JP2010162519A - Exhaust gas treatment apparatus and exhaust gas treatment method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exhaust gas treatment apparatus capable of generating a lot of nanobubbles at low cost and generating an optimal amount of nanobubbles in accordance with varying properties of exhaust gas. <P>SOLUTION: This exhaust gas treatment apparatus 77 improves the quality of washing water by using nanobubbles to treat the washing water which is introduced to a nanobubble producing part 74 from an exhaust gas treatment part 76, sticking nanobubbles to suspended solids in the washing water, floating them in a fourth tank 48 (suspended solid separation tank), and separating the suspended solids from the washing water. Since the washing water with improved quality is used again for the exhaust gas treatment part 76, a performance of the exhaust gas treatment apparatus 77 is improved and the amount of washing water is saved as well. By arranging, in series, three or more water tanks 5, 11, and 20, having microbubble generators 6, 13, and 22, and introducing the exhaust gas washing water from the exhaust gas treatment part 76 to the first tank 5 to the third tank 20, sequentially, the exhaust gas washing water containing nanobubbles is effectively produced in the third tank 20. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an exhaust gas treatment device and an exhaust gas treatment method, and more particularly to an inexpensive exhaust gas treatment device and an exhaust gas treatment method that improve the quality of washing water after exhaust gas treatment and reuse it again for exhaust gas treatment.

  Conventionally, techniques relating to a method for producing a nanobubble-containing liquid and a device for producing a nanobubble-containing liquid are known, but the amount of nanobubbles generated from a conventional nanobubble generator is generally small.

  By the way, a nanobubble generator capable of generating a larger amount of nanobubbles was started in 2006 from Kyowa Kikai Co., Ltd. As a result of investigating the nanobubble generator of Kyowa Kikai Co., Ltd. and analyzing its structure, the various parts that make up the nanobubble generator are specially manufactured to produce nanobubbles in large quantities due to the uniqueness of nanobubbles. It was. For this reason, not only the manufacturing cost of the nano bubble generator increased, but also the delivery time was long. Moreover, since the nano bubble generating apparatus of Kyowa Kikai Co., Ltd. is a single item apparatus, it was a system which cannot control the generation amount of nano bubbles freely according to the purpose.

  By the way, Patent Document 1 (Japanese Patent No. 4118939) discloses a method and an apparatus for generating fine bubbles (fine bubbles including nanobubbles).

  Patent Document 2 (Japanese Patent Laid-Open No. 2004-121962) discloses a method and apparatus for using nanobubbles as a conventional technique. This technology utilizes the characteristics of nanobubbles such as reduction of buoyancy, increase of surface area, increase of surface activity, generation of local high-pressure field, and surface active action and bactericidal action by realizing electrostatic polarization. More specifically, by interlinking them, various objects can be washed with high functionality and low environmental load by the adsorption function of dirt components, the high-speed washing function of the object surface, and the sterilization function. It discloses that purification can be performed.

  Patent Document 3 (Japanese Patent Application Laid-Open No. 2003-334548) discloses a nanobubble generation method as a conventional technique. In this technique, in a liquid, (1) a step of cracking and gasifying a part of the liquid, (2) a step of applying ultrasonic waves in the liquid, or (3) a step of cracking and gasifying a part of the liquid and It discloses that it is composed of a step of applying ultrasonic waves.

  Patent Document 4 (Japanese Patent Application Laid-Open No. 2004-321959) discloses a waste liquid treatment apparatus using ozone microbubbles as a conventional technique. In this technique, ozone gas generated from the ozone generator and waste liquid extracted from the lower part of the treatment tank are supplied to the microbubble generator via a pressure pump. It also discloses that the generated ozone microbubbles are vented into the waste liquid in the treatment tank through the opening of the gas blowing pipe.

  By the way, as research on nanobubbles progresses, the effects of nanobubbles have been reported by various researchers in various fields. Naturally, in the industry, it will be necessary in the future to manufacture nanobubbles at a low cost and stably in large quantities. Also in the field of exhaust gas treatment, the effect of incorporating nanobubbles into the cleaning water of the exhaust gas treatment apparatus is expected. In particular, when the quality of the exhaust gas cleaning water deteriorates, the exhaust gas cleaning water is generally introduced into a waste water treatment facility installed at a location different from the exhaust gas processing apparatus. Here, a compact exhaust gas reuse facility that can be installed near the exhaust gas treatment facility is desired.

  Further, as described above, there is currently a nano bubble generator provided by Kyowa Kikai Co., Ltd., which manufactures and combines specially manufactured parts with nano bubble generators with special specifications. For this reason, at present, the nano bubble generating apparatus of Kyowa Kikai Co., Ltd. is expensive because of many custom-made parts.

Japanese Patent No. 4118939 JP 2004-121962 A JP 2003-334548 A JP 2004-321959 A

  Therefore, an object of the present invention is to generate a large amount of nanobubbles at a low cost, and to generate an optimal amount of nanobubbles in accordance with the characteristics of fluctuating exhaust gas. It is an object to provide an exhaust gas treatment device and an exhaust gas treatment method that can be adjusted to each other.

In order to solve the above-described problem, an exhaust gas treatment apparatus of the present invention includes an exhaust gas treatment unit for washing introduced exhaust gas with washing water,
A nanobubble manufacturing unit that introduces cleaning bubbles from the exhaust gas treatment unit and contains nanobubbles in the cleaning water,
The cleaning water containing the nanobubbles is filtered from the nanobubble production unit, and the cleaning water treatment unit is introduced into the exhaust gas processing unit,
The nanobubble manufacturing department
A first tank having a microbubble generator and containing microbubbles in the washing water introduced from the exhaust gas treatment unit;
A second tank having a microbubble generator and containing micro-nano bubbles in the washing water introduced from the first tank;
A third tank having a microbubble generator and containing nanobubbles in the wash water introduced from the second tank;
A fourth tank in which nanobubble-containing cleaning water is introduced from the third tank and floats and separates suspended substances in the cleaning water; and
The fifth tank has a fifth tank in which an electrometer is installed which measures the potential correlated with the bubble content of the cleaning water while the cleaning water is introduced from the fourth tank.

  According to this invention, the washing water introduced from the exhaust gas treatment unit to the nanobubble production unit is treated using nanobubbles, and the nanobubbles are attached to the suspended solids in the washing water to form a fourth tank (floating substance separation tank). To raise the quality of the wash water by separating the suspended matter from the wash water. And since the wash water which improved this water quality is reused again for an exhaust gas treatment part, the performance of an exhaust gas treatment device can be improved and washing water can be saved.

  In the present invention, three or more water tanks in which microbubble generators are installed are arranged in series, and exhaust gas cleaning water from the exhaust gas treatment unit is sequentially introduced from the first tank to the third tank, and at the same time, The microbubble generator located in Thereby, it turned out that nanobubble containing exhaust gas washing water can be efficiently manufactured in the 3rd tank. That is, microbubbles are manufactured in the first first tank, the microbubbles are introduced into the second tank, and micronanobubbles, which are mixed bubbles of microbubbles and nanobubbles, are manufactured. It is possible to produce exhaust gas cleaning water containing nanobubbles by introducing into a third tank and further shearing. Therefore, according to the present invention, a large amount of nanobubbles can be generated at a low cost. Moreover, since the electrometer installed in the 5th tank measures the electric potential correlated with the bubble content of the introduced washing water, the bubble content of the washing water can be detected.

Moreover, in the exhaust gas treatment apparatus of one embodiment, a surfactant addition unit for adding a surfactant to at least one of the first tank to the third tank, and the first tank to the third tank Comprising at least one of an inorganic salt addition section for adding inorganic salts to at least one tank,
Furthermore, at least one of the addition amount of the surfactant by the surfactant addition unit and the addition amount of the inorganic salts by the inorganic salt addition unit according to the potential measured by the electrometer installed in the fifth tank An addition amount control unit for controlling one is provided.

  According to this embodiment, by controlling the addition amount of the surfactant and inorganic salts with the addition amount control unit, it is possible to generate an optimal amount of nanobubbles according to the characteristics of the fluctuating exhaust gas. The amount of nanobubble generation can be freely adjusted as necessary.

Moreover, in the exhaust gas treatment apparatus of an embodiment, the apparatus includes both the surfactant addition part and the inorganic salt addition part,
The addition amount control unit controls the addition amount of the surfactant and the addition amount of the inorganic salts according to the potential measured by the electrometer.

  According to this embodiment, since the addition amount of both the surfactant and the inorganic salt is controlled by the addition amount control unit, it is possible to generate a large amount of nanobubbles and effectively adjust the amount of nanobubble generation. .

  In one embodiment, the electrometer is a redox electrometer.

  According to this embodiment, the addition amount of the surfactant and the inorganic salt can be managed based on the oxidation-reduction potential of the washing water measured by the oxidation-reduction potentiometer. Since the redox potential of the washing water has a correlation with the amount of nanobubbles in the washing water, the amount of nanobubbles can be indirectly controlled and managed by the redox potential.

  In one embodiment, the electrometer is a zeta electrometer.

  According to this embodiment, the addition amount of the surfactant and the inorganic salt can be managed based on the zeta potential of the washing water measured by the zeta electrometer. Since the zeta potential of the washing water has a correlation with the amount of nanobubbles in the washing water, the amount of nanobubbles can be indirectly controlled and managed by the zeta potential.

In the exhaust gas treatment apparatus of one embodiment, the addition amount control unit is
A signal representing the potential measured by the electrometer installed in the fifth tank is input, and a sequencer for generating a control signal for controlling the addition amount based on the signal is provided.

  According to this embodiment, the addition amount of the surfactant and the inorganic salt can be managed by the control signal generated by the sequencer included in the addition amount control unit.

Moreover, in the exhaust gas treatment apparatus of one embodiment, the surfactant addition unit is configured to introduce the surfactant from the surfactant tank and the surfactant tank to each of the first tank to the third tank. It has a chemical pipe and a pump installed in this chemical pipe,
The inorganic salt addition unit has an inorganic salt tank, a chemical pipe for introducing inorganic salts from the inorganic salt agent tank to each of the first tank to the third tank, and a pump provided in the chemical pipe. ,
The sequencer controls the surface activity to the first to third tanks by controlling the pump of the surfactant addition unit and the pump of the inorganic salt addition unit with a control signal for controlling the addition amount. The amount of additive and inorganic salt added is controlled.

  According to this embodiment, the sequencer controls the addition amount of the surfactant and the inorganic salt added from the surfactant tank and the inorganic salt tank to the first to third tanks by controlling both the pumps. it can.

  Moreover, in the exhaust gas processing apparatus of one Embodiment, the said washing water processing part has an activated carbon adsorption tower.

  According to this embodiment, the component dissolved in the washing water can be physically adsorbed with the activated carbon of the activated carbon adsorption tower. In addition, the microorganisms that propagate on the activated carbon can be activated with nanobubbles to biologically decompose the components adsorbed on the activated carbon, thereby extending the time until breakthrough of the activated carbon.

  Moreover, in the exhaust gas treatment apparatus of one embodiment, the washing water treatment unit has a rapid filtration tower in front of the activated carbon adsorption tower.

  According to this embodiment, the suspended matter in the wash water can be reliably treated with the rapid filtration tower, and the pretreatment of the activated carbon adsorption tower can be achieved. The activated carbon can physically adsorb the components dissolved in the washing water with the activated carbon of the activated carbon adsorption tower. In addition, the microorganisms that propagate on the activated carbon can be activated with nanobubbles to biologically decompose the components adsorbed on the activated carbon, thereby extending the time until breakthrough of the activated carbon.

  Moreover, in the exhaust gas treatment apparatus of one embodiment, the washing water treatment unit has a microfiltration membrane device and a reverse osmosis membrane device in order after the activated carbon adsorption tower.

  According to this embodiment, the dissolved components in the wash water are treated with an activated carbon adsorption tower, a microfiltration membrane device, and a reverse osmosis membrane device to improve the quality of the wash water to a high level and improve the performance of exhaust gas treatment in the exhaust gas treatment unit. Can be improved.

  Moreover, in the exhaust gas treatment apparatus of one embodiment, the washing water treatment unit has a contact oxidation tank in the front stage of the rapid filtration tower.

  According to this embodiment, when the dissolved organic matter concentration in the wash water is high, the dissolved organic matter can be treated microbiologically and economically in the contact oxidation tank. The remaining suspended solids can be filtered with a rapid filtration tower, and the remaining dissolved organic matter can be filtered with activated carbon in an activated carbon adsorption tower.

In the exhaust gas treatment apparatus of one embodiment, the washing water treatment unit is
Having a treated water tank into which washing water from the activated carbon adsorption tower is introduced, this treated water tank having a TOC meter for measuring the TOC of the washing water;
The sequencer receives a signal representing the TOC concentration of the washing water from the TOC meter, and when the TOC concentration represented by the signal exceeds a preset set value, the pump of the surfactant addition unit and the inorganic salts By controlling the pump of the addition unit, the addition amount of the surfactant and inorganic salts to the first to third tanks is increased.

  According to this embodiment, the dissolved organic matter in the washing water can be treated in the activated carbon adsorption tower, and at the same time, since the TOC (total organic carbon) meter is installed in the treatment water tank, the quality of the washing water in the treatment water tank is changed to TOC (total Organic carbon). That is, it is possible to judge whether or not the amount of nanobubbles is appropriate by evaluating the washing water with TOC (total organic carbon).

  Moreover, in the exhaust gas processing apparatus of one Embodiment, the microbubble generator which each said 1st-3rd tank has has a vortex pump which self-sucks air and generate | occur | produces a microbubble.

  According to this embodiment, since a total of three vortex pumps (pressure dissolution pumps) are installed, nanobubbles can be economically produced with a vortex pump (pressure dissolution pump) that is a general-purpose pump. In addition, the vortex pump pressurizes and mixes air and water, so that a smaller-sized bubble can be produced.

  Further, in the exhaust gas treatment apparatus of one embodiment, the cleaning water treatment unit has a treated water pump installed in the treated water tank, and the treated water pump pressurizes air to self-suck to generate microbubbles. It is a dissolution pump, and the washing water is returned to the exhaust gas treatment section by the treatment water pump.

  According to this embodiment, the vortex pump (pressure dissolution pump) that generates microbubbles is used immediately before the cleaning water is sent from the cleaning water treatment unit to the exhaust gas treatment unit. In the remaining state, it can be used as washing water containing microbubbles, and the treatment efficiency of exhaust gas can be improved.

  In one embodiment, the exhaust gas is an exhaust gas containing a volatile organic compound.

  According to this embodiment, the exhaust gas containing a volatile organic compound can be used efficiently and efficiently without washing water flowing down. That is, the washing water can be reused in the treatment of volatile organic compounds.

In the exhaust gas treatment apparatus of one embodiment, the first tank and the second tank are connected by two water pipes, an overflow pipe near the water surface of the tank and a communication pipe at the bottom of the tank,
The second tank and the third tank are connected by two water pipes, an overflow pipe near the water surface of the tank and a communication pipe at the bottom of the tank.

  According to this embodiment, since the first to third tanks are connected by two pipes, an overflow pipe near the water surface of the tank and a communication pipe at the bottom of the tank, the washing water that has passed through the communication pipe at the bottom of the water tank is micronized. By introducing it into the bubble generator, it is possible to avoid the clogging phenomenon of the microbubble generator due to suspended substances.

In the exhaust gas treatment apparatus of one embodiment, the washing water treatment unit is
An activated carbon adsorption tower,
A cleaning water is introduced from the activated carbon adsorption tower and a treated water tank in which a COD meter is installed,
The addition amount control unit is
The addition amount is increased when the COD value of the washing water measured by the COD meter exceeds a set value.

  According to this embodiment, the wash water after being treated in the activated carbon adsorption tower can be evaluated with a COD meter and reflected in the amount of nanobubbles generated in the nanobubble production unit.

In the exhaust gas treatment apparatus of one embodiment, the washing water treatment unit includes an activated carbon adsorption tower, and a treated water tank in which washing water is introduced from the activated carbon adsorption tower and a TOC meter and a COD meter are installed. ,
The addition amount control unit is
The addition amount is increased when the TOC value of the cleaning water measured by the TOC meter exceeds a set value and when the COD value of the cleaning water measured by the COD meter exceeds a set value.

  According to this embodiment, the wash water after processing with the activated carbon adsorption tower can be evaluated with the TOC meter and the COD meter, and reflected in the amount of nanobubbles generated in the nanobubble production unit.

Further, in the exhaust gas treatment apparatus of one embodiment, the exhaust gas treatment unit has an upper part where the exhaust gas is introduced, and a lower part where the washing water that washed the exhaust gas is stored,
In the upper part, plastic filler and activated carbon for gas phase are arranged, and in the lower part, activated carbon for liquid phase is arranged.

  According to this embodiment, the upper part of the exhaust gas treatment unit is filled with the plastic filler and the activated carbon for the gas phase, and the lower part is filled with the activated carbon for the liquid phase. The activated carbon and the lower liquid phase activated carbon can be physically and biologically treated, and the quality of the washing water can be improved.

Further, in the exhaust gas treatment method of one embodiment, the exhaust gas introduced into the exhaust gas treatment unit is washed with washing water,
The cleaning water from which the exhaust gas has been cleaned is sequentially introduced into the first to fifth tanks of the nanobubble manufacturing unit, the microbubble generating unit installed in the first tank is made to contain microbubbles and installed in the second tank The microbubble generating part contains micro-nano bubbles in the washing water, the micro-bubble generating part installed in the third tank contains nano bubbles in the washing water, and the fourth tank floats floating substances to which the nano bubbles are attached. The floating substance is separated from the washing water, and in the fifth tank, a potential having a correlation with the bubble content in the washing water is measured with an electrometer.
Further, the washing water containing the nanobubbles from the fifth tank is filtered and introduced into the exhaust gas treatment section.

  According to the exhaust gas treatment method of this embodiment, after the suspended matter is separated by containing nanobubbles in the wash water washed with the exhaust gas and reused again in the exhaust gas treatment unit, the wash water can be saved.

  According to the exhaust gas treatment apparatus of the present invention, the wash water introduced from the exhaust gas treatment unit to the nano bubble production unit is treated using the nano bubbles, and the nano bubbles are attached to the suspended solids in the wash water to form the fourth tank (floating matter separation). Float in the tank) to separate suspended substances from the wash water and improve the quality of the wash water. And since the wash water which improved this water quality is reused again for an exhaust gas treatment part, the performance of an exhaust gas treatment device can be improved and washing water can be saved. In the present invention, three or more water tanks in which microbubble generators are installed are arranged in series, and exhaust gas cleaning water from the exhaust gas treatment unit is sequentially introduced from the first tank to the third tank, and at the same time, The microbubble generator located in Thereby, it turned out that nanobubble containing exhaust gas washing water can be efficiently manufactured in the 3rd tank. That is, microbubbles are manufactured in the first first tank, the microbubbles are introduced into the second tank, and micronanobubbles, which are mixed bubbles of microbubbles and nanobubbles, are manufactured. It is possible to produce exhaust gas cleaning water containing nanobubbles by introducing into a third tank and further shearing. Therefore, according to the present invention, a large amount of nanobubbles can be generated at a low cost. Moreover, since the electrometer installed in the 5th tank measures the electric potential correlated with the bubble content of the introduced washing water, the bubble content of the washing water can be detected.

It is a figure showing typically a 1st embodiment of an exhaust gas treatment device of this invention. It is a figure which shows typically 2nd Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 3rd Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 4th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 5th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 6th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 7th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 8th Embodiment of the waste gas processing apparatus of this invention. It is a figure which shows typically 9th Embodiment of the waste gas processing apparatus of this invention.

  Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

(First embodiment)
FIG. 1 is a diagram schematically showing a first embodiment of an exhaust gas treatment apparatus according to the present invention. That is, this 1st Embodiment is the waste gas processing apparatus 77 which manufactures a nano bubble and processes exhaust gas using the manufactured nano bubble.

  The exhaust gas treatment device 77 is introduced with an exhaust gas treatment unit 76 into which the exhaust gas 1 is introduced, a nanobubble production unit 74 into which wash water from the exhaust gas treatment unit 76 is introduced, and a wash water from the nanobubble production unit 74. And a washing water treatment unit 75 for treating the washing water and introducing it into the exhaust gas treatment unit 76.

  First, the exhaust gas processing unit 76 will be described.

  The exhaust gas 1 is introduced into the exhaust gas processing unit 3 by the exhaust fan 2 through the exhaust duct 52. In FIG. 1, reference numeral 76 also indicates the exhaust gas treatment unit 3, reference numeral 3 indicates the vertical range of the exhaust gas treatment unit in FIG. 1, and reference numeral 76 indicates the horizontal range of the exhaust gas treatment unit in FIG. 1. Show.

  In the first embodiment, as an example, the exhaust gas 1 is an exhaust gas containing a volatile organic compound in a semiconductor factory. Specifically, as a volatile organic compound in a semiconductor factory, isopropyl alcohol is a typical component. Components other than isopropyl alcohol include acetone and butyl acetate.

  The exhaust gas treatment unit 3 is divided in the vertical direction into an upper part 4 filled with a synthetic resin filler 61 with the exhaust fan 2 as a boundary, and a lower part 56 in which wash water after the exhaust gas is washed is temporarily stored. And have.

  As the synthetic resin filler 61, as a specific example in this embodiment, a trade name Teralet S-II type manufactured by Tsukishima Environmental Engineering Co., Ltd. was used. This product terralet is widely used in exhaust gas treatment equipment that uses cleaning water, and (1) has a large effective area because it does not form a dead surface. Small (3) Since the material is a synthetic resin, it has the advantages of being lightweight and resistant to chemical corrosion and mechanical shock.

  The synthetic resin filler 61 is filled on a lower perforated plate 63 installed in the vicinity of the central portion as viewed from the longitudinal direction of the exhaust gas treatment unit 3. The shape of the hole of the lower perforated plate 63 is not limited as long as it has an opening area that allows the entire amount of exhaust gas to pass through efficiently, but a round shape is generally used.

  The exhaust gas 1 is introduced into the upper part 4 of the exhaust gas treatment unit 3 by the exhaust fan 2 and washed with shower water by the wash water 109 sprayed from the water nozzle 60 attached to the wash water pipe 59. These components are transferred to the cleaning water 109 by gas-liquid contact and processed. The synthetic resin filler 61 serves to increase the contact efficiency of the gas-liquid.

  From the viewpoint of the processing efficiency for treating the exhaust gas 1, the point is the quality of the synthetic resin filler 61 and the quality of the cleaning water, and the quality of the cleaning water has the greatest influence on the processing efficiency. That is, the better the quality of the washing water, the more efficiently the components of the exhaust gas 1 can be transferred to the washing water, thereby increasing the treatment efficiency.

  Therefore, in order to reuse the wash water, the performance of the equipment for treating the wash water with water, that is, the performance of the reuse equipment is the most important point.

  In the first embodiment, the component in the exhaust gas 1 is isopropyl alcohol, and the isopropyl alcohol is water-soluble. Therefore, the isopropyl alcohol in the exhaust gas 1 is easily contained in the wash water 109 in the upper portion 4. To be stored in the lower part 56 of the exhaust gas treatment unit 3.

  The isopropyl alcohol washing water (treated water) stored in the lower part 56 of the exhaust gas treatment unit 3 is sucked from the suction pipe 65 and is transferred to the first tank (microbubbles) by the transfer pump 66 via the water pipe 67. Generation tank) 5.

  On the other hand, the gas processed in the exhaust gas processing unit 3 becomes the processing gas 57 and is discharged from the uppermost chimney 58 of the exhaust gas processing unit 3.

  Next, the nanobubble manufacturing unit 74 will be described in detail. After that, the cleaning water treatment unit 75 will be described in detail.

  The nanobubble production unit 74 is roughly divided into a first tank (microbubble generation tank) 5, a second tank (micronanobubble generation tank) 11, a third tank (nanobubble generation tank) 20, and a fourth tank (floating substance separation tank). 48, a fifth tank (measuring tank) 29, a surfactant tank 32, an inorganic salt tank 37, and various pumps.

  Then, the surfactant from the surfactant tank 32 is added to the first tank 5 via the chemical pipe 43 by the first metering pump 33 as necessary. And the inorganic salt from the inorganic salt tank 37 is added to the 1st tank 5 via the chemical | medical agent piping 42 by the 4th metering pump 38 as needed.

  The addition amount of these surfactants and inorganic salts is determined by the amount of microbubbles generated in the first tank 5.

  First, the number of microbubbles as the amount of generated microbubbles can be tested with a Beckman Coulter Co., Ltd. Coulter Counter.

  As a whole of the exhaust gas treatment system by the exhaust gas treatment device 77 of the first embodiment, the surface activity is determined according to the redox potential measured value measured by the redox potential meter attached to the fifth tank 29 which is a measurement tank. The addition amount of the agent and the inorganic salt is controlled, and the amount of nanobubbles that is correlated with the measured value of redox potential is controlled. The oxidation-reduction potentiometer includes the oxidation-reduction potential detector 30 and the oxidation-reduction potential adjuster 62. Moreover, the addition amount of the said surfactant and inorganic salt has a correlation with the nanobubble generation amount. And the addition amount of surfactant and inorganic salt is controlled by the said oxidation-reduction potential measured value.

  Inside the first tank (microbubble generation tank) 5, a submersible pump type microbubble generator 6 constituting the microbubble generator 78 is installed. A small blower 7 is installed outside the first tank 5. That is, the microbubble generator 78 includes the submersible pump type microbubble generator 6, the small blower 7, and the gas pipe 8. The submersible pump type microbubble generator 6 is supplied with air as a gas discharged from the small blower 7 via a gas pipe 8 to generate a bubble water flow 9.

  As described above, a surfactant is added from the surfactant tank 32 to the first tank 5 via the chemical pipe 43 by the first metering pump 33 as necessary. In addition, inorganic salts are added from the inorganic salt tank 37 to the first tank 5 via the chemical piping 42 by the fourth metering pump 38 as necessary.

  The addition amount of these surfactants and inorganic salts has been described above, but when described in more detail from the viewpoint of the system, the oxidation-reduction potential detection unit 30 installed in the fifth tank (measurement tank) 29 described later and the oxidation are described. A signal from the reduction potential controller 62 is received by the sequencer 31, and the discharge amount of the first metering pump 33 and the fourth metering pump 38 is adjusted in cooperation with the signal, and set in the fifth tank (measurement tank) 29. The reduced redox potential is maintained.

  When a large amount of microbubbles, micronanobubbles, and nanobubbles are present, the redox potential value indicates positive millivolts. In the first embodiment, as an example, the set value of the oxidation-reduction potential in the fifth tank (measurement tank) 29 is set to 20 millivolts (mV) or more. That is, the sequencer 31 controls the addition amount of the surfactant and inorganic salts to the first tank 5 so that the value of the oxidation-reduction potential in the fifth tank (measurement tank) is 20 millivolts (mV) or more. The Here, for example, an oxidation-reduction potentiometer is installed in each of the first, second, and third tanks 5, 11, and 20, and a signal from the oxidation-reduction potentiometer is input to the sequencer. By controlling the amount of inorganic salt added, the redox potential in the first tank 5 is set to 5 mV or higher, the redox potential in the second tank 11 is set to 10 mV or higher, and finally the redox potential in the third tank 20 is reached. The potential can also be 20 mV or higher.

  The set value of the oxidation-reduction potential in the fifth tank (measurement tank) 29 can be determined according to the quality and components of raw water that is the treated water. In addition, the amount of microbubbles generated in the first tank (microbubble generation tank) 5 is considerably different without the presence of the surfactant and the inorganic salt, and the amount of microbubbles generated is extremely large when the surfactant and the inorganic salt are present. To increase. In addition, the above-mentioned surfactant is suitable from among cationic products, anionic surfactants, and nonionic surfactants from commercially available products by conducting experiments on the quality of raw water and the amount of bubbles generated, for example. You can choose the right one. Moreover, as said inorganic salt, what is necessary is just to perform an experiment of the quality of raw | natural water and the amount of bubble generation from calcium salt, sodium salt, magnesium salt etc., and what is necessary is just to select an appropriate thing with those data.

  The surfactant tank 32 is provided with a first stirrer 36 for the purpose of stirring the inside of the tank. Similarly, the inorganic salt tank 37 is provided with a second stirrer 41 for the purpose of stirring the inside of the tank. Has been.

  The submersible pump type microbubble generator 6 installed in the first tank (microbubble generating tank) 5 is the same as a general submersible pump, and the air from the small blower 7 is supplied to the impeller portion that rotates at high speed. The air from the small blower 7 is sheared by the impeller rotating at high speed to generate microbubbles. The feature of the submersible pump type microbubble generator 6 is that microbubbles can be injected into the liquid in a 360-degree direction, that is, in the entire circumferential direction of the submersible pump type microbubble generator 6. The amount of air supplied from the small blower 7 to the submersible pump type microbubble generator 6 is 2 to 5 liters / minute. The submersible pump type microbubble generator 6, the small blower 7 and the air pipe 8 are combined to form a microbubble generator 78.

  As described above, when the surfactant and inorganic salts are added to the first tank 5, the water to be treated becomes cloudy like milk, although it varies depending on the addition amount.

  Next, the water to be treated that has flowed out of the first tank 5 due to the overflow (that is, the water to be treated near the surface of the first tank 5) passes through the overflow pipe 10 installed between the first tank 5 and the second tank 11. Then, it flows into the second tank 11. The treated water as the washing water flowing into the second tank (micro / nano bubble generating tank) 11 through the overflow pipe 10 includes scum (floated sludge) that floats floating substances in the treated water. When the isopropyl alcohol in the exhaust gas 1 is transferred to the wash water and circulated in the entire system of the exhaust gas treatment device 77, scum is generated in the wash water even if the concentration of the isopropyl alcohol is 100 ppm or less. When cleaning water with scum generated was used in the exhaust gas treatment unit 3, the exhaust gas treatment capacity was greatly reduced, and the isopropyl alcohol removal rate was 30% or less. Therefore, it is necessary to remove scum (floating sludge) that has floated from the water to be treated as cleaning water.

  Further, between the first tank 5 and the second tank 11, a lower microbubble pipe 50 is installed at the lower part of the tank, and the water to be treated that does not contain floating substances flows into the second tank 11. A large amount of micro / nano bubbles can be generated by flowing water to be treated that does not contain floating substances into the suction pipe 14 of the micro / nano bubble generator 79 installed in the second tank 11. On the other hand, when the to-be-processed water containing the floating substance, ie, scum, in the upper part of the first tank 5 flows into the micro / nano bubble generator 79, the micro / nano bubble generator 13 is blocked and the performance deteriorates.

  As described above, the micro / nano bubble generation device 79 is installed in the second tank (micro / nano bubble generation tank) 11 which is a micro / nano bubble generation tank. The micro-nano bubble generator 79 in the second tank 11 includes a circulation pump 15, a micro-nano bubble generator 13 as a component, a suction pipe 14, an air pipe 16, an air needle valve 17, and a water pipe 18. appear. In addition, a surfactant from the surfactant tank 32 is added to the second tank (micro / nano bubble generation tank) 11 by a second metering pump 34 via a chemical pipe 44 as required. In addition, inorganic salts from the inorganic salt tank 37 are added to the second tank 11 by the fifth metering pump 39 via the chemical piping 46 as necessary.

  The addition amount of the surfactant and the inorganic salt is described from the overall viewpoint in the water treatment apparatus, and the oxidation-reduction potential detector 30 and the oxidation-reduction potential installed in the fifth tank (measurement tank) 29 described later. The sequencer 31 receives a signal from the controller 62 (two redox potentiometers together). The sequencer 31 adjusts the discharge amounts of the second metering pump 34 and the fifth metering pump 39. As described above, the action of the surfactant and the inorganic salt is an additive that dramatically increases the amount of micro-nano bubbles generated by the micro-nano bubble generator 79. The amount of micro / nano bubbles generated varies considerably with and without the addition of a surfactant and an inorganic salt, and the amount of generation increases drastically when added.

  Next, the to-be-processed water which flowed out from the 2nd tank 11 by the overflow flows into the 3rd tank (nanobubble generation tank) 20 through the overflow piping 19. FIG. A nanobubble generator 80 is installed in the third tank 20. The nanobubble generator 80 in the third tank 20 includes a circulation pump 24, a nanobubble generator 22 as a component, a suction pipe 23, an air pipe 25, an air needle valve 26, and a water pipe 27, and generates a bubble water flow 21. . In addition, the surfactant from the surfactant tank 32 is added to the third tank (nano bubble generation tank) 20 by the third metering pump 35 via the chemical pipe 45 as required. In addition, inorganic salts from the inorganic salt tank 37 are added to the third tank 20 by the sixth metering pump 40 via the chemical piping 47 as necessary.

  The addition amount of the surfactant and the inorganic salt is described from the viewpoint of the apparatus, and the oxidation-reduction potential detector 30 and the oxidation-reduction potential controller 62 installed in the fifth tank (measurement tank) described above (the two are combined). The sequencer 31 receives the signal from the oxidation-reduction potentiometer), and the discharge amounts of the third metering pump 35 and the sixth metering pump 40 are adjusted. As described above, the action of the surfactant and the inorganic salt is an action as an additive that dramatically increases the amount of nanobubbles generated by the nanobubble generator 80. The amount of nanobubbles generated varies considerably with and without the addition of a surfactant and inorganic salts. That is, if the above addition is present, the amount of nanobubbles generated increases extremely.

  In addition, between the 2nd tank 11 and the 3rd tank 20, the lower microbubble piping 51 is installed in the lower part of a tank, and the to-be-processed water which does not contain a floating substance flows in into the 3rd tank 20. FIG. A large amount of nanobubbles can be generated by allowing the water to be treated not containing floating substances to flow into the suction pipe 23 of the nanobubble generator 80 installed in the third tank 20.

  Next, the to-be-processed water which flowed out from the 3rd tank (nano bubble generation tank) 20 flows in into the 4th tank (floating matter separation tank) 48 via the overflow piping 28. FIG. The fourth tank 48 is a floating substance separation tank. The microbubbles in the first tank (microbubble generating tank) 5, the micro-nano bubbles in the second tank 11, and the nanobubbles in the third tank 20 adhere to the suspended matter in the water to be treated, so that the first tank to the third tank. Suspended matter floats and is separated in up to 20 aquariums. Then, when the floating substance flows into the fourth tank (floating substance separation tank) 48, it accumulates on the portion of the water surface 49 of the fourth tank 48 and is discharged out of the system from the high concentration floating substance drainage pipe 53.

  On the other hand, in the fourth tank 48, the water to be treated as washing water from which floating substances floated and separated is connected to the lower tank connecting the fourth tank 48 and the fifth tank (measurement tank) 29. It passes through the pipe 54 and flows into the fifth tank 29. As described above, the fifth tank 29 is provided with the oxidation-reduction potential detection unit 30 for measuring the oxidation-reduction potential in water. This oxidation-reduction potential detection unit 30 is a detection unit for measuring the oxidation power of nanobubbles, and the amount of nanobubbles and the oxidation-reduction potential are correlated.

  Here, the oxidation-reduction potentiometer constituted by the oxidation-reduction potential detector 30 and the oxidation-reduction potential controller 62, the first metering pump 33, the second metering pump 34, the third metering pump 35, the fourth metering pump 38, the first metering pump 38, and the like. The 5 metering pump 39 and the sixth metering pump 40 are connected to the sequencer 31 by a signal line 55. The sequencer 31 controls the signal line 55 to control the first to sixth metering pumps 33, 34, 35, 38, 39, 40 based on the signal input from the oxidation-reduction potentiometer. Is output. Thereby, the addition amount of the surfactant and the inorganic salt from the surfactant tank 32 and the inorganic salt tank 37 to the first, second and third tanks 5, 11 and 20 is measured in the fifth tank 29 which is a measurement tank. The metering pumps 33, 34, 35, 38, 39, 40 are operated in cooperation so that the set oxidation-reduction potential can be secured. By this operation, the set oxidation-reduction potential is secured in the water to be treated as the washing water in the fifth tank 29 constituting the water treatment apparatus.

  In the fifth tank (measurement tank) 29, the water to be treated as cleaning water has a redox potential, but the components dissolved in the water to be treated are not sufficiently treated. That is, this water to be treated is in a state where the TOC (total organic carbon) item, which is an indicator of water quality, is not sufficiently treated, and is further treated in the washing water treatment section 75 in the next stage.

  Nanobubbles have an oxidizing power for substances. Since nanobubbles have an oxidizing power for substances, the oxidation-reduction potential is measured in plus millivolts, but varies depending on the type of liquid, the dissolved components in bath water, the number of nanobubbles, and the density of nanobubbles.

  Then, a measurement value related to the oxidation-reduction potential by the oxidation-reduction potential detector 30 in the fifth tank (measurement tank) 29 is received and adjusted by the oxidation-reduction potential adjuster 62, and a signal is sent to the sequencer 31. Thus, the discharge amount of each metering pump 33, 34, 35, 38, 39, 40 is controlled. That is, the discharge flow rate of the metering pumps 33, 34, 35, 38, 39, 40 is adjusted and controlled by the redox potential detector 30, the redox potential controller 62, and the sequencer 31.

  In the first embodiment, the redox potential of the water to be treated in the fifth tank 29 is operated in the range of, for example, + (plus) 20 mV to +40 mV. As a general matter, a denitrification tank (that is, a reduction tank) for wastewater treatment is a reduction tank for oxidation. Therefore, the oxidation-reduction potential is often in the range of −50 mV to −400 mV at minus millivolts.

  In addition, although it does not specifically limit as a maker of the oxidation-reduction potential detection part 30 and the oxidation-reduction potential regulator 62, In this 1st Embodiment, the product of Toa DKK Corporation was employ | adopted.

  Here, for the sake of organization, the first tank (microbubble generating tank) 5, the second tank (micronanobubble generating tank) 11, the third tank (nanobubble generating tank) 20, the fourth constituting the nanobubble manufacturing unit 74. The roles of the tank (floating substance separation tank) 48 and the fifth tank (measurement tank) 29 are summarized as follows.

(1) First tank (microbubble generation tank) 5: A tank for generating a large amount of microbubbles in water to be treated by adding a microbubble generator 78 and adding a surfactant and inorganic salts.
(2) Second tank (micro / nano bubble generating tank) 11: A tank for generating a large amount of micro / nano bubbles in the water to be treated by adding the micro / nano bubble generating device 79 and the addition of a surfactant and inorganic salts.
(Remarks) The micro-nano bubble generating device 79 is a micro bubble generating device when expressed accurately as a single device. However, the water to be treated containing microbubbles formed in the first tank (microbubble generation tank) 5 flows into the second tank 11 from the lower microbubble pipe 50. Therefore, in the 2nd tank 11, the mixture (micro nano bubble) of a micro bubble and a nano bubble generate | occur | produces by shearing the to-be-processed water containing a micro bubble with the micro nano bubble generator (micro bubble generator) 79 further. And by adding a surfactant and inorganic salts to the second tank 11, a mixture of microbubbles and nanobubbles, that is, micronanobubbles are generated in large quantities.

   (3) Third tank (nanobubble generating tank) 20: The nanobubble generating device 80 is a microbubble generating device when expressed accurately as a single device. However, the water to be treated containing micro / nano bubbles formed in the second tank 11 flows into the third tank 20 from the lower micro / nano bubble pipe 51. Therefore, the water to be treated containing the micro / nano bubbles is further sheared by the nano bubble generator (micro bubble generator) 80, thereby generating a mixture (nano bubbles or the like) with the micro bubbles centered on the nano bubbles. Furthermore, by adding a surfactant and inorganic salts to the third tank 20, a large amount of microbubbles, mainly nanobubbles, mainly nanobubbles is generated in the water to be treated (washing water).

   (4) Fourth tank (floating matter separation tank) 48: In the first tank 5 to the third tank 20, the aggregate of floating substances that have floated due to various bubbles adhering is physically stored in the fourth water tank 48. The suspended matter aggregate is separated into the water to be treated and the suspended matter aggregate is discharged from the high concentration suspended matter drainage pipe 53.

   (5) Fifth tank (measuring tank) 29: Generated from first tank (microbubble generating tank) 5 to third tank (nanobubble generating tank) 20 and passed through fourth tank (floating substance separation tank) 48. It is a tank for measuring the amount of nanobubbles in treated water (washing water) based on the oxidation-reduction potential of nanobubbles. When the amount of nanobubbles in the wash water is insufficient, that is, when the oxidation-reduction potential is lower than the set value, a first signal is output from the surfactant tank 32 and the inorganic salt tank 37 by a signal output from the sequencer 31 to the signal line 55. The amount of nanobubbles can be increased so that the redox potential becomes a set value by adding a surfactant and inorganic salts to the third tank. In addition, each addition amount of surfactant and inorganic salt, or individual addition amount becomes a value according to the conditions peculiar to each to-be-processed water. Moreover, the addition amount to each to-be-processed water of surfactant and inorganic salt is the content which can be confirmed by a prior experiment.

  Next, the mechanism of the microbubble generator 78, the micro / nano bubble generator 79, and the nanobubble generator 80 in the first tank 5, the second tank 11, and the third tank 20 will be described in detail. The microbubble generator 78, the micro / nano bubble generator 79, and the nanobubble generator 80 are precisely microbubble generators when the performance of the device is used alone.

  Compared with the micro / nano bubble generation device 79 and the nano bubble generation device 80, the micro bubble generation device 78 uses a larger amount of air at 2 to 5 liters / minute and has a larger bubble size. On the other hand, the amount of air used by the micro / nano bubble generating device 79 and the nano bubble generating device 80 is as small as 1 liter / min, and the bubble size is also smaller than that of the micro bubble generating device 78.

  The nanobubble production unit 74 is finally intended to produce nanobubble-containing treated water. Therefore, even if the bubble size generated by the microbubble generator 78 installed in the first first tank 5 is large, the purpose can be achieved if the third tank 20 can produce cleaning water containing nanobubbles. Therefore, in this nanobubble manufacturing unit 74, the three-stage shearing by the first tank 5, the second tank 11, and the third tank 20 through the first, second, and third tanks 5, 11, and 20, respectively. So make nanobubbles.

  Then, by introducing the water to be treated containing bubbles in the first tank 5, the second tank 11, and the third tank 20 into the circulation pumps 15 and 24 and the bubble generators 13 and 22, micro bubbles, micro nano bubbles, And nanobubbles will be formed. In addition, in this embodiment, although the 1st-3rd 3 tanks in which the microbubble generator was installed were arrange | positioned in series, 4 or more tanks in which the microbubble generator was installed were arranged in series, and each The microbubble generator may be operated.

  Next, the mechanism of the microbubble generator 78, the micro / nanobubble generator 79, and the nanobubble generator 80 will be described.

  The microbubble generator 78 includes a submersible pump type microbubble generator 6, a small blower 7, and an air pipe 8. If it says easily, the impeller in a submersible pump will be rotated at high speed, the air as gas will be supplied to the part from a small blower, and air will be sheared, and the micro bubble will be generated.

  On the other hand, the micro / nano bubble generator 79 and the nano bubble generator 80 have exactly the same structure and configuration. However, the micro-nano bubble generating device 79 sucks in the water to be treated containing micro bubbles, and the nano bubble generating device 80 is different in that it sucks in the water to be treated containing micro-nano bubbles. The micro / nano bubble generator 79 includes a micro / nano bubble generator 13, a suction pipe 14, a circulation pump 15, an air pipe 16, an air needle valve 17, and a water pipe 18. The nanobubble generator 80 includes a nanobubble generator 22, a suction pipe 23, a circulation pump 24, an air pipe 25, an air needle valve 26, and a water pipe 27.

  Then, in the micro / nano bubble generator 13 and the nano bubble generator 22, the pressure is controlled hydrodynamically, air is sucked from the negative pressure forming portion, and the fluid is moved at high speed to form the negative pressure portion, thereby generating bubbles. . To make it easier and easier to understand, micro-nano bubbles and nano-bubbles can be manufactured by effectively self-sufficiency, mixing, dissolving and pumping water and air.

Further details will be described. The circulation pumps 15 and 24 used in the micro / nano bubble generating device 79 and the nano bubble generating device 80 are pumps having a high head with a head of 15 m or more (that is, a high pressure of 1.5 kg / cm ² ). That is, in this embodiment, the circulation pumps 15 and 24 are high-lift pumps and it is desirable to select a two-pole pump with stable torque, but this is not an absolute condition. There are 2 poles and 4 poles in the pump, and the torque of the 2 pole pump is stable. The circulation pumps 15 and 24 are preferably pressure controlled. It is also possible to set the rotational speed of the high-lift pump to a desired pressure with a rotational speed controller (generally called an inverter). If the circulation pumps 15 and 24 are set to pressures suitable for the purpose, bubbles with a combined bubble size can be manufactured. Here, the mechanism of bubble generation by the bubble generators 13 and 22 connected to the circulation pumps 15 and 24 will be described.

  In order to generate the respective bubbles in the micro / nano bubble generator 13 and the nano bubble generator 22, a mixed phase swirl of liquid and gas is generated, and a gas cavity that is swirled at a high speed is formed in the center of the generator. Next, the hollow portion is thinned into a tornado shape with pressure to generate a rotating shear flow that swirls at a higher speed. Air (gas, ozone, carbon dioxide, nitrogen gas, oxygen gas in some cases) as a gas is automatically supplied to the cavity using a negative pressure (negative pressure). In this embodiment, the gas is simply air, but other gases may be selected depending on the purpose.

  Further, the multiphase flow is rotated while cutting and crushing the rotating shear flow. This cutting and crushing occurs due to the difference in the swirling speed of the gas-liquid two-phase fluid inside and outside near the generator outlet. The rotation speed at that time is 500 to 600 rotations / second. That is, in the micro / nano bubble generator 13 and the nano bubble generator 22, the pressure is hydrodynamically controlled so that gas is sucked from the negative pressure forming portion, and the high pressure pump is used to move the fluid at high speed to form the negative pressure portion. Then, micro-nano bubbles and nano bubbles are generated. To make it easier to understand, it is possible to produce micro-nano bubbles and nano bubbles by effectively self-mixing, dissolving, and pumping water and air with a high head pump. The above is the bubble generation mechanism of the micro / nano bubble generator 79 and the nano bubble generator 80.

  Next, the action of the surfactant and inorganic salts will be described. As described above, the addition of surfactants and inorganic salts has the effect of increasing the amount of bubbles generated.

   (1) Surfactant: For example, an aqueous solution of a detergent containing a surfactant foams well. This phenomenon is because the interfacial tension (also referred to as surface tension) between air and water decreases. For this reason, the interfacial tension is lowered and bubbles are formed. As a result, when a surfactant is added, a large amount of nanobubbles (microbubbles) can be generated. That is, when water and air come into contact with each other, interfacial tension, which is a force that reduces the area of the two-phase interface as much as possible, works. This action of reducing the interfacial tension is called surface activity, and a substance having a remarkable effect in a small amount is called a surfactant.

   (2) Inorganic salts: For example, foaming at the coast in the sea can be observed better than foaming at a freshwater waterfall. In particular, foaming on the coast of the Sea of Japan in winter is widely known. That is, foaming occurs more often in seawater containing a large amount of inorganic salts. Therefore, when inorganic salts are added as a result, the properties of the liquid become an electrolyte, which is a favorable condition for the generation of bubbles, and a large amount of nanobubbles (microbubbles) can be generated. In this embodiment, the microbubble generator 78 employs a micro bubbler MB-400 manufactured by Nomura Electronics Co., Ltd. as a specific example. Further, the bubble generators 13 and 22 in the nanobubble generator 79 and the nanobubble generator 80 employ a microbubble generator M2 type, which is a product of Nano Planet Research Laboratories.

  Here, three types of bubbles will be described.

   (i) A microbubble is a bubble having a bubble diameter of 10 to several tens of μm at the time of generation, and the microbubble is changed into a micro / nano bubble by contraction movement after the generation.

   (ii) Micro-nano bubbles are bubbles having a diameter of about 10 μm to several hundreds of nm, and can be said to be a mixture of micro-bubbles and nano-bubbles.

   (iii) Nano bubbles are bubbles having a diameter of several hundred nm or less.

  Next, the cleaning water treatment unit 75 will be described. The washing water treatment unit 75 is mainly composed of an activated carbon adsorption tower 72 and a treatment water tank 82. Water to be treated as washing water is sucked into the activated carbon adsorption tower transfer pump 69 from the fifth tank 29 through the suction pipe 68 and introduced into the activated carbon adsorption tower 72 via the water pipe 71. As the activated carbon incorporated in the activated carbon adsorption tower 72, activated carbon manufactured by Kuraray Chemical Co., Ltd., and activated carbon KW for a liquid phase having a trade name of Kuraray Coal were used. This liquid-phase activated carbon KW is a coal-based activated carbon and is used for water treatment and wastewater treatment. Activated carbon originally has the main effect of physical adsorption of organic matter in the water to be treated, but if the cleaning water that is the water to be treated contains nanobubbles, microorganisms that have propagated on the activated carbon cannot be considered in the prior art. It is activated to the extent that it decomposes isopropyl alcohol, which is an organic substance in the wash water that is the water to be treated, and isopropyl alcohol adsorbed by activated carbon. When the isopropyl alcohol concentration in the wash water is a double-digit concentration of 100 ppm or less, the isopropyl alcohol is reliably treated by the activated carbon adsorption tower 72.

Incidentally, water flow rate in the activated carbon adsorption column 72 at this time, the activated carbon weight 1 m ³ per was passed through a wash water per 1 m ³ times. This water flow rate is a common value in the field of water treatment, but when the isopropyl alcohol concentration in the wash water is a double-digit concentration of 100 ppm or less, isopropyl alcohol (IPA) is absorbed by the activated carbon adsorption tower 72. It is surprising that it can be processed reliably. Normally, in the water treatment field, water to be treated of one digit ppm of IPA or at most 20 ppm is passed, and activated carbon is replaced after a certain time, for example, every three months. In this first embodiment, The life of activated carbon can be continuously maintained for 1.5 years or more.

  Then, the wash water as the water to be treated that has exited the activated carbon adsorption tower 72 flows into the treated water tank 82 through the water pipe 81. In this treated water tank 82, a TOC detector 83 is installed, and when the TOC concentration of the cleaning water is higher than the set value, the amount of nanobubbles is insufficient. At this time, the adjustment signal output from the TOC controller 84 is received by the sequencer 31 through the signal line 88, and the sequencer 31 outputs a control signal to the signal line 55 in accordance with the adjustment signal, and the addition of a surfactant or inorganic salt is performed. Increase the amount. Thereby, the amount of generated nanobubbles is increased to control the TOC concentration of the cleaning water to be equal to or lower than the set value. The oxidation-reduction potential controller 62 and the TOC controller 84 are provided to adjust the oxidation-reduction potential and TOC concentration of the washing water. The sequencer 31 cooperates with the oxidation-reduction potential and TOC concentration. Adjust the addition amount of surfactants and inorganic salts. The sequencer 31 finally secures the set oxidation-reduction potential value, and the first to third metering pumps 33 to 35, fourth to fourth so as to be equal to or lower than the set TOC concentration. 6 The metering pumps 38 to 40 will be controlled. The operation of the first stirrer 36 and the second stirrer 41 may be controlled by a control signal output from the sequencer 31 to the signal line 55.

  The wash water in the treated water tank 82 is sent from the suction pipe 85 to the wash water pipe 59 in the upper part 4 of the exhaust gas treatment unit 76 via the water pipe 87 by the treated water tank pump 86. Water is sprayed from 60 as washing water 109.

  The washing water treatment unit 75 may include a microfiltration membrane device and a reverse osmosis membrane device in order after the activated carbon adsorption tower 72. In this case, the dissolved components in the wash water are treated with the activated carbon adsorption tower 72, the microfiltration membrane device, and the reverse osmosis membrane device to highly improve the quality of the wash water and improve the performance of exhaust gas treatment in the exhaust gas treatment section. Can be made.

  Further, the washing water treatment unit 75 may have a treated water pump installed in the treated water tank 82. This treated water pump is a pressure dissolution pump that self-sucks air to generate microbubbles, and the washed water is returned to the exhaust gas treatment unit by the treated water pump. In this case, a vortex pump (pressure dissolution pump) that generates microbubbles is used immediately before the cleaning water is sent from the cleaning water treatment unit 75 to the exhaust gas processing unit 76, and therefore the microbubbles are sufficiently contained in the cleaning water. In the remaining state, it can be used as washing water containing microbubbles, and the treatment efficiency of exhaust gas can be improved.

  The treated water tank 82 has a COD meter instead of the TOC meter, and the surfactant tank 32 is controlled by the sequencer 31 when the COD value of the cleaning water measured by the COD meter exceeds a set value. Alternatively, the amount of the surfactant or inorganic salt added from the inorganic salt tank 37 may be increased. In addition to the TOC meter, the COD meter may be provided.

(Second embodiment)
Next, FIG. 2 shows a second embodiment of the exhaust gas treatment apparatus of the present invention. This second embodiment does not have the inorganic salt tank 37, the fourth metering pump 38, the fifth metering pump 39, and the sixth metering pump 40 that the exhaust gas treatment apparatus of the first embodiment has. Only the first embodiment is different. Therefore, in the second embodiment, the same parts as those of the first embodiment described above are denoted by the same reference numerals, detailed description thereof will be omitted, and parts different from those of the first embodiment will be described.

  In the first embodiment described above, the inorganic salt tank 37, the fourth metering pump 38, the fifth metering pump 39, and the sixth metering pump 40 are installed. However, depending on the quality of the cleaning water as the water to be treated, these facilities are not necessary, and there is sufficient washing water as the water to be treated even with the surfactant alone in order to increase the amount of generated bubbles.

  In short, the purpose of the exhaust gas treatment device 77 is to set the value of the oxidation-reduction potential due to nanobubbles in the fifth tank 29 and the value of the TOC concentration in the treated water tank 82 to the set values. Therefore, the second embodiment is suitable when the target set value of the oxidation-reduction potential is low or when the TOC concentration is low. More specifically, when the set value of the oxidation-reduction potential in the fifth tank 29 and the TOC concentration in the treated water tank 82 can be easily satisfied with the addition of the surfactant, nanobubbles are easily generated in the nanobubble production unit 74. In addition, the second embodiment is suitable when cleaning water is selected as the water to be treated so that the set value of the TOC concentration in the treated water tank 82 can be easily secured.

(Third embodiment)
Next, FIG. 3 shows a third embodiment of the exhaust gas treatment apparatus of the present invention. This third embodiment is not provided with the surfactant tank 32, the first metering pump 33, the second metering pump 34, and the third metering pump 35 that the first embodiment has, Different from the first embodiment described above. Therefore, in the third embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and parts different from those in the first embodiment will be described.

  In the first embodiment described above, the surfactant tank 32, the first metering pump 33, the second metering pump 34, and the third metering pump 35 are installed. However, depending on the quality of the water to be treated, these facilities are not necessary, and there is sufficient water to be treated even with inorganic salts alone in order to increase the amount of bubble generation.

  In short, the purpose of the exhaust gas treatment device 77 is to set the value of the oxidation-reduction potential due to nanobubbles in the fifth tank 29 and the value of the TOC concentration in the treated water tank 82 to the set values. Therefore, the third embodiment is suitable when the target set value of the oxidation-reduction potential is low or when the TOC concentration is low. More specifically, when the oxidation reduction potential in the fifth tank 29 and the set value of the TOC concentration in the treated water tank 82 can be easily satisfied only by adding inorganic salts, nanobubbles are likely to be generated in the nanobubble production unit 74. In addition, the third embodiment is suitable when the cleaning water is selected as the water to be treated so that the set value of the TOC concentration in the treated water tank 82 can be easily secured.

(Fourth embodiment)
Next, FIG. 4 shows a fourth embodiment of the exhaust gas treatment apparatus of the present invention. In the fourth embodiment, a zeta potential detector 90 and a zeta potential adjuster 70 are installed as an alternative to the redox potential detector 30 and the redox potential adjuster 62 that the first embodiment has. Only the difference is from the first embodiment described above. Therefore, in the fourth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and parts different from those in the first embodiment will be described.

  The zeta potential is generally defined as “the potential on the sliding surface of the electric double layer formed by the surface potential”. Since the generation amount of nanobubbles and the zeta potential have a correlation, this zeta potential can be used as a means for managing the nanobubble amount, similarly to the oxidation-reduction potential.

  The set value of the zeta potential having a correlation with the generation amount of nanobubbles varies depending on the type of water to be treated, but is in the range of −30 mV to −70 mV, for example.

  The manufacturers of the zeta potential detector 90 and the zeta potential controller 70 are not particularly limited. In this embodiment, as an example, the zeta potential detector 90 and the zeta potential in the zeta potential measuring device DT type of Nippon Luft Co., Ltd. Controller 70 was selected.

(Fifth embodiment)
Next, FIG. 5 shows a fifth embodiment of the exhaust gas treatment apparatus of the present invention. The fifth embodiment includes a microbubble generator 92, a circulation pump 94 and the like instead of the microbubble generator 78 including the submersible pump type microbubble generator 6 and the like in the first embodiment. The only difference from the first embodiment is that the microbubble generator 78Z is provided. Therefore, in the fifth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, description thereof is omitted, and parts different from those in the first embodiment are described.

  In the fifth embodiment, the microbubble generator 78Z is installed in the first tank (microbubble generating tank) 5. The microbubble generator 78Z is composed of a microbubble generator 92, a circulation pump 94, and the like, a suction pipe 93 is connected to the circulation pump 94, and a water pipe 97 from the circulation pump 94 is connected to the microbubble generator 92. ing. In addition, a gas pipe 95 for supplying air to the microbubble generator 92 is connected, and a gas needle valve 96 is connected to the gas pipe 95.

  In this 5th Embodiment, since the said microbubble generator 78Z is installed in the 1st tank 5, in the 1st tank 5, it is finer than the submersible pump type microbubble generator 6 in the above-mentioned 1st Embodiment ( That is, microbubbles having a small size can be generated. Finally, the size of the nanobubbles in the fifth tank (measurement tank) 29 can be further reduced. As a result, the nanobubbles having a smaller size can improve the effects of free radical-induced oxidizing power and microbial activation.

(Sixth embodiment)
Next, FIG. 6 shows a sixth embodiment of the exhaust gas treatment apparatus of the present invention. The sixth embodiment is different from the first embodiment only in that the exhaust gas introduced into the exhaust gas treatment unit 3 by the exhaust fan 2 is a volatile organic compound (VOC) -containing exhaust gas 99. Therefore, in the sixth embodiment, the same parts as those in the first embodiment described above are denoted by the same reference numerals and detailed description thereof will be omitted, and parts different from those in the first embodiment will be described.

  In the first embodiment described above, the gas to be introduced into the exhaust gas treatment unit 3 by the exhaust fan 2 is simply the exhaust gas 1, but in this sixth embodiment, the exhaust gas 1 is converted into a volatile organic compound (VOC) -containing exhaust gas 99. The exhaust gas treatment unit 3 is introduced in a limited manner.

  Therefore, in the sixth embodiment, first, in the exhaust gas treatment unit 3, the volatile organic compound in the volatile organic compound (VOC) -containing exhaust gas 99 is transferred to the washing water. Subsequently, in the nanobubble manufacturing unit 74, suspended substances in the washing water can be removed, and the nanobubbles can be contained in the washing water as the water to be treated, and the washing water treatment unit 75 can wash the water as the water to be treated. A volatile organic compound component in water can be decomposed.

  As a result, the cleaning water processed by the cleaning water processing unit 75 can be reintroduced into the exhaust gas processing unit 3, and the processed cleaning water can be reused without reducing the performance of the exhaust gas processing unit 3.

(Seventh embodiment)
Next, FIG. 7 shows a seventh embodiment of the exhaust gas treatment apparatus of the present invention. This seventh embodiment differs from the above-described sixth embodiment only in the following points (1) and (2).

   (1) Gas phase activated carbon 98 housed in an activated carbon bag 89 is additionally filled above the synthetic resin filler 61 disposed in the upper part 4 of the exhaust gas treatment unit 3, and the gas phase activated carbon 98 is A point placed on the upper perforated plate 100.

   (2) The liquid phase activated carbon 103 filled in the perforated container 102 is disposed in the liquid phase of the lower portion 56 of the exhaust gas treatment unit 3.

  Therefore, in the seventh embodiment, the same parts as those in the above-described sixth embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and parts different from those in the above-described sixth embodiment will be described.

  In the seventh embodiment, Kuraray Coal GS manufactured by Kuraray Chemical Co., Ltd. is selected as a specific example of the activated carbon 98 for gas phase. In the seventh embodiment, Kuraray Coal KW manufactured by Kuraray Chemical Co., Ltd. is selected as the liquid-phase activated carbon 103 as a specific example.

  In the seventh embodiment, not only the synthetic resin filler 61 is disposed in the upper part 4 of the exhaust gas treatment unit 3 but also the activated carbon for gas phase contained in the activated carbon bag 89 above the synthetic resin filler 61. 98 is additionally filled. Therefore, in the seventh embodiment, the components in the exhaust gas can be adsorbed with the activated carbon 98 for gas phase. In addition, microorganisms propagate on the vapor-phase activated carbon 98 with the passage of time, and the microorganisms are activated by the nanobubbles in the washing water, and the components in the exhaust gas adsorbed by the vapor-phase activated carbon 98 are decomposed. As a result, the activated carbon 98 for gas phase is repeatedly adsorbed and regenerated, eliminating the need for replacement.

  On the other hand, also in the lower part 56 of the exhaust gas treatment unit 3, in the seventh embodiment, the liquid phase activated carbon 103 filled in the perforated container 102 in the liquid phase is disposed. Accordingly, also in the lower part 56 of the exhaust gas treatment unit 3, microorganisms propagate on the liquid phase activated carbon 103 with the passage of time, and the microorganisms are activated by the nanobubbles in the washing water, and the liquid phase activated carbon 103 is adsorbed in the exhaust gas. The components will be decomposed.

  Thus, according to the seventh embodiment, in the exhaust gas treatment unit 3, the action of both the upper-phase gas phase activated carbon 98 and the lower-phase liquid phase activated carbon 103 is compared with that of the sixth embodiment described above. Thus, the quality of the washing water as the water to be treated is improved when it flows out from the lower part 56 of the exhaust gas treatment unit 3.

(Eighth embodiment)
Next, FIG. 8 shows an eighth embodiment of the exhaust gas treatment apparatus of the present invention. The eighth embodiment is different from the sixth embodiment described above only in that a quick filtration tower 101 connected by water pipes 71 and 111 is provided between the activated carbon adsorption tower transfer pump 69 and the activated carbon adsorption tower 72. ing. That is, the eighth embodiment is different from the aforementioned sixth embodiment in that the washing water treatment unit 75 includes not only the activated carbon adsorption tower 72 and the treated water tank 82 but also the rapid filtration tower 101. Therefore, in the eighth embodiment, the same portions as those in the above-described sixth embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and portions different from those in the above-described sixth embodiment will be described.

  In the eighth embodiment, not only the activated carbon adsorption tower 72 and the treated water tank 82 included in the washing water treatment unit 75 in the sixth embodiment described above, but also a rapid filtration tower 101 is provided. That is, the rapid filtration tower 101 installed in the front stage of the activated carbon adsorption tower 72 is more reliable than removing floating substances in the wash water as the water to be treated in the fourth tank 48 which is a floating substance separation tank. After removal, washing water as treated water can be introduced into the activated carbon adsorption tower 72. As a result, the quality of the treated water leaving the activated carbon adsorption tower 72 is improved as compared with the sixth embodiment.

  In addition, you may have a contact oxidation tank in the front | former stage of the said rapid filtration tower 101. FIG. In this case, when the concentration of dissolved organic matter in the washing water is high, the dissolved organic matter can be treated microbiologically and economically in the contact oxidation tank. The residual suspended solids can be filtered by the rapid filtration tower 101, and the remaining dissolved organic matter can be filtered by the activated carbon of the activated carbon adsorption tower 72.

(Ninth embodiment)
Next, FIG. 9 shows a ninth embodiment of the exhaust gas treatment apparatus of the present invention. The ninth embodiment differs from the sixth embodiment only in that a microbubble generator 78W is installed in the first tank 5 in place of the microbubble generator 78. Therefore, in the ninth embodiment, the same portions as those in the above-described sixth embodiment are denoted by the same reference numerals, detailed description thereof will be omitted, and portions different from those in the above-described sixth embodiment will be described.

  In the above-described sixth embodiment, the microbubble generator 78 installed in the first tank 5 has the submersible pump type microbubble generator 6, but in the ninth embodiment, A microbubble generator 78W is installed, and the microbubble generator 78W includes a vortex pump 105 and piping related to the vortex pump 105. A suction pipe 104, a discharge pipe 106 and an air pipe 108 are connected to the vortex pump 105, and a needle valve 107 is attached to the air pipe 108.

  The performance difference between the ninth embodiment and the above-described sixth embodiment corresponds to the performance difference between the vortex pump 105 and the submersible pump type microbubble generator 6. In the ninth embodiment, as a specific example of the vortex pump 105, a vortex pump NPD type manufactured by Nikuni Co., Ltd. is employed. This vortex pump 105 is a pump capable of producing microbubbles by sucking both air and water, but since it is mass-produced, the price is slightly higher than the submersible pump type microbubble generator 6. .

  The vortex pump 105 generally has a high head, and the maximum head of the vortex pump NPD type of Nikuni Co., Ltd. is 60 m. The principle of generating microbubbles is to suck water and air into the pump casing, rotate the impeller with radial grooves on the outer periphery to generate vortices along the inner wall of the pump casing, and repeatedly pressurize the microbubbles. It is a content that generates a bubble. For this reason, the submersible pump type microbubble generator 6 does not pressurize but simply mixes water and air and generates microbubbles by high-speed stirring, whereas the vortex pump 105 pressurizes water and air to generate microbubbles. A bubble is generated. That is, the vortex pump 105 can generate microbubbles finer than the submersible pump type microbubble generator 6 by pressurization.

  Therefore, according to the ninth embodiment, finer microbubbles are generated in the first water tank (microbubble generating tank) 5, and as a result, the nanobubble manufacturing unit 74 can manufacture a large amount of nanobubbles. This can improve the overall performance of the exhaust gas treatment device 77.

  The situation around the vortex pump 105 in the first water tank (microbubble generation tank) 5 of the ninth embodiment will be described. Wash water as the water to be treated in the first water tank 5 is sucked into the vortex pump 105 through the suction pipe 104. Air is sucked from the air pipe 108 and the amount of air is accurately controlled by the needle valve 107 and sucked into the vortex pump 105. In this vortex pump 105, washing water and air are pressurized, mixed and stirred at a high speed to generate micro bubbles, and the micro bubbles are discharged from the discharge pipe 106.

  In addition to the first tank 5, each of the second and third tanks may have a vortex pump for generating microbubbles by sucking air instead of the circulation pumps 15 and 24. In this case, since a total of three vortex pumps (pressure dissolution pumps) are installed, nanobubbles can be produced economically with a vortex pump (pressure dissolution pump) which is a general-purpose pump. In addition, the vortex pump pressurizes and mixes air and water, so that a smaller-sized bubble can be produced.

(Experimental example)
Based on the sixth embodiment shown in FIG. 6, the exhaust gas treatment device 77 is composed of an exhaust gas treatment unit 76, a nanobubble production unit 74, and a washing water treatment unit 75, and an experimental device was manufactured.

In this experimental apparatus, the capacity of the exhaust gas treatment unit 76 is set to 2 m ³ , the capacity of the first tank 5 in the nanobubble manufacturing unit 74 is set to 0.4 m ³ , the capacity of the second tank 11 is set to 0.4 m ^3, and the third tank The capacity of 20 was set to 0.4 m ³ . The capacity of the fourth tank 48 was set to 0.6 m ^3, and the capacity of the fifth tank 29 was set to 0.2 m ³ . In addition, the capacity of the activated carbon adsorption tower 72 in the washing water treatment unit 75 was set to 1.2 m ^3, and the capacity of the treated water tank 82 was set to 0.5 m ³ .

  And the micro bubbler MD-400 which is a product of Nomura Electronics Co., Ltd. was selected as the microbubble generator 78 installed in the 1st tank 5. FIG. In addition, as the nano-bubble generating device 79 installed in the second tank 11 and the nano-bubble generating apparatus installed in the third tank 20, the same product M2 type manufactured by Nano Planet Research Laboratories was selected.

  Moreover, the product of Toa DKK was employ | adopted as the oxidation-reduction potential detection part 30 and the oxidation-reduction potential controller 62 installed in the 5th tank 29. FIG. Also, a cationic surfactant that does not affect the human body is charged into the surfactant tank 32 and the first stirrer 36 is operated and stirred, and further sodium chloride is charged into the inorganic salt tank 37 to set the second stirrer 41. Run and stir.

Then, a volatile organic compound-containing exhaust gas 99 mainly composed of isopropyl alcohol generated from a semiconductor factory was introduced into the exhaust gas processing unit 76 by the exhaust fan 2. After two weeks passed and the experimental apparatus was stabilized, the concentration of the volatile organic compound was measured at the exhaust duct 52 that is the inlet of the exhaust gas processing unit 76 and the outlet of the chimney 58 that is the outlet of the exhaust gas processing unit 76. The result of this concentration measurement is shown below.
(Volatile organic compound concentration)
(Inlet of exhaust gas treatment unit 76) ………… 171ppmC
(Exhaust of the exhaust gas treatment unit 76) ... 51ppmC
Therefore, the removal rate of volatile organic compounds by the exhaust gas treatment unit 76 was 71%.

  Note that a collection bag (Tedlar bag) was used for sampling in this concentration measurement. Further, as an analysis method in this concentration measurement, analysis was performed with a hydrogen ionization analyzer (FID). The value of ppmC was converted to the capacity of VOC having 1 carbon.

Moreover, when the quality of the washing water of the lower part 56 of the waste gas treatment part 3 and the washing water of the treated water tank 82 were measured, the contents shown in Table 1 below were obtained.
(Table 1)

  Although it seems that the TOC and COD removal rate is 50% or less in the water quality of Table 1, it seems that the cleaning water is exhausted from the exhaust gas treatment unit 76 in the exhaust gas treatment device 77, each tank of the nanobubble production unit 74, and Since the inside of the washing water treatment unit 75 is repeatedly circulated, such a result is obtained. If the washing water is passed through the exhaust gas treatment device 77 without passing through the exhaust gas treatment device 77 in one pass, the removal rate is remarkably improved. However, although the removal rate of SS (floating matter) is 93%, a high removal rate is maintained, but SS as a floating matter is reliably removed by floating separation in the fourth tank 48.

  Further, when the washing water in the fifth tank (measuring tank) 29 was measured with a Coulter counter of Beckman Coulter, Inc., nanobubbles having a size of about 186000 / ml centered around 180 nm were confirmed. Moreover, it was +32 mV when the oxidation reduction potential of the washing water of the 5th tank 29 at that time was measured.

DESCRIPTION OF SYMBOLS 1 Exhaust gas 2 Exhaust fan 3 Exhaust gas processing part 4 Upper part 5 1st tank 6 Submersible pump type micro bubble generator 7 Small blower 8 Air piping 9 Bubble water stream 10 Uppermost overflow pipe 11 Second tank 12 Bubble water stream 13 Micro nano bubble generator 14 Suction piping 15 Circulation pump 16 Air piping 17 Air needle valve 18 Water piping 19 Uppermost overflow piping 20 Third tank 21 Bubble water flow 22 Nano bubble generator 23 Suction piping 24 Circulation pump 25 Air piping 26 Air needle valve 27 Water piping 28 Overflow piping 29 5th tank 30 Oxidation reduction potential detection part 31 Sequencer 32 Surfactant tank 33 1st metering pump 34 2nd metering pump 35 3rd metering pump 36 1st stirrer 37 Inorganic salt tank 38 4th metering pump 39 5th metering Pump 40 6th fixed Volume pump 41 Second stirrer 42 to 47 Chemical pipe 48 Fourth tank 49 Fourth tank water surface 50 Lower micro bubble pipe 51 Lower micro nano bubble pipe 52 Exhaust duct 53 High-concentration floating substance drain pipe 54 Lower communication pipe 55 Signal line 56 Lower 57 Process gas 58 Chimney 59 Washing water pipe 60 Sprinkling nozzle 61 Plastic filler 62 Redox potential controller 63 Lower perforated plate 64 Water surface 65 Suction pipe 66 Transfer pump 67 Water pipe 68 Suction pipe 69 Activated carbon adsorption tower transfer pump 70 Zeta potential controller 71 Water pipe 72 Activated carbon adsorption tower 73 Treated water pipe 74 Nano bubble production section 75 Wash water treatment section 76 Exhaust gas treatment section 77 Exhaust gas treatment apparatus 78 Micro bubble generator 79 Micro nano bubble generator 80 Nano bubble generator 81 Water pipe 82 Treated water tank 83 TOC (total organic carbon) Detector 84 TOC (total organic carbon) controller 85 Suction piping 86 Treated water tank pump 87 Water piping 88 Signal line 89 Activated carbon bag 90 Zeta potential detector 91 Bubble water flow 92 Micro bubble generator 93 Suction piping 94 Circulation pump 95 Gas piping 96 Gas needle valve 97 Water pipe 98 Gas phase activated carbon 99 VOC exhaust gas 100 Upper perforated plate 101 Rapid filtration tower 102 Perforated vessel 103 Liquid phase activated carbon 104 Suction pipe 105 Vortex pump 106 Discharge pipe 107 Needle Valve 108 Air piping 109 Washing water

Claims (20)

An exhaust gas treatment unit for cleaning the introduced exhaust gas with cleaning water;
A nanobubble manufacturing unit that introduces cleaning bubbles from the exhaust gas treatment unit and contains nanobubbles in the cleaning water,
The cleaning water containing the nanobubbles is filtered from the nanobubble production unit, and the cleaning water treatment unit is introduced into the exhaust gas processing unit,
The nanobubble manufacturing department
A first tank having a microbubble generator and containing microbubbles in the wash water introduced from the exhaust gas treatment unit;
A second tank having a microbubble generator and containing micro-nano bubbles in the washing water introduced from the first tank;
A third tank having a microbubble generator and containing nanobubbles in the wash water introduced from the second tank;
A fourth tank in which nanobubble-containing cleaning water is introduced from the third tank and floats and separates floating substances in the cleaning water; and
An exhaust gas treatment apparatus comprising: a fifth tank in which an electrometer for measuring a potential correlated with the bubble content of the wash water is installed while the wash water is introduced from the fourth tank . The exhaust gas treatment apparatus according to claim 1,
A surfactant addition unit for adding a surfactant to at least one tank from the first tank to the third tank, and an inorganic salt for adding inorganic salts to at least one tank from the first tank to the third tank Comprising at least one of an addition part and
Furthermore, at least one of the addition amount of the surfactant by the surfactant addition unit and the addition amount of the inorganic salts by the inorganic salt addition unit according to the potential measured by the electrometer installed in the fifth tank An exhaust gas treatment apparatus comprising an addition amount control unit for controlling one of the two. The exhaust gas treatment apparatus according to claim 2,
With both the surfactant addition part and the inorganic salt addition part,
The exhaust gas treatment apparatus, wherein the addition amount control unit controls the addition amount of the surfactant and the addition amount of the inorganic salt according to the potential measured by the electrometer. The exhaust gas treatment apparatus according to claim 2 or 3,
The exhaust gas treatment apparatus, wherein the electrometer is an oxidation-reduction potentiometer. The exhaust gas treatment apparatus according to claim 2 or 3,
An exhaust gas treatment apparatus, wherein the electrometer is a zeta electrometer. In the exhaust gas treatment apparatus according to any one of claims 2 to 5,
The addition amount control unit is
A signal representing a potential measured by an electrometer installed in the fifth tank is input, and a sequencer that generates a control signal for controlling the addition amount based on the signal is provided. Exhaust gas treatment equipment. The exhaust gas treatment apparatus according to claim 6,
The surfactant adding section includes a surfactant tank, a chemical pipe for introducing the surfactant from the surfactant tank to each of the first to third tanks, and a pump provided in the chemical pipe. Have
The inorganic salt addition unit has an inorganic salt tank, a chemical pipe for introducing inorganic salts from the inorganic salt agent tank to each of the first tank to the third tank, and a pump provided in the chemical pipe. ,
The sequencer controls the interface between the first tank and the third tank by controlling the pump of the surfactant addition unit and the pump of the inorganic salt addition unit with a control signal for controlling the addition amount. An exhaust gas treatment apparatus that controls the addition amount of an activator and inorganic salts. In the exhaust gas treatment apparatus according to any one of claims 1 to 7,
The cleaning water treatment unit has an activated carbon adsorption tower. The exhaust gas treatment apparatus according to claim 8,
The exhaust water treatment apparatus, wherein the washing water treatment unit has a rapid filtration tower in front of the activated carbon adsorption tower. The exhaust gas treatment apparatus according to claim 8 or 9,
The exhaust water treatment apparatus, wherein the washing water treatment unit has a microfiltration membrane device and a reverse osmosis membrane device in order after the activated carbon adsorption tower. The exhaust gas treatment apparatus according to claim 9,
The exhaust gas treatment apparatus, wherein the washing water treatment unit has a contact oxidation tank in a stage preceding the rapid filtration tower. In the exhaust gas treatment apparatus according to any one of claims 8 to 11,
The washing water treatment unit
Having a treated water tank into which washing water from the activated carbon adsorption tower is introduced, this treated water tank having a TOC meter for measuring the TOC of the washing water;
The sequencer receives a signal representing the TOC concentration of the washing water from the TOC meter, and when the TOC concentration represented by the signal exceeds a preset set value, the pump of the surfactant addition unit and the inorganic salts An exhaust gas treatment apparatus characterized by increasing the addition amount of the surfactant and inorganic salts to the first to third tanks by controlling the pump of the addition unit. In the exhaust gas treatment apparatus according to any one of claims 1 to 12,
The microbubble generator included in each of the first to third tanks has an eddy current pump that self-sucks air and generates microbubbles. The exhaust gas treatment apparatus according to claim 12 or 13,
The washing water treatment unit
The treated water pump has a treated water pump installed in the treated water tank, and the treated water pump is a pressure dissolution pump that self-sucks air to generate microbubbles, and the exhaust water treatment unit supplies the washing water with the treated water pump. An exhaust gas treatment device characterized by being returned to In the exhaust gas treatment apparatus according to any one of claims 1 to 14,
An exhaust gas treatment apparatus, wherein the exhaust gas is an exhaust gas containing a volatile organic compound. In the exhaust gas treatment apparatus according to any one of claims 1 to 15,
The first tank and the second tank are connected by two water pipes, an overflow pipe near the water surface of the tank and a communication pipe at the bottom of the tank,
The second tank and the third tank are connected to each other by two water pipes, an overflow pipe near the water surface of the tank and a communication pipe at the bottom of the tank. The exhaust gas treatment apparatus according to any one of claims 2 to 16,
The washing water treatment unit
An activated carbon adsorption tower,
A cleaning water is introduced from the activated carbon adsorption tower and a treated water tank in which a COD meter is installed,
The addition amount control unit is
An exhaust gas treatment apparatus, wherein the addition amount is increased when a COD value of the cleaning water measured by the COD meter exceeds a set value. The exhaust gas treatment apparatus according to any one of claims 2 to 16,
The washing water treatment unit
An activated carbon adsorption tower,
Wash water is introduced from the activated carbon adsorption tower and a treated water tank in which a TOC meter and a COD meter are installed,
The addition amount control unit is
When the TOC value of the cleaning water measured by the TOC meter exceeds a set value, and when the COD value of the cleaning water measured by the COD meter exceeds a set value, the addition amount is increased. A featured exhaust gas treatment device. The exhaust gas treatment apparatus according to any one of claims 1 to 18,
The exhaust gas treatment part
An upper part where the exhaust gas is introduced, and a lower part where the washing water which washed the exhaust gas is stored,
An exhaust gas treatment apparatus characterized in that a plastic filler and activated carbon for gas phase are arranged in the upper part, and activated carbon for liquid phase is arranged in the lower part. Wash the exhaust gas introduced into the exhaust gas treatment section with wash water,
The cleaning water from which the exhaust gas has been cleaned is sequentially introduced into the first to fifth tanks of the nanobubble manufacturing unit, the microbubble generating unit installed in the first tank is made to contain microbubbles and installed in the second tank The microbubble generating part contains micro-nano bubbles in the washing water, the micro-bubble generating part installed in the third tank contains nano bubbles in the washing water, and the fourth tank floats floating substances to which the nano bubbles are attached. The floating substance is separated from the washing water, and in the fifth tank, a potential having a correlation with the bubble content in the washing water is measured with an electrometer.
Furthermore, the cleaning water containing the nanobubbles from the fifth tank is filtered and introduced into the exhaust gas treatment section.

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