JP2019109141A - Physical quantity sensor, complex sensor, inertial measurement unit, portable electronic apparatus, electronic apparatus, moving body, and manufacturing method of physical quantity sensor - Google Patents

Abstract

To provide a physical quantity sensor with an excellent detection property, a complex sensor, an inertial measurement unit, a portable electronic apparatus, an electronic apparatus, a moving body, and a manufacturing method of the physical quantity sensor.SOLUTION: A physical quantity sensor 1 includes: a substrate 110 on which a fixed detection electrode 186 as a detection electrode is provided; a movable body 10 which faces the fixed detection electrode 186; and a detection spring section 160 as an elastic beam which has one end connected to a post section 114 as an anchor provided on the substrate 110 and the other end connected to the movable body 10. A first virtual plane H1, which is along the vibration direction of the movable body 10 and is parallel to a plane 186c facing the movable body 10 in the fixed detection electrode 186, intersects a second virtual plane H2 which is parallel to the plane at which the substrate 110 is bonded with the movable body 10.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a physical quantity sensor, a composite sensor, an inertial measurement unit, a portable electronic device, an electronic device, a moving body, and a method of manufacturing a physical quantity sensor.

  In recent years, as an example of a physical quantity sensor, a gyro sensor using a gyro sensor element using a silicon MEMS (Micro Electro Mechanical System) technology has been developed. Among physical quantity sensors, gyro sensors that detect angular velocity are rapidly expanding, for example, in applications such as motion sensing functions of game machines.

  As such a gyro sensor, for example, Patent Document 1 discloses a sensor element constituting an angular velocity sensor. The sensor element includes a support substrate, a fixed portion fixed to the support substrate, a vibrator supported on the fixed portion via an elastic beam (support beam), and a comb-tooth shape provided on the vibrator. And a fixed comb-teeth electrode meshing with the movable electrode via a gap. In the angular velocity sensor having such a configuration, when a voltage is applied to the fixed comb electrode, the vibrator vibrates (drives vibrate) in the X-axis direction by the electrostatic force generated between the movable electrode and the fixed comb electrode. . When an angular velocity around the Z axis (or Y axis) acts on the vibrating body in such a vibrating state, the vibrator vibrates (detects and vibrates) in the Y axis (or Z axis) direction by the Coriolis force. The angular velocity of rotation can be detected by detecting an electrical signal corresponding to the magnitude of the vibration amplitude in the Y-axis (or Z-axis) direction of the vibrator due to the Coriolis force.

Such a sensor element is made of a silicon substrate, and thus can be manufactured by dry etching. For example, in Patent Document 2, SF ₆ (gas for etching) and C ₄ F ₈ (gas for deposition) are used. 2.) alternately switching between the two series of reactive plasma gases and repeating the etching and sidewall protective film deposition steps described in Si Deep Reactive Ion Etching technology, the so-called Bosch process It is done.

JP, 2009-175079, A Japanese Patent Publication No. 7-503815

  However, when it is intended to manufacture the sensor element described in Patent Document 1 by dry etching described in Patent Document 2, since the reactive plasma gas has a density distribution, the reactive plasma gas is applied to the silicon substrate. It can not be perpendicularly incident, and the processing wall is processed at an angle deviated from the ideal perpendicular depending on the incident angle of the reactive plasma gas, and the cross-sectional shape of the sensor element is processed deviated from the ideal perpendicular shape. Therefore, when the physical quantity of the physical quantity sensor is detected, fluctuation in detection characteristics occurs due to unnecessary vibration, resulting in a problem that detection accuracy is lowered.

  The present invention has been made to solve at least a part of the above-described problems, and can be realized as the following modes or application examples.

  Application Example 1 A physical quantity sensor according to this application example is connected to a substrate provided with a detection electrode, a movable body facing the detection electrode, and an anchor provided with one of the substrates, And a first virtual surface parallel to a surface of the detection electrode facing the movable body, the elastic beam being connected to the movable body, the other of the elastic beams being connected to the movable body; It is characterized in that it intersects with a second virtual surface parallel to the surface of the substrate joined to the movable body.

  According to this application example, when the cross-sectional shape of the movable body is processed to deviate from the ideal right-angled shape, a substrate in which the vibration direction of the movable body is joined to the movable body by unnecessary vibration during operation of the physical quantity sensor It is shifted in the direction intersecting with the second virtual plane parallel to the plane of. Therefore, the first virtual surface parallel to the surface facing the movable body of the detection electrode intersects the second virtual surface parallel to the surface of the substrate joined to the movable body, whereby the movable body of the detection electrode And the opposite surface is parallel to the vibration direction of the vibrating movable body. Therefore, detection characteristic variation due to unnecessary vibration at the time of physical quantity detection of the physical quantity sensor can be reduced, and a decrease in detection accuracy can be reduced.

  Application Example 2 In the physical quantity sensor according to the application example described above, it is preferable that the third virtual surface including the side surface of the elastic beam intersecting the vibration direction intersects the normal to the second virtual surface. .

  According to this application example, since the third virtual surface including the side surface of the elastic beam intersecting the vibration direction intersects the normal to the second virtual surface parallel to the surface of the substrate joined to the movable body. The surface of the detection electrode facing the movable body is parallel to the vibration direction of the movable body vibrating. Therefore, detection characteristic variation due to unnecessary vibration at the time of physical quantity detection of the physical quantity sensor can be reduced, and a decrease in detection accuracy can be reduced.

  Application Example 3 In the physical quantity sensor described in the application example, it is preferable that the first virtual surface is orthogonal to the third virtual surface.

  According to this application example, by making the first virtual surface orthogonal to the third virtual surface, the surface of the detection electrode facing the movable body can be made more parallel to the vibration direction of the movable body vibrating. it can. Therefore, detection characteristic variation due to unnecessary vibration at the time of physical quantity detection of the physical quantity sensor is further reduced, and a decrease in detection accuracy can be further reduced.

  Application Example 4 In the physical quantity sensor according to the application example, an intersection angle between the first virtual surface and the second virtual surface is θ1, and an intersection angle between the normal and the third virtual surface is θ2. Preferably, the θ1 is 0.01 ° or more and 3.0 ° or less, and the θ2 is 0.01 ° or more and 3.0 ° or less.

  According to this application example, the intersection angle θ1 between the first virtual surface and the second virtual surface, and the intersection angle θ2 between the normal to the second virtual surface and the third virtual surface are 0.01 ° or more. By setting the angle to 0 ° or less, it is possible to make the surface of the detection electrode facing the movable body substantially parallel to the vibration direction of the movable movable body. Therefore, detection characteristic variation due to unnecessary vibration at the time of physical quantity detection of the physical quantity sensor can be reduced, and a decrease in detection accuracy can be reduced.

  Application Example 5 In the physical quantity sensor described in the application example, it is preferable that a stopper is provided on the substrate, and the stopper has the same potential as the movable portion of the movable body.

  According to this application example, since the substrate is provided with the stopper, the displacement amount of the movable body is limited when an excessive physical quantity is applied or when an impact is applied from the direction crossing the vibration direction, It is possible to prevent the movable body from being broken. Further, since the stopper has the same potential as the movable portion of the movable body, the electrostatic force acting between the stopper and the movable portion can be suppressed, and the movable portion can be prevented from sticking to the stopper.

  Application Example 6 In the physical quantity sensor described in the application example, it is preferable that the physical quantity sensor is an angular velocity sensor.

  According to this application example, it is possible to obtain an angular velocity sensor with high detection accuracy, with less variation in detection characteristics due to unnecessary vibration at the time of angular velocity detection.

  Application Example 7 A composite sensor according to this application example includes the physical quantity sensor according to the application example 6 and an acceleration sensor.

  According to this application example, it is possible to easily configure a composite sensor including an angular velocity sensor with high detection accuracy and small detection characteristic variation due to unnecessary vibration at the time of angular velocity detection, and stable angular velocity data And acceleration data can be acquired.

  Application Example 8 The inertial measurement unit according to this application example includes the physical quantity sensor described in the application example 6, an acceleration sensor, and a control unit that controls the physical quantity sensor and the acceleration sensor. It features.

  According to this application example, highly reliable physical quantity data can be obtained by controlling the physical quantity sensor (angular velocity sensor) with high detection accuracy and the acceleration sensor with small detection characteristic variation due to unnecessary vibration at the time of angular velocity detection. An inertial measurement unit capable of outputting can be obtained.

  Application Example 9 A portable electronic device according to this application example includes the physical quantity sensor described in the application example, a case containing the physical quantity sensor, and the case housed with the output data from the physical quantity sensor. And a display unit accommodated in the case, and a translucent cover closing the opening of the case.

  According to this application example, since the processing unit performs control based on the output data output from the above-described physical quantity sensor, the effects of the above-described physical quantity sensor can be obtained, and a highly reliable portable electronic device can be obtained. be able to.

  Application Example 10 The electronic device according to this application example includes the physical quantity sensor according to the application example described above, and a control unit that performs control based on the detection signal output from the physical quantity sensor. I assume.

  According to this application example, since the control unit performs control based on the detection signal output from the above-described physical quantity sensor, the effect of the above-described physical quantity sensor can be enjoyed, and an electronic device with high reliability can be obtained. it can.

  Application Example 11 A mobile unit according to this application example includes the physical quantity sensor according to the application example described above, and an attitude control unit that controls an attitude based on a detection signal output from the physical quantity sensor. It is characterized by

  According to this application example, since the attitude control unit performs control based on the detection signal output from the above-described physical quantity sensor, the effect of the above-described physical quantity sensor can be enjoyed, and a highly reliable mobile object can be obtained. Can.

  Application Example 12 of a method of manufacturing a physical quantity sensor according to this application example includes the steps of processing a substrate, forming a detection electrode on the substrate, forming a movable body, and bonding a lid to the substrate. And a step of processing the substrate, the step of forming a convex portion, the step of covering the convex portion with a mask, and a portion of the mask on the convex portion Forming the opening in the opening, etching the projection exposed from the opening, and gradually etching the region between the projection and the mask, thereby forming the inclined surface on the projection And a forming step.

  According to this application example, in the step of processing the substrate, the step of forming the convex portion, the step of covering the convex portion with a mask, and the step of forming an opening in a part of the mask on the convex portion; And E. forming an inclined surface on the convex portion by etching the exposed convex portion and gradually etching a region between the convex portion and the mask. Therefore, the cross-sectional shape of the movable body is processed to deviate from the ideal right-angled shape, and the vibration direction of the movable body is parallel to the surface of the substrate joined to the movable body due to unnecessary vibration when detecting the physical quantity of the physical quantity sensor. Even if the sensor electrode is shifted in the direction intersecting the virtual surface, the projection on which the detection electrode is provided is inclined, so that the vibration of the surface of the detection electrode facing the movable body vibrates. It is parallel to the direction. Therefore, it is possible to manufacture a physical quantity sensor capable of reducing variations in detection characteristics due to unnecessary vibration at the time of physical quantity detection, and reducing a decrease in detection accuracy.

FIG. 1 is a plan view showing a schematic configuration of a physical quantity sensor according to a first embodiment. Sectional drawing in the AA of FIG. Sectional drawing in the BB line of FIG. The C section enlarged view of FIG. The flowchart which shows the manufacturing method of a physical quantity sensor to process order. The flowchart which shows a substrate processing process in order of a process. Sectional drawing for demonstrating the manufacturing method of a physical quantity sensor. Sectional drawing for demonstrating the manufacturing method of a physical quantity sensor. Sectional drawing for demonstrating the manufacturing method of a physical quantity sensor. Sectional drawing for demonstrating the manufacturing method of a physical quantity sensor. Sectional drawing for demonstrating the manufacturing method of a physical quantity sensor. Sectional drawing for demonstrating the manufacturing method of a physical quantity sensor. Sectional drawing which shows schematic structure of the physical quantity sensor which concerns on 2nd Embodiment. The functional block diagram which shows schematic structure of a compound sensor. The disassembled perspective view which shows schematic structure of an inertial measurement unit. The perspective view which shows the example of arrangement | positioning of the inertial sensor element of an inertial measurement unit. FIG. 2 is a plan view schematically showing the configuration of a portable electronic device. FIG. 2 is a functional block diagram showing a schematic configuration of a portable electronic device. FIG. 1 is a perspective view schematically illustrating a configuration of a mobile personal computer that is an example of an electronic device. The perspective view which shows typically the structure of the smart phone (mobile telephone) which is an example of an electronic device. FIG. 1 is a perspective view showing a configuration of a digital still camera which is an example of an electronic device. BRIEF DESCRIPTION OF THE DRAWINGS The perspective view which shows the structure of the motor vehicle which is an example of a mobile body.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
In the drawings used in the following description, in order to make the features easy to understand, the features that are the features may be enlarged for the sake of convenience, and the dimensional ratio of each component may be limited to the same as the actual Absent. Moreover, for the same purpose, there may be a case where parts which are not characteristic are omitted.

First Embodiment
Physical quantity sensor
First, an angular velocity sensor is illustrated as the physical quantity sensor 1 according to the first embodiment of the present invention, and will be described with reference to FIGS. 1 to 4. FIG. 1 is a plan view showing a schematic configuration of the physical quantity sensor according to the first embodiment. FIG. 2 is a cross-sectional view taken along the line AA of FIG. FIG. 3 is a cross-sectional view taken along line B-B of FIG. FIG. 4 is an enlarged view of a portion C of FIG. In FIGS. 1 to 4, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other.

  As shown in FIGS. 1 to 4, the physical quantity sensor 1 according to the first embodiment includes a movable body 10 serving as a detection element that detects a physical quantity, a substrate 110, and a lid 120. In addition, the board | substrate 110 and the cover body 120 are abbreviate | omitted in FIG. 1 for convenience. Moreover, the cover body 120 is abbreviate | omitted in FIG. 3 and FIG.

  As shown in FIGS. 1 and 2, the movable body 10 is provided on the substrate 110, and is housed in a housing portion constituted by the substrate 110 and the lid 120.

  The material of the substrate 110 is, for example, glass or silicon. The substrate 110 is provided with a recess 112. The substrate 110 has a post portion 114 as an anchor and a convex portion 115 provided on the bottom surface (surface of the substrate 110 defining the concave portion 112) 112 a of the concave portion 112. The post portion 114 is a member for supporting the movable body 10, and the convex portion 115 is disposed at a position facing the movable detection electrode 184 of the movable portion 182, and forms a fixed detection electrode 186 as a detection electrode. It is a member of

  The lid 120 is provided on the substrate 110 (on the + Z-axis direction side of the substrate 110). The material of the lid 120 is, for example, silicon. The substrate 110 and the lid 120 may be bonded by anodic bonding. In the illustrated example, a recess is formed in the lid 120, and the recess constitutes a cavity 102.

  The method for bonding the substrate 110 and the lid 120 is not particularly limited, and for example, bonding using low melting point glass (glass paste) may be used, or bonding using solder may be used. Alternatively, a metal thin film (not shown) may be formed on each bonding portion of the substrate 110 and the lid 120, and the metal thin film may be eutectically bonded to bond the substrate 110 and the lid 120. .

  The movable body 10 is bonded to the substrate 110 by anodic bonding, for example. The movable body 10 is accommodated in a cavity 102 formed by the substrate 110 and the lid 120. The cavity 102 is preferably in a reduced pressure state. Thus, the vibration of the movable body 10 can be suppressed from being attenuated by the air viscosity.

  The movable body 10 includes, for example, a fixed unit 130, a drive spring unit 140, a drive unit 150, a detection spring unit 160 as an elastic beam, a connection spring unit 170, a detection unit 180, a fixed drive monitor electrode 190, And 192.

  The fixing unit 130 is fixed to the substrate 110. The fixing portion 130 is joined to the post portion 114 provided on the substrate 110 by anodic bonding, for example. The fixing portion 130 is connected to at least one of the drive spring portion 140 and the detection spring portion 160. A plurality of fixing parts 130 are provided. In the example of illustration, the planar shape (shape seen from Z-axis direction) of the fixing | fixed part 130 is a quadrangle.

  The drive spring unit 140 connects the fixed unit 130 and the movable drive electrode 152 of the drive unit 150. The drive spring portion 140 is provided apart from the substrate 110. In the illustrated example, the drive spring portion 140 extends in the Y axis direction while reciprocating in the X axis direction. The drive spring portion 140 can be smoothly extended and contracted in the Y axis direction which is the vibration direction of the drive portion 150 (the vibration direction of the movable drive electrode 152).

  The drive unit 150 vibrates the movable unit 182 of the detection unit 180 in the Y-axis direction. A plurality of driving units 150 are provided. In the illustrated example, two drive units 150 are provided (a first drive unit 150a and a second drive unit 150b). For example, the detection unit 180 is provided between the first drive unit 150a and the second drive unit 150b. In the illustrated example, the first drive unit 150a is provided closer to the −Y-axis direction than the second drive unit 150b. The drive unit 150 includes, for example, a movable drive electrode 152 and fixed drive electrodes 154 and 156.

  The movable drive electrode 152 is provided apart from the substrate 110. The movable drive electrode 152 has, for example, a tooth-like shape including a trunk extending in the X-axis direction and a plurality of branches extending from the trunk in the Y-axis direction. In the illustrated example, the movable drive electrode 152 is supported by four drive spring portions 140. Specifically, the four corners of the movable drive electrode 152 are connected by the drive spring portion 140.

  The fixed drive electrodes 154 and 156 are fixed to the substrate 110. The fixed drive electrodes 154 and 156 are bonded to the post portion (not shown) of the substrate 110 by anodic bonding, for example. The fixed drive electrodes 154 and 156 are provided to face the movable drive electrode 152. That is, the fixed drive electrode 154 and the movable drive electrode 152 form a capacitance, and the fixed drive electrode 156 and the movable drive electrode 152 form a capacitance. In the first drive unit 150 a, the fixed drive electrode 154 is provided on the + Y-axis direction side of the movable drive electrode 152, and the fixed drive electrode 156 is provided on the −Y-axis direction side of the movable drive electrode 152. In the second drive unit 150 b, the fixed drive electrode 154 is provided on the −Y-axis direction side of the movable drive electrode 152, and the fixed drive electrode 156 is provided on the + Y-axis direction side of the movable drive electrode 152. The fixed drive electrodes 154 and 156 have, for example, a tooth shape corresponding to the movable drive electrode 152.

  The detection spring unit 160 connects the fixed unit 130 and the movable unit 182 of the detection unit 180. The detection spring portion 160 is provided apart from the substrate 110. The detection spring portion 160 is configured to be deformable in the Z-axis direction according to the displacement of the movable portion 182 in the Z-axis direction.

  A plurality of detection spring portions 160 are provided. The first detection spring portion 160 a of the plurality of detection spring portions 160 is connected to a first fixing portion (a first fixing portion of the plurality of fixing portions 130) 130 a. The first detection spring portion 160 a connects the first fixed portion 130 a and the movable portion 182. The second detection spring portion 160 b of the plurality of detection spring portions 160 couples the second fixed portion (the second fixed portion of the plurality of fixed portions 130) 130 b to the movable portion 182. The third detection spring portion 160 c of the plurality of detection spring portions 160 couples the third fixed portion (third fixed portion of the plurality of fixed portions 130) 130 c and the movable portion 182.

  In the illustrated example, two first fixing portions 130a are provided, and one first fixing portion 130a and second fixing portion 130b are integrally provided, and the other first fixing portion 130a and third fixing are provided. The portion 130c is integrally provided. The first detection spring portion 160a is provided between the second detection spring portion 160b and the third detection spring portion 160c in plan view (as viewed in the Z-axis direction). Although not shown, the fixing portions 130a, 130b and 130c may be provided independently of each other. Further, the number of fixing portions 130a, 130b, 130c is not particularly limited.

  The first detection spring portion 160a has a shape extending in the Y-axis direction orthogonal to the X-axis while reciprocating in the X-axis direction. The first detection spring portion 160 a has a plurality of extending portions 162 extending in the X-axis direction. Among the plurality of extending portions 162, the extending portion 162 (the extending portion 162 having a portion overlapping the first fixing portion 130a) overlapping with the first fixing portion 130a when viewed from the Y-axis direction, which is the most first fixing portion The extension part 162 (extension part 162a in the illustrated example) close to 130a is thicker (larger in size in the Y-axis direction) than the other extension parts 162 (for example, extension parts 162b). The extension portion 162a has a surface facing the surface of the first fixing portion 130a.

  The connection spring unit 170 connects the movable drive electrode 152 of the drive unit 150 and the movable unit 182 of the detection unit 180. The connection spring portion 170 is provided apart from the substrate 110. The connection spring portion 170 is configured to be deformable in the Z-axis direction according to the displacement of the movable portion 182 in the Z-axis direction. The connection spring portion 170 transmits the vibration in the Y-axis direction of the movable drive electrode 152 of the drive portion 150 to the movable portion 182 of the detection portion 180. Thereby, the movable portion 182 can vibrate in the Y-axis direction.

  The detection unit 180 detects an angular velocity. The detection unit 180 includes, for example, a movable unit 182 and a fixed detection electrode 186.

  The movable portion 182 vibrates in the Y axis direction by the vibration of the drive portion 150, and is displaced in the Z axis direction according to the angular velocity. The movable portion 182 is provided apart from the substrate 110. The movable portion 182 is a portion where the four corners are supported by the detection spring portion 160. That is, the detection spring portion 160 is connected to the four corners of the movable portion 182. The movable portion 182 includes movable drive monitor electrodes 188 and 189 in the form of teeth formed of a plurality of branches extending in the Y-axis direction from the main body. Further, the movable portion 182 has a movable detection electrode 184. The movable detection electrode 184 is a portion overlapping the fixed detection electrode 186 of the movable portion 182 in a plan view. In the illustrated example, the planar shape of the movable detection electrode 184 is rectangular. The movable detection electrode 184 vibrates in the Y-axis direction by the vibration of the drive unit 150, and is displaced in the Z-axis direction according to the angular velocity.

  The fixed detection electrode 186 is provided on the convex portion 115 of the substrate 110 so as to face the movable portion 182 of the movable body 10 and the movable detection electrode 184. That is, the fixed detection electrode 186 and the movable detection electrode 184 form a capacitance.

  The fixed detection electrode 186 is provided on a surface inclined along the Y-axis direction of the convex portion 115 opposed to the movable body 10. Therefore, the first virtual surface H1 parallel to the surface 186c facing the movable body 10 of the fixed detection electrode 186 intersects with the second virtual surface H2 parallel to the surface 110a of the substrate 110 joined to the movable body 10 doing. The intersection angle θ1 between the first virtual surface H1 and the second virtual surface H2 is 0.01 ° or more and 3.0 ° or less.

  This is because, when the movable body 10 is formed by Bosch process processing, the cross-sectional (YZ plane) shape of the movable body 10 is an ideal right angle due to processing variation depending on the density distribution of reactive plasma gas. The rectangular shape having a shape is shifted to a parallelogram shape. Therefore, when the physical quantity of the physical quantity sensor 1 is detected, unnecessary vibration occurs in the movable body 10, and the variation of the detection characteristic becomes large.

  That is, the third virtual surface H3 including the side surface 160d of the detection spring portion 160 intersecting the vibration direction is formed to intersect with the normal L1 of the second virtual surface H2 by the Bosch process processing. Furthermore, the cross section (YZ plane) of the detection spring portion 160 as an elastic beam of the movable body 10 is processed into a parallelogram having a side surface 160d of the detection spring portion 160 inclined along the Z-axis direction.

  Generally, the crossing angle θ2 between the normal line L1 of the second virtual surface H2 and the third virtual surface H3 generated by Bosch process processing is 0.01 ° or more and 3.0 ° or less. Therefore, if the fixed detection electrode 186 can be provided on a surface inclined along the Y-axis direction and the first virtual surface H1 of the fixed detection electrode 186 can intersect with the second virtual surface H2 (crossing angle θ1 is 0.01 ° The vibration direction of the movable body 10 and the surface 186 c of the fixed detection electrode 186 facing the movable body 10 can be made approximately parallel, and the fixed detection electrode 186 and the movable detection at the time of driving can be made parallel. The capacitance value with the electrode 184 can be kept substantially constant. Therefore, detection characteristic variation due to unnecessary vibration can be reduced at the time of physical quantity detection of the physical quantity sensor 1, and a decrease in detection accuracy can be reduced.

  Preferably, the first virtual surface H1 and the third virtual surface H3 are orthogonal to each other. That is, the intersection angle θ1 and the intersection angle θ2 become more parallel to the vibration direction of the movable body 10 vibrating the surface 186c of the fixed detection electrode 186 facing the movable body 10, thereby further reducing the decrease in detection accuracy. be able to. Note that the intersection angle between the first virtual surface H1 and the third virtual surface H3 includes 90 ° ± 0.01 ° (89.99 ° or more and 90.01 ° or less).

  A plurality of detection units 180 are provided. In the illustrated example, two detection units 180 are provided (a first detection unit 180a and a second detection unit 180b). The first detection unit 180a is provided, for example, on the -Y-axis direction side of the second detection unit 180b.

  The movable portion 182 (first movable portion 182a) of the first detection unit 180a vibrates by the drive of the first drive unit 150a. The fixed detection electrode 186 (first fixed detection electrode 186a) of the first detection unit 180a is opposed to the movable detection electrode 184 (first movable detection electrode 184a) of the first detection unit 180a. The movable portion 182 (second movable portion 182b) of the second detection unit 180b vibrates by the drive of the second drive unit 150b. The fixed detection electrode 186 (second fixed detection electrode 186b) of the second detection unit 180b is opposed to the movable detection electrode 184 (second movable detection electrode 184b) of the second detection unit 180b.

  The first movable portion 182 a and the second movable portion 182 b are connected by, for example, a detection spring portion 160.

  The first movable portion 182a and the second movable portion 182b vibrate in opposite phase (opposite phase). That is, for example, when the first movable portion 182a is displaced to the + X axis direction side, the second movable portion 182b is displaced to the −X axis direction side.

  The first movable portion 182a and the second movable portion 182b have the same size and the same shape. The movable body 10 may have a shape which is symmetrical with respect to a virtual straight line α which passes through the center C of the movable body 10 and is parallel to the X axis in plan view. The movable body 10 may have a shape which is symmetrical with respect to a virtual straight line β which passes through the center C of the movable body 10 and is parallel to the Y axis in a plan view.

  The first movable portion 182a has two movable drive monitor electrodes 188a and two movable drive monitor electrodes 189a, and a plurality of branches constituting each movable drive monitor electrode 188a are from the main body -Y A plurality of branches extending in the axial direction and constituting each movable drive monitor electrode 189a extend in the + Y axis direction from the main body. Similarly, the second movable portion 182b has two movable drive monitor electrodes 188b and two movable drive monitor electrodes 189b, and a plurality of branches constituting each movable drive monitor electrode 188b is a main body portion. The plurality of branches extending in the + Y-axis direction from each of the movable drive monitor electrodes 189b extend in the −Y-axis direction from the main body.

  The fixed drive monitor electrodes 190 and 192 are fixed to the substrate 110. The fixed drive monitor electrodes 190 and 192 are bonded to post portions (not shown) of the substrate 110 by anodic bonding, for example. The fixed drive monitor electrode 190 is provided to face each branch of the movable drive monitor electrode 188 of the movable portion 182, and the fixed drive monitor electrode 192 is opposed to each branch of the movable drive monitor electrode 189 of the movable portion 182. Is provided. That is, the fixed drive monitor electrode 190 and the movable drive monitor electrode 188 form a capacitance, and the fixed drive monitor electrode 192 and the movable drive monitor electrode 189 form a capacitance. More specifically, two fixed drive monitor electrodes 190 are provided on the -Y axis direction side of the two movable drive monitor electrodes 188a of the first movable portion 182a, and the two movable drive monitor electrodes 188b of the second movable portion 182b. Two fixed drive monitor electrodes 190 are provided on the + Y axis direction side. Further, two fixed drive monitor electrodes 192 are provided on the + Y axis direction side of the two movable drive monitor electrodes 189a of the first movable portion 182a, and the -Y axis direction of the two movable drive monitor electrodes 189b of the second movable portion 182b. Two fixed drive monitor electrodes 192 are provided on the side. The fixed drive monitor electrodes 190, 192 have, for example, a tooth shape corresponding to the movable drive monitor electrodes 188, 189.

  The fixed portion 130, the spring portions 140, 160, and 170, the movable drive electrode 152, and the movable portion 182 of the movable body 10 are integrally provided. The material of the fixed portion 130, the spring portions 140, 160, and 170, the drive portion 150, and the movable portion 182 is, for example, silicon to which conductivity is imparted by doping an impurity such as phosphorus or boron. The material of the fixed detection electrode 186 is, for example, aluminum, gold, platinum, ITO (Indium Tin Oxide). By using a transparent electrode material such as ITO as the fixed detection electrode 186, foreign matter and the like present on the fixed detection electrode 186 can be easily visually recognized from the lower surface side of the substrate 110.

Next, the operation of the movable body 10 will be described.
When a voltage is applied between the movable drive electrode 152 and the fixed drive electrodes 154 and 156 by a power supply (not shown), an electrostatic force can be generated between the movable drive electrode 152 and the fixed drive electrodes 154 and 156. Thus, the drive unit 150 can vibrate the movable unit 182 in the Y-axis direction.

  As shown in FIG. 1, in the first drive unit 150 a, the fixed drive electrode 154 is provided on the + Y axis direction side of the movable drive electrode 152, and the fixed drive electrode 156 is the −Y axis direction side of the movable drive electrode 152. Provided in In the second drive unit 150 b, the fixed drive electrode 154 is provided on the −Y-axis direction side of the movable drive electrode 152, and the fixed drive electrode 156 is provided on the + Y-axis direction side of the movable drive electrode 152. Therefore, the first alternating voltage is applied between the movable drive electrode 152 and the fixed drive electrode 154, and the second alternating voltage is 180 degrees out of phase with the first alternating voltage between the movable drive electrode 152 and the fixed drive electrode 156. By applying a voltage, the first movable portion 182a and the second movable portion 182b can be vibrated (tuning fork type vibration) in the Y axis direction in opposite phase (opposite phase) with each other and at a predetermined frequency. More specifically, a first bias is applied by applying a constant bias voltage to the movable drive electrode 152 and applying AC voltages of a predetermined frequency that are 180 degrees out of phase with each other to the fixed drive electrodes 154 and 156. The portion 182a and the second movable portion 182b vibrate in the Y-axis direction at a predetermined frequency and in opposite phase to each other.

  When the movable parts 182a and 182b perform the above-mentioned vibration, the movable parts 182a and 182b are displaced in opposite directions in the Y-axis direction, so that the distance between the fixed drive monitor electrode 190 and the movable drive monitor electrode 188a changes. The distance between the fixed drive monitor electrode 192 and the movable drive monitor electrode 189a changes. Therefore, the capacitance between the fixed drive monitor electrode 190 and the movable drive monitor electrode 188a changes, and the capacitance between the fixed drive monitor electrode 192 and the movable drive monitor electrode 189a changes. These changes in capacitance are in the opposite direction, and as one capacitance increases, the other capacitance decreases.

  Further, when an angular velocity ωx around the X axis is applied to the movable body 10 in a state where the movable parts 182a and 182b are performing the above-mentioned vibration, Coriolis force is exerted, and the first movable part 182a and the second movable part 182b Are displaced in mutually opposite directions in the Z-axis direction. The movable portions 182a and 182b repeat this operation (detected vibration) while receiving the Coriolis force.

  The distance between the movable detection electrodes 184a and 184b and the fixed detection electrodes 186a and 186b changes as the movable parts 182a and 182b are displaced in the Z-axis direction according to the Coriolis force. Therefore, the capacitance between the movable detection electrodes 184a and 184b and the fixed detection electrodes 186a and 186b changes. By detecting the amount of change in capacitance between the movable detection electrodes 184a and 184b and the fixed detection electrodes 186a and 186b, the angular velocity ωx around the X axis can be obtained.

  In the movable body 10, the first movable portion 182a and the second movable portion 182b vibrate in opposite phase. Therefore, in the movable body 10, even if a physical quantity such as acceleration other than the angular velocity is applied, for example, the acceleration component can be offset by differential detection, and the angular velocity can be detected more accurately.

  Although the mode (electrostatic drive system) in which the movable section 182 is vibrated by electrostatic force has been described above, the method of driving the movable section 182 is not particularly limited, and a piezoelectric drive system or Lorentz force of a magnetic field may be used. The electromagnetic drive system etc. which were utilized can be applied.

As described above, the physical quantity sensor 1 according to the first embodiment has the following features.
In the case of the substrate 110 in which the vibration direction of the movable body 10 is joined to the movable body 10 by unnecessary vibration at the time of detecting the physical quantity of the physical quantity sensor 1 when the cross-sectional shape of the movable It deviates in the direction intersecting with the second virtual plane H2 parallel to the plane 110a. Therefore, a first virtual surface H1 parallel to the surface 186c facing the movable body 10 of the fixed detection electrode 186 as the detection electrode is a second virtual parallel to the surface 110a of the substrate 110 joined to the movable body 10 By intersecting with the surface H2, the surface 186c of the fixed detection electrode 186 facing the movable body 10 becomes parallel to the vibrating direction of the movable body 10 vibrating. Therefore, detection characteristic variation due to unnecessary vibration can be reduced at the time of physical quantity detection of the physical quantity sensor 1, and a decrease in detection accuracy can be reduced.

  In addition, a method of the second virtual surface H2 in which the third virtual surface H3 including the side surface 160d of the detection spring portion 160 as an elastic beam intersecting the vibration direction is parallel to the surface 110a of the substrate 110 joined to the movable body 10 Since it intersects with the line L1, the surface 186c of the fixed detection electrode 186 facing the movable body 10 is parallel to the vibration direction of the movable body 10 vibrating. Therefore, detection characteristic variation due to unnecessary vibration at the time of physical quantity detection of the physical quantity sensor 1 can be reduced, and a decrease in detection accuracy can be reduced.

  Further, by making the first virtual surface H1 orthogonal to the third virtual surface H3, the surface 186c of the fixed detection electrode 186 facing the movable body 10 is made more parallel to the vibration direction of the movable body 10 vibrating. be able to. Therefore, the detection characteristic variation due to unnecessary vibration at the time of physical quantity detection of the physical quantity sensor 1 is further reduced, and the decrease in detection accuracy can be further reduced.

  In addition, an intersection angle θ1 between the first virtual surface H1 and the second virtual surface H2 and an intersection angle θ2 between the normal line L1 of the second virtual surface H2 and the third virtual surface H3 are 0.01 ° or more. By setting the angle to 0 ° or less, the surface 186 c of the fixed detection electrode 186 facing the movable body 10 and the vibration direction of the movable body 10 vibrating can be made approximately parallel. Therefore, detection characteristic variation due to unnecessary vibration at the time of physical quantity detection of the physical quantity sensor 1 can be reduced, and a decrease in detection accuracy can be reduced.

[Method of manufacturing physical quantity sensor]
Although an example of a manufacturing method of physical quantity sensor 1 concerning this embodiment is explained below with reference to Drawing 5-Drawing 7F, this embodiment is not limited to these.
FIG. 5 is a flowchart showing the method of manufacturing the physical quantity sensor shown in FIG. 1 in the order of steps. FIG. 6 is a flowchart showing the substrate processing process in order of processes. 7A to 7F are cross-sectional views for explaining the method of manufacturing the physical quantity sensor. 7A to 7F correspond to the position of the portion C in FIG.

  As shown in FIG. 5, the method of manufacturing the physical quantity sensor 1 includes the steps of: (1) processing the substrate 110 (step S1), (2) forming the detection electrode (step S2), and (3) movable body And [4] a step of bonding the lid 120 to the substrate 110 (step S4). The respective steps will be sequentially described below.

  In addition, below, the case where the board | substrate 110 is comprised with the glass material containing an alkali metal ion, the movable body 10 is comprised with a silicon material, and the cover body 120 is comprised with a silicon material is demonstrated to an example.

[1] Step of Processing Substrate 110 (Step S1)
First, a flat base material is patterned by photolithography and etching to form a substrate 110 having a concave portion 112, a post portion 114 as an anchor, and a convex portion 115 as shown in FIG. 7A.
This process will be described in detail with reference to FIG.

  As shown in FIG. 6, in the step of processing the substrate 110 (step S1), the step of forming the convex portion 115 on the [1-1] substrate 110 (step S11) and the [1-2] opening 118 are formed. (Step S12), and [1-3] a step of forming the inclined surface 115b (step S13). The respective steps will be sequentially described below.

[1-1] Step of Forming Convex Portions 115 on Substrate 110 (Step S11)
First, the substrate 110 is subjected to photolithography and etching to form the concave portion 112, the post portion 114, and the convex portion 115. Thereafter, photolithography and etching are performed again to form the convex portion 115 at a desired height as shown in FIG. 7A.

[1-2] Step of Forming Opening 118 (Step S12)
Next, as shown in FIG. 7B, a metal mask 116 is formed by photolithography and etching in a region other than the upper surface 115 a of the convex portion 115. After that, as shown in FIG. 7C, a mask 117 made of a resist or the like having an opening 118 where the end of the upper surface 115a of the protrusion 115 is exposed is formed by photolithography. At this time, wet etching using hydrofluoric acid (HF) was used for the etching. When the substrate 110 is a glass material, it can be etched well. Further, a chromium (Cr) thin film was used as the metal mask 116. Chromium has good adhesion to the glass material and can block the entry of hydrofluoric acid. In this manner, the selectivity to the resist can be enhanced, and the shape described below can be formed.

[1-3] Step of Forming Slanted Surface 115b (Step S13)
Next, etching is performed, and the convex portion 115 is etched from the opening 118. At the start of etching, the opening 118 region of the convex portion 115 is etched, but the adhesion between the mask 117 and the convex portion 115 is low as the etching progresses, so that the etching solution is used to form the mask 117 and the convex portion 115. Immersed in between, and as shown in FIG. 7D, an inclined surface 115 b is gradually formed from the opening 118 side of the convex portion 115. Thereafter, etching is performed for a desired time to form an inclined surface 115 b extending from the side where the opening 118 of the convex portion 115 is formed to the opposite side, as shown in FIG. 7E. Thereafter, by removing the mask 117 and the metal mask 116, as shown in FIG. 7F, the substrate 110 having the inclined surface 115b in the convex portion 115 is completed.

[2] Step of Forming Detection Electrode (Fixed Detection Electrode 186) (Step S2)
Next, photolithography and etching are performed to form a fixed detection electrode 186 as a detection electrode on the inclined surface 115 b of the convex portion 115. At the same time, a wire (not shown) is also formed.

[3] Step of Forming Movable Body 10 (Step S3)
Next, the fixed portion 130, the drive spring portion 140, the drive portion 150, the detection spring portion 160 as an elastic beam, the connection spring portion 170, the movable portion 182, and the fixed drive monitor electrodes 190 and 192 The movable body 10 is formed.

  Specifically, first, a plate-like element substrate is prepared, and the element substrate is bonded onto the substrate 110 by, for example, an anodic bonding method. Next, the element substrate is thinned by polishing, for example, and then the movable element 10 is formed by patterning the thinned element substrate by photolithography and etching. In the present embodiment, a Bosch process (Bosch) method, which is a combination of an etching process using a reactive plasma gas and a deposition process, is preferably used as the etching of the element substrate. Note that thinning of the element substrate may be omitted as appropriate.

Here, in the present embodiment, as described above, the element substrate is processed by the etching process using the reactive plasma gas. In the processing of the element substrate by reactive plasma gas, the etching gas is introduced into the chamber in which the element substrate is disposed to generate reactive plasma, but reactive plasma has a density distribution concentric to the element substrate. The incident angle differs depending on the position of the element substrate. Therefore, distribution occurs in the vertical processing accuracy in the element substrate. As a result, the obtained movable body 10 has a processing error due to the reactive plasma gas.
In the present embodiment, the processing error due to the reactive plasma gas is taken as an example, but the processing error or the like may be generated by other methods.

  In the movable body 10 obtained through the above-described steps as described above, a processing error or the like occurs to some extent. In the present embodiment, the cross-section (YZ plane) shape of the detection spring portion 160 obtained through the above-described steps is essentially a parallelogram as shown in FIG. 4 although the cross-sectional shape is ideally rectangular. I Therefore, the vibration direction of the movable body 10 is not a Y-axis direction parallel to the surface 110 a of the substrate 110 but a direction orthogonal to the side surface 160 d of the detection spring portion 160. Therefore, by forming the fixed detection electrode 186 in the convex portion 115 having the inclined surface 115 b, the surface 186 c of the fixed detection electrode 186 facing the movable body 10 is parallel to the vibration direction of the movable body 10 vibrating. As a result, variations in detection characteristics due to unnecessary vibrations can be reduced at the time of physical quantity detection of the physical quantity sensor 1, and a decrease in detection accuracy can be reduced.

[4] Step of Bonding Lid 120 to Substrate 110 (Step S4)
Next, the lid 120 having a recess is bonded to the surface 110 a of the substrate 110. Thus, the cavity 102 for housing the movable body 10 is formed by the concave portion 112 of the substrate 110 and the concave portion of the lid 120, whereby the physical quantity sensor 1 shown in FIG. 2 can be obtained.

  Moreover, when manufacturing several physical quantity sensors 1, you may provide the process of separating into pieces after a cover joining process (step S4).

  In the example of the method of manufacturing the physical quantity sensor 1 of the present invention described above, as described above, in the step (S1) of processing the substrate 110, the step (S11) of forming the convex portion 115; And forming the opening 118 in a part of the mask 117 on the projection 115 (S12), and etching the projection 115 exposed from the opening 118 to form the projection 117 with the mask 117. And (e) forming an inclined surface 115b on the convex portion 115 by gradually etching the area between the two.

  Therefore, the cross-sectional shape of the movable body 10 is processed to deviate from the ideal right-angled shape, and the surface of the substrate 110 in which the vibration direction of the movable body 10 is joined to the movable body 10 due to unnecessary vibration when detecting the physical quantity of the physical quantity sensor 1 Even when shifted in the direction intersecting with the second virtual plane H2 parallel to 110a, the convex portion 115 provided with the fixed detection electrode 186 is inclined, so it faces the movable body 10 of the fixed detection electrode 186. The face 186 c is parallel to the vibration direction of the movable body 10 vibrating. Therefore, it is possible to manufacture the physical quantity sensor 1 capable of reducing the detection characteristic variation due to unnecessary vibration at the time of physical quantity detection and reducing the decrease in detection accuracy.

Second Embodiment
Physical quantity sensor
Next, a physical quantity sensor 1a according to a second embodiment of the present invention will be described with reference to FIG. FIG. 8 is a cross-sectional view showing a schematic configuration of the physical quantity sensor according to the second embodiment.

  The physical quantity sensor 1a according to the present embodiment is the same as the physical quantity sensor 1 according to the first embodiment described above, except that the configuration of the substrate 110 is mainly different.

  In the following description, the physical quantity sensor 1a of the second embodiment will be described focusing on differences from the above-described embodiment, and the description of the same matters will be omitted. Further, in FIG. 8, the same components as those in the embodiment described above are denoted by the same reference numerals.

  The physical quantity sensor 1a according to the second embodiment, as shown in FIG. 8, is provided with a stopper 119 which protrudes toward the movable body 10 with the fixed detection electrode 186 provided on the convex portion 115 of the substrate 110. . The stopper 119 is provided to be opposed to the movable portion 182 of the movable body 10, and is in contact with the movable body 10 when an excessive physical quantity is applied or when an impact from a direction crossing the vibration direction is applied. Thus, the amount of displacement of the movable body 10 can be limited, and breakage of the movable body 10 can be prevented.

  Further, since the stopper 119 is at the same potential as the movable portion 182 of the movable body 10, the electrostatic force acting between the stopper 119 and the movable portion 182 is suppressed to prevent the movable portion 182 from sticking to the stopper 119. be able to.

  As described above, the physical quantity sensor 1a according to the second embodiment can provide the same effect as the first embodiment described above while preventing the movable body 10 from being damaged by providing the stopper 119.

[Complex sensor]
Next, a composite sensor 300 to which the physical quantity sensor 1 according to an embodiment of the present invention is applied will be described with reference to FIG.
FIG. 9 is a functional block diagram showing a schematic configuration of the composite sensor.

  A compound sensor 300 shown in FIG. 9 includes, for example, a triaxial angular velocity sensor and a triaxial acceleration sensor for detecting the posture and behavior (inertial momentum) of a moving body (mounted device) such as a car or robot. It functions as a so-called 6-axis motion sensor.

  As shown in FIG. 9, the compound sensor 300 includes three angular velocity sensors 320x, 320y and 320z capable of detecting an angular velocity in one axis, and an acceleration sensor 350 capable of detecting an acceleration in three axes. The angular velocity sensors 320x, 320y, and 320z are not particularly limited, and the above-described physical quantity sensors 1 and 1a using Coriolis force can be used. The angular velocity sensors 320x, 320y, and 320z are sensors in which the decrease in detection accuracy is reduced as in the above-described embodiments, and stable and highly accurate angular velocity detection is possible. The acceleration sensor 350 may also include independent sensors to measure acceleration in the directions of three axes.

  According to such a compound sensor 300, the compound sensor is easily obtained by the angular velocity sensors 320x, 320y and 320z to which the physical quantity sensors 1 and 1a according to the above embodiments are applied, and the acceleration sensor 350 capable of detecting three axes of acceleration. 300 can be configured, for example, angular velocity data and acceleration data can be easily obtained.

[Inertial Measurement Unit]
Next, an inertial measurement unit (IMU) 2000 to which the physical quantity sensor 1 according to an embodiment of the present invention is applied will be described with reference to FIG. 10 and FIG. FIG. 10 is an exploded perspective view showing a schematic configuration of the inertial measurement unit. FIG. 11 is a perspective view showing an arrangement example of an inertial sensor element of the inertial measurement unit.

  An inertial measurement unit 2000 (IMU: Inertial Measurement Unit) shown in FIG. 10 is a device for detecting the posture or behavior (inertial momentum) of a moving object (mounted device) such as a car or a robot. The inertial measurement unit 2000 functions as a so-called six-axis motion sensor provided with a three-axis acceleration sensor and a three-axis angular velocity sensor.

  The inertial measurement unit 2000 is a rectangular solid having a substantially square planar shape. Further, screw holes 2110 as fixing portions are formed in the vicinity of two apexes located in the diagonal direction of the square. The inertial measurement unit 2000 can be fixed to the mounting surface of a mounting object such as a car by passing two screws through the two screw holes 2110. In addition, it is also possible to miniaturize to a size that can be mounted on, for example, a smartphone or a digital camera, by selecting parts or changing the design.

  Inertial measurement unit 2000 has an outer case 2100, a bonding member 2200, and a sensor module 2300. Inside of outer case 2100, a bonding member 2200 is interposed, and sensor module 2300 is inserted. There is. The sensor module 2300 also includes an inner case 2310 and a substrate 2320.

  The outer shape of the outer case 2100 is a rectangular solid having a substantially square planar shape, similar to the overall shape of the inertial measurement unit 2000, and screw holes 2110 are formed in the vicinity of two apexes located in the diagonal direction of the square. There is. The outer case 2100 is box-shaped, and the sensor module 2300 is housed inside.

  The inner case 2310 is a member that supports the substrate 2320 and has a shape that fits inside the outer case 2100. Further, in the inner case 2310, a recess 2311 for preventing contact with the substrate 2320 and an opening 2312 for exposing a connector 2330 described later are formed. Such an inner case 2310 is joined to the outer case 2100 via a joining member 2200 (for example, a packing impregnated with an adhesive). In addition, a substrate 2320 is bonded to the lower surface of the inner case 2310 via an adhesive.

  As shown in FIG. 11, on the upper surface of the substrate 2320, a connector 2330, an angular velocity sensor 2340z for detecting an angular velocity around the Z axis, an acceleration sensor 2350 for detecting acceleration in each axial direction of X, Y and Z axes, etc. Has been implemented. Further, on the side surface of the substrate 2320, an angular velocity sensor 2340x for detecting an angular velocity around the X axis and an angular velocity sensor 2340y for detecting an angular velocity around the Y axis are mounted. The angular velocity sensors 2340z, 2340x, and 2340y are not particularly limited. For example, vibration gyro sensors that use Coriolis force such as the physical quantity sensor 1 described above can be used. Further, the acceleration sensor 2350 is not particularly limited, and, for example, a capacitive acceleration sensor can be used.

  In addition, on the lower surface of the substrate 2320, a control IC 2360 as a control unit is mounted. The control IC 2360 is an MCU (Micro Controller Unit), incorporates a storage unit including a non-volatile memory, an A / D converter, and the like, and controls each unit of the inertial measurement unit 2000. The storage unit stores a program that defines the order and content for detecting acceleration and angular velocity, a program that digitizes detection data and incorporates it into packet data, and accompanying data. A plurality of other electronic components are mounted on the substrate 2320.

  The inertial measurement unit 2000 has been described above. Such an inertial measurement unit 2000 includes angular velocity sensors 2340z, 2340x, 2340y and an acceleration sensor 2350 as the physical quantity sensor 1, and a control IC 2360 (control unit) for controlling driving of the respective sensors 2340z, 2340x, 2340y, 2350. Contains. Thereby, the effect of the physical quantity sensor 1 described above can be obtained, and a highly reliable inertial measurement unit 2000 can be obtained.

[Portable Electronics]
Next, a portable electronic device to which the physical quantity sensor 1 according to an embodiment of the present invention is applied will be described with reference to FIGS. 12 and 13. FIG. 12 is a plan view schematically showing the configuration of the portable electronic device. FIG. 13 is a functional block diagram showing a schematic configuration of the portable electronic device.
Hereinafter, as an example of the portable electronic device, a wrist device 1000 which is a wristwatch type activity meter (active tracker) will be described.

  As shown in FIG. 12, the wrist device 1000 is attached to a site (subject) such as a user's wrist by bands 1032 and 1037, etc., and has a display unit 250 for digital display and is capable of wireless communication. The physical quantity sensor 1 according to the present invention described above is incorporated in the wrist device 1000 as a sensor that measures an angular velocity.

  The wrist device 1000 is housed in a case 1030 in which at least the physical quantity sensor 1 is housed, and a processing unit 200 (see FIG. 13) which is housed in the case 1030 and processes output data from the physical quantity sensor 1. And a translucent cover 1071 closing the opening of the case 1030. A bezel 1078 is provided on the outside of the case 1030 of the translucent cover 1071 of the case 1030. On the side surface of the case 1030, a plurality of operation buttons 1080 and 1081 are provided. Hereinafter, further detailed description will be made with reference to FIG. 13 as well.

  The acceleration sensor 213 detects accelerations in directions of three axes intersecting (ideally orthogonal) with each other, and outputs a signal (acceleration signal) according to the magnitude and direction of the detected three-axis acceleration. Further, an angular velocity sensor 214 as the physical quantity sensor 1 detects angular velocities in the directions of three axes intersecting (ideally orthogonal) with each other, and signals (angular velocity according to the detected magnitude and direction of the detected three axial angular velocities Output signal).

  The liquid crystal display (LCD) constituting the display unit 250 uses, for example, positional information using the GPS sensor 210 or the geomagnetic sensor 211, and the angular velocity sensor 214 included in the movement amount or physical quantity sensor 1 according to various detection modes. The exercise information such as the exercise amount, the biological information such as the pulse rate using the pulse sensor 215, or the time information such as the current time is displayed. In addition, the environmental temperature using the temperature sensor 216 can also be displayed.

  The communication unit 270 performs various controls for establishing communication between the user terminal and an information terminal (not shown). The communication unit 270 is, for example, Bluetooth (registered trademark) (BTLE: including Bluetooth Low Energy), Wi-Fi (registered trademark) (Wireless Fidelity), Zigbee (registered trademark), NFC (Near field communication), ANT + (registered trademark) A transceiver or communication unit 270 compatible with a short distance wireless communication standard such as a trademark is configured to include a connector compatible with a communication bus standard such as USB (Universal Serial Bus).

  The processing unit 200 (processor) is configured of, for example, a micro processing unit (MPU), a digital signal processor (DSP), an application specific integrated circuit (ASIC) or the like. The processing unit 200 executes various processes based on the program stored in the storage unit 240 and the signals input from the operation unit 220 (for example, operation buttons 1080 and 1081). The processing by the processing unit 200 includes data processing for each output signal of the GPS sensor 210, the geomagnetic sensor 211, the pressure sensor 212, the acceleration sensor 213, the angular velocity sensor 214, the pulse sensor 215, the temperature sensor 216, and the clock unit 230, and the display unit 250. Display processing for displaying an image on the screen, sound output processing for outputting sound to the sound output unit 260, communication processing for communicating with an information terminal via the communication unit 270, power control processing for supplying power from the battery 280 to each unit, etc. Is included.

Such a wrist device 1000 can have at least the following functions.
1. Distance: Measure the total distance from the start of measurement by high precision GPS function.
2. Pace: Displays the current running pace from the pace distance measurement.
3. Average Speed: Calculates and displays the average speed from the start of driving to the present.
4. Elevation: Measure and display elevation by GPS function.
5. Stride: Measures and displays stride even in a tunnel where GPS radio waves do not reach.
6. Pitch: Measure and display the number of steps per minute.
7. Heart rate: The heart rate is measured and displayed by the pulse sensor.
8. Slope: Measures and displays the slope of the ground during training and trail runs in mountainous areas.
9. Auto lap: Automatic lap measurement is performed when running a certain distance or certain time set in advance.
10. Exercise calories burned: Display calories burned.
11. Number of steps: Display the total number of steps from the start of exercise.

  Note that the wrist device 1000 can be widely applied to a running watch, a runner's watch, a runner's watch compatible with multi sports such as a duathlon or a triathlon, an outdoor watch, and a satellite positioning system, for example, a GPS watch equipped with GPS.

  Also, although the above description has been made using the GPS (Global Positioning System) as a satellite positioning system, another Global Navigation Satellite System (GNSS) may be used. For example, one or more satellite positioning systems such as EGNOS (European Geostationary Satellite Navigation Overlay Service), QZSS (Quasi Zenith Satellite System), GLONASS (GLO Bal NAvigation Satellite System), GALILEO, BeiDou (BeiDou Navigation Satellite System), etc. You may use it. In addition, at least one of the satellite positioning systems may use a satellite based augmentation system (SBAS) such as Wide Area Augmentation System (WAAS) or European Geostationary Navigation Overlay Service (EGNOS). .

  Such a portable electronic device includes the physical quantity sensor 1 and the processing unit 200, and thus has excellent reliability.

[Electronics]
Next, an electronic device to which the physical quantity sensor 1 according to the embodiment of the present invention is applied will be described with reference to FIGS. 14 to 16.

  First, with reference to FIG. 14, a mobile personal computer 1100, which is an example of an electronic device, will be described. FIG. 14 is a perspective view schematically showing a configuration of a mobile personal computer which is an example of the electronic apparatus.

  In this figure, the personal computer 1100 comprises a main unit 1104 having a keyboard 1102 and a display unit 1106 having a display unit 1108. The display unit 1106 is rotated relative to the main unit 1104 via a hinge structure. It is supported movably. A physical quantity sensor 1 functioning as an angular velocity sensor is built in such a personal computer 1100, and based on detection data of the physical quantity sensor 1, the control unit 1110 can perform control such as attitude control.

  FIG. 15 is a perspective view schematically showing a configuration of a smartphone (portable telephone) as an example of the electronic device.

  In this figure, the smartphone 1200 incorporates the physical quantity sensor 1 described above. Detection data (angular velocity data) detected by the physical quantity sensor 1 is transmitted to the control unit 1201 of the smartphone 1200. The control unit 1201 includes a CPU (Central Processing Unit), recognizes the posture and behavior of the smartphone 1200 from the received detection data, and changes the display image displayed on the display unit 1208. Sound a warning sound or sound effect, or drive a vibration motor to vibrate the main unit. In other words, motion sensing of the smartphone 1200 can be performed, and the display content can be changed, sound, vibration, or the like can be generated from the measured attitude or behavior. In particular, when executing a game application, it is possible to experience a realistic feeling close to reality.

  FIG. 16 is a perspective view showing a configuration of a digital still camera as an example of the electronic device. Note that in this figure, the connection to an external device is also shown in a simplified manner.

  A display unit 1310 is provided on the back of the case (body) 1302 of the digital still camera 1300, and is configured to perform display based on an imaging signal by a CCD, and the display unit 1310 displays an object as an electronic image. It also functions as a finder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the rear side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit 1310 and depresses the shutter button 1306, an imaging signal of the CCD at that time is transferred and stored in the memory 1308. In the digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side of the case 1302. As shown, a television monitor 1430 is connected to the video signal output terminal 1312, and a personal computer 1440 is connected to the data communication input / output terminal 1314 as necessary. Furthermore, the imaging signal stored in the memory 1308 is configured to be output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. The digital still camera 1300 incorporates the physical quantity sensor 1 functioning as an angular velocity sensor, and based on the detection data of the physical quantity sensor 1, the control unit 1316 can perform control such as camera shake correction.

  Such an electronic device includes the physical quantity sensor 1 and the control units 1110, 1201, and 1316, and thus has excellent reliability.

  Other than the personal computer 1100 shown in FIG. 14, the smart phone (mobile phone) 1200 shown in FIG. 15, and the digital still camera 1300 shown in FIG. Ejection device (for example, ink jet printer), laptop personal computer, television, video camera, video tape recorder, car navigation device, pager, electronic notebook (including communication function included), electronic dictionary, calculator, electronic game machine, word processor, Workstations, video phones, television monitors for crime prevention, electronic binoculars, POS terminals, medical equipment (eg electronic thermometers, sphygmomanometers, blood glucose meters, electrocardiogram measuring devices, ultrasound diagnostic devices, electronic endoscopes), fish finders, etc. Measuring machine , Instruments (eg, instruments of vehicles, aircraft, ships), flight simulators, seismometers, pedometers, inclinometers, vibrometers that measure the vibrations of hard disks, attitude control devices for flying objects such as robots and drone, vehicles The present invention can be applied to control devices and the like used in inertial navigation for autonomous driving.

[Mobile body]
Next, a mobile body to which the physical quantity sensor 1 according to one embodiment of the present invention is applied will be described with reference to FIG. FIG. 17 is a perspective view showing a configuration of a car which is an example of a moving body.

  As shown in FIG. 17, the physical quantity sensor 1 is built in an automobile 1500 as a moving body, and for example, the physical quantity sensor 1 can detect the posture of the vehicle body 1501. The detection signal of the physical quantity sensor 1 is supplied to a vehicle body posture control device 1502 as a posture control unit for controlling the posture of the vehicle body, and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal, and the detection result Depending on the situation, the hardness of the suspension can be controlled or the brakes of the individual wheels 1503 can be controlled. In addition, the physical quantity sensor 1 is also keyless entry, immobilizer, car navigation system, car air conditioner, antilock brake system (ABS), air bag, tire pressure monitoring system (TPMS: Indium Tire Pressure Monitoring System), The present invention can be widely applied to electronic control units (ECUs) such as engine control and battery monitors of hybrid vehicles and electric vehicles.

  In addition to the above examples, the physical quantity sensor 1 applied to a moving object may be, for example, attitude control such as a biped robot or a train, remote control such as a radio controlled airplane, a radio controlled helicopter, or a drone or autonomous type. Use in control of attitude control of flight vehicles, attitude control of agricultural machines (growing machines) or construction machines (building machines), control of rockets, artificial satellites, ships, AGVs (unmanned transport vehicles), biped and two-legged robots, etc. Can. As described above, the physical quantity sensor 1 and the respective control units (not shown) are incorporated to realize attitude control of various moving bodies.

  Such a moving body includes the physical quantity sensor 1 and the control unit (for example, the vehicle body posture control device 1502 as a posture control unit), and therefore has excellent reliability.

  The physical quantity sensors 1 and 1a, the composite sensor 300, the inertial measurement unit 2000, the portable electronic device (1000), the electronic device (1100, 1200, 1300), and the moving body (1500) are described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each part can be replaced with an arbitrary configuration having the same function. In addition, any other component may be added to the present invention.

  In the embodiment described above, the X axis, the Y axis, and the Z axis are orthogonal to each other, but the present invention is not limited to this as long as they intersect with each other. For example, the X axis is perpendicular to the YZ plane. The Y axis may be slightly inclined with respect to the normal direction of the XZ plane, or the Z axis may be slightly inclined with respect to the normal direction of the XY plane. Note that “slightly” means a range in which the physical quantity sensor 1, 1 a can exhibit the effect, and the specific inclination angle (numerical value) differs depending on the configuration or the like.

  1, 1a: physical quantity sensor, 10: movable body, 102: cavity, 110: substrate, 110a: surface, 112: concave portion, 112a: bottom surface, 114: post portion, 115: convex portion, 115a: upper surface, 115b: inclined Surface: 116: metal mask, 117: mask, 118: opening, 119: stopper, 120: lid, 130: fixing portion, 130a: first fixing portion, 130b: second fixing portion, 130c: third fixing portion 140: drive spring portion 150: drive portion 152: movable drive electrode 154, 156: fixed drive electrode 160: detection spring portion 160d: lateral surface 162: extension portion 170: connection spring portion 180: Detection part, 182 ... movable part, 184 ... movable detection electrode, 186 ... fixed detection electrode, 186c ... surface, 188, 188a, 188b ... movable drive monitor electrode, 189 ... movable Dynamic monitor electrode, 190, 192 ... fixed drive monitor electrode, 300 ... composite sensor, 1000 ... list device, 1100 ... personal computer, 1200 ... smart phone, 1300 ... digital still camera, 1500 ... automobile, 2000 ... inertial measurement unit, H1 ... First virtual surface, H2: second virtual surface, H3: third virtual surface, L1: normal, θ1, θ2: intersection angle.

Claims (12)

A substrate provided with a detection electrode;
A movable body facing the detection electrode;
An elastic beam one of which is connected to an anchor provided on the substrate and the other one of which is connected to the movable body;
Including
Along the vibration direction of the movable body,
A first virtual surface parallel to a surface of the detection electrode facing the movable body intersects a second virtual surface parallel to the surface of the substrate joined to the movable body.
Physical quantity sensor. In claim 1,
The third virtual surface including the side surface of the elastic beam intersecting the vibration direction is
Intersects the normal to the second virtual surface,
Physical quantity sensor. In claim 2,
The first virtual plane is orthogonal to the third virtual plane,
Physical quantity sensor. In claim 2 or claim 3,
Let the crossing angle between the first virtual surface and the second virtual surface be θ1;
When the crossing angle between the normal line and the third virtual surface is θ2,
The θ1 is not less than 0.01 ° and not more than 3.0 °,
The θ2 is not less than 0.01 ° and not more than 3.0 °.
Physical quantity sensor. In any one of claims 1 to 4,
A stopper is provided on the substrate,
The stopper is at the same potential as the movable portion of the movable body.
Physical quantity sensor. In any one of claims 1 to 5,
The physical quantity sensor is an angular velocity sensor.
Physical quantity sensor. A physical quantity sensor according to claim 6,
An acceleration sensor,
Equipped with
Composite sensor. A physical quantity sensor according to claim 6,
An acceleration sensor,
A control unit that controls the physical quantity sensor and the acceleration sensor;
Equipped with
Inertial measurement unit. A physical quantity sensor according to any one of claims 1 to 5,
A case containing the physical quantity sensor;
A processing unit housed in the case and processing output data from the physical quantity sensor;
A display unit housed in the case;
A translucent cover closing the opening of the case;
Equipped with
Portable electronic devices. A physical quantity sensor according to any one of claims 1 to 5,
A control unit that performs control based on a detection signal output from the physical quantity sensor;
Equipped with
Electronics. A physical quantity sensor according to any one of claims 1 to 5,
An attitude control unit that controls an attitude based on a detection signal output from the physical quantity sensor;
Equipped with
Moving body. A process of processing a substrate;
Forming a detection electrode on the substrate;
Forming a movable body;
Bonding a lid to the substrate;
A method of manufacturing a physical quantity sensor including
The process of processing the substrate is
Forming a convex portion;
Covering the projection with a mask and forming an opening in a portion of the mask above the projection;
Forming an inclined surface on the convex portion by etching the convex portion exposed from the opening and gradually etching a region between the convex portion and the mask;
including,
Method of manufacturing physical quantity sensor.