JP3199657B2 - Equipment for manufacturing glass preforms for optical fibers - Google Patents
Equipment for manufacturing glass preforms for optical fibersInfo
- Publication number
- JP3199657B2 JP3199657B2 JP3578197A JP3578197A JP3199657B2 JP 3199657 B2 JP3199657 B2 JP 3199657B2 JP 3578197 A JP3578197 A JP 3578197A JP 3578197 A JP3578197 A JP 3578197A JP 3199657 B2 JP3199657 B2 JP 3199657B2
- Authority
- JP
- Japan
- Prior art keywords
- glass
- chamber
- manufacturing
- base material
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01406—Deposition reactors therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光ファイバ用ガラ
ス母材の製造装置に関するもので、特にチャンバー内に
付着した未堆積微粒子が剥離してすすとなって舞うこと
を防止し、安定した製造を可能とする装置に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing a glass preform for an optical fiber, and more particularly, to a method for preventing undeposited fine particles adhering in a chamber from peeling and sooting, thereby achieving stable manufacturing. The present invention relates to a device that enables the following.
【０００２】[0002]
【従来の技術】従来、光ファイバ用ガラス母材は、ＶＡ
Ｄ法等により、チャンバー内において酸水素火炎中での
ガラス原料ガスの火炎加水分解反応により製造され、母
材に堆積されなガラス微粒子は生成するHCl ガス等と共
に排気管からチャンバー外に排気されている。2. Description of the Related Art Conventionally, glass preforms for optical fibers have been VA
The glass fine particles produced by the flame hydrolysis reaction of the glass raw material gas in the oxyhydrogen flame in the chamber by the D method or the like, and the glass fine particles not deposited on the base material are exhausted from the exhaust pipe to the outside of the chamber together with the generated HCl gas and the like. I have.
【０００３】[0003]
【発明が解決しようとする課題】しかし、排気により、
すべての未堆積ガラス微粒子がチャンバー外に排出され
ることはなく、ガラス微粒子がチャンバー内や排気管内
に充満し、内壁等に多量付着し、付着ガラス微粒子がチ
ャンバー内に舞い込み、堆積中の母材表面に再度付着し
て母材の泡の原因となる。また、チャンバー内に落下し
た未堆積のガラス微粒子がすすとなって舞い、制御系の
窓に付着し、制御系を乱すという問題が生じている。そ
こで、従来は、排気量を多くするなどしてこの問題に対
処してきた。しかしながら、近年、大型の母材を製造す
るようになると、製造時間が長くなり、母材が大きくな
るためにチャンバー内壁と母材の距離も近くなり、浮遊
ガラス微粒子が内壁等に付着し易くなり、付着したガラ
ス微粒子が剥離して、泡や制御系の乱れを引き起し、そ
のため安定した母材の製造が困難になる問題が生じた。However, due to the exhaust,
All undeposited glass particles are not discharged out of the chamber.The glass particles fill the chamber and the exhaust pipe, adhere in large quantities to the inner walls, etc., and adhered glass particles flow into the chamber, and the base material being deposited It re-adheres to the surface and causes foam of the base material. In addition, there is a problem in that the undeposited glass fine particles that have fallen into the chamber fly as soot, adhere to windows of the control system, and disturb the control system. Therefore, conventionally, this problem has been dealt with by increasing the displacement. However, in recent years, when a large base material is manufactured, the manufacturing time becomes longer and the base material becomes larger, so that the distance between the chamber inner wall and the base material becomes shorter, and the floating glass particles easily adhere to the inner wall and the like. In addition, the adhered glass particles are peeled off, causing bubbles and disturbance of the control system, thereby causing a problem that it is difficult to manufacture a stable base material.
【０００４】[0004]
【課題を解決するための手段】本発明は、上記の問題に
鑑みなされたもので、光ファイバ用ガラス母材の製造装
置において、チャンバー内にバーナ、排気管、ターゲッ
トを備え、バーナの火炎中で合成したガラス微粒子をタ
ーゲットに堆積させ光ファイバ母材を製造する装置にお
いて、チャンバー内のガラス微粒子の付着し易い位置、
或いはこの微粒子が付着したとき、剥離し易い位置に溝
に溝を付けることを特徴とするものである。従来のチャ
ンバーの堆積ガラス微粒子の付着し易い位置、或いはこ
の微粒子が付着したとき、剥離し易い位置に溝をつける
ことにより、一度内壁に付着したガラス微粒子が剥離し
て再度チャンバー内にすす状になって舞うことを防止す
るものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has an object to provide an apparatus for manufacturing a glass base material for an optical fiber, comprising a burner, an exhaust pipe, and a target in a chamber. In an apparatus for manufacturing an optical fiber preform by depositing glass fine particles synthesized in the above, a position in the chamber where glass fine particles easily adhere,
Alternatively, a groove is formed at a position where the fine particles are easily peeled off when the fine particles adhere. By forming a groove at a position where the deposited glass particles easily adhere to the conventional chamber, or at a position where the particles easily adhere when the particles adhere, the glass particles once adhered to the inner wall are peeled off and sooted into the chamber again. This is to prevent them from dancing.
【０００５】[0005]
【発明の実施の形態】図１(a) は、本発明の光ファイバ
用ガラス母材の製造装置の一例を示したもので、符号の
１はチャンバー、２はコア用バーナ、３はクラッド用バ
ーナ、４はターゲット、５は排気管、６は多孔質ガラス
母材、７は溝を示したものである。また図１(b) は、Ａ
部分の溝７を内壁に網目状に形成した場合の拡大図を示
したものである。光ファイバ用ガラス母材の製造は、チ
ャンバー１内で、ターゲット４を回転させながら、これ
にコア用バーナ２、クラッド用バーナ３からそれぞれコ
ア用ガラス原料ガス、クラッド用ガラス原料ガスの酸水
素火炎による加水分解反応により生成したコア用ガラス
微粒子、クラッド用ガラス微粒子を堆積させて、軸方向
に上昇させて多孔質ガラス母材６を形成し、塩酸ガスお
よび未堆積のガラス微粒子を排気管５より排出させ、こ
の際図１(b) に示すような、チャンバー内のすすが付着
し易い部分に溝を付け、チャンバー内壁の表面積を大き
くし、付着したガラス微粒子をより強固に内壁に付着さ
せて、付着した微粒子が剥離しないようにしてガラス母
材を製造するもので、この方法によりチャンバー内に落
下して再び多孔質ガラス母材に付着し、母材の泡等の原
因になるのを防ぎ、またこれらがすすとして制御窓等に
付着することを防止することができる。チャンバー内の
溝を付ける場所は、すすが付着し易い場所、或いは付着
物が剥離し易い場所で、チャンバーの内壁の一部または
全部、排気管の一部または全部、装置部品の一部または
全部が良い。溝は、網目状あるいは格子状に配置し、そ
の面積はすすの付着しやすい場所の面積より大きくすれ
ば良い。このようにして、チャンバー内壁、排気管以外
の圧力タップ、その他の装置部品の外壁、内壁等にも同
様にして溝を付けることにより、付着した微粒子が再度
チャンバー内に舞うことをより一層防止できる。FIG. 1 (a) shows an example of an apparatus for manufacturing a glass preform for an optical fiber according to the present invention, wherein reference numeral 1 denotes a chamber, 2 denotes a burner for a core, and 3 denotes a burner for a clad. A burner, 4 is a target, 5 is an exhaust pipe, 6 is a porous glass base material, and 7 is a groove. FIG. 1 (b) shows A
FIG. 5 is an enlarged view of a case where a portion of the groove 7 is formed in a mesh shape on the inner wall. The glass preform for optical fiber is manufactured by rotating a target 4 in a chamber 1 and applying an oxyhydrogen flame of a core glass material gas and a cladding glass material gas from a core burner 2 and a cladding burner 3 respectively. The glass fine particles for the core and the glass fine particles for the clad generated by the hydrolysis reaction are deposited and raised in the axial direction to form the porous glass base material 6, and the hydrochloric acid gas and the undeposited glass fine particles are discharged from the exhaust pipe 5. At this time, as shown in FIG. 1 (b), a groove is formed in a portion of the chamber where soot is likely to adhere, so that the surface area of the chamber inner wall is increased, and the adhered glass particles are more firmly adhered to the inner wall. The glass base material is manufactured so that the attached fine particles are not peeled off. By this method, the glass base material is dropped into the chamber and adheres to the porous glass base material again. In addition, it is possible to prevent bubbles and the like of the base material from being caused, and to prevent the soot from adhering to the control window or the like as soot. The location of the groove in the chamber is a place where soot easily adheres or a place where the adhered substance is easily peeled off. Part or all of the inner wall of the chamber, part or all of the exhaust pipe, part or all of the device parts. Is good. The grooves may be arranged in a mesh or lattice shape, and the area thereof may be larger than the area of a place where soot is easily attached. In this manner, by forming grooves on the inner wall of the chamber, the pressure taps other than the exhaust pipe, and the outer wall and the inner wall of other device parts in the same manner, it is possible to further prevent the attached fine particles from flowing back into the chamber. .
【０００６】[0006]
実施例 図１(a) のＡ部のチャンバー上部の内壁に、巾１mm、深
さ0.3mm の溝を１mmの間隔で、図１(b) に示すように、
縦、横に100mm ×200mm で付けた外径250mm のチャンバ
ーを用いて、チャンバー内にターゲット棒をつり下げ30
rpm で回転上昇させながら、SiCl4 をArキャリアガスで
100SCCM 、GeCl4 をArキャリアガスで20SCCM、水素ガス
2.5SLM、酸素ガス５SLM をコア用バーナに、SiCl4 をAr
キャリアガスで350SCCM 、水素ガス30SLM 、酸素ガス30
SLM をクラッド用バーナにそれぞれ供給し、生成したガ
ラス微粒子を堆積させて、外径100mm 、長さ1000mmの多
孔質母材を50本製造し、1500℃で焼結ガラス化してガラ
ス母材を得た。このガラス母材は、製造中に、１本もす
すの剥離等の問題がなく、気泡混入のないものであっ
た。EXAMPLE As shown in FIG. 1 (b), grooves having a width of 1 mm and a depth of 0.3 mm were formed at intervals of 1 mm on the inner wall of the upper part of the chamber in part A of FIG.
Using a chamber with an outer diameter of 250 mm attached vertically and horizontally by 100 mm × 200 mm, the target rod is suspended in the chamber.
While rotating up at rpm, SiCl 4 with Ar carrier gas
100SCCM, GeCl 4 is 20SCCM with Ar carrier gas, hydrogen gas
2.5SLM, oxygen gas 5SLM for core burner, SiCl 4 for Ar
350SCCM for carrier gas, 30SLM for hydrogen gas, 30 for oxygen gas
SLM is supplied to each of the clad burners, and the generated glass particles are deposited, 50 porous base materials having an outer diameter of 100 mm and a length of 1000 mm are manufactured, and sintered at 1500 ° C to obtain a glass base material. Was. This glass base material had no problem such as peeling of any soot during production, and did not contain air bubbles.
【０００７】比較例 チャンバー内に溝を形成しなかった以外は、実施例と同
様に行って、外径100mm 、長さ1000mmの多孔質ガラス母
材を５本製造したところ、５本とも引き上げ後半におい
て、チャンバー内壁に付着したすすが剥離し、うち１本
については制御系の窓に付着し、制御が乱れ停止した。
また、これらの多孔質ガラス母材を焼結ガラスとして製
造したガラス母材には泡の混入が多く確認された。Comparative Example Five porous glass preforms having an outer diameter of 100 mm and a length of 1000 mm were manufactured in the same manner as in the example except that no groove was formed in the chamber. In, the soot adhering to the inner wall of the chamber was peeled off, and one of the soot adhered to the window of the control system, and the control was disrupted and stopped.
In addition, it was confirmed that a large amount of bubbles was mixed in the glass base material produced by using these porous glass base materials as sintered glass.
【０００８】[0008]
【発明の効果】本発明によれば、製造中、内壁に堆積し
た堆積粒子の剥離を防止することにより、チャンバー内
のすすが減少し、母材等にすすが入り込むことを防止で
きるので、気泡混入のないファイバ母材を安定して製造
することができる。According to the present invention, by preventing the deposited particles deposited on the inner wall from being peeled off during manufacturing, soot in the chamber can be reduced and soot can be prevented from entering the base material or the like. A fiber preform without contamination can be stably manufactured.
【図１】(a)光ファイバ用ガラス母材の製造装置の一例
である。 (b)Ａ部分の溝の拡大図である。FIG. 1A is an example of an apparatus for manufacturing a glass preform for an optical fiber. (b) It is an enlarged view of the groove of A part.
１…チャンバー ２…コア用バーナ ３…クラッド用バーナ ４…ターゲット ５…排気管 ６…多孔質ガラス母材 ７…溝 DESCRIPTION OF SYMBOLS 1 ... Chamber 2 ... Burner for cores 3 ... Burner for claddings 4 ... Target 5 ... Exhaust pipe 6 ... Porous glass base material 7 ... Groove
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平６−320127（ＪＰ，Ａ) 特開 昭56−32345（ＪＰ，Ａ) 特開 昭62−171938（ＪＰ，Ａ) 特開 昭60−346232（ＪＰ，Ａ) 特開 昭60−41537（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) C03B 37/018 ──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-6-320127 (JP, A) JP-A-56-32345 (JP, A) JP-A-62-171938 (JP, A) JP-A 60-320 346232 (JP, A) JP-A-60-41537 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C03B 37/018
Claims (4)
トを備え、バーナの火炎中で合成したガラス微粒子をタ
ーゲットに堆積させ光ファイバ母材を製造する装置にお
いて、チャンバー内のガラス微粒子の付着し易い位置、
或いはこの微粒子が付着したとき、剥離し易い位置に溝
を付けることを特徴とする光ファイバ用ガラス母材の製
造装置。An apparatus for manufacturing an optical fiber preform by depositing a glass fine particle synthesized in a flame of a burner on a target, provided with a burner, an exhaust pipe, and a target in the chamber. position,
Alternatively, an apparatus for manufacturing a glass base material for an optical fiber, wherein a groove is formed at a position where the fine particles are easily peeled off when the fine particles adhere.
載の光ファイバ用ガラス母材の製造装置。2. The apparatus for manufacturing a glass preform for an optical fiber according to claim 1, wherein a groove is formed in an inner wall of the chamber.
けた請求項１に記載の光ファイバ用ガラス母材の製造装
置。3. The apparatus for manufacturing a glass preform for an optical fiber according to claim 1, wherein grooves are formed on both the inside and outside of the exhaust pipe in the chamber.
の付着し易い位置に付けた請求項１に記載の光ファイバ
用ガラス母材の製造装置。4. The apparatus for manufacturing a glass preform for an optical fiber according to claim 1, wherein the groove is formed at a position where the glass particles of the equipment in the chamber are easily attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3578197A JP3199657B2 (en) | 1997-02-20 | 1997-02-20 | Equipment for manufacturing glass preforms for optical fibers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3578197A JP3199657B2 (en) | 1997-02-20 | 1997-02-20 | Equipment for manufacturing glass preforms for optical fibers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10231138A JPH10231138A (en) | 1998-09-02 |
| JP3199657B2 true JP3199657B2 (en) | 2001-08-20 |
Family
ID=12451451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3578197A Expired - Fee Related JP3199657B2 (en) | 1997-02-20 | 1997-02-20 | Equipment for manufacturing glass preforms for optical fibers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3199657B2 (en) |
-
1997
- 1997-02-20 JP JP3578197A patent/JP3199657B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10231138A (en) | 1998-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |