JP2013187251A - Cooling system and method of electronic apparatus - Google Patents

Cooling system and method of electronic apparatus Download PDF

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JP2013187251A
JP2013187251A JP2012049557A JP2012049557A JP2013187251A JP 2013187251 A JP2013187251 A JP 2013187251A JP 2012049557 A JP2012049557 A JP 2012049557A JP 2012049557 A JP2012049557 A JP 2012049557A JP 2013187251 A JP2013187251 A JP 2013187251A
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liquid refrigerant
container
cooling system
refrigerant
package member
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Masato Fukagaya
正人 深萱
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SOHKI KK
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PROBLEM TO BE SOLVED: To provide a cooling system which efficiently cools an entire electronic apparatus using a liquid refrigerant and easily reuses waste heat of the electronic apparatus.SOLUTION: An electronic apparatus 1 includes multiple heating elements 3 on a substrate 2. A system 11 cooling the electronic apparatus 1 includes: a package member 5 enclosing the entire substrate 2 including the elements 3; a container 12 in which a liquid refrigerant C is accumulated; a holder 16 holding the package member 5 in the container 12 with the package member 5 immersed in the liquid refrigerant; and a refrigerant circulation mechanism forming refrigerant flow F in the container 12. The refrigerant circulation mechanism includes a refrigerant circulation passage for taking out the relatively high temperature liquid refrigerant from an outlet 14 of the container 12 and returning the relatively low temperature liquid refrigerant to an inlet 13 of the container 12. An electric generator, generating electric power using the liquid refrigerant taken out from the container 12, is provided on the refrigerant circulation passage.

Description

本発明は、基板上に複数の素子が実装された電子装置を冷却するシステムと方法に関する。   The present invention relates to a system and method for cooling an electronic device having a plurality of elements mounted on a substrate.

従来、電子装置の内部に液冷媒を循環させ、基板上のCPUやメモリ等の素子を冷却するシステムが知られている。しかし、この種のシステムは、特定の素子を部分的に冷却しているため、基板上に多数の発熱性素子が密集する電子装置の場合に、基板全体を冷却するために液冷と空冷を併用する必要があり、データセンター等での使用にあたって、電力消費量が嵩むという問題点があった。   Conventionally, a system that circulates a liquid refrigerant inside an electronic device and cools elements such as a CPU and a memory on a substrate is known. However, since this type of system partially cools a specific element, in the case of an electronic device in which a large number of heat-generating elements are densely arranged on a substrate, liquid cooling and air cooling are performed to cool the entire substrate. There is a problem that it is necessary to use them together, and power consumption increases when used in a data center or the like.

そこで、従来、発熱性素子を液冷媒に直接浸けて冷却するシステムが提案されている。例えば、特許文献1には、液冷媒を循環ポンプにより低発熱密度モジュールユニットと高発熱密度モジュールユニットに供給し、低発熱密度素子と高発熱密度素子とを液冷媒中に直接浸漬させ、液冷媒の圧力及び飽和温度をモジュールユニットごとに制御する冷却システムが記載されている。   Therefore, conventionally, a system for cooling the heat-generating element by directly immersing it in a liquid refrigerant has been proposed. For example, in Patent Document 1, liquid refrigerant is supplied to a low heat generation density module unit and a high heat generation density module unit by a circulation pump, and the low heat generation density element and the high heat generation density element are directly immersed in the liquid refrigerant. A cooling system for controlling the pressure and saturation temperature of each module unit is described.

特開平5−160310号公報JP-A-5-160310

ところが、従来の冷却システムによると、発熱性素子が液冷媒に直接浸かるので、素子や基板から溶出したフラックス成分等がイオン化し、液冷媒の絶縁性能が徐々に低下するという問題点があった。また、変質した液冷媒は再使用が困難なうえ、液冷媒に含まれる電子装置の排熱を再利用することもできず、特に大量の冷媒を使用するデータセンターでは無駄が多く、不向きであった。   However, according to the conventional cooling system, since the exothermic element is directly immersed in the liquid refrigerant, the flux component and the like eluted from the element and the substrate are ionized, and the insulation performance of the liquid refrigerant gradually decreases. In addition, the altered liquid refrigerant is difficult to reuse, and the exhaust heat of the electronic devices contained in the liquid refrigerant cannot be reused, especially in a data center that uses a large amount of refrigerant, which is wasteful and unsuitable. It was.

本発明の目的は、液冷媒を用いて電子装置の全体を効率よく冷却できるとともに、電子装置の排熱を容易に再利用できる冷却システムを提供することにある。   The objective of this invention is providing the cooling system which can cool the whole electronic device efficiently using a liquid refrigerant, and can reuse the waste heat of an electronic device easily.

上記課題を解決するために、本発明は次のような冷却システムおよび冷却方法を提供する。
(1)基板上に複数の素子が実装された電子装置を冷却するシステムであって、素子を含む基板の全体を被包するパッケージ部材と、液冷媒を貯留する容器と、パッケージ部材を液冷媒中に浸けた状態で容器に保持するホルダと、容器の内部に液冷媒の流れを形成する冷媒流通機構とを備えたことを特徴とする冷却システム。
In order to solve the above problems, the present invention provides the following cooling system and cooling method.
(1) A system for cooling an electronic device having a plurality of elements mounted on a substrate, the package member enclosing the entire substrate including the elements, a container for storing liquid refrigerant, and the package member as liquid refrigerant A cooling system comprising: a holder that is held in a container while being immersed therein; and a refrigerant distribution mechanism that forms a flow of liquid refrigerant inside the container.

(2)冷媒流通機構が、相対的に高温の液冷媒を容器から取り出し、相対的に低温の液冷媒を容器に戻す冷媒循環管路を含むことを特徴とする冷却システム。 (2) A cooling system, wherein the refrigerant circulation mechanism includes a refrigerant circulation line that takes out a relatively high-temperature liquid refrigerant from the container and returns the relatively low-temperature liquid refrigerant to the container.

(3)冷媒循環管路上に、容器から取り出した液冷媒を用いて電力を生成する発電機を設けたことを特徴とする冷却システム。 (3) A cooling system characterized in that a generator for generating electric power using a liquid refrigerant taken out from a container is provided on a refrigerant circulation line.

(4)冷媒循環管路上に、容器から取り出した液冷媒を用いて温水を生成するタンクを設けたことを特徴とする冷却システム。 (4) A cooling system in which a tank for generating hot water using a liquid refrigerant taken out from a container is provided on a refrigerant circulation line.

(5)パッケージ部材が、電子装置を取出可能に収納する金属ケースを含むことを特徴とする冷却システム。 (5) The cooling system, wherein the package member includes a metal case in which the electronic device can be removed.

(6)金属ケースの内面と素子との間に絶縁シートを介装したことを特徴とする冷却システム。 (6) A cooling system comprising an insulating sheet interposed between the inner surface of the metal case and the element.

(7)金属ケースの外面に放熱フィンを設けたことを特徴とする冷却システム。 (7) A cooling system characterized in that heat radiation fins are provided on the outer surface of the metal case.

(8)パッケージ部材が、電子装置の基板および素子に密着する絶縁カバーを含むことを特徴とする冷却システム。 (8) The cooling system, wherein the package member includes an insulating cover that is in close contact with a substrate and an element of the electronic device.

(9)絶縁カバーが、基板および素子に接触する樹脂層と、液冷媒に接触する金属層とを備えたことを特徴とする冷却システム。 (9) The cooling system, wherein the insulating cover includes a resin layer in contact with the substrate and the element, and a metal layer in contact with the liquid refrigerant.

(10)基板上に複数の素子が実装された電子装置を用意し、素子を含む基板の全体をパッケージ部材で被包し、パッケージ部材を容器内部の液冷媒中に浸け、素子の発熱をパッケージ部材を介して液冷媒に伝え、液冷媒を容器の内部で流動させた後に、容器の外部に取り出すことを特徴とする電子装置の冷却方法。 (10) An electronic device having a plurality of elements mounted on a substrate is prepared, the entire substrate including the elements is encapsulated in a package member, the package member is immersed in a liquid refrigerant inside the container, and the heat generated by the element is packaged. A method for cooling an electronic device, comprising: transferring a liquid refrigerant to a liquid refrigerant through a member; allowing the liquid refrigerant to flow inside the container;

(11)液冷媒に沸点が100℃以下のフッ化炭素系冷却液を使用することを特徴とする電子装置の冷却方法。 (11) A method for cooling an electronic device, wherein a fluorocarbon coolant having a boiling point of 100 ° C. or less is used as the liquid refrigerant.

(12)液冷媒が容器の内部で噴霧される液滴を含むことを特徴とする電子装置の冷却方法。 (12) A method for cooling an electronic device, characterized in that the liquid refrigerant includes droplets sprayed inside the container.

本発明の冷却システムおよび冷却方法によれば、素子を含む基板の全体をパッケージ部材によって被包した状態で液冷媒中に浸漬するので、素子や基板からの溶出成分によって液冷媒が変質するおそれがなく、電子装置を安全かつ効率よく冷却できるとともに、電子装置の排熱を容易に再利用できるという優れた効果を奏する。   According to the cooling system and the cooling method of the present invention, since the entire substrate including the element is immersed in the liquid refrigerant in a state of being encapsulated by the package member, there is a possibility that the liquid refrigerant may be altered by the eluted component from the element or the substrate. Thus, the electronic device can be cooled safely and efficiently, and the exhaust heat of the electronic device can be easily reused.

本発明の一実施形態を示す電子装置の斜視図である。It is a perspective view of an electronic device showing one embodiment of the present invention. 図1の電子装置の冷却システムを示す断面図である。It is sectional drawing which shows the cooling system of the electronic device of FIG. パッケージ部材の変更例を示す断面図である。It is sectional drawing which shows the example of a change of a package member. 容器の変更例を示す断面図である。It is sectional drawing which shows the example of a change of a container. 複数の電子装置が保持された容器の断面図である。It is sectional drawing of the container in which the some electronic device was hold | maintained. データセンター用のサーバー冷却システムを示す概略図である。It is the schematic which shows the server cooling system for data centers.

以下、本発明の実施形態を図面に基づいて説明する。図1および図2に示す電子装置1は、基板2上に複数の素子3と電子回路(図示略)とを装備している。素子3はCPU、メモリ、トランジスタ、レジスタ等の発熱性電子ディバイスを含み、電子回路中の所定位置において基板2に実装されている。基板2の周縁部にはコネクタ4が設けられ、コネクタ4を除き、素子3を含む基板2の全体がパッケージ部材5によって被包されている。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. An electronic device 1 shown in FIGS. 1 and 2 includes a plurality of elements 3 and an electronic circuit (not shown) on a substrate 2. The element 3 includes a heat generating electronic device such as a CPU, a memory, a transistor, and a register, and is mounted on the substrate 2 at a predetermined position in the electronic circuit. A connector 4 is provided at the peripheral edge of the substrate 2, and the entire substrate 2 including the element 3 is encapsulated by a package member 5 except for the connector 4.

図1、図2に示すパッケージ部材5は、2枚のアルミニウム製のプレート6a,6bからなる金属ケース6を備え、金属ケース6の内側に基板2が取出可能に収納されている。2枚のプレート6a,6bは、防水パッキン7を介して接合され、周縁部が複数の締結具8で分離可能に締結されている。プレート6a,6bの内面と素子3および基板2との間には、高い伝熱性を備えたグラファイト製の絶縁シート9が介装されている。プレート6a,6bの外面には、素子3の発熱をパッケージ部材5の外部に放出する放熱フィン10が形成されている。   A package member 5 shown in FIGS. 1 and 2 includes a metal case 6 composed of two aluminum plates 6a and 6b, and a substrate 2 is accommodated inside the metal case 6 so as to be removable. The two plates 6 a and 6 b are joined via the waterproof packing 7, and the periphery is fastened so as to be separable by a plurality of fasteners 8. Between the inner surfaces of the plates 6a and 6b and the element 3 and the substrate 2, an insulating sheet 9 made of graphite having high heat conductivity is interposed. On the outer surfaces of the plates 6a and 6b, heat radiating fins 10 for releasing heat generated from the element 3 to the outside of the package member 5 are formed.

電子装置1の冷却システム11は、液冷媒Cを貯留する容器12を備えている。容器12の上面には、液冷媒Cの入口13および出口14と挿入口15とが設けられている。挿入口15には、パッケージ部材5を吊り下げるためのホルダ16が挿着されている。ホルダ16は、ゴム等の弾性材料で形成され、挿入口15の水密を保持するとともに、パッケージ部材5を液冷媒C中に浸漬した状態で容器12に保持するように構成されている。   The cooling system 11 of the electronic device 1 includes a container 12 that stores the liquid refrigerant C. On the upper surface of the container 12, an inlet 13 and an outlet 14 and an insertion port 15 for the liquid refrigerant C are provided. A holder 16 for suspending the package member 5 is inserted into the insertion port 15. The holder 16 is formed of an elastic material such as rubber, and is configured to hold the water tightness of the insertion port 15 and to hold the package member 5 in the container 12 while being immersed in the liquid refrigerant C.

図3に示すパッケージ部材5は、基板2および素子3に密着する絶縁カバー18を備えている。絶縁カバー18は、基板2および素子3に電気絶縁を保って接触する樹脂層18aと、液冷媒Cに接触する高い伝熱性を備えた金属層18bとからなり、樹脂層18aにより電気絶縁を確保して基板2および素子3に密着された状態で、パッケージ部材5の水密を確保している。   The package member 5 shown in FIG. 3 includes an insulating cover 18 that is in close contact with the substrate 2 and the element 3. The insulating cover 18 includes a resin layer 18a that is in contact with the substrate 2 and the element 3 while maintaining electrical insulation, and a metal layer 18b that is in contact with the liquid refrigerant C and has high heat conductivity. The resin layer 18a ensures electrical insulation. Thus, the watertightness of the package member 5 is ensured while being in close contact with the substrate 2 and the element 3.

また、図4に示すように、容器12を樹脂シートまたはフィルムで袋状に形成し、この柔軟袋の中に図2または図3に示すパッケージ部材5を収容してもよい。図5は、データセンター等において多数のサーバー1(電子装置)を冷却するのに適した大型の容器12を示す。この容器12は、内部に複数のパッケージ部材5を収納でき、かつパッケージ部材5の数に応じた容量の液冷媒Cを貯留できる容積で形成されている。容器12の上面は蓋部材23で覆われ、蓋部材23にパッケージ部材5を保持するための複数のホルダ16が装着されている。   Moreover, as shown in FIG. 4, the container 12 may be formed in a bag shape with a resin sheet or film, and the package member 5 shown in FIG. 2 or 3 may be accommodated in the flexible bag. FIG. 5 shows a large container 12 suitable for cooling a large number of servers 1 (electronic devices) in a data center or the like. The container 12 is formed with a volume capable of storing a plurality of package members 5 therein and storing liquid refrigerant C having a capacity corresponding to the number of package members 5. The upper surface of the container 12 is covered with a lid member 23, and a plurality of holders 16 for holding the package member 5 are attached to the lid member 23.

図6に示すように、データセンターに設置されたラック25には、サーバー1を収納する複数の容器12が格納されるとともに、各容器12の内部に液冷媒Cの流れF(図2,3参照)を形成する冷媒流通機構26が接続されている。冷媒流通機構26は、容器12の入口13と出口14との間を延びる冷媒循環管路27を装備し、この管路27によって相対的に高温の液冷媒Cを容器12から取り出し、相対的に低温の液冷媒Cを容器12に戻すように構成されている。   As shown in FIG. 6, a rack 25 installed in the data center stores a plurality of containers 12 that store the server 1, and the flow F of the liquid refrigerant C inside each container 12 (FIGS. 2 and 3). The refrigerant circulation mechanism 26 forming the reference) is connected. The refrigerant circulation mechanism 26 is equipped with a refrigerant circulation pipe 27 extending between the inlet 13 and the outlet 14 of the container 12, and a relatively high-temperature liquid refrigerant C is taken out from the container 12 through this pipe 27. The low-temperature liquid refrigerant C is returned to the container 12.

冷媒循環管路27上には、容器12から取り出した液冷媒Cを太陽熱で加熱するソーラヒータ28と、加熱後の液冷媒Cを用いて電力を生成する発電機29と、発電機29を通過した液冷媒Cの余熱を用いて温水を生成するタンク30と、発電機29で生成した電力の一部を利用して液冷媒Cを圧送するポンプ31と、発電機29で生成した余剰電力を蓄える蓄電池32とが配設されている。   On the refrigerant circulation line 27, the solar heater 28 that heats the liquid refrigerant C taken out of the container 12 by solar heat, the generator 29 that generates electric power using the heated liquid refrigerant C, and the generator 29 are passed. The tank 30 that generates hot water using the residual heat of the liquid refrigerant C, the pump 31 that pumps the liquid refrigerant C using a part of the electric power generated by the generator 29, and the surplus power generated by the generator 29 are stored. A storage battery 32 is provided.

液冷媒Cとしては、沸点が100℃以下のフッ化炭素系冷却液、例えば、商品名「Novec7300(沸点98℃)、Novec7200(沸点76℃)、Novec7100(沸点61℃)」(共に住友スリーエム社製)を好ましく使用できる。低沸点のフッ化炭素系冷却液は、素子3の発熱で蒸発しやすいため、容器12から取り出した蒸気流で発電機29のプロペラやタービンを効率よく回転し、発電量を増やすことができる。ソーラヒータ28はバイパス管路34上に設けられ、バイパス管路34がバルブ33を介して冷媒循環管路27に接続されている。そして、冷媒Cの流れをバイパス管路34側に切り替えることによって、ソーラヒータ28から発電機29により多量の蒸気流を供給できるように構成されている。   As the liquid refrigerant C, a fluorocarbon coolant having a boiling point of 100 ° C. or less, for example, trade names “Novec 7300 (boiling point 98 ° C.), Novec 7200 (boiling point 76 ° C.), Novec 7100 (boiling point 61 ° C.)” (both Sumitomo 3M) Can be preferably used. Since the low-boiling fluorocarbon coolant easily evaporates due to the heat generated by the element 3, the propeller and turbine of the generator 29 can be efficiently rotated by the steam flow taken out from the container 12, and the amount of power generation can be increased. The solar heater 28 is provided on the bypass line 34, and the bypass line 34 is connected to the refrigerant circulation line 27 via the valve 33. Then, by switching the flow of the refrigerant C to the bypass line 34 side, a large amount of steam flow can be supplied from the solar heater 28 by the generator 29.

上記構成の冷却システム11において、次に、電子装置1の冷却方法について説明する。まず、図1に示すように、基板をパッケージ部材5で被包し、所要数の電子装置1を用意する。次に、図2〜図5に示すように、パッケージ部材5を液冷媒C中に浸漬し、ホルダ16で容器12に保持する。この状態で、素子3の発熱をパッケージ部材5の金属ケース6(図2参照)または絶縁カバー18(図3参照)を介して液冷媒Cに伝える。   Next, the cooling method of the electronic apparatus 1 in the cooling system 11 having the above configuration will be described. First, as shown in FIG. 1, a substrate is encapsulated with a package member 5, and a required number of electronic devices 1 are prepared. Next, as shown in FIGS. 2 to 5, the package member 5 is immersed in the liquid refrigerant C and held in the container 12 by the holder 16. In this state, the heat generated by the element 3 is transmitted to the liquid refrigerant C through the metal case 6 (see FIG. 2) or the insulating cover 18 (see FIG. 3) of the package member 5.

続いて、図6に示すように、冷媒流通機構26のポンプ31により液冷媒Cを容器12に圧送し、入口13から出口14に向けて流動させる。そして、素子3の発熱を奪った高温の液冷媒Cを容器12の外部に取り出し、必要に応じてソーラヒータ28でさらに加熱し、発電機29で電力を生成し、電力の一部をポンプ31に供給し、余剰電力を蓄電池32に蓄え、発電機29を通過した液冷媒Cを用いてタンク30で温水を生成したのち、温度低下した液冷媒Cをポンプ31で容器12に還流させる。   Subsequently, as shown in FIG. 6, the liquid refrigerant C is pumped to the container 12 by the pump 31 of the refrigerant circulation mechanism 26, and flows from the inlet 13 toward the outlet 14. Then, the high-temperature liquid refrigerant C deprived of the heat generated by the element 3 is taken out of the container 12, further heated by the solar heater 28 as necessary, electric power is generated by the generator 29, and part of the electric power is supplied to the pump 31. After supplying the surplus power in the storage battery 32 and generating the hot water in the tank 30 using the liquid refrigerant C that has passed through the generator 29, the liquid refrigerant C whose temperature has decreased is recirculated to the container 12 by the pump 31.

この実施形態の冷却システムおよび冷却方法によれば、素子3を含む基板2の全体をパッケージ部材5によって被包した状態で液冷媒C中に浸漬するので、素子3や基板2の電子回路から溶出したフラックス成分等による液冷媒Cの変質を未然に防止することができる。したがって、特に、データセンターにおいて多数のサーバー1を安全かつ効率よく冷却できるとともに、サーバー1の排熱を有効に再利用できるという利点がある。   According to the cooling system and the cooling method of this embodiment, since the entire substrate 2 including the element 3 is immersed in the liquid refrigerant C in a state of being encapsulated by the package member 5, it is eluted from the electronic circuit of the element 3 and the substrate 2. It is possible to prevent alteration of the liquid refrigerant C due to the flux component and the like. Therefore, in particular, there are advantages that a large number of servers 1 can be cooled safely and efficiently in the data center, and the exhaust heat of the servers 1 can be effectively reused.

なお、本発明は上記実施形態に限定されるものではなく、例えば、容器12の内部に液冷媒を液滴(ミスト)の状態で噴霧するノズルを設け、高温の液滴を容器12の外部に取り出して、発電機29のタービンを駆動するなど、本発明の趣旨を逸脱しない範囲で各部の構成を適宜に変更して実施することも可能である。   The present invention is not limited to the above embodiment. For example, a nozzle that sprays liquid refrigerant in the form of droplets (mist) in the container 12 is provided, and high-temperature droplets are placed outside the container 12. It is also possible to implement by appropriately changing the configuration of each part without departing from the gist of the present invention, such as taking out and driving the turbine of the generator 29.

1 電子装置
2 基板
3 素子
5 パッケージ部材
6 金属ケース
9 絶縁シート
10 放熱フィン
11 冷却システム
12 容器
16 ホルダ
18 絶縁カバー
26 冷媒流通機構
27 冷媒循環管路
29 発電機
30 タンク
C 液冷媒
F 冷媒流
DESCRIPTION OF SYMBOLS 1 Electronic device 2 Board | substrate 3 Element 5 Package member 6 Metal case 9 Insulation sheet 10 Radiation fin 11 Cooling system 12 Container 16 Holder 18 Insulation cover 26 Refrigerant circulation mechanism 27 Refrigerant circulation line 29 Generator 30 Tank C Liquid refrigerant F Refrigerant flow

Claims (12)

基板上に複数の素子が実装された電子装置を冷却するシステムであって、前記素子を含む基板の全体を被包するパッケージ部材と、液冷媒を貯留する容器と、前記パッケージ部材を液冷媒中に浸けた状態で容器に保持するホルダと、前記容器の内部に液冷媒の流れを形成する冷媒流通機構とを備えたことを特徴とする冷却システム。   A system for cooling an electronic device having a plurality of elements mounted on a substrate, the package member enclosing the entire substrate including the elements, a container for storing liquid refrigerant, and the package member in liquid refrigerant A cooling system comprising: a holder that is held in a container while being immersed in the container; and a refrigerant circulation mechanism that forms a flow of liquid refrigerant inside the container. 前記冷媒流通機構が、相対的に高温の液冷媒を容器から取り出し、相対的に低温の液冷媒を容器に戻す冷媒循環管路を含む請求項1記載の冷却システム。   The cooling system according to claim 1, wherein the refrigerant circulation mechanism includes a refrigerant circulation pipe that takes out a relatively high-temperature liquid refrigerant from the container and returns the relatively low-temperature liquid refrigerant to the container. 前記冷媒循環管路上に、容器から取り出した液冷媒を用いて電力を生成する発電機を設けた請求項2記載の冷却システム。   The cooling system of Claim 2 which provided the generator which produces | generates electric power using the liquid refrigerant taken out from the container on the said refrigerant | coolant circulation conduit. 前記冷媒循環管路上に、容器から取り出した液冷媒を用いて温水を生成するタンクを設けた請求項2または3記載の冷却システム。   The cooling system according to claim 2 or 3, wherein a tank for generating hot water using the liquid refrigerant taken out from the container is provided on the refrigerant circulation pipe. 前記パッケージ部材が、基板を取出可能に収納する金属ケースを含む請求項1記載の冷却システム。   The cooling system according to claim 1, wherein the package member includes a metal case that accommodates the substrate in a removable manner. 前記金属ケースの内面と素子との間に絶縁シートを介装した請求項5記載の冷却システム。   The cooling system according to claim 5, wherein an insulating sheet is interposed between the inner surface of the metal case and the element. 前記金属ケースの外面に放熱フィンを設けた請求項5または6記載の冷却システム。   The cooling system according to claim 5 or 6, wherein heat radiation fins are provided on an outer surface of the metal case. 前記パッケージ部材が、基板および素子に密着する絶縁カバーを含む請求項1記載の冷却システム。   The cooling system according to claim 1, wherein the package member includes an insulating cover that is in close contact with the substrate and the element. 前記絶縁カバーが、基板および素子に接触する樹脂層と、液冷媒に接触する金属層とを備えた請求項8記載の冷却システム。   The cooling system according to claim 8, wherein the insulating cover includes a resin layer that contacts the substrate and the element, and a metal layer that contacts the liquid refrigerant. 基板上に複数の素子が実装された電子装置を用意し、前記素子を含む基板の全体をパッケージ部材で被包し、該パッケージ部材を容器内部の液冷媒中に浸け、前記素子の発熱をパッケージ部材を介して液冷媒に伝え、該液冷媒を容器の内部で流動させた後に、容器の外部に取り出すことを特徴とする電子装置の冷却方法。   An electronic device having a plurality of elements mounted on a substrate is prepared, the entire substrate including the elements is encapsulated in a package member, the package member is immersed in a liquid refrigerant inside the container, and the heat generated by the elements is packaged. A method for cooling an electronic device, comprising: transferring to a liquid refrigerant through a member, allowing the liquid refrigerant to flow inside the container, and then taking the liquid refrigerant out of the container. 前記液冷媒に沸点が100℃以下のフッ化炭素系冷却液を使用する請求項11記載の電子装置の冷却方法。   The method for cooling an electronic device according to claim 11, wherein a fluorocarbon coolant having a boiling point of 100 ° C. or less is used as the liquid refrigerant. 前記液冷媒が容器の内部で噴霧される液滴を含む請求項10または11記載の電子装置の冷却方法。   12. The method for cooling an electronic device according to claim 10, wherein the liquid refrigerant includes droplets sprayed inside the container.
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