JP5184800B2 - Method for producing anisotropic conductive sheet - Google Patents

Description

  The present invention relates to a method for producing an anisotropic conductive sheet. Specifically, the present invention relates to a method for producing an anisotropic conductive sheet that can be produced at low cost and can be used repeatedly.

  For example, an anisotropic conductive sheet is used when determining whether or not an electronic component such as a semiconductor wafer is manufactured according to specifications. The anisotropic conductive sheet has a large number of conductive portions that are conductive only in the thickness direction. The anisotropic conductive sheet is inserted between an electrode of an electronic component to be inspected and an electrode of an inspection device and is elastically deformed, and the electrodes are made conductive without causing damage due to a load. Inspection can be performed.

JP 2004-247216 A JP-A-7-312116

  The anisotropic conductive sheet described in Patent Document 1 includes a step of laminating a mask material made of a fluororesin on both surfaces of an electrically insulating polymer film, and through-holes in the laminated film obtained by lamination. It is manufactured by providing a step of forming, a step of attaching or filling a conductive substance into the through hole, and a step of removing the mask material from the laminated film.

  The anisotropic conductive sheet described in Patent Document 2 is formed using an electrostatic flocking method, and is configured by orienting and arranging conductive fibers and insulating fibers in an insulating film. .

  In the manufacturing process described in Patent Document 1, an ablation method using synchrotron radiation or laser light is employed for the step of forming the through hole. However, it is difficult to form a large number of through holes at the same time in the above-mentioned emitted light generator. For this reason, it is necessary to sequentially perform the drilling operation while accurately controlling the position of the radiated light generator or the sheet-like base material. Therefore, not only an expensive apparatus needs to be used, but also a great amount of work time is required.

  Moreover, since the amount that can be manufactured at one time is limited, productivity is low. For this reason, it has been difficult to reduce manufacturing costs.

  On the other hand, in the manufacturing method described in Patent Document 2, a conductive portion can be formed in a lump without using an expensive apparatus, and therefore, an anisotropic conductive sheet can be mass-produced at low cost. However, since the conductive fibers are linear, a sufficient amount of elastic deformation cannot be ensured when sandwiched between test electrodes. For this reason, there exists a problem that a test | inspection electrode and a conduction | electrical_connection part edge part are easy to be damaged, and cannot be used repeatedly.

  The present invention has been devised in order to solve the above problems, and it is an object of the present invention to provide a method for manufacturing an anisotropic conductive sheet that can be manufactured at low cost by reducing the manufacturing process and can be used repeatedly. To do.

  The present invention is a method for producing an anisotropic conductive sheet comprising an electrically insulating sheet-like base material and a linear conductor that is oriented and held in the thickness direction on the sheet-like base material. The linear conductor has a bent portion and relates to a method for producing an anisotropic conductive sheet held at both ends protruding from the sheet-like base material.

  In the anisotropic conductive sheet manufactured by the manufacturing method according to the present invention, the linear conductor is oriented and held in the thickness direction of the electrically insulating sheet-like substrate. Electrical conduction in the thickness direction of the material can be ensured. Moreover, since the both ends of the said linear conductor protrude from the sheet-like base material, the connection with the electrode etc. which are made to contact can be performed reliably.

  Furthermore, the said linear conductor manufactured by the manufacturing method which concerns on this invention is provided with the bending part. The linear conductor preferably has a form along a straight line in the thickness direction of the sheet-like base material as a whole, and adopts a form having a curved part or a bent part. By providing the bent portion, when a compressive force acts in the thickness direction of the sheet-like substrate, the portion can be easily elastically deformed. For this reason, it is possible to absorb the height variation in the inspection electrode or the like. Further, an excessive force does not act between the tip of the linear conductor and the electrodes to be in contact with each other, and these portions are not damaged. Therefore, these can be used repeatedly. The amount of protrusion of the linear conductor can be set according to the form of the electrode and the like to be brought into contact with each other and the form of the bent portion. In order to ensure the amount of elastic deformation, it is preferable to ensure an amount of protrusion of 5 μm to 20 μm.

  The bent portion can be provided, for example, by forming it in a wave shape or a spiral shape.

  The position at which the bent portion is provided is not particularly limited, but it is preferably provided at a portion protruding from the sheet-like base material. Thereby, it is possible to further increase the amount of elastic deformation in the thickness direction, and it is possible to perform inspection with high accuracy by absorbing height differences of inspection electrodes and the like. It is also possible to absorb variations in inspection electrodes and the like without deforming the sheet-like substrate.

  The linear conductor can be formed from various conductive materials as long as it can be elastically deformed. For example, metal materials such as copper, nickel, cobalt, iron, gold, silver, platinum, alloys thereof, and conductive materials such as carbon can be employed.

  Moreover, it is not necessary for the whole to be formed from a single conductive material, as long as at least conductivity in the thickness direction of the sheet-like substrate is provided. For example, the linear conductor is formed by coating a conductive material on a linear non-conductive material having a bent portion, or a material formed of a mixed material of a conductive material and a non-conductive material. be able to. For example, it is possible to use a glass or resin filament that has been subjected to metal coating or a linear body obtained by molding a resin material containing fine metal particles.

  The method for forming the linear conductor having the bent portion is not particularly limited. For example, when a linear conductor is formed of a metal material, a corrugated concave fine pattern is formed using a LIGA process, and a conductive metal is filled therein by a plating method or the like, whereby a wire having a bent portion is formed. Can be obtained.

  In addition, a linear conductor having a bent portion can be obtained by coating a conductive metal on a crimped resin filament. Furthermore, a conductive carbon filament formed by carbonizing a resin filament or the like can also be used.

  As the sheet-like base material, various materials can be adopted as long as they are electrically insulating materials. For example, a thermoplastic resin, a thermosetting resin, or a mixed resin thereof can be employed.

  As the resin material constituting the sheet-like substrate, the viscosity is low when molding or aligning the linear conductor, and on the other hand, the linear conductor can be held in the aligned state after curing or use. It is preferable to employ a resin having strength. For example, a thermosetting resin such as an epoxy resin is suitable. The epoxy resin is not particularly limited, but other than bisphenol type epoxy resins having skeletons of bisphenol A, F, S, AD, etc., naphthalene type epoxy resins, novolac type epoxy resins, biphenyl type epoxy resins, dicyclopentadiene type Epoxy resin can be used. Also, a phenoxy resin that is a high molecular weight epoxy resin can be employed. When aligning the linear conductor using a magnetic field, it is preferable to employ a non-magnetic resin material.

In the present invention, it is set only the electrical insulating property of the insulating coating layer on the linear conductor.

In the anisotropic conductive sheet, the linear conductor needs to be electrically insulated from adjacent linear bodies. When a linear linear body is employed, it is possible to ensure the insulation from the adjacent conductors by using magnetic force or static electricity so as to be oriented and arranged at predetermined intervals. On the other hand, in this invention, since each linear conductor has a bending part, even when it can arrange with a predetermined space | interval, it may consider that an adjacent linear conductor contacts. Moreover, if the amount of the linear conductor contained in the sheet-like base material is set to be small and the arrangement interval is set to be large, the conductive performance in the thickness direction of the sheet-like base material may be lowered. Furthermore, since it has a bending part, it may be considered that the linear conductors are entangled with each other when being oriented. In order to eliminate these disadvantages, the insulating coating layer can be provided.

By applying an electrically insulating coating to each linear conductor, it is possible to prevent the contact between the linear conductors that are aligned and arranged adjacent to each other to ensure insulation. The said insulating coating layer can also be provided in the whole linear conductor, and can also be provided in a part.

  For example, by providing a coating layer that completely covers the linear conductor and has a rod-like shape as a whole, not only can the contact between adjacent linear conductors be prevented, but also the linear conductivity during molding and orientation. It is also possible to prevent entanglement of the body. Furthermore, it is possible to provide an insulating coating on a bent portion that is easy to contact and to provide a kind of spacer function to align the linear conductors.

The electrically insulating coating layer can be formed using various resin materials. For example, it can be formed of the same resin as that constituting the sheet-like substrate. Note that, as will be described later, the coating layer is simultaneously removed in the process of projecting both end portions of the linear conductor from the sheet-like resin material .

  The linear conductor can be formed of a ferromagnetic material or a non-magnetic material having a ferromagnetic coating layer.

  A magnetic field can be used as a technique for aligning and arranging linear conductors in the thickness direction of the sheet-like substrate. By imparting ferromagnetism to the linear conductor, an external magnetic field can be applied and oriented in the direction along the magnetic field lines. Note that the entire linear conductor does not need to be a magnetic body, and when a linear body is formed from a non-magnetic material, it can be oriented in the same manner as described above by providing a ferromagnetic coating layer. it can.

  The linear conductor may be formed of a ferromagnetic material selected from copper, nickel, cobalt, gold, silver, or the like, or a nonmagnetic material having a ferromagnetic coating layer. When the sheet-like resin is cured, the linear conductor can be held in a state of being oriented in the thickness direction of the sheet-like substrate by applying the magnetic field.

  The said anisotropic conductive sheet can be manufactured with the manufacturing method which concerns on the invention described in Claims 1-4.

The invention described in claim 1 is a method for producing an anisotropic conductive sheet, comprising: a linear conductor having a bent portion and having ferromagnetism at least in part; and an electrically insulating resin material having fluidity. A sheet forming step of forming a composite material containing the sheet into a sheet shape, and applying a magnetic field in a direction orthogonal to the sheet surface to orient the linear conductor in the composite material in a thickness direction along the direction of the magnetic field. A linear conductor aligning step, a resin material curing step of curing the resin material to fix the alignment direction of the linear conductor, and removing the surface layer portion of the cured resin material to a predetermined thickness, the ends of the linear conductors seen including a surface layer portion removing step to protrude from the resin material, each line-shaped conductor is provided with a electrically insulating property of the insulating coating layer, an insulating portion which is protruded from the resin material coating There are those removed in the surface layer portion removal step.

  The sheet forming step can be performed using various methods. For example, a method of applying the composite material to a template having a flat plate surface can be employed. An injection molding method, an extrusion molding method, or the like can also be used.

  The linear conductor alignment step is a step in which a magnetic field is applied from both sides of the resin material formed into a sheet shape before the resin material is cured, and the linear conductor is aligned along the lines of magnetic force. By applying a magnetic field from both sides of the template with a magnet or the like, the linear conductor can be oriented along the direction of the lines of magnetic force.

  Various methods can also be employed for the resin material curing step depending on the resin employed. For example, if the resin is dissolved in a solvent and given fluidity, the solvent may be volatilized. Moreover, what is necessary is just to carry out cooling hardening, when a thermoplastic resin etc. are fuse | melted and shape | molded. Moreover, what is necessary is just to irradiate an ultraviolet-ray when employ | adopting an ultraviolet curable resin. By curing the resin material, the linear conductor can be fixed in a state of being oriented in the thickness direction of the sheet-like substrate.

  The said surface layer part removal process can be performed using the solvent etc. which melt | dissolve the employ | adopted said resin material. The surface layer portion removing step is performed until the linear conductor protrudes from the surface of the sheet-like base material to a required length.

After finishing the surface layer removal step, the sheet is subjected to washing and the like, and is provided with an electrically insulating sheet-like base material and a linear conductor that is oriented and held in the thickness direction on the sheet-like base material. It is an electroconductive sheet, Comprising: While the said linear conductor has a bending part, both ends can be protruded from the said sheet-like base material, and the anisotropic conductive sheet currently hold | maintained can be obtained. In the present invention, each linear conductor includes an electrically insulating insulating coating layer, and a portion of the insulating coating layer protruding from the resin material is removed in the surface layer portion removing step.

By providing the edge coating layer, adjacent linear conductors in the sheet-like base material are not brought into contact with each other, and the arrangement density of the linear conductors is set high, and anisotropy corresponding to a narrow pitch is set. A conductive sheet can be obtained. Also, in the linear conductor alignment step, the insulating coating layer can function as a kind of spacer, and the linear conductors can be regularly aligned at equal intervals. Further, in these steps, there is no possibility that the linear conductors are entangled with each other.

By adopting a resin material constituting the insulating coating layer that can be dissolved using a solvent similar to the solvent used for the sheet-like substrate, the surface layer part removing step is performed at the same time. The insulating coating layer in the protruding portion can be removed.

The invention described in claim 2 is a method of manufacturing an anisotropic conductive sheet, wherein a linear conductor having a bent portion and having at least a portion of ferromagnetism is applied with a magnetic field in a direction perpendicular to the flat plate surface. A linear conductor aligning step that is arranged on an applied template and is erected and oriented in the direction of the magnetic field, and an electrically insulating resin material having fluidity on the template on which the linear conductor is aligned and arranged A resin material coating process for coating the resin material, a resin material curing process for curing the resin material to fix the orientation direction of the linear conductor, and removing a predetermined thickness of the surface layer portion of the cured resin material. A step of removing the end portion of the linear conductor from the resin material , and each linear conductor includes an electrically insulating insulating coating layer, and a portion of the linear conductor that protrudes from the resin material. Insulating coating layer is the above surface layer And it is removed in the removal process.

In the invention described in claim 2, the linear conductor alignment step is not performed in the resin material as described in claim 1, but after aligning the linear conductor on the template, A resin material application process for applying the resin material is performed. The resin material curing step and the surface layer removing step can be performed using the same technique as that of the first aspect of the invention. Similarly to the first aspect of the invention, each linear conductor includes an electrically insulating insulating coating layer, and a portion of the insulating coating layer protruding from the resin material is removed in the surface layer portion removing step. Is done. Thereby, the same effect as that of the first aspect can be exhibited.

In the invention described in claim 3, the linear conductor having a bent portion is forcibly charged and cast on the adhesive layer provided on the template, thereby allowing the linear conductor to stand on the adhesive layer. Linear conductor orientation step for orientation, resin material lamination step for laminating and curing a resin material on the adhesive layer on which the linear conductor is cast, and a laminate comprising the resin material and the adhesive layer The surface layer portion is removed by a predetermined thickness, and the manufacturing process is performed including a surface layer portion removing step of projecting both end portions of the linear conductor from the laminate .

The invention described in claim 3 orients the linear conductor using an electrostatic flocking method. The electrostatic flocking method uses a Coulomb force in a high-voltage high electric field region to forcibly accelerate and align the fiber material into the adhesive layer . When the electrostatic flocking method is used, the linear conductors being scattered are forcibly charged, so that the linear conductors repel each other and are aligned at equal intervals. For this reason, it becomes possible to throw a linear conductor in the said adhesive bond layer without density unevenness. It is desirable to adjust the adhesive layer to have a viscosity that allows the linear conductor to stand upright and hold in the throwing step.

After the throwing step, a resin material laminating step is performed in which the resin material constituting the sheet-like base material is laminated and cured on the adhesive layer in which the linear conductors are thrown and arranged. In this resin material laminating step, the linear conductor can be oriented and held in the thickness direction of the sheet-like substrate. In addition, the same resin material can also be employ | adopted for the said adhesive bond layer and the said resin material.

After the resin material is cured, a surface layer removing step similar to that of the invention described in claims 1 and 2 is performed, and both end portions of the linear conductor are protruded from the laminate. Incidentally, the surface layer portion removal step, it is sufficient to protrude both ends of the linear conductor required length, leaving part of the adhesive layer, sheet-like base by the above adhesive layer and the resin material You may comprise material.

Furthermore, as in the invention described in claim 4, each linear conductor includes an electrically insulating insulating coating layer, and the insulating coating layer protruding from the laminate is removed in the surface layer portion removing step. be able to. As a result, like the first and second aspects, the adjacent linear conductors in the sheet-like base material do not come into contact with each other, and the arrangement density of the linear conductors is set high to cope with a narrow pitch. An anisotropic conductive sheet can be obtained. In the throwing step, the insulating coating layer can function as a kind of spacer, and the linear conductors can be regularly arranged and oriented at equal intervals. Furthermore, there is no risk of tangling the linear conductors.

  By this invention, the anisotropic conductive sheet which can be used repeatedly can be mass-produced at low cost.

  Embodiments of the present invention will be specifically described below with reference to the drawings.

  In FIG. 1, sectional drawing of 1st Embodiment of the anisotropic conductive sheet manufactured by the manufacturing method which concerns on this invention is shown.

  The anisotropic conductive sheet 1 includes an electrically insulating sheet-like substrate 2 and a linear conductor 3 that is oriented and held in the thickness direction on the sheet-like substrate 2. The linear conductor 3 is formed in a wave shape in which bent portions are provided at regular intervals. Moreover, the said linear conductor 3 is hold | maintained in the state which both ends protruded from the surface of the said sheet-like base material 1. FIG.

  In the present embodiment, a large number of the linear conductors 3 are oriented and held in the thickness direction of the sheet-like substrate 2, and the adjacent linear conductors are separated from each other in an electrically insulating state. Since the sheet-like base material 2 is arrayed and held, it is possible to conduct in the thickness direction while ensuring the insulation in the surface direction of the sheet-like base material 2.

  Moreover, in this embodiment, since the both ends of the said linear conductor 3 are made to protrude from the surface of the sheet-like base material 2, a connection with the electrode etc. of a connection object can be performed reliably.

Furthermore, the said linear conductor 3 is formed in the waveform provided with a bending part. The diameter of the linear conductor 3 itself is preferably set to 0.5 to 10 μm, and the maximum diameter including the bent portion is set to about 1 to 20 μm. Further, each linear conductor 3 according to the present embodiment is configured to include an electrically insulating insulating coating layer 28 as shown in FIG.

  By adopting the configuration including the bent portion, when the compressive force in the thickness direction of the sheet-like substrate 2 acts between the electrodes that are brought into contact with each other, the linear conductor 3 is easily elastically compressed and deformed. For this reason, an excessive force does not act between the front-end | tip part of the said linear conductor 3, or the electrode made to contact | abut, and there is also no possibility of damaging these parts. Moreover, since the said linear conductor 3 and the test | inspection electrode etc. which are made to contact are not damaged, it also becomes possible to use these repeatedly.

  The form of the bent portion is not particularly limited, but can be formed in a wave shape or a spiral shape. Further, the position where the bent portion is provided is not particularly limited. In the embodiment shown in FIG. 1, the bent portions are provided over the entire length of the linear conductor at regular intervals, but may be provided only in the portion protruding from the sheet-like substrate 2. Thereby, it is possible to further increase the amount of elastic deformation in the thickness direction, and it is possible to perform inspection with high accuracy by absorbing height differences of inspection electrodes and the like. In addition, it is possible to absorb variations in inspection electrodes and the like without deforming the sheet-like substrate 2, and it is also possible to employ a hard resin or the like for the sheet-like substrate.

  If the said linear conductor 3 can be elastically deformed, it can be formed from various electrically-conductive materials. For example, metal materials such as copper, nickel, cobalt, gold, silver, platinum, alloys thereof, and conductive materials such as carbon can be employed.

  Moreover, the whole does not need to be formed from a conductive material, and it is sufficient that at least conductivity in the thickness direction of the sheet-like substrate 2 is provided. For example, a linear non-conductive material having a bent portion formed by coating a conductive material, or a material formed by molding a mixed material of a conductive material and a non-conductive material can be employed. For example, it is possible to use a glass or resin filament that has been subjected to metal coating or a linear body obtained by molding a resin material containing fine metal particles.

  The method of forming the linear conductor 3 having a bent portion is not particularly limited. When a metal material is employed, a LIGA process is used to form a corrugated concave fine pattern, and this is filled with a conductive metal by plating or the like to obtain a linear conductor having a desired shape having a bent portion. be able to.

  In addition, a linear conductor having a bent portion can be obtained by coating a conductive metal on a crimped resin filament. Furthermore, a carbon filament formed by carbonizing a resin filament or the like can also be used.

  The sheet-like substrate 2 can employ various materials as long as they are electrically insulating materials. For example, a thermoplastic tree, a thermosetting resin, or a mixed resin thereof can be employed.

  As the resin material constituting the sheet-like substrate, the viscosity is low when molding or aligning the linear conductor, and on the other hand, the linear conductor can be held in the aligned state after curing or use. It is preferable to employ a resin having strength. For example, a thermosetting resin such as an epoxy resin is suitable. The epoxy resin is not particularly limited, but other than bisphenol type epoxy resins having skeletons of bisphenol A, F, S, AD, etc., naphthalene type epoxy resins, novolac type epoxy resins, biphenyl type epoxy resins, dicyclopentadiene type Epoxy resin can be used. Also, a phenoxy resin that is a high molecular weight epoxy resin can be employed. When aligning the linear conductor using a magnetic field, it is preferable to employ a non-magnetic resin material.

  Further, in order to ensure a certain degree of elastic deformability after molding, for example, a butadiene synthetic rubber such as nitrile rubber, an olefin synthetic rubber such as polyisoprene, or a thermoplastic elastomer such as polyurethane rubber may be employed.

  2 to 4 show a manufacturing method for orienting the linear conductor using a magnetic field.

  As shown in FIG. 2, a linear conductor 3 having a bent portion and having at least a portion of ferromagnetism on a mold plate 4 having a flat plate surface, and an electrically insulating resin material 5 having fluidity are provided. Apply composite material containing.

The composite material is configured by dispersing a predetermined amount of the linear conductor 3 in a thermosetting insulating resin mainly composed of an epoxy resin or the like, and has a constant thickness on the template 4. It is applied to become.

  In the present embodiment, the linear conductor is made of a ferromagnetic metal such as nickel, iron, or cobalt. As the linear conductor 3, a wave-like conductor shown in FIG. 1 is adopted. The thickness of the coating layer 8a is not particularly limited, but in order to orient the linear conductor 3 in the thickness direction, it is necessary to set the thickness to at least the length of the linear conductor 3 or more. There is.

  As shown in FIG. 3, before the resin material 5 is cured, a magnetic force is applied from above and below the template 4 using magnetic force application devices 6 and 7. As shown in FIG. 3, each linear conductor 3 is oriented in the direction along the lines of magnetic force, that is, in the thickness direction of the coating layer 8a. In this state, the resin material 5 is cured and peeled from the template 4 to obtain a resin sheet 8b in which the linear conductors 3 are oriented in the thickness direction.

Next, the front and back surfaces of the resin sheet 8b are immersed in a solution (etching solution). The solution to be employed is selected according to the resin material constituting the resin sheet 8b and the insulating coating layer 28 . For example, when an epoxy resin is employed, methyl ethyl ketone or acetone can be used.

In the solution, the surface layer portion of the resin sheet 8b and the insulating coating layer 28 are dissolved until both end portions of the linear conductor 3 protrude by a predetermined amount. Thereafter, the resin sheet 8b is taken out and washed, whereby the linear conductor 3 with the tip protruding from the sheet-like substrate 2 is oriented and held in the thickness direction as shown in FIG. A conductive sheet is formed.

  In the above-described embodiment, the composite material of the liquid resin material 5 and the linear conductor 3 is applied onto the mold plate 4 and then the magnetic conductor is applied to orient the linear conductor 3. The anisotropic conductive sheet can also be formed by applying a liquid resin material after the linear conductor 3 is held in an oriented state on the plate 4.

FIG. 5 to FIG. 7 show a manufacturing method for orienting the linear conductor using an electrostatic flocking method. Also in this embodiment, each linear conductor 3 includes an electrically insulating insulating coating layer 28 as shown in FIG.

In the manufacturing method according to the present embodiment, the high voltage power source 17 charges the high voltage electrode to 16 minus, while the flat template plate 14 on which the adhesive layer 15 is formed is grounded, and the template plate 14 and the high voltage are supplied. An electric field due to a voltage difference is generated between the electrode 16 and the electrode 16. Polarization occurs in each linear conductor 13 on the high voltage electrode. As a result, the negative charge of each linear conductor 3 is attracted to the template 14 and scattered and thrown in a state of standing on the adhesive layer 15 .

With the linear conductor 3 held in the adhesive layer 15 , as shown in FIG. 6, the adhesive layer 15 and the resin material are laminated by curing a resin material 19 on the adhesive layer 15. The resin sheet 18 in which the linear conductors 3 are oriented in the thickness direction 19 can be obtained.

After the resin sheet 18 is peeled from the template 14, as shown in FIG. 7, both the end portions of the linear conductor 3 are dissolved by dissolving the surface layer portion of the resin sheet 18 and the insulating coating layer 28. The anisotropic conductive sheet shown in FIG. 1 can be formed by protruding. In the present embodiment, all of the adhesive layer 15 can be removed, or a part of the adhesive layer 15 can be removed. Further, the same resin material can be employed for the resin material 19 and the adhesive layer 15 .

FIG. 8 shows an enlarged cross-sectional view of a linear conductor employed in the present invention.

As for the said linear conductor 23, the electrically insulating coating layer 28 is formed in the outer peripheral part.

The insulating coating layer 28 can be formed using various electrically insulating resins. Moreover, the same resin material as the resin material which comprises a sheet-like base material can also be employ | adopted. The said linear conductor 23 is equipped with the structure similar to embodiment mentioned above except having the insulating coating layer 28, and can be used for the manufacturing method which concerns on the Example mentioned above.

In FIG. 9, the expanded sectional view of the principal part of the anisotropic conductive sheet formed using the said linear conductor 23 is shown. The insulating coating layer 28 of the linear conductor 23 according to this embodiment is formed of a resin material that can be removed with the same solvent as the solvent that dissolves the sheet-like substrate 22 on which the linear conductor 23 is held.

In the manufacturing method shown in FIG. 2 to FIG. 4 or the manufacturing method shown in FIG. 5 to FIG. 7 , the linear conductor 23 is adopted, and the surface layer portion removing step is performed in the same manner, thereby the linear conductor. The portions of the insulating coating layer 28 protruding from the sheet-like base material 22 are simultaneously removed .

By employing a linear conductor having the insulating coating layer 28, it is possible to reliably align adjacent linear conductors in the sheet-like substrate 22. In addition, since the arrangement density of the linear conductors 23 can be increased, an anisotropic conductive sheet that can be used for narrow pitch inspection electrodes and the like can be manufactured at low cost.

  The present invention is not limited to the embodiment described above. It should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is defined not by the above-described meaning but by the scope of the claims, and is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

  According to the present invention, an anisotropic conductive sheet that can be used repeatedly at low cost can be provided.

It is sectional drawing of the anisotropic conductive sheet which concerns on this invention. It is sectional drawing explaining the method of manufacturing the anisotropic conductive sheet shown in FIG. 1 using a magnetic field. It is sectional drawing explaining the method to manufacture the anisotropic conductive sheet shown in FIG. 1 using a magnetic field. It is sectional drawing explaining the method to manufacture the anisotropic conductive sheet shown in FIG. 1 using a magnetic field. It is sectional drawing explaining the method to manufacture the anisotropic conductive sheet shown in FIG. 1 using an electrostatic flocking method. It is sectional drawing explaining the method to manufacture the anisotropic conductive sheet shown in FIG. 1 using an electrostatic flocking method. It is sectional drawing explaining the method to manufacture the anisotropic conductive sheet shown in FIG. 1 using an electrostatic flocking method. It is an expanded sectional view of a linear conductor. It is principal part sectional drawing of the anisotropic conductive sheet manufactured using the linear conductor shown in FIG.

3 anisotropic conductive sheet 2 sheet-like base material 3 linear conductor

Claims (5)

A sheet forming step of forming a composite material including a linear conductor having a bent portion and having at least a portion of ferromagnetism and an electrically insulating resin material having fluidity into a sheet;
Applying a magnetic field in a direction perpendicular to the sheet surface, and aligning the linear conductor in the composite material in a thickness direction along the direction of the magnetic field; and
A resin material curing step for curing the resin material to fix the orientation direction of the linear conductor, and removing a predetermined thickness of the surface layer portion of the cured resin material so that the end of the linear conductor is and a surface layer portion removing step to protrude from the resin material seen including,
Each linear conductor is provided with an electrically insulating insulating coating layer, and a portion of the insulating coating layer that protrudes from the resin material is removed in the surface layer portion removing step . A linear conductor having a bent portion and having at least a portion of ferromagnetism is disposed on a template plate to which a magnetic field is applied in a direction perpendicular to the plate mold surface, and is oriented upright in the direction of the magnetic field. Body orientation step;
A resin material coating step of coating an electrically insulating resin material having fluidity on the template on which the linear conductor is oriented;
A resin material curing step for curing the resin material to fix the orientation direction of the linear conductor, and removing a predetermined thickness of the surface layer portion of the cured resin material so that the end of the linear conductor is and a surface layer portion removing step to protrude from the resin material seen including,
Each linear conductor is provided with an electrically insulating insulating coating layer, and a portion of the insulating coating layer that protrudes from the resin material is removed in the surface layer portion removing step . A linear conductor alignment step in which the linear conductor is raised and aligned on the adhesive layer by forcibly charging the linear conductor having a bent portion and casting it on the adhesive layer provided on the template; and ,
A resin material laminating step of laminating and curing a resin material on the adhesive layer on which the linear conductor is cast;
A surface layer portion removing step of removing a predetermined thickness of a surface layer portion of the laminate composed of the resin material and the adhesive layer and projecting both end portions of the linear conductor from the laminate. For producing a conductive sheet. Each linear conductor includes an electrically insulating insulating coating layer,
The method for producing an anisotropic conductive sheet according to claim 3 , wherein a portion of the insulating coating layer protruding from the laminate is removed in the surface layer portion removing step.   The anisotropic conductive sheet manufactured by the manufacturing method of the anisotropic conductive sheet of any one of Claim 1 to 4.

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