JP4823751B2 - Drawing point data acquisition method and apparatus, and drawing method and apparatus - Google Patents

Description

  The present invention moves a drawing point formation region for forming a drawing point based on drawing point data relative to a drawing target and draws an image by sequentially forming drawing points according to the movement. The present invention relates to a drawing point data acquisition method and apparatus used in the above, and a drawing method and apparatus for performing the drawing using drawing point data acquired by the drawing point data acquisition method and apparatus.

  Conventionally, various exposure apparatuses using a photolithographic technique have been proposed as apparatuses for recording a predetermined pattern on a printed wiring board or a flat panel display substrate.

  As an exposure apparatus as described above, for example, a light beam is scanned in a main scanning direction and a sub scanning direction on a substrate coated with a photoresist, and the light beam is modulated based on image data representing a wiring pattern. Thus, there has been proposed an exposure apparatus for forming a wiring pattern.

  As the exposure apparatus as described above, for example, a spatial light modulator such as a digital micromirror device (hereinafter referred to as DMD) is used, and exposure is performed by modulating a light beam by the spatial light modulator according to image data. Various exposure apparatuses have been proposed.

  As an exposure apparatus using the DMD as described above, for example, the DMD is moved relative to the exposure surface, and a large number of drawing point data corresponding to a large number of micromirrors of the DMD according to the movement. An exposure apparatus is proposed that forms a desired image on an exposure surface by sequentially forming drawing point groups corresponding to DMD micromirrors in a time series (see, for example, Patent Document 1).

  Here, when performing exposure using the exposure apparatus as described above, drawing point data corresponding to each position of the DMD with respect to the exposure surface is sequentially input to the DMD with the movement. As the data, for example, vector format image data created in a data creation apparatus having a CAD station, a CAM (Computer Aided Manufacturing) station, or the like is converted into raster format image data, and the raster format image data is applied to the exposure surface. It is obtained by reading out pixel data corresponding to each position of the DMD (see, for example, Patent Document 2 and Patent Document 3).

Japanese Patent Laid-Open No. 2004-233718 JP 2003-057834 A JP 2003-050469 A

  However, when the drawing point data is acquired as described above, for example, when the substrate to be exposed is deformed, the pixel position to be read from the raster image data is changed according to the deformation of the substrate. The drawing point data is acquired after adjustment, but the resolution of the raster format image data is lower than the resolution of the vector format image data, and thus the accuracy such as the line width may be lowered. In addition, when there is an oblique line in the wiring pattern, there is a case where a jaggy is generated in the oblique line, and the exposure accuracy is deteriorated.

  In order to avoid the above problems, it may be possible to increase the resolution of raster format image data. However, if the resolution of raster format image data is increased, the amount of data becomes enormous. There is a possibility that the calculation of the read pixel position takes time, and the number of accesses to the image data increases, leading to a decrease in processing speed. Further, it is necessary to increase the capacity of the memory for storing the image data, which may increase the cost.

  In view of the above circumstances, the present invention provides a drawing point data that can improve the drawing accuracy without reducing the processing speed and increasing the cost in the method for obtaining the drawing point data as described above. It is an object of the present invention to provide an acquisition method and apparatus, and a drawing method and apparatus that perform drawing using drawing point data acquired by the drawing point data acquisition method and apparatus.

  The first drawing point data acquisition method of the present invention is a drawing point data for forming drawing points on a drawing target based on the drawing point data and acquiring drawing point data used when drawing an image on the drawing target. In the acquisition method, the image data in the original vector format of the image is acquired, and the position coordinates on the image data corresponding to the position where the drawing point on the drawing target is to be formed are acquired. Drawing point data of a drawing point is acquired based on the coordinates.

  In the first drawing point data acquisition method of the present invention, the image area determined based on the image data and the position coordinate are overlapped, and the drawing point is determined based on the image data of the image area to which the position coordinate belongs. Data can be acquired.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. In the drawing point data acquisition method for acquiring drawing point data used when drawing an image, the position coordinates can correspond to a drawing point formation region at a predetermined position on the drawing target.

  Further, it is possible to superimpose an image area determined based on image data and a line including the position coordinates, and to obtain drawing point data based on image data of an image area where the line overlaps. Further, the drawing point data can be acquired based on the position of the intersection between the image data and the line.

  Further, it is possible to acquire intersection arrangement information indicating the intersection of the contour of the image represented in the image data or obtained from the image data and the line, and acquire drawing point data based on the intersection arrangement information. .

  In addition, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points.

  In addition, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points arranged in time series.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. A drawing point data acquisition method for acquiring drawing point data used when drawing an image on a line, wherein a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points arranged in time series. .

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. A drawing point data acquisition method for acquiring drawing point data used when drawing an image on a line, wherein a line corresponds to a drawing locus of a drawing point formation area on the drawing target or in the image space on the drawing target It can be.

  In addition, the drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is moved according to the movement. A drawing point data acquisition method for acquiring drawing point data used when a corresponding drawing point group is sequentially formed on a drawing target and an image is drawn on the drawing target. Can correspond to a line connecting at least some of the drawing point formation regions of the drawing point formation region group.

  Further, the sampling pitch can be attached to the line.

  Further, it is possible to superimpose an image area determined based on image data and a predetermined area including the position coordinates so as to acquire drawing point data based on image data of an image area where the predetermined area overlaps.

  In addition, the drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is moved according to the movement. A drawing point data acquisition method for acquiring drawing point data used when a corresponding drawing point group is sequentially formed on a drawing target and an image is drawn on the drawing target. It may correspond to at least a part of the drawing point formation region group at the position.

  In the second drawing point data acquisition method of the present invention, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is changed according to the movement. In a drawing point data acquisition method for acquiring drawing point data that is sequentially formed on a drawing target and used for drawing an image on the drawing target, the original vector format image data of the image is acquired and the image is drawn Information on the drawing trajectory of the drawing point formation area on the drawing object for the image or in the image space on the drawing object, and corresponding to the contour and drawing trajectory information of the image represented by or obtained from the image data Intersection location information indicating the location of the intersection with the drawing point data locus on the image data is acquired, and the drawing point data corresponding to the drawing point data locus is obtained based on the intersection location information. The and acquiring.

  In the second drawing point data acquisition method of the present invention, the drawing point data trajectory is divided by the intersection indicated by the intersection arrangement information as a partial drawing point data trajectory, and the partial drawing point data trajectory includes the partial drawing point data trajectory. The binarized data is alternately assigned in the order in which the trajectories are arranged, and the binarized data assigned to each partial drawing point data trajectory is sampled at predetermined intervals in the scanning direction on the image data corresponding to the direction of movement. Drawing point data corresponding to the data locus can be acquired.

  Further, a coordinate value in the scanning direction on the image data corresponding to the direction of the movement of the intersection arrangement information is acquired, and the acquired coordinate value is divided by a predetermined interval value in the scanning direction on the image data to quantize. A quantization value is obtained, a difference between quantization values adjacent to each other in the scanning direction on the image data is obtained, the difference is obtained as run length data, and the obtained run length data is decoded to correspond to a drawing point data locus. Drawing point data can be acquired.

  Also, speed fluctuation information indicating fluctuations in the actual movement speed of the drawing target at the time of drawing the image with respect to a predetermined relative movement speed of the drawing target set in advance is acquired, and based on the acquired speed fluctuation information, the drawing target The drawing point data can be acquired by changing the predetermined interval so that the number of the drawing point data increases in the drawing region on the drawing target whose actual moving speed is relatively slow.

  Further, a plurality of reference marks provided in advance at predetermined positions on the drawing target are detected, detection position information indicating the positions of the reference marks is acquired, and drawing trajectory information is acquired based on the acquired detection position information. Can be.

  Also, deviation information about the actual movement direction of the drawing target when drawing an image with respect to a predetermined relative movement direction of the drawing target set in advance is acquired, and drawing trajectory information is acquired based on the acquired deviation information. be able to.

  Also, deviation information of the actual movement direction of the drawing target when drawing an image with respect to a predetermined relative movement direction of the drawing target set in advance is acquired, and drawing trajectory information is obtained based on the acquired deviation information and the detected position information. Can be acquired.

  A first drawing method of the present invention is a drawing method in which drawing points are formed on a drawing target based on the drawing point data and an image is drawn on the drawing target, and image data in the original vector format of the image is acquired. A position coordinate on the image data corresponding to a position where a drawing point on the drawing target should be formed is acquired, and drawing point data of the drawing point is acquired based on the image data in the vector format and the position coordinate. A drawing point is formed on a drawing target based on the acquired drawing point data.

  In the first drawing method of the present invention, the image area determined based on the image data and the position coordinates are overlapped, and the drawing point data is obtained based on the image data of the image area to which the position coordinates belong. To be able to.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. In the drawing method of drawing an image, the position coordinates may correspond to a drawing point formation region at a predetermined position on the drawing target.

  Further, it is possible to superimpose an image area determined based on image data and a line including the position coordinates, and to obtain drawing point data based on image data of an image area where the line overlaps.

  Further, the drawing point data can be acquired based on the position of the intersection between the image data and the line.

  Further, it is possible to acquire intersection arrangement information indicating the intersection of the contour of the image represented in the image data or obtained from the image data and the line, and acquire drawing point data based on the intersection arrangement information. .

  In addition, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points.

  In addition, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points arranged in time series.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. In this drawing method, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points arranged in time series.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. In this drawing method, the line can correspond to the drawing locus of the drawing point formation region on the drawing target or in the image space on the drawing target.

  In addition, the drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is moved according to the movement. A drawing method for sequentially forming corresponding drawing point groups on a drawing target and drawing an image on the drawing target, wherein a line is drawn at least in a part of the drawing point forming region group at a predetermined position on the drawing target It can correspond to a line connecting the formation regions.

  In addition, information on the sampling pitch can be attached to the line.

  Further, it is possible to superimpose an image area determined based on image data and a predetermined area including the position coordinates so as to acquire drawing point data based on image data of an image area where the predetermined area overlaps. .

  In addition, the drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is moved according to the movement. A drawing method for sequentially forming corresponding drawing point groups on a drawing target and drawing an image on the drawing target, wherein the predetermined area is at least a part of the drawing point forming area group at a predetermined position on the drawing target. It can correspond to a region.

  According to the second drawing method of the present invention, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is moved on the drawing target according to the movement. In the drawing method of sequentially forming the images on the drawing target and acquiring the image data in the original vector format, the image data is drawn on the drawing target for drawing the image or in the image space on the drawing target. The drawing locus information of the drawing point formation area is acquired, and the arrangement of the intersection of the image contour represented by the image data or obtained from the image data and the drawing point data locus on the image data corresponding to the drawing locus information is shown. Acquire intersection point arrangement information, acquire drawing point data corresponding to the drawing point data locus based on the intersection arrangement information, and draw point formation area based on the acquired drawing point data. And forming a drawing points on the drawing object by.

  In the second drawing method of the present invention, the drawing point data trajectory is divided by the intersection indicated by the intersection arrangement information as a partial drawing point data trajectory, and the partial drawing point data trajectory includes the partial drawing point data trajectory. The binarized data is alternately assigned in the order of arrangement, and the binarized data assigned to each partial drawing point data locus is sampled at predetermined intervals in the scanning direction on the image data corresponding to the moving direction. Drawing point data corresponding to the data locus can be acquired.

  Further, a coordinate value in the scanning direction on the image data corresponding to the direction of the movement of the intersection arrangement information is acquired, and the acquired coordinate value is divided by a predetermined interval value in the scanning direction on the image data to quantize. A quantization value is obtained, a difference between quantization values adjacent to each other in the scanning direction on the image data is obtained, the difference is obtained as run length data, and the obtained run length data is decoded to correspond to a drawing point data locus. Drawing point data can be acquired.

  Also, speed fluctuation information indicating fluctuations in the actual movement speed of the drawing target at the time of drawing the image with respect to a predetermined relative movement speed of the drawing target set in advance is acquired, and based on the acquired speed fluctuation information, the drawing target The drawing point data can be acquired by changing the predetermined interval so that the number of the drawing point data increases in the drawing region on the drawing target whose actual moving speed is relatively slow.

  Further, a plurality of reference marks provided in advance at predetermined positions on the drawing target are detected, detection position information indicating the positions of the reference marks is acquired, and drawing trajectory information is acquired based on the acquired detection position information. Can be.

  Also, deviation information about the actual movement direction of the drawing target when drawing an image with respect to a predetermined relative movement direction of the drawing target set in advance is acquired, and drawing trajectory information is acquired based on the acquired deviation information. be able to.

  Also, deviation information of the actual movement direction of the drawing target when drawing an image with respect to a predetermined relative movement direction of the drawing target set in advance is acquired, and drawing trajectory information is obtained based on the acquired deviation information and the detected position information. Can be acquired.

  The first drawing point data acquisition device according to the present invention is a drawing point data for forming drawing points on a drawing target based on the drawing point data and acquiring drawing point data used when drawing an image on the drawing target. In the acquisition device, position coordinate acquisition means for acquiring the position coordinates on the image data in the original vector format of the image corresponding to the position where the drawing point on the drawing target should be formed, and the image in the original vector format of the image It is characterized by comprising drawing point data acquisition means for acquiring data and acquiring drawing point data of drawing points based on the acquired vector format image data and the position coordinates acquired by the position coordinate acquisition means, To do.

  In the first drawing point data acquisition apparatus of the present invention, the drawing point data acquisition unit superimposes the image area determined based on the image data and the position coordinate, and the image area to which the position coordinate belongs. The drawing point data can be acquired based on the image data.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. In the drawing point data acquisition device for acquiring drawing point data used when drawing an image, the position coordinates can correspond to a drawing point formation region at a predetermined position on the drawing target.

  Further, the drawing point data acquisition means superimposes the image area determined based on the image data and the line including the position coordinates, and acquires the drawing point data based on the image data of the image area where the line overlaps. It can be. Further, the drawing point data acquisition means may acquire drawing point data based on the position of the intersection between the image data and the line.

  Further, it is provided with intersection arrangement information acquisition means for acquiring intersection arrangement information indicating the intersection between the contour of the image represented in the image data or obtained from the image data and the line, and the drawing point data acquisition means is provided with the intersection arrangement information. The drawing point data can be acquired based on the intersection arrangement information acquired by the acquisition means.

  In addition, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points.

  In addition, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points arranged in time series.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. A drawing point data acquisition device for acquiring drawing point data used when drawing an image on a line, and a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points arranged in time series .

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. A drawing point data acquisition apparatus for acquiring drawing point data used when drawing an image on a line, wherein a line corresponds to a drawing locus of a drawing point formation region on the drawing target or in the image space on the drawing target Can be.

  In addition, the drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is moved according to the movement. A drawing point data acquisition device that sequentially forms corresponding drawing point groups on a drawing target and acquires drawing point data used when drawing an image on the drawing target. Can correspond to a line connecting at least some of the drawing point formation regions of the drawing point formation region group.

  Further, the sampling pitch can be attached to the line.

  Further, the drawing point data acquisition means superimposes the image area determined based on the image data and the predetermined area including the position coordinates, and acquires the drawing point data based on the image data of the image area where the predetermined area overlaps. Can be.

  In addition, the drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is moved according to the movement. A drawing point data acquisition apparatus for sequentially obtaining corresponding drawing point groups on a drawing target and acquiring drawing point data used when drawing an image on the drawing target. It may correspond to at least a part of the drawing point formation region group at the position.

  The second drawing point data acquisition apparatus of the present invention moves a drawing point forming area for forming a drawing point based on the drawing point data relative to the drawing target, and changes the drawing point in accordance with the movement. An image space on or on a drawing object for drawing an image in a drawing point data acquisition apparatus that obtains drawing point data that is sequentially formed on a drawing object and used to draw an image on the drawing object Drawing trajectory information acquisition means for acquiring drawing trajectory information of the drawing point formation area above, and an image obtained by acquiring the original vector format image data of the image and obtained from the acquired image data Intersection location information acquisition means for acquiring intersection location information indicating the location of the intersection of the drawing point data trajectory on the image data corresponding to the contour and the drawing trajectory information; Characterized in that a drawing point data obtaining means for obtaining drawing point data corresponding to the drawing trajectories based on the obtained intersection arrangement information by the information acquisition means.

  In the second drawing point data acquisition apparatus of the present invention described above, the drawing point data acquisition means is configured as a partial drawing point data locus by dividing the drawing point data locus by the intersection indicated by the intersection arrangement information. The binarized data is alternately assigned to the trajectory in the order in which the partial drawing point data trajectories are arranged, and the binarized data assigned for each partial drawing point data trajectory is scanned in the scanning direction on the image data corresponding to the moving direction. It is possible to obtain the drawing point data corresponding to the drawing point data locus by sampling at a predetermined interval.

  Further, the drawing point data obtaining means obtains the coordinate value in the scanning direction on the image data corresponding to the moving direction of the intersection arrangement information, and the obtained coordinate value is obtained at a predetermined interval in the scanning direction on the image data. Divide each value to obtain a quantized value, find the difference between adjacent quantized values in the scan direction on the image data, obtain the difference as run-length data, decode the obtained run-length data, and Drawing point data corresponding to the drawing point data trajectory can be acquired.

  Further, the apparatus further comprises speed fluctuation information acquisition means for acquiring speed fluctuation information indicating fluctuations in the actual movement speed of the drawing target when the image is drawn with respect to a predetermined relative movement speed of the drawing target set in advance. Based on the speed fluctuation information acquired by the speed fluctuation information acquisition means, the acquisition means is configured so that the number of the drawing point data increases as the drawing area on the drawing target has a relatively slow actual movement speed of the drawing target. Drawing point data can be acquired by changing the interval.

  Further, the apparatus further comprises position information detecting means for detecting a plurality of reference marks provided in advance at predetermined positions on the drawing target and acquiring detected position information indicating the positions of the reference marks, and the drawing trajectory information acquiring means The drawing trajectory information can be acquired based on the detected position information acquired by the position information detecting means.

  Further, the apparatus further includes deviation information acquisition means for acquiring deviation information of the actual movement direction of the drawing target when the image is drawn with respect to a predetermined relative movement direction of the drawing target set in advance. The drawing trajectory information can be acquired based on the deviation information acquired by the deviation information acquisition means.

  Further, the apparatus further includes deviation information acquisition means for acquiring deviation information of the actual movement direction of the drawing target when the image is drawn with respect to a predetermined relative movement direction of the drawing target set in advance. The drawing trajectory information can be acquired based on the shift information acquired by the shift information acquisition means and the detected position information acquired by the position information detection means.

  According to a first drawing apparatus of the present invention, in a drawing apparatus that forms a drawing point on a drawing target based on the drawing point data and draws an image on the drawing target, the drawing point on the drawing target is to be formed. Corresponding position coordinate acquisition means for acquiring the position coordinates on the image data in the original vector format of the image, the image data in the original vector format of the image is acquired, and the acquired vector format image data and the above position coordinates A drawing point data acquisition unit that acquires drawing point data of a drawing point based on the position coordinates acquired by the acquisition unit, and a drawing point is formed on the drawing target based on the drawing point data acquired by the drawing point data acquisition unit And a drawing means.

  In the first drawing apparatus of the present invention, the drawing point data acquisition means superimposes the image area determined based on the image data and the position coordinate, and the image data of the image area to which the position coordinate belongs. The drawing point data can be acquired based on the above.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. In the drawing apparatus for drawing an image, the position coordinates may correspond to a drawing point formation region at a predetermined position on the drawing target.

  Further, the drawing point data acquisition means superimposes the image area determined based on the image data and the line including the position coordinates, and acquires the drawing point data based on the image data of the image area where the line overlaps. And can.

  Further, the drawing point data acquisition means may acquire drawing point data based on the position of the intersection between the image data and the line.

  Further, it is provided with intersection arrangement information acquisition means for acquiring intersection arrangement information indicating the intersection between the contour of the image represented in the image data or obtained from the image data and the line, and the drawing point data acquisition means is provided with the intersection arrangement information. The drawing point data can be acquired based on the intersection arrangement information acquired by the acquisition means.

  In addition, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points.

  In addition, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points arranged in time series.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. In the drawing apparatus for drawing an image, a line can be connected to a plurality of position coordinates corresponding to a plurality of drawing points arranged in time series.

  In addition, the drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement. In the drawing apparatus for drawing an image, a line may correspond to a drawing locus of a drawing point formation region on the drawing target or on an image space on the drawing target.

  In addition, the drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is moved according to the movement. A drawing device that sequentially forms corresponding drawing point groups on a drawing target and draws an image on the drawing target, wherein a line is drawn at least in a part of the drawing point forming region group at a predetermined position on the drawing target. It can correspond to the line which connects.

  In addition, information on the sampling pitch can be attached to the line.

  Further, the drawing point data acquisition means superimposes the image area determined based on the image data and the predetermined area including the position coordinates, and acquires the drawing point data based on the image data of the image area where the predetermined area overlaps. Can be.

  In addition, the drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is moved according to the movement. A drawing apparatus for sequentially forming corresponding drawing point groups on a drawing target and drawing an image on the drawing target, wherein the predetermined area is at least a part of the drawing point forming area group at a predetermined position on the drawing target. It can correspond to a region.

  The second drawing apparatus of the present invention moves a drawing point forming area for forming a drawing point based on the drawing point data relative to the drawing target, and moves the drawing point on the drawing target according to the movement. In a drawing device that sequentially forms images and draws an image on the drawing target, the drawing locus for obtaining information on the drawing locus of the drawing point formation area on the drawing object for drawing the image or on the image space on the drawing object Information acquisition means and image data in the original vector format of the image, and drawing point data on the image data corresponding to the image contour and drawing trajectory information represented by or obtained from the acquired image data Intersection arrangement information acquisition means for acquiring intersection arrangement information indicating the arrangement of the intersection with the locus, and a drawing locus based on the intersection arrangement information acquired by the intersection arrangement information acquisition means Drawing point data acquisition means for acquiring a plurality of corresponding drawing point data, and drawing means for forming drawing points on a drawing target by a drawing point formation area based on the drawing point data acquired by the drawing point data acquisition means It is characterized by that.

  Further, in the second drawing apparatus of the present invention, the drawing point data acquisition means is a partial drawing point data locus obtained by dividing the drawing point data locus by the intersection indicated by the intersection arrangement information, Binarized data is alternately assigned in the order in which the partial drawing point data trajectories are arranged, and the binarized data assigned to each partial drawing point data trajectory is set at a predetermined interval in the scanning direction on the image data corresponding to the moving direction. It is possible to obtain the drawing point data corresponding to the drawing point data locus by sampling.

  Further, the drawing point data obtaining means obtains the coordinate value in the scanning direction on the image data corresponding to the moving direction of the intersection arrangement information, and the obtained coordinate value is obtained at a predetermined interval in the scanning direction on the image data. Divide each value to obtain a quantized value, find the difference between adjacent quantized values in the scan direction on the image data, obtain the difference as run-length data, decode the obtained run-length data, and Drawing point data corresponding to the drawing point data trajectory can be acquired.

  Further, the apparatus further comprises speed fluctuation information acquisition means for acquiring speed fluctuation information indicating fluctuations in the actual movement speed of the drawing target when drawing an image with respect to a predetermined relative movement speed of the drawing target set in advance, and drawing point data acquisition means Based on the speed fluctuation information acquired by the speed fluctuation information acquisition means, the predetermined interval is set so that the number of the drawing point data increases in the drawing area on the drawing target whose actual moving speed of the drawing target is relatively slow. The drawing point data can be acquired by changing.

  Further, the apparatus further comprises position information detecting means for detecting a plurality of reference marks provided in advance at predetermined positions on the drawing target and acquiring detected position information indicating the positions of the reference marks, and the drawing trajectory information acquiring means The drawing trajectory information can be acquired based on the detected position information acquired by the position information detecting means.

  Further, the apparatus further includes deviation information acquisition means for acquiring deviation information of the actual movement direction of the drawing target when the image is drawn with respect to a predetermined relative movement direction of the drawing target set in advance. The drawing trajectory information can be acquired based on the deviation information acquired by the deviation information acquisition means.

  Further, the apparatus further includes deviation information acquisition means for acquiring deviation information of the actual movement direction of the drawing target when the image is drawn with respect to a predetermined relative movement direction of the drawing target set in advance. The drawing trajectory information can be acquired based on the shift information acquired by the shift information acquisition means and the detected position information acquired by the position information detection means.

  Here, the “drawing point formation region” may be a region formed by any region as long as a drawing point is formed on a drawing target. For example, each modulation element of a spatial light modulation element such as a DMD. It may be a beam spot formed by the beam light reflected by the light source, or a beam spot formed by the beam light itself emitted from the light source, or ink ejected from each nozzle of the ink jet printer is attached. It may be an area.

  Further, the above-mentioned “partitioning point data locus is divided by intersections indicated by intersection arrangement information to make partial drawing point data locus” means that the drawing point data locus is divided at all intersections to obtain partial drawing point data locus. For example, when two images overlap and a part of one image exists inside the other image, the outline of the inner image and the drawing point data trajectory for that part are included. It is also possible to acquire the partial drawing point data trajectory by assuming that there is no intersection point with.

  Further, as “binarized data”, 0 data and 1 data may be used, or other binarized data may be used.

  The drawing point data in the present invention is not limited to binary data. For example, when image data in vector format has multi-value information, multi-value data is used as drawing point data using the multi-value information. May be obtained.

  According to the drawing point data acquisition method and apparatus and the drawing method and apparatus of the present invention, the original vector format image data of the image is acquired, and the drawing point data is acquired directly from the vector format image data. The drawing point data can be obtained directly from the vector format image data without converting the vector format image data into the raster format image data as in the prior art, without reducing the processing speed and increasing the cost. The drawing accuracy can be improved.

  Hereinafter, a drawing point data acquisition method and apparatus and an exposure apparatus using the first embodiment of the drawing method and apparatus according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view showing a schematic configuration of an exposure apparatus using the first embodiment of the present invention. An exposure apparatus using the first embodiment of the present invention is an apparatus for exposing a wiring pattern of each layer of a multilayer printed wiring board, and an exposure point data acquisition method used for exposing the wiring pattern of each layer First, the schematic configuration of the exposure apparatus will be described.

  As shown in FIG. 1, the exposure apparatus 10 includes a flat moving stage 14 that holds the substrate 12 by adsorbing the substrate 12 to the surface. Two guides 20 extending along the stage moving direction are installed on the upper surface of the thick plate-like installation table 18 supported by the four legs 16. The moving stage 14 is arranged so that the longitudinal direction thereof faces the stage moving direction, and is supported by the guide 20 so as to be reciprocally movable.

  A U-shaped gate 22 is provided at the center of the installation table 18 so as to straddle the moving path of the moving stage 14. Each end of the U-shaped gate 22 is fixed to both side surfaces of the installation base 18. A scanner 24 is provided on one side of the gate 22, and the front and rear ends of the substrate 12 and positions of a plurality of circular reference marks 12 a provided in advance on the substrate 12 are provided on the other side. A plurality of cameras 26 are provided for detecting the above.

  Here, the reference mark 12a in the substrate 12 is, for example, a hole formed on the substrate 12 based on preset reference mark position information. In addition to the holes, lands, vias, and etching marks may be used. Further, as the reference mark 12a, a predetermined pattern such as a part of a circuit pattern exposed on the substrate 12 may be used. In FIG. 1, only six reference marks 12a are shown, but actually, a large number of reference marks 12a are provided. Further, the edge of the substrate 12 may be detected as the reference mark 12a.

  The scanner 24 and the camera 26 are respectively attached to the gate 22 and fixedly arranged above the moving path of the moving stage 14. The scanner 24 and the camera 26 are connected to a controller (described later) that controls them.

  As shown in FIGS. 2 and 3B, the scanner 24 includes ten exposure heads 30 (30A to 30J) arranged in a substantially matrix of 2 rows and 5 columns.

  Inside each exposure head 30, a digital micromirror device (DMD) 36, which is a spatial light modulation element (SLM) that spatially modulates an incident light beam, is provided as shown in FIG. In the DMD 36, a large number of micromirrors 38 are two-dimensionally arranged in a direction orthogonal to each other, and the micromirrors 38 are attached so that the column direction of the micromirrors 38 forms a predetermined set inclination angle θ with the scanning direction. Therefore, the exposure area 32 by each exposure head 30 is a rectangular area inclined with respect to the scanning direction. As the stage 14 moves, a strip-shaped exposed region 34 is formed on the substrate 12 for each exposure head 30. Although a light source that makes a light beam incident on each exposure head 30 is not shown, for example, a laser light source or the like can be used.

  The DMD 36 provided in each of the exposure heads 30 is on / off controlled in units of micromirrors 38, and the substrate 12 is exposed to a dot pattern (black / white) corresponding to the micromirrors 38 of the DMD 36. The aforementioned strip-shaped exposed region 34 is formed by two-dimensionally arranged dots corresponding to the micromirrors 38 shown in FIG. The two-dimensional dot pattern is inclined with respect to the scanning direction, so that dots arranged in the scanning direction pass between dots arranged in the direction intersecting the scanning direction. Can be planned. Note that there may be a dot that is not used due to variations in the adjustment of the tilt angle. For example, in FIG. 4, the hatched dot is a dot that is not used, and the micromirror 38 in the DMD 36 corresponding to this dot is always in the OFF state. It becomes.

  Further, as shown in FIGS. 3A and 3B, the exposure heads of the respective rows arranged in a line so that each of the strip-shaped exposed areas 34 partially overlaps the adjacent exposed areas 34. Each of 30 is arranged at a predetermined interval in the arrangement direction. For this reason, for example, the portion that cannot be exposed between the exposure area 32A located on the leftmost side of the first row and the exposure area 32C located on the right side of the exposure area 32A is the exposure area located on the leftmost side of the second row. It is exposed by 32B. Similarly, the portion that cannot be exposed between the exposure area 32B and the exposure area 32D located on the right side of the exposure area 32B is exposed by the exposure area 32C.

  Next, the electrical configuration of the exposure apparatus 10 will be described. As shown in FIG. 5, the exposure apparatus 10 obtains exposure image data in a vector format representing an exposure image to be exposed on the substrate 12 output from the data creation apparatus 40 having a CAM (Computer Aided Manufacturing) station, Based on the acquired exposure image data in the vector format, intermediate vector generation means 50 for generating intermediate vector data to be described later, and detection position information of the reference mark 12a is acquired based on the image of the reference mark 12a taken by the camera 26. Detection position information acquisition means 52 that performs detection, and an exposure locus that acquires information on the exposure locus of each micromirror 38 on the substrate 12 during actual exposure based on the detection position information acquired by the detection position information acquisition means 52 Information acquisition means 54 and each micromirror 38 acquired by exposure trajectory information acquisition means 54 Based on the exposure trajectory information and the intermediate vector data output from the intermediate vector generation means 50, the arrangement of the intersection of the exposure point data trajectory on the intermediate vector data corresponding to the exposure trajectory information and the vector represented by the intermediate vector data Intersection position information calculating means 56 for calculating intersection position information indicating the exposure point data corresponding to the exposure point data trajectory for each micromirror 38 based on the intersection position information calculated by the intersection position information calculating means 56. An exposure point data acquisition unit 58 to be acquired, an exposure head control unit 59 for controlling the DMD 36 of the exposure head 30 based on the exposure point data for each micromirror 38 acquired by the exposure point data acquisition unit 58, and the moving stage 14 A moving mechanism 60 for moving the exposure apparatus in the stage moving direction, and the entire exposure apparatus. And a controller 70. The moving mechanism 60 may adopt any known configuration as long as it moves the moving stage 14 back and forth along the guide 20. The intermediate vector data, the exposure point data trajectory, the intersection arrangement information, and the operation of each component will be described in detail later.

  Next, the operation of the exposure apparatus 10 using the first embodiment will be described with reference to the drawings.

  First, in the data creation device 40, exposure vector data in the original vector format of the exposure image to be exposed on the substrate 12 is created. Then, the exposure image data in the vector format is input to the intermediate vector generation means 50, and the intermediate vector generation means 50 generates intermediate vector data based on the input exposure image data in the vector format. The intermediate vector data represents the outline of the exposure image represented by the exposure image data in the vector format as data in the vector format. FIG. 6A shows an example of an exposure image represented by exposure image data in vector format, and FIG. 6B shows an intermediate image generated based on the exposure image data of the exposure image shown in FIG. A vector represented by vector data is shown. The hatched portion in FIG. 6A is an exposure image represented by exposure image data, and the arrow in FIG. 6B is a vector represented by intermediate vector data. Further, the vector here includes not only a vector represented by a straight line but also a vector represented by a curve as shown in FIG. With respect to the generation method of the intermediate vector data, for example, if the exposure image data in the vector format is region vector data, the intermediate vector data is generated using data indicating the contour in the region vector data. Good. Further, when the exposure image data in the vector format is composed of data indicating the direction of the line segment and data indicating the thickness of the line segment, it is converted into area vector data based on the data indicating the thickness. Then, intermediate vector data may be generated using data indicating the contour in the area vector data.

  When forming the intermediate vector data, information indicating whether one side is on or off may be added with a vector representing an outline as a boundary. For example, information that the direction in which Y increases is on or off (in the case of a vector parallel to the Y direction, the direction in which X increases is on or off) may be added, or the right side is on from the start point to the end point in advance. The contour vector may be generated after the left side is determined to be off. By forming the intermediate vector data in this way, on and off allocation can be easily performed when exposure point data to be described later is acquired.

  In the present embodiment, as shown in FIG. 6A, when two exposure images are arranged so as to overlap each other, as shown in FIG. 6B and FIG. Are combined into one exposure image represented by one contour, and intermediate vector data of the one exposure image is generated. However, the present invention is not limited to such a mode, and intermediate vector data may be generated for two overlapping exposure images.

  The intermediate vector data generated as described above is output from the intermediate vector generation means 50 to the intersection arrangement information calculation means 56.

  On the other hand, the intermediate vector data is generated as described above, and the information of the exposure locus on the substrate 12 at the time of actual exposure for each micromirror 38 of the DMD 36 of each exposure head 30 is acquired. When forming a multilayer substrate, it is necessary to draw an upper layer pattern in accordance with a lower layer pattern. In this case, an exposure locus on an image space on the substrate is defined.

  Specifically, a controller 70 that controls the operation of the entire exposure apparatus 10 outputs a control signal to the moving mechanism 60, and the moving mechanism 60 moves the moving stage 14 from the position shown in FIG. 1 to the guide 20 in accordance with the control signal. Then, it is moved to the upstream side, and then moved in the stage moving direction at a desired speed.

  When the substrate 12 on the moving stage 14 moving as described above passes under the plurality of cameras 26, the substrate 12 is photographed by these cameras 26, and the photographed image data representing the photographed images is detected positions. Input to the information acquisition means 52. The detection position information acquisition unit 52 acquires detection position information indicating the position of the reference mark 12a of the substrate 12 based on the input captured image data. As a method of acquiring the detection position information of the reference mark 12a, for example, it may be acquired by extracting a circular image, but any other known acquisition method may be adopted. The detection position information of the reference mark 12a is specifically acquired as a coordinate value. The origin of the coordinate value is, for example, one of four corners of the captured image data of the substrate 12. Or a predetermined position set in advance in the captured image data, or the position of one reference mark 12a among the plurality of reference marks 12a. It is assumed that the coordinate systems of the detection position information and the reference mark position information match. In the present embodiment, the camera 26 and the detected position information acquisition means 52 constitute position information detection means.

  The detected position information of the reference mark 12a acquired as described above is output from the detected position information acquiring unit 52 to the exposure trajectory information acquiring unit 54.

  Then, in the exposure trajectory information acquisition means 54, information on the exposure trajectory for each micromirror 38 on the substrate 12 at the time of actual exposure is acquired based on the input detected position information. Specifically, in the exposure trajectory information acquisition means 54, passage position information indicating the position through which each micromirror 38 of the DMD 36 of each exposure head 30 passes is set for each micromirror 38 in advance. The passage position information is determined by the installation position of each exposure head 30 with respect to the installation position of the substrate 12 on the moving stage 14, and is set in advance. It is expressed by a vector or a plurality of coordinate values with the same point as the reference mark position information and the detected position information as the origin. It is assumed that the coordinate system of the passing position information also coincides with the coordinate system of the reference mark position information and the detected position information. In FIG. 8, the ideally shaped substrate 12 that has not undergone the press process or the like, that is, no deformation such as distortion has occurred, and the reference mark 12a is arranged at the position indicated by the preset reference mark position information 12b. The schematic diagram which shows the relationship between the board | substrate 12 and the passage position information 12c of the predetermined | prescribed micromirror 38 is shown. The passing position information may be obtained based on the result of measuring the position of the beam spot on the substrate 12.

  Then, in the exposure trajectory information acquisition means 54, as shown in FIG. 9, the intersection of the straight line connecting the adjacent detection position information 12d in the direction orthogonal to the scanning direction and the straight line represented by the passing position information 12c of each micromirror 38. Is obtained. That is, the coordinate value of the point of the x mark in FIG. 9 is obtained, and further, the distance between the x mark and each detection position information 12d adjacent to the x mark in the orthogonal direction is obtained, and the adjacent detection position information is obtained. A ratio between the distance between one detection position information 12d of 12d and the x mark and the distance between the other detection position information 12d and the x mark is obtained. Specifically, a1: b1, a2: b2, a3: b3 and a4: b4 in FIG. 9 are obtained as exposure trajectory information. The ratio obtained as described above represents the exposure locus of the micromirror 38 on the substrate 12 after deformation. That is, it represents the exposure locus of the micromirror 38 on the substrate 12 during actual exposure (exposure locus in the image space on the substrate 12).

  Then, the exposure trajectory information obtained for each micromirror 38 as described above is input to the intersection arrangement information calculation means 56.

  In the intersection arrangement information calculating means 56, a coordinate system of intermediate vector data as shown in FIG. 10 is set in advance. The coordinate system of the intermediate vector data is also the coordinate system of the exposure image data, and the coordinate system and the coordinate systems of the reference mark position information, the detected position information, and the passing position information all match. In the coordinate system, as shown in FIG. 10, exposure image data reference position information 12e is arranged at a position corresponding to the position indicated by the reference mark position information 12b. In the intersection arrangement information calculation means 56, first, a straight line connecting the exposure image data reference position information 12e adjacent in the direction orthogonal to the scanning direction is based on the ratio indicated by the exposure trajectory information obtained as described above. The coordinate values of the divided points are obtained. That is, a coordinate value of a point satisfying the following expression is obtained.

a1: b1 = A1: B1
a2: b2 = A2: B2
a3: b3 = A3: B3
a4: b4 = A4: B4
Then, a straight line connecting the division points obtained as described above is obtained. The straight line indicates the exposure point data locus on the exposure image data corresponding to the exposure locus of the micromirror 38 on the substrate 12 in actual exposure.

  As described above, the division points obtained based on the ratio indicated by the exposure trajectory information may be connected by straight lines, and the straight lines may be used as exposure point data trajectories, or the division points may be connected by curves by spline interpolation, etc. You may make it acquire a curve as an exposure point data locus. If the lines are connected by a curved line by spline interpolation or the like as described above, an exposure point data locus that is more faithful to the deformation of the substrate 12 can be acquired. Further, if the characteristics of the material of the substrate 12 (for example, it expands and contracts only in a specific direction) is reflected in the calculation method such as the spline interpolation, the exposure point data locus that is more faithful to the deformation of the substrate 12 can be obtained. Can be obtained.

  Then, as shown in FIG. 11, the exposure point data trajectory obtained as described above and the intermediate vector data are plotted in the same coordinate system, and the intersection of the vector represented by the intermediate vector data and the exposure point data trajectory is plotted. Placement information is required. Here, the intersection arrangement information is the coordinate value of the intersection. That is, the coordinate values of the intersections A to F shown in FIG. 11 are acquired. Note that the exposure point data trajectory delimited by the intersections A to F shown in FIG. 11 is the partial drawing point data trajectory.

  Here, a method of calculating the intersection arrangement information will be specifically described. Here, for example, calculation of intersection arrangement information when the vector represented by the intermediate vector data is a line segment represented by the following expression (1) and the exposure point data locus is a line segment represented by the following expression (2). The method will be described with reference to the flowchart of FIG.

x = a ₁ y + b ₁ , x _s1 ≦ x ≦ x _e1 , y _s1 ≦ y ≦ y _e1 (1)
x = a ₂ y + b ₂ , x _s2 ≦ x ≦ x _e2 , y _s2 ≦ y ≦ y _e2 (2)
As shown in the flowchart of FIG. 12, first, a1 in equation (1) and a2 in equation (2) are compared, that is, the slopes of both straight lines are compared (S10), and when these are the same, The calculation is terminated assuming that there is no intersection (S12). Meanwhile, _{a 1} and _{a 2} is in the case of different values, the intersection calculation is performed in S10 (S14). Specifically, the x coordinate and the y coordinate of the intersection are calculated by the following calculation.

y than _{a 1 y + b 1 = a} 2 y + b 2 = (b 2 -b 1) / (a 1 -a 2)
x = a ₁ y + b ₁
Then, the magnitude of the y coordinate of the intersection obtained as described above is compared with y _s2 and y _e2 to confirm whether the intersection exists on the exposure point data locus. (S16). If y _s2 <y ≦ y _e2 is not satisfied, the calculation is terminated assuming that there is no intersection (S12). On the other hand, when y _s2 <y ≦ y _e2 is satisfied, whether or not the vector represented by the intermediate vector data is parallel to the x axis is confirmed by checking whether y _s1 and y _e1 are the same value. (S18). If the vector is not parallel to the x-axis, the intersection obtained as described above is represented by the intermediate vector data by comparing the y coordinate size with y _s1 and y _e1. It is confirmed whether or not it exists on the vector (S20). If y _s1 <y ≦ y _e1 is not satisfied, the calculation is terminated assuming that there is no intersection (S12). On the other hand, when y _s1 <y ≦ y _e1 is satisfied, the x-coordinate and the y-coordinate obtained as described above are acquired as if there is an intersection. If it is confirmed in S18 that the vector represented by the intermediate vector data is parallel to the x axis, the size of the x coordinate is compared with x _s1 and x _e1 as described above. It is confirmed whether or not the obtained intersection point exists on the vector represented by the intermediate vector data (S22). Then, when x _s1 <x ≦ x _e1 is not satisfied, the calculation is terminated assuming that there is no intersection (S24). On the other hand, when x _s1 <x ≦ x _e1 is satisfied, the x-coordinate and the y-coordinate obtained as described above are obtained assuming that there is an intersection.

  Next, calculation of intersection arrangement information when the vector represented by the intermediate vector data is a curve (arc) represented by the following equation (3) and the exposure point data locus is a line segment represented by the following equation (4): A method is demonstrated using the flowchart of FIG.

(X−a ₁ ) ² + (y−b ₁ ) ² = c ² (3)
x = a ₂ y + b ₂ , x _s ≦ x ≦ x _e , y _s ≦ y ≦ y _e (4)
As shown in the flowchart of FIG. 13, first, the intersections of these are calculated based on the above equations (3) and (4) (S30). Here, after converting the above equation (3) into the coordinate system with the center of the circle as the origin, like the following equation (5), and the above equation (4) as the following equation (5), The intersection (X, Y) is determined.

When X = x−a ₁ and Y = y−b ₁ , the above equation (3) is
X ² + Y ² = c ² (5)
Similarly, if X = xa ₁ and Y = yb ₁ , the above equation (4) is
X = a ₂ Y + d, d = b ₂ + a ₂ b ₁ −a ₁ ,
x _s −a ₁ ≦ X ≦ x _e −a ₁ , y _s −b ₁ ≦ Y ≦ y _e −b ₁ (6)
When the number of intersections obtained based on the above formula (5) and the above formula (6) is 0 or 1, the calculation is terminated as no intersection (S34). Here, the contact point is not an intersection. On the other hand, when there are two or more intersections, the intersection obtained as described above can be obtained by comparing the size of the Y coordinate with (y _s −b ₁ ) and (y _e −b ₁ ). It is confirmed whether or not it exists on the exposure point data locus (S36). If y _s −b ₁ <Y ≦ y _e −b ₁ is not satisfied, the calculation is terminated with no intersection (S34). On the other hand, when y _s −b ₁ <Y ≦ y _e −b ₁ is satisfied, the size of the Y coordinate is compared with y _sn and y _en (where n is a natural number of 1 or more), as described above. Even so, it is confirmed whether or not the obtained intersection exists on any arc on the circle represented by the above equation (5). Note that y _sn and y _en are values indicating the range of the Y coordinate of each arc when the arc vector is divided into each quadrant as shown in FIG. If y _sn <Y ≦ y _en is not satisfied, the calculation is terminated assuming that there is no intersection (S34). On the other hand, when y _sn <Y ≦ y _en is satisfied, it is assumed that the intersection point exists on any arc on the circle represented by the above equation (5) (S40). If it is determined in S38 that there is an intersection, the following equation (7) is calculated to return the Y coordinate to the original coordinate system, and the y coordinate of the intersection is obtained (S42).

y = Y + b1 (7)
Then, the y-coordinates of the intersections A to F acquired as described above are output to the exposure point data acquisition unit 58, and the exposure point data acquisition unit 58 determines each micromirror 38 based on the input intersection y-coordinate. The exposure point data string is acquired. Specifically, as shown in FIG. 15, the exposure point data acquisition means 58 plots y-coordinates of the intersections A to F, and assigns binarized exposure point data based on the plotted y-coordinates. Note that the y coordinate-1 shown in FIG. 15 is the y coordinate value corresponding to the initial position of the micromirror 38.

  Further, as shown in FIG. 15, the interval between y coordinates -1 to 10 is divided by a pitch of 0.5, and the interval from y coordinates -1 to 10 is binarized at a pitch of 0.5. Image data is sampled to obtain exposure point data, and an exposure point data string for each micromirror 38 as shown in FIG. 15 is obtained. As will be described later, the pitch may not be constant.

  In the same manner as described above, an exposure point data string is acquired for each micromirror 38 and the exposure point data string for each micromirror 38 is output to the exposure head controller 59.

  On the other hand, as described above, the exposure point data sequence for each micromirror 38 is output to the exposure head controller 59, and the moving stage 14 moves from the downstream position shown in FIG. 1 to the upstream side at a desired speed. Be made.

  Then, when the tip of the substrate 12 is detected by the camera 26, exposure is started. Specifically, a control signal based on the exposure point data is output from the exposure head controller 59 to the DMD 36 of each exposure head 30, and the exposure head 30 turns on / off the micromirror of the DMD 36 based on the input control signal. The substrate 12 is exposed by turning it off.

  When a control signal is output from the exposure head controller 59 to each exposure head 30, a control signal corresponding to each position of each exposure head 30 relative to the substrate 12 is sequentially exposed as the moving stage 14 moves. The head controller 59 outputs each exposure head 30. At this time, for example, as shown in FIG. 16, each exposure is obtained from each of m exposure point data sequences acquired for each micromirror 38. Exposure point data corresponding to each position of the head 30 may be sequentially read out one by one and output to the DMD 36 of each exposure head 30, or 90 degrees may be added to the acquired exposure point data string as shown in FIG. As shown in FIG. 17, frame data 1 to m corresponding to each position of each exposure head 30 with respect to the substrate 12 are generated as shown in FIG. The Mudeta 1~m may be sequentially output to each of the exposure heads 30.

  In the first embodiment, the exposure point data acquisition method in the exposure point data acquisition unit 58 is not limited to the acquisition method as described above. For example, as shown in FIG. After dividing the y-coordinate value of 0.5 by the sampling pitch of 0.5, each is converted to an integer to obtain a quantized value, the difference between adjacent quantized values is obtained, and this difference is regarded as run-length data. By decoding this, an exposure point data string as shown in FIG. 18 may be acquired. When the exposure point data sequence is acquired as described above, if the data of 0 corresponding to the initial position of the micromirror is added to the head of the exposure point data sequence, the exposure point data sequence shown in FIG. You can get something similar.

  In the above description, the method for acquiring exposure point data when exposing the deformed substrate 12 in the pressing process or the like has been described. However, the above description also applies to the case where the substrate 12 having an ideal shape that is not deformed is exposed. The exposure point data can be acquired by employing the same method as described above. The same applies when there is no need to consider the deformation of the substrate. In these cases, based on the exposure locus on the substrate 12, the intersection of the contour vector and the exposure point data locus is obtained.

  Further, for example, as shown in FIG. 19, when the substrate 12 is stretched in the scanning direction, the exposure point data acquisition unit 58 changes the sampling pitch of the exposure point data in accordance with the extent of the stretching. You may do it. Specifically, for example, the substrate 12 expands and contracts in the scanning direction as described above, and the detected position information 12d and the passing position information 12c have a relationship as shown in FIG. 19, and the detected position information 12d adjacent in the scanning direction An area A having an ideal length L, an area B in which the distance between the substrate 12 extending in the scanning direction is twice the length L, and the distance between the substrate 12 being reduced in the scanning direction When there is a region C that is ½ of the length L, for example, for the exposure point data corresponding to the region A, the exposure point data is sampled by setting the sampling pitch to normal 0.5. For the exposure point data corresponding to B, the exposure point data is sampled by setting the sampling pitch to 0.25 that is 1/2 of the normal sampling pitch. The exposure point data as 1.0 twice the normal sampling pitch may be sampled. In the above description, the method for acquiring exposure point data when the substrate 12 expands and contracts only in the scanning direction has been described. However, the substrate 12 is not limited to the above case and is deformed in other directions. Even in this case, if the length of the passing position information of the micromirror 38 is different for each region divided by the detection position information 12d, the sampling pitch is changed according to the length as described above. Also good. If the sampling pitch is changed according to the expansion and contraction of the substrate 12 as described above, a desired exposure image can be exposed at a desired position on the substrate 12.

  In the above embodiment, the exposure trajectory information acquisition unit 54 acquires the exposure trajectory information based on the reference mark position information and the detected position information. However, the exposure trajectory is not necessarily considered in consideration of the deformation of the substrate 12. For example, in the exposure trajectory information acquisition means 54, the passage position information preset by the installation position of each exposure head 30 with respect to the installation position of the substrate 12 is acquired as exposure trajectory information. The passing position information is output to the intersection location information calculating means 56, and the intersection location information calculating means 56 calculates the intersection between the passing position information and the vector represented by the intermediate vector data, and based on the y coordinate of the intersection, The exposure point data may be acquired in the same manner as described above. In such a case, it is not always necessary to provide the reference mark 12a. Also, the reference mark 12a shown in FIG. 1 is not necessarily provided when not used in the embodiments described later. The error of the installation position of the board | substrate 12 can be calculated | required by detecting the edge of the board | substrate 12, for example.

  Next, the drawing point data acquisition method and apparatus of the present invention and the exposure apparatus 20 using the second embodiment of the drawing method and apparatus will be described in detail. The schematic configuration of the external appearance of the exposure apparatus 20 is the same as that of the exposure apparatus 10 using the first embodiment of the present invention shown in FIG.

  As illustrated in FIG. 20, the exposure apparatus 20 includes an intermediate vector generation unit 50, a shift information acquisition unit 80 that acquires shift information in a direction orthogonal to the stage movement direction of the moving stage 14, and a shift information acquisition unit 80. Based on the acquired deviation information, the exposure trajectory information acquisition means 82 for acquiring information on the exposure trajectory of each micromirror 38 on the substrate 12 at the time of actual exposure, and each of the exposure trajectory information acquisition means 82 acquired by the exposure trajectory information acquisition means 82. Based on the exposure trajectory information for each micromirror 38 and the intermediate vector data output from the intermediate vector generating means 50, a vector represented by the exposure point data trajectory and the intermediate vector data on the intermediate vector data corresponding to the exposure trajectory information. Intersection location information calculating means 84 for calculating intersection location information indicating the location of the intersection with the An exposure point data acquisition unit 85 that acquires exposure point data for each micromirror 38 based on the intersection arrangement information calculated by the output unit 84, an exposure head control unit 59, a moving mechanism 60, and the entire exposure apparatus. And a controller 70 to be controlled. In FIG. 20, the same reference numerals as those in FIG. 5 are applied to the exposure apparatus 10 using the first embodiment of the present invention and the operation thereof is the same.

  Next, the operation of the exposure apparatus 20 will be described with reference to the drawings.

  First, the operation until the intermediate vector data is output from the intermediate vector generation unit 50 to the intersection arrangement information calculation unit 84 is the same as described above.

  Then, deviation information on movement of the moving stage 14 in the stage movement direction is obtained by the deviation information acquisition means 80. As shown in FIG. 21, the deviation information indicates a deviation in the movement direction (actual movement direction) of the actual movement stage 14 with respect to a preset stage movement direction (predetermined relative movement direction). Specifically, as shown in FIG. 21, the deviation amount in the direction perpendicular to the stage movement direction of the actual movement locus of the moving stage 14 with respect to the movement locus in the stage movement direction set in advance is set at a predetermined interval. Obtained. The direction and length of the dotted arrow shown in FIG. 21 indicates the amount of deviation.

  Here, when there is a deviation in the movement locus of the moving stage 14 as described above, the actual exposure locus on the substrate 12 of each micromirror 38 at the time of exposure is set in advance as shown in FIG. The micro mirror 38 shifts according to the shift amount with respect to the passing position information 12c. Therefore, it is necessary to acquire exposure point data corresponding to the actual exposure trajectory of each micromirror 38. As shown in FIG. 22, the micromirror m1 and the micromirror m2 pass through the same position on the substrate 12. However, if there is a shift in the movement locus of the moving stage 14 as described above, The actual exposure trajectory is out of phase. Therefore, it is necessary to acquire exposure point data in consideration of these phase shifts.

  Therefore, the exposure apparatus 20 acquires exposure point data corresponding to the amount of deviation of the exposure trajectory of each micromirror 38 as described above. Specifically, the displacement amount of the moving stage 14 is measured in advance, and the measured displacement amount is acquired by the displacement amount acquisition unit 80 as described above. Then, the deviation amount acquisition unit 80 outputs the acquired deviation amount to the exposure locus information acquisition unit 82. As a measuring method of the deviation amount, for example, a measuring method using a laser beam used in an IC wafer / stepper apparatus or the like can be used. For example, the moving stage 14 is provided with a reflecting surface extending in the stage moving direction, a laser light source that emits laser light toward the reflecting surface, and a detection unit that detects the reflected light reflected by the reflecting surface, and the moving stage 14 With the movement of 14, the shift amount can be measured by detecting the phase shift of the reflected light sequentially by the detection unit.

  Passing position information 12c for each micromirror 38 is set in the exposure trajectory information acquisition means 82, and the exposure trajectory information acquisition means 82 includes the input deviation amount and the passing position information 12c for each micromirror 38. Based on this, exposure trajectory information representing the actual exposure trajectory on the substrate 12 for each micromirror 38 during exposure is acquired. The passing position information 12c is the same as the description of the exposure apparatus 10 using the first embodiment.

  Then, the exposure trajectory information for each micromirror 38 is output to the intersection arrangement information calculation means 84. The intersection arrangement information calculation means 84 plots the input exposure trajectory information as an exposure point data trajectory in the same coordinate system as the intermediate vector data as shown in FIG. 23, and in the same way as in the first embodiment, Arrangement information of the intersection of the vector represented by the vector data and the exposure point data locus is obtained. Note that the method for calculating the intersection arrangement information is the same as described above.

  23 is the exposure point data locus of the micromirror m1 shown in FIG. 22, and the exposure point data locus M2 shown in FIG. 23 is the exposure point data of the micromirror m2 shown in FIG. It is a trajectory.

  Then, the value of the y coordinate of the intersection arrangement information acquired as described above is output to the exposure point data acquisition unit 85, and each micromirror 38 is based on the input intersection y coordinate in the exposure point data acquisition unit 85. Each exposure point data string is acquired. The method for obtaining the exposure point data string is the same as described above.

  Then, an exposure point data string is acquired for each micromirror 38 and the exposure point data string for each micromirror 38 is output to the exposure head controller 59.

  On the other hand, as described above, the exposure point data sequence for each micromirror 38 is output to the exposure head controller 59, and the moving stage 14 moves from the downstream position shown in FIG. 1 to the upstream side at a desired speed. Be made.

  Then, when the tip of the substrate 12 is detected by the camera 26, exposure is started. Specifically, a control signal based on the exposure point data is output from the exposure head controller 59 to the DMD 36 of each exposure head 30, and the exposure head 30 turns on / off the micromirror of the DMD 36 based on the input control signal. The substrate 12 is exposed by turning it off.

  Next, the drawing point data acquisition method and apparatus and the exposure apparatus 30 using the third embodiment of the drawing method and apparatus of the present invention will be described in detail.

  As shown in FIG. 24, the exposure apparatus 30 has both the configuration of the exposure apparatus 10 using the first embodiment and the configuration of the exposure apparatus 20 using the second embodiment.

  In the exposure apparatus 30, the detection position information of the reference mark 12 a acquired by the detection position information acquisition unit 52 as described above and the shift information acquired by the shift information acquisition unit 80 as described above are exposed. Input to the trajectory information acquisition means 86.

  Then, the exposure trajectory information acquisition means 86, based on the input detected position information and the deviation information, the actual exposure trajectory (exposure on the image space) on the substrate 12 for each micromirror 38 at the time of exposure. Exposure trajectory information representing the trajectory) is acquired.

  Specifically, in the exposure trajectory information acquisition means 86, as in the first embodiment, a straight line connecting the adjacent detection position information 12d in the direction orthogonal to the scanning direction and the passing position information 12c of each micromirror 38. And the distance between the intersection and each detected position information 12d adjacent to the intersection in the orthogonal direction is determined, and one of the adjacent detected position information 12d is obtained. A ratio between the distance between the detected position information 12d and the intersection and the distance between the other detected position information 12d and the intersection is obtained.

  On the other hand, the exposure trajectory information acquisition means 86, as in the second embodiment, is based on the input shift amount and the passing position information 12c for each micromirror 38, as shown by the curve in FIG. Provisional exposure trajectory information on the substrate 12 for each micromirror 38 is acquired.

  Then, the exposure trajectory information acquisition unit 86 outputs the ratio obtained as described above and the temporary exposure trajectory information to the intersection arrangement information calculation unit 88 as exposure trajectory information.

  Then, as in the first embodiment, as shown in FIG. 25, the intersection arrangement information calculation unit 88 receives a straight line connecting the exposure image data reference position information 12e adjacent in the direction orthogonal to the scanning direction. After obtaining the divided points based on the ratio, a straight line connecting the points is obtained, and the provisional exposure trajectory information is tilted by the inclination of the straight line with respect to the scanning direction to obtain curves M1 ′ and M2 ′ representing the exposure trajectory information. The curve is acquired as an exposure point data locus. Note that A1: B1, A2: B2 in FIG. 25 are a1: b1 = A1: B1, a2: b2 = when the ratio input from the exposure trajectory information acquisition unit 86 is a1: b1, a2: b2. The ratio satisfies A2: B2.

  In the same manner as described above, an exposure point data locus for each micromirror 38 is obtained.

  Then, the intersection arrangement information calculation means 88 plots the exposure point data trajectory obtained as described above in the same coordinate system as the intermediate vector data in the same manner as described above, and the vector and the exposure point represented by the intermediate vector data. Find the location information of the intersection with the data trajectory. Note that the method for calculating the intersection arrangement information is the same as described above.

  Then, the value of the y coordinate of the intersection arrangement information acquired as described above is output to the exposure point data acquisition unit 89, and each micromirror 38 is based on the input intersection y coordinate in the exposure point data acquisition unit 89. Each exposure point data string is acquired. The method for obtaining the exposure point data string is the same as described above.

  Then, an exposure point data string is acquired for each micromirror 38 and the exposure point data string for each micromirror 38 is output to the exposure head controller 59.

  On the other hand, as described above, the exposure point data sequence for each micromirror 38 is output to the exposure head controller 59, and the moving stage 14 moves from the downstream position shown in FIG. 1 to the upstream side at a desired speed. Be made.

  Then, when the tip of the substrate 12 is detected by the camera 26, exposure is started. Specifically, a control signal based on the exposure point data is output from the exposure head controller 59 to the DMD 36 of each exposure head 30, and the exposure head 30 turns on / off the micromirror of the DMD 36 based on the input control signal. The substrate 12 is exposed by turning it off.

  Next, the drawing point data acquisition method and apparatus and the exposure apparatus 40 using the fourth embodiment of the drawing method and apparatus of the present invention will be described in detail. The schematic configuration of the external appearance of the exposure apparatus 40 is the same as that of the exposure apparatus 10 using the first embodiment of the present invention shown in FIG.

  26, in addition to the configuration of the exposure apparatus 10 using the first embodiment, the exposure apparatus 40 further includes speed fluctuation information acquisition means 90 that acquires speed fluctuation information of movement of the substrate 12 in advance. I have. Then, the exposure point data acquiring unit 91 shortens the sampling pitch as the moving speed of the moving stage 14 is slower based on the speed variation information acquired by the speed variation information acquiring unit 90. In FIG. 26, the same reference numerals as those in FIG. 5 are applied to the exposure apparatus 10 using the first embodiment, and the operation thereof is the same. In addition, the speed fluctuation information of the movement of the substrate 12 is unevenness of the movement speed that occurs according to the control accuracy of the movement mechanism 60 of the movement stage 14 in the present embodiment.

  FIG. 27 shows the exposure trajectory of a predetermined micromirror 38 on the substrate 12 and the timing of exposing an exposure point by the micromirror 38 during actual exposure. Note that the dotted arrow in FIG. 27 represents the exposure trajectory and exposure timing of the micro mirror 38 when there is no speed fluctuation of the moving stage, and the solid arrow indicates the micro mirror when there is a speed fluctuation of the moving stage. 38 shows the exposure trajectory and exposure timing. The portion with an arrow on the straight line indicates the exposure timing of the exposure point by the micromirror 38. In FIG. 27, for convenience of explanation, two exposure trajectories are indicated by separate straight lines, but these exposure trajectories are exposure trajectories of the same micromirror. In FIG. 27, P1 to P8 indicate the respective pixels constituting the image exposed on the substrate 12. The exposure timing and the moving speed of the moving stage 14 are set in advance with a relative relationship so that the exposure image is exposed on the substrate 12 with a desired resolution.

  As shown in FIG. 27, when there is no fluctuation in the speed of the moving stage 14, each pixel P <b> 1 to P <b> 8 is exposed by one exposure point by the micromirror 38. That is, the number of exposure points that the micromirror 38 exposes to one pixel is one.

  On the other hand, when there is a speed variation of the moving stage 14, the number of exposure points at which the pixels P1 to P8 are exposed varies depending on the speed variation. Specifically, when the exposure timing is twice or more during the movement of the moving stage 14 by the width of one pixel, that is, the area exposed by moving the moving stage 14 at a relatively slow speed is: Each pixel is exposed by two or more exposure points. If there is no exposure timing during the movement of the moving stage 14 by the width of one pixel, that is, each pixel is not exposed in an area exposed by moving the moving stage 14 at a relatively high speed. .

  In FIG. 27, when the pixels P1 and P5 are exposed, the moving stage 14 moves at a relatively slow speed, and when the pixels P4 and P8 are exposed, the moving stage 14 is moved at a relatively high speed. When moving and exposing the pixels P2, P3, P6, and P7, the moving stage 14 moves at a predetermined constant speed.

  Therefore, it is necessary to acquire exposure point data according to the speed fluctuation of the moving stage as described above.

  Therefore, the exposure point data acquisition unit 91 changes the sampling pitch so that the number of exposure point data corresponding to the speed variation information acquired by the speed variation information acquisition unit 90 is acquired. Specifically, the speed fluctuation information is, for example, fluctuation information of the movement distance of the moving stage 14 in the stage movement direction at a predetermined exposure timing pitch, and is preset in the speed fluctuation information acquisition unit 90.

  Then, the speed fluctuation information preset in the speed fluctuation information acquisition means 90 as described above is output to the exposure point data acquisition means 91, and the exposure point data acquisition means 91 changes, for example, to the movement speed of the moving stage 14. If there is no exposure point data, the exposure pitch data is acquired with the sampling pitch set to the normal sampling pitch 0.5. If there is a change in the moving speed of the moving stage 14, the exposure point data is set at the sampling pitch corresponding to the speed fluctuation. To get. For example, when there is a speed fluctuation as indicated by the solid line arrow in FIG. 27, when acquiring exposure point data for exposing the pixel P1 and the pixel P5, the sampling pitch is shortened to three exposure points. Ensure that data is retrieved. Further, when acquiring exposure point data for exposing the pixel P4 and the pixel P8, the sampling pitch is increased so that the exposure point data is not acquired. When acquiring exposure data for exposing the pixels P2, P3, P6, and P7, one exposure point data is acquired as a normal sampling pitch.

  The exposure point data acquired as described above is sequentially output to the exposure head control unit 59 according to the movement of the moving stage 14, and the exposure point data is transferred from the exposure head control unit 59 to the micromirror 38 of each exposure head 30. A control signal corresponding to the data is output, the micromirror is turned on / off according to the control signal, and the exposure point is exposed on the substrate 12.

  In the exposure apparatus 40 of the fourth embodiment, the detected position information is acquired by the detected position information acquiring means 52, the exposure trajectory information is acquired by the exposure trajectory information acquiring means 54 based on the detected position information, and the intersection point is obtained. In the arrangement information calculation means 56, after obtaining the exposure point data locus based on the exposure locus information, the intersection point between the exposure point data locus and the vector represented by the intermediate vector data is obtained, and the y coordinate of the intersection point is binary. The operation until the assigned exposure image data is assigned is the same as that of the exposure apparatus 10 of the first embodiment. Then, the above-described method can be employed when the exposure point data is acquired by sampling from the binarized exposure image data assigned as described above.

  Also in the exposure apparatuses of the second and third embodiments, exposure point data can be obtained using the same method as described above. Even in this case, the second and third implementations described above are performed until the intersection of the exposure point data locus and the vector represented by the intermediate vector data is obtained and the binarized exposure image data is assigned to the y coordinate of the intersection. It is the same as that of the exposure apparatus of the form.

  Further, in the exposure apparatus of the second embodiment, if the number of exposure point data acquired according to the speed variation information is changed as in the exposure apparatus of the fourth embodiment, for example, a moving stage In addition to correcting 14 meanders, it is possible to perform correction in consideration of yawing. Note that yawing is the meandering of the moving stage 14 plus the rotation of the moving stage 14. By the rotation of the moving stage 14 as described above, the position of the image on the substrate 12 of each micromirror 38 is changed, and the moving distance of the moving stage 14 in the stage moving direction at a predetermined exposure timing pitch is changed. In other words, since the local speed fluctuation of the moving stage 14 is caused by the rotation, the number of exposure point data may be changed according to the position fluctuation and speed fluctuation information of the image. Note that only the rotation component may be considered with the meandering component being zero.

  Further, an exposure apparatus that uses all of the first to fourth embodiments can be used. The operation of the exposure apparatus in such a configuration will be briefly described with reference to the flowcharts of FIGS. The detailed operation is the same as described above.

  First, the passage position information of each micromirror 38 of the DMD 36 of each exposure head 30 is input and set to the exposure trajectory information acquisition means 54 (S10), and the deviation information and speed fluctuation information of the moving stage 14 are respectively set as deviation information acquisition means 80, Input is set to the speed fluctuation information acquisition means 90 (S12). Then, the exposure image data in the vector format created by the data creation device 40 is input to the intermediate vector generation means 50 (S14), and the intermediate vector generation means 50 generates intermediate vector data based on the exposure image data, The intermediate vector data is output to the intersection arrangement information calculation means 56 (S16).

  On the other hand, the intermediate vector data is generated as described above, and the controller 70 that controls the operation of the entire exposure apparatus 10 outputs a control signal to the moving mechanism 60. The moving mechanism 60 moves the moving stage 14 in accordance with the control signal. 1 is moved from the position shown in FIG. 1 along the guide 20 to a predetermined initial position on the upstream side, and then moved to the stage moving direction at a desired speed (S18).

And the reference mark 12a is image | photographed with the camera 26 on the board | substrate 12 on the moving stage 14 which moves as mentioned above, and detection position information is acquired by the detection position information acquisition means 52 based on the picked-up image data (S20). )
The detected position information acquired as described above is output from the detected position information acquisition unit 52 to the exposure locus information acquisition unit 54, and the deviation information set in the deviation information acquisition unit is the exposure locus information acquisition unit. 54. The exposure trajectory information acquisition means 54 calculates the exposure trajectory information of each micromirror 38 on the substrate 12. Specifically, first, as described in the exposure apparatus of the first embodiment, scanning is performed. The coordinate value of the intersection of the straight line connecting adjacent detection position information 12d in the direction orthogonal to the direction and the straight line representing the passing position information 12c of each micromirror 38 is obtained, and adjacent to the intersection and the intersection in the orthogonal direction. The distance between each detected position information 12d is calculated, the distance between one of the adjacent detected position information 12d and the intersection, and the distance between the other detected position information 12d and the intersection. Ratio is required. Specifically, a1: b1, a2: b2, a3: b3 and a4: b4 in FIG. 9 are obtained as exposure trajectory information. The ratio is obtained after subtracting the shift amount from the detected position information acquired as described above. (S20).

  Further, the exposure trajectory information acquisition means 54 calculates the ratio as described above, and provisional exposure trajectory information for each micromirror 38 based on the input shift amount and the passing position information of each micromirror 38. This temporary exposure trajectory information and the ratio are acquired as exposure trajectory information and output to the intersection arrangement information calculation means 56. Note that the order of obtaining the ratio and the temporary exposure locus may be reversed. Then, the intersection arrangement information calculation means 56 obtains a curve representing the exposure point data locus corresponding to the exposure locus information as described with reference to FIG. 25 (S24), and the exposure point data obtained as described above. Similar to the above, the trajectory is plotted in the same coordinate system as the intermediate vector data, and the arrangement information of the intersection of the vector represented by the intermediate vector data and the exposure point data trajectory is obtained (S26). The method for calculating the intersection arrangement information is the same as described above.

  Then, the value of the y coordinate of the intersection arrangement information acquired as described above is output to the exposure point data acquisition means 58, and the binarized exposure image data is assigned as described above based on the value of the y coordinate. (S28).

  The exposure point data acquisition means 58 receives the speed fluctuation information acquired by the speed fluctuation information acquisition means 90, and as described in the exposure apparatus of the fourth embodiment, it corresponds to the speed fluctuation information. A sampling pitch is set, and binarized exposure image data is sampled at the sampling pitch, and an exposure point data string for each micromirror 38 is acquired (S30). The method for obtaining the exposure point data string is the same as described above.

  At this time, not only the speed variation information but also the expansion / contraction in the scanning direction of the substrate 12 is taken into consideration, that is, the length of the passing position information of the micromirror 38 for each region divided by the detection position information 12d of the substrate 12 is also determined. It is desirable to determine the sampling pitch in consideration.

  Then, a 90 degree rotation process or a transposition conversion using a matrix is performed on the exposure point data column for each micromirror 38 acquired as described above, and each exposure on the substrate 12 is performed as shown in FIG. Frame data 1 to m corresponding to each position of the head 30 are generated (S32).

  On the other hand, the frame data 1 to m are generated as described above, and the moving stage 14 is moved from the downstream position shown in FIG. 1 to the upstream side at a desired speed. Then, when the leading edge of the substrate 12 is detected by the camera 26, the exposure is started, and the frame data 1 to m are sequentially output to each exposure head 30 according to the position of the moving stage 14 and each exposure. An exposure image based on the frame data is exposed on the substrate 12 by the head 30 (S34). Then, all the frame data is input to the exposure head 30, and when the exposure is completed, the moving stage 14 again moves upstream (S36). If the next substrate 12 is present, the substrate 12 is replaced, and then the processing from S16 is performed again. If the next substrate 12 is not present, the processing is terminated as it is (S34).

  According to the exposure apparatuses of the first to fourth embodiments, the exposure image data in the vector format representing the exposure image is acquired, and the information on the exposure locus of the micromirror 38 on the substrate 12 at the time of exposure of the exposure image. To obtain intersection point arrangement information indicating the arrangement of intersection points of the exposure point data locus on the exposure image data corresponding to the contour of the exposure image represented by the exposure image data and the exposure locus data, and based on the intersection point arrangement information Since exposure point data corresponding to the exposure point data trajectory is acquired, it is possible to directly expose exposure points from vector format exposure image data without converting vector format exposure image data to raster format exposure image data. Data can be acquired, and the exposure accuracy can be improved without reducing the processing speed and increasing the cost.

  FIG. 30 is a schematic diagram visually showing the effects of the exposure apparatuses of the first to fourth embodiments. FIG. 30A is a diagram showing an exposure image when exposed using raster format exposure image data, and FIG. 30B shows an exposure image when exposed using vector format exposure image data. It is a thing. In FIGS. 30A and 30B, black circles indicate micromirrors, and dotted arrows indicate the correspondence between micromirrors and exposure pixels exposed by the micromirrors.

  Further, like the exposure apparatus of the first embodiment, a plurality of reference marks 12a provided in advance at predetermined positions on the substrate 12 are detected, and detection position information 12d indicating the positions of the reference marks 12a is acquired. When the exposure trajectory information is acquired based on the acquired detection position information 12d, for example, even when the substrate 12 is deformed, the micromirror 38 on the substrate 12 after the deformation is detected. Information on the exposure trajectory can be acquired in advance, and exposure point data corresponding to the exposure trajectory information can be acquired from the exposure image data, so that an exposure image corresponding to the deformation can be drawn on the substrate 12. Therefore, for example, when forming a multilayer printed wiring board, the wiring pattern of each layer can be formed according to the deformation of each layer, so that the alignment of the wiring pattern of each layer can be performed with high accuracy.

  Further, as in the exposure apparatuses of the second and third embodiments, the information on the deviation of the actual movement direction of the substrate 12 during exposure of the exposure image with respect to the predetermined movement direction of the substrate 12 set in advance is acquired. When the exposure track information is acquired based on the acquired shift information, even when a shift occurs in the movement direction of the substrate 12, information on the exposure track corresponding to the shift in the transfer direction is acquired in advance. Since exposure point data corresponding to the exposure trajectory information can be acquired from the exposure image data, a desired exposure image is drawn at a desired position on the substrate 12 without being affected by the shift in the moving direction. Can do.

  Further, as in the exposure apparatus of the fourth embodiment, the speed fluctuation information indicating the fluctuation of the actual movement speed of the substrate 12 at the time of exposure of the exposure image with respect to the predetermined movement speed of the substrate 12 set in advance is acquired, Based on the acquired speed variation information, the exposure point data is acquired by changing the sampling pitch so that the exposure area on the substrate 12 where the actual moving speed of the substrate 12 is relatively slow increases the number of drawing point data. In such a case, a desired exposure image can be exposed at a desired position on the substrate 12 without being affected by unevenness in the moving speed of the moving stage 14.

  In the exposure apparatuses of the first to fourth embodiments, exposure is performed in association with the exposure point data trajectory acquired according to the deformation of the substrate 12 on the exposure image data in the vector format as described above. Although the point data is acquired, the exposure image data is deformed corresponding to the detected position information, and the exposure point data is acquired based on the modified exposure point data locus in the same manner as the deformed exposure image data. It may be. Depending on the nature of the error, what is absorbed by deformation of the image data and what is absorbed by deformation of the exposure point data locus (including the pitch component) may be separated. For example, the deformation of the substrate and the error of the installation position may be dealt with by the deformation of the image data, and the conveyance error of the moving stage may be dealt with by the deformation of the exposure point data locus. In this case, the exposure point data trajectory can be made invariant if the transport error of the moving stage is not taken into consideration.

  In the exposure apparatuses of the first to fourth embodiments, intermediate vector data is generated, and the intersection of the exposure point contour and the exposure image contour represented by the exposure image data is generated using the intermediate vector data. However, the intersection point can be obtained without necessarily generating intermediate vector data. For example, as shown in FIG. 31, when the exposure image data in the vector format is composed of line segment data D1 indicating the direction and length and thickness data D2, first, an arrow is shown in FIG. The intersection point 0 between the exposure point data locus and the line segment data D1 is obtained, the angle θ1 is obtained from the following equation (1), the OP length is obtained from the following equation (2) based on the angle θ1, and the length of the OP is obtained. Based on this, the coordinates of the intersection point P can be obtained from the following equation (3). Further, the coordinates of the intersection point Q may be obtained based on θ1, θ2, θ3, QP, and Ox and Oy as described above. Note that L1 and L2 in FIG. 31 are straight lines parallel to the x direction.

θ1 = θ3−θ2 (1)
OP = (D2 / 2) × (1 / sin θ1) (2)
Px = Ox + OP × cos θ3, Py = Oy + OP × sin θ3 (3)
However, Px is the x coordinate of the intersection point P, Py is the y coordinate of the intersection point P, Ox is the x coordinate of the point O, Oy is the y coordinate of the point O, and a method of acquiring exposure point data from exposure image data in vector format. In addition to the methods described in the first to fourth embodiments, other methods can be considered. For example, as shown in FIG. 32, the position coordinates (x1, y1) on the exposure image data D corresponding to the position of the exposure point P1 on the substrate 12 are acquired, and the exposure image data D in the vector format and the position coordinates ( Based on x1, y1), exposure point data of the exposure point can be acquired. Specifically, for example, when the exposure image data in the vector format is composed of line segment data D1 indicating the direction and length and thickness data D2 as shown in FIG. 33, the exposure point P1. A distance L3 between the line segment D1 and the line segment D1 is determined, and the size of L3 and D2 / 2 is compared to determine whether or not the exposure point P1 is on the exposure image represented by the exposure image data. In this case, the value indicated by the exposure image data in the vector format may be acquired as the exposure point data of the exposure point P1. The value indicated by the exposure image data in the vector format is not limited to binary, and may be multivalued. On the other hand, if the exposure point P1 is not on the exposure image, 0 may be acquired as the exposure point data of the exposure point P1.

  Further, the position coordinates of the exposure point P1 can indicate the position of the micromirror 38 at a predetermined position on the substrate 12, as shown in FIG.

  Further, as shown in FIG. 35, a plurality of exposure images determined based on the exposure image data D and the line L4 including the position coordinates of the exposure point P1 are superimposed, and the exposure image data of the exposure image where the line L4 overlaps is obtained. Based on this, exposure point data can be acquired.

  In addition, as shown in FIG. 36, the line L4 can be the exposure locus of the micromirror 38 on the substrate 12.

  As shown in FIG. 37, the line L4 can be a straight line connecting the micromirrors 38 of the DMD 36 at a predetermined position on the substrate 12. In this case, first, after obtaining the position coordinates of the start point of the vector (for example, the position coordinates of a predetermined single micromirror), the intersection point between the straight line extending from the start point and the contour vector of the exposure image data D is calculated. Exposure point data is calculated for micromirrors included between the intersections or in other sections. The shape of the straight line may be set as a fixed value based on the arrangement of the beam spots, and as in the case of the exposure trajectory described above, it is assumed that it has been deformed in consideration of deformation of the substrate, transport error of the moving stage, etc. Also good.

  As shown in FIG. 38, a plurality of exposure images determined based on the exposure image data and a predetermined area A including the position coordinates of the exposure point P1 are overlaid, and the exposure image data of the exposure image where the predetermined area A overlaps. The exposure point data can be acquired based on the above.

  Further, as shown in FIG. 39, the predetermined area A can be an area of the DMD 36 at a predetermined position on the substrate 12. For example, the region A may be set for all or part of the image of the DMD 36.

  Also, as shown in FIGS. 40A and 40B, a predetermined rectangular area S on the exposure image data D is set, and an overlap between the area of the DMD 36 and the exposure image is obtained within the rectangular area S, You may make it acquire the exposure point data of the exposure point P1 based on the exposure image data of the overlap part.

  In the above-described embodiment, the exposure apparatus including the DMD as the spatial light modulation element has been described. However, in addition to the reflective spatial light modulation element, a transmissive spatial light modulation element can also be used.

  In the above embodiment, a so-called flood bed type exposure apparatus has been described as an example. However, a so-called outer drum type exposure apparatus having a drum around which a photosensitive material is wound may be used.

  Moreover, the board | substrate 12 which is the exposure object of the said embodiment may be not only a printed wiring board but the board | substrate of a flat panel display. In this case, the pattern may be a color filter, a black matrix, a semiconductor circuit such as a TFT, or other various structures. The shape of the substrate 12 may be a sheet shape or a long shape (flexible substrate or the like).

  The drawing method and apparatus according to the present invention can also be applied to drawing in a printer such as an inkjet method. For example, a drawing point by ink ejection can be formed in the same manner as in the present invention. That is, the drawing point formation region in the present invention can be considered as a region to which ink ejected from each nozzle of an ink jet printer adheres.

  The drawing trajectory information may be drawn trajectory information using a drawing trajectory of a drawing point formation area on an actual substrate, or an approximation of a drawing trajectory of a drawing point formation area on an actual substrate. It is good also as information, and what estimated the drawing locus | trajectory of the drawing point formation area on an actual board | substrate is good also as drawing locus information.

  Further, the pitch component can also be defined in a non-linear manner in the same manner as the beam trajectory on the image data is defined by a non-linear line such as a polygonal line or a curve in accordance with the deformation of the substrate or the stage movement error.

  In this case, it is preferable to hold information on the pitch component corresponding to each beam locus. However, when only the positional deviation and inclination of the substrate are taken into consideration, a common pitch component (in this case, all pitch intervals may be constant) may be assigned to all beam trajectories.

  In other words, the substrate position correction and the image deformation correction in the direction orthogonal to the substrate transport direction correspond to the change of the beam trajectory, and the image deformation correction in the direction along the substrate transport direction can correspond to the change of the pitch component. it can. In this case, by providing a pitch component for each beam trajectory, it is possible to cope with deformation correction in which a local or deformation amount changes continuously.

  The pitch component may be set along the direction of the beam trajectory vector, or may be set along a vector obtained by projecting the beam trajectory vector onto a predetermined coordinate axis.

  Also, information on the intersection position between the contour of the image and the beam trajectory is obtained in association with the pitch component (for example, the intersection position is given as a pitch component), so that the information on the intersection position along the beam trajectory is obtained. You may make it handle gathering like compression data.

  In the above embodiment, one exposure point data locus may be acquired for every two or more micromirrors (beams). For example, the exposure point data trajectory can be obtained for each of a plurality of beams condensed by one microlens constituting the microlens array.

  Further, when the deformation of the substrate or the like is absorbed by the deformation of the image data, the contour vector may be deformed as shown in FIG. In this case, for example, the detection position information of the reference mark 12a is supplied from the detection position information acquisition means 52 in FIG. 5 to the intermediate vector generation means 50.

  As described above, in the present embodiment, since the exposure point data can be obtained based on the line (exposure point data locus) defined on the image data in the vector format, the calculation for that can be performed at high speed. it can. Here, when the exposure trajectory vector based on the exposure trajectory information is used as a line, and when the beam train vector defined along the beam spot train (for example, the line L4 in FIG. 37) is used, Explain the difference. When the exposure trajectory vector is used, the number of times of intersection calculation is the number of micromirrors (eg, 1024 × 240) × the number of exposure image data vectors, whereas when the beam train vector is used. , The number of beam rows (for example, 240) × the number of target exposure image data vectors × the number of frames. In this case, the number of frames is obtained by the length of the substrate / exposure pitch, for example, a value of about 1 million. Therefore, the calculation amount is larger when the beam train vector is used. On the other hand, when a beam train vector is used, since data can be created for each frame, the real-time property is excellent. That is, it is possible to deal with non-reproducible error causes such as stage vibration (the same applies when the predetermined area A is provided for the DMD 36 as in the example of FIG. 39).

The perspective view which shows schematic structure of the exposure apparatus using the 1st-4th embodiment of the drawing method and apparatus of this invention 1 is a perspective view showing the configuration of a scanner of the exposure apparatus in FIG. (A) is a plan view showing an exposed region formed on the exposure surface of the substrate, and (B) is a plan view showing an array of exposure areas by each exposure head. The figure which shows DMD in the exposure head of the exposure apparatus of FIG. 1 is a block diagram showing the configuration of an electric control system of an exposure apparatus using the first embodiment of the present invention. The figure which shows an example of the exposure image represented by exposure image data of a vector format, The figure which shows the vector represented by the intermediate vector data produced | generated based on the exposure image data of the exposure image shown by FIG. 6 (A) (B) The figure for demonstrating the production | generation method of intermediate vector data in case an exposure image has an overlap Schematic diagram showing the relationship between the reference mark on the ideally shaped substrate and the passing position information of a predetermined micromirror The figure for demonstrating the acquisition method of the exposure trace information of a micromirror The figure for demonstrating the method of acquiring an exposure point data locus | trajectory based on the exposure locus | trajectory information of a micromirror The figure for demonstrating the method of acquiring intersection arrangement | positioning information from an exposure point data locus | trajectory and intermediate vector data Flowchart for explaining a method for calculating intersection arrangement information when a vector represented by intermediate vector data is a line segment Flowchart for explaining a method for calculating intersection arrangement information when a vector represented by intermediate vector data is a circular arc The figure for demonstrating the calculation method of intersection arrangement | positioning information in case the vector represented by intermediate vector data is a circular arc The figure for demonstrating the method of acquiring the exposure point data of a micromirror based on intersection arrangement | positioning information The figure which shows the exposure point data row | line for every micromirror Diagram showing each frame data The figure for demonstrating the other method of acquiring the exposure point data of a micromirror based on intersection arrangement | positioning information The figure for demonstrating the acquisition method of the exposure point data according to expansion / contraction of a board | substrate The block diagram which shows the structure of the electric control system of the exposure apparatus using the 2nd Embodiment of this invention. The figure for explaining the shift of the moving direction of the moving stage The figure which shows the exposure locus of the predetermined micro mirror The figure for demonstrating the method of acquiring intersection arrangement | positioning information from an exposure point data locus | trajectory and intermediate vector data The block diagram which shows the structure of the electric control system of the exposure apparatus using the 3rd Embodiment of this invention. The figure for demonstrating the method of acquiring an exposure point data locus | trajectory based on the exposure locus | trajectory information of a micromirror The block diagram which shows the structure of the electric control system of the exposure apparatus using the 4th Embodiment of this invention. A diagram showing the exposure trajectory of the micromirror and the exposure timing of the micromirror The flowchart for demonstrating the effect | action of the exposure apparatus of the structure using all the 1st-4th embodiment of this invention. The flowchart for demonstrating the effect | action of the exposure apparatus of the structure using all the 1st-4th embodiment of this invention. The figure which shows typically the exposure image (A) exposed by the conventional exposure apparatus, and the exposure image (B) exposed by the exposure apparatus using embodiment of this invention The figure for explaining the method of calculating the intersection coordinates without generating intermediate vector data The figure for demonstrating other embodiment of the exposure point data acquisition method The figure for demonstrating other embodiment of the exposure point data acquisition method The figure for demonstrating other embodiment of the exposure point data acquisition method The figure for demonstrating other embodiment of the exposure point data acquisition method The figure for demonstrating other embodiment of the exposure point data acquisition method The figure for demonstrating other embodiment of the exposure point data acquisition method The figure for demonstrating other embodiment of the exposure point data acquisition method The figure for demonstrating other embodiment of the exposure point data acquisition method The figure for demonstrating other embodiment of the exposure point data acquisition method Diagram showing deformed contour vector

Explanation of symbols

10, 20, 30, 40 Exposure apparatus 12 Substrate 12a Reference mark 12b Reference mark position information 12c Passing position information 12d Detection position information 14 Moving stage 18 Installation table 20 Guide 22 Gate 24 Scanner 26 Camera 30 Exposure head (drawing means)
32 Exposure area 36 DMD
50 Intermediate vector generation means 52 Detection position information acquisition means 54, 82, 86 Exposure locus information acquisition means (drawing locus information acquisition means)
56, 84, 88 Intersection arrangement information calculation means 58, 85, 91 Exposure point data acquisition means (drawing point data acquisition means)
80 Deviation information acquisition means 90 Speed fluctuation information acquisition means

Claims (46)

In the drawing point data obtaining method for obtaining the drawing point data used when drawing the image on the drawing target by forming the drawing point on the drawing target based on the drawing point data,
Acquiring the original vector format image data of the image, and acquiring the position coordinates on the image data corresponding to the position where the drawing point should be formed on the drawing target,
A drawing point data acquisition method comprising: acquiring the drawing point data of the drawing point based on the vector format image data and the position coordinates. The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. In the drawing point data acquisition method for acquiring the drawing point data used when drawing an image on the top,
Obtaining the original vector format image data of the image, and obtaining the drawing locus information of the drawing point formation region on the drawing object for drawing the image or on the image space on the substrate,
Obtaining intersection arrangement information indicating an arrangement of intersections of an image contour represented by the image data or obtained from the image data and a drawing point data locus on the image data corresponding to the drawing locus information;
The drawing point data acquisition method, wherein the drawing point data corresponding to the drawing point data locus is acquired based on the intersection arrangement information. In a drawing method for forming a drawing point on a drawing target based on the drawing point data and drawing an image on the drawing target,
Acquiring the original vector format image data of the image, and acquiring the position coordinates on the image data corresponding to the position where the drawing point should be formed on the drawing target,
Obtaining the drawing point data of the drawing point based on the image data in the vector format and the position coordinates;
A drawing method, wherein the drawing points are formed on the drawing target based on the acquired drawing point data. The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. In the drawing method of drawing an image on top,
Acquiring the original vector format image data of the image, and acquiring the drawing locus information of the drawing point formation region on the drawing target at the time of drawing the image,
Obtaining intersection arrangement information indicating an arrangement of intersections of an image contour represented by the image data or obtained from the image data and a drawing point data locus on the image data corresponding to the drawing locus information;
Obtaining the drawing point data corresponding to the drawing point data locus based on the intersection arrangement information;
A drawing method characterized in that the drawing point is formed on the drawing object by the drawing point formation region based on the acquired drawing point data. In a drawing point data acquisition apparatus for acquiring the drawing point data used when drawing an image on the drawing target by forming a drawing point on the drawing target based on the drawing point data,
Position coordinate acquisition means for acquiring position coordinates on image data in the original vector format of the image corresponding to a position where the drawing point on the drawing target is to be formed;
Drawing that acquires original vector format image data of the image and acquires the drawing point data of the drawing point based on the acquired vector format image data and the position coordinates acquired by the position coordinate acquisition means A drawing point data acquisition apparatus comprising point data acquisition means.   The drawing point data acquisition means superimposes the image area determined based on the image data and the position coordinates, and acquires the drawing point data based on image data of the image area to which the position coordinates belong. The drawing point data acquisition apparatus according to claim 5, wherein The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. A drawing point data acquisition device for acquiring the drawing point data used when drawing an image on the top,
The drawing point data acquisition apparatus according to claim 6, wherein the position coordinates correspond to the drawing point formation region at a predetermined position on the drawing target.   The drawing point data acquisition means superimposes an image area determined based on the image data and a line including the position coordinates, and acquires the drawing point data based on image data of the image area where the line overlaps. The drawing point data acquisition apparatus according to claim 5, wherein   9. The drawing point data acquisition apparatus according to claim 8, wherein the drawing point data acquisition unit acquires the drawing point data based on a position of an intersection between the image data and the line. Intersection arrangement information acquisition means for acquiring intersection arrangement information indicating an intersection of the contour of the image represented in the image data or obtained from the image data and the line,
9. The drawing point data acquisition apparatus according to claim 8, wherein the drawing point data acquisition means acquires the drawing point data based on the intersection arrangement information acquired by the intersection arrangement information acquisition means.   9. The drawing point data acquisition apparatus according to claim 8, wherein the line connects a plurality of the position coordinates corresponding to the plurality of the drawing points.   9. The drawing point data acquiring apparatus according to claim 8, wherein the line connects a plurality of the position coordinates corresponding to the plurality of drawing points arranged in time series. The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. A drawing point data acquisition device for acquiring the drawing point data used when drawing an image on the top,
9. The drawing point data acquiring apparatus according to claim 8, wherein the line connects a plurality of the position coordinates corresponding to the plurality of drawing points arranged in time series. The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. A drawing point data acquisition device for acquiring the drawing point data used when drawing an image on the top,
9. The drawing point data acquisition apparatus according to claim 8, wherein the line corresponds to a drawing locus of the drawing point formation region on the drawing target or in an image space on the drawing target. A drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is corresponded to the movement. A drawing point data acquisition device that sequentially forms a drawing point group to be drawn on the drawing target and acquires the drawing point data used when drawing an image on the drawing target;
9. The drawing point data according to claim 8, wherein the line corresponds to a line connecting at least a part of the drawing point forming areas of the drawing point forming area group at a predetermined position on the drawing target. Acquisition device.   The drawing point data acquisition apparatus according to claim 8, wherein sampling line information is attached to the line.   The drawing point data acquisition means superimposes an image area determined based on the image data and a predetermined area including the position coordinates, and the drawing point data is based on image data of the image area where the predetermined area overlaps. The drawing point data acquisition apparatus according to claim 5, wherein: A drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is corresponded to the movement. A drawing point data acquisition device that sequentially forms a drawing point group to be drawn on the drawing target and acquires the drawing point data used when drawing an image on the drawing target;
18. The drawing point data acquisition apparatus according to claim 17, wherein the predetermined area corresponds to at least a part of the drawing point formation area group at a predetermined position on the drawing target. The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. In the drawing point data acquisition device for acquiring the drawing point data used when drawing an image on the top,
Drawing trajectory information acquisition means for acquiring information on a drawing trajectory of the drawing point formation region on the drawing target for drawing the image or on an image space on the drawing target;
The image data of the original vector format of the image is acquired, and the drawing point data trajectory on the image data corresponding to the contour of the image represented by the acquired image data and obtained from the image data and the drawing trajectory information Intersection location information acquisition means for acquiring intersection location information indicating the location of the intersection with
A drawing point data acquisition device comprising: drawing point data acquisition means for acquiring the drawing point data corresponding to the drawing trajectory based on the intersection point arrangement information acquired by the intersection point arrangement information acquisition means.   The drawing point data acquisition means delimits the drawing point data trajectory by intersections indicated by the intersection arrangement information to form partial drawing point data trajectories, and the partial drawing point data trajectory is arranged in the order in which the partial drawing point data trajectories are arranged. The drawing point data is obtained by sampling binarized data assigned for each partial drawing point data locus alternately at predetermined intervals in the scanning direction on the image data corresponding to the moving direction. The drawing point data acquiring apparatus according to claim 19, wherein the drawing point data corresponding to a locus is acquired.   The drawing point data acquisition unit acquires a coordinate value in the scanning direction on the image data corresponding to the direction of movement of the intersection arrangement information, and the acquired coordinate value is set in a predetermined direction in the scanning direction on the image data. Divide each by the interval value to obtain a quantized value, obtain a difference between adjacent quantized values in the scanning direction on the image data, obtain the difference as run length data, and obtain the obtained run length data. The drawing point data acquisition apparatus according to claim 19, wherein the drawing point data corresponding to the drawing point data locus is decoded and acquired. A speed fluctuation information acquiring unit that acquires speed fluctuation information indicating a fluctuation of an actual movement speed of the drawing target when the image is drawn with respect to a predetermined relative movement speed of the drawing target set in advance;
Based on the speed fluctuation information obtained by the speed fluctuation information obtaining means, the drawing point data obtaining means obtains a drawing area on the drawing object whose actual moving speed of the drawing object is relatively slow. The drawing point data acquisition apparatus according to any one of claims 19 to 21, wherein the drawing point data is acquired so that the number increases. It further comprises position information detection means for detecting a plurality of reference marks provided in advance at a predetermined position on the drawing target and acquiring detection position information indicating the position of the reference mark,
23. The drawing according to claim 19, wherein the drawing trajectory information acquiring unit acquires the drawing trajectory information based on the detected position information acquired by the position information detecting unit. Point data acquisition device. A deviation information acquisition unit for acquiring deviation information of the actual movement direction of the drawing target when the image is drawn with respect to a predetermined relative movement direction of the drawing target set in advance;
The drawing according to any one of claims 19 to 22, wherein the drawing point trajectory information acquisition means acquires the drawing trajectory information based on deviation information acquired by the deviation information acquisition means. Point data acquisition device. A deviation information acquisition unit for acquiring deviation information of the actual movement direction of the drawing target when the image is drawn with respect to a predetermined relative movement direction of the drawing target set in advance;
The drawing point trajectory information acquisition means acquires the drawing trajectory information based on the deviation information acquired by the deviation information acquisition means and the detected position information acquired by the position information detection means. The drawing point data acquisition apparatus according to claim 23. In a drawing apparatus for forming a drawing point on a drawing target based on the drawing point data and drawing an image on the drawing target,
Position coordinate acquisition means for acquiring position coordinates on image data in the original vector format of the image corresponding to a position where the drawing point on the drawing target is to be formed;
Drawing that acquires original vector format image data of the image and acquires the drawing point data of the drawing point based on the acquired vector format image data and the position coordinates acquired by the position coordinate acquisition means Point data acquisition means;
A drawing apparatus comprising: drawing means for forming the drawing point on the drawing object based on the drawing point data acquired by the drawing point data acquisition means.   The drawing point data acquisition means superimposes the image area determined based on the image data and the position coordinates, and acquires the drawing point data based on image data of the image area to which the position coordinates belong. 27. The drawing apparatus according to claim 26, wherein: The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. A drawing device for drawing an image on the top,
28. The drawing apparatus according to claim 27, wherein the position coordinates correspond to the drawing point formation region at a predetermined position on the drawing target.   The drawing point data acquisition means superimposes an image area determined based on the image data and a line including the position coordinates, and acquires the drawing point data based on image data of the image area where the line overlaps. 27. The drawing apparatus according to claim 26, wherein:   30. The drawing apparatus according to claim 29, wherein the drawing point data acquisition means acquires the drawing point data based on a position of an intersection between the image data and the line. Intersection arrangement information acquisition means for acquiring intersection arrangement information indicating an intersection of the contour of the image represented in the image data or obtained from the image data and the line,
30. The drawing apparatus according to claim 29, wherein the drawing point data acquisition means acquires the drawing point data based on the intersection arrangement information acquired by the intersection arrangement information acquisition means.   30. The drawing apparatus according to claim 29, wherein the line connects a plurality of the position coordinates corresponding to the plurality of drawing points.   30. The drawing apparatus according to claim 29, wherein the line connects a plurality of the position coordinates corresponding to the plurality of drawing points arranged in time series. The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. A drawing device for drawing an image on the top,
30. The drawing apparatus according to claim 29, wherein the line connects a plurality of the position coordinates corresponding to the plurality of drawing points arranged in time series. The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. A drawing device for drawing an image on the top,
30. The drawing apparatus according to claim 29, wherein the line corresponds to a drawing locus of the drawing point forming region on the drawing target or in an image space on the drawing target. A drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is corresponded to the movement. A drawing device that sequentially forms a drawing point group on the drawing target and draws an image on the drawing target;
30. The drawing apparatus according to claim 29, wherein the line corresponds to a line connecting at least a part of the drawing point formation regions of the drawing point formation region group at a predetermined position on the drawing target.   37. A drawing apparatus according to claim 29, wherein sampling line pitch information is attached to the line.   The drawing point data acquisition means superimposes an image area determined based on the image data and a predetermined area including the position coordinates, and the drawing point data is based on image data of the image area where the predetermined area overlaps. 27. The drawing apparatus according to claim 26, wherein: A drawing point forming region group having a plurality of drawing point forming regions for forming drawing points based on the drawing point data is moved relative to the drawing target, and the drawing point forming region group is corresponded to the movement. A drawing device that sequentially forms a drawing point group on the drawing target and draws an image on the drawing target;
The drawing apparatus according to claim 38, wherein the predetermined area corresponds to at least a part of the drawing point forming area group at a predetermined position on the drawing target. The drawing point forming area for forming the drawing point based on the drawing point data is moved relative to the drawing target, and the drawing point is sequentially formed on the drawing target in accordance with the movement, and the drawing target is formed. In a drawing device that draws an image on top,
Drawing trajectory information acquisition means for acquiring information of a drawing trajectory of the drawing point forming area on the drawing target for drawing the image;
The image data of the original vector format of the image is acquired, and the drawing point data trajectory on the image data corresponding to the contour of the image represented by the acquired image data and obtained from the image data and the drawing trajectory information Intersection location information acquisition means for acquiring intersection location information indicating the location of the intersection with
Drawing point data acquisition means for acquiring a plurality of drawing point data corresponding to the drawing trajectory based on the intersection point arrangement information acquired by the intersection point arrangement information acquisition means; and drawing point data acquired by the drawing point data acquisition means And a drawing means for forming the drawing point on the drawing object by the drawing point forming area.   The drawing point data acquisition means delimits the drawing point data trajectory by intersections indicated by the intersection arrangement information to form partial drawing point data trajectories, and the partial drawing point data trajectory is arranged in the order in which the partial drawing point data trajectories are arranged. The drawing point data is obtained by sampling binarized data assigned for each partial drawing point data locus alternately at predetermined intervals in the scanning direction on the image data corresponding to the moving direction. 41. The drawing apparatus according to claim 40, wherein the drawing point data corresponding to a locus is acquired.   The drawing point data acquisition unit acquires a coordinate value in the scanning direction on the image data corresponding to the direction of movement of the intersection arrangement information, and the acquired coordinate value is set in a predetermined direction in the scanning direction on the image data. Divide each by the interval value to obtain a quantized value, obtain a difference between adjacent quantized values in the scanning direction on the image data, obtain the difference as run length data, and obtain the obtained run length data. 41. The drawing apparatus according to claim 40, wherein the drawing point data corresponding to the drawing point data locus is obtained by decoding. A speed fluctuation information acquiring unit that acquires speed fluctuation information indicating a fluctuation of an actual movement speed of the drawing target when the image is drawn with respect to a predetermined relative movement speed of the drawing target set in advance;
Based on the speed fluctuation information obtained by the speed fluctuation information obtaining means, the drawing point data obtaining means obtains a drawing area on the drawing object whose actual moving speed of the drawing object is relatively slow. 43. The drawing apparatus according to claim 40, wherein the drawing point data is acquired so that the number increases. It further comprises position information detection means for detecting a plurality of reference marks provided in advance at a predetermined position on the drawing target and acquiring detection position information indicating the position of the reference mark,
44. The drawing according to claim 40, wherein the drawing trajectory information acquisition means acquires the drawing trajectory information based on the detected position information acquired by the position information detection means. apparatus. A deviation information acquisition unit for acquiring deviation information of the actual movement direction of the drawing target when the image is drawn with respect to a predetermined relative movement direction of the drawing target set in advance;
44. The drawing according to any one of claims 40 to 43, wherein the drawing point trajectory information acquisition means acquires the drawing trajectory information based on deviation information acquired by the deviation information acquisition means. apparatus. A deviation information acquisition unit for acquiring deviation information of the actual movement direction of the drawing target when the image is drawn with respect to a predetermined relative movement direction of the drawing target set in advance;
The drawing point trajectory information acquisition means acquires the drawing trajectory information based on the deviation information acquired by the deviation information acquisition means and the detected position information acquired by the position information detection means. The drawing apparatus according to claim 44.

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