JP6161511B2 - Humidity measuring device, degradation recovery method, and degradation recovery program - Google Patents

Description

  Some embodiments according to the present invention relate to a humidity measurement device, a deterioration recovery method, a deterioration recovery program, and a deterioration inspection method.

  Conventionally, humidity measurement devices have a reduced performance and quality of humidity sensors (humidity sensitive elements) due to the atmosphere of the measurement environment, for example, gas such as chemicals and solvents, and high humidity environments There was a problem of deterioration. For this reason, the humidity sensor is heated (hereinafter referred to as heat cleaning as appropriate) or the humidity sensor is cleaned (hereinafter referred to as cleaning cleaning as appropriate) to recover the deterioration of the humidity sensor.

  However, even if recovery processing such as heat cleaning or humidity cleaning is performed on a deteriorated humidity sensor, the humidity sensor does not recover completely, but some deterioration remains and accumulates in the humidity sensor. It became impossible to endure use, and the humidity sensor had to be replaced.

  Therefore, the humidity measurement value of the humidity sensor after the end of the first recovery process is stored as an initial value, and for each recovery process, the humidity measurement value of the humidity sensor after the end of the recovery process is compared with the initial value, A deterioration diagnosis method is known in which deterioration of a humidity sensor is determined based on a comparison result, and the humidity sensor is replaced when it is determined that the humidity sensor has deteriorated (see, for example, Patent Document 1).

JP 2010-8318 A

  However, in the deterioration diagnosis method of Patent Document 1, the execution time of the recovery process is a fixed time. As a result, the execution time of the recovery process may be longer than necessary, and the usable period (life) of the humidity sensor may be shortened (shortened). Conversely, there may be a shortage of recovery process execution time, and it is erroneously determined that the usable period (life) of the humidity sensor has passed (run out) based on the humidity measurement value after the end of the recovery process. There was a risk of replacing the usable humidity sensor.

  Some aspects of the present invention have been made in view of the above-described problems, and a humidity measuring device, a deterioration recovery method, and a deterioration recovery program capable of extending (extending) a usable period (life) of a humidity sensor. Is one of the purposes.

A humidity measuring apparatus according to the present invention is a humidity measuring apparatus that performs a recovery process for recovering deterioration of a humidity sensor that detects humidity, and is a humidity measured using the humidity sensor during the execution of the recovery process. An execution time control unit that controls the execution time of the recovery process based on the measurement value , the execution time control unit, the humidity measurement value measured using the humidity sensor after the end of the first recovery process, and the recovery process It is determined whether or not to continue the recovery process based on the humidity measurement value measured using the humidity sensor during execution .
The humidity measuring apparatus according to the present invention is a humidity measuring apparatus that performs a recovery process for recovering deterioration of a humidity sensor that detects humidity, and is measured by using the humidity sensor during the recovery process. An execution time control unit that controls the execution time of the recovery process based on the measurement value is provided, and the recovery process is a cleaning cleaning that cleans the humidity sensor to recover the deterioration of the humidity sensor.

The deterioration recovery method according to the present invention is a deterioration recovery method for executing a recovery process for recovering the deterioration of a humidity sensor that detects humidity, and is measured using the above-described humidity sensor during the execution of the recovery process. An execution time control step for controlling the execution time of the recovery process based on the measured humidity value, and the execution time control step includes a humidity measurement value measured using a humidity sensor after the completion of the first recovery process, and a recovery process. Determining whether to continue the recovery process based on the humidity measurement value measured using the humidity sensor during the execution of the process .
Furthermore, the deterioration recovery method according to the present invention is a deterioration recovery method for executing a recovery process for recovering the deterioration of a humidity sensor that detects humidity, and the humidity measured using the humidity sensor during the execution of the recovery process. An execution time control step for controlling the execution time of the recovery process based on the measurement value is included, and the recovery process is a cleaning cleaning for cleaning the humidity sensor and recovering the deterioration of the humidity sensor.

  The deterioration recovery program according to the present invention is a deterioration recovery program executed by a humidity measuring apparatus that executes a recovery process for recovering the deterioration of a humidity sensor that detects humidity, and includes each step in the above-described deterioration recovery method. Prepare.

  According to the humidity measuring apparatus, the degradation inspection method, and the program according to the present invention, the execution time of the recovery process is controlled based on the humidity measurement value measured using the humidity sensor during the execution of the recovery process. Here, the recovery state (recovery condition) of the humidity sensor during the execution of the recovery process appears in the humidity measurement value measured during the execution of the recovery process. Therefore, during the recovery process, by controlling the recovery process execution time based on the humidity measurement value measured using the humidity sensor, the recovery process can be performed according to the recovery state (recovery condition) of the humidity sensor. The execution time can be changed. Therefore, the recovery process execution time is made longer than necessary to shorten (shrink) the usable period (life) of the humidity sensor, or the shortened execution time is insufficient and the humidity sensor usable period ( It is possible to prevent the humidity sensor from being mistakenly determined that the (lifetime) has passed (run out) and replacing the usable humidity sensor, and to extend the useable period (lifetime) of the humidity sensor. )be able to.

It is a block diagram which shows an example of schematic structure of the humidity measuring apparatus in 1st Embodiment. It is a block diagram which shows an example of a functional structure of the control part shown in FIG. It is a flowchart explaining an example of the operation | movement which the humidity measuring apparatus shown in FIG. 1 recovers deterioration of a humidity sensor. It is a graph which shows an example of the humidity measurement value in the initial stage deterioration recovery process shown in FIG. It is a flowchart explaining the other example of the operation | movement which the humidity measuring apparatus shown in FIG. 1 recovers deterioration of a humidity sensor. It is a graph which shows an example of a humidity measurement value when it is assumed that the execution time of heat cleaning is constant. It is a graph explaining an example of the humidity measurement value P in the degradation recovery process shown in FIG. It is a flowchart explaining an example of the operation | movement which the humidity measuring apparatus shown in FIG. 1 determines the deterioration level of a humidity sensor. It is a block diagram which shows an example of schematic structure of the humidity measuring apparatus in 2nd Embodiment. It is a block diagram which shows an example of a functional structure of the control part shown in FIG. It is a flowchart explaining an example of the operation | movement which the humidity measuring apparatus shown in FIG. 9 recovers deterioration of a humidity sensor. It is a graph which shows an example of the humidity measurement value in the initial stage deterioration recovery process shown in FIG. 10 is a flowchart for explaining another example of an operation in which the humidity measuring device shown in FIG. 9 recovers the deterioration of the humidity sensor. It is a graph which shows an example of a humidity measurement value when it is assumed that the execution time of washing cleaning is constant. It is a graph explaining an example of the humidity measurement value P in the deterioration recovery process shown in FIG. It is a flowchart explaining an example of the operation | movement which the humidity measuring apparatus shown in FIG. 9 determines the deterioration level of a humidity sensor.

  Embodiments of the present invention will be described below. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, the drawings are schematic. Therefore, specific dimensions and the like should be determined in light of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings. In the following description, the upper side of the drawing is referred to as “upper”, the lower side as “lower”, the left side as “left”, and the right side as “right”.

<First Embodiment>
1 to 8 show a first embodiment of a humidity measuring device, a deterioration recovery method, and a deterioration recovery program according to the present invention. FIG. 1 is a configuration diagram illustrating an example of a schematic configuration of a humidity measuring apparatus 100 according to the first embodiment. As shown in FIG. 1, the humidity measuring device 100 includes a sensor unit 110 and a main body unit 130.

  The sensor unit 110 is installed in an atmosphere of a measurement environment, and detects a relative humidity (hereinafter simply referred to as humidity) in the atmosphere of the measurement environment. In addition to the humidity, the sensor unit 110 may detect a predetermined physical quantity in the atmosphere of the measurement environment, such as temperature, pressure, and wind speed (air volume).

  The sensor unit 110 includes a case (housing) 111, a humidity sensor 115, and a heater 116, and is connected to the main body unit 130 via the cable C. The humidity sensor 115 and the heater 116 are accommodated in the case 111.

  The case 111 has air permeability, and includes, for example, a net in which a plurality of holes are formed. The gas can flow through the network, and the humidity sensor 115 and the heater 116 can be in contact with (contact with) the gas in the measurement environment while being protected from the measurement environment by the case 111.

  The cable C is, for example, a bundle of a plurality of conducting wires covered (shielded). The cable C has one end connected to the case 111 and the other end connected to the main body 130. The humidity sensor 115 and the heater 116 in the case 111 are electrically connected to the main body 130 by the cable 112.

  The humidity sensor 115 is for detecting humidity. The humidity sensor 115 is, for example, a capacitance type (capacitance change type) humidity sensitive element whose capacitance changes according to humidity. The humidity sensor 115 outputs a capacitance value corresponding to the detected humidity to the main body 130 as a detection signal (humidity detection signal).

  The humidity sensor 115 is not limited to a capacitance type (capacitance change type) humidity sensitive element, and may be a resistance type (resistance change type) humidity sensitive element whose electric resistance changes according to humidity. Regardless of the method. Moreover, the moisture sensitive layer of a moisture sensitive element may be comprised, for example with materials, such as a high molecular compound and a ceramic, and does not ask | require material.

  The heater 116 is for heating the humidity sensor 115. When the heater 116 heats the humidity sensor 115, it is possible to perform heating cleaning that recovers the deterioration of the humidity sensor 115. The heater 116 may also serve as a temperature sensor that detects the temperature. In this case, for example, the heater 116 is a resistance temperature detector, and when the humidity sensor 115 is not heated, a resistance value corresponding to the detected temperature is output to the output unit as a detection signal (temperature detection signal). . Thereby, the heater 116 can function as a temperature sensor.

  The sensor unit 110 is not limited to the case where the heater 116 also serves as a temperature sensor, and the sensor unit 110 is configured to include a heater 116 that heats the humidity sensor 115 and a temperature sensor that detects the temperature in addition to the humidity sensor 115. It is possible.

  On the other hand, the main body 130 includes a case (housing) 131, a display unit 132, a light emitting unit 133, and an input unit 134. The display unit 132, the light emitting unit 133, and the input unit 134 are provided on the outer surface of the case 131.

  The display unit 132 is a display such as an LCD (Liquid Crystal Display), and displays output information such as measurement results and input information such as various settings. The light emitting unit 133 includes a plurality of light emitters such as LEDs (Light Emitting Diodes), for example, and at least one of the plurality of light emitters emits light based on the control signal. The input unit 134 includes a plurality of keys (buttons), and various types of information are input when the user (user) of the humidity measuring apparatus 100 operates the keys.

  The main body 130 includes a humidity signal conversion circuit 135, a heater element drive circuit 136, a control unit 140, an analog output unit 150, a digital communication unit 160, and a power supply unit 170 inside the case 131. Further prepare.

  The humidity signal conversion circuit 135 is connected to the humidity sensor 115 of the sensor unit 110, converts the humidity detection signal input from the humidity sensor 115 into a voltage signal, and outputs the converted voltage signal to the control unit 140.

  The heater element drive circuit 136 is connected to the heater 116 of the sensor unit 110 and supplies and drives the heater 116 based on a control signal input from the control unit 140.

  The control unit 140 is for controlling each unit of the humidity measuring apparatus 100. The control unit 140 is also for executing a deterioration recovery method and a deterioration recovery program according to the present invention described later. The control unit 140 is connected to the display unit 132, the light emitting unit 133, the input unit 134, the humidity signal conversion circuit 135, the heater element drive circuit 136, the analog output unit 150, and the digital communication unit 160. The control unit 140 includes an A / D converter 141, a CPU (Central Processing Unit) 142, a ROM (Read Only Memory) 143, a RAM 144, and a nonvolatile memory 145. Although not shown in the figure, the control unit 140 may further include various interfaces such as an input interface and an output interface, a bus connecting each device constituting the control unit 140, and the like.

  The A / D (Analog to Digital) converter 141 is for converting an electrical signal of an analog signal (hereinafter, appropriately referred to as an input signal) into an electrical signal of a digital signal (hereinafter appropriately referred to as an output signal). . In the present embodiment, the A / D converter 141 converts the analog voltage signal input from the humidity signal conversion circuit 135 into a digital signal and outputs it as the humidity measurement value P of the humidity sensor 115. The A / D converter 141 may perform signal processing such as filtering and signal amplification on the input signal, convert the input signal into an output signal, and output the output signal.

  Based on the data (information) input from the input unit 134, the humidity measurement value P input from the A / D converter 141, and the program stored in the ROM 143, the CPU 142 stores data in the RAM 144 and the memory 145. Various operations are performed while reading and writing data. And CPU142 outputs a control signal and data to each part connected to control part 140 based on a calculation result.

  Note that the functions of the devices constituting the control unit 140 can also be realized by a program executed by a computer (microcomputer). Therefore, each device constituting the control unit 150 can be realized (configurable) by hardware, software, or a combination of hardware and software, and is not limited to either case.

  In addition, when the device configuring the control unit 140 is realized (configured) by software, or a combination of hardware and software, processing for realizing the function of the device is multitasking, multithreading, or It can be executed by both multitasking and multithreading, and is not limited to either case.

  The analog output unit 150 is for converting a control signal and data input from the control unit 140 into a voltage signal or a current signal and outputting the voltage signal or current signal to the outside of the main body unit 130. The analog output unit 150 includes an output terminal, and outputs an analog signal to an external device connected to the output terminal, for example, a controller for humidity control.

  When outputting the humidity detection signal of the humidity sensor 115 to the outside, the control unit 140 bypasses (bypasses) the voltage signal input from the humidity signal conversion circuit 135 to the analog output unit. 150 may be output. In this case, the analog output unit 150 can output the humidity detection signal of the humidity sensor 115 to the outside of the main body unit 130 without converting it into a voltage signal or a current signal.

  The digital communication unit 160 is for outputting control signals and data input from the control unit 140 to the outside of the main body unit 130. The digital communication unit 160 includes an output terminal and outputs a digital signal to an external device connected to the output terminal, for example, a central monitoring device. The digital communication unit 160 may be an output terminal including a contact (pin) that simply outputs ON / OFF.

  The power supply unit 170 is for supplying power to each unit of the humidity measuring apparatus 100. The power supply unit 170 is not limited to being provided inside the case 131, and may be provided outside the case 131. In addition, the humidity measuring device 100 is not limited to the case where the power source unit 170 is provided, and the humidity measuring device 100 may be provided with power from an external power source without including the power source unit 170.

  In this embodiment, although the humidity measuring apparatus 100 demonstrated the example provided with the one sensor part 110, it is not limited to this. The humidity measuring apparatus 100 may include two or more sensor units. In this case, at least one of the plurality of sensor units may detect humidity.

  FIG. 2 is a block diagram illustrating an example of a functional configuration of the control unit 140 illustrated in FIG. As shown in FIG. 2, the control unit 140 includes a recovery process execution unit 140a, a time measurement unit 140b, a humidity measurement unit 140c, a storage unit 140d, an execution time control unit 140e, a deterioration determination unit 140f, and a deterioration notification. 140g and a measurement value correction unit 140h.

  The recovery process execution unit 140a executes a recovery process for recovering the deterioration of the humidity sensor 115. In the present embodiment, the recovery process is heating cleaning that heats the humidity sensor 115 and recovers the deterioration of the humidity sensor 115. The recovery process execution unit 140a outputs a control signal to the heater element drive circuit 136 to drive the heater 116 shown in FIG. Thereby, the humidity sensor 115 is heated by the heater 116, and the heat cleaning for the humidity sensor 115 is executed.

  The timer unit 140b is for measuring time in a predetermined period. The timer unit 140b can be configured by an IC chip having a clock function such as an oscillation circuit (clock generator) or an RTC (Real Time Clock), for example.

  The humidity measuring unit 140c is for measuring the humidity measurement value P using the humidity sensor 115 shown in FIG. The humidity measurement unit 140c obtains (obtains) the humidity measurement value P based on the voltage signal input from the humidity signal conversion circuit 135. The humidity measuring unit 140c can be configured by the A / D converter 141 described above, for example.

The storage unit 140d is for storing data (information). The storage unit 140d can be configured by, for example, the RAM 144 or the memory 145 described above. In the present embodiment, a predetermined execution period T ₁ of heat cleaning, a predetermined maximum execution time T _max of heat cleaning, a predetermined measurement period T ₂ of humidity, and the like are stored in advance in the storage unit 140d.

  The execution time control unit 140e controls the execution time of the heating cleaning based on the humidity measurement value P measured using the humidity sensor 115 shown in FIG. 1 during the execution of the heating cleaning. Here, the recovery state (recovery) of the humidity sensor 115 during execution of heat cleaning appears in the humidity measurement value P measured during the execution of heat cleaning. Therefore, by controlling the execution time of the heat cleaning based on the humidity measurement value P measured using the humidity sensor 115 during the execution of the heat cleaning, according to the recovery state (recovery condition) of the humidity sensor 115. It is possible to change the execution time of the heat cleaning.

  The deterioration determination unit 140f determines the level (degree or degree) of deterioration of the humidity sensor 115 based on the humidity measurement value P measured using the humidity sensor 115 shown in FIG.

  The deterioration notification unit 140g notifies the deterioration level (degree, degree) of the humidity sensor 115 based on the determination result by the deterioration determination unit 140e. In the present embodiment, the deterioration notification unit 140f outputs a control signal corresponding to the deterioration level (degree, degree) to the light emitting unit 133, and lights or blinks one of the plurality of light emitters.

  The measurement value correction unit 140h calculates a correction value β of the humidity measurement value P based on the humidity measurement value P measured using the humidity sensor 115 shown in FIG.

  Next, an operation in which the humidity measuring apparatus 100 recovers the deterioration of the humidity sensor 115 will be described.

  FIG. 3 is a flowchart for explaining an example of an operation in which the humidity measuring apparatus 100 shown in FIG. 1 recovers the deterioration of the humidity sensor 115. For example, the recovery process execution unit 140a is shown in FIG. 3 when the power switch is turned on and the humidity measuring device 100 is activated, or when the humidity sensor 115 is replaced and a reset signal is input from the input unit 134. An initial deterioration recovery process S100 is executed.

  That is, the recovery process execution unit 140a determines whether to perform heat cleaning based on a predetermined condition (S101), and repeats the step of S101 until it is determined to perform heat cleaning.

For example, the recovery process execution unit 140a uses the time measuring unit 140b to measure the elapsed time _tes since the activation of the humidity measuring apparatus 100 or the input of the reset signal from the input unit 134. Then, the recovery processing execution unit 140a reads a predetermined execution period T ₀ of the heat cleaning from the storage unit 140d, and when the elapsed time t _es becomes equal to or longer than the execution period T ₀ (t _es ≧ T ₀ ), the heat cleaning is performed. When the elapsed time t _es is less than the execution cycle T ₀ (t _es <T ₀ ), it is determined that the heat cleaning is not performed.

  Alternatively, the recovery process execution unit 140a determines that heat cleaning is to be performed when a heat cleaning execution signal is input from the input unit 134 by a user (user) operation, and the heat cleaning execution signal is input from the input unit 134. When no is input, it is determined that the heat cleaning is not performed.

As a result of the determination in S101, when performing heat cleaning, the recovery process execution unit 140a performs heat cleaning for a predetermined execution time _Tr0 (S102).

For example, the recovery processing execution unit 140a outputs a control signal to the heater element drive circuit 136 to start the heat cleaning by the heater 116, and measures the elapsed time _ter from the start of the heat cleaning using the time measuring unit 140b. . Then, the recovery process execution unit 140a reads a predetermined execution time T _r0 of the heating cleaning from the storage unit 140d, and when the elapsed time t _er becomes equal to or longer than the execution time T _r0 (t _er ≧ T _r0 ), the heater again A control signal is output to the element driving circuit 136, and the heating cleaning by the heater 116 is finished.

After the completion of the heat cleaning, the humidity measurement unit 140c measures the humidity measurement value P using the humidity sensor 115 (S103), and writes the measured humidity measurement value P as the initial measurement value P ₀ in the storage unit 140d for storage. (S104).

  After S104, the recovery process execution unit 140a ends the initial deterioration recovery process S100.

FIG. 4 is a graph showing an example of the humidity measurement value P in the initial deterioration recovery process S100 shown in FIG. As shown in FIG. 4, when the recovery processing execution unit 140a starts heating the cleaning at time t _1, the humidity measurement P starts to drop over time. The predetermined execution time T _r0 from the start of heating cleaning in elapsed time t _2, the recovery processing execution unit 140a ends the heating cleaning. At this time, that is, immediately after the end of the heat cleaning, the humidity measurement value P is substantially 0 (zero) [%] and is stored as the first measurement value P ₀ . Here, it is considered that the deterioration of the humidity sensor 115 is sufficiently recovered immediately after the end of the first heat cleaning. Therefore, the initial measurement value P ₀ measured and stored immediately after the end of the first heat cleaning is a reference (index) regarding the recovery state (specific recovery) of the humidity sensor 115.

  FIG. 5 is a flowchart for explaining another example of the operation in which the humidity measuring apparatus 100 shown in FIG. 1 recovers the deterioration of the humidity sensor 115. The recovery process execution unit 140a executes the deterioration recovery process S200 shown in FIG. 5 after the end of the initial deterioration recovery process S100 or after the end of the previous deterioration recovery process S200.

That is, the recovery processing execution unit 140a reads a predetermined execution period T ₁ of the heating cleaning from the storage unit 140d, and determines whether the elapsed execution cycle T ₁ from the end of the previous heating cleaning (S201), the last from the heated cleaning ends up running period T ₁ is passed repeats the steps of S201.

For example, the recovery processing execution unit 140a, using the time measuring unit 140b in advance by measuring the elapsed time t _ee from the end of the previous heating cleaning, if _{the ee} the elapsed time t becomes execution cycle above T ₁ (t _ee ≧ T ₁ ), it is determined that the execution cycle T ₁ has elapsed since the end of the previous heating cleaning, and when the elapsed time t _ee is less than the execution cycle T ₁ (t _ee <T ₁ ), It is determined that the execution cycle T ₁ has not elapsed since the end of the heat cleaning.

The execution cycle T ₁ is set based on the usage status (usage mode) of the humidity measuring apparatus 100 such as the accuracy required for the humidity sensor 115 and the measurement environment in which the humidity sensor 115 is arranged. For example, a time of several hours to several days is set. The execution cycle T ₁ may be the same as or different from the execution cycle T ₀ described above.

Result of the determination in S201, if the elapsed execution period T ₁ from the end of the previous heating cleaning, recovery processing execution unit 140a outputs a control signal to the heater element drive circuit 136 starts heating the cleaning by the heater 116 ( S202).

In the present embodiment, although the recovery processing execution unit 140a is an example for performing a heat cleaning at a predetermined execution period T _1, but is not limited thereto. For example, the recovery processing execution unit 140a receives a heating cleaning execution signal from the input unit 134 instead of periodically performing the heating cleaning or in addition to periodically performing the heating cleaning. Sometimes heat cleaning may be performed.

  Next, the humidity measuring unit 140c measures the humidity measurement value P using the humidity sensor 115 (S203). As a result, the humidity measurement value P is measured during the heat cleaning.

Next, the execution time control unit 140e reads out a predetermined maximum execution time T _max of heating cleaning from the storage unit 140d, and determines whether or not the maximum execution time T _max has elapsed (not yet elapsed) since the start of heating cleaning. Determine (S204).

For example, the execution time control unit 140e measures the elapsed time _ter from the start of the heat cleaning using the time measuring unit 140b, and the elapsed time _ter is less than the maximum execution time _Tmax ( _ter < T _max ), it is determined that the maximum execution time T _max has not elapsed since the start of the heat cleaning, and when the elapsed time t _er is equal to or greater than the maximum execution time T _max (t _er ≧ T _max ) It is determined that the maximum execution time T _max has elapsed from the start.

The result of the determination in S204, if the start of the heating cleaning has not passed the maximum execution time T _max, the execution time control unit 140e reads out the first measurement value P ₀ from the storage unit 140d, and the first measured value P _0, Based on the humidity measurement value P measured in S203, it is determined whether or not to continue the heat cleaning (S205).

For example, the execution time control unit 140e compares the humidity measurement values P measured by the first measurement value P ₀ and S203, determines whether to continue the heating cleaning based on the comparison result. That is, when the humidity measurement value P measured in S203 is larger than the initial measurement value P ₀ (P> P ₀ ), the execution time control unit 140e determines that the heating cleaning is continued, and the humidity measurement value P measured in S203. Is equal to or less than the initial measurement value P ₀ (P ≦ P ₀ ), it is determined that the heat cleaning is not continued, that is, the heat cleaning is finished.

Result of the determination in S205, if the heating is continued cleaning, recovery processing execution unit 140a reads out the predetermined measurement period T ₂ of the humidity from the storage unit 140d, the measurement of the previous humidity measurement values P in the heating cleaning running It is determined whether or not the measurement cycle T ₂ has passed (S206).

For example, if the recovery processing execution unit 140a is using time measuring unit 140b in advance by measuring the elapsed time t _em from the measurement of the previous humidity measurement values P, the elapsed time t _em measurement period T ₂ or more ( When t _me ≧ T ₂ ), it is determined that the measurement cycle T ₂ has elapsed from the previous measurement of the humidity measurement value P in the heat cleaning being performed, and the elapsed time t _em is less than the measurement cycle T ₂ (t _em <T ₂ ), and it is determined that the measurement cycle T ₂ has not elapsed since the previous measurement of the humidity measurement value P in the heat cleaning being performed.

Result of the determination in S206, if the measurement period T ₂ from the measurement of the previous humidity measurement values P in the heating cleaning running elapsed, the process returns to S203 of the step, the measurement of the previous humidity measurement values P in the heating cleaning running If the measurement period T ₂ has not elapsed from S, the process returns to step S204. As a result, the humidity measurement value P is measured at the measurement cycle T ₂ during execution of the heat cleaning, and is updated to the latest value.

The humidity measurement value P is measured a plurality of times during execution of the heat cleaning, and the execution time control unit 140e preferably controls the execution time of the heat cleaning being executed based on the latest (immediately) humidity measurement value P. . For this reason, the measurement cycle T ₂ is sufficiently shorter than the predicted execution time. For example, when the predicted execution time is about 10 minutes, the measurement cycle T ₂ is 1 second to several tens of seconds. About time is set.

In the present embodiment, during the execution of the heating cleaning, although the humidity measurement unit 140c is an example of measuring the humidity measurement values P at a predetermined measurement period T _2, but is not limited thereto. For example, the humidity measuring unit 140c may perform the aperiodic measurement instead of periodically measuring the humidity measurement value P or performing the humidity measurement value P periodically during the heat cleaning. Alternatively, the humidity measurement value P may be measured.

On the other hand, as a result of the determination in S204, when the maximum execution time T _max has elapsed since the start of the heat cleaning, the deterioration of the humidity sensor 115 does not sufficiently recover even if the heat cleaning being executed is continued further ( (It will not return). Therefore, the execution time control unit 140e outputs a control signal to the heater element drive circuit 136 and ends the heat cleaning by the heater 116 (S207).

  After S207, the deterioration determination unit 140f executes a deterioration level determination process S300, which will be described later, for determining the deterioration level (degree, degree) of the humidity sensor 115.

  On the other hand, as a result of the determination in S205, when the heating cleaning is not continued, that is, when the heating cleaning is ended, the execution time control unit 140e outputs a control signal to the heater element drive circuit 136 to end the heating cleaning by the heater 116. (S208).

  After the deterioration level determination process S300 and after S208, the recovery process execution unit 140a ends the deterioration recovery process S200.

FIG. 6 is a graph showing an example of the humidity measurement value P when it is assumed that the heat cleaning execution time is constant. As shown in FIG. 6, when the heating cleaning is started at the time t ₃ as shown in FIG. 6, when the heating cleaning is performed at a predetermined execution time T _{r as} in the conventional deterioration recovery method, the humidity measurement value P becomes a time lapse. It begins to decline with. Then, at the time t ₄ when a predetermined execution time _Tr has elapsed from the start of the heat cleaning, the heat cleaning is finished. At this time, the humidity measurement value P is almost 0 (zero) [%], but may be smaller than the initial measurement value P ₀ described above (P <P ₀ ). In this case, since the heat cleaning execution time _Tr is longer than necessary, the usable period (life) of the humidity sensor 115 may be shortened (shortened).

When the heat cleaning is started at time t ₅ , the humidity measurement value P starts to decrease with time. Then, at the time t ₆ when a predetermined execution time _Tr has elapsed from the start of the heat cleaning, the heat cleaning is finished. At this time, the humidity measurement value P may be larger than the initial measurement value P ₀ described above (P> P ₀ ). In this case, the execution time _Tr of the heat cleaning is insufficient, and it is erroneously determined that the usable period (life) of the humidity sensor 115 has passed (exhausted) based on the humidity measurement value P after the completion of the heat cleaning. Then, there is a possibility that the usable humidity sensor 115 may be replaced.

FIG. 7 is a graph for explaining an example of the humidity measurement value P in the deterioration recovery process S200 shown in FIG. In contrast, the deterioration recovery process S200 of this embodiment, as shown in FIG. 7, when starting the heating cleaning at time t _3, the humidity measurement values P starts to drop over time. When the humidity measurement value P reaches the first measurement value P ₀ at time t ₄ ′ before the predetermined execution time _Tr elapses from the start of the heat cleaning, the execution time control unit 140e determines that the step of S205 Thus, it is determined that the heat cleaning is finished, and the heat cleaning can be finished. In this way, by controlling the execution time of the heat cleaning based on the humidity measurement value P measured using the humidity sensor 115 during the execution of the heat cleaning, the execution time of the heat cleaning is set to the predetermined execution time T. It can be made shorter than _r , and the execution time of the heat cleaning can be prevented from becoming longer than necessary.

Further, the deterioration recovery process S200 of this embodiment, when starting the heating cleaning at time t _5, the humidity measurement values P starts to drop over time. Then, at the time t ₆ when the predetermined execution time _Tr has elapsed from the start of the heat cleaning, the humidity measurement value P is greater than the initial measurement value P ₀ , so that the execution time control unit 140e continues the heat cleaning in step S205. Determination and heating cleaning are continued. Thereafter, when the humidity measurement value P reaches the first measurement value P ₀ at time t ₆ ′, the execution time control unit 140e determines that the heating cleaning is to be ended in step S205, and the heating cleaning can be ended. It becomes. In this way, by controlling the execution time of the heat cleaning based on the humidity measurement value P measured using the humidity sensor 115 during the execution of the heat cleaning, the execution time of the heat cleaning is set to the predetermined execution time T. It can be made longer than _r , and it is possible to prevent the heat cleaning execution time from being insufficient.

The deterioration recovery process S200 shown in FIG. 5, in step S205, the execution time controller 140e is compared with the humidity measurement values P measured by the first measurement value P ₀ and S203, heating the cleaning on the basis of the comparison result Although the example which determines whether it continues is shown, it is not limited to this. The execution time control unit 140e converts the initial measurement value P ₀ measured using the humidity sensor 115 after the completion of the first heat cleaning and the humidity measurement value P measured using the humidity sensor 115 during the execution of the heat cleaning. Based on this, it may be determined whether or not to continue the heat cleaning.

That is, for example, after measuring the humidity measurement value P in S203, the execution time control unit 140e calculates a difference ΔP (= | P ₀ −P |) between the initial measurement value P ₀ and the humidity measurement value P. In step S205, the execution time control unit 140e reads the predetermined threshold value ΔP _th from the storage unit 140d, compares the predetermined threshold value ΔP _th with the calculated difference ΔP, and based on the comparison result. It may be determined whether or not to continue the heat cleaning.

Further, for example, after measuring the humidity measurement value P in S103, the measured humidity measurement value P is set as the initial measurement value P ₀ , and the execution time control unit 140e sets a predetermined range (± α) from the initial measurement value P _0. The recovery range W (W = P ₀ ± α) is set, and the set recovery range W is written and stored in the storage unit 140d. In step S205, the execution time control unit 140e reads the recovery range W from the storage unit 140d, compares the calculated recovery range W with the humidity measurement value P measured in S203, and based on the comparison result. It may be determined whether or not to continue the heat cleaning.

Further, for example, after measuring the humidity measurement value P in S203, the execution time control unit 140e calculates a difference ΔP (= P ₀ −P) between the initial measurement value P ₀ and the humidity measurement value P. Further, when the humidity measurement value P is measured a plurality of times in the heating cleaning being executed according to the determination of S206, the execution time control unit 140e calculates the average value ΔP _av from the humidity measurement values P for n times (n is an integer). . In step S205, the execution time control unit 140e reads the predetermined threshold value ΔP _th from the storage unit 140d, compares the predetermined threshold value ΔP _th with the calculated average value ΔP _av, and determines the comparison result. Based on this, it may be determined whether to continue or end the heating cleaning.

As described above, the initial measurement value P ₀ which is measured after the completion of the first heat cleaning and becomes a reference (index) regarding the recovery state (recovery specific) of the humidity sensor 115 and the measurement value during the heat cleaning is measured. Based on the humidity measurement value P that indicates the recovery state (recovery state) of the humidity sensor 115 during execution, the recovery state (recovery state) of the humidity sensor 115 during execution of heat cleaning can be easily determined. The execution time of heat cleaning can be controlled more appropriately.

  Next, an operation in which the humidity measuring apparatus 100 determines the level (degree or degree) of deterioration of the humidity sensor 115 will be described.

  FIG. 8 is a flowchart for explaining an example of an operation in which the humidity measuring apparatus 100 shown in FIG. 1 determines the level of deterioration of the humidity sensor 115. As described above, the recovery determination unit 140f executes the deterioration level determination process S300 illustrated in FIG. 8 after S207 illustrated in FIG.

  That is, the deterioration determination unit 140f determines whether or not the deterioration of the humidity sensor 115 is equal to or less than a predetermined level (degree, degree) based on the humidity measurement value P measured in S203 illustrated in FIG. 5 (S301). ).

For example, the deterioration determination unit _140f reads the predetermined allowable value P _0max from the storage unit 140d, and the deterioration of the humidity sensor 115 is performed when the humidity measurement value P measured in S203 is _{equal to} or less than the allowable value P _0max (P ≦ P _0max ). Is less than a predetermined level (degree, degree), and when the humidity measurement value P measured in S203 is larger than the allowable value P _0max (P> P _0max ), the deterioration of the humidity sensor 115 is a predetermined level (degree). It is determined that the deterioration of the humidity sensor 115 is higher (larger) than a predetermined level (degree, degree).

  As a result of the determination in S301, if the deterioration of the humidity sensor 115 is below a predetermined level (degree, degree), the humidity sensor 115 can be used if the humidity measurement value P is corrected, but the humidity sensor 115 is usable (Life) is considered to be low. Therefore, the deterioration notification unit 140g outputs a control signal to the light emitting unit 133 to light the corresponding light emitter, and notifies that the deterioration of the humidity sensor 115 is at a level close to the replacement time (replacement notice level) (S302). ). As a result, the user (user) can prepare the humidity sensor 115 in advance, for example, and can smoothly replace the future (future) humidity sensor 115.

  Next, the measurement value correction unit 140h calculates a correction value β of the humidity measurement value P based on the humidity measurement value P measured in S203 (S303), and writes and stores the calculated correction value β in the storage unit 140d. (S304). Thereby, for example, the measurement value correction unit 140h corrects the humidity measurement value P measured using the humidity sensor 115 using the correction value β, and outputs the corrected humidity measurement value P ′ to the display unit 132. Can be displayed. Alternatively, the measurement value correction unit 140h may output the corrected humidity measurement value P ′ to the display unit 132 for display instead of outputting the corrected humidity measurement value P ′ to the display unit 132 for display. In addition, the corrected humidity measurement value P ′ can be output to the outside of the humidity measurement apparatus 100 via the digital communication unit 160.

For example, the measurement value correction unit 140h reads the initial measurement value P ₀ from the storage unit 140d, and calculates the correction value β (= P−P ₀ ) from the difference between the humidity measurement value P measured in S203 and the initial measurement value P _0. calculate.

On the other hand, as a result of the determination in S301, if the deterioration of the humidity sensor 115 is higher (larger) than a predetermined level (degree, degree), even if the humidity measurement value P measured using the humidity sensor 115 is corrected, the reliability ( (Reliability) is low, and it is considered that the usable period (life) of the humidity sensor 115 has passed (exhausted). Therefore, the deterioration notification unit 140g outputs a control signal to the light emitting unit 133 to turn on the corresponding light emitter, and notifies that the deterioration of the humidity sensor 115 is at a level that has reached the replacement time (replacement time level) ( S305). As described above, when the maximum execution time T _max has elapsed from the start of the heat cleaning and the deterioration determination process S300 is executed, and the deterioration of the humidity sensor 115 is higher (larger) than a predetermined level (degree, degree), the humidity sensor Since it is notified that the deterioration of 115 has reached the replacement time, the deterioration of the humidity sensor 115 is not sufficiently recovered (not returned) even if the heat cleaning is further performed. Even if P is corrected, the humidity sensor 115 can be used until it is determined that the reliability (reliability) is low, and the usable period (life) of the humidity sensor 115 can be extended (longened). it can.

  After S304 and after S305, the deterioration determination unit 140f ends the deterioration level determination process S300.

  In the present embodiment, in the step of S301, the deterioration determination unit 140f has shown an example of determining whether or not the deterioration of the humidity sensor 115 is below a predetermined level (degree, degree), but is not limited to this. For example, the deterioration determination unit 140f may determine the deterioration of the humidity sensor 115 at three or more levels (degrees and degrees).

  In the present embodiment, in the steps of S302 and S305, the degradation notification unit 140g outputs a control signal to the light emitting unit 133 to turn on the corresponding light emitter, but the present invention is not limited to this. For example, instead of outputting the control signal to the light emitting unit 133 to light the corresponding light emitter, the deterioration notification unit 140g outputs the control signal to the light emitting unit 133 to light the corresponding light emitter. In addition, notification data for notifying the deterioration level (degree, degree) of the humidity sensor 115 may be output to the digital communication unit 160. As a result, the external device connected to the humidity measuring device 100 via the digital communication unit 160, for example, the central monitoring device, has a level of deterioration of the humidity sensor 115 close to the replacement time (replacement notice level), and humidity. It is possible to notify at least one of the fact that the deterioration of the sensor 115 is the level at which the replacement time has been reached (the replacement time level).

  Thus, according to the humidity measuring apparatus 100, the deterioration recovery method, and the deterioration recovery program in the present embodiment, heating is performed based on the humidity measurement value P measured using the humidity sensor 115 during execution of the heating cleaning. Controls the cleaning execution time. Here, the recovery state (recovery) of the humidity sensor 115 during execution of heat cleaning appears in the humidity measurement value P measured during the execution of heat cleaning. Therefore, by controlling the execution time of the heat cleaning based on the humidity measurement value P measured using the humidity sensor 115 during the execution of the heat cleaning, according to the recovery state (recovery condition) of the humidity sensor 115. It is possible to change the execution time of the heat cleaning. Therefore, it is possible to use the humidity sensor 115 by shortening (shortening) the usable period (life) of the humidity sensor 115 by extending the execution time of the heat cleaning more than necessary, or by shorting the execution time of the heat cleaning. It is possible to prevent the humidity sensor 115 from being mistakenly determined that the period (life) has passed (exhausted) and replacing the usable humidity sensor 115, and to determine the usable period (life) of the humidity sensor 115. Can be extended (lengthened).

Second Embodiment
9 to 16 are for illustrating a second embodiment of the humidity measuring device, the degradation recovery method, and the degradation recovery program according to the present invention. Unless otherwise specified, the same components as those of the first embodiment described above are denoted by the same reference numerals, and description thereof is omitted. In addition, components similar to those of the first embodiment described above are denoted by similar symbols, and detailed description thereof is omitted. Further, the configuration, operation, and arrangement not shown are the same as those in the first embodiment described above.

  FIG. 9 is a configuration diagram illustrating an example of a schematic configuration of a humidity measuring device 100A according to the second embodiment. As shown in FIG. 9, the humidity measuring apparatus 100A includes a sensor unit 110A and a main body unit 130A.

  The sensor unit 110 </ b> A is different from the sensor unit 110 of the first embodiment illustrated in FIG. 1 in that a cleaning device 117 is provided instead of the heater 116, and the other configurations are the same as the sensor unit 110.

  The cleaning device 117 is for cleaning the humidity sensor 115. By cleaning the humidity sensor 115 with the cleaning device 117, cleaning cleaning that recovers the deterioration of the humidity sensor 115 can be performed.

  On the other hand, the main body 130A is different from the main body 130 of the first embodiment shown in FIG. 1 in that it does not include the heater element drive circuit 136, and includes a control unit 140A instead of the control unit 140. Other configurations are the same as those of the main body 130. However, each device constituting the control unit 140A is the same as the control unit 140 of the first embodiment shown in FIG.

  FIG. 10 is a block diagram illustrating an example of a functional configuration of the control unit 140A illustrated in FIG. As shown in FIG. 10, the control unit 140A includes a recovery process execution unit 140a, a time measurement unit 140b, a humidity measurement unit 140c, a storage unit 140d, an execution time control unit 140e, a deterioration determination unit 140f, and a deterioration notification. 140g and a measurement value correction unit 140h. Note that the timer unit 140b, the humidity measurement unit 140c, and the deterioration notification unit 140g are the same as those in the first embodiment shown in FIG.

  The recovery process execution unit 140a executes a recovery process for recovering the deterioration of the humidity sensor 115. In the present embodiment, the recovery process is cleaning cleaning that cleans the humidity sensor 115 and recovers the deterioration of the humidity sensor 115. The recovery process execution unit 140a outputs a control signal to the cleaning device 117 and drives it. Thus, the humidity sensor 115 is cleaned by the cleaning device 117, and cleaning cleaning for the humidity sensor 115 is executed.

The storage unit 140d is for storing data (information). The storage unit 140d can be configured by, for example, the RAM 144 or the memory 145 described above. In the present embodiment, a predetermined cleaning cleaning execution period T ₁₁ , a predetermined maximum cleaning cleaning execution time T _max1 , a predetermined humidity measurement period T _{12, and the} like are stored in the storage unit 140 d in advance.

  The execution time control unit 140e controls the execution time of the cleaning cleaning based on the humidity measurement value P measured using the humidity sensor 115 shown in FIG. 9 during execution of the cleaning cleaning. Here, the recovery state (recovery level) of the humidity sensor 115 during execution of the cleaning cleaning appears in the humidity measurement value P measured during the execution of the cleaning cleaning. Therefore, by controlling the cleaning cleaning execution time based on the humidity measurement value P measured using the humidity sensor 115 during the cleaning cleaning, the humidity sensor 115 is recovered according to the recovery state (recovery condition). It is possible to change the cleaning cleaning execution time.

  The deterioration determination unit 140f determines the level (degree or degree) of deterioration of the humidity sensor 115 based on the humidity measurement value P measured using the humidity sensor 115 shown in FIG.

  The measurement value correction unit 140h calculates a correction value β ′ of the humidity measurement value P based on the humidity measurement value P measured using the humidity sensor 115 shown in FIG. 1 during the cleaning and cleaning.

  Next, an operation in which the humidity measuring apparatus 100A recovers the deterioration of the humidity sensor 115 will be described.

  FIG. 11 is a flowchart for explaining an example of an operation in which the humidity measuring apparatus 100A shown in FIG. 9 recovers the deterioration of the humidity sensor 115. For example, when the power switch is turned on and the humidity measuring device 100A is activated, or when the humidity sensor 115 is replaced and a reset signal is input from the input unit 134, the recovery processing execution unit 140a is shown in FIG. First degradation recovery processing S100A is executed.

  That is, the recovery process execution unit 140a determines whether or not to perform cleaning cleaning based on a predetermined condition (S111), and repeats step S111 until it is determined that cleaning cleaning is to be performed.

For example, the recovery processing execution unit 140a, using the time measuring unit 140b, the start of the humidity measuring devices 100A, or a reset signal from the input unit 134 measures the elapsed time t _es from being entered. Then, the recovery processing execution unit 140a, the read predetermined execution period T ₁₀ of the cleaning the cleaning from the storage unit 140d, when the elapsed time t _es becomes execution cycle T ₁₀ or more (t _es ≧ T _10), washed cleaning When the elapsed time t _es is less than the execution cycle T ₁₀ (t _es <T ₁₀ ), it is determined that the cleaning cleaning is not performed.

  Alternatively, the recovery processing execution unit 140a determines that the cleaning cleaning is to be performed when a cleaning cleaning execution signal is input from the input unit 134 by a user (user) operation, and the cleaning cleaning execution signal is input from the input unit 134. If no is input, it is determined not to perform cleaning.

As a result of the determination in S101, when cleaning cleaning is executed, the recovery process execution unit 140a executes cleaning cleaning for a predetermined execution time _Tr10 (S112).

For example, the recovery processing execution unit 140a outputs a control signal to the cleaning device 117 to start cleaning by the cleaning device 117, and measures an elapsed time _ter from the start of cleaning by using the time measuring unit 140b. Then, the recovery process execution unit 140a reads a predetermined cleaning cleaning execution time _Tr10 from the storage unit 140d, and when the elapsed time _ter becomes equal to or longer than the execution time _Tr10 ( _ter ≧ _Tr10 ), the cleaning is performed again. A control signal is output to the apparatus 117, and the cleaning cleaning by the cleaning apparatus 117 is completed.

After the cleaning and cleaning, the humidity measurement unit 140c measures the humidity measurement value P using the humidity sensor 115 (S103), and writes the measured humidity measurement value P as the initial measurement value P ₀ in the storage unit 140d for storage. (S104).

  After S104, the recovery process execution unit 140a ends the initial deterioration recovery process S100A.

FIG. 12 is a graph showing an example of the humidity measurement value P in the initial deterioration recovery process S100A shown in FIG. As shown in FIG. 12, the recovery processing execution unit 140a starts cleaning the cleaning at time t _11, the humidity measurement values P begins to rise with time. Then, at the beginning of the predetermined execution time of the cleaning the cleaning T _r10 time t ₁₂ has elapsed, the recovery processing execution unit 140a ends the wash cleaning. At this time, that is, immediately after the end of cleaning and cleaning, the humidity measurement value P is approximately 100 [%], and is stored as the first measurement value P ₀ . Here, it is considered that the deterioration of the humidity sensor 115 is sufficiently recovered immediately after the end of the first cleaning and cleaning. Therefore, the initial measurement value P ₀ measured and stored immediately after the end of the first cleaning and cleaning is a reference (index) regarding the recovery state (recovery specific) of the humidity sensor 115.

  FIG. 13 is a flowchart for explaining another example of the operation in which the humidity measuring apparatus 100A shown in FIG. 9 recovers the deterioration of the humidity sensor 115. The recovery process execution unit 140a executes the deterioration recovery process S200A shown in FIG. 13 after the end of the first deterioration recovery process S100A or after the previous deterioration recovery process S200A.

That is, the recovery processing execution unit 140a reads a predetermined execution period T ₁₁ of the cleaning the cleaning from the storage unit 140d, and determines whether the elapsed execution cycle T ₁₁ from the end of the previous wash cleaning (S211), the last from washing cleaning ends up execution period T ₁₁ elapses repeats the steps of S211.

For example, the recovery processing execution unit 140a, using the time measuring unit 140b in advance by measuring the elapsed time t _ee from the end of the previous wash cleaning, if _{the ee} the elapsed time t becomes execution cycle T ₁₁ or more (t _ee ≧ T ₁₁ ), it is determined that the execution cycle T ₁₁ has elapsed since the end of the previous cleaning, and when the elapsed time t _ee is less than the execution cycle T ₁₁ (t _ee <T ₁₁ ), determining from the end of the cleaning the cleaning and execution period T ₁₁ has not elapsed.

Execution period T _11, for example, the accuracy required to the humidity sensor 115, such as the measurement environment humidity sensor 115 is disposed, is set based on the usage (usage mode) of the humidity detecting device 100A. For example, a time of several hours to several days is set. Note that the execution cycle T ₁₁ may be the same as or different from the execution cycle T ₁₀ described above.

Result of the determination in S201, if the elapsed execution period T ₁ from the end of the previous wash cleaning, recovery processing execution unit 140a starts cleaning the cleaning by the cleaning device 117 outputs a control signal to the heater element drive circuit 136 (S212).

In the present embodiment, although the recovery processing execution unit 140a is an example for performing a wash cleaning with predetermined execution period T _11, but is not limited thereto. For example, the recovery processing execution unit 140a receives a cleaning signal from the input unit 134 instead of periodically performing cleaning cleaning or in addition to periodically executing cleaning cleaning. Sometimes cleaning and cleaning may be performed.

  Next, the humidity measuring unit 140c measures the humidity measurement value P using the humidity sensor 115 (S203). Thus, the humidity measurement value P is measured during the cleaning and cleaning.

Next, the execution time control unit 140e reads a predetermined maximum execution time T _max1 for cleaning from the storage unit 140d, and determines whether the maximum execution time T _max1 has not elapsed (not yet elapsed) since the start of cleaning. Determination is made (S214).

For example, the execution time controller 140e may leave measuring the elapsed time t _er from the start of the wash cleaning with a timer unit 140b, when the elapsed time t _er is less than _max1 maximum execution time T (t _er < T _max1 ), it is determined that the maximum execution time T _max1 has not elapsed since the start of cleaning, and if the elapsed time _ter is greater than or _equal to the maximum execution time T _max1 (t _er ≧ T _max1 ) It is determined that the maximum execution time T _max1 has elapsed since the start.

Result of the determination in S214, if the start of the wash cleaning has not passed the maximum execution time T _max1, execution time control unit 140e reads out the first measurement value P ₀ from the storage unit 140d, and the first measured value P _0, Based on the humidity measurement value P measured in S203, it is determined whether or not to continue cleaning (S215).

For example, the execution time control unit 140e compares the humidity measurement values P measured by the first measurement value P ₀ and S203, determines whether to continue the cleaning cleaning based on the comparison result. That is, when the humidity measurement value P measured in S203 is smaller than the initial measurement value P ₀ (P <P ₀ ), the execution time control unit 140e determines that the cleaning cleaning is continued, and the humidity measurement value P measured in S203. Is equal to or higher than the initial measurement value P ₀ (P ≧ P ₀ ), it is determined that the cleaning cleaning is not continued, that is, the cleaning cleaning is finished.

Result of the determination in S215, when continuing the wash cleaning, recovery processing execution unit 140a reads out the predetermined measurement period T ₁₂ of the humidity from the storage unit 140d, the measurement of the previous humidity measurement values P in the cleaning cleaning running determining measurement period T ₁₂ is whether elapsed (S216).

For example, if the recovery processing execution unit 140a is using time measuring unit 140b in advance by measuring the elapsed time t _em from the measurement of the previous humidity measurement values P, the elapsed time t _em measurement period T ₁₂ or more ( When t _me ≧ T ₁₂ ), it is determined that the measurement period T ₁₂ has elapsed from the previous measurement of the humidity measurement value P in the cleaning cleaning being performed, and the elapsed time _tem is less than the measurement period T ₂ (t _em <T ₁₂ ), it is determined that the measurement cycle T ₁₂ has not elapsed since the previous measurement of the humidity measurement value P in the cleaning cleaning being executed.

Result of the determination in S216, if the measurement period T ₁₂ from the measurement of the previous humidity measurement values P in the washing clean running elapsed, the process returns to S203 of the step, the measurement of the previous humidity measurement values P in the washing clean running If the measurement period T ₁₂ has not elapsed from the flow returns to S214 steps. Accordingly, humidity measurement P is measured by the measuring period T ₁₂ during the cleaning the cleaning run, is updated to the latest values.

The humidity measurement value P is measured a plurality of times during execution of the cleaning cleaning, and the execution time control unit 140e preferably controls the execution time of the cleaning cleaning being executed based on the latest (immediately) humidity measurement value P. . For this reason, the measurement cycle T ₁₂ is sufficiently short with respect to the predicted execution time. For example, when the predicted execution time is about 10 minutes, the measurement cycle T ₁₂ is 1 second to several tens of seconds. About time is set.

In this embodiment, during cleaning the cleaning run, but the humidity measurement unit 140c is an example of measuring the humidity measurement values P at a predetermined measurement period T _12, but is not limited thereto. For example, the humidity measurement unit 140c may perform the aperiodic measurement instead of periodically measuring the humidity measurement value P during cleaning cleaning, or in addition to periodically measuring the humidity measurement value P. Alternatively, the humidity measurement value P may be measured.

On the other hand, if the result of determination in S214 is that the maximum execution time _Tmax1 has elapsed since the start of cleaning, the humidity sensor 115 will not be sufficiently recovered even if the cleaning and cleaning in progress is further continued ( (It will not return). Therefore, the execution time control unit 140e outputs a control signal to the cleaning device 117 and ends the cleaning cleaning by the cleaning device 117 (S217).

  After S217, the deterioration determination unit 140f executes a deterioration level determination process S300A described later for determining the deterioration level (degree, degree) of the humidity sensor 115.

  On the other hand, as a result of the determination in S215, when the cleaning / cleaning is not continued, that is, when the cleaning / cleaning is ended, the execution time control unit 140e outputs a control signal to the cleaning device 117 and ends the cleaning / cleaning by the cleaning device 117 ( S218).

  After the deterioration level determination process S300 and after S218, the recovery process execution unit 140a ends the deterioration recovery process S200A.

FIG. 14 is a graph showing an example of the humidity measurement value P when it is assumed that the cleaning cleaning execution time is constant. As shown in FIG. 14, when the cleaning cleaning is started at time t ₁₃ as shown in FIG. 14, when the cleaning cleaning is performed at a predetermined execution time T _{r1 as} in the conventional deterioration recovery method, the humidity measurement value P is determined as the time has elapsed. It begins to rise with it. The predetermined execution time from the start of the wash cleaning T _r1 is at time t ₁₄ has elapsed, and ends the washing cleaning. At this time, the humidity measurement value P is almost 100 [%], but may be larger than the initial measurement value P ₀ described above (P> P ₀ ). In this case, since the cleaning cleaning execution time T _r1 is longer than necessary, the usable period (life) of the humidity sensor 115 may be shortened (shortened).

Further, when starting the wash cleaning at time t _15, the humidity measurement values P begins to rise with time. The predetermined execution time T _r1 washed clean from the start at time t ₁₆ has elapsed, and ends the washing cleaning. At this time, the humidity measurement value P may be smaller than the initial measurement value P ₀ described above (P <P ₀ ). In this case, the cleaning cleaning execution time T _r1 is insufficient, and it is erroneously determined that the usable period (life) of the humidity sensor 115 has passed (exhausted) based on the humidity measurement value P after the cleaning cleaning is completed. There is a risk that the humidity sensor 115 that is determined and usable can be replaced.

FIG. 15 is a graph for explaining an example of the humidity measurement value P in the deterioration recovery process S200A shown in FIG. In contrast, the deterioration recovery process S200A of the present embodiment, as shown in FIG. 15, when starting the wash cleaning at time t _13, the humidity measurement values P begins to rise with time. When the humidity measurement value P reaches the first measurement value P ₀ at time t ₁₄ ′ before the predetermined execution time T _r1 elapses from the start of cleaning and cleaning, the execution time control unit 140e determines that the step of S215. Therefore, it is determined that the cleaning cleaning is finished, and the cleaning cleaning can be finished. In this way, by executing the cleaning cleaning execution time based on the humidity measurement value P measured using the humidity sensor 115 during the cleaning cleaning, the cleaning cleaning execution time is set to the predetermined execution time T. It can be made shorter than _r1 , and it is possible to prevent the cleaning cleaning execution time from becoming longer than necessary.

Further, the deterioration recovery process S200A of the present embodiment, when starting the wash cleaning at time t _15, the humidity measurement values P begins to rise with time. Then, at time predetermined execution time cleaning cleaning from start T _r1 has elapsed t _16, since the humidity measurement value P is smaller than the first measured value P _0, the execution time controller 140e continues to wash clean the step S215 Determination and cleaning are continued. Thereafter, when the humidity measurement value P reaches the initial measurement value P ₀ at time t ₁₆ ′, the execution time control unit 140e determines that the cleaning cleaning is to be ended in step S215, and the cleaning cleaning can be ended. It becomes. In this way, by executing the cleaning cleaning execution time based on the humidity measurement value P measured using the humidity sensor 115 during the cleaning cleaning, the cleaning cleaning execution time is set to the predetermined execution time T. It can be longer than _r1 , and it is possible to prevent the cleaning cleaning time from being insufficient.

The deterioration recovery process S200A shown in FIG. 13, in step S215, the execution time controller 140e is compared with the humidity measurement values P measured by the first measurement value P ₀ and S203, the cleaning cleaning based on the comparison result Although the example which determines whether it continues is shown, it is not limited to this. The execution time control unit 140e converts the initial measurement value P ₀ measured using the humidity sensor 115 after the completion of the first cleaning cleaning and the humidity measurement value P measured using the humidity sensor 115 during the cleaning cleaning. Based on this, it is sufficient to determine whether or not to continue cleaning.

That is, for example, after measuring the humidity measurement value P in S203, the execution time control unit 140e calculates a difference ΔP (= | P ₀ −P |) between the initial measurement value P ₀ and the humidity measurement value P. In step S215, the execution time control unit 140e reads the predetermined threshold value ΔP _th1 from the storage unit 140d, compares the predetermined threshold value ΔP _th1 with the calculated difference ΔP, and based on the comparison result. It may be determined whether or not to continue cleaning.

Further, for example, after measuring the humidity measurement value P in S103, the measured humidity measurement value P is set as the initial measurement value P ₀ , and the execution time control unit 140e has a predetermined range (± α ′) from the initial measurement value P _0. Is set as a recovery range W ′ (W ′ = P ₀ ± α ′), and the set recovery range W ′ is written and stored in the storage unit 140d. In step S215, the execution time control unit 140e reads the recovery range W ′ from the storage unit 140d, compares the recovery range W ′ with the humidity measurement value P measured in S203, and performs cleaning based on the comparison result. It may be determined whether or not to continue cleaning.

Further, for example, after measuring the humidity measurement value P in S203, the execution time control unit 140e calculates a difference ΔP (= P ₀ −P) between the initial measurement value P ₀ and the humidity measurement value P. Further, when the humidity measurement value P is measured a plurality of times in the cleaning cleaning being executed according to the determination in S216, the execution time control unit 140e calculates the average value ΔP _av from the humidity measurement values P for n times (n is an integer). . In step S215, the execution time control unit 140e reads the predetermined threshold value ΔP _th1 from the storage unit 140d, compares the predetermined threshold value ΔP _th1 with the calculated average value ΔP _av, and displays the comparison result. Based on this, it may be determined whether to continue or end cleaning.

As described above, the initial measurement value P ₀ that is measured after the completion of the first cleaning and is used as a reference (index) regarding the recovery state (recovery specific) of the humidity sensor 115 and the cleaning value during the cleaning is measured. Based on the humidity measurement value P that indicates the recovery state (recovery state) of the humidity sensor 115 during execution, it is possible to easily determine the recovery state (recovery state) of the humidity sensor 115 during execution of cleaning. In addition, it is possible to more appropriately control the cleaning cleaning execution time.

  Next, an operation in which the humidity measuring apparatus 100A determines the level (degree or degree) of deterioration of the humidity sensor 115 will be described.

  FIG. 16 is a flowchart illustrating an example of an operation in which the humidity measuring apparatus 100A illustrated in FIG. 9 determines the level of deterioration of the humidity sensor 115. As described above, the recovery determination unit 140f executes the deterioration level determination process S300A illustrated in FIG. 16 after S217 illustrated in FIG.

  That is, the deterioration determination unit 140f determines whether the deterioration of the humidity sensor 115 is equal to or lower than a predetermined level (degree, degree) based on the humidity measurement value P measured in S203 illustrated in FIG. 13 (S301). ).

For example, the degradation determining unit 140f from the storage unit 140d reads a predetermined allowable value P _0min, deterioration of the humidity sensor 115 in the case where the humidity measurement values P measured in S203 allowable value P _0min more (P ≧ P _0min) Is less than a predetermined level (degree, degree), and when the humidity measurement value P measured in S203 is smaller than the allowable value P _0min (P <P _0min ), the deterioration of the humidity sensor 115 is a predetermined level (degree). It is determined that the deterioration of the humidity sensor 115 is higher (larger) than a predetermined level (degree, degree).

  As a result of the determination in S301, if the deterioration of the humidity sensor 115 is below a predetermined level (degree, degree), the humidity sensor 115 can be used if the humidity measurement value P is corrected, but the humidity sensor 115 is usable (Life) is considered to be low. Therefore, the deterioration notification unit 140g outputs a control signal to the light emitting unit 133 to light the corresponding light emitter, and notifies that the deterioration of the humidity sensor 115 is at a level close to the replacement time (replacement notice level) (S302). ). As a result, the user (user) can prepare the humidity sensor 115 in advance, for example, and can smoothly replace the future (future) humidity sensor 115.

  Next, the measurement value correction unit 140h calculates a correction value β ′ of the humidity measurement value P based on the humidity measurement value P measured in S203 (S313), and writes the calculated correction value β ′ in the storage unit 140d. (S314). Thereby, for example, the measurement value correction unit 140 h corrects the humidity measurement value P measured using the humidity sensor 115 using the correction value β ′, and outputs the corrected humidity measurement value P ′ to the display unit 132. Can be displayed. Alternatively, the measurement value correction unit 140h may output the corrected humidity measurement value P ′ to the display unit 132 for display instead of outputting the corrected humidity measurement value P ′ to the display unit 132 for display. In addition, the corrected humidity measurement value P ′ can be output to the outside of the humidity measurement apparatus 100A via the digital communication unit 160.

For example, the measurement value correcting unit 140h reads out the first measurement value P ₀ from the storage unit 140d, the correction value from the difference between the humidity measurement values P measured by the first measurement value P ₀ and _{S203 β '(= P 0 -P} ) Is calculated.

On the other hand, as a result of the determination in S301, if the deterioration of the humidity sensor 115 is higher (larger) than a predetermined level (degree, degree), even if the humidity measurement value P measured using the humidity sensor 115 is corrected, the reliability ( (Reliability) is low, and it is considered that the usable period (life) of the humidity sensor 115 has passed (exhausted). Therefore, the deterioration notification unit 140g outputs a control signal to the light emitting unit 133 to turn on the corresponding light emitter, and notifies that the deterioration of the humidity sensor 115 is at a level that has reached the replacement time (replacement time level) ( S305). In this way, when the maximum execution time T _max1 has elapsed from the start of cleaning and cleaning, the deterioration determination process S300A is executed, and when the deterioration of the humidity sensor 115 is higher (larger) than a predetermined level (degree, degree), the humidity sensor Since it is notified that the deterioration of 115 has reached the replacement timing, the deterioration of the humidity sensor 115 is not sufficiently recovered (not returned) even if the cleaning cleaning is further performed, and the humidity measurement value Even if P is corrected, the humidity sensor 115 can be used until it is determined that the reliability (reliability) is low, and the usable period (life) of the humidity sensor 115 can be extended (longened). it can.

  After S314 and after S305, the deterioration determining unit 140f ends the deterioration level determining process S300A.

  In the present embodiment, in the step of S301, the deterioration determination unit 140f has shown an example of determining whether or not the deterioration of the humidity sensor 115 is below a predetermined level (degree, degree), but is not limited to this. For example, the deterioration determination unit 140f may determine the deterioration of the humidity sensor 115 at three or more levels (degrees and degrees).

  In the present embodiment, in the steps of S302 and S305, the degradation notification unit 140g outputs a control signal to the light emitting unit 133 to turn on the corresponding light emitter, but the present invention is not limited to this. For example, instead of outputting the control signal to the light emitting unit 133 to light the corresponding light emitter, the deterioration notification unit 140g outputs the control signal to the light emitting unit 133 to light the corresponding light emitter. In addition, notification data for notifying the deterioration level (degree, degree) of the humidity sensor 115 may be output to the digital communication unit 160. As a result, the external device connected to the humidity measuring device 100A via the digital communication unit 160, for example, the central monitoring device, has a humidity sensor 115 whose deterioration is close to the replacement time (replacement notice level), and humidity. It is possible to notify at least one of the fact that the deterioration of the sensor 115 is the level at which the replacement time has been reached (the replacement time level).

  Thus, according to the humidity measuring apparatus 100A, the deterioration recovery method, and the deterioration recovery program in the present embodiment, cleaning is performed based on the humidity measurement value P measured using the humidity sensor 115 during execution of cleaning. Controls the cleaning execution time. Here, the recovery state (recovery level) of the humidity sensor 115 during execution of the cleaning cleaning appears in the humidity measurement value P measured during the execution of the cleaning cleaning. Therefore, by controlling the cleaning cleaning execution time based on the humidity measurement value P measured using the humidity sensor 115 during the cleaning cleaning, the humidity sensor 115 is recovered according to the recovery state (recovery condition). It is possible to change the cleaning cleaning execution time. Therefore, it is possible to use the humidity sensor 115 by shortening (shortening) the usable period (life) of the humidity sensor 115 by making the cleaning cleaning execution time longer than necessary, or by shortening the cleaning cleaning execution time. It is possible to prevent the humidity sensor 115 from being mistakenly determined that the period (life) has passed (exhausted) and replacing the usable humidity sensor 115, and to determine the usable period (life) of the humidity sensor 115. Can be extended (lengthened).

  Note that the configurations of the above-described embodiments may be combined, or some components may be replaced. The configuration of the present embodiment is not limited to the above-described embodiments, and various modifications may be made without departing from the scope of the present embodiment.

DESCRIPTION OF SYMBOLS 100,100A ... Humidity measuring apparatus 110,110A ... Sensor part 111 ... Case 115 ... Humidity sensor 116 ... Heater 117 ... Cleaning apparatus 130, 130A ... Main-body part 131 ... Case 132 ... Display part 133 ... Light emission part 134 ... Input part 135 ... Humidity signal conversion circuit 136: heater element drive circuit 140, 140A ... control unit 140a ... recovery processing execution unit 140b ... timing unit 140c ... humidity measurement unit 140d ... storage unit 140e ... execution time control unit 140f ... degradation determination unit 140g ... degradation notification unit Unit 140h ... Measurement value correction unit 141 ... A / D converter 142 ... CPU
143 ... ROM
144 ... RAM
145 ... Memory 150 ... Analog output unit 160 ... Digital communication unit 170 ... Power supply unit C ... Cable S100, S100A ... First degradation recovery process S200, S200A ... Degradation recovery process S300, S300A ... Degradation determination process

Claims (11)

A humidity measuring device that performs recovery processing to recover deterioration of a humidity sensor that detects humidity,
Wherein during recovery processing execution, on the basis of the humidity measurement values measured with the humidity sensor, e Bei execution time control unit for controlling the execution time of the recovery process,
The execution time control unit includes a humidity measurement value measured using the humidity sensor after the completion of the first recovery process, and a humidity measurement value measured using the humidity sensor during the execution of the recovery process. Based on whether or not to continue the recovery process,
Humidity measuring device. When a predetermined maximum execution time has elapsed from the start of the recovery process, a level of deterioration of the humidity sensor is determined based on a humidity measurement value measured using the humidity sensor during the execution of the recovery process. A deterioration determination unit;
The humidity measuring device according to claim 1 . Based on the determination result of the deterioration determination unit, further comprising a deterioration notification unit for notifying the level of deterioration of the humidity sensor,
The humidity measuring device according to claim 2 . The recovery process is a heating cleaning that heats the humidity sensor and recovers the deterioration of the humidity sensor.
The humidity measuring device according to any one of claims 1 to 3 . The recovery process is a cleaning cleaning for cleaning the humidity sensor and recovering the deterioration of the humidity sensor.
The humidity measuring device according to any one of claims 1 to 3 . A humidity measuring device that performs recovery processing to recover deterioration of a humidity sensor that detects humidity,
An execution time control unit that controls an execution time of the recovery process based on a humidity measurement value measured using the humidity sensor during the execution of the recovery process;
The recovery process is a cleaning cleaning for cleaning the humidity sensor and recovering the deterioration of the humidity sensor.
Humidity measuring device. A deterioration recovery method for executing a recovery process for recovering deterioration of a humidity sensor that detects humidity,
During execution of the recovery process, on the basis of the humidity measurement values measured with the humidity sensor, including the execution time control step of controlling the execution time of the recovery process,
The execution time control step includes a humidity measurement value measured using the humidity sensor after the completion of the first recovery process and a humidity measurement value measured using the humidity sensor during the execution of the recovery process. Determining whether to continue the recovery process based on:
Degradation recovery method. When a predetermined maximum execution time has elapsed from the start of the recovery process, a level of deterioration of the humidity sensor is determined based on a humidity measurement value measured using the humidity sensor during the execution of the recovery process. A deterioration determination step;
The deterioration recovery method according to claim 7 . A deterioration notification step of notifying the level of deterioration of the humidity sensor based on the determination result of the deterioration determination step;
The deterioration recovery method according to claim 8 . A deterioration recovery method for executing a recovery process for recovering deterioration of a humidity sensor that detects humidity,
An execution time control step for controlling an execution time of the recovery process based on a humidity measurement value measured using the humidity sensor during the execution of the recovery process;
The recovery process is a cleaning cleaning for cleaning the humidity sensor and recovering the deterioration of the humidity sensor.
Degradation recovery method. A deterioration recovery program executed by a humidity measuring device that executes a recovery process for recovering deterioration of a humidity sensor that detects humidity,
Each step in the degradation recovery method according to any one of claims 7 to 10, comprising
Degradation recovery program.

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