JP2010194699A - Adhesive double coated tape for fixing abrasive, and adhesive tape with the abrasive - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an adhesive double coated tape for fixing abrasive which has low initial tackiness, is easy to re-stick to a surface plate but rigidly stuck by pressing, and is free from such problems that the abrasive peels by mechanical shock during grinding once stuck to the surface plate, and the abrasive peels if abrasive grain liquid or the like with a variety of physical properties is used, as well as which does not peel from the surface plate, and can be peeled without leaving paste on the surface plate after use. <P>SOLUTION: An adhesive layer for fixing the surface plate is formed of a pressure-sensitive adhesive containing a (meth)acrylic alkyl-ester-based copolymer obtained by copolymerizing a polymerizing monomer in a polymerizing monomer mixture containing 90 wt.% or more of (meth)acrylic butyl, and 5-30 pts.wt. of xylene resin with respect to a solid content of 100 pts.wt. of the (meth)acrylic alkyl-ester-based copolymer. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to an abrasive fixing double-sided pressure-sensitive adhesive tape for fixing an abrasive to a polishing surface plate (hereinafter referred to as “surface plate”) of a polishing apparatus, and an abrasive using the double-sided adhesive tape for fixing an abrasive material It relates to a sticky adhesive tape.

Conventionally, when fixing a sheet-like abrasive material called a polishing cloth or polishing pad to a surface plate, an adhesive layer for fixing the abrasive material is laminated and integrated on one surface of the base film, and the surface plate is mounted on the other surface. An abrasive fixing double-sided pressure-sensitive adhesive tape in which fixing adhesive layers are laminated and integrated is used.
Moreover, as such a double-sided adhesive tape for fixing abrasives, it is highly softened to a copolymer of a monomer having a carboxyl group or a hydroxyl group and (meth) acrylic acid alkyl ester as an adhesive constituting the adhesive layer for fixing abrasives. The thing using the heat active acrylic adhesive which mix | blended the resin of the point was proposed (patent document 1).

  The previously proposed double-sided adhesive tape for fixing abrasives exhibits sufficient adhesive performance even when the adhesive layer for fixing the surface plate is lightly touched to the surface plate, and the abrasive is peeled off by mechanical impact during polishing. Of course, the polishing material will not peel off even when using various abrasive polishing fluids with different physical properties such as strongly acidic polishing abrasive fluid and strong alkaline polishing abrasive fluid. There is no peeling, and after use, the double-sided pressure-sensitive adhesive tape for fixing the abrasive can be peeled off from the surface plate without problems such as adhesive residue.

  On the other hand, some surface plates have a supply hole for polishing abrasive liquids. In the case of an abrasive used by being attached to such a surface plate, usually, first, both surfaces for fixing the abrasive to the abrasive are used. After sticking the adhesive tape to make an adhesive tape with abrasives, the adhesive tape with abrasives is shipped from the factory with holes drilled in accordance with the pitch of the supply holes for the abrasive abrasive liquid on the surface plate, When polishing, the adhesive tape with abrasive is adhesively fixed to the surface plate via an adhesive layer for fixing the surface plate so that the hole drilled in the adhesive tape with abrasive is aligned with the supply hole of the surface plate It is supposed to be.

  However, the work of adhering and fixing the adhesive tape with the abrasive to the surface plate by aligning the hole drilled in the adhesive tape with the abrasive to the supply hole of the surface plate requires skill, and unskilled workers need to reapply it. In many cases, the double-sided pressure-sensitive adhesive tape for fixing an abrasive exhibiting sufficient adhesive performance even when lightly touching a surface plate as described above has a problem that it is difficult to re-apply.

JP 2001-354926 A

  In view of the above circumstances, the present invention has low initial tackiness and is easy to re-attach to the surface plate, but after being firmly pressed and once attached to the surface plate, mechanical shock during polishing Abrasives do not peel off from the surface plate, of course, even if abrasives are peeled off, or when abrasive grains having different physical properties are used, etc. An object of the present invention is to provide a double-sided adhesive tape for fixing an abrasive that can be peeled off without causing adhesive residue on the surface plate, and an adhesive tape with an abrasive using the double-sided adhesive tape for fixing an abrasive. It is said.

  In order to achieve the above object, the double-sided pressure-sensitive adhesive tape for fixing an abrasive material according to the present invention has an adhesive layer for fixing an abrasive material laminated on one surface of a base film, and is used for fixing a surface plate on the other surface. A double-sided pressure-sensitive adhesive tape for fixing abrasives, in which pressure-sensitive adhesive layers are laminated and integrated, and the pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer for fixing a platen contains 90% by weight or more of butyl (meth) acrylate A (meth) acrylic acid alkyl ester copolymer obtained by copolymerizing polymerizable monomers in the mixture, and 100 parts by weight of the solid content of the (meth) acrylic acid alkyl ester copolymer, a xylene resin Is a pressure-sensitive adhesive containing 5 to 30 parts by weight.

In the present invention, (meth) acrylic acid means either methacrylic acid or acrylic acid.
In the double-sided pressure-sensitive adhesive tape for fixing abrasives according to the present invention, the pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer for fixing the surface plate is a copolymer of the polymerizable monomer in the polymerizable monomer mixture containing 90% by weight or more of butyl (meth) acrylate. 5-30 parts by weight of xylene resin is contained with respect to 100 parts by weight of the solid content of the (meth) acrylic acid alkyl ester copolymer obtained by polymerization and the (meth) acrylic acid alkyl ester copolymer. Although it is limited to a pressure sensitive adhesive, the reason is as follows.

[(Meth) acrylic acid alkyl ester copolymer]
By containing a (meth) acrylic acid alkyl ester obtained by copolymerizing a polymerizable monomer in a polymerizable monomer mixture containing 90% by weight or more of (meth) butyl acrylate, the pressure-sensitive adhesive layer for fixing the platen is It has a strong adhesive force, heat resistance and removability, and can prevent peeling during polishing. The content of butyl (meth) acrylate in the polymerizable monomer mixture is limited to 90% by weight or more, because the effect of improving heat resistance is insufficient when the content is less than 90% by weight. And more preferably 95% by weight or more.

In addition to butyl (meth) acrylate, other polymerizable monomers copolymerized with butyl (meth) acrylate are blended in the polymerizable monomer mixture in an amount of less than 10% by weight.
Examples of other polymerizable monomers include (meth) acrylic acid, (2-hydroxyethyl) (meth) acrylate, glycidyl (meth) acrylate, allyl glycidyl ether, crotonic acid, maleic acid, itaconic acid, and n-methylol. Examples include vinyl monomers having 1 to 12 carbon atoms in the alkyl group that can be copolymerized with butyl (meth) acrylate such as acrylamide, maleic anhydride, vinyl acetate, and styrene. Among them, higher adhesion to abrasives It is preferable to blend (meth) acrylic acid because it can be obtained to obtain a pressure-sensitive adhesive layer for fixing the platen that can further prevent the tape from peeling from the abrasive.

The blending amount of the (meth) acrylic acid is preferably 1 to 10 parts by weight, more preferably 1 to 5 parts by weight, and still more preferably 1 to 3 parts by weight with respect to 100 parts by weight of butyl (meth) acrylate.
That is, if the amount of (meth) acrylic acid is too small, the cohesive force is insufficient, the shear resistance of the pressure-sensitive adhesive layer is reduced, causing cohesive failure due to the shearing force applied during polishing, and it is easy to peel off. There is a possibility that the glass transition temperature is increased and the low-temperature adhesion performance is lowered.

[Molecular weight of (meth) acrylic acid alkyl ester copolymer]
The molecular weight of the copolymer is preferably 300,000 to 800,000 in terms of weight average molecular weight. That is, if the molecular weight is small, the heat resistance may be inferior, or the shear resistance of the pressure-sensitive adhesive layer may be reduced, causing a cohesive failure due to the shearing force applied during polishing, and may be easily peeled off. There is a case.

[Polymerization method]
In order to obtain the above-mentioned (meth) acrylic acid alkyl ester copolymer, butyl (meth) acrylate and the above-mentioned other polymerizable monomer blended as necessary are present in the presence of a polymerization initiator. A radical reaction may be performed. In addition, it does not specifically limit as a polymerization method, A conventionally well-known method is used, For example, solution polymerization, emulsion polymerization, suspension polymerization, block polymerization, etc. are mentioned.

(Polymerization initiator)
The polymerization initiator is not particularly limited. For example, 1,1-bis (t-hexylperoxy) -3,3,5-trimethylcyclohexane, t-hexylperoxypivalate, t-butylper Oxypivalate, 2,5-dimethyl-2,5-bis (2-ethylhexanoylperoxy) hexane, t-hexylperoxy-2-ethylhexanoate, t-butylperoxy-2-ethylhexanoate And t-butyl peroxyisobutyrate, t-butyl peroxy-3,5,5-trimethylhexanoate, t-butyl peroxylaurate and the like. 1,1-bis (t-hexylper Oxy) -3,3,5-trimethylcyclohexane and t-hexylperoxypivalate are preferred. In addition, the said polymerization initiator may be used independently, or 2 or more types may be used together.

[Xylene resin]
The blending ratio of the xylene resin is limited to 5 to 30 parts by weight (more preferably 10 to 20 parts by weight) with respect to 100 parts by weight of the solid content of the (meth) acrylic acid alkyl ester copolymer. The reason is that when the blending amount of the xylene resin is less than 5 parts by weight, the shear resistance of the pressure-sensitive adhesive layer decreases, and the shearing force applied during polishing may cause cohesive failure and peeling off. If it exceeds the area, the initial tackiness is high and it becomes difficult to reattach, and it becomes difficult to peel off after use, or glue may remain.

  In addition, the xylene resin used in the present invention is not particularly limited as long as the object of the present invention can be achieved, but a thermoplastic alkylphenol-modified type is preferable, and an average molecular weight of 1000 to 1500 is particularly preferable. Examples of commercially available xylene resins that meet such conditions include the product name HP70 manufactured by Fudou Co., Ltd., and the product name HP100 manufactured by Fudo.

In addition, you may mix | blend other tackifying resin other than a xylene resin in the range which does not inhibit the objective of this invention in the adhesive for surface plate fixation.
Other tackifying resins are not particularly limited, and examples thereof include phenol resins, rosin resins, and terpene resins, and these can be used alone or in combination.

[Initial tack of adhesive layer for fixing platen]
The initial tackiness can be judged by an inclined ball tack test according to JIS Z0237. When the test is performed at an inclination of 30 °, the ball number is preferably 4 to 20, and preferably 5 to 15. Is more preferable.

[Adhesive strength of the adhesive layer for fixing the platen]
When the 180 ° peel force of the adhesive layer for fixing the surface plate in the double-sided adhesive tape for fixing abrasive material is low, the pressure-sensitive adhesive layer for fixing the surface plate is formed by the acid or alkali contained in the slurry liquid during the polishing process. When the adhesive strength is reduced due to deterioration, the double-sided adhesive tape for fixing the abrasive material may peel off from the polishing machine surface plate. On the other hand, if it is high, the adhesive may remain, so 5-20 / 25 mm Is preferable, and 8 to 15 N / 25 mm is more preferable.
Here, the 180 ° peel force of the pressure-sensitive adhesive layer for fixing the platen in the double-sided pressure-sensitive adhesive tape for fixing the abrasive is measured according to JIS Z 0237. In the above 180 ° peel force measurement method, the temperature of 25 ° C. is measured after the test piece made of the double-sided adhesive tape for fixing the platen is attached to the test plate (stainless steel plate) until the 180 ° peel force is measured. Let it stand for 30 minutes in an atmosphere with a relative humidity of 50%.

[Thickness of adhesive layer for fixing platen]
The thickness of the pressure-sensitive adhesive layer for fixing the platen is not particularly limited, but is preferably 20 to 60 μm, and more preferably 30 to 50 μm.
That is, if the thickness of the pressure-sensitive adhesive layer for fixing the surface plate is too thin, the double-sided pressure-sensitive adhesive tape for fixing the abrasive together with the abrasive during the polishing process may peel off from the surface plate, or the polishing accuracy of the abrasive may be inferior, If it is too thick, the re-peelability is lowered, and there is a possibility that an adhesive residue may be generated on the surface plate when the surface plate is peeled off.
[Crosslinking agent]
You may add a crosslinking agent to the adhesive used for the said surface plate fixing adhesive layer. The crosslinking agent is not particularly limited, and examples thereof include an isocyanate crosslinking agent, an aziridine crosslinking agent, an epoxy crosslinking agent, and a metal chelate crosslinking agent, and an isocyanate crosslinking agent is preferable.

On the other hand, in the double-sided pressure-sensitive adhesive tape for fixing an abrasive according to the present invention, the pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer for fixing an abrasive is not particularly limited as long as the pressure-sensitive adhesive can achieve the object of the present invention. For example, a (meth) acrylic acid alkyl ester copolymer obtained by copolymerizing a polymerizable monomer in a polymerizable monomer mixture containing 90% by weight or more of butyl (meth) acrylate, and the (meth) acrylic acid Examples include a heat-sensitive pressure-sensitive adhesive containing 20 to 70 parts by weight of a terpene phenol resin and a hot-melt adhesive, based on 100 parts by weight of the solid content of the alkyl ester copolymer, and (meth) acrylic acid among others. A (meth) acrylic acid alkyl ester copolymer obtained by copolymerizing a polymerizable monomer in a polymerizable monomer mixture containing 90% by weight or more of butyl, Motor) 100 parts by weight of the solid content of the acrylic acid alkyl ester copolymer, heat-sensitive adhesive containing 20 to 70 parts by weight of terpene phenol resin is preferable.
In the present invention, the heat-sensitive pressure-sensitive adhesive means a material that exhibits high adhesive force after thermocompression bonding.

[(Meth) acrylic acid alkyl ester copolymer]
As the (meth) acrylic acid alkyl ester copolymer used for the heat-sensitive adhesive, the same ones as those used for the adhesive constituting the surface plate fixing adhesive layer can be used.
Moreover, the said heat sensitive adhesive is 20-70 weight part (preferably 30-60 weight part) of terpene phenol resin with respect to 100 weight part of solid content of a (meth) acrylic-acid alkylester type copolymer. It is preferable to blend, but the reason is that if the blending amount of the terpene phenol resin is less than 20 parts by weight, it may not function as a heat-sensitive adhesive or the adhesive force may be insufficient, exceeding 70 parts by weight. This is because the pressure-sensitive adhesive layer becomes hard and the initial tackiness may be inferior.

[Terpene phenol resin]
The terpene phenol resin used in the present invention is not particularly limited as long as the object of the present invention can be achieved. A phenolic resin can be used.

Moreover, you may mix | blend other tackifying resin with the said thermosensitive adhesive in the range which does not inhibit the objective of this invention other than a terpene phenol resin.
Other tackifying resins are not particularly limited, and examples thereof include phenol resins, rosin resins, and terpene resins, and these can be used alone or in combination.

[Adhesive strength of the adhesive layer for fixing abrasives]
If the 180 ° peel force of the abrasive fixing pressure-sensitive adhesive layer in the double-sided adhesive tape for fixing the abrasive is low, the adhesive layer for fixing the abrasive is altered by the acid or alkali contained in the slurry during the polishing process. When the adhesive force is reduced, the abrasive may be peeled off from the double-sided adhesive tape for fixing the abrasive, so that it is preferably 20 N / 25 mm or more, and more preferably 25 N / 25 mm or more.
Here, the 180 ° peel force of the abrasive fixing pressure-sensitive adhesive layer in the above-mentioned abrasive fixing double-sided pressure-sensitive adhesive tape is measured according to JIS Z0237. In the above 180 ° peel force measurement method, a temperature of 25 ° C. is measured after the test piece made of a double-sided adhesive tape for fixing an abrasive material is adhered to a test plate (stainless steel plate) until the 180 ° peel force is measured. Let it stand for 30 minutes in an atmosphere with a relative humidity of 50%.

[Thickness of adhesive layer for fixing abrasives]
The thickness of the abrasive fixing pressure-sensitive adhesive layer is not particularly limited, but is preferably 60 to 100 μm, and more preferably 70 to 90 μm. That is, if the abrasive fixing pressure-sensitive adhesive layer is too thin, the abrasive may be peeled off from the abrasive fixing pressure-sensitive adhesive layer during the polishing step, or the polishing accuracy of the abrasive may be inferior. Cohesive failure may occur in the abrasive fixing pressure-sensitive adhesive layer during the polishing process.

[Crosslinking agent]
A cross-linking agent may be added to the pressure-sensitive adhesive used for the abrasive-fixing pressure-sensitive adhesive layer. The crosslinking agent is not particularly limited and includes, for example, an isocyanate crosslinking agent, an aziridine crosslinking agent, an epoxy crosslinking agent, a metal chelate crosslinking agent, etc. Among them, performance such as heat resistance and durability is expressed. Since it is easy, an isocyanate type crosslinking agent is preferable.

[Base film]
The material of the base film is not particularly limited, but a plastic film is preferable, ethylene vinyl acetate copolymer (EVA), vinyl chloride resin, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyethylene (PE), Examples include films such as polypropylene (PP) or laminates thereof. If chemical resistance and strength are required, polyethylene terephthalate is preferable, and adhesion to abrasives is excellent. Biaxially stretched polypropylene is preferable if it is easy to follow the undulation.

[Base film thickness]
Although the thickness of a base film is not specifically limited, 10-200 micrometers is preferable, 25-70 micrometers is more preferable, 30-60 micrometers is still more preferable. That is, if the substrate film is too thin, the rigidity is insufficient, and as a result, the polishing accuracy may be insufficient (the strength may be inferior and the attachment property may be inferior), and if it is too thick, it may be applied neatly. There may be a problem in the workability of attaching to the abrasive, such as difficult and poor workability.

[Production method of double-sided adhesive tape for fixing abrasives]
As a manufacturing method of the double-sided pressure-sensitive adhesive tape for fixing an abrasive material, for example, first, two release films that are subjected to a release treatment on one surface and a pressure-sensitive adhesive for a surface plate fixing pressure-sensitive adhesive layer (for example, Solvent (for example, toluene, xylene, ethyl acetate) for the adhesive solution for the adhesive layer for fixing the platen formed by adding toluene, xylene, ethyl acetate, etc., and the adhesive for the adhesive layer for fixing the abrasive Etc.) and a pressure-sensitive adhesive solution for the abrasive-fixing pressure-sensitive adhesive layer formed.
Subsequently, the adhesive solution for the platen fixing adhesive layer is applied to the release treatment surface of one release film, and the solvent in the adhesive solution is completely dried and removed to remove the release film. A platen-fixing pressure-sensitive adhesive layer laminated film in which a platen-fixing pressure-sensitive adhesive layer is formed on the release treatment surface is prepared. On the other hand, the adhesive solution for the adhesive layer for fixing the abrasive is applied to the release treatment surface of the other release film, and the solvent in the adhesive solution is completely dried and removed to remove the release film. An abrasive fixing pressure-sensitive adhesive layer laminated film in which an abrasive fixing pressure-sensitive adhesive layer is formed on the release treatment surface is prepared.

Thereafter, a base film serving as a base layer is prepared, and the pressure-sensitive adhesive layer laminated film for fixing the surface plate is placed on one surface of the base film, and the pressure-sensitive adhesive layer for fixing the surface plate faces the base film. On the other hand, the abrasive fixing pressure-sensitive adhesive layer laminated film is laminated on the other surface of the base film so that the abrasive fixing pressure-sensitive adhesive layer faces the base film. Create a body.
Then, by pressing the laminated body in the thickness direction with a rubber roller or the like, the surface plate fixing adhesive layer, the base material layer and the abrasive fixing adhesive layer are laminated and integrated in this order, and A double-sided adhesive tape for fixing an abrasive, in which a release film is laminated and integrated so as to be peelable on the surface of the pressure-sensitive adhesive layer for fixing a board and the adhesive layer for fixing an abrasive, can be obtained.

  The pressure-sensitive adhesive tape with an abrasive according to the present invention is characterized in that the abrasive is adhered and fixed on the pressure-sensitive adhesive layer for fixing the abrasive of the above-mentioned double-sided pressure-sensitive adhesive tape for fixing the abrasive according to the present invention.

[Material of abrasive]
Although it does not specifically limit as an abrasives, For example, what was formed with polymeric resin materials, such as foaming polyurethane, a non-foaming type urethane resin, etc. are mentioned.

[Production method of adhesive tape with abrasive]
The method for producing the adhesive tape with the abrasive is not particularly limited. For example, the abrasive is laminated on the adhesive fixing adhesive layer of the abrasive fixing double-sided adhesive tape obtained as described above. There is a method of stacking and integrating the laminate by pressing the laminate in the thickness direction with a rubber roller or the like.

  As described above, the double-sided pressure-sensitive adhesive tape for fixing an abrasive according to the present invention has an adhesive layer for fixing an abrasive on one surface of a base film, and an adhesive layer for fixing a surface plate on the other surface. Is a double-sided pressure-sensitive adhesive tape for fixing an abrasive material, wherein the pressure-sensitive adhesive constituting the surface-plate-fixing pressure-sensitive adhesive layer contains 90% by weight or more of butyl (meth) acrylate in a polymerizable monomer mixture 5 parts of xylene resin is added to the (meth) acrylic acid alkyl ester copolymer obtained by copolymerizing the polymerizable monomer and 100 parts by weight of the solid content of the (meth) acrylic acid alkyl ester copolymer. Since it is a pressure-sensitive adhesive containing 30 parts by weight, the initial tackiness of the adhesive layer for fixing the surface plate is low and easy to reattach to the surface plate, but it is pressed firmly and once attached to the surface plate. Later on, mechanical shock during polishing Therefore, the abrasive material will not peel off, and even when using abrasive powders with different physical properties such as strongly acidic abrasive liquid and strongly alkaline abrasive fluid, the abrasive will not peel off. Of course, there is no peeling from the surface plate, and after use, the double-sided pressure-sensitive adhesive tape for fixing the abrasive can be peeled from the surface plate without problems such as adhesive residue.

  The pressure-sensitive adhesive constituting the abrasive-fixing pressure-sensitive adhesive layer is not particularly limited as long as it can achieve the object of the present invention. For example, 90% by weight of butyl (meth) acrylate is used. The (meth) acrylic acid alkyl ester copolymer obtained by copolymerizing the polymerizable monomer in the polymerizable monomer mixture contained above, and 100 parts by weight of the solid content of the (meth) acrylic acid alkyl ester copolymer On the other hand, if a heat-sensitive adhesive containing 20 to 70 parts by weight of a terpene phenol resin is used, the abrasive will not be peeled off by mechanical impact during polishing more reliably, and a strongly acidic polishing abrasive will be used. Even when a variety of polishing abrasive liquids having different physical properties, such as a granular liquid or a strong alkaline polishing abrasive liquid, are used, the abrasive can be kept firmly fixed.

  If the thickness of the abrasive-side pressure-sensitive adhesive layer is 60 to 100 μm and the thickness of the surface plate-side pressure-sensitive adhesive layer is 20 to 60 μm, the workpiece can be polished in a more accurate and stable state. In addition, after polishing, it can be peeled off from the surface plate without any adhesive residue.

  The pressure-sensitive adhesive tape with an abrasive according to the present invention is a pressure-sensitive adhesive for fixing a platen because the abrasive is stuck and fixed on the pressure-sensitive adhesive layer for fixing the abrasive of the above-mentioned double-sided pressure-sensitive adhesive tape for fixing the abrasive according to the present invention. The object to be polished can be polished with high accuracy and stability by simply fixing it to the surface plate with the layer, and after the polishing, it can be peeled off from the surface plate without any adhesive residue.

  Examples of the present invention will be described in detail below.

Example 1
[Preparation of heat-sensitive adhesive solution A1]
95 parts by weight of butyl acrylate and 5 parts by weight of acrylic acid were copolymerized to obtain a (meth) acrylic acid alkyl ester copolymer (weight average molecular weight 550,000). 40 parts by weight of terpene phenol resin (trade name T130 manufactured by Yasuhara Chemical Co., Ltd.) was added to 100 parts by weight of the solid content of the resulting (meth) acrylic acid alkyl ester copolymer to obtain a heat-sensitive adhesive solution A1.
[Preparation of pressure-sensitive adhesive solution B1]
97 parts by weight of butyl acrylate and 3 parts by weight of acrylic acid were copolymerized to obtain a (meth) acrylic acid alkyl ester copolymer (weight average molecular weight 500,000). While adding 10 parts by weight of xylene resin (trade name HP100, molecular weight 1000-1500 by Fudo Co., Ltd.) to 100 parts by weight of the solid content of the obtained (meth) acrylic acid alkyl ester copolymer, ethyl acetate was used as a solvent. A pressure-sensitive adhesive solution B1 containing was obtained.
[Production of double-sided adhesive tape for fixing abrasives]
By applying the heat-sensitive adhesive solution A1 to the release treatment surface of the release film and completely drying and removing the solvent in the adhesive solution, the release treatment surface of the release film is subjected to Table 1. An abrasive-fixing pressure-sensitive adhesive layer laminated film in which the abrasive-fixing pressure-sensitive adhesive layer A1 having the thickness shown in FIG.
On the other hand, by applying the pressure-sensitive adhesive solution B1 on the release treatment surface of the release film, and completely drying and removing the solvent in the adhesive solution, A platen-fixing pressure-sensitive adhesive layer laminated film in which a platen-fixing pressure-sensitive adhesive layer B1 having the thickness shown in Table 1 was formed was produced.
Thereafter, the pressure-sensitive adhesive layer laminated film for fixing the surface plate is placed on one surface of a biaxially stretched polypropylene film having a thickness of 23 μm as a base film, and the pressure-sensitive adhesive layer B1 for fixing the surface plate is in a state of facing the base film. On the other hand, the abrasive fixing pressure-sensitive adhesive layer laminated film is laminated on the other surface of the biaxially oriented polypropylene film so that the abrasive fixing pressure-sensitive adhesive layer A1 faces the base film. Thus, a laminate was obtained.
Then, by pressing the laminate in the thickness direction with a rubber roller or the like, the base plate fixing adhesive layer B1, the base material layer made of the biaxially stretched polypropylene film and the abrasive fixing adhesive layer A1 are laminated and integrated in this order. A double-sided pressure-sensitive adhesive tape for fixing an abrasive material, which is formed by laminating and separating the release film on the surface of the pressure-sensitive adhesive layer B1 for fixing the surface plate and the pressure-sensitive adhesive layer A1 for fixing the abrasive material. did.

(Example 2)
A double-sided pressure-sensitive adhesive tape for fixing abrasives was prepared in the same manner as in Example 1 above, except that the pressure-sensitive adhesive solution B2 containing 5 parts by weight of xylene resin was used to form the pressure-sensitive adhesive layer B2 for fixing the platen. Manufactured.

(Example 3)
A double-sided pressure-sensitive adhesive tape for fixing abrasives was prepared in the same manner as in Example 1 above, except that the pressure-sensitive adhesive solution B3 having a xylene resin content of 30 parts by weight was used to form the pressure-sensitive adhesive layer B3. Manufactured.

Example 4
A double-sided pressure-sensitive adhesive tape for fixing abrasives was prepared in the same manner as in Example 1 above, except that the pressure-sensitive adhesive solution B4 having a xylene resin content of 20 parts by weight was used to form the pressure-sensitive adhesive layer B4. Manufactured.

(Example 5)
[Preparation of pressure-sensitive adhesive solution B1]
Except that the pressure-sensitive adhesive solution B5 using a xylene resin (trade name H80, molecular weight 465, manufactured by Fudou Co., Ltd.) was used as the xylene resin, the same as in Example 1 except that the pressure-sensitive adhesive solution B5 was formed. A double-sided adhesive tape for fixing abrasives was produced.

(Example 6)
(Meth) acrylic acid alkyl ester copolymer (meth) acrylic acid alkyl ester copolymer (weight average molecular weight 550,000) obtained by copolymerizing 90 parts by weight of butyl acrylate and 10 parts by weight of acrylic acid A double-sided pressure-sensitive adhesive tape for fixing an abrasive material was produced in the same manner as in Example 1 except that the pressure-sensitive adhesive solution B6 using the adhesive was used to form the pressure-sensitive adhesive layer B6 for fixing the surface plate.

(Example 7)
As a (meth) acrylic acid alkyl ester copolymer, a (meth) acrylic acid alkyl ester copolymer obtained by copolymerizing 90 parts by weight of butyl acrylate, 9 parts by weight of acrylic acid, and 1 part by weight of acrylonitrile ( A double-sided pressure-sensitive adhesive tape for fixing abrasives was produced in the same manner as in Example 1 except that the pressure-sensitive adhesive solution B7 having a weight average molecular weight of 550,000) was used to form the pressure-sensitive adhesive layer B7 for fixing the platen.

(Example 8)
A double-sided pressure-sensitive adhesive tape for fixing abrasives as in Example 1 except that the adhesive layer A2 for fixing abrasives was formed using a heat-sensitive adhesive solution A2 with a blending amount of terpene phenol resin of 20 parts by weight. Manufactured.

Example 9
A double-sided pressure-sensitive adhesive tape for fixing an abrasive material as in Example 1 above, except that the adhesive layer A3 for fixing an abrasive material was formed using a thermosensitive adhesive solution A3 containing 70 parts by weight of a terpene phenol resin. Manufactured.

(Example 10)
A double-sided adhesive tape for fixing abrasives was prepared in the same manner as in Example 1 except that the adhesive layer A4 for fixing abrasives was formed using a heat-sensitive adhesive solution A4 with a blending amount of terpene phenol resin of 60 parts by weight. Manufactured.

(Example 11)
A double-sided pressure-sensitive adhesive tape for fixing an abrasive was produced in the same manner as in Example 1 except that the thickness of the pressure-sensitive adhesive layer B1 for fixing the platen was changed as shown in Table 1.

Example 12
A double-sided pressure-sensitive adhesive tape for fixing an abrasive was produced in the same manner as in Example 1 except that the thickness of the pressure-sensitive adhesive layer B1 for fixing the platen was changed as shown in Table 1.

(Example 13)
A double-sided pressure-sensitive adhesive tape for fixing abrasives was produced in the same manner as in Example 1 except that the thickness of the adhesive layer A1 for fixing abrasives was as shown in Table 1.

(Example 14)
A double-sided pressure-sensitive adhesive tape for fixing abrasives was produced in the same manner as in Example 1 except that the thickness of the adhesive layer A1 for fixing abrasives was as shown in Table 1.

(Comparative Example 1)
As the (meth) acrylic acid alkyl ester copolymer, a (meth) acrylic acid alkyl ester copolymer (weight average molecular weight 500,000) obtained by copolymerizing 85 parts by weight of butyl acrylate and 15 parts by weight of acrylic acid is used. A double-sided pressure-sensitive adhesive tape for fixing an abrasive was produced in the same manner as in Example 1 except that the pressure-sensitive adhesive solution B8 was used to form the pressure-sensitive adhesive layer B8 for fixing the platen.

(Comparative Example 2)
A double-sided pressure-sensitive adhesive tape for fixing abrasives was prepared in the same manner as in Example 1 above, except that the pressure-sensitive adhesive solution B9 containing 35 parts by weight of xylene resin was used to form the pressure-sensitive adhesive layer B9. Manufactured.

(Comparative Example 3)
A double-sided pressure-sensitive adhesive tape for fixing abrasives was prepared in the same manner as in Example 1 except that the pressure-sensitive adhesive solution B10 with a xylene resin content of 3 parts by weight was used to form the pressure-sensitive adhesive layer B10. Manufactured.

  About the double-sided pressure-sensitive adhesive tape for fixing abrasives produced in Examples 1 to 14 and Comparative Examples 1 to 3, the initial tackiness of the pressure-sensitive adhesive layer for fixing the surface plate, the pressure-sensitive adhesive layer for fixing the surface plate by the method shown below. Adhesive strength, holding power of the adhesive layer for fixing the surface plate, removability of the adhesive layer for fixing the surface plate, adhesive force of the adhesive layer for fixing the abrasive material, holding force of the adhesive layer for fixing the abrasive material, surface plate The presence or absence of peeling during the polishing of the fixing adhesive layer was examined, and the results are shown in Tables 1 to 3 together with the layer structure of the double-sided adhesive tape for fixing the abrasive.

[Initial tack of adhesive layer for fixing platen]
A flat rectangular test piece of 300 mm length × 25 mm width was cut out from the double-sided adhesive tape for fixing the abrasive. Based on the tilting ball tack test method of JIS Z0237, the surface of the pressure-sensitive adhesive layer surface of the test piece was tested at an inclination of 30 °, and the maximum ball number stopped was examined.

[Adhesive strength of the adhesive layer for fixing the platen]
A flat rectangular test piece having a length of 150 mm and a width of 25 mm was cut out from the double-sided adhesive tape for fixing the abrasive. The pressure-sensitive adhesive layer for fixing the surface plate of this test piece is superposed on a stainless steel plate and pressed with a 2 kg roller, and the test piece is stuck on the stainless steel plate and then placed in an atmosphere at a temperature of 25 ° C. and a relative humidity of 50%. Then, the adhesive strength was measured using a tensile tester according to JIS Z0237 (= 180 degree peel test).

[Holding power of adhesive layer for fixing platen]
A PET film having a thickness of 25 μm is lined on the abrasive-fixing adhesive layer of the obtained double-sided adhesive tape for fixing an abrasive cloth, a flat rectangular test piece having a length of 100 mm and a width of 25 mm is cut out, and a surface plate of the test piece is obtained. The fixing pressure-sensitive adhesive layer was superposed on the stainless steel plate and pressed with a 2 kg roller, and the test piece was stuck on the stainless steel plate, and then cured at 40 ° C. for 60 minutes.
Next, the test piece is placed on the lower surface of the PET film so that the test piece is positioned horizontally. At 40 ° C., a 1 kgf load is applied in the vertical direction to the end of the test piece in the longitudinal direction, The peel length 1 hour after applying the load was measured using a magnifying glass.

[Removability of adhesive layer for fixing platen]
The presence or absence of adhesive residue on the stainless steel plate when the test piece was peeled from the stainless steel plate in the same manner as in the method for measuring the adhesive strength of the pressure-sensitive adhesive layer for fixing the platen was visually observed and judged based on the following criteria.
○: There was no adhesive residue on the stainless steel plate.
Δ: Adhesive residue partially formed on the stainless steel plate.
X: Cohesive failure occurred in the pressure-sensitive adhesive layer for fixing the platen, and adhesive residue was generated on the entire surface of the stainless steel plate.

[Adhesive strength of the adhesive layer for fixing abrasives]
A flat rectangular test piece having a length of 150 mm and a width of 25 mm was cut out from the double-sided adhesive tape for fixing the abrasive. The pressure-sensitive adhesive layer for the abrasive of this test piece is superimposed on a stainless steel plate and pressed with a 2 kg roller, and the test piece is attached on the stainless steel plate, and then in an atmosphere at a temperature of 25 ° C. and a relative humidity of 50%. After leaving to stand for 20 minutes, the adhesive strength was measured using a tensile tester according to JIS Z0237.

[Retention force of adhesive layer for fixing abrasives]
A 25 μm thick PET film is lined on the adhesive layer for fixing the surface plate of the obtained double-sided pressure-sensitive adhesive tape for fixing the polishing cloth, and a flat rectangular test piece having a length of 100 mm and a width of 25 mm is cut out and pressed with a 2 kg roller. Then, after sticking the adhesive layer for fixing the abrasive of the test piece on the stainless steel plate, it was cured at 40 ° C. for 60 minutes.
Next, the test piece is placed on the lower surface of the PET film so that the test piece is positioned horizontally. At 40 ° C., a 1 kgf load is applied in the vertical direction to the end of the test piece in the longitudinal direction, The peel length 1 hour after applying the load was measured using a magnifying glass.

[Presence or absence of peeling during polishing]
A polishing pad having a thickness of 1.5 mm as an abrasive was laminated on the abrasive fixing pressure-sensitive adhesive layer of the abrasive-fixing double-sided pressure-sensitive adhesive sheet obtained in Examples and Comparative Examples, and bonded together using a rubber roll. And it mounted on the polishing machine surface plate, the rubber roll was pressed from the polishing pad side, and the adhesive layer for surface plate fixing was fixed to the surface plate.
Using a glass plate as a specimen to be polished, a polishing slurry (Cabot Microelectronics W2000 (pH 2.3) which is a slurry usually used for CMP) is used, and a polishing pad is applied for 5 minutes at a polishing pressure of 49.0 kPa and a rotation speed of 100 rpm. It was put into operation. Then, the peeling state was visually observed about the interface of the surface plate fixing adhesive layer of the double-sided adhesive tape and the surface plate. The above operation was performed 10 times.
Evaluation was made according to the following criteria.
A: Neither peeling nor floating was seen.
○: One float was observed.
Δ: Two floats were observed.
X: Both peeling and floating were seen.

Claims (4)

  A double-sided pressure-sensitive adhesive tape for fixing an abrasive, in which an adhesive layer for fixing an abrasive is laminated and integrated on one side of a base film, and an adhesive layer for fixing a platen is laminated and integrated on the other side. (Meth) acrylic acid alkyl ester system obtained by copolymerizing a polymerizable monomer in a polymerizable monomer mixture containing 90% by weight or more of (meth) butyl acrylate, the pressure-sensitive adhesive constituting the panel fixing pressure-sensitive adhesive layer A pressure-sensitive adhesive containing 5 to 30 parts by weight of a xylene resin with respect to 100 parts by weight of a solid content of the copolymer and the (meth) acrylic acid alkyl ester copolymer. Double-sided adhesive tape for fixing materials. (Meth) acrylic acid alkyl ester obtained by copolymerizing a polymerizable monomer in a polymerizable monomer mixture containing 90% by weight or more of (meth) butyl acrylate, the pressure-sensitive adhesive constituting the abrasive fixing pressure-sensitive adhesive layer The heat- sensitive pressure- sensitive adhesive comprising 20 to 70 parts by weight of a terpene phenol resin with respect to 100 parts by weight of a solid content of the copolymer and the (meth) acrylic acid alkyl ester copolymer. Double-sided adhesive tape for fixing abrasive materials.   The thickness of the pressure-sensitive adhesive layer for fixing the platen is 20 to 60 µm, and the thickness of the pressure-sensitive adhesive layer for fixing the abrasive material is 60 to 100 µm. Double-sided adhesive tape. Abrasive fixed double-sided pressure-sensitive adhesive tape according to any one of claims 1 to 3,-out with an abrasive, characterized in that the abrasive material is adhering fixed abrasive fixing adhesive layer on an adhesive tape.