JP4617869B2 - Boiling cooler - Google Patents

Boiling cooler Download PDF

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JP4617869B2
JP4617869B2 JP2004371247A JP2004371247A JP4617869B2 JP 4617869 B2 JP4617869 B2 JP 4617869B2 JP 2004371247 A JP2004371247 A JP 2004371247A JP 2004371247 A JP2004371247 A JP 2004371247A JP 4617869 B2 JP4617869 B2 JP 4617869B2
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refrigerant tank
refrigerant
heating element
base plate
cooling device
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JP2006177613A (en
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義之 岡本
公司 田中
焦 石井
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Denso Corp
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Denso Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367—Cooling facilitated by shape of device
    • H01L23/3672—Foil-like cooling fins or heat sinks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/0266—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with separate evaporating and condensing chambers connected by at least one conduit; Loop-type heat pipes; with multiple or common evaporating or condensing chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/0283—Means for filling or sealing heat pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • F28D15/046—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/345—Arrangements for heating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427—Cooling by change of state, e.g. use of heat pipes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2225/00—Reinforcing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4935—Heat exchanger or boiler making
    • Y10T29/49353—Heat pipe device making

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

A refrigerant tank includes a base plate made of cooper and a reinforcing frame made of stainless steel. A block made of copper extends through the reinforcing frame and has one face in contact with the base plate and an opposite face in contact with a heating body. Heat generated by the heating body is transferred through the cooper block and through the copper base plate to refrigerant inside the refrigerant tank. The stainless steel reinforcing frame provides strength to the refrigerant tank to allow the heating body to be pressed against the heating tank.

Description

本発明は、冷媒の沸騰と凝縮による潜熱移動によって半導体素子等の発熱体を冷却する沸騰冷却装置に関するものである。   The present invention relates to a boiling cooling device that cools a heating element such as a semiconductor element by latent heat transfer caused by boiling and condensation of a refrigerant.

特許文献１に示された沸騰冷却装置は、冷媒槽を形成する容器の材質や製法について記載されていないが、熱伝導特性を考えると、銅材をプレス、鍛造あるいは切削などの方法で加工して製作することが考えられる。また、通常、冷媒槽と放熱部はろう付けにて接合される。   Although the boiling cooling device shown in Patent Document 1 is not described about the material and manufacturing method of the container forming the refrigerant tank, considering the heat conduction characteristics, the copper material is processed by a method such as pressing, forging or cutting. It is possible to make it. Moreover, normally, a refrigerant tank and a thermal radiation part are joined by brazing.

一方、ヒートシンクを発熱体に適用する場合、接触熱抵抗を低減するために、一般的に発熱体に対して少なからぬ荷重で押し付けて取り付けることが要求される。そのため、沸騰冷却装置における冷媒槽の容器においても、この荷重に対して変形を起こさず、発熱体に対して適切な荷重にて押し付けられる強度（剛性）が求められる。
特開２００４−３７０７４号公報 On the other hand, when applying a heat sink to a heat generating body, in order to reduce contact thermal resistance, it is generally required to attach the heat sink by pressing it with a considerable load. Therefore, even in the container of the refrigerant tank in the boiling cooling device, the strength (rigidity) required to be pressed against the heating element with an appropriate load without causing deformation is required.
JP 2004-37074 A

しかしながら、銅材は一般的にろう付け時の加熱により軟化して剛性が低下するため、荷重に対して冷媒槽の容器が容易に変形し、発熱体に適切な荷重で押し付けることができないという問題があった。   However, since the copper material is generally softened by heating at the time of brazing and its rigidity is lowered, the container of the refrigerant tank easily deforms against the load and cannot be pressed against the heating element with an appropriate load. was there.

そこで本発明では、冷媒槽と放熱部がろう付けにて接合される沸騰冷却装置において、銅の高い伝熱特性を生かしながら、発熱体に適切な荷重で押し付け可能にすることを目的とする。   Therefore, an object of the present invention is to make it possible to press a heating element with an appropriate load while utilizing the high heat transfer characteristics of copper in a boiling cooling device in which a refrigerant tank and a heat radiating part are joined by brazing.

上記目的を達成するため、請求項１に記載の発明では、内部に液相の冷媒を貯留するとともに、外表面に発熱体（９０）が取り付けられる冷媒槽（１）と、発熱体（９０）の熱によって沸騰した冷媒を冷却して凝縮させた後に冷媒槽（１）に戻す放熱部（２）とを備え、冷媒槽（１）と放熱部（２）がろう付けにて接合される沸騰冷却装置において、冷媒槽（１）を形成する容器は、銅材より成り、一方の面が冷媒槽（１）の内部に露出するとともに他方の面に発熱体（９０）が接触するブロック（１３）と、銅材より成る外皮（１２１）間に補強材（１２２）を挟んだ３層構造材にて形成されるとともにブロック（１３）に接合される積層プレート（１２）とを有し、補強材（１２２）は、ろう付け工程後の剛性が銅材よりも高い材料から成ることを特徴とする。   In order to achieve the above object, according to the first aspect of the present invention, a refrigerant tank (1) in which a liquid phase refrigerant is stored and a heating element (90) is attached to the outer surface, and a heating element (90) are provided. And a heat radiating part (2) that cools and condenses the refrigerant boiled by the heat of the heat and returns it to the refrigerant tank (1), and the refrigerant tank (1) and the heat radiating part (2) are joined by brazing. In the cooling device, the container forming the refrigerant tank (1) is made of a copper material, and one block is exposed to the inside of the refrigerant tank (1) and the heating element (90) contacts the other surface (13). And a laminated plate (12) which is formed of a three-layer structure material in which a reinforcing material (122) is sandwiched between outer shells (121) made of a copper material and is joined to a block (13), and is reinforced The material (122) is made of a material whose rigidity after the brazing process is higher than that of the copper material. And wherein the Rukoto.

これによると、冷媒槽を形成する容器は補強材によりろう付け工程後の剛性が確保されるため、冷媒槽容器を発熱体に押し付けた際の冷媒槽容器の変形が抑制される。また、銅材より成る伝熱特性が高いブロックを介して冷媒と発熱体との間の熱移動を行うことができる。したがって、銅の高い伝熱特性を生かしながら、冷媒槽容器を発熱体に適切な荷重で押し付けることができる。   According to this, since the rigidity of the container forming the refrigerant tank after the brazing process is secured by the reinforcing material, the deformation of the refrigerant tank container when the refrigerant tank container is pressed against the heating element is suppressed. Further, heat transfer between the refrigerant and the heating element can be performed through the block made of copper material having high heat transfer characteristics. Therefore, the refrigerant tank container can be pressed against the heating element with an appropriate load while taking advantage of the high heat transfer characteristics of copper.

因みに、補強材（１２２）としては、請求項３に記載の発明のように、鋼材を用いることができる。   Incidentally, as the reinforcing material (122), a steel material can be used as in the invention described in claim 3.

なお、本明細書でいう「銅材」は、純銅および銅合金のいずれをも含むものである。   The “copper material” in this specification includes both pure copper and copper alloys.

請求項２に記載の発明では、請求項１に記載の沸騰冷却装置において、積層プレート（１２）は、冷媒槽（１）の内部と外部を連通させる開口部（１２３）を備え、開口部（１２３）にブロック（１３）が配置されていることを特徴とする。   According to a second aspect of the present invention, in the boiling cooling apparatus according to the first aspect, the laminated plate (12) includes an opening (123) that allows the inside and the outside of the refrigerant tank (1) to communicate with each other. 123), the block (13) is arranged.

これによると、ブロックの一方の面が冷媒槽の内部に露出するとともに他方の面に発熱体が接触する構成を容易に実現することができる。   According to this, it is possible to easily realize a configuration in which one surface of the block is exposed inside the refrigerant tank and the heating element is in contact with the other surface.

請求項４に記載の発明では、内部に液相の冷媒を貯留するとともに、外表面に発熱体（９０）が取り付けられる冷媒槽（１）と、発熱体（９０）の熱によって沸騰した冷媒を冷却して凝縮させた後に冷媒槽（１）に戻す放熱部（２）とを備え、冷媒槽（１）と放熱部（２）がろう付けにて接合される沸騰冷却装置において、冷媒槽（１）を形成する容器は、銅材より成るとともに一方の面が冷媒槽（１）の内部に露出するベースプレート（１６）と、銅材より成り、一方の面がベースプレート（１６）に接触するとともに他方の面に発熱体（９０）が接触するブロック（１８）と、ベースプレート（１６）のうちブロック（１８）が接触しない部位に配置された補強用のフレーム（１７）とを有し、フレーム（１７）は、ろう付け工程後の剛性が銅材よりも高い材料から成ることを特徴とする。   In the invention according to claim 4, the liquid phase refrigerant is stored inside, the refrigerant tank (1) in which the heating element (90) is attached to the outer surface, and the refrigerant boiled by the heat of the heating element (90). In a boiling cooling device comprising a heat radiating part (2) that is cooled and condensed and then returned to the refrigerant tank (1), and the refrigerant tank (1) and the heat radiating part (2) are joined by brazing. The container forming 1) is made of a copper material and has one surface exposed to the inside of the refrigerant tank (1) and a copper material, and one surface is in contact with the base plate (16). A block (18) in contact with the heating element (90) on the other surface, and a reinforcing frame (17) disposed in a portion of the base plate (16) where the block (18) does not contact, 17) Rigidity after brazing process There characterized in that it consists of higher material than copper material.

これによると、冷媒槽を形成する容器はフレームによりろう付け工程後の剛性が確保されるため、冷媒槽容器を発熱体に押し付けた際の冷媒槽容器の変形が抑制される。また、銅材より成る伝熱特性が高いベースプレートとブロックを介して冷媒と発熱体との間の熱移動を行うことができる。したがって、銅の高い伝熱特性を生かしながら、冷媒槽容器を発熱体に適切な荷重で押し付けることができる。   According to this, since the rigidity of the container forming the refrigerant tank after the brazing process is secured by the frame, deformation of the refrigerant tank container when the refrigerant tank container is pressed against the heating element is suppressed. Further, heat transfer between the refrigerant and the heating element can be performed through the base plate and the block made of copper material and having high heat transfer characteristics. Therefore, the refrigerant tank container can be pressed against the heating element with an appropriate load while taking advantage of the high heat transfer characteristics of copper.

因みに、フレーム（１７）としては、請求項８に記載の発明のように、鋼材を用いることができる。   Incidentally, as the frame (17), a steel material can be used as in the invention described in claim 8.

請求項５に記載の発明では、請求項４に記載の沸騰冷却装置において、フレーム（１７）は、ベースプレート（１６）の外表面側に位置するとともに、ベースプレート（１６）の外表面と冷媒槽（１）の外部とを連通させる開口部（１７１）を備え、開口部（１７１）にブロック（１８）が配置されていることを特徴とする。   According to a fifth aspect of the present invention, in the boiling cooling apparatus according to the fourth aspect, the frame (17) is located on the outer surface side of the base plate (16), and the outer surface of the base plate (16) and the refrigerant tank ( 1) An opening (171) that communicates with the outside is provided, and a block (18) is disposed in the opening (171).

ところで、請求項２に記載の発明のように、積層プレートが冷媒槽の内部と外部を連通させる開口部を備える構成の場合、積層プレートとブロックとの接合部からの冷媒の漏れの恐れがあるが、請求項５に記載の発明におけるフレームの開口部は、冷媒槽の内部と外部を連通させるものではないため、開口部からの冷媒の漏れの恐れはない。   By the way, like the invention of Claim 2, when a laminated plate is provided with the opening part which connects the inside and outside of a refrigerant tank, there exists a possibility of the leakage of the refrigerant | coolant from the junction part of a laminated plate and a block. However, since the opening portion of the frame in the invention according to claim 5 does not connect the inside and the outside of the refrigerant tank, there is no fear of leakage of the refrigerant from the opening portion.

請求項６に記載の発明では、内部に液相の冷媒を貯留するとともに、外表面に発熱体（９０）が取り付けられる冷媒槽（１）と、発熱体（９０）の熱によって沸騰した冷媒を冷却して凝縮させた後に冷媒槽（１）に戻す放熱部（２）とを備え、冷媒槽（１）と放熱部（２）がろう付けにて接合される沸騰冷却装置において、冷媒槽（１）を形成する容器は、銅材より成り、一方の面が冷媒槽（１）の内部に露出するるとともに他方の面に発熱体（９０）が接触するベースプレート（１６）と、ベースプレート（１６）のうち発熱体（９０）が接触しない部位に配置された補強用のフレーム（１７）とを有し、フレーム（１７）は、ろう付け工程後の剛性が銅材よりも高い材料から成ることを特徴とする
これによると、冷媒槽を形成する容器はフレームによりろう付け工程後の剛性が確保されるため、冷媒槽容器を発熱体に押し付けた際の冷媒槽容器の変形が抑制される。また、銅材より成る伝熱特性が高いベースプレートを介して冷媒と発熱体との間の熱移動を行うことができる。したがって、銅の高い伝熱特性を生かしながら、冷媒槽容器を発熱体に適切な荷重で押し付けることができる。 In the invention described in claim 6, the liquid phase refrigerant is stored inside, the refrigerant tank (1) in which the heating element (90) is attached to the outer surface, and the refrigerant boiled by the heat of the heating element (90). In a boiling cooling device comprising a heat radiating part (2) that is cooled and condensed and then returned to the refrigerant tank (1), and the refrigerant tank (1) and the heat radiating part (2) are joined by brazing. The container forming 1) is made of copper, and has a base plate (16) whose one surface is exposed inside the refrigerant tank (1) and whose heating element (90) is in contact with the other surface, and a base plate (16 ) And a reinforcing frame (17) arranged at a portion where the heating element (90) does not contact, and the frame (17) is made of a material having higher rigidity than the copper material after the brazing process. According to this, the container forming the refrigerant tank is Since the rigidity after the brazing process is secured by the frame, deformation of the refrigerant tank container when the refrigerant tank container is pressed against the heating element is suppressed. Further, heat transfer between the refrigerant and the heating element can be performed through a base plate made of a copper material and having high heat transfer characteristics. Therefore, the refrigerant tank container can be pressed against the heating element with an appropriate load while taking advantage of the high heat transfer characteristics of copper.

因みに、フレーム（１７）としては、請求項８に記載の発明のように、鋼材を用いることができる。   Incidentally, as the frame (17), a steel material can be used as in the invention described in claim 8.

請求項７に記載の発明では、請求項６に記載の沸騰冷却装置において、フレーム（１７）は、ベースプレート（１６）の外表面側に位置するとともに、ベースプレート（１６）の外表面と冷媒槽（１）の外部とを連通させる開口部（１７１）を備え、ベースプレート（１６）における発熱体（９０）が接触する部位は、開口部（１７１）から冷媒槽（１）の外側に向かって突出していることを特徴とする。   In the invention according to claim 7, in the boiling cooling device according to claim 6, the frame (17) is located on the outer surface side of the base plate (16), and the outer surface of the base plate (16) and the refrigerant tank ( 1) An opening (171) that communicates with the outside is provided, and a portion of the base plate (16) with which the heating element (90) comes into contact protrudes from the opening (171) toward the outside of the refrigerant tank (1). It is characterized by being.

ところで、請求項２に記載の発明のように、積層プレートが冷媒槽の内部と外部を連通させる開口部を備える構成の場合、積層プレートとブロックとの接合部からの冷媒の漏れの恐れがあるが、請求項７に記載の発明におけるフレームの開口部は、冷媒槽の内部と外部を連通させるものではないため、開口部からの冷媒の漏れの恐れはない。   By the way, like the invention of Claim 2, when a laminated plate is provided with the opening part which connects the inside and outside of a refrigerant tank, there exists a possibility of the leakage of the refrigerant | coolant from the junction part of a laminated plate and a block. However, since the opening portion of the frame in the invention according to claim 7 does not connect the inside and the outside of the refrigerant tank, there is no fear of leakage of the refrigerant from the opening portion.

また、請求項４に記載の発明におけるブロックに相当するものが不要であるため、構造が簡素で低コストに実現できるとともに、そのブロックとベースプレートとの接触面の熱抵抗がない分、伝熱特性が良好である。   Further, since a block corresponding to the block according to the invention of claim 4 is not required, the structure is simple and can be realized at low cost, and there is no thermal resistance of the contact surface between the block and the base plate, and therefore, heat transfer characteristics Is good.

また、ベースプレートにおける発熱体が接触する部位を突出させているため、ベースプレートと発熱体とを容易に接触させることができる。   Moreover, since the site | part which the heat generating body contacts in a baseplate is protruded, a base plate and a heat generating body can be made to contact easily.

なお、上記各手段の括弧内の符号は、後述する実施形態に記載の具体的手段との対応関係を示すものである。   In addition, the code | symbol in the bracket | parenthesis of each said means shows the correspondence with the specific means as described in embodiment mentioned later.

（第１実施形態）
本発明の第１実施形態について説明する。図１は第１実施形態に係る沸騰冷却装置の正面図、図２は図１の右側面図、図３は図１の平面図、図４は本実施形態の沸騰冷却装置に発熱体９０が取り付けられた状態を示す側面図、図５は図１のＡ−Ａ線に沿う断面図、図６は図１の沸騰冷却装置における要部を分解して示す斜視図である。 (First embodiment)
A first embodiment of the present invention will be described. 1 is a front view of a boiling cooling apparatus according to the first embodiment, FIG. 2 is a right side view of FIG. 1, FIG. 3 is a plan view of FIG. 1, and FIG. FIG. 5 is a sectional view taken along the line AA in FIG. 1, and FIG. 6 is a perspective view showing an essential part of the boiling cooling device in FIG. 1 in an exploded manner.

図１〜図４に示すように、沸騰冷却装置は、半導体素子等の発熱体９０を冷却するもので、内部に液相の冷媒を貯留するとともに、外表面に発熱体９０が取り付けられる冷媒槽１と、発熱体９０の熱によって沸騰した冷媒を冷却して凝縮させた後に冷媒槽１に戻す放熱部２とを備えている。   As shown in FIGS. 1 to 4, the boiling cooling device cools a heating element 90 such as a semiconductor element, stores a liquid-phase refrigerant inside, and a refrigerant tank in which the heating element 90 is attached to the outer surface. 1 and a heat dissipating section 2 that cools and condenses the refrigerant boiled by the heat of the heating element 90 and returns the refrigerant to the refrigerant tank 1.

冷媒槽１は、銅材より成るカバープレート１１と、積層プレート１２とが接合されて、液相の冷媒が貯留される空間が内部に形成された最中状ないしは扁平箱状の容器となっている。   The refrigerant tank 1 is a middle or flat box-like container in which a cover plate 11 made of a copper material and a laminated plate 12 are joined, and a space for storing a liquid-phase refrigerant is formed inside. Yes.

図５、図６に示すように、積層プレート１２は、銅材より成る外皮１２１間に補強材１２２を挟んだ３層構造材より成り、冷媒槽１の内部と外部を連通させるとともに後述するブロック１３が挿入される円形の開口部１２３を備え、また、後述するボルト９２が挿入される穴１２４が形成された４つの鍔部１２５を備えている。   As shown in FIGS. 5 and 6, the laminated plate 12 is made of a three-layer structure material in which a reinforcing material 122 is sandwiched between outer skins 121 made of a copper material, and communicates the inside and outside of the refrigerant tank 1 with a block described later. 13 includes a circular opening 123 into which 13 is inserted, and four flanges 125 in which holes 124 into which bolts 92 to be described later are inserted are formed.

補強材１２２は、ろう付け工程後の剛性が銅材よりも高い材料より成り、本実施形態ではステンレスを用いている。因みに、ステンレスは銅の拡散接合（約１１００℃）やろう付け（６００〜８００℃）の工程を経た後も、軟化することなく、良好な強度（剛性）を維持できる。   The reinforcing material 122 is made of a material having higher rigidity than the copper material after the brazing process, and stainless steel is used in this embodiment. Incidentally, stainless steel can maintain good strength (rigidity) without being softened even after it undergoes the steps of copper diffusion bonding (about 1100 ° C.) and brazing (600 to 800 ° C.).

ブロック１３は、銅材より成り、円柱状に形成された第１円柱部１３１と、第１円柱部１３１よりも大径の円柱状に形成された第２円柱部１３２を備えている。ブロック１３は、第２円柱部１３２が冷媒槽１の内部に位置するようにして、第２円柱部１３２が積層プレート１２の外皮１２１に当接する位置まで、第１円柱部１３１が積層プレート１２の開口部１２３に圧入される。これにより、第１円柱部１３１の端面が冷媒槽１の外部に露出し、第１円柱部１３１の端面に発熱体９０が接触するようになっている。   The block 13 is made of a copper material, and includes a first columnar part 131 formed in a columnar shape and a second columnar part 132 formed in a columnar shape having a larger diameter than the first columnar part 131. The block 13 has the first cylindrical portion 131 of the laminated plate 12 until the second cylindrical portion 132 is in contact with the outer skin 121 of the laminated plate 12 so that the second cylindrical portion 132 is located inside the refrigerant tank 1. Press-fitted into the opening 123. As a result, the end surface of the first cylindrical portion 131 is exposed to the outside of the refrigerant tank 1, and the heating element 90 comes into contact with the end surface of the first cylindrical portion 131.

そして、沸騰冷却装置全体を一体ろう付けする際に、第１円柱部１３１と開口部１２３の圧入部も、ブロック１３と積層プレート１２との勘合部の外側に配したリン銅ろうあるいは銀ろう等のリング状のろう材１４を用いて密封される。   And when brazing the whole boiling cooling apparatus integrally, the press-fit part of the 1st cylindrical part 131 and the opening part 123 is also arranged in the outer side of the fitting part of the block 13 and the lamination | stacking plate 12, phosphorous copper brazing, silver brazing, etc. The ring-shaped brazing filler metal 14 is used for sealing.

冷媒槽１内には、ウイック１５が設けられ、沸騰冷却装置全体を一体ろう付けする前に、ウイック１５はブロック１３に予め拡散接合されている。ウイック１５は、周知のように多孔質部材であり、本実施形態では発泡銅を用いている。   A wick 15 is provided in the refrigerant tank 1, and the wick 15 is diffusion bonded to the block 13 in advance before the whole boiling cooling device is brazed. As is well known, the wick 15 is a porous member, and in this embodiment, foamed copper is used.

図１〜図４に示すように、放熱部２は、２枚のプレートが接合されて内部に空間が形成された最中状ないしは扁平箱状のヘッダ２１と、ヘッダ２１と冷媒槽１とを連通させてヘッダ２１と冷媒槽１間で冷媒を流通させる複数本のチューブ２２と、チューブ２２間に介在されて放熱面積を増大させるフィン２３と、ヘッダ２１と冷媒槽１とを連結するサイドプレート２４とを備えている。なお、ヘッダ２１、チューブ２２、フィン２３、およびサイドプレート２４は、いずれも銅より成る。   As shown in FIG. 1 to FIG. 4, the heat radiating section 2 includes an intermediate or flat box-shaped header 21 in which two plates are joined to form a space therein, and the header 21 and the refrigerant tank 1. A plurality of tubes 22 that allow the refrigerant to flow between the header 21 and the refrigerant tank 1, a fin 23 that is interposed between the tubes 22 to increase the heat radiation area, and a side plate that connects the header 21 and the refrigerant tank 1. 24. The header 21, the tube 22, the fins 23, and the side plate 24 are all made of copper.

上記沸騰冷却装置は、ウイック１５をブロック１３に予め拡散接合した後、各部材間で接合される部位に施されたろう材により一体ろう付けされる。   After the wick 15 is preliminarily diffusion bonded to the block 13, the boiling cooling device is brazed integrally with a brazing material applied to a portion to be bonded between the members.

真空引きされた沸騰冷却装置の内部空間には、所定量の冷媒が封入され、飽和状態に保たれている。冷媒は、ここでは水を使用している。尚、冷媒としては、水の他にアルコール、フロロカーボン、フロン等を用いてもよい。   A predetermined amount of refrigerant is sealed in the evacuated boiling cooling device and kept in a saturated state. Here, water is used as the refrigerant. As the refrigerant, alcohol, fluorocarbon, chlorofluorocarbon or the like may be used in addition to water.

発熱体９０は、プリント基板９１に実装されており、プリント基板９１と沸騰冷却装置をボルト９２とナット９３により結合して、ブロック１３を発熱体９０に押し付けている。   The heating element 90 is mounted on the printed circuit board 91, and the printed circuit board 91 and the boiling cooling device are coupled by a bolt 92 and a nut 93 to press the block 13 against the heating element 90.

上記構成になる沸騰冷却装置の作動について説明する。   The operation of the boiling cooling device configured as described above will be described.

発熱体９０の熱がブロック１３を介してウイック１５に伝達され、ウイック１５内の液相冷媒はその熱により沸騰気化し、気相冷媒はチューブ２２内を上昇してヘッダ２１に向かって流れる。気相冷媒はチューブ２２内を流れる際に外部の空気と熱交換して冷却される。そして、冷却されて凝縮した冷媒は、チューブ２２内を下降して冷媒槽１内に還流する。   The heat of the heating element 90 is transmitted to the wick 15 through the block 13, the liquid phase refrigerant in the wick 15 is boiled and vaporized by the heat, and the gas phase refrigerant rises in the tube 22 and flows toward the header 21. The gas-phase refrigerant is cooled by exchanging heat with external air when flowing in the tube 22. Then, the cooled and condensed refrigerant descends in the tube 22 and returns to the refrigerant tank 1.

このように、発熱体９０が発生した熱は、冷媒に伝達されて放熱部２に輸送され、この放熱部２で気相冷媒が凝縮する際に凝縮潜熱として放出され、フィン２３を介して外気に放熱され、これにより、発熱体９０が冷却される。   In this way, the heat generated by the heating element 90 is transmitted to the refrigerant and transported to the heat radiating unit 2, and is released as condensation latent heat when the gas phase refrigerant condenses in the heat radiating unit 2, and the outside air passes through the fins 23. The heat generating element 90 is thereby cooled.

本実施形態では、冷媒槽１を形成する容器は補強材１２２によりろう付け工程後の剛性が確保されるため、冷媒槽容器を発熱体９０に押し付けた際の冷媒槽容器の変形が抑制される。また、銅材より成る伝熱特性が高いブロック１３を介して冷媒と発熱体９０との間の熱移動を行うことができる。したがって、銅の高い伝熱特性を生かしながら、冷媒槽容器を発熱体９０に適切な荷重で押し付けることができる。   In this embodiment, since the container forming the refrigerant tank 1 is secured by the reinforcing material 122 after the brazing process, deformation of the refrigerant tank container when the refrigerant tank container is pressed against the heating element 90 is suppressed. . Further, heat transfer between the refrigerant and the heating element 90 can be performed through the block 13 made of a copper material and having high heat transfer characteristics. Therefore, the refrigerant tank container can be pressed against the heating element 90 with an appropriate load while taking advantage of the high heat transfer characteristics of copper.

また、積層プレート１２の外皮１２１は銅材より成るため、冷媒として水を用いた場合に腐食による非凝縮ガスの発生を抑制することができるとともに、銅材より成るブロック１３と積層プレート１２とを、リン銅ろうあるいは銀ろうなどのような一般的な銅ろう付け用ろう材にて容易に接合することができる。   Moreover, since the outer skin 121 of the laminated plate 12 is made of a copper material, when water is used as a coolant, generation of non-condensable gas due to corrosion can be suppressed, and the block 13 made of the copper material and the laminated plate 12 can be combined. It can be easily joined with a general copper brazing brazing material such as phosphorous copper brazing or silver brazing.

また、ブロック１３を段付き円柱状に形成し、大径の第２円柱部１３２を積層プレート１２の外皮１２１に当接させることにより、ブロック１３と積層プレート１２との勘合部の外側にリング状のろう材１４などを持いてろう付けをおこなった際に、ウイック１５へろう材１４が吸い込まれるのを防ぐことができる。   Further, the block 13 is formed in a stepped columnar shape, and the second cylindrical portion 132 having a large diameter is brought into contact with the outer skin 121 of the laminated plate 12, so that a ring shape is formed outside the fitting portion between the block 13 and the laminated plate 12. It is possible to prevent the brazing material 14 from being sucked into the wick 15 when brazing is performed with the brazing material 14 or the like.

（第２実施形態）
本発明の第２実施形態について説明する。図７は第２実施形態に係る沸騰冷却装置の要部の断面図、図８は第２実施形態に係る沸騰冷却装置の要部を分解して示す斜視図である。本実施形態は、冷媒槽１を形成する容器の構成が第１実施形態と異なっている。なお、第１実施形態と同一もしくは均等部分には同一の符号を付し、その説明を省略する。 (Second Embodiment)
A second embodiment of the present invention will be described. FIG. 7 is a cross-sectional view of the main part of the boiling cooling apparatus according to the second embodiment, and FIG. 8 is an exploded perspective view showing the main part of the boiling cooling apparatus according to the second embodiment. This embodiment is different from the first embodiment in the configuration of the container forming the refrigerant tank 1. In addition, the same code | symbol is attached | subjected to the same or equivalent part as 1st Embodiment, and the description is abbreviate | omitted.

図７、図８に示すように、冷媒槽１は、銅材より成るカバープレート１１（図１参照）と、銅材より成るベースプレート１６とが接合されて、液相の冷媒が貯留される空間が内部に形成された最中状ないしは扁平箱状の容器となっている。ベースプレート１６の外表面側には、補強用のフレーム１７が配置されている。   As shown in FIGS. 7 and 8, the refrigerant tank 1 is a space in which a cover plate 11 made of a copper material (see FIG. 1) and a base plate 16 made of a copper material are joined to store a liquid-phase refrigerant. Is a middle or flat box-like container formed inside. A reinforcing frame 17 is disposed on the outer surface side of the base plate 16.

フレーム１７は、後述するブロック１８が挿入される円形の開口部１７１を備え、また、ボルトが挿入される穴１７２が形成された４つの鍔部１７３を備えている。フレーム１７は、ろう付け工程後の剛性が銅材よりも高い材料より成り、本実施形態ではステンレスを用いている。   The frame 17 includes a circular opening 171 into which a block 18 to be described later is inserted, and four flanges 173 in which holes 172 into which bolts are inserted are formed. The frame 17 is made of a material having higher rigidity than the copper material after the brazing process, and stainless steel is used in this embodiment.

ブロック１８は、銅材より成り、円柱状に形成された第１円柱部１８１と、第１円柱部１８１よりも小径の円柱状に形成された第２円柱部１８２を備えている。ブロック１８の第２円柱部１８２がフレーム１７の開口部１７１に挿入されて、第２円柱部１８２の端面がベースプレート１６に接触するようになっている。   The block 18 is made of a copper material, and includes a first cylindrical portion 181 formed in a cylindrical shape and a second cylindrical portion 182 formed in a cylindrical shape having a smaller diameter than the first cylindrical portion 181. The second cylindrical portion 182 of the block 18 is inserted into the opening 171 of the frame 17 so that the end surface of the second cylindrical portion 182 contacts the base plate 16.

また、ブロック１８の第１円柱部１８１とベースプレート１６との間にフレーム１７を挟み込んだ構造となっている。そして、第１円柱部１８１の端面が冷媒槽１の外部に露出し、第１円柱部１８１の端面に発熱体９０（図１参照）が接触するようになっており、これにより、発熱体９０の熱がベースプレート１６およびブロック１８を介してウイック１５に伝達される。   Further, the frame 17 is sandwiched between the first cylindrical portion 181 of the block 18 and the base plate 16. And the end surface of the 1st cylindrical part 181 is exposed outside the refrigerant tank 1, and the heat generating body 90 (refer FIG. 1) contacts the end surface of the 1st cylindrical part 181. Is transmitted to the wick 15 through the base plate 16 and the block 18.

なお、ベースプレート１６、フレーム１７、およびブロック１８は、沸騰冷却装置全体を一体ろう付けする際に同時にろう付けする。   The base plate 16, the frame 17, and the block 18 are brazed at the same time when the entire boiling cooling device is brazed together.

本実施形態では、冷媒槽１を形成する容器はフレーム１７によりろう付け工程後の剛性が確保されるため、冷媒槽容器を発熱体９０に押し付けた際の冷媒槽容器の変形が抑制される。また、銅材より成る伝熱特性が高いベースプレート１６およびブロック１８を介して冷媒と発熱体９０との間の熱移動を行うことができる。したがって、銅の高い伝熱特性を生かしながら、冷媒槽容器を発熱体９０に適切な荷重で押し付けることができる。   In the present embodiment, since the container forming the refrigerant tank 1 is secured by the frame 17 after the brazing process, deformation of the refrigerant tank container when the refrigerant tank container is pressed against the heating element 90 is suppressed. Further, heat transfer between the refrigerant and the heating element 90 can be performed via the base plate 16 and the block 18 made of copper and having high heat transfer characteristics. Therefore, the refrigerant tank container can be pressed against the heating element 90 with an appropriate load while taking advantage of the high heat transfer characteristics of copper.

また、ベースプレート１６は銅材より成るため、冷媒として水を用いた場合に腐食による非凝縮ガスの発生を抑制することができるとともに、銅材より成るブロック１８とベースプレート１６とを一般的な銅ろう付け用ろう材にて容易に接合することができる。   In addition, since the base plate 16 is made of a copper material, generation of non-condensable gas due to corrosion can be suppressed when water is used as a coolant, and the block 18 and the base plate 16 made of copper material can be connected to a general copper braze. Can be easily joined with a brazing filler metal.

また、フレーム１７の開口部１７１は冷媒槽１の内部と外部を連通させるものではないため、開口部１７１からの冷媒の漏れの恐れはなく、ベースプレート１６とブロック１８とを接合するためのろう材がウイック１５へ吸い込まれる恐れもない。   Further, since the opening 171 of the frame 17 does not allow the inside and outside of the refrigerant tank 1 to communicate with each other, there is no fear of leakage of the refrigerant from the opening 171, and the brazing material for joining the base plate 16 and the block 18. There is no fear of being sucked into wick 15.

（第３実施形態）
本発明の第３実施形態について説明する。図９は第３実施形態に係る沸騰冷却装置の要部の断面図、図１０は第３実施形態に係る沸騰冷却装置の要部を分解して示す斜視図である。本実施形態は、第２実施形態におけるベースプレート１６の形状を変更して、ブロック１８を不要にしたものである。なお、第２実施形態と同一もしくは均等部分には同一の符号を付し、その説明を省略する。 (Third embodiment)
A third embodiment of the present invention will be described. FIG. 9 is a sectional view of the main part of the boiling cooling device according to the third embodiment, and FIG. 10 is an exploded perspective view showing the main part of the boiling cooling device according to the third embodiment. In the present embodiment, the shape of the base plate 16 in the second embodiment is changed to make the block 18 unnecessary. In addition, the same code | symbol is attached | subjected to the same or equivalent part as 2nd Embodiment, and the description is abbreviate | omitted.

図９、図１０に示すように、ベースプレート１６の一部を外側に打ち出して凸部１６１を形成し、この凸部１６１をフレーム１７の開口部１７１に挿入して、凸部１６１を開口部１７１よりもさらに外側まで突出させている。そして、凸部１６１の外表面に発熱体９０（図１参照）が接触するようになっており、これにより、発熱体９０の熱がベースプレート１６を介してウイック１５に伝達される。   As shown in FIGS. 9 and 10, a portion of the base plate 16 is driven out to form a convex portion 161, and this convex portion 161 is inserted into the opening 171 of the frame 17, and the convex portion 161 is inserted into the opening 171. It protrudes further to the outside. And the heat generating body 90 (refer FIG. 1) contacts the outer surface of the convex part 161, and, thereby, the heat | fever of the heat generating body 90 is transmitted to the wick 15 via the base plate 16. FIG.

なお、ベースプレート１６とブロック１８は、沸騰冷却装置全体を一体ろう付けする際に同時にろう付けする。   The base plate 16 and the block 18 are brazed at the same time when the whole boiling cooling device is brazed together.

本実施形態では、冷媒槽１を形成する容器はフレーム１７によりろう付け工程後の剛性が確保されるため、冷媒槽容器を発熱体９０に押し付けた際の冷媒槽容器の変形が抑制される。また、銅材より成る伝熱特性が高いベースプレート１６を介して冷媒と発熱体９０との間の熱移動を行うことができる。したがって、銅の高い伝熱特性を生かしながら、冷媒槽容器を発熱体９０に適切な荷重で押し付けることができる。   In the present embodiment, since the container forming the refrigerant tank 1 is secured by the frame 17 after the brazing process, deformation of the refrigerant tank container when the refrigerant tank container is pressed against the heating element 90 is suppressed. In addition, heat transfer between the refrigerant and the heating element 90 can be performed via the base plate 16 made of copper and having high heat transfer characteristics. Therefore, the refrigerant tank container can be pressed against the heating element 90 with an appropriate load while taking advantage of the high heat transfer characteristics of copper.

また、ベースプレート１６は銅材より成るため、冷媒として水を用いた場合に腐食による非凝縮ガスの発生を抑制することができる。   Further, since the base plate 16 is made of a copper material, generation of non-condensable gas due to corrosion can be suppressed when water is used as a coolant.

また、フレーム１７の開口部１７１は冷媒槽１の内部と外部を連通させるものではないため、開口部１７１からの冷媒の漏れの恐れはない。   Further, since the opening 171 of the frame 17 does not connect the inside and the outside of the refrigerant tank 1, there is no fear of leakage of the refrigerant from the opening 171.

また、第２実施形態におけるブロック１８が不要であるため、構造が簡素で低コストに実現できるとともに、そのブロック１８とベースプレート１６との接触面の熱抵抗がない分、伝熱特性が良好である。   In addition, since the block 18 in the second embodiment is unnecessary, the structure is simple and can be realized at low cost, and the heat transfer characteristic is good because there is no thermal resistance of the contact surface between the block 18 and the base plate 16. .

（他の実施形態）
上記実施形態では、補強材１２２またはフレーム１７は、ステンレスを用いたが、他の鉄系材料（例えば炭素鋼）を用いてもよい。 (Other embodiments)
In the above embodiment, the reinforcing material 122 or the frame 17 is made of stainless steel, but other iron-based materials (for example, carbon steel) may be used.

また、第２、第３実施形態では、ベースプレート１６とフレーム１７をろう付けにて一体化したが、ベースプレート１６とフレーム１７をかしめにより一体化してもよい。   In the second and third embodiments, the base plate 16 and the frame 17 are integrated by brazing, but the base plate 16 and the frame 17 may be integrated by caulking.

本発明の第１実施形態に係る沸騰冷却装置の正面図である。It is a front view of the boiling cooling device concerning a 1st embodiment of the present invention. 図１の右側面図である。It is a right view of FIG. 図１の平面図である。It is a top view of FIG. 第１実施形態の沸騰冷却装置に発熱体が取り付けられた状態を示す側面図である。It is a side view which shows the state by which the heat generating body was attached to the boiling cooling device of 1st Embodiment. 図１のＡ−Ａ線に沿う断面図である。It is sectional drawing which follows the AA line of FIG. 図１の沸騰冷却装置における要部を分解して示す斜視図である。It is a perspective view which decomposes | disassembles and shows the principal part in the boiling cooling device of FIG. 本発明の第２実施形態に係る沸騰冷却装置の要部の断面図である。It is sectional drawing of the principal part of the boiling cooling device which concerns on 2nd Embodiment of this invention. 第２実施形態に係る沸騰冷却装置の要部を分解して示す斜視図であるIt is a perspective view which decomposes | disassembles and shows the principal part of the boiling cooling device which concerns on 2nd Embodiment. 本発明の第３実施形態に係る沸騰冷却装置の要部の断面図である。It is sectional drawing of the principal part of the boiling cooling device which concerns on 3rd Embodiment of this invention. 第３実施形態に係る沸騰冷却装置の要部を分解して示す斜視図であるIt is a perspective view which decomposes | disassembles and shows the principal part of the boiling cooling device which concerns on 3rd Embodiment.

符号の説明Explanation of symbols

１…冷媒槽、２…放熱部、１２…積層プレート、１３…ブロック、１２１…外皮、１２２…補強材、９０…発熱体。   DESCRIPTION OF SYMBOLS 1 ... Refrigerant tank, 2 ... Radiation part, 12 ... Laminated plate, 13 ... Block, 121 ... Outer skin, 122 ... Reinforcement material, 90 ... Heating body.

Claims (8)

内部に液相の冷媒を貯留するとともに、外表面に発熱体（９０）が取り付けられる冷媒槽（１）と、前記発熱体（９０）の熱によって沸騰した前記冷媒を冷却して凝縮させた後に前記冷媒槽（１）に戻す放熱部（２）とを備え、前記冷媒槽（１）と前記放熱部（２）がろう付けにて接合される沸騰冷却装置において、
前記冷媒槽（１）を形成する容器は、銅材より成り、一方の面が前記冷媒槽（１）の内部に露出するとともに他方の面に前記発熱体（９０）が接触するブロック（１３）と、銅材より成る外皮（１２１）間に補強材（１２２）を挟んだ３層構造材にて形成されるとともに前記ブロック（１３）に接合される積層プレート（１２）とを有し、
前記補強材（１２２）は、ろう付け工程後の剛性が前記銅材よりも高い材料から成ることを特徴とする沸騰冷却装置。 After the liquid phase refrigerant is stored inside the refrigerant tank (1) in which the heating element (90) is attached to the outer surface and the refrigerant boiled by the heat of the heating element (90) is cooled and condensed A boiling cooling device comprising a heat radiating part (2) returning to the refrigerant tank (1), wherein the refrigerant tank (1) and the heat radiating part (2) are joined by brazing;
The container forming the refrigerant tank (1) is made of a copper material, and one surface is exposed to the inside of the refrigerant tank (1) and the heat generating body (90) is in contact with the other surface (13). And a laminated plate (12) formed of a three-layer structure material with a reinforcing material (122) sandwiched between outer layers (121) made of copper material and joined to the block (13),
The said cooling material (122) consists of a material whose rigidity after a brazing process is higher than the said copper material, The boiling cooling device characterized by the above-mentioned. 前記積層プレート（１２）は、前記冷媒槽（１）の内部と外部を連通させる開口部（１２３）を備え、前記開口部（１２３）に前記ブロック（１３）が配置されていることを特徴とする請求項１に記載の沸騰冷却装置。 The laminated plate (12) includes an opening (123) that allows the inside and outside of the refrigerant tank (1) to communicate with each other, and the block (13) is disposed in the opening (123). The boiling cooling device according to claim 1. 前記補強材（１２２）は、鋼材より成ることを特徴とする請求項１または２に記載の沸騰冷却装置。 The said cooling material (122) consists of steel materials, The boiling cooling device of Claim 1 or 2 characterized by the above-mentioned. 内部に液相の冷媒を貯留するとともに、外表面に発熱体（９０）が取り付けられる冷媒槽（１）と、前記発熱体（９０）の熱によって沸騰した前記冷媒を冷却して凝縮させた後に前記冷媒槽（１）に戻す放熱部（２）とを備え、前記冷媒槽（１）と前記放熱部（２）がろう付けにて接合される沸騰冷却装置において、
前記冷媒槽（１）を形成する容器は、銅材より成るとともに一方の面が前記冷媒槽（１）の内部に露出するベースプレート（１６）と、銅材より成り、一方の面が前記ベースプレート（１６）に接触するとともに他方の面に前記発熱体（９０）が接触するブロック（１８）と、前記ベースプレート（１６）のうち前記ブロック（１８）が接触しない部位に配置された補強用のフレーム（１７）とを有し、
前記フレーム（１７）は、ろう付け工程後の剛性が前記銅材よりも高い材料から成ることを特徴とする沸騰冷却装置。 After the liquid phase refrigerant is stored inside the refrigerant tank (1) in which the heating element (90) is attached to the outer surface and the refrigerant boiled by the heat of the heating element (90) is cooled and condensed A boiling cooling device comprising a heat radiating part (2) returning to the refrigerant tank (1), wherein the refrigerant tank (1) and the heat radiating part (2) are joined by brazing;
The container forming the refrigerant tank (1) is made of a copper material and has one surface exposed to the inside of the refrigerant tank (1) and a copper material, and one surface is the base plate ( 16) the heating element (90) in contact with the other surface and the block (18), and a reinforcing frame (where the block (18) is not in contact with the base plate (16)). 17)
The said frame (17) consists of material whose rigidity after a brazing process is higher than the said copper material, The boiling cooling device characterized by the above-mentioned. 前記フレーム（１７）は、前記ベースプレート（１６）の外表面側に位置するとともに、前記ベースプレート（１６）の外表面と前記冷媒槽（１）の外部とを連通させる開口部（１７１）を備え、前記開口部（１７１）に前記ブロック（１８）が配置されていることを特徴とする請求項４に記載の沸騰冷却装置。 The frame (17) is located on the outer surface side of the base plate (16), and includes an opening (171) for communicating the outer surface of the base plate (16) and the outside of the refrigerant tank (1), The boiling cooling device according to claim 4, wherein the block (18) is disposed in the opening (171). 内部に液相の冷媒を貯留するとともに、外表面に発熱体（９０）が取り付けられる冷媒槽（１）と、前記発熱体（９０）の熱によって沸騰した前記冷媒を冷却して凝縮させた後に前記冷媒槽（１）に戻す放熱部（２）とを備え、前記冷媒槽（１）と前記放熱部（２）がろう付けにて接合される沸騰冷却装置において、
前記冷媒槽（１）を形成する容器は、銅材より成り、一方の面が前記冷媒槽（１）の内部に露出するるとともに他方の面に前記発熱体（９０）が接触するベースプレート（１６）と、前記ベースプレート（１６）のうち前記発熱体（９０）が接触しない部位に配置された補強用のフレーム（１７）とを有し、
前記フレーム（１７）は、ろう付け工程後の剛性が前記銅材よりも高い材料から成ることを特徴とする沸騰冷却装置。 After the liquid phase refrigerant is stored inside the refrigerant tank (1) in which the heating element (90) is attached to the outer surface and the refrigerant boiled by the heat of the heating element (90) is cooled and condensed A boiling cooling device comprising a heat radiating part (2) returning to the refrigerant tank (1), wherein the refrigerant tank (1) and the heat radiating part (2) are joined by brazing;
The container forming the refrigerant tank (1) is made of a copper material, one surface of which is exposed inside the refrigerant tank (1), and the base plate (16) with which the heating element (90) is in contact with the other surface. ) And a reinforcing frame (17) disposed in a portion of the base plate (16) where the heating element (90) does not contact,
The said frame (17) consists of material whose rigidity after a brazing process is higher than the said copper material, The boiling cooling device characterized by the above-mentioned. 前記フレーム（１７）は、前記ベースプレート（１６）の外表面側に位置するとともに、前記ベースプレート（１６）の外表面と前記冷媒槽（１）の外部とを連通させる開口部（１７１）を備え、
前記ベースプレート（１６）における前記発熱体（９０）が接触する部位は、前記開口部（１７１）から前記冷媒槽（１）の外側に向かって突出していることを特徴とする請求項６に記載の沸騰冷却装置。 The frame (17) is located on the outer surface side of the base plate (16), and includes an opening (171) for communicating the outer surface of the base plate (16) and the outside of the refrigerant tank (1),
The site | part which the said heat generating body (90) contacts in the said baseplate (16) protrudes toward the outer side of the said refrigerant | coolant tank (1) from the said opening part (171). Boiling cooler. 前記フレーム（１７）は、鋼材より成ることを特徴とする請求項４ないし７のいずれか１つに記載の沸騰冷却装置。 The boiling cooling device according to any one of claims 4 to 7, wherein the frame (17) is made of a steel material.
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