JP6126194B2 - Break jig - Google Patents

Description

  The present invention relates to a break jig used for breaking a substrate having a functional region (also referred to as a device region), which is a brittle material substrate such as a semiconductor wafer.

  Patent Document 1 proposes a substrate breaking device that breaks a substrate on which a scribe line is formed by pressing it perpendicularly to the surface along the scribe line from the back surface of the surface on which the scribe line is formed. Hereinafter, an outline of the break by such a break device will be described. It is assumed that a large number of functional regions are formed in alignment on the substrate to be broken. In the case of division, first, scribe lines are formed in the vertical direction and the horizontal direction at equal intervals between the functional areas on the substrate. And it breaks with a break device along this scribe line. Fig.1 (a) has shown sectional drawing of the board | substrate mounted in the breaking apparatus before dividing | segmenting. As shown in this figure, functional regions 101a, 101b and scribe lines S1, S2, S3,... In the case of dividing, an adhesive tape 102 is attached to the back surface of the substrate 101, and a protective film 103 is attached to the surface. In the case of a break, a scribe line to be broken, in this case a scribe line S2, is arranged in the middle of the receiving blades 105 and 106 as shown in FIG. The substrate 101 is pressed. In this way, a break by three-point bending between the pair of receiving blades 105 and 106 and the blade 104 has been performed.

JP 2004-39931 A

  In the substrate breaking device having such a configuration, when the peripheral portion is broken, particularly when the peripheral portion is broken, the substrate moves slightly outward when the blade is pushed down. End up. At this time, the end portion of the substrate easily floats, and may climb on the substrate fixing frame or cause a vacuum leak. For this reason, there is a problem that the position at which the break bar set in advance is shifted from the position of the scribe line, which makes it impossible to break stably. Therefore, it is necessary to move the break blade for a minute interval or reposition the board, which not only takes time to set, but also the functional area may be damaged if it is misaligned. was there.

  The present invention has been made paying attention to such problems, and provides a break jig for allowing a substrate to be broken so that the substrate is not displaced even if the break is repeated. Objective.

To solve this problem, break jig of the present invention, there is provided a break jig for breaking the brittle material substrate having a scribe line, and a base, wherein the brittle material substrate is placed, to Chuo the brittle material having an opening corresponding to the outer shape of the substrate, and a frame-shaped frame members for holding the pre-Symbol brittle material substrate placed on the base, is disposed on top of the frame-like member, the brittle And a pressing member that presses the material substrate from the periphery of the frame-shaped member. The breaking jig of the present invention may have the same shape as the brittle material substrate and may have an elastic member disposed on the base, and the brittle material substrate may be placed on the elastic member. .

  Here, the brittle material substrate has functional regions formed at predetermined pitches in the vertical and horizontal directions, and scribe lines formed in a lattice shape so that the functional regions are located at the center. Has openings arranged at intervals corresponding to the pitch of the functional regions of the brittle material substrate, and the elastic member may have a through hole at a position corresponding to the opening of the base.

  Here, the base may have a protrusion having the same shape as the brittle material substrate, and the opening of the base may penetrate the protrusion.

  Here, the pressing member is a comb-like shape including a central opening smaller than the brittle material substrate and protrusions and slits having a pitch corresponding to the pitch of the functional region of the brittle material substrate from the periphery toward the central opening. The frame-shaped member may have grooves having a pitch corresponding to the pitch of the functional region on the upper surface around the frame-shaped member.

  Here, the elastic member may be a transparent elastic plate having a certain thickness and the same shape as the brittle material substrate.

  When the break jig of the present invention having such a feature is used, the brittle material substrate is positioned and broken by the frame-shaped member and the pressing member of the break jig, so that the substrate is also broken during the break. The position of the end of the lens will not shift. Therefore, even if the break is advanced, positioning is not repeated many times, and an effect that the brittle material substrate can be broken along the scribe line is obtained.

FIG. 1 is a cross-sectional view showing a state of a conventional substrate during a break. FIG. 2 is a front view showing an example of a substrate that is a subject of the break of the present invention. FIG. 3A is a perspective view showing a part of a breaking jig according to the embodiment of the present invention. FIG. 3B is a perspective view showing a part of a breaking jig and a substrate to be broken according to the present embodiment. FIG. 4 is a cross-sectional view showing a state where the substrate is placed on the break jig according to the present embodiment.

In the embodiment of the present invention, as shown in FIG. 2, the substrate 10 to be broken is a substrate on which a large number of functional regions 11 are formed at a constant pitch in a lattice pattern along the x-axis and y-axis in the manufacturing process. To do. The functional area 11 is an area having a function as an LED, for example. In order to divide each functional area into LED chips, the scribe lines S _{y1 to} S _yn and the horizontal scribe lines S _{x1 to} S _yn are arranged so that each functional area is centered by a scribing device. _xm are formed so as to be orthogonal to each other. Accordingly, the pitch of these scribe lines S _{x1 to} S _xm and S _{y1 to} S _{yn is} the same as the pitch of the functional area in the x-axis and y-axis directions.

  Next, the breaking jig of the present embodiment used when breaking the substrate 10 will be described. 3A and 3B are perspective views showing the breaking jig 1 according to the present embodiment. As shown in FIG. 3B, the breaking jig includes a square base 20, an elastic member 30 disposed on the square base 20, a frame-like member 40 that holds the periphery of the elastic member 30 shown in FIG. 3A, and a frame-like member 40 and a pressing member 50 having substantially the same outer diameter. The breaking jig 1 is used to fix the substrate 10 and break the substrate from above with a blade (not shown).

  Next, each member will be described in more detail. The base 20 is made of a transparent member, and the inside thereof is a cavity. At the center of the upper surface of the base 20, a thin protrusion 21 having the same rectangular shape as that of the substrate 10 is provided, and on the surface of the protrusion 21, a large number of openings 22 are provided annularly along a rectangular ridge. All the openings 22 communicate with each other and are connected to a duct 23 provided on the side of the base 20. A large number of openings 24 arranged in the x-axis and y-axis directions are provided inside the openings 22. All of these openings 24 communicate with each other inside, and are connected to the duct 25 on the outer side. These ducts 23 and 25 are connected to a vacuum suction device (not shown).

  Next, the elastic member 30 is an elastic member such as rubber having the same shape as the protrusion 21 and having a certain thickness, and includes a through hole 31 provided along the four surrounding sides and a lattice shape inside thereof. A number of arranged through holes 32 are provided. The through hole 31 is provided at a position corresponding to the opening 22 described above, and the through hole 32 is provided at a position corresponding to each opening 24. Therefore, when the elastic member 30 is placed directly on the protruding portion 21, the positions of the through hole 31 and the opening 22, and the through hole 32 and the opening 24 coincide with each other. The elastic member 30 is preferably a transparent member so that the position of the scribe line of the substrate 10 to be placed can be confirmed from below.

The opening 22 of the base 20 has the scribe lines S _y1 , S _yn at both ends in the vertical direction and the scribe lines at both ends in the horizontal direction when the substrate 10 is accurately aligned and arranged directly above the protrusion 21 and the elastic member 30. Located outside lines S _x1 and S _xm . These openings 22 and through-holes 31 are used for sucking a portion that becomes an end material of the substrate 10 outside each LED chip when breaking along the scribe line.

Further, the openings 24 of the base 20 are arranged so that the scribe lines S _{x2 to} S _{x (m−} ) formed on the substrate 10 are positioned when the substrate 10 is positioned so as to be accurately positioned right above the protrusions 21 and the elastic member 30. ₁₎ , S _{y2 to} S _{y (n−1)} pass through the middle of the adjacent openings 24, and each functional region 11 of the substrate 10 is provided at a position corresponding to each opening 24.

  Next, as shown in FIG. 3A, the frame-like member 40 is a flat plate-like member, and the same rectangular opening 41 as the substrate 10 and the elastic member 30 is provided at the center thereof. Around the frame-shaped member 40, there are a large number of constant depths parallel to the x-axis along the center lines of the through holes 31 and 32 parallel to the x-axis when the elastic member 30 is held in the central opening 41. Grooves 42a and 42b are formed. Further, when the elastic member 30 is held in the opening 41, a plurality of grooves 43a and 43b having a certain depth are formed in parallel to the y axis along the center lines of the through holes 31 and 32 parallel to the y axis. . The thickness of the frame-shaped member 40 corresponds to the sum of the thicknesses of the protruding portion 21 of the base 20, the elastic member 30, and the substrate 10.

Next, the pressing member 50 is a thin flat plate whose outer shape is substantially the same as that of the frame-shaped member 40, and an opening 51 that is slightly smaller than the opening 41 of the frame-shaped member 40 is provided at the center. Combs 52a, 52b, 53a, 53b are formed in which slits and protrusions are alternately provided toward the edge of the opening 51 around the periphery. Slits and pitch of the protrusions of the comb scribe line S _x1 to S _xm of the substrate 10 to be break, the same as the pitch of the S _y1 to S _yn, shall have a constant width.

  When the frame-shaped member 40 and the pressing member 50 are overlapped with the outer periphery being matched, the slits of the comb-shaped portions 52a to 53b and the grooves 42a to 43b of the frame-shaped member 40 correspond to each other. Yes. When the substrate 10 is held in the opening of the frame-shaped member 40, the extension line of the scribe line of the substrate 10 is a position that passes through the groove of the frame-shaped member 40 and the center of the slit of the pressing member 50.

  Now, a case where the substrate 10 is broken using the breaking jig 1 will be described. First, the substrate 10 is scribed as shown in FIG. The scribe may be a blade scribe that rolls a scribing wheel, or a laser scribe using a laser beam.

  Next, as shown in the cross-sectional view of FIG. 4, the base 20 of the breaking jig 1 is disposed in advance on the upper surface of the table 60 of the breaking device. Then, the elastic member 30 is disposed on the protruding portion 21 of the base 20, and the substrate 10 is stacked thereon with the surface on which the scribe line is formed facing down. Then, in a state where the elastic member 30 and the substrate 10 are placed on the protruding portion 21 of the base 20, the frame-like member 40 is placed on the outer side, and then the pressing member 50 is placed. At this time, the lower surface of the frame-shaped member 40 is disposed so as to directly contact the periphery of the base 20 other than the protrusions 21. If it carries out like this, it will position so that a scribe line may be located in the middle of each opening 22. FIG. Now, the holding member 50 and the frame-like member 40 are provided with screw grooves in four directions, and are connected and fixed to the base 20 with screws.

  At this time, since the opening 51 of the pressing member 50 is slightly smaller than the opening 41 of the frame-like member 40, the protrusions of the comb-shaped parts 52 a to 53 b are positioned so as to cover the periphery of the substrate 10. Then, a vacuum suction device (not shown) is operated to suck the periphery of the substrate 10 from the duct 23 and suck the respective functional areas of the substrate from the duct 25 to hold the substrate 10.

At this time, the scribe line of the substrate 10 is confirmed by a CCD camera, an infrared camera, or the like through the transparent base 20 and the elastic member 30 from below, and is pressed from right above the scribe line of the substrate 10 by the blade 61 of the break device. Break. Then, the blade 61 is pushed down at positions corresponding to the slits of the pressing member 50 and the grooves 42a, 42b, 43a, 43b of the frame-like member 40. Therefore, the blade 61 can break the substrate 10 without contacting the pressing member 50 or the frame-shaped member 40. Moreover, since the edge part of the board | substrate 10 is hold | suppressed by the front-end | tip of the protrusion of any comb-shaped part of the holding member 50, the position of the board | substrate divided | segmented at the time of a break does not shift | deviate, but it stays in the original position. Then, by repeating the break along the scribe lines S _{x1 to} S _xm , it is possible to obtain elongated pieces. When the break in the x-axis direction is finished, individual LED chips can be generated by repeating the break along the scribe lines S _{y1 to} S _yn .

Well scribe line _{S x1, S xm, S y1} , but along the S _yn is end member when break occurs, the frame member 40 is held by the pressing member 50, further offcuts also opening 22, through holes Since it is adsorbed by the vacuum adsorbing device via 31, no displacement occurs. As described above, since the positional deviation of the fragments hardly occurs at the time of the break, the break operation can be surely executed.

  In this embodiment, the base 20 is provided with the protrusion 21 having the same shape as the substrate 10. However, if the elastic member 30 is sufficiently thick, the protrusion is not necessarily provided.

  In this embodiment, the break of the substrate in which the functional areas are formed in a lattice shape is described, but the functional areas are not limited. The present invention can also be applied to various brittle material substrates such as LTCC substrates, alumina, aluminum nitride, barium titanate, silicon nitride, and silicone resins.

  In the present invention, when a brittle material substrate having a region to be protected is scribed and broken, even if the end portion is broken, it can be broken without being displaced. it can.

DESCRIPTION OF SYMBOLS 10 Brittle material board | substrate 11 Functional area | region 20 Base 21 Protrusion part 22,24 Opening 23,25 Duct 30 Elastic member 31,32 Through-hole 40 Frame-shaped member 41 Opening 42a, 42b, 43a, 43b Groove 50 Holding member 51 Opening 52a-52d Comb

Claims (1)

Breaking jig for breaking a brittle material substrate having a scribe line,
A base on which the brittle material substrate is placed ;
To Chuo has an opening corresponding to the outer shape of the brittle material substrate, a frame-shaped frame members for holding the pre-Symbol brittle material substrate placed on the base,
A breaker jig comprising: a pressing member disposed on an upper portion of the frame-shaped member and pressing the brittle material substrate from the periphery of the frame-shaped member.