JP4966995B2 - Exhaust gas treatment equipment - Google Patents

Description

  The present invention relates to an exhaust gas treatment apparatus, which, as an example, mainly treats exhaust gas containing a volatile organic compound (VOC), and treats the exhaust water treatment unit which is a water scrubber and the cleaning water used in the water scrubber. The present invention relates to an exhaust gas treatment apparatus including a cleaning water treatment unit for reuse.

  In general, exhaust gas containing a volatile organic compound (VOC) is treated by a method that consumes a large amount of energy such as a combustion method, and treatment at room temperature is rare.

  Conventionally, there is an exhaust gas treatment apparatus composed of a water scrubber for exhaust gas containing a volatile organic compound (VOC), but the cleaning water used in the water scrubber is returned to the water scrubber again. It was not reused.

  The reason for this is that when cleaning water is reused, the removal performance of volatile organic compounds (VOC) in the water scrubber is greatly reduced, and there is no processing facility capable of processing the cleaning water in a short time. It is.

  In addition, rapid filtration towers and activated carbon adsorption towers that are thought to be able to treat water scrubber wash water corresponding to volatile organic compounds (VOC) have existed in the past, but rapid filtration towers and activated carbon adsorption towers are In order to treat the entire amount of washing water, the facility becomes large-scale. Moreover, the rapid filtration tower and the activated carbon adsorption tower were clogged in a short time due to suspended substances such as suspended substance sludge and microbial sludge generated by dissolving volatile organic compounds (VOC) in water. And even if the rapid filtration tower and the activated carbon adsorption tower were backwashed with industrial water or the like, the performance could not be completely recovered. Moreover, since the backwash waste water generated at that time has a high degree of contamination, it has been drained to a wastewater treatment plant without being reused.

  Here, it is conceivable to recover the performance by efficiently back-washing the rapid filtration tower and the activated carbon adsorption tower with the water containing micro-nano bubbles, but the micro-nano bubble generator for producing micro-nano bubble water containing a relatively large amount of nano-bubbles The contents had a high initial cost. A micro-nano bubble generator for producing such micro-nano bubble water containing a relatively large amount of nano-bubbles was launched in 2006 from Kyowa Kikai Co., Ltd. (Patent Document 1 (Patent No. 4118939) (Refer to microbubble generator).

  Patent Document 2 (Japanese Patent Laid-Open No. 2004-121962) discloses a method and apparatus for using nanobubbles as a conventional technique. This technology utilizes the characteristics of nanobubbles such as reduction of buoyancy, increase of surface area, increase of surface activity, generation of local high-pressure field, and surface active action and bactericidal action by realizing electrostatic polarization. More specifically, by interlinking them, various objects can be washed with high functionality and low environmental load by the adsorption function of dirt components, the high-speed washing function of the object surface, and the sterilization function. It discloses that purification can be performed.

  Patent Document 3 (Japanese Patent Application Laid-Open No. 2003-334548) discloses a nanobubble generation method as a conventional technique. In this technique, in a liquid, (1) a step of cracking and gasifying a part of the liquid, (2) a step of applying ultrasonic waves in the liquid, or (3) a step of cracking and gasifying a part of the liquid and It discloses that it is composed of a step of applying ultrasonic waves.

  Patent Document 4 (Japanese Patent Application Laid-Open No. 2004-321959) discloses a waste liquid treatment apparatus using ozone microbubbles as a conventional technique. In this technique, ozone gas generated from the ozone generator and waste liquid extracted from the lower part of the treatment tank are supplied to the microbubble generator via a pressure pump. It also discloses that the generated ozone microbubbles are vented into the waste liquid in the treatment tank through the opening of the gas blowing pipe.

  By the way, since processing of a volatile organic compound (VOC) generally consumes a large amount of energy such as a combustion method, there is a problem that it is not energy saving and cannot be processed economically. To put it simply, there is a problem that exhaust gas containing volatile organic compounds (VOC) cannot be efficiently treated at room temperature without discharging wastewater with a closed system.

  A water scrubber for volatile organic compound (VOC) countermeasures is also conceivable, but there is a problem that the amount of cleaning water used is large and the cleaning water cannot be reused. That is, there is a problem that there is no exhaust gas treatment apparatus including water treatment equipment that can treat the cleaning water of the exhaust gas treatment apparatus constituted by a water scrubber to a water quality that can be reused with a compact treatment facility.

  Moreover, since the washing water used with the water scrubber contains floating substances and organic substances, it is conceivable to use a rapid filtration tower or an activated carbon adsorption tower as the washing water treatment section.

  However, there have been problems of blockage of the rapid filtration tower due to suspended solids in the water to be treated as washing water and breakthrough of the activated carbon adsorption tower in a short time due to organic substances in the water to be treated as washing water.

Japanese Patent No. 4118939 JP 2004-121962 A JP 2003-334548 A JP 2004-321959 A

  Therefore, the object of the present invention is to extend the life of a rapid filtration tower and an activated carbon adsorption tower for reusing washing water, and regenerate the washing water used in the water scrubber with the rapid filtration tower and the activated carbon adsorption tower to reduce the cost. The object is to provide an exhaust gas treatment device that can be reused in the field.

In order to solve the above problems, an exhaust gas treatment apparatus of the present invention includes a water scrubber having an upper watering part for sprinkling cleaning water into the introduced exhaust gas and a lower water tank for storing cleaning water falling from the upper watering part,
A rapid filtration tower into which wash water from the lower water tank is introduced;
The micro-nano bubble generating part for producing the wash water containing the micro-nano bubbles introduced by the wash water filtered by the rapid filtration tower,
Microbubbles containing the micronanobubbles are introduced from the micronanobubble generation part, and the microbubbles are contained in the washing water containing the micronanobubbles more than the washing water containing the micronanobubbles. A separation tank that separates the cleaning water into nanobubble-containing cleaning water that contains a larger proportion of nanobubbles than microbubbles than the cleaning water that contains the micronanobubbles;
An activated carbon adsorption tower into which the nanobubble-containing washing water from the separation tank is introduced;
A cleaning water supply unit that supplies the nanobubble-containing cleaning water from the activated carbon adsorption tower to the upper watering unit of the water scrubber.

  According to the exhaust gas treatment apparatus of the present invention, by introducing cleaning water containing many nanobubbles separated in the separation tank into the activated carbon adsorption tower, the oxidizing power by free radicals caused by microbubbles and relatively many nanobubbles can be obtained. Thus, the organic matter adhering to the activated carbon surface can be oxidatively decomposed. In addition, the microorganisms propagated on the activated carbon can be activated, and the organic matter can be decomposed with the microorganism activated on the organic matter adsorbed by the activated carbon. As a result, the life of the activated carbon can be extended, and the activated carbon can be regenerated. As in the conventional activated carbon regeneration method, the activated carbon is removed from the activated carbon adsorption tower and needs to be regenerated with steam at another location. The performance of the activated carbon adsorption tower can be recovered at low cost.

  Therefore, it is possible to increase the removal rate of the target component in the exhaust gas treatment by sprinkling the cleaning water having good water quality regenerated by the activated carbon adsorption tower from the upper watering portion of the water scrubber.

  Moreover, the exhaust gas treatment apparatus of one embodiment includes a first backwashing unit that backwashes the washing water containing the micronanobubbles from the micronanobubble generation unit by introducing the washing water into the activated carbon adsorption tower.

  According to the exhaust gas treatment apparatus of this embodiment, the activated carbon adsorption tower whose pressure loss has increased due to suspended substances in the washing water as the water to be treated is back-washed with the mixed water of microbubbles and nanobubbles, whereby the activated carbon adsorption tower Can be backwashed efficiently and easily. Since the bubble diameter of the microbubble is relatively large, the activated carbon can be washed with stirring. In addition, since the backwashing of the activated carbon adsorption tower is performed with the water containing microbubbles and the water containing nanobubbles, the surface of the activated carbon can be reliably washed with the oxidizing power of free radicals caused by the microbubbles and nanobubbles.

  Moreover, the exhaust gas treatment apparatus of one embodiment includes a second backwashing unit that backwashes the microbubble-containing washing water from the separation tank by introducing it into the rapid filtration tower.

  According to the exhaust gas treatment apparatus of this embodiment, the filter medium of the rapid filtration tower can be cleaned while being oxidized with the oxidizing power of free radicals by the microbubbles contained in the microbubble-containing cleaning water. Therefore, the filter medium can be more reliably washed, and the filtration performance of the filter medium can be recovered to exhibit the original filtration performance. In addition, since microbubbles have a larger bubble size than nanobubbles, when the filter medium is washed with water containing microbubbles, it can be backwashed while loosening the filter medium by stirring the microbubbles. Moreover, the organic substance adhering to the filter medium surface can be treated microbiologically due to the microbial activation action of the microbubbles.

  Moreover, the exhaust gas treatment apparatus of one embodiment includes a third backwashing unit that backwashes the washing water containing the micronanobubbles from the micronanobubble generation unit by introducing the washing water into the rapid filtration tower.

  According to the exhaust gas treatment apparatus of this embodiment, the rapid filtration tower is backwashed with a mixture of microbubble-containing water and nanobubble-containing water by the micro-nanobubble-containing washing water. Therefore, especially when the filter medium of the rapid filtration tower is contaminated with organic substances such as floating substances, the organic substances such as floating substances can be oxidatively decomposed by the oxidizing power caused by free radicals caused by nanobubbles. In addition, the filter medium can be loosened by microbubbles having a bubble size larger than that of the nanobubble, and the filter medium can be more reliably washed while loosening the filter medium.

In the exhaust gas treatment apparatus of one embodiment, the separation tank is
The introduced micro-nano bubble-containing cleaning water is separated into the micro-bubble-containing cleaning water and the nano-bubble-containing cleaning water by utilizing the specific gravity difference between the micro-bubble-containing cleaning water and the nano-bubble-containing cleaning water.

  According to the exhaust gas treatment apparatus of this embodiment, since there is a specific gravity difference between the water containing microbubbles and the water containing nanobubbles, the microbubbles and nanobubbles can be smoothly separated in the separation tank using the specific gravity difference. The separated microbubbles and nanobubbles can be used effectively.

In the exhaust gas treatment apparatus of one embodiment, the separation tank is
A partition plate for separating the microbubble-containing cleaning water and the nanobubble-containing cleaning water is provided.

  According to the exhaust gas treatment apparatus of this embodiment, there is a difference in specific gravity between the cleaning water containing microbubbles and the cleaning water containing nanobubbles, so that the microbubbles and nanobubbles are smoothed by the partition plate installed in the separation tank. Can be separated. That is, since the microbubble-containing water has a small specific gravity, it is easy to move above the partition plate, while the nanobubble-containing water has a specific gravity close to 1, and thus easily moves below the partition plate. Therefore, microbubbles and nanobubbles can be easily separated using this specific gravity difference, and each can be used effectively.

  Moreover, in the exhaust gas treatment apparatus of one embodiment, the shape of the partition plate is a Y-shape.

  According to the exhaust gas treatment apparatus of this embodiment, microbubbles and nanobubbles can be smoothly separated by the Y-shaped partition plate, and microbubbles and nanobubbles can be used effectively. That is, since the specific gravity of the microbubble-containing water is small, it moves above the Y-shaped partition plate, and since the specific gravity of the nanobubble-containing water is close to 1, it moves below the Y-shaped partition plate. Can be separated. In addition, since the partition plate is Y-shaped, it is possible to avoid the separated microbubbles and nanobubbles from being mixed and stirred by the stirring water flow of the washing water flowing into the separation tank. Therefore, the microbubbles can be reliably moved above the Y-shaped partition plate, and the nanobubbles can be reliably moved below the Y-shaped partition plate to reliably separate them.

  Moreover, in the exhaust gas treatment apparatus of one embodiment, the shape of the partition plate is T-shaped.

  According to the exhaust gas treatment apparatus of this embodiment, micro bubbles and nano bubbles can be smoothly separated by the T-shaped partition plate, and micro bubbles and nano bubbles can be used effectively. That is, since the microbubble-containing water has a small specific gravity, the water moves above the T-shaped partition plate, and the nanobubble-containing water moves below the T-shaped partition plate because the specific gravity is close to 1. Can be easily separated. In addition, since the partition plate is T-shaped, it is possible to prevent the separated microbubbles and nanobubbles from being mixed and stirred by the stirring water flow of the washing water that has flowed into the separation tank. Therefore, the microbubbles can be reliably moved above the T-shaped partition plate, and the nanobubbles can be reliably moved below the T-shaped partition plate to reliably separate them.

Moreover, in the exhaust gas treatment apparatus of one embodiment, the micro-nano bubble generating unit is
A gas-liquid mixing circulation pump into which wash water from the rapid filtration tower is introduced;
A first gas shearing part attached to the gas-liquid mixing circulation pump and generating microbubbles in the washing water;
A second gas shearing section that introduces washing water containing the microbubbles from the first gas shearing section and generates nanobubbles by shearing the microbubbles;
Washing water containing the microbubbles and nanobubbles is introduced from the second gas shearing part, and a third gas shearing part that shears the microbubbles to further generate nanobubbles.

  According to the exhaust gas treatment apparatus of this embodiment, the micro / nano bubble generation unit sequentially introduces wash water from the rapid filtration tower into the first, second, and third gas shearing units, thereby three-stage gas shearing. To produce a large amount of nanobubbles.

  Moreover, in the exhaust gas treatment apparatus of one embodiment, the micro / nano bubble generation unit further includes at least one stage of gas shearing unit connected so that the cleaning water containing micro / nano bubbles from the third gas shearing unit is introduced. .

  According to the exhaust gas treatment apparatus of this embodiment, since nanobubbles are generated by the gas shearing portions having more than three stages, nanobubbles having a smaller size can be generated. That is, a large amount of nanobubbles can be produced by shearing a mixture of gas and liquid many times in four or more stages.

Moreover, in the exhaust gas treatment apparatus of an embodiment, the washing water supply unit includes a treatment tank into which nanobubble-containing washing water from the activated carbon adsorption tower is introduced,
A TOC meter installed in the treatment tank and measuring the TOC of the cleaning water in the treatment tank;
Further, when a signal representing the TOC value measured by the TOC meter is input and the TOC value represented by the input signal is higher than a set value, at least one of the first to third backwash units. When the TOC value represented by the input signal is equal to or lower than the set value, the backwashing is performed by one of the first to third backwashing units so as not to perform the backwashing. The control part which controls at least 1 backwashing part was provided.

  According to the exhaust gas treatment apparatus of this embodiment, when the TOC concentration of the washing water in the treatment tank exceeds a set value, the first backwashing unit contains the micro / nano bubbles from the micro / nano bubble generation unit. The washed water can be introduced into the activated carbon adsorption tower and backwashed. Further, when the TOC concentration of the washing water in the treatment tank exceeds a set value, the second backwashing section introduces the microbubble-containing washing water from the separation tank into the rapid filtration tower and backwashes. it can. Further, when the TOC concentration of the washing water in the treatment tank exceeds a set value, the third back washing unit introduces the washing water containing the micro / nano bubbles from the micro / nano bubble generation unit into the rapid filtration tower. Can be backwashed. These backwashes can improve the performance of the rapid filtration tower and activated carbon adsorption tower by washing the filter medium and activated carbon reliably by backwashing the filter medium of the rapid filtration tower and backwashing the activated carbon of the activated carbon adsorption tower. . Therefore, the water quality related to the TOC concentration of the cleaning water in the processing tank can be improved, and the TOC concentration of the cleaning water in the processing tank can be set as the target concentration.

Moreover, in the exhaust gas treatment apparatus of an embodiment, the washing water supply unit includes a treatment tank into which nanobubble-containing washing water from the activated carbon adsorption tower is introduced,
A COD meter installed in the treatment tank to measure the COD of the cleaning water in the treatment tank;
Further, when a signal representing the COD value measured by the COD meter is input and the COD value represented by the input signal is higher than a set value, at least one of the first to third backwash units. When the COD value represented by the input signal is equal to or lower than the set value, the backwashing is performed by one of the first to third backwashing units so as not to perform the backwashing. The control part which controls at least 1 backwashing part was provided.

  According to the exhaust gas treatment apparatus of this embodiment, when the COD concentration of the washing water in the treatment tank exceeds a set value, the first backwashing unit contains the micro / nano bubbles from the micro / nano bubble generation unit. The washed water can be introduced into the activated carbon adsorption tower and backwashed. In addition, when the COD concentration of the washing water in the treatment tank exceeds a set value, the second backwashing section introduces the microbubble-containing washing water from the separation tank into the rapid filtration tower and performs backwashing. it can. In addition, when the COD concentration of the washing water in the treatment tank exceeds a set value, the third back washing unit introduces the washing water containing the micro / nano bubbles from the micro / nano bubble generation unit to the rapid filtration tower. Can be backwashed. These backwashes can improve the performance of the rapid filtration tower and activated carbon adsorption tower by washing the filter medium and activated carbon reliably by backwashing the filter medium of the rapid filtration tower and backwashing the activated carbon of the activated carbon adsorption tower. . Therefore, the water quality related to the COD concentration of the washing water in the treatment tank can be improved, and the COD concentration of the washing water in the treatment tank can be set as the target concentration.

  In the exhaust gas treatment apparatus of an embodiment, the first backwashing unit performs the backwashing while passing water in the forward direction to the activated carbon adsorption tower, and the second and third backwashing units. Performs the backwashing while passing water in the forward direction to the rapid filtration tower.

  According to the exhaust gas treatment apparatus of this embodiment, since the activated carbon adsorption tower and the rapid filtration tower are back-washed while passing water in the forward direction, the operation of the activated carbon adsorption tower and rapid filtration tower by the forward water flow is stopped. Therefore, the activated carbon adsorption tower and the rapid filtration tower can be backwashed. That is, continuous water passage through the activated carbon adsorption tower and the rapid filtration tower is possible for 24 hours, and the operation efficiency of the activated carbon adsorption tower and the rapid filtration tower can be increased. In addition, since backwashing is performed while passing water, microbubbles and nanobubbles during backwashing can activate microorganisms in the activated carbon adsorption tower and rapid filtration tower to increase the treatment efficiency and improve the quality of the treated water. Therefore, the quality of the washing water is improved and the performance as an exhaust gas treatment device is also improved.

  In the exhaust gas treatment apparatus of one embodiment, the activated carbon adsorption tower has a double net for preventing the activated carbon from flowing out.

  According to the exhaust gas treatment apparatus of this embodiment, when backwash water having a strong discharge pressure flows in from the lower part of the activated carbon adsorption tower, the discharge pressure of the backwash water is reduced by the double net, and the activated carbon passes through the pipe. It is possible to prevent leakage to the outside. In addition, when a net | network is single, a net | network may be damaged by the backwash water with a strong discharge pressure. On the other hand, if the net is double, a double net with different mesh sizes can be installed so that activated carbon enters between the two nets, and the discharge pressure can be reduced by the activated carbon layer between the nets. It becomes possible.

  Moreover, in the exhaust gas treatment apparatus of one embodiment, the rapid filtration tower has a double net for preventing the filter medium from flowing out.

  According to the exhaust gas treatment apparatus of this embodiment, when the backwash water having a strong discharge pressure flows into the rapid filtration tower, the discharge pressure of the backwash water is reduced by the double net, and the filter medium flows out to the outside. Can be prevented. That is, reverse cleaning can be performed by relieving the pressure of the reverse cleaning water having a discharge pressure with the filter medium layer between the nets.

  In the exhaust gas treatment apparatus of one embodiment, the double net of the activated carbon adsorption tower includes a net on the upstream side of the water flow by backwashing and a net on the downstream side of the waterflow by backwashing, and the upstream side The mesh of this net is coarser than the mesh of the downstream net.

  According to the exhaust gas treatment apparatus of this embodiment, an activated carbon layer is easily formed between the downstream net and the upstream net, and the activated carbon between the net and the pressure of backwash water with discharge pressure is reduced. The layer can be softened to prevent the activated carbon from flowing out.

  In the exhaust gas treatment apparatus of one embodiment, the double net included in the rapid filtration tower includes a net on the upstream side of the water flow by back washing and a net on the downstream side of the water flow by back washing, and the upstream The mesh of the net on the side is coarser than the mesh of the net on the downstream side.

  According to the exhaust gas treatment apparatus of this embodiment, a filter medium layer is easily formed between the downstream net and the upstream net, and the pressure of backwash water having discharge pressure is changed between the net and the net. It can be softened with a layer to prevent the filter medium from flowing out.

Moreover, in the exhaust gas treatment apparatus of one embodiment, the cleaning water from the rapid filtration tower is introduced and a pump pit to which a surfactant is added is provided.
The micro / nano bubble generating unit sucks the cleaning water from the pump pit and produces cleaning water containing micro / nano bubbles.

  According to the exhaust gas treatment apparatus of this embodiment, since a surfactant is added to the pump pit, a large amount of nanobubbles are generated by introducing cleaning water containing the surfactant from the pump pit into the micro-nano bubble generating unit. It becomes possible to make it. That is, the microbubble generating unit can generate a large amount of nanobubbles having a small size by using cleaning water containing a surfactant from the pump pit.

Moreover, in the exhaust gas treatment apparatus of one embodiment, the cleaning water from the rapid filtration tower is introduced and a pump pit to which inorganic salts are added is provided.
The micro / nano bubble generating unit sucks the cleaning water from the pump pit and produces cleaning water containing micro / nano bubbles.

  According to the exhaust gas treatment apparatus of this embodiment, since inorganic salts are added to the pump pit, cleaning water containing inorganic salts is introduced from the pump pit into the micro / nano bubble generating unit to generate a large amount of nano bubbles. Is possible. That is, the microbubble generating unit can generate a large amount of nanobubbles having a small size by using washing water containing inorganic salts from the pump pit.

  In the exhaust gas treatment apparatus of one embodiment, the control unit performs backwashing of the activated carbon adsorption tower by the first backwashing unit and the second backwashing unit or the third backwashing during the backwashing. The first to third backwashing units are controlled so that the rapid filtration tower is backwashed by the washing unit simultaneously.

  According to the exhaust gas treatment apparatus of this embodiment, the backwashing of the rapid filtration tower and the backwashing of the activated carbon adsorption tower are simultaneously performed at the time of backwashing. Can be recovered. That is, when the rapid filtration tower and activated carbon adsorption tower are contaminated with suspended solids in the washing water, the water quality of the treatment tank deteriorates, but when the functions of the rapid filtration tower and activated carbon adsorption tower return to normal by backwashing, the treatment tank The quality of the wash water is restored. Therefore, there is an advantage that the quality of the washing water in the treatment tank can be quickly recovered by simultaneously performing the backwashing of the rapid filtration tower and the activated carbon adsorption tower.

  According to the exhaust gas treatment apparatus of the present invention, by introducing cleaning water containing many nanobubbles separated in the separation tank into the activated carbon adsorption tower, the oxidizing power by free radicals caused by microbubbles and relatively many nanobubbles can be obtained. Thus, the organic matter adhering to the activated carbon surface can be oxidatively decomposed. In addition, the microorganisms propagated on the activated carbon can be activated, and the organic matter can be decomposed with the microorganism activated on the organic matter adsorbed by the activated carbon. By these, the life of activated carbon can be extended and the activated carbon can be regenerated, and while recovering the performance of the activated carbon adsorption tower at a low cost, the organic matter in the washing water is also removed and regenerated by the activated carbon adsorption tower. The washed water containing nanobubbles with good water quality can be reused with a water scrubber.

It is a figure showing typically a 1st embodiment of an exhaust gas treatment device of this invention. It is a figure which shows typically 2nd Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 3rd Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 4th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 5th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 6th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 7th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 8th Embodiment of the waste gas processing apparatus of this invention.

  Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

(First embodiment)
FIG. 1 is a diagram showing a first embodiment of an exhaust gas treatment apparatus of the present invention. The exhaust gas treatment apparatus 51 of the first embodiment is mainly composed of an exhaust gas treatment unit 49 and a cleaning water treatment unit 50.

  First, the exhaust gas treatment unit 49 that is a water scrubber will be described. The exhaust gas 1 is introduced into the exhaust gas processing unit 49 by the exhaust fan 2 through the exhaust duct 71. The exhaust gas treatment unit 49 is composed of an upper part 3 and a lower part 4 when expressed in the vertical direction (vertical direction).

  In the first embodiment, an example of the exhaust gas 1 is an exhaust gas containing a volatile organic compound (VOC) in a semiconductor factory. More specifically, isopropyl alcohol is a typical component as a volatile organic compound in a semiconductor factory. Components other than isopropyl alcohol include acetone and butyl acetate.

  The exhaust gas treatment part 49 is roughly divided into an upper part 3 and a lower part 4 with the exhaust fan 2 as a boundary in the vertical direction. In the upper part 3, a filler 9 made of synthetic resin is filled on the perforated plate 10. Has been. Moreover, the wash water after washing | cleaning waste gas is temporarily stored in the lower part 4. FIG.

  Specifically, as the filler 9 made of synthetic resin, Terralet S-II type (trade name) manufactured by Tsukishima Environmental Engineering Co., Ltd. was adopted. Terralet (trade name) is widely used in exhaust gas treatment apparatuses that use cleaning water, and (1) has a large effective area because it does not form a dead surface (a surface that does not contribute to gas-liquid contact). (2) Pressure loss is small due to the linear structure and large space ratio. (3) Since the material is synthetic resin, it is lightweight and resistant to chemical corrosion and mechanical shock.

  The filler 9 made of synthetic resin is filled on the perforated plate 13 installed slightly above and near the center as viewed from the vertical direction of the exhaust gas treatment unit 49, and the gas-liquid of exhaust gas and cleaning water Are arranged so that they can be smoothly contacted.

  The shape of the perforated plate 10 is not limited as long as it has an opening area that allows the entire amount of exhaust gas to pass through efficiently, but a round shape is generally used. The exhaust gas 1 is introduced into the upper part 3 of the exhaust gas processing section 49 by the exhaust fan 2. The exhaust gas 1 is washed with shower water by water droplets 11 sprayed from a water spray nozzle 8 attached to the water sprinkling pipe 7, and components in the exhaust gas 1 are transferred to the water droplets 11 by gas-liquid contact. Then, the water droplets 11 to which the components in the exhaust gas have migrated fall to the lower part 4 and are stored in the lower part 4 for a certain period of time. Then, the rapid filtration tower 19 of the washing water treatment unit 50 is used by the rapid filtration tower water pump 14. Will be introduced and processed. Further, the exhaust gas 1 processed in the upper part 3 of the exhaust gas processing part 49 becomes a process gas 5 and is discharged from the chimney 6 at the top of the upper part 3.

  As described above, the filler 9 made of synthetic resin increases the gas-liquid contact efficiency in the upper part 3 of the exhaust gas treatment unit 49. This filler 9 improves the gas-liquid contact efficiency and improves the removal rate of volatile organic compounds (VOC) in the exhaust gas treatment section 49. The cleaning water sprayed from the sprinkling pipe 7 in the upper part 3 is the processing water (cleaning water) in the processing tank 46 supplied by the cleaning water pump 47 via the cleaning water pipe 48. Since the treated water in the treatment tank 46 is washed water that has already been treated by the activated carbon adsorption tower 40, it is treated water having a quality suitable for the washed water.

  And although it returns before, in this 1st Embodiment, since the component in the waste gas 1 is isopropyl alcohol and isopropyl alcohol is water-soluble, it transfers to the water droplet 11 easily by gas-liquid contact. The gas is stored in the lower part 4 of the exhaust gas treatment unit 49. The isopropyl alcohol-containing cleaning water (treated water) stored in the lower part 4 is a rapid filtration tower water pump under the condition that the electric valve 17 and the electric valve 21 are open and the electric valve 18 and the electric valve 36 are closed. 14 is sucked from the suction pipe 13 through the water pipe 15 and introduced into the rapid filtration tower 19.

  Next, the cleaning water treatment unit 50 will be described in detail. The washing water treatment unit 50 is mainly composed of a rapid filtration tower 19, a pump pit 23, a micro / nano bubble generator 67, a separation tank 35, an activated carbon adsorption tower 40, and a treatment tank 46. The micro / nano bubble generating device 67 as the micro / nano bubble generating unit includes a gas / liquid mixing circulation pump 26 to which the first gas shearing unit 27 is attached, a second gas shearing unit 30, and a third gas shearing unit 32. ing.

  As described above, under the condition that the electric valve 17 and the electric valve 21 are open and the electric valve 18 and the electric valve 36 are closed, the wash water (treated water) containing isopropyl alcohol is supplied to the rapid filtration tower. The pump 14 is transferred to the rapid filtration tower 19 through the suction pipe 13 and the water pipe 15, and the suspended matter in the water to be treated is physically filtered. The rapid filtration tower 19 was filled with anthracite produced using coal as a raw material as a filter medium. If micro-nano bubbles are present in the water to be treated, the anthracite that is the filter medium is less likely to form a lump inside the rapid filtration tower 19. That is, the anthracite is less likely to be blocked within the rapid filtration tower 19. This phenomenon is due to the cleaning effect of micro-nano bubbles.

  To-be-treated water exiting the rapid filtration tower 19 is freed of suspended solids in the to-be-treated water, and then introduced into the pump pit 23 through the treated water pipe 20. The pump pit 23 is provided with a micro / nano bubble generator 67 outside. The suction pipe 25 of the micro / nano bubble generating device 67 is installed in a state where it enters the pump pit 23. An air pipe 29 is connected to the gas shearing portion 27 of the gas-liquid mixing circulation pump 26 attached to the micro / nano bubble generating device 67, and a small amount of air is quantitatively introduced into the air pipe 29. A needle valve 28 is attached. Needle valve 28 can naturally be an electric valve for automatic control.

  Next, the mechanism of the nanobubble generator 67, which is one of the important devices that the cleaning water treatment unit 50 has, will be described in detail.

  As described above, the micro / nano bubble generating device 67 includes the gas-liquid mixing / circulation pump 26, the first gas shearing unit 27, the second gas shearing unit 30, the third gas shearing unit 32, the needle valve 28 and the piping connecting them. 31 or the like. In the micro / nano bubble generating device 67, the nano bubbles are mainly manufactured through the first stage and the second stage.

  First, the first stage will be briefly described. In the first gas shearing portion 27, the pressure is hydrodynamically controlled to suck in the gas from the negative pressure forming portion, the fluid is moved at high speed to form the negative pressure portion, and microbubbles are generated. To make it easier to understand, the first step is to produce microbubble cloudy water by effectively self-sufficiency, mixing, dissolving and pumping water and air. Next, the second stage will be briefly described. The microbubble cloudy water is introduced into the second gas shearing part 30 and the third gas shearing part 32 through the water pipe 31, and is subjected to high-speed fluid motion in the second gas shearing part 30 and the third gas shearing part 32, so that the negative pressure part Form. Thereby, nanobubbles are generated from the microbubbles by fluidly moving the generated microbubbles and shearing them. Here, in particular, since the micro / nano bubble generating device 67 has the third gas shearing portion 32, the number of nano bubbles to be generated increases, and as a result, the oxidizing power by the nano bubble-containing cleaning water becomes strong.

  Hereinafter, the first stage and the second stage will be described in more detail.

(First stage)
The gas-liquid mixing circulation pump 26 used in the micro / nano bubble generating device 67 is a high-lift pump having a lift of 40 m or higher (that is, a high pressure of 4 kg / cm ² ). That is, the gas-liquid mixing / circulation pump 26 having the first gas shearing portion 27 needs to be a high-lift pump, and it is necessary to select a two-pole one having a stable torque. There are 2 poles and 4 poles in the pump, and the torque of the 2 pole pump is more stable than that of the 4 pole pump.

  Further, the high-lift pump constituting the gas-liquid mixing circulation pump 26 requires pressure control, and the rotational speed of this high-lift pump is controlled by a rotational speed controller (generally called an inverter). The pressure is suitable for the purpose. Therefore, the gas-liquid mixing / circulation pump 26 can produce microbubbles in which bubble sizes are collected at a pressure suitable for the purpose.

  Here, the mechanism of microbubble generation in the first gas shearing portion 27 attached to the gas-liquid mixing circulation pump 26 will be described. In the first gas shearing portion 27, in order to generate microbubbles, a mixed phase swirling flow of liquid and gas is generated, and a gas cavity portion that is swirled at a high speed is formed in the central portion of the first gas shearing portion 27. Next, this gas cavity is thinned into a tornado shape by pressure to generate a rotating shear flow that swirls at a higher speed. Air as a gas is automatically supplied to the gas cavity using a negative pressure (negative pressure), and the mixed phase flow is rotated while being cut and pulverized. In this embodiment, the gas is simply air, but other gases (ozone, carbon dioxide, nitrogen gas, oxygen gas) may be selected depending on the purpose.

  The cutting and pulverization is caused by the difference in the swirling speed of the gas-liquid two-phase fluid inside and outside near the outlet of the apparatus. The rotation speed at that time is 500 to 600 rotations / second. That is, in the first gas shearing portion 27, by controlling the pressure hydrodynamically, the gas is sucked from the negative pressure forming portion, and the high pressure pump moves the fluid at high speed to form the negative pressure portion. Is generated. To explain more easily and simply, the first step is to produce micro-bubble cloudy water by effectively self-suppliing, mixing, dissolving and pumping water and air with a high head pump.

  The operation of the gas-liquid mixing circulation pump 26 is controlled by a control signal from a sequencer (not shown). Further, the internal shape of the first gas shearing portion 27 is an ellipse or a perfect circle as a shape having the maximum effect, and is further mirror-finished to reduce the internal friction. Further, in order to control the swirling turbulent flow of the fluid, a groove having a groove depth of 0.3 mm to 0.6 mm and a groove width of 0.8 mm or less is provided inside the first gas shearing portion 27.

  Next, the high speed fluid motion in the high head pump in the first stage will be described. In order to generate microbubbles in the first gas shearing section 27, first, a wing called an impeller of a pump is rotated at an ultra high speed to generate a mixed phase swirling flow of liquid and gas, and the first gas shearing is performed. A gas cavity that swirls at a high speed is formed at the center of the portion 27. This is high speed fluid motion. Next, this high-speed swirling gas cavity is thinned into a tornado shape by pressure to generate a rotating shear flow swirling at a higher speed. This gas cavity is self-supplied with air as a gas. The gas may be ozone, carbon dioxide gas, nitrogen gas, or oxygen gas.

  Further, the multiphase flow is rotated while the gas cavity is cut and pulverized. This cutting and pulverization occurs due to the difference in the swirling speed of the gas-liquid two-phase fluid inside and outside the vicinity of the apparatus outlet. It has been found that the rotation speed at that time is 500 to 600 rotations / second. If the metal constituting the first gas shearing portion 27 is thin, vibration is generated by operating the gas-liquid mixing circulation pump 26, and the fluid kinetic energy propagates outside as vibration and escapes. This reduces the required high velocity flow motion, i.e., high speed swirl and shear energy. Therefore, the thickness of the metal constituting the first gas shearing portion 27 is preferably in the range of 6 mm to 12 mm.

(Second stage)
The gas-liquid mixing / circulation pump 26 pressure-feeds the microbubbles generated by the first gas shearing unit 27 to the second gas shearing unit 30 through the water pipe 31. At this time, in the second gas shearing portion 30 and the third gas shearing portion 32, after the first stage described above, the pipe size is further reduced and the fluid is moved at high speed to make the gas cavity portion a tornado shape. It is thinned to generate a rotating shear flow that swirls at a higher speed. As a result, nanobubbles are generated from the microbubbles, and at the same time, an extremely high temperature limit reaction field is formed.

  The reason why the micro / nano bubble generating device 67 includes the second gas shearing part 30 and the third gas shearing part 32 is that the three-stage gas shearing part has a nanobubble amount rather than the one-stage gas shearing part. This is because there is a large amount of oxygen and its oxidizing power is strong. That is, when an ultra-high temperature extreme reaction field is formed by nanobubbles, a high temperature and high pressure state is locally generated, unstable free radicals (also called radicals) are generated, and heat is simultaneously generated. The second gas shearing portion 30 and the third gas shearing portion 32 are generally made of stainless steel, and the internal shape thereof is an ellipse, preferably a perfect circle. Moreover, although the small hole is opened in the 2nd gas shearing part 30 and the 3rd gas shearing part 32, 4-9 mm is the optimal discharge port diameter.

  Next, the description will be given of “shearing microbubbles generated in the second and third gas shearing portions 30 and 32 by fluid motion”. The microbubbles generated by the gas-liquid mixing circulation pump 26 having the first gas shearing part 27 are pumped to the second gas shearing part 30 and the third gas shearing part 32 through a water pipe. At this time, in the second gas shearing portion 30 and the third gas shearing portion 32, after the first stage described above, the pipe size is further reduced and the fluid is moved at high speed to be thinned in a tornado shape. Rotating shear flow that swirls at is generated.

  Next, the “negative pressure forming portion” will be described. The “negative pressure forming portion” in the first gas shearing portion 27 described above is generated by the difference in the swirling speed of the gas-liquid two-phase fluid inside and outside in the vicinity of the apparatus outlet. As described above, the rotation speed is 500 to 600 rotations / second. Next, the “negative pressure part” will be described. The “negative pressure part” formed by high-speed fluid motion in the second gas shearing part 30 and the third gas shearing part 32 means a region in the gas / liquid mixture where the pressure is smaller than the surroundings. .

  The above is the mechanism of nanobubble generation in the micro / nanobubble generator 67.

  Then, under the condition that the electric valve 34 is open, the electric valve 45 is open, the electric valve 33 is closed, and the electric valve 41 is closed, the micro-nano bubble generating device 67 moves to the separation tank 35. Micro-nano bubble water containing a mixture of micro bubbles and nano bubbles is introduced.

  The separation tank 35 is made of stainless steel for pressure and corrosion countermeasures. That is, the separation tank 35 is made of stainless steel so as not to corrode the material metal due to the high discharge pressure of the gas-liquid mixing circulation pump 26 and the oxidizing power of free radicals derived from nanobubbles and microbubbles. The stainless steel separation tank 35 can handle both high pressure and oxidizing power.

  In the first embodiment, a Y-shaped separation plate 37 as a partition plate is installed inside the separation tank 35. The Y-shaped separation plate 37 moves below the separation tank 35 because the microbubbles move above the separation tank 35 due to the difference in specific gravity between the microbubble-containing water and the nanobubble-containing water. It is installed in order to separate microbubbles from nanobubbles. In the separation tank 35, the microbubbles among the micro / nano bubbles introduced through the electric valve 34 are arranged in a narrow gap between the inner wall of the separation tank 35 and the Y-shaped separation plate 37. It comes into contact and grows, floats and is introduced into the backwash water pipe 22. As a result, the possibility that the microbubbles are sucked from the nanobubble water pipe 39 can be substantially eliminated. Thereby, microbubbles and nanobubbles can be separated.

  In this embodiment, as an example, the Y-shaped separation plate 37 is made of stainless steel. Further, a T-shaped separation plate may be adopted instead of the Y-shaped separation plate 37.

  Part of the microbubbles separated by the Y-shaped separation plate 37 becomes bubbles 38, gathers in the gap above the outer wall of the separation tank 35 and the Y-shaped separation plate 37, and flows into the backwash water pipe 22. To do. On the other hand, the nanobubbles pass through the outer wall of the separation tank 35 and the gap below the Y-shaped separation plate 37 and flow into the nanobubble water pipe 39. That is, the washing water containing a large amount of nanobubbles flows into the activated carbon adsorption tower 40 through the nanobubble water pipe 39.

  The rapid filtration tower 19 is backwashed by opening the electric valve 36 under the condition that the electric valve 18 is opened, the electric valve 17 is closed, and the electric valve 21 is closed. As a result, the microbubble-containing water separated in the separation tank 35 is introduced into the rapid filtration tower 19 from the backwash water pipe 22 and discharged through the backwash water pipe 16, whereby the rapid filtration tower 19 is backwashed. The electric valves 18, 36 and the backwash drainage pipes 16, 22 constitute a second backwash section.

  In the backwashing, the microbubble-containing water introduced into the rapid filtration tower 19 has a higher buoyancy than the nanobubble-containing water, and the microbubble has a larger bubble size than the nanobubble. Then, the filter medium filled inside is washed and stirred up. As a result, the filter medium packed in the rapid filtration tower 19 is efficiently washed with the stirring power of the microbubbles and the oxidizing power of the free radicals of the microbubbles. In this embodiment, as described above, anthracite manufactured using coal as a raw material is employed as an example of the filter medium. Further, a filter medium outflow prevention net 68 is installed in the upper part of the rapid filtration tower 19 to prevent the filter medium from flowing out during backwashing. This net 68 is doubled. Therefore, when backwash water with a strong discharge pressure flows in from the lower part of the rapid filtration tower 19, the discharge pressure of the backwash water is reduced by the double net 68 to prevent the filter medium from flowing out through the pipe. it can. The double net 68 is preferably composed of a coarse net upstream of the water flow by backwashing and a fine net downstream of the water flow by backwashing. In this case, a filter medium layer is easily formed between the downstream net and the upstream net, and the pressure of the backwash water having discharge pressure is reduced by the filter medium layer between the net and the outside of the filter medium. The outflow can be prevented. Further, the distance between the double net 68 and the filter medium layer in the rapid filtration tower 19 is preferably 150 mm as an example.

  On the other hand, nanobubble-containing water introduced from the separation tank 35 into the nanobubble water pipe 39 (that is, washing water containing a large amount of nanobubbles) flows into the activated carbon adsorption tower 40 through the nanobubble water pipe 39. The activated carbon adsorption tower 40 was filled with Kuraray Coal KW, an activated carbon manufactured by Kuraray Chemical Co., Ltd. as an example. This Kuraray Coal KW is granular activated carbon made from coal produced for general water treatment.

  In this exhaust gas treatment device 51, when washing water is passed through the activated carbon adsorption tower 40 and the water passage period is continued for three months or more, microorganisms propagate on the activated carbon. Then, cleaning water containing nanobubbles from the separation tank 35, that is, water to be treated, continuously flows into the activated carbon adsorption tower 40. Thereby, the microorganisms propagated on the activated carbon are activated by the nanobubbles, and the volatile organic compound adsorbed by the activated carbon is microbiologically decomposed. Therefore, adsorption of activated carbon of volatile organic compounds in the water to be treated and decomposition by activated microorganisms are repeated, so that the activated carbon is always regenerated.

  Therefore, the wash water as the water to be treated containing the volatile organic compound is treated with the content described above in the activated carbon adsorption tower 40 and flows into the treatment tank 46 through the treatment water pipe 44. A washing water pump 47 is installed in the treatment tank 46, and the treated washing water is sprinkled from the watering nozzle 8 of the watering pipe 7 in the upper part 3 of the exhaust gas treatment unit 49 via the washing water pipe 48. .

  On the other hand, the backwashing of the activated carbon adsorption tower 40 is performed by operating the micro / nano bubble generating device 67 under the condition that the electric valve 34 and the electric valve 45 are closed and the electric valve 33 and the electric valve 41 are opened. Done. This backwashing is performed by introducing micronano bubble water in which microbubbles and nanobubbles are mixed from the lower part of the activated carbon adsorption tower 40 through the backwash water pipe 43 and the treated water pipe 44. In the backwashing of the activated carbon adsorption tower 40, the microbubbles of the micro-nano bubble water are effective for flowing the activated carbon in the activated carbon adsorption tower 40 and stirring the air, while the nano bubbles of the micro-nano bubble water activate the microorganisms propagated on the activated carbon. However, the water to be treated can be oxidized by the strong free radical oxidization property of the nanobubbles. As a result, the backwashing efficiency for the activated carbon of the activated carbon adsorption tower 40 is improved. If it says easily, the dirt of activated carbon will be reliably washed by backwashing, and the adsorption function of activated carbon will be restored. The electric valve 33, the backwash water pipe 43, the backwash drain pipe 42, and the electric valve 41 constitute a first backwash section.

  In this embodiment, the activated carbon adsorption tower 40 has a double net 69 for preventing the activated carbon from flowing out. Therefore, when backwash water with strong discharge pressure flows in from the lower part of the activated carbon adsorption tower 40, the discharge pressure of backwash water is reduced by the double net 69 to prevent the activated carbon from flowing out through the pipe. it can. Further, the double net 69 of the activated carbon adsorption tower 40 is composed of a net upstream of the water flow by backwashing and a net downstream of the water flow by backwashing, and the mesh of the upstream net is It is coarser than the mesh of the downstream net. As a result, an activated carbon layer is easily formed between the downstream net and the upstream net, and the pressure of the backwash water with discharge pressure is reduced by the activated carbon layer between the net and the outside of the activated carbon. The outflow can be prevented. In addition, the distance between the double net 69 and the activated carbon layer in the activated carbon adsorption tower 40 is preferably 200 mm as an example.

  In addition, the backwash water in the rapid filtration tower 19 and the backwash water in the activated carbon adsorption tower 40 are installed in different places via respective backwash pipes (backwash water pipe 16 and backwash water pipe 42). The wastewater treatment facility is used. The treated water treated by the wastewater treatment facility can be returned to the pump pit 23 and the treatment tank 46 for reuse, or can be discharged. In short, whether to reuse or discharge is determined by the water treatment capacity of the wastewater treatment facility.

  As described above, according to the exhaust gas treatment apparatus 51 of the present embodiment, a mixture of microbubbles and nanobubbles is manufactured by the micro / nano bubble generator 67, and the manufactured mixture of microbubbles and nanobubbles is converted into microbubbles and nanobubbles in the separation tank 35. The washed water containing the separated microbubbles is used as backwash water for the rapid filtration tower 19 and the washed water containing the nanobubbles is introduced into the activated carbon adsorption tower 40. The nanobubble-containing washing water activates microorganisms propagating in the activated carbon adsorption tower 40, and microbially decomposes organic substances derived from volatile organic compounds (VOC) adsorbed on the activated carbon by the activated microorganisms. Thus, an exhaust gas treatment device 51 is constructed as an overall system that can automatically biologically regenerate the activated carbon.

  Therefore, according to the exhaust gas treatment apparatus 51 of this embodiment, the exhaust gas treatment unit 49 sprays a large amount of cleaning water containing nanobubbles from the sprinkling pipe 7 to treat the exhaust gas. Then, the used cleaning water after cleaning the exhaust gas by gas-liquid contact is supplied with nanobubbles by the micro-nano bubble generating device 67 after the suspended matter is removed by the rapid filtration tower 19 in the cleaning water treatment unit 50 and volatilized by the activated carbon adsorption tower 40. Organic compounds are adsorbed and decomposed. Then, water can be sprayed again from the sprinkling pipe 7 of the exhaust gas treatment unit 49 as regenerated cleaning water containing a large amount of nanobubbles. The washing water recycling system is completed by repeating the washing water spraying and regeneration processes.

  Here, each bubble will be described.

  (i) Normal bubbles (bubbles) rise in the water and eventually disappear on the surface by popping with bread.

  (ii) A microbubble is a bubble having a bubble diameter of 10 to several tens of μm at the time of its generation, and changes to a micro / nano bubble by contraction after the generation.

  (iii) Nano bubbles are bubbles having a diameter of several hundred nm or less.

  (iv) Micro-nano bubbles are bubbles having a diameter of about 10 μm to several hundreds of nm, and can be described as a mixture of micro-bubbles and nano-bubbles.

  In the first embodiment, the micro / nano bubble generating device 67 includes the first, second, and third three-stage gas shearing sections, but may include four or more stages of gas shearing sections. In the first embodiment, a surfactant or an inorganic salt may be added to the pump pit 23. In this case, it is possible to introduce a large amount of nanobubbles by introducing cleaning water containing a surfactant or inorganic salt from the pump pit 23 into the micro / nano bubble generating section 67. That is, the microbubble generating unit 67 can generate a large amount of nanobubbles having a small size by using the cleaning water containing the surfactant or the inorganic salt from the pump pit 23. Further, in the above description, when the activated carbon adsorption tower 40 is back-washed, the forward water flow to the activated carbon adsorption tower 40 is stopped. 40 backwashing may be performed. Further, in the above description, when the rapid filtration tower 19 is backwashed, the forward water flow to the rapid filtration tower 19 is stopped. You may perform 19 backwashing. In these cases, since the activated carbon adsorption tower 40 and the rapid filtration tower 19 are backwashed while passing water in the forward direction, without stopping the operation of the activated carbon adsorption tower 40 and rapid filtration tower 19 by the forward water flow, The activated carbon adsorption tower 40 and the rapid filtration tower 19 can be backwashed. That is, the activated carbon adsorption tower 40 and the rapid filtration tower 19 can be continuously watered for 24 hours, and the operation efficiency of the activated carbon adsorption tower 40 and the rapid filtration tower 19 can be increased. In addition, since backwashing is performed while water is passed, microbes and nanobubbles in the backwash water can activate microorganisms in the activated carbon adsorption tower 40 and the rapid filtration tower 19 to increase treatment efficiency and improve the quality of the treated water. Therefore, the quality of the washing water is improved and the performance as an exhaust gas treatment device is also improved.

(Second embodiment)
Next, FIG. 2 shows a second embodiment of the exhaust gas treatment apparatus of the present invention. In the second embodiment, only a part of the filler 9 arranged in the upper part 3 of the exhaust gas treatment unit 49 in the first embodiment described above is replaced with a perforated container 53 containing activated carbon 54. This is different from the first embodiment. Therefore, in the second embodiment, the same parts as those of the first embodiment described above are denoted by the same reference numerals, detailed description thereof will be omitted, and parts different from those of the first embodiment will be described.

  In the second embodiment, in the upper part 3 of the exhaust gas treatment unit 49, the filler 9 in the first embodiment described above as a filler on the perforated plate 10 and the perforated storage container 53 in which the activated carbon 54 is stored. Alternatingly arranged. Therefore, in this embodiment, activated carbon can be directly used for the treatment of volatile organic compounds in the exhaust gas. Here, the filler 9 means the terrarette (trade name) described in the first embodiment.

  Thereby, in this 2nd Embodiment, while the efficiency of contact of gas-liquid can be improved with the filler 9 in the upper part 3 of the exhaust gas treatment part 49, a volatile organic compound is made into active with the activated carbon 54 in the perforated container 53. Direct adsorption treatment can be performed. Therefore, in the second embodiment, from the viewpoint of the exhaust gas treatment apparatus 51 as a whole, the amount of activated carbon is increased as compared with the first embodiment, so that the treatment capacity of volatile organic compounds is improved.

  In addition, although it is also considered that the adsorption capacity of activated carbon decreases in a short time, after the adsorption capacity decreases, the volatile organic compound in the exhaust gas 1 is biologically treated by microorganisms propagated on the activated carbon surface. be able to. That is, activated carbon becomes biological activated carbon and exhibits biological action, and can biologically treat volatile organic compounds in the exhaust gas 1. Further, as the activated carbon 54, when the component in the exhaust gas is a water-soluble volatile organic compound, the KW for liquid phase can be selected with the Kuraray Chemical granular activated carbon of Kuraray Chemical Co., Ltd. When the components in the exhaust gas are water-insoluble volatile organic compounds, Kuraray Chemical granular activated carbon (trade name) manufactured by Kuraray Chemical Co., Ltd. can be selected for the gas phase and solvent recovery activated carbon GS.

(Third embodiment)
Next, FIG. 3 shows a third embodiment of the exhaust gas treatment apparatus of the present invention. The third embodiment differs from the first embodiment only in the following points (i) and (ii). Therefore, in the third embodiment, the same parts as those in the first embodiment described above are denoted by the same reference numerals and description thereof is omitted, and parts different from those in the first embodiment described above will be described.

   (i) A microbubble water discharge pipe 56 for discharging microbubbles is installed in the water tank at the lower part 4 of the exhaust gas treatment unit 49.

   (ii) Floating sludge extraction unit 58 as a floating sludge discharge facility that discharges sludge floating by microbubbles discharged from microbubble water discharge pipe 56, and the floating sludge from this floating sludge extraction unit 58 is drained. The point which installed the floating sludge drainage pipe 59 which passes in the case.

  In the third embodiment, an electric valve 73 is attached to a microbubble water pipe 55 connected to a microbubble water discharge pipe 56 in the lower part 4, and the microbubble water pipe 55 includes the electric valve 73, the backwash water pipe 22, and It is connected to the separation tank 35 via an electric valve 36. An electric valve 72 is additionally installed in the backwash water pipe 22.

  In this third embodiment, the electric valve 36 is opened, the electric valve 73 is opened, and the electric valve 72 is closed, so that the water containing microbubbles from the separation tank 35 is installed in the lower part 4 through the microbubble pipe 55. The microbubble water discharge pipe 56 is supplied. As a result, microbubble-containing water is discharged from the microbubble water discharge pipe 56 into the lower portion 4, and the microbubbles adhere to the floating substance derived from the volatile organic compound floating in the water tank of the lower portion 4. Thereby, the floating substance can be floated and drained from the floating sludge extraction part 58 through the floating sludge drain pipe 59. Examples of the suspended matter include a suspended matter generated by a volatile organic compound being dissolved in washing water and microorganisms breeding based on the organic compound. Thus, by discharging the floating sludge from the water tank at the lower part 4 of the exhaust gas treatment unit 49, the water quality is greatly improved. As a result, the TOC removal rate in the exhaust gas treatment unit 49 can be maintained.

  Further, when the water quality gradually deteriorates, the VOC removal rate also significantly decreases, and the function as the exhaust gas treatment device 51 decreases. Also in this case, the nanobubble generator 67 is operated under the condition that the electric valve 36 is opened, the electric valve 73 is opened, and the electric valve 72 is closed. Thereby, the microbubble containing water from the separation tank 35 is supplied to the microbubble water discharge pipe 56 installed in the lower part 4 through the microbubble pipe 55. Then, microbubble-containing water is discharged from the microbubble water discharge pipe 56 into the lower portion 4, and the discharged microbubbles generate an upward flow that is a microbubble flow 57, and the floating sludge is discharged from the water tank of the lower portion 4. This improves water quality.

  In this embodiment, when the floating sludge is drained from the floating sludge extraction part 58 through the floating sludge drain pipe 59, the cleaning water in the exhaust gas treatment device 51 system is reduced. The tank 46 is a system that is replenished from a replenishment facility (not shown).

(Fourth embodiment)
Next, FIG. 4 shows a fourth embodiment of the exhaust gas treatment apparatus of the present invention. The fourth embodiment is different from the first embodiment only in the following points (i) and (ii). Therefore, in the fourth embodiment, the same parts as those in the first embodiment described above are denoted by the same reference numerals and description thereof is omitted, and parts different from those in the first embodiment will be described.

   (i) A micro-nano bubble water discharge pipe 77 for discharging micro-nano bubbles is installed in the water tank at the lower part 4 of the exhaust gas treatment unit 49, a micro-nano bubble water pipe 60 is installed in the micro-nano bubble water discharge pipe 77, and backwash water A point where an electric valve 74 is attached to the pipe 43.

   (ii) Floating sludge extraction unit 58 as a floating sludge discharge facility that discharges sludge that floats by the microbubbles discharged from the micro / nano bubble water discharge pipe 77, and the floating sludge from the floating sludge extraction unit 58 is drained. The point which installed the floating sludge drainage pipe 59 which passes in the case.

  In the fourth embodiment, an electric valve 75 is attached to the micro / nano bubble water pipe 60 connected to the micro / nano bubble water discharge pipe 77 in the lower part 4, and the micro / nano bubble water pipe 60 is connected to the backwash water pipe 43. . The micro / nano bubble generating device 67 is operated under the condition that the electric valve 34 is closed, the electric valve 33 is opened, and the electric valve 75 is opened and the electric valve 74 additionally installed in the backwash water pipe 43 is closed. Then, water containing micro / nano bubbles is supplied from the backwash water pipe 43 to the micro / nano bubble water pipe 60, and water containing micro / nano bubbles is supplied from the micro / nano bubble water pipe 60 to the micro / nano bubble water discharge pipe 77. The micro / nano bubble-containing water is discharged into the water tank of the lower part 4 to generate a micro / nano bubble flow 76 that is an upward flow. Then, micro-nano bubbles adhere to floating substances derived from volatile organic compounds floating in the lower 4 water tank. Thereby, the floating substance can be floated and drained from the floating sludge extraction part 58 through the floating sludge drain pipe 59. Examples of the suspended matter include a suspended matter generated by a volatile organic compound being dissolved in washing water and microorganisms breeding based on the organic compound. Thus, by discharging the floating sludge from the water tank at the lower part 4 of the exhaust gas treatment unit 49, the water quality is greatly improved. As a result, the TOC removal rate in the exhaust gas treatment unit 49 can be maintained.

  Further, when the water quality gradually deteriorates, the VOC removal rate also significantly decreases, and the function as the exhaust gas treatment device 51 decreases. Also in this case, the micro / nano bubble generating device 67 is operated under the condition that the electric valve 34 is closed and the electric valve 33 is opened, and the electric valve 75 is open and the electric valve 74 is closed. Thus, as described above, the water quality is improved by discharging the micro / nano bubble-containing water from the micro / nano bubble water discharge pipe 77 into the lower 4 water tank and discharging the floating sludge from the lower 4 water tank.

(Fifth embodiment)
Next, FIG. 5 shows a fifth embodiment of the exhaust gas treatment apparatus of the present invention. In the fifth embodiment, a TOC (total organic carbon) detector 65 is installed in the processing tank 46, and a sequencer 62 and a TOC controller 63 to which a TOC detection signal is input from the TOC detector 65 are provided. Different from the first embodiment described above. Therefore, in the fifth embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals, detailed description thereof is omitted, and portions different from those in the first embodiment are described.

  The sequencer 62 as a control unit provided in the fifth embodiment outputs a control signal for controlling each electric valve from the signal line 61 to each electric valve. Note that the first embodiment also has a signal line similar to the signal line 61 for outputting a control signal from the sequencer to each motorized valve (not shown). Open and close can be controlled.

  In the fifth embodiment, the TOC detector 65 installed in the treatment tank 46 detects the TOC value of the water to be treated in the treatment tank 46 and inputs the TOC detection signal to the sequencer 62. The TOC controller 63 inputs a signal representing the TOC setting value to the sequencer 62. When the TOC (total organic carbon) value represented by the TOC detection signal input from the TOC detector 65 is higher than the TOC setting value, the sequencer 62 generates a micro signal by a control signal output to the signal line 61. The rotation speed of the electric motor of the gas-liquid mixing circulation pump 26 of the nanobubble generator 67 is controlled to be higher speed.

  That is, when the TOC (total organic carbon) value, which is the quality of the water to be treated in the treatment tank 46, is high, the rotation speed of the gas-liquid mixing circulation pump 26 is increased to increase the generation amount of micro / nano bubbles. As a result, the amount of nanobubbles flowing into the activated carbon adsorption tower 40 is increased, and (1) the microorganisms propagating on the activated carbon are more activated, and the organic matter related to the TOC adsorbed by the activated carbon is microbiologically decomposed.

  In addition, (2) the organic matter related to TOC in the wash water as the water to be treated is oxidatively decomposed by the oxidizing power caused by free radicals in the nanobubbles. (3) Nanobubbles oxidatively decompose organic matter using activated carbon as a catalyst in the presence of activated carbon, so that oxidative decomposition of organic matter related to TOC in the water to be treated, that is, washing water.

  Due to the actions (1), (2), and (3), the TOC concentration in the water to be treated, that is, the wash water, decreases.

  When the TOC (total organic carbon) value, which is the water quality of the treatment tank 46, is higher than the TOC setting value, the rapid filtration tower 19 and the activated carbon adsorption tower 40 are back-washed, or the rapid filtration tower 19 and the activated carbon adsorption tower There is also a need to extend the backwash time at 40. More specifically, as a cause of the TOC increase in the treatment tank 46, there is a decrease in the functions of the rapid filtration tower 19 and the activated carbon adsorption tower 40. In that case, the sequence control 62 is prepared so as to perform backwashing of at least one of the rapid filtration tower 19 and the activated carbon adsorption tower 40, or at least the rapid filtration tower 19 and the activated carbon adsorption tower 40 are prepared. The sequencer 62 is prepared to perform sequence control for extending one backwash time.

  That is, the suspended matter on the surface of the filter medium of the rapid filtration tower 19 and the suspended matter on the activated carbon surface of the activated carbon adsorption tower 40 are removed by backwashing or by extending the backwash time. In this embodiment, the sequencer 62 controls the opening and closing of each electric valve based on the TOC value detected by the TOC detector 65 based on the TOC concentration of the processing tank 46 and the TOC setting value by the TOC controller 63, Sequence control is performed such as controlling the number of revolutions of the motor of the gas-liquid mixing circulation pump 26 constituting the micro / nano bubble generating device 67, starting the backwashing of the rapid filtration tower 19 and the activated carbon adsorption tower 40, and extending the backwashing time. Thereby, the TOC density | concentration of the processing tank 46 can be made into a target density | concentration. Thus, according to this embodiment, based on the TOC (total organic carbon) value that is the water quality of the treatment tank 46, operation management and operation control by the sequencer 62 are performed to maintain the VOC removal performance. .

(Sixth embodiment)
Next, FIG. 6 shows a sixth embodiment of the exhaust gas treatment apparatus of the present invention. In the sixth embodiment, a COD (chemical oxygen demand) detector 66 is installed in the processing tank 46, and a sequencer 62 and a COD controller 64 to which a COD detection signal is input from the COD detector 66 are provided. However, this is different from the first embodiment. Therefore, in the sixth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and parts different from those in the first embodiment will be described.

  The sequencer 62 provided in the sixth embodiment outputs a control signal for controlling each electric valve from the signal line 61 to each electric valve. Note that the first embodiment also has a signal line similar to the signal line 61 for outputting a control signal from the sequencer to each motorized valve (not shown). Open and close can be controlled.

  In the sixth embodiment, the COD detector 66 installed in the treatment tank 46 detects the COD value of the water to be treated in the treatment tank 46 and inputs the COD detection signal to the sequencer 62. Further, the COD controller 64 inputs a signal representing the COD set value to the sequencer 62. When the COD (chemical oxygen demand) value represented by the COD detection signal input from the COD detector 66 is higher than the COD set value, the sequencer 62 uses a control signal output to the signal line 61. Then, the rotational speed of the electric motor of the gas-liquid mixing circulation pump 26 of the micro / nano bubble generating device 67 is controlled to be higher speed.

  That is, when the COD value, which is the quality of the water to be treated in the treatment tank 46, is higher than the COD set value, the rotation speed of the gas-liquid mixing circulation pump 26 is increased to increase the generation amount of micro / nano bubbles. As a result, the amount of nanobubbles flowing into the activated carbon adsorption tower 40 is increased, (1) the microorganisms propagating on the activated carbon are more activated, and the organic matter related to the COD adsorbed by the activated carbon is microbiologically decomposed.

  Further, (2) the organic matter related to COD in the wash water as the water to be treated is oxidatively decomposed by the oxidizing power caused by the free radicals of the nanobubbles. (3) Nanobubbles oxidatively decompose organic matter using activated carbon as a catalyst in the presence of activated carbon, and therefore oxidatively decompose organic matter related to COD in water to be treated, that is, washing water.

  Due to the actions (1), (2), and (3), the COD concentration in the water to be treated, that is, the wash water, decreases.

  When the COD (chemical oxygen demand) value, which is the water quality of the treatment tank 46, is higher than the COD set value, the rapid filtration tower 19 or the activated carbon adsorption tower 40 is back-washed, or the rapid filtration tower 19 or There is a need to extend the backwash time in the activated carbon adsorption tower 40. More specifically, as a cause of the COD increase in the processing tank 46, there is a decrease in functions of the rapid filtration tower 19 and the activated carbon adsorption tower 40. In that case, it prepares so that sequence control which performs backwashing of at least one of rapid filtration tower 19 and activated carbon adsorption tower 40 may be performed by sequencer 62, or each of rapid filtration tower 19 and activated carbon adsorption tower 40 The sequencer 62 is prepared to perform sequence control that extends the backwash time.

  That is, the suspended matter on the surface of the filter medium of the rapid filtration tower 19 and the suspended matter on the activated carbon surface of the activated carbon adsorption tower 40 are removed by backwashing or extending the backwash time. In this embodiment, the sequencer 62 controls the opening and closing of each electric valve based on the COD value detected by the COD detector 65 based on the COD concentration in the processing tank 46 and the COD set value by the COD controller 64, Sequence control is performed such as controlling the number of revolutions of the motor of the gas-liquid mixing circulation pump 26 constituting the micro / nano bubble generating device 67, starting the backwashing of the rapid filtration tower 19 and the activated carbon adsorption tower 40, and extending the backwashing time. Thereby, the COD density | concentration of the processing tank 46 can be made into a target density | concentration. Thus, according to this embodiment, operation management and operation control by the sequencer 62 are performed based on the COD (chemical oxygen demand) value, which is the water quality of the treatment tank 46, to maintain the VOC removal performance. It becomes.

(Seventh embodiment)
Next, FIG. 7 shows a seventh embodiment of the exhaust gas treatment apparatus of the present invention. The seventh embodiment is provided with a bypass pipe 78 that bypasses the separation tank 35 and connects the micro / nano bubble generator 67 to the backwash water pipe 22 and an electric valve 70 attached to the bypass pipe 78 as described above. Different from the fifth embodiment. Therefore, in the seventh embodiment, points different from the above-described fifth embodiment will be described, and the same parts as those in the above-described fifth embodiment will be denoted by the same reference numerals and detailed description thereof will be omitted.

  In the seventh embodiment, the backwashing operation of the rapid filtration tower 19 is different from the above-described fifth embodiment. That is, in the seventh embodiment, the backwashing operation of the rapid filtration tower 19 is performed by the sequencer 62 opening the electric valve 70 of the bypass pipe 78 and opening the electric valve 18, as well as the electric valve 17 and the electric valve. 36 is closed, and the micro / nano bubble water from the micro / nano bubble generator 67 is guided to the backwash water pipe 22 via the bypass pipe 78. The backwash water pipe 22, the bypass pipe 78, and the electric valve 70 constitute a third backwash section.

  Therefore, according to the seventh embodiment, the back filtration of the rapid filtration tower 19 allows the filter medium in the rapid filtration tower 19 to be washed with the oxidizing power caused by the free radicals of the microbubbles, and at the same time, the nanobubbles have more powerful properties. Organic substances adhering to the filter medium can be cleaned while oxidatively decomposing by the oxidizing power caused by free radicals.

(Eighth embodiment)
Next, FIG. 8 shows an eighth embodiment of the exhaust gas treatment apparatus of the present invention. The eighth embodiment is provided with a bypass pipe 78 that bypasses the separation tank 35 and connects the micro / nano bubble generator 67 to the backwash water pipe 22 and an electric valve 70 attached to the bypass pipe 78 as described above. Different from the sixth embodiment. Therefore, in the eighth embodiment, points different from the above-described sixth embodiment will be described, and the same parts as those in the above-described sixth embodiment will be denoted by the same reference numerals and detailed description thereof will be omitted.

  In the eighth embodiment, the backwashing operation of the rapid filtration tower 19 is different from that in the sixth embodiment. That is, in the eighth embodiment, the backwashing operation of the rapid filtration tower 19 is performed by the sequencer 62 opening the electric valve 70 of the bypass pipe 78 and opening the electric valve 18 and opening the electric valve 17 and the electric valve. 36 is closed, and the micro / nano bubble water from the micro / nano bubble generator 67 is guided to the backwash water pipe 22 via the bypass pipe 78. The backwash water pipe 22, the bypass pipe 78, and the electric valve 70 constitute a third backwash section.

  Therefore, according to the eighth embodiment, the back filtration of the rapid filtration tower 19 allows the filter medium in the rapid filtration tower 19 to be washed with the oxidizing power caused by the free radicals of the microbubbles, and at the same time, the nanobubbles have more powerful properties. Organic substances adhering to the filter medium can be cleaned while oxidatively decomposing by the oxidizing power caused by free radicals.

(Experimental example)
Based on 1st Embodiment of FIG. 1, the waste gas processing apparatus 51 was comprised from the waste gas processing part 49 and the washing water processing part 50, and the experimental apparatus was manufactured.

In this experimental apparatus, the capacity of the exhaust gas treatment part 49 was 5 m ³ , the capacity of the rapid filtration tower 19 in the washing water treatment part 50 was 0.5 m ^3, and the capacity of the pump pit 23 was 0.2 m ³ . The capacity of the separation tank 35 was set to 0.2 m ³ , the capacity of the activated carbon adsorption tower 40 was set to 0.9 m ^3, and the capacity of the treatment tank 46 was set to 0.2 m ³ . In addition, the experimental apparatus was configured with a three-phase 200 V, 3.7 kW power capacity of the gas-liquid mixing circulation pump 26 in the micro / nano bubble generating device 67.

  As the micro-nano bubble generating device 67, a product Bavitus HYK-32 type manufactured by Kyowa Kikai Co., Ltd. was adopted.

Then, exhaust gas containing volatile organic compounds mainly composed of isopropyl alcohol generated from a semiconductor factory is introduced into the exhaust gas treatment section 49 by the exhaust fan 2, and after 6 weeks have passed, the exhaust gas treatment section 49 is stabilized. The concentration of volatile organic compounds at the exhaust duct 71 that is the inlet of the exhaust gas and the outlet of the chimney 6 that is the outlet of the exhaust gas treatment unit 5 was measured. The results of this measurement are shown in Table 1 below.
(Table 1)

  In the above measurement, a collection bag (Tedlar bag) was used for sampling, and a hydrogen ionization analyzer (FID) was used as an analysis method. In Table 1 above, the ppmC value was converted to the capacity of VOC having 1 carbon.

In addition, Table 2 shows the results of measuring the water quality of the washing water in the lower 4 water tank and the washing water in the treatment tank 46 of the exhaust gas treatment unit 49.
(Table 2)

DESCRIPTION OF SYMBOLS 1 Exhaust gas 2 Exhaust fan 3 Upper part 4 Lower part 5 Process gas 6 Chimney 7 Sprinkling pipe 8 Sprinkling nozzle 9 Filling material 10 Perforated board 11 Water drop 12 Water surface 13 Suction pipe 14 Rapid filtration tower water pump 15 Water pipe 16 Backwash drain pipe 17 Electric Valve 18 Electric valve 19 Rapid filtration tower 20 Treated water pipe 21 Electric valve 22 Backwash water pipe 23 Pump pit 24 Water surface 25 Suction pipe 26 Gas-liquid mixing circulation pump 27 First gas shearing part 28 Needle valve 29 Air pipe 30 Second gas Shear part 31 Water pipe 32 Third gas shear part 33, 34, 36 Electric valve 35 Separation tank 37 Y-type separation plate 38 Air bubble 39 Nano bubble water pipe 40 Activated carbon adsorption tower 41 Electric valve 42 Backwash drain pipe 43 Backwash water pipe 44 Treated water piping 45 Electric valve 46 Treatment tank 47 Washing water pump 48 Washing water piping 49 Exhaust gas Processing section (a water scrubber)
50 Washing Water Treatment Unit 51 Exhaust Gas Treatment Device 52 Nano Bubble Flow 53 Perforated Containment Container 54 Activated Carbon 55 Micro Bubble Water Pipe 56 Micro Bubble Water Discharge Piping 57 Micro Bubble Flow 58 Levitation Sludge Extraction Port 59 Levitation Sludge Drain Pipe 60 Micro Nano Bubble Water Piping 61 Signal Line 62 Sequencer 63 TOC (Total Organic Carbon) Controller 64 COD (Chemical Oxygen Demand) Controller 65 TOC Detector 66 COD Detector 67 Micro / Nano Bubble Generator 68 Filter Material Outflow Prevention Net 69 Activated Carbon Outflow Prevention Net 70 Electric valve 71 Exhaust duct 72-75 Electric valve 76 Micro nano bubble flow 77 Micro nano bubble water discharge piping 78 Bypass piping

Claims (20)

A water scrubber having an upper watering part for sprinkling cleaning water into the introduced exhaust gas and a lower water tank for storing cleaning water falling from the upper watering part;
A rapid filtration tower into which wash water from the lower water tank is introduced;
The micro-nano bubble generating part for producing the wash water containing the micro-nano bubbles introduced by the wash water filtered by the rapid filtration tower,
Washing water containing the micro-nano bubbles is introduced from the micro-nano bubble generating part, and the washing water containing the micro-nano bubbles is contained in the micro-bubbles in a larger proportion of the micro bubbles than the washing water containing the micro-nano bubbles. A separation tank that separates the cleaning water into nanobubble-containing cleaning water that has a higher proportion of nanobubbles to microbubbles than the cleaning water that contains the micro-nanobubbles,
An activated carbon adsorption tower into which the nanobubble-containing washing water from the separation tank is introduced;
An exhaust gas treatment apparatus comprising: a cleaning water supply unit that supplies cleaning water containing nanobubbles from the activated carbon adsorption tower to an upper watering unit of the water scrubber. The exhaust gas treatment apparatus according to claim 1,
An exhaust gas treatment apparatus comprising: a first backwashing unit for backwashing by introducing cleaning water containing the micronanobubbles from the micronanobubble generating unit into the activated carbon adsorption tower. The exhaust gas treatment apparatus according to claim 1 or 2,
An exhaust gas treatment apparatus comprising a second backwashing section for introducing the microbubble-containing washing water from the separation tank into the rapid filtration tower and backwashing. In the exhaust gas treatment apparatus according to any one of claims 1 to 3,
An exhaust gas treatment apparatus comprising: a third backwashing unit for backwashing by introducing cleaning water containing the micronanobubbles from the micronanobubble generating unit into the rapid filtration tower. In the exhaust gas treatment apparatus according to any one of claims 1 to 4,
The separation tank is
An exhaust gas characterized in that the introduced cleaning water containing micro-nano bubbles is separated into the cleaning water containing micro-bubbles and the cleaning water containing nano-bubbles using the difference in specific gravity between the cleaning water containing micro-bubbles and the cleaning water containing nano-bubbles. Processing equipment. The exhaust gas treatment apparatus according to claim 5,
The separation tank is
An exhaust gas treatment apparatus comprising a partition plate for separating the microbubble-containing cleaning water and the nanobubble-containing cleaning water. The exhaust gas treatment apparatus according to claim 6,
An exhaust gas treatment apparatus, wherein the partition plate has a Y-shape. The exhaust gas treatment apparatus according to claim 6,
An exhaust gas treatment apparatus, wherein the partition plate has a T-shape. In the exhaust gas treatment apparatus according to any one of claims 1 to 8,
The micro-nano bubble generation part is
A gas-liquid mixing circulation pump into which wash water from the rapid filtration tower is introduced;
A first gas shearing part attached to the gas-liquid mixing circulation pump and generating microbubbles in the washing water;
A second gas shearing section that introduces washing water containing the microbubbles from the first gas shearing section and generates nanobubbles by shearing the microbubbles;
An exhaust gas treatment apparatus comprising: a third gas shearing section that introduces cleaning water containing the microbubbles and nanobubbles from the second gas shearing section and shears the microbubbles to further generate nanobubbles. . The exhaust gas treatment apparatus according to claim 9,
The micro-nano bubble generation part is
An exhaust gas treatment apparatus, further comprising at least one stage of gas shearing unit connected so that the cleaning water containing micro-nano bubbles from the third gas shearing unit is introduced. In the exhaust gas treatment apparatus according to any one of claims 2 to 10,
The washing water supply unit
A treatment tank into which nanobubble-containing washing water from the activated carbon adsorption tower is introduced;
A TOC meter installed in the treatment tank and measuring the TOC of the cleaning water in the treatment tank;
Further, when a signal representing the TOC value measured by the TOC meter is input and the TOC value represented by the input signal is higher than a set value, at least one of the first to third backwash units. When the TOC value represented by the input signal is equal to or lower than the set value, the backwashing is performed by one of the first to third backwashing units so as not to perform the backwashing. An exhaust gas treatment apparatus comprising a control unit for controlling at least one backwashing unit. In the exhaust gas treatment apparatus according to any one of claims 2 to 10,
The washing water supply unit
A treatment tank into which nanobubble-containing washing water from the activated carbon adsorption tower is introduced;
A COD meter installed in the treatment tank to measure the COD of the cleaning water in the treatment tank;
Further, when a signal representing the COD value measured by the COD meter is input and the COD value represented by the input signal is higher than a set value, at least one of the first to third backwash units. When the COD value represented by the input signal is equal to or lower than the set value, the backwashing is performed by one of the first to third backwashing units so as not to perform the backwashing. An exhaust gas treatment apparatus comprising a control unit for controlling at least one backwashing unit. The exhaust gas treatment apparatus according to claim 11 or 12,
The first backwashing section performs the backwashing while passing water in the forward direction to the activated carbon adsorption tower, and the second and third backwashing sections are directed in the forward direction to the rapid filtration tower. An exhaust gas treatment apparatus that performs the backwashing while passing water. In the exhaust gas treatment apparatus according to any one of claims 2 to 13,
The activated carbon adsorption tower is
An exhaust gas treatment apparatus having a double net for preventing activated carbon from flowing out. The exhaust gas treatment apparatus according to any one of claims 4 to 14,
The rapid filtration tower is
An exhaust gas treatment apparatus having a double net for preventing a filter medium from flowing out. The exhaust gas treatment apparatus according to claim 14,
The double net of the activated carbon adsorption tower is composed of a net upstream of the water flow by backwashing and a net downstream of the water flow by backwashing, and the mesh of the upstream net is on the downstream side. An exhaust gas treatment apparatus characterized by being coarser than the mesh of the net. The exhaust gas treatment apparatus according to claim 15,
The double net included in the rapid filtration tower includes a net upstream of the water flow by backwashing and a net downstream of the water flow by backwashing, and the mesh of the upstream net is the downstream side. An exhaust gas treatment apparatus characterized by being coarser than the mesh of the net. The exhaust gas treatment apparatus according to any one of claims 1 to 17,
Provided with a pump pit into which the washing water from the rapid filtration tower is introduced and a surfactant is added,
The exhaust gas treatment apparatus according to claim 1, wherein the micro / nano bubble generating unit sucks the cleaning water from the pump pit to produce cleaning water containing micro / nano bubbles. The exhaust gas treatment apparatus according to any one of claims 1 to 17,
Provided with a pump pit into which inorganic water is added while washing water from the rapid filtration tower is introduced,
The exhaust gas treatment apparatus according to claim 1, wherein the micro / nano bubble generating unit sucks the cleaning water from the pump pit to produce cleaning water containing micro / nano bubbles. The exhaust gas treatment apparatus according to any one of claims 11 to 19,
The control unit, during the backwashing, backwashing the activated carbon adsorption tower by the first backwashing unit, and backwashing the rapid filtration tower by the second backwashing unit or the third backwashing unit, The exhaust gas processing apparatus is characterized in that the first to third backwashing units are controlled so as to be performed simultaneously.

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