JP3381447B2 - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JP3381447B2
JP3381447B2 JP6968795A JP6968795A JP3381447B2 JP 3381447 B2 JP3381447 B2 JP 3381447B2 JP 6968795 A JP6968795 A JP 6968795A JP 6968795 A JP6968795 A JP 6968795A JP 3381447 B2 JP3381447 B2 JP 3381447B2
Authority
JP
Japan
Prior art keywords
chip
lead
chips
thickness
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP6968795A
Other languages
Japanese (ja)
Other versions
JPH08264711A (en
Inventor
忠 込山
良彦 五味
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP6968795A priority Critical patent/JP3381447B2/en
Publication of JPH08264711A publication Critical patent/JPH08264711A/en
Application granted granted Critical
Publication of JP3381447B2 publication Critical patent/JP3381447B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Landscapes

  • Credit Cards Or The Like (AREA)

Abstract

PURPOSE: To obtain a package with which it is possible to prevent deformation of a base due to assembling and processing and to reduce the thickness inexpensively and, at the same time, to prevent occurrence of unfilling of a sealing material at the time of molding in regard to a semiconductor device wherein a plurality of IC chips are mounted in one package. CONSTITUTION: The rear sides of IC chips 1 and 2 are joined on each other by an adhesive tape such as a polyimide tape 6 or a bonding agent such as silver paste. Each IC chip is wired by gold wires 7 from electrodes 15 to leads 12 and 13 which are terminals for contact with the outside. It is allowable, besides, that positions of the IC chips to be joined at the rear sides are shifted relatively in the lateral direction, each of the chip being joined to the leads at one end the rear sides thereof being bonded to each other at the other end. It is also allowable that the leads are depressed in the vertical direction of the sections thereof at this time so that the IC chips may not be tilted.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体装置に関するも
ので、特に複数のICチップを1つのパッケージ内に搭
載する場合の半導体装置におけるICチップ取付構造及
びリードの構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, and more particularly to an IC chip mounting structure and a lead structure in a semiconductor device when a plurality of IC chips are mounted in one package.

【0002】[0002]

【従来の技術】従来この種の半導体装置は、図8に従来
の半導体装置の一例に関する断面図を示すが、複数のI
Cチップ(図8では2個のICチップ、すなわちICチ
ップA・1、ICチップB・2)は、基板4におけるI
Cの接合パターンであるダイパッド8上へ接着剤9によ
って接合され、基板4上の配線パターン5に対して導電
性接合手段の一つである金線7によって電気的にコンタ
クトをとられ、さらに配線パターン5から導電性接合手
段の一つである金線7によって外部との電気的コンタク
ト端子であるリードA12に電気的にコンタクトをとら
れた後、図9で点線で示してある封止材10で封止され
るようになっていた。なお、外部との電気的コンタクト
端子であるリードA12は、封止材10で封止した後
に、封止材10の外に出ている部分を所望の形状に整形
加工する場合もある。
2. Description of the Related Art A conventional semiconductor device of this type is shown in FIG.
The C chip (two IC chips in FIG. 8, namely, IC chip A.1, IC chip B.2) is I on the substrate 4.
It is bonded to the die pad 8 which is a bonding pattern of C by the adhesive 9, and is electrically contacted to the wiring pattern 5 on the substrate 4 by the gold wire 7 which is one of the conductive bonding means. After electrical contact is made from the pattern 5 to the lead A12 which is an electrical contact terminal with the outside by the gold wire 7 which is one of the conductive joining means, the encapsulant 10 shown by the dotted line in FIG. It was supposed to be sealed with. In some cases, the lead A12, which is an electrical contact terminal with the outside, is shaped with a desired shape after the portion outside the sealing material 10 is sealed with the sealing material 10.

【0003】[0003]

【発明が解決しようとする課題】前述の従来の半導体装
置の一例では、ダイボンディングやワイヤボンディン
グ、或はモールド加工時等の製造過程におけるの基板の
変形対策のため、基板の厚さは0.4mm程度またはそ
れ以上が要求される。
In an example of the above-mentioned conventional semiconductor device, the thickness of the substrate is set to 0.000 as a measure against the deformation of the substrate in the manufacturing process such as die bonding, wire bonding, or molding. About 4 mm or more is required.

【0004】しかし、0.4mm以上の基板厚さがある
場合、封止材によるモールド加工の際に体積の大きい基
板が邪魔をして封止材の流れ込みが悪くなり、未充填が
発生することがある。また、0.4mmという厚い基板
がパッケージに内蔵されるためパッケージの薄型化が困
難になるという欠点を持っていた。
However, when the substrate has a thickness of 0.4 mm or more, the substrate having a large volume interferes with the molding process of the encapsulating material to impede the flow of the encapsulating material, resulting in unfilling. There is. Further, since a thick substrate of 0.4 mm is built in the package, it is difficult to make the package thin.

【0005】なお通常は基板の厚さは、例えば樹脂基板
の場合は最も薄いもので0.1mm程度まで製造可能で
あるが、基板の厚さを0.1mm程度にすると、薄すぎ
て製品組立加工の際に基板が変形することがある。
Normally, the thickness of the substrate is the thinnest in the case of a resin substrate, for example, and it can be manufactured up to about 0.1 mm. However, if the thickness of the substrate is about 0.1 mm, it will be too thin to assemble the product. The substrate may be deformed during processing.

【0006】本発明の目的は、以上のような、複数のI
Cチップを1つのパッケージに搭載する際に、未充填が
発生せず、かつ安価に薄型化を図れるような半導体装置
を提供することにあり、特に、パッケージ内部の体積を
小さくし、未充填を防止しつつパッケージの薄型化を安
価に実現出来るような半導体装置を提供することにあ
る。さらに、上記の目的に加え、ICチップをより安定
して固定できる(宙づりにならない)ようにした半導体
装置を提供することにある。また、ICチップをより安
定して固定すると同時にスペーサ搭載の工数とスペーサ
の部品代を削減しより安価に提供すること、前述のIC
チップの固定を安定化することに加えて、リードへのI
Cチップの接合部分の高さを安定させ、より高品質の半
導体装置を提供することにある。
The object of the present invention is to provide a plurality of I as described above.
An object of the present invention is to provide a semiconductor device in which unfilling does not occur when a C chip is mounted in one package and which can be made thin at low cost. It is an object of the present invention to provide a semiconductor device that can realize a thin package at low cost while preventing it. Further, in addition to the above-mentioned object, it is another object of the present invention to provide a semiconductor device in which an IC chip can be more stably fixed (not suspended). Further, the IC chip can be more stably fixed, and at the same time, the man-hour for mounting the spacer and the cost of the spacer can be reduced to provide the IC chip at a lower cost.
In addition to stabilizing the fixing of the chip, I to the lead
An object of the present invention is to provide a semiconductor device of higher quality by stabilizing the height of the joint portion of the C chip.

【0007】[0007]

【課題を解決するための手段】上記目的は、ICチップ
の裏面同士を接着剤や接着テープ等の接合手段で接着す
ることによって達成される。また併せて裏面を相互に接
続するICチップの位置を相対的にその接合面の方向に
ずらして接着部分と反対側を外部との接続端子に接着剤
や接着テープ等の接合手段でスペーサを介してICチッ
プが傾かないように接着することによってより安定して
達成できる。また外部との接続端子の位置をICチップ
が傾かないようにその断面の上下方向において相対的に
接合面と直角の方向にずらす(すなわちデプレスする)
ことによってより安定するとともにスペーサが不要にな
りより安価に達成できる。さらに、外部との接続端子を
デプレスし、かつICチップの裏面の接着部分にスペー
サ介させることによってICチップを安定して固定でき
るとともにリードのデプレス量をスペーサの分だけ少な
くできるので、リードデプレス量が大きくなる場合に生
じるデプレス量のバラツキがなくなりリードへのICチ
ップの接合部分の高さを安定させかつより高品質に達成
できる。そして、請求項1にかかる本発明の半導体装置
は、外部出力用端子を有するリードと、ワイヤボンディ
ングによって該リードに電気的に接続された第1のIC
チップと第2のICチップと、前記リードの少なくとも
一部と前記第1および第2のICチップを封止する樹脂
とを有し、前記第1および第2のICチップが非能動面
同士を第1の接合手段によって接着され、前記第1のI
Cチップが第2の接合手段によって前記リードに接着さ
れ、前記第2のICチップが第3の接合手段によって前
記リードに接着された半導体装置において、前記第1お
よび第2のICチップが、接合面の方向に相対的にずれ
て重なる位置に配置され、前記接合手段によって直に接
着されてなり、前記リードの厚みをt2、前記第1の
合手段の厚みをt3、前記第2および前記第3の接合手
段の厚みをt4としたとき、t3=t2+2×t4の式
が実質的に成り立つことを特徴とする。また、請求項2
にかかる本発明の半導体装置は、外部出力用端子を有す
るリードと、ワイヤボンディングによって該リードに電
気的に接続された第1のICチップと第2のICチップ
と、前記リードの少なくとも一部と前記第1および第2
のICチップを封止する樹脂とを有し、前記第1および
第2のICチップが非能動面同士を第1の接合手段によ
って接着され、前記第1のICチップが第2の接合手段
によって前記リードに接着され、前記第2のICチップ
が第3の接合手段によって前記リードに接着された半導
体装置において、前記第1および第2のICチップが、
接合面の方向に相対的にずれて重なる位置に配置され、
スペーサを介して前記接合手段によって接着されてな
り、前記スペーサの厚みをt1、前記リード厚みをt
2、前記第1の接合手段の厚みをt3、前記第2および
前記第3の接合手段の厚みをt4としたとき、2×t3
+t1=t2+2×t4の式が実質的に成り立つことを
特徴とする。
The above object is achieved by bonding the back surfaces of the IC chips to each other with a bonding means such as an adhesive or an adhesive tape. At the same time, the positions of the IC chips for connecting the back surfaces to each other are relatively shifted in the direction of the bonding surface, and the side opposite to the bonding portion is connected to the external connection terminal via a spacer by a bonding means such as an adhesive or an adhesive tape. This can be achieved more stably by bonding the IC chip so that it does not tilt. Further, the position of the connection terminal with the outside is relatively shifted (that is, depressed) in the direction perpendicular to the joint surface in the vertical direction of the cross section so that the IC chip does not tilt.
As a result, it is more stable, and a spacer is not required, so that it can be achieved at a lower cost. Further, the IC chip can be stably fixed and the lead depressing amount can be reduced by the amount of the spacer by depressing the connection terminal to the outside and interposing the spacer on the adhesive portion on the back surface of the IC chip. There is no variation in the amount of depressing that occurs when the amount becomes large, and the height of the bonding portion of the IC chip to the lead can be stabilized and higher quality can be achieved. The semiconductor device of the present invention according to claim 1
Is a lead having an external output terminal and a first IC electrically connected to the lead by wire bonding.
A chip, a second IC chip, and a resin that seals at least a part of the lead and the first and second IC chips, and the first and second IC chips have inactive surfaces on each other. Bonded by a first joining means , said first I
The C chip is attached to the lead by the second joining means.
And the second IC chip is fronted by the third bonding means.
In the semiconductor device bonded to the lead, the first and second IC chips are arranged at positions overlapping with each other with a relative displacement in the direction of the bonding surface, and are directly bonded by the bonding means. Is t2, the thickness of the first joining means is t3, and the thicknesses of the second and third joining means are t4, the equation of t3 = t2 + 2 × t4 is substantially satisfied. It is characterized by the fact that it holds. In addition, claim 2
According to another aspect of the semiconductor device of the present invention, a lead having an external output terminal, a first IC chip and a second IC chip electrically connected to the lead by wire bonding, and at least a part of the lead. The first and second
And a resin for sealing the IC chip, the first and second IC chips are adhered to each other at their inactive surfaces by a first joining means , and the first IC chip is made into a second joining means.
Is attached to the lead by the second IC chip
In the semiconductor device in which the third bonding means adheres to the lead, the first and second IC chips are
It is placed at a position where it is relatively displaced in the direction of the joint surface and overlaps,
The spacers are adhered to each other via a spacer, the thickness of the spacer is t1, and the thickness of the lead is t.
2, the thickness of the first joining means is t3, the second and
When the thickness of the third joining means is t4, 2 × t3
It is characterized in that the equation of + t1 = t2 + 2 × t4 substantially holds.

【0008】[0008]

【作用】複数のICチップを接着剤で固定し、このIC
チップと外部出力用端子を金線等の導電性接合手段で電
気的に接合し、樹脂等の封止材で封止する半導体装置に
おいて、ICチップの裏面同士を接着剤や接合テープ等
の接合手段で接着することによって、ICチップの接着
と固定に基板を用いる場合に比較して接着・固定に要す
る厚さを薄くできるため、パッケージ内部に占める接合
部材の体積を小さくかつ薄くできるので、封止する際に
未充填が発生しにくく、金線やICチップの露出を防ぎ
つつパッケージの薄型化を実現できる。
[Function] A plurality of IC chips are fixed with an adhesive, and this IC
In a semiconductor device in which a chip and an external output terminal are electrically joined by a conductive joining means such as a gold wire and sealed with a sealing material such as a resin, the back surfaces of IC chips are joined together with an adhesive or a joining tape. By bonding by means of means, the thickness required for bonding and fixing can be made smaller than the case where a substrate is used for bonding and fixing the IC chip, so that the volume of the bonding member in the package can be made small and thin. Unfilling is unlikely to occur when stopping, and it is possible to reduce the package thickness while preventing the gold wire and IC chip from being exposed.

【0009】さらに、接合するICチップの位置を接合
面の方向に相対的にずらし、一方の端をリードに接合
し、IC同士の接合面をスペーサを介してICが傾かな
いようにバランスをとりながら接合することによってI
Cチップをより安定して固定できる(宙づりにならな
い)。また、ずらしたICを接合するリードを接合した
ICが傾かない程度に接合面と直角の方向に相互に逆に
デプレスすることによって、ICチップをより安定して
固定できると同時にスペーサを用いないのでデプレスの
工数はかかるが、スペーサ搭載の工数とスペーサの部品
代を削減でき、コストダウンができる。さらにICチッ
プ接合面へのスペーサ搭載とリードのデプレスの共用に
よって、前述のICチップの固定を安定できることに加
えて、スペーサの分だけデプレスを少なくすることがで
きるので、リードデプレスが深くなる場合に生じるデプ
レス深さのバラツキを少なくすることができる。
Further, the positions of the IC chips to be bonded are relatively shifted in the direction of the bonding surface, one end is bonded to the lead, and the bonding surfaces of the ICs are balanced with a spacer so that the ICs do not tilt. By joining while
The C chip can be fixed more stably (it does not become suspended). Also, by depressing the leads for joining the shifted ICs in the directions perpendicular to the joining surface so that the joined ICs do not tilt, the IC chip can be more stably fixed and a spacer is not used. Although depressing man-hours are required, man-hours for mounting the spacers and spacer parts cost can be reduced, and cost can be reduced. Further, by mounting the spacer on the IC chip joint surface and sharing the lead depressurization, the IC chip can be stably fixed, and the depressurization can be reduced by the amount of the spacer. It is possible to reduce the variation in the depressing depth that occurs in the.

【0010】[0010]

【実施例】以下に本発明の実施例について述べる。EXAMPLES Examples of the present invention will be described below.

【0011】図1は、本発明の半導体装置の第一の実施
例に関する断面図である。図1によれば、複数のICチ
ップ(図1においてはICチップA・1、ICチップB
・2)は、ポリイミドテープ6によって裏面を接合さ
れ、各々のICチップは外部とのコンタクト用端子であ
るリードA・12及びリードA・12と隣接して設けら
れたリードB・13とは、金線7によって電極15との
間を電気的にコンタクトをとられている。さらに詳しく
説明するために、図2に本発明の半導体装置の第一の実
施例に関する内部構造の斜視図を示す。図2において金
線7はリードA・12及びリードB・13に対し、IC
チップA・1,ICチップB・2各々から、対応するリ
ードA・12及びリードB・13へ各々のリードの上下
から配線される。すなわち、ICチップA・1について
は図2の対応するリードB・13の上側へ、またICチ
ップB・2については対応するリードA・12の下側へ
配線される。必要に応じて接合しないリードがあっても
よいし、ICチップA・1、ICチップB・2から同じ
リードへ上下方向から配線してもよい。またリードA・
12とリードB・13は図のごとく1つおきに交互にな
らなくてもよい。なお、ICチップの接合手段は、ポリ
イミドテープやアルミ箔、ポリエチレンテープのような
接着テープでも銀ペーストやエポキシ樹脂等の液状の接
着剤でも、ICチップを接着できるものであれば良い
が、いずれの材料を用いる場合でも製造工程でかかる温
度(少なくとも120℃。)以上の耐熱性があることが
望ましい。
FIG. 1 is a sectional view of a semiconductor device according to a first embodiment of the present invention. According to FIG. 1, a plurality of IC chips (in FIG. 1, IC chip A.1, IC chip B
In 2), the back surface is joined by the polyimide tape 6, and each IC chip is a lead A. 12 which is a terminal for contact with the outside and a lead B. 13 provided adjacent to the lead A. The gold wire 7 makes electrical contact with the electrode 15. For further explanation, FIG. 2 is a perspective view of the internal structure of the first embodiment of the semiconductor device of the present invention. In FIG. 2, the gold wire 7 is an IC for the leads A and 12 and the leads B and 13.
From the chip A.1, the IC chip B.2, to the corresponding lead A.12 and lead B.13, wiring is provided from above and below each lead. That is, the IC chip A.1 is wired above the corresponding lead B.13 in FIG. 2, and the IC chip B.2 is wired below the corresponding lead A.12. If necessary, there may be leads that are not joined, or wiring may be provided from the IC chip A.1, IC chip B.2 to the same lead from above and below. Also Lead A
The leads 12 and the leads B and 13 do not have to alternate every other one as shown in the figure. The IC chip joining means may be an adhesive tape such as a polyimide tape, an aluminum foil, or a polyethylene tape, or a liquid adhesive such as a silver paste or an epoxy resin as long as it can bond the IC chips. Even when a material is used, it is desirable that the material has heat resistance equal to or higher than the temperature (at least 120 ° C.) applied in the manufacturing process.

【0012】製造方法ついては、図3(a)〜図3
(g)に本発明の半導体装置の第一の実施例の製造方法
の一例に関する主な製造工程ごとの断面図を示す。図3
(a)〜図3(g)によって説明すると、まず図3
(a)は、本発明の半導体装置の第一の実施例の製造方
法の一例におけるダイアタッチ時の断面図であるが、I
CチップA・1、ICチップB・2は裏面同士をポリイ
ミドテープ6で接着される。このとき、ICチップA・
1、ICチップB・2は支持ピン18によって支えられ
る。次に、図3(b)は、本発明の半導体装置の第一の
実施例の製造方法の一例におけるワイヤボンディング時
の断面図であるが、下面側のICチップB2は支持ピン
A18によって下方より支持されており、この状態で上
側のICチップA1が金線7によってリードA12また
はリードB13にワイヤボンディングされる。次に下側
のICチップB2をワイヤボンディングするためにIC
チップを反転させなければならないが、これは図3
(c)に本発明の半導体装置の第一の実施例の製造方法
の一例におけるICチップ反転直前の断面図を示すが、
ICチップA・1、ICチップB・2は支持ピンA・1
8により下面を、また支持ピンB・19によって上面を
各々支持され、上下の支持ピンによって挟み込まれた状
態で支持ピンごと回転させることにより、ICチップA
・1、ICチップB・2の位置は反転し、ICチップB
・2が上面になる。反転完了後は支持ピンA・18は除
去される。なお、支持ピンA・18、B・19の形状
は、ICチップA・1、B・2と接触する部分をフラッ
トにし、金線7と接触しない程度の細さであればその他
の形状はワイヤボンダの機械との取付関係に従って寸法
を決めればよい。また、支持ピンA・18、B・19に
よるICチップA・1、B・2の支持箇所は支持する場
合のバランスを考えれば、各ICチップの中央部分が最
も良い。次に、図3(d)に本発明の半導体装置の第一
の実施例の製造方法の一例におけるワイヤボンディング
完了時の断面図を示すが、図3(d)によれば先にワイ
ヤボンディングした裏面のICチップA・1が支持ピン
B・19によって支持された状態で、ICチップB・2
が金線7によってワイヤボンディングされる。次に図3
(e)に本発明の半導体装置の第一の実施例の製造方法
の一例におけるワイヤボンディング後の搬送状態の断面
図を示すが、図3(e)によればワイヤボンディング後
のICチップA・1、ICチップB・2は吸着ノズル2
1によって吸着され、またリードA・12、リードB・
13は、搬送爪22によって支持されて搬送される。さ
らに、図3(f)に本発明の半導体装置の第一の実施例
の製造方法の一例におけるモールド加工時の断面図を示
すが、搬送されたICチップA・1、ICチップB・2
及びリードA・12、リードB・13は、下側から樹脂
製で切断可能な支持ピンD23によって支持されつつ金
型24内で封止材10で封止される。最後に、図3
(g)に本発明の半導体装置の第一の実施例の製造方法
の一例におけるモールド加工後の仕上げ状態に関する断
面図を示すが、図3(g)によればモールド加工された
半導体装置は、支持ピンD・23ごと金型24からはず
され、支持ピンD・23を所望の寸法に(図3(g)中
では封止材の表面に沿って)切断される。必要に応じ
て、封止材から外へ出ているリードを所望の形状に切断
し整形する。
As for the manufacturing method, FIGS.
(G) is a sectional view of each main manufacturing step relating to an example of the manufacturing method of the first embodiment of the semiconductor device of the present invention. Figure 3
Explaining with reference to (a) to FIG. 3 (g), first, referring to FIG.
(A) is sectional drawing at the time of the die attach in an example of the manufacturing method of the 1st Example of the semiconductor device of this invention.
The back surfaces of the C chip A.1 and the IC chip B.2 are adhered to each other with a polyimide tape 6. At this time, IC chip A
1, the IC chip B.2 is supported by the support pin 18. Next, FIG. 3B is a cross-sectional view at the time of wire bonding in an example of the manufacturing method of the first embodiment of the semiconductor device of the present invention. The IC chip B2 on the lower surface side is supported by the support pins A18 from below. It is supported, and in this state, the upper IC chip A1 is wire-bonded to the lead A12 or the lead B13 by the gold wire 7. Next, in order to wire bond the lower IC chip B2 to the IC
The chip must be flipped, which is shown in Figure 3.
(C) is a cross-sectional view immediately before IC chip inversion in an example of the manufacturing method of the first embodiment of the semiconductor device of the present invention.
IC chip A.1 and IC chip B.2 are support pins A.1
The lower surface of the IC chip 8 is supported by 8 and the upper surface of the support pin B is supported by the support pins B and 19.
・ The positions of IC chip B and IC chip B are reversed and IC chip B
・ 2 is the top surface. After the inversion is completed, the support pin A · 18 is removed. The support pins A, 18 and B and 19 have flat shapes at the portions which come into contact with the IC chips A and B, and have other shapes as long as they do not come into contact with the gold wire 7. The dimensions may be determined according to the mounting relationship with the machine. Further, considering the balance when supporting the IC chips A.1, B.2 by the support pins A.18, B.19, the central portion of each IC chip is the best. Next, FIG. 3D shows a cross-sectional view after completion of wire bonding in an example of the manufacturing method of the first embodiment of the semiconductor device of the present invention. According to FIG. 3D, wire bonding is performed first. With the IC chip A.1 on the back surface being supported by the support pins B.19, IC chip B.2
Is wire-bonded by the gold wire 7. Next in FIG.
FIG. 3E is a cross-sectional view of the carrying state after wire bonding in the example of the manufacturing method of the first embodiment of the semiconductor device of the present invention. According to FIG. 3E, the IC chip A after wire bonding 1, IC chip B ・ 2 is suction nozzle 2
Adsorbed by 1, and lead A ・ 12, lead B ・
The sheet 13 is supported and conveyed by the conveying claw 22. Further, FIG. 3 (f) shows a cross-sectional view at the time of molding in the example of the manufacturing method of the first embodiment of the semiconductor device of the present invention. The conveyed IC chip A.1, IC chip B.2
The leads A and 12 and the leads B and 13 are sealed from the lower side by the sealing material 10 in the mold 24 while being supported by the support pins D23 which are made of resin and can be cut. Finally, Figure 3
FIG. 3G shows a cross-sectional view of the finished state after molding in the example of the manufacturing method of the first embodiment of the semiconductor device of the present invention. According to FIG. 3G, the molded semiconductor device is The support pins D · 23 and the support pins D · 23 are removed from the mold 24, and the support pins D · 23 are cut to a desired dimension (along the surface of the sealing material in FIG. 3G). If necessary, the leads protruding from the sealing material are cut into a desired shape and shaped.

【0013】なおICチップは3個以上の場合もあるの
で、図4に多数のICチップを搭載した場合の一例とし
て、本発明の半導体装置の第一の実施例を応用し、4個
のICチップを接合した場合の一実施例の斜視図を示
す。本実施例の場合は、図2に示した実施例のICチッ
プA・1の代わりに、3個のICすなわち、ICチップ
C・25、ICチップD・3、ICチップE・9が、下
側のICチップB・2に接合手段(本実施例の場合はポ
リイミドテープ6)で接合されている。リードA・12
にはICチップB・2から金線7を介して配線され、ま
たリードB・13にはICチップC25、ICチップD
・3、ICチップE・9から金線7で配線されている。
そのほかの符号に付いては、図2と同様である。
Since there may be three or more IC chips, as an example of mounting a large number of IC chips in FIG. 4, the first embodiment of the semiconductor device of the present invention is applied and four IC chips are applied. The perspective view of one Example at the time of joining a chip is shown. In the case of the present embodiment, instead of the IC chip A.1 of the embodiment shown in FIG. 2, three ICs, that is, IC chip C.25, IC chip D.3, IC chip E.9, It is joined to the IC chip B.2 on the side by joining means (polyimide tape 6 in this embodiment). Lead A ・ 12
Is connected to the IC chip B.2 via the gold wire 7, and the leads B.13 are connected to the IC chip C25 and the IC chip D.
・ 3, IC chip E ・ 9 is wired by gold wire 7.
Other reference numerals are the same as in FIG.

【0014】次に図5(a)〜(c)に本発明の半導体
装置の第二の実施例に関する断面図を示す。
Next, FIGS. 5A to 5C are sectional views showing a second embodiment of the semiconductor device of the present invention.

【0015】説明のため、次のように記号をおく。For the sake of explanation, the following symbols are used.

【0016】スペーサの厚さ =t1 リードの厚さ =t2 ICチップ側の接合手段の厚さ =t3 (本実施例の場合はICチップ同士の接合部のポリイミ
ドテープ6の厚さ) リード側の接合手段の厚さ =t4 (本実施例の場合はリードとICチップの接合部のポリ
イミドテープ6の 厚さ) ここで、図5(a)は、本発明の半導体装置の第二の実
施例に関し、リード側の接合手段の厚さt4=ICチッ
プ側の接合手段の厚さt3の場合の断面図、図5(b)
は、本発明の半導体装置の第二の実施例に関し、リード
側の接合手段の厚さt4>ICチップ側の接合手段の厚
さt3の場合の断面図、図5(c)は、本発明の半導体
装置の第二の実施例に関し、リード側の接合手段の厚さ
4<ICチップ側の接合手段の厚さt3の場合の断面図
を示す。まず、図5(a)によればICチップA・1,
ICチップB・2は互いに図5の左右方向にずれた位置
関係でポリイミドテープ6によって裏面を接合され、か
つリードA・12、リードB・13に対して、各々のI
Cチップの一端が、各々のICチップがずれたことによ
って生じたスペース16にポリイミドテープ6によって
接合されている。また、ICチップA・1、ICチップ
B・2と各々のリードA・12、リードB・13との接
合部との反対側の端(すなわちICチップの裏面接合部
分)は、裏面にポリイミドテープ6が貼られているが、
さらにスペーサ17を介して傾かないようにバランスを
とられて固定されている。ここでスペーサ17の厚さt
1 は、ICチップ側の接着剤の厚さt3 =リード側の接
着剤の厚さt4 なので、スペーサの厚さt1 =リードの
厚さt2 とすることでICチップは傾かず、例えばワイ
ヤボンデイングや樹脂封止でICチップの傾きによる問
題は発生しない。また、図5(b)の例のごとくリード
側の接着剤の厚さt4>ICチップ側の接着剤の厚さt3
の場合や、図5(c)の例のごとく、リード側の接着剤
の厚さt4<ICチップ側の接着剤の厚さt3の場合には
各々スペーサ17の厚さを厚くしたり(→図5
(b))、薄くしたり(→図5(c))してやればよ
い。このときのスペーサ17の厚さt1 は、 t1=t2−2×(t4−t3 ) である。スペーサ17の材質は、シリコン板、、42a
lloyや銅板、エポキシ基板など変形しにくい材料が
よいが、特にワイヤボンディング時やモールド時の加熱
による熱膨張を考慮すると、ICチップと同じ材質が望
ましい。(例えばシリコン板など。)また、ICチップ
間を絶縁したい場合には、本実施例のように絶縁性のポ
リイミドテープを使う以外に接着剤としてエポキシ樹脂
やフェノール系等の絶縁性ポッティング樹脂を使うこと
もある。この場合スペーサ17に関しては、確実に絶縁
するために金属や金属粉末等の導電性材料を混入した導
電性のスペーサは用いない方がよい。本実施例ではIC
チップがリードに固定されているため、第一の実施例に
比較してICチップの位置がより安定しているという特
徴がある。
Thickness of spacer = t 1 Thickness of lead = t 2 Thickness of joining means on IC chip side = t 3 (In this embodiment, thickness of polyimide tape 6 at joining portion between IC chips) Thickness of joining means on lead side = t 4 (thickness of polyimide tape 6 at the joining portion between the lead and the IC chip in the case of the present embodiment) Here, FIG. 5A shows the semiconductor device of the present invention. FIG. 5B is a cross-sectional view of the second embodiment in which the thickness t 4 of the joining means on the lead side = the thickness t 3 of the joining means on the IC chip side.
Relates to a second embodiment of the semiconductor device of the present invention, and is a cross-sectional view in the case where the thickness t 4 of the joining means on the lead side> the thickness t 3 of the joining means on the IC chip side, FIG. A second embodiment of the semiconductor device of the present invention is shown in a sectional view in the case where the thickness t 4 of the joining means on the lead side is smaller than the thickness t 3 of the joining means on the IC chip side. First, according to FIG. 5A, the IC chip A.1,
The IC chip B.2 is bonded on the back surface by the polyimide tape 6 in a positional relationship shifted from each other in the left-right direction in FIG.
One end of the C chip is joined to the space 16 created by the displacement of the IC chips by the polyimide tape 6. Further, the ends of the IC chip A.1 and IC chip B.2 opposite to the joints of the leads A.12 and leads B.13 (that is, the back surface joint portion of the IC chip) are polyimide tape on the back surface. 6 is attached,
Furthermore, the spacers 17 are balanced and fixed so as not to tilt. Here, the thickness t of the spacer 17
1 is the thickness t 3 of the adhesive on the IC chip side = the thickness t 4 of the adhesive on the lead side, so that the thickness t 1 of the spacer = the thickness t 2 of the lead prevents the IC chip from tilting. For example, wire bonding and resin sealing do not cause a problem due to the inclination of the IC chip. Further, as in the example of FIG. 5B, the thickness t 4 of the adhesive on the lead side> the thickness t 3 of the adhesive on the IC chip side.
If the thickness of the adhesive on the lead side is t 4 <the thickness of the adhesive on the IC chip side is t 3 , as in the example of FIG. 5C, the thickness of the spacer 17 may be increased. (→ Figure 5
(B)), thinning (→ FIG.5 (c)). The thickness t 1 of the spacer 17 at this time is t 1 = t 2 −2 × (t 4 −t 3 ). The spacer 17 is made of a silicon plate, 42a.
It is preferable to use a material that does not easily deform such as an alloy, a copper plate, or an epoxy substrate. However, in consideration of thermal expansion due to heating during wire bonding or molding, the same material as the IC chip is preferable. (For example, a silicon plate.) When it is desired to insulate the IC chips from each other, an epoxy resin or a phenolic insulating potting resin is used as an adhesive instead of using an insulating polyimide tape as in this embodiment. Sometimes. In this case, for the spacer 17, it is preferable not to use a conductive spacer in which a conductive material such as metal or metal powder is mixed for reliable insulation. In this embodiment, IC
Since the chip is fixed to the lead, the position of the IC chip is more stable as compared with the first embodiment.

【0017】図6(a)〜(d)には請求項3による本
発明の半導体装置の第三の実施例に関する断面図を示
す。
6A to 6D are sectional views showing a third embodiment of the semiconductor device of the present invention according to claim 3.

【0018】図6の実施例の場合、ICチップA・1、
ICチップB・2は、各々先端をICチップの接合面と
直角方向でかつ各々接合するICチップの裏面と反対側
にデプレスされたリードA・12、リードB・13に各
々ポリイミドテープで接合されている。デプレスの方法
は、封止後の半導体装置のリードを整形加工するような
金型によって加圧整形するかリードをエッチングしてデ
プレス部分を形成してもよいが、コスト的には整形型に
よって加圧整形する方が良い。以下にデプレス深さと接
合手段(本実施例の場合ポリイミドテープ)との寸法関
係を説明するが、前述の第2の実施例の記号を用い、ま
た リードのデプレス深さ =tD1 とすると、図6(a)は、リード側の接合手段の厚さt
4 >ICチップ側の接合手段の厚さt3 >0の場合の断
面図、図6(b)はt2 +2×t4 >ICチップ側の接
合手段の厚さt3 >リード側の接合手段の厚さt4 の場
合の断面図、図6(c)はICチップ側の接合手段の厚
さt3 =t2 +2×t3 の場合の断面図、図6(d)は
ICチップ側の接合手段の厚さt3>t2 +2×t4の場
合の断面図、を示す。図6(a)は、ICチップ側の接
合手段の厚さt4 がリード側の接合手段の厚さt4 より
薄かった場合である。図6(c)はリード側の接着剤の
厚さt4 がちょうどデプレスが不要な厚さで、図6
(b)の場合は図6(a)と図6(c)の場合の間のデ
プレス量になっている。また図6(d)はリード側の接
合手段の厚さt4 を図6(c)の場合よりもさらに厚く
した場合の例である。本実施例の場合には、いずれもデ
プレス深さtD1は、 tD1= t2/2−(t3−2×t4)/2 とすることによってICチップは傾かなくなる。
In the case of the embodiment shown in FIG. 6, the IC chip A.1,
The tip of each of the IC chips B and 2 is bonded to the leads A and 12 and the leads B and 13 which are depressed in the direction perpendicular to the bonding surface of the IC chip and on the side opposite to the back surface of the bonding IC chip with a polyimide tape. ing. As for the depressing method, the depressed portion may be formed by press-molding with a die that shapes the leads of the semiconductor device after sealing or by etching the leads, but in terms of cost, the shaping method applies. It is better to pressure-form. The dimensional relationship between the depressing depth and the joining means (polyimide tape in this embodiment) will be described below. If the depressing depth of the lead = t D1 is used and the symbol of the second embodiment is used, 6 (a) is the thickness t of the joining means on the lead side.
4 > Sectional view when the thickness t 3 of the joining means on the IC chip side is> 0, FIG. 6B shows t 2 + 2 × t 4 > Thickness t 3 of the joining means on the IC chip side> joining of the lead side 6C is a sectional view when the thickness of the joining means is t 4 , FIG. 6C is a sectional view when the thickness of the joining means on the IC chip side is t 3 = t 2 + 2 × t 3 , and FIG. The cross-sectional view in the case where the thickness t 3 > t 2 + 2 × t 4 of the side joining means is shown. FIG. 6A shows a case where the thickness t 4 of the joining means on the IC chip side is smaller than the thickness t 4 of the joining means on the lead side. In FIG. 6C, the thickness t 4 of the adhesive on the lead side is a thickness that does not require depressing.
In the case of (b), the depressing amount is between the cases of FIGS. 6 (a) and 6 (c). Further, FIG. 6D shows an example in which the thickness t 4 of the joining means on the lead side is made thicker than that in the case of FIG. 6C. In the case of the present embodiment, the IC chip is not inclined by setting the depressing depth t D1 to be t D1 = t 2 / 2- (t 3 -2 × t 4 ) / 2.

【0019】本実施例の場合には、ICチップの固定が
安定している上にいずれもスペーサを使用していないの
で、スペーサの搭載コストやスペーサの部品代が不要に
なりその分のコストダウンが可能になる。図6(d)の
様な寸法にすることは図の上下方向の寸法が大きくなる
ため、樹脂封止した場合に厚くなってしまうので望まし
くない。図6(c)がデプレスが要らず加工工数や金型
費用が節約でき最も望ましく、続いて(b)、(a)の
順にデプレス量が少なくて済むのでデプレス時のリード
のデプレス深さバラツキが少なくなり、リード側のワイ
ヤボンディング位置が安定し品質が向上するので望まし
い。
In the case of the present embodiment, since the fixing of the IC chip is stable and neither spacer is used, the mounting cost of the spacer and the parts cost of the spacer are unnecessary, and the cost is reduced accordingly. Will be possible. It is not desirable to make the dimensions as shown in FIG. 6 (d) because the dimension in the vertical direction in the figure becomes large and the thickness becomes large when the resin is sealed. 6C is most desirable because depressing is not required and processing man-hours and die costs can be saved. Then, since the depressing amount can be reduced in the order of (b) and (a), the depressing depth variation of the lead at the time of depressing varies. This is desirable because it reduces the number of wire bonding positions on the lead side and stabilizes the quality.

【0020】次に図7に本発明の半導体装置の第四の実
施例に関する断面図を示すが、接合手段の厚さに制限が
あり、かつリードのデプレス量を少なくしなければなら
ないような場合には、第三の実施例で示したリードA・
12、リードB・13のデプレスと第二の実施例で示し
たICチップの傾き防止のためのスペーサ17を用いる
方法を共用し、向かい合うリードA・12とリードB・
13の先端は相互にICチップの接合面と垂直方向に各
々逆方向にデプレス加工され、ICチップA・1,IC
チップB・2はリードA・12とリードB・13の先端
にポリイミドテープ6によってその一端を固定され、他
端は裏面を互いにスペーサ17を介してポリイミドテー
プ6で固定されている。この場合のリードのデプレス深
さtD2は、 tD2= t2/2+(t3 −t4)+t4/2−t1/2 である。
Next, FIG. 7 is a sectional view showing a fourth embodiment of the semiconductor device of the present invention. In the case where the thickness of the joining means is limited and the lead depressing amount must be reduced. The lead A shown in the third embodiment is
12, the method of using the spacer 17 for preventing the inclination of the IC chip as shown in the second embodiment is shared by depressing the leads B and 13, and the leads A and 12 and the leads B and 12 facing each other are used.
The tips of 13 are mutually depressed in a direction perpendicular to the bonding surface of the IC chip, and the IC chip A.1, IC
The tip B of the chip B.2 is fixed to the tips of the leads A.12 and the lead B.13 by a polyimide tape 6 at one end, and the other end is fixed at the back surface by the polyimide tape 6 via a spacer 17. Depuresu depth t D2 of this case leads, t D2 = t 2/2 + (t 3 -t 4) is a + t 4/2-t 1 /2.

【0021】一方、スペーサを用いない場合のデプレス
量tD1は、前述の説明で示したように、 tD1= t2/2+t4/2+(t3−t4) である。このときスペーサによってデプレス量を小さく
するためには、 tD2 < tD1 なので、式を解くと、 −t3< t1<2×t2−3×t3+4×t4 しかし 0<t1 なので 0< t1<2×t2−3×t3+4×t4 にすることで、 スペーサを用いない場合のデプレス量
D1に比較してデプレス量を小さくすることができる。
Meanwhile, Depuresu amount t D1 of the case of not using the spacer are as indicated in the foregoing description, t D1 = t 2/2 + t 4/2 + (t 3 -t 4). At this time, in order to reduce the depressing amount by the spacer, t D2 <t D1, and therefore the equation is solved: −t 3 <t 1 <2 × t 2 −3 × t 3 + 4 × t 4 but 0 <t 1 Since 0 <by the t 1 <2 × t 2 -3 × t 3 + 4 × t 4, it is possible to reduce the Depuresu weight compared to Depuresu amount t D1 of the case of not using a spacer.

【0022】[0022]

【発明の効果】複数のICチップを接着剤で固定し、こ
のICチップと外部出力用端子を金線等の導電性接合手
段で電気的に接合し、樹脂等の封止材で封止する半導体
装置において、請求項1によるようにICチップの裏面
同士を接着剤や接合テープ等の接合手段で接着すること
によって、ICチップの接着と固定に基板を用いる場合
に比較して接着・固定に要する厚さを薄くできるため、
パッケージ内部に占める接合部材の体積を小さくかつ薄
くできるので、封止する際に未充填が発生しにくく、金
線やICチップの露出を防ぎつつパッケージの薄型化を
実現できるという効果を有する。
EFFECTS OF THE INVENTION A plurality of IC chips are fixed with an adhesive, and the IC chips and external output terminals are electrically joined by a conductive joining means such as a gold wire and sealed with a sealing material such as resin. In the semiconductor device, the back surfaces of the IC chips are adhered to each other by a bonding means such as an adhesive or a bonding tape so that the IC chips can be bonded and fixed as compared to the case where a substrate is used for bonding and fixing the IC chips. Because the required thickness can be reduced,
Since the volume of the bonding member occupying inside the package can be made small and thin, there is an effect that unfilling is unlikely to occur at the time of sealing and the package can be made thin while preventing the exposure of the gold wire and the IC chip.

【0023】さらに、接合するICチップの位置をずら
し、一方の端をリードに接合し、IC同士の接合面をス
ペーサを介してICが傾かないようにバランスをとりな
がら接合することによってICチップをより安定して固
定できる(宙づりにならない)。また、ずらしたICを
接合するリードを接合したICが傾かない程度にデプレ
スすることによって、ICチップをより安定して固定で
きると同時にスペーサを用いないのでデプレスの工数は
かかるが、スペーサ搭載の工数とスペーサの部品代を削
減でき、コストダウンができる。さらにICチップ接合
面へのスペーサ搭載とリードのデプレスの共用によっ
て、前述のICチップ固定安定化に加えて、スペーサの
分だけデプレスを少なくすることができるので、リード
デプレスが深くなる場合に生じるデプレス深さのバラツ
キを少なくすることができるという効果を有する。
Further, the positions of the IC chips to be bonded are shifted, one end is bonded to the lead, and the bonding surfaces of the ICs are bonded through spacers while balancing the ICs so that the ICs do not incline. Can be fixed more stably (does not become suspended). In addition, the IC chip can be more stably fixed by depressing the IC that joins the shifted ICs so that the IC to which the leads are joined does not tilt, and at the same time the spacers are not used, so the depressing man-hour is high, but the man-hours for mounting the spacer And the parts cost of the spacer can be reduced, and the cost can be reduced. Further, by mounting the spacer on the IC chip bonding surface and sharing the lead depressurization, in addition to the above-described IC chip fixing and stabilization, the depressurization can be reduced by the amount of the spacer, which occurs when the lead depressing becomes deep. This has the effect that variations in the depth of depression can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の半導体装置の第一の実施例に関する断
面図。
FIG. 1 is a sectional view of a semiconductor device according to a first embodiment of the invention.

【図2】本発明の半導体装置の第一の実施例に関する内
部構造の斜視図。
FIG. 2 is a perspective view of the internal structure of the first embodiment of the semiconductor device of the present invention.

【図3】本発明の半導体装置の第一の実施例の製造方法
の一例に関する主な製造工程ごとの断面図。
FIG. 3 is a cross-sectional view for each main manufacturing process relating to an example of the manufacturing method of the first example of the semiconductor device of the present invention.

【図4】本発明の半導体装置の第一の実施例を応用し、
4個のICチップを接合した場合の一実施例の斜視図。
FIG. 4 is a diagram showing an application of the first embodiment of the semiconductor device of the present invention,
The perspective view of one Example at the time of joining four IC chips.

【図5】本発明の半導体装置の第二の実施例に関する断
面図。
FIG. 5 is a sectional view of a semiconductor device according to a second embodiment of the present invention.

【図6】本発明の半導体装置の第三の実施例に関する断
面図。
FIG. 6 is a sectional view of a semiconductor device according to a third embodiment of the invention.

【図7】本発明の半導体装置の第四の実施例に関する断
面図。
FIG. 7 is a sectional view of a semiconductor device according to a fourth embodiment of the present invention.

【図8】従来の半導体装置の一例に関する断面図。FIG. 8 is a sectional view of an example of a conventional semiconductor device.

【符号の説明】[Explanation of symbols]

1.ICチップA 2.ICチップB 3.ICチップD 4.基板 5.配線パターン 6.ポリイミドテープ 7.金線 8.ダイパッド 9.ICチップE 10.封止材 11.厚手のポリイミドテープ 12.リードA 13.リードB 14.断差 15.電極 16.スペース 17.スペーサ 18.支持ピンA 19.支持ピンB 20.支持ピンC 21.吸着ノズル 22.搬送爪 23.支持ピンD 24.金型 25.ICチップC 1. IC chip A 2. IC chip B 3. IC chip D 4. substrate 5. Wiring pattern 6. Polyimide tape 7. Gold wire 8. Die pad 9. IC chip E 10. Sealing material 11. Thick polyimide tape 12. Lead A 13. Lead B 14. Gap 15. electrode 16. space 17. Spacer 18. Support pin A 19. Support pin B 20. Support pin C 21. Suction nozzle 22. Transport claw 23. Support pin D 24. Mold 25. IC chip C

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01L 21/60 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) H01L 21/60

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】外部出力用端子を有するリードと、 ワイヤボンディングによって該リードに電気的に接続さ
れた第1のICチップと第2のICチップと、 前記リードの少なくとも一部と前記第1および第2のI
Cチップを封止する樹脂とを有し、 前記第1および第2のICチップが非能動面同士を第1
接合手段によって接着され 前記第1のICチップが第2の接合手段によって前記リ
ードに接着され、 前記第2のICチップが第3の接合手段によって前記リ
ードに接着された 半導体装置において、 前記第1および第2のICチップが、接合面の方向に相
対的にずれて重なる位置に配置され、前記接合手段によ
って直に接着されてなり、 前記リードの厚みをt2、前記第1の接合手段の厚みを
t3、前記第2および前記第3の接合手段の厚みをt4
としたとき、 t3=t2+2×t4 の式が実質的に成り立つことを特徴とする半導体装置。
1. A lead having an external output terminal, a first IC chip and a second IC chip electrically connected to the lead by wire bonding, at least a part of the lead and the first and second IC chips. Second I
A resin for encapsulating a C chip, wherein the first and second IC chips have first and second inactive surfaces .
Is bonded by a bonding means, said Li said first IC chip by a second joining means
It is bonded to the over-de, the Li by the second IC chip third joining means
In the semiconductor device bonded to a card, the first and second IC chips are arranged at positions where they are relatively displaced and overlapped in the direction of the bonding surface, and are directly bonded by the bonding means. Is t2, the thickness of the first joining means is t3, and the thicknesses of the second and third joining means are t4.
The semiconductor device is characterized in that the equation t3 = t2 + 2 × t4 substantially holds.
【請求項2】外部出力用端子を有するリードと、 ワイヤボンディングによって該リードに電気的に接続さ
れた第1のICチップと第2のICチップと、 前記リードの少なくとも一部と前記第1および第2のI
Cチップを封止する樹脂とを有し、 前記第1および第2のICチップが非能動面同士を第1
接合手段によって接着され 前記第1のICチップが第2の接合手段によって前記リ
ードに接着され、 前記第2のICチップが第3の接合手段によって前記リ
ードに接着された 半導体装置において、 前記第1および第2のICチップが、接合面の方向に相
対的にずれて重なる位置に配置され、スペーサを介して
前記接合手段によって接着されてなり、 前記スペーサの厚みをt1、前記リード厚みをt2、
記第1の接合手段の厚みをt3、前記第2および前記第
3の接合手段の厚みをt4としたとき、 2×t3+t1=t2+2×t4 の式が実質的に成り立つことを特徴とする半導体装置。
2. A lead having an external output terminal, a first IC chip and a second IC chip electrically connected to the lead by wire bonding, at least a part of the lead and the first and second IC chips. Second I
A resin for encapsulating a C chip, wherein the first and second IC chips have first and second inactive surfaces .
Is bonded by a bonding means, said Li said first IC chip by a second joining means
It is bonded to the over-de, the Li by the second IC chip third joining means
In the semiconductor device bonded to a card, the first and second IC chips are arranged at positions overlapping with each other with a relative displacement in the direction of the bonding surface, and bonded by the bonding means via a spacer, the thickness of the spacer t1, the lead thickness t2, before
The thickness of the first joining means is t3, the second and
The semiconductor device is characterized in that the equation 2 × t3 + t1 = t2 + 2 × t4 substantially holds, where t4 is the thickness of the joining means of 3 .
JP6968795A 1995-03-28 1995-03-28 Semiconductor device Expired - Fee Related JP3381447B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6968795A JP3381447B2 (en) 1995-03-28 1995-03-28 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6968795A JP3381447B2 (en) 1995-03-28 1995-03-28 Semiconductor device

Publications (2)

Publication Number Publication Date
JPH08264711A JPH08264711A (en) 1996-10-11
JP3381447B2 true JP3381447B2 (en) 2003-02-24

Family

ID=13410037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6968795A Expired - Fee Related JP3381447B2 (en) 1995-03-28 1995-03-28 Semiconductor device

Country Status (1)

Country Link
JP (1) JP3381447B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100340862B1 (en) * 1998-06-29 2002-09-25 주식회사 하이닉스반도체 Stack package and its manufacturing method
KR100391094B1 (en) * 2001-02-22 2003-07-12 삼성전자주식회사 Dual die package and manufacturing method thereof
KR100532947B1 (en) * 2002-07-11 2005-12-02 주식회사 하이닉스반도체 Method for stacking and packaging first and second semiconductor chip with center pads on their circuit formation surfaces
FI20041525A (en) * 2004-11-26 2006-03-17 Imbera Electronics Oy Electronics module and manufacturing process
JP2007294884A (en) * 2006-03-29 2007-11-08 Sanyo Electric Co Ltd Semiconductor device
JP4750076B2 (en) * 2007-05-24 2011-08-17 ルネサスエレクトロニクス株式会社 Manufacturing method of semiconductor device

Also Published As

Publication number Publication date
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