JP3297856B2 - Phosphor screen structure, field emission type display device, and manufacturing method thereof - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a phosphor screen structure, a field emission display device, and a method of manufacturing the same.
Using this phosphor screen structure, a field emission display (FED: Field Emission) using a field emission cathode as an electron source.
Display), and a method of manufacturing the color phosphor screen structure and the display.

[0002]

2. Description of the Related Art Generally, a slurry method, a printing method or an electrodeposition method is employed as a method for forming a fluorescent screen in a color cathode ray tube (including a monochrome tube).

However, in a fluorescent screen panel for FED, a large number of pillars having a height of about several hundred μm called pillars for withstanding a high vacuum inside the panel and supporting the vacuum are formed in advance. The phosphor must be applied to the gaps between the multiple pillar patterns.

[0004] For this reason, in the slurry method and the printing method which have been conventionally used, pillars cause a three-dimensional hindrance in the process, and it is considerably difficult to form a uniform fluorescent surface. In addition, since an organic material is used as a binder, it cannot be completely removed only by burning this material in a firing step. For example, when forming a color phosphor screen in an FED, the inside of the display should be 10 ^-8.
Although it is necessary to maintain an ultra-high vacuum of about Torr, the slurry method has a disadvantage that the degree of vacuum is deteriorated due to the above-mentioned gas emitted from the fluorescent screen by the organic material.

However, in the electrodeposition method, a fluorescent substance can be applied to a predetermined position (a position corresponding to an electrode pattern) irrespective of the presence of pillars, and no gas is released from the coating film, and a high vacuum is applied. Can also be held. The present applicant has already proposed to form a fluorescent screen for FED by utilizing the features of the electrodeposition method (Japanese Patent Application No. 4-225994: Japanese Patent Application Laid-Open No. 6-7767).
No. 8). That is, according to the method of the prior application, when a phosphor of a predetermined color is electrodeposited on a selection electrode, a voltage of zero or reverse polarity (reverse bias) is applied to a non-selection electrode on which no phosphor is electrodeposited. By applying the voltage, undesired adhesion of the phosphor to the non-selective electrode can be prevented.

According to this electrodeposition method, the phosphor to be coated is dispersed in an aqueous solution or a non-aqueous electrodeposition solution containing an electrolyte (added to positively or negatively charge the phosphor). To be electrodeposited in the electrodeposition solution (that is,
The electrode on the inner surface of the panel) and its counter electrode are usually opposed to each other with an interelectrode distance of the order of several tens of mm. If the phosphor is positively charged, the electrode side has a negative potential and the counter electrode has a positive potential. When the phosphor is negatively charged, the electrode is set to a positive potential and the counter electrode is set to a negative potential, and the phosphor is electrodeposited on the electrode to form a phosphor screen.

[0007] For example, as proposed in Japanese Patent Publication No. 60-11415, a stripe-shaped transparent electrode is formed to form a color phosphor screen comprising phosphors of green, blue and red colors. The above process is repeated for each of green, blue and red, and the phosphor of each color is sequentially electrodeposited.

However, as a result of studying the technique of applying a phosphor to the phosphor panel by the electrodeposition method, the present inventor has found that there are the following problems to be improved.

That is, first, conventionally, electrodeposition was performed by placing a counter electrode (counter electrode) in parallel only at a position separated by a certain distance (for example, on the order of 40 to 50 mm) from the phosphor screen panel surface. Also, during a short electrodeposition time, the charged phosphor particles that actually participate in the electrophoresis by electrophoresis are a small distance from the surface to be electrodeposited (depending on the electrodeposition time, at most around 1 mm).
Because it is only a group within the group, it is difficult to fine-tune the electric field intensity applied to the charged phosphor particles necessary to achieve accurate electrodeposition coating on narrow stripe pattern electrodes. In some cases, uniform formation of a high-definition fluorescent screen cannot be realized.

In addition, since the electrode is electrodeposited with a narrow stripe pattern, the width between the stripes naturally becomes narrow. Electrodeposition is also performed on the adjacent stripe electrodes, and there is a disadvantage that color mixing is likely to occur.

Further, since the counter electrodes are arranged at a fixed distance, the size of the electrodeposition tank itself becomes large, and the uniform circulation and stirring of the electrodeposition liquid becomes more difficult as the amount of liquid used increases. are doing.

[0012]

SUMMARY OF THE INVENTION An object of the present invention is to provide an FE
Even when pillars for holding a high vacuum are formed in D, a uniform fluorescent surface can be obtained without being affected by the three-dimensional effect, and the fluorescent surface must be formed so as not to impair the degree of vacuum. A phosphor screen structure and a field emission display device (hereinafter referred to as a field emission display device) capable of forming a fluorescent substance on a pattern having a fine width and a fine pitch such as a narrow stripe pattern with high definition and good operability without color mixing. FED) as well as a method for producing these.

[0013]

That is, the present invention provides a plurality of first electrodes (for example, stripe-shaped selection electrodes) to which a plurality of kinds of phosphors (particularly phosphors of each color for color) are respectively applied. ) Is a phosphor screen structure provided on a base (for example, a glass substrate for a phosphor screen panel), and the electrodeposit is provided between the plurality of first electrodes and at a position adjacent to each of the first electrodes. Wherein a second electrode (for example, a stripe-shaped non-electrodeposited reverse bias electrode) to which is not applied is provided on the substrate.

In the phosphor screen structure according to the present invention, the phosphors of a plurality of colors (particularly, red, green, and blue) have a plurality of transparent electrodes (for example, stripes) as first electrodes corresponding to the phosphors of the respective colors. Indium tin oxide (ITO)
A second electrode (e.g., a non-electrodeposited reverse bias electrode) which is selectively applied to the plurality of transparent electrodes and which is adjacent to the plurality of transparent electrodes and to which no electrodeposit is applied. An electrode integrated with a vacuum-resistant column (eg, a pillar) provided between each phosphor group consisting of a set of optical bodies;
It is desirable that at least one of the plurality of color phosphors be provided with an electrode (for example, an electrode having a multifunctional structure for fine electric field intensity control) provided between the phosphors.

Preferably, the plurality of transparent electrodes as the first electrodes and the second electrodes adjacent thereto are provided on the same inner surface of the common fluorescent panel. Also, a plurality of phosphors may constitute a color phosphor surface, and a plurality of transparent electrodes as first electrodes and a second electrode adjacent thereto may be formed in stripes.

The present invention also provides a field emission display device comprising a fluorescent panel having a phosphor screen structure according to the present invention and a panel having an electrode structure provided with a field emission cathode. Is what you do.

The present invention further provides a method of manufacturing the above-mentioned phosphor screen structure or the field emission display device according to the present invention, in which a plurality of kinds of phosphors (particularly phosphors of each color for color) are coated. A plurality of first electrodes (e.g., stripe-shaped selection electrodes) for attachment, and a second electrode (between the plurality of first electrodes and adjacent to the first electrodes, respectively, to which no electrodeposit is finally applied) Providing a common substrate (for example, a glass substrate for a fluorescent panel) with a stripe-shaped non-electrodeposited reverse bias electrode; selecting a predetermined electrode from among the plurality of first electrodes; Performing an electrodeposition treatment in an electrodeposition solution using an electrode other than an electrode including the second electrode as a counter electrode, and electrodepositing the phosphor on the selected electrode. It is.

In this manufacturing method according to the present invention, a voltage is applied to a selected first electrode in a water-insoluble or water-soluble electrodeposition solution to control an electric field applied to the first electrode and its vicinity. It is desirable that a reverse bias voltage be applied to electrodes other than the selected first electrode. In this case, the third electrode may be arranged to face the base surface on which the first electrode and the second electrode are provided at a predetermined interval, and a reverse bias voltage may be applied to the third electrode. By applying the bias voltage to the third electrode, the degree of freedom regarding the control of the electric field intensity near the selection electrode is increased, and a higher definition fluorescent screen may be formed.

It is also desirable that a pretreatment for preventing deterioration of the first electrode is performed on the electrodeposition liquid.

It is preferable that the first electrode and the second electrode are provided on the same surface on the inner surface of the common fluorescent panel, and these can be formed by lithography or printing. By providing the first electrode and the second electrode as a counter electrode on the same surface, it is possible to reduce the size and size of the electrodeposition tank and, consequently, the entire apparatus, and to further reduce the amount of the electrodeposition liquid and achieve uniform circulation and stirring. Becomes easier.

The phosphor screen structure according to the present invention may be specifically manufactured as follows. That is, in the electrodeposition method,
Basically, the opposing electrodes arranged as in the conventional method are basically eliminated (however, such opposing electrodes can be used in combination), and the stripe pattern to be electrodeposited formed on the effective screen portion of the phosphor screen panel is selected. With respect to the electrode portion (an electrode assembly for an arbitrary specific color), a non-selected stripe electrode portion (an electrode assembly for another color) on both adjacent electrode patterns (however, one side electrode may be used) or An electrodeposition method of applying and controlling a DC voltage is used by using an electrode portion (mainly a striped electrode) provided in advance between the stripe electrodes to be electrode-coated as a counter electrode.

In this case, by forming and arranging the opposing electrodes on the same plane by lithography or printing, the distance accuracy between the electrodes is greatly improved, and the fine adjustment of the electric field to the selected electrode portion can be performed. As a result, it is possible to accurately perform electrodeposition on a high-definition pattern.

By applying a DC reverse bias voltage to all of the electrodes other than the selection electrode, non-electrostatic (besides the Coulomb force) phosphor adhesion between the stripe electrodes and to the stripe electrodes for other colors. (Color mixing) can also be prevented. The fluorescent surface may be one in which stripe-shaped phosphors are sequentially arranged in one direction, or a pattern which can apply an electric field from the periphery (on the same plane) of the electrode to be electrodeposited to the electrode to be electrodeposited. I just need.

In the present invention, on the inner surface of the phosphor panel of the FED, first, a plurality of narrow stripe-shaped transparent electrodes to be electrodeposited corresponding to the phosphors of each color, and the periphery of the assembly of these electrodes ( Guard electrode is provided solidly on the invalid screen section)
Next, a black stripe (insulating layer) and a conductive stripe (conductive layer) are stacked in this order between the stripes to be electrically charged and the trio (a set of stripes for each color) to form a laminate. For example, pillars (insulating layers) for maintaining a vacuum at predetermined positions on the laminate between the trios
Can be stacked and arranged (every few trios may be arranged).

Thereafter, an electrodeposition solution in which a phosphor corresponding to each color is dispersed is prepared for each color. In each electrodeposition solution, a selection electrode (a stripe electrode to be electrodeposited) has a negative potential (positive potential). By applying an optimal DC reverse bias potential to the non-selective electrodes (the electrodes located on both sides of the stripe electrode to be electrodeposited and all the remaining electrodes) and the guard electrode. In addition, a predetermined phosphor can be accurately and uniformly deposited on a narrow stripe electrode without color mixing.

This is because, on the stripe electrode to be electrodeposited, the electrodes on both sides existing on the same plane serve as counter electrodes, and the fine adjustment of the electric field allows the phosphor to be applied only to the selected electrode. This is because they adhere well. This makes it easy to attach the phosphor to the high-definition stripe pattern.

[0027]

Embodiments of the present invention will be described below.

FIGS. 1 to 15 show a first embodiment in which the present invention is applied to uniform formation of a high-definition color phosphor screen.

(Outline of FED Panel) First, FIG. 12 and FIG.
The configuration of an FED (field emission display) 13 will be schematically described.

The FED is obtained by extracting electrons using a so-called Spindt-type field emission microcathode having a small size of a cathode of about several μm or less, and irradiating the electrons to the phosphor surface with accelerated irradiation. This is a thin flat-panel display device that emits light.

FIG. 12 shows an exploded perspective view as an example. In this FED, for example, R (red), G
(Green) and B (blue) phosphor elements of ITO (In)
a transparent phosphor screen panel 14 having a color phosphor screen 23 formed in stripes through transparent electrodes 1R, 1G, and 1B made of dium tin oxide (a mixed oxide of In and Sn). The back panel 16 on which the electrode structure 15 having the field emission cathode is formed is hermetically sealed with a sealing material or the like, and is maintained at a predetermined degree of vacuum.

The fluorescent screen panel 14 and the rear panel 16 are sealed via a pillar (so-called pillar) 10 having a predetermined height in order to keep the distance between them. This pillar 10 is provided between trios of phosphor elements R, G, and B of three primary colors.
It is provided on an electrode (reverse bias electrode at the time of electrodeposition) 9 provided in the same pattern on the insulating layer 8 to be a black stripe.

The electrode assembly 15 has, for example, strip-shaped cathode electrodes 17 extending in the direction indicated by the x-axis in FIG. 12 on the inner surface of the back panel 16 in parallel in a stripe shape. Cathode electrode 17 through layer 18
The strip-shaped gate electrodes 19 are arranged in parallel in a striped manner in the y-axis direction substantially orthogonal to the extension direction of.

Then, each cathode electrode 17 and gate electrode 19
At the intersections 22 with each other, for example, a plurality of cathode holes 20 having a predetermined opening width w are opened so as to correspond to the phosphor elements of the three primary colors indicated by R, G, and B on the phosphor screen. ing. In these cathode holes 20, on the cathode electrode 17, for example, as shown in a schematic enlarged perspective view of the main part in FIG. Have been.

As a method of performing color display by the FED, a method of associating each cathode of the selected intersection 22 with a phosphor of one color, and a method of associating each cathode with a phosphor of a plurality of colors. There is a so-called color sorting method. The operation of the color selection in this case will be described with reference to FIGS.

In FIG. 14, R, G, and B phosphors corresponding to each color are sequentially arranged and formed on a plurality of stripe-shaped transparent electrodes 1 on the inner surface of the phosphor screen panel 10, and the electrode of each color is formed. Are respectively collected and derived from terminals of 3R for red, 3G for green, and 3B for blue.

On the opposing back panel 16, the cathode electrode 17 and the gate electrode 19 are provided in the form of stripes orthogonal to each other as described above.
When an electric field intensity of 10 ⁸ to 10 ⁹ V / m is applied in between, electrons are emitted from the field emission cathode 21 formed at the intersection 22 of each electrode.

On the other hand, the transparent electrode 1 (that is, the anode electrode)
A voltage of 100 to 1000 V is applied between the electrode and the cathode electrode 17 to accelerate electrons and cause the phosphor to emit light. The example of FIG. 14 shows a case where a voltage is applied only to the red phosphor R to accelerate the electrons as shown by the arrow e.

As described above, each of the three terminals R, G,
Color display can be performed by selecting B in time series. NTS of one point cathode, gate and anode (phosphor stripe) on each cathode electrode row
FIG. 15 shows a timing chart for color selection in the C system.

When each cathode electrode 17 is driven line-sequentially at a period of 1H, a signal of + hV is supplied to each of the color phosphors R, G, and B in each of H periods, while a gate signal and a cathode signal are supplied. A signal is given in synchronism with + αV as a gate signal and −αV to −βV as a cathode signal in an H / 3 cycle, and a gate-cathode voltage V _PP = + 2α
Emits an electron when V, R selected for each H / 3,
The G and B phosphors are allowed to emit light to perform color selection, thereby enabling full color display.

(Formation of Color Phosphor Screen) Next, an example of a method for forming the above color phosphor screen will be described.
A transparent conductive layer made of, for example, ITO is formed on the entire inner surface of the fluorescent screen panel 14 for D by sputtering or electron beam evaporation (EB evaporation), and then a photoresist is formed on the transparent conductive layer. Is applied over the entire surface. Next, using a chromium mask pattern (including a predetermined stripe pattern and a guard electrode pattern) prepared in advance based on a lithography technique, a proximity exposure method or a contact exposure method using ultraviolet light, a laser exposure method, and an EB exposure method using ultraviolet light. Exposure is performed on the photoresist by patterning and the like, and through the development, etching, and resist stripping steps, the ITO transparent electrode 1 to be electrodeposited is exposed.
R, 1G, 1B, etc. are formed.

FIG. 3 shows the striped electrode portion 1 and its lead-out terminal patterns 3R, 3G, 3B (these are common terminals of the electrodes of each color). The electrode lead-out terminal pattern 3T between the trios is also shown. Show.

As shown in FIG. 4, for example, as shown in FIG. 4, the terminal lead-out processing section 6 of the transparent electrodes 1R, 1G, and 1B sequentially deposits and forms each transparent electrode in a stripe shape, and then puts the electrodes corresponding to the same color at the ends. They can be formed by connecting them in common.
That is, 3R, 3G, and 3B indicate terminals common to the respective colors derived corresponding to red, green, and blue, respectively, and one electrode 1R, 1G, or 1B of each transparent electrode is more than the other electrode. Extend and extend each terminal for each trio.
However, the derived position is not limited to this, and various modifications are possible, such as setting the interval at every two trios.

Then, on one end side of the stripe-shaped transparent electrode 1, an insulating layer 33 made of a glass paste or the like extended in a direction perpendicular to this is formed by a printing method or the like. Contact holes 2R, 2G, and 2B are formed corresponding to 1R, 1G, and 1B, respectively. Such a contact hole is, for example, shown in FIG.
As shown in (A), patterning can be performed using a mask 35 having a mask portion 36 other than the contact holes 2R, 2G, and 2B.

Further, a conductive material 34 made of a conductive metal or carbon paste extending in a direction perpendicular to the transparent electrode 1 is further formed on the conductive material 34 by a printing method or the like, for example, as shown in FIG.
It can be patterned using a stripe-like conductive material mask 37 shown in FIG. Thereby, the transparent electrodes 1R, 1G, and 1B corresponding to each color can be electrically connected, and the common terminals 3R, 3G, and 3B can be derived.

In FIGS. 3 and 4, the electrode width W of the stripe electrodes 1R, 1G, and 1B to be electrode-deposited is 50 μm, the electrode interval d is 50 μm, and the interval L between the sets of red, green, and blue (one trio) is The distance between the guard electrode 4 and the end of the stripe electrode portion 1 adjacent to the guard electrode 4 is 250 μm. Of course, the electrode width and the electrode interval, the distance between the trios, and the distance between the guard electrode and the adjacent stripe electrode are not limited. In particular, the width of the stripe electrode to be charged can be further reduced. is there.

Next, as shown in FIGS. 1 and 2, the insulating layer 8 and the conductive layer 9 are interposed between the trio of the stripe electrodes 1R, 1G, and 1B to be applied to the panel 14 formed as described above.
Is formed by multi-layer printing or the like (preparation of inter-trio electrodes), and pillars 10 for supporting a vacuum are further formed thereon by the same multi-layer printing or the like to a height of 100 μm.
Formed.

Next, as shown in FIG. 6, this panel is placed in an electrodeposition tank 11 in which fluorescent powder of a desired color is dispersed, and striped corresponding to each color under uniform stirring by a stirrer 13 or the like. Red, green, and blue phosphors are sequentially electrodeposited on the transparent electrode.
In addition to the case using the stirrer 13, stirring may be performed by a stirring blade, a pump circulation using a motor, or the like.

First, a panel as shown in FIGS. 1 and 2, for example, is placed in an electrodeposition tank 11R containing an electrodeposition solution 12R in which red fluorescent powder is dispersed. In the cathodic electrodeposition, red fluorescent powder 30 g, aluminum nitrate and lanthanum nitrate 1 to 3 × 10 ⁻⁷ mol / l as electrolytes, glycerin as a dispersing agent 10 ml, isopropyl alcohol 10 as a solvent
An electrodeposition solution 12R containing 00 ml is used.

A negative potential is applied to the striped narrow transparent electrode (selection electrode) 1R corresponding to red via the terminal 3R, a stripe electrode 1G corresponding to the green electrode via the terminals 3G and 5, and a guard. 0 (positive potential) is applied to the electrode 4 (these correspond to the counter electrode), and 0 (positive potential) is applied accurately (fine adjustment control) to the blue electrode 1B and the trio electrode 9 via the terminals 3B and 3T to correspond to red. A red fluorescent powder is electrodeposited on the narrow electrode 1R as shown in FIG. This red phosphor is selectively electrodeposited only on the 1R, and the red phosphor is applied on top of the 0 or positive potential other striped electrode to be deposited because it is reverse biased to the 1R. No color mixing occurs, so that a uniform and accurate red phosphor film R is formed. Thereafter, it is washed with alcohol or the like and dried with hot air.

Next, the panel 14 is placed in an electrodeposition solution 12G (a composition ratio substantially equivalent to that of the above-described red fluorescent powder) in which green fluorescent powder is dispersed, and a stripe corresponding to green is supplied via a terminal 3G. Negative potential, stripe-shaped transparent electrodes 1R and 1B (opposite electrodes) corresponding to red and blue, inter-trio electrode 9, guard electrode 4 are applied to a narrow transparent electrode 1G (this electrode is now a selection electrode). To the red phosphor film R and the blue stripe electrode 1B previously applied on the narrow electrode 1G corresponding to green without color mixing, as shown in FIG. The green phosphor powder is electrodeposited to form an accurate and uniform green phosphor film G. Thereafter, it is washed with alcohol or the like and dried with hot air.

Next, the panel 14 is placed in an electrodeposition solution 12B (a composition ratio substantially equivalent to that of the above-described red fluorescent powder) in which blue fluorescent powder is dispersed, and a stripe corresponding to blue is supplied via a terminal 3B. Potential on the narrow transparent electrode 1B, green electrode 1G,
By applying 0 or a positive potential to the stripe-shaped electrode (opposite electrode) corresponding to the inter-trio electrode 9, the red electrode 1 </ b> R, and the guard electrode 4, as shown in FIG. 9, blue is applied to the narrow electrode 1 </ b> B corresponding to blue. Only the fluorescent powder is electrodeposited onto the red and green fluorescent films R and G, which have already been deposited on the electrodes 1R and 1G, without any color mixing (no phosphor is deposited on the inter-trio electrodes), and the accuracy is high. A uniform blue phosphor film B is formed. Thereafter, it is washed with alcohol or the like and dried with hot air.

Through the above steps, as shown in FIGS. 10 and 11, red, green and blue phosphors R, G and B are selectively applied onto the narrow stripe electrodes 1R, 1G and 1B, respectively. be able to. In this case, the inter-trio electrode 9 is not covered with any phosphor and the portions other than the pillars 10 are exposed.

In the cathodic electrodeposition, hydrogen or the like may be generated on the cathode side due to electrolysis of water or the like and an electrochemical reaction of the electrolyte (free ions) at the cathode, which may reduce the ITO film. This is a pretreatment of the electrodeposition solution (water is removed by H ₂ removal by electrolytic treatment or the like, and removal of electrolyte-free ions such as Al ³⁺ and La ³⁺ is carried out by replacing the supernatant of the electrodeposition solution or the like. ) It is possible to avoid this.

In the above process, the coating value of each phosphor can be controlled by the electrodeposition time, electric field intensity, phosphor amount, stirring intensity and the like. For example, an ITO stripe electrode [48 × 48 mm square effective screen] Pitch 330μm, stripe width 50μm, distance between stripes 50μm, distance between trios (red, green, blue) 80μ
m, stripe thickness of 200 to 300 nm, 145 lines per color, 435 lines in total], and if the DC potential is 5 to 7.5 V, an electrodeposition time of 1 to 2 minutes is sufficient.

The reason why the voltage has a range as described above is that when red, green, and blue are applied by electrodeposition, the electrodes serving as opposite electrodes are different (the distance between the electrodes is also changed). By the way, when the green phosphor is electrodeposited on the center of the red, green and blue stripe electrodes 1R, 1G and 1B, the adjacent electrodes, that is, the red and blue stripe electrodes 1R and 1B are opposed electrodes. (The distance between the electrodes is the same), so that the same potential (about 7.5 V) may be applied to each electrode.

For the other colors, the potential is adjusted according to the distance between the electrodes (fine adjustment to the optimum electric field strength), so that the electrodeposition can be performed accurately (the range of the potential difference applied to the opposing electrode depends on the distance between the electrodes). , But cannot be uniquely determined, but is at least 500 V or less, preferably in the range of 1 to 50 V).

The phosphors R, G, and B used include, for example, red phosphors such as Y ₂ O ₂ S: Eu and CdS, and green phosphors such as ZnS: Cu and Al. ZnS: Ag, Cl, ZnS: Ag, A as blue phosphor
l and other powders that are easily eluted in the solvent,
Most phosphors can be used. In addition, although a glass paste is used as the insulating layer 8 and an aluminum paste or the like is used as the conductive layer 9, the material is not limited to these materials.

As described above, according to the present embodiment, in forming the fluorescent screen for the FED, the non-selective electrodes (the stripe electrodes to be electrically charged) are set on the same plane as the non-selective electrodes. The electrodeposition method of applying a DC bias voltage to the portion to be subjected to fine adjustment and applying a DC bias voltage is applied. The following remarkable effects can be obtained.

(1) An adjacent electrode pattern (one-sided electrode pattern may be used) acts as a counter electrode, and electrodeposition coating can be performed on a predetermined electrode even when a three-dimensional obstacle such as a pillar exists. And a phosphor that does not impair the degree of vacuum can be electrodeposited.

(2) By applying a DC reverse bias voltage to the electrodes other than the selection electrode (the voltage of the counter electrode required for electrodeposition also becomes the reverse bias voltage at the same time), so that color mixing is possible even in a fine width and a fine pitch. And the adhesion of phosphors between stripe electrodes to be charged and the like can be prevented. The guard electrode, which is an invalid screen portion, has a function of preventing the adhesion of the fluorescent substance to the invalid screen portion, in addition to the function as the counter electrode (non-selection electrode) described above.

(3) Since the electrodes are formed by a lithography or printing method, the accuracy of the distance between the electrodes is greatly improved, and the electric field near the selected electrode portion can be easily controlled by fine control of the DC voltage. It becomes possible to apply the phosphor uniformly on the high-definition (narrow width) stripe.

(4) Since the selection electrode and the counter electrode can be provided on the same plane of the fluorescent screen panel, the thickness of the electrodeposition tank and the electrodeposition apparatus can be reduced, and the amount of the electrodeposition liquid can be reduced. In addition, uniform stirring is facilitated because the amount of liquid is reduced.

As described above, the terminals 3R, 3G, 3G
When the three-terminal processing is performed as in B, it is possible to realize both the color electrodeposition coating of R, G, and B in order and to enable color display by time-sequential color selection as an FED, which is advantageous. is there.

FIGS. 16 to 21 show a second embodiment in which the present invention is applied to uniform formation of a high-definition color phosphor screen.

In the fluorescent screen panel according to this embodiment, as shown in FIGS. 16 and 17, the insulating layer 8 and the electrode are provided between the electrodes 1R, 1G, and 1B as compared with the examples of FIGS. 9 are laminated in a stripe shape.

These stripe electrodes 1R, 1G, 1B
As shown in FIGS. 18 to 21, the multifunctional two-layer film between the multifunctional two-layer films has a multifunctional structure having pillars 10 when the phosphors R, G, and B of each color are sequentially electrodeposited on the electrodes 1R, 1G, and 1B. Used as a counter electrode to which 0 or a positive DC bias voltage is applied together with the two-layer film.

As a result, the predetermined electrodes 1R, 1G or 1B
Only on the top can the phosphors of each color be selectively applied under more fine control of the electric field. That is, by applying a reverse bias voltage between the electrodes 1R, 1G, and 1B and the electrodes of the multifunctional bilayer film therebetween, the adhesion of the phosphor powder to the adjacent electrodes is completely prevented. This is because it can be prevented.

For example, as shown in FIG. 19, when a red phosphor R is electrodeposited, a negative potential is applied to the electrode 1R, and a zero or positive potential is applied to the electrodes 1G, 1B, and 9 to obtain a 1R. The phosphor R can be selectively electrodeposited only on top. The other phosphors G and B can be similarly electrodeposited as shown in FIGS. Note that no phosphor is attached to the electrode 9 and the electrode 9 is exposed except for the pillar 10 and between the electrodes 1R, 1G, and 1B.

FIG. 22 shows a third embodiment in which the present invention is applied to uniform formation of a high-definition color phosphor screen.

In this embodiment, as compared with the electrodeposition apparatus shown in FIG. 6, an electrode 28 is arranged as a counter electrode at a predetermined distance from the fluorescent screen panel 14 in the electrodeposition solution,
A reverse bias voltage is also applied to 28 to perform electrodeposition of a phosphor of a predetermined color.

As described above, by applying the bias voltage to the counter electrode 28 arranged separately from the phosphor screen panel 14, the degree of freedom in controlling the electric field intensity near the selection electrode is increased, and a more precise phosphor screen is formed. Can be formed.

Although the embodiments of the present invention have been described above, the above embodiments can be further modified based on the technical idea of the present invention.

For example, the pattern and arrangement of the above-mentioned phosphor and the electrodeposition electrode may be variously changed, and a black matrix may be used instead of the black stripe. The type and number of colors may be arbitrary.

The above-mentioned electrodeposition conditions, in particular, the applied voltage and the time may be appropriately changed according to the device configuration and conditions.

Although the present invention is suitable for application to FEDs, it is also applicable to other types of displays, and its application range is wide.

[0077]

As described above, according to the present invention, a plurality of first electrodes for depositing a plurality of kinds of phosphors, and an electrodeposit such as the phosphor, which is adjacent between these electrodes, are formed. A second electrode that is not attached is provided on a common substrate, a predetermined electrode is selected from the plurality of first electrodes, and an electrode other than the selected electrode is used as a counter electrode to perform an electrodeposition process in an electrodeposition solution. Since the phosphor is electrodeposited on the selection electrode, the following remarkable effects can be obtained.

(1) Adjacent electrode patterns are made to act as counter electrodes, so that electrodeposition coating can be performed on a predetermined electrode even if a three-dimensional obstacle such as a pillar exists, and the degree of vacuum is impaired. No phosphor can be electrodeposited.

(2) By applying a DC reverse bias voltage to the electrodes other than the selection electrode, it is possible to prevent the occurrence of color mixing even with a fine width and a fine pitch, and to prevent the phosphor from adhering between stripe electrodes to be coated.

(3) Since the electrodes are formed by lithography or printing, the accuracy of the distance between the electrodes is greatly improved, and the electric field near the selected electrode portion can be easily controlled by fine-tuning the DC voltage. It becomes possible to apply the phosphor uniformly on the high-definition (narrow width) stripe.

(4) Since the selection electrode and the counter electrode can be provided on the same plane of the fluorescent screen panel, the thickness of the electrodeposition tank and the electrodeposition apparatus can be reduced, and the amount of the electrodeposition liquid can be reduced. In addition, uniform stirring is facilitated because the amount of liquid is reduced.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing an electrode pattern on a color fluorescent screen according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is a schematic plan view showing each electrode pattern on the color fluorescent screen.

FIG. 4 is a schematic plan view showing a lead-out structure of an electrode terminal on the color fluorescent screen.

FIG. 5 is a schematic plan view of a mask used for forming a lead-out structure of an electrode terminal on the color fluorescent screen.

FIG. 6 is a schematic diagram of an electrodeposition apparatus for applying a phosphor to the color phosphor screen.

FIG. 7 is a cross-sectional view showing one stage of a manufacturing process of the color fluorescent screen.

FIG. 8 is a sectional view showing another stage of the manufacturing process of the color phosphor screen.

FIG. 9 is a cross-sectional view showing yet another stage of the manufacturing process of the color phosphor screen.

FIG. 10 is a schematic perspective view of the color fluorescent surface.

11 is a sectional view taken along line XI-XI in FIG.

FIG. 12 is an exploded perspective view of an example of a field emission display.

FIG. 13 is a schematic enlarged perspective view of a main part of the field emission display.

FIG. 14 is an explanatory diagram at the time of color selection by switching the three terminals R, G, and B.

FIG. 15 is a diagram illustrating a timing chart at the time of the same color selection.

FIG. 16 is a schematic perspective view of a color phosphor screen according to a second embodiment of the present invention.

17 is a sectional view taken along line XVII-XVII in FIG. 16;

FIG. 18 is a cross-sectional view showing one step of the manufacturing process of the color fluorescent screen.

FIG. 19 is a cross-sectional view showing another stage of the manufacturing process of the color phosphor screen.

FIG. 20 is a cross-sectional view showing another stage of the manufacturing process of the color phosphor screen.

FIG. 21 is a cross-sectional view showing yet another stage of the manufacturing process of the color phosphor screen.

FIG. 22 is a schematic view of an electrodeposition apparatus for applying a phosphor to a color phosphor screen according to a third embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Electrode part 1R, 1G, 1B ... Transparent electrode (stripe electrode) 3R, 3G, 3B, 5 ... Terminal 4 ... Guard electrode 6 ... Terminal derivation processing part 8, 18, ...・ Insulating layer 9 ・ ・ ・ Electrode 10 ・ ・ ・ Pill 11R, 11G, 11B ・ ・ ・ Electrodeposition tank 12R, 12G, 12B ・ ・ ・ Electrodeposition liquid 14 ・ ・ ・ Fluorescent panel 17 ・ ・ ・ Cathode 19・ ・ ・ Gate electrode 20 ・ ・ ・ Cathode hole 21 ・ ・ ・ Cathode R ・ ・ ・ Red phosphor G ・ ・ ・ Green phosphor B ・ ・ ・ Blue phosphor

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-6-76738 (JP, A) JP-A-59-200797 (JP, A) JP-B-60-11415 (JP, B1) (58) Field (Int.Cl. ⁷ , DB name) H01J 31/12 H01J 9/227

Claims (17)

(57) [Claims] 1. A phosphor screen structure in which a plurality of first electrodes to which a plurality of kinds of phosphors are respectively attached are provided on a substrate, wherein the first electrodes are located between the plurality of first electrodes. And a second electrode to which no electrodeposit is applied is provided on the base at a position adjacent to each of the phosphors. 2. A plurality of phosphors of a plurality of colors are selectively deposited on a plurality of transparent electrodes as first electrodes corresponding to the phosphors of the respective colors. And a second electrode, on which the electrodeposit is not applied, integrated with a vacuum-resistant column provided between each phosphor group comprising the plurality of phosphor sets, and 2. The phosphor screen structure according to claim 1, comprising at least one of an electrode provided between the phosphors in the plurality of phosphors. 3. The phosphor screen structure according to claim 2, wherein a plurality of transparent electrodes as first electrodes and a second electrode adjacent thereto are provided on the same inner surface of a common phosphor panel. . 4. A plurality of color phosphors constitute a color phosphor screen, and a plurality of transparent electrodes as first electrodes and a second electrode adjacent thereto are formed in stripes. 3. The phosphor screen structure according to 1 or 2. 5. A field emission display comprising a phosphor panel having the phosphor screen structure according to claim 1 and a panel having an electrode structure provided with a field emission cathode. apparatus. 6. A plurality of first electrodes for depositing a plurality of kinds of phosphors, respectively, and a plurality of first electrodes are provided between the plurality of first electrodes, adjacent to the first electrodes, and finally covered with an electrodeposit. Providing a second electrode that is not attached to a common substrate; selecting a predetermined electrode from the plurality of first electrodes, and using an electrode other than the selected electrode and including the second electrode as a counter electrode. 5. The method of manufacturing a phosphor screen structure according to claim 1, further comprising: performing an electrodeposition treatment in the inside, and electrodepositing the phosphor on the selection electrode. 7. The method according to claim 6, wherein a voltage is applied to a selected first electrode in a water-insoluble or water-soluble electrodeposition solution to control an electric field applied to the first electrode and the vicinity thereof. Production method. 8. The method according to claim 7, wherein a reverse bias voltage is applied to a selected electrode other than the first electrode. 9. The method according to claim 6, wherein a pretreatment for preventing deterioration of the first electrode is performed on the electrodeposition liquid. 10. The manufacturing method according to claim 6, wherein the first electrode and the second electrode are formed on the same surface of the common fluorescent panel on the same surface by lithography or printing. 11. The method according to claim 8, wherein a third electrode is disposed to face the substrate surface on which the first electrode and the second electrode are provided at a predetermined interval, and a reverse bias voltage is also applied to the third electrode. Manufacturing method described. 12. A plurality of first electrodes for depositing a plurality of kinds of phosphors, respectively, and a plurality of first electrodes are provided between the plurality of first electrodes, adjacent to the first electrodes, and finally covered with an electrodeposit. Providing a second electrode that is not attached to a common substrate; selecting a predetermined electrode from the plurality of first electrodes, and using an electrode other than the selected electrode and including the second electrode as a counter electrode. 6. A method of manufacturing a field emission display device according to claim 5, further comprising: performing an electrodeposition process in the inside, and electrodepositing the phosphor on the selection electrode. 13. The method according to claim 12, wherein a voltage is applied to a selected first electrode in a water-insoluble or water-soluble electrodeposition solution to control an electric field applied to the first electrode and the vicinity thereof. Production method. 14. The method according to claim 13, wherein a reverse bias voltage is applied to electrodes other than the selected first electrode. 15. The manufacturing method according to claim 12, wherein a pretreatment for preventing deterioration of the first electrode is performed on the electrodeposition liquid. 16. The manufacturing method according to claim 12, wherein the first electrode and the second electrode are formed on the same surface of the common fluorescent panel on the same surface by lithography or printing. 17. The method according to claim 14, wherein a third electrode is disposed at a predetermined distance from a surface of the base on which the first electrode and the second electrode are provided, and a reverse bias voltage is applied to the third electrode. Manufacturing method described.