JP4332037B2 - Electronic component storage package and electronic device - Google Patents

Electronic component storage package and electronic device Download PDF

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Publication number
JP4332037B2
JP4332037B2 JP2004010300A JP2004010300A JP4332037B2 JP 4332037 B2 JP4332037 B2 JP 4332037B2 JP 2004010300 A JP2004010300 A JP 2004010300A JP 2004010300 A JP2004010300 A JP 2004010300A JP 4332037 B2 JP4332037 B2 JP 4332037B2
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metal frame
electronic component
insulating base
brazing
mounting portion
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JP2005203669A (en
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昭一 島田
公明 井口
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Kyocera Corp
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Kyocera Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

Description

本発明は、圧電振動子や半導体素子等の電子部品を搭載し収容するための電子部品収納用パッケージおよびそれを用いた電子装置に関するものである。   The present invention relates to an electronic component storage package for mounting and storing electronic components such as piezoelectric vibrators and semiconductor elements, and an electronic device using the same.

従来、圧電振動子や半導体素子等の電子部品は、これらの電子部品を気密に収容するための電子部品収納用パッケージ(以下、パッケージともいう)内に気密封止されて電子装置となり、携帯電話やコンピュータ等の各種電子機器の部品として使用される。   2. Description of the Related Art Conventionally, electronic components such as piezoelectric vibrators and semiconductor elements are hermetically sealed in an electronic component storage package (hereinafter also referred to as a package) for accommodating these electronic components in an airtight manner, thereby becoming an electronic device. Used as a part of various electronic devices such as computers.

このような電子部品を気密に収容するパッケージにおいて、最も信頼性の高いとされるものは、酸化アルミニウム質焼結体等のセラミックスから成り、上面の中央部に電子部品を収容し搭載するための凹状の搭載部を有する絶縁基体と、絶縁基体の搭載部内から外表面にかけて導出された複数の配線導体と、絶縁基体の上面に搭載部を取り囲むように形成された枠状の金属層と、枠状金属層に銀ろう等のろう材を介して接合された鉄−ニッケル−コバルト合金や鉄−ニッケル合金等から成る封止用の金属枠体と、金属枠体の上面にシーム溶接により接合される鉄−ニッケル合金や鉄−ニッケル−コバルト合金から成る蓋体とから構成されるタイプのものである。   In such a package for accommodating electronic components in an airtight manner, the most reliable one is made of ceramics such as an aluminum oxide sintered body, and is used for accommodating and mounting the electronic components in the center of the upper surface. An insulating base having a concave mounting portion; a plurality of wiring conductors led out from the inside of the mounting portion of the insulating base to the outer surface; a frame-shaped metal layer formed on the upper surface of the insulating base so as to surround the mounting portion; A metal frame for sealing composed of an iron-nickel-cobalt alloy or an iron-nickel alloy joined to a metal-like metal layer via a brazing filler metal such as silver brazing, and joined to the upper surface of the metal frame by seam welding. And a lid made of iron-nickel alloy or iron-nickel-cobalt alloy.

このタイプのパッケージの場合、絶縁基体の搭載部に電子部品を搭載するとともに電子部品の電極とメタライズ配線導体とを電気的に接続した後、金属枠体に蓋体を載置し、この蓋体の外周縁にシーム溶接機の一対のローラー電極を接触させながら転動させるとともに、この一対のローラー電極間に溶接のための大電流を流し金属枠体と蓋体とを直接的にシーム溶接することによって、内部に電子部品が気密に収納された製品としての電子装置となる。この電子装置は、配線導体のうち絶縁基体の外表面に導出された部位を外部電気回路に接続することにより外部電気回路基板に実装されて使用される。
特開平7−30007号公報
In the case of this type of package, after mounting the electronic component on the mounting portion of the insulating base and electrically connecting the electrode of the electronic component and the metallized wiring conductor, the lid is placed on the metal frame. The pair of roller electrodes of the seam welding machine are rolled while being in contact with the outer peripheral edge of the seam, and a large current for welding is passed between the pair of roller electrodes to directly seam weld the metal frame and the lid. As a result, an electronic device as a product in which electronic components are housed in an airtight manner. This electronic device is used by being mounted on an external electric circuit board by connecting a portion of the wiring conductor led to the outer surface of the insulating base to an external electric circuit.
Japanese Unexamined Patent Publication No. 7-30007

しかしながら、近時、電子機器の小型化、高機能化にともない、上記電子装置が実装される外部電気回路基板に、容量素子や抵抗器等の小型のいわゆるチップ状の電子素子も、隣接間隔を狭くして高密度で実装する必要が生じてきており、これに応じて、電子部品収納用パッケージも、例えば絶縁基体の1辺の長さが数mm程度と非常に小型化が進んでいる。そのため、絶縁基体と金属枠体との接合面の幅を十分に確保することが難しくなり、金属枠体と絶縁基体との間のろう付けの強度が低下し、電子部品の気密封止の信頼性が低下してしまうという問題があった。   However, recently, along with the downsizing and higher functionality of electronic devices, small so-called chip-shaped electronic elements such as capacitors and resistors are also placed on the external electric circuit board on which the electronic device is mounted. In response to this, it has become necessary to mount the electronic component storage package in a narrow and high-density manner, and the electronic component storage package has been miniaturized so that, for example, the length of one side of the insulating base is about several millimeters. For this reason, it is difficult to ensure a sufficient width of the joint surface between the insulating base and the metal frame, the strength of brazing between the metal frame and the insulating base is reduced, and the reliability of hermetic sealing of electronic components is reduced. There was a problem that the performance would deteriorate.

本発明は、かかる従来の問題点に鑑みて完成されたものであり、その目的は、絶縁基体の外形寸法を小型化することが可能で、かつ金属枠体を絶縁基体に強固にろう付けすることができる、小型で気密封止の信頼性に優れた電子部品収納用パッケージおよび電子装置を提供することにある。   The present invention has been completed in view of such conventional problems, and an object of the present invention is to reduce the outer dimensions of the insulating base and to braze the metal frame firmly to the insulating base. An object of the present invention is to provide an electronic component storage package and an electronic device that are small and have excellent airtight sealing reliability.

本発明の電子部品収納用パッケージは、上面に電子部品の搭載部を有する四角形状の絶縁基体と、該絶縁基体の前記搭載部から外表面にかけて導出された配線導体と、前記絶縁基体の上面外周部に形成され、前記搭載部を取り囲み、前記絶縁基体の少なくとも各角部において前記絶縁基体の側面に延出しているろう付け用金属層と、下面が前記ろう付け用金属層にろう付けされる金属枠体と、前記搭載部を覆うようにして前記金属枠体の上面に取着される蓋体とを具備し、前記金属枠体の外周が前記絶縁基体の外周よりも外側に位置することを特徴とするものである。 An electronic component storage package according to the present invention includes a rectangular insulating substrate having an electronic component mounting portion on an upper surface, a wiring conductor led out from the mounting portion to the outer surface of the insulating substrate, and an outer periphery of the upper surface of the insulating substrate. is formed in part, the saw takes mounting portion circumference, brazed to at least the brazing metal layer extends on the side surface of the insulating base at each corner, the lower surface is the brazing metal layer of the insulating base And a lid attached to the upper surface of the metal frame so as to cover the mounting portion, and the outer periphery of the metal frame is located outside the outer periphery of the insulating base. It is characterized by doing.

また本発明の電子部品収納用パッケージは、前記金属枠体の外周は、前記絶縁基体の外周よりも0.5mm以上外側に位置することを特徴とするものである。   In the electronic component storage package according to the present invention, the outer periphery of the metal frame is positioned outside the outer periphery of the insulating base by 0.5 mm or more.

また本発明の電子部品収納用パッケージは、前記ろう付け用金属層の前記絶縁基体側面に延出する長さが0.3mm以上であることを特徴とするものである。 In the electronic component storage package of the present invention, the length of the brazing metal layer extending to the side surface of the insulating base is 0.3 mm or more.

また本発明の電子装置は、上記構成の電子部品収納用パッケージの前記搭載部に電子部品を搭載するとともに、該電子部品の電極を前記配線導体に電気的に接続し、かつ前記金属枠体の上面に前記蓋体を取着して前記電子部品を気密に封止したことを特徴とするものである。   The electronic device according to the present invention has an electronic component mounted on the mounting portion of the electronic component storage package having the above-described configuration, and an electrode of the electronic component is electrically connected to the wiring conductor, and the metal frame body The lid is attached to the upper surface and the electronic component is hermetically sealed.

本発明の電子部品収納用パッケージによれば、絶縁基体の上面に搭載部を取り囲むようにしてろう付けされた金属枠体の外周が、絶縁基体の外周よりも、例えば0.5mm以上、外側に位置することから、絶縁基体と金属枠体との接合面よりも外側に金属枠体の下面の外周部が露出して突出することになり、この露出した分だけ金属枠体に対するろう材の接合面積が大きくなるとともに、金属枠体の下面外周でろう材のメニスカス(ろう材の溜り部)を大きく形成することができるため、絶縁基体が小型化されたとしても、金属枠体を絶縁基体に対して強固にろう付けすることができる。   According to the electronic component storage package of the present invention, the outer periphery of the metal frame brazed so as to surround the mounting portion on the upper surface of the insulating base is, for example, 0.5 mm or more outside the outer periphery of the insulating base. Therefore, the outer peripheral portion of the lower surface of the metal frame body is exposed and protrudes outside the joint surface between the insulating base and the metal frame body, and the brazing material is bonded to the metal frame body by this exposed amount. As the area increases, a brazing material meniscus can be formed on the outer periphery of the lower surface of the metal frame so that the metal frame can be used as an insulating substrate even if the insulating substrate is downsized. It can be brazed firmly.

この場合、金属枠体の外周部分が絶縁基体の外側に突出した形状になるが、金属枠体は外部電気回路基板には直接接していないので、外部電気回路基板にチップ状の電子素子等を接続する際に金属枠体が妨げになることはほとんどなく、これにより外部電気回路基板に電子素子等を実装する面積を容易に確保することができる。   In this case, the outer peripheral portion of the metal frame protrudes to the outside of the insulating base, but the metal frame is not in direct contact with the external electric circuit board. When connecting, the metal frame is hardly hindered, and this makes it possible to easily secure an area for mounting electronic elements and the like on the external electric circuit board.

その結果、本発明によれば、絶縁基体の外形寸法を小型化することが可能で、かつ金属枠体に蓋体を強固に接合することが可能な、小型で気密封止の信頼性に優れた電子部品収納用パッケージを提供することができる。   As a result, according to the present invention, the external dimensions of the insulating base can be reduced, and the lid can be firmly bonded to the metal frame, and the size is small and the reliability of the hermetic sealing is excellent. An electronic component storage package can be provided.

また本発明の電子部品収納用パッケージにおいて、絶縁基体の上面に形成され金属枠体が接合されるろう付け用金属層を、例えば0.3mm以上の長さで、絶縁基体の少なくとも各角部において絶縁基体の側面に延出させたことから、ろう材が金属枠体の下面から絶縁基体の側面の金属層にかけてメニスカスを形成しながら一体的に接合することによって、ろう材の金属枠体および絶縁基体に対する接合面積を広く確保することができ、また、ろう材のメニスカスを大きく形成することができるため、金属枠体の下面と絶縁基体の上面との接合面積が小さくなったとしても、金属枠体を絶縁基体に対して強固に接合させて、気密封止の信頼性を優れたものとすることができる。また、絶縁基体の少なくとも各角部において絶縁基体の側面にろう付け用金属層を延出させておくことにより、金属枠体に蓋体を溶接等により接合するときに大きな応力が加わる各角部において、ろう材の接合面積を大きくするとともに、ろう材の大きな溜まりを形成して良好なメニスカス形状とすることができ、絶縁基体と金属枠体との接合を有効に補強することができるため、金属枠体と絶縁基体の接合の長期信頼性を優れたものとし、気密封止の信頼性に極めて優れた小型の電子部品収納用パッケージを提供することができる。 In the electronic component storing package of the present invention, the brazing metal layer upper surface formed metal frame of the insulation substrate is bonded, for example, 0.3mm or more in length, at least the corners of the insulating base in the fact that by extending the side surface of the insulating base, by the brazing material is integrally bonded while forming a meniscus toward the metal layer side of the insulating base from the lower surface of the metal frame, the metal frame of the brazing material and bonding area with respect to the insulating substrate can be secured wide and also because it can meniscus of the brazing material is greatly formed, even bonding area between the upper surface of the lower surface and the insulating substrate of the metal frame is reduced, the metal frame body is joined to strong solid with respect to the insulating substrate can be made the reliability of the hermetic seal was superior. In addition, by extending a brazing metal layer on the side surface of the insulating base at least at each corner of the insulating base, each corner is subjected to great stress when the lid is joined to the metal frame by welding or the like. In addition, the bonding area of the brazing material is increased, a large pool of brazing material can be formed into a favorable meniscus shape, and the bonding between the insulating base and the metal frame can be effectively reinforced, It is possible to provide a small-sized electronic component storage package that has excellent long-term reliability of bonding between the metal frame and the insulating base and is extremely excellent in reliability of hermetic sealing.

また本発明の電子装置は、上記構成の電子部品収納用パッケージと、搭載部に搭載された電子部品とを具備し、金属枠体の上面にろう材を介して蓋体を取着することにより前記電子部品を気密封止して形成されていることから、気密封止の信頼性に優れた小型で高信頼性のものとすることができる。   An electronic device according to the present invention includes an electronic component storage package having the above-described configuration and an electronic component mounted on a mounting portion, and a lid is attached to the upper surface of the metal frame via a brazing material. Since the electronic component is hermetically sealed, it can be made compact and highly reliable with excellent hermetic sealing reliability.

本発明の電子部品収納用パッケージおよび電子装置を添付の図面を基に説明する。   An electronic component storage package and an electronic device according to the present invention will be described with reference to the accompanying drawings.

図1は本発明の電子部品収納用パッケージおよび電子装置の実施の形態の一例を示す断面図である。図1において、1は絶縁基体、2は配線導体、3は金属枠体、4はろう付け用金属層、5は蓋体である。主に、これらの絶縁基体1、配線導体2、金属枠体3、ろう付け用金属層4、蓋体5により電子部品収納用パッケージ7が構成される。また、絶縁基体1の上面の搭載部1aに電子部品6を搭載するとともに電子部品6の電極を配線導体2に電気的に接続し、金属枠体3の上面に蓋体5を取着して電子部品6を気密に封止することにより電子装置9が形成される。   FIG. 1 is a sectional view showing an example of an embodiment of an electronic component storage package and an electronic device according to the present invention. In FIG. 1, 1 is an insulating substrate, 2 is a wiring conductor, 3 is a metal frame, 4 is a metal layer for brazing, and 5 is a lid. The insulating component 1, the wiring conductor 2, the metal frame 3, the brazing metal layer 4, and the lid 5 constitute an electronic component storage package 7. In addition, the electronic component 6 is mounted on the mounting portion 1 a on the upper surface of the insulating base 1, the electrodes of the electronic component 6 are electrically connected to the wiring conductor 2, and the lid 5 is attached to the upper surface of the metal frame 3. The electronic device 9 is formed by hermetically sealing the electronic component 6.

絶縁基体1は、上面に電子部品6を搭載するための搭載部1aが形成されており、酸化アルミニウム質焼結体やガラスセラミックス、窒化アルミニウム質焼結体、ムライト質焼結体等の絶縁材料により形成される。   The insulating base 1 has a mounting portion 1a for mounting the electronic component 6 on the upper surface, and is an insulating material such as an aluminum oxide sintered body, a glass ceramic, an aluminum nitride sintered body, or a mullite sintered body. It is formed by.

なお、絶縁基体1は、図1では、上面に凹部を設け、凹部の底面に搭載部1aを設けた例を示したが、平板状のものでもよい。   In addition, although the insulating base | substrate 1 showed the example which provided the recessed part in the upper surface, and provided the mounting part 1a in the bottom face of the recessed part in FIG.

絶縁基体1は、例えば酸化アルミニウム質焼結体から成る場合、酸化アルミニウム,酸化珪素,酸化マグネシウム、酸化カルシウム等の原料粉末に適当な有機バインダー、溶剤を添加混合して泥漿状となし、これを従来周知のドクターブレード法によりシート状とすることによって絶縁基体1用のセラミックグリーンシートを得、しかる後、このセラミックグリーンシートに適当な打ち抜き加工を施すとともに複数枚積層し、高温で焼成することによって製作される。   When the insulating substrate 1 is made of, for example, an aluminum oxide sintered body, an appropriate organic binder and solvent are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide to form a slurry. A ceramic green sheet for the insulating substrate 1 is obtained by forming into a sheet form by a conventionally known doctor blade method, and thereafter, the ceramic green sheet is subjected to an appropriate punching process, and a plurality of sheets are laminated and fired at a high temperature. Produced.

なお、絶縁基体1および搭載部1aは、四角板状の電子部品6を搭載し気密封止するのに適するように、平面視で四角形状に形成する。この場合、完全な四角形に限らず、例えば、カケ等の発生を防止するために角部を円弧状に面取りしたような形状でもよい。 Note that the insulating substrate 1 and the mounting portion 1a, as suitable for hermetically sealing mounting the electronic component 6 of the rectangular plate, you formed in a square shape in plan view. In this case, the shape is not limited to a perfect quadrangle, and may be, for example, a shape in which corners are chamfered in an arc shape in order to prevent occurrence of chipping or the like.

また、絶縁基体1は、上面の搭載部1aから側面や下面等の外表面にかけて複数の配線導体2が導出されている。   In the insulating base 1, a plurality of wiring conductors 2 are led out from the mounting portion 1a on the upper surface to the outer surface such as the side surface and the lower surface.

搭載部1aに搭載される電子部品6は、その電極(図示せず)が、配線導体2のうち搭載部1aに露出した部位にボンディングワイヤや半田等を介して電気的に接続される。   The electrode (not shown) of the electronic component 6 mounted on the mounting portion 1a is electrically connected to a portion of the wiring conductor 2 exposed to the mounting portion 1a via a bonding wire or solder.

配線導体2は、タングステン、モリブデン、マンガン、銅、銀、金等の金属材料からなり、例えばタングステンから成る場合、タングステン粉末に適当な有機バインダー,溶剤を添加混合して得たタングステンペーストを、絶縁基体1となるセラミックグリーンシートに従来周知のスクリーン印刷法により所定パターンに印刷塗布し、これを絶縁基体1となるセラミックグリーンシートとともに焼成することによって、所定のパターンに被着形成される。   The wiring conductor 2 is made of a metal material such as tungsten, molybdenum, manganese, copper, silver, or gold. For example, when it is made of tungsten, the tungsten paste obtained by adding and mixing an appropriate organic binder and solvent to tungsten powder is insulated. The ceramic green sheet to be the base 1 is printed and applied in a predetermined pattern by a well-known screen printing method, and is fired together with the ceramic green sheet to be the insulating base 1 to form a predetermined pattern.

また、絶縁基体1は、上面外周部に、搭載部1aを取り囲むようにしてろう付け用金属層4が形成されているとともに、ろう付け用金属層4に金属枠体3が、ろう材8を介してろう付けされている。   The insulating base 1 has a brazing metal layer 4 formed on the outer periphery of the upper surface so as to surround the mounting portion 1a, and the metal frame 3 and the brazing material 8 on the brazing metal layer 4. Is brazed through.

ろう付け用金属層4は、絶縁基体1の上面外周に金属枠体3をろう付けするための下地金属層として作用し、タングステン、モリブデン、マンガン、銅、銀、金等の金属材料により形成される。   The brazing metal layer 4 acts as a base metal layer for brazing the metal frame 3 to the outer periphery of the upper surface of the insulating substrate 1 and is formed of a metal material such as tungsten, molybdenum, manganese, copper, silver, gold or the like. The

ろう付け用金属層4は、生産性等を考慮すれば配線導体2と同種の金属材料により形成することが好ましく、例えば、タングステンから成る場合であれば、上述の配線導体2を形成するのと同様のタングステンペーストを絶縁基体1となるセラミックグリーンシートのうち搭載部1aを取り囲む部位に枠状のパターンに印刷塗布しておくことにより形成される。   The metal layer 4 for brazing is preferably formed of the same metal material as the wiring conductor 2 in consideration of productivity and the like. For example, in the case of being made of tungsten, the above-described wiring conductor 2 is formed. The same tungsten paste is formed by printing and applying a frame-like pattern on a portion surrounding the mounting portion 1a of the ceramic green sheet serving as the insulating substrate 1.

また金属枠体3は、電子部品6が搭載される搭載部1aを気密封止するための側壁として作用し、金属枠体3の上面に蓋体5を取着することにより、搭載部1aに搭載された電子部品6が絶縁基体1と金属枠体3と蓋体5とから成る容器の内部に気密封止される。   Further, the metal frame 3 acts as a side wall for hermetically sealing the mounting portion 1a on which the electronic component 6 is mounted, and the lid 5 is attached to the upper surface of the metal frame 3 so that the mounting portion 1a is attached to the mounting portion 1a. The mounted electronic component 6 is hermetically sealed inside a container composed of the insulating base 1, the metal frame 3, and the lid 5.

金属枠体3は、鉄−ニッケル−コバルト合金や鉄−ニッケル合金等の金属材料からなり、例えば鉄−ニッケル−コバルト合金からなる場合、鉄−ニッケル−コバルト合金の板材に適当な圧延加工や打抜き加工、エッチング加工等の加工を施すことにより形成される。   The metal frame 3 is made of a metal material such as an iron-nickel-cobalt alloy or an iron-nickel alloy. For example, when the metal frame 3 is made of an iron-nickel-cobalt alloy, the metal frame 3 is appropriately rolled or punched into an iron-nickel-cobalt alloy plate It is formed by processing such as processing and etching processing.

また、金属枠体3のろう付け用金属層4に対するろう付けは、銀ろう等のろう材8を介して行われ、例えば、金属枠体3をろう付け用金属層4上面に、間に枠状の銀−銅共晶ろう等の銀ろう材を介して位置決めセットし、ろう付け用の炉等を用いて約800℃〜900℃に加熱ろう付けすることにより行われる。   The brazing of the metal frame 3 to the brazing metal layer 4 is performed via a brazing material 8 such as silver brazing. For example, the metal frame 3 is placed on the upper surface of the brazing metal layer 4 and the frame is interposed therebetween. It is set by positioning through a silver brazing material such as a silver-copper eutectic braze, and brazing at about 800 ° C. to 900 ° C. using a brazing furnace or the like.

本発明の電子部品収納用パッケージ7においては、金属枠体3の外周が、絶縁基体1の外周よりも外側に位置している。   In the electronic component storage package 7 of the present invention, the outer periphery of the metal frame 3 is positioned outside the outer periphery of the insulating substrate 1.

金属枠体3の外周を絶縁基体1の外周よりも外側に位置させることにより、金属枠体3の下面の外周部が絶縁基体1と金属枠体3との接合面よりも外側に露出して突出することになり、この露出した分だけ金属枠体3に対するろう材8の接合面積が大きくなるとともに、金属枠体3の下面外周でろう材8のメニスカス(ろう材の溜り部)を大きく形成することができるため、絶縁基体1が小型化されたとしても、金属枠体3を絶縁基体1に対して強固にろう付けしておくことができる。   By positioning the outer periphery of the metal frame 3 outside the outer periphery of the insulating base 1, the outer peripheral portion of the lower surface of the metal frame 3 is exposed to the outside of the joint surface between the insulating base 1 and the metal frame 3. As a result of the protrusion, the bonding area of the brazing material 8 to the metal frame 3 is increased by the exposed amount, and a meniscus (a brazing material reservoir) of the brazing material 8 is formed on the outer periphery of the lower surface of the metal frame 3. Therefore, even if the insulating base 1 is downsized, the metal frame 3 can be firmly brazed to the insulating base 1.

この場合、金属枠体3の外周部分が絶縁基体1の外側に突出した形状になるが、金属枠体3は外部電気回路基板には直接接していないので、外部電気回路基板にチップ状の電子素子等を接続する際に金属枠体3が妨げになることはほとんどなく、これにより外部電気回路基板にチップ状の電子素子等を実装する面積を容易に確保することができる。   In this case, the outer peripheral portion of the metal frame 3 protrudes to the outside of the insulating base 1, but the metal frame 3 is not in direct contact with the external electric circuit board. When the elements are connected, the metal frame 3 is hardly hindered, so that it is possible to easily secure an area for mounting the chip-shaped electronic elements on the external electric circuit board.

その結果、本発明によれば、絶縁基体1の外形寸法を小型化することが可能で、かつ金属枠体3を絶縁基体1に強固に接合することが可能な、小型で気密封止の信頼性に優れた電子部品収納用パッケージ7を提供することができる。   As a result, according to the present invention, it is possible to reduce the outer dimensions of the insulating base 1 and to reliably join the metal frame 3 to the insulating base 1 in a small and hermetic sealing reliability. It is possible to provide the electronic component storage package 7 having excellent performance.

また、金属枠体3の外周を絶縁基体1の外周よりも外側に位置させる際、金属枠体3の外周が、絶縁基体1の外周から0.5mm未満の位置になると、ろう材8の金属枠体3に対する接合面積を十分に大きくしたり、ろう材8のメニスカスを十分に大きく形成したりすることが難しくなる傾向があり、金属枠体3を絶縁基体1に対して強固にろう付けすることが難しくなる傾向がある。従って、前記金属枠体3の外周は、絶縁基体1の外周よりも0.5mm以上外側に位置させておくことが好ましく、電子部品収納用パッケージ7をより有効に小型化することを考慮すると、0.5mm以上3mm以下の範囲で外側に位置させておくことがより一層好ましい。   Further, when the outer periphery of the metal frame 3 is positioned outside the outer periphery of the insulating base 1, the metal of the brazing material 8 is positioned when the outer periphery of the metal frame 3 is less than 0.5 mm from the outer periphery of the insulating base 1. There is a tendency that it becomes difficult to sufficiently increase the bonding area with respect to the frame 3 or to form a sufficiently large meniscus of the brazing material 8, and the metal frame 3 is firmly brazed to the insulating substrate 1. Tend to be difficult. Therefore, it is preferable that the outer periphery of the metal frame 3 be positioned 0.5 mm or more outside the outer periphery of the insulating base 1, and considering that the electronic component storage package 7 is more effectively reduced in size, It is even more preferable to locate the outside in the range of 0.5 mm or more and 3 mm or less.

なお、金属枠体3の形状は、絶縁基体1の形状に対応するように四角枠状であることが好ましい。これにより、半導体集積回路素子や圧電振動子等の一般に四角形状である電子部品6を無駄なスペースを取ることなく効率よく取り囲むものとなっている。この場合、金属枠体3は、各角部を円弧状に面取りし、角部でカケ等が生じることを防止することが好ましい。   The shape of the metal frame 3 is preferably a square frame so as to correspond to the shape of the insulating substrate 1. As a result, the electronic component 6 that is generally rectangular, such as a semiconductor integrated circuit element or a piezoelectric vibrator, can be efficiently surrounded without taking a useless space. In this case, the metal frame 3 is preferably chamfered in a circular arc shape at each corner to prevent the occurrence of chipping or the like at the corner.

また、本発明の電子部品収納用パッケージ7において、前記ろう付け用金属層4は、図2に示すように、その少なくとも一部が絶縁基体1の側面に延出されている。 In the electronic component storing package 7 of the present invention, the brazing metal layer 4, as shown in FIG. 2, at least a portion of that it has been extended to the side surface of the insulating substrate 1.

ろう付け用金属層4について、その少なくとも一部を絶縁基体1の側面に延出させておくことにより、ろう材8が金属枠体3の下面から絶縁基体1の側面のろう付け用金属層4の延出部分にかけて一体的に接合するので、ろう材8の金属枠体3および絶縁基体1に対する接合面積を広く確保することができ、またろう材8に大きなメニスカスを形成することができ、その結果、金属枠体3の下面と絶縁基体1の上面との接合面積が小さくなったとしても、金属枠体3を絶縁基体1に対して強固に接合させて、気密封止の信頼性に優れた電子部品収納用パッケージを提供することができる。 About the brazing metal layer 4, at least a part of the brazing metal layer 4 is extended to the side surface of the insulating base 1, so that the brazing material 8 is brazed from the lower surface of the metal frame 3 to the side surface of the insulating base 1. As a result, the bonding area of the brazing material 8 to the metal frame 3 and the insulating base 1 can be secured widely, and a large meniscus can be formed in the brazing material 8. result, even if the bonding area between the lower surface of the metal frame 3 and the upper surface of the insulating substrate 1 is reduced, the metal frame 3 is joined to the strong solid with respect to the insulating base 1, the reliability of the hermetic seal An excellent electronic component storage package can be provided.

ろう付け用金属層4を絶縁基体1の側面に延出させる際、その延出長さが0.3mm未満になると、角部において有効にろう材8の接合面積を大きくしたり、良好なメニスカスを形成したりすることが困難となる傾向があり、金属枠体3と絶縁基体1との接合を補強することが難しくなるおそれがある。従って、ろう付け用金属層7は、絶縁基体1の側面に0.3mm以上の長さで延出させておくことが好ましい。   When the brazing metal layer 4 is extended to the side surface of the insulating base 1, if the extension length is less than 0.3 mm, the bonding area of the brazing material 8 is effectively increased at the corners, or a good meniscus is obtained. There is a tendency that it becomes difficult to form the metal frame 3 and it becomes difficult to reinforce the bonding between the metal frame 3 and the insulating substrate 1. Therefore, the brazing metal layer 7 is preferably extended to the side surface of the insulating substrate 1 with a length of 0.3 mm or more.

また、ろう付け用金属層4を絶縁基体1の側面に延出させる際、絶縁基体1が四角形状の角部を有する形状、少なくとも絶縁基体1の各角部において延出させておく。絶縁基体1の各角部において絶縁基体1の側面にろう付け用金属層4を延出させておくことにより、金属枠体3に蓋体5を溶接等により接合するときに大きな応力が加わる各角部において、ろう材8の接合面積を大きくするとともに、ろう材8の大きな溜まりを形成して良好なメニスカス形状とすることができ、絶縁基体1と金属枠体3との接合を有効に補強することができるため、金属枠体3と絶縁基体1の接合の長期信頼性を優れたものとし、気密封止の信頼性に極めて優れた小型の電子部品収納用パッケージを提供することができる。従って、ろう付け用金属層4は、絶縁基体1の少なくとも角部において0.3mm以上の長さで延出させておくことがより一層好ましい。 Further, when causing extend the brazing metal layer 4 on the side surface of the insulating base 1, a shape where the insulating substrate 1 has a square shaped corner, Contact Ku by extending at least each corner of the insulating base 1. By keeping by extending the brazing metal layer 4 on the side surface of the insulating base 1 at each corner of the insulating base 1, the large stress when you joined by welding or the like lid 5 to the metal frame 3 is applied at the corners, with increasing bonding area of the brazing material 8, to form a large reservoir of the brazing material 8 can be a good meniscus shape, enable the bonding of the insulating base 1 and the metal frame 3 it is possible to reinforce, that the long-term reliability of the bonding of the metal frame 3 and the insulating substrate 1 assumes a superior, provides very good small electronic component storing package reliability hermetic seal it can. Therefore, it is even more preferable that the brazing metal layer 4 is extended with a length of 0.3 mm or more at least at the corners of the insulating substrate 1.

また、前記ろう付け用金属層4の延出部分の幅は、1mm以上としておくことが好ましい。延出部分の幅が1mm未満では、ろう材8の接合面積を有効に確保することが難しく、金属枠体3の絶縁基体1に対する接合の強度を有効に補強することが難しい。   The width of the extended portion of the brazing metal layer 4 is preferably 1 mm or more. If the width of the extended portion is less than 1 mm, it is difficult to effectively secure the bonding area of the brazing material 8 and it is difficult to effectively reinforce the bonding strength of the metal frame 3 to the insulating base 1.

また、金属枠体3は、少なくとも絶縁基体1の上面に接合される部位よりも外側の下面を、下方または上方に向けて傾斜させておくと、金属枠体3の外形寸法を大きくすることなく、ろう材8の金属枠体3との接合面積をより大きく確保することができ、より一層小型で気密封止の信頼性に優れた電子部品収納用パッケージを提供することができる。従って、前記金属枠体3は、少なくとも絶縁基体1の上面に接合される部位よりも外側の下面を、下方または上方に向けて傾斜させておくことが好ましい。   Further, when the metal frame 3 is inclined with the lower surface at least outside the portion bonded to the upper surface of the insulating substrate 1 being inclined downward or upward, the external dimensions of the metal frame 3 are not increased. In addition, the bonding area of the brazing material 8 to the metal frame 3 can be secured larger, and an electronic component storage package that is even smaller and has excellent airtight sealing reliability can be provided. Therefore, it is preferable that the metal frame 3 is inclined such that at least the lower surface outside the portion bonded to the upper surface of the insulating substrate 1 is inclined downward or upward.

そして、電子部品収納用パッケージ7の搭載部1aに電子部品6を搭載するとともにその電極を配線導体2に半田やボンディングワイヤ等の導電性接続材を介して電気的に接続し、その後、金属枠体3の上面に蓋体5を接合して電子部品6を気密封止することにより、本発明の電子装置9が構成される。   Then, the electronic component 6 is mounted on the mounting portion 1a of the electronic component storage package 7, and the electrode is electrically connected to the wiring conductor 2 via a conductive connecting material such as solder or bonding wire. The electronic device 9 of the present invention is configured by joining the lid 5 to the upper surface of the body 3 and hermetically sealing the electronic component 6.

金属枠体3に対する蓋体5の接合は、金属枠体3の上面の外周部と蓋体5の下面の外周部を位置合わせして載せ、蓋体5の外周部に沿ってシーム溶接や電子ビーム溶接等の溶接を施すこと等により行なうことができる。   The lid 5 is joined to the metal frame 3 by aligning and placing the outer peripheral portion of the upper surface of the metal frame 3 and the outer peripheral portion of the lower surface of the lid body 5 along the outer peripheral portion of the lid 5. It can be performed by performing welding such as beam welding.

本発明の電子装置9は、上述した構成の電子部品収納用パッケージ7の搭載部1aに電子部品6を搭載し、金属枠体3の上面にろう材8を介して蓋体5を接合することにより形成されていることから、気密封止の信頼性に優れた小型で高信頼性のものとすることができる。   In the electronic device 9 of the present invention, the electronic component 6 is mounted on the mounting portion 1a of the electronic component storage package 7 having the above-described configuration, and the lid 5 is joined to the upper surface of the metal frame 3 via the brazing material 8. Therefore, it can be made small and highly reliable with excellent hermetic sealing reliability.

なお、本発明は上述の実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内であれば種々の変更が可能である。   Note that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention.

例えば、前記絶縁基体1の外側面と金属枠体3の外側面との間の距離は、全周にわたって同じ距離とする必要はなく、例えば、金属枠体3に蓋体5を溶接等で接合するときの応力が大きく作用する角部分で広くして、金属枠体3の下面に対する銀ろうの接合面積を十分に確保するようにしてもよい。   For example, the distance between the outer surface of the insulating base 1 and the outer surface of the metal frame 3 does not have to be the same over the entire circumference. For example, the lid 5 is joined to the metal frame 3 by welding or the like. It is also possible to widen the corner portion where the stress at the time of large action acts to ensure a sufficient bonding area of the silver brazing to the lower surface of the metal frame 3.

本発明の電子部品収納用パッケージを用いた電子装置の実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the electronic device using the package for electronic component accommodation of this invention. 本発明の電子部品収納用パッケージおよび電子装置の他の実施例の要部拡大断面図である。It is a principal part expanded sectional view of the other Example of the electronic component storage package and electronic device of this invention.

符号の説明Explanation of symbols

1・・・絶縁基体
1a・・搭載部
2・・・配線導体
3・・・金属枠体
4・・・ろう付け用金属層
5・・・蓋体
6・・・電子部品
7・・・電子部品収納用パッケージ
8・・・ろう材
9・・・電子装置
DESCRIPTION OF SYMBOLS 1 ... Insulation base | substrate 1a .... Mounting part 2 ... Wiring conductor 3 ... Metal frame 4 ... Metal layer 5 for brazing ... Lid body 6 ... Electronic component 7 ... Electronic Component storage package 8 ... brazing material 9 ... electronic device

Claims (4)

上面に電子部品の搭載部を有する四角形状の絶縁基体と、該絶縁基体の前記搭載部から外表面にかけて導出された配線導体と、前記絶縁基体の上面外周部に形成され、前記搭載部を取り囲み、前記絶縁基体の少なくとも各角部において前記絶縁基体の側面に延出しているろう付け用金属層と、下面が前記ろう付け用金属層にろう付けされる金属枠体と、前記搭載部を覆うようにして前記金属枠体の上面に取着される蓋体とを具備し、前記金属枠体の外周が前記絶縁基体の外周よりも外側に位置することを特徴とする電子部品収納用パッケージ。   A rectangular insulating base having an electronic component mounting portion on the upper surface, a wiring conductor led out from the mounting portion to the outer surface of the insulating base, and an outer peripheral portion of the upper surface of the insulating base, surrounding the mounting portion And a brazing metal layer extending to a side surface of the insulating base at at least each corner of the insulating base, a metal frame having a lower surface brazed to the brazing metal layer, and the mounting portion. In this way, the electronic component storing package is provided with a lid attached to the upper surface of the metal frame, and the outer periphery of the metal frame is located outside the outer periphery of the insulating base. 前記金属枠体の外周は、前記絶縁基体の外周よりも0.5mm以上外側に位置することを特徴とする請求項1記載の電子部品収納用パッケージ。   2. The electronic component storage package according to claim 1, wherein an outer periphery of the metal frame is located 0.5 mm or more outside an outer periphery of the insulating base. 前記ろう付け用金属層の前記絶縁基体の側面に延出する長さが0.3mm以上であることを特徴とする請求項1または請求項2に記載の電子部品収納用パッケージ。   3. The electronic component storage package according to claim 1, wherein a length of the brazing metal layer extending to a side surface of the insulating base is 0.3 mm or more. 請求項1乃至請求項3のいずれかに記載の電子部品収納用パッケージの前記搭載部に電子部品を搭載するとともに、該電子部品の電極を前記配線導体に電気的に接続し、かつ前記金属枠体の上面に前記蓋体を取着して前記電子部品を気密に封止したことを特徴とする電子装置。 An electronic component is mounted on the mounting portion of the electronic component storage package according to any one of claims 1 to 3 , and an electrode of the electronic component is electrically connected to the wiring conductor, and the metal frame An electronic device, wherein the lid is attached to an upper surface of the body and the electronic component is hermetically sealed.
JP2004010300A 2004-01-19 2004-01-19 Electronic component storage package and electronic device Expired - Fee Related JP4332037B2 (en)

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