JP3215361B2 - Quartz glass soot deposition equipment - Google Patents
Quartz glass soot deposition equipmentInfo
- Publication number
- JP3215361B2 JP3215361B2 JP27680797A JP27680797A JP3215361B2 JP 3215361 B2 JP3215361 B2 JP 3215361B2 JP 27680797 A JP27680797 A JP 27680797A JP 27680797 A JP27680797 A JP 27680797A JP 3215361 B2 JP3215361 B2 JP 3215361B2
- Authority
- JP
- Japan
- Prior art keywords
- soot
- quartz glass
- chamber
- excess
- soot deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01406—Deposition reactors therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/0144—Means for after-treatment or catching of worked reactant gases
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、石英ガラススート
堆積装置に関するものである。The present invention relates to a quartz glass soot deposition apparatus.
【０００２】[0002]
【従来の技術】石英ガラスの製造方法として、SiCl4 な
どを原料とし火炎加水分解によりSiO2としてスートを堆
積させ、焼結する方法がある。この方法で泡のない高品
質の石英ガラスを製造するには、余剰スートを速やかに
排出し、スート堆積体表面およびスート堆積部付近を清
浄に保つことが望ましい。従って清浄エアをチャンバー
内に導入、これとともに排気を行うのが従来の余剰スー
ト排出方法であった。余剰スートの排出能力を高めるに
は、導入するエアおよび排気の量を増すのが一般的な方
法であるが、この方法は気流の乱れを誘発し、火炎が暴
れる原因となる。火炎の暴れは均質なスートの堆積を妨
げ、ときにはスート堆積体が割れる原因となり、高品質
な石英ガラス製造に悪影響を及ぼす。2. Description of the Related Art As a method for producing quartz glass, there is a method in which a soot is deposited as SiO 2 by flame hydrolysis from a material such as SiCl 4 and sintered. In order to produce high-quality quartz glass free of bubbles by this method, it is desirable to quickly discharge excess soot and keep the soot deposit surface and the vicinity of the soot deposit clean. Therefore, the conventional method of discharging excess soot is to introduce clean air into the chamber and exhaust the air together with the clean air. To increase the excess soot discharge capacity, it is a general method to increase the amount of air and exhaust gas to be introduced. However, this method induces turbulence in the airflow and causes the flame to be violated. Flame rampage prevents homogeneous soot deposition and sometimes causes the soot deposits to crack, adversely affecting high quality quartz glass production.
【０００３】[0003]
【発明が解決しようとする課題】このため、石英ガラス
スートの製造において、チャンバー内に舞う余剰スート
を速やかに排出することが必要である。本発明はチャン
バー内の気流を乱すことなく、余剰スートを速やかに排
出させる石英ガラススート堆積装置の提供を課題とする
ものである。For this reason, in the production of quartz glass soot, it is necessary to quickly discharge surplus soot flowing in the chamber. SUMMARY OF THE INVENTION It is an object of the present invention to provide a quartz glass soot deposition apparatus for quickly discharging excess soot without disturbing an air flow in a chamber.
【０００４】[0004]
【課題を解決するための手段】本発明は、石英ガラスス
ート堆積装置において、チャンバー内の排気管周辺およ
び／またはチャンバー上部に、複数の段数からなる凹凸
で形成された余剰スートため込み部を設けてなることを
特徴とするものである。本発明は、上記問題に鑑みなさ
れたもので、本発明者らは、チャンバー内に余剰スート
が付着しやすい箇所を意図的に作り、ここに余剰スート
をため込むことにより、チャンバー内に舞う余剰スート
を減少させて、チャンバー内を清浄に保ち、焼結後の石
英ガラス内に生成する泡を低減させることができること
を見いだし、また、従来の排気による方法では気流が乱
れ、火炎が暴れるため、均質なスートの堆積が妨げられ
たり、スート割れの原因となったりしたが、これがなく
なることを見いだし、種々検討して本発明を完成させ
た。According to the present invention, there is provided a quartz glass soot deposition apparatus, wherein a plurality of steps are provided around an exhaust pipe in a chamber and / or above the chamber.
The surplus soot storage portion formed by the above is provided. The present invention has been made in view of the above-described problems, and the present inventors intentionally create a location in the chamber where surplus soot is likely to adhere, and accumulate the surplus soot therein, so that the excess soot flying in the chamber To keep the chamber clean and reduce the bubbles generated in the quartz glass after sintering.In addition, the conventional exhaust method disturbs the air flow and causes the flame to ramp up. Although the accumulation of soot was hindered or caused soot cracking, it was found that this disappeared, and various studies were made to complete the present invention.
【０００５】[0005]
【発明の実施の形態】ＶＡＤ法によるスート堆積体の製
造においては、排気しきれない余剰スートは排気管やチ
ャンバー内部に付着し、また付着しきれない余剰スート
はチャンバー内に舞っている。そして、付着したスート
もやがて落下し、その落下も新たにスートが舞う原因と
なる。そこで、本発明はチャンバーの形状・材質などを
工夫し、チャンバー内に余剰スートが付着・堆積しやす
い箇所を意図的に作り、余剰スートをため込み、落下し
にくくしてチャンバー内に舞うスートの量を低減させよ
うとするものである。ため込み部には複数の段数からな
る凹凸で形成し、表面を粗くして付着効率を上げ、付着
したスートの落下を起こりにくくし、更にはサーモフォ
レシス効果を考慮し、ため込み部を水冷して付着効率を
さらに上げることができる。ため込み部はスートが付着
し易い排気管周辺および／または上部に設置する。な
お、ため込みによるスートの排出と、火炎を乱さない程
度のゆるやかな排気を併用してもよい。DESCRIPTION OF THE PREFERRED EMBODIMENTS In the production of soot deposits by the VAD method, excess soot that cannot be exhausted adheres to the exhaust pipe and the inside of the chamber, and excess soot that cannot be exhausted flows into the chamber. Then, the attached soot will soon fall, and the fall will cause a new soot to dance. Therefore, the present invention devises the shape and material of the chamber, intentionally creates a place where excess soot is likely to adhere and accumulate in the chamber , accumulates excess soot, makes it difficult for the soot to fall and soot in the chamber. It is intended to reduce the amount. There are several stages in the retaining section.
It is formed with irregularities , roughens the surface and increases the adhesion efficiency, makes it less likely that the attached soot will fall off, and furthermore, considering the thermophoresis effect, it is possible to further increase the adhesion efficiency by water cooling the reservoir. . The reservoir is installed around and / or above the exhaust pipe to which soot is likely to adhere. It should be noted that the soot discharge due to the accumulation and the gentle exhaust that does not disturb the flame may be used together.
【０００６】以下、図について、本発明を詳細に説明す
る。図１（ａ）は本発明の石英ガラススート堆積装置の
縦断面図の一例を示したもので、ＶＡＤ法により分散シ
フト光ファイバ用のスート堆積体１を製造する場合であ
る。堆積装置は、センターコア用バーナー２、サイドコ
ア用バーナー３、クラッド用バーナー４及び排気管５を
配したチャンバー６とカバー７よりなり、排気管５の周
辺および／またはチャンバー上部には余剰スートため込
み部８を備えており、これに冷却管９が配置されてい
る。また、図１（ｂ）は、余剰スートため込み部を示し
た図で、表面に複数の段数からなる凹凸10が設けられ、
表面を粗くしてスートが付着し易く、落下が起こりにく
くしてある。凹凸の寸法は、深さは５〜100 mmで、幅は
５〜20 mm がよく、また凹凸の段数は多いほどよい。ま
た、サーモフォレンス効果を考慮し、該ため込み部を水
冷管９により冷却して付着効果を上げることができる。
冷却温度は内壁温度で100 ℃以下がよい。Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1A shows an example of a longitudinal sectional view of a quartz glass soot deposition apparatus of the present invention, in which a soot deposit 1 for a dispersion-shifted optical fiber is manufactured by a VAD method. The deposition apparatus is composed of a chamber 6 in which a burner 2 for the center core, a burner 3 for the side core, a burner 4 for the clad, and an exhaust pipe 5 are arranged, and a cover 7, and the excess soot is accumulated around the exhaust pipe 5 and / or at the top of the chamber. It has a part 8 in which a cooling pipe 9 is arranged. FIG. 1B is a view showing a surplus soot accumulation portion, in which unevenness 10 having a plurality of steps is provided on the surface,
The surface is roughened, soot is easily attached, and it is hard to fall. The size of the unevenness is preferably 5 to 100 mm in depth and 5 to 20 mm in width, and the greater the number of unevenness, the better. In addition, in consideration of the thermophoresis effect, the sealing portion can be cooled by the water cooling pipe 9 to increase the adhesion effect.
The cooling temperature is preferably 100 ° C or less at the inner wall temperature.
【０００７】本発明によるチャンバー内の余剰スートの
排出は、ため込みによる静的なものであるため、気流の
乱れやそれによる火炎の乱れを誘発することがなく、常
に高品質の石英ガラスを製造することが可能となる。ま
た、光ファイバープリフォームの製造、特にＶＡＤ法に
よる製造工程では火炎の安定性が品質にシビアに影響す
るので、排出量の増加による余剰スートの排出能力の向
上を計ることが難しく、本発明はこのようなケースに特
に有効である。The discharge of excess soot in the chamber according to the present invention is static because of accumulation, so that turbulence of the air flow and thereby turbulence of the flame are not induced, and high-quality quartz glass is always produced. It is possible to do. Further, in the production of optical fiber preforms, especially in the production process by the VAD method, the stability of the flame has a severe effect on the quality, so it is difficult to improve the discharge capacity of surplus soot by increasing the discharge amount. This is particularly effective in such cases.
【０００８】[0008]
（実施例）図１の石英ガラススート堆積装置を用い、セ
ンターコア用バーナー２には四塩化珪素ガス50cc／分、
四塩化ゲルマニウムガス30cc／分、水素ガス1.2 リット
ル／分、酸素ガス７リットル／分、アルゴンガス１リッ
トル／分を供給し、サイドコア用バーナー３には四塩化
珪素ガス60cc／分、四塩化ゲルマニウムガス60cc／分、
水素ガス９リットル／分、酸素ガス９リットル／分、ア
ルゴンガス1.5 リットル／分を供給し、またクラッド用
バーナー４には四塩化珪素ガス1.2 リットル／分、水素
ガス32リットル／分、酸素ガス25リットル／分、アルゴ
ンガス５リットル／分を供給して、それぞれのバーナー
で酸水素火炎反応により生成したガラス微粒子を回転す
るダミー棒に堆積させて、これを軸方向に成長させて、
外径140 mm、長さ1,000 mmのスート堆積体を得た。な
お、この際用いた余剰スートため込み部は、深さ50mm、
幅10mmの凹凸を５段有したパイレックス製であり、これ
をチャンバー上部に配備した。得られたスート堆積体を
加熱して、1,100 ℃で脱水後 1,500 ℃で焼結、透明ガ
ラス化して直径60mm、長さ700mm の分散シフト光ファイ
バ用プリフォームを得た。このコアロッド内の泡の数を
測定したところ、10本の平均個数が0.1 個であった。(Embodiment) Using the quartz glass soot deposition apparatus shown in FIG. 1, the center core burner 2 was provided with silicon tetrachloride gas at 50 cc / min.
30 cc / min of germanium tetrachloride gas, 1.2 liter / min of hydrogen gas, 7 liter / min of oxygen gas, and 1 liter / min of argon gas are supplied. The side core burner 3 is supplied with 60 cc / min of silicon tetrachloride gas and germanium tetrachloride gas. 60cc / min,
Hydrogen gas 9 liters / minute, oxygen gas 9 liters / minute, argon gas 1.5 liters / minute are supplied. Also, silicon tetrachloride gas 1.2 liters / minute, hydrogen gas 32 liters / minute, oxygen gas 25 Liters / minute and 5 liters / minute of argon gas are supplied, and glass fine particles generated by the oxyhydrogen flame reaction are deposited on the rotating dummy rod by each burner, and grown in the axial direction.
A soot deposit having an outer diameter of 140 mm and a length of 1,000 mm was obtained. In addition, the excess soot pool used at this time is 50 mm deep,
It was made of Pyrex having five steps of 10 mm width unevenness, and this was arranged at the top of the chamber. The soot stack obtained was heated, dehydrated at 1,100 ° C., sintered at 1,500 ° C., and vitrified to obtain a preform for a dispersion-shifted optical fiber having a diameter of 60 mm and a length of 700 mm. When the number of bubbles in this core rod was measured, the average number of bubbles was 0.1.
【０００９】（比較例）図１において余剰スートため込
み部を配備しなかった以外は実施例と同様に行い、直径
60mm、長さ700 mmの分散シフト光ファイバ用プリフォー
ムを得た。このコアロッド内の泡の数を測定したとこ
ろ、10本の平均個数が3.5 個であった。(Comparative Example) The same procedure as in the example was carried out except that the excess soot storage portion was not provided in FIG.
A preform for a dispersion-shifted optical fiber having a length of 60 mm and a length of 700 mm was obtained. When the number of bubbles in the core rod was measured, the average number of bubbles was 3.5.
【００１０】[0010]
【発明の効果】本発明により、チャンバー内に舞う余剰
スートを減少させて、チャンバー内を清浄に保つことに
より、焼結体の石英ガラス内に生成する泡を低減させる
ことができ、また気流が乱れたり、火炎が暴れたりする
ことがないので、均一なスートが得られ、スート割れが
起きない。According to the present invention, by reducing excess soot flowing in the chamber and keeping the chamber clean, bubbles generated in the quartz glass of the sintered body can be reduced, and the air flow can be reduced. Since it is not disturbed or the flame does not rage, a uniform soot can be obtained and no soot cracking occurs.
【図１】（ａ）は本発明の石英ガラススート堆積装置の
縦断面図であり、（ｂ）はその余剰スートため込み部の
縦断面図である。FIG. 1A is a longitudinal sectional view of a quartz glass soot deposition apparatus of the present invention, and FIG. 1B is a longitudinal sectional view of a surplus soot storage portion.
１…スート堆積体 ２…センターコア用バーナー ３…サイドコア用バーナー ４…クラッド用バーナー ５…排気管 ６…チャンバー ７…カバー ８…余剰スートため込み部 ９…冷却管 10…凹凸 11…シャフト DESCRIPTION OF SYMBOLS 1 ... Soot deposit 2 ... Center core burner 3 ... Side core burner 4 ... Clad burner 5 ... Exhaust pipe 6 ... Chamber 7 ... Cover 8 ... Excess soot accumulation part 9 ... Cooling pipe 10 ... Unevenness 11 ... Shaft
───────────────────────────────────────────────────── フロントページの続き (72)発明者 平沢 秀夫 群馬県安中市磯部２丁目13番１号 信越 化学工業株式会社 精密機能材料研究所 内 (56)参考文献 特開 平10−231138（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C03B 8/04 C03B 37/018 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Hideo Hirasawa 2-13-1, Isobe, Annaka-shi, Gunma Shin-Etsu Chemical Co., Ltd. Precision Functional Materials Laboratory (56) References JP-A-10-231138 (JP) , A) (58) Field surveyed (Int. Cl. 7 , DB name) C03B 8/04 C03B 37/018
Claims (2)
周辺および／またはチャンバー上部に、複数の段数から
なる凹凸で形成された余剰スートため込み部を備えてな
ることを特徴とする石英ガラススート堆積装置。1. A plurality of stages are provided around an exhaust pipe in a chamber of a soot deposition apparatus and / or at an upper part of the chamber.
An apparatus for depositing quartz glass soot, comprising a surplus soot recess formed by irregularities .
設けてなる請求項１に記載の石英ガラススート堆積装
置。2. The quartz glass soot deposition apparatus according to claim 1, wherein a cooling mechanism is provided in the excess soot reservoir.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27680797A JP3215361B2 (en) | 1997-10-09 | 1997-10-09 | Quartz glass soot deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27680797A JP3215361B2 (en) | 1997-10-09 | 1997-10-09 | Quartz glass soot deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11116246A JPH11116246A (en) | 1999-04-27 |
| JP3215361B2 true JP3215361B2 (en) | 2001-10-02 |
Family
ID=17574668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27680797A Expired - Fee Related JP3215361B2 (en) | 1997-10-09 | 1997-10-09 | Quartz glass soot deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3215361B2 (en) |
-
1997
- 1997-10-09 JP JP27680797A patent/JP3215361B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11116246A (en) | 1999-04-27 |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |