JP5897825B2 - Laser irradiation apparatus and laser irradiation method - Google Patents

Description

The present invention relates to a laser irradiation apparatus and a laser irradiation method capable of scanning laser irradiation whose scanning is limited to one direction of two-dimensional orthogonal coordinates in any direction in the two-dimensional orthogonal coordinate system.

In a laser irradiation apparatus that modifies or processes an irradiation target surface by scanning an elliptical beam or line beam other than a circle, in the conventional scanning direction, the beam minor axis direction (orthogonal coordinate system of X axis and Y axis) The scanning direction is the same direction as either the X direction or the Y method.

For example, according to the beam irradiation apparatus, the beam irradiation method, and the thin film transistor manufacturing method disclosed in Patent Document 1 below, when laser light irradiation is performed using a galvano mirror or a polygon mirror, irradiation unevenness occurs at the end of laser light irradiation. Provided are a laser irradiation apparatus and a laser irradiation method for solving the problems. As a means for solving this problem, uniform laser processing is performed, but the scanning direction of the laser is premised on one direction of an orthogonal coordinate system.

Patent Document 2 listed below is a temperature range that can be used with respect to a substrate having poor heat resistance, and can reduce the time required for sintering or can be completed instantaneously. In providing an electronic device using a dispersion of a compound, according to a new electronic device and a method for manufacturing the same, according to the present invention, "irradiation is performed by scanning the laser irradiation unit while fixing the irradiated object, or laser irradiation unit The object to be irradiated may be moved while fixing is fixed, or a combination of both may be used. However, the scanning direction of the laser irradiation unit and the moving direction of the object to be irradiated are lacking in specificity.

In the prior art including such an example, the direction of laser irradiation has been treated in principle to assume either the X direction or the Y method in the X-axis and Y-axis cross coordinate system.

However, in recent years, there has been an increasing demand for free and descriptive modification of the elliptical beam and line beam on the X-axis and Y-axis planes of the orthogonal coordinate system. The problem of lack of productivity has emerged.

JP 2004-343093 A JP 2006-186138 A

An object of the present invention is to provide a laser irradiation apparatus and a laser irradiation method that meet the demands of the market by solving the problems inherent in the above prior art.

The present invention relates to a laser beam position moving means for moving a scanning position of a laser beam for irradiating an irradiation object between an orthogonal X scanning unit and a Y scanning unit, and a scanning angle (θi) about the laser beam as an optical axis center. A laser beam rotating means for rotating the laser, a microprocessor for controlling the operation of these means, and a memory for storing information related to the control, the scanning direction coincides with the minor axis direction of the laser beam, In a laser irradiation apparatus that scans a laser beam,
  The laser beam position moving means includes an XY stage for placing an irradiation object and moving in the X and Y directions driven by the X scanning unit and the Y scanning unit,
  The laser beam rotating means is an optical head including a laser light source, and rotates the optical axis of the laser beam irradiated to the irradiation object around the rotation center,
  The microprocessor refers to the information stored in the memory, controls the laser beam position moving means by the X scanning unit and the Y scanning unit, and moves the XY stage in the X and Y directions; Control for rotating the laser beam rotating means so that the scanning angle (θi) is calculated from the position path information (Xi, Yi) of the laser beam as shown in Equation 1 and the laser beam minor axis direction coincides with the scanning direction. And
  The memory stores position path information (Xi, Yi), scanning speed information (Vi), and scanning angle (θi) information of a laser beam.

  The present invention also provides a laser beam position moving means for moving the scanning position of the laser beam that irradiates the irradiation object between the X scanning unit and the Y scanning unit that are orthogonal to each other, and a scanning angle ( a laser beam rotating means for rotating θi), a microprocessor for controlling the operation of these means, and a memory for storing information related to the control, and the scanning direction is made to coincide with the minor axis direction of the laser beam. In the laser irradiation method for scanning the laser beam,
  The laser beam position moving means moves the irradiation object placed on the XY stage by an XY stage that is driven by the X scanning unit and the Y scanning unit and moves in the X and Y directions,
  The laser beam rotating means is an optical head including a laser light source, and rotates the optical axis of the laser beam irradiated to the irradiation object around the rotation center,
  The microprocessor refers to the information stored in the memory, controls the laser beam position moving means by the X scanning unit and the Y scanning unit, and moves the XY stage in the X and Y directions; Control for rotating the laser beam rotating means so that the scanning angle (θi) is calculated from the position path information (Xi, Yi) of the laser beam as shown in Equation 1 and the laser beam minor axis direction coincides with the scanning direction. And
  The memory stores position path information (Xi, Yi), scanning speed information (Vi), and scanning angle (θi) information of a laser beam.

As described above, the present invention has many features. Such features are based on the essence of the invention below. That is, according to the present invention, the short axis direction orthogonal to the long axis direction of the laser beam (hereinafter, the most effective line beam for the present invention is used instead of the laser beam as appropriate) is the same as the prior art. The scanning direction of the line beam is used. Here, the line beam according to the present invention is defined such that the projection shape of the laser beam irradiated onto the irradiation object is rectangular, and the aspect ratio of the short axis length to the long axis length is 1 or more. The subscript i according to the present invention is an integer from 1 to N, which means the order of the scanning path.

In the present invention, an XY orthogonal coordinate system that can use the “orthogonal” relationship between the major axis direction and the minor axis direction as it is for an XY stage on which an irradiation object is placed is virtually assumed, and θ related to the scanning direction of the line beam. _i can be calculated using an inverse function. The scanning direction of the line beam based on θ _i can be represented by a displacement vector of the line beam if X _i and Y _i that are parameters of Equation 1 (or 2) are used as position information.
Therefore, the scanning angle (θ _i ) can be easily calculated by presetting the laser beam position path information (X _i , Y _i ) in Equation 1 (or 2).

The scanning direction is also related to the velocity vector. This is because if a virtual XY orthogonal coordinate system is used as a time axis with a change in the position of the laser beam, the velocity vector of the laser beam with respect to the scanning direction of the line beam is obtained.
Therefore, in the present invention, calculation processing can be performed using such a velocity vector in addition to the displacement vector.

In addition, since there is a common “orthogonal relationship” between the scanning direction of the laser beam, the operation of the XY stage on which the irradiation object is placed, and the scanning angle (θ _i ), they are related to each other in the same dimension. Is possible. For example, the scanning direction of the laser beam is projected directly and accurately on the XY stage, the scanning angle (θ _i ) is rotated on the XY stage, and conversely, the scanning of the laser beam set in advance on the XY stage is performed. angle (theta _i) from may be immediately controlled rotation angle of the laser beam rotating means (θ _i). The present invention which pays attention to such an organic relationship with each other can exhibit the following specific functions and effects not found in the prior art.

That is, according to the present invention, in particular, an elliptical beam or line beam other than a circle is used, and the surface of the irradiation object is not limited to one direction in the XY rectangular coordinate system, but is described in any direction and uniform. Laser irradiation with irradiation energy can be performed.
In addition, the laser irradiation direction can be programmed in advance from the above-described “organic relationship with each other”, and the scanning direction can be controlled in real time during the laser irradiation scanning process.

In addition, there is an effect that the efficiency of the laser irradiation process is remarkably improved. For example, in the production of circuit patterns in the telecommunications field and the like, it can be used for drawing and sintering of conductive paste, and productivity is expected to improve.

Furthermore, it is effective for crystallization of TFT amorphous silicon, and crystal processing can be selectively performed only at a portion where a transistor is formed. Therefore, there is no waste and it is very efficient.
It is also an effective technique for mold laser fusion, laser ultraviolet curing, and metal processing.

It is the schematic of the laser irradiation apparatus which concerns on embodiment of this invention. It is a figure which shows the scanning direction of a line beam. It is a figure which shows the relationship between a line beam and a scanning direction. It is a figure explaining the function of a dove prism. It is a figure which shows the relationship between the scanning path | route of a line beam, and rotation of a line beam. It is the schematic of the principal part of the other laser irradiation apparatus which concerns on embodiment of this invention. It is a figure which shows the example of a line beam scanning locus | trajectory. It is an operation | movement flowchart of the laser irradiation apparatus by this invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic diagram of a first laser irradiation apparatus according to an embodiment of the present invention. The laser irradiation apparatus 1 of the first embodiment of the present invention is a line beam rotating unit 2 corresponding to a laser rotating unit, and a laser position moving unit that controls scanning of the line beam 3 in an orthogonal coordinate system composed of X and Y. Microprocessor (MPU) for controlling the corresponding X scanning unit 4 and Y scanning unit 5, the X linear motor 6 serving as a drive source for the X scanning unit 4, and the Y linear motor 7 serving as a drive source for the Y scanning unit 5. 8, F program, a memory 9 for storing input / output data used in the program, a rotation motor 10 for rotating the line beam rotating unit 2 under the control of the MPU 8, and between the MPU 8 and the line beam rotating unit 2, A laser diode (LD) 11 that emits a laser under control, a collimator lens 12 that converts laser light emitted from the LD 11 into parallel light, a laser diode The falling mirror 13 for guiding the laser light emitted from the laser beam rotating unit 2 to the irradiation target 15, the objective lens 14 for condensing the laser light, the irradiation target 15, and the X scanning unit 4 and the An XY stage 16 that operates in the X or Y direction by the control of the Y scanning unit 5 is provided. F 1 and F 2 are the optical axes of the line beam 3.

In FIG. 1, θ is a rotation angle when the line beam 3 rotates about the optical axis F2 (also F1). The line beam 3 which irradiates the irradiation target object 15 has shown the state rotating in the arrow direction of FIG.

The line beam rotating unit 2 is a rotating body for forming the rotation angle θ of the line beam 3. The line beam rotating unit 2 is set so that when the line beam rotating unit 2 rotates by θ °, the line beam 3 has the same rotation angle θ of θ °. Since the scanning direction of the line beam 3 in FIG. 1 coincides with the X direction as shown in FIG. 2, θ is 0 (zero).

FIG. 2 is a diagram showing the scanning direction of the line beam 3. The scanning direction P1 irradiates the surface of the irradiation target 15 perpendicular to the line beam 3 from the objective lens 14 that condenses the laser light. In the figure, the scanning direction P1 is the X direction.

FIG. 3 is a diagram showing the scanning direction of the line beam 3 in FIG. 2 in more detail in relation to the major axis direction (3a) and the minor axis direction (3b) of the line beam 3. The scanning direction P2 is the same as the short axis direction (3b) of the line beam 3. That is, it is orthogonal to the major axis direction (3a). This relationship applies to all scanning directions of the line beam 3 of the present invention.

In the laser irradiation apparatus 1 of the first embodiment, the line beam rotating unit 2 is strongly related to θ. The rotation angle of the line beam rotating unit 2 is directly the rotation angle of the line beam 3 in the scanning direction, and if the scanning speed of the line beam 3 is taken into consideration, it is necessary to transmit this rotation angle accurately and at high speed. is there.
Therefore, as a specific example, a dove prism (also referred to as an image rotation prism) 17 as shown in FIG. 4 is used in order to fully demonstrate the function of the line beam rotating unit 2 that rotates about the optical axis (F1). It is preferable to provide. Therefore, the Dove prism 17 will be outlined here.

FIG. 4 is a diagram for explaining the function of the Dove prism 17. In general, the Dove prism 17 rotates the transmitted image (laser light) at twice the speed when the prism is rotated. The laser beam incident at an incident angle of 45 ° is totally reflected by the bottom surface of the prism and passes through the prism.
In FIG. 4, the incident line beam 31 is refracted in the arrow direction F3a when incident on the incident surface 17a along the optical axis F3 of the Dove prism 17 as incident light, reflected by the prism bottom surface 17b, proceeds in the arrow direction F3b, and is emitted. In the surface 17c, it is radiate | emitted by the same optical axis F4 as the incident light (The optical axis F4 and the optical axis F3 are the same optical axes). Therefore, when the dove prism 17 is rotated in the arrow direction R1, an output line beam rotated by the rotation angle of the dove prism 17 is emitted. In the line beam rotating unit 2 equipped with the dove prism 17, the laser light emitted from the LD 11 is output as a beam rotated by the rotation angle θ of the line beam rotating unit 2. The rotation angle θ is controlled by the MPU 8 and is the same as the rotation angle θ of the line beam 3 that irradiates the irradiation object 15.

In the description through FIGS. 1 to 4, the line beam 3 having the most remarkable aspect ratio among the laser beams is used. This is because the light beam can most effectively utilize the features of the present invention. Therefore, for example, an elliptical beam other than a circle may be replaced with the line beam 3, and the same effects of the present invention as the line beam 3 can be obtained.

Next, the scanning path of the line beam 3 in the laser irradiation apparatus 1 will be described below with reference to FIGS. FIG. 5 is a diagram showing the relationship between the scanning path of the line beam and the rotation of the line beam.

Various data indispensable for the operation of the laser irradiation apparatus 1 are previously stored in the memory 9 and stored. In addition, a program necessary for control and arithmetic processing of the MPU 8 is also stored. Here, the various data are, for example, all elements (θi, Xi, Yi, Vi) necessary for the calculation of the mathematical formulas (Mathematical Formula 1, Formula 2). Xi and Yi are position elements related to the scanning coordinates in the scanning direction, and Vi is a speed element in the scanning direction.

(Move the line beam 3 to the origin)
First, the stage moves the line beam 3 to the origin position. The origin position is a position (scanning coordinates (0, 0) in FIG. 5) on the irradiation target 15 for preparation for starting the line beam 3. Since the irradiation object 15 is placed on the XY stage 16, in order to move the line beam 3 to the origin, the XY stage 16 may be moved and positioned. The laser position moving means that moves between the X scanning section and the Y scanning section is that the X scanning section and the Y scanning section are substantial position moving means, but the irradiation object 15 does not move directly, but the XY stage 16. Is moved to move the irradiation object 15, and as a result, the line beam 3 is irradiated with the irradiation object 1.
5 is moved on the irradiation object 15 in a relative relationship with 5.
Therefore, based on the output signal from the MPU 8, the X linear motor 6 and the Y linear motor 7 are driven and the associated X scanning unit 4 and Y scanning unit 5 are operated to adjust the movement of the line beam 3 to the origin position. . Since the major axis direction of the line beam 3A at this time is determined in advance (by the control signal from the MPU 8 as a result of the arithmetic processing using the elements (θi, Xi, Yi, Vi) stored in the memory 9). the scanning direction of the beam 3A also determined inevitably (V ₀ direction in FIG. 5). Note that the scanning coordinates (0, 0) are not the irradiation object 15 but the origin with respect to the XY stage 16. It is not the start position for starting scanning of the line beam 3A.

(Line beam 3 irradiation start position and scanning direction)
Scanning coordinates (X which are specific position information of the position route information (X _i , Y _i ) in FIG. 5
₁ , Y ₁ ). Line beam 3A to _{V 0} direction, moving the irradiation target object 15 top to scanning coordinates _(X 1, _{Y 1).}

For this purpose, the X linear motor 6 and the Y linear motor 7 are driven based on the output signal from the MPU 8 and the interlocking X scanning unit 4 and Y scanning unit 5 are operated to scan the line beam 3A with the scanning coordinates (X ₁ , Y ₁ ).
At the same time as the line beam 3A moves to the scanning coordinates (X ₁ , Y ₁ ), the LD 11 is activated based on the output signal from the MPU 8, and the emitted laser light enters the collimating lens 12 that travels on the optical axis F1 and collimates. The outgoing beam is incident on the dove prism 17 of the line beam rotating unit 2. The line beam rotating unit 2 is also rotated by the rotation angle θ _{1 at} which the rotation is started by driving the rotary motor 10 activated based on the output signal from the MPU 8.
The line beam 3 rotated by θ ° is refracted downward by the falling mirror 13 and enters the objective lens 14 along the optical axis F2, and the output beam is operated in the X or Y direction of the XY orthogonal coordinate system. 16 enters the system for irradiating the surface of the irradiation object 15 placed on 16. The conventional line beam 3A at the scanning coordinate A (X ₁ , Y ₁ ) is rotated by the rotation angle θ ₁ to become a line beam 3B. The rotation angle θ _{1 in the} figure is based on the X axis of the XY orthogonal coordinate system. The scanning direction of the line beam 3B at the scanning coordinates (X ₁ , Y ₁ ) is the direction of V ₁ . V ₁ was a speed of up to line beam 3B is moved to the next position, the arrow tip of V ₁ was, the movement position of the line beam 3B.

(Position and scanning direction after starting irradiation of line beam 3)
Based on the output signal from the MPU 8, the LD 11 is activated. In the scanning coordinates (X _i , Y _i ), the line beam 3B is scanned with i = 1. The line beam reaches the scanning coordinates (X ₂ , Y ₂ ) as specific position information of the position path information (X _i , Y _i ).
Scanning direction of the line beam 3C at this point is V ₂ direction, the scanning angle is theta _2.

Thereafter, the process proceeds to the last scanning coordinate (X _N , Y _N ) in the scanning coordinate (X _i , Y _i ) in the same procedure. This operation ends when i = N is reached. The line beam 3 is moved to the origin position.

In FIG. 5, the scanning coordinates (X ₁ , Y ₁ ), the scanning coordinates (X ₂ , Y ₂ ), and the subsequent scanning coordinates (X _i , Y _i ) are “predetermined movement positions” of the present invention. In the scanning coordinates, the scanning direction and the scanning speed are calculated according to Formula 1 (Formula 2) so that the irradiation line diagrammed in advance in the circuit development design or the like is established, and the scanning path (scanning trajectory) is determined. The scanning speed is generally a high-speed constant speed (for example, a maximum of 1 m / S), but may be set so as to shift at a position having a “predetermined movement position”.
The beam angle θ _i of the line beam 3 (3A) may be calculated in real time by the MPU 8 during the scanning of the line beam 3 (3A).
Further, the beam angle θ _i can be calculated by determining numerical values of X _i and Y _i if they are parameters in the position path information (X _i , Y _i ). If speed information Vi is used as a parameter, {Y _{I + 1} −Y _I / X _{I + 1} −X _I } is determined by setting a specific numerical value for Vi. Therefore, the beam angle θ _i can be calculated by determining the numerical value of either X _i or Y _i . The beam angle θ _i can be numerically set in advance, and Vi, X _i, or Y _i can be obtained by setting partial numerical values of parameters in a similar manner.

Here, the line beam 3 (3A, 3B,..., 3 _i ) is located between the predetermined movement positions, and the laser output value is changed between arbitrary movement positions without limiting the laser output to a constant value. May be. Further, the laser output may be stopped (mainly intermittently stopped) between arbitrary movement positions.
Further, the predetermined movement position may be outside the irradiation object 15 without remaining in the irradiation object 15.
Further, with respect to scanning, in the present invention, not only the above-mentioned predetermined movement positions are continuously scanned, but also a line having the same scanning angle (θ ₁ ) in the drawing path is collectively scanned and then newly scanned. Alternatively, a line having a different scanning angle (θ _1+! ) _{May be} collectively processed, and thereafter the same batch processing may be repeated to connect the drawing paths. Each of the above methods is also applied as it is to the invention described below.

Next, a second laser irradiation apparatus 1A according to another embodiment of the present invention will be described with reference to FIG. FIG. 6 is a schematic view of the main part of the laser irradiation apparatus 1A for rotating the optical head.

In the laser irradiation apparatus 1A of the present invention, the beam angle θ _i forming means including the line beam 3 that forms the main part of the laser irradiation apparatus 1 is accommodated in the optical head 18, and the optical head 18 is rotated to thereby adjust the beam angle. This is an apparatus for forming θi. Other components are the same as those of the laser irradiation apparatus 1.

The optical head 18 includes a laser diode (LD) 11A, a collimating lens 12A that collimates laser light emitted from the LD 11A, and an objective lens 14A, and rotates about the optical axis F5. The laser beam emitted from the LD 11A irradiates the irradiation target 15A with the line beam 3A.

In the laser irradiation apparatus 1A, the laser diode (LD) 11A is used as a laser light source. However, the laser irradiation apparatus 1A is not limited to this, and may be a YVO ₄ laser, a YAG laser, an Ar laser, or an excimer laser (laser irradiation). The same applies to the device 1).

The optical head 18 rotates under the control of the rotation motor 10A. When the optical head 18 rotates clockwise by θ °, the beam angle of the line beam 3A that irradiates the irradiation target 15A placed on the XY stage 16A also rotates clockwise by θ °.

As described above, even in the laser irradiation apparatus 1A, it functions in the same manner as the laser irradiation apparatus 1 and produces the same effects.

The laser irradiation apparatus 1 and the laser irradiation apparatus 1A of the present invention described above are irradiated objects 15 (by the combined operation of the laser head rotation operation and the workpiece movement operation (substantially movement of the XY stage 16). 15A) is a device that can scan the line beam 3 (3A) in the free direction.

However, the present invention is not limited to such a device. That is, for example, one or both of the X scanning unit 4 and the Y scanning unit 5 may be a galvanometer mirror (not shown) that changes the irradiation direction of the laser light. This apparatus is a laser irradiation apparatus that skillfully uses a mirror for laser light. By using two galvanometer mirrors and an fθ lens, the work is not moved (substantially, the XY stage 16 is moved). The position of the line beam 3 (3A) on the irradiation object 15 (15A) can be directly moved.

Furthermore, either one or both of the X scanning unit 4 and the Y scanning unit 5 may be a device that moves the optical head.
Further, the X scanning unit 4 and the Y scanning unit 5 may be configured as a combination of galvanometer mirror scanning and optical head movement.

According to the present invention such as the laser irradiation apparatus 1 or the laser irradiation apparatus 1A described above, the scanning trajectory of the line beam 3 (3A) can take a free scanning direction. FIG. 7 is a diagram showing an example of the scanning trajectory of such a line beam.
The line beams 33 to 38 indicate the position of the main line beam in the scanning locus, and the scanning directions P3 and P4 indicate the scanning locus. The perspective portions PP3 and PP4 indicate the irradiation widths of the line beams 33 to 38.
The scanning direction is not limited to a linear direction, and a scanning trajectory in a flexible bending direction (FIG. 7A) or a curved direction (FIG. 7B) can be created.

Next, the operation of the laser irradiation apparatus 1 of this embodiment will be summarized with reference to the flowchart shown in FIG.

In the start of FIG. 8, the scanning coordinates (X _i , Y _i ) and the scanning speed (V _i ) are input. Here, i is an integer of 1 to N (S101).
Then, the MPU 8 performs arithmetic processing based on the calculation formula 1 and the calculation formula 1A input from the memory 9, and calculates the scanning angle (θi) (S102). The processing here is performed by using a PC (personal computer) (not shown) connected to the MPU 8 to scan coordinates (X
After calculating the input of _i , Y _i ) and scanning speed (V _i ) and the scanning angle (θ _i ), these may be transferred to the memory 9 as scanning data. The rotation angle (θ _i ) of the line beam 3 may be calculated in real time by the MPU 8 during the scanning of the line beam 3.

Scan data (X _i , Y _i, V _i, θ _i) calculated by the MPU 8 is stored in the memory 9 (S103).

When the above preparation is completed, the laser irradiation apparatus 1 starts driving.
The scanning switch is turned “ON” (S104). Then, the MPU 8 instructs the XY stage 16 to move, and the line beam 3 moves to the scanning coordinate (0, 0) which is the origin coordinate of the scanning coordinate (Xi, Yi) (S105). Subsequently, the MPU 8 takes in the scan data (X _i , Y _i, V _i, θ _i) ) from the memory 9 and instructs the XY stage 16 and the line beam rotating unit 2 to rotate by the rotation angle (θ ₁ ).
In response to this instruction, the line beam 3 moves to the scanning coordinates (X ₁ , Y ₁ ), and the line beam 3 is also rotated by the rotation angle (θ ₁ ) to the line beam rotating unit 2 (S106).

Subsequently, the laser emission is turned “ON” (S107). Each parameter in the scan data (X _i , Y _i, V _i, θ _i) ) is set to i = 1 (S108). Then, the MPU 8 takes in the scan data (X _i , Y _i, V _i, θ _i ) from the memory 9 and instructs the XY stage 16 to operate, so that the line beam 3 scans to the scan coordinates (X ₂ , Y ₂ ). It moves at a speed (V ₁ ) (S109).

Further, the MPU 8 fetches the scan data (X _i , Y _i, V _i, θ _i ) from the memory 9,
The line beam rotation unit 2 is instructed to rotate by the rotation angle (θ ₂ ) (S110).

The MPU 8 determines i <N (S111). If i <N, it is determined that the line beam 3 has not reached the predetermined scanning coordinates (Xi, Yi), and the process returns to S109. When under this condition, this step continues iteratively. On the other hand, when it is determined that i <N is not satisfied, it is assumed that i = N, and the laser emission is turned “OFF” (S112). The desired laser irradiation ends.

When the MPU 8 instructs the XY stage 16 to operate, the line beam 3 moves to the scanning coordinates (0, 0) that are the origin coordinates (S113).

1: Laser irradiation device, 2: Line beam rotating unit (laser beam rotating means),
3: Line beam,
4: X scanning unit (laser beam position moving means),
5: Y scanning section (laser position moving beam means), 6:
X linear motor,
7: Y linear motor, 8: MPU, 9: Memory,
10: Rotation motor, 11: LD, 15: Object to be irradiated, 16: XY stage 17: Dove prism, 18: Optical head

Claims (2)

Laser beam position moving means for moving the scanning position of the laser beam that irradiates the irradiation object between the X scanning unit and the Y scanning unit that are orthogonal to each other, and a laser that rotates the scanning angle (θi) around the optical axis of the laser beam A beam rotating means, a microprocessor for controlling the operation of these means, and a memory for storing information related to the control are provided, the scanning direction is made to coincide with the minor axis direction of the laser beam, and the laser beam is scanned. In the laser irradiation device to be
The laser beam position moving means includes an XY stage for placing an irradiation object and moving in the X and Y directions driven by the X scanning unit and the Y scanning unit,
The laser beam rotating means is an optical head including a laser light source, and rotates the optical axis of the laser beam irradiated to the irradiation object around the rotation center,
The microprocessor refers to the information stored in the memory, controls the laser beam position moving means by the X scanning unit and the Y scanning unit, and moves the XY stage in the X and Y directions; Control for rotating the laser beam rotating means so that the scanning angle (θi) is calculated from the position path information (Xi, Yi) of the laser beam as shown in Equation 1 and the laser beam minor axis direction coincides with the scanning direction. And
The laser irradiation apparatus , wherein the memory stores position path information (Xi, Yi), scanning speed information (Vi), and scanning angle (θi) information of a laser beam. Laser beam position moving means for moving the scanning position of the laser beam that irradiates the irradiation object between the X scanning unit and the Y scanning unit that are orthogonal to each other, and a laser that rotates the scanning angle (θi) around the optical axis of the laser beam A beam rotating means, a microprocessor for controlling the operation of these means, and a memory for storing information related to the control are provided, the scanning direction is made to coincide with the minor axis direction of the laser beam, and the laser beam is scanned. In the laser irradiation method to make
  The laser beam position moving means moves the irradiation object placed on the XY stage by an XY stage that is driven by the X scanning unit and the Y scanning unit and moves in the X and Y directions,
  The laser beam rotating means is an optical head including a laser light source, and rotates the optical axis of the laser beam irradiated to the irradiation object around the rotation center,
  The microprocessor refers to the information stored in the memory, controls the laser beam position moving means by the X scanning unit and the Y scanning unit, and moves the XY stage in the X and Y directions; Control for rotating the laser beam rotating means so that the scanning angle (θi) is calculated from the position path information (Xi, Yi) of the laser beam as shown in Equation 1 and the laser beam minor axis direction coincides with the scanning direction. And
  The laser irradiation method, wherein the memory stores position path information (Xi, Yi), scanning speed information (Vi), and scanning angle (θi) information of a laser beam.