JP5656987B2 - Method and apparatus for manufacturing organic EL element - Google Patents

Description

  The present invention relates to a manufacturing method and a manufacturing apparatus of an organic EL element that can be used for an organic EL (Electro Luminescence) display, for example.

  In recent years, there has been a demand for flat panel displays that are large in size, high in image quality, and low in power consumption. Organic EL displays that can be driven at a low voltage and have high image quality are attracting a great deal of attention. For example, in a full-color active matrix organic EL display, a thin-film organic EL element is provided on a substrate on which a TFT (thin film transistor) is provided. In the organic EL element, an organic EL layer including red (R), green (G), and blue (B) light emitting layers is laminated between a pair of electrodes. A TFT is connected to one of the pair of electrodes. An image is displayed by applying a voltage between the pair of electrodes to cause each light emitting layer to emit light.

  In order to manufacture an organic EL element, it is necessary to form a light emitting layer made of an organic light emitting material that emits light of each color in a predetermined pattern.

  As a method for forming the light emitting layer in a predetermined pattern, for example, a vacuum deposition method, an ink jet method, and a laser transfer method are known. For example, a vacuum evaporation method is often used in a low molecular organic EL display (OLED).

  In the vacuum deposition method, a mask (also referred to as a shadow mask) in which openings having a predetermined pattern are formed is used. The deposition surface of the substrate to which the mask is closely fixed is opposed to the deposition source. Then, vapor deposition particles (film forming material) from the vapor deposition source are vapor deposited on the vapor deposition surface through the opening of the mask, thereby forming a thin film having a predetermined pattern. Vapor deposition is performed for each color of the light emitting layer (this is called “separate vapor deposition”).

  For example, Patent Documents 1 and 2 describe a method in which a mask is sequentially moved with respect to a substrate to perform separate deposition of light emitting layers of respective colors. In such a method, a mask having a size equivalent to that of the substrate is used, and the mask is fixed so as to cover the deposition surface of the substrate during vapor deposition.

JP-A-8-227276 JP 2000-188179 A

  In such a conventional separate vapor deposition method, as the substrate becomes larger, it is necessary to enlarge the mask accordingly. However, when the mask is enlarged, a gap is likely to be generated between the substrate and the mask due to deflection or extension of the mask due to its own weight. For this reason, it is difficult to perform high-precision patterning, and it is difficult to realize high definition due to the occurrence of misalignment of deposition positions and color mixing.

  In addition, when the mask is enlarged, the mask and the frame for holding the mask become enormous and the weight of the mask increases, which makes handling difficult and may impair productivity and safety. In addition, since the vapor deposition apparatus and its accompanying apparatus are similarly enlarged and complicated, the apparatus design becomes difficult and the installation cost becomes high.

  Therefore, it is difficult to cope with a large substrate by the conventional separate deposition method, and for example, a method capable of separate deposition at a mass production level cannot be realized for a large substrate exceeding 60 inch size.

  On the other hand, in an organic EL display, high resolution and high brightness are strongly desired in addition to an increase in size. For this purpose, it is necessary to reduce the pixel pitch of the organic EL element and increase the aperture ratio.

  An object of the present invention is to provide a method and an apparatus for manufacturing an organic EL element that can be applied to a large substrate without increasing the pixel pitch or reducing the aperture ratio.

  The method for producing an organic EL element of the present invention is a method for producing an organic EL element having a film with a predetermined pattern on a substrate, and includes a vapor deposition step in which vapor deposition particles are deposited on the substrate to form the film. The vapor deposition step uses a vapor deposition unit including a vapor deposition source having a vapor deposition source opening that emits the vapor deposition particles, and a vapor deposition mask disposed between the vapor deposition source opening and the substrate, In a state where the deposition mask is spaced apart from the deposition mask by a predetermined distance, one of the substrate and the deposition unit is moved relative to the other while passing through a plurality of mask openings formed in the deposition mask. It is a step of attaching the vapor deposition particles to the substrate. When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction are provided. Each of the plurality of limiting plates limits an incident angle when the vapor deposition particles incident on each of the plurality of mask openings are viewed along the first direction.

  The organic EL element manufacturing apparatus of the present invention is an organic EL element manufacturing apparatus having a film with a predetermined pattern on a substrate, and includes a vapor deposition source provided with a vapor deposition source opening for emitting vapor deposition particles for forming the film. And a deposition unit having a deposition mask disposed between the deposition source opening and the substrate, and the substrate and the deposition unit are spaced apart from each other by a predetermined interval. And a moving mechanism for moving one of them relative to the other. The vapor deposition mask has a plurality of mask openings through which the vapor deposition particles emitted from the vapor deposition source opening pass. When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction are further provided. Each of the plurality of limiting plates limits an incident angle when the vapor deposition particles incident on each of the plurality of mask openings are viewed along the first direction.

  According to the present invention, the vapor deposition particles that have passed through the mask opening formed in the vapor deposition mask are attached to the substrate while moving one of the substrate and the vapor deposition unit relative to the other, so that the vapor deposition is smaller than the substrate. A mask can be used. Accordingly, it is possible to form a stripe-shaped film by separately coating even a large substrate.

  Further, since the limiting plate limits the incident angle when viewed along the first direction of the vapor deposition particles incident on the mask opening, the traveling direction of the vapor deposition particles passing through the mask opening can be managed. Therefore, even when the vapor deposition mask and the substrate are separated from each other, it is possible to suppress the occurrence of blurring at both ends of the striped film. As a result, it is not necessary to increase the interval between the stripe-shaped films or reduce the width thereof.

  Therefore, according to the present invention, an organic EL element can be formed on a large substrate without increasing the pixel pitch or decreasing the aperture ratio. As a result, a large-sized organic EL display with high resolution and high brightness can be manufactured.

FIG. 1 is a cross-sectional view showing a schematic configuration of an organic EL display. FIG. 2 is a plan view showing a configuration of pixels constituting the organic EL display shown in FIG. FIG. 3 is a cross-sectional view of the TFT substrate constituting the organic EL display along the line 3-3 in FIG. FIG. 4 is a flowchart showing the manufacturing process of the organic EL display in the order of steps. FIG. 5 is a perspective view showing the basic concept of the new vapor deposition method. 6 is a front view of the vapor deposition apparatus shown in FIG. 5 as viewed along a direction parallel to the traveling direction of the substrate. FIG. 7 is a cross-sectional view for explaining the cause of blurring occurring at the edge of the coating in the new vapor deposition method of FIG. FIG. 8 is a perspective view showing a schematic configuration of the organic EL element manufacturing apparatus according to Embodiment 1 of the present invention. FIG. 9 is a front view of the organic EL element manufacturing apparatus according to Embodiment 1 of the present invention as seen along a direction perpendicular to the width direction of the substrate. FIG. 10 is a perspective plan view of the vapor deposition unit constituting the organic EL element manufacturing apparatus according to Embodiment 1 of the present invention, as viewed from the vapor deposition mask side. FIG. 11 is a cross-sectional view taken along line 11-11 in FIG. 10 showing the flow of vapor deposition particles in the vapor deposition block in the organic EL element manufacturing apparatus according to Embodiment 1 of the present invention. 12 is a cross-sectional view taken along line 12-12 of FIG. 10 showing the flow of vapor deposition particles in the vapor deposition block in the organic EL element manufacturing apparatus according to Embodiment 1 of the present invention. FIG. 13 is a perspective plan view of the vapor deposition block as viewed from the vapor deposition mask side in the organic EL element manufacturing apparatus according to Embodiment 1 of the present invention. FIG. 14 is a perspective plan view of the vapor deposition unit constituting the organic EL element manufacturing apparatus according to Embodiment 2 of the present invention, as viewed from the vapor deposition mask side. FIG. 15 is a cross-sectional view taken along line 15-15 in FIG. 14 showing the flow of vapor deposition particles in the vapor deposition block in the organic EL element manufacturing apparatus according to Embodiment 2 of the present invention. FIG. 16 is a perspective plan view of the vapor deposition block as seen from the vapor deposition mask side in the organic EL element manufacturing apparatus according to Embodiment 2 of the present invention. FIG. 17 is a perspective plan view of a vapor deposition unit constituting an organic EL element manufacturing apparatus according to Embodiment 3 of the present invention as viewed from the vapor deposition mask side. 18 is a cross-sectional view taken along the line 18-18 in FIG. 17 of the vapor deposition unit constituting the organic EL element manufacturing apparatus according to Embodiment 3 of the present invention. FIG. 19 is a perspective plan view of a vapor deposition unit constituting an organic EL element manufacturing apparatus according to Embodiment 4 of the present invention, as viewed from the vapor deposition mask side. FIG. 20 is a perspective plan view of another vapor deposition unit constituting the organic EL element manufacturing apparatus according to Embodiment 4 of the present invention, as viewed from the vapor deposition mask side. FIG. 21 is a perspective view showing a schematic configuration of an organic EL element manufacturing apparatus according to Embodiment 5 of the present invention. FIG. 22 is a cross-sectional view showing the flow of vapor deposition particles in the vapor deposition block in the organic EL device manufacturing apparatus according to Embodiment 5 of the present invention. FIG. 23 is a perspective plan view of the vapor deposition block as seen from the vapor deposition mask side in the organic EL element manufacturing apparatus according to Embodiment 6 of the present invention. FIG. 24 is a perspective plan view of the vapor deposition unit constituting the organic EL element manufacturing apparatus according to Embodiment 7 of the present invention, as viewed from the vapor deposition mask side. FIG. 25 is a perspective plan view of the vapor deposition unit constituting the organic EL element manufacturing apparatus according to Embodiment 8 of the present invention, as viewed from the vapor deposition mask side. FIG. 26 is a cross-sectional view showing the flow of vapor deposition particles in the vapor deposition block in the organic EL device manufacturing apparatus according to Embodiment 8 of the present invention.

  In the method for manufacturing an organic EL element according to the aspect of the invention, the restriction plate may be configured such that vapor deposition particles emitted from the vapor deposition source opening on one side of the second direction with respect to the restriction plate are in the second direction. It is preferred to prevent entry into the mask opening arranged on the other side. Thereby, since the advancing direction of the vapor deposition particle which passes a mask opening can be managed more easily, generation | occurrence | production of the blurring of the both-ends edge of a striped film can be suppressed further.

  It is preferable that the vapor deposition source opening is disposed between the limiting plates adjacent in the second direction. Thereby, since the vapor deposition particles adhering to the limiting plate can be reduced, the waste of the vapor deposition material can be reduced.

  It is preferable that the number of the vapor deposition source openings is plural. The plurality of vapor deposition source openings and the plurality of limiting plates preferably have substantially the same pitch in the second direction. Thereby, one vapor deposition source opening can be arrange | positioned between a pair of adjacent restriction | limiting plates. Therefore, since the traveling direction of the vapor deposition particles passing through the mask opening can be more easily managed, it is possible to further suppress the occurrence of blurring at both end edges of the striped film. In addition, since a plurality of vapor deposition blocks having the same configuration including a pair of adjacent limiting plates and one vapor deposition source opening and a mask opening arranged therebetween can be arranged in the second direction, the second direction is wide. A uniform organic EL element can be manufactured over a range.

  The width in the second direction of the plurality of mask openings arranged between the restricting plates adjacent in the second direction is the second width of the vapor deposition source opening arranged between the restricting plates adjacent in the second direction. It is preferable that the distance increases as the distance from the position in the direction increases in the second direction. Thereby, a plurality of stripe-shaped films having the same width can be easily formed on the deposition surface of the substrate.

  The length in the first direction of the plurality of mask openings arranged between the restriction plates adjacent in the second direction is the first length of the vapor deposition source opening arranged between the restriction plates adjacent in the second direction. It is preferable that the length increases as the distance from the position in the two directions increases in the second direction. As a result, a plurality of stripe-shaped films having the same thickness can be easily formed on the deposition surface of the substrate.

  It is preferable that the pitch in the second direction of the plurality of mask openings arranged between the limiting plates adjacent in the second direction is constant. Thereby, a plurality of striped films having a constant pitch in the second direction can be easily formed on the deposition surface of the substrate.

  It is preferable that a pitch in the second direction of the plurality of mask openings arranged between the limiting plates adjacent in the second direction is smaller than a pitch in the second direction of the coating formed on the substrate. Thereby, a plurality of striped films having a constant pitch in the second direction can be easily formed on the deposition surface of the substrate.

  A plurality of the vapor deposition source openings may be arranged along a plurality of rows having different positions in the first direction. In this case, it is preferable that the plurality of mask openings and the plurality of limiting plates are arranged along the plurality of rows corresponding to the positions of the plurality of vapor deposition source openings. Thereby, the freedom degree of design regarding a some vapor deposition source opening, a some restricting board, and a some mask opening increases.

  In the above, at least one of the plurality of rows is preferably different from at least one other row with respect to the positions of the vapor deposition source opening, the mask opening, and the limiting plate in the second direction. Thereby, since the distance between the vapor deposition source openings adjacent to each other in the second direction can be increased, the design, production, maintenance and the like related to the limiting plate are facilitated. Moreover, since the amount of the vapor deposition material adhering to the limiting plate can be reduced, waste of the vapor deposition material can be reduced.

  In the two rows adjacent in the first direction among the plurality of rows, it is preferable that the plurality of vapor deposition source openings are arranged in a staggered manner. Thereby, a plurality of vapor deposition source openings can be efficiently arranged in the vapor deposition source. Furthermore, since the distance between the vapor deposition source openings adjacent to each other in the second direction can be increased, the design, production, maintenance, etc. relating to the limiting plate are facilitated. Moreover, since the amount of the vapor deposition material adhering to the limiting plate can be reduced, waste of the vapor deposition material can be reduced.

  The vapor deposition unit may further include a second limiting plate between the vapor deposition source opening and the vapor deposition mask. In this case, the second restriction plate is arranged such that the vapor deposition particles emitted from the vapor deposition source opening on one side in the first direction with respect to the second restriction plate are arranged on the other side in the first direction. Further, it is preferable to prevent entry into the mask opening. Thereby, since the advancing direction of the vapor deposition particle which passes a mask opening can be managed more easily, generation | occurrence | production of the blurring of the both-ends edge of a striped film can be suppressed further.

  The vapor deposition source openings arranged in each of the two rows adjacent to each other in the first direction may be inclined and opened in opposite directions when viewed along the second direction. As a result, it is possible to reduce the number of vapor deposition particles that are emitted from the vapor deposition source opening of one of the two adjacent rows and enter the mask opening of the other row. Can be further suppressed.

  It is preferable that the pitch of the vapor deposition source openings in the first direction is not constant. For example, when the direction in which the vapor deposition source opening emits vapor deposition particles is changed for each column, the pitch in the first direction of the vapor deposition source opening is varied to thereby change the vapor deposition source aperture in one of the two adjacent columns. It is possible to reduce the number of vapor deposition particles emitted from the gas and entering the mask openings of the other row.

  A common film may be formed on the substrate by the vapor deposition particles that have passed through at least two of the mask openings belonging to at least two of the plurality of rows. Thereby, the freedom degree of design, such as a mask opening, a limiting plate, and a vapor deposition source opening, increases.

  The second restriction plate may be bent in a zigzag shape. Thereby, the arrangement | positioning density of a vapor deposition source opening can be increased and a vapor deposition unit can be reduced in size.

  It is preferable to cool at least a part of the plurality of limiting plates. Thereby, since re-evaporation of the vapor deposition particles adhering to the limiting plate can be prevented, it is possible to further suppress the occurrence of blurring at both end edges of the striped film. “Cooling the limiting plate” includes not only directly cooling the limiting plate, but also cooling the limiting plate indirectly by cooling other members and utilizing heat conduction or the like.

  It is preferable to cool at least a part of the second restriction plate. Thereby, since re-evaporation of the vapor deposition particles adhering to the 2nd restriction board can be prevented, generation | occurrence | production of the blur of the both-ends edge of a striped film can further be suppressed. Note that “cooling the second restriction plate” means cooling the second restriction plate indirectly by cooling other members and using heat conduction or the like in addition to directly cooling the second restriction plate. Including the case of

  It is preferable that the plurality of limiting plates are integrated. This eliminates the need to adjust the position of each of the plurality of limiting plates and improves the positional accuracy of the limiting plates. In addition, it is easy to replace the plurality of limiting plates. Note that “a plurality of restriction plates are integrated” means that a plurality of restriction plates are integrally formed from a single material, and a plurality of restriction plates that are separately produced are combined. And integrated.

  It is preferable that the plurality of limiting plates and the second limiting plate are integrated. Thereby, the position adjustment of each of the plurality of limiting plates and the second limiting plate is not necessary. In addition, the replacement work of the plurality of limiting plates and the second limiting plate is facilitated. In addition, “a plurality of limiting plates and a plurality of second limiting plates are integrated” means that when a plurality of limiting plates and a plurality of second limiting plates are integrally formed from a single material, And the case where the some restriction | limiting board produced separately and the some 2nd restriction | limiting board are combined and integrated is included.

  The thickness of the limiting plate in the second direction may be larger than the interval between the limiting plates adjacent in the second direction. Thereby, the surface facing the vapor deposition source of the limiting plate can be used as a shutter that blocks vapor deposition particles.

  A plurality of mask opening rows having different positions in the second direction may be arranged between the restriction plates adjacent in the second direction. In this case, it is preferable that each of the plurality of mask opening rows includes the plurality of mask openings arranged along the first direction. Thereby, the fall of the intensity | strength of the vapor deposition mask by forming several mask opening can be decreased. Further, the dimensional stability and thermal conductivity of the vapor deposition mask are improved.

  In the above, the total dimension in the first direction of the plurality of mask openings included in each of the plurality of mask opening rows is the first dimension of the vapor deposition source openings disposed between the limiting plates adjacent in the second direction. It is preferable that the distance increases as the distance from the position in the two directions increases in the second direction. As a result, a plurality of stripe-shaped films having the same thickness can be easily formed on the deposition surface of the substrate.

  The vapor deposition source opening may be a slit-like opening extending in the first direction. As a result, the opening area of the vapor deposition source opening is enlarged and the vapor deposition particles released are increased, so that the vapor deposition rate is increased and the throughput in mass production can be improved.

  The vapor deposition source opening may extend so as to cross the limiting plate in the second direction. As a result, the opening area of the vapor deposition source opening is enlarged and the vapor deposition particles released are increased, so that the vapor deposition rate is increased and the throughput in mass production can be improved. Moreover, the position accuracy of the vapor deposition source in the second direction with respect to the plurality of limiting plates and the vapor deposition mask can be relaxed.

  In this case, the length in the first direction of the plurality of mask openings arranged between the restriction plates adjacent in the second direction becomes longer as the distance in the second direction to the restriction plate becomes shorter. It is preferable. As a result, a plurality of stripe-shaped films having the same thickness can be easily formed on the deposition surface of the substrate.

  The coating is preferably a light emitting layer. This makes it possible to manufacture a large organic EL display with high resolution and high brightness.

  Below, this invention is demonstrated in detail, showing suitable embodiment. However, it goes without saying that the present invention is not limited to the following embodiments. For convenience of explanation, the drawings referred to in the following description show only the main members necessary for explaining the present invention in a simplified manner among the constituent members of the embodiment of the present invention. Therefore, the present invention can include arbitrary components not shown in the following drawings. In addition, the dimensions of the members in the following drawings do not faithfully represent the actual dimensions of the constituent members and the dimensional ratios of the members.

(Configuration of organic EL display)
An example of an organic EL display that can be manufactured by applying the present invention will be described. This organic EL display is a bottom emission type that extracts light from the TFT substrate side, and is a full color by controlling light emission of pixels (sub-pixels) composed of red (R), green (G), and blue (B) colors. This is an organic EL display that displays an image.

  First, the overall configuration of the organic EL display will be described below.

  FIG. 1 is a cross-sectional view showing a schematic configuration of an organic EL display. FIG. 2 is a plan view showing a configuration of pixels constituting the organic EL display shown in FIG. FIG. 3 is a cross-sectional view of the TFT substrate constituting the organic EL display along the line 3-3 in FIG.

  As shown in FIG. 1, the organic EL display 1 includes an organic EL element 20, an adhesive layer 30, and a sealing substrate 40 connected in this order on a TFT substrate 10 on which a TFT 12 (see FIG. 3) is provided. It has a provided configuration. The center of the organic EL display 1 is a display area 19 for displaying an image, and an organic EL element 20 is disposed in the display area 19.

  The organic EL element 20 is sealed between the pair of substrates 10 and 40 by bonding the TFT substrate 10 on which the organic EL element 20 is laminated to the sealing substrate 40 using the adhesive layer 30. As described above, since the organic EL element 20 is sealed between the TFT substrate 10 and the sealing substrate 40, entry of oxygen and moisture into the organic EL element 20 from the outside is prevented.

  As shown in FIG. 3, the TFT substrate 10 includes a transparent insulating substrate 11 such as a glass substrate as a support substrate. However, in the top emission type organic EL display, the insulating substrate 11 does not need to be transparent.

  On the insulating substrate 11, as shown in FIG. 2, a plurality of wirings 14 including a plurality of gate lines laid in the horizontal direction and a plurality of signal lines laid in the vertical direction and intersecting the gate lines are provided. It has been. A gate line driving circuit (not shown) for driving the gate line is connected to the gate line, and a signal line driving circuit (not shown) for driving the signal line is connected to the signal line. On the insulating substrate 11, sub-pixels 2R, 2G, and 2B made of organic EL elements 20 of red (R), green (G), and blue (B) colors are provided in each region surrounded by the wirings 14, respectively. They are arranged in a matrix.

  The sub pixel 2R emits red light, the sub pixel 2G emits green light, and the sub pixel 2B emits blue light. Sub-pixels of the same color are arranged in the column direction (vertical direction in FIG. 2), and repeating units composed of sub-pixels 2R, 2G, and 2B are repeatedly arranged in the row direction (left-right direction in FIG. 2). The sub-pixels 2R, 2G, and 2B constituting the repeating unit in the row direction constitute the pixel 2 (that is, one pixel).

  Each sub-pixel 2R, 2G, 2B includes a light-emitting layer 23R, 23G, 23B responsible for light emission of each color. The light emitting layers 23R, 23G, and 23B extend in a stripe shape in the column direction (vertical direction in FIG. 2).

  The configuration of the TFT substrate 10 will be described.

  As shown in FIG. 3, the TFT substrate 10 is formed on a transparent insulating substrate 11 such as a glass substrate, a TFT 12 (switching element), a wiring 14, an interlayer film 13 (interlayer insulating film, planarizing film), an edge cover 15, and the like. Is provided.

  The TFT 12 functions as a switching element that controls light emission of the sub-pixels 2R, 2G, and 2B, and is provided for each of the sub-pixels 2R, 2G, and 2B. The TFT 12 is connected to the wiring 14.

  The interlayer film 13 also functions as a planarizing film, and is laminated on the entire surface of the display region 19 on the insulating substrate 11 so as to cover the TFT 12 and the wiring 14.

  A first electrode 21 is formed on the interlayer film 13. The first electrode 21 is electrically connected to the TFT 12 through a contact hole 13 a formed in the interlayer film 13.

  The edge cover 15 is formed on the interlayer film 13 so as to cover the pattern end of the first electrode 21. The edge cover 15 has a short circuit between the first electrode 21 and the second electrode 26 constituting the organic EL element 20 because the organic EL layer 27 is thinned or electric field concentration occurs at the pattern end of the first electrode 21. This is an insulating layer for preventing this.

  The edge cover 15 is provided with openings 15R, 15G, and 15B for each of the sub-pixels 2R, 2G, and 2B. The openings 15R, 15G, and 15B of the edge cover 15 serve as light emitting areas of the sub-pixels 2R, 2G, and 2B. In other words, each of the sub-pixels 2R, 2G, 2B is partitioned by the edge cover 15 having an insulating property. The edge cover 15 also functions as an element isolation film.

  The organic EL element 20 will be described.

  The organic EL element 20 is a light emitting element that can emit light with high luminance by low-voltage direct current drive, and includes a first electrode 21, an organic EL layer 27, and a second electrode 26 in this order.

  The first electrode 21 is a layer having a function of injecting (supplying) holes into the organic EL layer 27. As described above, the first electrode 21 is connected to the TFT 12 via the contact hole 13a.

  As shown in FIG. 3, the organic EL layer 27 includes a hole injection layer / hole transport layer 22, light emitting layers 23 </ b> R, 23 </ b> G, between the first electrode 21 and the second electrode 26 from the first electrode 21 side. 23B, the electron transport layer 24, and the electron injection layer 25 are provided in this order.

  In this embodiment, the first electrode 21 is an anode and the second electrode 26 is a cathode. However, the first electrode 21 may be a cathode and the second electrode 26 may be an anode. In this case, the organic EL layer 27 is configured. The order of each layer is reversed.

  The hole injection layer / hole transport layer 22 has both a function as a hole injection layer and a function as a hole transport layer. The hole injection layer is a layer having a function of increasing the efficiency of hole injection into the light emitting layers 23R, 23G, and 23B. The hole transport layer is a layer having a function of improving the efficiency of transporting holes to the light emitting layers 23R, 23G, and 23B. The hole injection layer / hole transport layer 22 is uniformly formed on the entire surface of the display region 19 in the TFT substrate 10 so as to cover the first electrode 21 and the edge cover 15.

  In this embodiment, the hole injection layer / hole transport layer 22 in which the hole injection layer and the hole transport layer are integrated is provided. However, the present invention is not limited to this, and The hole transport layer may be formed as a layer independent of each other.

  On the hole injection layer / hole transport layer 22, the light emitting layers 23R, 23G, and 23B correspond to the columns of the sub-pixels 2R, 2G, and 2B so as to cover the openings 15R, 15G, and 15B of the edge cover 15, respectively. Is formed. The light emitting layers 23R, 23G, and 23B are layers having a function of emitting light by recombining holes injected from the first electrode 21 side and electrons injected from the second electrode 26 side. . Each of the light emitting layers 23R, 23G, and 23B includes a material having high light emission efficiency such as a low molecular fluorescent dye or a metal complex.

  The electron transport layer 24 is a layer having a function of increasing the electron transport efficiency from the second electrode 26 to the light emitting layers 23R, 23G, and 23B.

  The electron injection layer 25 is a layer having a function of increasing the electron injection efficiency from the second electrode 26 to the light emitting layers 23R, 23G, and 23B.

  The electron transport layer 24 is formed on the light emitting layers 23R, 23G, 23B and the hole injection / hole transport layer 22 so as to cover the light emitting layers 23R, 23G, 23B and the hole injection / hole transport layer 22. It is uniformly formed over the entire surface of the display area 19 in the substrate 10. The electron injection layer 25 is uniformly formed on the entire surface of the display region 19 in the TFT substrate 10 on the electron transport layer 24 so as to cover the electron transport layer 24.

  In the present embodiment, the electron transport layer 24 and the electron injection layer 25 are provided as independent layers. However, the present invention is not limited to this, and a single layer in which both are integrated (that is, an electron) It may be provided as a transport layer / electron injection layer).

  The second electrode 26 is a layer having a function of injecting electrons into the organic EL layer 27. The second electrode 26 is formed uniformly over the entire surface of the display region 19 in the TFT substrate 10 on the electron injection layer 25 so as to cover the electron injection layer 25.

  Note that organic layers other than the light emitting layers 23R, 23G, and 23B are not essential as the organic EL layer 27, and may be selected according to the required characteristics of the organic EL element 20. Moreover, the organic EL layer 27 may further include a carrier blocking layer as necessary. For example, by adding a hole blocking layer as a carrier blocking layer between the light emitting layers 23R, 23G, and 23B and the electron transport layer 24, holes are prevented from passing through the electron transport layer 24, and the light emission efficiency is improved. can do.

For example, the organic EL element 20 may employ a layer configuration as shown in the following (1) to (8).
(1) First electrode / light emitting layer / second electrode (2) First electrode / hole transport layer / light emitting layer / electron transport layer / second electrode (3) First electrode / hole transport layer / light emitting layer / Hole blocking layer / electron transport layer / second electrode (4) first electrode / hole transport layer / light emitting layer / hole blocking layer / electron transport layer / electron injection layer / second electrode (5) first electrode / Hole injection layer / hole transport layer / light emitting layer / electron transport layer / electron injection layer / second electrode (6) first electrode / hole injection layer / hole transport layer / light emitting layer / hole blocking layer / electron Transport layer / second electrode (7) first electrode / hole injection layer / hole transport layer / light emitting layer / hole blocking layer / electron transport layer / electron injection layer / second electrode (8) first electrode / positive Hole injection layer / hole transport layer / electron blocking layer (carrier blocking layer) / light emitting layer / hole blocking layer / electron transport layer / electron injection layer / second electrode In the above layer configuration, for example, the hole injection layer and the hole transport layer may be an integrated single layer. Further, the electron transport layer and the electron injection layer may be an integrated single layer.

  Further, the configuration of the organic EL element 20 is not limited to the above-described exemplary layer configurations (1) to (8), and for example, a desired layer configuration can be adopted according to the characteristics required for the organic EL element 20. .

(Method for manufacturing organic EL display)
Next, the manufacturing method of the organic EL display 1 will be described below.

  FIG. 4 is a flowchart showing manufacturing steps of the organic EL display 1 in the order of steps.

  As shown in FIG. 4, the manufacturing method of the organic EL display 1 according to the present embodiment includes, for example, a TFT substrate / first electrode manufacturing step S1, a hole injection layer / hole transport layer forming step S2, and a light emitting layer. Formation step S3, electron transport layer formation step S4, electron injection layer formation step S5, second electrode formation step S6, and sealing step S7 are provided in this order.

  Below, each process of FIG. 4 is demonstrated. However, the dimensions, materials, shapes, and the like of the components shown below are merely examples, and the present invention is not limited to these. In the present embodiment, the first electrode 21 is an anode and the second electrode 26 is a cathode. Conversely, when the first electrode 21 is a cathode and the second electrode 26 is an anode, the organic EL The order of layer stacking is reversed from the description below. Similarly, the materials constituting the first electrode 21 and the second electrode 26 are also reversed from the following description.

  First, the TFT 12 and the wiring 14 are formed on the insulating substrate 11 by a known method. As the insulating substrate 11, for example, a transparent glass substrate or a plastic substrate can be used. The thickness of the insulating substrate 11 can be set to, for example, 0.7 to 1.1 mm, and the vertical and horizontal dimensions can be set to, for example, 500 mm × 400 mm, but is not limited thereto. In one embodiment, a rectangular glass plate having a thickness of about 1 mm and a vertical and horizontal dimension of 500 × 400 mm can be used.

  Next, a photosensitive resin is applied on the insulating substrate 11 so as to cover the TFT 12 and the wiring 14, and patterning is performed by a photolithography technique, thereby forming the interlayer film 13. As a material of the interlayer film 13, for example, an insulating material such as an acrylic resin or a polyimide resin can be used. Examples of the acrylic resin include Optomer series manufactured by JSR Corporation. Moreover, as a polyimide resin, the photo nice series by Toray Industries, Inc. is mentioned, for example. However, the polyimide resin is generally not transparent but colored. For this reason, when the bottom emission type organic EL display 1 as shown in FIG. 3 is manufactured, it is preferable to use a transparent resin such as an acrylic resin as the interlayer film 13. The thickness of the interlayer film 13 is not particularly limited as long as the step on the upper surface of the TFT 12 can be eliminated. In one embodiment, the interlayer film 13 having a thickness of about 2 μm can be formed using an acrylic resin.

  Next, a contact hole 13 a for electrically connecting the first electrode 21 to the TFT 12 is formed in the interlayer film 13.

  Next, the first electrode 21 is formed on the interlayer film 13. That is, an ITO (Indium Tin Oxide) film, for example, is formed as a conductive film (electrode film) on the interlayer film 13 by a sputtering method or the like with a thickness of, for example, 100 nm. Next, after applying a photoresist on the ITO film and performing patterning using a photolithography technique, the ITO film is etched using ferric chloride as an etchant. Thereafter, the photoresist is stripped using a resist stripping solution, and substrate cleaning is further performed. Thereby, a matrix-like first electrode 21 is obtained on the interlayer film 13.

  As the conductive film material used for the first electrode 21, in addition to ITO, transparent conductive materials such as IZO (Indium Zinc Oxide) and gallium-doped zinc oxide (GZO); gold (Au), nickel (Ni ), Or a metal material such as platinum (Pt).

  As a method for laminating the conductive film, in addition to the sputtering method, a vacuum deposition method, a CVD (chemical vapor deposition) method, a plasma CVD method, a printing method, or the like can be used.

  In one embodiment, the first electrode 21 having a thickness of about 100 nm can be formed by sputtering using ITO.

  Next, the edge cover 15 having a predetermined pattern is formed. The edge cover 15 can use, for example, the same insulating material as that of the interlayer film 13 and can be patterned by the same method as that of the interlayer film 13. In one embodiment, the interlayer film 13 having a thickness of about 1 μm can be formed using an acrylic resin.

  As described above, the TFT substrate 10 and the first electrode 21 are manufactured (step S1).

  Next, the TFT substrate 10 that has undergone step S <b> 1 is baked under reduced pressure for dehydration, and further subjected to oxygen plasma treatment for cleaning the surface of the first electrode 21.

  Next, a hole injection layer and a hole transport layer (in this embodiment, a hole injection layer / hole transport layer 22) are formed on the entire surface of the display region 19 of the TFT substrate 10 on the TFT substrate 10 by vapor deposition. (S2).

  Specifically, an open mask having the entire display area 19 opened is closely fixed to the TFT substrate 10 and the TFT substrate 10 and the open mask are rotated together. The material of the transport layer is deposited on the entire surface of the display area 19 of the TFT substrate 10.

  The hole injection layer and the hole transport layer may be integrated as described above, or may be layers independent of each other. The thickness of the layer is, for example, 10 to 100 nm per layer.

  Examples of the material for the hole injection layer and the hole transport layer include benzine, styrylamine, triphenylamine, porphyrin, triazole, imidazole, oxadiazole, polyarylalkane, phenylenediamine, arylamine, oxazole, anthracene, and fluorenone. , Hydrazone, stilbene, triphenylene, azatriphenylene, and derivatives thereof; polysilane compounds; vinyl carbazole compounds; thiophene compounds, aniline compounds, and the like, heterocyclic conjugated monomers, oligomers, or polymers; It is done.

  In one embodiment, 4,4′-bis [N- (1-naphthyl) -N-phenylamino] biphenyl (α-NPD) is used to form a hole injection layer / hole transport layer 22 having a thickness of 30 nm. Can be formed.

  Next, light emitting layers 23R, 23G, and 23B are formed in a stripe shape on the hole injection / hole transport layer 22 so as to cover the openings 15R, 15G, and 15B of the edge cover 15 (S3). The light emitting layers 23R, 23G, and 23B are vapor-deposited so that a predetermined region is separately applied for each color of red, green, and blue (separate vapor deposition).

  As the material of the light emitting layers 23R, 23G, and 23B, a material having high light emission efficiency such as a low molecular fluorescent dye or a metal complex is used. For example, anthracene, naphthalene, indene, phenanthrene, pyrene, naphthacene, triphenylene, anthracene, perylene, picene, fluoranthene, acephenanthrylene, pentaphen, pentacene, coronene, butadiene, coumarin, acridine, stilbene, and derivatives thereof; 8-quinolinolato) aluminum complex; bis (benzoquinolinolato) beryllium complex; tri (dibenzoylmethyl) phenanthroline europium complex; ditoluylvinylbiphenyl; and the like.

  The thickness of the light emitting layers 23R, 23G, and 23B can be set to, for example, 10 to 100 nm.

  The manufacturing method and the manufacturing apparatus of the organic EL element of the present invention can be particularly preferably used for the separate vapor deposition of the light emitting layers 23R, 23G, and 23B. Details of the method of forming the light emitting layers 23R, 23G, and 23B using the present invention will be described later.

  Next, an electron transport layer 24 is formed on the entire surface of the display region 19 of the TFT substrate 10 by vapor deposition so as to cover the hole injection layer / hole transport layer 22 and the light emitting layers 23R, 23G, and 23B (S4). The electron transport layer 24 can be formed by the same method as in the hole injection layer / hole transport layer forming step S2.

  Next, an electron injection layer 25 is formed on the entire surface of the display region 19 of the TFT substrate 10 by vapor deposition so as to cover the electron transport layer 24 (S5). The electron injection layer 25 can be formed by the same method as in the hole injection layer / hole transport layer forming step S2.

  Examples of the material of the electron transport layer 24 and the electron injection layer 25 include quinoline, perylene, phenanthroline, bisstyryl, pyrazine, triazole, oxazole, oxadiazole, fluorenone, and derivatives and metal complexes thereof; LiF (lithium fluoride) Etc. can be used.

  As described above, the electron transport layer 24 and the electron injection layer 25 may be formed as an integrated single layer or may be formed as independent layers. The thickness of each layer is, for example, 1 to 100 nm. The total thickness of the electron transport layer 24 and the electron injection layer 25 is, for example, 20 to 200 nm.

  In one embodiment, Alq (tris (8-hydroxyquinoline) aluminum) is used to form a 30 nm thick electron transport layer 24, and LiF (lithium fluoride) is used to form a 1 nm thick electron injection layer 25. Can be formed.

  Next, the second electrode 26 is formed on the entire surface of the display area 19 of the TFT substrate 10 so as to cover the electron injection layer 25 (S6). The second electrode 26 can be formed by the same method as in the hole injection layer / hole transport layer forming step S2 described above. As a material (electrode material) of the second electrode 26, a metal having a small work function is preferably used. Examples of such electrode materials include magnesium alloys (MgAg, etc.), aluminum alloys (AlLi, AlCa, AlMg, etc.), metallic calcium, and the like. The thickness of the second electrode 26 is, for example, 50 to 100 nm. In one embodiment, the second electrode 26 having a thickness of 50 nm can be formed using aluminum.

  A protective film may be further provided on the second electrode 26 so as to cover the second electrode 26 and prevent oxygen and moisture from entering the organic EL element 20 from the outside. As a material for the protective film, an insulating or conductive material can be used, and examples thereof include silicon nitride and silicon oxide. The thickness of the protective film is, for example, 100 to 1000 nm.

  As described above, the organic EL element 20 including the first electrode 21, the organic EL layer 27, and the second electrode 26 can be formed on the TFT substrate 10.

  Next, as shown in FIG. 1, the TFT substrate 10 on which the organic EL element 20 is formed and the sealing substrate 40 are bonded together with an adhesive layer 30 to encapsulate the organic EL element 20. As the sealing substrate 40, for example, an insulating substrate such as a glass substrate or a plastic substrate having a thickness of 0.4 to 1.1 mm can be used.

  Thus, the organic EL display 1 is obtained.

  In such an organic EL display 1, when the TFT 12 is turned on by signal input from the wiring 14, holes are injected from the first electrode 21 into the organic EL layer 27. On the other hand, electrons are injected from the second electrode 26 into the organic EL layer 27. Holes and electrons recombine in the light emitting layers 23R, 23G, and 23B, and emit light of a predetermined color when energy is deactivated. A predetermined image can be displayed in the display area 19 by controlling the light emission luminance of each of the sub-pixels 2R, 2G, and 2B.

  Below, process S3 which forms the light emitting layers 23R, 23G, and 23B by separate vapor deposition will be described.

(New vapor deposition method)
As a method for separately depositing the light emitting layers 23R, 23G, and 23B, the present inventors replaced the evaporation method in which a mask having the same size as the substrate is fixed to the substrate at the time of deposition, as in Patent Documents 1 and 2. A new vapor deposition method (hereinafter referred to as “new vapor deposition method”) in which vapor deposition is performed while moving the substrate relative to the vapor deposition source and the vapor deposition mask was studied.

  FIG. 5 is a perspective view showing the basic concept of the new vapor deposition method.

  The vapor deposition source 960 and the vapor deposition mask 970 constitute a vapor deposition unit 950. The relative position of the vapor deposition source 960 and the vapor deposition mask 970 is constant. The substrate 10 moves in one direction 10a at a constant speed on the opposite side of the vapor deposition mask 970 from the vapor deposition source 960. A plurality of vapor deposition source openings 961 each emitting vapor deposition particles 991 are formed on the upper surface of the vapor deposition source 960, and a plurality of mask openings 971 are formed in the vapor deposition mask 970. The vapor deposition particles 991 emitted from the vapor deposition source opening 961 pass through the mask opening 971 and adhere to the substrate 10. By repeatedly performing deposition for each color of the light emitting layers 23R, 23G, and 23B, the light emitting layers 23R, 23G, and 23B can be separately deposited.

  According to such a new vapor deposition method, the dimension D of the deposition mask 970 in the moving direction 10a of the substrate 10 can be set regardless of the dimension of the substrate 10 in the same direction. Therefore, an evaporation mask 970 smaller than the substrate 10 can be used. For this reason, even if the substrate 10 is increased in size, it is not necessary to increase the size of the vapor deposition mask 970, so that the problem of the self-weight deflection and extension of the vapor deposition mask 970 does not occur. Further, the vapor deposition mask 970 and a frame for holding the vapor deposition mask 970 do not become large and heavy. Therefore, the problems of the conventional vapor deposition methods described in Patent Documents 1 and 2 are solved, and separate vapor deposition on a large substrate becomes possible.

  However, as a result of further studies by the present inventors, the new vapor deposition method shown in FIG. 5 is blurred at the edge of the formed film (vapor deposition film) as compared with the vapor deposition methods of Patent Documents 1 and 2. It turns out that there is a problem that it is easy. The cause of this problem will be described below.

  FIG. 6 is a front view of the vapor deposition apparatus of FIG. 5 viewed along a direction parallel to the moving direction 10a of the substrate 10. A plurality of vapor deposition source openings 961 and a plurality of mask openings 971 are arranged in the left-right direction on the paper surface of FIG. The vapor deposition particles 991 are emitted from each vapor deposition source opening 961 with a certain spread (directivity). That is, in FIG. 6, the number of vapor deposition particles 991 emitted from the vapor deposition source opening 961 is the largest in the direction directly above the vapor deposition source opening 961, and as the angle (emission angle) formed with respect to the direct upward direction increases. Gradually decreases. Each vapor-deposited particle 991 emitted from the vapor deposition source opening 961 goes straight in the respective emission direction. In FIG. 6, the flow of the vapor deposition particles 991 emitted from the vapor deposition source opening 961 is conceptually indicated by arrows. Therefore, most of the vapor deposition particles 991 emitted from the vapor deposition source opening 961 located immediately below each mask opening 971 fly, but the present invention is not limited to this, and is emitted from the vapor deposition source opening 961 located obliquely below. The vapor deposition particles 991 also fly.

  FIG. 7 is a cross-sectional view of the coating film 990 formed on the substrate 10 by the vapor deposition particles 991 that have passed through a certain mask opening 971, as seen in a direction parallel to the moving direction 10a of the substrate 10 as in FIG. . As described above, the vapor deposition particles 991 flying from various directions pass through the mask opening 971. The number of the vapor deposition particles 991 reaching the vapor deposition surface 10e of the substrate 10 is the largest in the region directly above the mask opening 971, and gradually decreases with increasing distance from the area. Therefore, as shown in FIG. 7, a constant thickness portion 990c having a constant and maximum thickness is formed in a region directly above the mask opening 971 on the deposition surface 10e of the substrate 10, and constant on both sides thereof. A gradually decreasing thickness portion 990e is formed which gradually decreases as the distance from the thickness portion 990c increases. The gradually decreasing thickness portion 990e causes blurring of the edge of the coating film 990.

  In order to reduce the width We of the gradually decreasing thickness portion 990e, the distance between the vapor deposition mask 970 and the substrate 10 may be reduced. However, in the new vapor deposition method, it is necessary to move the substrate 10 relative to the vapor deposition mask 970, and therefore, the interval between the vapor deposition mask 970 and the substrate 10 cannot be made zero.

  When the width We of the gradually decreasing thickness portion 990e is large, the adjacent light emitting layer materials of different colors adhere and cause “mixed color”. In order to prevent color mixing, the resolution decreases if the interval between adjacent light emitting layers is increased, and the aperture ratio decreases and the luminance decreases if the width of the light emitting layer is reduced.

  The present inventors diligently studied to solve the above problems of the new vapor deposition method, and have completed the present invention. The preferred embodiments of the present invention will be described below.

(Embodiment 1)
FIG. 8 is a perspective view showing a schematic configuration of the organic EL element manufacturing apparatus according to Embodiment 1 of the present invention. FIG. 9 is a front view of the organic EL element manufacturing apparatus according to Embodiment 1 as viewed along a direction perpendicular to the width direction (second direction) of the substrate 10. For convenience of the following description, the horizontal axis along the width direction of the substrate 10 is the X axis, the horizontal axis perpendicular to the X axis is the Y axis, and the vertical axis parallel to the X and Y axes is the Z axis. XYZ rectangular coordinate system to be set is set. The XY plane is parallel to the deposition surface 10 e of the substrate 10.

  A vapor deposition mask 70 is disposed facing the vapor deposition source 60 in the Z-axis direction. A plurality of limiting plates 81 are arranged between the vapor deposition source 60 and the vapor deposition mask 70. The relative positions of the vapor deposition source 60, the vapor deposition mask 70, and the plurality of limiting plates 81 are constant at least during the period of performing separate vapor deposition, and these constitute the vapor deposition unit 50. The plurality of limiting plates 81 may be held by a jig (not shown) or the like so that the relative position and posture of each other are maintained constant, or are integrated (for example, see FIG. 21 described later). May be.

  The substrate 10 is held by the holding device 55. As the holding device 55, for example, an electrostatic chuck that holds the surface of the substrate 10 opposite to the deposition surface 10e with electrostatic force can be used. Thereby, the board | substrate 10 can be hold | maintained in the state which does not have the bending | flexion by the dead weight of the board | substrate 10 substantially. However, the holding device 55 for holding the substrate 10 is not limited to the electrostatic chuck, and may be other devices.

  The substrate 10 held by the holding device 55 is moved in one direction (first direction) at a constant speed with the moving mechanism 56 away from the vapor deposition mask 70 by a predetermined distance from the vapor deposition mask 70. (One direction) 10a is moved (scanned). In the first embodiment, the moving direction of the substrate 10 coincides with the positive direction of the Y axis. However, the movement of the substrate 10 may be a reciprocating movement, or may be a unidirectional movement toward only one of them. The configuration of the moving mechanism 56 is not particularly limited. For example, a known transport driving mechanism such as a feed screw mechanism that rotates a feed screw with a motor or a linear motor can be used.

  The vapor deposition unit 50, the substrate 10, the holding device 55 that holds the substrate 10, and the moving mechanism 56 that moves the substrate 10 are housed in a vacuum chamber (not shown). The vacuum chamber is a sealed container, and its internal space is decompressed and maintained in a predetermined low pressure state.

  In the present embodiment, the vapor deposition source 60 and the plurality of limiting plates 81 are separated from each other. The plurality of limiting plates 81 and the vapor deposition mask 70 are separated from each other. This is for heat dissipation and for maintaining a space between adjacent restriction plates 81 at a predetermined degree of vacuum. If there is no problem in these viewpoints, the vapor deposition source 60 and the plurality of limiting plates 81 may be in contact with or integrated with each other, and / or the plurality of limiting plates 81 and the vapor deposition mask 70 are in contact with or integrated with each other. It may be made.

  The vapor deposition source 60 includes a plurality of vapor deposition source openings 61 on an upper surface thereof (that is, a surface facing the vapor deposition mask 70). The plurality of vapor deposition source openings 61 are arranged at equal intervals along the X axis. Each vapor deposition source opening 61 opens upward along the Z axis, and emits vapor deposition particles 91 serving as a material of the light emitting layer toward the vapor deposition mask 70.

  In the vapor deposition mask 70, a plurality of mask openings 71 are formed at different positions in the X-axis direction. The plurality of mask openings 71 are arranged along the X-axis direction. The vapor deposition particles 91 emitted from the vapor deposition source opening 61 pass through the mask opening 71 and adhere to the vapor deposition surface of the substrate 10 (that is, the surface facing the vapor deposition mask 70 of the substrate 10) 10e. Form.

  The plurality of limiting plates 81 are arranged at different positions in the X-axis direction along the X-axis direction. The plurality of limiting plates 81 are thin plates having the same dimensions, and each limiting plate 81 is perpendicular to the deposition surface 10e of the substrate 10 and parallel to the Y-axis direction.

  FIG. 10 is a plan view of the vapor deposition unit 50 as viewed from the vapor deposition mask 70 side along the Z axis. It is shown as a perspective view so that the relative relationship among the vapor deposition source 60, the plurality of limiting plates 81, and the vapor deposition mask 70 can be understood.

  As shown in FIG. 10, the plurality of limiting plates 81 are arranged at the same pitch as the plurality of vapor deposition source openings 61 in the X-axis direction. When viewed along a direction parallel to the Z axis, one vapor deposition source opening 61 is disposed between a pair of limiting plates 81 adjacent in the X axis direction. The position of each vapor deposition source opening 61 in the X-axis direction coincides with the center position in the X-axis direction of the pair of limiting plates 81 that sandwich the opening 61 in the X-axis direction. Further, when viewed along a direction parallel to the Z axis, a plurality of mask openings 71 are arranged between a pair of limiting plates 81 adjacent in the X axis direction. Each mask opening 71 is a slit-like opening whose longitudinal direction is the Y-axis direction. The center position of each mask opening 71 in the Y-axis direction coincides with the Y-axis direction position of the vapor deposition source opening 61. A pair of limiting plates 81 adjacent in the X-axis direction, a single vapor deposition source opening 61 disposed between the pair of limiting plates 81, and a plurality of mask openings 71 disposed between the pair of limiting plates 81 One vapor deposition block 51 is configured. The vapor deposition unit 50 of the present invention includes a plurality of vapor deposition blocks 51 arranged along the X-axis direction. The plurality of vapor deposition blocks 51 have the same configuration.

  Using the organic EL element manufacturing apparatus of the present embodiment configured as described above, the light emitting layers 23R, 23G, and 23B are formed as follows.

  In a state where the vapor deposition particles 91 are emitted from the plurality of vapor deposition source openings 61 of the vapor deposition source 60, the substrate 10 is moved in the Y-axis direction. In each vapor deposition block 51, the vapor deposition particles 91 emitted from the vapor deposition source opening 61 pass between a pair of limiting plates 81 adjacent in the X-axis direction, and further, a plurality of mask openings 71 formed in the vapor deposition mask 70. And reaches the deposition surface 10e of the substrate 10. As a result, the vapor deposition particles 91 adhere to the vapor deposition surface 10e of the substrate 10 to form a plurality of striped films 90 parallel to the Y-axis direction. The X-axis direction positions and widths (X-axis direction dimensions) of the plurality of coatings 90 are the relative positional relationship between the deposition source opening 61, the mask opening 71, and the deposition surface 10 e of the substrate 10, and the mask opening 71. It is determined by the width (dimension in the X axis direction) and the like. The thickness of the coating 90 is determined by the amount of vapor deposition particles emitted from the vapor deposition source opening 61, the length of the mask opening 71 (dimension in the Y-axis direction), the relative speed of the substrate 10 with respect to the vapor deposition unit 50, and the like.

  By changing the vapor deposition material 91 for each color of red, green, and blue and performing vapor deposition three times (separate vapor deposition), a striped film corresponding to each color of red, green, and blue on the vapor deposition surface 10e of the substrate 10 90 (that is, the light emitting layers 23R, 23G, and 23B) can be formed.

  The effects of the organic EL device manufacturing apparatus of this embodiment will be described.

  In the new vapor deposition method shown in FIGS. 5 and 6, vapor deposition particles 991 emitted in an oblique direction from the vapor deposition source opening 961 pass through the mask opening 971 far from the vapor deposition source opening 961 and reach the substrate 10. . In other words, the vapor deposition particles 991 flying from the plurality of vapor deposition source openings 961 pass through the respective mask openings 971. Accordingly, the thickness gradually decreasing portion 990e as shown in FIG. 7 is generated, and the edge of the coating film 990 is blurred.

  Also in this embodiment, similarly to the above-described new vapor deposition method, the vapor deposition particles 91 are emitted with a certain spread (directivity) from the vapor deposition source opening 61. In FIG. 9, the flow of the vapor deposition particles 91 emitted from the vapor deposition source opening 61 is conceptually indicated by arrows. However, in the present embodiment, a plurality of limiting plates 81 are arranged between the vapor deposition source 60 and the vapor deposition mask 70. Accordingly, as shown in FIG. 9, among the vapor deposition particles 91 emitted from the vapor deposition source opening 61, the vapor deposition particles 91 whose velocity vector has a large X-axis direction component collide with and adhere to the limiting plate 81. The mask opening 71 cannot be reached. That is, the limiting plate 81 limits the incident angle of the vapor deposition particles 91 that enter the mask opening 71 in the projection view on the XZ plane. Here, the “incident angle” is defined as an angle formed by the traveling direction of the vapor deposition particles 91 with respect to the Z axis in the projection view on the XZ plane. Thus, in this embodiment, the vapor deposition particles 91 that pass through the mask opening 71 at a large incident angle are reduced. Accordingly, the width We of the gradually decreasing thickness portion 990e shown in FIG. 7 is reduced, and preferably, the gradually decreasing thickness portion 990e is substantially not generated. Therefore, the occurrence of blurring of the edges on both sides of the striped film 90 is greatly increased. It is suppressed. Further, the positional deviation amount of the coating 90 in the X-axis direction with respect to the mask opening 71 can be suppressed small.

  By using a thin plate as the limiting plate 81, the interval between the limiting plates 81 adjacent in the X-axis direction can be increased. Thereby, since the opening area between the restriction | limiting board 81 becomes large, the amount of vapor deposition particles adhering to the restriction | limiting board 81 can be decreased, As a result, the waste of vapor deposition material can be reduced. Further, since clogging due to the deposition material adhering to the limiting plate 81 is less likely to occur, continuous use for a long time is possible, and mass productivity of the organic EL element is improved. Further, since the opening area between the limiting plates 81 is large, it is easy to clean the vapor deposition material adhering to the limiting plates 81, the maintenance becomes simple, the stop loss in production is small, and the mass productivity is further improved.

  The plurality of limiting plates 81 have a simple structure and do not require micro processing on the order of microns, so that they are easy to manufacture and low cost.

  Like this embodiment, with respect to one vapor deposition source opening 61, a pair of limiting plates 81 and a plurality of mask openings 71 are arranged to constitute a vapor deposition block 51, and by arranging a plurality of the vapor deposition blocks 51, Design with high accuracy and high tolerance is possible. A uniform film 90 can be formed on the deposition surface 10e of the substrate 10 over a wide range.

  FIG. 11 is a cross-sectional view showing the flow of the vapor deposition particles 91 in the vapor deposition block 51 on a plane parallel to the XZ plane passing through the vapor deposition source opening 61 (a plane including the line 11-11 in FIG. 10). FIG. 12 shows the flow of the vapor deposition particles 91 in the vapor deposition block 51 on a plane passing through the vapor deposition source opening 61 and forming 45 degrees with respect to the XZ plane (a plane including the 12-12 line in FIG. 10). It is sectional drawing.

  Preferably, as shown in FIGS. 11 and 12, the limiting plate 81 has vapor deposition particles 91 emitted from a vapor deposition source opening 61 located on one side in the X-axis direction with respect to the limiting plate 81. , Preventing entry into the mask opening 71 located on the other side. As a result, only the vapor deposition particles 91 flying from the vapor deposition source opening 61 belonging to the vapor deposition block 51 are incident on any of the mask openings 71 belonging to the vapor deposition blocks 51, and for example, the vapor deposition block 51 located next to the vapor deposition block 51 in the X-axis direction. The vapor deposition particles 91 that have come from the vapor deposition source opening 61 belonging to the above are not incident.

  Accordingly, since the vapor deposition particles 91 are incident on the mask opening 71 positioned directly above the vapor deposition source opening 61 substantially in parallel with the Z axis, the opening width of the mask opening 71 and the vapor deposition surface 10e of the substrate 10 are determined. A striped film 90 having substantially the same width is formed at a position almost directly above the mask opening 71. Since the coating film 90 is formed only by the vapor deposition particles 91 flying from the vapor deposition source opening 61 located immediately below the coating film 90, almost no blur is generated at the edges on both sides of the coating film 90.

  On the other hand, the vapor deposition particles 91 enter the mask opening 71 located obliquely above the vapor deposition source opening 61 at a relatively large incident angle. Accordingly, the vapor deposition particles 91 are slightly on the deposition surface 10e of the substrate 10 outside the position directly above the mask opening 71 (on the side farther in the X axis direction from the straight line passing through the vapor deposition source opening 61 and parallel to the Z axis). It is formed at a position deviated from.

  In the new vapor deposition method shown in FIG. 6, since the vapor deposition particles 91 flying from the plurality of vapor deposition source openings 961 pass through one mask opening 971, the plurality of vapor deposition source openings 961 are formed on the deposition surface of the substrate 10. A plurality of coatings corresponding to one to one are overlapped with a slight shift in the width direction to form a coating 990. This was the cause of the thickness gradually decreasing portions 990e formed on both sides of the coating 990.

  On the other hand, in this embodiment, the vapor deposition particles 91 that pass through each mask opening 71 are limited to those that have come from only one vapor deposition source opening 61 belonging to the vapor deposition block 51 to which the mask opening 71 belongs. Therefore, any coating film 90 formed on the deposition surface 10 e of the substrate 10 is formed only by the vapor deposition particles 91 flying from the single vapor deposition source opening 61. Therefore, the stripe-shaped film 90 formed corresponding to the mask opening 71 located obliquely above the vapor deposition source opening 61 is hardly blurred at both edges. Further, since the incident angle of the vapor deposition particles 91 incident on the mask opening 71 is equal to or less than a predetermined upper limit value, the positional deviation amount in the X-axis direction between the mask opening 71 and the coating 90 corresponding thereto is small.

  FIG. 13 is a plan view of the vapor deposition block 51 as viewed from the vapor deposition mask 70 side along the Z-axis. Only a vapor deposition source opening 61, a pair of limiting plates 81, and a mask opening 71 constituting the vapor deposition block 51 are shown as perspective views. The vapor deposition block 51 shown in FIG. 13 is repeatedly arranged in the X-axis direction as shown in FIG. Note that FIG. 10 is simplified, and the number of mask openings 71 does not coincide with FIG. A preferred configuration of the mask opening 71 will be described with reference to FIG.

  As described with reference to FIG. 11, in the present embodiment, the X-axis direction position of the coating film 90 formed by the vapor deposition particles 91 that have passed through the mask opening 71 positioned directly above the vapor deposition source opening 61 is the mask opening. 71 coincides with the position in the X-axis direction. On the other hand, the position in the X-axis direction of the coating film 90 formed by the vapor deposition particles 91 that have passed through the mask opening 71 at a position shifted in the X-axis direction from the position in the X-axis direction of the vapor deposition source opening 61 The source opening 61 is shifted to the opposite side to the X-axis direction position. The amount of positional deviation in the X-axis direction between the mask opening 71 and the coating 90 corresponding thereto is proportional to the distance in the X-axis direction between the mask opening 71 and the vapor deposition source opening 61.

  Therefore, in this embodiment, the pitch in the X-axis direction of the plurality of mask openings 71 constituting the vapor deposition block 51 is set in the X-axis direction of the plurality of stripe-shaped coatings 90 to be formed on the vapor deposition surface 10e of the substrate 10. It is set smaller than the pitch. Furthermore, as shown in FIG. 13, the pitch in the X-axis direction of the plurality of mask openings 71 constituting the vapor deposition block 51 is constant. Here, the pitch in the X-axis direction of the mask opening 71 and the film 90 is defined by the X-axis direction interval of the central axis parallel to the Y-axis direction passing through the center position of the mask opening 71 and the film 90 in the X-axis direction. With such a preferable configuration, a plurality of striped films 90 can be easily formed on the deposition surface of the substrate 10 at an equal pitch in the X-axis direction. The reason why the coating film 90 having the equal pitch can be easily formed in this embodiment is that the limiting plate 81 restricts the vapor deposition source opening 61 that emits the vapor deposition particles 91 that can pass through the mask opening 71. In the above configuration, the optimum pitch in the X-axis direction of the plurality of mask openings 71 is the relative positional relationship between the vapor deposition source openings 61, the vapor deposition mask 70, and the substrate 10, the thickness of the vapor deposition mask 70, and the mask openings 71. It can be easily obtained by geometric calculation in consideration of the shape of the inner peripheral surface in the XZ sectional view, the X-axis direction positions of the plurality of coatings 90 to be formed, and the like.

  The vapor deposition mask 70 has a certain thickness. Therefore, as can be understood from FIG. 11, the effective width Wx of the mask opening 71 viewed from the vapor deposition source opening 61 differs depending on the position of the mask opening 71 in the X-axis direction. More specifically, the effective width Wx of the mask opening 71 located directly above the vapor deposition source opening 61 is substantially the same as the X-axis direction dimension of the mask opening 71, but the mask opening 71 is the true width of the vapor deposition source opening 61. As moving away from the upper position in the X-axis direction, the effective width Wx of the mask opening 71 becomes smaller than the dimension of the mask opening 71 in the X-axis direction. Here, the “effective width Wx” of the mask opening 71 is defined by a width in the X-axis direction of a bundle of flow of vapor deposition particles 91 that can pass through the mask opening 71 (vapor deposition particle flux).

  Therefore, in the present embodiment, as shown in FIG. 13, the width of the mask opening 71 (that is, the dimension in the X-axis direction) is made the smallest at the mask opening 71 positioned directly above the evaporation source opening 61, The mask opening 71 located farther in the X-axis direction from the X-axis direction position of the opening 61 is made larger (that is, as the X-axis direction distance between the mask opening 71 and the limiting plate 81 becomes smaller). The width of the mask opening 71 located immediately above the vapor deposition source opening 61 is set to be approximately the same as the width of the coating film 90 to be formed. With such a configuration, the effective widths Wx of all the mask openings 71 belonging to the vapor deposition block 51 are the same, so that a plurality of striped films 90 having the same width can be easily formed on the vapor deposition surface of the substrate 10. be able to. The reason why the film 90 having the same width can be easily formed in this embodiment is that the vapor deposition source opening 61 that discharges the vapor deposition particles 91 that can pass through the mask opening 71 is limited by the limiting plate 81. In the above configuration, the optimum width of each of the plurality of mask openings 71 depends on the relative positional relationship between the vapor deposition source opening 61, the mask opening 71, and the substrate 10, the thickness of the vapor deposition mask 70, and the inner circumference of the mask opening 71. It can be easily obtained by geometric calculation in consideration of the shape of the surface in the XZ sectional view, the X-axis direction positions and widths of the plurality of coatings 90 to be formed.

  As described above, the vapor deposition particles 91 are emitted from the vapor deposition source opening 61 with a certain spread (directivity). That is, the number of the vapor deposition particles 91 emitted from the vapor deposition source opening 61 is the largest in the opening direction of the vapor deposition source opening 61 (that is, the direction parallel to the Z axis), and the angle formed with the opening direction (the emission angle) is large. Gradually decreases as Accordingly, when viewed along a direction parallel to the Z axis as shown in FIG. 13, the density of the vapor deposition particles passing through the mask opening 71 (the number of vapor deposition particles passing through a unit area parallel to the XY plane) is determined by the vapor deposition source. The mask opening 71 far from the opening 61 in the X-axis direction decreases.

  Therefore, in the present embodiment, as shown in FIG. 13, the length of the mask opening 71 (that is, the dimension in the Y-axis direction) is the shortest at the mask opening 71 positioned directly above the vapor deposition source opening 61, The mask opening 71 located farther in the X-axis direction from the position in the X-axis direction of the opening 61 is made longer (that is, as the distance in the X-axis direction between the mask opening 71 and the limiting plate 81 becomes smaller). Since the length of the mask opening 71 is proportional to the time of exposure to the vapor deposition particles that have passed through the mask opening 71 when the substrate 10 is moved in the Y-axis direction, the length of the mask opening 71 is different as described above. By doing so, the number of vapor deposition particles passing through the mask opening 71 becomes the same among all the mask openings 71 belonging to the vapor deposition block 51. Therefore, a plurality of stripe-shaped films 90 having the same thickness can be easily formed on the deposition surface 10e of the substrate 10. The reason why the film 90 having the same thickness can be easily formed in this embodiment is that the vapor deposition source opening 61 that emits the vapor deposition particles 91 that can pass through the mask opening 71 is limited by the limiting plate 81. . In the above configuration, the optimum length of each of the plurality of mask openings 71 depends on the relative positional relationship between the vapor deposition source opening 61, the mask opening 71, and the substrate 10, the thickness of the vapor deposition mask 70, and the mask openings 71. It can be easily obtained by geometric calculation in consideration of the shape of the peripheral surface in the XZ sectional view, the X-axis direction positions of the plurality of coatings 90 to be formed, and the like.

  The above embodiment is an example, and can be changed as appropriate.

  For example, in the above embodiment, the X-axis direction pitch of the vapor deposition source openings 61 and the X-axis direction pitch of the limiting plate 81 are the same, but the present invention is not limited to this. For example, the X-axis direction pitch of the limiting plates 81 is set to an integral multiple of the X-axis direction pitch of the vapor deposition source openings 61, and a plurality of vapor deposition source openings 61 are arranged between a pair of limiting plates 81 adjacent in the X-axis direction. Also good.

  The shape of the limiting plate 81 viewed along the X-axis direction is not necessarily rectangular, and may be, for example, a substantially trapezoidal shape with a small side on the vapor deposition source 60 side and a large side on the vapor deposition mask 70 side. Further, the limiting plate 81 does not need to be a flat plate, and may be bent or curved, for example, or may be a corrugated plate.

  The thickness (dimension in the X-axis direction) of the limiting plate 81 can be arbitrarily set as long as the coating 90 can be formed at a desired position on the substrate 10 without substantially closing the mask opening 71. Further, the thickness of the limiting plate 81 does not need to be constant. For example, the limiting plate 81 may have a tapered cross section that is thick on the vapor deposition source 60 side and thin on the vapor deposition mask 70 side.

  The dimensions of the plurality of limiting plates 81 in the Z-axis direction and the Y-axis direction are not particularly limited. The dimension of the limiting plate 81 is preferably set so that the mask opening 71 belonging to the adjacent vapor deposition block 51 cannot be seen from the vapor deposition source opening 61. Furthermore, the lower end of the limiting plate 81 may be extended to the vapor deposition source 60 and / or the upper limit of the limiting plate 81 may be extended to the vapor deposition mask 70. In this case, since the intrusion of the vapor deposition particles from the adjacent vapor deposition block 51 can be greatly reduced, the color mixture can be greatly reduced, and the design margin of the organic EL element such as the arrangement of the light emitting layer can be reduced. improves.

  The limiting plate 81 may be cooled. As a result, it is possible to prevent the vapor deposition particles adhering to the limiting plate 81 from being re-evaporated, so that the traveling direction and amount of the vapor deposition particles 91 passing through the mask opening 71 can be easily managed. A coating 90 can be formed. The method for cooling the limiting plate 81 is not particularly limited, but for example, a water cooling method can be used. A cooling device may be attached to the restriction plate 81 itself, or the restriction plate 81 may be cooled using heat conduction by attaching a cooling device to a jig or the like that holds the restriction plate 81.

  There are no particular restrictions on the method of creating the limiting plate 81. For example, a plurality of limiting plates 81 may be created separately and fixed to a jig or the like by welding or the like. Alternatively, as in a limiting plate block 85 (see FIG. 21) described later, a plurality of through holes may be formed in a straight line on the thick plate, and a partition between adjacent through holes may be used as the limiting plate 81.

  The pattern of the mask opening 71 formed in the vapor deposition mask 70 is not limited to the above embodiment. The pattern of the mask opening 71 is formed by the relative positional relationship between the vapor deposition source opening 61, the vapor deposition mask 70, and the substrate 10, the thickness of the vapor deposition mask 70, and the shape of the inner peripheral surface of the mask opening 71 in the XZ sectional view. It can be calculated by geometric calculation considering the X-axis direction position and width of the plurality of coatings 90. Therefore, it is possible to freely change the design of the pattern of the mask opening 71 other than the above embodiment.

  In the above embodiment, the opening shape of the vapor deposition source opening 61 is a small-diameter circular hole, but the present invention is not limited to this. For example, the hole may be an arbitrary shape such as an ellipse, a rectangle, or a slit. Moreover, the dimension of an opening can also be set arbitrarily. However, since the spread (directivity) of the vapor deposition particles emitted from the vapor deposition source opening 61 changes depending on the shape and size of the vapor deposition source opening 61, it is necessary to review the design of the limiting plate 81 and the mask opening 71. There is sex.

  The degree of spread (directivity) of the vapor deposition particles 91 emitted from the vapor deposition source opening 61 can be freely set. The limiting plate 81 and the mask opening 71 can be appropriately changed according to the spread of the vapor deposition particles 91.

  In the above embodiment, the vapor deposition blocks 51 are arranged on a straight line parallel to the X axis, but the present invention is not limited to this. For example, a zigzag arrangement may be used (see, for example, FIG. 14 described later), and a plurality of columns of the vapor deposition blocks 51 arranged along a straight line parallel to the X axis may be arranged in the Y axis direction (for example, described later). (See FIGS. 14, 17, 19, and 20).

  In said embodiment, although the board | substrate 10 moved with respect to the stationary vapor deposition unit 50, this invention is not limited to this, One of the vapor deposition unit 50 and the board | substrate 10 is moved relatively with respect to the other. Just do it. For example, the position of the substrate 10 may be fixed and the vapor deposition unit 50 may be moved, or both the vapor deposition unit 50 and the substrate 10 may be moved.

  In said embodiment, although the board | substrate 10 was arrange | positioned above the vapor deposition unit 50, the relative positional relationship of the vapor deposition unit 50 and the board | substrate 10 is not limited to this. For example, the substrate 10 may be disposed below the vapor deposition unit 50, or the vapor deposition unit 50 and the substrate 10 may be disposed to face each other in the horizontal direction.

(Embodiment 2)
The second embodiment will be described with a focus on differences from the first embodiment.

  FIG. 14 is a plan view of the vapor deposition unit 50 constituting the organic EL element manufacturing apparatus according to Embodiment 2 of the present invention as viewed from the vapor deposition mask 70 side along the Z axis. Similarly to FIG. 10, a perspective view is shown so that the relative relationship among the vapor deposition source 60, the plurality of limiting plates 81, and the vapor deposition mask 70 can be understood.

  The present embodiment is different from the first embodiment in that a plurality of vapor deposition source openings 61 formed in the vapor deposition source 60 are staggered in two rows. That is, as shown in FIG. 14, a plurality of vapor deposition source openings 61 are arranged at an equal pitch in a direction parallel to the X axis in the first row I in the upstream of the moving direction of the substrate 10 with respect to the vapor deposition unit 50. A plurality of vapor deposition source openings 61 are arranged at an equal pitch in a direction parallel to the X axis in the second row on the downstream side in the moving direction of the substrate 10 with respect to the unit 50. The pitch in the X-axis direction of the evaporation source openings 61 is the same in the first row and the second row. However, in the X-axis direction, the first row of vapor deposition source openings 61 and the second row of vapor deposition source openings 61 are alternately arranged.

  As in the first embodiment, in each of the first row and the second row, the plurality of limiting plates 81 are different in the X-axis direction along the X-axis direction so as to sandwich each of the vapor deposition source openings 61 in the X-axis direction. Placed in position.

  A second limiting plate 82 extending in the X-axis direction is provided between the limiting plate 81 in the first row and the limiting plate 81 in the second row. An end edge on the I-th row side of the restriction plate 81 in the I-th row and an end edge on the I-th row side of the restriction plate 81 in the II-th row are connected to the second restriction plate 82. The upper edge of the second restriction plate 82 in the Z-axis direction protrudes toward the vapor deposition mask 70 from the upper edge of the plurality of restriction plates 81 in the Z-axis direction, and the lower edge of the second restriction plate 82 in the Z-axis direction. The edge protrudes to the vapor deposition source 60 side from the lower edge of the plurality of limiting plates 81 in the Z-axis direction (see FIG. 15 described later).

  In the vapor deposition mask 70, as in the first embodiment, a plurality of mask openings 71 are formed corresponding to the respective vapor deposition source openings 61. The plurality of mask openings 71 are also arranged along two rows of the first row and the second row parallel to the X axis. The X-axis direction position of the mask opening 71 is different between the I-th row and the II-th row. Each mask opening 71 is a slit-like opening whose longitudinal direction is the Y-axis direction. The plurality of mask openings 71 formed in the vapor deposition mask 70 correspond one-to-one to the plurality of striped films 10 to be formed on the vapor deposition surface of the substrate 10.

  Similar to the first embodiment, also in the present embodiment, a pair of limiting plates 81 adjacent in the X-axis direction, one vapor deposition source opening 61 disposed between the pair of limiting plates 81, and a pair of limiting plates 81. A plurality of mask openings 71 arranged between the two portions constitute one vapor deposition block 51. In the present embodiment, a plurality of vapor deposition blocks 51 are arranged in a staggered manner.

  15 is a cross-sectional view showing the flow of the vapor deposition particles 91 in the vapor deposition block 51 on a plane parallel to the XZ plane passing through the vapor deposition source opening 61 (a plane including the line 15-15 in FIG. 14). Also in the present embodiment, as in the first embodiment, the limiting plate 81 limits the incident angle of the vapor deposition particles 91 that enter the mask opening 71 in the projection view on the XZ plane. Preferably, in the limiting plate 81, vapor deposition particles 91 emitted from the vapor deposition source opening 61 located on one side in the X-axis direction with respect to the limiting plate 81 enter the mask opening 71 located on the other side. To prevent. FIG. 15 shows the flow of the vapor deposition particles 91 in the vapor deposition source openings 61 constituting the II row, but the flow of the vapor deposition particles 91 in the vapor deposition source openings 61 constituting the I row is the same as FIG. is there.

  Although not shown, the second limiting plate 82 is configured such that the vapor deposition particles emitted from the vapor deposition source opening 61 on one side in the Y-axis direction with respect to the second limiting plate 82 are on the other side in the Y-axis direction. Is prevented from entering the mask opening 71 arranged in the. Preferably, the vapor deposition particles are prevented from going back and forth between the vapor deposition block 51 in the first row and the vapor deposition block 51 in the second row. In the present embodiment, since the plurality of vapor deposition blocks 51 are arranged in a staggered manner, the second restriction plate 82 is incident on the vapor deposition particles incident on the mask opening 71 in the projection view on the XZ plane, like the restriction plate 81. Limit the angle.

  Also in the present embodiment, as in the first embodiment, in a state where the vapor deposition particles 91 are emitted from the plurality of vapor deposition source openings 61, the substrate 10 is moved in the Y-axis direction, whereby vapor deposition is performed on the deposition surface 10e of the substrate 10. The particles 91 are attached to form a plurality of striped films 90 parallel to the Y-axis direction.

  According to the present embodiment, by providing the limiting plate 81 and the second limiting plate 82, the edges on both sides of the stripe-shaped film 90 formed on the deposition surface 10e of the substrate 10 as in the first embodiment. The occurrence of blurring can be suppressed.

  Furthermore, this embodiment has the following effects.

  In the present embodiment, since the plurality of vapor deposition blocks 51 are arranged in a staggered manner, the pitch in the X-axis direction of the vapor deposition blocks 51 (or the vapor deposition source openings 61) arranged in the X-axis direction can be made larger than that in the first embodiment. . That is, the distance in the X-axis direction between the vapor deposition source opening 61 belonging to one of the two vapor deposition blocks 51 adjacent in the X-axis direction and the mask opening 71 belonging to the other can be made larger than that in the first embodiment. Accordingly, the vapor deposition particles 91 emitted from the vapor deposition source opening 61 disposed on one side in the X-axis direction with respect to the limiting plate 81 pass through the limiting plate 81 and enter the mask opening 71 disposed on the other side. The possibility of entering is lower than in the first embodiment. Therefore, the degree of freedom of design for the limiting plate 81 is wider than that of the first embodiment. For example, the dimension of the limiting plate 81 in the Z-axis direction is shortened, the interval between the limiting plates 81 adjacent in the X-axis direction is increased, or the thickness of the limiting plate 81 (the dimension in the X-axis direction) is increased. This makes it easy to design, manufacture, maintain, etc. the limiting plate 81.

  Regarding design, in addition to the design of the limiting plate 81 itself being easy, the design of its peripheral structure is also facilitated. For example, by shortening the dimension of the limiting plate 81 in the Z-axis direction, a shutter that switches the start / stop of vapor deposition between the limiting plate 81 and the vapor deposition source 60 or between the limiting plate 81 and the vapor deposition mask 70. It becomes easy to arrange. In addition, a cooling device (for example, cooling water passes) to cool the limiting plate 81 by increasing the interval between the limiting plates 81 adjacent in the X-axis direction or increasing the thickness of the limiting plate 81. It becomes easy to install the cooling water pipe) on the restriction plate 81.

  As for manufacturing, compared to the first embodiment, the interval between adjacent limiting plates 81 can be increased and the required dimensional accuracy can be relaxed, so that the limiting plate 81 can be manufactured easily and at low cost.

  Regarding maintenance, since the opening area between the restricting plates 81 can be increased, clogging is unlikely to occur, and continuous use for a long time is possible, so that mass productivity of the organic EL element is improved. Further, since the vapor deposition material adhering to the limiting plate 81 can be easily cleaned and removed, maintenance is simplified, stop loss during mass production is small, and mass productivity is further improved.

  Further, the amount of vapor deposition material adhering to the limiting plate 81 can be reduced by shortening the dimension of the limiting plate 81 in the Z-axis direction or increasing the interval between the limiting plates 81 adjacent in the X-axis direction. Therefore, waste of vapor deposition material can be reduced.

  Further, since the number of vapor deposition particles 91 between the vapor deposition blocks 51 adjacent to each other in the X-axis direction is smaller than that in the first embodiment, the edges on both sides of the striped film 90 formed on the vapor deposition surface 10e of the substrate 10 are reduced. Generation of blur can be further suppressed, and an organic EL element can be produced with higher accuracy.

  Further, since the number of vapor deposition particles 91 between the vapor deposition blocks 51 adjacent in the X-axis direction is smaller than that in the first embodiment, the pitch in the X-axis direction of the vapor deposition source openings 61 that can be provided in the vapor deposition source 60 can be reduced. it can. Accordingly, the deposition rate can be improved and the throughput is improved. Further, it is possible to easily cope with the miniaturization of the pitch of the thin film 50 in the X-axis direction, and it is possible to easily manufacture a high-resolution organic EL display.

  FIG. 16 is a plan view of the vapor deposition block 51 as viewed from the vapor deposition mask 70 side along the Z-axis. Similarly to FIG. 13, only the vapor deposition source opening 61, the limiting plate 81, the second limiting plate 82, and the mask opening 71 constituting the vapor deposition block 51 are shown as perspective views. FIG. 14 is simplified, and the number of mask openings 71 does not coincide with FIG. The pattern (that is, pitch, width, length) of the mask opening 71 of the present embodiment is designed based on the same concept as in the first embodiment. This will be described below.

  The pitch in the X-axis direction of the plurality of mask openings 71 constituting the vapor deposition block 51 is preferably smaller than the pitch in the X-axis direction of the plurality of striped coatings 90 to be formed on the deposition surface of the substrate 10 ( FIG. 15). Furthermore, it is preferable that the pitch in the X-axis direction of the plurality of mask openings 71 constituting the vapor deposition block 51 is constant. With such a preferable configuration, a plurality of striped films 90 can be easily formed on the deposition surface of the substrate 10 at an equal pitch in the X-axis direction.

  Further, the width (dimension in the X-axis direction) of the mask opening 71 is the smallest in the mask opening 71 located directly above the vapor deposition source opening 61 and is located farther from the X-axis direction position of the vapor deposition source opening 61 in the X-axis direction. The mask opening 71 is preferably as large as possible. With such a configuration, a plurality of striped films 90 having the same width can be easily formed on the deposition surface of the substrate 10.

  Further, the length (dimension in the Y-axis direction) of the mask opening 71 is the shortest in the mask opening 71 located immediately above the vapor deposition source opening 61 and is located farther from the X-axis direction position of the vapor deposition source opening 61 in the X-axis direction. It is preferable that the mask opening 71 is longer. With such a preferable configuration, a plurality of striped films 90 having the same thickness can be easily formed on the deposition surface of the substrate 10.

  According to the present embodiment, as described above, the pitch in the X-axis direction of the vapor deposition blocks 51 in each of the first column and the second column can be made larger than that in the first embodiment. Accordingly, since the distance between the two groups of mask openings belonging to the pair of vapor deposition blocks 51 adjacent in the X-axis direction is increased, the degree of freedom in designing the mask opening pattern is increased.

  In the present embodiment, the plurality of vapor deposition source openings are arranged in two rows having different positions in the Y-axis direction, but the number of the vapor deposition source openings is not limited to two and may be larger than this. For example, a plurality of vapor deposition source openings may be arranged in a plurality of rows so as to have a saw blade shape when viewed along the Z axis. When a plurality of vapor deposition source openings are arranged in a plurality of rows so that the positions in the X-axis direction are not the same, as the number of vapor deposition source apertures increases, the interval between the vapor deposition source apertures adjacent in the X-axis direction further increases. .

  The present embodiment is the same as the first embodiment except for the above, and has the same effects as the first embodiment. The various modifications mentioned in the first embodiment can be applied to the present embodiment as they are or with appropriate modifications.

(Embodiment 3)
The third embodiment will be described with a focus on differences from the first and second embodiments.

  FIG. 17: is the top view which looked at the vapor deposition unit 50 which comprises the manufacturing apparatus of the organic EL element concerning Embodiment 3 of this invention from the vapor deposition mask 70 side along the Z-axis. Similarly to FIGS. 10 and 14, a perspective view is shown so that the relative relationship among the vapor deposition source 60, the plurality of limiting plates 81, and the vapor deposition mask 70 can be understood. 18 is a cross-sectional view of the vapor deposition unit 50 taken along the plane parallel to the YZ plane including the line 18-18 in FIG.

  In the present embodiment, as shown in FIG. 17, the plurality of vapor deposition source openings formed in the vapor deposition source 60 are staggered as in the second embodiment. However, as shown in FIG. 18, when viewed along the X-axis, the first row of vapor deposition source openings 61 and the second row of vapor deposition source openings 61 are inclined in opposite directions. Yes. Accordingly, the first row of vapor deposition source openings 61 emits vapor deposition particles 91 obliquely upward to the upstream side in the movement direction of the substrate 10, and the second row of vapor deposition source openings 61 is oblique to the downstream side in the movement direction of the substrate 10. The vapor deposition particles 91 are discharged upward.

  The configurations of the plurality of limiting plates 81 and the vapor deposition mask 70 are the same as those in the second embodiment. The vertical dimension of the second restriction plate 82 is shorter than that of the second embodiment and is set to be the same as that of the plurality of restriction plates 81.

  According to the present embodiment, it is possible to reduce the number of vapor deposition particles 91 that move from one side in the Y-axis direction to the other side with respect to the second restriction plate 82 as compared with the second embodiment. That is, it is possible to reduce the number of vapor deposition particles 91 between the first row vapor deposition block 51 and the second row vapor deposition block 51 as compared with the second embodiment.

  Accordingly, the degree of freedom in designing the limiting plate 81 and the second limiting plate 82 is increased, for example, by shortening the dimension of the second limiting plate 82 in the Z-axis direction. Moreover, the freedom degree of design of the mask opening pattern of the vapor deposition mask 70 increases.

  In addition, it is possible to easily suppress the blurring of the edges on both sides of the striped film 90 formed on the vapor deposition surface 10e of the substrate 10 as compared with the second embodiment, and to make the organic EL element more accurate. Can be created.

  Moreover, since the amount of the vapor deposition material adhering to the second restriction plate 82 is reduced, the waste of the vapor deposition material can be reduced.

  The present embodiment is the same as the second embodiment except for the above, and has the same effects as the second embodiment. Further, the various modifications mentioned in the first and second embodiments can be applied to the present embodiment as it is or with appropriate modifications.

(Embodiment 4)
The fourth embodiment will be described with a focus on differences from the first to third embodiments.

  FIG. 19 is a plan view of the vapor deposition unit 50 constituting the organic EL element manufacturing apparatus according to Embodiment 4 of the present invention, as viewed from the vapor deposition mask 70 side along the Z axis. 10, 14, and 17 are shown as perspective views so that the relative relationship among the vapor deposition source 60, the plurality of limiting plates 81, and the vapor deposition mask 70 can be understood.

  The plurality of vapor deposition source openings 61 formed in the vapor deposition source 60 are arranged along two rows parallel to the X axis as shown in FIG. 14 in the second embodiment, whereas in the present embodiment, FIG. As shown in FIG. 4, they are arranged along four rows parallel to the X axis.

  That is, in each of the first row, the second row, the third row, and the fourth row arranged in order from the upstream side to the downstream side in the moving direction of the substrate 10 with respect to the vapor deposition unit 50, the plurality of vapor deposition source openings 61 are arranged in the X axis. Are arranged at an equal pitch in a direction parallel to the. Corresponding to the arrangement of the vapor deposition source openings 50, a plurality of limiting plates 81 and mask openings 71 are also arranged along four rows parallel to the X axis. Similar to the first and second embodiments, also in this embodiment, a pair of limiting plates 81 adjacent in the X-axis direction, a single vapor deposition source opening 61 disposed between the pair of limiting plates 81, and a pair of limiting The plurality of mask openings 71 arranged between the plates 81 constitute one vapor deposition block 51.

  The plurality of vapor deposition blocks 51 are staggered in two rows adjacent to each other in the Y-axis direction. In the first row and the third row, the positions of the vapor deposition block 51, the vapor deposition source opening 61, the limiting plate 81, and the mask opening 71 constituting the vapor deposition block 51 are the same in the X-axis direction. Further, in the second column and the fourth column, the positions of the vapor deposition block 51 and the vapor deposition source opening 61, the limiting plate 81, and the mask opening 71 constituting the vapor deposition block 51 are the same.

  A second limiting plate 82a extending in the X-axis direction is provided between the limiting plate 81 in the first row and the limiting plate 81 in the second row, and the limiting plate 81 in the second row and the limiting plate 81 in the third row are provided. A second limit plate 82b extending in the X-axis direction is provided between the limit plate 81 and the limit plate 81 in the third row and the limit plate 81 in the fourth row are provided in the X-axis direction. A second restriction plate 82c extending in the direction is provided. The second limiting plates 82a, 82b, 82c are arranged such that the vapor deposition particles emitted from the vapor deposition source opening 61 on one side in the Y-axis direction with respect to the second limiting plates 82a, 82b, 82c are on the other side in the Y-axis direction. Is prevented from entering the mask opening 71 arranged in the.

  As in the third embodiment (see FIG. 18), when viewed along the X axis, the first row of vapor deposition source openings 61 and the second row of vapor deposition source openings 61 are inclined in opposite directions. Yes. Further, when viewed along the X axis, the deposition source openings 61 in the third row and the deposition source openings 61 in the fourth row are inclined in opposite directions.

  Since the vapor deposition source opening 61 is inclined in this way, in particular, the vapor deposition particles emitted from the vapor deposition source opening 61 on one side in the Y-axis direction with respect to the second limiting plate 82b are the other in the Y-axis direction. In order to prevent entry into the mask opening 71 arranged on the side, the Y-axis direction interval between the II column and the III column is set as the Y-axis interval between the I column and the II column and the III column. And the distance in the Y-axis direction between the fourth column and the fourth column. This is particularly recognized at the pitch of the evaporation source openings 61 in the Y-axis direction. Further, the lengths in the Y-axis direction of the mask openings 71 in the II and III columns are shorter than the lengths in the Y-axis direction of the mask openings 71 in the I and IV columns.

  Therefore, the thickness (Y-axis direction dimension) of the second limiting plate 82b can be made larger than the thickness of the second limiting plates 82a and 82c. For example, a cooling device (for example, cooling water passes through the second limiting plate 82b). It is easy to install a cooling water pipe). In this case, the restriction plates 81 in the I-th to IV-th rows can be cooled through heat conduction to the second restriction plate 82b.

  Also in the present embodiment, as in the first to third embodiments, in a state where the vapor deposition particles are released from the plurality of vapor deposition source openings 61, the substrate 10 is moved in the Y-axis direction, thereby vapor deposition on the deposition surface of the substrate 10. The particles are attached to form a plurality of striped films 90 parallel to the Y-axis direction.

  According to the present embodiment, by providing the limiting plate 81 and the second limiting plates 82a, 82b, and 82c, the striped film 90 formed on the deposition surface of the substrate 10 as in the first to third embodiments. It is possible to suppress the occurrence of blurring at the edges on both sides of the.

  Furthermore, this embodiment has the following effects.

  In the present embodiment, two mask openings 71 having the same position in the X-axis direction of the I-th row and the III-th row are responsible for forming one common film 90, and the X-axis direction positions of the II-th row and the IV-th row are determined. Two similar mask openings 71 are responsible for forming one common film 90. That is, all the coating films 90 formed on the substrate 10 are each formed by vapor deposition particles that have passed through the two mask openings 71 having the same position in the X-axis direction. The total length in the Y-axis direction of two mask openings 71 having the same position in the X-axis direction is set in consideration of the thickness of the coating film 90 to be formed. In other words, the total length in the Y-axis direction of the mask opening 71 necessary for forming the coating film 90 having a desired thickness is determined for two mask openings 71 belonging to different rows having the same position in the X-axis direction. It is possible to set freely whether to allocate to. Similarly, various conditions of the vapor deposition source openings 61 and the limiting plate 81 in each row can be freely set under conditions necessary for forming the desired film 90. In this way, the coating 90 is formed in two stages using the two mask openings 71 in different rows, whereby the mask openings 71, the limiting plates 81, and the vapor deposition source openings 61 constituting the vapor deposition blocks 51 in each row. The degree of freedom of design is increased.

  FIG. 20 is a plan view of another vapor deposition unit 50 constituting the organic EL element manufacturing apparatus according to Embodiment 4 of the present invention as viewed from the vapor deposition mask 70 side along the Z axis. Similarly to FIG. 19, a perspective view is shown so that the relative relationship among the vapor deposition source 60, the plurality of limiting plates 81, the second limiting plates 82 a, 82 b and 82 c, and the vapor deposition mask 70 can be understood.

  20 is different from FIG. 19 in that the second limiting plates 82a, 82b, and 82c are bent in a zigzag shape to reduce the pitch in the Y-axis direction of each row. Therefore, the arrangement density of the vapor deposition source openings 61 is increased, and the vapor deposition unit 50 can be downsized. In FIG. 20, all the vapor deposition source openings 61 are open toward the upper side in the Z-axis direction.

  In FIG. 20, the pattern of the mask openings 71 of the vapor deposition mask 70 is different from that of FIG. 19, and the vapor deposition that has passed through the four mask openings 71 in the I-th to IV-th rows arranged in a substantially straight line in the Y-axis direction. One film 90 is formed by the particles. The vapor deposition unit 50 of FIG. 20 forms the coating 90 in four stages using four mask openings 71 in different rows, so that the mask openings 71, the limiting plate 81, and the vapor deposition source that constitute the vapor deposition block 51 in each row. The degree of freedom in designing the opening 61 and the like is further increased. Moreover, the throughput at the time of mass production of the organic EL element is improved.

  19 and 20, the plurality of vapor deposition blocks 51 are arranged in four rows, but the present invention is not limited to this, and the vapor deposition blocks 51 may be arranged in three rows or five rows or more. Further, the number of mask openings 71 responsible for forming one film 90 is not limited to two in FIG. 19 or four in FIG. 20, and may be three or five or more. In general, the greater the number of mask openings 71 responsible for forming one film 90, the greater the degree of freedom in designing the configuration of the vapor deposition block 51 including the mask openings 71.

  Except for the above, this embodiment is the same as Embodiments 1 to 3, and has the same effects as Embodiments 1 to 3. Further, the various modifications mentioned in the first to third embodiments can be applied to the present embodiment as it is or with appropriate modifications.

(Embodiment 5)
The fifth embodiment will be described with a focus on differences from the first embodiment.

  FIG. 21 is a perspective view showing a schematic configuration of an organic EL element manufacturing apparatus according to Embodiment 5 of the present invention. FIG. 22 is a cross-sectional view showing the flow of the vapor deposition particles 91 in the vapor deposition block 51 on a plane parallel to the XZ plane passing through the vapor deposition source opening 61 in the present embodiment.

  This embodiment is different from the first embodiment in that a plurality of restriction plates 86 are integrally formed on the restriction plate block 85. The limiting plate 86 functions in the same manner as the limiting plate 81 of the first embodiment.

  For example, the limiting plate block 85 having the plurality of limiting plates 86 can be created by forming a plurality of through holes through which the vapor deposition particles 91 pass in a plate material having a predetermined thickness. It may be difficult to increase the thickness (dimension in the Z-axis direction) of the limiting plate block 85 due to processing restrictions for forming the through hole. Alternatively, it may be difficult to reduce the thickness (dimension in the X-axis direction) of the limiting plate 86. In such a case, as shown in FIG. 22, the function of the limiting plate 86 can be ensured by arranging the limiting plate block 85 close to the vapor deposition source 60.

  In order to increase the size of the limiting plate 86 in the Z-axis direction, a plurality of limiting plate blocks 85 may be stacked in the Z-axis direction.

  The present embodiment is the same as the first embodiment except for the above. Also in the present embodiment, as in the first embodiment, in a state where the vapor deposition particles 91 are emitted from the plurality of vapor deposition source openings 61, the substrate 10 is moved in the Y-axis direction, whereby vapor deposition is performed on the deposition surface 10e of the substrate 10. The particles 91 are attached to form a plurality of striped films 90 parallel to the Y-axis direction.

  According to the present embodiment, the plurality of limiting plates 86 are formed integrally with the limiting plate block 85. Therefore, it is not necessary to adjust the position of each limiting plate 86, and the positional accuracy of the limiting plate 86 is increased. Further, since the replacement of the limiting plate 86 is possible by replacing the limiting plate block 85 including a plurality of limiting plates 86, the replacement work of the limiting plate 86 is easy, and the maintenance burden during mass production is reduced. Can do.

  Further, it is easy to install additional devices such as a cooling device for cooling the limiting plate 86 (for example, cooling water piping through which cooling water passes). For example, the cooling water pipe can be installed in the frame-shaped portion of the restriction plate block 85 surrounding the plurality of restriction plates 86. In addition, since the plurality of limiting plates 86 are integrated, good heat conduction characteristics can be obtained and the cooling performance can be improved.

  Depending on the size of each part of the limiting plate block 85, the limiting plate block 85 can be used as a shutter for blocking the vapor deposition particles 91 by adding a mechanism for moving the limiting plate block 85 in the X-axis direction or the Y-axis direction. .

  For example, as described above, when the thickness (the dimension in the X-axis direction) of the limiting plate 86 is large (particularly, when the thickness of the limiting plate 86 is larger than the interval between the limiting plates 86 adjacent in the X-axis direction) By moving the plate block 85 in the X-axis direction, the vapor deposition particles 91 may be blocked by the lower surface of the restriction plate 86 facing the vapor deposition source 60.

  Alternatively, by moving the limiting plate block 85 in the Y-axis direction, the vapor deposition particles 91 may be blocked by the lower surface of the portion parallel to the X-axis in the frame-shaped portion around the limiting plate block 85.

  As described above, in this embodiment, it may be difficult to increase the thickness of the limiting plate block 85. However, in this case, the space between the limiting plate block 85 and the vapor deposition source 60 and / or the space between the limiting plate block 85 and the vapor deposition mask 70 is enlarged. Therefore, the degree of vacuum around the limiting plate 86 can be easily maintained, and the load on the vacuum pump can be reduced. Moreover, since contamination can be reduced, the coating film 90 with few defects can be formed. Furthermore, it is advantageous from the viewpoint of heat dissipation of the limiting plate 86 and replacement workability of the limiting plate block 85.

  The present embodiment is the same as the first embodiment except for the above, and has the same effects as the first embodiment. The various modifications mentioned in the first embodiment can be applied to the present embodiment as they are or with appropriate modifications.

  The concept of integrating a plurality of limiting plates shown in this embodiment can be applied to all the embodiments described in this specification, and in that case, the above-described effects can be obtained. In order to arrange a plurality of restriction plates in a plurality of rows as described in the second, third, and fourth embodiments, a plurality of through holes through which vapor deposition particles pass are formed along a plurality of rows in a plate material having a predetermined thickness. What is necessary is just to form. Thereby, the limiting plate block in which the limiting plate and the second limiting plate are integrally formed can be formed.

(Embodiment 6)
The sixth embodiment will be described with a focus on differences from the first embodiment.

  FIG. 23 is a plan view of the vapor deposition block 51 as viewed from the vapor deposition mask 70 side along the Z axis in the organic EL element manufacturing apparatus according to Embodiment 6 of the present invention. Similarly to FIG. 13, only the vapor deposition source opening 61, the pair of limiting plates 81, and the mask opening 76 constituting the vapor deposition block 51 are shown as perspective views.

  In the first embodiment, as shown in FIG. 13, a plurality of mask openings 71 having different positions in the X-axis direction are formed for one vapor deposition source opening 61. Each mask opening 71 was one slit-like opening extending in the Y-axis direction. On the other hand, the mask opening pattern of this embodiment has a shape that approximates that each mask opening 71 of Embodiment 1 is divided into a plurality of pieces in the Y-axis direction. That is, as shown in FIG. 23, a plurality of mask opening rows 75 having different positions in the X-axis direction are arranged for one vapor deposition source opening 61. Each mask opening row 75 includes a plurality of mask openings 76 arranged along the Y-axis direction.

  The plurality of mask openings 76 arranged in the Y-axis direction are responsible for forming the same film 90. In order to make the thicknesses of the plurality of striped films 90 formed on the substrate 10 the same, the total dimension in the Y-axis direction of the plurality of mask openings 76 constituting the mask opening row 75 is set to The mask opening row 75 located right above is minimized, and the mask opening row 75 located farther in the X-axis direction from the X-axis direction position of the vapor deposition source opening 61 is made larger. In FIG. 23, the change in the total dimension in the Y-axis direction of the mask openings 76 arranged in the Y-axis direction is realized by changing the number of mask openings 76 constituting the mask opening row 75. That is, the number of the mask openings 76 constituting the mask opening array 75 is minimized in the mask opening array 75 located immediately above the vapor deposition source opening 61, and is farther from the X-axis direction position of the vapor deposition source opening 61 in the X-axis direction. The number of the mask opening rows 75 is increased.

  The X-axis direction position of each mask opening row 75 and the width (X-axis direction dimension) of the mask opening 76 constituting each mask opening row 75 are determined in the same manner as in the first embodiment.

  In FIG. 23, the mask openings 76 are arranged at a constant pitch in the Y-axis direction, but the present invention is not limited to this. The Y-axis direction pitch of the mask openings 76 may not be constant within the mask opening row 75, and may be different among the plurality of mask opening rows 75. Further, the position of the mask opening 76 in the Y-axis direction may be different between the mask opening rows 75 adjacent in the X-axis direction.

  In FIG. 23, all of the plurality of mask opening rows 75 are constituted by two or more mask openings 76, but at least one of the plurality of mask opening rows 75 is a single slit extending in the Y-axis direction. It may be replaced with a shaped opening.

  In order to change the total dimension in the Y-axis direction of the mask openings 76 constituting the mask opening row 75 as described above, the number of the mask openings 76 constituting the mask opening row 75 is changed for each mask opening row 75 as shown in FIG. Instead of changing to the above, the dimension in the Y-axis direction of the mask opening 76 constituting the mask opening row 75 may be changed for each mask opening row 75.

  According to the present embodiment, since it is not necessary to form a slit-shaped mask opening having a large dimension in the Y-axis direction on the vapor deposition mask 201, it is possible to reduce a decrease in strength of the vapor deposition mask 70 due to the formation of the mask opening. it can. Further, the dimensional stability of the vapor deposition mask 70 is improved.

  Further, the thickness and dimension stability of the vapor deposition mask 70 are increased by increasing the thickness of the bridge portion between the mask openings 76 adjacent in the Y-axis direction (dimension in the Z-axis direction) or adding a reinforcing member to the bridge portion. Can be easily improved.

  Further, when the vapor deposition mask 70 is cooled, the bridging portion between the mask openings 76 adjacent in the Y-axis direction contributes to the improvement of the heat conduction characteristics, so that temperature unevenness can be reduced.

  The concept of replacing the slit-like mask opening 71 shown in this embodiment with a mask opening row 75 including a plurality of mask openings 76 arranged in the Y-axis direction is applied to all the embodiments described in this specification. In that case, the above-described effects can be obtained.

(Embodiment 7)
The seventh embodiment will be described with a focus on differences from the first embodiment.

  FIG. 24 is a plan view of the vapor deposition unit 50 constituting the organic EL element manufacturing apparatus according to Embodiment 7 of the present invention, as viewed from the vapor deposition mask 70 side along the Z axis. Similarly to FIG. 10, a perspective view is shown so that the relative relationship among the vapor deposition source 60, the plurality of limiting plates 81, and the vapor deposition mask 70 can be understood.

  In the first embodiment, a minute circular deposition source opening 61 is used as an opening for discharging deposition particles from the deposition source 60. On the other hand, in this embodiment, the slit-shaped vapor deposition source opening 62 extended in the Y-axis direction is used.

  The present embodiment is the same as the first embodiment except that the shape of the vapor deposition source opening is different. However, the Y-axis direction dimensions of the mask opening 71 and the limiting plate 81 are preferably set appropriately according to the length (Y-axis direction dimension) of the vapor deposition source opening 62.

  Also in the present embodiment, as in the first embodiment, in a state where the vapor deposition particles are released from the plurality of vapor deposition source openings 62, the vapor deposition particles are moved to the vapor deposition surface of the substrate 10 by moving the substrate 10 in the Y-axis direction. A plurality of striped films 90 parallel to the Y-axis direction are formed.

  According to this embodiment, since the opening area of the vapor deposition source opening 62 can be made larger than the opening area of the vapor deposition source opening 61 of the first embodiment, the number of vapor deposition particles emitted from the vapor deposition source opening 62 increases. Therefore, the deposition rate can be increased and the throughput during mass production can be improved.

  The present embodiment is the same as the first embodiment except for the above, and has the same effects as the first embodiment. The various modifications mentioned in the first embodiment can be applied to the present embodiment as they are or with appropriate modifications.

  The slit-shaped vapor deposition source opening 62 shown in the present embodiment can be applied to the first to sixth embodiments, and in that case, the above-described effects can be obtained.

(Embodiment 8)
The eighth embodiment will be described with a focus on differences from the first embodiment.

  FIG. 25 is a plan view of the vapor deposition unit 50 constituting the organic EL element manufacturing apparatus according to Embodiment 8 of the present invention, as viewed from the vapor deposition mask 70 side along the Z axis. Similarly to FIG. 10, a perspective view is shown so that the relative relationship among the vapor deposition source 60, the plurality of limiting plates 81, and the vapor deposition mask 70 can be understood.

  In the first embodiment, a minute circular deposition source opening 61 is used as an opening for discharging deposition particles from the deposition source 60. On the other hand, in the present embodiment, a slit-like deposition source opening 63 extending in the X-axis direction is used. The vapor deposition source opening 63 extends in the X-axis direction so as to cross the limiting plate 81 in the Y-axis direction. In FIG. 25, the vapor deposition source opening 63 continuously extends in the X-axis direction over a range wider than the distance between the limiting plates 81 on both outer sides of the plurality of limiting plates 81 arranged in the X-axis direction.

  FIG. 26 is a cross-sectional view showing the flow of the vapor deposition particles 91 in the vapor deposition block 51 on a plane parallel to the XZ plane passing through the vapor deposition source opening 63. Also in the present embodiment, the limiting plate 81 limits the incident angle of the vapor deposition particles 91 that enter the mask opening 71 in the projection view on the XZ plane. Preferably, in the limiting plate 81, the vapor deposition particles 91 emitted from the portion of the vapor deposition source opening 63 positioned on one side in the X-axis direction with respect to the limiting plate 81 are applied to the mask opening 71 positioned on the other side. Prevent entry.

  Also in the present embodiment, as in the first embodiment, in a state where the vapor deposition particles 91 are released from the vapor deposition source opening 63, the vapor deposition particles 91 are deposited on the vapor deposition surface 10e of the substrate 10 by moving the substrate 10 in the Y-axis direction. A plurality of stripe-shaped films 90 parallel to the Y-axis direction are formed.

  According to the present embodiment, since the vapor deposition source opening 63 is a slit-like opening extending in the X-axis direction, as is apparent from FIG. 26, the vapor deposition particles 91 incident on the mask opening 71 compared to the first embodiment. The maximum incident angle increases. Therefore, as compared with the first embodiment, the width We of the gradually decreasing thickness portion 990e shown in FIG.

  However, in this embodiment, by designing the vapor deposition block 51 as described below, no problem is caused even if the width We of the gradually decreasing thickness portion 990e is increased.

  As described above, the edge cover 15 (see FIG. 3) having a predetermined pattern is formed in advance on the deposition surface of the substrate 10. The coating 90 is formed in the opening of the edge cover 15.

  Therefore, first, at least in the opening of the edge cover 15, the mask opening 71 and the mask opening 71 and Design the limiting plate 81 and the like.

  Second, the vapor deposition particles 91 that have passed through the mask opening 71 adhere to the opening of the edge cover 15 that is located next to the opening of the edge cover 15 that is located almost directly above the mask opening 71 in the X-axis direction. The mask opening 71, the limiting plate 81, and the like are designed so as not to occur (that is, color mixing does not occur).

  The organic EL element emits light only in the opening of the edge cover 15. Therefore, as described above, if the thickness of the coating film 90 is constant in the opening of the edge cover 15 and no color mixture occurs in the opening of the edge cover 15, light emission in the pixel is constant, luminance unevenness, etc. Does not occur.

  Also in this embodiment, since the vapor deposition particles 91 are blocked by the restriction plate 81, the density of the vapor deposition particles 91 passing through the mask opening 71 having a small distance in the X-axis direction to the restriction plate 81 is relatively reduced. Therefore, as described in the first embodiment, it is preferable that the length of the mask opening 71 (that is, the dimension in the Y-axis direction) be longer as the mask opening 71 has a shorter distance in the X-axis direction to the limiting plate 81. Thereby, a plurality of striped films 90 having the same thickness can be easily formed on the vapor deposition surface 10e of the substrate 10.

  Further, since the vapor deposition particles 91 are blocked by the restriction plate 81, the mask opening 71 and the coating film 90 formed by the mask opening 71 are formed in the mask opening 71 and the mask opening 71 having a small distance in the X-axis direction to the restriction plate 81. And the relative positional relationship in the X-axis direction may be different. Therefore, it is preferable that the X-axis direction positions of the plurality of mask openings 71 are set so that the coating films 90 are formed on the substrate 10 at equal intervals. The position of each mask opening 71 in the X-axis direction is a relative positional relationship among the evaporation source opening 63, the evaporation mask 70, and the substrate 10, the thickness of the evaporation mask 70, and the XZ sectional view of the inner peripheral surface of the mask opening 71. It can be easily obtained by geometric calculation in consideration of the shape of the film and the positions of the plurality of coatings 90 to be formed in the X-axis direction.

  According to this embodiment, since the opening area of the vapor deposition source opening 63 can be made larger than the opening area of the vapor deposition source opening 61 of the first embodiment, the number of vapor deposition particles emitted from the vapor deposition source opening 63 increases. Therefore, the deposition rate can be increased and the throughput during mass production can be improved.

  Further, since the vapor deposition source opening 63 is a slit-shaped opening extending in the X-axis direction, the alignment accuracy of the vapor deposition source 60 with respect to the plurality of limiting plates 81 and the vapor deposition mask 70 in the X-axis direction can be relaxed. Therefore, the vapor deposition unit 50 can be easily assembled.

  In FIG. 25, one slit-like deposition source opening 63 that is longer than the distance between the limiting plates 81 on both outer sides of the plurality of limiting plates 81 arranged in the X-axis direction is used, but the present invention is not limited to this. For example, a plurality of slit-shaped deposition source openings extending in the X-axis direction may be aligned on the straight line in the X-axis direction. In addition, a plurality of slit-shaped vapor deposition source openings extending in the X-axis direction may be arranged at different positions in the Y-axis direction.

  The opening width of the vapor deposition source opening 63 in the Y-axis direction may be enlarged, and the shape of the vapor deposition source opening 63 may be a substantially rectangular shape or a long hole shape with the X-axis direction being the major axis direction. Thereby, the vapor deposition particles emitted from the vapor deposition source opening 63 further increase.

  The present embodiment is the same as the first embodiment except for the above, and has the same effects as the first embodiment. The various modifications mentioned in the first embodiment can be applied to the present embodiment as they are or with appropriate modifications.

  The opening shape of the vapor deposition source opening 63 shown in the present embodiment can be applied to the first to sixth embodiments, and in that case, the above-described effects can be obtained.

  Each of the embodiments described above is intended to clarify the technical contents of the present invention, and the present invention is not construed as being limited to such specific examples. The present invention should be construed broadly, with various modifications within the spirit and scope of the appended claims.

  The field of application of the present invention is not particularly limited, and can be used for any apparatus using an organic EL element. Especially, it can utilize especially preferably for an organic EL display.

23R, 23G, 23B Light emitting layer 10 Substrate 10e Deposition surface 50 Deposition unit 51 Deposition block 60 Deposition source 61, 62, 63 Deposition source opening 70 Deposition mask 71, 76 Mask opening 75 Mask opening row 81, 86 Restriction plate 85 Restriction plate Blocks 82, 82a, 82b, 82c Second limiting plate 90 Film 91 Vapor deposited particles

Claims (28)

A method for producing an organic EL element having a film with a predetermined pattern on a substrate,
Having a vapor deposition step of depositing vapor deposition particles on the substrate to form the film;
The vapor deposition step uses a vapor deposition unit including a vapor deposition source having a vapor deposition source opening that emits the vapor deposition particles, and a vapor deposition mask disposed between the vapor deposition source opening and the substrate, In a state where the deposition mask is spaced apart from the deposition mask by a predetermined distance, one of the substrate and the deposition unit is moved relative to the other while passing through a plurality of mask openings formed in the deposition mask. A step of attaching the vapor deposition particles to the substrate;
When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction;
Each of the plurality of limiting plates limits an incident angle when viewed along the first direction of the vapor deposition particles incident on each of the plurality of mask openings,
A plurality of the vapor deposition source openings are arranged along a plurality of rows having different positions in the first direction,
The plurality of mask openings and the plurality of limiting plates are arranged along the plurality of rows corresponding to the positions of the plurality of vapor deposition source openings,
The method of manufacturing an organic EL element, wherein the plurality of vapor deposition source openings are arranged in a staggered manner in two rows adjacent in the first direction among the plurality of rows. A method for producing an organic EL element having a film with a predetermined pattern on a substrate,
Having a vapor deposition step of depositing vapor deposition particles on the substrate to form the film;
The vapor deposition step uses a vapor deposition unit including a vapor deposition source having a vapor deposition source opening that emits the vapor deposition particles, and a vapor deposition mask disposed between the vapor deposition source opening and the substrate, In a state where the deposition mask is spaced apart from the deposition mask by a predetermined distance, one of the substrate and the deposition unit is moved relative to the other while passing through a plurality of mask openings formed in the deposition mask. A step of attaching the vapor deposition particles to the substrate;
When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction;
Each of the plurality of limiting plates limits an incident angle when viewed along the first direction of the vapor deposition particles incident on each of the plurality of mask openings,
A plurality of the vapor deposition source openings are arranged along a plurality of rows having different positions in the first direction,
The plurality of mask openings and the plurality of limiting plates are arranged along the plurality of rows corresponding to the positions of the plurality of vapor deposition source openings,
The vapor deposition unit further includes a second limiting plate between the vapor deposition source opening and the vapor deposition mask,
The second restriction plate is a mask in which vapor deposition particles emitted from the vapor deposition source opening on one side in the first direction with respect to the second restriction plate are arranged on the other side in the first direction. To prevent opening,
The plurality of limiting plates and the second limiting plate are arranged orthogonally ,
The method of manufacturing an organic EL element , wherein the plurality of vapor deposition source openings are arranged in a staggered manner in two rows adjacent in the first direction among the plurality of rows .   The at least one row of the plurality of rows is different from at least one other row with respect to positions of the deposition source opening, the mask opening, and the limiting plate in the second direction. Manufacturing method of organic EL element.   3. The organic EL according to claim 1, wherein the vapor deposition source openings arranged in each of two rows adjacent to each other in the first direction are inclined in the opposite direction when viewed along the second direction. Device manufacturing method.   3. The method of manufacturing an organic EL element according to claim 1, wherein a common film is formed on the substrate by the vapor deposition particles that have passed through at least two mask openings belonging to at least two of the plurality of rows. .   The method of manufacturing an organic EL element according to claim 1, wherein the second restriction plate is bent in a zigzag shape. A method for producing an organic EL element having a film with a predetermined pattern on a substrate,
Having a vapor deposition step of depositing vapor deposition particles on the substrate to form the film;
The vapor deposition step uses a vapor deposition unit including a vapor deposition source having a vapor deposition source opening that emits the vapor deposition particles, and a vapor deposition mask disposed between the vapor deposition source opening and the substrate, In a state where the deposition mask is spaced apart from the deposition mask by a predetermined distance, one of the substrate and the deposition unit is moved relative to the other while passing through a plurality of mask openings formed in the deposition mask. A step of attaching the vapor deposition particles to the substrate;
When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction;
Each of the plurality of limiting plates limits an incident angle when viewed along the first direction of the vapor deposition particles incident on each of the plurality of mask openings,
The method of manufacturing an organic EL element, wherein a thickness of the limiting plate in the second direction is larger than an interval between the limiting plates adjacent in the second direction.   The method of manufacturing an organic EL element according to claim 7, wherein the plurality of limiting plates function as shutters that block the vapor deposition particles by moving in the second direction. A method for producing an organic EL element having a film with a predetermined pattern on a substrate,
Having a vapor deposition step of depositing vapor deposition particles on the substrate to form the film;
The vapor deposition step uses a vapor deposition unit including a vapor deposition source having a vapor deposition source opening that emits the vapor deposition particles, and a vapor deposition mask disposed between the vapor deposition source opening and the substrate, In a state where the deposition mask is spaced apart from the deposition mask by a predetermined distance, one of the substrate and the deposition unit is moved relative to the other while passing through a plurality of mask openings formed in the deposition mask. A step of attaching the vapor deposition particles to the substrate;
When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction;
Each of the plurality of limiting plates limits an incident angle when viewed along the first direction of the vapor deposition particles incident on each of the plurality of mask openings,
The method of manufacturing an organic EL element, wherein the vapor deposition source opening is a slit-like opening extending in the first direction.   8. The method of manufacturing an organic EL element according to claim 1, wherein the vapor deposition source opening extends so as to cross the limiting plate in the second direction.   The length in the first direction of the plurality of mask openings arranged between the restriction plates adjacent in the second direction becomes longer as the distance in the second direction to the restriction plate becomes shorter. The manufacturing method of the organic EL element of description.   The method for producing an organic EL element according to claim 1, 2, 7, or 9, wherein the vapor deposition source opening is disposed between the limiting plates adjacent in the second direction. The number of the evaporation source openings is plural,
The method for manufacturing an organic EL element according to claim 1, 2, 7, or 9, wherein the plurality of vapor deposition source openings and the plurality of limiting plates have substantially the same pitch in the second direction.   The width in the second direction of the plurality of mask openings arranged between the restricting plates adjacent in the second direction is the second width of the vapor deposition source opening arranged between the restricting plates adjacent in the second direction. The method for manufacturing an organic EL element according to claim 1, 2, 7, or 9, wherein the organic EL element increases as the distance from the position in the direction increases in the second direction.   The length in the first direction of the plurality of mask openings arranged between the restriction plates adjacent in the second direction is the first length of the vapor deposition source opening arranged between the restriction plates adjacent in the second direction. 10. The method of manufacturing an organic EL element according to claim 1, 2, 7, or 9, which becomes longer from a position in two directions in a direction away from the second direction. 11.   10. The method of manufacturing an organic EL element according to claim 1, wherein a pitch in the second direction of the plurality of mask openings arranged between the limiting plates adjacent in the second direction is constant.   The pitch in the second direction of the plurality of mask openings arranged between the restriction plates adjacent in the second direction is smaller than the pitch in the second direction of the coating formed on the substrate. The manufacturing method of the organic EL element of 2, 7, or 9.   The method for manufacturing an organic EL element according to claim 1, 2, 7, or 9, wherein at least a part of the plurality of limiting plates is cooled.   The method of manufacturing an organic EL element according to claim 2, wherein at least a part of the second restriction plate is cooled.   The method for manufacturing an organic EL element according to claim 1, 2, 7, or 9, wherein the plurality of limiting plates are integrated.   The method for producing an organic EL element according to claim 2, wherein the plurality of limiting plates and the second limiting plate are integrated. A plurality of mask opening rows having different positions in the second direction are arranged between the limiting plates adjacent in the second direction,
10. The method of manufacturing an organic EL element according to claim 1, wherein each of the plurality of mask opening rows includes the plurality of mask openings arranged along the first direction.   The total dimension in the first direction of the plurality of mask openings included in each of the plurality of mask opening rows is in the second direction of the vapor deposition source openings arranged between the limiting plates adjacent in the second direction. The method of manufacturing an organic EL element according to claim 22, wherein the organic EL element increases as the distance from the position increases in the second direction.   The method for producing an organic EL element according to claim 1, 2, 7, or 9, wherein the coating is a light emitting layer. An apparatus for manufacturing an organic EL element having a film with a predetermined pattern on a substrate,
A deposition source having a deposition source opening for emitting deposition particles for forming the coating; and a deposition unit having a deposition mask disposed between the deposition source opening and the substrate;
A moving mechanism for moving one of the substrate and the vapor deposition unit relative to the other in a state where the substrate and the vapor deposition mask are spaced apart by a predetermined interval;
In the vapor deposition mask, a plurality of mask openings through which the vapor deposition particles emitted from the vapor deposition source opening pass are formed,
When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction;
Each of the plurality of limiting plates limits an incident angle when viewed along the first direction of the vapor deposition particles incident on each of the plurality of mask openings,
A plurality of the vapor deposition source openings are arranged along a plurality of rows having different positions in the first direction,
The plurality of mask openings and the plurality of limiting plates are arranged along the plurality of rows corresponding to the positions of the plurality of vapor deposition source openings,
The apparatus for manufacturing an organic EL element, wherein the plurality of vapor deposition source openings are arranged in a staggered manner in two rows adjacent to each other in the first direction among the plurality of rows. An apparatus for manufacturing an organic EL element having a film with a predetermined pattern on a substrate,
A deposition source having a deposition source opening for emitting deposition particles for forming the coating; and a deposition unit having a deposition mask disposed between the deposition source opening and the substrate;
A moving mechanism for moving one of the substrate and the vapor deposition unit relative to the other in a state where the substrate and the vapor deposition mask are spaced apart by a predetermined interval;
In the vapor deposition mask, a plurality of mask openings through which the vapor deposition particles emitted from the vapor deposition source opening pass are formed,
When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction;
Each of the plurality of limiting plates limits an incident angle when viewed along the first direction of the vapor deposition particles incident on each of the plurality of mask openings,
A plurality of the vapor deposition source openings are arranged along a plurality of rows having different positions in the first direction,
The plurality of mask openings and the plurality of limiting plates are arranged along the plurality of rows corresponding to the positions of the plurality of vapor deposition source openings,
The vapor deposition unit further includes a second limiting plate between the vapor deposition source opening and the vapor deposition mask,
The second restriction plate is a mask in which vapor deposition particles emitted from the vapor deposition source opening on one side in the first direction with respect to the second restriction plate are arranged on the other side in the first direction. To prevent opening,
The plurality of limiting plates and the second limiting plate are arranged orthogonally ,
The apparatus for manufacturing an organic EL element , wherein the plurality of vapor deposition source openings are arranged in a staggered manner in two rows adjacent to each other in the first direction among the plurality of rows . An apparatus for manufacturing an organic EL element having a film with a predetermined pattern on a substrate,
A deposition source having a deposition source opening for emitting deposition particles for forming the coating; and a deposition unit having a deposition mask disposed between the deposition source opening and the substrate;
A moving mechanism for moving one of the substrate and the vapor deposition unit relative to the other in a state where the substrate and the vapor deposition mask are spaced apart by a predetermined interval;
In the vapor deposition mask, a plurality of mask openings through which the vapor deposition particles emitted from the vapor deposition source opening pass are formed,
When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction;
Each of the plurality of limiting plates limits an incident angle when viewed along the first direction of the vapor deposition particles incident on each of the plurality of mask openings,
2. The organic EL element manufacturing apparatus according to claim 1, wherein a thickness of the limiting plate in the second direction is larger than an interval between the limiting plates adjacent in the second direction. An apparatus for manufacturing an organic EL element having a film with a predetermined pattern on a substrate,
A deposition source having a deposition source opening for emitting deposition particles for forming the coating; and a deposition unit having a deposition mask disposed between the deposition source opening and the substrate;
A moving mechanism for moving one of the substrate and the vapor deposition unit relative to the other in a state where the substrate and the vapor deposition mask are spaced apart by a predetermined interval;
In the vapor deposition mask, a plurality of mask openings through which the vapor deposition particles emitted from the vapor deposition source opening pass are formed,
When the relative movement direction between the substrate and the vapor deposition unit is a first direction and the direction perpendicular to the first direction is a second direction, the vapor deposition unit is located between the vapor deposition source opening and the vapor deposition mask. A plurality of limiting plates having different positions in the second direction;
Each of the plurality of limiting plates limits an incident angle when viewed along the first direction of the vapor deposition particles incident on each of the plurality of mask openings,
The organic EL element manufacturing apparatus, wherein the vapor deposition source opening is a slit-like opening extending in the first direction.

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