JP2013022903A - Glass film laminate and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a glass film laminate in which overlapping glass film laminates do not stick to each other in roll-winding produced glass film laminates and positional accuracy on processing can be improved by preventing processing trouble such as oblique pattern formation with respect to the glass film when supplying the glass film laminate to supply to each process through transportation.SOLUTION: The glass film laminate includes a support film 1, an adhesive layer 2, and a glass film 3 laminated on the support film 1 via the adhesive layer 2, wherein a difference (|A-B|) between a width B of the support film 1 and a width A of the glass film 3 is within 1 mm, and distances a, b from ends 3a, 3b in the width direction X of the glass film 3 to ends 1a, 1b in the width direction of the support film 1 in each end side thereof are within ±0.5 mm from the ends 3a, 3b in the width direction of the glass film 3 to the inside.

Description

  The present invention relates to a glass film laminate, and more specifically, a support film is attached to thin glass (also referred to as “glass film”) used in displays such as organic EL displays and liquid crystal displays, color filters, solar cells, and the like. It is related with the glass film laminated body formed, and its manufacturing method.

  In recent years, thin glass (glass film) having a thickness of about 100 μm or less has been manufactured due to progress in glass manufacturing technology. For example, Patent Document 1 proposes a glass film having a thickness of 200 μm or less, and Patent Document 2 proposes a glass film having a thickness of 0.1 to 100 μm. Since such a glass film has flexibility, a roll-to-roll process can be applied to form a film on the glass film, so that high productivity can be obtained as compared with a conventional sheet (sheet-fed) process. it can. However, a thin glass film is inferior in impact resistance, and handling in a process becomes difficult.

  In order to improve handling in the process, Patent Document 3 proposes a glass film laminate in which a glass film and a support sheet are laminated with an adhesive layer interposed therebetween. In this glass film laminate, when a support sheet wider than the glass film is laminated, the support sheet protrudes from the end of the glass film. Therefore, since the protruding support sheet portion acts to protect the end portion of the glass film, it is said that the protective effect of the glass film inferior in impact resistance can be further enhanced.

JP 2008-133174 A JP 2001-97733 A JP 2010-228166 A

  In manufacture of an above-described glass film laminated body, after providing the adhesion layer in the whole surface of a support sheet, it bonds together with the glass film. Therefore, in the manufactured glass film laminate, there is an adhesive layer on the support sheet portion that protrudes from the end of the glass film, and when the manufactured glass film laminate is rolled, the overlapping glass films There was a problem that the laminates would stick together. Moreover, when the manufactured glass film laminated body was roll-conveyed, there also existed a problem that a glass film laminated body affixed on conveyance members, such as the roll.

  Moreover, when conveying the manufactured glass film laminated body, the both ends of the width direction of a glass film laminated body are detected and conveyed, and the conveyance straightness of a glass film laminated body is ensured. Therefore, in the case of a glass film laminate in which a glass film is bent and attached to a wide support sheet (hereinafter referred to as “support film” in the present invention), for example, the glass film is transported to a photolithography process and is applied to the glass film. When patterning the film formed on the glass film, for example, the exposure mask is correctly arranged for the glass film laminate, but for the glass film that is bent and stuck, for example, the exposure mask is obliquely arranged. Therefore, there is a problem that an oblique pattern is formed with respect to the glass film.

  The present invention has been made in order to solve the above-mentioned problems, and its purpose is that when the manufactured glass film laminate is rolled, the overlapped glass film laminates are adhered to each other. In addition, when the glass film laminate is transported and used for each process, it is possible to improve processing position accuracy by preventing processing defects such as oblique pattern formation with respect to the glass film. It is providing a film laminated body and its manufacturing method.

  A glass film laminate according to the present invention for solving the above-described problems includes a support film, an adhesive layer, and a glass film laminated on the support film via the adhesive layer, and the width B of the support film. And the width A of the glass film (| A-B |) is within 1 mm, and each end in the width direction of the support film from each end in the width direction of the glass film to each end. The distance is up to ± 0.5 mm from the end in the width direction of the glass film toward the inside.

  According to this invention, the difference between the width B of the support film and the width A of the glass film is within 1 mm as the absolute value difference | A−B |, and the respective end portions from the respective end portions in the width direction of the glass film. Since the distance to each end in the width direction of the support film on the side is within ± 0.5 mm inward from the width direction end of the glass film, the end of the support film and the end of the glass film Are disposed at the same position or substantially at the same position, and the adhesive layer provided on the support film is not exposed or substantially not exposed. As a result, when the glass film laminate is rolled, the overlapped glass film laminates do not stick to each other, and when the glass film laminate is roll conveyed, the glass film is applied to a conveying member such as a roll. The laminated body will not stick. Furthermore, when conveying the glass film laminate, both ends in the width direction of the glass film laminate are detected. At both ends, the end position of the support film and the end position of the glass film are the same position or substantially. Since they are at the same position, for example, an exposure mask or the like is not disposed obliquely with respect to the glass film, and processing defects such as pattern formation can be prevented, and position accuracy during processing is not reduced.

  In the glass film laminate according to the present invention, at least a patterned film is provided on the glass film.

  According to this invention, on the glass film, any one or two or more films selected from a transparent electrode film, a metal film, a semiconductor film, an organic compound film, an inorganic compound film, and the like are provided in a patterned manner. Therefore, such a glass film laminate is applied to, for example, an organic EL display element substrate, a liquid crystal display element substrate, a color filter element substrate, a solar cell element substrate, and the like. As described above, the glass film laminate according to the present invention has an effect of preventing sticking during roll winding and the like, and improving the positional accuracy during processing. Therefore, a film patterned on the glass film laminate exhibiting such an effect is provided. By providing, when manufacturing the organic EL display etc. using the glass film laminate as an element substrate for organic EL display, etc., it is possible to reduce process defects and to form various patterns with high positional accuracy. There is an effect that can be done.

  In order to solve the above problems, the method for producing a glass film laminate according to the present invention has a difference (| A−B |) between the step of preparing a support film provided with an adhesive layer and the width B of the support film. A step of preparing a glass film having a width A of 1 mm or less, and a distance from each end in the width direction of the glass film to each end in the width direction of the support film on each end side of the glass film A step of bonding the glass film and the support film through the adhesive layer so as to be within ± 0.5 mm inward from the end in the width direction.

  According to the present invention, a support film and a glass film having a width A that is the same as or substantially the same as the width B of the support film are prepared, and the support on each end side from each end in the width direction of the glass film is prepared. The glass film and the support film are bonded together via an adhesive layer so that the distance to each end in the width direction of the film is within ± 0.5 mm from the end in the width direction of the glass film inward. Therefore, in the manufactured glass film laminate, the end portion of the support film and the end portion of the glass film are disposed at the same position or substantially the same position, and the adhesive layer provided on the support film is not exposed or substantially exposed. Not exposed. As a result, the same effects as above (preventing sticking during roll winding and improving position accuracy during processing) are achieved.

  According to the glass film laminate and the method for producing the same according to the present invention, the end portion of the support film and the end portion of the glass film are arranged at the same position or substantially the same position, and are provided in the support film. Is not exposed or substantially not exposed, so that when the glass film laminate is rolled, the overlapping glass film laminates do not stick to each other, and when the glass film laminate is rolled and conveyed, A glass film laminated body will not stick to conveyance members, such as a roll. Furthermore, when conveying the glass film laminate, both ends in the width direction of the glass film laminate are detected. At both ends, the end position of the support film and the end position of the glass film are the same position or substantially. Since they are at the same position, for example, an exposure mask or the like is not disposed obliquely with respect to the glass film, and processing defects such as pattern formation can be prevented, and position accuracy during processing is not reduced.

It is typical sectional drawing which shows an example of the glass film laminated body which concerns on this invention. It is typical sectional drawing which shows the example of the glass film laminated body which concerns on this invention. It is a typical top view which shows the distance from the edge part of the elongate glass film to the edge part of a support film. It is typical sectional drawing which shows an example of the glass film laminated body provided with the film | membrane. It is a schematic diagram which shows an example of the manufacturing apparatus of a glass film laminated body.

  A glass film laminate and a method for producing the same according to the present invention will be described in detail with reference to the drawings. The present invention can be modified in various ways as long as it has the technical features, and is not limited to the embodiments specifically shown below.

[Glass film laminate]
The glass film laminated body 10 which concerns on this invention is equipped with the support film 1, the adhesion layer 2, and the glass film 3 laminated | stacked on the support film 1 via the adhesion layer 2, as shown in FIG.1 and FIG.2. ing. The difference between the width B of the support film 1 and the width A of the glass film 3 is within 1 mm as the absolute value difference | A−B |, and each end 3a in the width direction X of the glass film 3 The distances a and b from 3b to the end portions 1a and 1b in the width direction of the support film 1 on each end side are ± 0.5 mm from the width direction end portions 3a and 3b of the glass film 3 inward. It is characterized by being within.

  Hereinafter, each configuration will be described in detail.

(Support film)
As shown in FIG. 1, the support film 1 is a film for supporting the glass film 3, and is bonded to the glass film 3 through the adhesive layer 2. As the support film 1, a flexible resin film is used. Examples of the resin material constituting the support film 1 include polyethylene, polyvinyl chloride, polyethylene terephthalate, polyvinylidene chloride, polypropylene, polyvinyl alcohol, polyester, polycarbonate, polystyrene, polyamide, polyacrylonitrile, ethylene vinyl acetate copolymer, and ethylene. -A vinyl alcohol copolymer, an ethylene-methacrylic acid copolymer, nylon, cellophane, a silicone resin, etc. can be mentioned. Among these, polyethylene terephthalate, polyethylene, polyvinylidene chloride and the like can be preferably exemplified.

  The support film 1 may be a single layer film formed of the above-described resin material, or may be a multilayered film. Further, it may be a support film 1 made of a foamable resin material, or a support film 1 made of a resin material to which a stabilizer, a plasticizer, an impact modifier, a colorant, a reinforcing agent, and the like are added. There may be. The presence or absence of coloring of the support film 1 and translucency (transparent, translucent, opaque, etc.) are not particularly limited.

  The thickness of the support film 1 is preferably 1 μm to 200 μm, and more preferably 10 μm to 50 μm. The support film 1 in this thickness range can support the glass film 3 and does not cause problems when the obtained glass film laminate 10 is rolled. When the thickness of the support film 1 is less than 1 μm, the effect of supporting the glass film 3 is not substantially achieved due to being too thin. On the other hand, when the thickness of the support film 1 exceeds 200 μm, when the obtained glass film laminate 10 is rolled, the residual stress in the support film becomes large, and between the support film 1 and the glass film 3. Peeling may occur or the glass film 3 may be broken.

  The support film 1 may be a single-wafer support film, but a long support film (see FIG. 3) that can be rolled is preferably used. In the present invention, as will be described later, the difference between the width B of the support film 1 and the width A of the glass film 3 (absolute difference | A−B |) is within 1 mm, and the widths A and B of both are the same. It can be evaluated as width or substantially the same width. Therefore, when the sheet-like support film 1 and the glass film 3 are used, each side of the support film 1, for example, in the case of a quadrilateral, the ends of the four sides coincide with the ends of the glass film 3. Or it can paste together so that it may correspond substantially. Moreover, also when using the support film 1 and the glass film 3 of the long aspect wound by roll etc., as shown in FIG. 3, both ends 1a and 1b of the width direction X of the support film 1 are also a long aspect similarly. The glass film 3 can be bonded so as to coincide with or substantially coincide with the end portions 3a, 3b on both sides in the width direction X.

  Such a support film 1 can be formed into a film by a generally known production method, and can be produced by an extrusion method, a calendar method, a solution / emulsion cast method, or the like.

(Adhesive layer)
The adhesive layer 2 is provided between the support film 1 and the glass film 3 in order to laminate the support film 1 and the glass film 3. The pressure-sensitive adhesive layer 2 is not limited to a layer that can be finally peeled off from the glass film 3, but also includes a layer that adheres to the glass film 3 permanently or semi-permanently without peeling from the glass film 3, that is, an adhesive layer.

  The material constituting the adhesive layer 2 is a rubber adhesive obtained by mixing natural rubber or synthetic rubber with tackifiers, softeners, anti-aging agents, etc., and an acrylic ester and other functional monomers are copolymerized. Acrylic adhesives, silicone adhesives composed of silicone rubber and resin, polyether and polyurethane adhesives, and the like. Examples of the form include a solvent-type pressure-sensitive adhesive, a non-aqueous emulsion-type pressure-sensitive adhesive, a water-based emulsion-type pressure-sensitive adhesive, a water-soluble pressure-sensitive adhesive, a solventless pressure-sensitive adhesive, and a liquid curable pressure-sensitive adhesive. In addition, when the adhesion layer 2 is provided as an adhesive layer which adheres permanently or semipermanently to the glass film 3, various thermoplastic resin adhesives and thermosetting resin adhesives may be applied.

  The pressure-sensitive adhesive layer 2 may have a single layer structure formed of the above-described materials, or may be a multilayered layer. Moreover, the adhesion layer 2 formed with the adhesive which added various additives as needed may be sufficient as the adhesion layer 2. The presence or absence of coloring of the adhesive layer 2 and translucency (transparent, translucent, opaque, etc.) are not particularly limited.

  The thickness of the adhesive layer 2 is preferably 0.5 μm to 100 μm, and more preferably 1 μm to 50 μm. The pressure-sensitive adhesive layer 2 in this thickness range does not cause a problem when the support film 1 and the glass film 3 are subsequently handled or rolled, although depending on the type of pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer 2. In addition, it can be preferably bonded. When the thickness of the adhesion layer 2 is less than 0.5 μm, the bonding between the support film 1 and the glass film 3 may be insufficient. On the other hand, when the thickness of the pressure-sensitive adhesive layer 2 exceeds 100 μm, the pressure-sensitive adhesive layer 2 may be peeled off, or the pressure-sensitive adhesive layer 2 may protrude from the glass film 3 and come into contact with a roll during bonding.

  For the formation of the pressure-sensitive adhesive layer 2, the above-mentioned material is dissolved in a solvent to obtain a pressure-sensitive adhesive layer coating solution, and the coating solution is directly applied onto the support film 1, or the coating solution is peelable. A method (transfer method) in which the sheet is once coated and then transferred onto the support film 1 can be used. The latter transfer method is preferably used when the support film 1 does not have solvent resistance, or when the support film 1 does not have heat resistance against heat during solvent drying.

  As the coating method, for example, a die coating method, a comma coating method, a knife coating method, a gravure coating method, a roll coating method, or the like can be used.

  In addition, the adhesion layer 2 does not exceed the outer dimension of the support film 1. That is, the pressure-sensitive adhesive layer 2 is provided in the same shape or size as the planar view shape of the support film 1. Therefore, it is provided on one surface of the support film 1 so as not to exceed the support film 1, and is usually provided on the entire surface of the support film 1 with the same size. That is, the width of the adhesive layer 2 is the same as the width B of the support film 1. In addition, as long as the effects of the present invention (prevention of sticking at the time of roll winding and the like and improvement of positional accuracy at the time of processing) are not hindered, the film may be provided with a size slightly smaller than the support film 1, for example, 1 mm. It may be provided with a size as small as possible.

(Glass film)
The glass film 3 is thin glass laminated on the support film 1 with the adhesive layer 2 interposed therebetween. As the glass material constituting the glass film 3, those having almost any glass composition such as soda lime glass, silica glass, borosilicate glass, non-alkali borosilicate glass, etc. can be applied. When the glass film 3 contains an alkali component, cation substitution occurs on the surface, so-called soda blowing phenomenon may occur, and the structure may become rough. Note that the alkali-free borosilicate glass is glass that does not substantially contain an alkali component, and specifically, glass having an alkali component of 1000 ppm or less. Moreover, the glass film 3 which gave secondary processing, such as tempered glass and surface treatment glass, is also possible according to the use of the glass film laminated body 10 obtained.

  In principle, the glass film 3 can be produced by stretching the glass melt at a temperature above the temperature at which the glass melt solidifies. The thickness of the glass film 3 can be controlled by the glass composition, the thickness of the glass melt, the temperature, and the take-up speed.

  The thickness of the glass film 3 is preferably 10 μm to 200 μm, and more preferably 30 μm to 150 μm. The glass film 3 in this thickness range is effective for handling, roll winding and the like. When the thickness of the glass film 3 is less than 10 μm, the handling of the glass film 3 itself becomes extremely difficult, and the glass film 3 is easily damaged by a slight impact, and the disconnection runs in the width direction X of the long glass film 3 Sometimes. On the other hand, when the thickness of the glass film 3 exceeds 200 μm, the residual stress in the glass film 3 becomes large when the obtained glass film laminate 10 is rolled, and the gap between the glass film 3 and the support film 1 is increased. May cause peeling or breakage of the glass film 3.

  Although the glass film 3 may be a single wafer glass film, a long glass film that can be rolled is preferably used.

(Difference between the width of the glass film and the width of the support film)
As for the width A of the glass film 3, the difference with respect to the width B of the support film 1 is within 1 mm as the absolute value difference | A−B |. “The difference in width (| A−B |) is within 1 mm” can be evaluated that both widths are the same width or substantially the same width. When the width difference (A−B) is positive, the width A of the glass film 3 is larger (wider) than the width B of the support film 1, and the difference (A−B) is negative. Is the case where the width A of the glass film 3 is smaller (narrower) than the width B of the support film 1.

  By setting the difference in width (difference in absolute value | A−B |) within this range, for example, when the glass film 3 and the support film 1 in a single wafer mode are used, each side of the glass film 3, for example, four sides In the case of the shape, it can be bonded so that the positions of the end portions of the four sides and the end portions of the support film 1 in the same sheet-like manner match or substantially match. On the other hand, also when using the glass film 3 and the support film 1 of the long aspect wound by roll etc., as shown in FIG. 3, the edge parts 3a and 3b of both sides of the width direction X of the glass film 3 are the same. The long support film 1 can be bonded so that the positions of both ends 1a and 1b in the width direction X of the support film 1 coincide or substantially coincide with each other.

  In the glass film laminate 10 bonded in this manner, the adhesive layer 2 provided on the support film 1 is not exposed or substantially exposed at the end of the glass film laminate 10 (synonymous with “peripheral portion”). do not do. As a result, when the glass film laminate 10 is rolled, the overlapping glass film laminates do not stick to each other, and when the glass film laminate 10 is roll conveyed, The glass film laminate 10 is not stuck. Furthermore, although the both ends of the width direction X of the glass film laminated body 10 are detected at the time of conveyance of the glass film laminated body 10, in the both ends, the position of the edge parts 1a and 1b of the support film 1 and the edge part of the glass film 3 are detected. The positions 3a and 3b are the same position or substantially the same position. As a result, for example, an exposure mask or the like is not disposed obliquely with respect to the glass film 3, and processing defects such as pattern formation can be prevented, and positional accuracy during processing is not reduced.

  When the width difference (A−B) exceeds −1 mm, that is, when the width B of the support film 1 is greater than 1 mm than the width A of the glass film 3, it is provided on the support film 1. The adhesive layer 2 protrudes from the end of the glass film laminate 10 to that limit. As a result, when the glass film laminate 10 is rolled, there is a possibility that the overlapped glass film laminates may be stuck by the exposed adhesive layer 2, and when the glass film laminate 10 is rolled and conveyed, There exists a possibility that the glass film laminated body 10 may adhere to conveyance members, such as a roll. Furthermore, although the both ends of the width direction of the glass film laminated body 10 are detected at the time of conveyance of the glass film laminated body 10, there exists a possibility that the edge parts 1a and 1b of the support film 1 which protruded may be detected in the both ends. As a result, for example, the exposure mask or the like may be disposed obliquely with respect to the glass film 3, and processing defects such as pattern formation may occur, resulting in a decrease in positional accuracy during processing.

  When the width difference (A−B) exceeds +1 mm, that is, when the width A of the glass film 3 is wider than the width B of the support film 1 by 1 mm, the ends 3a and 3b of the glass film 3 are supported. The film 1 protrudes from the ends 1a and 1b. As a result, during the manufacturing process of the glass film laminate 10 or when the obtained glass film laminate 10 is handled, the end portions 3a and 3b of the glass film 3 protruding from the end portions 1a and 1b of the support film. There is a risk of scratches and cracks.

(Distance between end of glass film and support film)
The distances a and b from the end portions 3a and 3b in the width direction X of the glass film 3 to the end portions 1a and 1b in the width direction X of the support film 1 on the end portions 3a and 3b side of the glass film 1 It is desirable that it is within ± 0.5 mm inward from the end portions 3a, 3b in the width direction X. Specifically, the distance a from the end 3a in the width direction X of the glass film 3 to the end 1a in the width direction X of the support film 1 on the end 3a side is from the end 3a in the width direction X of the glass film 3. The distance b from the end portion 3b in the width direction X of the glass film 3 to the end portion 1b in the width direction X of the support film 1 on the end portion 3b side is within ± 0.5 mm toward the inside. It is desirable that it is within ± 0.5 mm inward from the end portion 3b in the width direction X of the glass film 3.

  The glass film 3 and the support film 1 are bonded so that the end portions (3a, 3b and 1a, 1b) of both coincide with each other or substantially coincide with each other. b indicates the degree of coincidence at that time. That the distances a and b between the end portions are within 0.5 mm means that the glass film 3 and the support film 1 having the width difference (| A−B |) within 1 mm are in the same position or substantially. It means that they are stuck together. Therefore, when the glass film 3 and the support film 1 having a width difference (| A−B |) of 1 mm or less are bonded to the same position, the distances a and b between the end portions are within ± 0.5 mm. . In addition, “+” is a case where the end portions 1 a and 1 b of the support film 1 exist inward from the end portions 3 a and 3 b of the glass film 3, and “−” is an end portion 3 a of the glass film 3. , 3b, the end portions 1a, 1b of the support film 1 protrude outward.

  The glass film laminate 10 bonded at such distances a and b is the end in the width direction X, and neither the end 3a or 3b of the glass film 3 nor the end 1a or 1b of the support film protrudes or It does not actually protrude. As a result, the pressure-sensitive adhesive layer 2 is not exposed or substantially not exposed. Therefore, when the glass film laminate 10 is rolled, the overlapping glass film laminates do not stick to each other, and the glass film laminate 10 When the roll is conveyed, the glass film laminate 10 is not attached to a conveyance member such as the roll. Furthermore, since the support film 1 does not protrude or does not substantially protrude, both ends of the glass film laminate 10 in the width direction X are detected when the glass film laminate 10 is conveyed. As a result, for example, an exposure mask or the like is not disposed obliquely with respect to the glass film 3, and processing defects such as pattern formation can be prevented, and positional accuracy during processing is not reduced. Moreover, since the glass film 3 does not protrude or does not substantially protrude, when the glass film laminate 10 is handled during the manufacturing process of the glass film laminate 10, the end 3 a of the glass film 3 is used. , 3b has no risk of scratches or cracks.

  The case where the distances a and b exceed ± 0.5 mm is based on the premise that the difference (| A−B |) between the width A of the glass film 3 and the width B of the support film 1 is within 1 mm. This is a case where the glass film 3 and the support film 1 cannot be bonded to the same position and are shifted to the left and right and become unbalanced.

  When the distances a and b exceed −0.5 mm, that is, when the end portions 1 a and 1 b of the support film 1 exceed 0.5 mm and protrude outward in the glass film 3, they are provided on the support film 1. The pressure-sensitive adhesive layer 2 protrudes from the end of the glass film laminate 10 to that limit. As a result, when the glass film laminate 10 is rolled, there is a possibility that the overlapped glass film laminates may stick together, and when the glass film laminate 10 is roll conveyed, There exists a possibility that the glass film laminated body 10 may stick. Furthermore, although the both ends of the width direction X of the glass film laminated body 10 are detected at the time of conveyance of the glass film laminated body 10, the edge part 1a of the support film 1 is in the edge part of the side which the support film 1 protruded among both ends. , 1b may be detected. As a result, for example, the exposure mask or the like may be disposed obliquely with respect to the glass film 3, and processing defects such as pattern formation may occur, resulting in a decrease in positional accuracy during processing.

  When the distances a and b exceed +0.5 mm, that is, when the end portions 3a and 3b of the glass film 3 exceed 0.5 mm and protrude outward from the support film 1, the glass film laminate 10 is manufactured. During the process or when the obtained glass film laminate 10 is handled, scratches and cracks may occur in the end portions 3a and 3b of the protruding glass film 3.

  The distances a and b between the width A of the glass film 3, the width B of the support film 1, the end portions 3a and 3b in the width direction X of the glass film 3 and the end portions 1a and 1b of the support film 1 are various. It can be measured by this method. In the present invention and each example described later, the measurement was performed by comparing an enlarged image when the glass film 3, the support film 1, and the glass film laminate 10 to be measured were viewed in plan and an enlarged image of the reference scale.

(Other configurations)
On the glass film 3, you may provide the film | membrane 4 as shown in FIG. Although the film | membrane 4 is not specifically limited, For example, the film of any 1 type or 2 or more types chosen from a transparent electrode film, a metal film, a semiconductor film, a resist film, an organic compound film, an inorganic compound film etc. can be mentioned. In particular, it is preferable that such a film 4 is patterned according to its application.

  As the patterning method, various conventionally known methods can be applied and are not particularly limited. For example, patterning may be performed by applying photolithography using a resist, or patterning may be performed by dry etching or wet etching.

  As an example of the glass film laminated body 10 which provides the film | membrane 4 patterned on the glass film 3, the element substrate for organic EL displays, the element substrate for liquid crystal displays, the element substrate for color filters, the element substrate for solar cells, for example Etc. In the element substrate for organic EL display, a transparent electrode film such as patterned ITO can be provided on the glass film 3 of the glass film laminate 10. In the element substrate for a liquid crystal display, a similar transparent electrode film such as ITO or a patterned alignment film can be provided. In the color filter element substrate, the same transparent electrode film such as ITO, colored layer partition walls, colored layers, and the like can be provided. Moreover, in the element substrate for solar cells, the same transparent electrode film etc., such as patterned ITO, can be provided. Further, in order to form various functional film patterns on each of these element substrates, a film 4 formed by forming a resist film on the glass film 3 and patterning the resist film by, for example, photolithography may be used. .

  Since the glass film laminate 10 according to the present invention has the effects of preventing sticking during roll winding and the like and improving the positional accuracy during processing, as described above, the glass film laminate 10 was patterned into the glass film laminate 10 exhibiting such effects. By providing the film 4, the glass film laminate 10 is used as, for example, an organic EL display element substrate, a liquid crystal display element substrate, a color filter element substrate, a solar cell element substrate, or the like. When a color filter, a solar cell, or the like is manufactured, it is possible to reduce process defects and to form various patterns with high positional accuracy.

[Method for producing glass film laminate]
In the method for producing the glass film laminate 10 according to the present invention, the difference (| A−B |) between the step of preparing the support film 1 provided with the adhesive layer 2 and the width B of the support film 1 is within 1 mm. The step of preparing the glass film 3 with the width A, and the end portions 1a and 1b in the width direction X of the support film 1 on the side of the end portions 3a and 3b from the end portions 3a and 3b in the width direction X of the glass film 3 Glass film 3 and support film 1 through adhesive layer 2 such that distances a and b are within ± 0.5 mm inward from end portions 3a and 3b in the width direction X of glass film 3. And a step of bonding them together.

  This manufacturing method is an embodiment for manufacturing the glass film laminate 10 according to the present invention described above. The glass film laminate 10 according to the present invention described above may be manufactured by other methods. In addition, the glass film laminated body 10 is manufactured, and as shown in FIG. 4, the patterned film | membrane 4 etc. are provided, the element substrate for organic EL displays, the element substrate for liquid crystal displays, the element substrate for color filters, a solar cell The support film 1 with the pressure-sensitive adhesive layer 2 may be peeled after manufacturing the element substrate or the like.

  FIG. 5 is a schematic diagram showing an example of a manufacturing apparatus 20 for the glass film laminate 10 in which this manufacturing method can be carried out. As shown in FIG. 5, the roll-like support film roll 23 is attached to the support film supply unit 22, and the roll-like glass film roll 25 is attached to the glass film supply unit 24. The support film roll 23 is a roll of the support film 1 having the adhesive layer 2 provided on one side via a cover sheet, and the support film 1 fed from the support film roll 23 while peeling the cover sheet; The glass film 3 fed out from the glass film roll 25 is bonded at the bonding portion 26. In addition, the support film 1 and the glass film 3 are guided to the bonding part 26 with the guide roller 28 arrange | positioned as needed.

  In the bonding unit 26, the support film 1 and the glass film 3 are bonded together with the nip roller 30 through the adhesive layer 2. The glass film laminated body 10 after bonding is sent to the winding part 34 through the conveyance path 32, and becomes a roll-shaped glass film laminated body roll 36.

  In the glass film laminate 10 produced by this production method, the end portions 1a and 1b of the support film 1 and the end portions 3a and 3b of the glass film 3 are the same as the glass film laminate 10 according to the present invention described above. The pressure-sensitive adhesive layer 2 disposed at the position or substantially the same position and provided on the support film 1 is not exposed or substantially not exposed. As a result, when the glass film laminate 10 is rolled, the overlapping glass film laminates do not stick to each other, and when the glass film laminate 10 is roll conveyed, The glass film laminate 10 is not stuck. Furthermore, although the both ends of the width direction of the glass film laminated body 10 are detected at the time of conveyance of the glass film laminated body 10, the edge part position of the support film 1 and the edge part position of the glass film 3 are the same position in the both edge parts. Alternatively, since the positions are substantially the same, for example, the exposure mask or the like is not disposed obliquely with respect to the glass film, processing defects such as pattern formation can be prevented, and position accuracy during processing is not reduced.

  Hereinafter, the present invention will be described in more detail with reference to examples. In addition, this invention is not limited only to the content of the following Examples. In the following examples, when the glass film laminate 10 is manufactured, and the film 4 provided on the glass film laminate 10 is further subjected to a photolithography process and patterned, in this series of steps, it is applied at the time of roll winding. In addition, the positional accuracy of the pattern and the crack at the end were evaluated.

[Example 1]
As the support film 1, a support film roll 23 in which a PET film with an adhesive layer having a thickness of 59 μm, a width of 300 mm, and a length of 10 m (manufactured by Nitto Denko Corporation, RP207) was wound around a 3-inch core was prepared. On the pressure-sensitive adhesive layer 2 provided on the support film 1, a cover sheet is detachably attached. As the glass film 3, a glass film roll 25 in which a thin glass plate (manufactured by Nippon Electric Glass Co., Ltd., OA-10G) having a thickness of 70 μm, a width of 300 mm, and a length of 10 m was wound around a 6-inch core was prepared.

  Subsequently, using the laminating apparatus shown in FIG. 5, a support film roll 23 was installed in the support film supply unit 22, and a glass film roll 25 was installed in the glass film supply unit 24. Subsequently, the glass film 3 fed out from the glass film roll 25 and the support film 1 fed out from the support film roll 23 were laminated with the nip roller 30 of the laminating portion 26 after centering each film. Then, the conveyance path 32 was conveyed, and it wound up on the core whose diameter is 6 inches, and produced the glass film laminated body roll 36. FIG.

  Next, the glass film laminated body roll 36 was set in the unwinding part of the coating apparatus (not shown), and the glass film laminated body 10 was drawn out. Then, the photoresist was apply | coated by the micro gravure printing on the glass film 3 of the rolled-out glass film laminated body 10, and it wound up after that. Then, the glass film laminated body roll after forming a photoresist was set to the unwinding part of the exposure apparatus, and the glass film laminated body roll was let out. In addition, the drawing to the exposure apparatus is performed on the exposure stage by detecting the end portions 3a and 3b of the glass film laminate 10 with an ultrasonic sensor so that the end portions 3a and 3b of the glass film laminate 10 are at a fixed position. Then, the exposure operation was performed five times. Then, it developed using the developing device and obtained the glass film laminated body 10 with a pattern in which the pattern was formed in five places.

  In the obtained glass film laminate 10, the distance a from the end 3a of the glass film 3 to the end 1a of the support film is ± 0 mm, and from the end 3b of the glass film 3 to the end 1b of the support film. The distance b was also ± 0 mm.

[Example 2]
In Example 1, the bonding position between the glass film 3 and the support film 1 at the bonding portion 26 is controlled, and the distance a from the end 3a of the glass film 3 to the end 1a of the support film is +0.5 mm. A patterned glass film laminate was obtained in the same manner as in Example 1 except that the distance b from the end 3b of the glass film 3 to the end 1b of the support film was set to -0.5 mm.

[Example 3]
In Example 1, the width of the PET film with an adhesive layer (manufactured by Nitto Denko Corporation, RP207) is set to 299 mm, and the bonding position of the glass film 3 and the support film 1 at the bonding portion 26 is controlled, and the glass film 3 except that the distance a from the end 3a of the support 3 to the end 1a of the support film is +0.5 mm, and the distance b from the end 3b of the glass film 3 to the end 1b of the support film is also +0.5 mm. In the same manner as in Example 1, a patterned glass film laminate was obtained.

[Example 4]
In Example 1, the width of the PET film with an adhesive layer (manufactured by Nitto Denko Corporation, RP207) is set to 301 mm, the bonding position of the glass film 3 and the support film 1 at the bonding portion 26 is controlled, and the glass film The distance a from the end portion 3a of the support film 3 to the end portion 1a of the support film is set to -0.5 mm, and the distance b from the end portion 3b of the glass film 3 to the end portion 1b of the support film is also set to -0.5 mm. In the same manner as in Example 1, a patterned glass film laminate was obtained.

[Comparative Example 1]
In Example 1, the width of the PET film with an adhesive layer (manufactured by Nitto Denko Corporation, RP207) is 298 mm, the bonding position between the glass film 3 and the support film 1 at the bonding portion 26 is controlled, and the glass film 3 except that the distance a from the end 3a of the support 3 to the end 1a of the support film is +1 mm, and the distance b from the end 3b of the glass film 3 to the end 1b of the support film is also +1 mm. Thus, a patterned glass film laminate was obtained.

[Comparative Example 2]
In Example 3, by controlling the bonding position between the glass film 3 and the support film 1 at the bonding portion 26, the distance a from the end 3a of the glass film 3 to the end 1a of the support film is set to +1 mm, A patterned glass film laminate was obtained in the same manner as in Example 3 except that the distance b from the end 3b of the glass film 3 to the end 1b of the support film was ± 0 mm.

[Comparative Example 3]
In Example 4, the bonding position of the glass film 3 and the support film 1 in the bonding part 26 is controlled, and the distance a from the end 3a of the glass film 3 to the end 1a of the support film is set to -1 mm. A patterned glass film laminate was obtained in the same manner as in Example 4 except that the distance b from the end 3b of the glass film 3 to the end 1b of the support film was ± 0 mm.

[Measurements and results]
About the glass film laminated body with a pattern obtained by Examples 1-4 and Comparative Examples 1-3, as above-mentioned, distance of edge part 3a, 3b of the glass film 3 and edge part 1a, 1b of the support film 1 Table 1 shows a and b. The numerical value “+” of the distances a and b is the case where the end portions 1 a and 1 b of the support film 1 exist inside the end portions 3 a and 3 b of the glass film 3, and the numerical value “−” indicates the support film This is a case where the end portions 1 a and 1 b of 1 protrude beyond the end portions 3 a and 3 b of the glass film 3.

  The evaluation items of the conveyance test in Table 1, “sticking at the time of roll winding”, “positional accuracy of the pattern”, and “cracking at the end” were subjected to a photolithography process using the produced glass film laminate 10. It was evaluated later. Here, “sticking at the time of roll winding” is a result of evaluating whether or not the glass film laminates 10 are stuck together when the produced glass film laminate 10 is rolled, and “1”. Was a case where no sticking occurred, “2” was a case where it was as good as it seemed that there was a slight sticking, and “3” was a case where sticking had occurred. The “positional accuracy of the pattern” means that, in each of the five patterns, the film pattern 4 (see FIG. 4) formed on the glass film laminate 10 is the end of the glass film 3 constituting the glass film laminate 10. It is a result of evaluating whether or not the formation positions for 3a and 3b are formed at predetermined positions. “1” indicates that the film pattern formation position is good, and “2” indicates that the film pattern formation position is strict. In this case, “3” was accurately provided for the end portions 1a and 1b of the support film, but the accuracy for the end portions 3a and 3b of the glass film 3 was not. As a little insufficient. In addition, the “end portion crack” means that after the manufacturing process of the glass film laminate 10 and the film pattern forming step, the end portions 3a and 3b of the glass film 3 constituting the produced glass film laminate 10 are cracked. It is an evaluation of whether or not a flaw has occurred. “1” is a case where no cracks or flaws are generated, “2” is a case where there is a slight flaw but there is no problem in practical use, and “3”. In the case where scratches or cracks occurred.

  In addition, as a comprehensive evaluation, “○” is usable, “△” has at least one evaluation of “3” or all “2”, and there are some problems in use. It was.

  As can be seen from the results in Table 1, when the difference in width (| A-B |) is within 1 mm and the distances a and b are within ± 0.5 mm (Examples 1 to 4), the glass film is laminated. Sticking at the time of roll winding of the body 10 did not occur, the pattern position accuracy in the patterning step did not decrease, and the end of the glass film 3 did not crack.

DESCRIPTION OF SYMBOLS 1 Support film 1a, 1b End part of support film 2 Adhesive layer 3 Glass film 3a, 3b End part of glass film 10, 10A, 10B, 10C Glass film laminated body 20 Manufacturing apparatus of glass film laminated body 22 Support film supply part 23 Support film roll 24 Glass film supply section 25 Glass film roll 26 Laminating section 28 Guide roller 30 Nip roller 32 Conveying path 34 Winding section 36 Glass film laminate roll A Glass film width B Support film width a One side of glass film Distance from end to end of support film b Distance from other end of glass film to end of support film

Claims (3)

  A support film, an adhesive layer, and a glass film laminated on the support film through the adhesive layer, the difference between the width B of the support film and the width A of the glass film (| A−B |) Is within 1 mm, and the distance from each end in the width direction of the glass film to each end in the width direction of the support film on the end side is inward from the end in the width direction of the glass film. A glass film laminate characterized by being within ± 0.5 mm.   The glass film laminate according to claim 1, wherein at least a patterned film is provided on the glass film. Preparing a support film provided with an adhesive layer;
Preparing a glass film having a width A of 1 mm or less (| A-B |) from the width B of the support film;
The distance from each end in the width direction of the glass film to each end in the width direction of the support film on each end side is ± 0.5 mm inward from the end in the width direction of the glass film. And a step of bonding the glass film and the support film through the adhesive layer, the method for producing a glass film laminate.

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