JP4449422B2 - Measurement error correction method - Google Patents

Description

  The present invention relates to an error correction method for measuring an electronic component, and more particularly to a method for correcting (estimating) a measurement result measured by an actual measurement device to a measurement result measured by a different measurement system.

  Conventionally, SOLT correction is performed for the purpose of removing the influence of measurement system errors from measurement values. This correction method is performed as follows. First, a standard device is prepared in which physical true values of electrical characteristics (such as scattering coefficient) are specified in advance. Here, a coaxial electronic component in which the physical true value of the electrical characteristic shows a limit value is used as a standard device. The reason why such a coaxial electronic component is used as a standard device is that it is relatively easy to specify the physical true value of the electrical characteristic of a coaxial electronic component whose electrical characteristic exhibits a limit value. The physical true value of the electrical properties of coaxial electronic components with electrical states such as open, short circuit, termination, etc. show extreme values. Therefore, such a coaxial electronic component is used as a standard device. In addition, specifying the physical true value of the electrical characteristics in an electronic component such as a coaxial electronic component is hereinafter referred to as pricing.

  Returning to the description of the SOLT correction. Next, a coaxial cable is connected to one or a plurality of connection ports provided in the measuring apparatus, and a prepared standard device is connected to the tip of the coaxial cable. In this state, the electrical characteristics of the standard device are measured. Furthermore, the ends of the coaxial cables (connection ports of the measuring device) are connected (through connection) with the standard device removed, and the electrical characteristics are measured even in this state. Then, an error factor from the electrical characteristic in a state where the standard device is connected to the tip of the coaxial cable is identified. By identifying the error factor, the influence of the error is removed from the measured electrical characteristics, and the electrical characteristics of the coaxial electronic component connected to the end of the coaxial cable are calculated. In this case, the tip of the coaxial cable becomes the calibration surface.

  After calculating the correspondence between the measured value of the standard device and the physical true value of the standard device (identification of error factors), the calculated correspondence relationship was measured when measuring the electrical characteristics of the actual specimen. The measurement value is corrected based on this (the influence of the error factor is removed by calculation). Such calculation of correspondence and correction of measurement values based on the correspondence (identification of error factors and removal of error factors by calculation) are called calibration, and the above-described SOLT correction is an example of calibration.

  The above calibration is also required when measuring the electrical characteristics of an electronic component having no coaxial connector (hereinafter referred to as a non-coaxial electronic component), for example, a surface mount electronic component. In this case, the coaxial cable connected to the connection port of the measuring apparatus and the non-coaxial electronic component are relayed by the jig. The jig has a coaxial connector connected to the coaxial cable, and the coaxial connector is connected to the coaxial cable in a state of being connected to the coaxial cable. The non-coaxial electronic component is mounted on a jig connected to a coaxial cable, and its electrical characteristics are measured.

  Basically, a standard device is required for calibration of non-coaxial electronic components. However, it is practically impossible to make a standard for non-coaxial electronic components. This is due to the fact that standard devices other than the coaxial shape are very difficult to price. Therefore, when calibration is performed on a non-coaxial electronic component in the absence of a non-coaxial standard device, the calibration surface is the tip of the coaxial cable even though a jig is attached to the coaxial cable. For these reasons, non-coaxial electronic components are attached to a jig that is not a calibration surface and their electrical characteristics are measured.

In this case, an error may occur in the jig. Therefore, the electrical characteristics of the non-coaxial electronic component are identified in a state where the error factor caused by the jig is ignored, or the error factor due to the jig is estimated by calculation based on the physical dimensions of the jig. . In addition, the accuracy of calibration at the time of measurement of the non-coaxial electronic component can be improved by removing the estimation error factor of the jig from the electrical characteristics obtained by the measurement. (See Non-Patent Document 1)
Agilent Technologies 8720ES Network Analyzer User's Guide p.6-29 to p.6-32 Advantest R3860 Component Analyzer Operation Manual p.5-1 to p.5-6

  Thus, the conventional configuration in which calibration is performed at the time of specific measurement of a non-coaxial electronic component has a problem that the calibration accuracy is not necessarily high. As described above, the calibration surface of the measurement apparatus (mainly the network analyzer) must be a coaxial surface such as the tip of the coaxial cable. The measuring device measures the characteristics of the electronic components connected via the calibration surface subject to such restrictions. However, non-coaxial electronic components cannot be directly connected to the coaxial surface (calibration surface). For this reason, the non-coaxial electronic component is connected to a measuring device via a kind of relay transmission path called a jig, and its characteristics are measured. Here, each jig has its own characteristics, and it is difficult to make the characteristics uniform among a plurality of jigs. For these reasons, when performing characteristic measurements via jigs, jig-specific errors must occur for each jig, which causes variations in measurement results and increases calibration accuracy. It causes deterioration.

  In addition, in a non-coaxial electronic component (for example, a duplexer) having three or more ports, it is more difficult to make the characteristics uniform among a plurality of jigs, which is not practical at all. .

  In addition, electronic components used at high frequencies are increasingly operating with balanced signals instead of conventional unbalanced signals. The balanced signal is a signal that is transmitted as two signals having a phase difference of 180 °. On the signal receiving side, the original signal is extracted as a difference between the two signals. Since balanced signals are more resistant to noise than conventional unbalanced signals, they have become popular in recent years. However, since the balanced signal is a system in which one signal is transmitted and received as two signals, one balanced port corresponds to two unbalanced ports. For example, a balanced input / output filter is a two-port device with one input port and one output port, but it actually corresponds to a four-port unbalanced device. In fact, four signal input / output terminals are provided except for the ground terminal. Yes.

  As the balance of electronic components progresses, the number of non-coaxial electronic components such as surface mount electronic components is expected to continue increasing in the future. There is a demand for a port-based relative correction method (calibration method).

  In order to achieve the above-described object, the first of the present invention has the following configuration. An actual measurement jig is connected to the coaxial connection surface of the measurement apparatus, and then the measurement target electronic component is mounted on the actual measurement jig and measured with the measurement apparatus in this state. Other measurement that can be regarded as having the same measurement characteristics as the measurement apparatus or the measurement apparatus in a state where the measurement result of the electrical characteristics of the same electronic component to be measured is different from that of the actual measurement measurement jig. The method for correcting a measurement error for correcting to an electrical characteristic estimated to be obtained when the measurement target electronic component is measured by an apparatus includes the following steps.

Identifying an error factor in the coaxial connection surface;
When measuring the measurement target electronic component with the measurement device or the other measurement device in a state where the measurement target electronic component measurement value of the measurement target electronic component and the measurement target electronic component are mounted on the reference measurement jig Calculating a relative relationship between the electrical characteristics estimated to be obtained in
Identifying the error factor as a new error factor of the measurement device by correcting the error factor based on the relative relationship;
Connecting the actual measurement jig to the coaxial connection surface, mounting the measurement target electronic component on the actual measurement jig, and measuring the electrical characteristics of the measurement target electronic component in this state with the measurement device;
Removing the new error factor from the electrical characteristics of the electronic component to be measured obtained by measurement,
Is included.

Further, according to a second aspect of the present invention, the measurement object measured by the measurement apparatus in this state after mounting the measurement target electronic component on the measurement measurement jig after connecting the measurement measurement jig to the coaxial connection surface of the measurement apparatus. The measurement value of the actual measurement jig of the electronic component is the same as that of the measurement device or the measurement device in a state where the measurement result of the electrical characteristics of the electronic component to be measured is different from that of the actual measurement jig. The measurement error correction method for correcting to the electrical characteristics estimated to be obtained when the measurement target electronic component is measured by another measurement apparatus that can be regarded as having measurement characteristics includes the following steps.

Identifying an error factor in the coaxial connection surface;
When measuring the measurement target electronic component with the measurement device or the other measurement device in a state where the measurement target electronic component measurement value of the measurement target electronic component and the measurement target electronic component are mounted on the reference measurement jig Calculating a relative relationship between the electrical characteristics estimated to be obtained in
Mounting the measurement target electronic component on the actual measurement measurement jig after connecting the actual measurement measurement jig to the measurement device, and measuring the electrical characteristics of the measurement target electronic component with the measurement device in this state;
Obtaining the electrical characteristics of the measurement target electronic component connected to the actual measurement measurement jig by removing the error factor from the electrical characteristics of the measurement target electronic component obtained by measurement; and
Correcting the electrical characteristics of the measurement target electronic component connected to the actual measurement jig obtained by removing the error factor based on the relative relationship;
Is included.

  A configuration that is a feature of the present invention is that the measurement device or the other measurement device includes the measurement value of the actual measurement jig of the measurement target electronic component and the measurement target electronic component mounted on the reference measurement jig. After calculating the relative relationship between the electrical characteristics estimated to be obtained when measuring the measurement target electronic component, the error factor is corrected based on the assumed relationship. Here, the error factor is an error factor in the coaxial connection surface (Claim 1), and the measurement is performed in a state where another circuit element is connected to the measurement target electronic component and mounted on the actual measurement measurement jig. This is an error factor that occurs when the electronic component to be measured is measured by an apparatus (claim 2). Means for identifying these error factors is provided in the existing measuring apparatus. Therefore, the present invention can be realized by obtaining the relative relationship in an external computing device and correcting the error factor set in the measuring device by the relative relationship obtained in the present invention. That is, the present invention can realize a measurement error correction method in an existing measurement apparatus without adding a new configuration. In addition, if the third to seventh specific correction methods are carried out, the accuracy becomes very high.

  As described above, according to the present invention, the actual measurement jig measurement value by the actual measurement apparatus (using the actual measurement jig) is used as the reference measurement by the reference measurement apparatus (using the reference measurement jig). It is possible to match the jig measurement value with high accuracy. Moreover, it is possible to minimize the number of correction data acquisition samples necessary for carrying out such highly accurate correction to at least three.

  Furthermore, according to the present invention, almost the new configuration is achieved in the conventional measurement apparatus having a calibration function such as full 2-port correction and the conventional measurement apparatus having the device connection assumption correction function named in the embodiment. Therefore, the initial cost required for the construction of the correction system can be suppressed to the necessary minimum, and the convenience is excellent.

First Embodiment First, the basic configuration of the correction method of the present embodiment will be described. In the present embodiment, a surface mounting type SAW filter is used as an electronic component to be measured, and a measurement error correction method and its correction method when measuring the electrical characteristics of this SAW filter with a measuring apparatus having a network analyzer are adopted. The present invention is implemented in an electrical property measuring apparatus. Note that the present invention can be implemented in a method for correcting measurement results at two or more ports, particularly at three or more ports, but in the following description of this embodiment, a method for correcting measurement results at three ports or The present invention is described in an electrical characteristic measuring apparatus that employs the correction method. However, the present invention can be similarly applied to a correction method of measurement results of four or more ports and an apparatus employing the correction method. Further, the present invention can be similarly applied to a correction method for a one-port measurement result and a device that employs the correction method, and a correction method for a two-port measurement result and a device that employs the correction method.

  FIG. 1 is a plan view showing configurations of a reference characteristic measuring apparatus and an actual measurement apparatus according to the present embodiment, FIG. 2 is a plan view showing a configuration of a measuring jig, and FIG. 3 is a configuration of a network analyzer of the characteristic measuring apparatus. FIG. 4 is a back view showing a configuration of an electronic component that is a measurement target sample and a correction data acquisition sample.

  The actual measurement device 2 and the reference measurement device 1 are devices that can be regarded as having the same measurement characteristics, and can basically be configured from the same device. However, the configurations of these devices 1 and 2 may be different as long as equivalent measurement characteristics can be obtained. Both devices 1 and 2 can have the same measurement characteristics by performing calibration using a coaxial standard or the like.

  The apparatuses 1 and 2 are apparatuses that measure the electrical characteristics of the measurement target electronic component 11A having a plurality of ports and the correction data acquisition sample 11B while being mounted on the reference measurement jig 5A and the actual measurement measurement jig 5B.

  The actual measurement device 2 uses the measurement value measured in a state in which the measurement target electronic component 11A is mounted on the measurement measurement jig 5B, and the measurement target electronic component 11A as a reference measurement jig 5A having different characteristics from the measurement measurement jig 5B. It has a function of correcting to electrical characteristics estimated to be obtained when measuring in a mounted state.

  As shown in FIG. 1, the devices 1 and 2 include network analyzers 3A and 3B, coaxial cables 4A, 4B, and 4C, a reference measurement jig 5A, and an actual measurement measurement jig 5B. The network analyzer 3A and the reference measurement jig 5A are provided in the reference measurement apparatus 1, and the network analyzer 3B and the actual measurement jig 5B are provided in the actual measurement apparatus 2.

  The network analyzers 3A and 3B are measuring instruments for measuring electrical characteristics of electronic components used for high frequencies, and are input / output units having a plurality of ports (in this embodiment, three ports of port 1, port 2, and port 3). Have Coaxial cables 4A, 4B, and 4C are connected to these ports 1 to 3, respectively. A coaxial cable connector 6 is provided at the free ends of the coaxial cables 4A, 4B, and 4C.

  As shown in FIG. 2, the measuring jigs 5A and 5B include an insulating substrate 7, a connection wiring portion 8, and coaxial connectors 9A, 9B, and 9C. The connection wiring portion 8 is formed on the substrate surface 7a of the insulating substrate 7, and includes signal transmission paths 8a, 8b, and 8c and ground lines 8d to 8i. The signal transmission paths 8a, 8b, and 8c are arranged on the substrate surface 7a of the insulating substrate 7 so as to extend from the respective peripheral surfaces of the substrate toward the center of the substrate, and each of the extended end portions is predetermined at the central portion of the substrate surface 7a. Are spaced apart from each other. The ground lines 8c to 8i are provided on both sides of the signal transmission lines 8a, 8b, and 8c, respectively, in the central portion of the substrate surface 7a. The ground lines 8d and 8e located on the transmission line 8a side, the ground lines 8f and 8fg located on the transmission line 8b side, and the ground lines 8h and 8i located on the transmission line 8c side are located at the center of the substrate surface 7a. They are spaced apart by a predetermined spacing (equivalent to the signal transmission paths 8a, 8b, 8c).

  The signal transmission paths 8a, 8b, and 8c are connected to internal conductor contacts (not shown) of the coaxial connectors 9A, 9B, and 9C at the end of the board. The ground lines 8c to 8i are connected to a ground pattern (not shown) on the back surface of the substrate via the through-hole connecting portion 10, and further, external conductor contacts (not shown) of the coaxial connectors 9A, 9B, and 9C via the ground pattern. Connected to (omitted).

  In FIG. 2, the reference measurement jig 5A of the reference measurement device 1 and the actual measurement jig 5B of the actual measurement device 2 have the same shape, but these are particularly the same shape. do not have to. In particular, the shape of the actual measurement jig 5B may be different from that of the reference measurement jig 5A by making it suitable for an automatic sorting measuring machine or the like.

  As shown in FIG. 3, the network analyzer 3 </ b> B constituting the actual measurement measuring device 2 includes a network analyzer main body 20 and a control unit 21. The control unit 21 includes a control unit main body 22, a memory 23, an error factor identification unit 24, and a correction calculation unit 25.

  The measurement target electronic component 11A and the correction data acquisition sample 11B are electronic components having input / output terminals of 3 ports or more (3 ports in the present embodiment), and are transmitted to the back surface 11a as shown in FIG. Road terminals 12a, 12b, and 12c and ground terminals 12d to 12i are provided. The samples 11A and 11B are configured such that the transmission line terminals 12a, 12b, and 12c and the ground terminals 12d to 12i are connected to the signal transmission lines 8a, 8b, and 8c by bringing the back surface 11a into contact with the substrate surface 7a of the measurement jigs 5A and 5B. 8c is crimped to the ground lines 8d to 8i. As a result, the measurement target electronic component 11A and the correction data acquisition sample 11B are measured and mounted on the measurement jigs 5A and 5B.

  In the present embodiment, as the correction data acquisition sample 11B, a sample is prepared that generates an electrical characteristic equivalent to an arbitrary electrical characteristic of the measurement target electronic component 11A by a measurement operation using the measurement apparatuses 1 and 2. The correction data acquisition samples 11B are the three samples 11B having different electrical characteristics (reflection coefficients and the like) generated by the measuring device. The correction data acquisition sample 11B has a very small transmission coefficient between the ports. Preferably, the correction data acquisition sample 11B has an inter-port transmission coefficient of −20 dB or less. At least three samples 11B having such characteristics are prepared regardless of the connection port of the sample.

  Hereinafter, a measurement error correction method using the measurement apparatuses 1 and 2 according to the present embodiment will be described. First, a correction method that is the main point will be described.

  In the measurement value correction method (hereinafter referred to as a correction adapter type relative correction method) performed by the measurement apparatuses 1 and 2 of the present embodiment, three of the actual measurement jig 5B and the reference measurement jig 5A are the same. The correction data acquisition sample 11B is measured, and a correction coefficient (relative correction adapter) is obtained from the measurement result. In principle, the number of correction data acquisition samples 11B necessary for setting the correction coefficient is three regardless of the number of ports of the measurement system. Further, the correction data acquisition sample 11B does not need to be priced with a physical true value, but must be a sample having a sufficiently small transfer coefficient.

  The purpose of the correction method (correction adapter type relative correction method) of the present invention is to measure the electrical characteristics (hereinafter referred to as actual measurement) measured with the actual measurement device 2 in a state where the measurement object (non-coaxial electronic component) is mounted on the actual measurement jig 5B. The electrical characteristics (hereinafter referred to as reference measurement jig measurement values) measured by the reference measurement device 1 in a state where the measurement object is mounted on the reference measurement jig 5A are estimated from the measurement values (referred to as jig measurement values). It is to be.

  The reference measurement jig 5A is a jig that uses a measurement value of an electronic component measured by using the reference measurement jig as a reference measurement value of the electronic component. Specifically, a jig used when an electronic component manufacturer guarantees the characteristics of the electronic component to an electronic component user corresponds to the reference measurement jig 5A. The actual measurement jig 5B is a jig used when practically measuring an electronic component. An example of the actual measurement jig 5B includes a jig that performs measurement by being attached to an electronic component characteristic sorting step (automatic characteristic sorter) or the like.

  Due to the structure of the jig, it is not possible to accurately match the specification at the time of measurement between the plurality of jigs. Therefore, it is difficult to match the measurement value using the actual measurement jig 5B and the measurement value using the reference measurement jig 5A without correction. There is such a relationship between the actual measurement jig 5B and the reference measurement jig 5A.

  Hereinafter, the measurement values measured by the reference measurement jig 5A and the actual measurement jig 5B are referred to as the reference measurement jig measurement value and the actual measurement jig measurement value, respectively.

  In a network analyzer that is widely used as a measuring instrument for the reference measurement measure 1 or the actual measurement device 2, a SOLT correction, a TRL correction, or the like is provided at the tip of a coaxial cable or the like (hereinafter referred to as a coaxial connection point) connected to each port of the device. Can be obtained, the true value of the scattering coefficient of an arbitrary network connected to the coaxial connection point can be obtained. Hereinafter, the coaxial connection point on which the SOLT correction and the TRL correction are performed is referred to as a calibration plane.

  When the electrical characteristics of the non-coaxial electronic parts are measured by the measuring devices 1 and 2, the reference measurement jig 5A and the actual measurement jig 5B are attached to the calibration surface, and the non-coaxial electronic parts are further attached to the jigs 5A and 5B. The electrical characteristics are measured in the attached state. Although the reference measurement jig measurement value is not the sample true value, the reference measurement jig measurement value is obtained by superimposing a measurement error caused by the reference measurement jig 5A on the sample true value. The correction adapter type relative correction method of the present invention is a correction method for accurately estimating the measurement value of the reference measurement jig on the premise that it is impossible to obtain the true sample value itself.

  Hereinafter, the correction adapter type relative correction method of the present invention will be described by taking a correction method of a two-port measurement system as an example. The two-port measurement system is taken as an example in order to facilitate understanding of the correction adapter type relative correction method of the present invention. However, as will become clear from the following description, the correction adapter type relative correction method of the present invention can be implemented without any problem in the case of an arbitrary n port (n is a natural number).

When an arbitrary sample of a non-coaxial electronic component is measured using the reference measurement jig 5A, it is difficult to measure the true value of the sample scattering coefficient. However, there is no doubt that true values exist, and in the following description, these true values will be referred to as S _21DUT , S _11DUT, etc. The values whose characteristics can be observed with the sample mounted on the reference measurement jig 5A are the errors of the reference measurement jig 5A (hereinafter referred to as the reference measurement jig error) in the true values S _21DUT and S _11DUT. It becomes the superimposed value. This value becomes the reference measurement jig measurement value.

The state of the measurement is shown in FIG. In the figure, an arbitrary sample itself is called a DUT. The reference measurement jig measurement values are referred to as S _21D and S _11D . The reference measurement jig error is referred to as E _D1 (input side) and E _D2 (output side). The _circles attached to the reference measurement jig measurement values S _21D and S _11D in the figure indicate that these measurement values can be measured. The reference measurement jig errors E _D1 and E _D2 cannot be identified like the sample true values S _21DUT and S _11DUT .

Next, as shown in FIG. 6, it is assumed that the same sample DUT as the sample DUT is mounted on the actual measurement jig 5B and measured. In this case, the sample true values S _21DUT and S _11DUT themselves are equivalent to the state in which the reference measurement jig 5A is used as long as the same sample DUT is measured. However, the error superimposed on the sample true values S _21DUT and S _11DUT is an error caused by the actual measurement jig 5B. In the figure, values obtained by measuring the characteristics of the sample DUT using the actual measurement jig 5B are referred to as actual measurement jig measurement values S _21T and S _11T . Errors caused by the actual measurement jig 5B are referred to as actual measurement jig errors E _T1 (input side) and E _T2 (output side). The actual measurement jig errors E _T1 and E _T2 cannot be identified in the same manner as the reference measurement jig errors E _D1 and E _D2 .

Next, an error removal adapter 30 that further mounts the actual measurement jig 5B on which the sample DUT is mounted is assumed. The error removal adapter 30 is connected to the actual measurement device 2 in such a mounted state. The error elimination adapter 30 is assumed to have a characteristic that cancels the errors by offsetting the actual measurement jig errors E _T1 and E _T2 .

Specifically, the error elimination adapter 30 is a virtual adapter expressed by a two-port scattering coefficient, and is assumed as follows. First, after the scattering coefficient matrix of actual measurement jig errors E _T1 and E _T2 is converted into a transmission matrix, an inverse matrix of the transmission matrix is obtained. The obtained inverse matrix is returned to the scattering coefficient matrix. By performing such matrix transformation, an error removal adapter 20 having errors E _T1 ⁻¹ and E _T2 ⁻¹ is assumed. Error E _T1 ^-1 of the error neutralization adapter 30, it is not possible to actually measure the E _T2 ^-1, the error E _T1 ^-1, it is possible to envisage, as described above the E _T2 ^-1.

As shown in FIG. 7, it is assumed that the error elimination adapter 30 in a state where the actual measurement jig 5B with the sample DUT is mounted is connected to the actual measurement device 2 and the characteristics of the sample DUT are measured in that state. The In this case, the actual measurement jig errors E _{T1 and} E _T2 are canceled (removed) by the errors E _T1 ⁻¹ and E _T2 ⁻¹ of the error removal adapter 20. Accordingly, the measured values of the sample DUT in that case are regarded as the sample true values S _21DUT and S _11DUT .

As shown in FIG. 8, it is assumed that the error removal jig adapter 30 on which the actual measurement jig 5B with the sample DUT is mounted is further mounted on the reference measurement jig 5A. Then, it is assumed that the reference measurement jig 5A in this state is connected to the actual measurement device 2 and the characteristics of the sample DUT are measured. At this time, the characteristics at the input / output points of the error elimination adapter 30 are regarded as the sample true values S _21DUT and S _11DUT as described above. Therefore, the characteristics at the input / output points of the reference jig 5A are regarded as the reference jig measurement values S _21D and S _11D . That is, the state in which the characteristics of the sample DUT are measured in a state where the actual measurement jig 5B, the error removal adapter 30, and the reference measurement jig 5A are sequentially mounted is the situation shown in FIG. 2 is the same as the situation where the characteristics of the sample DUT are measured with the reference measurement jig 5A attached.

From the above consideration, the actual measurement jig measurement values S _21T and S _11T are multiplied by the errors E _T1 ⁻¹ and E _T2 ⁻¹ of the error removal adapter 30 and the reference measurement jig errors E _{D1 and} E _D2. It is understood that the reference measurement jig measurement values S _21D and S _11D in the measurement apparatus 2 can be estimated.

In order to realize this estimation, the sample true values S _21DUT and S _11DUT , the actual measurement jig error E _{T1 and} E _T2 , the reference measurement jig error E _{D1 and} E _D2, and the error removal adapter error E _T1 ⁻¹ , The condition is that E _T2 ⁻¹ is identified. However, it is impossible to identify these values. Therefore, in the present invention, the following new situation is assumed.

In the measurement assumption shown in FIG. 8 described above, it is assumed that the reference measurement jig 5A and the error removal adapter 30 are combined to form a single adapter shown in FIG. Hereinafter, an adapter newly assumed by the above synthesis is referred to as a relative correction adapter 31. Errors C1 and C2 caused by the relative correction adapter 31 are calculated as follows. After the scattering coefficient matrix of the reference measurement jig errors E _{D1 and} E _D2 and the errors E _T1 ⁻¹ and E _T2 ⁻¹ of the error removal adapter 30 is converted into a transmission matrix, these products are obtained. Furthermore, errors C1 and C2 of the relative correction adapter 31 are calculated by converting the obtained product into a scattering coefficient matrix.

Furthermore, as shown in FIG. 9, a mounting state in which the sample DUT is mounted on the relative correction adapter 31 and the relative correction adapter 31 is further mounted on the actual measurement jig 5B is assumed. Further, in such an implementation, a measurement state in which the actual measurement device 2 measures the specification of the sample DUT is assumed. The measurement values measured in such a measurement state are the reference measurement jig measurement values S _21D and S _11D . That is, if the relative correction adapter 31 is assumed, the reference measurement jig measurement values S _21D and S _11D can be calculated using the actual measurement jig 5B without using the reference measurement jig 5A.

Here, the actual measurement jig measurement values S _21T and S _11T and the reference measurement jig measurement values S _21D and S _11D are known values obtained by measurement. Further, the error factor (unknown number) that causes the errors C1 and C2 of the relative correction adapter 31 is a finite number. Therefore, if a finite number of sample DUTs are used and the actual measurement jig measurement values S _21T and S _{11T of} the sample DUT (standard sample) and the reference measurement jig measurement values S _21D and S _11D are obtained, relative correction is performed. The error factors included in the adapter 31 can be calculated to identify the errors C1 and C2. The error factor of the relative correction adapter 31 can be calculated by various methods. Next, an example of an error factor identification method for the relative correction adapter 31 will be described.

  In order to carry out the correction adapter type relative correction method of the present invention, a sample DUT having a characteristic that the transmission coefficient is sufficiently small and almost negligible (preferably the inter-port transmission coefficient is −20 dB or less) is required. .

  Here, it is examined how small the transfer coefficient of the sample DUT should be. When obtaining a correction adapter for each port of the measurement jig, it is desirable that the measured value of the reflection coefficient of the sample DUT at the port is not affected by other ports. At this time, if the transmission coefficient of the sample DUT is −AdB, the measurement signal incident on the port where the sample is present is attenuated by −AdB and transmitted to the other port. A part of the signal transmitted to the other port is reflected by the other port and is attenuated by -Adb and transmitted to the port again. This signal is superimposed on the reflection coefficient of the sample DUT at the port to cause an error. For example, if it is about several GHz, the reflection generated at the other port is generally about -20 dB. Therefore, if the transmission coefficient of the sample DUT is -20 dB, it will eventually be -60 dB with respect to the incident signal to the sample DUT. A signal of a degree becomes an error signal. This is 0.1% of the incident signal to the sample DUT, and the influence is often negligible at this level. Of course, it goes without saying that the numerical values given here as examples vary depending on the required correction accuracy and the like.

  Returning to the description of the correction adapter type relative correction method. This state is shown in FIGS. FIG. 10 is an overall configuration diagram when the sample DUT has two ports, and FIG. 11 is an enlarged view of one port of the two-port sample DUT. In the following description, port 1 is taken up as an arbitrary port from among a plurality of ports.

In this case, the sample DUT is regarded as a one-port device when viewed from the port (port 1 in FIGS. 10 and 11). Therefore, the error factors C1 ₀₀ , C1 ₁₀ , C1 ₁₁ , C1 ₀₁ of the relative correction adapter 31 are obtained independently for each port. Will always equal the reciprocity theorem the forward transmission coefficient C1 ₁₀ and reverse transmission coefficient C1 ₀₁ is the error factor of the relative correction adapter 31. Accordingly, the error factors of the relative correction adapter 31 that appears to be four at first glance are three coefficients C1 ₀₀ , (C1 ₁₀ = C1 ₀₁ ), C1 ₁₁ as independent variables in detail. Therefore, if the actual measurement jig measurement values S _21T and S _11T and the reference measurement jig measurement values S _21D and S _11D are obtained for the three types of sample DUT, the error factor (transfer coefficient, etc.) of the relative correction adapter 31 is obtained. ) C1 ₀₀ , (C1 ₁₀ = C1 ₀₁ ), C1 ₁₁ can be identified.

Error correction adapter 31 using measured measurement jig measurement values S _21T and S _11T and reference measurement jig measurement values S _21D and S _11D measured for three sample DUTs (correction data acquisition sample 11B) at port 1 The formula for calculating the error factor is the following formula (1). In the formula (1), the numbers ₁ , ₂ , and ₃ attached to the end of the subscripts of the actual measurement jig measurement values S _21T and S _11T and the reference measurement jig measurement values S _21D and S _11D are characteristic. The sample numbers of three measured samples DUT (correction data acquisition sample 11B) are shown.

Here, it is impossible to directly determine the code (± Sqrt...) Included in C1 ₀₁ (= C1 ₁₀ ). This means that if the electrical length of the jig is physically long (or short) by half a wavelength, the phase is rotated by 2π in a reciprocal manner, so even if only the reflected wave is observed, it cannot be distinguished from the original electrical length. This is because there is. However, this code may be important for the transfer coefficient, and the correct code must be determined.

  In the low frequency of about several GHz to which the present invention is mainly applied, the wavelength is generally longer than the electrical length of the jigs 5A and 5B, and when the jigs 5A and 5B are longer than the electrical length of the wavelength, the positive sign is reversed. In such a case, a negative sign may be added. In such a case, there is no particular problem, and the correction adapter type relative correction method of the present invention can be implemented.

The error factor of the relative correction adapter 31 on the port 2 side is also identified in the same manner as the port 1 side described above. Further, by substituting the error factors of the ports 1 and 2 identified in this way into the following equation (2), the measured values S _21T and S _11T of the measured measurement jig S _21D and S _11D can be estimated.

Next, a correction method for estimating the reference measurement jig measurement values S _21D and S _11D from the actual measurement jig measurement values S _21T and S _11T when the number of ports is three or more will be described. As described above, the correction adapter type relative correction method is calculated as a linear simultaneous equation in which the actual measurement jig measurement values S _21T and S _11T are known constants and the reference jig measurement values S _21D and S _11D are unknown variables. Come back. The element of the linear simultaneous equations is the number of ports × 3. By solving this equation, the correction adapter type relative correction method of the present invention is realized.

  The linear simultaneous equations are easily generated automatically by a computer algorithm. Further, by solving the simultaneous equations by a general method such as the LU decomposition method (which is a so-called direct method for solving linear simultaneous equations), the present invention corresponding to a measurement system having an arbitrary number of ports. The correction adapter type relative correction method is realized.

  Although this method can be applied regardless of the number of ports of the measurement system, the calculation time becomes long. If the speed of processing is to be improved, a linear simultaneous equation is solved algebraically in advance, and correction calculation is performed using this equation. However, in this case, versatility that can support a measurement system with an arbitrary number of ports is lost.

Solving the linear simultaneous equations with the actual measurement jig measurement values S _21T and S _11T as unknown variables and the reference measurement jig measurement values S _21D and S _11D as known constants is equivalent to the calculation method in the SOLT correction method. . As a result, the correction adapter type relative correction method of the present invention makes it possible to perform SOLT correction in a measurement system having an arbitrary number of ports. Hereinafter, a correction adapter type relative correction method for three or more ports will be described.

In the correction adapter type relative correction method of the present invention, the reference measurement jig measurement values S _21D and S _11D are obtained as follows. The reference measurement jig measurement values S _21D and S _11D are obtained when a kind of two-port network called the relative correction adapter 31 is connected to each port in the measurement model represented as the actual measurement jig measurement values S _21T and S _11T . It is obtained as a scattering coefficient. Therefore, the correction adapter type relative correction method of the present invention is defined as a method for obtaining the scattering coefficient in a state where the relative correction adapter 31 is attached to the measurement model represented by the actual measurement jig measurement values S _21T and S _11T .

Hereinafter, a procedure for actually calculating the reference measurement jig measurement values E _{D1 and} E _D2 from the actual measurement jig measurement values S _21T and S _11T will be described on the assumption that the relative correction adapter 31 has already been obtained. For convenience of explanation, a two-port measurement system model is used for explanation, but it goes without saying that a measurement system having an arbitrary number of ports can be mechanically expanded.

FIG. 12 shows a forward signal flow diagram in a state in which the relative correction adapter 31 is attached to each port of the measurement model represented by the reference measurement jig measurement values S _21D and S _11D . FIG. 12 is a measurement model that defines the measurement model of FIG. 9 in more detail.

In FIG. 12, E _T1 and E _T2 are a two-port network indicating error factors of each port of the actual measurement jig 5B. The scattering coefficient that causes an error in the two-port networks E _T1 and E _T2 is not obtained by measurement. ^{_{C 1 11, C 1 12,}} C 1 21, C 1 22 are coefficients becoming the error factors of the relative correction adapter 31 at the port 1 side. Factor ^{_{C 1 11, C 1 12,}} C 1 21, C 1 22 are obtained by calculation. ^{_{N 1 1, N 1 2,}} N 1 3, N 1 4 is the value of each node in the relative correction adapter 31 at the port 1 side. C ² ₁₁ , C ² ₁₂ , C ² ₂₁ , and C ² ₂₂ are coefficients that cause an error in the relative correction adapter 31 on the port 2 side. The coefficients C ² ₁₁ , C ² ₁₂ , C ² ₂₁ , and C ² ₂₂ are obtained by calculation. N ² ₁ , N ² ₂ , N ² ₃ , and N ² ₄ are values of each node of the relative correction adapter 31 on the port 2 side. S _11DUT and S _21DUT are scattering coefficients of the sample DUT. The scattering coefficients S _11DUT and S _21DUT cannot be obtained by measurement. S _11T and S _21T are actual measurement jig measurement values. The actual measurement jig measurement values S _11T and S _21T are values measured by the measuring apparatus. S _11D and S _21D are reference jig measurement values estimated by the correction adapter type relative correction method.

  In the signal flow diagram of FIG. 12, the value of each node is the sum of signal inputs from adjacent nodes. This input is given as the product of the value of the adjacent node and the signal transmission path coefficient.

Node N ¹ ₃ in the figure signal is input from node N ¹ ₁ and node N ¹ ₄ Tokyo. The signal is C ¹ _11, C ¹ _12-fold, respectively while propagating from the nodes N ^{₁ 1,} N ¹ ₄ to node N ¹ _3. Therefore, the following equation (3) holds at the node N ¹ _3.
N ¹ ₃ = C ¹ ₁₁ N ¹ ₁ + C ¹ ₁₂ N ¹ ₄ (3)
The above relationships are also established at each node. By arranging such a relationship, the following equation group (4) is obtained. Since the equation group (4) can be obtained mechanically for each port, it is easy to calculate this relational expression for an arbitrary n port when performing computer processing. The expression on the left corresponds to port 1 and the expression on the right corresponds to port 2. Both are the same except for the port number, and can be automatically generated by a computer algorithm even if the number of ports increases.

N ¹ ₂ = C ¹ ₂₁ N ¹ ₁ + C ¹ ₂₂ N ¹ ₄ N ² ₂ = C ² ₂₁ N ² ₁ + C ² ₂₂ N ² ₄
N ¹ ₃ = C ¹ ₁₁ N ¹ ₁ + C ¹ ₁₂ N ¹ ₄ N ² ₃ = C ² ₁₁ N ² ₁ + C ² ₁₂ N ² ₄
N ¹ ₄ = S _11T N ¹ ₂ + S _12T N ² ₂ N ² ₄ = S _22T N ² ₂ + S _21T N ¹ ₂
... (4)
The known quantities that are constant conditions are described below. In the case of forward measurement, the signal source output on the port 1 side is regarded as 1. Further, the signal input on the port 2 side is regarded as 0. As a result, the following condition (5) is obtained.

Further, the following expression (6) is established between the unknown (reference measurement jig measurement values S _21D and S _11D ) to be obtained and each node.

Equations (4) to (6) are linear simultaneous equations. In this linear simultaneous equation, the number of unknowns matches the number of equations. Therefore, by solving these linear simultaneous equations, the reference measurement jig measurement values S _11D and S _{21D which} are unknown numbers are obtained. Any method can be used to solve the linear simultaneous equations by the computer. However, since the number of the equations is not large, it can be solved relatively easily by a direct method such as the LU decomposition method.

The above is the calculation method of the reference measurement jig measurement values S _11D and S _21D at the time of forward measurement. The reference measurement jig measured values S _11D and S _21D at the time of reverse direction measurement are replaced with the formulas (7) and (8), respectively, instead of the formulas (5) and (6) which are the calculation formulas for the constant condition and the unknown. And (4) is used as it is.

  The case of two ports has been described above as an example. However, it is easy to solve the simultaneous equations by automatically generating them by a computer algorithm in the case of arbitrary n ports. The correction adapter type relative correction method can be implemented for the measurement system.

In the above description, the method for obtaining the reference measurement jig measurement values S _21D and S _11D as the scattering coefficient when the relative correction adapter 31 is attached to the measurement model represented by the actual measurement jig measurement values S _21T and S _11T. explained. Mathematically speaking, the actual measurement jig measurement values S _21T and S _11T are regarded as known constants, and the reference measurement jig measurement values S _21D and S _11D are regarded as unknown variables. ) Is solved.

In contrast, the reference measurement jig measurement values S _21D and S _11D are regarded as known constants, and the actual measurement jig measurement values S _21T and S _11T are regarded as unknown variables. It is also possible to solve equation (4). In this case, the actual measurement jig measurement values S _21T and S _11T are replaced with the true value of the sample DUT, and the reference measurement jig measurement values S _21D and S _11D are replaced with the observation values of the measurement apparatus. From this, the true value of the sample DUT can be obtained. This is exactly the same processing as the SOLT correction. In this case, the relative correction adapter 31 corresponds to an error model for SOLT correction.

In accordance with the above solution, the SOLT is solved by solving simultaneous equations expressed by an equation obtained by applying the following equation (9) to the equation (4) and an equation obtained by applying the following equation (10) to the equation (4). Correction is performed. By performing the SOLT correction, the unknown S _11T , S _21T , S _12T, and S _22T are specified.

Although not shown, S _12T and S _22T indicate actual measurement jig measurement values of the reverse direction transmission coefficient and reflection coefficient, respectively. These correspond to S _21T and S _22T of the forward measurement.

  As described above, these simultaneous equations can be easily generated and solved by a computer algorithm in a measurement system in which the number of ports is arbitrarily set. Thereby, it is possible to execute the SOLT correction at an arbitrary n port.

  In addition, what is necessary is just to perform the method of calculating | requiring the error factor (scattering coefficient etc.) of SOLT correction as follows. Three types of sample DUTs having different characteristics are prepared, and the measured values of the three types of sample DUTs at the respective ports are set to known amounts. As a result, three error factors (error coefficients) of directionality, source match, and reflection tracking are obtained and one-port correction is performed. Further, two error factors (error coefficients) of load match / transmission tracking of other ports are obtained at the port where the one-port correction is completed. Thereby, the error factor (the number of scattering coefficients) of the SOLT correction is obtained.

  Such a correction adapter type relative correction method is effective when it is necessary to correct a measurement system of 5 ports or more. In particular, in balanced measurement, the number of ports when converted to unbalanced ports may be very large, which is useful.

Next, the correction adapter type relative correction method of the present invention will be described with reference to the actually measured results. The main measurement conditions are as follows.
Electronic component to be measured 11A (sample DUT): unbalanced input-parallel output SAW filter (fn = 1842.5 MHz) (SAFSD1G84CB0T00), and these electronic components are good (3) and defective (2). Prepared as a measurement target electronic component 11A.
Correction data acquisition sample 11B: Three types of electronic components that are set to be substantially open / substantially short / substantially set by performing a process such as soldering a chip component directly to the SMA connector are used as the correction data acquisition sample 11B. Prepared.
Reference measurement jig 5A: A KMM jig on which the measurement target electronic component 11A (sample DUT) can be mounted is prepared as the reference measurement jig 5A.
Measured measurement jig 5B: As a cause of error on the calibration surface of the jig, a 50 cm coaxial cable was attached to port 1, a 30 mm adapter was attached to port 2, and a -3 dB attenuator was attached to port 3. A thing is prepared as the actual measurement jig 5B.
A measuring instrument that constitutes the reference measuring apparatus 1 and the actual measuring apparatus 2: R3860 (up to 8 GHz 4-port network analyzer) manufactured by ADVANTEST is prepared as a measuring instrument. The measuring instrument to which the reference measuring jig 5A is connected becomes the reference measuring apparatus 1, and the measuring instrument to which the actual measuring jig 5B is connected becomes the actual measuring apparatus 2.
Frequency range: 1650MHz to 2050MHz
Number of data: 401 points IF bandwidth, etc .: 1000 Hz (no averaging processing)
Measuring method:
1. Three types of the correction data acquisition samples 11B are mounted on the reference measurement jig 5A. The reference measurement jig 5A mounted on the sample 11B is connected to the measurement apparatus and its characteristics are measured. In this case, the measuring device is regarded as the reference measuring device 1. The measured characteristics are regarded as the reference measurement jig measurement values S _21D and S _{11D of the} correction data acquisition sample 11B.
2. Similarly, the three types of correction data acquisition samples 11B are mounted on the actual measurement measuring jig 5B. The actual measurement jig 5B mounted on the sample 11B is connected to the measuring device and its characteristics are measured. In this case, the measuring device is regarded as the actual measuring device 2. The measured characteristics are regarded as the actual measurement jig measurement values S _21T and S _{11T of the} correction data acquisition sample 11B.
3. By substituting the reference measurement jig measurement values S _21D and S _11D and the actual measurement jig measurement values S _21T and S _11T, which are measurement results of the correction data acquisition sample 11B, into the above-described equation (1), An error factor of the relative correction adapter 31 is calculated.
4). The measurement target electronic component 11A is mounted on the reference measurement jig 5A. The reference measuring jig 5A mounted on the component 11A is connected to the measuring device and its characteristics are measured. In this case, the measuring device is regarded as the reference measuring device 1. The measured characteristics are regarded as the reference measurement jig measurement values S _21D and S _{11D of the} electronic component 11A to be measured.
5). Similarly, the measurement target electronic component 11A is mounted on the actual measurement jig 5B. The actual measurement jig 5B mounted on the component 11A is connected to the measuring device and its characteristics are measured. In this case, the measuring device is regarded as the actual measuring device 2. The measured characteristics are regarded as the actual measurement jig measurement values S _21T and S _{11T of the} electronic component 11A to be measured.
6). The actual measurement jig measurement values S _21T and S _11T of the measurement target electronic component 11A are substituted into the above-described equation (2), whereby the reference measurement jig measurement values S _21D and S _11D of the measurement target electronic component 11A are obtained. Presumed.

13 and 14 show the correction result of the transmission coefficient (Sds21) of the measurement target electronic component (non-defective product) 11A. FIG. 13 shows an overall image of 1650 MHz to 2050 MHz, and FIG. 14 is an enlarged view of a main part of FIG. In these drawings, Definition indicates reference measurement jig measurement values S _21D and S _11D , Test indicates actual measurement jig measurement values S _21T and S _11T , and Corrected indicates a relative correction result. In these figures, the test is corrected to be corrected by relative correction, and it is sufficient that this matches the definition.

As is clear from a detailed examination of these figures, the actual measurement jig measurement values S _21T and S _11T are greatly different from the reference measurement jig measurement values S _21D and S _11D due to the difference in jig error. It has become. However, the result of correcting the actual measurement jig measurement values S _21T and S _11T by the relative adapter type relative correction method of the present invention almost exactly matches the reference measurement jig measurement values S _21D and S _11D . That is, it can be seen that the correction is performed accurately by executing the correction adapter type relative correction method of the present invention.

  15 and 16 show the correction result of the transmission coefficient (Sds21) of the measurement target electronic component (defective product) 11A. FIG. 15 shows an overview of 1650 MHz to 2050 MHz, and FIG. 16 is an enlarged view of the main part of FIG. The correction adapter type relative correction method of the present invention can perform correction regardless of the sample characteristics as long as the linearity of the sample characteristics is maintained. Therefore, highly accurate correction is also performed on the measurement target electronic component (defective product) 11A. In these drawings, Definition, Test, and Corrected are the same as those described in FIGS. 13 and 14.

  FIG. 17 shows a correction result of one unbalanced transmission coefficient (Sss31) in the vicinity of the pass band of the measurement target electronic component (non-defective product) 11A. The correction result is shown in polar coordinate display. Two balanced signals are input to the balanced port. Therefore, normal balance port correction cannot be expected only by correcting the amplitude correctly. It is necessary that both the amplitude and the phase are corrected correctly.

On the other hand, FIG. 17 shows that the actual measurement jig measurement values S _21T and S _11T have a larger amplitude than the reference measurement jig measurement values S _21D and S _11D because an attenuator is inserted into the port 3. It is attenuated (should have been attenuated by 3 dB), and the phase is rotated by its electrical length. On the other hand, the correction result is normally reproduced in both amplitude and phase.

  FIG. 18 shows a correction result of the reflection coefficient (Sss33) in the vicinity of the passband of the electronic component to be measured (non-defective product) 11A. As for the reflection coefficient, if the correction adapter type relative correction method of the present invention is performed, a good correction result can be obtained.

  Next, the correction data acquisition sample 11B used in the correction adapter type relative correction method of the present invention will be described.

  In order to carry out the correction adapter type relative correction method of the present invention, a correction data acquisition sample 11B having the characteristic that the transfer coefficient between ports is as close as possible to 0 (preferably, the transfer coefficient between ports is -20 dB or less) is necessary. It becomes. In order to configure such a correction data acquisition sample 11B, it is necessary to make the insulation between ports of the correction data acquisition sample 11B as high as possible. In order to increase the insulation between the ports, it is conceivable to provide a shield between the ports, but the configuration becomes complicated and the cost increases.

  Here, when the correction data acquisition sample 11B is configured from an element having strong electrostatic coupling or dielectric coupling, a transmission mode in which a large amount of leakage occurs between ports is determined by the shape of the sample 11B. Therefore, for example, when the correction data acquisition sample 11B is configured from an element having strong inductive coupling, the following characteristics are obtained. That is, when both ports are short-circuited, the insulation between the two ports becomes very low. If one port is short-circuited and the other port is open, the open-side port is not magnetically coupled, so that the insulation characteristics between the two ports are kept high. Accordingly, as shown in FIGS. 19A and 19B, one of the three required correction data acquisition samples 11B has a (open / short) configuration and the other has a (short / open) configuration. do it. Then, the combination of (open / short circuit + short circuit / open circuit) can be used in the same manner as the conventional combination (open / open + short circuit / short circuit). Thereby, the correction adapter type relative correction method of the present invention can be implemented without affecting the correction procedure.

  The same applies when the end (50Ω) is used as the correction data acquisition sample 11B. In this case, the insulation may be deteriorated when the (termination / termination) configuration is adopted. On the other hand, if the configuration is (terminated / open), the insulation characteristics between both ports can be kept high. Accordingly, as shown in FIGS. 19 (c) and 19 (d), one of the three required correction data acquisition samples 11B has a (open / terminated) configuration and the other has a (terminated / opened) configuration. do it. By doing so, it is possible to use the combination of (open / termination + termination / opening) as in the conventional combination of (open / open + termination / termination). As a result, the correction adapter type relative correction method can be implemented without affecting the correction procedure. However, in this case, the required number of correction data acquisition samples 11B increases by one to four. Since the measurement has already been completed for the other correction data acquisition sample 11B, the data is discarded. The same applies when a reflection end (for example, 100Ω or 10Ω) other than the termination is used.

  When the correction data acquisition sample 11B is configured from an electronic component (such as an LTCC device) having a multilayer structure, it is difficult to manufacture a terminal end (50Ω) or the like even though the open / short circuit can be easily manufactured.

  In that case, a delay line can be used instead of the resistance element necessary for forming the termination. In this case, the end of the delay line may be an open end or a short-circuit end. However, in this case, it is desirable to design so that the phases of the reflected waves of the correction data acquisition sample 11B are substantially evenly shifted from each other by the inserted delay line. By doing so, the characteristics of the correction data acquisition sample 11B are separated from each other, and as a result, the influence of the measurement error is further reduced. Specifically, it is preferable to provide a delay line having a 90 ° phase and a 270 ° phase when necessary together with an open circuit and a short circuit. This is because the open circuit has a phase of 0 ° and the short circuit has a phase of 180 °. When three types of delay lines are required, it is optimal to provide a 0 ° (= open) phase delay line, a 120 ° phase delay line, and a 240 ° phase delay line.

  Only the conductor pattern can be formed in the delay line. Therefore, the correction data acquisition sample 11B having a delay line can be easily realized as an LTCC device (a device using low-temperature fired ceramics). On the other hand, it is difficult to realize the correction data acquisition sample 11B that requires a resistor, such as the termination (50Ω), with the LTCC device, or it can be realized at a very high cost.

  When a delay line is provided at each port of the correction data acquisition sample 11B having two or more ports, the insulation property may be lowered. In this case, it is possible to prevent a decrease in insulation by configuring one port as a delay line and then opening the other ports or short-circuiting.

  When the correction data acquisition sample 11B is configured as described above, the correction coefficient acquisition sample 11B having high isolation between ports can be acquired as a result of a very small transfer coefficient between ports. Therefore, the correction accuracy of the correction adapter type relative correction method of the present invention is increased.

  Further, at the open end, current does not flow at all, but voltage fluctuation occurs. Therefore, an electric field wave is generated from the open end toward the short-circuit end. However, a current can flow at the short-circuited end (receives a magnetic field wave), but the voltage cannot change (does not receive an electric field wave). Therefore, after all, there is no coupling between the ports, and high isolation is obtained. The same effect can be obtained with the reverse configuration.

  The term “end” is usually 50Ω, and both the electric field wave and the magnetic field wave are transmitted to the other end. In this case, if the influence of the electric field wave is large due to the structure of the correction data acquisition sample 11B, the other end may be a short-circuited end, and if the influence of the magnetic field wave is large, the other end may be an open end. Then, the transfer coefficient between ports can be minimized. The same applies to the case where a terminal other than 50Ω is configured.

  However, for example, when the correction data acquisition sample 11B having a configuration of termination / opening is manufactured, when another correction data acquisition sample 11B having a configuration of short-circuiting / opening is manufactured, considering the port 2 side, Two correction data acquisition samples 11B having the characteristics of opening are arranged. With this, the relative correction cannot be normally performed. In that case, a correction data acquisition sample 11B having a configuration of opening / termination may be separately prepared. If it does so, duplication of data can be prevented with the measurement data of the port 2 by this correction data acquisition sample 11B. The same applies to the case of three or more ports.

  The above is the basic configuration of the correction method of the present embodiment. Next, the characteristic part of the correction method of this embodiment will be described.

  In a measuring apparatus such as a network analyzer that is widely used, the relative correction adapter 31 cannot be calculated by itself. However, even such a measuring apparatus has a calibration function (SOLT correction function) on the calibration surface. The correction adapter type relative correction method of the present embodiment is used when the correction coefficient (error coefficient (error factor)) used in the calibration function (SOLT correction function) of the actual measurement measuring device 2 is calculated externally. This can be implemented by performing the calculation in a state where the correction coefficient element by the correction method is taken into consideration. The present invention has the greatest feature in carrying out the correction adapter type relative correction method in this way. The method will be described below.

First, the relationship between the error model (SOLT correction error model) on the calibration surface (coaxial connection surface) of the actual measurement device 2 and the actual measurement jig measurement values S _21T and S _11T will be described with reference to FIG. In FIG. 20, DUT is a sample. E _T1 and E _T2 represent errors of the actual measurement jig 5B. The characteristic true values S _21DUT and S _{11DUT of the} sample DUT and the errors E _T1 and E _T2 are unidentifiable quantities. The actual measurement jig measurement values S _21T and S _11T , which are values measured in a state where the sample DUT is mounted on the actual measurement jig 5B, are quantities obtained by measurement. E _NA1 and E _NA2 are inherent errors of the actual measurement device 2 and include errors of the actual measurement device 2 itself and errors of the cable.

Here, the amount actually observed by the actual measurement device 2 is indicated by S _11M , S _{21M, and the} like. The actual measurement measuring apparatus 2 is subjected to calibration (SOLT correction) to mathematically remove the measurement system errors E _NA1 and E _NA2 from the observed values S _11M and S _21M , thereby measuring the actual measured jig measurement values S _11T , S _21T etc. are output.

As described above with reference to FIG. 9 and the like, the correction adapter type relative correction method is performed by attaching the relative correction adapter 31 to the model represented by the actual measurement jig measurement values S _21T and S _11T , and thereby the reference measurement jig. This is a correction method for outputting measured values S _21D and S _11D , and is a method for estimating reference jig measured values S _11D and S _21D from measured measurement jig measured values S _11T and S _21T .

Here, it is assumed that the relative correction adapter 31 is mounted on another correction adapter. Another correction adapter is an adapter having a characteristic of neutralizing the error of the relative correction adapter 31, and this adapter is hereinafter referred to as a neutralization adapter 32. A state in which the relative correction adapter 31 is mounted on the neutralization adapter 32 is shown in FIG. In FIG. 21, C1 ⁻¹ is an error of the neutralizing adapter 32 that neutralizes (cancels) the error C1 of the relative correction adapter 31. C2 ⁻¹ is an error of the neutralization adapter 32 that neutralizes (cancels) the error C2 of the relative correction adapter 31. Thus, the neutralization adapter 32 is an adapter that neutralizes the influence of the relative correction adapter 31 when the relative correction adapter 31 is connected so that the relative correction adapter 31 does not exist. For example, when an adapter having a loss is set as the relative correction adapter 31, the neutralizing adapter 32 corresponds to an adapter having an amplification action.

More precisely, the neutralization adapter 32 converts the relative correction adapter 31 which is a scattering matrix (S parameter) into a transmission matrix (T parameter), obtains an inverse matrix thereof, and further transmits this transmission matrix (T parameter). Is converted into a scattering matrix (S parameter). When the neutralization adapter 32 is provided, the state is as if there is no relative correction adapter 31. This state can be regarded as a state in which the actual measurement jig measurement values S _21T and S _11T can be observed from the outside of the apparatus. Therefore, the state in which the neutralizing adapter 32 is provided and the state in which the sample DUT is simply mounted on the actual measurement jig 5B can be regarded as substantially the same. Therefore, as shown in FIG. 22, a state in which the neutralization adapter 32 is provided and connected to the actual measurement device 2 and a state in which the sample DUT is mounted on the actual measurement jig 5B and connected to the actual measurement device 2 Can be considered to be in exactly the same state.

Next, as shown in FIG. 23, the errors E _NA1 and E _NA2 of the measurement system are corrected by the errors C1 ⁻¹ and C2 ^{−1 of the} neutralization adapter 32. That is, new measurement system errors F _NA1 and F _{NA2 obtained} by synthesizing the errors E _NA1 and E _NA2 and the errors C1 ⁻¹ and C2 ^{−1 of the} neutralization adapter 32 are assumed. Specifically, the new measurement system errors F _NA1 and F _NA2 are obtained by converting the measurement system errors E _NA1 and E _NA2 and neutralization adapters C1 ^-1 and C2 ^-1 into transmission coefficients, respectively. This is obtained by returning it to the scattering coefficient.

It is assumed that the assumed new measurement system errors F _NA1 and F _NA2 are written as error coefficients of the actual measurement measuring device 2. Then, the actual measurement device (network analyzer) 2 removes the influence of the error coefficients F _NA1 and F _NA2 from the observed values S _11M and S _21M obtained by the measurement, that is, the reference measurement jig measurement value S _11D , _S21D is output as the measurement result. Therefore, the actual measurement apparatus 2 measures the characteristics of the sample DUT with the actual measurement jig 5B, but not the actual measurement jig measurement values S _11T and S _21T but the reference measurement jig measurement values S _11D , S _21D is output as a measured value. As described above, assuming the neutralization adapter 32, the correction adapter type relative correction method of the present invention can be implemented by the actual measurement measuring device 2 alone.

This method requires an external computer or the like for calculating correction data (measurement system errors F _NA1 , F _NA2 ) for rewriting the error coefficient (error factor) of the calibration surface (coaxial connection surface) of the actual measurement measuring device 2. To do. However, once the error coefficient of the actual measurement measuring device 2 is rewritten, the correction adapter type relative correction method can be carried out without requiring processing such as fetching data into an external computer. Further, since the actual measurement device 2 only performs normal calibration (SOLT correction) calculation, no extra calculation time is required.

  Next, in the actual measurement device 2, a function of correcting (summing up) error factors set by calibration (full 2-port correction, etc.) of the calibration surface (coaxial connection surface) based on the error factors of the relative correction adapter 31. A configuration (software) that embodies the above will be described with reference to the flowchart of FIG.

  The configuration (software) described below reads an error coefficient (error factor) from the actual measurement device 2 that performs full 2-port correction, and combines with the relative correction adapter 31 to obtain a new error coefficient. It is software that exhibits the function of writing back to the actual measurement measuring device 2.

First, the reference measurement jig measurement values S _21D and S _11D and the actual measurement jig measurement values S _21T and S _{11T of} the correction data acquisition sample 11B are measured, and the relative correction adapter 31 is calculated using the measurement data. . The calculation of the relative correction adapter 31 is performed by software different from this software (software that calculates a new error coefficient and writes it back to the actual measurement device 2). The calculated relative correction adapter 31 is recorded on a recording medium (not shown) readable by the actual measurement measuring device 2.

  Next, the recording medium is loaded into the reading device (not shown) of the actual measurement device 2 and read, whereby the data (error coefficient) of the relative correction adapter 31 is input to the actual measurement device 2 (S2401). The input data of the relative correction adapter 31 is written in the memory 23. Write control to the memory 23 is performed by the control unit main body 22.

  The relative correction coefficient of the relative correction adapter 31 written in the memory 23 has an S parameter data format. The relative correction coefficient (S parameter) of the relative correction adapter 31 is first converted into a T parameter (S2402). The conversion is performed by the error factor identification means 24 or the like.

  The conversion is performed by the correction calculation means 25, for example. Conversion to the T parameter is performed in order to facilitate matrix calculation performed after this processing. The conversion is performed based on, for example, the following equation (11).

S ₁₁ , S ₁₂ , S ₂₁ , S ₂₂ : Relative correction coefficient (S parameter)
T ₁₁ , T ₁₂ , T ₂₁ , T ₂₂ : Relative correction coefficient (T parameter)
Next, the relative correction coefficient (T parameter) of the neutralization adapter 32 is generated by converting the converted relative correction coefficient (T parameter) of the relative correction adapter 31 into an inverse matrix. Inverse matrix transformation is performed by the error factor identification means 24 or the like. Inverse matrix transformation is performed based on the following equation (12), for example.

T ₁₁ , T ₁₂ , T ₂₁ , T ₂₂ : Relative correction coefficient (T parameter)
X ₁₁ , X ₁₂ , X ₂₁ , X ₂₂ : Relative correction coefficient after inverse transformation (T parameter)
On the other hand, in the actual measurement measuring device 2, calibration (full 2-port correction) on the calibration surface (coaxial connection surface) is performed by SOLT correction or the like. Thereby, the error coefficients (error factors) of the errors E _NA1 and E _NA2 of the actual measurement device 2 are set, and the set error coefficients are recorded in the memory 23 of the actual measurement device 2 (S2404). The error coefficient is set by the error factor identification means 24 or the like. Recording control of the memory 23 is performed by the control unit main body 22. The error coefficient written in the memory 23 has an S parameter data form.

  Next, an error coefficient (error factor) is read from the memory 23 (S2405), and the read error coefficient is converted into a T parameter (S2406). The conversion is performed by the error factor identification means 24 or the like.

Next, the error is corrected by the error coefficient (T parameter) and the relative correction coefficient (T parameter) of the neutralization adapter 32 (specifically, both are added together), so that a new error F of the actual measurement device 2 is obtained. The error coefficient (T parameter) of _NA1 and _FNA2 is calculated. (S2407). The error coefficients (T parameters) of the new errors F _NA1 and F _NA2 are calculated for each port.

Next, the error coefficients (T parameters) of the new errors F _NA1 and F _NA2 of each synthesized port are converted into S parameters (S2408). The conversion to the S parameter is performed based on the following equation (13), for example.

Next, the error coefficients (S parameters) of the new errors F _NA1 and F _NA2 of each port are added (S2409), and the added error coefficients (S parameters) of the new errors F _NA1 and F _NA2 are actually measured. Normalized for the measuring apparatus 2 (S2410). For example, normalization when full 2-port correction is performed is performed by performing processing for adjusting sort tracking to 1. This is processing performed because the source tracking is set as the reference 1 in the error model of full 2-port correction.

Finally, the normalized error coefficients (S parameters) of the new errors F _NA1 and F _NA2 are written and stored in the memory 23 (S2411). That is, the errors E _NA1 and E _NA2 initially stored in the memory 23 are rewritten with error coefficients of new errors F _NA1 and F _NA2 .

Thereafter, calibration of the actual measurement device 2 (full 2-port correction or the like) is performed based on the error coefficients of the new errors F _NA1 and F _NA2 written in the memory 23. As a result, the actual measurement measuring apparatus 2 performs the correction adapter type relative correction simultaneously and automatically at the time of calibration. Therefore, when the electrical identification of the electronic component 11A to be measured is subsequently measured using the actual measurement jig 5B, the measurement values (actual measurement jig measurement values S _21T , S _11T ) are the reference measurement jig measurement values S _21D , Matches _S11D with high accuracy.

Second Embodiment Next, a second embodiment will be described. The configuration of the actual measurement measurement device 2 and the reference measurement device 1 in which the relative correction method of the present embodiment is implemented and the configuration of the basic correction adapter type relative correction method are the same as those of the first embodiment. Therefore, in the following description, the symbols used in the first embodiment are used as they are for the components of the apparatus.

  Among general-purpose electronic component characteristic measuring apparatuses (network analyzers and the like), there is an apparatus having a function called a so-called software fixture. This function eliminates the error factor set on the actual calibration surface from the measurement result of the measuring device, and further specifies the scattering coefficient from the measured value after eliminating the error factor. Assuming that processing such as removal of impedance, impedance conversion, or insertion of an ideal balun has been performed, the processing result is calculated and output as a measurement result. Specifically, the assumed error factor is assumed after the error factor superimposed on the measurement result of the electronic component 11A to be measured by removing the 2-port network, inserting the impedance conversion circuit, or inserting the ideal balun circuit. Is removed from the actual measurement jig measurement value of the measurement target electronic component 11A. Hereinafter, this function is referred to as a device connection assumption correction function.

  The device connection assumption correction function is used to obtain the true value of the scattering coefficient of the sample DUT by removing the error factor of the jig obtained by simulation or the like, to estimate the measurement result when measured with a different characteristic impedance system, or This function is used for estimation of the measurement result of the balanced device. Here, all the various elements connected to the sample DUT (the measurement target electronic component 11A, etc.) for the above processing are fictitious elements, and further, error factors generated by connecting these fictitious elements are also fictitious. These factors are set on the simulation.

  As described above, when the device connection assumption correction function is used, it is possible to simulate a state in which a circuit network having an arbitrary two-port scattering coefficient is connected to the sample DUT being measured. Therefore, the correction adapter type relative correction method can be implemented by a single measuring instrument by giving the scattering coefficient of the relative correction adapter 31 to the actual measurement measuring apparatus 2 having the device connection assumption correction function.

Specifically, first, the scattering coefficient matrix represented by the actual measurement jig measurement values S _11T , S _21T , S _12T , S _22T of the measurement target electronic component 11A is converted into a transmission coefficient matrix T0. Next, the scattering coefficient matrices of the errors C1 and C2 of the relative correction adapter 31 are converted into transmission coefficient matrices T1 and T2. Then, the product of T1, T0, and T2 is calculated, and this transmission coefficient matrix is converted into a scattering coefficient matrix. This scattering coefficient matrix is a measurement value assumed to be obtained when the measurement target electronic component 11A is measured by the reference measurement device. As described above, the correction adapter type relative correction method is carried out by a single measuring instrument.

  The correction method of this embodiment will be described by an experiment using an unbalanced input-balanced output SAW filter (unbalanced conversion 3-port device). The main experimental conditions are exactly the same as the experimental conditions performed in the description of the basic description of the correction adapter type relative correction method of the present invention.

FIG. 25 shows the actual measurement jig measurement values S _21T and S _11T of the measurement target electronic component 11A in a state where the device connection assumption correction function is invalidated in the actual measurement apparatus 2 having the device connection assumption correction function. FIG. 25 also shows reference measurement jig measurement values S _21D and S _{11D of the} electronic component 11A to be measured. The reference measurement jig measurement values S _21D and S _11D are output using the memory function of the actual measurement device 2. As is clear from FIG. 25, the actual measurement jig measurement values S _21T and S _11T do not coincide with the reference measurement jig measurement values S _21D and S _11D .

FIG. 26 shows the actual measurement jig measurement values S _21T and S _11T of the measurement target electronic component 11A in a state where the device connection assumption correction function is enabled in the actual measurement device 2. FIG. 26 also illustrates reference measurement jig measurement values S _21D and S _{11D of the} electronic component 11A to be measured. As is clear from FIG. 26, the actual measurement jig measurement values S _21T and S _11T almost completely match the reference measurement jig measurement values S _21D and S _11D . As described above, the difference between the reference measurement jig measurement values S _21D and S _11D and the actual measurement jig measurement values S _21T and S _11T measured when the device connection assumption correction function is invalid is almost completely lost. Thus, it can be seen that the difference between the jigs is relatively corrected by the actual measurement device 2 alone.

  From the above, the correction adapter type relative correction method of the present invention can be implemented by the actual measurement measuring device 2 alone in the unbalance-balance measurement (unbalance conversion 3-port measurement). This is not limited in the number of ports, and can be implemented in the actual measurement device 2 having any number of ports as long as the actual measurement device 2 supports.

  In the first and second embodiments described above, the measurement result measured by the actual measurement device 2 in a state where the measurement target electronic component 11A is mounted on the actual measurement jig 5B is used, and the measurement target electronic component 11A is used as the reference measurement process. The case where the present invention is carried out when correcting the measurement result measured by the reference measurement device 1 in a state where it is mounted on the tool 5A has been described. Here, the reference measurement device 1 is a device that is defined as an example of a measurement device in which the measurement result of the electrical characteristics of the same electronic component to be measured is different from the actual measurement device 2. However, in the present invention, in addition to this, the measurement result measured by the actual measurement device 2 in a state where the measurement target electronic component 11A is mounted on the actual measurement jig 5B is used, and the measurement target electronic component 11A is mounted on the reference measurement jig 5A. The present invention is similarly implemented when correcting to the measurement result measured by the actual measurement device 2.

It is a top view which shows schematic structure of the measuring apparatus which implements the correction method of the measurement error of this invention. It is a top view which shows the structure of the measurement jig | tool which comprises the measuring apparatus which implements the correction method of the measurement error of this invention. It is a block diagram which shows schematic structure of the measuring apparatus which implements the correction method of the measurement error of this invention. It is a back view which shows the structure of the correction data acquisition sample which comprises the measuring apparatus which implements the correction method of the measurement error of this invention, and a measurement object electronic component. It is a 1st correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a 2nd correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a 3rd correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a 4th correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a 5th correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a 6th correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a 7th correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is an 8th correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a 1st diagram which shows the correction result of the correction method of the measurement error of this invention. It is a principal part enlarged view of FIG. It is a 2nd diagram which shows the correction result of the correction method of the measurement error of this invention. It is a principal part enlarged view of FIG. It is a 3rd figure which shows the correction result of the correction method of the measurement error of this invention. It is a 4th line figure which shows the correction result of the correction method of the measurement error of this invention. It is a conceptual diagram which shows the structure of the correction data acquisition sample which can be used suitably with the correction method of the measurement error of this invention. It is a 9th correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a 10th correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is an 11th correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a 12th correction | amendment conceptual diagram with which it uses for description of the correction method of the measurement error of this invention. It is a flowchart which shows the flow of operation | movement of the correction method of the measurement error of this invention. It is a 5th diagram which shows the correction result of the correction method of the measurement error of this invention. It is a 6th diagram which shows the correction result of the correction method of the measurement error of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Reference measuring device 2 Actual measuring device 3A, 3B Network analyzer 4A, 4B, 4C Coaxial cable 5A Reference measuring jig 5B Actual measuring jig 6 Coaxial cable connector 7 Insulating substrate 7A Substrate surface 8A, 8B Signal transmission path 8C-8i grounding Lines 9A, 9B, 9C Coaxial connector 10 Through-hole connection portion 11A Measurement target electronic component 11B Correction data acquisition sample 11a Back surface of substrate
12a, 12b Transmission line terminals 12C to 12f Ground terminal 13 Frame body 20 Network analyzer main body 21 Control unit 22 Control unit main body 23 Memory 24 Error factor identification means 25 Correction calculation means 30 Error removal adapter 31 Relative correction adapter 32 Neutralization adapter S ₁₁ Forward reflection coefficient S ₂₁ Forward transmission coefficient S ₁₂ Reverse transmission coefficient S ₂₂ Reverse reflection coefficient S _21DUT , S _11DUT Sample true value S _21D , S _11D reference measurement jig measured value S _21T , S _11T actual measurement measurement jig measurements E _D1, E _D2 standard test fixture errors E _T1, E _T2 test fixture errors E _T1 ^-1, E _T2 ^-1 first error neutralization adapter errors C1, C2 relative correction adapter of the error S _11M, S observations _21M actual measuring system 2 is observed E _NA1, E _NA2 error F _NA1 of the measuring system, F _NA2 new measurement system error

Claims (7)

An actual measurement jig is connected to the coaxial connection surface of the measurement apparatus, and then the measurement target electronic component is mounted on the actual measurement jig and measured with the measurement apparatus in this state. Other measurement that can be regarded as having the same measurement characteristics as the measurement apparatus or the measurement apparatus in a state where the measurement result of the electrical characteristics of the same electronic component to be measured is different from that of the actual measurement measurement jig. A measurement error correction method for correcting an electrical characteristic estimated to be obtained when measuring the measurement target electronic component with an apparatus,
Identifying an error factor in the coaxial connection surface;
When measuring the measurement target electronic component with the measurement device or the other measurement device in a state where the measurement target electronic component measurement value of the measurement target electronic component and the measurement target electronic component are mounted on the reference measurement jig Calculating a relative relationship between the electrical characteristics estimated to be obtained in
Identifying the error factor as a new error factor of the measurement device by correcting the error factor based on the relative relationship;
Connecting the actual measurement jig to the coaxial connection surface, mounting the measurement target electronic component on the actual measurement jig, and measuring the electrical characteristics of the measurement target electronic component in this state with the measurement device;
Removing the new error factor from the electrical characteristics of the electronic component to be measured obtained by measurement,
A measurement error correction method characterized by comprising: An actual measurement jig is connected to the coaxial connection surface of the measurement apparatus , and then the measurement target electronic component is mounted on the actual measurement jig and measured with the measurement apparatus in this state. Other measurement that can be regarded as having the same measurement characteristics as the measurement apparatus or the measurement apparatus in a state where the measurement result of the electrical characteristics of the same electronic component to be measured is different from that of the actual measurement measurement jig. A measurement error correction method for correcting an electrical characteristic estimated to be obtained when measuring the measurement target electronic component with an apparatus,
Identifying an error factor in the coaxial connection surface;
When measuring the measurement target electronic component with the measurement device or the other measurement device in a state where the measurement target electronic component measurement value of the measurement target electronic component and the measurement target electronic component are mounted on the reference measurement jig Calculating a relative relationship between the electrical characteristics estimated to be obtained in
Connecting the actual measurement jig to the measurement device, mounting the measurement target electronic component on the actual measurement jig, and measuring the electrical characteristics of the measurement target electronic component with the measurement device in this state;
Obtaining the electrical characteristics of the measurement target electronic component connected to the actual measurement measurement jig by removing the error factor from the electrical characteristics of the measurement target electronic component obtained by measurement; and
Correcting the electrical characteristics of the measurement target electronic component connected to the actual measurement jig obtained by removing the error factor based on the relative relationship;
A measurement error correction method characterized by comprising: The method of correcting a measurement error according to claim 1 or 2,
The step of calculating the relative relationship includes:
A procedure for preparing at least three correction data acquisition samples having different electrical characteristics and having a very small transfer coefficient between the ports;
A procedure for acquiring a reference measurement jig measurement value of the correction data acquisition sample by measuring the electrical characteristics of the correction data acquisition sample with the measurement apparatus or the other measurement apparatus in a reference measurement jig mounting state;
A procedure for acquiring an actual measurement measurement jig measurement value of the correction data acquisition sample by measuring the electrical characteristics of the correction data acquisition sample with the measurement device or the other measurement device in an actual measurement measurement jig mounting state;
An electrical property generated by the actual measurement jig in the measurement target electronic component mounting state is formed of a two-port network connected to each port located on the measurement device side of the actual measurement measurement jig. Assuming a relative correction adapter having a characteristic to be changed to an electrical characteristic generated by the reference measurement jig, an error factor of the assumed relative correction adapter is calculated based on the measured value of the reference measurement jig of the correction data acquisition sample. And a procedure for identifying from the actual measurement jig measurement value,
Including
The error factor of the relative correction adapter is the relative relationship,
A measurement error correction method characterized by the above. The measurement error correction method according to claim 3,
As the correction data acquisition sample, a sample having a port-to-port transmission coefficient of −20 dB or less is used.
A measurement error correction method characterized by the above. The method for correcting a measurement error according to claim 3 or 4,
As the correction data acquisition sample, a sample having a different reflection coefficient between the samples is used.
A measurement error correction method characterized by the above. The measurement error correction method according to any one of claims 3 to 5,
A procedure for identifying an error factor of the relative correction adapter,
Based on the following equation (1),

C1 ₀₀ , C1 ₀₁ , C1 ₁₀ , C1 ₁₁ : Error factor of the relative correction adapter S _11D1 , S _11D2 , S _11D3 : Reference data measurement value of the reference measurement jig for the correction data acquisition S _11T1 , S _11T2 , S _11T3 : Acquisition of correction data Measurement error correction method characterized by the following: The measurement error correction method according to claim 6,
The reference measurement jig measurement value calculation step of the measurement target electronic component,
Based on the following equation (2),

A measurement error correction method characterized by the above.

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