JP2016191467A - Actuator device, humanoid type robot, and power assist device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a small actuator device which achieves high output and enables power control.SOLUTION: An actuator device 1000 includes: an electromagnetic coil member 110 which is provided over a predetermined width at an outer periphery of a cylinder 100; and a movable element 200 which may slide in the cylinder 100 as a piston. The movable element 200 has magnetic members 202 and is moved relative to the electromagnetic coil member 110 by excitation of the electromagnetic coil member 110. A fluid is supplied to a first chamber 106a and a second chamber 106b so as to drive the movable element 200 in the same direction when the movable element 200 is relatively moved by the excitation of the electromagnetic coil member 110.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an actuator device using electromagnetic force and fluid pressure, and a power assist device that supports a user's exercise using the actuator device.

  Linear actuators (linear motors) using electromagnetic force are known and applied in various fields (for example, see Patent Document 1).

  In addition, as a hybrid approach that combines different types of actuators, we have proposed actuators that combine rotary fluid motors, voice coil motors, ball screws, etc. with working fluid actuators such as McKibben pneumatic actuators, air cylinders, and vane motors. It has been studied (Non-Patent Documents 1 to 3).

  Furthermore, for example, in applications such as driving of intake and exhaust valves of an engine, there is a technique of using an air spring as an electromagnetic actuator. In this technique, an air spring is used instead of a mechanical spring used in an electromagnetic actuator (see Patent Document 2).

  However, the combination of the air spring and the electromagnetic actuator in this case is a technique based on the premise that the movable range is such that the valve can be opened and closed. The air spring is intended to reduce the impact by applying a repulsive force when the movable body reaches the stroke end.

  On the other hand, for example, in Japan and many other countries, an aging society with a declining birthrate has become a problem, and there is an increasing demand for assist devices that apply robotics technology. On the other hand, robots that can balance and walk have been developed. For example, there is a robot that can optimally distribute an action force necessary for movement to any plurality of contact points in space and generate torque of each joint in the same manner as a human (see Patent Document 3).

  In recent years, there has been an increasing demand for the development of robots that support rehabilitation such as exoskeleton-type robots that aim to support lower limb and trunk movements. For example, an exoskeleton type robot is used for a patient with spinal cord injury in rehabilitation that promotes a patient's independent life (see Patent Document 4).

  In Patent Document 4, a so-called “aeroelectric hybrid actuator” in which the driving force of the motor and the driving force of the air muscle are linked is used as a robot for performing the power assist of the user in such an application. Technology has been proposed.

  Further, as a robot manipulator, non-patent document 4 also discloses hybrid driving in which driving by a DC motor and air muscle are combined.

  On the other hand, as actuators for driving rotational motion, pneumatic actuators are individually arranged in parallel with electromagnetic actuators, and these are driven in cooperation, so that low heat generation and high torque, high speed response and high speed are achieved. There is also a proposal for a rotary actuator that achieves both accurate positioning controllability (see Patent Document 5).

  Furthermore, there is also a proposal for a piston engine that can be continuously rotated only by air pressure or a mixed gas of air and fuel (see Patent Document 6).

JP 2011-214624 A JP 2002-147209 A WO2007 / 139135 Publication JP 2012-045194 A JP 2010-196777 A US Pat. No. 6,868,822

James K. Mills, “Hybrid actuator for robot manipulators: design, control and performance,” Proc. Of ICRA1990, pp.1872-1878 (1990) H. Higo et al., “Dynamic Characteristic and Power Consumption on an Electro-Pneumatic Hybrid Positioning System,” Proc. Of the 6th JFPS International Symposium on Fluid Power, pp.363-368 (2005) Yoshioka et al., "Development of high-torque high-accuracy rotating mechanism using hybrid actuator", 7th Production Processing and Machine Tool Division Lecture, pp.207-208 (2008) I, Sardelliti, J. Park, D. Shin and O. Khatib, “Air Muscle Controller Design in the Distributed Macro-Mini (DM2-) Actuation Approach,” Proceedings of the 2007 IEEE / RSJ International Conference on Intelligent Robots and Systems San Diego, CA, USA, Oct 29-Nov 2, 2007, WeB 2.1 p.1822-1827

  However, in the general electromagnetic actuator as described above, it is necessary to increase the size of the actuator in order to increase the output.

  In the case of conventional hybrid actuators, two types of actuators are combined using links and gears, and the responsiveness and robustness are impaired by the mechanism used, making it difficult to reduce the size and weight, or the movable range. There are problems such as being limited.

  In addition, when using conventional electromagnetic actuators for applications such as exoskeleton robots, the reversibility of actuator movement is large, so conversely, static excitation such as gravity compensation also requires current excitation. Heat generation becomes a problem.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an actuator device capable of controlling force with a small size and high output.

  Another object of the present invention is to provide a power assist device using an actuator device that is compact and capable of force control with high output.

  According to one aspect of the present invention, an actuator device is an airtight container configured to be able to apply fluid pressure from the outside to the inside, and is housed in the airtight container, and slides in the airtight container according to the fluid pressure. A movable member including a movable member, a driving member for transmitting the driving force of the movable member to the outside of the hermetic container, and a first magnetic member provided outside the hermetic container along a movable path of the movable member. The child has a second magnetic member and moves relative to the first magnetic member by excitation of the first magnetic member or the second magnetic member. The hermetic container has a first inner surface in the hermetic container and one of the movable elements. A first chamber that is a space between the side surface and a second chamber that is a space between the second inner surface of the hermetic container and the other side surface of the mover, and the first chamber and the second chamber Each further comprising fluid pressure supply means for supplying fluid pressure, Body pressure supply unit controls the supply of fluid pressure to drive the movable element in the same direction when moved relative to the movable element by excitation of 1 magnetic member or the second magnetic member.

  Preferably, the hermetic container is a cylinder having a first end and a second end in the axial direction, and the first and second inner surfaces are cylinder inner surfaces of the first and second ends, respectively, and are movable. The child includes a piston that can slide in the cylinder, and the drive member transmits the reciprocating motion of the piston to the outside of the cylinder.

  Preferably, the first magnetic member is an electromagnetic coil member provided on the outer periphery of the cylinder, and the electromagnetic coil member is excited for the relative movement of the mover.

  Preferably, the electromagnetic coil member has a plurality of coils that are provided on the outer periphery of the cylinder over a predetermined width and are independently excited, and the second magnetic member includes a plurality of permanent magnets, and is interposed between the plurality of permanent magnets. Is provided with a soft magnetic material, and the permanent magnets are arranged so that their polarities are alternately reversed in the axial direction.

  Preferably, the apparatus further includes a control unit for controlling excitation of the fluid supply means and the plurality of coils, and the control unit is generated by electromagnetic force during a period until the force generated by the fluid pressure reaches a desired driving force. The force is controlled so as to supplement the generated force due to the fluid pressure.

  Preferably, the apparatus further includes a fluid supply means and a control unit that controls excitation of the plurality of coils, and the control unit controls the excitation of the coil so as to compensate for deviation from the control target after the steady state is reached. To do.

  Preferably, the fluid is a gas.

  Preferably the fluid is either water or oil.

  Preferably, the cylinder has a curved shape.

  Preferably, an outer cylinder part provided so as to cover the cylinder and the first magnetic member is further provided, and the outer cylinder part supplies a fluid having a predetermined fluid pressure to a fluid transmission path surrounded by the outer cylinder part and the cylinder. And a discharge hole for supplying a fluid of a predetermined fluid pressure from the fluid transmission path to the suction hole of the same type of actuator device, and selectively allowing the fluid in the fluid transmission path to flow in, A fluid pressure is supplied to the first chamber, a first control valve part for selectively discharging the fluid in the first chamber, and a fluid in the fluid transmission path are selectively introduced, so that the fluid pressure is reduced to a second value. And a second control valve section for supplying the chamber and selectively discharging the fluid in the second chamber, and the fluid pressure supply means controls the first and second control valve sections. Controlling the supply of fluid pressure to the first chamber and the second chamber .

  Preferably, the hermetic container is a cylinder capable of maintaining an airtight state, the drive member is an output shaft that transmits the rotational movement of the mover to the outside of the cylinder, and the mover is integrated with the output shaft in the cylinder. In the cylinder, a partition wall extending from the output shaft to the inner periphery of the cylinder is provided, and the first and second inner surfaces are the one surface and the other surface of the partition wall, respectively.

  Preferably, the first magnetic member is an electromagnetic coil member provided on the bottom surface side of the cylinder, and the electromagnetic coil member is excited for the relative movement of the rotor.

  Preferably, the electromagnetic coil member has a plurality of coils which are provided in a circumferential direction on the bottom surface side of the cylinder and are independently excited, and the second magnetic member is disposed adjacent to each other in the rotor. A plurality of fan-shaped permanent magnets are included, and the permanent magnets are arranged so that the respective polarities adjacent to each other are in the direction of the output shaft and have opposite polarities alternately.

  Preferably, the first magnetic member is provided along the outer periphery of the cylinder and has a plurality of coils that are independently excited, and the second magnetic member is a plurality of members disposed adjacent to each other in the rotor. The permanent magnets are arranged so that their adjacent polarities are alternately opposite in the normal direction of the output shaft.

  Preferably, the mover is a rotor that continuously rotates in the hermetic container, and a cross section perpendicular to the rotation axis of the rotor is a constant width figure having a plurality of vertices, and the hermetic container is in an airtight state. A cylindrical shape that can be maintained, and the inner surface of the cylindrical shape has a shape that can rotate while contacting a fixed-width figure, and the drive member transmits the continuous rotational motion of the mover to the outside of the hermetic container. It is an output shaft, and the first side surface is the side surface of the rotor from the first contact portion where the rotor contacts the inner surface of the airtight container, to the second contact portion adjacent to the first contact portion, among the side surfaces of the rotor, The second side surface is a side surface of the rotor from the third contact portion where the rotor contacts the inner surface of the hermetic container, to the fourth contact portion adjacent to the third contact portion, of the side surfaces of the rotor, Is a different aspect.

  Preferably, the first magnetic member is an electromagnetic coil member provided on the bottom surface side of the hermetic container, and the electromagnetic coil member is excited for relative movement of the rotor.

  Preferably, the first magnetic member is an electromagnetic coil member provided along the outer periphery of the hermetic container, and the electromagnetic coil member is excited for the relative movement of the rotor.

  According to another aspect of the present invention, a humanoid robot drives a skeleton using the actuator device.

  According to another aspect of the present invention, there is provided a power assist device for assisting human musculoskeletal motion as a target, provided for each joint to be assisted, and having a power to assist joint motion. An actuator device for generating the actuator device. The actuator device includes a cylinder having a first end and a second end, an electromagnetic coil member provided on the outer periphery of the cylinder over a predetermined width, and stored in the cylinder. A movable member having a magnetic force member, and moving relative to the electromagnetic coil member by excitation of the electromagnetic coil member, and the first end of the cylinder and one end of the movable member. Fluid supply for supplying fluid to a first chamber that is a space between the second chamber and a second chamber that is a space between the second end of the cylinder and the other end of the mover, respectively. And a drive means for driving the actuator device. The drive means drives the mover in the same direction by the fluid supply means when the mover is relatively moved by the excitation of the electromagnetic coil member. Control fluid supply.

  According to still another aspect of the present invention, a power assist device for assisting a target human musculoskeletal motion, which is provided for each joint to be assisted and assists the rotational motion of the joint. An actuator device for generating a force is provided. The actuator device transmits a fluid pressure to a cylindrical airtight container that can be applied from the outside to the inside, and a driving force generated in the airtight container is transmitted to the outside of the airtight container. An output shaft that is housed in the hermetic container, is slidable in accordance with the fluid pressure in the hermetic container, and rotates in the hermetic container integrally with the output shaft, and in the hermetic container, from the output shaft A partition extending to the inner periphery of the cylinder, and a first magnetic member provided outside the hermetic container along the movable path of the mover, the mover having a second magnetic member, Magnetic member or second The airtight container moves relative to the first magnetic member by excitation of the magnetic member, and the airtight container has a first chamber that is a space between one surface of the partition wall in the airtight container and one end of the movable element, and the other surface of the partition wall. And a second chamber which is a space between the other end of the movable element, and the actuator device further includes fluid pressure supply means for supplying fluid pressure to the first chamber and the second chamber, respectively. Drive means for driving the actuator device is further provided, and the drive means controls the supply of fluid so that the mover is driven in the same direction by the fluid supply means when the mover is relatively moved by excitation.

  According to the actuator device and the power assist device of the present invention, force control with a small size, high output, and high response is possible.

It is a figure for demonstrating the cross-section of the static electricity hybrid type actuator apparatus 1000 of this Embodiment. FIG. 5 is a perspective view showing the internal structure by removing 1/4 of the front upper part of the cylinder of the pneumatic hybrid actuator device 1000; FIG. 6 is a diagram for explaining the arrangement of magnetic members 202 in the mover 200. It is a conceptual diagram for demonstrating the drive system as an electromagnetic actuator. It is a conceptual diagram for demonstrating the coil electric current in the case of a single phase drive. It is a functional block diagram for demonstrating an example of the structure of control of a control part. It is a functional block diagram for demonstrating the other example of a structure of control of a control part. It is a figure which shows the time change of the force generate | occur | produced by control of FIG. It is a functional block diagram for demonstrating the further another example of the structure of control of a control part. It is a figure for demonstrating the static electricity hybrid type actuator apparatus 1000 'cross-section of the modification of Embodiment 1. FIG. It is a figure which shows the structural example of the exoskeleton type robot 1 in this Embodiment. It is a figure which shows the structure of the freedom degree of the exoskeleton type robot. It is a figure which shows the other example of arrangement | positioning of the artificial muscle (actuator apparatus) with respect to the exoskeleton type robot with respect to a leg. It is a figure which shows the example of arrangement | positioning of the artificial muscle (actuator apparatus) with respect to the exoskeleton type robot with respect to an upper limb. It is sectional drawing which shows the modification of the drive system of an electromagnetic actuator. It is a conceptual diagram for demonstrating the coil electric current in the case of a single phase drive. It is a conceptual diagram for demonstrating the magnetic field generated of a coil. FIG. 6 is a diagram for explaining a cross-sectional structure of an aerodynamic hybrid actuator device 1100 according to a second embodiment. It is a figure for demonstrating the supply path | route of the air at the time of arrange | positioning several actuator apparatuses of the same kind with respect to frame | skeleton. FIG. 10 is a diagram for explaining a cross-sectional structure of an aerodynamic hybrid actuator device 1200 according to a third embodiment. It is a figure which shows the external appearance of the static electricity hybrid type actuator apparatus 1300 of Embodiment 4. FIG. FIG. 3 is a conceptual diagram for explaining the inside of a stator 150. FIG. 11 is a perspective view for explaining the configuration of an aeroelectric hybrid actuator device 1300. FIG. 11 is a conceptual diagram for explaining the operation of the pneumatic hybrid actuator device 1300. It is a figure for demonstrating the relationship of arrangement | positioning with the electromagnetic coils 112a-112l and the rotor 200. FIG. It is a figure for demonstrating the flow of the magnetic flux in the electromagnetic coils 112a-112l and the rotor 200. FIG. It is a conceptual diagram for demonstrating the structure of the static electricity hybrid type actuator apparatus 1300 'of the modification 1 of Embodiment 4. FIG. It is a figure for demonstrating the structure of a cross section perpendicular | vertical with respect to the rotating shaft of the static electricity hybrid type actuator apparatus 1300 'of the modification 1 of Embodiment 4. FIG. It is a figure for demonstrating the structure of the static electricity hybrid type actuator device 1302 of the modification 2 of Embodiment 4. FIG. FIG. 10 is a conceptual diagram for explaining a configuration of an aerodynamic hybrid actuator device 1400 of a fifth embodiment.

  Hereinafter, the configuration of an aerodynamic hybrid actuator device according to an embodiment of the present invention will be described with reference to the drawings. In the following embodiments, components and processing steps given the same reference numerals are the same or equivalent, and the description thereof will not be repeated unless necessary.

In the following, air will be described as an example of the fluid that drives the actuator.
(Embodiment 1)
FIG. 1 is a diagram for explaining a cross-sectional structure of an aerodynamic hybrid actuator device 1000 of the present embodiment.

  Further, FIG. 2 is a perspective view showing the internal structure by removing 1/4 of the front upper part of the cylinder of the pneumatic hybrid actuator device 1000.

  Hereinafter, with reference to FIG. 1 and FIG. 2, the pneumatic hybrid actuator device 1000 includes a cylinder 100 and a mover 200 slidably housed in the cylinder 100.

  The cylinder 100 functions as a movable guide part of an electromagnetic actuator and a cylinder of a pneumatic actuator. The mover 200 functions as a mover of an electromagnetic actuator and a piston of a pneumatic actuator. In other words, in the aeroelectric hybrid actuator device 1000, the movable element that transmits electromagnetic interaction to the output shaft and the movable space of the movable element move the piston and the piston that are elements that transmit air pressure to the output shaft. Each space is integrated.

  On the outer periphery of the cylinder 100, an electromagnetic coil member 110 disposed over a predetermined width in the axial direction of the cylinder 100 is provided. The electromagnetic coil member 110 has a plurality of coils 112a to 112l inside. Each of the plurality of coils 112a to 112l is excited in an independent polarity direction by an independently supplied current. More specifically, each of the plurality of coils 112a to 112l is configured such that alternating currents having different phases flow. For example, a plurality of coils 112a to 112l are divided into three groups, and each group is propelled to the mover 200 by passing alternating currents (symmetric three-phase alternating current) that are out of phase with each other by (2π / 3). Give power. The AC applied to the electromagnetic coil member 110 is not limited to such “symmetric three-phase AC” as long as the movable element can be driven.

  Further, as shown in the drawing, a soft magnetic material is sandwiched between the plurality of coils 112a to 112l, whereby magnetic lines of force are concentrated on the soft magnetic material, thereby increasing the magnetic force. Here, it is not always necessary to sandwich the soft magnetic material, and there is an advantage that thrust pulsation does not occur when no current is passed, although the thrust is reduced when the soft magnetic material is not sandwiched.

  Further, the periphery of the coil is covered with a soft magnetic case. With such a configuration, the magnetic flux that has passed through the coil / soft magnetic body returns to the mover again through the case. By the case, leakage of magnetic flux to the surroundings can be suppressed and thrust can be improved.

  An opening 102 is provided at the center at one end of the cylinder 100, and an output shaft 204 connected to the mover 200 is inserted into the opening 102. The output shaft 204 transmits the driving force generated when the mover 200 is driven to the outside. In addition, the opening 102 and the output shaft 204 have a seal structure that is slidable and that can maintain fluid (air) airtightness.

  The mover 200 has a plurality of magnetic members 202a to 202d arranged to face the plurality of coils 112a to 112l on the side opposite to the surface to which the output shaft 204 is connected, and the plurality of coils 112a. It moves relative to the electromagnetic coil member 110 by the excitation of ˜112 l.

  Here, the “magnetic member” may be a member that generates a driving force in accordance with the magnetic force from the coil, and is typically a permanent magnet, but may be a magnetic material. In the following description, the “magnetic member” is assumed to be a permanent magnet unless otherwise specified.

  The magnetic members 202a to 202d are arranged so that their polarities are alternately reversed in the axial direction. Therefore, the mover 200 and the plurality of coils 112a to 112l constitute a linear motor.

  FIG. 3 is a view for explaining the arrangement of the magnetic member 202 in the mover 200.

  The magnetic members 202a to 202d are collectively referred to as a magnetic member 202.

  In addition to FIGS. 1 and 2, as shown in FIGS. 3A and 3B, intermediate members 203 a to 203 c are inserted and disposed between the magnetic members 202 a to 202 d with which the polarities oppose each other. The The intermediate members 203a to 203c are soft magnetic materials having higher magnetic permeability than the permanent magnets of the magnetic force members 202a to 202d. Since the permeability is higher than that of the permanent magnet, the magnetic flux between the opposing permanent magnets is a magnetic field having a higher magnetic flux density in the intermediate member than that of the permanent magnet alone. Will exit or enter that direction. Thereby, the intensity of the magnetic field at the position of the electromagnetic coil member 110 can be increased.

  Further, by configuring in this way, the intermediate members 203a to 203c and the magnetic members (permanent magnets) 202a to 202d are all configured by disk-shaped or ring-shaped components having the same radius, thereby facilitating manufacture. Furthermore, it is possible to easily realize a high magnetic flux density by adjusting the thicknesses of the intermediate members 203a to 203c and the magnetic members (permanent magnets) 202a to 202d.

  For example, Japanese Patent No. 5422175 has a detailed disclosure on the configuration of driving as such a linear motor.

  In addition, about the drive structure as a linear motor, it is also possible to set it as the structure of a "linear vernier motor" as described in Unexamined-Japanese-Patent No. 2012-244688, for example.

  The chamber 106a is a space between one end of the cylinder 200 and one end face side to which the output shaft 204 of the mover 200 is connected. The chamber 106 b is a space between the other end of the cylinder 200 and the other end surface of the mover 200. Air of a predetermined pressure is supplied to the chamber 106a through a pipe 108a having a control valve, or air is exhausted. A predetermined pressure of air is supplied to the chamber 106b through a pipe 108b having a control valve, or air is exhausted.

  The driving as a linear motor as described above and the intake / exhaust of air to / from the chamber 106a and the chamber 106b are controlled by a control unit (not shown). When driving the mover in the target direction, the control unit applies a driving force for driving the mover 200 in the same direction as the mover 200 relatively moves by excitation of the plurality of coils 112a to 112l. Control air intake and exhaust.

  1 to 3 exemplify a configuration in which the output shaft 204 is provided only on one side of the cylinder 100, the output shaft 204 is provided on both ends of the mover 200, and is externally connected to both ends of the cylinder 100. It is good also as a structure which protrudes.

  Further, not only a gas such as compressed air but also water, oil or a magnetic fluid actuator can be applied as the fluid. When water or oil is used, the coil cooling efficiency is increased, and when magnetic fluid is used, viscosity can be controlled as a hardware characteristic.

  FIG. 4 is a conceptual diagram for explaining a drive system as an electromagnetic actuator.

  1-3 demonstrated as an example the alternating current given to the electromagnetic coil member 110 by symmetrical three-phase alternating current. FIG. 4A shows such a three-phase AC drive.

  On the other hand, as shown in FIG. 4B, the mover 200 is provided with one magnetic member 202a, and the electromagnetic coil member 110 has coils 112a and 112b connected in series, and connected to each other. A configuration in which the winding direction is reversed and driving in a single phase is also possible.

  FIG. 5 is a conceptual diagram for explaining the coil current in the case of single-phase driving in FIG.

  5A and 5B, the cross symbol (X in the circle) indicates the current from the front side to the back side of the paper surface, and the dot symbol (black circle in the circle) is from the back side of the paper surface to the front side. Indicates the current facing.

  As shown in FIG. 5A, when a current is passed through the coils 212a and 212b and driven in a single phase, the mover is driven in the right direction, and the direction of the current is reversed as shown in FIG. 5B. Then, the mover is driven in the left direction.

  FIG. 6 is a functional block diagram for explaining an example of a control configuration of the control unit.

  FIG. 6 is a functional block diagram of the control unit in the case of force control for controlling the force generated on the output shaft to have a target magnitude.

  The output from the air cylinder can be calculated based on the relationship between the pressure command and the output measured in advance. For example, the output of the air cylinder can be estimated by subtracting friction from the pressure in the cylinder.

Referring to FIG. 6, the control unit receives target output (force) F ^* as an output command, converts it with a predetermined gain (1 / μS), and outputs a pressure command P for the pressure supplied to cylinder 100. An amplifier 312 that generates ^* is included.

  Here, S represents the cross-sectional area of the cylinder, and μ represents the efficiency of the air cylinder element.

The control unit further determines a difference between the air cylinder output (force) Fp output from the air cylinder element 314 and the output command F ^* in accordance with the pressure command P ^* , and the output of the difference element 316. An output command Fe ^* is converted by a predetermined gain (1 / K) to generate a current command I ^* indicating a current value for driving the linear motor, and a current control loop 320 for controlling the electromagnetic actuator; including. As the final output F, the aeroelectric hybrid actuator device generates a composite of the air cylinder output (force) Fp and the output (force) Fe of the electromagnetic actuator. Again, K represents the thrust constant of the electromagnetic actuator element.

  Note that the generated force of the electromagnetic actuator is proportional to the excitation current, so it is only necessary to control the current. However, there may be a pulsation of force generated without exciting the current, and this pulsation may be modeled in advance and added to the command current as a correction value.

  FIG. 7 is a functional block diagram for explaining another example of the control configuration of the control unit.

  FIG. 7 is also a functional block diagram of the control unit in the case of force control for controlling the force generated on the output shaft to have a target magnitude. The difference from the configuration of FIG. 6 is that the final output F is fed back to the input side.

  Note that the output from the air cylinder can be calculated based on the relationship between the pressure command and the output in advance, as in FIG. Assume that a sensor for measuring the final output F is provided. For example, a load cell can be used as such a sensor.

Referring to FIG. 8, the control unit receives target output (force) F ^* as an output command, takes a difference from final output (force) F by difference element 332, and calculates difference element 332. The output is input to the PID control unit 334, and the output of the PID control unit 334 is converted by the amplifier 336 with a predetermined gain (1 / μS) to generate a pressure command P ^* for the pressure supplied to the cylinder 100 To do. Again, S represents the cross-sectional area of the cylinder and μ represents the efficiency of the air cylinder element.

The control unit further determines a difference between the air cylinder output (force) Fp output from the air cylinder element 338 and the output command F ^* according to the pressure command P ^* , and the output of the difference element 340. An output command Fe ^* is converted by a predetermined gain (1 / K) to generate a current command I ^* indicating a current value for driving the linear motor, and a current control loop 344 for controlling the electromagnetic actuator. including. As the final output F, the aeroelectric hybrid actuator device generates a composite of the air cylinder output (force) Fp and the output (force) Fe of the electromagnetic actuator. Again, K represents the thrust constant of the electromagnetic actuator element.

  Even with such a configuration, the same effects as in the case of FIG. 6 can be obtained.

  FIG. 8 is a diagram showing the time change of the force generated by the control of FIG. 6 or FIG.

  When the control described with reference to FIG. 6 or FIG. 7 is performed, as shown in FIG. 8, the period until the force generated by air pressure having a slow time response reaches the desired driving force is from the linear motor due to electromagnetic force. The generated force can supplement the generated force (driving force) due to the air pressure.

That is, in the force control, the actuator device 1000 uses a difference between the overall target output of the hybrid actuator device and the output by the air cylinder element as an output command in order to improve the delay of the air pressure control, and is more time responsive than the air pressure control. Adjust the output of highly efficient electromagnetic actuator elements. Since the output of the air cylinder element stabilizes after a sufficient amount of time, the electromagnetic actuator element only plays a role of responding immediately to changes in the output of the air cylinder element due to disturbance. As a result, the exciting current of the coil is small and heat generation is suppressed.
Even after the steady state is reached, the output of the electromagnetic actuator element having higher time response than the pneumatic control can be used to compensate for the deviation from the control target.

  That is, when an external force is applied after the steady state is reached and the value of the pressure sensor of the air cylinder changes, the output command to the electromagnetic actuator changes, and the output of the electromagnetic actuator immediately changes.

  As a result, in the force control, the actuator device 1000 is excellent in time responsiveness while realizing miniaturization by integrating the drive force generation mechanism using electromagnetic force and the drive force generation mechanism using air pressure. High output can be realized.

  FIG. 9 is a functional block diagram for explaining another example of the control configuration of the control unit.

  FIG. 9 is a functional block diagram of the control unit in the case of position control for controlling the position of the output shaft to be the target position.

  Note that the position of the mover 200 is detected by, for example, a sensor that detects the position of the output shaft 204. As such a sensor, for example, a magnetic sensor using a Hall element or an optical sensor using a plate with a slit can be used.

Referring to FIG. 9, the control unit outputs an output command for instructing a target driving force by PID control based on a difference between current position x of movable unit 200 and position command x ^* indicating a target position to be driven. A PID control unit 300 that generates F ^* and an amplifier 302 that converts the output command F ^* with a predetermined gain (1 / μS) and generates a pressure command P ^* for the pressure supplied to the cylinder 100 are included.

  Here, S represents the cross-sectional area of the cylinder, and μ represents the efficiency of the air cylinder element.

Control unit further converts the driving force Fp due to the pressure applied to the movable member 200 in the cylinder 100, the output command Fe ^* is the difference between the output command F ^* by a predetermined gain (1 / K), linear It includes an amplifier 304 that generates a current command I ^* indicating a current value for driving the motor, and a current control loop 304 that controls the electromagnetic actuator. Here, K represents a thrust constant of the electromagnetic actuator element.

  That is, in the actuator device 1000, in order to improve the delay of the air pressure control in the case of the position control, the difference between the overall target output of the hybrid actuator device and the output by the air cylinder element is used as an output command, and the time is longer than the air pressure control. Adjust the output of highly responsive electromagnetic actuator elements. Since the output of the air cylinder element is stabilized after a sufficient amount of time, the electromagnetic actuator element plays a role of responding immediately to changes in the output of the air cylinder element due to disturbance. As a result, the exciting current of the coil is small and heat generation is suppressed. Even after the steady state is reached, the output of the electromagnetic actuator element having higher time response than the pneumatic control can be used to compensate for the deviation from the control target.

As a result, the actuator device 1000 realizes high output with excellent time response while realizing miniaturization by integrating the mechanism for generating the driving force by the electromagnetic force and the mechanism for generating the driving force by the air pressure. be able to.
(Modification of Embodiment 1)
In the pneumatic hybrid actuator device 1000 shown in FIG. 1, in the mover 200, a plurality of magnetic members 202 a to 202 d and intermediate members 203 a to 203 c function as pistons that slide on the inner surface of the cylinder 100. Met.

  FIG. 10 is a view for explaining a cross-sectional structure of an aerodynamic hybrid actuator device 1000 ′ according to a modification of the first embodiment.

  In FIG. 10, the plurality of magnetic members 202a to 202d and the intermediate members 203a to 203c are collectively referred to as a magnetic member 200-1.

As shown in FIG. 10, in the mover 200, a piston 200-2 that slides on the inner surface of the cylinder 100 is separately provided, and the chamber 106a and the chamber 106b are separated by the piston 200-2. Good. In this case, there may be a gap between the plurality of magnetic members 202 a to 202 d and intermediate members 203 a to 203 c and the inner surface of the cylinder 100.
(Power assist device)
Next, a configuration of a power assist device using the actuator device 1000 as described above as an actuator for driving the joint of the exoskeleton robot will be described.

  That is, hereinafter, in this embodiment, an exoskeleton robot using a hybrid actuator for walking / posture rehabilitation will be described.

  However, the hybrid exoskeleton robot of the present invention can be used not only as an exoskeleton robot for assisting the movement of the lower limbs but also as an exoskeleton robot for assisting the movement of the upper limbs. is there.

  Further, in the following description, an exoskeleton type robot that assists exercise as a pair of lower limbs will be described. However, an exoskeleton type that assists exercise of either one of lower limbs or upper limbs. It can also be used as a robot.

  Furthermore, if the hybrid exoskeleton robot of the present invention assists the movement of the target human musculoskeletal system, the above-described “at least one of the lower limbs or the upper limbs” It is not limited to “at least one of the exercises”. For example, it may assist only the exercise of the subject's hips, or the hips may be linked with the exercises of the lower limbs during walking or running. It may be one that assists the exercise. In the present specification, such assist for human motion as a target is collectively referred to as “support for assisting musculoskeletal motion of a target human (assist)”.

  The exoskeleton type robot of the present embodiment has an exoskeleton. “Exoskeleton” refers to a skeleton structure that a robot has corresponding to a human skeleton structure. More specifically, “exoskeleton” refers to a frame (framework) structure that supports a part of a human body to which an exoskeleton-type robot is mounted from the outside.

  The frame structure is further provided with a joint for moving each part of the frame structure in accordance with the movement based on the human skeleton structure.

  In particular, an exoskeleton-type robot that assists the movement of the lower limbs is a robot having a base and a lower half body, and having joints with 6 degrees of freedom in the left and right positions of the ankle, knee, and waist. The six joints are joints that are driven by using an aerodynamic hybrid actuator as an artificial muscle. Hereinafter, in such an exoskeleton robot, a joint driven by an actuator to give support force to a user's joint is referred to as an “active joint”.

  FIG. 11 is a diagram illustrating a configuration example of the exoskeleton robot 1 in the present embodiment. The exoskeleton robot 1 has 10 degrees of freedom.

  Note that a similar configuration is disclosed in Patent Document 3 described above for the configuration example of such an exoskeleton type robot.

  In FIG. 11, the exoskeleton type robot 1 includes a frame structure corresponding to both legs, a backpack 101, a flexible sheet 102, a HAA antagonist muscle 103, an HFE extensor muscle 104, an HFE motor 111, a KFE extensor muscle 105, a KFE motor 106, and an AFE. The extensor / AAA antagonist muscle 107, the AFE flexor muscle 108, the joint 109, and the joint 110 provided in the frame structure are provided.

  In FIG. 11, the backpack 101 is directly attached to the structure for supporting exercise, but the backpack 101 may be removed from this structure.

  The backpack 101 is provided with a control device for controlling the driving of the exoskeleton robot.

  Further, for example, an optical encoder is attached to the rotation shaft of the joint 109, and the joint angle is measured. Similarly, an optical encoder is attached to the joint 110. The optical encoder may not be attached to the shaft, but may be configured to read the moving direction and the moving amount of the belt wound around the shaft. The control device of the backpack 101 controls the driving force of the artificial muscle (actuator) according to the read joint angle.

  The encoder can be configured to be built in the shaft.

  FIG. 12 is a diagram showing the configuration of the degree of freedom of the exoskeleton robot 1.

  In FIG. 12, in each joint, the display “R_” indicates that the joint is on the right side, and the display “L_” indicates that the joint is on the left side.

  Referring to FIG. 11 and FIG. 12, the left and right AFE joints of all 10 degrees of freedom employ antagonistic drive by extensors and flexors. The joints other than the antagonistic drive are passive drives. However, more joints may be antagonistic drive.

  In FIG. 11, an attitude sensor is mounted on the body part to which both legs are connected to detect the attitude of the base part. In addition, wire type encoders (or encoders attached to motors) are attached to all joints so that joint angles can be measured. A configuration may be adopted in which the target torque generated in each joint is calculated by detecting the joint angle and, for example, the myoelectric potential of the lower limbs.

  In addition, a floor reaction force sensor is mounted on the sole, and it is used as an auxiliary to determine whether the sole that is supposed to touch is actually touching or to correct the model error included in the Jacobian matrix It is good also as composition to do.

  In addition to the control device, the backpack 101 incorporates a valve for pneumatic control and a driver for a linear motor.

The backpack 101 is also equipped with a battery, a compressed air cylinder (or a CO ₂ gas cylinder), and a regulator, and enables a short time autonomous driving in case the power supply line and the air supply are disconnected. It may be.

  Alternatively, the backpack 101 may include a battery, a power source for driving the motor, and a built-in compressor.

  FIG. 13 is a diagram illustrating another example of the arrangement of the artificial muscle (actuator device) with respect to the exoskeleton-type robot with respect to the lower limbs.

  As shown in FIG. 13, an actuator device 1002 having a function corresponding to a human “iliac muscle + gluteal muscle” is provided on the skeleton as an artificial muscle that drives the flexion of the hip joint.

  In addition, an actuator device 1004 having a function corresponding to a human “hamstrings + stratus thigh muscle” is provided on the skeleton as an artificial muscle that drives the flexion of the hip joint and the extension of the knee joint.

  Further, as an artificial muscle that drives knee flexion and knee joint extension, an actuator device 1006 having a function corresponding to a human “biceps femoris short head + lateral broad muscle” is provided for the skeleton.

  In addition, an actuator device 1008 having a function corresponding to a human “gastrocnemius” is provided on the skeleton as an artificial muscle that drives the bending of the knee joint.

  FIG. 14 is a diagram illustrating an example of the arrangement of artificial muscles (actuator devices) for an exoskeleton robot with respect to the upper limbs.

  As shown in FIG. 14, an actuator device 1012 having a function corresponding to a human “biceps brachii muscle + triceps brachii muscle” is provided on the skeleton as an artificial muscle that drives bending and extension of the elbow joint.

  Actuator devices 1016 and 1018 having a function corresponding to a human “arm peroneal muscle” are provided on the skeleton as artificial muscles for driving the rotation of the forearm.

  With such a configuration, it is possible to configure an exoskeleton robot that assists the movement of the lower limbs or upper limbs of a human.

  As described above, according to the actuator device of the present embodiment, the element that transmits electromagnetic interaction and fluid pressure to the output shaft and the space are integrated, so that it is back-drivable but small and high output. Force control is possible.

The integrated structure of the mover and the piston (element) and the movable range and the chamber (space) ensures a higher output than a high-efficiency electromagnetic actuator of the same volume.
(Other examples of drive systems)
FIG. 15 is a cross-sectional view showing a modification of the driving method of the electromagnetic actuator.

  As shown in FIG. 15A, only the coil 212a is provided as the electromagnetic coil member 110, and the mover 200 is provided with a magnetic member (permanent magnet) 202a that generates a magnetic field in a direction perpendicular to the axial direction of the cylinder. Provide. A single-phase alternating current is driven by exciting the coil 212a.

  Alternatively, as shown in FIG. 15 (b), a soft magnetic body 205 may be provided as a magnetic member instead of the permanent magnet 202a.

  In this case, the electromagnetic actuator functions as a solenoid actuator and generates a driving force. For example, when at least a part of the magnetic body 205 is outside the coil 212a, the coil 212a can be excited to generate a pulling force into the coil. Here, the coil 212a is housed in a soft magnetic case.

  Also in the case of the configuration as shown in FIG. 15, when the mover is driven in the target direction, the fluid is supplied so that the mover is driven in the same direction as the mover is relatively moved by excitation of the electromagnetic coil member. Is controlled.

  FIG. 16 is a conceptual diagram for explaining the coil current in the case of single-phase driving with the configuration of FIG.

  As shown in FIG. 16A, when a current is passed through the coil 212a and driven in a single phase, the mover is driven in the right direction, and as shown in FIG. The child is driven to the left.

  FIG. 17 is a conceptual diagram for explaining the magnetic field generated by the coil in the configuration of FIG.

  When current is excited in the coil, magnetic flux flows as shown by the arrows in the figure. At this time, the portion of the chamber 106b is air and has low magnetic permeability and high magnetic resistance. The mover is driven in the right direction so as to reduce the magnetic resistance of this portion.

The description so far has been made on the basis of a configuration in which a coil is provided on the outer periphery of the cylinder and the mover is a permanent magnet. However, the configuration is not necessarily limited thereto. For example,
i) The mover may be an electromagnetic coil, and the stator arranged on the cylinder side may have a configuration in which a plurality of permanent magnets that generate magnetic fields in different predetermined directions are sequentially arranged.

    ii) Further, the cylinder is not only in the shape of a single cylinder, but may be configured such that an inner cylinder having the same central axis is disposed inside the outer cylinder. In this case, a plurality of permanent magnets for generating magnetic fields in predetermined different directions are sequentially arranged on the inner side of the inner cylinder and the outer periphery of the outer cylinder, and the mover is a cylinder that can move in the space between the outer cylinder and the inner cylinder. It is an electromagnetic coil having a shape, and can be configured to function as a piston.

  Accordingly, the term “magnetic member” may include an electromagnetic coil in the broadest sense.

  In this structure, a large magnetic flux is generated in the coil by sandwiching the coil between strong magnets inside and outside. Moreover, all the coils can always contribute to the output. Furthermore, in the model using the iron core for both the mover and the stator, thrust pulsation (detent force) is generated even when current is not excited, but this model has the advantage that it does not occur because the mover is only a coil. .

  The actuator device of this embodiment is a linear drive that combines the force control by electromagnetic force with the viscosity / compliance characteristics of the working fluid while maintaining the back drivability of both electromagnetic and pneumatic direct drive actuators, and can respond flexibly to external forces. It is possible to realize the actuator.

  In addition, the actuator device according to the present embodiment of the present embodiment is not limited to the above-described “assistance for the target human musculoskeletal movement (assist)”, but also to the drive mechanism of a general industrial product. Application is also possible.

In addition, the above-described configuration of “support for assisting human musculoskeletal system movement (assist)” can be used as a single robot, and can be applied as, for example, a humanoid robot.
(Embodiment 2)
In the pneumatic / hybrid actuator device 1000 shown in FIG. 1, air of a predetermined pressure is supplied to the chamber 106a via a pipe 108a having a control valve, or air is exhausted to the chamber 106b. Has described a configuration in which air of a predetermined pressure is supplied or air is exhausted via the pipe 108b having a control valve.

  In the aeroelectric hybrid actuator device 1100 according to the second embodiment, which will be described below, the hydroelectric hybrid actuator according to the first embodiment is configured to supply fluid pressure, for example, air pressure, to the chamber 106a and the chamber 106b. This is different from the configuration of the apparatus 1000 or 1000 ′.

  As will be described below, Embodiment 2 will also be described using air as an example of fluid.

  FIG. 18 is a view for explaining a cross-sectional structure of an aerodynamic hybrid actuator device 1100 according to the second embodiment. FIG. 18 is a diagram to be compared with FIG.

  Hereinafter, differences from FIG. 1 will be mainly described, and the same portions are denoted by the same reference numerals and description thereof will not be repeated.

  Referring to FIG. 18, an aerodynamic hybrid actuator device 1100 is provided with an outer cylinder portion 400 that covers cylinder 100 and electromagnetic coil member 110. A space surrounded by the outer surfaces of the cylinder 100 and the electromagnetic coil member 110 and the inner surface of the outer cylindrical portion 400 is airtight and has a function of transmitting air of a predetermined air pressure from the outside. In this respect, the enclosed space is referred to as a “fluid transmission path 402”.

  Air having a predetermined pressure is supplied to the fluid transmission path 402 from the suction hole 410. Further, this air is discharged from the exhaust hole 420 of the fluid transmission path 402, and as described later, the air having a predetermined pressure discharged from the exhaust hole 420 has the same configuration as that of the pneumatic hybrid actuator device 1100. Is supplied to the intake hole of another actuator device 1100 ′ having

  The control valve portion 450a and the control valve portion 450b are provided corresponding to the pipe 108a and the pipe 108b, respectively.

  The control valve unit 450a is controlled by a control unit (not shown) to supply air with a predetermined air pressure from the fluid transmission path 402 to the chamber 106a, or exhaust air from the chamber 106a through the exhaust hole 452a.

  Similarly, the control valve unit 450b is controlled by a control unit (not shown) to supply air with a predetermined air pressure from the fluid transmission path 402 to the chamber 106b, or exhaust air from the chamber 106b through the exhaust hole 452b.

  When driving the mover in the target direction, the control unit applies a driving force for driving the mover 200 in the same direction as the mover 200 relatively moves by excitation of the plurality of coils 112a to 112l. Control air intake and exhaust.

  FIG. 19 is a view for explaining an air supply path when a plurality of actuator devices of the same type as the aeroelectric hybrid actuator device 1100 are arranged with respect to the skeleton.

  FIG. 19 is a diagram contrasted with FIG. 13, and shows an example of the arrangement of artificial muscles (actuator devices) with respect to the exoskeleton-type robot with respect to the lower limbs, as in FIG. 13.

  As shown in FIG. 19, an actuator device 1004 having a function corresponding to human “hamstrings + stratus thigh muscle” is provided on the skeleton as an artificial muscle that drives the flexion of the hip joint and the extension of the knee joint. As an artificial muscle that drives the bending of the knee joint, an actuator device 1008 having a function corresponding to a human “gastrocnemius” is provided for the skeleton.

  In addition, as an artificial muscle that drives the flexion of the hip joint, an actuator device 1002 that has a function corresponding to a human “iliac muscle + gluteal muscle” is provided on the skeleton, and further, the knee joint is bent and the knee joint is extended. As an artificial muscle that drives the human body, an actuator device 1006 that has a function corresponding to a human “biceps femoris short head + lateral broad muscles” is provided for the skeleton.

  Compressed air is supplied to the intake hole 410 of the actuator device 1004 from a compressed air source (for example, a cylinder) via the tube AST1, and compressed to the intake hole 410 of the actuator device 1008 via the tube AST2 from the exhaust hole 420. Air is supplied. For example, it is assumed that the exhaust hole 420 of the actuator device 1008 is sealed.

  Similarly, compressed air is supplied from a compressed air source (for example, a cylinder) to the intake hole 410 of the actuator device 1002 through the tube AST3, and the intake air of the actuator device 1006 from the exhaust hole 420 through the tube AST4. Compressed air is supplied to the holes 410. For example, the exhaust hole 420 of the actuator device 1006 is sealed.

  Alternatively, although not particularly limited, for example, an air pressure from the exhaust hole 420 of the actuator device 1004 is supplied to the intake hole 410 of the actuator device 1002, and the exoskeleton robot is only supplied from the compressed air source by the tube AST1. The compressed air may be supplied to one of the lower limbs.

  With the above configuration, when supplying air pressure to a plurality of actuator devices, it is possible to simplify the air pressure supply path from the compressed air source, compared to a configuration in which air pressure is individually supplied to the actuator devices. It becomes.

Further, since the air from the compressed air source is supplied to the outside of the electromagnetic coil member 110, the electromagnetic coil member 110 is also air-cooled.
(Embodiment 3)
FIG. 20 is a diagram for explaining a cross-sectional structure of the aerodynamic hybrid actuator device 1200 according to the third embodiment. FIG. 20 is a diagram to be compared with FIG.

  Also in the third embodiment, air will be described as an example of the fluid.

  In the first embodiment, the cylinder 100 has been described as having a straight cylindrical shape.

  However, the shape of the cylinder is not limited to this, and for example, as shown in FIG. 20, the cylinder shaft may be circularly curved.

Except for the fact that the cylinder shape is curved, the configuration is the same as that of the first embodiment. Therefore, the same portions are denoted by the same reference numerals, and description thereof will not be repeated.
(Embodiment 4)
FIG. 21 is a diagram illustrating an external appearance of an aerodynamic hybrid actuator device 1300 according to the fourth embodiment.

  The pneumatic hybrid actuator device 1300 drives rotational movement.

  Referring to FIG. 21, actuator device 1300 has a configuration in which cylindrical case 101b and cylindrical case 101d having the same diameter are stacked. An output shaft (rotor) 201 for transmitting the driving force of rotation of the mover inside the case 101b to the outside is disposed at the center of the cases 101b and 101d.

  Inside the lower case 101d, as will be described later, electromagnetic coils each having a wire core wound around a plurality of fan-shaped core members are arranged so as to surround the output shaft.

  The bottom portion of the lower case 101d is covered with a disk-shaped back yoke material 101e made of a magnetic material. The upper opening of the lower case 101d and the lower opening of the upper case 101b are separated by a disk-shaped partition wall 101c. The upper opening of the upper case 101b is blocked by the upper lid 101a. A circular opening through which the output shaft 201 passes is provided at the center of the upper lid 101a. The bearing 102 seals between the output shaft 201 and the opening, and the output shaft 201 can be rotated. It has become. As will be described later, airtightness is maintained by the case 101b, the partition wall 101c, and the upper lid 101a so that air pressure can be applied to the case 101b by air of a predetermined pressure through the pipes 108a and 108b.

  The upper lid 101a, the case 101b, the partition wall 101c, the case 101d, and the back yoke material 101e are collectively referred to as a stator 150 in contrast to the mover.

  FIG. 22 is a conceptual diagram for explaining the inside of the stator 150.

  FIG. 23 is a perspective view for explaining the configuration of the pneumatic hybrid actuator device 1300.

  In FIG. 23, the upper lid 101a is virtually transparent and the partition wall 101c is translucent so that the internal structure of the actuator device 1300 can be easily seen.

  FIG. 22A is a view of the back yoke material 101e as viewed from above. A bearing 152 for rotatably supporting the output shaft 201 is provided at the center of the back yoke material 101e.

  FIG. 22B is a view of the inside of the case 101d as viewed from above.

  As shown in FIG. 22B and FIG. 23, as described above, in the case 101d, electromagnetic coils 112a to 112l each having a wire rod wound around a plurality of fan-shaped core members are provided on the output shaft 201. It is arranged so as to surround it.

  The electromagnetic coils 112a to 112l are not particularly limited. For example, a three-phase alternating current UVW is applied and excited to drive the mover.

  FIG. 22C is a view of the inside of the case 101b as viewed from above.

  As shown in FIG. 22C and FIG. 23, in the case 101b, a mover 200 having a fan-shaped shape as viewed from above (hereinafter referred to as “rotor 200” because of its rotational movement). And the rotor 200 is configured to rotate integrally with the output shaft 201. In the rotor 200, for example, two fan-shaped permanent magnets 202a and 202b are provided adjacent to each other. Permanent magnets 202a and 202b may be formed, for example, by magnetizing a single magnetic member for each region so as to have a magnetic field direction as described below. The permanent magnets 202a and 202b are magnetized so as to be parallel to the output shaft 201 and in opposite directions. In FIG. 22C, it is assumed that the upper surface side of the permanent magnet 202a is N and the upper surface side of the permanent magnet 202b is S. The number of permanent magnets may be more than two as long as adjacent ones are magnetized in opposite directions. Although not shown in FIG. 22 (c), as shown in FIG. 23, a magnetic member 158 is provided above the permanent magnets 202a and 202b to cover them.

  In addition, a partition wall 154 is provided inside the case 101b, and a space surrounded by one end surface of the rotor 200 and one surface of the partition wall 154 functions as a first chamber 106a (also referred to as an air chamber). A space surrounded by the other end surface of the mover 200 and the other surface of the partition wall 154 functions as a second chamber 106b (also referred to as an air chamber).

  FIG. 22D is a view of the upper lid 101a as viewed from above. A circular opening 156 through which the output shaft 201 passes is provided in the center of the upper lid 101a.

  FIG. 24 is a conceptual diagram for explaining the operation of the pneumatic hybrid actuator device 1300.

  Also in FIG. 24, the upper lid 101a is virtually illustrated as being transparent so that the internal structure of the actuator device 1300 can be easily seen.

  FIG. 25 is a diagram for explaining the arrangement relationship between the electromagnetic coils 112 a to 112 l and the rotor 200.

  In FIG. 25, the upper lid 101a and the case 101b are virtually removed so that the positional relationship between the rotor 200 and the electromagnetic coil can be easily seen, and the partition wall 101c and the case 101d are illustrated as being translucent.

  First, referring to FIG. 25, each of the plurality of coils 112a to 112l is excited in an independent polarity direction by an independently supplied current. More specifically, each of the plurality of coils 112a to 112l is configured such that alternating currents having different phases flow. For example, as shown in the figure, every third coil 112a to 112l is divided into three groups, and each group is an alternating current whose phase is shifted by (2π / 3) (symmetric three-phase alternating current, each position). The phase is expressed by U, V, W, etc., and the rotor 200 is given a driving force for rotation.

  On the other hand, referring to FIG. 24, first chamber 106 a is a space between one surface of partition wall 154 and one end surface of rotor 200. The second chamber 106 b is a space between the other surface of the partition wall 154 and the other end surface of the rotor 200. Air of a predetermined pressure is supplied to the chamber 106a through a pipe 108a having a control valve, or air is exhausted. A predetermined pressure of air is supplied to the chamber 106b through a pipe 108b having a control valve, or air is exhausted.

  The rotation driving by the electromagnetic force as described above and the intake / exhaust of air to / from the chamber 106a and the chamber 106b are controlled by a control unit (not shown). When driving the rotor 200 in the target direction, the control unit applies air to drive the rotor 200 in the same direction as the rotor 200 moves relatively by excitation of the plurality of coils 112a to 112l. Controls intake and exhaust.

  As a fluid, not only a gas such as compressed air but also water, oil, or a magnetic fluid actuator can be applied. When water or oil is used, the coil cooling efficiency is increased, and when magnetic fluid is used, viscosity can be controlled as a hardware characteristic.

  FIG. 26 is a diagram for explaining the flow of magnetic flux in the electromagnetic coils 112 a to 112 l and the rotor 200.

  FIG. 26 virtually shows a cross section of the electromagnetic coil and a part of the rotor cut out in FIG.

  When the electromagnetic coils 112a to 112l are excited and the rotor 200 rotates, for example, at a certain point in time, the magnetic flux generated by the electromagnetic coil 112c and the magnetic flux of the permanent magnet 202a in the rotor 200 are in the same direction and exit from the permanent magnet 202a. The magnetic flux passes through the magnetic material 158 and enters the upper surface of the permanent magnet 202b. The magnetic flux of the permanent magnet 202b and the magnetic flux generated by the electromagnetic coil 112d are in the same direction, and the magnetic flux emitted from the electromagnetic coil 112d is the back yoke material. A magnetic flux flows through 101e and enters the electromagnetic coil 112c.

With the configuration as described above, the actuator device 1300 can also be miniaturized by integrating the drive force generation mechanism using electromagnetic force and the drive force generation mechanism using air pressure, as in the first embodiment. By using not only the air pressure but also the driving force of electromagnetic force, high output with excellent time response can be realized.
(Modification 1 of Embodiment 4)
In FIG. 21 to FIG. 26, the configuration has been described in which a permanent magnet is provided on the rotor 200 side and an electromagnetic coil is provided in the case 101 d.

  However, an electromagnetic coil may be provided on the rotor 200 side, and a permanent magnet may be provided above and below the electromagnetic coil.

  FIG. 27 is a conceptual diagram for explaining the configuration of an aerodynamic hybrid actuator device 1300 ′ according to Modification 1 of Embodiment 4 described above.

  FIG. 28 is a view for explaining the structure of a cross section perpendicular to the rotation axis of the aerodynamic hybrid actuator device 1300 ′ of the first modification of the fourth embodiment. FIG. 28B shows a cross section at the virtual plane V in FIG.

  Referring to FIG. 27 (a), providing the back yoke at the bottom is the same as in the fourth embodiment.

  Next, as shown in FIG. 27B, in the first case on the back yoke, a plurality of fan-shaped permanent magnets are arranged around the output shaft 201, and the magnetic flux direction is the output shaft direction. The adjacent permanent magnets are arranged so that the magnetization directions are alternately reversed. In FIG. 27B, as an example, eight permanent magnets are alternately arranged.

  As shown in FIG. 27C, in the second case further above the first case, a mover (rotor) is provided so as to be rotatable, similarly to the case 101b in FIG. In the rotor, electromagnetic coils each having a wire wound around three fan-shaped core members are provided so that UVW alternating current can be applied independently. However, the number of electromagnetic coils is not limited to three and may be larger.

  Similarly to the case 101b of FIG. 23, the second case has an airtight structure and is configured to independently apply a predetermined air pressure to the first and second air chambers.

  As shown in FIG. 27 (d), in the third case on the second case, there are a plurality of fan-shaped permanent magnets around the output shaft 201, and the magnetic flux direction is the output shaft direction. It arrange | positions so that a magnetizing direction may reverse alternately with the adjacent permanent magnet. In FIG. 27 (d), eight permanent magnets are alternately arranged in accordance with the configuration of FIG. 27 (b). As shown in FIG. 28, the magnetization direction of each permanent magnet in FIG. 27D is magnetized in the same direction as the permanent magnet in the corresponding position in the first case.

  As shown in FIG. 27 (e), a back yoke material is also provided as an upper lid at the uppermost stage. The back yoke material of the upper lid is provided with an opening through which the output shaft 201 passes in the center.

Even in such a configuration, the same effect as the aerodynamic hybrid actuator device 1300 of the fourth embodiment is obtained.
(Modification 2 of Embodiment 4)
In the pneumatic hybrid actuator device 1300 according to the fourth embodiment, the electromagnetic coils 112 a to 112 l (generically referred to as the electromagnetic coil 112) that generate a driving force for the permanent magnet in the rotor 200 are the rotor 200. Is provided in the case 101d below the case 101b.

  FIG. 29 is a diagram for explaining a configuration of an aerodynamic hybrid actuator device 1302 according to the second modification of the fourth embodiment.

  FIG. 29A is a perspective view showing the upper lid 101a as virtually translucent. FIG. 29B is a view of the configuration of FIG. 29A as viewed from above.

  The electromagnetic coil 112 is arranged along the outer periphery of the case 101b in which the rotor 200 is stored. Accordingly, the magnetization direction of the permanent magnet in the rotor 200 is set to a direction perpendicular to the rotation axis (the radial direction of the rotor).

  The aeroelectric hybrid actuator device 1300 according to the fourth embodiment or the aeroelectric hybrid actuator devices 1300 ′ and 1302 according to the modification of the fourth embodiment perform the same control as in the first embodiment, thereby While maintaining the back drivability of both direct drive actuators, it is possible to realize a rotationally driven actuator that can respond flexibly to external forces by combining force control by electromagnetic force and viscosity / compliance characteristics of the working fluid.

  The aerodynamic hybrid actuator device 1300 according to the fourth embodiment or the aerodynamic hybrid actuator devices 1300 ′ and 1302 according to the modification of the fourth embodiment are joint portions of the exoskeleton robot as shown in FIGS. It can be used as an actuator device for the rotational movement of humans, and can be used not only for “assisting the target human musculoskeletal movement (assist)” but also for driving mechanisms of general industrial products. It is also possible.

In addition, such a configuration of “support for assisting human musculoskeletal system movement (assist)” can be used as a single robot, and can be applied as, for example, a humanoid robot.
(Embodiment 5)
In the fourth embodiment, the rotor 200 moves in an arc shape. In the fifth embodiment, a configuration in which the rotor 200 continuously rotates will be described.

  FIG. 30 is a conceptual diagram for illustrating a configuration of an aerodynamic hybrid actuator device 1400 according to the fifth embodiment.

  A figure in which the width of the delivery is always constant is called a “constant width figure”. A circle is a typical constant-width figure, but other than that, famous examples of constant-width figures include the Rouleau polygon.

  In particular, a rotary engine having a Rouleau triangle having a rotor cross-sectional shape is known. In this case, the rotor is constituted by a three-leaf inner envelope inscribed in the trochoid curve of the rotor housing that houses the rotor. In the center of the rotor, there is a round hole portion into which an eccentric shaft is fitted via a rotor bearing, and an inner tooth type (internal gear) that engages with a gear portion of the side housing is provided at the edge. The rotor housing has an eyebrows shape called a peritrochoidal curve having two inner surfaces.

  More generally, it is known that a rotor having a cross-sectional shape of a constant width figure can always rotate smoothly in contact with the inner surface of the housing in a housing having an inner envelope shape that matches the cross-sectional shape of the rotor. It has been.

  In FIG. 30, as an example, a housing 101b having a pertrochoidal curve as a cross-sectional shape of its inner surface along a trajectory obtained by circularly rotating a rotor 200 having a cross-sectional shape of a constant width figure based on a pentagon, and A rotating shaft 201 for transmitting the driving force by the rotor 200 to the outside is provided.

  A plurality of permanent magnets are provided in the rotor 200, and each permanent magnet is arranged so that the magnetization direction is opposite to that of the adjacent permanent magnet.

  Since the output shaft 201 is eccentric, for example, the upper lid 101a is provided with an opening in which the output shaft is eccentric and rotatable, and the opening portion is configured to be hermetically sealed on the upper surface side of the rotor 200. And it can be set as the structure which transmits the driving force of rotation of the rotor 200 to the exterior by a crank mechanism.

  As a result, the output shaft 201 rotates in the same direction as the rotation direction of the rotor 200.

  Or similarly to the case of the rotary engine mentioned above, it is also possible to make it the structure which transmits a driving force to the exterior by an eccentric shaft.

  In accordance with the rotation of the rotor 200, air of a predetermined pressure is supplied (referred to as air supply) or exhausted from the pipes 108a to 108b at a predetermined timing. Thus, a driving force by pneumatic pressure can also be generated.

  For example, in FIG. 30, the inner surface corresponding to the first leaf in the cross section of the housing 101b and the outer surface of the rotor 200 are in contact with each other at the first contact portion. Further, the inner surface corresponding to the second leaf adjacent to the first leaf in the cross section of the housing 101b and the outer surface of the rotor 200 are in contact with each other at the second contact portion. In this way, the air chambers 106a and 106b are formed by the outer surface of the rotor 200 extending from the first contact portion to the second contact portion and the corresponding inner surface of the housing 101b. The volume of such an air chamber changes as the rotor 200 rotates. Control is performed so that air is supplied or exhausted at a predetermined timing to / from the air chambers 106a to 106b by the pipes 108a to 108b.

  For example, at the time shown in FIG. 30, the operation of supplying air from the pipe 108a to the air chamber 106a is performed at the timing of exhausting from the air chamber 106b through the pipe 108b (white arrow in the figure) (black arrow in the figure). By controlling the timing of supply / exhaust, as described above, in addition to the driving force by the electromagnetic force, the driving force by the air pressure can also be generated.

  Here, the piping for supplying and exhausting air may be provided corresponding to other leaves of the cross section of the housing 101b, and is not limited to two as shown in FIG.

  In addition, in FIG. 30, it is set as the structure which provides an electromagnetic coil in the lower stage of the housing 101b in which the rotor 200 is accommodated similarly to FIG.

  However, a configuration in which the electromagnetic coil is disposed along the outer periphery of the housing 101b in which the rotor 200 is housed may be used as in the second modification of the fourth embodiment described above. In this case, the magnetization direction of the permanent magnet in the rotor 200 is a direction perpendicular to the rotation axis, as in the second modification of the fourth embodiment.

  With the configuration of the fifth embodiment as described above, it is possible to cause the aeroelectric hybrid actuator device to perform a continuous rotation operation and extract the driving force to the outside.

  Embodiment disclosed this time is an illustration of the structure for implementing this invention concretely, Comprising: The technical scope of this invention is not restrict | limited. The technical scope of the present invention is shown not by the description of the embodiment but by the scope of the claims, and includes modifications within the wording and equivalent meanings of the scope of the claims. Is intended.

  DESCRIPTION OF SYMBOLS 1 Exoskeleton type robot, 10 Internal controller, 11 I / F part, 12 Exoskeleton, 20 External controller, 121 Base, 122 Lower body, 123 Active joint, 124 Detection mechanism, 131 Recording processing part, 132 Storage device, 133 Measuring device, 100 cylinder, 101a upper lid, 101b case, 101c partition, 101d case, 101e back yoke material, 102 opening, 106a, 106b chamber, 108a, 108b intake / exhaust piping, 110 electromagnetic coil member, 112a-112l coil, 200 Movable element, 202a to 202d magnetic member, 201, 204 output shaft, 1000, 1100, 1200, 1300 actuator device.

According to one aspect of the present invention, an actuator device is an airtight container configured to be able to apply fluid pressure from the outside to the inside, and is housed in the airtight container, and slides in the airtight container according to the fluid pressure. A movable member including a movable member, a driving member for transmitting the driving force of the movable member to the outside of the hermetic container, and a first magnetic member provided outside the hermetic container along a movable path of the movable member. The child has a second magnetic member and moves relative to the first magnetic member by excitation of the first magnetic member or the second magnetic member. The hermetic container has a first inner surface in the hermetic container and one of the movable elements. A first chamber that is a space between the side surface and a second chamber that is a space between the second inner surface of the hermetic container and the other side surface of the mover, and the first chamber and the second chamber Each further comprising fluid pressure supply means for supplying fluid pressure, Body pressure supply unit controls the supply of fluid pressure to the excitation of the first magnetic member and the second magnetic member to drive the movable element in the same direction when moved relative to the movable element.
Preferably, the first magnetic member includes an electromagnetic coil member, and the first magnetic member drives the mover in the hermetic container via the partition of the hermetic container between the inside of the hermetic container and the first magnetic member. In order to do so, it is opposed to a region where fluid pressure is supplied.
According to another aspect of the present invention, an airtight container configured to be able to apply fluid pressure from the outside to the inside is provided, and the airtight container has a first end and a second end in the axial direction. A movable element housed in the hermetic container and slidable in accordance with the fluid pressure in the hermetic container; a drive member for transmitting the driving force of the movable element to the outside of the hermetic container; A first magnetic member that is an electromagnetic coil member provided outside the container, and the length along the movable path of the first magnetic member is longer than the length along the movable path of the movable element itself. And the second magnetic member is moved relative to the first magnetic member by excitation of the first magnetic member, and the hermetic container is a space between the inner surface of the hermetic container at the first end and one side surface of the mover. Between the first chamber and the inner surface of the hermetic container at the second end and the other side of the mover A first chamber is a space, and the first magnetic member is provided at a position facing the first and second chamber regions through the side wall of the hermetic container, and the first chamber and the second chamber The fluid pressure supply means further supplies fluid pressure, and the fluid pressure supply means drives the mover in the same direction when the mover is relatively moved by excitation of the first magnetic member or the second magnetic member. To control the supply of fluid pressure.

Preferably the fluid is either water or oil.
Preferably, the mover is provided with a predetermined gap between the piston portion slidable in accordance with the fluid pressure in the hermetic container and the inner surface of the hermetic container, and is coupled to the piston portion, so that the second magnetic force A magnetic member having a member.

According to another aspect of the present invention, there is provided a power assist device for assisting human musculoskeletal motion as a target, provided for each joint to be assisted, and having a power to assist joint motion. An actuator device for generating the actuator device. The actuator device includes a cylinder having a first end and a second end, an electromagnetic coil member provided on the outer periphery of the cylinder over a predetermined width, and stored in the cylinder. A movable member having a magnetic force member, and moving relative to the electromagnetic coil member by excitation of the electromagnetic coil member, and the first end of the cylinder and one end of the movable member. fluid pressure supplied to the second chamber, respectively, the fluid is a space between the first chamber is a space, the second end portion and the other end of the movable element of the cylinder between the Further comprising a feed means, further comprising a drive means for driving the actuator device, the drive means, when relatively moving the movable element by excitation of the electromagnetic coil member to drive the movable element in the same direction by the fluid pressure supply means To control the fluid supply.
Preferably, the electromagnetic coil member is opposed to a region to which fluid pressure is supplied in order to drive the mover in the hermetic container via a partition wall of the hermetic container between the inside of the hermetic container and the electromagnetic coil member side. Yes.

According to still another aspect of the present invention, a power assist device for assisting a target human musculoskeletal motion, which is provided for each joint to be assisted and assists the rotational motion of the joint. An actuator device for generating a force is provided. The actuator device transmits a fluid pressure to a cylindrical airtight container that can be applied from the outside to the inside, and a driving force generated in the airtight container is transmitted to the outside of the airtight container. An output shaft that is housed in the hermetic container, is slidable in accordance with the fluid pressure in the hermetic container, and rotates in the hermetic container integrally with the output shaft, and in the hermetic container, from the output shaft A partition extending to the inner periphery of the cylinder, and a first magnetic member provided outside the hermetic container along the movable path of the mover, the mover having a second magnetic member, Magnetic member or second The airtight container moves relative to the first magnetic member by excitation of the magnetic member, and the airtight container has a first chamber that is a space between one surface of the partition wall in the airtight container and one end of the movable element, and the other surface of the partition wall. And a second chamber which is a space between the other end of the movable element, and the actuator device further includes fluid pressure supply means for supplying fluid pressure to the first chamber and the second chamber, respectively. The driving device further includes a driving unit that drives the actuator device, and the driving unit controls the supply of fluid so that the moving unit is driven in the same direction by the fluid pressure supply unit when the moving unit is relatively moved by excitation.
Preferably, the first magnetic member includes an electromagnetic coil member, and the electromagnetic coil member drives the mover in the hermetic container via a partition wall of the hermetic container between the inside of the hermetic container and the electromagnetic coil member side. It faces the area where the fluid pressure is supplied to.

Claims (20)

An airtight container configured to be able to apply fluid pressure from the outside to the inside;
A mover stored in the hermetic container and slidable in the hermetic container according to the fluid pressure;
A driving member for transmitting the driving force of the mover to the outside of the airtight container;
A first magnetic member provided outside the hermetic container along the movable path of the mover,
The mover has a second magnetic member, and moves relative to the first magnetic member by excitation of the first magnetic member or the second magnetic member,
The airtight container includes a first chamber that is a space between the first inner surface in the airtight container and one side surface of the mover, and a second inner surface in the airtight container and the other side surface of the mover. A second chamber that is a space of
Fluid pressure supply means for supplying the fluid pressure to the first chamber and the second chamber, respectively.
The fluid pressure supply means controls the supply of the fluid pressure so as to drive the mover in the same direction when the mover is relatively moved by excitation of the first magnetic member or the second magnetic member. apparatus. The airtight container is a cylinder having a first end and a second end in the axial direction,
The first and second inner surfaces are cylinder inner surfaces of the first and second ends, respectively.
The mover includes a piston that can slide in the cylinder,
The actuator device according to claim 1, wherein the drive member transmits a reciprocating motion of the piston to the outside of the cylinder. The first magnetic member is an electromagnetic coil member provided on the outer periphery of the cylinder,
The actuator device according to claim 2, wherein the electromagnetic coil member is excited for relative movement of the mover. The electromagnetic coil member has a plurality of coils that are provided on the outer periphery of the cylinder over the predetermined width and are independently excited,
The second magnetic member includes a plurality of permanent magnets, and a soft magnetic material is provided between the plurality of permanent magnets,
The actuator device according to claim 3, wherein the permanent magnets are arranged so that their polarities are alternately reversed in the axial direction. A controller for controlling excitation of the fluid supply means and the plurality of coils;
5. The control unit controls the force generated by the electromagnetic force to compensate for the generated force due to the fluid pressure during a period until the generated force due to the fluid pressure reaches a desired driving force. Actuator device. A controller for controlling excitation of the fluid supply means and the plurality of coils;
The actuator device according to claim 3, wherein the control unit controls excitation of the coil so as to compensate for a deviation from a control target after the steady state is achieved.   The actuator device according to claim 3, wherein the fluid is a gas.   The actuator device according to claim 3, wherein the fluid is water or oil.   The actuator device according to claim 1, wherein the cylinder has a curved shape. An outer cylinder provided to cover the cylinder and the first magnetic member;
The outer cylinder part is
A suction hole for supplying a fluid having a predetermined fluid pressure to a fluid transmission path surrounded by the outer cylinder portion and the cylinder;
A discharge hole for supplying the fluid of the predetermined fluid pressure from the fluid transmission path to the suction hole of the same kind of actuator device;
A first control valve portion for selectively inflowing fluid in the fluid transmission path, supplying the fluid pressure to the first chamber, and selectively discharging the fluid in the first chamber;
A second control valve section for selectively injecting fluid in the fluid transmission path, supplying the fluid pressure to the second chamber, and selectively discharging the fluid in the second chamber; In addition,
2. The actuator device according to claim 1, wherein the fluid pressure supply unit controls supply of the fluid pressure to the first chamber and the second chamber by controlling the first and second control valve portions. 3. . The airtight container is a cylinder capable of maintaining an airtight state,
The drive member is an output shaft that transmits the rotational movement of the mover to the outside of the cylinder,
The mover is a rotor that rotates integrally with the output shaft in the cylinder,
In the cylinder, a partition wall extending from the output shaft to the inner periphery of the cylinder is provided,
The actuator device according to claim 1, wherein the first and second inner surfaces are one surface and the other surface of the partition wall, respectively. The first magnetic member is an electromagnetic coil member provided on the bottom surface side of the cylinder,
The actuator device according to claim 11, wherein the electromagnetic coil member is excited for relative movement of the rotor. The electromagnetic coil member is provided in a circumferential direction on the bottom surface side of the cylinder, and has a plurality of coils that are excited independently.
The second magnetic member includes a plurality of fan-shaped permanent magnets disposed adjacent to each other in the rotor,
The actuator device according to claim 12, wherein the permanent magnets are arranged so that respective polarities adjacent to each other are in the direction of the output shaft and alternately have opposite polarities. The first magnetic member is provided along the outer periphery of the cylinder and has a plurality of coils that are independently excited,
The second magnetic member includes a plurality of fan-shaped permanent magnets disposed adjacent to each other in the rotor,
The actuator device according to claim 11, wherein the permanent magnets are arranged such that respective polarities adjacent to each other are alternately opposite in the normal direction of the output shaft.   A humanoid robot that drives a skeleton using the actuator device according to claim 1. The mover is a rotor that continuously rotates in the hermetic container, and a cross section perpendicular to the rotation axis of the rotor is a constant width figure having a plurality of vertices,
The airtight container has a cylindrical shape capable of maintaining an airtight state, and the inner surface of the cylindrical shape has a shape that can rotate while contacting with the constant width figure,
The drive member is an output shaft that transmits a continuous rotational motion of the mover to the outside of the airtight container,
The first side surface is a side surface of the rotor that extends from a first contact portion where the rotor contacts the inner surface of the hermetic container to a second contact portion adjacent to the first contact portion, of the side surfaces of the rotor. ,
The second side surface is a side surface of the rotor from a third contact portion where the rotor contacts the inner surface of the airtight container to a fourth contact portion adjacent to the third contact portion. The actuator device according to claim 1, wherein the actuator device is a side surface different from the first side surface. The first magnetic member is an electromagnetic coil member provided on the bottom side of the hermetic container,
The actuator device according to claim 16, wherein the electromagnetic coil member is excited for relative movement of the rotor. The first magnetic member is an electromagnetic coil member provided along the outer periphery of the hermetic container,
The actuator device according to claim 16, wherein the electromagnetic coil member is excited for relative movement of the rotor. A power assist device for assisting a target human musculoskeletal movement,
Provided for each joint to be assisted, comprising an actuator device for generating a force to assist the movement of the joint,
The actuator device includes:
A cylinder having a first end and a second end;
An electromagnetic coil member provided on the outer periphery of the cylinder over a predetermined width;
A movable element stored in the cylinder and slidable as a piston in the cylinder;
The mover has a magnetic member, and moves relative to the electromagnetic coil member by excitation of the electromagnetic coil member,
A first chamber that is a space between the first end portion of the cylinder and one end of the mover; and a space that is a space between the second end portion of the cylinder and the other end of the mover. Each further comprising fluid supply means for supplying fluid to the two chambers,
Drive means for driving the actuator device;
The drive means controls the supply of the fluid so as to drive the mover in the same direction by the fluid supply means when the mover is relatively moved by excitation of the electromagnetic coil member. . A power assist device for assisting a target human musculoskeletal movement,
An actuator device is provided for each joint to be assisted, and generates a force for assisting the rotational motion of the joint,
The actuator device includes:
A cylindrical airtight container configured to be able to apply fluid pressure from the outside to the inside;
An output shaft for transmitting a driving force generated in the hermetic container to the outside of the hermetic container;
A mover stored in the hermetic container, slidable in accordance with the fluid pressure in the hermetic container and rotating integrally with the output shaft in the hermetic container;
In the airtight container, a partition wall extending from the output shaft to the inner periphery of the cylinder;
A first magnetic member provided outside the hermetic container along the movable path of the mover,
The mover has a second magnetic member, and moves relative to the first magnetic member by excitation of the first magnetic member or the second magnetic member,
The airtight container includes a first chamber that is a space between one surface of the partition and the one end of the mover in the airtight container, and between the other surface of the partition and the other end of the mover. A second chamber that is a space,
The actuator device further includes fluid pressure supply means for supplying the fluid pressure to the first chamber and the second chamber,
Drive means for driving the actuator device;
The driving means controls the supply of the fluid so as to drive the movable element in the same direction by the fluid supply means when the movable element is relatively moved by the excitation.