JP2019078545A - Physical quantity sensor, inertia measuring device, moving body positioning device, portable electronic apparatus, electronic apparatus, and moving body - Google Patents

Abstract

To provide a physical quantity sensor having high detection accuracy, an inertia measuring device, a moving body positioning device, a portable electronic apparatus, an electronic apparatus, and a moving body.SOLUTION: A physical quantity sensor 1 comprises a first fixing part 42B by which a movable detection electrode 441B is fixed to a substrate 2, a detection spring 46B for coupling the first fixing part 42B and the movable detection electrode 441B, a first stem part 50 provided in a first direction, and a first coupling part 52 for coupling to the first stem part 50. The first coupling part 52 includes a first support part 521 for coupling to the first stem part 50, and a second support part 522 for coupling to the detection spring part 46B, a gap G1 in the first direction between the first support part 521 and a fixed detection electrode 443B being smaller than a gap G2 in the first direction between the second support part 522 and the fixed detection electrode 443B.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a physical quantity sensor, an inertial measurement device, a mobile positioning device, a portable electronic device, an electronic device, and a mobile.

  In recent years, physical quantity sensors manufactured using silicon MEMS (Micro Electro Mechanical System) technology have been developed. As such a physical quantity sensor, for example, Patent Document 1 has an element provided with a movable electrode and a fixed electrode arranged in a comb-like shape and opposed to each other, and based on the capacitance between these two electrodes. Capacitive acceleration sensors that detect physical quantities (angular velocities) are described. And in this composition, in order to raise detection sensitivity, many movable electrodes and fixed electrodes are provided.

U.S. Patent Application No. 84688886

  However, in the configuration of the physical quantity sensor described in Patent Document 1, when attempting to miniaturize it, it is necessary to reduce the number of movable electrodes and fixed electrodes, and there is a problem that the detection sensitivity is lowered.

  The present invention has been made to solve at least a part of the above-described problems, and can be realized as the following modes or application examples.

  Application Example 1 A physical quantity sensor according to this application example includes a substrate and a detection unit provided on the substrate and detecting a physical quantity, and the detection unit is a fixed detection electrode fixed to the substrate. A movable detection electrode displaceable in a first direction which is a detection axial direction of the physical quantity with respect to the substrate, a first fixing portion for fixing the movable detection electrode to the substrate, the first fixing portion, and the first fixing portion A first spring portion connecting the movable detection electrode, and the fixed detection electrode includes a plurality of fixed detection electrode fingers provided along a second direction which is a direction intersecting the first direction. The movable detection electrode is provided along a second direction from a first trunk provided along the first direction and the first trunk from the first trunk, and the fixed detection electrode finger and the first direction A plurality of movable detection electrode fingers spaced apart from each other, and the first A first connecting part connected to the first part, and the first connecting part has a first supporting part connected to the first trunk and a second supporting part connected to the first spring part. The distance between the first support portion and the fixed detection electrode in the first direction is smaller than the distance between the second support portion and the fixed detection electrode in the first direction.

  According to this application example, the distance in the first direction between the fixed detection electrode of the first support portion constituting the first connection portion connecting the first stem of the movable detection electrode and the first spring portion is the second support Since it is smaller than the space | interval of the 1st direction of a part and a fixed detection electrode, a 1st support part can be regarded as a movable detection electrode finger which opposes a fixed detection electrode finger. Therefore, since the electrostatic capacitance between the movable detection electrode and the fixed detection electrode can be increased, the detection sensitivity can be increased. Therefore, it is possible to obtain the physical quantity sensor in which the decrease in the detection sensitivity is reduced even when the size is reduced.

  Application Example 2 In the physical quantity sensor according to the application example, it is preferable that the length of the first support portion in the second direction is substantially equal to the length of the movable detection electrode finger in the second direction.

  According to this application example, since the length in the second direction of the first support portion is substantially equal to the length in the second direction of the movable detection electrode finger, the side surface of the first support portion and the side surface of the fixed detection electrode finger The facing area can be made approximately equal to the facing area of the side surface of the movable detection electrode finger and the side surface of the fixed detection electrode finger.

  Application Example 3 In the physical quantity sensor according to the application example, a distance between the first support portion and the fixed detection electrode in the first direction is the distance between the fixed detection electrode finger and the movable detection electrode finger. Preferably, the distance is substantially equal to the distance in one direction.

  According to this application example, the facing areas described above are equal, and the distance between the first support portion and the fixed detection electrode in the first direction is substantially equal to the distance between the fixed detection electrode finger and the movable detection electrode finger in the first direction. Therefore, the capacitance between the first support portion and the fixed detection electrode can be made substantially equal to the capacitance between the fixed detection electrode finger and the movable detection electrode finger.

  Application Example 4 A physical quantity sensor according to this application example includes a substrate and a detection unit provided on the substrate and detecting a physical quantity, and the detection unit is a fixed detection electrode fixed to the substrate. A movable detection electrode displaceable in a first direction which is a detection axial direction of the physical quantity with respect to the substrate, a first fixing portion for fixing the movable detection electrode to the substrate, the first fixing portion, and the first fixing portion A first spring portion connecting the movable detection electrode, and the fixed detection electrode includes a plurality of fixed detection electrode fingers provided along a second direction which is a direction intersecting the first direction. The movable detection electrode is provided along a second direction from a first trunk provided along the first direction and the first trunk from the first trunk, and the fixed detection electrode finger and the first direction A plurality of movable detection electrode fingers spaced apart from each other, and the first And a first connecting portion connected to the first connecting portion, wherein a length of the first connecting portion in the second direction is substantially equal to a length of the movable detection electrode finger in the second direction, and the first connecting portion An interval between the fixed detection electrode and the fixed detection electrode in the first direction is substantially equal to an interval between the fixed detection electrode finger and the movable detection electrode finger in the first direction.

  According to this application example, the length in the second direction of the first connection portion is substantially equal to the length in the second direction of the movable detection electrode finger, and the distance between the first connection portion and the fixed detection electrode in the first direction is Since the distance between the fixed detection electrode finger and the movable detection electrode finger is substantially equal to the distance in the first direction, the capacitance between the first coupling portion and the fixed detection electrode is set to the capacitance between the fixed detection electrode finger and the movable detection electrode finger. And the capacitance between them. Therefore, since the first connection portion can be regarded as the movable detection electrode finger facing the fixed detection electrode finger, the capacitance between the movable detection electrode and the fixed detection electrode can be increased, and the detection sensitivity is high. can do. Therefore, it is possible to obtain the physical quantity sensor in which the decrease in the detection sensitivity is reduced even when the size is reduced.

  Application Example 5 In the physical quantity sensor according to the application example described above, the drive includes a drive unit provided on the substrate and capable of driving the detection unit, and the drive unit is a fixed drive electrode fixed to the substrate. And a movable driving electrode displaceable in the second direction with respect to the substrate, a second fixing portion fixing the movable driving electrode to the substrate, and connecting the second fixing portion and the movable driving electrode A second spring portion, the fixed drive electrode having a plurality of fixed drive electrode fingers provided along the second direction, and the movable drive electrode along the first direction A second trunk provided, and a plurality of movable drive electrodes that are provided along the second direction from the second trunk and are spaced apart from the fixed drive electrode fingers in the first direction; And a second connecting portion connected to the second trunk, and the second link The part has a third support part connected to the second trunk and a fourth support part connected to the second spring part, and the first direction of the third support part and the fixed drive electrode It is preferable that the distance between the second support portion and the fixed drive electrode be smaller than the distance between the fourth support portion and the fixed drive electrode in the first direction.

  According to this application example, the distance between the fixed drive electrode of the third support portion and the fixed drive electrode of the third support portion that constitutes the second connecting portion that connects the second stem of the movable drive electrode and the second spring portion is the fourth support The third support portion can be regarded as a movable drive electrode finger opposed to the fixed drive electrode finger because the distance between the portion and the fixed drive electrode is smaller than the distance in the first direction. Therefore, since the electrostatic capacitance between the movable drive electrode and the fixed drive electrode can be increased, the vibration displacement of the detection unit can be increased, and the detection sensitivity can be increased. Therefore, it is possible to obtain a physical quantity sensor in which the decrease in detection sensitivity is further reduced even when the size is reduced.

  Application Example 6 In the physical quantity sensor according to the application example, it is preferable that a length of the third support in the second direction is substantially equal to a length of the movable drive electrode finger in the second direction.

  According to this application example, since the length in the second direction of the third support portion is substantially equal to the length in the second direction of the movable drive electrode finger, the side surface of the third support portion and the side surface of the fixed drive electrode finger The facing area can be made substantially equal to the facing area of the side surface of the movable drive electrode finger and the side surface of the fixed drive electrode finger.

  Application Example 7 In the physical quantity sensor according to the application example, the distance between the third support portion and the fixed drive electrode in the first direction is the distance between the fixed drive electrode finger and the movable drive electrode finger. Preferably, the distance is substantially equal to the distance in one direction.

  According to this application example, the facing areas described above are equal, and the distance between the third support and the fixed drive electrode in the first direction is substantially equal to the distance between the fixed drive electrode finger and the movable drive electrode finger in the first direction. Therefore, the capacitance between the third support and the fixed drive electrode can be made substantially equal to the capacitance between the fixed drive electrode finger and the movable drive electrode finger.

  Application Example 8 An inertial measurement device according to this application example includes the physical quantity sensor described in the above application example, and a control circuit that controls driving of the physical quantity sensor.

  According to this application example, the effect of the physical quantity sensor as described above can be obtained, and an inertial measurement device with high reliability can be obtained.

  Application Example 9 A mobile body positioning device according to this application example includes the inertial measurement device according to the application example, a receiving unit that receives a satellite signal on which position information is superimposed from a positioning satellite, and the received satellite Based on a signal, an acquisition unit that acquires position information of the reception unit, an operation unit that calculates an attitude of a moving object based on inertia data output from the inertial measurement device, and the calculated attitude And calculating a position of the moving body by correcting the position information.

  According to this application example, it is possible to receive the effect of the physical quantity sensor as described above, and to obtain a mobile object positioning device with high reliability.

  Application Example 10 The portable electronic device according to this application example includes the physical quantity sensor described in the application example, a case containing the physical quantity sensor, and the case accommodated in the case, and the output data from the physical quantity sensor And a display unit accommodated in the case, and a translucent cover closing the opening of the case.

  According to this application example, the effect of the physical quantity sensor as described above can be obtained, and a highly reliable portable electronic device can be obtained.

  Application Example 11 An electronic device according to this application example includes the physical quantity sensor according to the application example, and a control unit that performs control based on a detection signal output from the physical quantity sensor. I assume.

  According to this application example, the effect of the physical quantity sensor as described above can be obtained, and a highly reliable electronic device can be obtained.

  Application Example 12 The mobile unit according to this application example includes the physical quantity sensor according to the application example described above, and an attitude control unit that controls the attitude based on the detection signal output from the physical quantity sensor. It is characterized by

  According to this application example, the effect of the physical quantity sensor as described above can be obtained, and a highly reliable mobile object can be obtained.

FIG. 1 is a plan view showing a physical quantity sensor according to a first embodiment of the present invention. AA sectional view in FIG. FIG. 2 is a plan view showing an element part of the physical quantity sensor of FIG. 1. FIG. 4 is an enlarged plan view of a portion B in FIG. 3; The enlarged plan view of the reverse phase spring which the element part of FIG. 3 has. The enlarged plan view of the reverse phase spring which the element part of FIG. 3 has. FIG. 5 is a schematic view for explaining a vibration mode of the element unit shown in FIG. 3; The top view which shows a part of detection part which the physical quantity sensor which concerns on 2nd Embodiment of this invention has. The top view which shows the element part which the physical quantity sensor which concerns on 3rd Embodiment of this invention has. FIG. 10 is an enlarged plan view of a portion C in FIG. 9; FIG. 2 is an exploded perspective view showing a schematic configuration of an inertial measurement device. The perspective view which shows the example of arrangement | positioning of the inertial sensor element of an inertial measuring device. The block diagram showing the whole system of a mobile positioning device. The figure which shows typically the effect | action of a mobile positioning device. FIG. 2 is a plan view schematically showing the configuration of a portable electronic device. FIG. 2 is a functional block diagram showing a schematic configuration of a portable electronic device. FIG. 1 is a perspective view schematically illustrating a configuration of a mobile personal computer that is an example of an electronic device. FIG. 2 is a perspective view schematically showing a configuration of a smartphone (mobile phone) as an example of the electronic device. FIG. 1 is a perspective view showing a configuration of a digital still camera which is an example of an electronic device. BRIEF DESCRIPTION OF THE DRAWINGS The perspective view which shows the structure of the motor vehicle which is an example of a mobile body.

  Hereinafter, a physical quantity sensor, an inertial measurement device, a mobile positioning device, a portable electronic device, an electronic device, and a mobile according to the present invention will be described in detail based on embodiments shown in the attached drawings. Note that the embodiments described below do not unduly limit the content of the present invention described in the claims. In addition, not all of the configurations described in the present embodiment are necessarily essential configuration requirements of the present invention.

<Physical quantity sensor>
First Embodiment
First, a physical quantity sensor 1 according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 7. FIG. 1 is a plan view showing a physical quantity sensor according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along line AA in FIG. FIG. 3 is a plan view showing an element portion of the physical quantity sensor of FIG. FIG. 4 is an enlarged plan view of a portion B in FIG. 5 and 6 are enlarged plan views of reverse-phase springs of the element portion of FIG. 3 respectively. FIG. 7 is a schematic view for explaining a vibration mode of the element portion shown in FIG. Note that in FIGS. 1 to 7 and in FIGS. 8 to 10 shown below, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to one another, and each of the element portions 4 bonded to the substrate 2 The plane on which the portion is disposed is taken as an X axis and a Y axis, and the direction where the substrate 2 and the lid 3 are joined is taken as a Z axis. In addition, the direction parallel to the X axis is "X axis direction" or "second direction", the direction parallel to the Y axis is "Y axis direction" or "first direction", the direction parallel to the Z axis is "Z axis It is also called "direction". Moreover, the arrow tip side of each axis is also referred to as "plus side", and the opposite side is also referred to as "minus side". Further, the Z axis direction plus side is also referred to as “upper or upper”, and the Z axis direction minus side is also referred to as “lower or lower”.

  The physical quantity sensor 1 shown in FIG. 1 is an angular velocity sensor capable of detecting an angular velocity ωz around the Z axis. The physical quantity sensor 1 includes a substrate 2, a lid 3, and an element unit 4.

  As shown in FIG. 1, the substrate 2 has a plate shape having a rectangular plan view shape in plan view from the Z-axis direction. Further, the substrate 2 has a recess 21 opened to the upper surface which is the upper surface. The concave portion 21 functions as a relief portion for preventing (suppressing) the contact between the element portion 4 and the substrate 2. The substrate 2 also has a plurality of mounts 22 (221, 222, 223, 224, 225) projecting from the bottom surface of the recess 21. The element portion 4 is bonded to the upper surface of the mount 22. Thereby, the element portion 4 can be fixed to the substrate 2 in a state where the contact with the substrate 2 is prevented. In addition, the substrate 2 has groove portions 23, 24, 25, 26, 27, 28 opened on the upper surface.

  As the substrate 2, for example, a glass material (for example, Tempacx (registered trademark) glass, Pyrex (for example), which contains mobile ions (alkali metal ions, hereinafter represented by Na +) such as sodium ion (Na +), lithium ion (Li +)) A glass substrate made of borosilicate glass (registered trademark) glass such as glass can be used. Thus, for example, as described later, the substrate 2 and the element portion 4 can be anodically bonded, and these can be strongly bonded. In addition, since the light transmitting substrate 2 is obtained, it is possible to visually recognize the state of the element unit 4 from the outside of the physical quantity sensor 1 through the substrate 2. However, the constituent material of the substrate 2 is not particularly limited, and a silicon substrate, a ceramic substrate or the like may be used.

  As shown in FIG. 1, in the grooves 23, 24, 25, 26, 27 and 28, wires 73, 74, 75, 76, 77 and 78 are arranged, respectively. The wirings 73, 74, 75, 76, 77, and 78 are electrically connected to the element unit 4, respectively. In addition, one end portions of the wires 73, 74, 75, 76, 77, 78 are exposed to the outside of the lid 3 and function as electrode pads P for electrically connecting to an external device.

  As shown in FIG. 1, the lid 3 has a plate shape having a rectangular plan view shape in plan view from the Z-axis direction. Moreover, as shown in FIG. 2, the cover 3 has the recessed part 31 opened to a lower surface. The lid 3 is joined to the top surface of the substrate 2 so as to accommodate the element portion 4 in the recess 31. Then, a storage space S for storing the element portion 4 is formed inside the lid 3 and the substrate 2.

  Further, as shown in FIG. 2, the lid 3 has a communication hole 32 communicating the inside and the outside of the storage space S. Therefore, the storage space S can be replaced with a desired atmosphere via the communication hole 32. Further, a sealing member 33 is disposed in the communication hole 32, and the communication hole 32 is hermetically sealed by the sealing member 33. The storage space S is preferably in a reduced pressure state, particularly in a vacuum state. Thereby, the viscous resistance is reduced, and the element unit 4 can be vibrated efficiently.

  For example, a silicon substrate can be used as such a lid 3. However, the lid 3 is not particularly limited, and for example, a glass substrate or a ceramic substrate may be used. The method of bonding the substrate 2 and the lid 3 is not particularly limited, and may be appropriately selected depending on the materials of the substrate 2 and the lid 3. However, for example, bonding surfaces activated by anodic bonding or plasma irradiation Examples include activation bonding for bonding together, bonding using a bonding material such as glass frit, and diffusion bonding for bonding metal films formed on the upper surface of the substrate 2 and the lower surface of the lid 3. In the present embodiment, the substrate 2 and the lid 3 are bonded via the glass frit 39 (low melting point glass).

  The element unit 4 is disposed in the storage space S, and is joined to the upper surface of the mount 22. The element portion 4 can be formed, for example, by patterning a conductive silicon substrate doped with an impurity such as phosphorus (P) or boron (B) by a dry etching method (silicon deep etching). The element unit 4 will be described in detail below. Hereinafter, a straight line that intersects with the center O of the element unit 4 and extends in the Y-axis direction in plan view from the Z-axis direction is also referred to as a “virtual straight line α”.

  As shown in FIG. 3, the shape of the element unit 4 is symmetrical with respect to the imaginary straight line α. In addition, the element unit 4 includes driving units 41A and 41B disposed on both sides of the imaginary straight line α. The drive units 41A and 41B can drive the detection units 44A and 44B, and the drive unit 41A, as a movable electrode unit, has a comb-like movable drive electrode 411A, a comb-like shape, and an air gap with the movable drive electrode 411A. And fixed drive electrodes 412A arranged alternately. Similarly, as the movable electrode portion, the drive portion 41B includes a comb-shaped movable drive electrode 411B and a fixed drive electrode 412B which has a comb shape and is alternately disposed with a gap and the movable drive electrode 411B. Have.

  The fixed drive electrode 412A is positioned outside (the side farther from the virtual straight line α) than the movable drive electrode 411A, and the fixed drive electrode 412B is positioned outside (the side farther from the virtual straight line α) than the movable drive electrode 411B. doing. The fixed drive electrodes 412A and 412B are respectively bonded to the upper surface of the mount 221 and fixed to the substrate 2. The movable drive electrodes 411A and 411B are electrically connected to the wire 73, respectively, and the fixed drive electrodes 412A and 412B are electrically connected to the wire 74, respectively.

  Further, the element unit 4 includes four fixing portions (first fixing portion 42A, second fixing portion 421A) disposed around the driving portion 41A, and four fixing portions (second fixing portions) disposed around the driving portion 41B. A first fixing portion 42B and a second fixing portion 421B). The first fixing portions 42A and 42B and the second fixing portions 421A and 421B are bonded to the upper surface of the mount 222 and fixed to the substrate 2.

  In addition, the element unit 4 includes drive springs 43A as four second spring portions that connect the first fixed portion 42A and the second fixed portion 421A to the movable drive electrode 411A, a first fixed portion 42B, and a second fixed portion. It has drive spring 43B as four 2nd spring parts which connect 421B and movable drive electrode 411B. Each drive spring 43A is elastically deformed in the X-axis direction to allow displacement of the movable drive electrode 411A in the X-axis direction, and each drive spring 43B is elastically deformed in the X-axis direction to move the X-axis of the movable drive electrode 411B. Displacement in the direction is allowed.

  When a drive voltage is applied between the movable drive electrodes 411A and 411B and the fixed drive electrodes 412A and 412B via the wires 73 and 74, the drive between the movable drive electrode 411A and the fixed drive electrode 412A and the fixed drive of the movable drive electrode 411B are performed. An electrostatic attractive force is generated between each of the electrodes 412B. By this electrostatic attractive force, the movable drive electrode 411A vibrates in the X axis direction while elastically deforming the drive spring 43A in the X axis direction, and the movable drive electrode 411B elastically deforms the drive spring 43B in the X axis direction and the X axis Swing in the direction. Since the drive portions 41A and 41B are arranged symmetrically with respect to the imaginary straight line α, the movable drive electrodes 411A and 411B vibrate in the opposite phase in the X-axis direction so as to repeatedly approach and separate from each other. Therefore, the vibration of the movable drive electrodes 411A and 411B is canceled, and the vibration leakage can be reduced. Hereinafter, this vibration mode is also referred to as "drive vibration mode".

  In the physical quantity sensor 1 of the present embodiment, although the electrostatic drive system excites the drive vibration mode by electrostatic attraction, the drive vibration mode is not particularly limited, for example, piezoelectric drive. It is also possible to apply a method, an electromagnetic drive method using Lorentz force of a magnetic field, or the like.

  The element unit 4 further includes detection units 44A and 44B disposed between the drive units 41A and 41B. The detection unit 44A has a comb-teeth-shaped movable detection electrode 441A as a movable electrode unit, and a comb-teeth-shaped fixed detection electrode 442A, 443A which has a gap and is alternately arranged with a movable detection electrode 441A. doing. The fixed detection electrodes 442A and 443A are arranged side by side in the Y-axis direction, the fixed detection electrode 442A is positioned on the positive side in the Y-axis direction with respect to the center of the movable detection electrode 441A, and the fixed detection electrode 443A on the negative side in the Y-axis direction. Is located. The fixed detection electrodes 442A and 443A are arranged in a pair so as to sandwich the movable detection electrodes 441A from both sides in the X-axis direction.

  Similarly, as the movable electrode portion, the detection unit 44B has a comb-like movable detection electrode 441B, a comb-teeth-like fixed detection electrodes 442B and 443B which are alternately arranged with a gap and a movable detection electrode 441B. ,have. The fixed detection electrodes 442B and 443B are arranged side by side in the Y-axis direction, the fixed detection electrode 442B is positioned on the positive side in the Y-axis direction with respect to the center of the movable detection electrode 441B, and the fixed detection electrode 443B on the negative side in the Y-axis direction. Is located. The fixed detection electrodes 442B and 443B are arranged in a pair so as to sandwich the movable detection electrode 441B from both sides in the X-axis direction.

  The movable detection electrodes 441A and 441B are electrically connected to the wiring 73, the fixed detection electrodes 442A and 443B are electrically connected to the wiring 75, and the fixed detection electrodes 443A and 442B are each connected to the wiring 76. And are electrically connected. When the physical quantity sensor 1 is driven, a capacitance Ca is formed between the movable detection electrode 441A and the fixed detection electrode 442A and between the movable detection electrode 441B and the fixed detection electrode 443B, and the movable detection electrode 441A and the fixed detection electrode 443A , And between the movable detection electrode 441B and the fixed detection electrode 442B.

  The element unit 4 also has two first fixing portions 451 and 452 disposed between the detection units 44A and 44B. The first fixing portions 451 and 452 are respectively joined to the upper surface of the mount 224 and fixed to the substrate 2. The first fixing portions 451 and 452 are arranged in the Y-axis direction and spaced apart. In the present embodiment, the movable drive electrodes 411A and 411B and the movable detection electrodes 441A and 441B are electrically connected to the wiring 73 via the first fixed portions 451 and 452, respectively.

  Further, the element unit 4 includes four detection spring 46A as first spring parts connecting the movable detection electrode 441A and the first fixed parts 42A, 451 and 452, the movable detection electrode 441B and the first fixed parts 42B and 451. , 452, and four detection springs 46B as first spring portions. Each detection spring 46A elastically deforms in the X-axis direction to allow displacement of the movable detection electrode 441A in the X-axis direction, and elastic deformation in the Y-axis direction causes displacement of the movable detection electrode 441A in the Y-axis direction Permissible. Similarly, the elastic deformation of each detection spring 46B in the X-axis direction permits the displacement of the movable detection electrode 441B in the X-axis direction, and the elastic deformation in the Y-axis direction allows the movable detection electrode 441B in the Y-axis direction Displacement is acceptable.

  Therefore, the angular velocity ωz around the Z-axis can be detected by the angular velocity ωz around the Z-axis, so that the movable detection electrodes 441A and 441B can be displaced in the first direction (Y-axis direction).

  Further, as shown in FIG. 4, the detection unit 44B includes a movable detection electrode 441B including a plurality of movable detection electrode fingers 51 arranged in a comb shape and a plurality of fixed detection electrode fingers arranged in a comb shape. 53 and the movable detection electrode finger 51 of the movable detection electrode 441 B, and the fixed detection electrode 443 B having a gap and alternately arranged.

  The fixed detection electrode 443B includes a plurality of fixed detection electrode fingers 53 extending along a second direction (X-axis direction) which is a direction intersecting the first direction (Y-axis direction). There is. Further, the movable detection electrode 441B is provided extending from the first trunk 50 provided extending along the Y-axis direction and the first trunk 50 along the X-axis direction, and the fixed detection electrode finger is provided. 53 and a plurality of movable detection electrode fingers 51 arranged at intervals in the Y-axis direction, and a first connecting portion 52 connected to the first trunk 50.

  Furthermore, the first connecting portion 52 has a first support portion 521 connected to the first trunk 50, and a second support portion 522 connected to the detection spring 46B. A gap G1 in the Y-axis direction with the electrode 443B is smaller than a gap G2 in the Y-axis direction between the second support 522 and the fixed detection electrode 443B. That is, the first support portion 521 is disposed closer to the side of the fixed detection electrode 443 B than the second support portion 522. Note that, by providing the second support portion 522, the detection spring 46B can be made longer, and the movable detection electrode 441B can be more easily displaced.

  Further, the length L1 of the first support portion 521 in the X-axis direction is substantially equal to the length L2 of the movable detection electrode finger 51 in the X-axis direction. Therefore, the facing area of the side surface of the first support portion 521 and the side surface of the fixed detection electrode finger 53 can be equal to the facing area of the side surface of the movable detection electrode finger 51 and the side surface of the fixed detection electrode finger 53.

  An interval G1 in the Y-axis direction between the first support portion 521 and the fixed detection electrode 443B is substantially equal to an interval G3 in the Y-axis direction between the fixed detection electrode finger 53 and the movable detection electrode finger 51. That is, since the facing areas are substantially the same, the capacitance between the first support portion 521 and the fixed detection electrode 443B is made equal to the capacitance between the fixed detection electrode finger 53 and the movable detection electrode finger 51. be able to.

  Therefore, the length L1 of the first support portion 521 and the length L2 of the movable detection electrode finger 51 are equal, the distance G1 between the first support portion 521 and the fixed detection electrode 443B, the fixed detection electrode finger 53, and the movable detection electrode finger Since the distance G3 in the Y-axis direction from 51 is substantially equal, the first support portion 521 and the fixed detection electrode 443B correspond to the pair of fixed detection electrode fingers 53 and the movable detection electrode finger 51. Therefore, the first support portion 521 can be regarded as the movable detection electrode finger 51, and the movable detection electrode fingers 51 can be increased without changing the dimension of the detection portion 44B in the Y-axis direction. That is, the capacitance between the movable detection electrode 441B and the fixed detection electrode 443B can be increased, and the detection sensitivity can be improved. In addition, it is possible to achieve miniaturization with equivalent detection sensitivity.

  In the present embodiment, as shown in FIG. 3, at both ends in the Y-axis direction of the detection unit 44B, the end in the −Y-axis direction and the end in the −X-axis direction have been described as an example. The end of the detection unit 44B in the −Y direction, the end in the + X direction, the end of the detection unit 44B in the + Y direction, both ends in the X direction, and the ends of the detection unit 44A in the Y direction The same configuration is also applied to both ends in the X-axis direction.

  Returning to FIG. 3, the element unit 4 is located between the drive unit 41A and the detection unit 44A, and detects the negative phase spring 47A connecting the movable drive electrode 411A and the movable detection electrode 441A, and the drive unit 41B. It has a reverse phase spring 47B located between it and the portion 44B and connecting the movable drive electrode 411B and the movable detection electrode 441B. The movable detection electrode 441A can be displaced in the X axis direction with respect to the movable drive electrode 411A by elastically deforming the reverse phase spring 47A in the X axis direction. Similarly, the movable detection electrode 441B can be displaced in the X axis direction with respect to the movable drive electrode 411B by elastically deforming the reverse phase spring 47B in the X axis direction.

  As shown in FIG. 5, the reverse phase spring 47A includes a spring main body 471A, a beam 477A connecting the spring main body 471A and the movable drive electrode 411A, and a beam 478A connecting the spring main body 471A and the movable detection electrode 441A; have. Further, the spring main body 471A has a shape extending in the Y-axis direction, and an arm 472A elastically deformable in the X-axis direction and a shape extending in the Y-axis direction, and an elastically deformable arm in the X-axis direction And 473A. The arms 472A and 473A are arranged with a gap in the X-axis direction, the beam 477A is connected to the center of the arm 472A, and the beam 478A is connected to the center of the arm 473A. Further, the spring main body 471A has a connecting portion 474A connecting one end of the arms 472A and 473A, and a connecting portion 475A connecting the other ends of the arms 472A and 473A. Therefore, the spring main body 471A has a frame shape in which the central portion is opened.

  The reverse phase spring 47B has the same configuration as the reverse phase spring 47A, and as shown in FIG. 6, the spring main body 471B, the beam 477B connecting the spring main body 471B and the movable drive electrode 411B, the spring main body 471B and the movable And a beam 478B coupled to the detection electrode 441B.

  Here, as shown in FIG. 7, in the drive vibration mode, the vibration of the movable drive electrode 411A is transmitted to the movable detection electrode 441A through the reverse phase spring 47A, so that the movable detection electrode 441A is caused by the vibration of the movable drive electrode 411A. Interlocks and vibrates in the X-axis direction. Similarly, since the vibration of the movable drive electrode 411B is transmitted to the movable detection electrode 441B via the reverse phase spring 47B, the movable detection electrode 441B vibrates in the X axis direction in conjunction with the vibration of the movable drive electrode 411B. Further, as described above, since the movable drive electrodes 411A and 411B vibrate in the opposite phase in the X-axis direction, the movable detection electrodes 441A and 441B also vibrate in the opposite phase in the X-axis direction so as to repeatedly approach and separate from each other. . Therefore, the vibration of the movable detection electrodes 441A and 441B is canceled, and the vibration leakage to the substrate 2 can be reduced.

  Furthermore, in the drive vibration mode, the movable detection electrode 441A vibrates in the reverse phase in the X-axis direction so as to repeatedly approach and separate from the movable drive electrode 411A using elastic deformation of the reverse phase spring 47A. Similarly, using elastic deformation of the reverse phase spring 47B, the movable detection electrode 441B vibrates in the negative phase in the X-axis direction so as to repeatedly approach and separate from the movable drive electrode 411B. Thus, at least a part of the vibration of the movable detection electrode 441A and the movable drive electrode 411A is canceled, and at least a part of the vibration of the movable detection electrode 441B and the movable drive electrode 411B is canceled. Therefore, it is possible to more effectively reduce the vibration leakage to the substrate 2 as compared with the case where the movable detection electrode 441A and the movable drive electrode 411A and the movable detection electrode 441B and the movable drive electrode 411B respectively vibrate in phase. In order to vibrate the movable detection electrode 441A and the movable drive electrode 411A in reverse phase in the drive vibration mode, for example, the spring constant of the reverse phase spring 47A between them may be adjusted. In order to cause the movable drive electrode 411B and the movable drive electrode 411B to vibrate in reverse phase, for example, the spring constant of the reverse phase spring 47B between them may be adjusted.

  The resonance frequency f1 in the reverse phase mode in which the movable detection electrode 441A and the movable drive electrode 411A and the movable detection electrode 441B and the movable drive electrode 411B vibrate in opposite phases, the movable detection electrode 441A and the movable drive electrode 411A, and the movable detection electrode As the difference between the 441B and the movable drive electrode 411B oscillates in phase with each other and the resonance frequency f2 of the in-phase mode increases, oscillation in the anti-phase mode is facilitated and the in-phase mode is less likely to be coupled (that is, the anti-phase mode is Become dominant). Specifically, for example, when the resonance frequency f1 of the reverse phase mode is about 30 kHz, it is preferable that the resonance frequency f2 of the in-phase mode is separated from the resonance frequency by 3 kHz or more (that is, 10% or more). As a result, the common mode can not be sufficiently coupled, and can be driven more stably in the reverse phase mode.

  In addition, "vibrate the movable detection electrode 441A (441B) and the movable drive electrode 411A (411B) in the reverse phase" means that the reverse phase mode is dominant as well as when vibrations other than the reverse phase mode are not coupled. If so, other vibration modes (for example, the common mode described above) may be coupled. Further, for example, when there is no phase difference between the vibration of the movable detection electrode 441A and the movable drive electrode 411A, it goes without saying that there is also a case where there is a phase difference. The case where there is no phase difference means, for example, that the time when the movable drive electrode 411A is displaced to the positive side in the X-axis direction coincides with the time when the movable detection electrode 441A is displaced to the negative side in the X-axis direction. . The case where there is a phase difference means, for example, that the movable detection electrode 441A is displaced to the negative side in the X axis direction later than the time when the movable drive electrode 411A is displaced to the positive side in the X axis direction.

  When angular velocity ωz is applied to the physical quantity sensor 1 while driving in such a driving vibration mode, the movable detection electrodes 441A and 441B are detected spring as shown by an arrow A in FIG. It vibrates in the opposite phase in the Y-axis direction while elastically deforming 46A and 46B in the Y-axis direction (this vibration is also referred to as “detection vibration mode”). In the detection vibration mode, since the movable detection electrodes 441A and 441B vibrate in the Y-axis direction, the gap between the movable detection electrode 441A and the fixed detection electrodes 442A and 443A and the gap between the movable detection electrode 441B and the fixed detection electrodes 442B and 443B are Each changes, and the capacitances Ca and Cb change accordingly. Therefore, the angular velocity ωz can be obtained based on the changes in the capacitances Ca and Cb.

  In the detection vibration mode, the electrostatic capacitance Cb decreases as the electrostatic capacitance Ca increases, and conversely, the electrostatic capacitance Cb increases as the electrostatic capacitance Ca decreases. Therefore, the detection signal (signal according to the magnitude of the capacitance Ca) output from the QV amplifier connected to the wiring 75 and the detection signal (electrostatic capacitance Cb) output from the QV amplifier connected to the wiring 76 By performing a differential operation (subtraction processing: Ca-Cb) with a signal corresponding to the magnitude of (N), noise can be canceled and the angular velocity ωz can be detected more accurately.

  Here, in the drive vibration mode, the amplitude of the movable detection electrode 441A becomes larger than the amplitude of the movable drive electrode 411A by the expansion and contraction of the negative phase spring 47A, and the amplitude of the movable detection electrode 441B is the movable drive electrode by the expansion and contraction of the negative phase spring 47B. It becomes larger than the amplitude of 411B. Therefore, the amplitudes of the movable detection electrodes 441A and 441B in the drive vibration mode can be increased, and a larger Coriolis force acts accordingly. Therefore, the detection sensitivity of the angular velocity ωz is improved. In addition, since the movable detection electrodes 441A and 441B can be largely vibrated by a small driving force, power consumption can also be reduced.

  Further, as shown in FIG. 3, the element unit 4 has a frame 48 located at the central portion (between the detection unit 44A and the detection unit 44B). The frame 48 has a shape along the outline of the alphabet “H”, a so-called H shape, and a defect 481 (concave portion) located on the plus side in the Y axis direction and a defect 482 located on the minus side in the Y axis direction And a concave portion). The first fixing portion 451 is disposed over the inside and outside of the defect portion 481, and the first fixing portion 452 is disposed over the inside and outside of the defect portion 482. As a result, the first fixing portions 451 and 452 can be formed long in the Y-axis direction, and the bonding area with the substrate 2 is increased accordingly, and the bonding strength between the substrate 2 and the element portion 4 is increased.

  Further, the element portion 4 is located between the first fixed portion 451 and the frame 48, and is located between the frame spring 488 connecting these, and between the first fixed portion 452 and the frame 48, and connects them. And a frame spring 489.

  Further, the element portion 4 is located between the frame 48 and the movable detection electrode 441A, and is a connection spring for connecting these, and between the frame 48 and the movable detection electrode 441B, and a connection spring for connecting these. And 40B. The connection spring 40A supports the movable detection electrode 441A together with the detection spring 46A, and the connection spring 40B supports the movable detection electrode 441B together with the detection spring 46B. Therefore, the movable detection electrodes 441A and 441B can be supported in a stable posture, and unnecessary vibration (spurious) of the movable detection electrodes 441A and 441B can be reduced.

  In the drive vibration mode, the connection springs 40A and 40B are elastically deformed to allow the vibration of the movable bodies 4A and 4B including the movable detection electrodes 441A and 441B and the movable drive electrodes 411A and 411B, and the like. In this case, the connection springs 40A and 40B and the frame springs 488 and 489 are elastically deformed, and the frame 48 pivots around the center O, thereby allowing the movable detection electrodes 441A and 441B to vibrate in the Y-axis direction.

  The element unit 4 further includes monitor units 49A and 49B for detecting the vibration state of the movable drive electrodes 411A and 411B in the drive vibration mode. The monitor unit 49A includes a movable monitor electrode 491A disposed on the movable detection electrode 441A and including a plurality of electrode fingers disposed in a comb shape, and a plurality of electrode fingers disposed in the comb shape. And fixed monitor electrodes 492A and 493A, which are alternately arranged with a gap between the electrode fingers. The fixed monitor electrode 492A is positioned on the positive side in the X-axis direction with respect to the movable monitor electrode 491A, and the fixed monitor electrode 493A is positioned on the negative side in the X-axis direction with respect to the movable monitor electrode 491A.

  Similarly, the monitor unit 49B includes a movable monitor electrode 491B disposed on the movable detection electrode 441B and provided with a plurality of electrode fingers disposed in a comb shape, and a plurality of electrode fingers disposed in a comb shape. And fixed monitor electrodes 492B and 493B which are alternately arranged with an electrode finger of the monitor electrode 491B and a gap. The fixed monitor electrode 492B is positioned on the minus side in the X-axis direction with respect to the movable monitor electrode 491B, and the fixed monitor electrode 493B is positioned on the plus side in the X-axis direction with respect to the movable monitor electrode 491B.

  The fixed monitor electrodes 492A, 493A, 492B, and 493B are respectively bonded to the upper surface of the mount 225 and fixed to the substrate 2. The movable monitor electrodes 491A and 491B are electrically connected to the wire 73, the fixed monitor electrodes 492A and 492B are electrically connected to the wire 77, and the fixed monitor electrodes 493A and 493B are , And the wiring 78 are electrically connected. The wires 77 and 78 are each connected to a QV amplifier (charge voltage conversion circuit). When the physical quantity sensor 1 is driven, a capacitance Cc is formed between the movable monitor electrode 491A and the fixed monitor electrode 492A and between the movable monitor electrode 491B and the fixed monitor electrode 492B, and the movable monitor electrode 491A and the fixed monitor electrode 493A And between the movable monitor electrode 491B and the fixed monitor electrode 493B.

  As described above, in the drive vibration mode, since the movable detection electrodes 441A and 441B vibrate in the X-axis direction, the gap between the movable monitor electrode 491A and the fixed monitor electrodes 492A and 493A and the movable monitor electrode 491B and the fixed monitor electrode 492B, The gap with 493 B changes, and the capacitances Cc and Cd change accordingly. Therefore, it is possible to detect the vibration state (in particular, the amplitude in the X-axis direction) of the movable bodies 4A and 4B based on the change in the electrostatic capacitances Cc and Cd.

  In the drive vibration mode, as the capacitance Cc increases, the capacitance Cd decreases, and conversely, when the capacitance Cc decreases, the capacitance Cd increases. Therefore, the detection signal (signal according to the magnitude of the capacitance Cc) obtained from the QV amplifier connected to the wiring 77 and the detection signal (size of the capacitance Cd obtained from the QV amplifier connected to the wiring 78 By performing a differential operation (subtraction processing: Cc-Cd) with a signal corresponding to the length, noise can be canceled, and the vibration state of the movable bodies 4A and 4B can be detected more accurately.

  The vibration state (amplitude) of the movable bodies 4A and 4B detected by the outputs from the monitor units 49A and 49B is fed back to the drive circuit that applies the voltage V2 to the movable bodies 4A and 4B. The drive circuit changes the frequency and the duty ratio of the voltage V2 so that the amplitudes of the movable bodies 4A and 4B become the target values. As a result, the movable bodies 4A and 4B can be vibrated with a predetermined amplitude more reliably, and the detection accuracy of the angular velocity ωz is improved.

As described above, the physical quantity sensor 1 according to the first embodiment has the following features.
Y axis of fixed detection electrodes 442A, 442B, 443A, 443B of the first support portion 521 constituting the first connecting portion 52 connecting the first trunk 50 of the movable detection electrodes 441A, 441B and the detection springs 46A, 46B The distance G1 in the direction is smaller than the distance G2 in the Y-axis direction between the second support 522 and the fixed detection electrodes 442A, 442B, 443A, 443B. Further, the length L1 in the X axis direction of the first support portion 521 and the length L2 in the X axis direction of the movable detection electrode finger 51 are equal, and the first support portion 521 and the fixed detection electrodes 442A, 442B, 443A, 443B and The interval G1 in the Y-axis direction of the Y-axis direction and the interval G3 in the Y-axis direction between the fixed detection electrode finger 53 and the movable detection electrode finger 51 are substantially equal. Therefore, the first support portion 521 and the fixed detection electrodes 442A, 442B, 443A, 443B correspond to the pair of fixed detection electrode fingers 53 and the movable detection electrode fingers 51. Therefore, the first support portion 521 can be regarded as the movable detection electrode finger 51, and the movable detection electrode fingers 51 can be increased without changing the dimension of the detection portions 44A and 44B in the Y-axis direction. That is, the capacitance between the movable detection electrodes 441A and 441B and the fixed detection electrodes 442A, 442B, 443A, and 443B can be increased, and the detection sensitivity can be improved. Therefore, it is possible to obtain the physical quantity sensor 1 that reduces the decrease in the detection sensitivity even if the size is reduced.

Second Embodiment
Next, a physical quantity sensor 1a according to a second embodiment of the present invention will be described with reference to FIG. FIG. 8 is a plan view showing a part of a detection unit of the physical quantity sensor according to the second embodiment of the present invention. FIG. 8 corresponds to the part B of FIG.

  The physical quantity sensor 1a according to the present embodiment is the same as the physical quantity sensor 1 according to the first embodiment described above, except that the configuration of the first connecting part 52a of the detection units 44A and 44B is mainly different.

  In the following description, the physical quantity sensor 1a of the second embodiment will be described focusing on differences from the above-described embodiment, and the description of the same matters will be omitted. Further, in FIG. 8, the same components as those in the embodiment described above are denoted by the same reference numerals.

  In the detection units 44A and 44B of the physical quantity sensor 1a according to the second embodiment, the detection unit 44B will be described as an example. As shown in FIG. 8, the detection unit 44 </ b> B includes a first connecting portion 52 a that connects the first trunk 50 and the detection spring 46 </ b> B. The length L3 of the first connection portion 52a in the X-axis direction is substantially equal to the length L4 of the movable detection electrode finger 51 in the X-axis direction, and the distance G4 between the first connection portion 52a and the fixed detection electrode 443B in the Y-axis direction Is substantially equal to the distance G5 between the fixed detection electrode finger 53 and the movable detection electrode finger 51 in the Y-axis direction. Therefore, the capacitance between the first connection portion 52 a and the fixed detection electrode 443 B can be made substantially equal to the capacitance between the fixed detection electrode finger 53 and the movable detection electrode finger 51. Therefore, since the first connection portion 52a can be regarded as the movable detection electrode finger 51 facing the fixed detection electrode finger 53, the capacitance between the movable detection electrode 441B and the fixed detection electrode 443B can be increased. , Detection sensitivity can be increased. Therefore, the physical quantity sensor 1a in which the decrease in detection sensitivity is reduced can be obtained even when the size is reduced.

  In the present embodiment, as in the first embodiment, referring to FIG. 3, at both ends in the Y-axis direction of the detection unit 44B, an end at the −Y-axis direction and an end at the −X-axis direction In the end of the detection unit 44B in the -Y axis direction, the end in the + X axis direction, the end of the detection unit 44B in the + Y axis direction, both ends in the X axis direction, and the detection unit 44A. The same configuration is also applied to both ends in the Y-axis direction of both in the X-axis direction.

  The physical quantity sensor 1a according to the second embodiment has been described above. Also by such a second embodiment, the same effect as that of the first embodiment described above can be exhibited.

Third Embodiment
Next, a physical quantity sensor 1b according to a third embodiment of the present invention will be described with reference to FIG. 9 and FIG. FIG. 9 is a plan view showing an element portion of the physical quantity sensor according to the third embodiment of the present invention. FIG. 10 is an enlarged plan view of a portion C in FIG.

  The physical quantity sensor 1b according to the present embodiment is the same as the physical quantity sensor 1 according to the first embodiment described above, except that the configurations of the drive units 41A and 41B are mainly different.

  In the following description, the physical quantity sensor 1b of the third embodiment will be described focusing on differences from the above-described embodiment, and the description of the same matters will be omitted. Moreover, in FIG. 9 and FIG. 10, the same code | symbol is attached | subjected about the structure similar to embodiment mentioned above.

  In the drive units 41A and 41B of the physical quantity sensor 1b according to the third embodiment, the drive unit 41B will be described as an example. As shown in FIGS. 9 and 10, the drive portion 41B includes a movable drive electrode 411B including a plurality of movable drive electrode fingers 61 arranged in a comb shape and a plurality of fixed drive electrodes arranged in a comb shape. A movable drive electrode finger 61 of the movable drive electrode 411B is provided with a finger 63, and a fixed drive electrode 412B having a gap and alternately arranged is provided.

  The fixed drive electrode 412B includes a plurality of fixed drive electrode fingers 63 extending along a second direction (X-axis direction) which is a direction intersecting the first direction (Y-axis direction). There is. Further, the movable detection electrode 441 B is provided extending from the second stem 60 extending along the Y-axis direction and the second stem 60 along the X-axis direction. 63 and a plurality of movable drive electrode fingers 61 arranged at intervals in the Y-axis direction, and a second connecting portion 62 connected to the second trunk 60.

  Furthermore, the second connection portion 62 includes a third support portion 621 connected to the second trunk 60, and a fourth support portion 622 connected to the drive spring 43B. A gap G6 in the Y-axis direction with the electrode 412B is smaller than a gap G7 in the Y-axis direction between the fourth support portion 622 and the fixed drive electrode 412B. That is, the third support portion 621 is disposed closer to the fixed drive electrode 412B than the fourth support portion 622 is.

  The length L5 in the X-axis direction of the third support portion 621 is substantially equal to the length L6 in the X-axis direction of the movable drive electrode finger 61. Therefore, the facing area of the side face of the third support portion 621 and the side face of the fixed drive electrode finger 63 can be made substantially equal to the facing area of the side face of the movable drive electrode finger 61 and the side face of the fixed drive electrode finger 63.

  A gap G6 in the Y-axis direction between the third support portion 621 and the fixed drive electrode 412B is substantially equal to a gap G8 in the Y-axis direction between the fixed drive electrode finger 63 and the movable drive electrode finger 61. That is, since the facing area is also substantially equal, the capacitance between the third support portion 621 and the fixed drive electrode 412 B and the capacitance between the fixed drive electrode finger 63 and the movable drive electrode finger 61 may be substantially equal. it can.

  Therefore, the length L5 in the X axis direction of the third support portion 621 and the length L6 in the X axis direction of the movable drive electrode finger 61 are substantially equal, and the third support portion 621 and the fixed drive electrode 412B in the Y axis direction Since the gap G6 and the gap G8 in the Y-axis direction between the fixed drive electrode finger 63 and the movable drive electrode finger 61 are substantially equal, the third support portion 621 and the fixed drive electrode 412B are a pair of fixed drive electrode fingers 63 and movable drive It corresponds to the electrode finger 61. Therefore, the third support portion 621 can be regarded as the movable drive electrode finger 61, and the movable drive electrode finger 61 can be increased without changing the dimension of the drive portion 41B in the Y-axis direction. That is, the capacitance between the movable drive electrode 411B and the fixed drive electrode 412B can be increased.

  By increasing the capacitance of the drive unit 41B, the movable drive electrode 411B and the movable body 4B of the detection unit 44B can be greatly vibrated in the X axis direction, and along with this, the angular velocity ωz around the Z axis is applied Then, the detection unit 44B can be largely displaced in the Y-axis direction which is the detection axis direction, so that the detection sensitivity can be improved. Therefore, the physical quantity sensor 1b having high detection sensitivity can be obtained. In addition, even if miniaturization is achieved, it is possible to obtain the physical quantity sensor 1b in which the decrease in detection sensitivity is further reduced.

  In the present embodiment, as shown in FIG. 9, at both ends in the Y-axis direction of the drive portion 41B, the end portions in the -Y-axis direction have been described as an example, but the end of the drive portion 41B in the + Y-axis direction The same configuration is also applied to both ends of the drive unit 41A in the Y-axis direction.

  According to the third embodiment as described above, the same effects as those of the first embodiment described above can be obtained, and still, static electricity between the movable drive electrodes 411A and 411B and the fixed drive electrodes 412A and 412B in the drive portions 41A and 41B can be obtained. The capacitance can be increased, and the vibration displacement of the detection units 44A and 44B can be increased. Therefore, it is possible to obtain the physical quantity sensor 1b in which the decrease in detection sensitivity is further reduced even when the size is reduced.

<Inertial Measurement Device>
Next, an inertial measurement unit (IMU: Inertial Measurement Unit) 2000 to which the physical quantity sensor 1 according to an embodiment of the present invention is applied will be described with reference to FIGS. 11 and 12. FIG. 11 is an exploded perspective view showing a schematic configuration of the inertial measurement device. FIG. 12 is a perspective view showing an arrangement example of an inertial sensor element of the inertial measurement device.

  An inertial measurement device 2000 (IMU: Inertial Measurement Unit) shown in FIG. 11 is a device that detects the posture or behavior (inertial momentum) of a moving object (mounted device) such as a car or a robot. The inertial measurement device 2000 functions as a so-called six-axis motion sensor provided with a three-axis acceleration sensor and a three-axis angular velocity sensor.

  The inertial measurement device 2000 is a rectangular solid having a substantially square planar shape. Further, screw holes 2110 as fixing portions are formed in the vicinity of two apexes located in the diagonal direction of the square. The inertial measurement device 2000 can be fixed to the mounting surface of a mounting object such as a car by passing two screws through the two screw holes 2110. In addition, it is also possible to miniaturize to a size that can be mounted on, for example, a smartphone or a digital camera, by selecting parts or changing the design.

  The inertial measurement device 2000 has an outer case 2100, a joining member 2200, and a sensor module 2300. The inside of the outer case 2100 has the joining member 2200 interposed therein, and the sensor module 2300 is inserted. There is. The sensor module 2300 also includes an inner case 2310 and a substrate 2320.

  The outer shape of the outer case 2100 is a rectangular solid having a substantially square planar shape, similar to the overall shape of the inertial measurement device 2000, and screw holes 2110 are formed in the vicinity of two apexes located in the diagonal direction of the square. There is. The outer case 2100 is box-shaped, and the sensor module 2300 is housed inside.

  The inner case 2310 is a member that supports the substrate 2320 and has a shape that fits inside the outer case 2100. Further, in the inner case 2310, a recess 2311 for preventing contact with the substrate 2320 and an opening 2312 for exposing a connector 2330 described later are formed. Such an inner case 2310 is joined to the outer case 2100 via a joining member 2200 (for example, a packing impregnated with an adhesive). In addition, a substrate 2320 is bonded to the lower surface of the inner case 2310 via an adhesive.

  As shown in FIG. 12, on the upper surface of the substrate 2320, a connector 2330, an angular velocity sensor 2340z for detecting an angular velocity around the Z axis, an acceleration sensor 2350 for detecting acceleration in each axial direction of X, Y and Z axes, etc. Has been implemented. Further, on the side surface of the substrate 2320, an angular velocity sensor 2340x for detecting an angular velocity around the X axis and an angular velocity sensor 2340y for detecting an angular velocity around the Y axis are mounted. The angular velocity sensors 2340z, 2340x, and 2340y are not particularly limited. For example, vibration gyro sensors that use Coriolis force such as the physical quantity sensor 1 described above can be used. Further, the acceleration sensor 2350 is not particularly limited, and, for example, a capacitive acceleration sensor can be used.

  Further, on the lower surface of the substrate 2320, a control IC 2360 as a control circuit is mounted. The control IC 2360 is an MCU (Micro Controller Unit), incorporates a storage unit including a non-volatile memory, an A / D converter, and the like, and controls each unit of the inertial measurement device 2000. The storage unit stores a program that defines the order and content for detecting acceleration and angular velocity, a program that digitizes detection data and incorporates it into packet data, and accompanying data. A plurality of other electronic components are mounted on the substrate 2320.

  The inertial measurement device 2000 has been described above. Such an inertial measurement device 2000 includes angular velocity sensors 2340z, 2340x and 2340y and an acceleration sensor 2350 as the physical quantity sensor 1, and a control IC 2360 (control circuit) for controlling driving of the respective sensors 2340z, 2340x, 2340y and 2350. Contains. Thereby, the effect of the physical quantity sensor 1 described above can be obtained, and a highly reliable inertial measurement device 2000 can be obtained.

<Mobile positioning device>
Next, a mobile positioning device 3000 to which the physical quantity sensor 1 according to an embodiment of the present invention is applied will be described with reference to FIGS. 13 and 14. FIG. 13 is a block diagram showing an entire system of a mobile positioning device. FIG. 14 is a diagram schematically showing the operation of the mobile positioning device.

  A mobile body positioning device 3000 shown in FIG. 13 is a device mounted on a mobile body and used to perform positioning of the mobile body. The moving body is not particularly limited, and may be a bicycle, a car (including a four-wheeled car and a motorcycle), a train, an airplane, a ship, etc., but in the present embodiment, it will be described as a four-wheeled car. The mobile positioning device 3000 includes an inertial measurement device 3100 (IMU), an arithmetic processing unit 3200, a GPS receiving unit 3300, a receiving antenna 3400, a position information obtaining unit 3500, a position combining unit 3600, and a processing unit 3700. , A communication unit 3800, and a display unit 3900. As the inertial measurement device 3100, for example, the above-described inertial measurement device 2000 can be used.

  Further, the inertial measurement device 3100 has a 3-axis acceleration sensor 3110 and a 3-axis angular velocity sensor 3120. The arithmetic processing unit 3200 as an arithmetic unit receives acceleration data from the acceleration sensor 3110 and angular velocity data from the angular velocity sensor 3120, performs inertial navigation arithmetic processing on these data, and performs inertial navigation positioning data (the acceleration of the moving object and Output data (including attitude).

  Also, a GPS reception unit 3300 as a reception unit receives a signal from a GPS satellite (GPS carrier wave, satellite signal on which positional information is superimposed) via the reception antenna 3400. In addition, the position information acquisition unit 3500 as an acquisition unit is a GPS that indicates the position (latitude, longitude, altitude), speed, and direction of the mobile positioning device 3000 (mobile) based on the signal received by the GPS reception unit 3300. Output positioning data. The GPS positioning data also includes status data indicating a reception state, a reception time, and the like.

  The position synthesis unit 3600 as a calculation unit is a position of the moving object, specifically, based on the inertial navigation positioning data as inertial data output from the arithmetic processing unit 3200 and the GPS positioning data output from the position information acquisition unit 3500. Calculate the position on the ground where the mobile unit is traveling. For example, even if the position of the moving object included in the GPS positioning data is the same, as shown in FIG. 14, if the attitude of the moving object is different due to the influence of the inclination of the ground, the different position of the ground The moving body is traveling. Therefore, it is not possible to calculate the accurate position of the mobile using GPS positioning data alone. Therefore, the position synthesis unit 3600 calculates which position on the ground the moving body is traveling using the inertial navigation positioning data (in particular, data on the attitude of the moving body). Note that the determination can be made relatively easily by calculation using a trigonometric function (slope θ with respect to the vertical direction).

  The position data output from the position combining unit 3600 is subjected to predetermined processing by the processing unit 3700, and is displayed on the display unit 3900 as a positioning result. The position data may be transmitted to the external device by the communication unit 3800.

  The mobile positioning device 3000 has been described above. As described above, such a mobile positioning device 3000 includes the inertial measurement device 3100, the GPS receiving unit 3300 (receiving unit) for receiving the satellite signal on which the position information is superimposed from the positioning satellite, and the received satellite signal Based on the position information acquisition unit 3500 (acquisition unit) that acquires position information of the GPS reception unit 3300 and the inertial navigation positioning data (inertial data) output from the inertial measurement device 3100, It includes an arithmetic processing unit 3200 (arithmetic unit) to calculate, and a position synthesis unit 3600 (calculator) that calculates the position of the moving body by correcting the position information based on the calculated attitude. Thus, the effect of the above-described physical quantity sensor 1 (inertial measurement device 2000) can be obtained, and a highly reliable mobile object positioning device 3000 can be obtained.

<Portable Electronic Equipment>
Next, a portable electronic device to which the physical quantity sensor 1 according to an embodiment of the present invention is applied will be described with reference to FIG. 15 and FIG. FIG. 15 is a plan view schematically showing the configuration of the portable electronic device. FIG. 16 is a functional block diagram showing a schematic configuration of the portable electronic device.
Hereinafter, a wristwatch-type activity meter (active tracker) will be described as an example of the portable electronic device.

  The wrist device 1000, which is a wristwatch-type activity meter (active tracker), is attached to a site (subject) such as the user's wrist by a band 1032, 1037 or the like as shown in FIG. Wireless communication is possible while being equipped. The physical quantity sensor 1 according to the present invention described above is incorporated in the wrist device 1000 as a sensor that measures an angular velocity.

  The wrist device 1000 is housed in a case 1030 in which at least the physical quantity sensor 1 is housed, a processing unit 100 housed in the case 1030 and processing output data from the physical quantity sensor 1 (see FIG. 16), and a case 1030 And a translucent cover 1071 closing the opening of the case 1030. A bezel 1078 is provided on the outside of the case 1030 of the translucent cover 1071 of the case 1030. On the side surface of the case 1030, a plurality of operation buttons 1080 and 1081 are provided. Hereinafter, further detailed description will be made with reference to FIG. 16 as well.

  The acceleration sensor 113 detects each acceleration in the directions of three axes intersecting (ideally orthogonal) with each other, and outputs a signal (acceleration signal) according to the magnitude and direction of the detected three-axis acceleration. Further, an angular velocity sensor 114 as the physical quantity sensor 1 detects angular velocities in the directions of three axes intersecting (ideally orthogonal) with each other, and signals (angular velocity according to the detected magnitude and direction of the detected three axial angular velocities Output signal).

  The liquid crystal display (LCD) constituting the display unit 150 uses, for example, position information using the GPS sensor 110 or the geomagnetic sensor 111, and the angular velocity sensor 114 included in the movement amount and physical quantity sensor 1 according to various detection modes. The exercise information such as the exercise amount, the biological information such as the pulse rate using the pulse sensor 115, or the time information such as the current time is displayed. In addition, the environmental temperature using the temperature sensor 116 can also be displayed.

  The communication unit 170 performs various controls for establishing communication between the user terminal and an information terminal (not shown). The communication unit 170 may be, for example, Bluetooth (registered trademark) (BTLE: including Bluetooth Low Energy), Wi-Fi (registered trademark) (Wireless Fidelity), Zigbee (registered trademark), NFC (Near field communication), ANT + (registered trademark) The transceiver and the communication unit 170 compliant with the short distance wireless communication standard such as trademark are configured to include a connector compliant with the communication bus standard such as USB (Universal Serial Bus).

  The processing unit 100 (processor) is configured by, for example, a micro processing unit (MPU), a digital signal processor (DSP), an application specific integrated circuit (ASIC) or the like. The processing unit 100 executes various processes based on the program stored in the storage unit 140 and the signals input from the operation unit 120 (for example, operation buttons 1080 and 1081). The processing by the processing unit 100 includes data processing for each output signal of the GPS sensor 110, the geomagnetic sensor 111, the pressure sensor 112, the acceleration sensor 113, the angular velocity sensor 114, the pulse sensor 115, the temperature sensor 116, and the clock unit 130, and the display unit 150. Display processing for displaying an image on the screen, sound output processing for outputting sound to the sound output unit 160, communication processing for communicating with an information terminal via the communication unit 170, power control processing for supplying power from the battery 180 to each unit, etc. Is included.

Such a wrist device 1000 can have at least the following functions.
1. Distance: Measure the total distance from the start of measurement by high precision GPS function.
2. Pace: Displays the current running pace from the pace distance measurement.
3. Average Speed: Calculates and displays the average speed from the start of driving to the present.
4. Elevation: Measure and display elevation by GPS function.
5. Stride: Measures and displays stride even in a tunnel where GPS radio waves do not reach.
6. Pitch: Measure and display the number of steps per minute.
7. Heart rate: The heart rate is measured and displayed by the pulse sensor.
8. Slope: Measure and display the slope of the ground during training or trail running in mountainous areas.
9. Auto lap: Automatic lap measurement is performed when running a certain distance or certain time set in advance.
10. Exercise calories burned: Display calories burned.
11. Number of steps: Display the total number of steps from the start of exercise.

  Note that the wrist device 1000 can be widely applied to a running watch, a runner's watch, a runner's watch compatible with multi sports such as a duathlon or a triathlon, an outdoor watch, and a satellite positioning system, for example, a GPS watch equipped with GPS.

  Also, although the above description has been made using the GPS (Global Positioning System) as a satellite positioning system, another Global Navigation Satellite System (GNSS) may be used. For example, one or more satellite positioning systems such as EGNOS (European Geostationary Satellite Navigation Overlay Service), QZSS (Quasi Zenith Satellite System), GLONASS (GLO Bal NAvigation Satellite System), GALILEO, BeiDou (BeiDou Navigation Satellite System), etc. You may use it. In addition, at least one of the satellite positioning systems may use a satellite based augmentation system (SBAS) such as Wide Area Augmentation System (WAAS) or European Geostationary Navigation Overlay Service (EGNOS). .

  Such a portable electronic device includes the physical quantity sensor 1 and the processing unit 100, and thus has excellent reliability.

<Electronic equipment>
Next, an electronic device to which the physical quantity sensor 1 according to the embodiment of the present invention is applied will be described with reference to FIGS. 17 to 19.

  First, with reference to FIG. 17, a mobile personal computer 1100 which is an example of the electronic apparatus will be described. FIG. 17 is a perspective view schematically showing a configuration of a mobile personal computer which is an example of the electronic apparatus.

  In this figure, the personal computer 1100 comprises a main unit 1104 having a keyboard 1102 and a display unit 1106 having a display unit 1108. The display unit 1106 is rotated relative to the main unit 1104 via a hinge structure. It is supported movably. A physical quantity sensor 1 functioning as an angular velocity sensor is built in such a personal computer 1100, and based on detection data of the physical quantity sensor 1, the control unit 1110 can perform control such as attitude control.

  FIG. 18 is a perspective view schematically showing a configuration of a smartphone (mobile phone) as an example of the electronic device.

  In this figure, the smartphone 1200 incorporates the physical quantity sensor 1 described above. Detection data (angular velocity data) detected by the physical quantity sensor 1 is transmitted to the control unit 1201 of the smartphone 1200. The control unit 1201 includes a CPU (Central Processing Unit), recognizes the posture and behavior of the smartphone 1200 from the received detection data, and changes the display image displayed on the display unit 1208. Sound a warning sound or sound effect, or drive a vibration motor to vibrate the main unit. In other words, motion sensing of the smartphone 1200 can be performed, and the display content can be changed, sound, vibration, or the like can be generated from the measured attitude or behavior. In particular, when executing a game application, it is possible to experience a realistic feeling close to reality.

  FIG. 19 is a perspective view showing a configuration of a digital still camera as an example of the electronic apparatus. Note that in this figure, the connection to an external device is also shown in a simplified manner.

  A display unit 1310 is provided on the back of the case (body) 1302 of the digital still camera 1300, and is configured to perform display based on an imaging signal by a CCD, and the display unit 1310 displays an object as an electronic image. It also functions as a finder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the rear side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit 1310 and depresses the shutter button 1306, an imaging signal of the CCD at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side of the case 1302. As shown, a television monitor 1430 is connected to the video signal output terminal 1312, and a personal computer 1440 is connected to the data communication input / output terminal 1314 as necessary. Furthermore, the imaging signal stored in the memory 1308 is configured to be output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. The digital still camera 1300 incorporates the physical quantity sensor 1 functioning as an angular velocity sensor, and based on the detection data of the physical quantity sensor 1, the control unit 1316 can perform control such as camera shake correction.

  Such an electronic device includes the physical quantity sensor 1 and the control units 1110, 1201, and 1316, and thus has excellent reliability.

  In addition to the personal computer 1100 shown in FIG. 17, the smartphone (mobile phone) 1200 shown in FIG. 18, and the digital still camera 1300 shown in FIG. Ejection device (for example, ink jet printer), laptop personal computer, television, video camera, video tape recorder, car navigation device, pager, electronic notebook (including communication function included), electronic dictionary, calculator, electronic game machine, word processor, Workstations, video phones, television monitors for crime prevention, electronic binoculars, POS terminals, medical equipment (eg electronic thermometers, sphygmomanometers, blood glucose meters, electrocardiogram measuring devices, ultrasound diagnostic devices, electronic endoscopes), fish finders, etc. Measuring machine , Instruments (eg, instruments of vehicles, aircraft, ships), flight simulators, seismometers, pedometers, inclinometers, vibrometers that measure the vibrations of hard disks, attitude control devices for flying objects such as robots and drone, vehicles The present invention can be applied to control devices and the like used in inertial navigation for autonomous driving.

<Mobile body>
Next, a mobile body to which the physical quantity sensor 1 according to an embodiment of the present invention is applied will be described with reference to FIG. FIG. 20 is a perspective view showing a configuration of a car which is an example of a moving body.

  As shown in FIG. 20, the physical quantity sensor 1 is built in an automobile 1500 as a moving body, and, for example, the physical quantity sensor 1 can detect the posture of the vehicle body 1501. The detection signal of the physical quantity sensor 1 is supplied to a vehicle body posture control device 1502 as a posture control unit for controlling the posture of the vehicle body, and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and the detection result Depending on the situation, the hardness of the suspension can be controlled or the brakes of the individual wheels 1503 can be controlled. In addition, the physical quantity sensor 1 is also keyless entry, immobilizer, car navigation system, car air conditioner, antilock brake system (ABS), air bag, tire pressure monitoring system (TPMS: Indium Tire Pressure Monitoring System), The present invention can be widely applied to electronic control units (ECUs) such as engine control and battery monitors of hybrid vehicles and electric vehicles.

  In addition to the above examples, the physical quantity sensor 1 applied to a moving object may be, for example, attitude control such as a biped robot or a train, remote control such as a radio controlled airplane, a radio controlled helicopter, or a drone or autonomous type. Use in control of attitude control of flight vehicles, attitude control of agricultural machines (growing machines) or construction machines (building machines), control of rockets, artificial satellites, ships, AGVs (unmanned transport vehicles), biped and two-legged robots, etc. Can. As described above, the physical quantity sensor 1 and the respective control units (not shown) are incorporated to realize attitude control of various moving bodies.

  Such a moving body includes the physical quantity sensor 1 and the control unit (for example, the vehicle body posture control device 1502 as a posture control unit), and therefore has excellent reliability.

  As described above, the physical quantity sensors 1, 1a and 1b, the inertial measurement device 2000, the mobile object positioning device 3000, the portable electronic device (1000), the electronic device (1100, 1200, 1300), and the mobile object (1500) are illustrated. However, the present invention is not limited to this, and the configuration of each part can be replaced with any configuration having the same function. In addition, any other component may be added to the present invention.

  In the embodiment described above, the X axis, the Y axis, and the Z axis are orthogonal to each other, but the present invention is not limited to this as long as they intersect with each other. For example, the X axis is perpendicular to the YZ plane. The Y axis may be slightly inclined with respect to the normal direction of the XZ plane, or the Z axis may be slightly inclined with respect to the normal direction of the XY plane. Note that “slightly” means a range in which the physical quantity sensors 1, 1 a, 1 b can exhibit the effect, and the specific inclination angle (numerical value) differs depending on the configuration or the like.

  DESCRIPTION OF SYMBOLS 1, 1a, 1b ... Physical quantity sensor, 2 ... Board | substrate, 21 ... Recess, 22, 221, 222, 223, 224, 225 ... Mount, 23, 24, 25, 26, 27, 28 ... Groove part, 3 ... Lid, DESCRIPTION OF SYMBOLS 31 recessed part 32 communicating hole 33 sealing member 39 glass frit 4 element part 4A, 4B movable body 41A, 41B drive part 411A, 411B movable drive electrode 412A, 412B ... fixed drive electrode, 42A, 42B ... first fixed section, 421A, 421B ... second fixed section, 43A, 43B ... drive spring as second spring section, 44A, 44B ... detection section, 441A, 441B ... movable detection electrode 442A, 442B, 443A, 443B ... fixed detection electrode, 451, 452 ... first fixed section, 46A, 46B ... detection spring as first spring section, 47A, 47B ... reverse phase spring, 4 1A, 471B, ... spring body, 472A, 473A ... arm, 474A, 475A ... connection portion, 477A, 477B, 478A, 478B ... beam, 48 ... frame, 481, 482 ... defective portion, 488, 489 ... frame spring, 49A , 49B: monitor unit, 491A, 491B: movable monitor electrode, 492A, 492B, 493A, 493B: fixed monitor electrode, 50: first trunk, 51: movable detection electrode finger, 52, 52a: first connection portion, 521: 521 First support section 522: second support section 53: fixed detection electrode finger 60: second stem section 61: movable drive electrode finger 62: second connection section 621: third support section 622: fourth Support part, 63: fixed drive electrode finger, 73, 74, 75, 76, 77, 78: wiring, 1000: wrist device as portable electronic device, 1100: paper Sonal computer, 1200 ... smart phone (mobile phone), 1300 ... digital still camera, 1500 ... car as a moving body, 2000 ... inertia measurement device, 3000 ... mobile body positioning device, G1, G2, G3, G4, G5, G6, G7, G8 ... interval, L1, L2, L3, L4, L5, L6 ... length.

Claims (12)

A substrate,
A detection unit provided on the substrate and detecting a physical quantity;
The detection unit is
A fixed detection electrode fixed to the substrate;
A movable detection electrode displaceable in a first direction which is a detection axial direction of the physical quantity with respect to the substrate;
A first fixing portion for fixing the movable detection electrode to the substrate;
A first spring unit connecting the first fixed unit and the movable detection electrode;
The fixed detection electrode is
It has a plurality of fixed detection electrode fingers provided along a second direction which is a direction intersecting the first direction,
The movable detection electrode is
A plurality of first stems provided along the first direction and a plurality of stems provided along the second direction from the first stem and spaced apart from the fixed detection electrode fingers in the first direction A movable connection electrode finger of the above and a first connection part connected to the first trunk,
The first connecting portion is
A first support portion connected to the first trunk, and a second support portion connected to the first spring portion;
The physical quantity sensor, wherein a distance between the first support portion and the fixed detection electrode in the first direction is smaller than a distance between the second support portion and the fixed detection electrode in the first direction.   2. The physical quantity sensor according to claim 1, wherein a length of the first support portion in the second direction is substantially equal to a length of the movable detection electrode finger in the second direction.   The distance between the first support portion and the fixed detection electrode in the first direction is substantially equal to the distance between the fixed detection electrode finger and the movable detection electrode in the first direction. Or the physical quantity sensor of Claim 2. A substrate,
A detection unit provided on the substrate and detecting a physical quantity;
The detection unit is
A fixed detection electrode fixed to the substrate;
A movable detection electrode displaceable in a first direction which is a detection axial direction of the physical quantity with respect to the substrate;
A first fixing portion for fixing the movable detection electrode to the substrate;
A first spring unit connecting the first fixed unit and the movable detection electrode;
The fixed detection electrode is
It has a plurality of fixed detection electrode fingers provided along a second direction which is a direction intersecting the first direction,
The movable detection electrode is
A plurality of first stems provided along the first direction and a plurality of stems provided along the second direction from the first stem and spaced apart from the fixed detection electrode fingers in the first direction A movable connection electrode finger of the above and a first connection part connected to the first trunk,
The length of the first connection portion in the second direction is substantially equal to the length of the movable detection electrode finger in the second direction,
A physical quantity sensor, wherein a distance between the first connection portion and the fixed detection electrode in the first direction is substantially equal to a distance between the fixed detection electrode finger and the movable detection electrode finger in the first direction. A driving unit provided on the substrate and capable of driving the detection unit;
The drive unit is
A fixed drive electrode fixed to the substrate;
A movable drive electrode displaceable in the second direction with respect to the substrate;
A second fixing portion for fixing the movable drive electrode to the substrate;
And a second spring portion connecting the second fixed portion and the movable drive electrode,
The fixed drive electrode is
A plurality of fixed drive electrode fingers provided along the second direction;
The movable drive electrode is
A second trunk provided along the first direction, and a plurality of the second trunk provided from the second trunk along the second direction and spaced apart from the fixed drive electrode finger in the first direction And a second connection portion connected to the second trunk,
The second connection portion is
A third support portion connected to the second trunk, and a fourth support portion connected to the second spring portion;
The distance between the third support portion and the fixed drive electrode in the first direction is smaller than the distance between the fourth support portion and the fixed drive electrode in the first direction. The physical quantity sensor according to any one of Items 4.   The physical quantity sensor according to claim 5, wherein a length of the third support in the second direction is substantially equal to a length of the movable drive electrode finger in the second direction.   The distance between the third support portion and the fixed drive electrode in the first direction is substantially equal to the distance between the fixed drive electrode finger and the movable drive electrode in the first direction. Or the physical quantity sensor of Claim 6. A physical quantity sensor according to any one of claims 1 to 7,
And a control circuit for controlling the drive of the physical quantity sensor. An inertial measurement device according to claim 8;
A receiver for receiving a satellite signal on which position information is superimposed from a positioning satellite;
An acquisition unit that acquires position information of the reception unit based on the received satellite signal;
An arithmetic unit that calculates the attitude of the moving object based on the inertial data output from the inertial measurement device;
And a calculator configured to calculate the position of the mobile body by correcting the position information based on the calculated attitude. A physical quantity sensor according to any one of claims 1 to 7,
A case containing the physical quantity sensor;
A processing unit housed in the case and processing output data from the physical quantity sensor;
A display unit housed in the case;
And a translucent cover closing the opening of the case. A physical quantity sensor according to any one of claims 1 to 7,
And a control unit configured to perform control based on a detection signal output from the physical quantity sensor. A physical quantity sensor according to any one of claims 1 to 7,
And a posture control unit configured to control a posture based on a detection signal output from the physical quantity sensor.

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