JP2008221825A - Liquid jetting head and liquid jetting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid jetting head and a liquid jetting device capable of appropriately bonding a nozzle plate and a channel formation substrate to each other and preventing coming off of the nozzle plate for a long period of time. <P>SOLUTION: A nozzle plate 20 in which nozzle openings 21 are perforated, a channel formation substrate 10 joined with the nozzle plate 20 by an adhesive agent 25 and having a plurality of individual channels including pressure generation chambers 12 communicated with the nozzle openings 21, and pressure generation means 300 which generate pressures in the pressure generation chambers 12 for jetting droplets are provided. The surface of the nozzle plate 20 joined with the channel formation substrate 10 has projecting portions 22 formed to be close to demarcating walls 11, which demarcates at least the individual channels, and to be along the dividing walls 11. The nozzle plate 20 and the channel formation substrate 10 are joined in the state in which the space between each projecting portion 22 and each demarcating wall 11 is filled with the adhesive agent 25. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that eject liquid, and more particularly, to an ink jet recording head and an ink jet recording apparatus that eject ink as liquid.

  As the liquid ejecting head, for example, a part of a pressure generating chamber communicating with a nozzle opening for ejecting ink droplets is constituted by a vibration plate, and the vibration plate is deformed by pressure generating means such as a piezoelectric element to generate pressure. There is an ink jet recording head that pressurizes ink in a chamber and ejects ink droplets from nozzle openings. In such an ink jet recording head, generally, a nozzle plate having a plurality of nozzle openings for ejecting ink droplets is bonded to a flow path forming substrate in which a pressure generating chamber is formed by an adhesive. It has a structure. For this reason, when the pressure generating chambers are arranged in a high density on the flow path forming substrate, the bonding area between the nozzle plate and the flow path forming substrate is reduced, and excessive adhesive flows excessively into the pressure generating chamber. There is a possibility that problems such as a decrease in the amount of displacement of the diaphragm due to the adhesive flowing into the generation chamber or a blockage of the nozzle opening may occur. Furthermore, there is a possibility that the bonding area between the nozzle plate and the flow path forming substrate is reduced, and the bonding strength between them is reduced.

  In order to prevent the above-described problem of the adhesive flowing into the pressure generating chamber, for example, dummy pressure chambers are provided at both ends of the pressure chambers arranged in a row, and a plurality of independent pressure chambers are provided outside the dummy pressure chambers. There is one provided with an adhesive relief groove formed of a recess (for example, see Patent Document 1).

Japanese Patent Laid-Open No. 11-157063 (Claims, FIG. 1 etc.)

  Thus, by providing the adhesive pressure relief groove on the dummy pressure chamber or outside thereof, the adhesive can be prevented from flowing into the pressure generating chamber to some extent, but the bonding strength between the nozzle plate and the flow path forming substrate is reduced. It is not possible to eliminate the problem of doing so. Furthermore, in the configuration in which the nozzle plate is bonded to the flow path forming substrate with an adhesive, the adhesive may deteriorate due to contact with the ink for a long time, and the nozzle plate may be peeled off from the flow path forming substrate. .

  By the way, it is preferable that the length of the nozzle opening is relatively short in order to discharge ink droplets well from the nozzle opening. That is, it is preferable that the thickness of the nozzle plate is relatively thin. However, if the thickness of the nozzle plate is reduced, when ejecting ink droplets, the nozzle plate resonates due to pressure vibration in the reservoir, which may cause problems such as uneven printing. .

  Such a problem exists not only in an ink jet recording head that ejects ink, but also in other liquid ejecting heads that eject liquid other than ink.

  The present invention has been made in view of such circumstances, and is a liquid capable of satisfactorily bonding the nozzle plate and the flow path forming substrate and preventing the nozzle plate from peeling off over a long period of time. An object is to provide an ejecting head and a liquid ejecting apparatus. In addition, the present invention provides a liquid ejecting head and a liquid ejecting apparatus that can satisfactorily bond the nozzle plate and the flow path forming substrate and prevent the discharge unevenness of the droplets by suppressing the resonance of the nozzle plate. Objective.

The present invention for solving the above-mentioned problems is a flow path formation having a plurality of individual flow paths including a nozzle plate having a nozzle opening and a pressure generating chamber which is joined to the nozzle plate by an adhesive and communicates with the nozzle opening. A pressure generating means for applying a pressure for injecting droplets into the pressure generating chamber, and at least the individual flow paths are defined on a joint surface of the nozzle plate with the flow path forming substrate. The nozzle plate and the flow path forming substrate have projections that are proximate to the partition and project along the partition, and the adhesive is filled between the projection and the partition. The liquid ejecting head is characterized by being joined.
In the present invention, the effective bonding area between the flow path forming substrate and the nozzle plate is increased. Therefore, the adhesive strength between the flow path forming substrate and the nozzle plate can be improved without increasing the size of the flow path forming substrate and the nozzle plate.

  Here, it is preferable that the convex portion protrudes in the pressure generating chamber. In particular, it is preferably provided over the entire surface in a region facing the pressure generating chamber. By providing the protruding portion that protrudes in the pressure generating chamber that occupies a relatively wide range of the individual flow paths, the adhesive strength between the nozzle plate and the flow path forming substrate can be more reliably increased.

  Further, the flow path forming substrate is provided with a communication portion that communicates with each of the individual flow paths, and the individual flow path is communicated with the pressure generation chamber and is larger than a cross-sectional area of the pressure generation chamber. A liquid supply path having a narrow cross-sectional area, and a communication path having a cross-sectional area larger than that of the liquid supply path and connecting the liquid supply path and the communication portion, and the convex portion protrudes from the communication path. It is preferable. Even when the nozzle plate is provided with a projecting portion that protrudes into the communication path, of course, the adhesive strength between the nozzle plate and the flow path forming substrate can be more reliably increased. In particular, by providing a convex portion protruding into the pressure generating chamber and a convex portion protruding into the communication path, the adhesive strength between the nozzle plate and the flow path forming substrate can be further reliably increased.

  Moreover, it is preferable that the flow path forming substrate is provided with a communication portion that communicates with each of the individual flow channels, and the convex portion projects from the communication portion. Thereby, the resonance of the nozzle plate due to the pressure vibration in the communication part can be reduced, and the droplet discharge unevenness can be prevented.

  The nozzle plate is preferably made of a silicon substrate. Thereby, a convex part can be formed in a nozzle plate comparatively easily with high precision.

  Furthermore, the present invention provides a liquid ejecting apparatus including the liquid ejecting head as described above. According to the present invention, a liquid ejecting apparatus with improved reliability can be realized.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is an exploded perspective view of an ink jet recording head according to Embodiment 1 of the present invention, and FIG. 2 is a plan view of FIG. 3 is a cross-sectional view taken along the line BB ′ of FIG. 2, and FIG. 4 is a cross-sectional view taken along the line CC ′ of FIG.

As shown in the drawing, a flow path forming substrate 10 constituting an ink jet recording head, which is an example of a liquid ejecting head, is a silicon single crystal substrate having a crystal plane orientation of (110) in this embodiment, and is formed on one surface thereof. An elastic film 50 having a thickness of 0.5 to 2.0 [μm] made of silicon oxide (SiO ₂ ) previously formed by thermal oxidation is formed. In the flow path forming substrate 10, a plurality of individual flow paths including a plurality of pressure generation chambers 12 partitioned by a partition wall 11 are arranged in parallel in the width direction. Specifically, an ink supply path 13 and a communication path 14 that are partitioned by a partition wall 11 and communicate with each pressure generation chamber 12 are provided on one end side in the longitudinal direction of the pressure generation chamber 12 of the flow path forming substrate 10. The pressure generating chamber 12, the ink supply path 13, and the communication path 14 constitute an individual flow path.

  Furthermore, a communication portion 15 that communicates with each communication path 14 is provided outside the communication path 14. The communication portion 15 communicates with a reservoir portion 32 of the protective substrate 30 described later, and constitutes a part of the reservoir 100 that becomes a common ink chamber (liquid chamber) of each pressure generating chamber 12.

  Here, the ink supply path 13 is formed to have a narrower cross-sectional area than the pressure generation chamber 12, and the flow path resistance of the ink flowing into the pressure generation chamber 12 from the communication portion 15 is kept constant. . For example, in this embodiment, the ink supply path 13 is formed with a width smaller than the width of the pressure generation chamber 12 by narrowing the individual flow paths in the width direction. In this embodiment, the ink supply path is formed by narrowing the width of the individual flow path from one side. However, the ink supply path may be formed by narrowing the width of the individual flow path from both sides. Further, the ink supply path may be formed by narrowing from the thickness direction instead of narrowing the width of the individual flow path. Each communication path 14 is formed by extending the partition walls 11 on both sides in the width direction of the pressure generating chamber 12 to the communication part 15 side to partition the space between the ink supply path 13 and the communication part 15.

  As a material for the flow path forming substrate 10, a silicon single crystal substrate is used in the present embodiment. However, the material is not limited to this, and glass ceramics, stainless steel, etc. may be used.

  On the opening surface side of the flow path forming substrate 10, a nozzle plate 20 in which a plurality of nozzle openings 21 are formed is joined by, for example, an adhesive 25, and each nozzle opening 21 is connected to each pressure generation chamber 12. The ink supply path 13 communicates with the vicinity of the end on the opposite side. Further, on the joint surface of the nozzle plate 20 with the flow path forming substrate 10, convex portions 22 that protrude into the individual flow paths are provided. The nozzle plate 20 according to the present embodiment is provided with a convex portion 22A that protrudes into the pressure generating chamber 12 and a convex portion 22B that protrudes into the communication path 14.

  These convex portions 22 (22A, 22B) are provided close to the partition wall 11 and project along the partition wall 11. In the present embodiment, the convex portion 22 </ b> A is provided over substantially the entire surface of the portion of the nozzle plate 20 facing the pressure generation chamber 12, that is, the portion excluding the peripheral portion of the nozzle opening 21. Further, the convex portion 22B is provided over substantially the entire surface of the nozzle plate 20 facing the communication passage 14. Between each convex part 22 and the partition 11, the space with which the adhesive agent 25 for joining the nozzle plate 20 to the flow-path formation board | substrate 10 is filled is defined. The nozzle plate 20 is bonded to the flow path forming substrate 10 in a state where the adhesive 25 is filled in this space. In other words, the flow path forming substrate 10 is bonded to the concave portion defined by the convex portion 22 of the nozzle plate 20 by the adhesive 25. Further, in the present embodiment, the convex portion 22 is continuously formed around the nozzle opening 21 of the nozzle plate 20, and the flow path forming substrate 10 (partition wall 11) on both sides in the width direction of the pressure generating chamber 12. Similarly, the flow path forming substrate 10 is joined also on the outer side in the longitudinal direction of the pressure generating chamber 12.

  Thus, by providing the convex part 22 in the nozzle plate 20, the contact area of the nozzle plate 20, the flow path formation board | substrate 10, and the adhesive agent 25 expands. That is, the effective bonding area between the nozzle plate 20 and the flow path forming substrate 10 is increased. Therefore, the adhesive strength between the nozzle plate 20 and the flow path forming substrate 10 can be improved without increasing the size of the nozzle plate 20 and the flow path forming substrate 10, and the nozzle plate 20 is peeled off from the flow path forming substrate 10. Can be prevented.

  Further, while the contact area between the nozzle plate 20 and the adhesive 25 is enlarged, the area where the adhesive 25 is exposed in the pressure generating chamber 12 is almost the same as when the convex portion 22 is not provided. For this reason, peeling of the nozzle plate 20 caused by the deterioration of the adhesive 25 by the ink can be prevented for a relatively long period of time. Therefore, the adhesive strength between the nozzle plate 20 and the flow path forming substrate 10 can be favorably maintained over a long period.

  Further, in the present embodiment, the convex portion 22 is provided on substantially the entire surface of the nozzle plate 20 facing the pressure generation chamber 12 and the communication path 14, that is, the convex portion 22 is relatively wide on the nozzle plate 20. Since it is provided in the range, the rigidity of the nozzle plate 20 is improved. Accordingly, the bonding strength is improved as described above, and the occurrence of deformation and cracking of the nozzle plate 20 can be prevented.

  Here, the height of the convex portion 22 is preferably as high as possible from the viewpoint of bonding strength, but may be appropriately determined in consideration of various conditions such as the volume of the pressure generation chamber 12 and the communication passage 14. For example, if the height (projection amount) of the convex portion 22A is too high, the volume of the pressure generating chamber 12 becomes too small to obtain desired discharge characteristics. It is preferable to make the generation chamber 12 as high as possible so that the volume of the generation chamber 12 does not become too small.

  The material of the nozzle plate 20 is not particularly limited, and examples thereof include glass ceramics, a silicon single crystal substrate, and stainless steel. In particular, a silicon single crystal substrate is preferably used. By forming the nozzle plate 20 from a silicon single crystal substrate, the convex portion 22 having a desired shape can be formed relatively easily with high accuracy.

  In the present embodiment, the example in which the convex portion 22 is provided on substantially the entire surface of the nozzle plate 20 facing the pressure generation chamber 12 and the communication path 14 is described, but the present invention is not limited to this. For example, each convex portion 22 (22A, 22B) is only in a portion along the partition wall 11 adjacent to the partition wall 11 like the peripheral edge of the nozzle opening 21 in all the regions of the pressure generation chamber 12 and the communication passage 14. It may be provided (see FIG. 3). Even with such a configuration, the bonding strength between the nozzle plate 20 and the flow path forming substrate 10 can be improved as described above. Moreover, the shape of each convex part 22 is not specifically limited, For example, as shown in FIG. 5, you may make it provide the collar part 22a which protruded toward the partition 11 side in the front-end | tip part of each convex part 22. As shown in FIG. Good. Thereby, the effective bonding area is further increased, and the bonding strength between the nozzle plate 20 and the flow path forming substrate 10 can be further improved. Further, since the area where the adhesive 25 is exposed in the pressure generating chamber 12 is further reduced, deterioration of the adhesive 25 due to ink can be further suppressed.

  On the other hand, the elastic film 50 having a thickness of, for example, about 1.0 [μm] is formed on the surface of the flow path forming substrate 10 opposite to the nozzle plate 20 as described above. An insulator film 55 made of zirconium oxide or the like and having a thickness of, for example, about 0.4 [μm] is formed. Further, on the insulator film 55, a lower electrode film 60 having a thickness of, for example, about 0.1 to 0.2 [μm] and a piezoelectric film having a thickness of, for example, about 0.5 to 5 [μm]. A piezoelectric element 300 that is a pressure generating unit including the body layer 70 and the upper electrode film 80 having a thickness of, for example, about 50 [nm] is formed. Here, the piezoelectric element 300 refers to a portion including the lower electrode film 60, the piezoelectric layer 70, and the upper electrode film 80. In general, one of the electrodes of the piezoelectric element 300 is used as a common electrode, and the other electrode is patterned together with the piezoelectric layer 70 for each pressure generating chamber 12 to form individual electrodes. In the above-described example, the elastic film 50, the insulator film 55, and the lower electrode film 60 substantially function as a vibration plate, but only the lower electrode film 60 is provided without providing the elastic film 50 and the insulator film 55. The lower electrode film 60 may be left as a diaphragm. Further, the piezoelectric element 300 itself may substantially serve as a diaphragm. Further, a lead electrode 90 made of, for example, gold (Au) or the like is connected to the upper electrode film 80 of each piezoelectric element 300, and is selectively connected to each piezoelectric element 300 via the lead electrode 90. A voltage is applied to.

  On the flow path forming substrate 10 on which such a piezoelectric element 300 is formed, a protective substrate 30 having a piezoelectric element holding portion 31 for protecting the piezoelectric element 300 is bonded by, for example, an adhesive layer 35. Note that the space defined by the piezoelectric element holding portion 31 may be sealed or may not be sealed. Further, the protective substrate 30 is provided with a reservoir portion 32 that constitutes at least a part of the reservoir 100 in which the ink supplied to the plurality of pressure generating chambers 12 is stored. In this embodiment, the reservoir portion 32 is formed through the protective substrate 30 in the thickness direction and across the width direction of the pressure generating chamber 12, and the communication portion 15 of the flow path forming substrate 10 as described above. And the reservoir 100 is configured. Note that the communication portion 15 of the flow path forming substrate 10 may be divided into a plurality for each pressure generation chamber 12 and only the reservoir portion 32 may be used as the reservoir. Further, for example, only the pressure generation chamber 12 is provided in the flow path forming substrate 10, and a reservoir and a member interposed between the flow path forming substrate 10 and the protective substrate 30 (for example, the elastic film 50, the insulator film 55, etc.) An ink supply path 13 that communicates with each pressure generation chamber 12 may be provided.

  As such a protective substrate 30, it is preferable to use a material substantially the same as the coefficient of thermal expansion of the flow path forming substrate 10, for example, a glass material, a ceramic material, etc., and in this embodiment, the same as the flow path forming substrate 10. The material is a silicon single crystal substrate.

  Further, the protective substrate 30 is provided with a through-hole 33 that penetrates the protective substrate 30 in the thickness direction, and the vicinity of the end portion of the lead electrode 90 drawn from each piezoelectric element 300 is in the through-hole 33. Exposed. Although not shown, the drive IC for driving the piezoelectric element 300 and each lead electrode 90 are connected by a connection wiring made of a bonding wire or the like extending in the through hole 33.

  In addition, a compliance substrate 40 including a sealing film 41 and a fixing plate 42 is bonded onto the protective substrate 30. Here, the sealing film 41 is made of a material having low rigidity and flexibility (for example, a polyphenylene sulfide (PPS) film having a thickness of 6 [μm]). The direction is sealed. The fixing plate 42 is made of a hard material such as metal (for example, stainless steel (SUS) having a thickness of 30 [μm]). A region of the fixing plate 42 facing the reservoir 100 is an opening 43 that is completely removed in the thickness direction, and one surface of the reservoir 100 is sealed only with a flexible sealing film 41. ing.

  In such an ink jet recording head of this embodiment, ink is taken in from an ink introduction port connected to an external ink supply means (not shown), and the interior from the reservoir 100 to the nozzle opening 21 is filled with ink, and then driving (not shown) is performed. In accordance with a recording signal from the circuit, a voltage is applied between the lower electrode film 60 and the upper electrode film 80 corresponding to the pressure generation chamber 12 to bend and deform the piezoelectric element 300, thereby causing each pressure generation chamber 12 The pressure increases and ink droplets are ejected from the nozzle openings 21.

(Embodiment 2)
FIG. 6 is a cross-sectional view of the liquid jet head according to the second embodiment.

  In the present embodiment, as shown in FIG. 6, the same as in the first embodiment, except that a convex portion 22 </ b> C protruding into the communicating portion 15 is further provided on the joint surface of the nozzle plate 20 with the flow path forming substrate 10. It is. The convex portion 22 </ b> C may be provided in a part of a region facing the communication portion 15, but is preferably provided over substantially the entire surface. As in the case of the convex portions 22A and 22B, a space is secured between the convex portion 22C and the wall surface defining the communication portion 15, and the nozzle plate 20 is placed in the flow path forming substrate 10 in this space. An adhesive 25 for bonding is filled.

  Thus, by providing the convex part 22C with the convex parts 22A and 22B on the nozzle plate 20, the contact area between the nozzle plate 20, the flow path forming substrate 10 and the adhesive 25 is further expanded. Therefore, the adhesive strength between the nozzle plate 20 and the flow path forming substrate 10 can be more reliably improved without increasing the size of the nozzle plate 20 and the flow path forming substrate 10. Can be prevented from peeling off.

  Furthermore, in the present embodiment, by providing the convex portion 22 </ b> C, the rigidity of the nozzle plate 20 in the region facing the communication portion 15 constituting the reservoir 100 is improved. Thereby, when the piezoelectric element 300 is driven and ink droplets are ejected, resonance of the nozzle plate 20 due to pressure vibration in the reservoir 100 can be reduced. Accordingly, ink droplet ejection unevenness, that is, printing unevenness is prevented, and the print quality can be greatly improved.

  In this embodiment, the space between the convex portion 22C and the wall surface defining the communication portion 15 is filled with the adhesive 25, but it is not necessarily filled. If the adhesive 25 is filled in at least the space between the convex portions 22A and 22B and the partition wall 11, the bonding strength between the flow path forming substrate 10 and the nozzle plate 20 can be sufficiently ensured. As described above, even when the space between the convex portion 22C and the wall surface defining the communication portion 15 is not filled with the adhesive 25, the resonance of the nozzle plate 20 during ink droplet ejection can be reduced.

  Further, in the present embodiment, the convex portion 22B in the region facing the communication path 14 and the convex portion 22C in the region facing the communication portion 15 are formed independently. The convex portions 22B and the convex portions 22C are preferably formed independently from the viewpoint of manufacturing. Of course, the convex portions 22B and the convex portions 22C may be formed continuously.

(Other embodiments)
As mentioned above, although embodiment of this invention was described, this invention is not limited to embodiment mentioned above. For example, in the above-described first embodiment, the convex portions 22A and 22B are provided in the regions facing the pressure generation chamber 12 and the communication path 14 of the nozzle plate 20, respectively. You may make it provide the convex part 22 only in the area | region which opposes any one. In the above-described embodiment, the convex portion 22 is not provided in the region facing the ink supply path 13 of the nozzle plate 20, but, of course, the convex portion 22 is also provided in the region facing the ink supply path 13. May be. However, since the ink supply path 13 is a narrower space than the other part of the flow path, it is necessary to consider so that the flow path becomes too narrow and the passage of ink is not prevented by providing the convex portion 22.

  In the above embodiment, an example in which the piezoelectric element 300 is used as the pressure generating unit has been described. However, the pressure generating unit is not particularly limited. For example, a thick film type piezoelectric element formed by a method such as attaching a green sheet or a longitudinal vibration type piezoelectric element in which a piezoelectric material and an electrode forming material are alternately stacked to expand and contract in the axial direction are similarly applied. Applicable. Furthermore, the pressure generating means may be a heat generating element disposed in the pressure generating chamber, or may be a type that deforms the diaphragm by electrostatic force.

  The ink jet recording head described above constitutes a part of a recording head unit having an ink flow path communicating with an ink cartridge or the like, and is mounted on the ink jet recording apparatus. FIG. 7 is a schematic view showing an example of the ink jet recording apparatus.

  As shown in FIG. 7, in the recording head units 1A and 1B having the ink jet recording head, cartridges 2A and 2B constituting ink supply means are detachably provided, and a carriage 3 on which the recording head units 1A and 1B are mounted. Is provided on a carriage shaft 5 attached to the apparatus body 4 so as to be movable in the axial direction. The recording head units 1A and 1B, for example, are configured to eject a black ink composition and a color ink composition, respectively. The driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and timing belt 7 (not shown), so that the carriage 3 on which the recording head units 1A and 1B are mounted is moved along the carriage shaft 5. The On the other hand, the apparatus body 4 is provided with a platen 8 along the carriage shaft 5, and a recording sheet S which is a recording medium such as paper fed by a paper feed roller (not shown) is wound around the platen 8. It is designed to be transported.

  In the above-described embodiment, an ink jet recording head has been described as an example of a liquid ejecting head. However, the present invention is widely intended for all liquid ejecting heads and ejects liquids other than ink. Of course, the present invention can also be applied to a method of manufacturing a liquid jet head. Other liquid ejecting heads include, for example, various recording heads used in image recording apparatuses such as printers, color material ejecting heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejection head used for electrode formation, a bioorganic matter ejection head used for biochip production, and the like.

FIG. 3 is an exploded perspective view of the recording head according to the first embodiment. 2A and 2B are a plan view and a cross-sectional view of the recording head according to the first embodiment. FIG. 3 is a cross-sectional view of the recording head according to the first embodiment. FIG. 3 is a cross-sectional view of the recording head according to the first embodiment. FIG. 6 is an enlarged cross-sectional view illustrating a modification of the recording head according to the first embodiment. 6 is a cross-sectional view of a recording head according to Embodiment 2. FIG. 1 is a schematic diagram of a recording apparatus according to an embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 Flow path formation board | substrate, 12 Pressure generation chamber, 13 Ink supply path, 14 Communication path, 15 Communication part, 20 Nozzle plate, 21 Nozzle opening, 22 Convex part, 25 Adhesive, 30 Protection board, 31 Piezoelectric element holding part, 32 reservoir section, 40 compliance substrate, 50 elastic film, 55 insulator film, 60 lower electrode film, 70 piezoelectric layer, 80 upper electrode film, 90 lead electrode, 100 reservoir, 300 piezoelectric element

Claims (7)

A nozzle plate having a nozzle opening, a flow path forming substrate having a plurality of individual flow paths including a pressure generating chamber joined to the nozzle plate by an adhesive and communicating with the nozzle opening; and a liquid in the pressure generating chamber Pressure generating means for applying pressure for ejecting droplets,
The joint surface of the nozzle plate with the flow path forming substrate has a convex portion that is proximate to at least the partition partitioning the individual flow channel and protrudes along the partition. The convex portion and the partition wall The liquid jet head is characterized in that the nozzle plate and the flow path forming substrate are bonded together with the adhesive filled therebetween.   The liquid ejecting head according to claim 1, wherein the convex portion protrudes from the pressure generating chamber.   The liquid ejecting head according to claim 2, wherein the convex portion is provided over the entire surface in a region facing the pressure generating chamber. The flow path forming substrate is provided with a communication portion that communicates with each of the individual flow paths, and the individual flow path communicates with the pressure generation chamber and is narrower than a cross-sectional area of the pressure generation chamber. A liquid supply path having an area; and a communication path having a larger cross-sectional area than the liquid supply path and connecting the liquid supply path and the communication portion;
The liquid ejecting head according to claim 1, wherein the convex portion protrudes in the communication path.   5. The flow path forming substrate is provided with a communication portion that communicates with each of the individual flow channels, and the convex portion projects from the communication portion. The liquid jet head described in 1.   The liquid ejecting head according to claim 1, wherein the nozzle plate is made of a silicon substrate.   A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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