JP3490309B2 - Wiring board and method of manufacturing the same - Google Patents

Wiring board and method of manufacturing the same

Info

Publication number
JP3490309B2
JP3490309B2 JP30904798A JP30904798A JP3490309B2 JP 3490309 B2 JP3490309 B2 JP 3490309B2 JP 30904798 A JP30904798 A JP 30904798A JP 30904798 A JP30904798 A JP 30904798A JP 3490309 B2 JP3490309 B2 JP 3490309B2
Authority
JP
Japan
Prior art keywords
wiring board
liquid crystal
crystal polymer
wiring
wiring pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP30904798A
Other languages
Japanese (ja)
Other versions
JP2000138422A (en
Inventor
昭一 山田
洋 大平
章 米沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamaichi Electronics Co Ltd
Original Assignee
Yamaichi Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamaichi Electronics Co Ltd filed Critical Yamaichi Electronics Co Ltd
Priority to JP30904798A priority Critical patent/JP3490309B2/en
Publication of JP2000138422A publication Critical patent/JP2000138422A/en
Application granted granted Critical
Publication of JP3490309B2 publication Critical patent/JP3490309B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は配線パターン面を絶
縁被覆した構成の配線基板、およびその配線基板の製造
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wiring board having a structure in which a wiring pattern surface is covered with insulation, and a method for manufacturing the wiring board.

【0002】[0002]

【従来の技術】電子機器類の小型化などに伴って、回路
を形成する配線基板においてもコンパクト化、もしくは
高密度配線などが要求されている。このような要求に対
応して、図4に要部構成を拡大し断面的に示すような配
線基板が開発されている。図4において、1は厚さ25μ
m 程度の接着剤付きポリイミド樹脂フィルム(絶縁支持
体)、2は前記ポリイミド樹脂フィルム1主面に形成さ
れた配線パターン、3は前記配線パターン2の所要領域
2aを露出させて、配線パターン2形成面を被覆する厚さ
25μm 程度の接着剤付きポリイミド樹脂フィルム(カバ
ーフィルム)、4はスルホール接続部である。なお、5
a,5bはいずれも接着剤層であり、また、配線パターン
2の露出領域2aは、電子部品もしくは他の回路配線との
電気的な接続部である。
2. Description of the Related Art With the miniaturization of electronic devices, there is a demand for downsizing or high-density wiring of a wiring board for forming a circuit. In response to such a demand, a wiring board has been developed in which an essential configuration is enlarged and shown in cross section in FIG. In FIG. 4, 1 is 25 μ thick
A polyimide resin film (insulating support) with an adhesive of about m 2 is a wiring pattern formed on the main surface of the polyimide resin film 1, and 3 is a required area of the wiring pattern 2.
Thickness that exposes 2a and covers the wiring pattern 2 formation surface
A polyimide resin film (cover film) with an adhesive of about 25 μm, 4 is a through-hole connecting portion. In addition, 5
Each of a and 5b is an adhesive layer, and the exposed area 2a of the wiring pattern 2 is an electrical connection portion with an electronic component or another circuit wiring.

【0003】 そして、上記図4に示した構成の配線基
板は、次のようにして製造されている。すなわち、厚さ
25μm 程度のポリイミド樹脂フィルム1の主面に、接着
剤層5aを介して厚さ12〜18μm 程度の銅箔を貼り合わせ
た銅箔貼りシートを用意する。次いで、この銅箔貼りシ
ートの所定領域に穿孔加工を施し、層間接続用の貫通孔
を設けた後、銅箔について穿孔内壁面に導電体層を形成
る。その後、フォトエッチング処理を施して、配線パ
ターン2を形成し、前記両面の配線パターン2間が接続
された配線パターニング2付きポリイミド樹脂フィルム
1とする。
The wiring board having the structure shown in FIG. 4 is manufactured as follows. Ie thickness
A copper foil sticking sheet is prepared by sticking a copper foil having a thickness of about 12 to 18 μm to the main surface of the polyimide resin film 1 having a thickness of about 25 μm via the adhesive layer 5a. Then, a perforation process is performed on a predetermined area of this copper foil-clad sheet to form a through hole for interlayer connection, and then a conductor layer is formed on the inner wall surface of the perforation of the copper foil.
You. Then, photo-etching treatment is performed to form the wiring pattern 2, and the polyimide resin film 1 with the wiring pattern 2 in which the wiring patterns 2 on both surfaces are connected to each other is obtained.

【0004】一方、所要の領域に打ち抜きプレス加工を
施した厚さ15μm 程度の接着剤層付きの厚さ12μm 程度
のポリイミド樹脂フィルム(カバーフィルム)3を用意
する。その後、前記ポリイミド樹脂フィルム1の配線パ
ターニング2面に、このポリイミド樹脂フィルム(カバ
ーフィルム)3を位置合わせ・積層・配置して、配線パ
ターニング2面に圧着・一体化させることにより製造さ
れている。
On the other hand, a polyimide resin film (cover film) 3 having a thickness of about 12 μm with an adhesive layer having a thickness of about 15 μm prepared by punching and pressing in a required area is prepared. After that, the polyimide resin film (cover film) 3 is aligned, laminated, and arranged on the wiring patterning 2 surface of the polyimide resin film 1 and pressure-bonded and integrated on the wiring patterning 2 surface.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、上記配
線基板の場合は、コンパクト化できること、あるいはフ
レキシブル的であることなどの利点を有するが、一方で
は、次のような不都合がある。すなわち、(a) ポリイミ
ド樹脂フィルム(絶縁性支持体)1と配線パターン2
(銅箔など)とを接合・一体化するため、また、(b) 配
線パターン2の形成面にカバーフィルム3を接合・一体
化するために、それぞれ接着剤層5a,5bを介挿してい
る。ところで、前記接着剤層5a,5bは、一般的に、難燃
性化が要求されており、この要求に対応して、たとえば
ハロゲン化合物、燐化合物などの難燃化剤が添加・配合
されている。
However, in the case of the above wiring board, there are advantages such as compactness and flexibility, but on the other hand, there are the following disadvantages. That is, (a) polyimide resin film (insulating support) 1 and wiring pattern 2
Adhesive layers 5a and 5b are respectively interposed in order to join / integrate with (such as copper foil) and (b) join / integrate the cover film 3 on the surface on which the wiring pattern 2 is formed. . Incidentally, the adhesive layers 5a and 5b are generally required to have flame retardancy, and in response to this requirement, for example, a flame retardant such as a halogen compound or a phosphorus compound is added / blended. There is.

【0006】ここで、難燃化剤を含有する接着剤層5a,
5bの介挿・存在は、構成された配線基板自体の電気的な
特性に悪影響を及ぼすばかりでなく、配線基板の製造工
程上、または配線基板の破棄処分などにおいて、その難
燃化剤が環境問題を提起する恐れもある。
Here, the adhesive layer 5a containing a flame retardant,
The presence / absence of 5b not only adversely affects the electrical characteristics of the configured wiring board itself, but also the flame retardant is environmentally friendly in the manufacturing process of the wiring board or in the disposal of the wiring board. It may pose a problem.

【0007】本発明は、上記事情に対処してなされたも
ので、接着剤による接合一体化の構成を省略した実用性
が高く、また、環境問題を軽減し、かつ従来の基板より
も電気特性、特に高速信号を劣化させることなく伝送で
きる配線基板、およびその製造方法の提供を目的とす
る。
The present invention has been made in consideration of the above circumstances and has high practicability by omitting the constitution of joining and unifying with an adhesive, reduces environmental problems, and has electric characteristics more than conventional substrates. In particular, it is an object of the present invention to provide a wiring board that can transmit a high-speed signal without deteriorating and a manufacturing method thereof.

【0008】[0008]

【課題を解決するための手段】請求項1の発明は、第1
液晶ポリマーから成る絶縁体層および前記絶縁体層
少なくとも一主面に形成された配線パターンを有する
ア配線板と、前記第1の液晶ポリマーより融点が低い第
2の液晶ポリマーから成り、前記コア配線板の前記配線
パターン形成された面に一体化され、かつ前記配線パ
ターンの所要箇所を露出するための穿孔を有する絶縁被
覆層とを備えていることを特徴とする配線基板である。
The invention according to claim 1 is the first
A core wiring board having an insulating layer made of the liquid crystal polymer and a wiring pattern formed on at least one main surface of the insulating layer ; and a melting point lower than the first liquid crystal polymer.
Consists of two liquid crystal polymers, said wiring pattern of the core wiring board is integrated in the formed surface, and includes a insulation coating layer that have a perforation for exposing the desired portions of the wiring pattern The wiring board is characterized in that

【0009】 請求項1記載の配線基板において、コア
配線板は、多層配線パターン型であってもよいコア配
線板の多層配線パターン型により、液晶ポリマーが有す
る本来の特長である耐湿性、高い電気絶縁性と高速信号
伝送安定性などが生かされながら、高機能化された配線
回路を提供できる。
[0009] In the wiring board according to claim 1, the core wiring board may be a multilayer wiring pattern type. Core distribution
Due to the multilayer wiring pattern type of the wire board, the liquid crystal polymer has
Moisture resistance, high electrical insulation and high-speed signals
Highly functional wiring while making the most of transmission stability
A circuit can be provided.

【0010】 また、請求項1記載の配線基板におい
て、コア配線板の配線パターン層間は絶縁体層を貫挿し
た導電性バンプで接合されていてもよいコア配線板の
配線パターン層間の接続が、絶縁体層を貫挿した導電性
バンプで成されているため、微細で、かつ信頼性の高い
接続を備えた配線回路を提供できる。
Further , in the wiring board according to the first aspect , the wiring pattern layers of the core wiring board may be joined by a conductive bump having an insulating layer inserted therethrough . Of core wiring board
The connection between the wiring pattern layers is conductive with the insulation layer inserted.
Fine and highly reliable because it is made of bumps
A wired circuit with connections can be provided.

【0011】[0011]

【0012】 また、請求項1記載の配線基板におい
て、コア配線板の配線パターンは銅箔製とすることがで
きるコア配線板の配線パターンが銅箔製であると、設
計し易く、かつ回路特性の良好な配線回路を提供でき
る。
Further, in the wiring board according to claim 1 , the wiring pattern of the core wiring board may be made of copper foil.
Can . If the wiring pattern of the core wiring board is made of copper foil,
We can provide a wiring circuit that is easy to measure and has good circuit characteristics.
It

【0013】 また、請求項1記載の配線基板におい
て、絶縁被覆層に接するコア配線板の配線パターンは、
コア配線板面と平坦面を成しているようにしてもよい
コア配線板の配線パターンがコア配線板に圧入的に配置
され、コア配線板面に対して平坦面を成しているため、
絶縁被覆層との良好な密着性が図られ、信頼性の高い配
線回路を提供できる。
Further, in the wiring board according to claim 1 , the wiring pattern of the core wiring board in contact with the insulating coating layer is:
You may make it a flat surface with the core wiring board surface.
The wiring pattern of the core wiring board is press-fitted into the core wiring board.
And is a flat surface with respect to the core wiring board surface,
Good adhesion with the insulation coating layer ensures high reliability.
A line circuit can be provided.

【0014】 請求項の発明は、第1の液晶ポリマー
から成る絶縁体層の少なくとも一主面に導電性金属箔を
載置し、加圧・加熱して一体化する工程と、前記導電性
金属箔をパターニングして前記一体化された前記絶縁体
層と前記導電性金属箔とをコア配線板化する工程と、前
記コア配線板の前記導電性金属箔パターニング面に、前
記第1の液晶ポリマーより融点が低い第2の液晶ポリマ
ーから成る絶縁体シートを位置決め配置し加圧・加熱
してさらに一体化する工程と、前記コア配線板に一体化
された絶縁体シートの所定領域を穿孔加工し、前記パタ
ーニングされた導電性金属箔の所要箇所を露出させる工
程とを有することを特徴とする。液晶ポリマー本来の特
長である耐湿性、高い電気絶縁性と高速信号伝送安定性
などが生かされ、高機能化された配線回路を歩留まりよ
く提供できる。
[0014] According to a second aspect of the invention, the steps of a conductive metal foil on at least one major surface of the insulating layer composed of the first liquid crystal polymer is placed, integrated pressure and heat to the front Kishirube the integrated the insulator a conductive metal foil is patterned
A step of forming a layer and the conductive metal foil into a core wiring board, and forming a core wiring board on the conductive metal foil patterning surface of the core wiring board.
Insulation sheet made of the second liquid crystal polymer having a lower melting point than that of the first liquid crystal polymer is positioned and arranged , and pressure / heating is performed.
And further integration with the core wiring board
A predetermined area of the formed insulating sheet is perforated to form the pattern.
And a step of exposing a required portion of the conductive metal foil subjected to the aging . Original characteristics of liquid crystal polymer
Long moisture resistance, high electrical insulation and high-speed signal transmission stability
Yield a highly functional wiring circuit
Can be provided.

【0015】 ここで、導電性金属箔は、銅箔とするこ
とができる配線パターンの形成に銅箔を使用すること
により、より容易に、高機能化された配線回路を歩留ま
りよく提供できる。
Here, the conductive metal foil should be a copper foil .
You can Use copper foil to form the wiring pattern
This makes it easier to yield high-performance wiring circuits.
Can be better provided.

【0016】 上記各態様において、コア配線板の絶縁
体層(絶縁性支持体)、および配線パターン形成面を被
覆する絶縁被覆層(カバーフィルムないしカバーシー
ト)を形成する液晶ポリマーは、たとえばキシダール
(商品名.Dartco社製)、ベクトラ(商品名.Celanese
社製)で代表される多軸配向の熱可塑性ポリマーであ
る。ここで、液晶ポリマーは、その分子構造によって、
その融点なども異なっており、同一の分子構造でも、結
晶構造や添加物によって融点が変動する。たとえばベク
トランAタイプ(融点, 285℃)、ベクトランCタイプ
(融点, 325℃)、BIACフィルム(融点, 335℃)
などが例示される。
In each of the above aspects , the liquid crystal polymer forming the insulating layer (insulating support) of the core wiring board and the insulating coating layer (cover film or cover sheet) that covers the wiring pattern forming surface is, for example, kishdal ( Trade name. Made by Dartco, Vectra (trade name. Celanese
Manufactured by the company). Here, the liquid crystal polymer, by its molecular structure,
The melting points and the like are also different, and even with the same molecular structure, the melting points vary depending on the crystal structure and additives. For example, Vectran A type (melting point, 285 ° C), Vectran C type (melting point, 325 ° C), BIAC film (melting point, 335 ° C)
Are exemplified.

【0017】また、コア配線板の配線パターン層間を絶
縁離隔する絶縁体層の厚さは、一般的に、25〜 100μm
程度であり、一方、カバーフィルムないしカバーシート
の厚さは、一般的に、10〜50μm 程度である。ここで、
絶縁体層を複数層の積層で構成する場合、同種の絶縁体
シートや液晶ポリマーの組み合わせでも、あるいは異種
の絶縁体シートや液晶ポリマー組み合わせでもよい。特
に、加熱工程などを要する場合は、比較的融点の高い絶
縁体シートや液晶ポリマーに対し、比較的融点の低い絶
縁体シートや液晶ポリマーを組み合わせることが好まし
い。
Further, the thickness of the insulating layer for insulating and separating the wiring pattern layers of the core wiring board is generally 25 to 100 μm.
On the other hand, the thickness of the cover film or cover sheet is generally about 10 to 50 μm. here,
When the insulating layer is formed by laminating a plurality of layers, a combination of insulating sheets and liquid crystal polymers of the same kind or a combination of different insulating sheets and liquid crystal polymers may be used. Especially when a heating step or the like is required, it is preferable to combine an insulating sheet or liquid crystal polymer having a relatively high melting point with an insulating sheet or liquid crystal polymer having a relatively low melting point.

【0018】なお、一般的に、液晶ポリマーは吸湿性が
ほとんどなく、誘電率が約 3.0(1MHz)程度であり、広い
周波数領域で安定しているだけでなく、たとえば熱プレ
スによって熱変形し、かつ対向する配線パターン面や液
晶ポリマー層(絶縁支持体)面に対して容易に接合・一
体化する。この場合、配線パターン面、液晶ポリマー面
の粗化された面での場合、固着・一体化がより強固にな
る。
In general, liquid crystal polymers have almost no hygroscopicity, a dielectric constant of about 3.0 (1 MHz), are stable in a wide frequency range, and are thermally deformed by, for example, hot pressing. Also, it is easily joined and integrated with the opposing wiring pattern surface or liquid crystal polymer layer (insulating support) surface. In this case, if the wiring pattern surface or the liquid crystal polymer surface is a roughened surface, the fixing and integration will be stronger.

【0019】 また、上記各態様において、コア配線板
は、フレキシブル性の要求に対応すると片面パターン型
もしくは両面パターン型が望ましいが、配線回路の高機
能性などの要求に対しては多層配線型が望まれる。そし
て、配線パターン層間の電気的な接続を要する構成の場
合は、配線パターン面の所定位置に配置した導電性バン
プ先端部の絶縁体層貫挿により、絶縁離隔された他の配
線パターン面に対接させる構造を採ると、製造工程を簡
略化できるし、さらに、微細で信頼性の高い配線パター
ン層間の接続が得られる。
Further, in each of the above aspects , the core wiring board is preferably a single-sided pattern type or a double-sided pattern type in order to meet the requirement of flexibility, but a multilayer wiring type is required for the requirement of high functionality of the wiring circuit. desired. In the case of a structure that requires electrical connection between the wiring pattern layers, the insulation layer is inserted at the tip of the conductive bumps arranged at a predetermined position on the wiring pattern surface so that the other wiring pattern surface is insulated and separated. By adopting the contact structure, the manufacturing process can be simplified, and moreover, fine and highly reliable connection between the wiring pattern layers can be obtained.

【0020】なお、上記配線パターン層間の接続に推奨
した導電性バンプは、導電性ペーストの印刷などで配置
・形成できる。ここで、導電性ペーストは、たとえば
銀,金,銅,半田粉などの導電性粉末、これらの合金粉
末もしくは複合(混合)金属粉末と、樹脂バインダー成
分とを混合して調製されたペースト類が挙げられる。前
記樹脂バインダー成分としては、たとえばポリカーボネ
ート樹脂、ポリスルホン樹脂、ポリエステル樹脂、フェ
ノキシ樹脂などの熱可塑性樹脂、フェノール樹脂、ポリ
イミド樹脂、メラミン樹脂、エポキシ樹脂などの熱硬化
性樹脂などが一般的に挙げられる。
The conductive bumps recommended for connection between the wiring pattern layers can be arranged / formed by printing a conductive paste or the like. Here, the conductive paste is, for example, a paste prepared by mixing conductive powder such as silver, gold, copper, solder powder, alloy powder or composite (mixed) metal powder of these, and a resin binder component. Can be mentioned. Examples of the resin binder component generally include thermoplastic resins such as polycarbonate resin, polysulfone resin, polyester resin and phenoxy resin, and thermosetting resins such as phenol resin, polyimide resin, melamine resin and epoxy resin.

【0021】 上記各態様において、コア配線板の配線
パターンは、一般的に、厚さ 5〜35μm 程度のたとえば
銅、アルミニウムなどの導電性金属箔のフォトエッチン
グで形成される。つまり、液晶ポリマーフィルム面に貼
着された導電性金属箔の選択的なエッチングで配線パタ
ーンが形成される。したがって、一般的に、配線パター
ンは、その厚さ分だけ、液晶ポリマーフィルム面から突
出しているが、これを液晶ポリマーフィルム面に圧入し
て、液晶ポリマーフィルム面と平坦な面とすれば、カバ
ーフィルムの配置・被覆が容易になるだけでなく、凹凸
のないパターンなどの緻密な被覆層を形成するので、ボ
イドの巻き込みを低減できカバーコートの信頼性が向上
すること、また、配線パターンの基板に対する密着強度
が向上する。 発明では、配線パターンを支持する絶
縁体層、および前記配線パターン形成面を被覆する絶縁
被覆層がともに液晶ポリマーで形成され、かつ接着剤層
の介挿も不要となるので、接着剤層が含む難燃化剤に起
因する環境問題など大幅に軽減する。つまり、液晶ポリ
マーが有する本来の特長である耐湿性、高い電気絶縁性
と高速信号伝送安定性を有する信頼性の高い配線回路を
提供できる。また、絶縁体層および絶縁被覆層が、融点
の異なる液晶ポリマーの選択により形成したことに伴っ
て、緻密な一体性が確保されるため、さらに信頼性の高
い配線回路を提供できる。
In each of the above aspects , the wiring pattern of the core wiring board is generally formed by photoetching a conductive metal foil such as copper or aluminum having a thickness of about 5 to 35 μm. That is, the wiring pattern is formed by selectively etching the conductive metal foil attached to the surface of the liquid crystal polymer film. Therefore, in general, the wiring pattern protrudes from the liquid crystal polymer film surface by the thickness thereof, but if this is pressed into the liquid crystal polymer film surface to form a flat surface with the liquid crystal polymer film surface, the cover will be covered. In addition to facilitating the placement and coating of the film, a dense coating layer such as a pattern with no irregularities is formed, so that the inclusion of voids can be reduced and the reliability of the cover coat can be improved. The adhesion strength to In the present invention, the insulating layer that supports the wiring pattern and the insulating coating layer that covers the wiring pattern forming surface are both formed of a liquid crystal polymer, and since an adhesive layer does not need to be interposed, the adhesive layer is It significantly reduces environmental problems such as flame retardants. That is, it is possible to provide a highly reliable wiring circuit having the moisture resistance, high electrical insulation, and high-speed signal transmission stability, which are the original features of the liquid crystal polymer. In addition, the insulation layer and the insulation coating layer have melting points
Associated with the formation by the selection of different liquid crystal polymers
And, because the precise integration is ensured, the reliability is higher.
It is possible to provide a good wiring circuit.

【0022】[0022]

【0023】[0023]

【0024】[0024]

【0025】[0025]

【0026】[0026]

【0027】[0027]

【0028】[0028]

【0029】[0029]

【発明の実施の形態】図1,図2および図3を参照して
実施例を説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment will be described with reference to FIGS. 1, 2 and 3.

【0030】図1は、第1の実施例に係る配線基板の要
部構成を示す断面図である。図1において、6は融点 3
25℃程度、厚さ50μm 程度の液晶ポリマーフィルム(絶
縁体層ないし絶縁性支持体)、7a,7bは前記液晶ポリマ
ーフィルム6の両面に設けられた厚さ12μm 程度の電解
銅箔製の配線パターン、8a,8bは前記配線パターン7a,
7b形成面に一体化し、被覆する融点 285℃程度、厚さ30
μm 程度の液晶ポリマーフィルムである。
FIG. 1 is a sectional view showing the structure of the main part of a wiring board according to the first embodiment. In FIG. 1, 6 is the melting point 3
Liquid crystal polymer film (insulator layer or insulating support) with a thickness of about 25 ° C. and a thickness of about 50 μm, and 7a and 7b are wiring patterns made of electrolytic copper foil with a thickness of about 12 μm provided on both sides of the liquid crystal polymer film 6. , 8a, 8b are the wiring patterns 7a,
7b Forming surface is integrated and covered Melting point: 285 ℃, Thickness: 30
It is a liquid crystal polymer film of about μm.

【0031】ここで、液晶ポリマーフィルム6および配
線パターン7a,7bはコア配線板9を構成しており、ま
た、液晶ポリマーフィルム8a,8bは、所要箇所(もしく
は領域)を穿孔し、前記配線パターン7a,7bの被接続部
10a, 10bを露出させたカバーコートを形成している。
なお、11はコア配線板9の両面に形成されている配線パ
ターン7a,7b間を接続する層間接続部である。この穿孔
方法としては、エキシマ、 YAGあるいは半導体レーザー
光を照射し、選択した領域の液晶ポリマーを揮散させる
方法が適している。勿論、他の方法でもよく、たとえば
選択した領域に予めマスクを配置しておき、カバーフィ
ルムを貼り合わせた後に、前記マスクを除去する手段で
もよい。
Here, the liquid crystal polymer film 6 and the wiring patterns 7a and 7b constitute a core wiring board 9, and the liquid crystal polymer films 8a and 8b are perforated at required portions (or areas) to form the wiring pattern. Connected parts of 7a and 7b
A cover coat is formed exposing 10a and 10b.
Reference numeral 11 is an interlayer connecting portion that connects between the wiring patterns 7a and 7b formed on both surfaces of the core wiring board 9. As the perforation method, a method of irradiating excimer, YAG or semiconductor laser light to volatilize the liquid crystal polymer in the selected region is suitable. Of course, other methods may be used, for example, a mask may be arranged in advance in a selected area, a cover film may be attached, and then the mask may be removed.

【0032】図2は、第2の実施例に係る配線基板の要
部構成を示す断面図である。この実施例は、コア配線板
9が多層配線パターン型で、配線パターン層間がスルホ
ール接続、ヴィア接続された構成を採っている。図2に
おいて、6a,6b,6cは融点 325℃程度、厚さ 100μm 程
度で、かつ積層・一体化した液晶ポリマーフィルム(絶
縁体層)、7a′,7b′は前記液晶ポリマーフィルム6a,
6b,6c面に形成された内層配線パターン、7a,7bは液晶
ポリマーフィルム6b,6c面に形成された外層配線パター
ンである。なお、前記内層配線パターン7a′,7b′およ
び外層配線パターン7a,7bはいずれも厚さ12μm 程度の
電解銅箔製でり、それら配線パターン7a,7b,7a′,7
b′間は導電性バンプ12で接続されている。
FIG. 2 is a sectional view showing the structure of the main part of a wiring board according to the second embodiment. In this embodiment, the core wiring board 9 is of a multi-layer wiring pattern type, and the wiring pattern layers are connected by through-holes or vias. In FIG. 2, 6a, 6b and 6c have a melting point of about 325 ° C. and a thickness of about 100 μm, and are laminated / integrated liquid crystal polymer films (insulator layers), and 7a ′ and 7b ′ are the liquid crystal polymer film 6a,
Inner layer wiring patterns formed on the surfaces 6b and 6c, and 7a and 7b are outer layer wiring patterns formed on the liquid crystal polymer films 6b and 6c. The inner layer wiring patterns 7a ′, 7b ′ and the outer layer wiring patterns 7a, 7b are both made of electrolytic copper foil with a thickness of about 12 μm, and these wiring patterns 7a, 7b, 7a ′, 7b
The b's are connected by the conductive bumps 12.

【0033】また、8a,8bは前記配線パターン7a,7b形
成面に一体化し、被覆する融点 285℃程度、厚さ25μm
程度の液晶ポリマーフィルムである。
Further, 8a and 8b are integrated with the wiring pattern 7a and 7b forming surface and have a melting point of about 285 ° C. and a thickness of 25 μm.
It is a liquid crystal polymer film of a degree.

【0034】ここで、液晶ポリマーフィルム6a,6b,6
c、および配線パターン7a,7b,7a′,7b′は、コア配
線板9′を構成している。また、液晶ポリマーフィルム
8a,8bは、所要箇所(もしくは領域)を YAGレーザの高
調波で穿孔し、前記配線パターン7a,7bの被接続部 10
a, 10bを露出させたカバーコートを形成している。な
お、11はコア配線板9′の両面に形成されている配線パ
ターン7a,7b間を接続する層間接続部である。
Here, the liquid crystal polymer films 6a, 6b, 6
c and the wiring patterns 7a, 7b, 7a ', 7b' constitute a core wiring board 9 '. Also, liquid crystal polymer film
8a and 8b are perforations at required locations (or areas) with harmonics of a YAG laser, and the connected portions 10 of the wiring patterns 7a and 7b.
A cover coat is formed exposing a and 10b. Reference numeral 11 denotes an interlayer connecting portion that connects the wiring patterns 7a and 7b formed on both surfaces of the core wiring board 9 '.

【0035】次に、上記コア配線板9′が多層配線パタ
ーン型の配線基板の製造方法例を説明する。
Next, an example of a method of manufacturing a wiring board in which the core wiring board 9'is a multilayer wiring pattern type will be described.

【0036】厚さ12μm の電解銅箔の一主面上に、メタ
ルマスクを位置決め配置し、導電性ペーストを印刷し、
乾燥後、同一のメタルマスクを用いて同一位置に導電性
ペーストを印刷、乾燥を繰り返して高さ 200μm 程度の
円錐型導電性バンプを形成した。なお、メタルマスク
は、厚さ約 250μm のステンレス鋼板の所要箇所に直径
250μm の孔を穿設したものであり、導電性ペースト
は、銀粉およびエポキシ樹脂からなる導電性組成物であ
る。
A metal mask is positioned and arranged on one main surface of an electrolytic copper foil having a thickness of 12 μm, a conductive paste is printed,
After drying, the same metal mask was used to print the conductive paste at the same position and the drying was repeated to form a conical conductive bump having a height of about 200 μm. The metal mask has a diameter of approximately 250 μm and is applied to the required location on a stainless steel plate.
250 μm holes are formed, and the conductive paste is a conductive composition composed of silver powder and an epoxy resin.

【0037】上記導電性バンプを所要の位置に設けた電
解銅箔を、予め用意しておいた厚さ100μm 程度の液晶
ポリマーフィルムの片面側に、導電性バンプの先端側を
対向させる一方、他面に銅箔を配置する。この状態で、
真空熱プレス加工を施して、液晶ポリマーフィルムの両
面側に電解銅箔を圧着し、導電性バンプによって両面の
電解銅箔同士が電気的に接続された両面銅箔貼りシート
を作製した。
The electro-deposited copper foil provided with the above-mentioned conductive bumps at required positions is made to face one end of a liquid crystal polymer film having a thickness of about 100 μm prepared in advance with the tip end side of the conductive bumps being opposed to the other. Place copper foil on the surface. In this state,
A vacuum hot press process was performed, and electrolytic copper foils were pressure bonded to both sides of the liquid crystal polymer film to prepare a double-sided copper foil-bonded sheet in which electrolytic copper foils on both sides were electrically connected by conductive bumps.

【0038】その後、両面銅箔貼りシートの両銅箔面に
それぞれドライフィルム型の感光性レジストを貼り合
せ、配線パターンフィルムマスクを位置決めし、露光処
理を施してからエッチング処理を行って、配線パターニ
ングすることにより、両面配線型のコア配線板を作製す
る。次いで、前記コア配線板の両面に、厚さ50μm 程度
の液晶ポリマーフィルムおよび厚さ12μm の電解銅箔を
順次・積層配置し、真空熱プレス加工を施して両面銅箔
貼りの多層型素板を作製する。このとき、電解銅箔の一
主面子の所要箇所には、上記のような手段で導電性バン
プを予め設けておいたものを使用する。
After that, a dry film type photosensitive resist is adhered to both copper foil surfaces of the double-sided copper foil adhering sheet, a wiring pattern film mask is positioned, an exposure process is performed, and then an etching process is performed to perform wiring patterning. By doing so, a double-sided wiring type core wiring board is produced. Next, a liquid crystal polymer film with a thickness of about 50 μm and an electrolytic copper foil with a thickness of 12 μm are sequentially laminated on both sides of the core wiring board, and vacuum heat press processing is applied to form a multilayer base plate with copper foil on both sides. Create. At this time, conductive bumps are provided in advance at the required positions on one main surface of the electrolytic copper foil by the above-mentioned means.

【0039】その後、両面銅箔貼りの多層型素板の両銅
箔面にそれぞれ感光性レジストを貼り合せ、配線パター
ンフィルムマスクを位置決めし、露光処理を施してから
エッチング処理を行って、配線パターニングし、多層配
線パターン型のコア配線板を作製する。ここで、銅スル
ホールを併設する場合には、予め穿孔後、スルホールメ
ッキしてパターニングする方法も行える。
Thereafter, a photosensitive resist is attached to each of the copper foil surfaces of the double-sided copper foil-adhered multilayer base plate, a wiring pattern film mask is positioned, an exposure process is performed, and an etching process is performed to perform wiring patterning. Then, a multilayer wiring pattern type core wiring board is produced. Here, in the case where a copper through hole is additionally provided, it is possible to carry out a method of patterning after through hole drilling and through hole plating.

【0040】次に、前記多層配線パターン型コア配線板
の主面に、厚さ30μm 程度の液晶ポリマーフィルムを接
合・一体化させカバーコート層を形成した。次いで、前
記カバーコートの所要箇所(位置)に、エキシマレーザ
ー光をメタライズ層を介して選択的に照射して穿孔を行
い、配線パターンの所要箇所を露出させ、スルホール内
壁面および配線パターン露出面に銅メッキ層を成長させ
ることによって配線基板が得られる。
Next, a liquid crystal polymer film having a thickness of about 30 μm was joined and integrated with the main surface of the multilayer wiring pattern type core wiring board to form a cover coat layer. Then, a desired portion (position) of the cover coat is selectively irradiated with excimer laser light through the metallization layer to form a hole to expose the required portion of the wiring pattern, and the inner wall surface of the through hole and the wiring pattern exposed surface are exposed. A wiring board is obtained by growing a copper plating layer.

【0041】 上記配線基板の製造方法においては、コ
ア配線板の製造時における銅箔の貼り合わせ、およびカ
バーフィルムの貼り合わせに当たって、液晶ポリマーの
特性を利用して熱融されるので、接着剤が不要となって
製造工程が大幅に簡略化する。また、配線基板の廃棄処
分などにおいては、燃焼によりハロゲンやリンを含む有
害物質の発生がないので、環境衛生面でも有利であると
ともに、熱可塑性樹脂と金属の組み合わせという簡単な
構成であるため、熱溶融で容易に樹脂分と金属分に分離
でき、樹脂と金属とを別けてリサイクルできるという特
長もある。
[0041] In the manufacturing method of the wiring substrate, bonding of the copper foil at the time of manufacture of the core wiring board, and when bonding the cover film, because it is thermally utilizing the characteristics of liquid crystal polymers, adhesives Is unnecessary and the manufacturing process is greatly simplified. In addition, when disposing of the wiring board, since harmful substances including halogen and phosphorus are not generated by combustion, it is advantageous in terms of environmental hygiene, and because of the simple configuration of the combination of thermoplastic resin and metal, It also has the feature that it can be easily separated into a resin component and a metal component by heat melting, and that the resin and metal can be separated and recycled.

【0042】図3は第3の実施例に係る配線基板の要部
構成を示す断面図である。この実施例の配線基板は、基
本的に、前記第1の実施例の場合と同様で、配線パター
ン7a,7bを絶縁体層6に圧入し、コア配線板9の主面を
平坦面化した点で相違する。この構成を採った場合は、
カバーフィルム8a,8bが、平坦面に圧着・一体化されて
いるため、カバーコートの被覆操作が容易になるだけで
なく、パターン面に凹凸のない平坦性のすぐれた良好な
密着性の絶縁被覆が行われる。また、絶縁体層6および
カバーコート(絶縁被覆層)が、誘電率の低い液晶ポリ
マーで形成されていることに伴って、高周波特性のすぐ
れた、また、低吸湿性および良好な柔軟性によって、軽
薄・短小で信頼性の高い配線基板を構成する。
FIG. 3 is a sectional view showing the structure of the main part of a wiring board according to the third embodiment. The wiring board of this embodiment is basically the same as the case of the first embodiment, in which the wiring patterns 7a and 7b are press-fitted into the insulating layer 6 and the main surface of the core wiring board 9 is made flat. Differences in points. If you take this configuration,
Since the cover films 8a and 8b are pressed and integrated on a flat surface, not only the covering operation of the cover coat is easy, but also the pattern surface has no unevenness and the insulating coating has good flatness and good adhesion. Is done. In addition, since the insulator layer 6 and the cover coat (insulating coating layer) are formed of a liquid crystal polymer having a low dielectric constant, excellent high-frequency characteristics are obtained, and low hygroscopicity and good flexibility allow Constructing a light, thin, short, and highly reliable wiring board.

【0043】本発明は上記例示に限定されるものでな
く、発明の主旨を逸脱しない範囲でいろいろの変化を採
ることができる。たとえば絶縁体層(絶縁性支持体)の
厚さ、絶縁被覆層(カバーコート)の厚さ、配線パター
ンの材質、コア配線板の配線パターン層数、導電性バン
プの形成用素材などは、用途・目的に応じて適宜選択し
て用いることができる。
The present invention is not limited to the above examples, and various changes can be made without departing from the spirit of the invention. For example, the thickness of the insulating layer (insulating support), the thickness of the insulating coating layer (cover coat), the material of the wiring pattern, the number of wiring pattern layers of the core wiring board, the material for forming the conductive bumps, etc. -It can be appropriately selected and used according to the purpose.

【0044】[0044]

【発明の効果】発明によれば、接着剤層の介挿が不要
となるので、接着剤層を含むことによる難燃化剤に起因
する環境問題などが解消されるだけでなく、液晶ポリマ
ー本来の特長である耐湿性、すぐれた高周波特性などが
生かされた信頼性の高い配線基板およびその製造方法
提供される。
According to the present invention, since it is not necessary to interpose an adhesive layer, not only the environmental problem caused by the flame retardant due to the inclusion of the adhesive layer is solved but also the liquid crystal polymer is used. Provided is a highly reliable wiring board and a method for manufacturing the same, which makes use of the original characteristics such as moisture resistance and excellent high-frequency characteristics.

【0045】[0045]

【0046】[0046]

【0047】[0047]

【0048】[0048]

【0049】[0049]

【0050】[0050]

【0051】[0051]

【図面の簡単な説明】[Brief description of drawings]

【図1】第1の実施例に係る配線基板の要部構成を示す
断面図。
FIG. 1 is a cross-sectional view showing a main-part configuration of a wiring board according to a first embodiment.

【図2】第2の実施例に係る配線基板の要部構成を示す
断面図。
FIG. 2 is a cross-sectional view showing a main-part configuration of a wiring board according to a second embodiment.

【図3】第3の実施例に係る配線基板の要部構成を示す
断面図。
FIG. 3 is a cross-sectional view showing a main part configuration of a wiring board according to a third embodiment.

【図4】従来の配線基板の要部構成を示す断面図。FIG. 4 is a cross-sectional view showing a configuration of a main part of a conventional wiring board.

【符号の説明】[Explanation of symbols]

6……液晶ポリマーからなる絶縁体層 7a,7b,7a′,7b′……配線パターン 8a,8b……液晶ポリマーからなる絶縁被覆層(カバーコ
ート) 9,9′……コア配線板 10a ,10b ……配線パターン露出部 11……スルホール接続部 12……ヴィア接続部(導電性バンプ)
6 ... Insulator layers 7a, 7b, 7a ', 7b' made of liquid crystal polymer ... Wiring patterns 8a, 8b ... Insulating coating layer (cover coat) made of liquid crystal polymer 9, 9 '... Core wiring board 10a, 10b …… Wiring pattern exposed part 11 …… Through hole connection part 12 …… Via connection part (conductive bump)

フロントページの続き (56)参考文献 特開 平10−190231(JP,A) 特開 平8−78845(JP,A) 特開 平8−97565(JP,A) 特開 平8−264939(JP,A) 特開 平11−289165(JP,A) (58)調査した分野(Int.Cl.7,DB名) H05K 3/46 Continuation of the front page (56) Reference JP-A-10-190231 (JP, A) JP-A-8-78845 (JP, A) JP-A-8-97565 (JP, A) JP-A-8-264939 (JP , A) JP-A-11-289165 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) H05K 3/46

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 第1の液晶ポリマーから成る絶縁体層
よび前記絶縁体層の少なくとも一主面に形成された配線
パターンを有するコア配線板と、前記第1の液晶ポリマーより融点が低い第2の液晶ポリ
マーから成り、 前記コア配線板の前記配線パターン
された面に一体化され、かつ前記配線パターンの所要
箇所を露出するための穿孔を有する絶縁被覆層とを備え
ていることを特徴とする配線基板。
1. An insulator layer made of a first liquid crystal polymer .
And a core wiring board having a wiring pattern formed on at least one main surface of the insulator layer , and a second liquid crystal poly having a melting point lower than that of the first liquid crystal polymer.
Consists mer, the wiring pattern of the core wiring board is integrated into the surface that is shaped <br/> formed, and the insulation coating layer that have a perforation for exposing the desired portions of the wiring pattern A wiring board characterized by being provided.
【請求項2】 第1の液晶ポリマーから成る絶縁体層の
少なくとも一主面に導電性金属箔を載置し、加圧・加熱
して一体化する工程と、 前記導電性金属箔をパターニングして前記一体化された
前記絶縁体層と前記導電性金属箔とをコア配線板化する
工程と、 前記コア配線板の前記導電性金属箔パターニング面に
前記第1の液晶ポリマーより融点が低い第2の液晶ポリ
マーから成る絶縁体シートを位置決め配置し加圧・加
してさらに一体化する工程と、 前記コア配線板に一体化された絶縁体シートの所定領域
を穿孔加工し、前記パターニングされた導電性金属箔
所要箇所を露出させる工程とを有することを特徴とする
配線基板の製造方法。
2. A conductive metal foil is placed on at least one main surface of an insulator layer made of a first liquid crystal polymer, and pressure / heating is performed.
A step of integrating and was the integrated front Kishirube conductive metal foil is patterned
A step of forming the insulating layer and the conductive metal foil into a core wiring board, and on the conductive metal foil patterning surface of the core wiring board ,
A step of positioning and arranging an insulating sheet made of a second liquid crystal polymer having a melting point lower than that of the first liquid crystal polymer , and pressing and heating to further integrate the insulating sheet; and an insulating sheet integrated with the core wiring board. And a step of exposing a predetermined portion of the patterned conductive metal foil to form a predetermined area, and a method of manufacturing a wiring board.
JP30904798A 1998-10-29 1998-10-29 Wiring board and method of manufacturing the same Expired - Lifetime JP3490309B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30904798A JP3490309B2 (en) 1998-10-29 1998-10-29 Wiring board and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30904798A JP3490309B2 (en) 1998-10-29 1998-10-29 Wiring board and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JP2000138422A JP2000138422A (en) 2000-05-16
JP3490309B2 true JP3490309B2 (en) 2004-01-26

Family

ID=17988243

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JP4722507B2 (en) * 2005-02-17 2011-07-13 新日鐵化学株式会社 Double-sided flexible circuit board for repeated bending applications
JP4827446B2 (en) * 2005-07-08 2011-11-30 株式会社プライマテック Electronic circuit board and manufacturing method thereof
JP2007258697A (en) * 2006-02-27 2007-10-04 Nippon Steel Chem Co Ltd Method of manufacturing multilayer printed wiring board
WO2011018979A1 (en) 2009-08-11 2011-02-17 株式会社村田製作所 Multilayered substrate
JP2011112896A (en) * 2009-11-27 2011-06-09 Sumitomo Chemical Co Ltd Pedestal for oscillating mirror, and optical scanner
JP5048850B2 (en) * 2011-01-24 2012-10-17 新日鐵化学株式会社 Double-sided flexible circuit board for repeated bending applications
TWI477217B (en) * 2013-04-10 2015-03-11 Tripod Technology Corp Method for manufacturing printed circuit board having copper wrap layer
CN104159401B (en) * 2013-05-13 2017-07-28 健鼎(无锡)电子有限公司 The manufacture method of printed circuit board (PCB) with cladding layers of copper
JP6443927B2 (en) * 2015-03-25 2018-12-26 住友電工プリントサーキット株式会社 Sensor
CN109196963B (en) 2016-06-17 2020-12-04 株式会社村田制作所 Method for manufacturing resin multilayer substrate

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