JP5892419B2 - Touch panel sensor - Google Patents

Description

  The present invention relates to a touch panel sensor.

  Today, touch panel devices are widely used as input means. The touch panel device includes a touch panel sensor, a control circuit that detects a contact position on the touch panel sensor, wiring, and an FPC (flexible printed circuit board). In many cases, the touch panel device is used together with the display device as an input means for various devices including a display device such as a liquid crystal display or a plasma display (for example, a ticket vending machine, an ATM device, a mobile phone, a game machine). ing. In such a device, the touch panel sensor is disposed on the display surface of the display device, thereby enabling the touch panel device to perform a very direct input to the display device. The area | region which faces the display area of the display apparatus among touch panel sensors is transparent, This area | region of a touch panel sensor comes to comprise the active area which can detect a contact position (approach position).

  The touch panel device can be classified into various types based on the principle of detecting a contact position (approach position) on the touch panel sensor. In recent years, capacitive touch panel devices have attracted attention because they are optically bright, have good design properties, have a simple structure, and are superior in function. In a capacitively coupled touch panel device, a strange capacitance is newly generated when an external conductor (typically a finger) whose position is to be detected contacts (approaches) the touch panel sensor via a dielectric. The position of the external conductor on the touch panel sensor is detected using the change in capacitance. The capacitive coupling method includes a surface type and a projection type, but the projection type is attracting attention because it is suitable for multi-touch recognition (multi-point recognition).

  A projected capacitively coupled touch panel sensor includes a dielectric and a sensor electrode formed on the dielectric. Typically, the sensor electrode includes a plurality of detection patterns extending in a predetermined direction and having conductivity. The detection pattern is generally made of a transparent conductive material having translucency and conductivity. In such a touch panel sensor, a detection pattern approached by an external conductor is generated based on an electromagnetic change or a change in capacitance that occurs when an external conductor (typically a finger) approaches the touch panel sensor. Thus, the position of the outer conductor is detected.

  In order to reduce the electrical resistance value of the detection pattern, it has been proposed to use a metal material such as silver having higher conductivity than the transparent conductive material as a material constituting the detection pattern (for example, Patent Document 1). ). When the detection pattern is made of a metal material, an opening for transmitting image light from the display device at an appropriate ratio is formed in the detection pattern. For example, the detection pattern is arranged in a mesh shape and is constituted by a conductive wire made of a metal material.

JP 2010-277392 A

  As described above, when the detection pattern is composed of metal conductive wires arranged in a mesh pattern, the light transmittance in the detection pattern is a portion where such a conductive wire is not provided by the area occupied by the conductive wire. It is lower than On the other hand, a predetermined gap is provided between two adjacent detection patterns to prevent the detection patterns from being electrically connected. In this case, the transmittance in the detection pattern and the transmittance in the gap between the detection patterns are greatly different. As a result, the detection pattern becomes conspicuous, and this may impair the design of the touch panel sensor.

  An object of this invention is to provide the touch panel sensor which can solve such a subject effectively.

  The present invention provides a first support pattern, a plurality of first detection patterns provided on a surface on one side of the support and extending in a first direction, and a first surface on the one side of the support. A first dummy pattern arranged with a predetermined first gap between the detection patterns and extending in a first direction, wherein the first detection pattern and the first dummy pattern are light-shielding and conductive wires. And it is a touch panel sensor comprised from the conducting wire arrange | positioned by the predetermined pattern on the surface of the one side of the said support body so that an opening part may be formed between each conducting wire.

  In the touch panel sensor according to the present invention, preferably, the width of the first gap is in the range of 2 to 1000 μm.

  In the touch panel sensor according to the present invention, the conducting wires constituting the first detection pattern and the first dummy pattern are arranged such that the first gap has a shape extending irregularly in a zigzag manner along the first direction. May be.

  In the touch panel sensor according to the present invention, the conductive wire constituting the first detection pattern may be provided with a plurality of cuts within a range in which conductivity in the first direction is not lost.

  In the touch panel sensor according to the present invention, a plurality of second detection patterns provided on a surface on the other side of the support and extending in a second direction orthogonal to the first direction, and a surface on the other side of the support In the above, a second dummy pattern may be further provided, which is disposed with a predetermined second gap between the second detection patterns and extends in the second direction. In this case, the second detection pattern and the second dummy pattern are light-shielding and conductive conductors on the surface on the other side of the support so that an opening is formed between the conductors. It is comprised from the conducting wire arrange | positioned by the predetermined pattern.

  In the touch panel sensor according to the present invention, preferably, the width of the second gap is in the range of 2 to 1000 μm.

  In the touch panel sensor according to the present invention, the conductive wire constituting the second detection pattern and the second dummy pattern may have a shape in which the second gap irregularly extends in a zigzag manner along the second direction. Good.

  In the touch panel sensor according to the present invention, the conductive wire constituting the second detection pattern may be provided with a plurality of cuts within a range in which conductivity in the second direction is not lost.

  In the touch panel sensor according to the present invention, the conductive wires constituting the first detection pattern and the first dummy pattern are disposed so as to overlap the second gap when viewed from the normal direction of the support, and the second detection pattern The conductive wire constituting the pattern and the second dummy pattern may be arranged so as to overlap the first gap when viewed from the normal direction of the support.

  In the touch panel sensor according to the present invention, the conductors constituting the first detection pattern and the first dummy pattern are arranged such that the openings formed between the conductors are regularly arranged at a predetermined first arrangement pitch. The conductors constituting the second detection pattern and the second dummy pattern are arranged such that the openings formed between the conductors are regularly arranged at the same second arrangement pitch as the first arrangement pitch. It may be.

  In the touch panel sensor according to the present invention, when viewed from the normal direction of the support, the conductive wires constituting the second detection pattern and the second dummy pattern are a predetermined distance smaller than the first arrangement pitch. The first detection pattern and the first dummy pattern may be arranged so as to be shifted with respect to the conducting wire.

  According to the present invention, the touch panel sensor is provided on the support, the surface on one side of the support, the plurality of first detection patterns extending in the first direction, and the surface on the one side of the support. And a first dummy pattern which is arranged with a predetermined first gap between each first detection pattern and extends in the first direction. Here, the first detection pattern and the first dummy pattern are light-shielding and conductive conductors, and a predetermined pattern is formed on the surface on one side of the support so that an opening is formed between the conductors. It is comprised from the conducting wire arrange | positioned by. In this way, by providing the first dummy pattern on the same plane as the first detection pattern, the first detection pattern is prevented from being visually recognized by the observer while ensuring the degree of freedom in designing the first detection pattern. be able to.

FIG. 1 is a plan view showing a touch panel sensor according to an embodiment of the present invention. FIG. 2A is an enlarged plan view showing one side of the touch panel sensor shown in FIG. 1. 2B is an enlarged plan view showing a part surrounded by a frame line IIB in the touch panel sensor shown in FIG. 2A. 3 is an enlarged plan view showing the other side of the touch panel sensor shown in FIG. 4 is a cross-sectional view of the touch panel sensor shown in FIG. 2A as viewed from the direction of the IV-IV line. FIG. 5 is a cross-sectional view of the touch panel sensor shown in FIG. 2A as viewed from the direction of the VV line. 6 is a cross-sectional view of the touch panel sensor shown in FIG. 2A viewed from the VI-VI line direction. 7A to 7H are diagrams showing a method for designing the first gap. FIG. 8 is a flowchart illustrating a method for manufacturing a touch panel sensor. FIG. 9A is a diagram showing a step of providing a photosensitive layer on a laminate. FIG. 9B is a diagram showing a step of exposing the photosensitive layer. FIG. 9C is a diagram showing a step of developing the photosensitive layer. FIG. 9D is a diagram showing a process of patterning the light-shielding conductive layer. FIG. 9E is a diagram showing a step of removing the photosensitive layer. FIG. 10 is a plan view showing a touch panel sensor in a comparative form. FIGS. 11A to 11G are views showing a first modification of the gap design method. FIGS. 12A to 12G are views showing a second modification of the gap design method. FIGS. 13A to 13H are views showing a third modification of the gap design method. FIG. 14 is a diagram showing a modification of the first detection pattern. FIGS. 15A and 15B are diagrams showing examples of the positional relationship of the second detection pattern with respect to the first detection pattern. 16 (a) and 16 (b) are views showing a modification of the method for forming the extraction pattern and the terminal portion of the touch panel sensor. FIGS. 17A and 17B are views showing a modification of the method for forming the detection pattern of the touch panel sensor.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 9E. First, the entire capacitively coupled touch panel sensor 10 according to the present embodiment will be described with reference to FIG.

Touch panel sensor The touch panel sensor 10 is provided on the observer side of a display device (not shown) such as a liquid crystal display, a plasma display, or an organic EL display. By combining the display device and the touch panel sensor 10, an input / output device is provided that can provide image light to the observer and detect the contact position or the approach position of an external conductor such as the observer's finger. The FIG. 1 is a plan view showing a case where such a touch panel sensor 10 is viewed from one side (for example, an observer side).

  As shown in FIG. 1, the touch panel sensor 10 is provided with a support 11 having a surface 11 a on one side and a surface 11 b on the other side, and a predetermined pattern on the support 11. Detection patterns 21, 26, extraction patterns 23, 28 electrically connected to the detection patterns 21, 26, respectively, and signals from the detection patterns 21, 26 transmitted via the extraction patterns 23, 28. And terminal portions 24 and 29 for taking out to the outside. Specifically, a plurality of first detection patterns 21 extending in a first direction (for example, the x direction shown in FIG. 1) are provided on the surface 11a on one side (for example, the observer side) of the support 11, and each first A first extraction pattern 23 connected to the detection pattern 21 and a first terminal portion 24 disposed near the outer edge of the support 11 and connected to the first extraction pattern 23 are provided. Further, on the other side (for example, the display device side) of the support 11, a plurality of second detection patterns 26 extending in a second direction (for example, the y direction shown in FIG. 1) orthogonal to the first direction, and each second A second extraction pattern 28 connected to the detection pattern 26 and a second terminal portion 29 arranged near the outer edge of the support 11 and connected to the second extraction pattern 28 are provided. In FIG. 1, the components provided on one side of the support 11 are represented by solid lines, and the components provided on the other side of the support 11 are represented by dotted lines.

  As shown in FIG. 1, the first dummy pattern 22 is disposed between the first detection patterns 21 on one side of the support 11. On the other side of the support 11, a second dummy pattern 27 is disposed between the second detection patterns 26. The dummy patterns 22 and 27 will be described in detail later.

  As will be described later, the first detection pattern 21 and the first dummy pattern 22 are provided on one surface 11a of the support 11 so that they are located on the same plane. Similarly, the second detection pattern 26 and the second dummy pattern 27 are provided on the other surface 11b of the support 11 so that they are located on the same plane. Here, “provided on one surface 11 a of the support 11” means that the first detection pattern 21 and the first dummy pattern 22 are directly provided on the one surface 11 a of the support 11. This is a concept that includes not only the case where the first detection pattern 21 and the first dummy pattern 22 are provided on a plane separated from the surface 11a by a certain distance. That is, as long as the first detection pattern 21 and the first dummy pattern 22 are located on the same plane, the surface 11a on one side of the support 11 is between the first detection pattern 21 and the first dummy pattern 22. Some flat layer may be interposed. Similarly, “provided on the other surface 11 b of the support 11” means that the second detection pattern 26 and the second dummy pattern 27 are provided directly on the other surface 11 b of the support 11. This is a concept that includes not only the case where the second detection pattern 26 and the second dummy pattern 27 are provided on a plane separated from the surface 11b by a certain distance.

As shown in FIG. 1, the area of the touch panel sensor 10 is a display area A ₁ where an image of image light from a display device is displayed. Detection patterns 21 and 26 for detecting a touch, and dummy patterns 22 and 27. There a display area _{a 1} that is arranged, is formed outside the display area _{a 1,} a non-display area _{a 2} of extraction patterns 23 and 28 and the terminal portions 24 and 29 are disposed, is partitioned into. Non-display area A ₂ has a region where an image is not displayed.

(First detection pattern)
Next, the shapes of the detection patterns 21 and 26 and the dummy patterns 22 and 27 when the touch panel sensor 10 is viewed from the normal direction of the touch panel sensor 10 will be described with reference to FIGS. 2A and 3. 2A is an enlarged plan view showing the touch panel sensor 10 when viewed from one side, and FIG. 3 is an enlarged plan view showing the touch panel sensor 10 when viewed from the other side. First, the first detection pattern 21 will be described with reference to FIG. 2A.

  In general, in a touch panel sensor, a detection pattern is provided to detect an electromagnetic change or a change in capacitance that occurs when an external conductor approaches the touch panel sensor. Therefore, the detection pattern is required to have a conductivity sufficient to allow a current caused by an electromagnetic change or a change in capacitance to flow at a detectable level. Conventionally, as a material for constituting such a detection pattern, a light-shielding and conductive metal material such as silver alloy, and a transparent and conductive transparent conductive material such as indium tin oxide (ITO). Is used. In the present embodiment, an example in which the detection patterns 21 and 26 are made of a metal material having light shielding properties and conductivity will be described.

  As shown in FIG. 2A, each of the first detection patterns 21 provided on the surface 11a on one side of the support 11 includes a plurality of conductive wires 37a having a light-shielding property and a conductivity, which serve as a path through which a current flows. And an opening 37b. Specifically, in each first detection pattern 21, the conducting wire 37a is arranged in a predetermined pattern so that an opening 37b is formed between the conducting wires 37a. Here, the opening 37 b of the first detection pattern 21 is defined as a region surrounded by the conductive wire 37 a of the first detection pattern 21 or a region sandwiched by the conductive wire 37 a of the first detection pattern 21. In the example shown in FIG. 2A, a plurality of conducting wires 37a extending in the x direction and a plurality of conducting wires 37a extending in the y direction are combined. As a result, the conducting wires 37a arranged in a mesh shape are configured. A rectangular opening 37b is formed between the conductive wires 37a. In this case, even if the lead wire 37a has a light shielding property by appropriately setting the ratio of the area occupied by the opening 37b in the entire area of the first detection pattern 21 (hereinafter referred to as the aperture ratio). The image light from the display device can be transmitted at an appropriate ratio to reach the observer side. That is, an observer can visually recognize an image from the display device. The range of the aperture ratio is appropriately set according to the characteristics of the image light emitted from the display device, and is in the range of 80 to 99%, for example.

In Figure 2A, the width of the conductor 37a is shown at _{w 1.} Preferably, the width w1 of the conducting wire 37a is set in the range of ₁ to 20 μm, more preferably in the range of 2 to 15 μm. Thereby, the influence which the conducting wire 37a has on the image visually recognized by the observer can be reduced to a negligible level.

Preferably, the conducting wires 37a are arranged so that the openings 37b are regularly arranged. For example, as shown in FIG. 2A, conductor 37a so that each opening 37b are arranged regularly in the x direction and the y direction at a predetermined arrangement pitch p ₁ is disposed. By arranging the conducting wire 37a in this way, the pattern of the conducting wire 37a can be made inconspicuous as compared with the case where the openings 37b are irregularly arranged. Thereby, the influence of the conducting wire 37a on the image visually recognized by the observer can be further reduced. In addition, even when the display device does not emit video light, the pattern of the conductor 37a can be made inconspicuous, and thereby the design of the touch panel sensor 10 and the input / output device including the touch panel sensor 10 can be improved by the conductor 37a. It can be prevented from lowering. Although never specific value of the arrangement pitch p ₁ of each opening 37b is particularly limited, for example, the arrangement pitch p ₁ of each opening 37b is, the value of the width w ₁ of the opening ratio obtained and conductor 37a Accordingly, the thickness is appropriately set within the range of 100 to 1000 μm. In the example shown in FIG. 2A, the arrangement pitch of the openings 37b in the x direction and the arrangement pitch of the openings 37b in the y direction are substantially the same. The arrangement pitch of the portions 37b and the arrangement pitch of the openings 37b in the y direction may be different.

(First dummy pattern)
By the way, the material which comprises the conducting wire 37a is a metal material which has light-shielding property as mentioned above. Therefore, even if the width w ₁ of the aperture ratio and conductor 37a as described above in the first detection pattern 21 is set, the transmittance of the entire first detection pattern 21, such first detection pattern 21 is It is smaller than the transmittance in the area where it is not provided. For this reason, there is a first gap between two adjacent first detection patterns 21 that can be visually recognized by an observer, and no pattern is provided between the two adjacent first detection patterns 21. If not, the luminance due to the image light transmitted between the two adjacent first detection patterns 21 is larger than the luminance due to the light transmitted through the first detection patterns 21. In this case, the variation in luminance of the image light is visually recognized. In order to prevent such luminance variation, a first dummy pattern 22 is arranged between two adjacent first detection patterns 21 as described below.

As shown in FIG. 2A, the first dummy pattern 22 is arranged with a predetermined first gap s ₁ between the first detection patterns 21. The first dummy pattern 22 is a conductive wire having light shielding properties and electrical conductivity, and is composed of a conductive wire arranged in the same pattern as the conductive wire 37 a of the first detection pattern 21. Thus, since the conducting wire which comprises the 1st dummy pattern 22 is formed with the same pattern as the conducting wire 37a of the 1st detection pattern 21, in FIG. 2A, the conducting wire of the 1st dummy pattern 22 is shown by the code | symbol 37a. An opening formed by the conductive wire 37a of the first dummy pattern 22 is indicated by reference numeral 37b. The “same pattern” means that the aperture ratio in the first dummy pattern 22, the width of the conductor 37 a and the arrangement pitch of the openings 37 b are the same as those in the first detection pattern 21. By providing the first dummy pattern 22 as described above, the luminance of the image light transmitted through the region between the two adjacent first detection patterns 21 and how the image light is visually recognized can be determined. It can be the same as the brightness and how it is viewed. Thereby, it is possible to prevent the variation in luminance of the image light from being visually recognized. In the present embodiment, as shown in FIG. 2A, the first gap s ₁ includes the envelope 21 a that connects the ends of the conductor 37 a that constitutes the first detection pattern 21 and the conductor that constitutes the first dummy pattern 22. It is defined as a region between the envelope 21a and the envelope 22a when the envelope 22a connecting the end portions of 37a is virtually drawn.

The first gap s ₁ described above is provided to electrically insulate the first detection pattern 21 and the first dummy pattern 22 from each other. The width of the first gap s ₁ is appropriately set according to the accuracy of the method of forming the first detection pattern 21 and the first dummy pattern 22, but is within a range of, for example, 2 to 1000 μm, more preferably 10 to 1000 μm. It is within the range. By setting the width of the first gap s ₁ in such a range, the first detection pattern 21 and the first detection pattern 21 are secured while ensuring electrical insulation between the first detection pattern 21 and the first dummy pattern 22. It is possible to prevent the discontinuity between the dummy pattern 22 and the observer from being visually recognized.

Preferably, the pattern of the conducting wire 37a of the first dummy pattern 22 is the same as the pattern obtained when the conducting wire 37a constituting the adjacent first detection pattern 21 is translated to the first dummy pattern 22 side. . For example, conductor obtained when placed in more virtually arrangement pitch p ₁ of the conductor 37a toward the first dummy pattern 22 side extending in the x-direction in the lead 37a constituting the first detection pattern 21, a first The first dummy pattern 22 is configured to overlap the conductive wire 37a extending in the x direction among the conductive wires 37a configuring the dummy pattern 22. In addition, a conductor obtained when the conductor 37a extending in the y direction out of the conductors 37a constituting the first detection pattern 21 is further virtually extended toward the first dummy pattern 22 side constitutes the first dummy pattern 22. The first dummy pattern 22 is configured so as to overlap the conducting wire 37a extending in the y direction among the conducting wires 37a. Thus, even if the conductor 37a is visually recognized by an observer, the observation is performed as if the conductor 37a constituting the first detection pattern 21 and the conductor 37a constituting the first dummy pattern 22 are continuous. Can be recognized. That is, discontinuity between the first detection pattern 21 and the first dummy pattern 22 can be prevented from being visually recognized by the observer.

Also preferably, as shown in FIG. 2A, conductor 37a constituting the first detection pattern 21 and the first dummy pattern 22 has a shape in which the first gap s ₁ extends irregularly zigzag along the x-direction It is arranged as follows. By forming the first gap s ₁ in this way, the density distribution of the first gap s ₁ , that is, the region where the conducting wire 37 a is not provided, compared to the case where the first gap s ₁ has a shape extending linearly. density distribution of the can be made more uniform over the entire display area a _1. Thus, it is possible to obscure the first gap s _1, Thus, the discontinuities between the first detection pattern 21 and the first dummy pattern 22 is visually recognized by the viewer surely Can be prevented. Note that “irregular” means that the period of the zigzag shape in the first gap s ₁ is not constant, as shown in FIG. 2A.

Preferably, the distribution width σ ₁ of the first gap s ₁ in the y direction orthogonal to the x direction is limited to a predetermined value or less. For example, in the example shown in FIG. 2A, the distribution width sigma ₁ of the first gap s ₁ have been limited to less than or equal to about 2 times the arrangement pitch p ₁ of the opening 37b. By thus limiting the distribution width σ ₁ of the first gap s ₁ , it is possible to prevent the width of the first detection pattern 21 from being locally narrowed. Can be ensured.

  In the example shown in FIGS. 1 and 2A, the first extraction pattern 23 is not connected to the first dummy pattern 22. That is, the first dummy pattern 22 is in an electrically floating state. However, the present invention is not limited to this, and although not illustrated, the first extraction pattern 23 and the first terminal portion 24 may be connected to the first dummy pattern 22. In this case, the first extraction pattern 23 and the first terminal portion 24 connected to the first dummy pattern 22 may be connected to a stable potential such as a ground potential. Thereby, the first dummy pattern 22 can be electrically stabilized.

Incidentally, as described above, the first extraction pattern 23 and the first terminal portion 24 of the pattern provided on one side of the support 11 is placed in the non-display area A ₂ where an image is not displayed. For this reason, the width | variety of the 1st extraction pattern 23 and the 1st terminal part 24 is not restrict | limited in particular. For example, as shown in FIG. 2A, the width of the first extraction pattern 23 may be larger than the width of the conducting wire 37 a of the first detection pattern 21. In the example shown in FIG. 2A, the first extraction pattern 23 is connected to only one of the conductive wires 37a constituting the first detection pattern 21, but the present invention is not limited to this, and the first extraction pattern is not limited thereto. 23 may be connected to a plurality of conducting wires 37a.

(Second detection pattern)
Next, the second detection pattern 26 provided on the surface 11b on the other side of the support 11 will be described with reference to FIG. As shown in FIG. 3, each second detection pattern 26 includes a plurality of light-shielding and conductive wires 38 a and a plurality of openings 38 b that serve as paths through which current flows. Specifically, in each second detection pattern 26, the conductors 38a are arranged in a predetermined pattern so that an opening 38b is formed between the conductors 38a. Here, the opening 38b of the second detection pattern 26 is defined as a region surrounded by the conductive wire 38a of the second detection pattern 26 or a region sandwiched by the conductive wire 38a of the second detection pattern 26. The second detection pattern 26 is different only in that the second detection pattern 26 is provided on the surface 11b on the other side of the support 11, and other configurations, for example, the aperture ratio, the width w _{2 of the} conductor 38a, and the arrangement pitch of the openings 38b. p ₂ and the second gap s ₂ between the second detection pattern 26 and the second dummy pattern 27 include the aperture ratio of the first detection pattern 21, the width w _{1 of the} conductor 37a, and the arrangement pitch p _{1 of the} openings 37b. The first gap s ₁ between the first detection pattern 21 and the first dummy pattern 22 is substantially the same. For this reason, even if the conducting wire 38a has a light shielding property, it is possible to transmit the image light from the display device at an appropriate ratio to reach the observer side.

(Second dummy pattern)
Further, as shown in FIG. 3, a second dummy pattern 27 is disposed between two adjacent second detection patterns 26. Each of the second dummy patterns 27 is a conductive wire 38a having light shielding properties and conductivity, as in the case of the first dummy pattern 22 shown in FIG. 2A, and is arranged in the same pattern as the conductive wire 38a of the second detection pattern 26. It is comprised from the conducting wire 38a made. Further, the second gap s ₂ between the second detection pattern 26 and the second dummy pattern 27 is substantially the same as the first gap s ₁ between the first detection pattern 21 and the first dummy pattern 22. Yes. By providing such a second dummy pattern 27, it is possible to prevent the variation in luminance of the image light from being visually recognized.

Also as in the first detection pattern 21 and the first dummy patterns 22, preferably, wires 38a constituting the second detection pattern 26 and the second dummy patterns 27, second gap s ₂ along the y-direction It arrange | positions so that it may have the shape extended irregularly zigzag. By forming the second gap s ₂ in this way, the density distribution of the second gap s ₂ , that is, the region where the conducting wire 38 a is not provided, compared to the case where the second gap s ₂ has a linearly extending shape. density distribution of the can be made more uniform over the entire display area a _1. Thus, it is possible to obscure the second gap s _2, by this, that the discontinuity between the second detection pattern 26 and the second dummy pattern 27 is visually recognized by the viewer surely Can be prevented. Note that “irregular” means that the zigzag period in the second gap s ₂ is not constant, as shown in FIG. 3, as in the case of the first gap s ₁ .

Preferably, the distribution width σ ₂ of the second gap s ₂ in the x direction orthogonal to the y direction is limited to a predetermined value or less. For example, in the example shown in FIG. 3, the distribution width sigma ₂ of the second gap s ₂ has been limited so as to be approximately 2 times the opening 38b of the arrangement pitch p _2. By thus limiting the distribution width σ ₂ of the second gap s ₂ , it is possible to prevent the width of the second detection pattern 26 from being locally narrowed, and thereby the second detection pattern 26. Can be ensured.

Note that the positions of the conductor 38a of the second detection pattern 26 and the conductor 38a of the second dummy pattern 27 with respect to the conductor 37a of the first detection pattern 21 and the conductor 37a of the first dummy pattern 22 are not particularly limited. For example, the conductor 38 a of the second detection pattern 26 and the conductor 38 a of the second dummy pattern 27 are the conductor 37 a of the first detection pattern 21 and the conductor of the first dummy pattern 22 when viewed from the normal direction of the touch panel sensor 10. You may arrange | position so that it may overlap with 37a. That is, in the conducting wire 37a and the conducting wire 38a, not only the period (arrangement pitch) of these arrangement patterns but also the phase may coincide. In this case, in most of the region of the first gap s ₁ between the first detection pattern 21 and the first dummy pattern 22, a conductor 38 a arranged with the same period and phase as the conductor 37 a of each pattern 21, 22. Is visible. Similarly, in most of the region of the second gap s ₂ between the second detection pattern 26 and the second dummy pattern 27, a conductor 37a arranged with the same period and phase as the conductor 38a of each pattern 26, 27. Is visible. For this reason, the discontinuity between the first detection pattern 21 and the first dummy pattern 22 and the discontinuity between the second detection pattern 26 and the second dummy pattern 27 are visually recognized by the observer. Can be prevented more reliably.

Or, wires 38a and wire 38a of the second dummy pattern 27 of the second detection pattern 26, when viewed from the normal direction of the touch panel sensor 10, by a small predetermined distance than the arrangement pitch p ₁ of the aforementioned first detection The conductors 37 a of the pattern 21 and the conductors 37 a of the first dummy pattern 22 may be shifted from each other. That is, in the conducting wire 37a and the conducting wire 38a, the period (arrangement pitch) of these arrangement patterns coincides, but the phase of these arrangement patterns may not coincide. Although the amount of deviation is not particularly limited, for example, a deviation of 0.5 × p ₁ (phase 180 degrees) is conceivable. Note that the second detection pattern 26 and the second dummy patterns 27 is 1 times or more _{p 1} at its outer edge with respect to the first detection pattern 21 and the first dummy pattern 22, even if displaced for example 1.5 × _{p 1} , the deviation between the wires 38a constituting the conductor 37a and each pattern 26, 27 constituting the respective patterns 21 and 22 are visually recognized as 0.5 × _{p 1.} Therefore, wire 38a is shifted by a small predetermined distance than the arrangement pitch _{p 1} with respect to conductor 37a, that is, the outer edge of the outer edge and the pattern 26, 27 of the pattern 21, 22 from "arrangement pitch _{p 1} Is equivalent to a small predetermined distance + k × p ₁ (k is a positive integer) ”.

Layer Configuration of Touch Panel Sensor Next, a layer configuration of the touch panel sensor 10 will be described with reference to FIGS. 2B and 4 to 6. FIG. 2B is an enlarged plan view showing a part surrounded by a frame line IIB in the touch panel sensor 10 shown in FIG. 2A. 4 is a cross-sectional view of the touch panel sensor 10 shown in FIG. 2A viewed from the IV-IV line direction, and FIG. 5 is a cross-sectional view of the touch panel sensor 10 shown in FIG. 2A viewed from the VV line direction. FIG. 6 is a cross-sectional view of the touch panel sensor 10 shown in FIG. 2A as seen from the VI-VI line direction. 4 is a cross-sectional view taken along line IV-IV drawn across the openings 37b of the first detection pattern 21 and the first dummy pattern 22, and FIG. It is a cross-sectional view taken along line VV drawn so as not to cross each opening 37b of the first dummy pattern 22. In FIG. 2B, patterns 21 and 22 provided on the surface 11a on one side of the support 11 are indicated by solid lines, and patterns 26 and 27 provided on the surface 11b on the other side of the support 11 are shown. Is indicated by a dotted line. In FIG. 2B, for the sake of illustration, the width of the conducting wire 37a located on the surface 11a on one side of the support 11 is different from the width of the conducting wire 38a located on the surface 11b on the other side of the support 11. However, the present invention is not limited to this, and the width of the conducting wire 37a and the width of the conducting wire 38a may be the same.

  In addition, in the example shown in FIGS. 4 to 6, conducting wires 37 a and 38 a formed in a predetermined pattern and outer intermediate layers 35 a and 36 a described later are composed of a base film 31 and inner intermediate layers 35 b and 36 b described later. Is supported by the support 11. As shown in FIGS. 4 to 6, the surface 11 a on one side and the surface 11 b on the other side of the support 11 are both flat surfaces. That is, the conducting wires 37a and 38a and the outer intermediate layers 35a and 36a formed in a predetermined pattern are all supported by a flat surface. On the other hand, if the conducting wires 37a, 38a and the outer intermediate layers 35a, 36a are supported by a surface including irregularities, a large stress is locally applied to the conducting wires 37a, 38a and the outer intermediate layers 35a, 36a in the irregular portions. Will be. In this case, there is a concern that the conductive wires 37a and 38a and the outer intermediate layers 35a and 36a are disconnected at the uneven portions. On the other hand, according to the present embodiment, it is possible to support the conductive wires 37a and 38a and the outer intermediate layers 35a and 36a without generating such a large stress locally. For this reason, the stability of the conducting wires 37a, 38a and the outer intermediate layers 35a, 36a formed in a predetermined pattern can be increased.

  As shown in FIGS. 4 to 6, the touch panel sensor 10 includes a base film 31, a first intermediate layer 35 provided on the surface on one side of the base film 31, and one of the first intermediate layers 35. Of the first detection pattern 21 and the first dummy pattern 22 provided on the surface on the second side, the second intermediate layer 36 provided on the surface on the other side of the base film 31, and the second intermediate layer 36 A second detection pattern 26 and a second dummy pattern 27 are provided on the other side surface.

4, the first detection pattern 21 and the first dummy pattern 22 is formed, is that is clearly represented by wires 37a and openings 37b which are arranged in a predetermined arrangement pitch p _1. 5 and 6, predetermined gaps s ₁ and s ₂ are provided between the detection patterns 21 and 26 and the dummy patterns 22 and 27, so that the detection patterns 21 and 26 and the dummy patterns 22 and 27 are formed. The point that it is electrically insulated from 27 is clearly shown.

Preferably, as shown in FIGS. 2B and 5, the conductive wire 38 a that constitutes the second detection pattern 26 or the second dummy pattern 27 has the first detection pattern 21 and the first dummy as viewed from the normal direction of the touch panel sensor 10. are arranged so as to overlap the first gap s ₁ between the pattern 22. In this case, the wire 38a is visible in the first position of the gap s _1. Thereby, it can prevent more reliably that the discontinuity between the 1st detection pattern 21 and the 1st dummy pattern 22 is visually recognized by the observer. Similarly, as shown in FIG. 2B and FIG. 6, the conductive wire 37 a constituting the first detection pattern 21 or the first dummy pattern 22 is connected to the second detection pattern 26 and the second dummy when viewed from the normal direction of the touch panel sensor 10. are arranged so as to overlap the second gap s ₂ between the pattern 27. In this case, the conductor 37a is viewed in the second position of the gap s _1. Thereby, it is possible to prevent the discontinuity between the second detection pattern 26 and the second dummy pattern 27 from being visually recognized by the observer.

  Next, materials and the like constituting each layer and each pattern of the touch panel sensor 10 will be described.

(Base film)
First, the base film 31 will be described. The base film 31 serves as a base for manufacturing the touch panel sensor 10 and has a synthetic resin layer 32 as shown in FIG. As a material of the synthetic resin layer 32, a material having transparency and flexibility is used, and for example, a synthetic resin (plastic) is used. Examples of synthetic resins include flexibility and transparency such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), cycloolefin polymer (COP), polycarbonate (PC), polyimide (PI), or triacetyl cellulose (TAC). A resin having a property is used.

  The base film 31 includes a first hard coat layer 33 provided on one surface of the synthetic resin layer 32 and a second hard coat layer 34 provided on the other surface of the synthetic resin layer 32. And may further have. By providing the first hard coat layer 33 and the second hard coat layer 34, the scratch resistance against scratches and the like can be improved. As a material constituting the hard coat layers 33 and 34, for example, an acrylic resin is used. Further, on the first hard coat layer 33 and the second hard coat layer 34 of the base film 31, it has adhesion to the hard coat layers 33, 34 and is in contact with the base film 31 (in this embodiment, A primer layer (not shown) having adhesiveness to the intermediate layers 35 and 36) may be provided.

(Detection pattern and dummy pattern)
Next, the materials of the conducting wires 37a and 38a constituting the detection patterns 21 and 26 and the dummy patterns 22 and 27 will be described. As the material of the conducting wires 37a and 38a, a material having higher conductivity than a transparent conductive material such as ITO is used, and for example, at least one of silver, copper, aluminum, or an alloy thereof is used. Among these, the silver alloy has a lower specific resistance than a molybdenum alloy or the like used as a material for a conductive pattern in a conventional general touch panel sensor, and is therefore preferable as a material for the conductive wires 37a and 38a. As an example of such a silver alloy, an APC alloy containing silver, palladium, and copper can be given.

The non-display extraction pattern provided in a region _{A 2} 23, 28 and the terminal portions 24 and 29 are conductors 37a, may be composed of the same material as 38a. In this case, as will be described later, the conducting wires 37a and 38a of the detection patterns 21 and 26 and the dummy patterns 22 and 27, the extraction patterns 23 and 28, and the terminal portions 24 and 29 may be simultaneously formed in the same process. As a result, the touch panel sensor 10 can be manufactured with less man-hours.

  By the way, when conducting wire 37a, 38a is comprised from the material which has high electroconductivity, such as APC alloy, the adhesive force between the base film 31 which consists of synthetic resins, and conducting wire 37a, 38a is common in molybdenum alloys etc. In general, the adhesive strength between the wiring material and the base film 31 is small. Therefore, if the conducting wires 37a and 38a are directly provided on the base film 31, it is considered that the adhesion between the conducting wires 37a and 38a and the base film 31 becomes insufficient. In this case, it is conceivable that the conducting wires 37 a and 38 a are peeled off from the base film 31 when some kind of impact is applied to the touch panel sensor 10. Here, according to this Embodiment, in order to solve such a subject, the intermediate | middle layers 35 and 36 are interposed between the base film 31 and the conducting wire 37a and 38a. Hereinafter, the intermediate layers 35 and 36 will be described.

(Middle layer)
Compared to the base film 31, the first intermediate layer 35 is configured to have a greater adhesion to the conductive wires 37 a of the first detection pattern 21 and the first dummy pattern 22. That is, the first intermediate layer 35 is configured such that the adhesion between the conductor 37 a and the first intermediate layer 35 is greater than the adhesion between the conductor 37 a and the base film 31. In addition, the second intermediate layer 36 is configured to have a greater adhesion to the conductive wires 38 a of the second detection pattern 26 and the second dummy pattern 27 than the base film 31. That is, the second intermediate layer 36 is configured such that the adhesion between the conductor 38 a and the second intermediate layer 36 is greater than the adhesion between the conductor 38 a and the base film 31. By interposing such intermediate layers 35 and 36 between the base film 31 and the conductive wires 37 a and 38 a, the conductive wires 37 a and 38 a can be reliably fixed to the base film 31.

The “adhesion strength” is evaluated by, for example, a pull-off method described in JIS K5600-5-7.
For example, first, a tensile tester suitable for the method described in JIS K5600-5-7 is prepared. Next, a test plate in which a material (hereinafter referred to as material a) constituting the intermediate layers 35 and 36 is provided on a material (hereinafter referred to as material b) constituting the base film 31 is prepared, and a tensile test is performed. The adhesion force (adhesion force) between the material a and the material b is measured using a machine. The adhesion force measured in this case is defined as _Fab .
Next, a test plate in which a material (hereinafter referred to as material c) constituting the conductive wires 37a and 38a is provided on the material a is prepared, and an adhesion force between the material a and the material c is prepared using a tensile tester. Measure (adhesion). The adhesion force measured in this case is _{defined as Fac} .
Next, a test plate in which the material c is provided on the material b is prepared, and the adhesion force (adhesion force) between the material b and the material c is measured using a tensile tester. The adhesion force measured in this case is _defined as F _bc .
In the present embodiment, the adhesion force F _ab between the material a and the material b and the adhesion force F _ac between the material a and the material c are the adhesion force F _bc between the material b and the material c. Is bigger than.
JIS K5600-5-7 is a standard created on the assumption that a metal plate, glass plate, cement board, wood, or the like is used as a test sample. In the present embodiment, a synthetic resin (plastic) may be used as a material constituting the base film 31 as described above. Even in this case, JIS K5600-5 is used as a method for evaluating adhesion. The method described in -7 will be used.

  In addition, the 1st intermediate | middle layer 35 may consist of one layer, and may have a some layer. For example, as shown in FIGS. 4 to 6, the first intermediate layer 35 includes an outer first intermediate layer 35 a disposed so as to contact the conductive wire 37 a and an inner first intermediate layer 35 b disposed so as to contact the base film 31. And may have. In this case, the outer first intermediate layer 35a is configured to have a greater adhesion to the conductive wire 37a than the base film 31 and the inner first intermediate layer 35b. Further, the inner first intermediate layer 35b is configured to have a greater adhesion to the base film 31 than the conducting wire 37a and the outer first intermediate layer 35a. Moreover, the contact | adhesion power between the outer side 1st intermediate | middle layer 35a and the inner side 1st intermediate | middle layer 35b is larger than the contact | adhesion power between the base film 31 and the conducting wire 37a.

  Similarly, the second intermediate layer 36 may include an outer second intermediate layer 36 a disposed so as to contact the conductor 38 a and an inner second intermediate layer 36 b disposed so as to contact the base film 31. Good. In this case, the outer second intermediate layer 36a is configured to have a greater adhesion to the conductive wire 38a than the base film 31 and the inner second intermediate layer 36b. In addition, the inner second intermediate layer 36b is configured to have a greater adhesion to the base film 31 than the conducting wire 38a and the outer second intermediate layer 36a. Moreover, the contact | adhesion power between the outer side 2nd intermediate | middle layer 36a and the inner side 2nd intermediate | middle layer 36b is larger than the contact | adhesion power between the base film 31 and the conducting wire 38a.

As a material constituting the inner intermediate layers 35b and 36b, a material having high adhesion to the base film 31 is used, and for example, a silicon compound such as silicon, silicon oxide (SiO ₂ ), or silicon nitride (SiN) is used. . On the other hand, as a material constituting the outer intermediate layers 35a and 36a, a material having high adhesion to the conductive wires 37a and 38a is used, and a metal such as a molybdenum alloy is used. Examples of the molybdenum alloy include molybdenum niobium (MoNb), which is an alloy of molybdenum and niobium. When a metal material is used for the outer intermediate layers 35a and 36a, the outer intermediate layers 35a and 36a are provided as shown in FIGS. 4 to 6 in order to prevent the image light from being blocked by the outer intermediate layers 35a and 36a. The conductors 37a and 38a are provided in the same pattern.

Next, the operation and effect of the present embodiment having such a configuration will be described. Here, _first , a specific arrangement method of the conducting wires 37a and 38a for allowing the gaps s ₁ and s ₂ to extend irregularly in a zigzag manner as described above will be described with reference to FIG. Next, a method for manufacturing the touch panel sensor 10 will be described with reference to FIGS. 8 to 9E.

Method of arranging wire Figure 7 (a) ~ (h), a method of designing the first gap s _1, i.e. a view for explaining a method of arranging wire 37a. First, as shown in FIG. 7A, a conducting wire 37a arranged in a lattice shape is virtually considered. Further, one midpoint of the line segment constituting the grid is determined as the point (1).

Next, the conducting wire 37a is cut at the point (1). As a result, a cut portion (1) ′ is formed as shown in FIG. Thereafter, as shown in FIG. 7B, the midpoints of the two line segments that are close to the cut location (1) ′ and are on the x-direction side when viewed from the cut location (1) ′ are respectively ( 2) and point (3). Specifically, first, two lattice points adjacent to the y direction side (left and right direction side in FIG. 7B) as viewed from the cutting location (1) ′ are determined, and then, from each lattice point, the x direction side. Among these, two line segments extending upward in FIG. 7B are defined, and the midpoint of each line segment is defined as point (2) and point (3), respectively. Note here, since it is intended to design the first gap s ₁ extending from the lower side to the upper side in FIG. 7 (b), in determining a line segment, the upper side in out 7 in the x-direction side (b) The direction extending to is selected.

  Thereafter, one of the point (2) and the point (3) is selected. In this case, the probability of selecting the point (2) and the probability of selecting the point (3) may be the same or different. Here, it is assumed that the point (2) is selected.

  Next, the conducting wire 37a is cut at the selected point (2). As a result, a cut portion (2) 'is formed as shown in FIG. Thereafter, as shown in FIG. 7C, the midpoints of the two line segments that are close to the cut location (2) ′ and are on the x-direction side when viewed from the cut location (2) ′ are respectively points ( 4) and point (5). Next, either the point (4) or the point (5) is selected. The probability of selecting each point may be the same or different. Here, it is assumed that the point (4) is selected.

By repeating such a procedure, as shown in FIG. 7 (d) to FIG. 7 (h), cut points (4) ′, (6) ′, (9) ′, (11) ′ and (12) 'Is further formed. After that, by connecting the ends of the conductive wire 37a generated by the cut portion, envelopes 21a and 22a are generated as shown in FIG. 7 (h). In this way, it is possible to design irregularly the first gap s ₁ having a shape extending in a zigzag manner.

  In the example shown in FIGS. 7A to 7H, the cut points (4) ′ and (9) ′ are arranged along the x direction, and the cut points (9) ′ and (12) ′. Are aligned along the x direction. In this case, the cutting point (6) ′ between the cutting points (4) ′ and (9) ′ and the cutting point (11) ′ between the cutting points (9) ′ and (12) ′ are: This is a cut portion that does not contribute to dividing the first detection pattern 21 and the first dummy pattern 22. When such a cut location occurs in the design stage, the conductor 37a may be provided at the cut location (6) ′ and the cut location (11) ′ in the manufacturing stage of the touch panel sensor 10 against the design, or The conductor 37a may not be provided as designed.

Preferably, the position of a point that can be selected is limited when selecting a point to be a cut portion of the conducting wire 37a. For example, as shown by the alternate long and short dash line in FIGS. 7A to 7H, when selecting either the point (8) or the point (9) close to the cutting location (6) ′, the selection is made. The points that can be made may be limited to points that are inside the two adjacent restriction lines 51. In this case, in the example shown in FIG. 7E, points that can be selected are limited to the point (9). Accordingly, the distribution width σ ₁ of the first gap s ₁ in the y direction can be limited to a predetermined value or less, thereby preventing the width of the first detection pattern 21 from being locally narrowed. Can do.

Since the method of designing the second gap s ₂ , that is, the method of arranging the conducting wire 38 a is the same as the method of arranging the conducting wire 37 a, detailed description is omitted.

Method for Manufacturing Touch Panel Sensor Next, a method for manufacturing the touch panel sensor 10 according to the design of the conducting wire 37a designed as described above will be described. FIG. 8 is a flowchart illustrating a method for manufacturing the touch panel sensor 10, and FIGS. 9A (a) (b) to 9E (a) (b) are diagrams sequentially illustrating steps for manufacturing the touch panel sensor 10. is there. In addition, in each figure of FIG. 9A (a) (b)-FIG. 9E (a) (b), FIG. 9A (a)-FIG. 9E (a) show the touch panel sensor under manufacture for one side of the base film 31. It is a top view which shows the case where it sees from the side. FIG. 9A (b) to FIG. 9E (b) show the touch panel sensor under fabrication in cross sections along the line IXb-IXb in FIG. 9A (a) to FIG. 9E (a). Further, in each of FIGS. 9A (a) (b) to 9E (a) (b), for convenience, the number of detection patterns 21 and 26 and the number of dummy patterns 22 and 27 are shown in the touch panel sensor 10 shown in FIG. It is simplified as appropriate.

(Laminate preparation process)
First, as shown to FIG. 9A (a) (b), the laminated body (it is also called blanks) 30 as a base material for manufacturing the touch panel sensor 10 is prepared (process S11). As shown in FIG. 9A (b), the laminate 30 includes a base film 31, a first intermediate layer 35 provided on one side of the base film 31, and one of the first intermediate layers 35. A first light-shielding conductive layer 37 having a light-shielding property and conductivity, a second intermediate layer 36 provided on the other-side surface of the base film 31, and a second intermediate layer A second light-shielding conductive layer 38 having a light-shielding property and conductivity. Among these, the first light-shielding conductive layer 37 and the second light-shielding conductive layer 38 are layers that become the conductive wires 37a and 38a of the detection patterns 21 and 26 and the dummy patterns 22 and 27 by patterning.

  The method for producing the laminate 30 is not particularly limited, and a known method is appropriately used. For example, first, the base film 31 is prepared, and then the intermediate layers 35 and 36 are formed on the base film 31, and then the light-shielding conductive layers 37 and 38 are formed on the intermediate layers 35 and 36. . As a film forming method, a known method is appropriately used. For example, vacuum deposition, sputtering, CVD, ion plating, or the like can be used.

(Photosensitive layer formation process)
Next, as shown in FIGS. 9A (a) and 9 (b), a first photosensitive layer 41 is provided on one side of the laminate 30, and a second photosensitive layer 42 is provided on the other side of the laminate 30. Is provided (step S12). The photosensitive layers 41 and 42 have photosensitivity to light in a specific wavelength range, for example, ultraviolet rays. The specific photosensitive characteristics of the photosensitive layers 41 and 42 are not particularly limited. For example, as the photosensitive layers 41 and 42, a photocurable photosensitive material may be used, or a photodissolvable photosensitive material may be used. Here, an example in which a photocurable photosensitive material is used as the photosensitive layers 41 and 42 will be described.

(Exposure process)
Next, as shown in FIGS. 9B and 9B, the first mask 43 is disposed on the first photosensitive layer 41 and the second mask 44 is disposed on the second photosensitive layer 42. Each of the masks 43 and 44 transmits the exposure light in a pattern corresponding to each of the conducting wires 37a and 38a, the extraction patterns 23 and 28 and the terminal portions 24 and 29 of the detection patterns 21 and 26 and the dummy patterns 22 and 27 to be formed later. Openings 43a and 44a and light-shielding portions 43b and 44b that shield the exposure light are included. Thereafter, as shown in FIGS. 9B (a) and 9 (b), exposure light is irradiated to the photosensitive layers 41 and 42 through the masks 43 and 44 (step S13). As a result, the first photosensitive layer 41 and the second photosensitive layer 42 are simultaneously exposed in different patterns.

  Here, according to the present embodiment, the stacked body 30 includes the first light-shielding conductive layer 37 and the second light-shielding conductive layer 38 having a light-shielding property. Therefore, the exposure light transmitted through the first photosensitive layer 41 is shielded by the first light shielding conductive layer 37. Further, the exposure light transmitted through the second photosensitive layer 42 is shielded by the second light shielding conductive layer 38. Therefore, the exposure light irradiated from one side of the laminate 30 for exposing the first photosensitive layer 41 does not reach the second photosensitive layer 42, and similarly, the second photosensitive layer 42 is exposed. The exposure light irradiated from the other side of the laminate 30 does not reach the first photosensitive layer 41. As a result, in the exposure step S12, the first photosensitive layer 41 and the second photosensitive layer 42 can be simultaneously exposed with a desired pattern with high accuracy.

(Development process)
Next, the exposed first photosensitive layer 41 and second photosensitive layer 42 are developed (step S14). Specifically, a developer corresponding to the photosensitive layers 41 and 42 is prepared, and the photosensitive layers 41 and 42 are developed using this developer. As a result, as shown in FIGS. 9C (a) and 9 (b), portions of the photosensitive layers 41 and 42 that are not irradiated with the exposure light are removed, and as a result, the photosensitive layers 41 and 42 are patterned into a predetermined pattern. The

(Patterning process)
Thereafter, as shown in FIGS. 9D and 9B, the first light-shielding conductive layer 37 is etched using the patterned first photosensitive layer 41a as a mask, and the second photosensitive layer 42 is used as a mask to etch the second. The light shielding conductive layer 38 is etched (step S15). By this etching, the first light-shielding conductive layer 37 and the second light-shielding conductive layer 38 are patterned into substantially the same pattern as the patterns of the first photosensitive layer 41 and the second photosensitive layer 42, respectively. The etching method is not particularly limited, and wet etching using an etching solution, mechanical etching, or the like is appropriately used. When wet etching is employed, an etching solution capable of dissolving the material constituting the light-shielding conductive layers 37 and 38 is appropriately selected. For example, when the light-shielding conductive layers 37 and 38 are made of silver or a silver alloy, phosphoric acid acetic acid (water) containing phosphoric acid, nitric acid, acetic acid, and water in a ratio of 4: 1: 4: 4 is used as an etching solution. Can be used as

  As shown in FIG. 9D (b), the outer intermediate layers 35a and 36a may be patterned by etching simultaneously with the light-shielding conductive layers 37 and 38. In this case, an etching solution capable of dissolving the outer intermediate layers 35a and 36a together with the light-shielding conductive layers 37 and 38 is appropriately used.

(Removal process of photosensitive layer)
Thereafter, the first photosensitive layer 41 patterned and remaining on the first light-shielding conductive layer 37 and the second photosensitive layer 42 patterned and remaining on the second light-shielding conductive layer 38 are removed (step). S16). For example, the remaining photosensitive layers 41 and 42 are removed by using an alkaline solution such as 2% potassium hydroxide. As a result, as shown in FIGS. 9E (a) and 9 (b), the patterned light-shielding conductive layers 37 and 38 are exposed. That is, conductive wires 37a and 38a having a predetermined pattern are formed. Accordingly, the touch panel sensor including the first detection pattern 21 and the first dummy pattern 22 including the conductive wire 37a and the opening 37b, and the second detection pattern 26 and the second dummy pattern 27 including the conductive wire 38a and the opening 38b. 10 is obtained.

The touch panel sensor 10 according to the present embodiment obtained in this way is provided with a support 11 and a plurality of first detection patterns 21 provided on the surface 11a on one side of the support 11 and extending in the x direction. on one side surface 11a of the support 11, and are spaced a first gap s ₁ given between the first detection pattern 21, a first dummy pattern 22 extending in the x direction. Here, the first detection pattern 21 and the first dummy pattern 22 are light-shielding and conductive conductors 37a on one side of the support 11 so that an opening 37b is formed between the conductors 37a. It is comprised from the conducting wire 37a arrange | positioned by the predetermined pattern on the surface 11a. Thus, by providing the first dummy pattern 22 on the same plane as the first detection pattern 21, compared to the case where the first dummy pattern 22 is provided on a different plane from the first detection pattern 21, The transmittance in the first detection pattern 21 and the transmittance in the first dummy pattern 22 can be precisely matched. Thereby, it is possible to prevent the area between the first detection patterns 21 from being noticeable, and thereby it is possible to prevent the first detection patterns 21 from being visually recognized by an observer.

According to this embodiment, conductors 37a constituting the first detection pattern 21 and the first dummy patterns 22 are arranged to have a shape that first gap s ₁ extends irregularly zigzag along the x-direction Has been. By forming the first gap s ₁ in this way, the density distribution of the first gap s ₁ , that is, the region where the conducting wire 37 a is not provided, compared to the case where the first gap s ₁ has a shape extending linearly. density distribution of the can be made more uniform over the entire display area a _1. Thus, it is possible to obscure the first gap s _1, Thus, it is possible to prevent the discontinuity between the first detection pattern 21 and the first dummy pattern 22 is visually recognized by the observer it can.

Further, according to the present embodiment, the touch panel sensor 10 is provided on the surface 11 b on the other side of the support 11, the plurality of second detection patterns 26 extending in the y direction perpendicular to the x direction, and the support 11. on the other side surface 11b, it is spaced a predetermined second gap s ₂ between the second detection pattern 26 further includes a second dummy pattern 27 extending in the y direction. In addition, the conductive wire 38a constituting the second detection pattern 26 and the second dummy pattern 27 is a first wire between the first detection pattern 21 and the first dummy pattern 22 when viewed from the normal direction of the touch panel sensor 10. It is arranged so as to overlap with the gap s _1. Thereby, it can prevent more reliably that the discontinuity between the 1st detection pattern 21 and the 1st dummy pattern 22 is visually recognized by the observer.

  Moreover, according to the manufacturing method demonstrated above, as mentioned above, the 1st photosensitive layer 41 of the one side of the base film 31 and the 2nd photosensitive layer 42 of the other side of the base film 31 are simultaneous. Exposed. For this reason, for example, by providing positioning marks (not shown) such as alignment marks on each of the first mask 43 and the second mask 44, the first mask 43 and the second mask 44 are brought into contact with each other. For example, positioning can be performed with extremely high accuracy on the order of microns, and extremely easily (and therefore in a short time). As a result, the second detection pattern 26 and the second dummy pattern 27 on the other side of the base film 31 are different from the first detection pattern 21 and the first dummy pattern 22 on the one side of the base film 31. The touch panel sensor 10 positioned with relatively high accuracy can be obtained.

  Moreover, according to this Embodiment, the detection patterns 21 and 26 are provided in the both sides of the base film 31, respectively. For this reason, the thickness of the touch panel sensor 10 can be reduced as compared with the case where the touch panel sensor is configured by pasting together two film sensors as in the prior art. Further, by eliminating the need for bonding, the number of interfaces that can exert an optical action on the transmitted light can be reduced, thereby increasing the transmittance of the image light from the display device.

  In addition, according to the present embodiment, the detection patterns 21 and 26 are conductors 37a arranged in a predetermined pattern on the intermediate layers 35 and 36 so that the openings 37b and 38b are formed between the conductors 37a and 38a, respectively. , 38a. In this case, since the image light from the display device can pass through the openings 37b and 38b, the conducting wires 37a and 38a do not need to have translucency. For this reason, a metal material having high conductivity can be used as the material of the conducting wires 37a and 38a. Thereby, the electrical resistance value of the detection patterns 21 and 26 can be made lower than that of a touch panel sensor of a type using a transparent conductive material. For example, the sheet resistance when it is assumed that the above-described conducting wire 37a and conducting wire 38a are provided over the entire surface of one side or the other side of the support 11 can be in the range of 0.05 to 10Ω / □. .

Further, according to the present embodiment, the conducting wires 37a and 38a constituting the detection patterns 21 and 26 and the dummy patterns 22 and 27 are formed by patterning using a photolithography method. For this reason, the conducting wires 37a and 38a can be formed in a desired shape at a desired position with extremely high accuracy. As a result, the aperture ratio and the widths w ₁ and w ₂ of the conductive wires 37a and 38a in the detection patterns 21 and 26 and the dummy patterns 22 and 27 can be adjusted with high accuracy. The touch panel sensor 10 having a value can be manufactured.

  Moreover, according to this Embodiment, the intermediate | middle layers 35 and 36 are comprised so that it may have the larger contact | adhesion power with respect to the detection patterns 21 and 26 compared with the base film 31. FIG. By interposing such intermediate layers 35 and 36 between the detection patterns 21 and 26 and the base film 31, the detection patterns 21 and 26 can be reliably fixed to the base film 31.

The comparative embodiment Next, the effect of this embodiment will be described in comparison with a comparative embodiment. FIG. 10 is a plan view showing a touch panel sensor 60 in a comparative form.

  The touch panel sensor 60 according to the comparison form shown in FIG. 10 is different only in that no dummy pattern is provided between detection patterns, and the other configurations are substantially the same as those of the above-described embodiment shown in FIGS. 1 to 9E. Are the same. In the comparison form shown in FIG. 10, the same parts as those in the embodiment shown in FIGS.

As shown in FIG. 10, the touch panel sensor 60 according to the comparative embodiment includes a plurality of first detection patterns 21 arranged on the surface 11 a on one side of the support 11 with a predetermined gap s ₃ , and a support. 11 and the second detection pattern 26 other predetermined on the surface 11b side of the plurality of aligned spaced a gap s ₄ of, a. As described above, in the touch panel sensor 60, the dummy patterns 22 and 27 are not provided between the detection patterns 21 and 26. In this case, in order to prevent the observer from visually recognizing the gaps s ₃ and s ₄ between the detection patterns 21 and 26, the detection patterns 21 and 26 are arranged so that the widths of the gaps s ₃ and s ₄ are sufficiently small. Is done. Therefore, when the arrangement pitch of the first detection patterns 21 arranged in the y direction is determined, the width of each first detection pattern 21 is substantially determined at the same time. Similarly, when the arrangement pitch of the second detection patterns 26 arranged in the x direction is determined, the width of each second detection pattern 26 is substantially determined at the same time. Thus, in the comparative form, the width of each detection pattern 21 and 26 is determined according to the arrangement pitch of each detection pattern 21 and 26. That is, in the comparative form, the arrangement pitch and width of the detection patterns 21 and 26 cannot be determined independently.

On the other hand, according to the present embodiment, dummy patterns 22 and 27 are provided between detection patterns 21 and 26 as described above. For this reason, it is possible to independently determine the arrangement pitch and width of the detection patterns 21 and 26 while setting the gaps s ₁ and s ₂ sufficiently small. For this reason, according to this Embodiment, according to the characteristic calculated | required by the touch panel sensor 10, the detection patterns 21 and 26 can be designed flexibly, and, thereby, higher quality can be implement | achieved.

Modifications Various modifications can be made to the above-described embodiment. Hereinafter, an example of modification will be described.

(Variation of conductor arrangement method)
Hereinafter, modified examples of the arrangement of the conductive wires constituting the detection pattern and the dummy pattern will be described. In the following modification example, only a modification example of the arrangement of the conductors 37a constituting the first detection pattern 21 and the first dummy pattern 22 will be described. However, the modification example includes the second detection pattern 26 and the second dummy pattern. Of course, the present invention can also be applied to the arrangement of the conductive wires 38a constituting the pattern 27.

[First Modification]
In the present embodiment, when designing the arrangement of the conducting wires, as shown in FIGS. 7A to 7H, the conducting wires 37a are arranged in a lattice shape, and the midpoints of the line segments constituting the lattice An example in which the cutting location is set is shown in However, the present invention is not limited to this, and a cut location may be set at a lattice point of the lattice. Hereinafter, such an example will be described with reference to FIGS. The “lattice point” means a point where a conducting wire 37a extending in one direction and a conducting wire 37a extending in the other direction intersect.

  In this modified example, first, as shown in FIG. 11A, a conducting wire 37a arranged in a lattice shape is considered virtually. Further, one of the lattice points of the lattice is determined as a point (1).

  Next, the conducting wire 37a is cut at the point (1). As a result, as shown in FIG. 11B, a cut portion (1) 'is formed. Thereafter, as shown in FIG. 11B, three lattice points that are close to the cutting location (1) ′ and on the x-direction side when viewed from the cutting location (1) ′ are respectively point (2), Determined as point (3) and point (4). Specifically, first, a lattice point located on the upper side in FIG. 11B in the x direction with respect to the cut location (1) ′ is defined as a point (3), and then viewed from the point (3). Then, two lattice points adjacent to the y direction side (left and right direction side in FIG. 11B) are defined as point (2) and point (4), respectively.

  Then, any one of point (2), point (3), or point (4) is selected. In this case, the probability of selecting the point (2), the probability of selecting the point (3), and the probability of selecting the point (4) may be the same or different. Here, it is assumed that the point (4) is selected.

  Next, the conducting wire 37a is cut at the selected point (4). As a result, a cut portion (4) 'is formed as shown in FIG. Thereafter, as shown in FIG. 11 (c), three lattice points that are close to the cutting point (4) ′ and on the x-direction side when viewed from the cutting point (4) ′ are respectively point (5), It is defined as point (6) and point (7). Next, one of the points (5), (6), and (7) is selected. The probability of selecting each point may be the same or different. Here, it is assumed that the point (6) is selected.

By repeating such a procedure, cut portions (6) ′, (8) ′, (11) ′ and (16) ′ are further formed as shown in FIGS. 11 (d) to 11 (h). The After that, by connecting the ends of the conductive wire 37a generated by the cut portion, envelopes 21a and 22a are generated as shown in FIG. 11 (h). In this way, it is possible to design irregularly the first gap s ₁ having a shape extending in a zigzag manner.

  In the example shown in FIGS. 11A to 11H, the cut portions (4) ′ and (6) ′ are arranged along the x direction. In this case, a cut line segment 37 c that is not connected to either the first detection pattern 21 or the first dummy pattern 22 is generated between the cut positions (4) ′ and (6) ′. When such a parting line segment occurs in the design stage, the conductor 37a may be provided as designed at the part of the parting segment 37c in the manufacturing stage of the touch panel sensor 10, or the conductor 37a is provided contrary to the design. It may not be possible. Preferably, the conductor 37a is provided as designed also in the part of the dividing line segment 37c that is not connected to either the first detection pattern 21 or the first dummy pattern 22. Thereby, the discontinuity between the first detection pattern 21 and the first dummy pattern 22 can be made difficult to be visually recognized by the observer.

As in the case of the example illustrated in FIGS. 7A to 7H, the position of a point that can be selected may be limited by the limit line 51 when selecting a point to be a cut portion of the conducting wire 37 a. For example, in the example shown in FIG. 11 (f), the point (14) is excluded from the selection target. Accordingly, the distribution width σ ₁ of the first gap s ₁ in the y direction can be limited to a predetermined value or less, thereby preventing the width of the first detection pattern 21 from being locally narrowed. Can do. In addition, when the point excluded from selection object has generate | occur | produced, you may adjust the probability of selection so that the point which is far from the point excluded from selection object may be selected with high probability. For example, in the example shown in FIG. 11 (f), the probability of selecting the point (16) located farther from the point (14) than the point (15) is higher than the probability of selecting the point (15). It may be. As a result, the first gap s ₁ can be moved away from the limit line 51.

  Moreover, in this Embodiment, the conducting wire 37a, 38a arrange | positioned at the grid | lattice form showed the example which consists of a conducting wire extended in ax direction, and a conducting wire extended in ay direction. That is, the example in which the extending direction of the conducting wires 37a and 38a is the same as the extending direction of the first detection pattern 21 or the extending direction of the second detection pattern 26 is shown. However, the present invention is not limited to this, and each of the conductive wires 37a and 38a may be formed of a conductive wire extending in a direction inclined with respect to the x direction and the y direction. For example, the direction in which the conducting wires 37a and 38a extend may be a direction that forms 45 degrees with respect to the x direction and the y direction. An example of a method for designing the arrangement of the conductive wires in such a case will be described below as a second modification and a third modification.

[Second Modification]
In the present modification, first, as shown in FIG. 12A, the conducting wires 37a arranged in a lattice shape are virtually arranged along the direction inclined with respect to the x direction and the y direction in which the detection patterns 21 and 26 extend. Think. Further, one midpoint of the line segment constituting the grid is determined as the point (1).

  Next, the conducting wire 37a is cut at the point (1). As a result, as shown in FIG. 12B, a cut portion (1) 'is formed. Thereafter, as shown in FIG. 12B, the midpoints of the three line segments that are close to the cut location (1) ′ and are on the x-direction side as viewed from the cut location (1) ′ are respectively points ( 2), point (3) and point (4). Specifically, first, the midpoint of the line segment positioned on the upper side in FIG. 12B among the x-direction side with respect to the cut location (1) ′ is determined as the point (3), and then the point (3 ), The midpoints of the two line segments located on the y direction side (left and right direction side in FIG. 12B) are defined as point (2) and point (4), respectively.

  Then, any one of point (2), point (3), or point (4) is selected. In this case, the probability of selecting the point (2), the probability of selecting the point (3), and the probability of selecting the point (4) may be the same or different. Here, it is assumed that the point (4) is selected.

  Next, the conducting wire 37a is cut at the selected point (4). As a result, as shown in FIG. 12C, a cut portion (4) 'is formed. Thereafter, as shown in FIG. 12C, the midpoints of the three line segments that are close to the cut portion (4) ′ and that are on the x-direction side when viewed from the cut portion (4) ′ are respectively points ( 5), determined as point (6) and point (7). The probability of selecting each point may be the same or different. Next, one of the points (5), (6), and (7) is selected. Here, it is assumed that the point (6) is selected.

By repeating such a procedure, cut portions (6) ′, (8) ′, (11) ′ and (15) ′ are further formed as shown in FIGS. 12 (d) to 12 (f). The Thereafter, by connecting the ends of the conductive wire 37a generated by the cut portion, envelopes 21a and 22a are generated as shown in FIG. In this way, it is possible to design irregularly the first gap s ₁ having a shape extending in a zigzag manner.

[Third Modification]
Alternatively, as in the case of the example illustrated in FIGS. 11A to 11H, the cut location may be set at the lattice point of the lattice instead of the midpoint of the line segment. In this modification, first, as shown in FIG. 13A, the conducting wires 37a arranged in a lattice shape are virtually arranged along the direction in which the detection patterns 21 and 26 extend and the direction inclined with respect to the y direction. Think. Further, one of the lattice points of the lattice is determined as a point (1).

  Next, the conducting wire 37a is cut at the point (1). As a result, as shown in FIG. 13B, a cut portion (1) 'is formed. Thereafter, as shown in FIG. 13 (b), two lattice points that are close to the cutting location (1) ′ and on the x-direction side as viewed from the cutting location (1) ′ are respectively point (2) and Determined as point (3). Specifically, among the grid points connected to the line segment extending from the cut location (1) ′, the grid points above the cut location (1) ′ are defined as the point (2) and the point (3), respectively. . In the example shown in FIG. 13B, the point (2) and the point (3) are respectively in the directions of 135 degrees and 45 degrees with respect to the cut location (1) ′ (in FIG. The grid points are located in the diagonally upper right direction.

  Thereafter, one of the point (2) and the point (3) is selected. In this case, the probability of selecting the point (2) and the probability of selecting the point (3) may be the same or different. Here, it is assumed that the point (2) is selected.

  Next, the conducting wire 37a is cut at the selected point (2). As a result, as shown in FIG. 13C, a cut portion (2) 'is formed. After that, as shown in FIG. 13 (c), two lattice points that are close to the cutting location (2) ′ and on the x-direction side when viewed from the cutting location (2) ′ are respectively point (4) and Determined as point (5). Next, either the point (4) or the point (5) is selected. The probability of selecting each point may be the same or different. Here, it is assumed that the point (4) is selected.

By repeating such a procedure, cut portions (7) ′, (9) ′, (11) ′ and (12) ′ are further formed as shown in FIGS. 13 (d) to 13 (g). The After that, by connecting the ends of the conductive wire 37a generated by the cut portion, envelopes 21a and 22a are generated as shown in FIG. 13 (h). In this way, it is possible to design irregularly the first gap s ₁ having a shape extending in a zigzag manner.

  In the second and third modifications described above, the positions of points that can be selected may be restricted by the restriction line 51, as in the case of the present embodiment and the first modification described above.

(Modification of detection pattern)
Moreover, as shown in FIG. 14, the notch 37d may be provided in the conducting wire 37a which comprises the 1st detection pattern 21. As shown in FIG. The position and number of the cuts 37d to be provided are arbitrarily set as long as the electrical continuity between the one end and the other end of the first detection pattern 21 in the x direction is not lost. By providing such a cut 37d on the first detection pattern 21, it can be less noticeable the first gap s _1, thereby, it is possible to enhance the design of the touch panel sensor 10. As shown in FIG. 14, the cut 37 d may be provided not only in the first detection pattern 21 but also in the first dummy pattern 22. Similar notches may be provided in the conductors 38 a constituting the second detection pattern 26 and the second dummy pattern 27.

(Example of positional relationship between the pattern on one side of the support and the pattern on the other side)
Next, an example of the positional relationship between the conducting wire 37a provided on the surface 11a on one side of the support 11 and the conducting wire 38a provided on the surface 11b on the other side of the support 11 will be described. . Here, as shown in FIG. 15, the arrangement pitch of the conductors 37 a is the same as the arrangement pitch of the conductors 38 a, and the conductor 38 a is predetermined with respect to the conductor 37 a when viewed from the normal direction of the touch panel sensor 10. A case will be described in which the arrangement is shifted by the distance, for example, the arrangement pitch p ₁ × 0.5.

When the conducting wire 38a is shifted with respect to the conducting wire 37a, it is preferable that when the arrangement of the conducting wire 37a is designed, the cutting position of the conducting wire 37a is the other of the support 11 when viewed from the normal direction of the support 11. It is set so as to overlap the conductive wire 38a on the side. Thus, when viewed from the normal direction of the support, first and gap s ₁ on the one side of the support 11, it is possible to overlap the wires 38a on the other side of the support 11. 15 (a) and 15 (b), when the conducting wire 38a is shifted from the conducting wire 37a by the arrangement pitch p ₁ × 0.5, the arrangement pitch p ₁ × 0.5 is set. distance corresponding to the position, i.e. it is arranged cut portion of the conductor 37a to the midpoint of a line segment, thereby, an example that is shown overlapping the first gap s ₁ and wire 38a is. 15A and 15B, for convenience, a portion where the cut portion of the conducting wire 37a overlaps with the conducting wire 38a is surrounded by a circle 52.

(Variation of forming pattern and terminal part)
Further, in the present embodiment, simultaneously with the detection patterns 21 and 26 and the dummy patterns 22 and 27, the extraction patterns 23 and 28 and the terminal portions 24 and 29 are connected to the detection patterns 21 and 26 and the lead wires 37 a and 27 of the dummy patterns 22 and 27. An example in which the same material as that of 38a, that is, the light-shielding conductive layers 37 and 38 is formed is shown. However, the present invention is not limited to this, and as shown in FIG. 16A, first, the conductive wires 37a, 38a of the detection patterns 21, 26 and the dummy patterns 22, 27 from the light-shielding conductive layers 37, 38 by photolithography. Then, the extraction patterns 23 and 28 and the terminal portions 24 and 29 may be formed as shown in FIG. In this case, the method of forming the extraction patterns 23 and 28 and the terminal portions 24 and 29 is not particularly limited. In order to form the extraction patterns 23 and 28 and the terminal portions 24 and 29, S12 to S12 shown in FIG. You may perform a process like S15 again. Further, the extraction patterns 23 and 28 and the terminal portions 24 and 29 may be formed by a printing method such as screen printing. Further, as the metal material for forming the extraction patterns 23 and 28 and the terminal portions 24 and 29, a metal material different from the metal material for forming the conductive wires 37a and 38a of the detection patterns 21 and 26 and the dummy patterns 22 and 27 may be used. Good.

(Modification of detection pattern and dummy pattern formation method)
In the present embodiment, an example in which the detection patterns 21 and 26 and the dummy patterns 22 and 27 are formed by one set of exposure process, development process, and etching process as shown in S12 to S14 is shown. However, the present invention is not limited to this. First, as shown in FIG. 17A, the first light-shielding conductive layer 37 is patterned in a mesh pattern over the entire surface by one set of exposure process, development process and etching process, and then As shown in FIG. 17B, the detection patterns 21 and 26 and the dummy patterns 22 and 27 may be formed by a further set of exposure process, development process, and etching process.

(Other variations)
Moreover, in this Embodiment, although the intermediate | middle layers 35 and 36 were shown between the base film 31 and the conducting wires 37a and 38a, it was not restricted to this. For example, when the material which has sufficient adhesive force with respect to the base film 31 is used as the conducting wires 37a and 38a, the intermediate layers 35 and 36 may not be provided. In this case, the support 11 is constituted by the base film 31.

  In addition, although some modified examples with respect to the above-described embodiment have been described, naturally, a plurality of modified examples can be applied in combination as appropriate.

DESCRIPTION OF SYMBOLS 10 Touch panel sensor 11 Support body 21 1st detection pattern 22 1st dummy pattern 23 1st extraction pattern 24 1st terminal part 26 2nd detection pattern 27 2nd dummy pattern 28 2nd extraction pattern 29 2nd terminal part 30 Laminated body 31 Base film 32 Synthetic resin layer 33 First hard coat layer 34 Second hard coat layer 35 First intermediate layer 35a Outer first intermediate layer 35b Inner first intermediate layer 36 Second intermediate layer 36a Outer second intermediate layer 36b Inner first 2 intermediate layer 37 first light-shielding conductive layer 37a conducting wire 37b opening 38 second light-shielding conductive layer 38a conducting wire 38b opening 41 first photosensitive layer 42 second photosensitive layer 43 first mask 44 second mask

Claims (13)

A support;
A plurality of first detection patterns provided on a surface on one side of the support and extending in a first direction;
A first dummy pattern disposed on a surface of one side of the support body with a predetermined first gap between the first detection patterns and extending in a first direction;
A plurality of second detection patterns provided on a surface on the other side of the support and extending in a second direction orthogonal to the first direction;
A second dummy pattern disposed on the other surface of the support with a predetermined second gap between the second detection patterns and extending in the second direction ;
The first detection pattern and the first dummy pattern are light-shielding and conductive conductors, and a predetermined pattern is formed on a surface on one side of the support so that an opening is formed between the conductors. in which consist arranged wires,
The second detection pattern and the second dummy pattern are light-shielding and conductive conductors, and a predetermined pattern is formed on the other surface of the support so that an opening is formed between the conductors. Composed of conductors arranged in
A part of the conducting wire of the first detection pattern and a part of the conducting wire of the first dummy pattern extend in the second direction and face each other with the first gap between them,
A part of the conducting wire constituting the second detection pattern and the second dummy pattern extends in the second direction and faces each other when viewed from the normal direction of the support. A touch panel sensor, wherein the touch panel sensor is disposed so as to overlap the first gap between a part of the conducting wire and a part of the conducting wire of the first dummy pattern . A part of the conducting wire of the second detection pattern and a part of the conducting wire of the second dummy pattern extend in the first direction and face each other with the second gap therebetween;
A part of the conducting wire constituting the first detection pattern and the first dummy pattern extends in the first direction and faces each other when viewed from the normal direction of the support. The touch panel sensor according to claim 1, wherein the touch panel sensor is disposed so as to overlap the second gap between a part of the conducting wire and a part of the conducting wire of the second dummy pattern .   The conductive wire constituting the first detection pattern and the first dummy pattern is arranged such that the first gap has a shape extending irregularly in a zigzag shape along the first direction. Item 3. The touch panel sensor according to item 1 or 2. A support;
A plurality of first detection patterns provided on a surface on one side of the support and extending in a first direction;
A first dummy pattern disposed on a surface of one side of the support body with a predetermined first gap between the first detection patterns and extending in a first direction;
The first detection pattern and the first dummy pattern are light-shielding and conductive conductors, and a predetermined pattern is formed on a surface on one side of the support so that an opening is formed between the conductors. in which consist arranged wires,
The conductive wire constituting the first detection pattern and the first dummy pattern is arranged such that the first gap has a shape extending irregularly in a zigzag shape along the first direction. Sensor. A plurality of second detection patterns provided on a surface on the other side of the support and extending in a second direction orthogonal to the first direction;
A second dummy pattern disposed on the other surface of the support with a predetermined second gap between the second detection patterns and extending in the second direction;
The second detection pattern and the second dummy pattern are light-shielding and conductive conductors, and a predetermined pattern is formed on the other surface of the support so that an opening is formed between the conductors. The touch panel sensor according to claim 4 , wherein the touch panel sensor is composed of a conductive wire arranged in a line. The touch panel sensor according to any one of claims 1, 2, 3 and 5, characterized in that the width of the second gap is in the range from 2～1000Myuemu. The conductive wire constituting the second detection pattern and the second dummy pattern is arranged such that the second gap has a shape extending irregularly in a zigzag shape along the second direction. Item 7. The touch panel sensor according to any one of Items 1, 2, 3, 5, and 6 . A plurality of cuts are made in the conductive wire constituting the second detection pattern within a range in which conductivity in the second direction is not lost . 7 the touch panel sensor according to any one of. The conductors constituting the first detection pattern and the first dummy pattern are arranged so as to overlap the second gap when viewed from the normal direction of the support,
9. The conductive wires constituting the second detection pattern and the second dummy pattern are disposed so as to overlap the first gap when viewed from the normal direction of the support. The touch panel sensor according to any one of the above. The conductors constituting the first detection pattern and the first dummy pattern are arranged such that the openings formed between the conductors are regularly arranged at a predetermined first arrangement pitch,
The conducting wires constituting the second detection pattern and the second dummy pattern are arranged such that the openings formed between the conducting wires are regularly arranged at a second arrangement pitch that is the same as the first arrangement pitch. The touch panel sensor according to any one of claims 1, 2, 3, 5, 6, 7, 8, and 9 . When viewed from the normal direction of the support, the conductive wires constituting the second detection pattern and the second dummy pattern are the first detection pattern and the second detection pattern by a predetermined distance smaller than the first arrangement pitch. The touch panel sensor according to claim 10 , wherein the touch panel sensor is arranged so as to be shifted with respect to the conducting wire constituting the first dummy pattern. The touch panel sensor according to any one of claims 1 to 11, characterized in that the width of the first gap is in the range from 2～1000Myuemu. The lead constituting the first detection pattern, according to any one of claims 1 to 12, characterized in that conductivity is several cuts are placed in a range not lost in the first direction Touch panel sensor.

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