JP4859212B2 - Imaging device - Google Patents

Description

  The present invention relates to an imaging apparatus that images a subject.

  Conventionally, in a single-lens reflex digital camera, if dust, dust (hereinafter collectively referred to as dust) exists in the vicinity of the focal plane of the taking lens, the shadow of the dust is reflected on the solid-state image sensor, and the image quality is improved. May decrease. Examples of such dust include those that enter from the outside at the time of lens replacement, and fine wear powder generated from members such as resin or metal constituting the shutter or mirror. For example, when such dust enters a space between the cover glass of the solid-state imaging device and the optical filter disposed in front of the cover glass, it is necessary to disassemble the camera in order to remove the dust. is there. For this reason, a dustproof structure is provided to prevent the intrusion of dust into the space by blocking the space between the cover glass of the solid-state imaging device and the optical filter from the outside.

  However, the dust-proof structure prevents dust from entering the space between the cover glass of the solid-state imaging device and the optical filter, and the dust adheres to the light incident surface, that is, the surface of the optical filter. It does not prevent that. Therefore, dust may adhere to the surface of the optical filter. Here, when the optical filter is disposed in the vicinity of the focal plane, the dust adhering to the surface will be reflected as a shadow on the solid-state imaging device, causing a reduction in image quality.

  Further, a structure in which the surface of the cover glass of the solid-state image sensor or the surface of the optical filter is cleaned with a wiper has been proposed (see, for example, Patent Document 1). According to this, it is possible to remove dust attached to the surface of the cover glass of the solid-state image sensor or the surface of the optical filter without removing the lens and without disassembling the camera.

  However, the dust adhering to the surface of the cover glass of the solid-state image sensor or the surface of the optical filter may be hard like metal powder. In this case, when the wiper slides along the cover glass surface or the optical filter surface, the dust may damage the surface of the cover glass or the surface of the optical filter.

Therefore, a configuration has been proposed in which the cover glass or the optical filter is vibrated in order to remove dust adhering to the surface of the solid-state imaging element without damaging the surface of the cover glass or the optical filter (for example, Patent Document 2). reference). That is, in this configuration, the cover glass or the optical filter is vibrated by the vibration means, and dust attached to the surface is removed by the vibration of the cover glass or the optical filter.
JP 2003-005254 A JP 2004-032191 A

  However, when vibration is applied to the cover glass or the optical filter by the vibration means, the vibration of the cover glass or the optical filter of the solid-state imaging device propagates to the member that fixes the cover glass or the optical filter. As a result, the cover glass or the optical filter of the solid-state image sensor may be peeled off from the member that fixes it.

  An object of the present invention is to remove dust attached to a surface of an optical member or a cover member of an image sensor without damaging the surface of the optical member, and the optical member or the cover member is peeled off from a member for fixing the dust. An object of the present invention is to provide an imaging apparatus that is free from fear.

  In order to achieve the above object, the present invention provides an imaging means for converting light from a subject into an electric signal, an optical member disposed in front of the imaging means and spaced from the imaging means, and the imaging means And a sealing means for blocking a space formed between the optical member and the outside, the optical member being formed of a transmissive piezoelectric member, and the subject-side surface of the optical member There is provided an imaging apparatus characterized in that an electrode for exciting a surface acoustic wave is formed on a surface of the optical member on the subject side by applying a driving voltage.

  In order to achieve the above object, the present invention has a cover member that transmits light from a subject, constitutes a housing space that is shielded from the outside, and is housed in the housing space of the base body. An image sensor that converts light that has passed through to an electrical signal, and the cover member is made of a transmissive piezoelectric member, and on the subject side surface of the cover member, by applying a drive voltage, An imaging apparatus is provided, wherein an electrode for exciting a surface acoustic wave is formed on a surface of the cover member on the subject side.

The present invention, in order to achieve the above object, an imaging device for converting light from an object into an electrical signal, and an optical member disposed at the imaging means and spacing in front of the imaging means, the imaging means Sealing means for blocking a space formed between the optical member and the outside, and an electrode disposed on one end of the optical member that is outside a region through which light from the subject passes, the electrode A surface acoustic wave excitation means for exciting a surface acoustic wave on a surface of the optical member on the subject side by applying a driving voltage to the optical member, and the other end of the optical member that is outside a region through which light from the subject passes. And vibration suppressing means for suppressing generation of reflected waves of surface acoustic waves excited by the surface acoustic wave exciting means .

  ADVANTAGE OF THE INVENTION According to this invention, the dust adhering to the surface can be removed, without damaging the surface of an optical member or the surface of the cover member of an image pick-up element, and an optical member or a cover member peels from the member which fixes it. There is no fear.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a longitudinal sectional view showing a configuration of an imaging apparatus according to the first embodiment of the present invention. In this embodiment, a single-lens reflex digital camera will be described as an imaging device.

  As shown in FIG. 1, the single-lens reflex digital camera includes a camera body 100 on which a lens device 101 is detachably mounted. The lens device 101 incorporates a photographing optical system 103 that defines an optical path L1 of photographing light, a diaphragm (not shown) for restricting the amount of light incident on the photographing optical system 103, and the like. Here, regarding the photographing optical system 103, only the lens 103a is shown among a plurality of lenses constituting the photographing optical system 103.

  The camera body 100 includes a mount mechanism 126 for detachably mounting the lens device 101 and a half mirror 111 movable within a predetermined range. The half mirror 111 has a refractive index of about 1.5 and a thickness of 0.5 mm. The half mirror 111 moves between the first optical path division position and the second optical path division position. Here, at the first optical path dividing position, the half mirror 111 reflects a part of the photographing light incident from the photographing optical system 103 along the optical path L1 toward the focusing screen 105 and transmits the rest. (Position indicated by a solid line in the figure). The second optical path division position is a position where the half mirror 111 is retracted from the optical path L1 (position 111 'indicated by a broken line in the drawing).

  The light reflected by the half mirror 111 is imaged on the focusing screen 105, and this light image is guided to the outside from the finder lens group 109 through the pentaprism 112. The finder lens group 109 includes a plurality of lenses 109a, 109b, and 109c. The photographer can observe the light image formed on the focusing screen 105 via the finder lens group 109. On the focusing screen 105, the information display unit 180 displays specific information (for example, shutter speed, aperture value, shooting mode, etc.).

  A sub mirror 122 is provided on the back side of the half mirror 111. The sub mirror 122 moves in conjunction with the movement of the half mirror 111 while rotating angularly about a rotation shaft (not shown) provided on a holding member (not shown) of the half mirror 111. When the half mirror 111 is in the first optical path division position, the sub mirror 122 is in a position where light close to the optical path L1 out of the light transmitted through the half mirror 111 is reflected toward the lens 164. On the other hand, when the half mirror 111 moves to the second optical path division position, the sub mirror 122 moves to a position retracted from the optical path L1 in conjunction with this (position 122 'indicated by a dotted line in the drawing).

  The reflected light from the sub mirror 122 is guided to the focus detection unit 167 via the lens 164, the reflection mirror 165, and the lens 166. The focus detection unit 167 receives the reflected light from the sub-mirror 122, and performs focus detection by a phase difference detection method based on the received light.

  On the back side of the half mirror 111, a focal plane shutter 50 for adjusting the amount of light incident on the solid-state imaging device 15, the optical member 19, the optical filter 11, the solid-state imaging device 15 and the like are sequentially arranged. Details of these will be described later.

  Further, the camera body 100 is provided with a movable flash light emitting unit 104, a display 107, a main switch 119, a release button 120, and a cleaning switch 123.

  The flash light emitting unit 104 is movable between a storage position stored in the camera body 100 and a light emission position exposed from the camera body 100 to the outside. Here, a state in which the flash light emitting unit 104 is in the light emitting position is shown. The display 107 is composed of a liquid crystal display panel or the like, and displays various information including a photographed image and photographing conditions.

  The main switch 119 is a switch for starting up the camera body 100. The release button 120 is a button that can be pressed in two stages. When the release button 120 is pressed halfway (SW1 is turned on), a shooting preparation operation (photometry operation, focus adjustment operation, etc.) is started. When the release button 120 is fully pressed (SW2 is turned on), a shooting operation (recording of image data read from the solid-state imaging device 15b in the memory) is started. The cleaning switch 123 is a switch for setting a cleaning mode. This cleaning mode is a mode for exciting surface acoustic waves on the optical member 19 and removing dust adhering to the surface of the optical member 19.

  Next, the configuration around the focal plane shutter 50 and the solid-state imaging device 15 will be described with reference to FIG. FIG. 2 is a longitudinal sectional view showing a configuration around the focal plane shutter 50 and the solid-state imaging device 15 of FIG.

  As shown in FIG. 2, the focal plane shutter 50 includes a leading film 21, a rear curtain 22, a presser plate 24, a cover plate 25, and an intermediate plate 23. The front curtain 21 includes a plurality of shutter blades 21a to 21d. The rear curtain 22 is composed of a plurality of shutter blades, like the front curtain 21. The presser plate 24 is a presser plate for the rear curtain 22, and an opening 24 a for receiving imaging light is provided at the center thereof. The cover plate 25 is a pressing plate for the front curtain 21, and an opening 25a for receiving imaging light is provided at the center thereof. The intermediate plate 23 is inserted between the presser plate 24 and the cover plate 25. By the intermediate plate 23, the space between the presser plate 24 and the cover plate 25 is divided into a driving space for the front curtain 21 and a driving space for the rear curtain 22. The cover plate 25 is provided with a stopper portion 29 for positioning when the shutter blades 21a to 21d of the front curtain 21 are opened.

  The optical filter 11 disposed on the back side of the focal plane shutter 50 has a filter characteristic that restricts the passage of this frequency component so that a spatial frequency component higher than necessary does not enter the solid-state imaging device 15. The optical filter 11 is formed by laminating a birefringent plate such as quartz and an infrared cut filter, for example.

  The edge of the optical filter 11 is held by the holding member 12, and the holding member 12 is integrated with the optical filter 11 and supported by the support member 13. The support member 13 is fixed to a chassis (not shown) of the camera body 100.

  On the light incident surface (surface facing the shutter 50) of the optical filter 11, that is, on the surface side, a rectangular flat plate-shaped optical member 19 is disposed with a space between the optical filter 11. The optical member 19 is composed of a piezoelectric member having optical transparency that transmits a frequency component in the visible light region. The edge of the optical member 19 is fixed to the support member 13 so that the space formed between the optical member 19 and the optical filter 11 is blocked from the outside. Thereby, intrusion of dust into the space between the optical member 19 and the optical filter 11 is prevented. On the surface of the optical member 19, a comb-shaped electrode 63 for exciting a surface acoustic wave is formed on the surface. Details of the comb electrode 63 will be described later. Here, the optical member 19 can also be composed of a piezoelectric member that cooperates with the optical filter 11 and exhibits filter characteristics that limit the passage of high spatial frequency components.

  The solid-state imaging device 15 disposed on the back side of the optical filter 11 has a base body 15a that opens toward the optical filter 11 side and forms a housing space that houses the solid-state imaging device 15b. The opening of the base body 15a is covered with a transparent cover member 15d for protecting the solid-state imaging device 15b and blocking the housing space from the outside. The solid-state image sensor 15b is composed of a CMOS process compatible sensor, which is one of amplification type solid-state image sensors, for example. A plurality of connection terminals 15c are connected to the solid-state image sensor 15b, and the solid-state image sensor 15b is electrically connected to the substrate 17 via the connection terminals 15c. The substrate 17 and the solid-state imaging device 15 are integrated and held by a holding plate 18, and the holding plate 18 is fixed to a chassis (not shown) of the camera body 100 by screws (not shown).

  The cover member 15d is disposed at a predetermined interval with respect to the optical filter 11, and the space formed between the cover member 15d and the optical filter 11 is blocked from the outside by the seal member 16. Yes. This prevents dust from entering the space between the cover member 15d and the optical filter 11.

  Thus, the space between the optical member 19 and the optical filter 11 and the space between the cover member 15d and the optical filter 11 are spaces blocked from the outside. Therefore, the target site to which dust that causes shadows in the captured image is attached is the surface (light incident surface) of the optical member 19.

  Next, the comb electrode 63 formed on the surface of the optical member 19 will be described in detail with reference to FIG. FIG. 3 is a plan view showing the configuration of the comb electrode 63 formed on the surface of the optical member 19 of FIG.

  As shown in FIG. 3, the comb-shaped electrode 63 is formed in the vicinity of one end portion along the short side direction so as to avoid the imaging region E defined in the optical member 19. A vibration absorbing member 65 is formed in the vicinity of the other end along the short side direction of the optical member 19, and the vibration absorbing member 65 is disposed so as to face the comb-shaped electrode 63. An AC voltage having a predetermined frequency is applied to the comb-shaped electrode 63 from a power supply circuit 67 described later, and the application operation of the AC voltage of the power supply circuit 67 is controlled by the camera system control unit 135.

  When an alternating voltage having a predetermined frequency is applied to the comb-shaped electrode 63, each part near the surface of the optical member 19 moves elliptically, and thereby a surface acoustic wave is excited. This surface acoustic wave travels from the comb-shaped electrode 63 toward the vibration absorbing member 65. Since the vibration absorbing member 65 absorbs the surface acoustic wave and suppresses the generation of the reflected surface acoustic wave, the reflected surface wave prevents the traveling surface acoustic wave from becoming a stationary wave.

  Here, the cutting direction of the crystal axis of the optical member 19 is such that a surface acoustic wave traveling from the comb electrode 63 of the optical member 19 toward the vibration absorbing member 65 is generated when an AC voltage is applied to the comb electrode 63. Is set. In the present embodiment, as a member constituting the optical member 19, a crystal having 42.75π / 180 (rad) Y cut with respect to the surface of propagation of the surface acoustic wave is used, and the thickness thereof is 0. 5 mm.

  Further, when the electrode width of the comb-shaped electrode 63 is d1, the distance between electrodes (intersection width) is d2, the propagation velocity of the surface acoustic wave in the optical member 19 is v, and the frequency of the surface acoustic wave is f, this frequency f is It is given by the following equation (1).

f = v / {2 × (d1 + d2)} (1)
Here, the propagation velocity v of the surface acoustic wave of the optical member 19 is 3157 m / sec. The electrode width d1 of the comb-shaped electrode 63 is set to 10 μm, and the inter-electrode distance d2 is set to 20 μm. The frequency f of the surface acoustic wave in this case is 52 MHz from the above equation (1). Therefore, if an AC voltage having a frequency of 52 MHz is applied to the comb-shaped electrode 63, surface acoustic waves can be excited on the surface of the optical member 19 with maximum efficiency.

  In the present embodiment, the vibration absorbing member 65 is used, but instead of the vibration absorbing member 65, a comb-shaped electrode is formed, and surface acoustic waves are excited by the comb-shaped electrode, so that the reflected wave described above can be obtained. It is also possible to suppress the occurrence.

  Next, the control configuration of the digital camera of the present embodiment will be described with reference to FIG. FIG. 4 is a block diagram showing a control configuration of the digital camera of FIG.

  As shown in FIG. 4, the control configuration in the present embodiment has a camera system control unit 135 provided in the camera body 100. The camera system control unit 135 includes a CPU, a ROM, a RAM, and the like, and controls the entire camera and performs various individual controls.

  When the lens apparatus 101 is attached to the camera body 100 via the mount mechanism 126, the terminal 100a and the terminal 101a are electrically connected, and the camera system control unit 135 can communicate with the lens system control unit 141. The lens system control unit 141 sends to the camera system control unit 135 a lens state signal indicating the state of the lens device 101 (the aperture value of the diaphragm 102, the focal length, the focus lens position, etc.).

  The camera system control unit 135 receives the lens state signal, the detection signal from the operation detection unit 136, the signal from the AF control unit 140, and the like. Here, the operation detection unit 136 detects the presence / absence of operations of the main switch 119, the release button 120, the cleaning switch 123 (see FIG. 1), and the like. This detection result is output to the camera system control unit 135 as an operation detection signal. The AF control unit 140 generates a signal indicating the focus adjustment state (defocus amount) of the photographing optical system 103 based on the output signal from the focus detection unit 167 and outputs the signal to the camera system control unit 135. Based on the reflected light from the sub mirror 122, the focus detection unit 167 detects the in-focus state of the image in the focus detection area provided at a predetermined position in the shooting screen, and outputs a signal indicating the detection result. Output.

  The camera system control unit 135 generates a control signal to the lens system control unit 141 based on the lens state signal, the detection signal from the operation detection unit 136, the signal from the AF control unit 140, and the like. In addition, the camera system control unit 135 individually generates a control signal for each part of the camera body 100 based on each signal. Specifically, control signals for the half mirror drive unit 138, the shutter control unit 145, the power supply unit 67, and the substrate 17 are individually generated. In addition, control signals for the A / D converter 130, the RGB image processing unit 131, the YC processing unit 132, the recording processing unit 133, the reproduction processing unit 133, and the information display unit 180 are individually generated. These control signals are signals for instructing operation timing, operation content, and the like.

  The lens system control unit 141 generates a drive signal for the aperture drive unit 143 that drives the aperture 104 based on the control signal from the camera system control unit 135. The aperture driving unit 143 drives the aperture 104 based on the drive signal so that the aperture diameter of the aperture 104 becomes the aperture value indicated by the control signal. The lens system control unit 141 generates a drive signal for the AF motor 147 that drives the focus lens of the photographing optical system 103 based on the control signal from the camera system control unit 135. With this drive signal, the AF motor 147 moves the focus lens to the position instructed by the control signal.

  The half mirror drive unit 138 of the camera body 100 drives the half mirror 111 based on a control signal from the camera system control unit 135. The shutter control unit 145 drives the focal plane shutter 50 (the front curtain and the rear curtain) so as to obtain a corresponding shutter speed based on a control signal from the camera system control unit 135. Based on a control signal from the camera system control unit 135, the power supply unit 67 generates an AC voltage having a predetermined frequency (= surface acoustic wave frequency f) with respect to the comb-shaped electrode 63 provided in the optical member 19. Application is repeated periodically over a predetermined period. Thereby, a surface acoustic wave is excited on the surface of the optical member 19. The board 17 reads an imaging signal (electric signal) of the solid-state imaging device 15 at a predetermined timing based on a control signal from the camera system control unit 135, and the read imaging signal is converted into an A / D signal. Output to the converter 130.

  The A / D converter 130 converts the imaging signal into, for example, 10-bit R, G, and B digital signals according to the amplitude of the imaging signal. The RGB image processing unit 131 performs white balance, gamma correction, high resolution processing by interpolation calculation, and the like on the R, G, and B digital signals input from the A / D converter 130. The YC processing unit 132 generates a luminance signal Y and color difference signals RY and BY from the R, G, and B digital signals input from the RGB image processing unit 131. The generated luminance signal Y and color difference signals RY and BY are input to the recording processing unit 133 as image signals. The operations of the A / D converter 130, the RGB image processing unit 131, and the YC processing unit 132 are controlled by control signals output from the camera system control unit 135, respectively.

  Based on the control signal from the camera system control unit 135, the recording processing unit 133 writes the input image signal into a memory (not shown) such as a CF card (registered trademark), or the image from the memory. A signal reading process is performed. The reproduction processing unit 134 reproduces the image signal read from the memory based on the control signal from the camera system control unit 135 and outputs the image signal to the display 107. A configuration in which the reproduction processing unit 134 and the display 107 are connected via wireless communication such as Bluetooth (registered trademark) may be employed. In this case, an image captured by this digital camera can be monitored at a position away from the camera.

  The information display unit 180 displays specific information on the focusing screen 105 based on a control signal from the camera system control unit 135. The specific information to be displayed is information given from the camera system control unit 135 together with the control signal. The flash light emitting unit 104 emits flash light at a predetermined timing based on a control signal from the camera system control unit 135.

  Next, the cleaning mode in the present embodiment will be described.

  As described above, the target site to which dust that causes shadows in the photographed image is attached is the surface (light incident surface) of the optical member 19, so that the dust attached to the surface of the optical member 19 is removed. Is performed in the clean mode.

  This cleaning mode is set according to the operation of the cleaning switch 123. When this cleaning mode is set, the mode and shooting conditions set immediately before are stored. Then, in order to start the cleaning mode, a control signal instructing the start of application of the AC voltage is output from the camera system control unit 135 to the power supply unit 67.

  Based on the control signal, the power supply unit 67 starts applying an alternating voltage having a predetermined frequency to the comb-shaped electrode 63 on the optical member 19. Thereby, a surface acoustic wave is excited on the surface of the optical member 19. The application of the AC voltage is repeated periodically over a predetermined time, for example. Due to the surface acoustic wave, the dust adhering to the surface of the optical member 19 moves away from the surface while moving on the surface, and finally falls toward the lower part of the camera body 100. That is, dust adhering to the surface of the optical member 19 is removed from the surface.

  Next, after a predetermined time elapses, the camera system control unit 135 outputs a control signal instructing to stop the application of the AC voltage to the power supply unit 67. The power supply unit 67 stops applying the AC voltage to the comb-shaped electrode 63 based on the control signal. As a result, the cleaning mode ends.

  In the present embodiment, as described above, if the cleaning switch 123 is operated at an arbitrary timing, a cleaning mode for removing dust attached to the surface of the optical member 19 is performed. Instead of this, for example, a sequence in which an AC voltage is applied to the comb-shaped electrode 63 of the optical member 19 by using power on the digital camera or the end of the photographing operation as a trigger may be employed.

  As described above, according to the present embodiment, it is possible to easily remove dust attached to the surface of the optical member 19 by exciting surface acoustic waves on the surface of the optical member 19. That is, even if dust that intrudes during lens replacement or wear dust generated when the focal plane shutter 50 is driven adheres to the surface of the optical member 19, the dust is removed without touching the optical member 19. Is possible. As a result, it is possible to always obtain an image with good image quality without the shadow of dust.

  Further, since the surface acoustic wave is generated only on the surface of the optical member 19, there is no possibility that the optical member 19 is peeled off from the support plate 13. For example, even when an infrared cut filter or the like is bonded to the back surface of the optical member 19, the infrared cut filter does not peel off due to surface acoustic waves. In other words, if at least a part (surface side) of the optical member is made of a piezoelectric material, it is possible to provide an optical member that exhibits the effects described above.

  Furthermore, since the comb-shaped electrode 63 for exciting the surface acoustic wave is provided on the surface of the optical member 19, the thickness of the optical member 19 is not particularly increased, and the installation space for the optical member 19 is easy. Can be secured. As a result, the installation of the optical member 19 does not increase the size of the camera body 100.

  In the present embodiment, the case where the optical member 19 is composed of a quartz substrate having a thickness of 0.5 mm is shown, but it is also possible to construct the optical member from another piezoelectric material instead. is there. For example, the optical member 19 can be made of lithium niobate (LiNbO3) having a thickness of 0.3 mm. In this case, lithium niobate is obtained by cutting 128π / 180 (rad) Y with respect to the propagation surface. In this case, the electrode width d1 of the comb-shaped electrode 63 is set to 10 μm, and the inter-electrode distance d2 is set to 30 μm.

  When the optical member 19 is composed of this lithium niobate, the surface acoustic wave propagation velocity V is 4000 m / sec. Therefore, the surface acoustic wave generated by the comb-shaped electrode 63 having the electrode width d1 and the interelectrode distance d2 The frequency f is 50 MHz from the above equation (1). Therefore, in the case of the optical member 19 having such a configuration, an AC voltage of 50 MHz is applied to the comb electrode 63.

  Further, in the present embodiment, the power supply unit 67 is built in the camera body 100, but instead, for example, an external power supply unit corresponding to the power supply unit 67 is prepared and connected to the camera body 100. It is also possible to adopt such a configuration. In this case, the camera body 100 is provided with a terminal for connecting the external power supply unit and the comb electrode 63. A cleaning mode for removing dust adhering to the surface of the optical member 19 is obtained by connecting the external power source to the terminal and applying an AC voltage from the external power source unit to the comb electrode 63 via the terminal. Will be implemented. If such a configuration is adopted, it is not necessary to incorporate the power supply unit 67 in the camera body 100.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS. FIG. 5 is a longitudinal sectional view showing a configuration around the focal plane shutter and the solid-state imaging device in the imaging device according to the second embodiment of the present invention. Here, the imaging apparatus of the present embodiment is a single-lens reflex digital camera, and the basic configuration thereof is the same as that of the first embodiment. Therefore, in the present embodiment, only the parts different from the first embodiment will be described. In the drawing, the same members as those in the first embodiment are denoted by the same reference numerals.

  In the present embodiment, as shown in FIG. 5, the optical filter 11 and the optical member 19 are provided between the focal plane shutter 50 and the solid-state imaging device 15 as in the first embodiment. Not. In this case, dust adheres to the surface of the cover member of the solid-state imaging device 15. Therefore, in the present embodiment, as the cover member of the solid-state imaging device 15, the optical member 19 on which the comb-shaped electrode 63 is formed as shown in the first embodiment is used. In this case, for example, the optical member 19 is preferably made of a piezoelectric material that exhibits the same filter characteristics as the optical filter 11 of the first embodiment.

  Further, instead of the above configuration, a configuration as shown in FIG. 6 may be employed. That is, in the case of this configuration, the optical member 19 on which the comb-shaped electrode 63 is formed is attached to the cover member 15 d of the solid-state imaging device 15. Even in this case, it is preferable that the optical member 19 is made of a piezoelectric material that exhibits the same filter characteristics as the optical filter 11 of the first embodiment.

  As described above, in any configuration shown in FIG. 5 or FIG. 6, the same effect as in the first embodiment can be obtained.

1 is a longitudinal sectional view showing a configuration of an imaging apparatus according to a first embodiment of the present invention. It is a longitudinal cross-sectional view which shows the structure around the focal plane shutter 50 and the solid-state imaging device 15 of FIG. FIG. 3 is a plan view showing a configuration of a comb electrode 63 formed on the surface of the optical member 19 in FIG. 2. It is a block diagram which shows the control structure of the digital camera of FIG. It is a longitudinal cross-sectional view which shows the structure around the focal plane shutter and solid-state imaging device in the imaging device which concerns on the 2nd Embodiment of this invention. It is a longitudinal cross-sectional view which shows the alternative structure around a focal plane shutter and a solid-state imaging device in the imaging device which concerns on the 2nd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Optical filter 13 Support member 15 Solid-state imaging device 15a Base | substrate 15b Solid-state image sensor 15d Cover member 19 Optical member 63 Comb-shaped electrode

Claims (10)

Imaging means for converting light from the subject into an electrical signal;
An optical member disposed at the imaging means and spacing in front of the imaging means,
Sealing means for blocking a space formed between the imaging means and the optical member from the outside ;
An electrode is disposed on one end of the optical member outside the region through which light from the subject passes, and a surface acoustic wave is excited on the surface of the optical member on the subject side by applying a driving voltage to the electrode. Surface acoustic wave excitation means for
Suppressing the generation of reflected waves of surface acoustic waves, which are disposed on the other end of the optical member outside the region through which light from the subject passes, so as to face the electrodes, and are excited by the surface acoustic wave excitation means. Vibration suppression means
An imaging device comprising: The electrode includes a first comb electrode and a second comb electrode, and an AC voltage having a preset frequency is applied between the first comb electrode and the second comb electrode. The imaging apparatus according to claim 1. An optical filter that is disposed in a space between the optical member that is blocked from the outside by the sealing unit and the imaging unit and that restricts transmission of a light component in a predetermined band is provided. Item 3. The imaging device according to Item 1 or 2 . The optical member, the imaging apparatus according to claim 1 or 2, characterized in that it is composed of a piezoelectric member having a filter characteristic that limits the passage of the spatial frequency components of a predetermined band. A base on which a housing space is formed ;
A cover member that shields the housing space from the outside by covering the base;
An image sensor that converts light that is received in the storage space and passes through the cover member into an electrical signal ;
An electrode is disposed at one end of the cover member that is outside the region through which the light passes, and a surface elastic wave that excites a surface acoustic wave on the surface of the cover member by applying a driving voltage to the electrode. Wave excitation means;
Vibration suppression which suppresses generation | occurrence | production of the reflected wave of the surface acoustic wave which is arrange | positioned so that it may oppose the said electrode at the other end which becomes the outer side of the area | region through which the said light of the said cover member passes. Means and
An imaging device comprising: The electrode includes a first comb electrode and a second comb electrode, and an AC voltage having a preset frequency is applied between the first comb electrode and the second comb electrode. The imaging device according to claim 5 . The imaging apparatus according to claim 5 , wherein the cover member is configured by a piezoelectric member having a filter characteristic that restricts transmission of a spatial frequency component in a predetermined band. A base on which a housing space is formed ;
A cover member that shields the housing space from the outside by covering the base;
An image sensor that converts light that is received in the storage space and transmitted through the cover member into an electrical signal;
An optical member to be pasted on the object side surface of the front Symbol cover member,
An electrode is disposed on one end of the optical member outside the region through which light from the subject passes, and a surface acoustic wave is excited on the surface of the optical member on the subject side by applying a driving voltage to the electrode. Surface acoustic wave excitation means for
Suppressing the generation of reflected waves of surface acoustic waves, which are disposed on the other end of the optical member outside the region through which light from the subject passes, so as to face the electrodes, and are excited by the surface acoustic wave excitation means. Vibration suppression means
An imaging device comprising: The electrode includes a first comb electrode and a second comb electrode, and an AC voltage having a preset frequency is applied between the first comb electrode and the second comb electrode. The imaging device according to claim 8 . The image pickup apparatus according to claim 8 or 9 , wherein the optical member is composed of a piezoelectric member having a filter characteristic that restricts transmission of a spatial frequency component in a predetermined band.

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