JP6256575B2 - High frequency module - Google Patents

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JP6256575B2
JP6256575B2 JP2016222902A JP2016222902A JP6256575B2 JP 6256575 B2 JP6256575 B2 JP 6256575B2 JP 2016222902 A JP2016222902 A JP 2016222902A JP 2016222902 A JP2016222902 A JP 2016222902A JP 6256575 B2 JP6256575 B2 JP 6256575B2
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plane conductor
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宏通 北嶋
宏通 北嶋
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Murata Manufacturing Co Ltd
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Description

本発明は、多層基板の上面に部品が実装された高周波モジュールに関し、詳しくは、多層基板の内部に形成される面内導体と部品との電磁結合を防止しつつ、高周波モジュールの小型化を図るとともに、この高周波モジュールを安価に製造する技術に関する。 The present invention relates to a high-frequency module in which components are mounted on the upper surface of a multilayer board. Specifically, the high-frequency module is reduced in size while preventing electromagnetic coupling between in-plane conductors formed in the multilayer board and the components. In addition, the present invention relates to a technique for manufacturing the high-frequency module at low cost.

携帯電話機等の通信端末装置の小型化に伴って、その内部に配設される高周波モジュールの小型化が要求されているため、高周波モジュールの回路基板には立体的な配線が可能な多層基板が広く用いられている。例えば、特許文献1に記載の高周波モジュール100は、図7に示すように、複数の絶縁層が積層されて成る多層基板101と、この多層基板101の上面に実装された半導体素子102とを備えている。また、多層基板101の内部における半導体素子102の下方には、接地用のグランド電極103が設けられている。   Along with miniaturization of communication terminal devices such as mobile phones, there is a demand for miniaturization of the high-frequency module disposed therein, so a multilayer substrate capable of three-dimensional wiring is provided on the circuit board of the high-frequency module. Widely used. For example, the high-frequency module 100 described in Patent Document 1 includes a multilayer substrate 101 in which a plurality of insulating layers are stacked and a semiconductor element 102 mounted on the upper surface of the multilayer substrate 101 as shown in FIG. ing. A ground electrode 103 for grounding is provided below the semiconductor element 102 in the multilayer substrate 101.

ところで、高周波モジュール100の小型化の要請から多層基板101の主面の面積が制約されている中で、半導体素子102の各端子に繋がる配線経路を多層基板101内に形成しようとすると、所定の信号端子に繋がる配線経路の一部を、グランド電極103の下方を通って形成せざるを得ない場合がある。そこで、この高周波モジュール100では、グランド電極103の半導体素子102の所定の信号端子の直下に相当する部分に開口が設けられるとともに、多層基板101に該開口を通るスルーホール104が設けられている。そして、所定の信号端子を、スルーホール104を介してグランド電極103の下方に形成された配線電極105,106に接続することにより、所定の信号端子に繋がる配線経路が、グランド電極103の下方を通って半導体素子102の外側に引き出されている。   By the way, when the area of the main surface of the multilayer substrate 101 is restricted due to a demand for miniaturization of the high-frequency module 100, if an attempt is made to form a wiring path connected to each terminal of the semiconductor element 102 in the multilayer substrate 101, a predetermined value is obtained. In some cases, a part of the wiring path connected to the signal terminal has to be formed below the ground electrode 103. Therefore, in the high-frequency module 100, an opening is provided in a portion of the ground electrode 103 corresponding to a portion immediately below a predetermined signal terminal of the semiconductor element 102, and a through-hole 104 that passes through the opening is provided in the multilayer substrate 101. Then, by connecting the predetermined signal terminal to the wiring electrodes 105 and 106 formed below the ground electrode 103 through the through-hole 104, the wiring path connected to the predetermined signal terminal extends below the ground electrode 103. It passes through the outside of the semiconductor element 102.

特開2008−244179号公報(段落0022、図1等参照)Japanese Patent Laying-Open No. 2008-244179 (see paragraph 0022, FIG. 1, etc.)

しかしながら、従来の高周波モジュール100では、半導体素子102の所定の信号端子に繋がる配線経路の一部をグランド電極103の下方に設けるのに、グランド電極103に開口を設け、その開口にスルーホール104を形成する構成であるため、高周波モジュール100の製造コストが増加する。ここで、より安価に高周波モジュール100を製造するのに、グランド電極103の下方の配線電極105,106をグランド電極103の上層側に設け、所定の信号端子とビア導体等で接続することも考えられる。しかし、配線電極105,106が半導体素子の直下を通る場合は、半導体素子102と配線電極105,106との間で電磁結合が生じて、高周波特性が劣化するおそれがあるため採用し難い。   However, in the conventional high-frequency module 100, in order to provide a part of the wiring path connected to a predetermined signal terminal of the semiconductor element 102 below the ground electrode 103, an opening is provided in the ground electrode 103, and a through hole 104 is formed in the opening. Since it is the structure to form, the manufacturing cost of the high frequency module 100 increases. Here, in order to manufacture the high-frequency module 100 at a lower cost, wiring electrodes 105 and 106 below the ground electrode 103 may be provided on the upper layer side of the ground electrode 103 and connected to a predetermined signal terminal with a via conductor or the like. It is done. However, when the wiring electrodes 105 and 106 pass directly below the semiconductor element, electromagnetic coupling occurs between the semiconductor element 102 and the wiring electrodes 105 and 106, which may be difficult to employ because the high-frequency characteristics may deteriorate.

本発明は、上記した課題に鑑みてなされたものであり、多層基板の内部に形成される面内導体と部品との電磁結合を防止しつつ、高周波モジュールの小型化を図るとともに、この高周波モジュールを安価に製造することができる技術を提供することを目的とする。   The present invention has been made in view of the above problems, and while minimizing the high-frequency module while preventing electromagnetic coupling between the in-plane conductor formed in the multilayer substrate and the component, the high-frequency module is provided. It is an object to provide a technique that can be manufactured at low cost.

上記した目的を達成するために、本発明の高周波モジュールは、上面に部品が実装された多層基板を備える高周波モジュールにおいて、前記多層基板の上面に形成され、前記部品のグランド端子と接続される接地用実装電極と、前記多層基板の内部であって前記部品の下方に設けられ、前記接地用実装電極に第1接地用層間接続導体により接続された平板状の第1グランド面内導体と、前記多層基板の上面に形成され、前記部品の複数の信号端子のうちのいずれかである特定信号端子に接続される第1特定信号用実装電極と、前記多層基板の上面に形成され、前記部品の複数の信号端子のうちの前記特定信号端子とは異なる複数の信号端子にそれぞれ接続される複数の第2特定信号用実装電極と、前記多層基板の内部であって前記第1グランド面内導体の下方に設けられ、前記第1特定信号用実装電極に第1特定信号用層間接続導体により接続されたライン状の第1特定信号用面内導体と、前記多層基板の内部であって前記第1グランド面内導体と同層に設けられ、それぞれ前記第2特定信号用実装電極に接続された複数の第2特定信号用面内導体とを備え、前記第1グランド面内導体は、前記部品と前記第1特定信号用面内導体との間に配置され、前記第1特定信号用層間接続導体が、平面視において前記第1グランド面内導体の外側に配置されており、平面視で、前記複数の第2特定信号用面内導体のそれぞれは、前記部品と重なる領域の内縁から前記多層基板の内縁に向かって延びるように配置されていることを特徴としている。   In order to achieve the above-described object, a high-frequency module according to the present invention is a high-frequency module including a multilayer board having components mounted on the top surface, and is formed on the top surface of the multilayer board and connected to a ground terminal of the component. A mounting electrode for a plate, a flat first ground in-plane conductor provided inside the multilayer substrate and below the component, and connected to the grounding mounting electrode by a first grounding interlayer connection conductor; A first specific signal mounting electrode formed on an upper surface of the multilayer substrate and connected to a specific signal terminal which is one of a plurality of signal terminals of the component; and formed on the upper surface of the multilayer substrate, A plurality of second specific signal mounting electrodes respectively connected to a plurality of signal terminals different from the specific signal terminal among the plurality of signal terminals; A line-shaped first in-plane conductor for specific signals provided below the in-plane conductor and connected to the first specific signal mounting electrode by a first specific signal interlayer connection conductor; and an interior of the multilayer substrate. And a plurality of second specific signal in-plane conductors connected to the second specific signal mounting electrodes, respectively, and the first ground in-plane conductor is provided on the same layer as the first ground in-plane conductor. The first specific signal interlayer conductor is disposed between the component and the first specific signal in-plane conductor, and the first specific signal interlayer connecting conductor is disposed outside the first ground in-plane conductor in a plan view. In view, each of the plurality of second specific signal in-plane conductors is arranged so as to extend from an inner edge of a region overlapping the component toward an inner edge of the multilayer substrate.

この場合、部品と、該部品の下方を通る第1特定信号用面内導体との間に第1グランド面内導体が配置されるため、部品と第1特定信号用面内導体との電磁結合を防止することができる。また、この電磁結合を防止することにより、例えば、第1特定信号用面内導体が部品直下を通らないように迂回して配線する必要がなくなるため、第1特定信号用面内導体の配線長を短くして高周波モジュールの小型化を図ることができる。   In this case, since the first ground in-plane conductor is disposed between the component and the first specific signal in-plane conductor passing below the component, electromagnetic coupling between the component and the first specific signal in-plane conductor is performed. Can be prevented. Further, by preventing this electromagnetic coupling, for example, it is not necessary to make a detour wiring so that the first specific signal in-plane conductor does not pass directly under the component, so that the wiring length of the first specific signal in-plane conductor is eliminated. The high frequency module can be miniaturized by shortening the length.

また、第1グランド面内導体の下方に設けられたライン状の第1特定信号用面内導体と、多層基板の上面に形成された第1特定信号用実装電極とを接続する第1特定信号用層間接続導体が、平面視で第1グランド面内導体の外側に配置される。そのため、従来の高周波モジュールのように、第1特定信号用実装電極と第1特定信号用面内導体とを接続するのに、第1グランド面内導体に開口を設けて、該開口にスルーホールを通す必要がなく、高周波モジュールの製造コストが低減する。   Also, a first specific signal that connects a line-shaped first specific signal in-plane conductor provided below the first ground in-plane conductor and a first specific signal mounting electrode formed on the upper surface of the multilayer substrate. The interlayer connection conductor is disposed outside the first ground plane conductor in plan view. Therefore, as in the conventional high-frequency module, in order to connect the first specific signal mounting electrode and the first specific signal in-plane conductor, an opening is provided in the first ground in-plane conductor, and a through-hole is formed in the opening. The manufacturing cost of the high frequency module is reduced.

また、前記部品は、平面視において矩形状を成し、前記特定信号端子は、前記部品の一辺側に形成され、前記第1特定信号用面内導体が、前記部品の前記一辺側から該一辺の対向辺に向けて配線されていてもよい。この場合、例えば、部品の特定信号端子(第1特定信号用実装電極)と、部品の前記対向辺側に配置された他の部品等とを接続する場合に、その配線経路を短くすることができるため、当該配線経路の電気的特性が向上する。   In addition, the component has a rectangular shape in plan view, the specific signal terminal is formed on one side of the component, and the first specific signal in-plane conductor extends from the one side of the component to the one side. It may be wired toward the opposite side. In this case, for example, when connecting a specific signal terminal (first specific signal mounting electrode) of a component to another component or the like disposed on the opposite side of the component, the wiring path may be shortened. Therefore, the electrical characteristics of the wiring path are improved.

また、前記多層基板における前記第1特定信号用面内導体よりも下層側に設けられ、複数の第2接地用層間接続導体により前記第1グランド面内導体に接続された平板状の第2グランド面内導体をさらに備え、前記第1接地用層間接続導体が複数あり、前記第1接地用層間接続導体の総数よりも、前記第2接地用層間接続導体の総数が少なく設定されており、前記第1特定信号用面内導体は、前記第1グランド面内導体と前記第2グランド面内導体との間の前記第2接地用層間接続導体の非形成領域に配置されていてもよい。   Also, a flat second ground provided on the lower layer side of the first specific signal in-plane conductor in the multilayer substrate and connected to the first ground in-plane conductor by a plurality of second grounding interlayer connection conductors. An in-plane conductor, and a plurality of the first grounding interlayer connection conductors, wherein a total number of the second grounding interlayer connection conductors is set smaller than a total number of the first grounding interlayer connection conductors, The first specific signal in-plane conductor may be disposed in a region where the second grounding interlayer connection conductor is not formed between the first ground in-plane conductor and the second ground in-plane conductor.

この場合、第1特定信号用面内導体よりも下層側に第2グランド面内導体が設けられるため、例えば、多層基板の下面でマザー基板等と接続した場合に、マザー基板と第1特定信号用面内導体との電磁結合を防止することができる。   In this case, since the second ground in-plane conductor is provided on the lower layer side than the first in-plane conductor for specific signal, for example, when the lower surface of the multilayer substrate is connected to the mother substrate or the like, the mother substrate and the first specific signal Electromagnetic coupling with the in-plane conductor can be prevented.

また、第1グランド面内導体と第2グランド面内導体とを接続する第2接地用層間接続導体の総数が、第1接地用層間接続導体の総数よりも少なく設定されおり、第1特定信号用面内導体が、第1グランド面内導体と第2グランド面内導体との間の第2接地用層間接続導体の非形成領域に配置される。このようにすると、第1グランド面内導体の面積を大きくすることなく、該第1グランド面内導体の下方に配置する第1特定信号用面内導体の形成スペースを確保することができる。   In addition, the total number of second grounding interlayer connection conductors connecting the first ground plane conductor and the second ground plane conductor is set to be smaller than the total number of first grounding interlayer connection conductors, and the first specific signal The in-plane conductor is disposed in a non-formation region of the second grounding interlayer connection conductor between the first ground in-plane conductor and the second ground in-plane conductor. In this way, a space for forming the first specific signal in-plane conductor disposed below the first ground in-plane conductor can be secured without increasing the area of the first ground in-plane conductor.

また、前記第1グランド面内導体は、平面視で長矩形状を成し、前記第1特定信号用面内導体は、平面視で、前記第1グランド面内導体の対向する両短辺それぞれと交わるように前記第1グランド面内導体の長手方向に沿って配線されていてもよい。このようにすると、第1特定信号用面内導体が、第1グランド面内導体の長辺と交わるように配線される場合と比較して、第1特定信号用面内導体が、第1グランド面内導体により部品との電磁結合を防止される領域が広くなるため、前記電磁結合の防止効果が向上する。   Further, the first ground in-plane conductor has a long rectangular shape in plan view, and the first specific signal in-plane conductor has both short sides facing each other in plan view. It may be wired along the longitudinal direction of the first ground plane conductor so as to intersect. In this case, the first specific signal in-plane conductor is connected to the first ground in comparison with the case where the first specific signal in-plane conductor is wired so as to cross the long side of the first ground in-plane conductor. Since the area where electromagnetic coupling with the component is prevented by the in-plane conductor is widened, the effect of preventing the electromagnetic coupling is improved.

また、前記第1グランド面内導体が、平面視で前記部品と重なる領域内に収まるように形成されていてもよい。この場合、第1グランド面内導体を小さくすることができるため、多層基板の内部に形成する面内導体等の設計自由度が向上する。また、前記接地用実装電極は、平面視で、前記部品と重なる領域であって、当該部品と重なる領域の内縁とは異なる領域に配置されていてもよい。また、前記第1特定信号用実装電極と前記各第2特定信号用実装電極とは、平面視で、前記第1特定信号用実装電極と前記各第2特定信号用実装電極とにより前記接地用実装電極を囲むように、前記部品と重なる領域の内縁に配置されていてもよい。また、前記第1グランド面内導体は、平面視で、前記部品と重なる領域の略中央に配置されていてもよい Further, the first ground in-plane conductor may be formed so as to be within a region overlapping the component in a plan view. In this case, since the first ground in-plane conductor can be reduced, the degree of freedom in designing the in-plane conductor formed inside the multilayer substrate is improved. The grounding mounting electrode may be disposed in a region overlapping the component in a plan view and different from an inner edge of the region overlapping the component. The first specific signal mounting electrode and each second specific signal mounting electrode are connected to the ground by the first specific signal mounting electrode and each second specific signal mounting electrode in plan view. You may arrange | position at the inner edge of the area | region which overlaps with the said component so that a mounting electrode may be enclosed. In addition, the first in-plane ground conductor may be disposed in the approximate center of a region overlapping the component in plan view .

本発明によれば、部品と、該部品の下方を通る第1特定信号用面内導体との間に第1グランド面内導体が配置されるため、部品と第1特定信号用面内導体との電磁結合を防止することができる。また、この電磁結合を防止することにより、例えば、第1特定信号用面内導体が部品の直下を通らないように迂回して配線する必要がなくなるため、第1特定信号用面内導体の配線長を短くして高周波モジュールの小型化を図ることができる。   According to the present invention, since the first ground in-plane conductor is disposed between the component and the first specific signal in-plane conductor passing below the component, the component and the first specific signal in-plane conductor Can be prevented. Further, by preventing this electromagnetic coupling, for example, it is not necessary to make a detour wiring so that the first specific signal in-plane conductor does not pass directly under the component. The length can be shortened to reduce the size of the high-frequency module.

また、第1グランド面内導体の下方に設けられたライン状の第1特定信号用面内導体と、多層基板の上面に形成された第1特定信号用実装電極とを接続する第1特定信号用層間接続導体が、平面視で第1グランド面内導体の外側に配置される。そのため、従来の高周波モジュールのように、第1特定信号用実装電極と第1特定信号用面内導体とを接続するのに、第1グランド面内導体に開口を設けて、該開口にスルーホールを通す必要がなく、高周波モジュールの製造コストが低減する。   Also, a first specific signal that connects a line-shaped first specific signal in-plane conductor provided below the first ground in-plane conductor and a first specific signal mounting electrode formed on the upper surface of the multilayer substrate. The interlayer connection conductor is disposed outside the first ground plane conductor in plan view. Therefore, as in the conventional high-frequency module, in order to connect the first specific signal mounting electrode and the first specific signal in-plane conductor, an opening is provided in the first ground in-plane conductor, and a through-hole is formed in the opening. The manufacturing cost of the high frequency module is reduced.

本発明の一実施形態にかかる高周波モジュールの断面図である。It is sectional drawing of the high frequency module concerning one Embodiment of this invention. 図1の多層基板の上面図である。It is a top view of the multilayer substrate of FIG. 図1の第1グランド面内導体が形成された絶縁層の平面図である。It is a top view of the insulating layer in which the 1st in-plane conductor in FIG. 1 was formed. 図1の特定信号用面内導体が形成された絶縁層の平面図である。It is a top view of the insulating layer in which the in-plane conductor for specific signals of FIG. 1 was formed. 図1の第2グランド面内導体が形成された絶縁層の平面図である。It is a top view of the insulating layer in which the 2nd in-plane conductor of FIG. 1 was formed. 特定信号用面内導体の変形例を示す図である。It is a figure which shows the modification of the in-plane conductor for specific signals. 従来の高周波モジュールの断面図である。It is sectional drawing of the conventional high frequency module.

本発明の一実施形態にかかる高周波モジュール1について、図1〜図5を参照して説明する。なお、図1は本発明の一実施形態に係る高周波モジュール1の断面図、図2は、図1の多層基板2の上面図、図3は図1の第1グランド面内導体が形成された絶縁層2bの平面図、図4は図1の特定信号用面内導体5aが形成された絶縁層2cの平面図、図5は図1の第2グランド面内導体5dが形成された絶縁層2dの平面図である。ここで、図2〜図5それぞれでは、本発明に関係する要部を示し、他の部分を図示省略している。   A high-frequency module 1 according to an embodiment of the present invention will be described with reference to FIGS. 1 is a cross-sectional view of a high-frequency module 1 according to an embodiment of the present invention, FIG. 2 is a top view of the multilayer substrate 2 in FIG. 1, and FIG. 3 is a diagram illustrating that the first in-plane conductor in FIG. 4 is a plan view of the insulating layer 2c on which the specific signal in-plane conductor 5a of FIG. 1 is formed, and FIG. 5 is an insulating layer of the second ground in-plane conductor 5d in FIG. It is 2d top view. Here, in each of FIG. 2 to FIG. 5, main parts related to the present invention are shown, and other parts are not shown.

この実施形態にかかる高周波モジュール1は、図1に示すように、多層基板2と、該多層基板2の上面に実装された部品3とを備え、例えば、携帯電話機等の通信機器のマザー基板に実装されるものである。なお、多層基板2の上面には、上記した部品3に加えて、図示省略の他の部品(例えば、チップコンデンサ、チップインダクタ等)が実装されている。   As shown in FIG. 1, the high-frequency module 1 according to this embodiment includes a multilayer substrate 2 and a component 3 mounted on the upper surface of the multilayer substrate 2. For example, the high-frequency module 1 is mounted on a mother substrate of a communication device such as a mobile phone. To be implemented. In addition to the components 3 described above, other components (not shown) such as a chip capacitor and a chip inductor are mounted on the upper surface of the multilayer substrate 2.

部品3は、例えば、RF−IC、スイッチIC、チップSAWフィルタ等であり、この実施形態では、多層基板2の上面にフリップチップ実装される。このとき、部品3は平面視において長矩形状を成し、部品3の多層基板2の上面との対向面には、複数の信号端子3a,3b、および、複数のグランド端子3cが形成されている。また、各グランド端子3cは、部品3の前記対向面の略中央にまとまって配置されるとともに、各信号端子3a,3bが、部品3の前記対向面の周縁部に並んで配置される。なお、部品3の平面視形状は長矩形状に限らず、例えば、正方形状であってもかまわない。   The component 3 is, for example, an RF-IC, a switch IC, a chip SAW filter, or the like. In this embodiment, the component 3 is flip-chip mounted on the upper surface of the multilayer substrate 2. At this time, the component 3 has a long rectangular shape in plan view, and a plurality of signal terminals 3 a and 3 b and a plurality of ground terminals 3 c are formed on the surface of the component 3 facing the upper surface of the multilayer substrate 2. . The ground terminals 3 c are arranged in the approximate center of the facing surface of the component 3, and the signal terminals 3 a and 3 b are arranged side by side on the peripheral portion of the facing surface of the component 3. In addition, the planar view shape of the component 3 is not limited to the long rectangular shape, and may be a square shape, for example.

多層基板2は、複数の絶縁層2a〜2dが積層されて成り、これらの絶縁層2a〜2dは、それぞれ、セラミック、ガラスエポキシ樹脂等の絶縁材料で形成されている。また、多層基板2の上面には、部品3実装用の複数の実装電極4a〜4cが形成されるとともに、下面には、外部のマザー基板等との接続用の複数の外部電極9が形成される。   The multilayer substrate 2 is formed by laminating a plurality of insulating layers 2a to 2d, and these insulating layers 2a to 2d are each formed of an insulating material such as ceramic or glass epoxy resin. A plurality of mounting electrodes 4a to 4c for mounting the component 3 are formed on the upper surface of the multilayer substrate 2, and a plurality of external electrodes 9 for connection to an external mother substrate or the like are formed on the lower surface. The

このとき、多層基板2の最上層の絶縁層2aの上面には、図2に示すように、部品3の各信号端子3a,3bおよび各グランド端子3cに対応する位置に、上記した部品3を実装するための複数の実装電極4a〜4cがそれぞれ形成される。   At this time, the component 3 described above is placed on the upper surface of the uppermost insulating layer 2a of the multilayer substrate 2 at positions corresponding to the signal terminals 3a, 3b and the ground terminals 3c of the component 3, as shown in FIG. A plurality of mounting electrodes 4a to 4c for mounting are formed.

また、絶縁層2aよりも下層に配置された所定の絶縁層2bの主面には、図3に示すように、各実装電極4a,4bのうちの一部の実装電極4bからの引き出し配線となるライン状の面内導体5bが形成される。このとき、実装電極4bと面内導体5bとは、図示省略のビア導体により接続されている。   Further, on the main surface of a predetermined insulating layer 2b disposed below the insulating layer 2a, as shown in FIG. 3, lead wires from a part of the mounting electrodes 4b of the mounting electrodes 4a and 4b A line-shaped in-plane conductor 5b is formed. At this time, the mounting electrode 4b and the in-plane conductor 5b are connected by a via conductor (not shown).

また、図3に示すように、部品3の下方、具体的には、絶縁層2bの主面における平面視で部品3と重なる領域に収まる範囲内であって、部品3の各グランド端子3cに接続される各実装電極4c(本発明の「接地用実装電極」に相当し、以下、接地用実装電極4cと称する。)と平面視で重なる領域には、平面視で略長矩形を成す平板状の第1グランド面内導体5cが形成されている。そして、各接地用実装電極4cが、これらの接地用実装電極4cに対して個別に設けられたビア導体6(図1参照)により第1グランド面内導体5cにそれぞれ接続される。このようなビア導体6が、本発明の「第1接地用層間接続導体」に相当し、以下、各ビア導体6を第1接地用層間接続導体6と称する。   Further, as shown in FIG. 3, below the component 3, specifically, within a range that fits in a region overlapping the component 3 in plan view on the main surface of the insulating layer 2 b, and is connected to each ground terminal 3 c of the component 3. In a region overlapping with each mounting electrode 4c (corresponding to the "grounding mounting electrode" of the present invention, hereinafter referred to as the grounding mounting electrode 4c) in plan view, a flat plate having a substantially rectangular shape in plan view A first ground in-plane conductor 5c is formed. Then, each grounding mounting electrode 4c is connected to the first in-plane conductor 5c by a via conductor 6 (see FIG. 1) individually provided for these grounding mounting electrodes 4c. Such a via conductor 6 corresponds to the “first grounding interlayer connection conductor” of the present invention. Hereinafter, each via conductor 6 is referred to as a first grounding interlayer connection conductor 6.

また、第1グランド面内導体5cは、絶縁層2bの主面における平面視で部品3と重なる領域の略中央に配置され、上記した一部の実装電極4bからの引き出し配線となる面内導体5bが、平面視で第1グランド面内導体5cの周囲から部品3の外側に向けて配線されている。つまり、第1グランド面内導体5cを、絶縁層2bの平面視で部品3と重なる領域の略中央のみに配置することで、絶縁層2bの主面における各面内導体5bの配線自由度の向上が図られている。   Also, the first ground in-plane conductor 5c is disposed in the approximate center of the region overlapping the component 3 in plan view on the main surface of the insulating layer 2b, and is an in-plane conductor serving as a lead-out wiring from the part of the mounting electrodes 4b. 5b is wired from the periphery of the first ground plane conductor 5c toward the outside of the component 3 in plan view. That is, by arranging the first ground in-plane conductor 5c only at substantially the center of the region overlapping the component 3 in a plan view of the insulating layer 2b, the degree of freedom of wiring of the in-plane conductors 5b on the main surface of the insulating layer 2b. Improvements are being made.

また、部品3の各信号端子3a,3bのうち、平面視で長矩形状の部品3の一方の短辺側(図1における紙面左端)に配置された所定の信号端子3aに接続される実装電極4aは、図4に示すように、平面視で第1グランド面内導体5cの外側に配置されたビア導体7により、絶縁層2bのさらに下層の絶縁層2cの主面に形成されたライン状の面内導体5a(図4参照)に接続される。このような所定の信号端子3aが本発明の「特定信号端子」に相当し、実装電極4aが本発明の「第1特定信号用実装電極」に相当し、ビア導体7が本発明の「第1特定信号用層間接続導体」に相当し、面内導体5aが本発明の「第1特定信号用面内導体」に相当する。また、以下、所定の信号端子3aを特定信号端子3aと称し、実装電極4aを特定信号用実装電極4aと称し、ビア導体7を特定信号用層間接続導体7と称し、面内導体5aを特定信号用面内導体5aと称する。   In addition, among the signal terminals 3a and 3b of the component 3, a mounting electrode connected to a predetermined signal terminal 3a disposed on one short side (the left end in the drawing in FIG. 1) of the long rectangular component 3 in plan view. As shown in FIG. 4, 4 a is a line formed on the main surface of the insulating layer 2 c, which is further below the insulating layer 2 b, by the via conductor 7 disposed outside the first ground plane conductor 5 c in plan view. To the in-plane conductor 5a (see FIG. 4). The predetermined signal terminal 3a corresponds to the “specific signal terminal” of the present invention, the mounting electrode 4a corresponds to the “first specific signal mounting electrode” of the present invention, and the via conductor 7 corresponds to the “first signal terminal” of the present invention. The in-plane conductor 5a corresponds to the “first in-plane conductor for specific signals” of the present invention. Hereinafter, the predetermined signal terminal 3a is referred to as a specific signal terminal 3a, the mounting electrode 4a is referred to as a specific signal mounting electrode 4a, the via conductor 7 is referred to as a specific signal interlayer connection conductor 7, and the in-plane conductor 5a is specified. This is referred to as a signal in-plane conductor 5a.

なお、上記した第1グランド面内導体5cは、必ずしも、絶縁層2bの主面における平面視で部品3に重なる領域の範囲内に収まるように形成する必要はなく、特定信号用層間接続導体7の形成に邪魔にならない範囲において、その形状および形成領域を、適宜、変更することができる。   The first ground in-plane conductor 5c is not necessarily formed so as to be within the range of the region overlapping the component 3 in plan view on the main surface of the insulating layer 2b. As long as it does not interfere with the formation of the film, its shape and formation region can be changed as appropriate.

特定信号用面内導体5aは、図1に示すように、部品3との間に第1グランド面内導体5cが配置されるように、該第1グランド面内導体5cの下方に設けられる。また、図4に示すように、特定信号用面内導体5aは、平面視長矩形状の部品3の一方の短辺側(紙面左側)から、この辺に対向する他方の短辺側に向けて配線されている。さらに、特定信号用面内導体5aの平面視で第1グランド面内導体5cに重なる部分は、第1グランド面内導体5cの長辺に沿うように配線されており、特定信号用面内導体5aの平面視で部品3と重なる領域の大部分で、部品3との間に第1グランド面内導体5cが介在するように構成されている。   As shown in FIG. 1, the specific signal in-plane conductor 5 a is provided below the first ground in-plane conductor 5 c so that the first ground in-plane conductor 5 c is disposed between the specific signal in-plane conductor 5 a and the component 3. Further, as shown in FIG. 4, the in-plane conductor for specific signal 5a is wired from one short side (left side of the drawing) of the rectangular component 3 in plan view toward the other short side facing this side. Has been. Further, the portion of the specific signal in-plane conductor 5a that overlaps the first ground in-plane conductor 5c in a plan view is wired along the long side of the first ground in-plane conductor 5c. The first in-plane conductor 5c is configured to be interposed between the part 3 and most of the region overlapping the part 3 in a plan view of 5a.

また、絶縁層2cよりも下層の絶縁層2dの主面には、図5に示すように、第1グランド面内導体5cよりも面積が大きい平板状の第2グランド面内導体5dが形成される。この第2グランド面内導体5dは、複数のビア導体8(図3および図4参照)により、第1グランド面内導体5cに接続されている。なお、各ビア導体8それぞれが、本発明の「第2接地用層間接続導体」に相当し、以下、各ビア導体8それぞれを、第2接地用層間接続導体8と称する。   Further, as shown in FIG. 5, a planar second ground in-plane conductor 5d having a larger area than the first ground in-plane conductor 5c is formed on the main surface of the insulating layer 2d below the insulating layer 2c. The The second ground plane conductor 5d is connected to the first ground plane conductor 5c by a plurality of via conductors 8 (see FIGS. 3 and 4). Each via conductor 8 corresponds to a “second grounding interlayer connection conductor” of the present invention. Hereinafter, each via conductor 8 is referred to as a second grounding interlayer connection conductor 8.

ところで、この実施形態では、多層基板2の上面に形成された接地用実装電極4cの総数が8つ(図1参照)であり、各接地用実装電極4cと第1グランド面内導体5cとを接続する第1接地用層間接続導体6の総数も8つである。一方、第1グランド面内導体5cと第2グランド面内導体5dとを接続する第2接地用層間接続導体8の総数は、図3および図4に示すように5つである。すなわち、第2接地用層間接続導体8の総数が、第1接地用層間接続導体6の総数よりも少なく設定されている。   Incidentally, in this embodiment, the total number of grounding mounting electrodes 4c formed on the upper surface of the multilayer substrate 2 is eight (see FIG. 1), and each grounding mounting electrode 4c and the first ground in-plane conductor 5c are connected to each other. The total number of first grounding interlayer connection conductors 6 to be connected is also eight. On the other hand, the total number of second grounding interlayer connection conductors 8 connecting the first ground in-plane conductor 5c and the second ground in-plane conductor 5d is five as shown in FIGS. That is, the total number of second grounding interlayer connection conductors 8 is set to be smaller than the total number of first grounding interlayer connection conductors 6.

そして、特定信号用面内導体5aが、第1グランド面内導体5cと第2グランド面内導体5dとの間の第2接地用層間接続導体8の非形成領域に配置されている。つまり、第1グランド面内導体5cの直下の第2接地用層間導体8の数を少なくすることにより、第1グランド面内導体5cの下方に空きスペースを確保し、特定信号用面内導体5aの形成自由度を高めている。なお、第2接地用層間導体8の総数を第1接地用層間接続導体6よりも少なく設定せずに、例えば、隣接する第2接地用層間接続導体8間を通して、特定信号用面内導体5aを形成する構成であってもかまわない。   The specific signal in-plane conductor 5a is disposed in a region where the second grounding interlayer connection conductor 8 is not formed between the first ground in-plane conductor 5c and the second ground in-plane conductor 5d. That is, by reducing the number of second grounding interlayer conductors 8 immediately below the first ground plane conductor 5c, an empty space is secured below the first ground plane conductor 5c, and the specific signal plane conductor 5a. The degree of freedom of formation is increased. The total number of the second grounding interlayer conductors 8 is not set to be smaller than that of the first grounding interlayer connection conductor 6, for example, through the adjacent second grounding interlayer connection conductors 8, the specific signal in-plane conductor 5 a. It may be configured to form.

したがって、上記した実施形態によれば、多層基板2の上面に実装された部品3と、この部品3の下方を通る特定信号用面内導体5aとの間に第1グランド面内導体5cが配置されるため、部品3と特定信号用面内導体5aとの電磁結合を防止することができる。また、この電磁結合を防止することにより、例えば、特定信号用面内導体5aを、部品3直下を通らないように迂回して配線する必要がなくなるため、特定信号用面内導体5aの配線長を短くして高周波モジュール1の小型化を図ることができる。   Therefore, according to the above-described embodiment, the first ground in-plane conductor 5c is arranged between the component 3 mounted on the upper surface of the multilayer substrate 2 and the specific signal in-plane conductor 5a passing under the component 3. Therefore, the electromagnetic coupling between the component 3 and the specific signal in-plane conductor 5a can be prevented. Further, by preventing this electromagnetic coupling, for example, it is not necessary to bypass the specific signal in-plane conductor 5a so as not to pass directly under the component 3, so that the wiring length of the specific signal in-plane conductor 5a is reduced. Thus, the high-frequency module 1 can be reduced in size.

また、第1グランド面内導体5cの下方に設けられた特定信号用面内導体5aと、多層基板2の上面に形成された特定信号用実装電極4aとを接続する特定信号用層間接続導体7が、平面視で第1グランド面内導体5cの外側に配置される。そのため、従来の高周波モジュールのように、特定信号用実装電極4aと特定信号用面内導体5aとを接続するのに、第1グランド面内導体5cに開口を設けて、該開口にスルーホールを通す必要がなく、高周波モジュール1の製造コストが低減する。   Further, the specific signal interlayer connecting conductor 7 connecting the specific signal in-plane conductor 5 a provided below the first ground in-plane conductor 5 c and the specific signal mounting electrode 4 a formed on the upper surface of the multilayer substrate 2. Is disposed outside the first ground in-plane conductor 5c in plan view. Therefore, as in the conventional high-frequency module, in order to connect the specific signal mounting electrode 4a and the specific signal in-plane conductor 5a, an opening is provided in the first ground in-plane conductor 5c, and a through hole is formed in the opening. There is no need to pass through, and the manufacturing cost of the high-frequency module 1 is reduced.

また、特定信号用面内導体5aが、平面視長矩形状の部品3の一方の短辺側から、この辺に対向する他方の短辺側に向けて配線されているため、例えば、部品3の特定信号端子3aと、部品3の前記他方の短辺側に配置された他の部品等とを接続する場合に、その配線経路を短くすることができ、当該配線経路の電気的特性が向上する。   Further, since the specific signal in-plane conductor 5a is wired from one short side of the rectangular component 3 in plan view toward the other short side facing the side, for example, the component 3 is specified. When the signal terminal 3a is connected to another component or the like disposed on the other short side of the component 3, the wiring path can be shortened, and the electrical characteristics of the wiring path are improved.

また、特定信号用面内導体5aよりも下層側に、第1グランド面内導体5cの面積よりも大きい面積を有する第2グランド面内導体5dが設けられているため、高周波モジュール1を外部のマザー基板等に実装したときに、マザー基板と、特定信号用面内導体5aや部品3との電磁結合を防止することができる。   Since the second ground in-plane conductor 5d having an area larger than the area of the first ground in-plane conductor 5c is provided on the lower layer side than the specific signal in-plane conductor 5a, the high-frequency module 1 is connected to the outside. When mounted on a mother board or the like, electromagnetic coupling between the mother board and the specific signal in-plane conductor 5a or the component 3 can be prevented.

また、第1グランド面内導体5cと第2グランド面内導体5dとを接続する第2接地用層間接続導体8の総数が、各接地用実装電極4cと第1グランド面内導体5cとを接続する第1接地用層間接続導体6の総数よりも少なく設定されおり、特定信号用面内導体5aが、第1グランド面内導体5cと第2グランド面内導体5dとの間の第2接地用層間接続導体8の非形成領域に配置される。このようにすると、第1グランド面内導体5cの面積を大きくすることなく、該第1グランド面内導体5cの下方に配置する特定信号用面内導体5aの形成スペースを確保することができる。   Further, the total number of second grounding interlayer connection conductors 8 connecting the first ground plane conductor 5c and the second ground plane conductor 5d connects the ground mounting electrodes 4c and the first ground plane conductor 5c. The number of the first grounding interlayer connection conductors 6 is set to be smaller than the total number of the first grounding interlayer connection conductors 6, and the specific signal in-plane conductor 5a is connected to the second grounding in-plane conductor 5c and the second grounding-plane conductor 5d Arranged in a region where the interlayer connection conductor 8 is not formed. In this way, a space for forming the specific signal in-plane conductor 5a disposed below the first ground in-plane conductor 5c can be ensured without increasing the area of the first in-plane conductor 5c.

また、部品3と特定信号用面内導体5aとの電磁結合を防止する第1グランド面内導体5cが、平面視で部品3と重なる領域内に収まるように小さく形成されているため、多層基板2の内部に形成する面内導体等の設計自由度が向上する。   In addition, the first ground in-plane conductor 5c that prevents electromagnetic coupling between the component 3 and the specific signal in-plane conductor 5a is formed to be small so as to be within a region overlapping the component 3 in plan view. The degree of freedom in designing the in-plane conductor formed inside 2 is improved.

(特定面内導体5aの変形例)
第1グランド面内導体5cの下方に設けられた特定信号用面内導体5aの変形例について、図6を参照して説明する。なお、図6は本例に係る特定信号用面内導体5a1を示す図であり、絶縁層2cの部分平面図である。
(Modification of specific in-plane conductor 5a)
A modification of the specific signal in-plane conductor 5a provided below the first ground in-plane conductor 5c will be described with reference to FIG. FIG. 6 is a diagram showing the specific signal in-plane conductor 5a1 according to this example, and is a partial plan view of the insulating layer 2c.

この特定信号用面内導体5a1は、図6に示すように、第1グランド面内導体5cの対向する両短辺それぞれと交わるように、該第1グランド面内導体5cの長手方向に沿って配線されている。このようにすると、特定面内導体5a1が、第1グランド面内導体5cの長辺と交わるように配線される場合と比較して、特定信号用面内導体5a1が、第1グランド面内導体5cにより部品3との電磁結合を防止される領域が広くなるため、前記電磁結合の防止効果が向上する。   As shown in FIG. 6, the specific signal in-plane conductor 5a1 extends along the longitudinal direction of the first ground in-plane conductor 5c so as to intersect with the opposing short sides of the first ground in-plane conductor 5c. Wired. In this case, the specific signal in-plane conductor 5a1 is compared with the case where the specific in-plane conductor 5a1 is wired so as to cross the long side of the first ground in-plane conductor 5c. Since the area | region where the electromagnetic coupling with the components 3 is prevented by 5c becomes wide, the prevention effect of the said electromagnetic coupling improves.

なお、本発明は上記した各実施形態に限定されるものではなく、その趣旨を逸脱しない限りにおいて、上記したもの以外に種々の変更を行なうことが可能である。例えば、上記した各実施形態では、特定信号用層間接続導体7、各第1接地用層間接続導体6、各第2接地用層間接続導体8をビア導体で形成した場合について説明したが、これらをポスト電極や、ピン状の導体で形成してもかまわない。   The present invention is not limited to the above-described embodiments, and various modifications other than those described above can be made without departing from the spirit of the invention. For example, in each of the embodiments described above, the case where the specific signal interlayer connection conductor 7, the first ground interlayer connection conductor 6, and the second ground interlayer connection conductor 8 are formed of via conductors has been described. It may be formed of a post electrode or a pin-shaped conductor.

また、第1グランド面内導体5cの下方に設ける面内導体は、上記した特定信号用面内導体5aに限らず、部品3との電磁結合を防止する必要がある他の面内導体であってもかまわない。   Further, the in-plane conductor provided below the first ground in-plane conductor 5c is not limited to the above-described specific signal in-plane conductor 5a, but is another in-plane conductor that needs to prevent electromagnetic coupling with the component 3. It doesn't matter.

また、上記した実施形態では、第1グランド面内導体5cを内層の絶縁層2bに形成した場合について説明したが、多層基板2の上面に配置する構成であってもかまわない。この場合、接地用実装電極4cの代わりに第1グランド面内導体5cを使用する。具体的には、第1グランド面内導体5c上に絶縁被覆膜(所謂、フレーミング)を施し、この絶縁被覆膜の各接地用実装電極4cに対応する部分(実装面)に開口部を設けるようにすればよい。   In the above-described embodiment, the case where the first ground in-plane conductor 5c is formed in the inner insulating layer 2b has been described. However, the first ground in-plane conductor 5c may be arranged on the upper surface of the multilayer substrate 2. In this case, the first ground in-plane conductor 5c is used instead of the ground mounting electrode 4c. Specifically, an insulating coating film (so-called framing) is applied on the first ground plane conductor 5c, and an opening is formed in a portion (mounting surface) corresponding to each grounding mounting electrode 4c of the insulating coating film. What is necessary is just to provide.

また、本発明は、多層基板の上面に部品が実装された種々の高周波モジュールに適用することができる。   Further, the present invention can be applied to various high frequency modules in which components are mounted on the upper surface of a multilayer board.

1 高周波モジュール
2 多層基板
3 部品
3a 特定信号端子
3c グランド端子
4a 特定信号用実装電極
4c 接地用実装電極
5a,5a1 特定信号用面内導体
5c 第1グランド面内導体
5d 第2グランド面内導体
6 第1接地用層間接続導体
7 特定信号用層間接続導体
8 第2接地用層間接続導体
DESCRIPTION OF SYMBOLS 1 High frequency module 2 Multilayer substrate 3 Parts 3a Specific signal terminal 3c Ground terminal 4a Specific signal mounting electrode 4c Grounding mounting electrode 5a, 5a1 Specific signal in-plane conductor 5c First ground in-plane conductor 5d Second ground in-plane conductor 6 First ground interlayer connection conductor 7 Specific signal interlayer connection conductor 8 Second ground interlayer connection conductor

Claims (8)

上面に部品が実装された多層基板を備える高周波モジュールにおいて、
前記多層基板の上面に形成され、前記部品のグランド端子と接続される接地用実装電極と、
前記多層基板の内部であって前記部品の下方に設けられ、前記接地用実装電極に第1接地用層間接続導体により接続された平板状の第1グランド面内導体と、
前記多層基板の上面に形成され、前記部品の複数の信号端子のうちのいずれかである特定信号端子に接続される第1特定信号用実装電極と、
前記多層基板の上面に形成され、前記部品の複数の信号端子のうちの前記特定信号端子とは異なる複数の信号端子にそれぞれ接続される複数の第2特定信号用実装電極と、
前記多層基板の内部であって前記第1グランド面内導体の下方に設けられ、前記第1特定信号用実装電極に第1特定信号用層間接続導体により接続されたライン状の第1特定信号用面内導体と、
前記多層基板の内部であって前記第1グランド面内導体と同層に設けられ、それぞれ前記第2特定信号用実装電極に接続された複数の第2特定信号用面内導体とを備え、
前記第1グランド面内導体は、前記部品と前記第1特定信号用面内導体との間に配置され、
前記第1特定信号用層間接続導体が、平面視において前記第1グランド面内導体の外側に配置されており、
平面視で、前記複数の第2特定信号用面内導体のそれぞれは、前記部品と重なる領域の内縁から前記多層基板の内縁に向かって延びるように配置されていることを特徴とする高周波モジュール。
In a high-frequency module comprising a multilayer substrate with components mounted on the upper surface,
A mounting electrode for grounding formed on the upper surface of the multilayer substrate and connected to a ground terminal of the component;
A flat first ground in-plane conductor provided inside the multilayer substrate and below the component and connected to the ground mounting electrode by a first ground interlayer connection conductor;
A first specific signal mounting electrode formed on an upper surface of the multilayer substrate and connected to a specific signal terminal which is one of a plurality of signal terminals of the component;
A plurality of second specific signal mounting electrodes formed on an upper surface of the multilayer substrate and connected to a plurality of signal terminals different from the specific signal terminal among the plurality of signal terminals of the component;
The first specific signal line-shaped line is provided in the multilayer substrate and below the first ground plane conductor and connected to the first specific signal mounting electrode by a first specific signal interlayer connection conductor. An in-plane conductor;
A plurality of second in-plane conductors for specific signals provided in the same layer as the first in-plane conductor inside the multilayer substrate, each connected to the second specific signal mounting electrode;
The first ground in-plane conductor is disposed between the component and the first specific signal in-plane conductor;
The first specific signal interlayer connection conductor is disposed outside the first ground plane conductor in a plan view;
In the planar view, each of the plurality of second specific signal in-plane conductors is disposed so as to extend from an inner edge of a region overlapping with the component toward an inner edge of the multilayer substrate.
前記部品は、平面視において矩形状を成し、
前記特定信号端子は、前記部品の一辺側に形成され、
前記第1特定信号用面内導体が、前記部品の前記一辺側から該一辺の対向辺に向けて配線されていることを特徴とする請求項1に記載の高周波モジュール。
The component has a rectangular shape in plan view,
The specific signal terminal is formed on one side of the component,
2. The high-frequency module according to claim 1, wherein the first specific signal in-plane conductor is wired from the one side of the component toward an opposite side of the one side.
前記多層基板における前記第1特定信号用面内導体よりも下層側に設けられ、複数の第2接地用層間接続導体により前記第1グランド面内導体に接続された平板状の第2グランド面内導体をさらに備え、
前記第1接地用層間接続導体が複数あり、
前記第1接地用層間接続導体の総数よりも、前記第2接地用層間接続導体の総数が少なく設定されており、
前記第1特定信号用面内導体は、前記第1グランド面内導体と前記第2グランド面内導体との間の前記第2接地用層間接続導体の非形成領域に配置されていることを特徴とする請求項1または2に記載の高周波モジュール。
In the flat second ground plane provided on the lower layer side of the first specific signal in-plane conductor in the multilayer substrate and connected to the first ground in-plane conductor by a plurality of second grounding interlayer connection conductors Further comprising a conductor,
A plurality of the first grounding interlayer connection conductors;
The total number of the second grounding interlayer connection conductors is set to be smaller than the total number of the first grounding interlayer connection conductors,
The first specific signal in-plane conductor is disposed in a region where the second grounding interlayer connection conductor is not formed between the first ground in-plane conductor and the second ground in-plane conductor. The high frequency module according to claim 1 or 2.
前記第1グランド面内導体は、平面視で長矩形状を成し、
前記第1特定信号用面内導体は、平面視で、前記第1グランド面内導体の対向する両短辺それぞれと交わるように前記第1グランド面内導体の長手方向に沿って配線されていることを特徴とする請求項1ないし3のいずれかに記載の高周波モジュール。
The first ground in-plane conductor has a long rectangular shape in plan view,
The first specific signal in-plane conductor is wired along the longitudinal direction of the first ground in-plane conductor so as to intersect with both opposing short sides of the first ground in-plane conductor in plan view. The high frequency module according to claim 1, wherein the high frequency module is provided.
前記第1グランド面内導体が、平面視で前記部品と重なる領域内に収まるように形成されていることを特徴とする請求項1ないし3のいずれかに記載の高周波モジュール。   4. The high-frequency module according to claim 1, wherein the first in-plane conductor is formed so as to be within a region overlapping the component in a plan view. 前記接地用実装電極は、平面視で、前記部品と重なる領域であって、当該部品と重なる領域の内縁とは異なる領域に配置されていることを特徴とする請求項1ないし5のいずれかに記載の高周波モジュール。   The grounding mounting electrode is disposed in a region overlapping with the component in a plan view and different from an inner edge of the region overlapping with the component. The high-frequency module described. 前記第1特定信号用実装電極と前記各第2特定信号用実装電極とは、平面視で、前記第1特定信号用実装電極と前記各第2特定信号用実装電極とにより前記接地用実装電極を囲むように、前記部品と重なる領域の内縁に配置されていることを特徴とする請求項6に記載の高周波モジュール。   The first specific signal mounting electrode and each second specific signal mounting electrode are the ground specific mounting electrodes by the first specific signal mounting electrode and each second specific signal mounting electrode in plan view. The high-frequency module according to claim 6, wherein the high-frequency module is disposed on an inner edge of a region overlapping with the component so as to surround the component. 前記第1グランド面内導体は、平面視で、前記部品と重なる領域の略中央に配置されていることを特徴とする請求項1ないし7のいずれかに記載の高周波モジュール。   The high-frequency module according to any one of claims 1 to 7, wherein the first in-plane conductor is disposed substantially in the center of a region overlapping the component in a plan view.
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