JP5428933B2 - Manufacturing method of touch panel sensor integrated color filter - Google Patents

Description

  The present invention relates to a method for manufacturing a color filter with an integrated touch panel sensor, and more particularly, a touch panel sensor portion is formed on one surface of a transparent substrate, a color filter portion is formed on the other surface, and the color The filter part is patterned by performing alignment using an alignment mark provided on the surface of the transparent substrate on the side where the touch panel sensor part is formed. It is about the method.

  Today, touch panel devices are widely used as input means to mobile phones, game machines, tablet PCs, car navigation systems, automatic ticket vending machines, ATM devices, and the like. The touch panel device is incorporated on a display surface of a display device such as a liquid crystal display or a CRT, and an operator can perform input operations such as cursor movement and selection on the display surface using a finger or a touch pen. This touch panel device includes a touch panel sensor, a control circuit for detecting a contact position with the touch panel sensor, wiring, and the like.

  The touch panel sensor is a transparent panel having a surface that senses an input operation by an operator, that is, the approach or contact of a human finger or a touch pen. This touch panel sensor is arranged so that the approach / contact detection surface covers the display area of the display device, detects an approach / contact event of the operator's finger or touch pen, and sends these signals to the control device. The control device processes these signals and outputs a predetermined signal to the control device on the display device side so that the display device performs display corresponding to the input operation.

There are several types of touch panel devices including resistance type, capacitance type, infrared type, surface acoustic wave type, electromagnetic type, near field imaging type, etc. As a method that can detect the approach and contact (multi-touch), a capacitive touch panel device has attracted attention.
In a capacitive touch panel device, a capacitance change due to electrostatic coupling between the arranged transparent electrodes and the operator's finger, and the position on the touch panel using the induced current generated thereby. Detect coordinates.
Typically, a capacitive touch panel sensor includes an X-axis transparent electrode and a Y-axis transparent electrode, and the X and Y-axis transparent electrodes are insulated from each other and installed in the touch panel sensor, and are connected to a control circuit. The

In the conventional touch panel sensor, the X-axis transparent electrode and the Y-axis transparent electrode are formed on two separate substrates, and the two substrates are bonded to each other with an insulating material interposed therebetween. This is disadvantageous in reducing the thickness of the sensor, and it is difficult to align the X-axis and Y-axis transparent electrodes with high accuracy, which is also disadvantageous in terms of sensitivity and positional accuracy of the touch sensor.
Therefore, in order to eliminate such drawbacks, a capacitive touch panel sensor having a structure in which X-axis and Y-axis transparent electrodes are arranged on the same plane has been proposed (for example, Patent Document 1).

FIG. 7 is a schematic plan view showing an example of the aforementioned capacitive touch panel sensor.
The touch panel sensor 100 includes a transparent substrate 101 made of a glass substrate or a transparent resin film, a plurality of X-axis transparent electrodes 103 and Y-axis transparent electrodes 104 arranged in an effective area 102 corresponding to the display area of the touch panel, and an X-axis transparent electrode. 103 and an insulating layer (not shown) that insulates the Y-axis transparent electrode 104, disposed outside the effective region 102, and connects the X-axis transparent electrode 103 and the Y-axis transparent electrode 104 to a control circuit (not shown). The wiring conductor 105 is at least included.
In FIG. 7, the Y-axis transparent electrode 104 is connected on the same plane, but the X-axis transparent electrode 103 intersects with the Y-axis transparent electrode 104 to avoid a short circuit with the Y-axis transparent electrode 104. And is connected by a connecting transparent electrode 106.
Here, in order to form the X-axis transparent electrode 103 and the Y-axis transparent electrode 104, the insulating layer (not shown), the wiring conductor 105, and the connecting transparent electrode 106, mutual alignment is necessary. An alignment mark 109 is formed on the outer periphery of 100. Typically, in the step of forming the wiring conductor 105, the alignment mark 109 is formed at the same time.

  8 is a cross-sectional view taken along the line AA of the touch panel sensor shown in FIG. However, the drawing on the left side is omitted to avoid complications. As described above, the X-axis transparent electrode 103 is divided at a portion intersecting with the Y-axis transparent electrode 104, and the first axis is provided between the X-axis transparent electrode 103 and the Y-axis transparent electrode 104 to prevent a short circuit. An insulating layer 107 is formed. The first insulating layer 107 is formed so as to cover the Y-axis transparent electrode 104 at a portion intersecting with the Y-axis transparent electrode 104. The connected transparent electrode 106 is formed so as to straddle the first insulating layer 107 and electrically connects the divided X-axis transparent electrode 103. The connection transparent electrode 106 is usually formed of the same material as the X-axis transparent electrode 103 and the Y-axis transparent electrode 104, typically, crystallized ITO (indium tin oxide) (Patent Documents 2 and 3).

  The second insulating layer 108 in FIG. 8 is usually made of the same material as the first insulating layer 107 and is formed at the same time as the first insulating layer 107 is formed. It is formed so as to cover the axial transparent electrode 104. The second insulating layer 108 may be removed.

An alignment mark 109 is formed on the outer periphery of the touch panel sensor 100. Typically, in the step of forming the wiring conductor 105, the alignment mark 109 is formed at the same time.
For example, first, a metal thin film is formed on the transparent substrate 101 by sputtering or the like, and a desired wiring conductor 105 and alignment mark 109 are formed by photolithography or the like.

Next, a polycrystalline ITO thin film is formed on the surface on which the wiring conductor 105 is formed by a sputtering method, aligned using an alignment mark 109 and formed by a photolithography method, and then a strong acid such as aqua regia. Then, the desired X-axis transparent electrode 103 and Y-axis transparent electrode 104 are formed by the method of etching unnecessary ITO.
In this step, the transparent protective film 110 may be provided using the same polycrystalline ITO thin film as the X-axis transparent electrode 103 and the Y-axis transparent electrode 104.

  Next, an insulating film made of UV curable acrylic resin or the like is formed so as to cover the X-axis transparent electrode 103 and the Y-axis transparent electrode 104, and alignment is performed using the alignment mark 109, and photolithography is performed. A desired first insulating layer 107 and second insulating layer 108 are formed by patterning using a method.

Next, the connecting transparent electrode 106 made of polycrystalline ITO is formed on the surface on which the first insulating layer 107 and the second insulating layer 108 are formed.
As with the X-axis transparent electrode 103 described above, the connecting transparent electrode 106 is formed by depositing a polycrystalline ITO thin film by sputtering, aligning it using the alignment mark 109, and forming a pattern by photolithography. It can be formed by a method of etching unnecessary ITO with a strong acid such as.
The conventional touch panel sensor 100 can be formed by the above method.

Next, the color filter will be described. FIG. 9 is a schematic sectional view showing an example of a conventional color filter.
As shown in FIG. 9, the color filter 200 is arranged between a transparent substrate 201 made of a glass substrate, a transparent resin film, or the like, and a light shielding body (black matrix) 202 and a light shielding body 202 arranged in a matrix on the transparent substrate 201. A plurality of colored bodies 203 provided and a transparent electrode 204 disposed so as to cover the colored bodies 203 are included.
Note that a transparent protective film for protecting the colored body 203 in various processes may be provided between the colored body 203 and the transparent electrode 204 (not shown).

The light blocking body 202 is formed to prevent light leakage from the backlight of the liquid crystal display device and color mixing of the colored body 203. The colored body 203 adjusts the color of the backlight that has passed through the liquid crystal as a pixel, and usually three types of colored bodies of red, blue, and green are formed.
The transparent electrode 204 functions as a common electrode for adjusting the light transmittance by changing the arrangement of liquid crystal molecules. Typically, the transparent electrode 204 is made of polycrystalline ITO that has been crystallized to have a low resistance.

  Here, in order to form the light shielding body 202, the colored body 203, and the transparent electrode 204, alignment with each other is necessary. Usually, an alignment mark 205 is formed on the outer periphery of the color filter 200. Typically, the alignment mark 205 is formed simultaneously in the formation process of the light shielding body 202 (Patent Document 4).

For example, as shown in FIG. 10, first, a metal thin film 202a made of chromium or the like is formed on a transparent substrate 201 by sputtering or the like (FIG. 10A), and a desired light shielding body 202 is formed by photolithography or the like. An alignment mark 205 is formed (FIG. 10B).
Next, a plurality of colored bodies 203 are formed between the light shielding bodies 202 (FIG. 10C). A method of forming the colored body 203 is, for example, applying a colored photosensitive resin containing a pigment of each color, aligning using the alignment mark 205, exposing the pattern by a photolithography method, developing, baking, A desired colored body 32 can be formed. In the case of forming three kinds of colored bodies of red, blue and green, the above process is performed three times.
Next, a polycrystalline ITO thin film is formed by sputtering so as to cover the colored body 203, thereby forming a transparent electrode 204 (FIG. 10D).
As described above, the conventional color filter 200 can be obtained.

Utility Model Registration No. 3144241 JP 2001-311954 A JP 2005-290458 A JP-A-8-50202

Here, when the touch panel sensor and the color filter described above are formed on separate transparent substrates and overlapped with each other, it is disadvantageous for thinning and weight reduction of the entire touch panel device.
Therefore, a touch panel sensor-integrated color filter in which a touch panel sensor portion is formed on one surface of the common transparent substrate and a color filter portion is formed on the other surface has been used.

  However, when a touch panel sensor portion is formed on one surface of a common transparent substrate and then a color filter portion is formed on the other surface, this is the first step for forming the color filter portion. When forming the light shielding body, alignment with the touch panel sensor unit is required.

That is, when aligning the color filter part with respect to the touch panel sensor part, it is necessary to identify the alignment mark formed on the transparent substrate on the touch panel sensor part side.
However, in the conventional manufacturing method, the area on the transparent substrate on the color filter portion side corresponding to the position of the alignment mark is covered with a light-shielding film having a low transmittance (for example, the metal thin film 202a shown in FIG. 10A). Therefore, it is difficult to identify the alignment mark formed on the transparent substrate on the touch panel sensor unit side from the color filter unit side through the transparent substrate covered with the light shielding film. It becomes difficult to accurately align with the sensor unit.

  The present invention has been made in view of the above circumstances, and it is easy to identify alignment marks formed on a transparent substrate on the touch panel sensor unit side through the transparent substrate from the color filter unit side. On the other hand, an object of the present invention is to provide a method for manufacturing a color filter integrated with a touch panel sensor, in which the color filter portion can be accurately aligned and formed.

  As a result of various researches, the present inventor has found that the position of the alignment mark formed on the touch panel sensor unit side when forming the film constituting the light shielding body of the color filter unit in the manufacturing method of the color filter integrated with the touch panel sensor. The present invention has been completed by finding that the above problem can be solved by preventing the corresponding region on the transparent substrate on the color filter portion side from being covered with the film constituting the light shielding body.

  That is, the invention according to claim 1 of the present invention is a color in which a touch panel sensor unit having a wiring conductor is formed on one main surface of a transparent substrate, and a light-shielding body is formed on the other main surface of the transparent substrate. In the method for manufacturing a touch panel sensor-integrated color filter for forming a filter portion, an alignment mark is formed on the transparent substrate on the touch panel sensor portion side, and then the color filter portion is formed on the transparent substrate on the color filter portion side. A film constituting a light shielding body is formed in a region excluding a region on the transparent substrate on the color filter portion side corresponding to the position of the alignment mark formed on the touch panel sensor portion side, and then using the alignment mark Aligning from the color filter part side through the transparent substrate to form the color filter part A touch panel sensor integrated type color filter manufacturing method characterized by and.

  The invention according to claim 2 of the present invention is characterized in that the alignment mark is made of the same material as that of the wiring conductor constituting the touch panel sensor unit, and is formed at the same time in the step of forming the wiring conductor. A touch filter sensor-integrated color filter manufacturing method according to claim 1.

  In the invention according to claim 3 of the present invention, the film constituting the light shielding body of the color filter portion is a thin film in which at least one kind of metal, metal oxide, or metal nitride is vacuum-deposited, The thin film is formed in a region excluding the region on the transparent substrate on the color filter unit side corresponding to the position of the alignment mark formed on the touch panel sensor unit side by defining a region for vacuum film formation with a metal mask. A touch filter sensor-integrated color filter manufacturing method according to any one of claims 1 to 2.

  In the invention according to claim 4 of the present invention, the film constituting the light-shielding body of the color filter portion is a thin film formed by coating a resin containing at least light-shielding particles. The thin film is formed in a region excluding a region on the transparent substrate on the color filter portion side corresponding to the position of the alignment mark formed on the touch panel sensor portion side. It is a manufacturing method of the color filter of a touch panel sensor integrated type in any one of 1-3.

  The invention according to claim 5 of the present invention is the method for manufacturing a color filter with an integrated touch panel sensor according to claim 4, wherein the resin containing the light-shielding particles is a photosensitive resin. It is.

According to the present invention, since the region on the transparent substrate on the color filter portion side corresponding to the position of the alignment mark formed on the transparent substrate on the touch panel sensor portion side is not covered with the film constituting the light shielding body, the color filter It becomes easy to identify the alignment mark formed on the transparent substrate on the touch panel sensor part side from the part side, and as a result, the color filter part can be accurately aligned with the touch panel sensor part.
Therefore, in a touch panel sensor integrated color filter in which a touch panel sensor unit is formed on one surface of the common transparent substrate and a color filter unit is formed on the other surface, the touch panel sensor unit and the color filter unit It is possible to easily manufacture a color filter integrated with a touch panel sensor that is accurately aligned with the touch panel sensor.

It is a schematic sectional drawing which shows the example of the touchscreen sensor integrated color filter which concerns on this invention. It is a typical process figure showing an example of a manufacturing method of a touch panel sensor part in a touch panel sensor integrated color filter concerning the present invention. It is a typical process figure showing an example of a manufacturing method of a color filter part in a touch panel sensor integrated color filter concerning the present invention. It is explanatory drawing which shows the relationship between a touchscreen sensor part and a metal mask, (a) is schematic which shows the example of a touchscreen sensor part, (b) is schematic which shows the example of a metal mask. It is the schematic which shows the example of an alignment exposure apparatus. It is explanatory drawing which shows the other example of the manufacturing method of the color filter part in the touchscreen sensor integrated color filter which concerns on this invention, (a) is schematic which shows the coating film-forming using a die-coater, (b) is It is the schematic which shows the example of the color filter part after coating film-forming, (c) is the schematic which shows the example of a touchscreen sensor part. It is a schematic plan view which shows the example of the conventional touch panel sensor. It is AA sectional drawing of the touch-panel sensor shown in FIG. It is a schematic sectional drawing which shows the example of the conventional color filter. It is typical process drawing which shows an example of the manufacturing method of the conventional color filter.

  Hereinafter, the touch panel sensor integrated color filter of the present invention and the manufacturing method thereof will be described in detail.

[Touch filter integrated color filter]
First, the touch panel sensor integrated color filter according to the present invention will be described.
FIG. 1 is a schematic cross-sectional view showing an example of a touch panel sensor integrated color filter according to the present invention. In the touch panel sensor-integrated color filter 1 shown in FIG. 1, a touch panel sensor unit 20 is formed on one surface and a color filter unit 30 is formed on the other surface with a transparent substrate 2 made of a glass substrate or the like interposed therebetween. Has been.

[Touch panel sensor]
The configuration of the touch panel sensor unit 20 can use the same configuration as that of a conventional touch panel sensor. Here, the description is based on an example of a capacitive touch panel sensor having a structure in which the transparent electrodes of the first transparent electrode corresponding to the X-axis transparent electrode and the second transparent electrode corresponding to the Y-axis transparent electrode are arranged on the same plane. To do. In this case, the plan view on the touch panel sensor side may be the same as that shown in FIG.
As shown in FIG. 1, the touch panel sensor unit 20 includes, for example, a first transparent electrode 22 corresponding to an X-axis transparent electrode, a second transparent electrode 23 corresponding to, for example, a Y-axis transparent electrode, a first transparent electrode 22 and a first transparent electrode 22 2 The first insulating layer 24 that insulates the transparent electrode 23, the wiring conductor 21 that connects the first transparent electrode 22 and the second transparent electrode 23 and the control circuit (not shown), and the outer periphery of the touch panel sensor unit 20 It includes at least the alignment mark 27 provided.

The first transparent electrode 22 is divided at a portion intersecting with the second transparent electrode 23, and a first insulating layer 24 is formed between the first transparent electrode 22 and the second transparent electrode 23 to prevent a short circuit. Has been. The first insulating layer 24 is formed so as to cover the second transparent electrode 23 at a portion where the first transparent electrode 22 and the second transparent electrode 23 intersect. And the connection transparent electrode 26 is formed so that the 1st insulating layer 24 may be straddled, and it electrically connects the divided | segmented 1st transparent electrode 22. FIG.
The second insulating layer 25 in FIG. 1 is made of the same material as the first insulating layer 24 and is formed at the same time as the first insulating layer 24 forming step. The first transparent electrode 22 and the second transparent layer It is formed so as to cover the electrode 23. The second insulating layer 25 may be removed.

[Wiring conductor]
The wiring conductor 21 is for electrically connecting the first transparent electrode 22 and the second transparent electrode 23 and the control circuit, and is disposed on the periphery of the transparent substrate 2 outside the display area.
Since the wiring conductor 21 is formed outside the display area, transparency is not necessary, but it is necessary to form the wiring conductor 21 from a material having a small resistance value. Therefore, the material of the wiring conductor 21 is preferably a material having higher conductivity than the transparent electrode material described above. For example, the wiring conductor 21 is formed of a metal thin film made of aluminum, silver, copper, or an alloy thereof, or a conductive paste such as a silver paste.

[Alignment mark]
The alignment mark 27 is provided to align the first transparent electrode 22 and the second transparent electrode 23, the first insulating layer 24, the second insulating layer 25, and the connecting transparent electrode 26.
The alignment mark 27 is also used for alignment when forming a color filter portion described later.
The alignment mark 27 is preferably formed simultaneously with the wiring conductor 21 in the formation process of the wiring conductor 21 using the same material as that of the wiring conductor 21 from the viewpoint of simplification of the process.
The shape of the alignment mark 27 is not particularly limited as long as the alignment can be performed as described above. For example, the alignment mark 27 has a cross shape, a line width of 10 to 100 μm, and a length of 0.5. -3.0 mm.
The arrangement position of the alignment mark 27 is not particularly limited as long as the alignment mark 27 is located outside the display area of the touch panel and can be aligned as described above. Near both ends.
The number of alignment marks 27 is not particularly limited, but is one or more on the left and right ends of the outer peripheral portion of the touch panel sensor unit 20, for example. Moreover, according to each alignment exposure process of a light-shielding body or a colored body (typically 3 colors), you may provide the alignment mark from which an arrangement | positioning position and a shape differ.

[First and second transparent electrodes, connected transparent electrodes]
The 1st transparent electrode 22, the 2nd transparent electrode 23, and the connection transparent electrode 26 are normally formed with the same material. The first transparent electrode 22 and the second transparent electrode 23 are preferably made of the same material because they are formed on the same plane at the same time. In order to obtain uniform transparency and conductivity, the connecting transparent electrode 26 is also a first transparent electrode. This is because the same material as that of the transparent electrode 22 and the second transparent electrode 23 is preferable.

  As the material, a material having transparency and required conductivity is used. For example, indium tin oxide (ITO), zinc oxide, indium oxide, antimony-added tin oxide, fluorine-added tin oxide, aluminum-added zinc oxide, potassium-added zinc oxide, silicon-added zinc oxide, zinc oxide-tin oxide system, oxidation Examples thereof include metal oxides such as indium-tin oxide, zinc oxide-indium oxide-magnesium oxide, and materials in which two or more of these metal oxides are combined.

  The formation method of the 1st transparent electrode 22, the 2nd transparent electrode 23, and the connection transparent electrode 26 is not specifically limited, A well-known method can be used. For example, a polycrystalline ITO thin film is formed using a sputtering method using a mixed gas of argon and oxygen while the substrate is heated to 200 ° C. to 250 ° C., aligned using the alignment mark 27, and subjected to photolithography. After forming a desired pattern, the first transparent electrode 22, the second transparent electrode 23, and the connected transparent electrode 26 are formed by a method of etching unnecessary ITO with aqua regia.

[First and second insulating layers]
The first insulating layer 24 is provided to insulate the first transparent electrode 22 from the second transparent electrode 23 and the connecting transparent electrode 26. The first insulating layer 24 is formed so as to cover the second transparent electrode 23 at a portion where the first transparent electrode 22 and the second transparent electrode 23 intersect. And the connection transparent electrode 26 is formed so that the 1st insulating layer 24 may be straddled, and it electrically connects the divided | segmented 1st transparent electrode 22. FIG.

  The second insulating layer 25 is made of the same material as the first insulating layer 24 and is formed at the same time as the first insulating layer 24, and covers the first transparent electrode 22 and the second transparent electrode 23. Formed. And the 2nd insulating layer 25 prescribes | regulates the area where the connection transparent electrode 26 touches the 2nd transparent electrode 23, and has a function which prevents the short circuit of the connection transparent electrodes 26. The second insulating layer 25 may be removed in the final form.

The first insulating layer 24 and the second insulating layer 25 are made by a screen printing method or a photolithography method using an inorganic material such as a resin material having transparency and electric insulation or SOG (a coating type SiO ₂ material). It is formed. For example, it is formed by using a UV curable acrylic resin and performing processes such as coating, mask exposure, development, and baking.

[Protective film]
The protective film 29 is formed to protect the alignment mark 27, and is usually formed simultaneously with the first transparent electrode 22 and the second transparent electrode 23.
For example, a polycrystalline ITO thin film for forming the first transparent electrode 22 and the second transparent electrode 23 is usually formed also on the alignment mark 27. In order to protect the alignment mark 27 from aqua regia and the like, a desired pattern is formed on the alignment mark 27 by photolithography, and then unnecessary ITO is etched with aqua regia to form a protective film 29. .

[Color filter section]
Next, the color filter unit 30 will be described.
As shown in FIG. 1, the color filter unit 30 is formed on a surface opposite to the surface on which the touch panel sensor unit 20 is formed with the transparent substrate 2 interposed therebetween, and is a light shielding body arranged in a matrix. 31, a plurality of colored bodies 32 disposed between the light shielding bodies 31, and a third transparent electrode 33 formed so as to cover the colored bodies 32.
Each component of the color filter unit 30 can be made of the same material as that of the conventional color filter.
However, the light shield 31 does not exist on the transparent substrate 2 on the color filter unit 30 side corresponding to the position of the alignment mark 27 formed on the touch panel sensor unit 20 side.
Therefore, it becomes easy to identify the alignment mark formed on the touch panel sensor unit 20 side through the transparent substrate 2 from the color filter unit 30 side. As a result, the color filter unit 30 can be accurately compared to the touch panel sensor unit 20. It can be formed in alignment.
Although not shown in FIG. 1, a transparent protective film may be provided between the colored body 32 and the third transparent electrode 33. Examples of the material for the protective film include a transparent material made of an oxide or oxynitride of silicon, aluminum, zinc or tin, or an organic insulating film such as an acrylic resin.

[Shading body]
The light shielding body 31 is provided to prevent light leakage from the backlight of the liquid crystal display device and color mixture of the colored body 32.
The light shielding body 31 is formed by forming a metal thin film such as chromium having a thickness of about 100 to 200 nm by a vacuum film forming method such as a sputtering method or a vacuum deposition method, and patterning this thin film, or carbon fine particles or metal oxides. Forming a resin layer of polyimide resin, acrylic resin, epoxy resin, etc. containing light-shielding particles such as objects, and patterning this resin layer, and light-shielding particles such as carbon fine particles and metal oxides A layer having a light shielding property such as a layer formed by patterning the photosensitive resin layer containing a photosensitive resin layer can be used.

[Colored body]
The color body 32 adjusts the color of the backlight that has passed through the liquid crystal as a color filter pixel, and usually three types of color bodies of red, blue, and green are formed.
Examples of the colorant used in the red colored body include perylene pigments, lake pigments, azo pigments, quinacridone pigments, anthraquinone pigments, anthracene pigments, and isoindoline pigments. These pigments or dyes may be used alone or in combination of two or more.
Examples of the colorant used for the blue colored body include copper phthalocyanine pigments, anthraquinone pigments, indanthrene pigments, indophenol pigments, cyanine pigments, dioxazine pigments, and the like. These pigments or dyes may be used alone or in combination of two or more.
Examples of the colorant used in the green colored body include phthalocyanine pigments such as halogen polysubstituted phthalocyanine pigments or halogen polysubstituted copper phthalocyanine pigments, triphenylmethane basic dyes, isoindoline pigments, and isoindolinones. And pigments. These pigments or dyes may be used alone or in combination of two or more.

[Third transparent electrode]
The third transparent electrode 33 functions as a common electrode for adjusting the light transmittance by changing the arrangement of liquid crystal molecules.
The third transparent electrode 33 can be formed, for example, by depositing polycrystalline ITO using a sputtering method using a mixed gas of argon and oxygen while heating the substrate to 200 ° C. to 250 ° C.

[Method for manufacturing color filter with touch panel sensor]
Next, the manufacturing method of the color filter integrated with a touch panel sensor of the present invention will be described. The manufacturing method of the color filter integrated with the touch panel sensor of the present invention corresponds to the position of the alignment mark formed on the transparent substrate on the touch panel sensor unit side in the step of forming the material forming the light shielding body of the color filter unit. The area on the transparent substrate on the color filter part side is not covered with the film constituting the light shielding body, and this allows the touch panel sensor part to pass through the transparent substrate from the color filter part side. This makes it easy to identify the alignment mark formed on the transparent substrate on the side, and as a result, the color filter portion can be accurately aligned with the touch panel sensor portion.
The manufacturing method of the other components is not particularly limited as long as the touch panel sensor integrated color filter having the above-described configuration can be obtained.

[Method for manufacturing touch panel sensor]
In the present invention, first, a touch panel sensor part is formed, and then a color filter part is formed, whereby the touch panel sensor integrated color filter according to the present invention is obtained.
FIG. 2 shows an example of a method for manufacturing a touch panel sensor portion in a color filter with an integrated touch panel sensor according to the present invention. First, a transparent substrate 2 made of a material such as glass is prepared, and a wiring conductor 21 made of a metal material and an alignment mark 27 are simultaneously formed on one surface thereof (FIG. 2A). A method for forming the wiring conductor 21 and the alignment mark 27 is not particularly limited, and a known method can be used. For example, a metal thin film is formed on the transparent substrate 2 by a sputtering method, and a desired shape is formed by a photolithography method. Wiring conductor 21 and alignment mark 27 are formed.

Next, as shown in FIG. 2B, the first transparent electrode 22 and the second transparent electrode 23 made of polycrystalline ITO are simultaneously formed on the surface on which the wiring conductor 21 and the alignment mark 27 are formed.
The polycrystalline ITO that forms the first transparent electrode 22 and the second transparent electrode 23 is formed by a sputtering method using a mixed gas of argon and oxygen while heating the substrate to 200 ° C. to 250 ° C. Then, alignment exposure is performed using the alignment mark 27 by a photolithography method, a pattern is formed, and then processed into a desired shape by a method of etching unnecessary ITO with a strong acid such as aqua regia.

Next, an insulating film for forming the first insulating layer 24 and the second insulating layer 25 is formed so as to cover the first transparent electrode 22 and the second transparent electrode 23 (FIG. 2C). ), Alignment is performed using the alignment mark 27, and pattern processing is performed to form the first insulating layer 24 and the second insulating layer 25 having desired shapes (FIG. 2D).
The method for forming the first transparent electrode 22 and the second transparent electrode 23 is not particularly limited, and a known method can be used. For example, a UV curable acrylic resin is applied, and a desired shape is formed by photolithography. The first insulating layer 24 and the second insulating layer 25 can be formed.

Next, as shown in FIG. 2E, a connected transparent electrode 26 made of polycrystalline ITO is formed on the surface on which the first insulating layer 24 and the second insulating layer 25 are formed.
The polycrystalline ITO forming the connection transparent electrode 26 is formed by sputtering using a mixed gas of argon and oxygen while heating the substrate to 200 ° C. to 250 ° C. Then, alignment exposure is performed using the alignment mark 27 by a photolithography method, a pattern is formed, and then processed into a desired shape by a method of etching unnecessary ITO with a strong acid such as aqua regia.
Through the above steps, the touch panel sensor unit 20 of the color filter integrated with the touch panel sensor according to the present invention is formed.

[Production method of color filter section]
Next, a color filter portion is formed on the surface of the transparent substrate 2 opposite to the surface on which the touch panel sensor portion is formed.
Here, the method for forming the light shielding body 31 of the color filter portion according to the present invention includes the following two embodiments depending on the material constituting the light shielding body 31. That is, a mode for forming a light shielding body made of a metal thin film such as chromium (first embodiment) and a mode for forming a light shielding body made of a resin containing light shielding particles such as carbon fine particles (second embodiment). ).

(First embodiment)
As an example of the first embodiment, a mode of forming a light shielding body made of a metal thin film such as chromium will be described.
First, as shown in FIG. 3A, a thickness of about 100 to 200 nm is formed on the surface of the transparent substrate 2 opposite to the surface on which the touch panel sensor unit 20 is formed by a sputtering method using a metal mask 40. A metal thin film 31a such as chromium is vacuum-deposited.

Here, the metal mask 40 will be described. FIG. 4 shows a relationship between the touch panel sensor unit 20 and the metal mask 40 of the touch panel sensor integrated color filter according to the present invention.
As shown in FIG. 4B, the metal mask 40 acts to shield at least a region on the transparent substrate on the color filter unit side corresponding to the position of the alignment mark 27 formed on the touch panel sensor unit 20 side. And an opening 41 including the effective area 28 of the touch panel sensor unit 20.

A color filter corresponding to the position of the alignment mark 27 formed on the touch panel sensor unit side by interposing the metal mask 40 between a metal target such as chromium and the transparent substrate 2 in the vacuum film forming step. In the region on the transparent substrate on the part side, no metal such as chromium is sputtered.
This makes it easy to identify the alignment mark formed on the touch panel sensor unit side through the transparent substrate from the color filter unit side.

  Next, as shown in FIG. 3B, a photoresist is applied to the metal thin film 31a, and alignment exposure, development, and etching are performed to form a light shielding body 31 having a desired shape. The alignment exposure is performed as follows, for example.

FIG. 5 shows an example of an exposure apparatus used for alignment exposure. As shown in FIG. 5, the transparent substrate 2 is held by the exposure apparatus 50 so that the color filter portion side faces the light-shielding body photomask 60. Here, in this invention, it is preferable to hold | maintain at the edge part of the transparent substrate 2 by the board | substrate holding means 51 so that a touchscreen sensor part may not receive the contamination by contact.
The light-shielding body photomask 60 is held above the transparent substrate 2 by the mask holding means 52. Then, the mask-side alignment mark 61 provided on the light shielding body photomask 60 and the alignment mark 27 formed on the touch panel sensor portion side of the transparent substrate 2 are used to form the transparent substrate 2 and the light shielding body photomask 60. Alignment is performed.

The above alignment is performed as follows, for example.
First, the CCD camera 54 provided with the alignment light source 53 images the mask side alignment mark 61 provided on the light shielding body photomask 60 and the alignment mark 27 formed on the touch panel sensor portion side of the transparent substrate 2. The
Here, the alignment mark 27 is provided on the transparent substrate 2 on the side opposite to the color filter portion side, but the region corresponding to the position of the alignment mark 27 on the color filter portion side is not covered with the light shielding body. The alignment mark 27 can be easily identified through the transparent substrate 2 from the color filter portion side.

The captured image signal is sent to the control means 55 connected to the CCD camera 54. An arrangement error between the mask-side alignment mark 61 and the alignment mark 27 formed on the transparent substrate 2 is obtained from the image signal, and the control means 55 drives and controls the moving means 56 based on the arrangement error.
Then, the transparent substrate 2 is moved together with the substrate holding unit 51 by the moving unit 56, and the alignment of the mask side alignment mark 61 and the alignment mark 27 formed on the transparent substrate 2 is performed. As described above, the light-shielding body photomask 60 can be accurately and reliably aligned with the transparent substrate 2.
Finally, the photoresist on the metal thin film 31 a is exposed by the exposure light source 57 of the exposure apparatus 50 through the light shielding body photomask 60.

Next, as shown in FIG. 3C, a plurality of colored bodies 32 are formed between the light shielding bodies 31.
The alignment exposure for forming the colored body 32 is performed using the alignment mark 27 formed on the touch panel sensor portion side of the transparent substrate 2 in the same manner as the alignment exposure method for forming the light shielding body 31 described above. Can do.
Here, the alignment marks of the light-shielding body and the colored bodies (typically three colors) can be provided at different positions. This is to prevent the mark area from being covered by each coloring application process. Further, the alignment marks of the light shielding body and the respective colored bodies (typically three colors) may be marks having different shapes. This is because it is possible to prevent the color of the colored body to be formed from being mistaken.
The process of forming the colored body 32 other than the alignment exposure process is not particularly limited, and a known method can be used. For example, a colored photosensitive resin containing a pigment of each color is applied, exposed, developed, baked. Thus, a desired colored body 32 can be formed. In the case of forming three kinds of colored bodies of red, blue and green, the above process is performed three times.

Finally, as shown in FIG. 3D, a polycrystalline ITO thin film is formed by sputtering so as to cover the colored body 32, thereby forming the third transparent electrode 33.
As described above, the touch panel sensor integrated color filter according to the first embodiment of the present invention can be obtained.
In the above description, the manufacturing method for forming each colored body (typically three colors) after the formation of the light shielding body has been described. However, for example, each colored body (typically three colors) is first formed. After that, a light shielding body may be formed.

(Second Embodiment)
Next, as an example of the second embodiment, a mode of forming a light shielding body made of a photosensitive resin containing light shielding particles such as carbon fine particles will be described.
FIG. 6 is an explanatory view showing an example of a manufacturing method of a color filter part in the touch panel sensor integrated color filter of the second embodiment according to the present invention, and (a) is a schematic showing coating film formation using a die coater. It is a figure, (b) is a schematic diagram showing an example of a color filter part after application film formation, and (c) is a schematic diagram showing an example of a touch panel sensor part.
First, as shown in FIG. 6A, a thickness of 1 to 3 μm is formed on the surface of the transparent substrate 2 opposite to the surface on which the alignment mark 27 of the touch panel sensor portion is formed by coating using a die coater. A photosensitive resin layer 31b containing light-shielding particles such as carbon fine particles is formed.
Here, the die nozzle 70 of the die coater has an opening defined by the width of the effective area 28 of the touch panel sensor unit 20, and therefore a color corresponding to the position of the alignment mark formed on the touch panel sensor unit side. The resin layer 31b is not applied to the region on the transparent substrate on the filter side (FIGS. 6B and 6C).
By using such a coating film forming method, it becomes easy to identify the alignment mark formed on the touch panel sensor unit side through the transparent substrate from the color filter unit side.

  In addition, as a method of forming a light-shielding body made of a photosensitive resin containing light-shielding particles such as carbon fine particles, in addition to the method using the above-described die coater, an inkjet method, a screen printing method, or a dry film is laminated. There are methods, etc., both of which form the above-described die coater by forming a photosensitive resin layer containing light-shielding particles such as carbon fine particles within the range defined by the width of the effective area 28 of the touch panel sensor unit 20. As in the case of using it, the alignment mark formed on the touch panel sensor unit side can be identified from the color filter unit side through the transparent substrate.

Next, alignment exposure, development, baking, and the like are performed to form a light shielding body 31 having a desired shape.
The alignment exposure is performed using the alignment mark 27 formed on the touch panel sensor portion side of the transparent substrate 2 in the same manner as the alignment exposure method for forming the light shield 31 in the first embodiment. it can. Therefore, detailed description is omitted here.

Next, a plurality of colored bodies 32 are formed between the light shielding bodies 31.
The alignment exposure for forming the colored body 32 can be performed using the alignment mark 27 formed on the touch panel sensor portion side of the transparent substrate 2 in the same manner as the method described in the first embodiment. Therefore, detailed description is omitted here.

Next, a polycrystalline ITO thin film is formed by a sputtering method so as to cover the colored body 32 to obtain the third transparent electrode 33.
As described above, the touch panel sensor integrated color filter of the second embodiment according to the present invention can be obtained.
In the above description, the manufacturing method for forming each colored body (typically three colors) after the formation of the light shielding body has been described. However, each colored body (typically three colors) is formed first. Then, a light shielding body may be formed thereafter.

According to the present invention, since the region on the transparent substrate on the color filter portion side corresponding to the position of the alignment mark formed on the touch panel sensor portion side is not covered with the film constituting the light shielding body, the touch panel is opened from the color filter portion side. It becomes easy to identify the alignment mark formed on the transparent substrate on the sensor unit side, and as a result, the color filter unit can be accurately aligned with the touch panel sensor unit.
Therefore, in a touch panel sensor integrated color filter in which a touch panel sensor unit is formed on one surface of the common transparent substrate and a color filter unit is formed on the other surface, the touch panel sensor unit and the color filter unit It is possible to easily manufacture a color filter integrated with a touch panel sensor that is accurately aligned with the touch panel sensor.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the technical idea described in the claims of the present invention has substantially the same configuration and exhibits the same function and effect regardless of the case. It is included in the technical scope of the invention.

Hereinafter, the present invention will be described more specifically with reference to examples.
Example 1
The touch panel sensor integrated color filter according to the present invention was manufactured according to the manufacturing method of the first embodiment described above.
First, as a transparent substrate 2, an AN glass manufactured by Asahi Glass Co., Ltd. having a size of 350 mm × 300 mm is prepared, and aluminum is formed on one surface thereof by a sputtering method. The wiring conductor 21 and the alignment mark 27 were formed by etching with phosphoric acid / acetic acid water mixed at a ratio of 1: 4: 4. The alignment mark 27 was a cross-shaped mark having a line width of 20 μm and a length of 1.0 mm.

  Next, a polycrystalline ITO thin film having a thickness of 20 nm is formed on the surface on which the wiring conductor 21 and the alignment mark 27 are formed by sputtering using a mixed gas of argon and oxygen at a substrate temperature of 230 ° C. A desired pattern was formed by lithography, and unnecessary ITO was etched with aqua regia to form the first transparent electrode 22 and the second transparent electrode 23.

  Next, a positive photosensitive material PFI-27 manufactured by Sumitomo Chemical Co., Ltd. is applied so as to cover the first transparent electrode 22 and the second transparent electrode 23, and the first insulation having a desired shape is formed by photolithography. Layer 24 and second insulating layer 25 were formed.

  Next, a polycrystalline ITO thin film having a thickness of 20 nm is formed on the surface on which the first insulating layer 24 and the second insulating layer 25 are formed by a sputtering method using a mixed gas of argon and oxygen at a substrate temperature of 230 ° C. Then, a desired pattern was formed by photolithography, and unnecessary ITO was etched with aqua regia to form the connected transparent electrode 26.

Next, a region other than the region on the transparent substrate on the color filter portion side corresponding to the position of the alignment mark 27 formed on the touch panel sensor portion side by sputtering using the metal mask 40 on the opposite surface of the transparent substrate 2. A metal thin film 31a made of chromium having a thickness of 150 nm was formed in a predetermined region.
Next, a positive photosensitive material PFI-27 manufactured by Sumitomo Chemical Co., Ltd. is applied to the metal thin film 31a, alignment exposure is performed using the alignment mark 27 formed on the touch panel sensor portion side of the transparent substrate 2, and development and etching are performed. The light shielding body 31 having a desired shape was formed.
Subsequently, a colored photosensitive resin containing a red pigment was applied, alignment exposure, development, and baking were performed to form a red colored body 32. Blue and green colored bodies 32 were formed in the same manner.

  Finally, a 130 nm thick polycrystalline ITO thin film is formed by sputtering so as to cover the colored body 32 to form the third transparent electrode 33, and the touch panel of the first embodiment according to the present invention. A sensor integrated color filter was obtained.

(Example 2)
In accordance with the manufacturing method of the second embodiment described above, the touch panel sensor integrated color filter according to the present invention was manufactured.
First, AN glass manufactured by Asahi Glass Co., Ltd. was prepared as the transparent substrate 2, and the touch panel sensor portion of the touch panel sensor integrated color filter according to the present invention was formed on one surface in the same manner as in Example 1.

Next, an alignment mark formed on the touch panel sensor unit side by a die coating method using a die nozzle 70 having an opening defined in the width of the region requiring the light shield 31 on the opposite surface of the transparent substrate 2. A photosensitive resin layer 31b made of carbon black having a thickness of 2 μm was applied and formed in a predetermined region other than the region on the transparent substrate on the color filter portion side corresponding to position 27.
Next, alignment exposure was performed using the alignment mark 27 formed on the touch panel sensor portion side of the transparent substrate 2, and development and baking were performed to form a light shielding body 31 having a desired shape.
Subsequently, a colored photosensitive resin containing a red pigment was applied, alignment exposure, development, and baking were performed to form a red colored body 32. Blue and green colored bodies 32 were formed in the same manner.

  Finally, a polycrystalline ITO thin film having a thickness of 130 nm is formed by sputtering so as to cover the colored body 32 to form the third transparent electrode 33, and the touch panel of the second embodiment according to the present invention. A sensor integrated color filter was obtained.

  In any of the steps of Examples 1 and 2, the area on the transparent substrate on the color filter portion side corresponding to the position of the alignment mark formed on the touch panel sensor portion side is not covered with the light shielding body. The alignment mark formed on the transparent substrate on the touch panel sensor unit side can be easily identified through the transparent substrate from the color filter unit side, and the color filter unit can be manufactured with high positional accuracy with respect to the touch panel sensor unit. .

DESCRIPTION OF SYMBOLS 1 Touch panel sensor integrated color filter 2 Transparent substrate 20 Touch panel sensor part 21 Wiring conductor 22 1st transparent electrode 23 2nd transparent electrode 24 1st insulating layer 25 2nd insulating layer 26 Connection transparent electrode 27 Alignment mark 28 Effective area 29 Protective film DESCRIPTION OF SYMBOLS 30 Color filter part 31 Light-shielding body 31a Metal thin film 31b Resin layer 32 Colored body 33 3rd transparent electrode 40 Metal mask 41 Shielding part 42 Opening part 50 Exposure apparatus 51 Substrate holding means 52 Mask holding means 53 Light source for alignment 54 CCD camera 55 Control Means 56 Moving means 57 Exposure light source 60 Light shield photomask 61 Mask side alignment mark 70 Die nozzle 100 Touch panel sensor 101 Transparent substrate 102 Effective area 103 X-axis transparent electrode 104 Y-axis transparent electrode 105 Wiring conductor 1 06 Connection transparent electrode 107 1st insulating layer 108 2nd insulating layer 109 Alignment mark 110 Protective film 200 Color filter 201 Transparent substrate 202 Light shielding body 202a Metal thin film 203 Colored body 204 Transparent electrode 205 Alignment mark

Claims (5)

Manufacture of a touch panel sensor integrated color filter in which a touch panel sensor portion having a wiring conductor is formed on one main surface of a transparent substrate, and a color filter portion having a light blocking body is formed on the other main surface of the transparent substrate. In the method
An alignment mark is formed on the transparent substrate on the touch panel sensor side,
Then, on the transparent substrate on the color filter portion side, a transparent substrate on the color filter portion side corresponding to the position of the alignment mark formed on the touch panel sensor portion side with a film constituting the light shielding body of the color filter portion. Form in the area except the upper area,
Next, the color filter part is formed by performing alignment from the color filter part side through the transparent substrate using the alignment mark, and the method for manufacturing a color filter with an integrated touch panel sensor.   The touch panel sensor integrated color filter according to claim 1, wherein the alignment mark is made of the same material as a wiring conductor constituting the touch panel sensor unit, and is formed at the same time in the step of forming the wiring conductor. Manufacturing method.   The film constituting the light shielding body of the color filter portion is a thin film in which at least one kind of metal, metal oxide, or metal nitride is vacuum-deposited, and a region to be vacuum-deposited is defined by a metal mask The thin film is formed in a region excluding a region on the transparent substrate on the color filter portion side corresponding to the position of the alignment mark formed on the touch panel sensor portion side. A method for manufacturing a color filter integrated with a touch panel sensor according to claim 1.   The film constituting the light-shielding body of the color filter part is a thin film formed by coating a resin containing at least light-shielding particles, and is formed on the touch panel sensor part side by defining the coating film-forming region. The touch panel sensor integrated type according to any one of claims 1 to 3, wherein the thin film is formed in a region excluding a region on the transparent substrate on the color filter portion side corresponding to the position of the alignment mark. Manufacturing method of color filter. 5. The method for manufacturing a color filter integrated with a touch panel sensor according to claim 4, wherein the resin containing the light-shielding particles is a photosensitive resin.

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