JP5385749B2 - Transfer apparatus and transfer method - Google Patents

Description

  The present invention relates to a transfer apparatus and a transfer method for transferring a fine transfer pattern to a molded product.

  In recent years, a mold (mold) is formed by forming an ultrafine transfer pattern on a quartz substrate or the like by an electron beam drawing method or the like, and the mold is pressed to a molded product with a predetermined pressure, and the mold is formed. A nanoimprint technique for transferring a transfer pattern has been researched and developed (for example, see Non-Patent Document 1).

  As a method for forming a nano-order fine pattern (transfer pattern) at a low cost, an imprint method using a lithography technique has been devised. This molding method is roughly classified into a thermal imprint method and a UV imprint method.

  In the thermal imprint method, the mold is pressed against the substrate (molded product) and heated until the resin (thermoplastic resin) made of a thermoplastic polymer is sufficiently flowable to allow the resin to flow into the fine pattern. After that, the mold and the resin are cooled to below the glass transition temperature, the fine pattern transferred to the substrate is solidified, and then the mold is pulled apart.

  In the UV imprint method, a transparent mold capable of transmitting light is used, and the UV radiation is applied by pressing the mold against the UV curable liquid. Radiant light is applied for an appropriate time to cure the solution and transfer the fine pattern, and then pull back the mold.

  The imprint includes a molded product holder that holds the molded product, and a mold holder that holds the mold and moves relatively in a direction approaching or moving away from the molded product holder. Is made by a transfer device.

Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 25 (2001) 192-199

  By the way, in the conventional transfer apparatus, a molded product (for example, a trial molded product; the first molded product) is installed on the molded product holder, the mold is installed on the mold holder, and visually checked. The mold is brought close to the product by manual operation.

  When the mold is sufficiently close to the product to be molded, the movement of the mold by the manual operation is stopped, and the position A of the mold holding body with respect to the product to be molded body at that time is provided in the control device of the transfer device. Is stored in the storage unit.

  Further, in the conventional transfer apparatus, in addition to storing the position A, the moving speed of the mold holder until the position A is reached (the moving speed of the mold holder when the mold is brought close to the product to be molded), transfer is performed. Limit value of pressing force (press) when pressing (pressing) the product to be molded with the mold, the moving speed of the mold holder after the position A (the mold is brought into contact with the product to be pressed) The movement speed of the mold holder at the time) is set.

  Then, by using the stored position A and each set value, a fine transfer pattern formed on the mold is transferred to a molded product (for example, transferred next to the trial molded product). To be molded; second and subsequent molded products). That is, up to the position A, the mold holder is moved at a high speed, and after passing the position A, the mold holder is moved at a low speed for transfer.

  However, in the conventional transfer apparatus, since the position A is obtained manually, there is a problem in that the transfer efficiency of the fine transfer pattern formed on the mold to the molded product is deteriorated due to individual differences among operators. There is.

  That is, the manual operation for obtaining the position A requires a long time, and the value of the obtained position A is large, so that the second and subsequent molded articles (the first molded article and When transferring the molded product having the same shape, extra time is required and transfer efficiency is deteriorated.

  The above problem becomes more prominent when the operator has little experience or is in poor physical condition.

  The present invention has been made in view of the above problems, and can be efficiently transferred in a transfer apparatus and a transfer method for transferring a fine transfer pattern formed on a mold to a molded product. It is an object to provide a transfer device and a transfer method.

  According to a first aspect of the present invention, there is provided a transfer apparatus for transferring a fine transfer pattern formed on a mold onto a molded product, and a molded product holder for holding the molded product, and the mold being held. A mold holder that relatively moves in a direction approaching or moving away from the molded article holder, and a driving unit that drives the mold holder so that the mold holder moves relative to the mold holder. A position detecting means for detecting a relative position of the mold holding body with respect to the molded article holding body, and a molding held by the molded article holding body by a mold held by the mold holding body. A pressing force detection sensor for detecting a pressing force when pressing an article, and the mold holding body is relatively moved by the driving means, and the pressing force detected by the pressing force detection sensor starts to increase, or The pressing force detected by the pressing force detection sensor is Upon reaching a constant value, which is a transfer device and a control means for controlling to store the relative position detected by said position detecting means in the storage unit.

  According to a second aspect of the present invention, in the transfer device according to the first aspect, the control unit is configured such that the mold is held by the mold holding body, and the first molded product is the molded product holding body. The mold and the first mold are held in a state where the mold held by the mold holding body is separated from the molded product held by the molded product holding body by a first predetermined distance. The mold holder is relatively brought closer to the molded article holder at a first speed until the distance to the molded article becomes a second predetermined distance smaller than the first predetermined distance. Thereafter, the transfer device is a means for controlling and storing the drive means so that the mold holder is relatively brought close to the molded article holder at a second speed lower than the first speed. It is.

  According to a third aspect of the present invention, in the transfer device according to the second aspect, after the storage, the control unit holds the mold on the mold holding body, and the second article to be molded is the The mold held by the molded article holder and the mold held by the mold holder is separated from the second molded article held by the molded article holder by a first predetermined distance. In the state, until the distance between the mold and the second molded product reaches a third predetermined distance, the mold holding body is relative to the second molded product holding body at the first speed. , And thereafter, at the second speed, the driving means is controlled so as to bring the mold holding body relatively close to the second molded article holding body. The distance is a transfer device that is smaller than the second predetermined distance.

  Invention of Claim 4 is the transfer method which transfers to the said to-be-molded product using the transfer apparatus of any one of Claims 1-3.

  According to the present invention, in a transfer device and a transfer method for transferring a fine transfer pattern formed on a mold to a molded product, there is an effect that the transfer can be efficiently performed.

1 is a diagram illustrating a schematic configuration of a transfer device according to an embodiment of the present invention. It is a figure which shows the transcription | transfer apparatus with which a type | mold and a to-be-molded product are contacting. It is a figure which shows the input screen of a transfer apparatus. It is a figure which shows the movement operation | movement of a type | mold holding body, and the pressing force to the to-be-molded product by a type | mold. It is a flowchart which shows operation | movement of a transfer apparatus. It is a flowchart which shows operation | movement of a transfer apparatus. It is a figure which shows schematic structure of the transfer apparatus for performing transcription | transfer several times with one type | mold to one big to-be-molded product. It is a figure which shows the outline | summary of the thermal imprint method. It is a figure which shows the outline | summary of UV imprint method.

  FIG. 1 is a diagram showing a schematic configuration of a transfer apparatus 1 according to an embodiment of the present invention.

  Hereinafter, for convenience of explanation, one horizontal direction is defined as an X-axis direction, another horizontal direction that is perpendicular to the X-axis direction is defined as a Y-axis direction, and the X-axis direction and the Y-axis direction. A direction perpendicular to the vertical direction (vertical direction; vertical direction) is referred to as a Z-axis direction.

  The transfer device (nanoimprint device) 1 is a fine transfer pattern (pitch and height of, for example, visible light, infrared light, or ultraviolet light) formed on the mold (stamper) M by the above-described thermal imprint method, UV imprint method, or the like. (Transfer pattern formed with fine irregularities having the same degree as the wavelength of) is transferred to the molded product W (by pressing the molded product W with the mold M, the fine irregularities similar to those of the mold M are transferred. Device). In addition, as a to-be-molded product W, CD-ROM, DVD-ROM, the light-guide plate of a liquid crystal display device, the board | substrate of a hard disk, etc. can be hung up.

  Here, the thermal imprint method will be described with reference to FIG. 8 (a diagram showing an outline of the thermal imprint method). The transfer device 1 is in charge of the steps shown in FIGS. In the case of the thermal imprint method, the mold M is made of metal, quartz glass, or the like, and the molded product W is made of a thermoplastic resin or the like.

  8A, the mold M and the workpiece W are heated by a heater (not shown) provided in the transfer device 1, and the mold M is moved in the direction of the arrow shown in FIG. It moves, and presses the to-be-molded product W with the type | mold M as shown in FIG.8 (b). Thereafter, when the mold M is moved in the direction of the arrow shown in FIG. 8 (b) and the mold M is separated from the molded product W, a fine transfer pattern is formed on the molded product W as shown in FIG. 8 (c). Is transcribed.

  Next, the UV imprint method will be described with reference to FIG. 9 (a diagram showing an outline of the UV imprint method). The transfer device 1 is in charge of the steps shown in FIGS.

  In the case of the UV imprint method, the mold M is made of, for example, quartz glass, and the molded product W is thinly provided on the surface of the base material W1 made of, for example, silicon or glass and the base material W1. Film-shaped transfer material (for example, UV curable resin) W2.

  The mold M is moved in the direction of the arrow shown in FIG. 9A, and the molded product W is pressed by the mold M as shown in FIG. The UV curable resin (ultraviolet curable resin) W2 is cured by irradiating ultraviolet rays with an unillustrated). Thereafter, when the mold M is moved in the direction of the arrow shown in FIG. 9B and the mold M is separated from the molding target W, as shown in FIG. 9C, the molding target W (ultraviolet curable resin) is obtained. A fine transfer pattern is transferred to W2). Up to here, the transfer is performed using the transfer device 1.

After the transfer, in the state shown in FIG. 9C, the remaining film of the cured UV curable resin W2 is removed by, for example, O ₂ ashing, and the UV curable resin W2 from which the remaining film has been removed is used as a masking member by etching. A fine transfer pattern is formed on the material W1, and then the cured ultraviolet curable resin W2 is removed with, for example, a solvent. As a result, as shown in FIG. 9D, a fine transfer pattern is transferred to the substrate W1.

  The transfer device 1 includes a molded product holder 3 that holds a molded product W and a mold holder 5 that holds a mold M.

  The molded product holder 3 is provided on the frame 7, and the mold holder 5 is movable in a direction approaching or moving away from the molded product holder 3 (for example, the Z-axis direction). It is provided on the frame 7. In addition to or in addition to the mold holder 5 being movably provided with respect to the frame 7 in the Z-axis direction, the molded article holder 3 is movable with respect to the frame 7 in the Z-axis direction. It may be provided. That is, it is only necessary that the mold holder 5 is movable relative to the molded article holder 3 in the Z-axis direction.

  Further, the transfer device 1 is provided with a drive unit 9, a position detection unit 11, a pressing force detection sensor 13, and a control unit (control device) 15.

  The drive means 9 drives the mold holder 5 so as to move the mold holder 5 in the Z-axis direction, and includes, for example, an actuator such as a servo motor 17 and a ball screw 19. Then, when the rotation output shaft of the servo motor 17 is driven to rotate, the mold holder 5 is moved and positioned in the Z-axis direction via the ball screw 19. Then, the molded product W held by the molded product holding body 3 is pressed (pressed) with a predetermined force by the mold M held by the mold holding body 5 and transferred.

  The position detecting means 11 detects the position of the mold holder 5 in the Z-axis direction with respect to the molded article holder 3, and includes, for example, a rotary encoder 21 that detects the rotation angle of the rotation output shaft of the servo motor 17. Configured. Then, by detecting the rotation angle of the rotation output shaft of the servo motor 17, it is possible to detect the amount of movement of the mold holder 5 with respect to the frame 7 and the position of the mold holder 5 with respect to the molded article holder 3. It has become. That is, detecting the position of the mold M held by the mold holding body 5 (the distance between the molded article W and the mold M) with respect to the molded article W held by the molded article holding body 3. Can be done.

  The pressing force detection sensor 13 moves the mold holder 5 in the direction approaching the molded article holder 3 (downward in the Z axis) by the driving means 9, and the molded article is held by the mold M held by the mold holder 5. A pressing force (pressing force) when the workpiece W held by the holding body 3 is pressed (pressed) is detected. For example, the load cell 23 is provided.

  The control device 15 includes a control unit 25 and a storage unit (memory) 27, and controls the operation of the transfer device 1 based on an operation program stored in the memory 27. . For example, the control device 15 is configured such that when a trial molded product (for example, the first molded product) W is installed on the molded product holder 3 and the mold M is installed on the mold holder 5, The driving means 9 moves the mold holder 5 in a direction approaching the molded article holder 3 (downward in the Z-axis), and the mold M contacts the trial molded article W and is detected by the pressing force detection sensor 13. Detected by the position detecting means 11 when the pressure starts to increase or when the pressing force detected by the pressing force detection sensor 13 reaches a predetermined value when the mold M contacts the trial product W The memory 27 is controlled to store the position (the position of the mold holder 5 with respect to the molded article holder 3).

  Further, the control device 15 is provided with an input unit 29 configured by, for example, a touch panel and a keyboard, and an output unit (display unit) 30 configured by, for example, a liquid crystal display device.

  In addition, the control device 15 uses a trial product when transferring to a molded product for mass production (a molded product having the same shape as the trial molded product W; for example, a second or subsequent molded product). Using the value of the position (position of the mold holding body 5) stored in the memory 27 using the molded article W, the driving means 9 is controlled, and the mold for the molded article W held on the molded article holding body 3 is controlled. The mold M held by the holding body 5 is relatively positioned.

  That is, in the control device 15, the mold M is held by the mold holding body 5, the trial molded product W is held by the molded product holding body 3, and the mold held by the mold holding body 5 is used. In a state where M is separated from the molded product W held by the molded product holding body 3 by a first predetermined distance (a state where the mold holding body 5 is positioned at the rising end), the driving means 9 Is to control.

  Further, the control device 15 determines that the distance between the mold (mold held by the mold holder 5) M and the trial molded article (trial molded article held by the molded article holder 3) W is The mold holder 5 is brought close to (lowered) the molded article holder 3 at the first speed (fast-running speed) until the second predetermined distance is smaller than the first predetermined distance. Thereafter, at a second speed (pressing speed) slower than the first speed, the mold holder 5 is brought close to (lowered) the molded article holder 3, and the mold M becomes the trial molded article W. When the pressing force detected by the pressing force detection sensor 13 reaches a predetermined value, the position detected by the position detecting means 11 (the position of the mold M held by the mold holding body 5; the mold holding body 5 The position may be stored) in the memory 27.

  In addition, after storing in the memory 27, the control device 15 holds the mold M on the mold holder 5, holds the molded product W for mass production on the molded article holder 3, and A state in which the mold M held by the holding body 5 is separated from the molding target W held by the molding target holding body 3 by a first predetermined distance (the mold holding body 5 is positioned at the rising end). The driving means 9 is controlled.

  That is, the control device 15 determines the distance between the mold (the mold held by the mold holding body 5) M and the molded product for mass production (the molded product for mass production held by the molded article holding body 3) W. Until the third predetermined distance (offset value) is reached, the mold holder 5 is brought close to (lowered) the molded article holder 3 at the first speed, and thereafter, the mold holder 5 is moved at the second speed. The holding body 5 is made to approach (lower) the molded article holding body 3. Then, the workpiece M is pressed and transferred by the mold M.

  The third predetermined distance is a distance smaller than the second predetermined distance. Further, when the distance is the third predetermined distance, the mold M held by the mold holder 5 and the molded product W for mass production held by the molded article holder 3 are not in contact with each other. It has become. Further, at the third predetermined distance, the distance between the mold holder 5 and the molded article holder 3 is the distance between the mold holder 5 and the molded article holder 3 stored in the memory 27. Is slightly larger than

  Further, the first speed of the trial molded product W may be different from the first speed of the mass-produced molded product W. That is, the first speed in the trial molded product W may be slower than the first speed in the mass-produced molded product W, or may be a faster speed. The second speed may be different as well.

  Further, the molded product W for mass production is adopted as a product or a semi-finished product. After storing in the storage unit 27, the product is transferred to the test molded product W and used for trial. The molded product W may be employed as a product or a semi-finished product.

  The transfer device 1 will be described in more detail.

  The frame 7 includes a lower frame 33, an upper frame 35, a column (not shown), and a tie rod 37. The mold holder 5 includes a movable body 39 and a mold holder 41, and is provided between the lower frame 33 and the upper frame 35 in the Z-axis direction.

  The lower frame 33 and the upper frame 35 are integrated via the column, and for example, four tie rods 37 are integrally provided between the lower frame 33 and the upper frame 35. . Each of the four tie rods 37 is provided in the vicinity of the four corners of the lower frame 33 and the upper frame 35.

  The movable body 39 of the mold holding body 5 is provided in the column via a linear guide bearing (not shown) and is movable in the Z-axis direction. Note that the movable body 39 is engaged with each tie rod 37 via a linear guide bearing (not shown) instead of or in addition to the linear guide bearing, so that the movable body 39 is movable in the Z-axis direction. It may be a configuration. A mold holder 41 is provided under the movable body 39 with the load cell 23 therebetween.

  The upper surface of the molded product holder 3 is a flat surface developed in the X-axis direction and the Y-axis direction. The to-be-molded product W is formed in a flat plate shape having a predetermined shape such as a rectangle or a circle, and a fine transfer pattern formed on the mold M is transferred to one surface (upper surface) in the thickness direction. It is like that.

  The lower surface of the mold holding portion 41 is a flat surface developed in the X-axis direction and the Y-axis direction. The mold M is formed in a flat plate shape with a predetermined shape such as a rectangle or a circle, and a fine transfer pattern is formed on one surface (lower surface) in the thickness direction.

  The molded product holder 3 is brought into contact with the other surface in the thickness direction of the molded product W (the lower surface; the surface opposite to the surface to which the fine pattern is transferred) on this upper surface, for example, a vacuum The molded product W is held by suction.

  The mold holding portion 41 is brought into contact with the other surface in the thickness direction of the mold M (upper surface; the surface opposite to the side where the fine pattern is formed) with the lower surface, and a holding member (not shown) is used. The mold M is held.

  The position of the mold holder 5 (mold holder 41) relative to the molded article holder 3 (distance between the molded article holder 3 and the mold holder 5) is the planar upper surface of the molded article holder 3 And the distance between the flat bottom surface of the mold holding portion 41.

  The distance between the molded product W held by the molded product holding body 3 and the mold M held by the mold holding body 5 is the molded product W held by the molded product holding body 3. Is the distance between the upper surface (the surface on which the fine pattern is transferred) and the lower surface (the surface on which the fine transfer pattern is formed) of the mold M held by the mold holder 5.

  The distance between the molded product holder 3 and the mold holder 5 is “h1”, and the molded product W held by the molded product holder 3 and the mold holder 5 hold the molded product holder 3. When the distance from the mold M is “h2”, the thickness of the molded product W is “hw”, and the thickness of the mold M is “hm”, the relationship “h1 = h2 + hw + hm” is established. It is supposed to be established.

  Here, the “when the molded product W held by the molded product holding body 3 and the mold M held by the mold holding body 5“ contact ”will be described in detail.

  The above-mentioned “when in contact” means that the tip of the fine unevenness formed on the mold M (the lowermost surface MA of the mold M shown in FIG. 8A) is the product W (FIG. 8A). ) When touching the upper surface WA) of the molded product W shown in FIG.

  When the mold M and the molded product W are separated from each other, the distance between the mold M and the molded product W is a “plus” value. At the time of “contacting”, the distance between the mold M and the workpiece W is “0”. That is, the distance in FIG. 4A described later in detail is “ZO”.

  When the mold M approaches the molding target W (when pressed and the mold M bites into the molding target W slightly) rather than the “contact”, the mold M and the molding target. The distance to the product W is the value of “Mymouth”.

  The value stored in the memory 27 presses the molded product W held by the molded product holding body 3 with the mold M held by the mold holding body 5 as compared with the above-mentioned “when touching”. Therefore, the distance between the mold M and the workpiece W is a value of “my mass” (a negative value having a very small absolute value).

  By the way, an XY stage (not shown) and a θ-axis stage (not shown) are provided on the molded product holder 3, and the mold (the mold holder 5 is installed) around the X-axis direction, the Y-axis direction, and the θ-axis. The molded product (molded product) (molded product installed on the molded product holder 3) W may be positioned relative to the mold M). The positioning around the θ axis is the rotation positioning of the product W with the Z axis as the rotation center.

  In addition, a planar lower surface of the mold (a mold installed on the mold holder 5) and a planar upper surface of a product to be molded (molded product installed on the molded product holder 3) W In order to ensure surface contact with each other, a gimbal mechanism may be provided on the mold holder 5 or the molded article holder 3. By this gimbal mechanism, the mold M installed on the mold holding body 5 rotates very slightly with the X axis and the Y axis as rotation centers.

  Next, the operation of the transfer device 1 will be described.

  FIG. 4 shows the movement of the mold holder 5 and the pressing to the molded article (molded article held by the molded article holder 3) W by the mold (the mold held by the mold holder 5) M. It is a figure which shows a pressure. 5 and 6 are flowcharts showing the operation of the transfer apparatus 1.

  The horizontal axis of FIG. 4 shows the passage of time t, and the vertical axis of FIG. 4A is held by the mold M held by the mold holder 5 and the molded article holder 3. The distance between the workpiece W and the vertical axis of FIG. 4B indicates the pressing force F detected by the load cell 23. Further, Steps S1 to S19 in FIG. 5 show operations using the trial molded product W, and Steps S21 to S39 in FIG. 6 show operations using the mass-produced molded product W.

  First, in step S1, in a state where the mold holder 5 is located at the rising end (a state where the mold holder 5 is separated from the molded article holder 3 by the first predetermined distance), the operator The mold M is installed on the mold holder 5 and the trial molded product W is installed on the molded product holder 3. Further, on the screen shown in FIG. 3 (screen with a touch panel including the input unit 29 and the output unit 30), a first descending speed (first speed; fast running speed) is set (SC5), A predetermined distance of 2 is set (SC8), a second descending speed (second speed; pressing speed) is set (SC6), and it is determined that the mold M has contacted the trial product W. When setting the pressing force for the contact determination (SC1) and setting the pressing force for the contact determination (SC1), the upper limit value and the lower limit value of the pressing force for the contact determination are set (SC2, SC3). . Further, the press limit force is set (SC4), and the press force holding time is set (SC7).

  In FIG. 3, the pressing force is set at 1.00 t (1000 kgf; 9800 N) at the display location SC1, the upper limit value is set at 0.20 t at the display location SC2, and the lower limit value is set at 0.20 t at the display location SC3. Is set. As a result, when the value of the pressing force is within the range of 0.80t to 1.20t, the transfer device 1 (control unit 25) determines that the mold M has contacted the trial product W. It is supposed to be.

  Subsequently, in step S3, the control unit 25 determines whether or not the start button SC10 of FIG. 3 has been pressed by the operator. If the start button SC10 is pressed, the mold holder 5 is moved at the first lowering speed. Then, it is lowered until the distance between the mold M and the workpiece W becomes a second predetermined distance (S5, S7). That is, in FIG. 4A, the mold holder 5 moves from time t1 to time t2 until the distance Zu reaches the distance Z1, thereby moving as indicated by the line G12 in the graph G1. Note that the distance Z0 shown in FIG. 4A is the distance between the mold M and the molded product W when the mold M and the molded product W “contact” (the distance is “0”) as described above. The distances Zu, Z1, Z2, Z3, and Z4 shown on the vertical axis in FIG. 4A are distances based on the distance Z0. The distance Z1 is, for example, about 1.0 mm.

  Subsequently, the mold holder 5 is lowered at the second lowering speed until the pressing force becomes the pressing force for determination (S9, S11, FIG. 2). That is, in FIG. 4A, the mold holder 5 moves from time t2 to time t4 until the distance Z1 becomes the distance Z3, thereby moving as indicated by the line G13 in the graph G1. The distance Z3 is a slight negative value. Further, in FIG. 4B showing the relationship between the time t and the pressing force F, the pressing force F gradually increases from “0” from the time t3 when the mold M contacts the workpiece W, and the time t4 Thus, the pressing force F becomes the pressing force F2 for determination.

  Subsequently, in step S11, the position of the mold holder 5 when the pressing force F becomes the determination pressing force is stored in the storage unit 27 (S13). That is, the value of the distance Z3 (may be the position of the mold holder 5) at time t4 in FIG.

  Subsequently, the mold holder 5 is further slightly lowered at the second lowering speed until the pressing force F becomes the press limit force F1 (S15). That is, in FIG. 4A, the mold holder 5 moves from time t4 to time t5 until the distance Z3 becomes the distance Z4, thereby moving as indicated by the line G14 in the graph G1.

  Subsequently, after pressing for a predetermined time (time between time t5 and time t6) with the press limit force F1 (S17), the die holder 5 is raised at a predetermined speed (S19). That is, in FIG. 4A, the mold holding body 5 stops between the time t5 and the time t6 and moves up between the time t6 and the time t7, whereby the movement indicated by the line segments G15 and G16 in the graph G1. do. In addition, although the site | part G31 of the graph G3 shown in FIG.4 (b) has negative pressure, this is pressing by predetermined time (time set by display location SC7) with the press limit force F1. This is because the mold M and the product W to be bonded are peeled off.

  Subsequently, in the state where the mold holder 5 is positioned at the rising end in step S21, the first lowering speed (SC5) and the second lowering speed are set on the screen shown in FIG. 3 (SC6), The press limit force is set (SC4), and the press force holding time is set (SC7). Further, an offset value is set (SC9). When the first descending speed set in step S21 is the same as the first descending speed set in step S1, the setting of the first descending speed can be omitted. The second descending speed, the press limit force, and the press force holding time can be similarly omitted. The offset value is a value added to the distance Z3 stored in step S13, and the distance (the mold M and the molding target) indicated by the value obtained by adding the offset value to the distance Z3 (the distance Z2 shown in FIG. 4A). The distance between the product W and the lowering speed of the mold holder 5 is switched from the first speed to the second speed.

  Subsequently, in step S <b> 23, the operator installs the mass-produced molded product W.

  Subsequently, in step S25, the control unit 25 determines whether or not the start button SC11 of FIG. 3 has been pressed by the operator. If the start button SC11 has been pressed, the first descending speed is determined in step S27. Thus, the mold holder 5 is lowered until the distance between the mold M and the product W is a third predetermined distance (S27). That is, in FIG. 4A, the mold holder 5 moves from time t1 to time t21 until the distance Zu becomes the distance Z2, thereby moving as indicated by the line G22 in the graph G2. Note that the distance Z2 shown in FIG. 4A is, for example, about 0.1 mm.

  Subsequently, the die holder 5 is lowered at the second lowering speed until the pressing force becomes the press limit force F1 (S31, S33, FIG. 2). That is, in FIG. 4A, the mold holder 5 moves from time t21 to time t22 until the distance Z2 reaches the distance Z4, thereby moving as indicated by a line segment G23 in the graph G2.

  Subsequently, after pressing for a predetermined time with the press limit force F1 (S35), the die holder 5 is raised at a predetermined speed (S37). That is, in FIG. 4A, the mold holding body 5 stops between time t22 and time t51 and rises between time t51 and time t61, whereby movement indicated by line segments G25 and G26 in the graph G2. do. In FIG. 4B, a graph corresponding to the graph G1 in FIG.

  Subsequently, it is determined whether or not there is a transfer to the next mass-produced product W (S39). If transfer to the next mass-produced product W is necessary, the process proceeds to step S23, and the next mass production is performed. If there is no transfer to the molding target product W, the operation is terminated.

  According to the transfer device 1, when the value of the pressing force detected by the load cell 23 becomes a predetermined value (within the pressing force F2 or the pressing force F2 ± ΔF2 shown in FIG. 4B), the mold holder 5 is stored in the storage unit 27, so that it is not necessary to detect the position of the mold holder 5 by a manual operation by an operator as in the prior art, and the mold holder relative to the molded article holder 3 (molded article W). The position 5 (type M) (the position corresponding to the distance Z3 shown in FIG. 4A) can be accurately obtained in a short time. In addition, since the moving speed of the mold holder 5 during transfer can be accurately controlled based on the position corresponding to the distance Z3, the molded product W for mass production can be used without wasting time. Transfer can be performed, and the transfer efficiency can be increased.

  Explaining in detail using FIG. 4, in the trial molded product W, the moving speed of the mold holding body 5 is slowed at the distance Z1 (time t2), and the mold holding is performed with the pressing force F2 smaller than the pressing force F1 of the limit. The distance Z3 of the body 5 is obtained. On the other hand, in the molded product W for mass production, a distance Z2 (a distance smaller than the distance Z1) obtained by adding an offset value to the distance Z3 is obtained, and the mold holder 5 is moved at a position corresponding to the distance Z2. Transfer is performed at a low speed. Therefore, the line segment G23 in the graph G2 in FIG. 4A can be made shorter than the sum of the line segment G13 and the line segment G14 in the graph G1 in FIG. Time can be shortened.

  Furthermore, since the determination of the pressing force F2 for determination is unnecessary in the transfer of the molded product W for mass production, time for calculation in the control unit 25 is unnecessary, and the time required for the transfer is actually shown in FIG. The time TS shown in (a) can be further shortened.

  By the way, the transfer may be performed a plurality of times with one mold (a mold smaller than the molding product) for one large molding product.

  FIG. 7 is a diagram showing a schematic configuration of a transfer device 1a for performing transfer a plurality of times with one mold on one large workpiece.

  The transfer device 1a differs from the transfer device 1 (transfer device shown in FIG. 1 and the like) 1 described above in the configuration of the molded article holder 3a, and is configured in substantially the same manner as the transfer device 1 in other respects.

  That is, the molded product holder 3a of the transfer apparatus 1a shown in FIG. 7 can hold a molded product W sufficiently larger than the mold M. That is, the molded product holder 3a can move and position the held flat molded product W in at least one of the X axis direction, the Y axis direction, and the θ axis.

  Then, the first transfer is performed in the same manner as the trial molded product W described above. After the first transfer, the molded product W is transferred to at least one of the X axis direction, the Y axis direction, and the θ axis. The position is moved and the second transfer is performed. That is, the transfer is performed by a step-and-repeat operation. Note that the second and subsequent transfers are performed in the same manner as the above-described molded product W for mass production.

DESCRIPTION OF SYMBOLS 1, 1a Transfer device 3, 3a Molding object holding body 5 Mold holding body 9 Driving means 11 Position detection means 13 Pressing force detection sensor 15 Control means 27 Storage part M type W Molding article

Claims (4)

In a transfer device for transferring a fine transfer pattern formed on a mold to a molded product,
A molded product holder for holding the molded product;
A mold holder that holds the mold and moves relatively in a direction approaching or moving away from the molded article holder;
Drive means for driving the mold holder so that the mold holder performs the relative movement;
Position detecting means for detecting a relative position of the mold holder relative to the molded article holder;
A pressing force detection sensor for detecting a pressing force when the molded product held by the molded product holding body is pressed by a mold held by the mold holding body;
The mold holding body is relatively moved by the driving means, and the pressing force detected by the pressing force detection sensor starts to increase, or the pressing force detected by the pressing force detection sensor becomes a predetermined value. Control means for performing control to store the relative position detected by the position detection means in the storage unit when reaching the position;
A transfer device comprising: The transfer apparatus according to claim 1,
The control means is configured such that the mold is held by the mold holding body, the first molded article is held by the molded article holding body, and the mold held by the mold holding body is the molded article. A second distance in which the distance between the mold and the first molding object is smaller than the first predetermined distance in a state where the molding object is held by the holding body at a first predetermined distance. Until the predetermined distance is reached, the mold holder is relatively brought closer to the molded article holder at a first speed, and then the mold is held at a second speed slower than the first speed. A transfer apparatus, characterized in that the drive means is controlled and the storage is performed so that a body is relatively close to the molded product holder. The transfer device according to claim 2,
The control means stores the mold, the mold is held by the mold holding body, the second molded product is held by the molded product holding body, and the mold is held by the mold holding body. However, the distance between the mold and the second molded product is a third distance in a state where the mold is separated from the second molded product held by the molded product holder by a first predetermined distance. Until the predetermined distance is reached, the mold holder is moved closer to the second article holder at the first speed, and then the mold holder is moved at the second speed. A means for controlling the driving means so as to be relatively close to the second molded article holder;
The transfer device according to claim 3, wherein the third predetermined distance is smaller than the second predetermined distance.   4. A transfer method, wherein transfer onto the product is performed using the transfer device according to claim 1.

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