JP2019155699A - Stereo molding device and stereo molding method - Google Patents

Abstract

To provide a stereo molding device capable of correctly detecting a decrease of the transmittance of an irradiation window.SOLUTION: A stereo molding device includes: means 12 for forming a powder thin layer with a powder material; heat insulation means 14, which surrounds a periphery of the powder thin layer and thermally shields from an outer environment; means 18 for generating a beam, which is arranged outside of the heat insulating means and generates an electromagnetic wave beam; a transparent window 15, which is provided on a part of the heat insulating means and is made of a transparent material to the electromagnetic wave beam; polarized light separation means 21, which is arranged between the beam generating means and the transparent window, and separates the electromagnetic wave beam emitted from the beam generating means into a polarized component of one direction and a polarized light component of a direction orthogonal to the one direction; selective irradiation means 24, which guides the electromagnetic wave beam of the polarized component of the one direction to the transparent window and selectively irradiates to the powder thin layer via the transparent window; and beam intensity detection means 23 for detecting a beam intensity of the polarized component of the direction orthogonal to the one direction.SELECTED DRAWING: Figure 3-2

Description

  The present invention relates to a three-dimensional modeling apparatus and a three-dimensional figure method.

  As a three-dimensional modeling device that forms a three-dimensional modeled object, a three-dimensional modeled object is formed by forming a thin layer using a powdered metal material, a ceramic material, or a resin material, and repeating selective melting and solidification by irradiation of electromagnetic waves such as a laser. Powder bed melt bonding devices are known which form

  In the powder bed fusion bonding apparatus, it is required to maintain the surface of the powder thin layer formed in the laser scanning space at a desired temperature while irradiating the laser beam in order to prevent warping and distortion of the three-dimensional structure. For this reason, in the conventional powder bed fusion bonding apparatus, the temperature control is performed by measuring the surface temperature of the thin layer of the powder with an infrared radiation thermometer and controlling the heating means based on the temperature measurement result.

  In order to keep the surface temperature of the thin powder layer constant, it is necessary to surround the entire laser scanning space with a heat insulating chamber and to thermally shield it from the outside. For this reason, a laser light source, an infrared radiation thermometer, etc. are arranged outside the heat insulation chamber, and the irradiation of the laser light to the thin powder layer and the measurement of the surface temperature of the thin powder layer are performed through an irradiation window provided in the heat insulation chamber. Done.

  When the surface of the thin powder layer is irradiated with laser, decomposition products and the like are generated as the powder melts, drifting in the laser scanning space, and a part of the powder adheres to the irradiation window to contaminate the irradiation window. As a result, there is a problem that the transmittance of the irradiation window with respect to the laser light is reduced, and the intensity of the laser light irradiated on the surface of the thin powder layer is reduced. In addition, the measurement of the radiation thermometer is also affected by a decrease in the transmittance of the irradiation window, and the temperature of the powder thin layer is measured lower than the actual temperature, which is fed back to the temperature control device. There is a problem that the surface temperature of the thin layer increases.

  This invention is made | formed in view of the above, Comprising: It aims at provision of the solid modeling layer apparatus which can detect the fall of the transmittance | permeability of an irradiation window correctly.

  In order to solve the above-described problems and achieve the object, the three-dimensional modeling apparatus of the present invention includes a powder thin layer forming unit that forms a powder thin layer using a powder material, and surrounds the periphery of the powder thin layer, A heat insulating means that is thermally shielded from the environment, a beam generating means that is disposed outside the heat insulating means and that emits an electromagnetic wave beam, and is provided in a part of the heat insulating means, and is made of a material that is transparent to the electromagnetic wave beam A polarized window that is disposed between the transparent window and the beam generating means and the transparent window and separates the electromagnetic wave beam emitted from the beam generating means into a polarized light component in one direction and a polarized light component in a direction orthogonal to the one direction. Separation means, selective irradiation means for guiding an electromagnetic beam of the unidirectionally polarized light component to the transparent window, and selectively irradiating the thin powder layer through the transparent window; and an electromagnetic wave beam reflected by the transparent window From before Comprising a beam intensity detection means for detecting a beam intensity of the polarized component in one direction and the orthogonal direction, a.

  According to the present invention, it is possible to correctly detect a decrease in the transmittance of the irradiation window.

FIG. 1 is a perspective view showing a schematic configuration of a powder bed fusion bonding apparatus according to an embodiment. FIG. 2 is a block diagram of the powder bed fusion bonding apparatus according to the embodiment. FIG. 3-1 is a diagram for explaining a method of manufacturing a three-dimensional structure. 3-2 is a figure for demonstrating the manufacturing method of a three-dimensional molded item. FIGS. 4-1 is a figure for demonstrating the manufacturing method of a three-dimensional molded item. FIGS. 4-2 is a figure for demonstrating the manufacturing method of a three-dimensional molded item. FIG. 5 is a diagram for explaining a method of measuring the amount of decomposition product attached according to the embodiment. FIG. 6 is a schematic diagram for explaining the behavior of laser light around the irradiation window. FIG. 7 is a flowchart showing a procedure for measuring the S-polarized light component generated by the decomposition product attached to the irradiation window.

  Hereinafter, an embodiment of a three-dimensional modeling apparatus will be described in detail with reference to the accompanying drawings. FIG. 1 is a perspective view illustrating a schematic configuration of a powder bed fusion bonding apparatus 1 (an example of a three-dimensional modeling apparatus) according to an embodiment.

(Configuration of powder bed fusion bonding device)
As shown in FIG. 1, the powder bed fusion bonding apparatus 1 includes a supply tank 11, a heater 11H, a roller 12, a heater 13H, a heat insulation chamber 14, an irradiation window 15, an infrared radiation thermometer 16, a laser generator 18, a first generator. It has a polarizing plate 20, a polarizing beam splitter 21, a second polarizing plate 22, a first light receiving element 23, a first reflecting mirror 24, a second reflecting mirror 30, a piston 11P, and a piston 13P.

  The supply tank 11 is a container for accommodating the powder P for modeling. Examples of the powder P include a powdered metal material, a ceramic material, or a resin material. In the present embodiment, resin powder is used.

  The heater 11H heats the powder P accommodated in the supply tank 11. The heater 13H heats the powder P supplied to the laser scanning space 13.

  The roller 12 is powder thin layer forming means for leveling the powder P supplied to the laser scanning space 13 of the powder bed fusion bonding apparatus 1 to form a thin layer of the powder P. As the powder thin layer forming means, a roller, a blade, a brush, or a combination thereof can be used.

  The heat insulation chamber 14 is a heat insulation means for thermally shutting off the laser scanning space 13 maintained at a high temperature and the outside room temperature environment.

  The irradiation window 15 is a transparent window that is provided in a part of the heat insulation chamber 14 and is made of a material that is transparent to the laser light emitted from the laser generator 18. The laser light is introduced into the laser scanning space 13 through the irradiation window 15.

  The infrared radiation thermometer 16 is a temperature measuring means that is disposed outside the heat insulation chamber 14 and remotely measures the surface temperature of the powder P (powder thin layer) through the irradiation window 15 in a non-contact manner. As shown in FIG. 1, by installing the infrared radiation thermometer 16 over the irradiation window 15, remote temperature measurement can be performed without providing a dedicated window for the thermometer in the heat insulation chamber 14. Further, by using the most general-purpose infrared radiation thermometer 16 as a temperature measuring means capable of remote temperature measurement without contact, a temperature measuring function can be realized with an inexpensive configuration.

The laser generator 18 is disposed outside the heat insulation chamber 14, and irradiates the thin powder layer with an electromagnetic wave to melt it. The laser generator 18 includes a CO ₂ laser light source as an electromagnetic wave beam source, and emits laser light L. As the electromagnetic wave beam source, a laser light source, an infrared irradiation source, a microwave generator, or a combination thereof can be used.

  The first polarizing plate 20 transmits only a specific polarization component of the laser light L emitted from the laser generator 18. The polarization beam splitter 21 transmits a polarization component in one direction and reflects a polarization component in a direction orthogonal to the one direction. That is, the polarization beam splitter 21 functions as a polarization separation unit that separates the laser light into the first polarization component and the second polarization component. The first polarizing plate 20 and the polarizing beam splitter 21 will be described in detail later.

  The first reflecting mirror 24 reflects only the laser light of the polarization component in one direction separated by the polarization beam splitter 21 and guides it to a predetermined position in the laser scanning space 13. The reflection surface of the first reflecting mirror 24 changes the angle based on two-dimensional data of a 3D (three-dimensional) model while the laser generator 18 irradiates the laser light L. The two-dimensional data of the 3D model is each cross-sectional shape data when the 3D model is sliced at a predetermined interval. As a result, the laser beam L is selectively irradiated to a portion indicated by the two-dimensional data in the laser scanning space 13 by changing the reflection angle of the laser beam. That is, the first reflecting mirror 24 functions as a selective irradiating unit that guides only the separated laser beam having the polarization component in one direction to the irradiation window 15 and selectively irradiates the thin powder layer through the irradiation window 15. To do. The powder P at the position where the laser beam is irradiated sinters or fuses the powders together to form a molten layer.

  When the modeling of the molten layer is completed, the piston 11P and the piston 13P are driven by the piston driving unit 122 shown in FIG. 2, and the supply tank 11 and the laser scanning space 13 are moved upward or downward with respect to the stacking direction of the molded object. Move to. Thereby, the new powder P used for modeling of a new layer is supplied from the supply tank 11 to the laser scanning space 13.

  The second polarizing plate 22 is disposed between the polarizing beam splitter 21 and the light receiving element 23 and transmits only a specific polarization component of the laser light. The light receiving element 23 is a beam intensity detection unit that detects the beam intensity of the polarization component orthogonal to the direction of the polarization component of the laser light irradiated to the thin powder layer from the laser light reflected by the irradiation window 15. The second polarizing plate 22 and the first light receiving element 23 will also be described in detail later.

  The second reflecting mirror 30 is a half mirror that reflects a part of the incident laser beam L and transmits a part thereof. The second light receiving element 40 is a so-called laser power sensor that detects the intensity of the laser light L emitted from the laser generator 18 and reflected by the second reflecting mirror 30.

  FIG. 2 is a block diagram showing a schematic configuration of a control system of the powder bed fusion bonding apparatus 1. The powder bed fusion bonding apparatus 1 includes a control unit 100 that controls the entire powder bed fusion bonding apparatus 1. The control unit 100 includes a controller unit 110 and an engine control unit 120.

  The controller unit 110 includes a CPU, a memory (ROM, RAM), and the like, and is connected to the engine control unit 120, the data input unit 200, and the like. The controller unit 110 controls the entire powder bed fusion bonding apparatus 1 by executing a control program incorporated in advance. For example, the controller unit 110 receives a plurality of two-dimensional data generated from a 3D model input via the data input unit 200, controls the engine control unit 120 according to the data, and performs an operation of forming a three-dimensional structure. Control.

  The engine control unit 120 includes a CPU, a ROM, a RAM, and the like, and is connected to the controller unit 110, each detection member (the infrared radiation thermometer 16, the first light receiving element 23, the second light receiving element 40) and the like, and is incorporated in advance. By executing the control program, a modeling engine (heater 11H, roller 12, heater 13H, laser generator 18, first reflecting mirror 24, piston, which performs a modeling operation based on a command from the controller unit 110 and the like. 11P, piston 13P, etc.) are controlled. For example, the engine control unit 120 controls the roller driving unit 121 to control the driving of the roller 12, or controls the piston driving unit 122 to control the vertical movement of the piston 11P and the piston 13P. Based on the obtained data, the reflecting mirror driving unit 123 is controlled to control the angle of the reflecting mirror 24. Further, the engine control unit 120 controls the heater driving unit 124 based on the reflected light intensity detected by the light receiving element 23 to control the energization time of the heater 13H or the unidirectional polarization detected by the light receiving element 23. Based on the beam intensity of the component, the laser generator 18 is controlled to control the intensity of the emitted laser light L. The control of the energization time of the heater 13H and the control of the intensity of the laser beam L will be described in detail later.

(Method for manufacturing a three-dimensional model)
Next, the manufacturing method of a three-dimensional molded item is demonstrated using FIGS. 3-1, FIGS. 3-2, FIGS. 4-1, and 4-2.

  The engine control unit 120 controls the heater 11H to heat the powder P accommodated in the supply tank 11. The temperature of the supply tank 11 is preferably as high as possible below the melting point of the powder P in terms of suppressing warping when the powder P is melted by laser light irradiation, but the melting of the powder P in the supply tank 11 is preferable. In terms of prevention, it is preferably 110 ° C. lower than the melting point of the powder P.

  The engine control unit 120 controls the roller 12 to supply the powder P in the supply tank 11 to the laser scanning space 13 to level the surface, and as shown in FIG. 3-1, a thin powder layer having a thickness T corresponding to one layer. Form. The surface temperature of the powder P supplied to the laser scanning space 13 is remotely measured by the infrared radiation thermometer 16 through the irradiation window 15. The engine control unit 120 controls the heater 13H to heat the powder P to a desired temperature. The desired temperature is preferably as high as possible in terms of suppressing warping when the powder P is melted by laser irradiation, but is more preferable than the melting point of the powder P in terms of preventing the powder P from melting in the laser scanning space 13. A low temperature of 5 ° C. or higher is preferable.

  The engine control unit 120 receives a plurality of two-dimensional data generated from the 3D model from the data input unit 200. As shown in FIG. 3-2, the engine control unit 200 changes the angle of the reflecting surface of the reflecting mirror 24 based on the two-dimensional data closest to the bottom surface among the plurality of two-dimensional data. Laser light L is emitted. There is no restriction | limiting in particular as an output of a laser, Although it selects suitably according to the objective, 10 watts or more and 150 watts or less are preferable. By the irradiation of the laser light, the powder P at the position corresponding to the pixel indicated by the two-dimensional data on the most bottom surface side of the thin powder layer is melted. When the laser light irradiation is completed, the molten resin is cured, and a molten layer having a shape indicated by the two-dimensional data on the bottom side is formed.

  Although it does not specifically limit as thickness T of a molten layer, As an average value, 10 micrometers or more are preferable, 50 micrometers or more are more preferable, and 100 micrometers or more are still more preferable. The thickness T of the molten layer is not particularly limited, but the average value is preferably less than 200 μm, more preferably less than 150 μm, and still more preferably less than 120 μm.

  When the molten layer on the bottom surface side is formed, the engine control unit 120 causes the laser scanning space 13 to form a modeling space having a thickness T corresponding to one layer as shown in FIG. The piston 13P is lowered by the thickness T in the scanning space 13. Further, the engine control unit 120 raises the piston 11P so that new powder P can be supplied. Subsequently, as shown in FIG. 4A, the engine control unit 120 drives the roller 12 to supply the powder P in the supply tank 11 to the laser scanning space 13 and level the ground, thereby making the thickness for one layer. A thin powder layer of thickness T is formed.

  Subsequently, as illustrated in FIG. 4B, the engine control unit 120 determines the reflection surface of the first reflecting mirror 24 based on the two-dimensional data of the second layer from the bottom surface side among the plurality of two-dimensional data. The laser beam L is emitted from the laser generator 18 while changing the angle. As a result, the powder P at the position corresponding to the pixel indicated by the two-dimensional data of the second layer from the bottom side in the powder thin layer is melted. When the irradiation with the laser beam is completed, the molten resin is cured, and a molten layer having a shape indicated by the two-dimensional data of the second layer from the bottom surface side is formed in a state of being laminated on the molten layer on the bottom surface side. .

  The engine control unit 120 repeats the supply of the powder P and the formation of the thin powder layer, thereby laminating the molten layer. When modeling based on all of the plurality of two-dimensional data is completed, a three-dimensional modeled object having the same shape as the 3D model is obtained.

(Measurement method of amount of decomposition product adhesion)
In the manufacturing process of the three-dimensional structure, the decomposition product may be scattered in the laser scanning space 13 when the resin powder thin layer melts. And if a part of them adheres to the irradiation window 15, the transmittance of the irradiation window 15 is lowered, 1) the intensity of the laser beam reaching the surface of the thin powder layer is reduced, or 2) through the irradiation window 15. There is a problem that the temperature of the thin powder layer measured using the infrared radiation thermometer 16 is measured lower than the actual temperature.

  Therefore, the above problem is solved by measuring the adhesion amount of the decomposition product and adjusting the laser output or correcting the temperature measurement value according to the adhesion amount. Hereinafter, a method for measuring the amount of decomposition products adhering to the irradiation window 15 will be described with reference to FIGS. 5 and 6.

  In FIG. 5, when the laser light emitted from the laser generator 18 passes through the first polarizing plate 20, a specific polarization component, that is, in this case, a vibration component of an electric field parallel to the paper surface (hereinafter referred to as P). Only the polarization component) is transmitted. Note that if the laser beam L emitted from the laser generator 18 is linearly polarized and has only a P-polarized component, the first polarizing plate 20 is not necessarily required. However, in order to remove components other than the P-polarized component slightly contained in the laser light L, it is more desirable to use the first polarizing plate 20. Thereby, the S / N ratio in the measurement can be improved.

  The laser light having P-polarized light is transmitted through the polarization beam splitter 21, reflected by the first reflecting mirror 24, further transmitted through the irradiation window 15, and introduced into the laser scanning space 13. When the decomposition product C adheres to the surface of the irradiation window 15, a part of the light that has been multiple-reflected inside the thin layer of the decomposition product C propagates in the reverse direction of the optical path and is reflected by the first reflecting mirror 24. It is reflected and enters the polarization beam splitter 21 again. The polarization beam splitter 21 has a function of reflecting or transmitting laser light according to the polarization direction. The polarization state of the laser light returned by multiple reflection at the thin layer of the decomposition product C includes a polarization component having a vibration direction perpendicular to the paper surface (hereinafter referred to as an S polarization component) for the reason described later. The S-polarized component is reflected by the polarization beam splitter 21, passes through the second polarizing plate 22, and enters the first light receiving element 23. As a result, the beam intensity of the S-polarized component contained in the reflected light is detected by the first light receiving element 23. Although the second polarizing plate 22 is not always necessary, in order to remove components other than S-polarized light slightly contained in the reflected light from the polarizing beam splitter 21, it is more preferable to use the second polarizing plate 22. desirable. Thereby, the S / N ratio in the measurement can be improved.

  FIG. 6 is a schematic diagram for explaining the behavior of laser light around the irradiation window 15. FIG. 6A shows the polarization state of the light transmitted through the decomposition product C attached to the irradiation window 15, and the laser beam incident as P-polarized light maintains the P-polarized state, and the laser scanning space. Go straight to 13.

  B of FIG. 6 shows the laser light reflected on the back surface of the irradiation window 15, and in this case, the polarization state is maintained as P-polarized light.

  C in FIG. 6 shows laser light that is multiple-reflected by a thin layer of the decomposition product C. Although the path of the multiple-reflected laser beam C is drawn so as not to include a vector component perpendicular to the paper surface in FIG. 6, it is considered that the path including the vector component perpendicular to the paper surface actually follows. As a result, the polarization state changes and an S-polarized light component is generated.

  As described above, the laser light returning to the original optical path after multiple reflection by the thin layer of the decomposition product C includes a slight S-polarized light in its polarization component. Further, the intensity of the S-polarized component increases in accordance with the thickness of the decomposition product C layer, that is, the amount of adhesion. Therefore, if the beam intensity of the S-polarized component is measured with the above-described apparatus configuration, it is possible to estimate the amount of the decomposition product C adhering to the irradiation window 15.

  In the present embodiment, the laser light having only one unidirectional polarization component (P-polarized component) is guided to the irradiation window, and among the laser light multiple-reflected by the decomposition product attached to the irradiation window 15, By measuring the S-polarized light component orthogonal to the direction of the P-polarized light component, it is possible to correctly detect the decrease in the transmittance of the irradiation window 15 due to the attachment of the decomposition products. Then, by using this detection result, as described later, it is possible to appropriately control the heater and set the beam intensity according to the decrease in transmittance.

(S-polarized component received light amount calculation flow)
Next, a flow of calculating the amount of received light of the S polarization component will be described.

  FIG. 7 is a flowchart showing a procedure for measuring the S-polarized light component generated by the decomposition product attached to the laser window. The timing for measuring the S-polarized component may be, for example, between the laser irradiation of the Nth layer and the laser irradiation of the (N + 1) th layer. Alternatively, it may be carried out at predetermined time intervals, for example, every 30 minutes during modeling.

  First, the control unit 100 turns off the laser generator 18 (step S1), and sets the angle of the first reflecting mirror 24 to an angle at which the laser beam is perpendicularly incident on the irradiation window 15 (step S2). . In this state, the amount of received light of the S-polarized component is measured and stored in the storage device (step S3). Thereafter, the laser generator 18 is turned on (step S4), and the amount of received light of the S-polarized component is measured again. The data is stored in the storage device (step S5), and the laser generator 18 is turned off (step S6).

  Since the S-polarized component received by the first light receiving element 23 has a weak intensity, the difference between the measured values measured in step S3 and step S5 is calculated, and the difference value is calculated as the intensity of the S-polarized component. (Step S7).

(Control method of laser light intensity)
When the difference value obtained in step S7 in FIG. 7 is zero or close to it, it means that there is no decomposition product attached to the irradiation window 15 or only a very small amount is attached. Therefore, in this case, the engine control unit 120 continues the modeling as it is without updating the laser output setting value at the time of modeling.

  However, when the difference value obtained in S7 of FIG. 7 is non-zero, it means that the decomposition product adheres to the irradiation window 15 and the transmittance of the irradiation window 15 decreases. Therefore, in order to maintain the laser beam intensity reaching the thin powder layer in the laser scanning space 13 at a certain level, it is necessary to increase the laser output set value. There is a fixed relationship between the laser output setting value for maintaining the laser light intensity at a constant level and the difference value of the S polarization intensity, and an appropriate laser output setting value is obtained from the difference value of the S polarization intensity. Obtain the conversion table and conversion formula in advance. Thereby, it is possible to obtain an appropriate laser output set value corresponding to the amount of decomposition product attached. The engine control unit 120 controls the intensity of the laser beam L emitted from the laser generator 18 using an appropriate laser output setting value corresponding to the amount of decomposition product attached.

(Temperature control method for powder thin layer)
As described above, when the difference value obtained in step S7 in FIG. 7 is zero or close thereto, it means that there is no decomposition product attached to the irradiation window 15 or only a very small amount is attached. Therefore, the engine control unit 120 is used to control the heater 13H without correcting the surface temperature of the powder thin layer that is remotely measured through the irradiation window 15.

  However, if the difference value obtained in step S7 in FIG. 7 is non-zero, it means that decomposition products are attached to the irradiation window 15, and the powder measured remotely via the irradiation window 15 The surface temperature of the thin layer will be measured lower than the actual temperature. Therefore, it is necessary to correct the measured value of the infrared radiation thermometer 16. There is a certain relationship between the measurement error of the infrared radiation thermometer 16 caused by the adhesion of the decomposition product and the difference value of the S-polarized light intensity, and a conversion table and a conversion formula can be obtained in advance. Thereby, the appropriate temperature measurement value according to the adhesion amount of the decomposition product can be obtained. The engine control unit 120 controls a control amount such as an energization time of the heater 13H based on an appropriate temperature measurement value.

DESCRIPTION OF SYMBOLS 1 Powder bed fusion | bonding apparatus 11 Supply tank 11H, 13H Heater 11P, 13P Piston 12 Roller 13 Laser scanning space 14 Heat insulation chamber 15 Irradiation window (transparent window)
16 Infrared radiation thermometer 16
DESCRIPTION OF SYMBOLS 18 Laser generator 20 1st polarizing plate 21 Polarizing beam splitter 22 2nd polarizing plate 23 1st light receiving element 24 1st reflective mirror 30 2nd reflective mirror 40 2nd light receiving element 100 Control part 110 Controller part 120 Engine control unit

JP 2011-21218 A JP 2007-223293 A Japanese Patent No. 4076091

Claims (10)

Powder thin layer forming means for forming a powder thin layer using a powder material;
Heat insulating means for enclosing the thin powder layer and thermally shielding from the external environment;
A beam generating means disposed outside the heat insulating means and emitting an electromagnetic wave beam;
A transparent window provided in a part of the heat insulating means and made of a material transparent to the electromagnetic wave beam;
A polarization separation unit that is disposed between the beam generation unit and the transparent window and separates an electromagnetic wave beam emitted from the beam generation unit into a polarization component in one direction and a polarization component in a direction orthogonal to the one direction;
A selective irradiating means for guiding an electromagnetic wave beam of the unidirectionally polarized component to the transparent window and selectively irradiating the thin powder layer through the transparent window;
A beam intensity detecting means for detecting a beam intensity of a polarized component in a direction orthogonal to the one direction from the electromagnetic wave beam reflected by the transparent window;
3D modeling apparatus.   The three-dimensional model | molding apparatus of Claim 1 further equipped with the beam intensity control means which controls the intensity | strength of the electromagnetic wave beam which the said beam generation means inject | emits based on the beam intensity detected by the said beam intensity detection means. Temperature control means for maintaining the temperature of the powder thin layer at a predetermined temperature;
Control means for controlling a control amount of the temperature control means based on the beam intensity detected by the beam intensity detection means;
The three-dimensional modeling apparatus according to claim 1, further comprising:   The three-dimensional model | molding apparatus of any one of Claim 1 to 3 further provided with the 1st polarizing element arrange | positioned between the said beam generation means and the said polarization separation means.   The three-dimensional model | molding apparatus of any one of Claim 1 to 4 further provided with the 2nd polarizing element arrange | positioned between the said polarization separation means and the said beam intensity detection means.   The three-dimensional model | molding apparatus of any one of Claim 1 to 5 further equipped with the temperature measurement means arrange | positioned outside the said heat insulation means, and remotely measuring the surface temperature of the said powder thin layer through the said transparent window.   The three-dimensional modeling apparatus according to claim 1, wherein the beam generation unit includes a laser light source as an electromagnetic wave beam source. Forming a thin powder layer using a powder material;
Separating the electromagnetic wave beam emitted from the beam generating means into a polarization component in one direction and a polarization component in a direction orthogonal to the one direction;
Only the electromagnetic wave of the polarized light component in one direction is guided to the transparent window made of a material transparent to the electromagnetic wave beam provided in a part of the heat insulating means surrounding the thin powder layer, through the transparent window. Selectively irradiating the thin powder layer;
Detecting the beam intensity of the polarized component in the direction orthogonal to the one direction from the electromagnetic wave beam reflected by the transparent window;
3D modeling method.   The three-dimensional modeling method according to claim 8, further comprising a step of controlling the intensity of the electromagnetic wave beam emitted by the beam generating unit based on the detected beam intensity.   The three-dimensional modeling method according to claim 8 or 9, further comprising a step of controlling the temperature of the thin-film layer based on the detected beam intensity.

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