JP2949314B2 - Calorimeter and method - Google Patents

Calorimeter and method

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Publication number
JP2949314B2
JP2949314B2 JP22896891A JP22896891A JP2949314B2 JP 2949314 B2 JP2949314 B2 JP 2949314B2 JP 22896891 A JP22896891 A JP 22896891A JP 22896891 A JP22896891 A JP 22896891A JP 2949314 B2 JP2949314 B2 JP 2949314B2
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JP
Japan
Prior art keywords
container
temperature
sample
heat insulating
sample container
Prior art date
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Expired - Lifetime
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JP22896891A
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Japanese (ja)
Other versions
JPH0566160A (en
Inventor
和利 鍛示
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Hitachi Ltd
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Hitachi Ltd
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Publication of JPH0566160A publication Critical patent/JPH0566160A/en
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は微量試料の熱量測定に好
適な熱量測定装置及び方法に関する
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a calorimeter and a calorimeter suitable for measuring a calorific value of a small amount of sample.

【0002】[0002]

【従来の技術】従来、物質の熱容量を高精度で測定する
手段として断熱型熱量計が用いられている。断熱型熱量
計は、主として試料容器とその外周にある断熱シールド
から構成される。試料容器には試料加熱用ヒータと試料
温度測定用温度計、断熱シールドには温度制御用ヒータ
が備えられ、試料容器と断熱シールドの温度を同一に制
御するために両者間の温度差を検出する熱電対が直列に
接続されている。
2. Description of the Related Art Conventionally, an adiabatic calorimeter has been used as a means for measuring the heat capacity of a substance with high accuracy. An adiabatic calorimeter is mainly composed of a sample container and an adiabatic shield on its outer periphery. The sample container is equipped with a heater for heating the sample and a thermometer for measuring the temperature of the sample, and the adiabatic shield is equipped with a heater for controlling the temperature. The temperature difference between the sample container and the adiabatic shield is detected in order to control the same temperature. Thermocouples are connected in series.

【0003】熱容量を測定するためには、まずヒータに
よって或る量の熱エネルギーを試料及び試料容器に加
え、そのときの温度上昇量を測定し、熱容量を(1)式
により求める。
In order to measure the heat capacity, first, a certain amount of heat energy is applied to the sample and the sample container by a heater, the amount of temperature rise at that time is measured, and the heat capacity is obtained by equation (1).

【0004】[0004]

【数1】 C=ΔE/ΔT……………………………………………………………(1) C :熱容量 ΔE:熱エネルギー ΔT:温度上昇量 従来の断熱型熱量計においては、ΔE、ΔTを測定する
熱量測定回路と、断熱シールドを試料容器温度と同一に
する断熱制御回路が独立に作動している。まず、ΔE
は、試料容器に巻いたヒータに電流を或る時間間隔だけ
流し(2)式より測定し、また、ΔTは抵抗温度計等の
抵抗値をブリッジ等を用いてmKの精度で測定してい
る。
[Formula 1] C = ΔE / ΔT ……………………………………………… (1) C: Heat capacity ΔE: Thermal energy ΔT: Temperature rise Conventional thermal insulation In the type calorimeter, a calorimetric circuit for measuring ΔE and ΔT and an adiabatic control circuit for making the adiabatic shield the same as the temperature of the sample container operate independently. First, ΔE
Is measured by a formula (2) in which a current is passed through a heater wound around a sample container for a certain time interval, and ΔT is a resistance value of a resistance thermometer or the like measured with a precision of mK using a bridge or the like. .

【0005】[0005]

【数2】 ΔE=I2・R・Δt……………………………………………………(2) ΔE:熱エネルギー I :電流 R :ヒータの抵抗 Δt:時間間隔 これが熱量測定回路である。一方、試料容器と断熱シー
ルド間に取り付けた熱電対の起電力を電圧計で測定し、
その出力をPID制御器に入力し、PID制御器からの
出力を増幅器によって増幅後、断熱シールドに巻いたヒ
ータに流す電流を調節することによって、断熱シールド
の温度を試料容器と同一になるよう制御している。これ
が断熱制御回路である。したがって、このような方法で
熱容量を測定していたため、高精度に熱容量を測定する
ためには断熱シールドと試料容器の温度を同一にし、試
料容器からの熱伝導を防ぐことが必要である。
ΔE = I 2 · R · Δt ··················· (2) ΔE: thermal energy I: current R: resistance of heater Δt: time Interval This is the calorimetric circuit. On the other hand, the electromotive force of the thermocouple attached between the sample container and the heat shield was measured with a voltmeter,
The output is input to a PID controller, the output from the PID controller is amplified by an amplifier, and the current flowing through a heater wound on the heat shield is adjusted so that the temperature of the heat shield becomes the same as that of the sample container. doing. This is the adiabatic control circuit. Therefore, since the heat capacity is measured by such a method, in order to measure the heat capacity with high accuracy, it is necessary to make the temperature of the heat insulating shield and the temperature of the sample container the same, and to prevent heat conduction from the sample container.

【0006】近年マイクロエレクトロニクスの進歩によ
り電子部品が微小化している。その微小な電子部品の材
料例えば薄膜材料の熱物性を高精度で測定することが要
求される。従来の熱量測定装置は微量試料の熱容量を高
精度で測定することが不可能で少なくとも10〜20g
の試料を必要とし、極少量しか入手できない試料や薄膜
材料の熱容量を測定するためには微量試料用断熱型熱量
計の開発が望まれている。しかし、微量試料を測定する
場合には2つの課題がある。1つは、試料の熱容量の値
そのものが微量故に小さく、試料容器を含めた全体の熱
容量と比べて試料の熱容量の相対値が小さくなり、検出
感度が低下すること。もう1つは、試料容器と断熱シー
ルドとの間の温度制御能力に限界があるため、両者間の
リード線を伝導する熱伝導が生じ、温度上昇量(ΔT)
の誤差の原因となり、微量試料ほどその影響が大きい。
In recent years, electronic components have been miniaturized due to advances in microelectronics. It is required to measure the thermophysical properties of the material of the minute electronic component, for example, the thin film material with high accuracy. A conventional calorimeter cannot measure the heat capacity of a small amount of sample with high accuracy and is at least 10 to 20 g.
In order to measure the heat capacity of a sample or a thin film material that requires only a small amount of a sample and that is available in a very small amount, the development of an adiabatic calorimeter for a small amount of sample is desired. However, there are two problems when measuring a small amount of sample. One is that the value of the heat capacity of the sample itself is small because it is very small, so that the relative value of the heat capacity of the sample becomes smaller than the entire heat capacity including the sample container, and the detection sensitivity is lowered. The other is that there is a limit in the temperature control ability between the sample container and the heat insulating shield, so that heat conduction through the lead wire between the two occurs, and the temperature rise (ΔT)
, And the smaller the sample, the greater the effect.

【0007】これらの問題を解決する1つの方法とし
て、試料容器の熱容量を小さくすることが考えられ、特
に試料容器から温度計を取り外す方法がある。しかしそ
のようにすると試料容器の温度を検知する他の手段が必
要となる。
One method for solving these problems is to reduce the heat capacity of the sample container. In particular, there is a method of removing the thermometer from the sample container. However, doing so requires another means for detecting the temperature of the sample container.

【0008】それについては、ジャーナルオブフィジッ
クス イー サイエンティフィックインスツルメント、1
7巻(1984年)1054(J.Phys. E:Sci. Instru
m.,17(1984)1054)に論じられている。
[0008] About that, Journal of Physics e Scientific Instruments, 1
7 (1984) 1054 (J. Phys. E: Sci. Instru
m., 17 (1984) 1054).

【0009】[0009]

【発明が解決しようとする課題】上記文献に記載の装置
では、試料容器から取外した温度計を取り付けるための
温度測定用ブロックが断熱シールドの内側にある。試料
容器と温度測定用ブロックとの温度を同一にすることに
より、温度測定用ブロックに取り付けた温度計で試料温
度を測定することができる。このとき、両者の温度を同
一にするためには、両者の間に熱電対を取付け、熱起電
力が零になるよう温度測定用ブロックの温度を制御しな
ければならない。このようにして試料容器から温度計を
取り外すことを可能としている。しかし、上記従来装置
では新たに試料容器に熱電対を取り付けなければなら
ず、その熱電対による試料容器からの熱伝導が発生す
る。その結果、試料の温度上昇量に誤差を生じるという
問題がある。
In the apparatus described in the above document, a temperature measuring block for attaching a thermometer detached from the sample container is located inside the heat insulating shield. By making the temperature of the sample container and the temperature measurement block the same, the sample temperature can be measured with a thermometer attached to the temperature measurement block. At this time, in order to make the temperature of both the same, a thermocouple must be attached between the two, and the temperature of the temperature measurement block must be controlled so that the thermoelectromotive force becomes zero. Thus, it is possible to remove the thermometer from the sample container. However, in the above-described conventional apparatus, a thermocouple must be newly attached to the sample container, and heat conduction from the sample container is generated by the thermocouple. As a result, there is a problem that an error occurs in the amount of temperature rise of the sample.

【0010】また、温度測定用ブロックの温度制御系と
温度測定系とは完全に独立に作動しているため、両者間
には信号の送受信がなく、温度測定用ブロックの温度及
び温度変化が必ずしも試料の温度及び温度変化を正確に
表わしていないという問題がある。例えば温度測定用ブ
ロックの温度が上昇する場合、その温度変化が試料の温
度上昇を示すのか、あるいは温度測定用ブロックのすぐ
外側にある断熱シールドからの熱伝導等の外部要因によ
って温度測定用ブロックの温度のみが上昇しているのか
の判断が不可能である。
In addition, since the temperature control system and the temperature measurement system of the temperature measurement block operate completely independently, no signal is transmitted and received between the two, and the temperature and the temperature change of the temperature measurement block are not necessarily changed. There is a problem that the temperature and temperature change of the sample are not accurately represented. For example, when the temperature of the temperature measurement block rises, the temperature change indicates the temperature increase of the sample, or the temperature measurement block is heated by an external factor such as heat conduction from the heat insulating shield just outside the temperature measurement block. It is impossible to determine whether only the temperature is rising.

【0011】本発明の目的は、微量試料の熱容量を高精
度で測定が可能な熱量測定装置及び方法を提供すること
にある。
An object of the present invention is to provide a calorimeter and a calorimeter capable of measuring the heat capacity of a trace sample with high accuracy.

【0012】[0012]

【課題を解決するための手段】上記目的は、微量試料を
保有する試料容器と、該試料容器を加熱する第1の発熱
体と、該試料容器を支持し包含する断熱容器と、該断熱
容器を加熱する第2の発熱体と、該断熱容器の温度を検
出する断熱容器温度センサ若しく該断熱容器壁に設け温
度を抵抗値の変化として検出する金属抵抗線と、接点部
を前記試料容器と前記断熱容器に接触させ温度差を検出
する熱電対とを備えたことにより達成される。
An object of the present invention is to provide a sample container holding a small amount of sample, a first heating element for heating the sample container, an insulating container supporting and containing the sample container, and an insulating container. A second heat generating element for heating the heat-insulating container, a heat-insulating container temperature sensor for detecting the temperature of the heat-insulating container, or a metal resistance wire provided on the heat-insulating container wall for detecting the temperature as a change in resistance value; And a thermocouple that is in contact with the heat insulating container and detects a temperature difference.

【0013】上記目的は、微量試料を保有する試料容器
と、該試料容器を加熱する第1の発熱体と、該試料容器
を支持し包含する断熱容器と、該断熱容器を加熱する第
2の発熱体と、該断熱容器の温度を検出する断熱容器温
度センサ若しく該断熱容器壁に設け温度を抵抗値の変化
として検出する金属抵抗線と、接点部を前記試料容器と
前記断熱容器に接触させ温度差を検出する熱電対と、該
熱電対が検出した温度差を入力し該温度差を解消するよ
うに前記第2の発熱体へ供給するエネルギを制御する断
熱制御回路と、前記第1の発熱体へ供給するエネルギ量
を測定し前記断熱容器温度センサが検出した断熱容器温
度と前記熱電対が検出した温度差とを入力し前記温度差
がほぼ零になった時に前記断熱容器温度を前記微量試料
の温度として前記エネルギ量を用いて熱容量を演算する
熱量測定回路とを備えたことにより達成される。
The object is to provide a sample container holding a small amount of sample, a first heating element for heating the sample container, a heat insulating container for supporting and containing the sample container, and a second heat source for heating the heat insulating container. A heating element, an insulated container temperature sensor for detecting the temperature of the insulated container or a metal resistance wire provided on the wall of the insulated container and detecting the temperature as a change in resistance value, and a contact portion in contact with the sample container and the insulated container A thermocouple for detecting a temperature difference, an adiabatic control circuit for inputting the temperature difference detected by the thermocouple and controlling energy supplied to the second heating element so as to eliminate the temperature difference; The amount of energy supplied to the heating element is measured, and the temperature of the heat insulating container detected by the temperature sensor of the heat insulating container and the temperature difference detected by the thermocouple are input, and the temperature of the heat insulating container is reduced when the temperature difference becomes substantially zero. As the temperature of the trace sample, It is achieved by having a calorimetric circuit for calculating the heat capacity with Nerugi amount.

【0014】上記目的は、試料を保有し発熱体を備えた
試料容器と、該試料容器を包含し発熱体を備えた断熱容
器と、該断熱容器の温度を検出する断熱容器温度センサ
と、前記試料容器と前記断熱容器の温度差を検出する温
度差センサとを備えた熱量測定装置を用い、前記温度差
がほぼ零になるように前記断熱容器の発熱体を制御しそ
の時の断熱容器温度を試料温度と定めることにより達成
される。
The object is to provide a sample container holding a sample and having a heating element, an insulating container including the sample container and having a heating element, an insulating container temperature sensor for detecting the temperature of the insulating container, Using a calorimeter equipped with a temperature difference sensor for detecting the temperature difference between the sample container and the heat-insulating container, controlling the heating element of the heat-insulating container so that the temperature difference becomes substantially zero, and controlling the heat-insulating container temperature at that time. This is achieved by defining the sample temperature.

【0015】[0015]

【作用】上記構成によれば、断熱容器に温度を検出する
断熱容器温度センサ若しく該断熱容器壁に設け温度を抵
抗値の変化として検出する金属抵抗線を設け、試料容器
と断熱容器とに接点を接触させた熱電対が検出する試料
容器と断熱容器の温度差がほぼ零になった時の温度のみ
を試料の温度として採用すれば、断熱容器の温度を検出
することにより試料の温度を知り、試料容器から温度セ
ンサを除外することが出来、試料容器の小型化は勿論の
こと試料容器に付属する部品点数を削減し試料容器の低
熱容量化を図り微量試料の熱量測定が可能となる。
According to the above construction, an insulated container temperature sensor for detecting the temperature in the insulated container or a metal resistance wire provided on the insulated container wall for detecting the temperature as a change in resistance is provided for the sample container and the insulated container. If only the temperature at which the temperature difference between the sample container and the heat insulating container detected by the thermocouple contacting the contacts is substantially zero is adopted as the temperature of the sample, the temperature of the sample is detected by detecting the temperature of the heat insulating container. Knowing that, the temperature sensor can be excluded from the sample container, and it is possible to reduce the number of parts attached to the sample container, reduce the heat capacity of the sample container, and measure the calorific value of a small amount of sample, as well as to reduce the size of the sample container. .

【0016】また、試料容器から温度センサを除外する
ことにより温度センサの導線による熱伝導を無くし、試
料容器からの熱伝導による試料の温度上昇量に対する誤
差が低減されるから熱量測定の精度が向上する。
Further, by eliminating the temperature sensor from the sample container, heat conduction by the conductor of the temperature sensor is eliminated, and the error in the amount of temperature rise of the sample due to the heat conduction from the sample container is reduced, so that the accuracy of the calorimetric measurement is improved. I do.

【0017】[0017]

【実施例】以下本発明の一実施例を図を用いて説明す
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.

【0018】実施例1 まず、装置の構造を説明する。Embodiment 1 First, the structure of the apparatus will be described.

【0019】図1は本実施例の断熱型熱量計の試料容器
と断熱容器の断面図である。
FIG. 1 is a sectional view of a sample container and a heat insulating container of the heat insulating calorimeter of the present embodiment.

【0020】試料容器1は試料容器蓋2、試料容器本体
3、試料容器ヒータ5、ヒータ保護カバー4から構成さ
れる。熱電対6の接点が試料容器1と断熱容器7に取り
付けてある。また、断熱容器7の内壁には温度センサ8
が取り付けてあり、断熱容器7の外壁には温度制御をす
るための断熱容器ヒータ9が均一に巻いてある。
The sample container 1 comprises a sample container lid 2, a sample container main body 3, a sample container heater 5, and a heater protection cover 4. The contacts of the thermocouple 6 are attached to the sample container 1 and the heat insulating container 7. A temperature sensor 8 is provided on the inner wall of the heat insulating container 7.
A heat insulating container heater 9 for controlling the temperature is uniformly wound on the outer wall of the heat insulating container 7.

【0021】次に動作を説明する。Next, the operation will be described.

【0022】図2は断熱制御回路及び熱量測定回路のブ
ロックダイヤグラムである。
FIG. 2 is a block diagram of the adiabatic control circuit and the calorimetric measuring circuit.

【0023】断熱制御は次のように行われる。熱電対6
によって試料容器1と断熱容器7間の温度差を温度差検
出器10によって温度差信号として検出し、その温度差
信号をPID制御器11に出力し、増幅器12によって
PID制御器からの出力信号を増幅して断熱容器ヒータ
9に電流として出力し、断熱容器7の温度を試料容器1
と同一に制御する。例えば、断熱容器7の温度が試料容
器1より低いとき、熱電対6の熱起電力が負になるよう
に熱電対6の極性を配置し、温度差信号が負の場合断熱
容器ヒータ9に電流を増加するように構成する。仮に、
断熱容器7の温度が試料容器1より低い場合熱起電力は
負となるが、断熱容器ヒータ9への電流を増加すること
によって断熱容器7の温度が上昇し、試料容器1の温度
に近づき、熱起電力の値も零に近づく。そして、更に両
者の温度が等しくなるように断熱容器ヒータ9の電流を
細かく調節する。このようにして試料容器1と断熱容器
7との温度差は無くなり、試料容器1は外界に対して断
熱状態になり試料容器1の温度は極めて安定に制御され
る。
The adiabatic control is performed as follows. Thermocouple 6
The temperature difference between the sample container 1 and the heat insulating container 7 is detected as a temperature difference signal by the temperature difference detector 10, the temperature difference signal is output to the PID controller 11, and the output signal from the PID controller is output by the amplifier 12. It is amplified and output as a current to the insulated container heater 9, and the temperature of the insulated container 7 is
Control the same as. For example, when the temperature of the heat insulating container 7 is lower than that of the sample container 1, the polarity of the thermocouple 6 is arranged so that the thermoelectromotive force of the thermocouple 6 becomes negative. Is configured to be increased. what if,
When the temperature of the heat insulating container 7 is lower than that of the sample container 1, the thermoelectromotive force becomes negative. However, by increasing the current to the heat insulating container heater 9, the temperature of the heat insulating container 7 rises and approaches the temperature of the sample container 1, The value of the thermoelectromotive force also approaches zero. Then, the current of the heat insulating container heater 9 is finely adjusted so that the temperatures of the two become equal. In this manner, the temperature difference between the sample container 1 and the heat insulating container 7 is eliminated, the sample container 1 is insulated from the outside, and the temperature of the sample container 1 is controlled very stably.

【0024】一方、試料容器1に巻いた試料容器ヒータ
5に断続的に或る時間間隔だけ電流を流し、その時試料
容器ヒータ5の両端にかかる電圧、試料容器ヒータ5を
流れる電流を電圧、電流計15によって測定し、試料容
器1に加えた熱エネルギーを測定する。
On the other hand, a current is intermittently applied to the sample container heater 5 wound around the sample container 1 for a certain time interval, and the voltage applied to both ends of the sample container heater 5 and the current flowing through the sample container heater 5 at that time are referred to as voltage and current. The heat energy applied to the sample container 1 is measured by the total 15.

【0025】[0025]

【数3】 ΔE=I・V・Δt……………………………………………………(3) ΔE:熱エネルギー I :印加電流 V :印加電圧 Δt:時間間隔 そしてその熱エネルギーデータをマイクロコンピュータ
14に送る。また、温度センサ8の信号を電圧計あるい
は抵抗測定器13により測定し、マイクロコンピュータ
14に試料温度のデータとして送る。このとき、熱電対
6からの温度差を温度差検出器10よりマイクロコンピ
ュータ14に温度差信号として送り、温度差が数mK以
内、好ましくは零のときの温度のみ試料温度として採用
し、次のようにして熱エネルギを加える前後の温度上昇
量を測定する。まず、断熱制御が行われている条件のも
とで、試料温度の時間変化がある設定値(例えば10m
K/h)以下になったとき、試料温度の時間変化を試料
加熱開始から終了までの時間の中間まで外挿し、その時
の温度を試料加熱前の温度として求める。次に、加熱終
了後、試料温度の時間変化がある設定値以下になったこ
とを確認し、その温度変化を直前の試料加熱開始から終
了までの時間の中間まで外挿し、その時の温度を試料加
熱後の温度として求める。このようにして加熱前後の温
度上昇量を求めることができる。
ΔE = I · V · Δt (3) ΔE: thermal energy I: applied current V: applied voltage Δt: time interval Then, the heat energy data is sent to the microcomputer 14. The signal of the temperature sensor 8 is measured by a voltmeter or a resistance measuring device 13 and sent to the microcomputer 14 as data of the sample temperature. At this time, the temperature difference from the thermocouple 6 is sent from the temperature difference detector 10 to the microcomputer 14 as a temperature difference signal, and only the temperature when the temperature difference is within several mK, preferably zero, is adopted as the sample temperature. The amount of temperature rise before and after the application of thermal energy is measured as described above. First, under a condition in which adiabatic control is performed, a set value (for example, 10 m
(K / h) or less, the time change of the sample temperature is extrapolated to the middle of the time from the start to the end of sample heating, and the temperature at that time is determined as the temperature before sample heating. Next, after heating is completed, it is confirmed that the time change of the sample temperature has fallen below a certain set value, and the temperature change is extrapolated to the middle of the time from the start to the end of the immediately preceding sample heating, and the temperature at that time is sampled. Calculate as the temperature after heating. In this way, the amount of temperature rise before and after heating can be obtained.

【0026】[0026]

【数4】 ΔT=Tf−Ti……………………………………………………(4) ΔT:温度上昇量 Tf:試料加熱後の温度 Ti:試料加熱前の温度 そしてこれらの結果をもとに試料の熱容量を(1)式に
より求めることができる。高精度に熱容量を測定するた
めには、ΔT=1〜2Kとなるよう条件を設定し、試料
を加熱するモードと熱平衡状態で温度を測定するモード
を断続的に繰り返しながら測定する。また、温度センサ
8には数mKの精度を有する白金抵抗温度計を用いる。
ΔT = Tf−Ti (4) ΔT: Temperature rise Tf: Temperature after sample heating Ti: Before sample heating Temperature Based on these results, the heat capacity of the sample can be determined by equation (1). In order to measure the heat capacity with high accuracy, conditions are set so that ΔT = 1 to 2K, and the measurement is performed while intermittently repeating a mode for heating the sample and a mode for measuring the temperature in a thermal equilibrium state. Further, as the temperature sensor 8, a platinum resistance thermometer having an accuracy of several mK is used.

【0027】図1のように試料容器1と断熱容器7を構
成し、図2のように断熱制御回路及び熱量測定回路を構
成することにより、試料容器1からのリード線は熱電対
6と試料容器ヒータ5だけとなり、熱伝導を少なくでき
る。また、熱電対6を用いて断熱容器7の温度が試料容
器1と同一になったことを確認し、そのときの温度セン
サ8の測定値を試料温度として採用することによって、
試料温度を高い再現性と精度のもとに測定することがで
きる。
By forming the sample container 1 and the heat insulating container 7 as shown in FIG. 1, and forming the heat insulating control circuit and the calorific value measuring circuit as shown in FIG. 2, the lead wire from the sample container 1 is connected to the thermocouple 6 and the sample. Since only the container heater 5 is used, heat conduction can be reduced. Further, it is confirmed that the temperature of the heat insulating container 7 is the same as that of the sample container 1 using the thermocouple 6, and the measured value of the temperature sensor 8 at that time is adopted as the sample temperature.
The sample temperature can be measured with high reproducibility and accuracy.

【0028】実施例2 実施例1と基本的に同じ構成であるが、温度センサ8の
代わりに断熱容器7全体に金属抵抗線16を巻き、この
金属抵抗線16の温度による抵抗値の変化を温度変化と
して検出する。このようにすると金属抵抗線16は断熱
容器7全体の温度を検出するから温度分布があっても平
均値が得られ、標準偏差の小さい断熱容器7の温度を測
定することができる。
Embodiment 2 The structure is basically the same as that of Embodiment 1, except that a metal resistance wire 16 is wound around the entire heat insulating container 7 in place of the temperature sensor 8, and the change in the resistance value of the metal resistance wire 16 due to the temperature is measured. Detected as a temperature change. In this manner, since the metal resistance wire 16 detects the temperature of the entire heat insulating container 7, an average value is obtained even if there is a temperature distribution, and the temperature of the heat insulating container 7 having a small standard deviation can be measured.

【0029】以上述べたように、試料容器に代えて断熱
容器の温度を測定することにより、試料容器から温度計
を除外し、それにより試料容器の低熱容量化が達成され
従来10g必要とした試料を50mgまで低減し同じ精
度で測定出来ることが可能となった。更に、試料容器か
ら出る温度計のリード線が無くなり熱伝導を少なくでき
る。
As described above, by measuring the temperature of the insulated container instead of the sample container, the thermometer is excluded from the sample container, whereby the heat capacity of the sample container is reduced, and the sample that required 10 g in the past was required. Was reduced to 50 mg, and it was possible to measure with the same accuracy. Further, the lead wire of the thermometer coming out of the sample container is eliminated, so that heat conduction can be reduced.

【0030】また、熱電対によって断熱容器の温度が試
料容器の温度と同じなったときに測定した温度のみを試
料温度として採用することによって、外部からの熱伝導
による断熱容器の異常な温度変化を、試料温度変化とし
て測定するような誤った測定を防ぐことができる。
Also, by employing only the temperature measured when the temperature of the heat insulating container becomes equal to the temperature of the sample container by the thermocouple as the sample temperature, abnormal temperature change of the heat insulating container due to heat conduction from the outside can be prevented. In addition, erroneous measurement such as measurement as a change in sample temperature can be prevented.

【0031】[0031]

【発明の効果】本発明によれば、断熱容器に温度センサ
若しくは金属抵抗線を設け、試料容器と断熱容器の温度
差がほぼ零になった時に断熱容器の温度を試料の温度と
定めることにより、試料容器から温度センサを除外して
試料容器の低熱容量化を図り微量試料の熱量測定が可能
となる効果が得られる。
According to the present invention, a temperature sensor or a metal resistance wire is provided in a heat insulating container, and when the temperature difference between the sample container and the heat insulating container becomes substantially zero, the temperature of the heat insulating container is determined as the temperature of the sample. In addition, the temperature sensor can be excluded from the sample container to reduce the heat capacity of the sample container, and the calorie measurement of a small amount of sample can be obtained.

【0032】また、試料容器から温度センサを除外する
ことにより温度センサの導線による熱伝導を無くし、試
料容器からの熱伝導による試料の温度上昇量に対する誤
差が低減されるから熱量測定の精度が向上する。
In addition, by eliminating the temperature sensor from the sample container, heat conduction by the conducting wire of the temperature sensor is eliminated, and the error in the amount of temperature rise of the sample due to heat conduction from the sample container is reduced, so that the accuracy of the calorimetric measurement is improved. I do.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例の断熱型熱量計の試料容器と断
熱容器の断面図である。
FIG. 1 is a sectional view of a sample container and a heat insulating container of an adiabatic calorimeter according to an embodiment of the present invention.

【図2】本発明の実施例の断熱制御回路及び熱量測定回
路のブロックダイヤグラムである。
FIG. 2 is a block diagram of an adiabatic control circuit and a calorimetric measurement circuit according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 試料容器 2 試料容器蓋 3 試料容器本体 4 ヒータ保護カバー 5 試料容器ヒータ 6 熱電対 7 断熱容器 8 温度センサ 9 断熱容器ヒータ 10 温度差検出器 11 PID制御器 12 増幅器 13 電圧計あるいは抵抗測定器 14 マイクロコンピュータ 15 電圧、電流計 16 金属抵抗線 DESCRIPTION OF SYMBOLS 1 Sample container 2 Sample container lid 3 Sample container main body 4 Heater protection cover 5 Sample container heater 6 Thermocouple 7 Insulated container 8 Temperature sensor 9 Insulated container heater 10 Temperature difference detector 11 PID controller 12 Amplifier 13 Voltmeter or resistance measuring device 14 Microcomputer 15 Voltage and ammeter 16 Metal resistance wire

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 微量試料を保有する試料容器と、該試料
容器を加熱する第1の発熱体と、該試料容器を支持し包
含する断熱容器と、該断熱容器を加熱する第2の発熱体
と、該断熱容器の温度を検出する断熱容器温度センサ
と、接点部を前記試料容器と前記断熱容器に接触させ温
度差を検出する熱電対とを備えたことを特徴とする熱量
測定装置。
1. A sample container holding a small amount of sample, a first heating element for heating the sample container, a heat insulating container supporting and containing the sample container, and a second heating element for heating the heat insulating container. And a thermocouple for detecting a temperature difference between the sample container and the heat-insulating container by bringing a contact portion into contact with the sample container and the heat-insulating container.
【請求項2】 微量試料を保有する試料容器と、該試料
容器を加熱する第1の発熱体と、該試料容器を支持し包
含する断熱容器と、該断熱容器を加熱する第2の発熱体
と、該断熱容器壁に設け温度を抵抗値の変化として検出
する金属抵抗線と、接点部を前記試料容器と前記断熱容
器に接触させ温度差を検出する熱電対とを備えたことを
特徴とする熱量測定装置。
2. A sample container holding a small amount of sample, a first heating element for heating the sample container, a heat insulating container supporting and containing the sample container, and a second heating element for heating the heat insulating container. And a metal resistance wire provided on the heat insulating container wall and detecting a temperature as a change in resistance value, and a thermocouple for detecting a temperature difference by bringing a contact portion into contact with the sample container and the heat insulating container. Calorimeter.
【請求項3】 微量試料を保有する試料容器と、該試料
容器を加熱する第1の発熱体と、該試料容器を支持し包
含する断熱容器と、該断熱容器を加熱する第2の発熱体
と、該断熱容器の温度を検出する断熱容器温度センサ
と、接点部を前記試料容器と前記断熱容器に接触させ温
度差を検出する熱電対と、該熱電対が検出した温度差を
入力し該温度差を解消するように前記第2の発熱体へ供
給するエネルギを制御する断熱制御回路と、前記第1の
発熱体へ供給するエネルギ量を測定し前記断熱容器温度
センサが検出した断熱容器温度と前記熱電対が検出した
温度差とを入力し前記温度差がほぼ零になった時に前記
断熱容器温度を前記微量試料の温度として前記エネルギ
量を用いて熱容量を演算する熱量測定回路とを備えたこ
とを特徴とする熱量測定装置。
3. A sample container holding a small amount of sample, a first heating element for heating the sample container, a heat insulating container supporting and containing the sample container, and a second heating element for heating the heat insulating container. And a heat insulating container temperature sensor for detecting the temperature of the heat insulating container, a thermocouple for detecting a temperature difference by bringing a contact portion into contact with the sample container and the heat insulating container, and inputting the temperature difference detected by the thermocouple. An adiabatic control circuit for controlling the energy supplied to the second heating element so as to eliminate the temperature difference, and an adiabatic vessel temperature detected by the adiabatic vessel temperature sensor by measuring the amount of energy supplied to the first heating element And a calorie measurement circuit for calculating a heat capacity using the energy amount as the temperature of the adiabatic container when the temperature difference is substantially zero, and when the temperature difference becomes substantially zero. Calorimetry characterized by Setting device.
【請求項4】 微量試料を保有する試料容器と、該試料
容器を加熱する第1の発熱体と、該試料容器を支持し包
含する断熱容器と、該断熱容器を加熱する第2の発熱体
と、該断熱容器壁に設け温度を抵抗値の変化として検出
する金属抵抗線と、接点部を前記試料容器と前記断熱容
器に接触させ温度差を検出する熱電対と、該熱電対が検
出した温度差を入力し該温度差を解消するように前記第
2の発熱体へ供給するエネルギを制御する断熱制御回路
と、前記第1の発熱体へ供給するエネルギ量を測定し前
記断熱容器温度センサが検出した断熱容器温度と前記熱
電対が検出した温度差とを入力し前記温度差がほぼ零に
なった時に前記断熱容器温度を前記微量試料の温度とし
て前記エネルギ量を用いて熱容量を演算する熱量測定回
路とを備えたことを特徴とする熱量測定装置。
4. A sample container holding a small amount of sample, a first heating element for heating the sample container, a heat insulating container supporting and containing the sample container, and a second heating element for heating the heat insulating container. And a metal resistance wire provided on the heat insulating container wall and detecting a temperature as a change in resistance, a thermocouple for detecting a temperature difference by bringing a contact portion into contact with the sample container and the heat insulating container, and detecting the thermocouple. An adiabatic control circuit for inputting a temperature difference and controlling energy supplied to the second heating element so as to eliminate the temperature difference; and an adiabatic container temperature sensor for measuring an amount of energy supplied to the first heating element. Inputting the temperature of the insulated container detected by the thermocouple and the temperature difference detected by the thermocouple, and when the temperature difference becomes substantially zero, the heat capacity is calculated by using the amount of energy as the temperature of the insulated container as the temperature of the trace sample. That it has a calorimeter Characteristic calorimeter.
【請求項5】 試料を保有し発熱体を備えた試料容器
と、該試料容器を包含し発熱体を備えた断熱容器と、該
断熱容器の温度を検出する断熱容器温度センサと、前記
試料容器と前記断熱容器の温度差を検出する温度差セン
サとを備えた熱量測定装置を用い、前記温度差がほぼ零
になるように前記断熱容器の発熱体を制御しその時の断
熱容器温度を試料温度と定めることを特徴とする熱量測
定方法。
5. A sample container holding a sample and having a heating element, an insulating container including the sample container and having a heating element, an insulating container temperature sensor for detecting a temperature of the insulating container, and the sample container And a calorimeter equipped with a temperature difference sensor for detecting a temperature difference between the heat insulating container and a heating element of the heat insulating container so that the temperature difference becomes substantially zero. And a calorimetric method.
JP22896891A 1991-09-09 1991-09-09 Calorimeter and method Expired - Lifetime JP2949314B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22896891A JP2949314B2 (en) 1991-09-09 1991-09-09 Calorimeter and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22896891A JP2949314B2 (en) 1991-09-09 1991-09-09 Calorimeter and method

Publications (2)

Publication Number Publication Date
JPH0566160A JPH0566160A (en) 1993-03-19
JP2949314B2 true JP2949314B2 (en) 1999-09-13

Family

ID=16884690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22896891A Expired - Lifetime JP2949314B2 (en) 1991-09-09 1991-09-09 Calorimeter and method

Country Status (1)

Country Link
JP (1) JP2949314B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100189970B1 (en) * 1995-08-07 1999-06-01 윤종용 A polishing apparatus for semiconductor wafer
EP1184649A1 (en) * 2000-09-04 2002-03-06 Eidgenössische Technische Hochschule Zürich Calorimeter
JP2003014674A (en) * 2001-07-03 2003-01-15 Sumitomo Chem Co Ltd Method for controlling calorimeter installing atmosphere
GB2462293B (en) * 2008-07-31 2012-10-17 Ge Infrastructure Sensing Inc System and method for a temperature sensor using temprature balance
JP5585131B2 (en) * 2010-03-12 2014-09-10 いすゞ自動車株式会社 Calorific value measurement container

Also Published As

Publication number Publication date
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