JP4334463B2 - Semiconductor integrated circuit test apparatus and method - Google Patents

Description

  The present invention relates to a semiconductor integrated circuit test apparatus and method for constructing a test circuit for a semiconductor integrated circuit under test in a test apparatus and verifying the operation of the semiconductor integrated circuit under test with the test circuit.

When verifying the operation of a semiconductor integrated circuit such as a semiconductor memory or a logic integrated circuit, a programmable device such as an FPGA (Field Programmable Gate Array) capable of rewriting arbitrary logic by a user is mounted on a circuit board. In addition, a technique for constructing a test circuit capable of executing a desired test item described in HDL (Hardware Description Language) or C language has been proposed. (See Patent Documents 1 and 2).
International Publication No. 98/57281 Pamphlet JP 2002-123562 A

  In the techniques described in Patent Documents 1 and 2, for example, there is no technical consideration when transmitting a test program stored in a host computer and executing a test to a test target to a programmable device. The test program is transmitted to the programmable device for each test item of the semiconductor integrated circuit. However, since the test of the semiconductor integrated circuit actually requires about 100 items, a test program that requires a data capacity of several megabytes or more is transmitted to the programmable device for each test item to construct a test circuit. Is not practical. In addition, when a test program is transmitted from an external device such as a host computer for each test item, it may take an enormous amount of time depending on the communication speed with the host computer, which is not realistic.

  The present invention has been made in view of the above problems, and prior to testing a semiconductor integrated circuit to be tested, a test program is transmitted from a host computer in which a test program is stored to a test apparatus having a programmable device. The data is sent and stored in the memory. At that time, the test program includes test circuit construction data (several megabytes) for constructing the test circuit and test condition setting data (several hundred kilobytes) for each test item. The test circuit is constructed so that at least a plurality of test items can be performed on the programmable device from the memory, and then the test is performed from the memory on the programmable device. Test condition data is transmitted for each item. Accordingly, an object of the present invention is to provide a practical and highly versatile semiconductor integrated circuit test apparatus and method.

  To achieve the above object, the invention described in claim 1 is a memory storing a test program of a semiconductor integrated circuit under test transmitted from a host computer, reading the test program from the memory, and A programmable device for constructing a test circuit for verifying the operation of the semiconductor integrated circuit, a PC interface that mediates input / output of signals to / from the host computer, and signals from a plurality of input / output terminals of the semiconductor integrated circuit under test A pin electronics driver that mediates input / output of the test circuit, and the memory includes test circuit construction data for constructing a test circuit capable of executing all the test items of the test target semiconductor integrated circuit, and the test target semiconductor integrated Test condition setting to set test conditions for all test items of the circuit And the test circuit is configured to receive at least a plurality of test items on the programmable device upon receipt of the test circuit construction data. Further, the test circuit receives the test condition setting data and receives at least an arbitrary inspection waveform signal whose generation timing, polarity, voltage value, and current value are variable via the pin electronics driver. A test waveform signal generation circuit that enables output to an arbitrary terminal of the semiconductor integrated circuit under test, and a comparison between the output waveform signal output from the semiconductor integrated circuit under test and the theoretical value for the test waveform signal A comparison circuit for determining whether the operation of the semiconductor integrated circuit under test is good or bad, and The memory is configured to transmit the test condition setting data to the test circuit for each test item of the semiconductor integrated circuit under test, and the operation of the semiconductor integrated circuit under test by the comparison circuit via the PC interface The pass / fail judgment result is transmitted to the host computer.

  The voltage value or current value set by the test waveform signal generation circuit and applied to the semiconductor integrated circuit under test is regulated, and the voltage value or current value output from the semiconductor integrated circuit under test is measured. Preferably, a voltage / current application / measurement circuit is provided.

  Moreover, it is preferable that the test circuit capable of executing all the test items of the test target semiconductor integrated circuit is constructed in the programmable device. Alternatively, when the semiconductor integrated circuit is a composite device composed of a plurality of types of circuits including a logic circuit and a memory, the test circuit for one type of the plurality of types of circuits is constructed in the programmable device. It is preferred that

  According to a fifth aspect of the present invention, a memory for storing a test program for a semiconductor integrated circuit under test transmitted from a host computer, and the operation of the semiconductor integrated circuit under test are verified by reading the test program from the memory. Programmable device for constructing a test circuit, a PC interface for mediating input / output of signals to / from the host computer, and pin electronics for mediating input / output of signals to / from a plurality of input / output terminals of the semiconductor integrated circuit under test A test circuit construction data for constructing a test circuit capable of executing all the test items of the semiconductor integrated circuit under test, wherein the test is performed by a semiconductor integrated circuit test apparatus provided with a driver. And a test for every test item of the semiconductor integrated circuit under test The test circuit is stored separately for test condition setting data for setting a test condition, and the test circuit can receive at least a plurality of test items on the programmable device upon receiving the test circuit construction data. Furthermore, the test circuit receives the test condition setting data and receives at least an arbitrary test waveform signal whose generation timing, polarity, voltage value, and current value are variable via the pin electronics driver. Output to an arbitrary terminal of the semiconductor integrated circuit under test, and compares the output waveform signal output from the semiconductor integrated circuit under test with a theoretical value against the inspection waveform signal, and the semiconductor integrated circuit under test In addition, the memory is determined for each test item of the semiconductor integrated circuit under test. Send a serial test condition setting data to the test circuit, and transmitting the quality of the determination result of the operation of the object to be tested semiconductor integrated circuit according to the comparison via the PC interface to the host computer.

  The programmable device is preferably configured with the test circuit capable of executing all the test items of the semiconductor integrated circuit. Alternatively, when the semiconductor integrated circuit is a composite device composed of a plurality of types of circuits including a logic circuit and a memory, the test circuit for one type of the plurality of types of circuits is constructed in the programmable device. Preferably, after completing all test items for this type of circuit, the test circuits for the remaining other types of circuits are constructed.

  According to the semiconductor integrated circuit test apparatus and method of the present invention, the memory for storing the test program of the semiconductor integrated circuit under test transmitted from the host computer, and the operation of the semiconductor integrated circuit under test by reading the test program from the memory Programmable device for constructing a test circuit for verifying data, a PC interface for mediating input / output of signals with a host computer, and a pin for mediating input / output of signals to / from a plurality of input / output terminals of a semiconductor integrated circuit An electronic driver, and the memory includes test circuit construction data for constructing a test circuit capable of executing all test items of the semiconductor integrated circuit under test, and test conditions for all test items of the semiconductor integrated circuit under test. Test program divided into test condition setting data to set The test circuit is configured to receive at least a plurality of test items on the programmable device upon receipt of the test circuit construction data, and the test circuit is configured to set test conditions. Upon receiving data, it is possible to output any test waveform signal that changes at least the generation timing, polarity, voltage value, and current value to any terminal of the semiconductor integrated circuit under test via the pin electronics driver. And a comparison circuit for comparing the output waveform signal output from the semiconductor integrated circuit under test against the inspection waveform signal and the theoretical value to determine whether the operation of the semiconductor integrated circuit under test is good or bad And the memory further stores test condition setting data for each test item of the semiconductor integrated circuit under test. The test result of the semiconductor integrated circuit to be tested by the comparison circuit is transmitted to the host computer via the PC interface to the host computer, so that a practical and highly versatile semiconductor integrated circuit test can be performed. Apparatus and methods can be provided.

  1, a semiconductor integrated circuit test apparatus 2 to which the present invention is applied includes a CPU 11 mounted on a test board 10, a memory module 12, an FPGA 13, and a voltage / current application / measurement apparatus (PMU). ) 14, a power supply circuit (DPS) 15, a pin electronics driver (PE) and a multiplexer (MPX) 16, and an interface 17 with the host computer. The test apparatus 2 constructs a test circuit 19 in the FPGA 13 based on a test program transmitted from a host computer (HC) 18, and a semiconductor integrated circuit (DUT; Device Under Test) to be inspected by the test circuit 19. 20 operations are verified.

  Here, the test program transmitted from the HC 18 is created according to the specification of the DUT 20, and is roughly divided into test circuit construction data and test condition setting data, and each is described in HDL or C language. The test circuit construction data is data for constructing a test circuit capable of executing all the test items of one DUT 20, and is prepared by a test software manufacturer according to the specifications of the DUT 20, for example. Further, the test condition setting data is prepared corresponding to the test item so as to give the test condition for every test item of the DUT 20 to the test circuit constructed in the FPGA. This test condition setting data further includes data for setting various conditions such as sequence setting and pin list setting, which will be described later, and test pattern data for testing logical devices. These data are prepared by the test software manufacturer. Or set by the user.

  The HC 18 is connected to the test apparatus 2 with a USB cable or the like and exchanges data with the test apparatus 2, and is also connected to a system LAN (not shown) by the Ethernet (registered trademark) system. You may transmit / receive production management data with the production management apparatus (not shown) which performs overall control. The HC 18 is connected to a prober that moves the test apparatus 2 and the DUT 20 relative to each other and a control device (not shown) such as a handler, and is connected to a GPIB (General Purpose Interface Bus), and transmits and receives signals to and from this control device. It may be a thing. Further, the HC 18 may be connected to a plurality of test apparatuses 2 by USB, manage an ID number unique to each test apparatus 2, and control each test apparatus 2 individually.

  Further, the DUT 20 is typically composed of a predetermined combination unit (for example, 16) of a plurality of chips formed on the semiconductor wafer, and the test apparatus 2 is made relative to the semiconductor wafer after one test is completed. Therefore, the entire chip formed on the semiconductor wafer is tested by moving the unit in units. The DUT 20 is not limited to a semiconductor wafer chip, and may be a plurality of identical semiconductor chips after mounting, for example.

  The CPU 11 and the interface 17 have various output terminals and are configured by various logic circuits such as an AND circuit and a flip-flop circuit, as illustrated in FIGS. 2 to 4 illustrated as interface circuits with the CPU configured in the FPGA 13. Function modules (internal reset signal creation / internal memory clear module (reg # rst, FIG. 3), address decoder (reg # addec, FIG. 4), etc.) The respective units of the test apparatus 2 are comprehensively controlled via the control unit 21.

  In FIG. 1, the memory module 12 includes a DRAM 22, a flash memory 23, and an SRAM 24. The memory module 12 stores a test program including test circuit construction data and test condition setting data transmitted from the HC 18 via the bus 21 under the control of the CPU 11. Prior to the start of the test of the DUT 20, the memory module 12 transmits test circuit construction data to the FPGA 13 via the bus 21, and further transmits test condition setting data for each test item of the DUT 20. In addition, the memory module 12 receives the test result obtained for each test item from the FPGA 13 and stores it. Further, the memory module 12 transmits the stored test result to the HC 18 via the CPU 11 and the interface 17.

  The DRAM 22 stores test condition setting data for every test test item of the DUT 20. The DRAM 22 transmits test condition setting data for each test item to the FPGA 13 via the bus 21 under the control of the CPU 11 for each test item of the DUT 20, and test pattern data in the test condition setting data. Is transmitted to the FPGA 13 via the SRAM 24. The flash memory 23 stores test circuit construction data for constructing the test circuit 19 that can execute all the test items necessary for the test of the DUT 20.

  The SRAM 24 functions as a temporary buffer for the test pattern data of the test condition setting data stored in the DRAM 22, and when the semiconductor memory is tested as the DUT 20, a relief process for storing the test result transmitted from the FPGA 13. It also functions as an ECR memory.

  Prior to the start of the test of the DUT 20, the FPGA 13 reads the test circuit construction data from the flash memory 23, and builds a test circuit 19 that can execute a test of a plurality of test items based on the data.

  When the DUT 20 is composed of only a logic circuit or a memory circuit, the test circuit 19 is normally constructed so that all test items can be executed, and the DUT 20 is a composite device composed of a plurality of types of circuits including a logic circuit and a memory circuit. In such a case, it is constructed so that all test items of one type of circuit among a plurality of types of circuits can be executed. In such a composite device, after completing the test of all the test items in one type of circuit, a new test circuit is constructed so that all the test items in the other type of circuit can be executed. Individual test circuits are constructed so that all tests are completed. Further, the FPGA 13 reads test condition setting data for each test item from the DRAM 22 and the SRAM 24 in a state where the test circuit 19 is constructed, and executes a desired test under the test conditions.

  As shown in FIG. 5, the test circuit 19 includes a test waveform signal generation circuit 30 and a comparison circuit 31. The inspection waveform signal generation circuit 30 generates at least the generation timing, polarity, and voltage according to the test conditions input to the test condition setting register 32 that holds the test condition setting data transmitted from the DRAM 22 and the SRAM 24 for each test item. An arbitrary inspection waveform signal whose value and current value are variable is output to an arbitrary terminal of the DUT 20 via the PE 16.

  Test conditions to be input to the test condition setting register 32 include sequence setting for controlling the operation of the entire test circuit 19, pin list setting for setting input / output pins of the DUT 20 that outputs the test waveform signal, and regulation by the PMU 14. PMU setting for setting the voltage value or current value to be performed, DPS setting for setting the power supply voltage supplied from the DPS 15 to the DUT 20, relay setting for controlling the operation of the PE and MPX 16, and timing setting for setting the generation timing of the inspection waveform signal There are format setting for setting the rise, fall, and polarity of the waveform signal, instruction setting data for operating the ALPG circuit 37 described later, and the like. These test conditions exemplify test conditions used for inspection of a certain type of DUT 20, and various setting changes can be made according to the type of DUT 20.

  The inspection waveform signal generation circuit 30 includes, for example, an A / D, D / A control circuit 34, a timing circuit 35, and a format circuit for controlling the A / D and D / A circuits provided in the sequence circuit 33, the PMU 14, and the like. 36, and an ALPG (Algorithmic Memory Pattern Generator) circuit 37. The inspection waveform signal generation circuit 30 is individually set according to the DUT 20.

  Based on the sequence setting data and pin list setting data input to the test condition setting register 32, the sequence circuit 33 executes tests such as test start and end, data addressing, and input / output terminal specification of the DUT 20. For example, having a hierarchical function module (pin electronics control module (pec), timing generation module (pec # tmgen), etc.) as shown in FIG. 6, as shown in FIG. It has a block configuration (rising edge detection that detects a rising edge of a test start instruction and generates a pulse, test end instruction from the HC 18, execution of an end address, end detection that detects execution of an END instruction and an STPS instruction, etc.).

  The A / D and D / A control circuit 34 outputs the voltage value or current value data and the output waveform signal output from the DUT 20 based on the PMU setting and DPS setting data input to the test condition setting register 32. A range switching command for measuring the voltage value or the current value is transmitted to the PMU 14. In addition, a range switching command for transmitting power supply voltage data to be supplied to the DUT 20 is transmitted to the DPS 15.

  The timing circuit 35 has, for example, a configuration as shown in FIG. 8 (clock cycle counter, pec # tsblock, etc.), and is a cycle used for testing based on timing setting data input to the test condition setting register 32. A clock is generated, and this is used as a basic test cycle to determine the generation timing of the inspection waveform signal.

  The format circuit 36 has, for example, a configuration (clock selection, waveform shaping, etc.) as shown in FIG. 9, and the rising and falling edges of the test waveform signal based on the format setting data input to the test condition setting register Determine the polarity.

  When testing the semiconductor memory as the DUT 20, the ALPG circuit 37 generates a repetitive pattern to the input / output pins of the DUT 20 based on the instruction setting data input to the test condition setting register, and performs a ping-pong test and marching Various inspection waveform signals such as tests are generated.

  In FIG. 5, the comparison circuit 31 compares the output waveform signal output from the DUT 20 with the theoretical value with respect to the inspection waveform signal, and determines whether the DUT is good or bad. The comparison circuit 31 has a configuration (external PEdelay generation circuit, terminal state comparison circuit, etc.) as shown in FIG. 10, for example. Further, the comparison circuit may compare the voltage value or current value measured by the PMU 14 with the theoretical value to determine whether the operation of the DUT 20 is good or bad.

  Here, the test condition setting register 32 has a format table (reg # fmtreg) and a timing table (reg # tmg) as shown in FIGS. For this reason, the test condition setting register 32 receives the determination result of the operation of the DUT 20 by the comparison circuit 31 and creates defect processing data (ECR (Error Capture Ram) data) in the DUT 20 and stores it in the SRAM 24. An ECR memory interface 38 (see FIG. 5) for storage can be provided.

  In FIG. 1, the PMU 14 includes A / D and D / A circuits, and the voltage value, current value data, and output signal among the inspection waveform signals input from the A / D and D / A control circuit 34. In response to a range switching command for measuring the current value or voltage value of the current, the output level of the voltage value or current value to be applied to the DUT 20 is specified, the measurement range and the measurement mode are switched, and the output signal from the DUT 20 Measure the voltage or current value. For example, as shown in FIG. 13, the PMU 14 has a circuit configuration capable of range switching combining an amplifier and an FET. With such a configuration in the PMU 14, verification of current leakage in the DUT 20, internal short circuit, circuit open, etc. is performed based on a comparison of the input voltage value and current value to the DUT 20 and the output current value and voltage value from the DUT 20. Is possible.

  The DPS 15 includes A / D and D / A circuits, and receives power supply voltage data input from the A / D and D / A control circuit 34 and a range switching command when measuring the operating power supply current. A desired power supply voltage is supplied to the DUT 20. For example, as shown in FIG. 14, the DPS 15 has a circuit configuration capable of range switching combining an amplifier and an FET. With this configuration in the DPS 15, it is possible to supply an arbitrary power supply voltage to the DUT 20, and it is possible to verify the DUT 20 at various power supply voltages. The hardware configuration of the test apparatus 2 including the PMU 14 and the DPS 15 has a configuration as shown in FIG. 15, for example.

  The PE 16 mediates input / output of signals between the plurality of input / output pins of the FPGA 13 and the plurality of input / output pins of the DUT 20. Further, the MPX 16 performs switching to connect the input / output pins of the FPGA 13 or the input / output pins of the PMU 14 to the input / output pins of the DUT 20 by the relay matrix.

  The interface 17 is an interface that mediates input / output between the FPGA 13, the memory 12, the CPU 11, and the like with respect to the HC 18, and includes various commands such as a test start (START) and a test stop (STOP) transmitted from the HC 18, And exchange of signals such as determination results (PASS, FAIL) and command acceptance (READY) of the DUT 20 transmitted from the FPGA 13 are performed.

  Next, the effect | action by the said structure is demonstrated with reference to the flowchart of FIG. First, the test apparatus 2 and the HC 18 are connected by a USB cable or the like, and the test apparatus 2 and the DUT 20 are connected via the PE and MPX 16.

  Next, the test program of the DUT 20 is received from the HC 18 via the interface 17 and stored in the memory module 12 via the bus 21. At this time, among the test programs, the test condition setting data is stored in the DRAM 22 and the test circuit construction data is stored in the flash memory 23 separately.

  After storing the test program, the test circuit construction data is read from the flash memory 23 to the FPGA 13 under the control of the CPU 11, and the test circuit 19 based on the test circuit construction data is constructed in the FPGA 13.

  Here, the test circuit construction data includes data capable of executing all the test items of the DUT 20. When the DUT 20 is a logic circuit or one type of memory circuit, all of the test circuit construction data is read out to the FPGA 13 to construct a test circuit. On the other hand, when the DUT 20 is a composite device composed of a plurality of types of circuits including a logic circuit and a memory, test circuit construction data for one type of the plurality of types of circuits is read out to the FPGA 13 and one type of circuit is read out. A test circuit for this circuit is constructed. In this case, the test circuit construction data for the remaining types of circuits is read out to the FPGA 13 after all the tests of one type of circuit are completed, and the test circuits for the remaining types of circuits are constructed.

  After the test circuit 19 is constructed, when a test program is transmitted and a test start command is issued, test condition setting data is sequentially input from the DRAM 22 to the test circuit 19 for each test item under the control of the CPU 11. At the same time, test pattern data is set in the SRAM 24. The test condition setting data is input to the test condition setting register 32 of the test circuit 19, whereby the test condition is set.

  In the test circuit 19, a desired inspection waveform signal is generated by the inspection waveform signal generation circuit 30 based on the test program input to the test condition setting register 32. The generated inspection waveform signal is output to the input / output pin of the DUT 20 selected by the sequence circuit 33 via the PE 16. Further, a desired voltage value or current value is output from the PMU 14 to the input / output pin of the DUT 20 via the A / D and D / A control circuit 34. At this time, the MPX 16 switches the input / output pins of the DUT 20 to select the input / output pins of the PMU 14 instead of the input / output pins of the FPGA 13.

  In the DUT 20, the inspection waveform signal input from the test circuit, or the output waveform signal for the voltage value or current value input from the PMU 14, or the current value or voltage value is compared in the FPGA 19 via the PE and MPX 16. The signal is input to the circuit 31 or the PMU 14. These inputs are switched by switching the MPX 16.

  In the comparison circuit 31, the input output signal is compared with the theoretical value, and the quality of the operation of the DUT 20 is determined. This test determination result is transmitted to the SRAM 24 via the ECR memory interface 38 provided in the test condition setting register 32 or is transmitted to the HC 18 via the interface 17. Further, the determination result stored in the SRAM 24 is transmitted to the HC 18 via the interface 17.

  As described above, the test program transmitted from the HC 18 is divided into test condition setting data and test circuit construction data, stored in the DRAM 22 and the flash memory 23, respectively, and a desired test is performed in the FPGA 13 based on the test circuit construction data. The circuit 19 is constructed, and based on the test condition setting data, a test waveform signal is generated by the test waveform signal generation circuit 30 and output to the DUT 20, and an output waveform signal output from the DUT 20 with respect to the test waveform signal The comparison value is compared with the theoretical value by the comparison circuit 31 to determine whether the operation of the DUT 20 is good or not, and the determination result is transmitted to the HC 18. Therefore, it is not necessary to rewrite a test circuit by writing a test program consisting of all test circuit construction data and test condition setting data for each test item into a programmable device such as an FPGA as in the prior art, and test a large number of test programs. There is no need to send items from the host computer. Accordingly, a more practical and versatile semiconductor integrated circuit test apparatus can be provided.

  The configuration of the test circuit 19 is not limited to each circuit shown in the above embodiment, and may include a trimming circuit, for example. The trimming circuit is used when a flash memory is tested as the DUT 20. The flash memory test repeats the write, read, and erase processes. The trimming circuit repeats the test while changing the test conditions in each process, and all the cells of the flash memory are in the programmed state (charge storage sites such as floating gates). In this state, the cell current is reliably turned ON / OFF in the erase state (the charge storage site such as the floating gate is emptied). Of course, a cell that does not exhibit the above behavior depending on the extracted conditions also has a function for processing the cell as NG. The above test is a test that takes a lot of time in the test of the flash memory, and the trimming circuit is a circuit for executing this sequence.

  In the above embodiment, the test circuit 19 capable of executing all the tests is constructed in the FPGA 13. However, when the test target device is a composite device including a plurality of types of circuits including a logic circuit and a memory, A test circuit for one type of circuit (for example, a logic circuit) among a plurality of types of circuits is constructed, and after testing this type of circuit, a test circuit for the remaining types of circuits (memory) is constructed, The remaining circuits may be tested in the same manner. If the device to be tested is a device having a self test circuit (BIST; Built In Self Test, DFT; Design For Test), a test circuit 19 corresponding to the device may be constructed and test conditions may be set. Accordingly, various semiconductor integrated circuit tests can be realized with one test apparatus.

It is a figure which shows schematic structure of the testing apparatus of the semiconductor integrated circuit to which this invention is applied. It is a nest female block diagram of an example of a configuration of a CPU and an interface. It is a block diagram which shows an example of the functional module of CPU and an interface. It is a block diagram which shows an example of the functional module of CPU and an interface. It is a figure which shows schematic structure of a test circuit. It is explanatory drawing which shows an example of the hierarchical structure of a sequence circuit. It is a block diagram which shows an example of an internal structure of a sequence circuit. It is a block diagram which shows an example of a timing circuit. It is a block diagram which shows an example of the internal structure of a format circuit. It is a block diagram which shows an example of an internal structure of a comparison circuit. It is a figure which shows the outline | summary of the format table provided in the register for test condition setting. It is a figure which shows the outline | summary of the timing table provided in the register for test condition setting. It is an electric circuit diagram which shows an example of a structure of PMU. It is an electric circuit diagram which shows an example of a structure of DPS. It is a block diagram which shows the hardware constitutions of the test apparatus containing PMU and DPS. It is a flowchart which shows the process sequence of the test device of a semiconductor integrated circuit.

Explanation of symbols

2 Test equipment 11 CPU
12 memory module 13 FPGA (programmable device)
14 Voltage / Current Application / Measurement Unit (PMU)
15 Power supply circuit (DPS)
16-pin electronics driver (PE) and multiplexer (MPX)
17 Interface 18 Host computer (HC)
19 Test Circuit 20 Semiconductor Integrated Circuit (DUT)
22 DRAM
23 Flash memory 24 SRAM
30 Test Waveform Signal Generation Circuit 31 Comparison Circuit 32 Test Condition Setting Register

Claims (6)

Host for transmitting test circuit construction data for constructing a test circuit capable of testing a plurality of test items of a semiconductor integrated circuit to be tested and test condition data for setting test conditions for each test item to a semiconductor integrated circuit test apparatus A computer is connected, and the host computer can control the test apparatus by transmitting a command including test start / end to the test apparatus, and can receive test result data of the semiconductor integrated circuit under test by the test apparatus Composed of
The test device comprises:
A PC interface that mediates signal input and output with the host computer;
Storing the test circuit construction data and the test condition data transmitted from the host computer, and a memory capable of separating and outputting these data ;
Prior to starting the test from the memory, the test circuit construction data is supplied to construct a test circuit capable of testing a plurality of test items of the semiconductor integrated circuit under test, and a plurality of tests of the semiconductor integrated circuit under test for each item, and a programmable device that sets a test condition is supplied with test condition data for setting the test condition for each said test item from said memory,
Before SL test circuit is supplied with the test condition setting data, at least generation timings, polarity, voltage value, outputting a current value of any test waveform signal is variable before SL under test semiconductor integrated circuits A test waveform signal generating circuit that enables the test, and the output waveform signal output from the semiconductor integrated circuit under test with respect to the test waveform signal is compared with a theoretical value to determine whether the operation of the semiconductor integrated circuit under test is good or bad. A comparison circuit for determining,
The level is set by the inspection waveform signal generating circuit and applied to the semiconductor integrated circuit under test, and the voltage value or current value output from the semiconductor integrated circuit under test is measured. A voltage / current application / measurement circuit for supplying the measurement result data to the comparison circuit;
The signals received from the programmable device and the voltage / current application / measurement circuit are supplied to the semiconductor integrated circuit under test, and the output from the semiconductor integrated circuit under test is supplied to the programmable device and the voltage / current / A test apparatus for a semiconductor integrated circuit, comprising: a pin electronics driver for outputting to a current application / measurement circuit . 2. The test apparatus for a semiconductor integrated circuit according to claim 1, wherein the test circuit capable of executing all the test items of the semiconductor integrated circuit under test is constructed in the programmable device. When the semiconductor integrated circuit is a composite device composed of a plurality of types of circuits including a logic circuit and a memory,
2. The test apparatus for a semiconductor integrated circuit according to claim 1, wherein the test circuit for one type of the plurality of types of circuits is constructed in the programmable device. Prior to starting the test of the semiconductor integrated circuit under test, test circuit construction data and a test condition for each test item for setting up a test circuit capable of testing a plurality of test items of the semiconductor integrated circuit under test from the host computer are set. Test condition data is transmitted to a test apparatus of a semiconductor integrated circuit, and the host computer transmits a command including test start / end to the test apparatus to control the test apparatus, and the semiconductor device under test by the test apparatus The test result data of the integrated circuit can be received,
The test apparatus includes a PC interface, a memory, a programmable device, a voltage / current application / measurement circuit, and a pin electronics driver.
The test circuit construction data and the test condition data transmitted from the host computer are stored in the memory via a PC interface that mediates signal input / output with the host computer, and the memory stores these data. Can be output separately.
The test circuit construction data is supplied from the memory to the programmable device prior to the start of the test of the semiconductor integrated circuit under test, thereby constructing a test circuit capable of testing a plurality of test items of the semiconductor integrated circuit under test . Thereafter, for each of a plurality of test items of the semiconductor integrated circuit to be tested, supply test condition data for setting test conditions for each test item from the memory to set the test conditions,
Before SL test circuit is supplied with the test condition setting data, at least generation timings, polarity, voltage value, to output a current value to an arbitrary test waveform signal before SL under test semiconductor integrated circuits for varying A test waveform signal generation circuit to be enabled, and an output waveform signal output from the semiconductor integrated circuit under test with respect to the test waveform signal and a theoretical value are compared to determine whether the operation of the semiconductor integrated circuit under test is good or bad And at least a comparison circuit that
The voltage / current application / measurement circuit is set by the inspection waveform signal generation circuit, defines a level of a voltage value or a current value applied to the semiconductor integrated circuit under test, and is output from the semiconductor integrated circuit under test. Voltage value or current value to be measured, and the measurement result data is supplied to the comparison circuit,
The pin electronics driver receives signals from the programmable device and the voltage / current application / measurement circuit, supplies these signals to the semiconductor integrated circuit under test, and outputs an output from the semiconductor integrated circuit under test. A test method for a semiconductor integrated circuit, comprising: outputting to a programmable device and the voltage / current application / measurement circuit . 5. The test method for a semiconductor integrated circuit according to claim 4 , wherein the test circuit capable of executing all the test items of the semiconductor integrated circuit is constructed in the programmable device. When the semiconductor integrated circuit is a composite device composed of a plurality of types of circuits including a logic circuit and a memory,
In the programmable device, the test circuit for one type of the plurality of types of circuits is constructed,
5. The method of testing a semiconductor integrated circuit according to claim 4 , wherein after all test items of this type of circuit are completed, the test circuit for the remaining other types of circuits is constructed.

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