JP2008023799A - Liquid jet head and liquid jet device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a miniaturized liquid jet head of which the ejection characteristic of a liquid is improved by reducing crosstalk thereof, and a liquid jet device. <P>SOLUTION: This liquid jet head comprises a fluid channel forming substrate 10 equipped with a discrete fluid channel having a pressure generation chamber 12 communicating with a nozzle opening 21 for jetting a liquid, and a pressure generation element 300 provided to a region on the fluid channel forming substrate 10 at one face side opposite to the pressure generation chamber 12. A reservoir forming substrate 30 having a reservoir 100, to be a liquid chamber common to the discrete fluid channels, which is provided to a region opposite to the pressure generation element 300, is bonded to the face of the fluid channel forming substrate 10 at the side of the pressure generation element 300 by interposing therebetween a compliance substrate 40 having a prescribed distance from the pressure generation element 300. The compliance substrate 40 seals the opening of the reservoir 100 and a flexible section 44 is provided to the compliance substrate 40 at a region for sealing the reservoir 100. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus, and more particularly to an ink jet recording head and an ink jet recording apparatus that eject ink as a liquid.

  As an ink jet recording head that is a liquid ejecting head, for example, a pressure generation chamber communicating with a nozzle opening and a longitudinal direction one end side of the pressure generation chamber are provided across the short direction of the pressure generation chamber. A flow path forming substrate formed with a communication portion communicating with the chamber, a piezoelectric element formed on one surface side of the flow path forming substrate, and an adhesive agent on the surface of the flow path forming substrate on the piezoelectric element side Some have a reservoir forming substrate that has a reservoir portion that is joined to form a part of the reservoir together with the communication portion (see, for example, Patent Document 1).

  In such a configuration of Patent Document 1, the reservoir is provided with a communication portion that constitutes a part of the reservoir on one end side in the longitudinal direction of the pressure generating chamber. There is a problem of increasing the size.

  In addition, there is one in which a reservoir is provided in a region facing the piezoelectric element holding portion of the reservoir forming substrate joined to the flow path forming substrate (see, for example, Patent Documents 2 and 3).

  According to this, although the ink jet type recording head can be reduced in size in the longitudinal direction of the pressure generating chamber, the ink discharge characteristics deteriorate due to the compliance from the pressure generating chamber to the adjacent pressure generating chamber when ink is discharged. There is a problem of end up.

  In addition, there is a problem in that compliance occurs when ink is introduced from a storage unit that stores ink, which adversely affects ink ejection.

  Furthermore, when a drive circuit for driving a piezoelectric element is mounted on a reservoir forming substrate, there is a problem that a compliance substrate that generates compliance cannot be arranged.

Japanese Patent Laying-Open No. 2005-219243 (FIGS. 3-5, pages 6-8) JP 2001-105611 A (FIGS. 6 to 8, pages 8 to 9) JP 2004-106316 A (FIG. 11, page 6)

  In view of such circumstances, it is an object of the present invention to provide a liquid ejecting head and a liquid ejecting apparatus which are reduced in size while reducing crosstalk to improve liquid ejection characteristics.

According to a first aspect of the present invention for solving the above-described problems, a flow path forming substrate provided with an individual flow path having a pressure generating chamber communicating with a nozzle opening for ejecting liquid, and one surface side of the flow path forming substrate A pressure generating element provided in a region opposite to the pressure generating chamber, and a surface on the pressure generating element side of the flow path forming substrate is provided in the region facing the pressure generating element. A reservoir forming substrate provided with a reservoir serving as a common liquid chamber of the flow path is bonded to the pressure generating element via a compliance substrate provided at a predetermined interval, and the compliance substrate is connected to the reservoir. The liquid ejecting head is characterized in that a flexible portion is provided in a region where the opening is sealed and the reservoir of the compliance substrate is sealed.
In the first aspect, since the reservoir is provided on the pressure generating element side of the flow path forming substrate, the longitudinal width of the pressure generating chamber of the liquid ejecting head can be reduced, and the size can be reduced. . In addition, a compliance substrate that seals the reservoir is provided between the reservoir formation substrate and the flow path formation substrate, and a flexible portion is provided in a region of the compliance substrate that faces the reservoir. It can be formed, and the crosstalk due to the stress change in the pressure generating chamber when the liquid is discharged can be reduced by the flexible portion. Moreover, the dynamic pressure when the liquid is supplied to the reservoir from the storage means storing the liquid can be absorbed by the flexible portion. Thereby, the liquid ejection characteristics can be improved.

According to a second aspect of the present invention, the compliance substrate includes a fixing plate bonded to the flow path forming substrate side, and a sealing film made of a flexible material bonded to the fixing plate, An opening portion penetrating in the thickness direction is provided in a region facing the reservoir of the fixing plate, and a region where the reservoir is sealed only by the sealing film by the opening portion becomes the flexible portion. In the liquid jet head according to the first aspect,
In the second aspect, the flexible portion can be easily provided in a large area on the compliance substrate.

According to a third aspect of the present invention, in the liquid ejecting head according to the first or second aspect, the compliance substrate is provided with a through hole that communicates the reservoir and the individual flow path. .
In the third aspect, the liquid from the reservoir can be supplied to the individual flow path through the through hole.

According to a fourth aspect of the present invention, in the liquid jet according to the third aspect, a protective film having liquid resistance is provided on the inner surface of the individual flow path and the inner surface of the through hole. In the head.
In the fourth aspect, erosion of the flow path forming substrate and the compliance substrate by the liquid can be prevented, and durability and reliability can be improved.

According to a fifth aspect of the present invention, in the liquid jet head according to the third or fourth aspect, the through hole is provided independently for each individual flow path group including a plurality of individual flow paths. is there.
In the fifth aspect, the alignment between the compliance substrate and the flow path forming substrate can be facilitated to prevent the occurrence of liquid supply failure or the like.

According to a sixth aspect of the present invention, in the liquid ejecting head according to the third or fourth aspect, the through hole is provided independently for each individual flow path.
In the sixth aspect, it is possible to prevent the occurrence of crosstalk due to the pressure fluctuation of the pressure generating chamber from which the liquid is discharged affecting the adjacent pressure generating chamber.

According to a seventh aspect of the present invention, the individual flow path includes the pressure generation chamber, and the through hole serves as a liquid supply path that generates a flow path resistance between the reservoir and the pressure generation chamber. The liquid ejecting head according to the sixth aspect is characterized by functioning.
In the seventh aspect, since only the pressure generating chamber is formed on the flow path forming substrate, it is possible to further reduce the size in the width direction that is the longitudinal direction of the pressure generating chamber of the liquid ejecting head.

In an eighth aspect of the present invention, the individual flow path communicates with at least the pressure generation chamber and one end of the pressure generation chamber, and has a cross-sectional area smaller than the cross-sectional area in the width direction of the pressure generation chamber. And a liquid supply path for generating a flow path resistance in the liquid between the reservoir and the pressure generating chamber. It is in.
In the eighth aspect, the liquid supply path can cause flow path resistance in the liquid, and the liquid ejection characteristics can be improved.

According to a ninth aspect of the present invention, in the first to eighth aspects, a drive circuit for driving the pressure generating element is mounted on a surface of the reservoir forming substrate opposite to the compliance substrate. It exists in the liquid jet head of any aspect.
In the ninth aspect, by mounting the drive circuit on the reservoir forming substrate, it is possible to further reduce the size in the width direction that is the longitudinal direction of the pressure generating chamber of the liquid ejecting head.

A tenth aspect of the present invention is a liquid ejecting apparatus including the liquid ejecting head according to any one of the first to ninth aspects.
In the tenth aspect, it is possible to realize a liquid ejecting apparatus that is reduced in size and improved in liquid ejecting characteristics.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is a schematic perspective view of an ink jet recording head which is an example of a liquid jet head according to Embodiment 1 of the present invention, and FIG. 2 is a plan view of FIG. As shown in the figure, the flow path forming substrate 10 is formed of a silicon single crystal substrate having a plane orientation (110) in this embodiment, and one surface thereof is previously formed of silicon dioxide by thermal oxidation to a thickness of 0.5 to 2 μm. The elastic film 50 is formed.

  In the flow path forming substrate 10, pressure generating chambers 12 partitioned by a plurality of partition walls 11 are arranged in parallel in the width direction (short direction) by anisotropic etching from the other surface side. In addition, an ink supply path that is an example of a liquid supply path that forms an individual flow path for each nozzle opening, which will be described in detail later, together with the pressure generation chamber 12 on one end side in the longitudinal direction of the pressure generation chamber 12 of the flow path forming substrate 10. 14 and the communication portion 13 are partitioned by the partition wall 11.

  The ink supply path 14 generates a flow path resistance for the ink between a reservoir 100 and a pressure generation chamber 12 which will be described in detail. The ink supply path 14 communicates with one end in the longitudinal direction of the pressure generation chamber 12 and is a pressure generation chamber. Having a cross-sectional area of less than 12. For example, in the present embodiment, the ink supply path 14 is formed with a width smaller than the width of the pressure generation chamber 12 by narrowing the flow path of the pressure generation chamber 12 in the width direction. As described above, in this embodiment, the ink supply path 14 is formed by narrowing the width of the flow path from one side. However, the ink supply path may be formed by narrowing the width of the flow path from both sides. Further, the ink supply path may be formed by narrowing from the thickness direction instead of narrowing the width of the flow path. Further, each communication portion 13 communicates with the side of the ink supply path 14 opposite to the pressure generation chamber 12 and has a larger cross-sectional area than the width direction (short direction) of the ink supply path 14. In the present embodiment, the communication portion 13 is formed with the same cross-sectional area as the pressure generation chamber 12.

  In other words, the flow path forming substrate 10 is connected to the pressure generation chamber 12, the ink supply path 14 having a smaller cross-sectional area in the short direction of the pressure generation chamber 12, the ink supply path 14, and the ink supply. An individual flow path including a communication portion 13 having a cross-sectional area larger than the cross-sectional area in the short direction of the path 14 is provided by being partitioned by a plurality of partition walls 11.

  On the surface side of the flow path forming substrate 10 where the individual flow paths such as the pressure generation chambers 12 are opened, nozzle openings 21 communicating with the vicinity of the ends of the pressure generation chambers 12 opposite to the ink supply paths 14 are formed. In one example of the nozzle forming member, the nozzle plate 20 is fixed by an adhesive, a heat welding film, or the like. The nozzle plate 20 is made of, for example, glass ceramics, a silicon single crystal substrate, stainless steel, or the like.

  On the other hand, as described above, the elastic film 50 having a thickness of, for example, about 1.0 μm is formed on the surface of the flow path forming substrate 10 opposite to the nozzle plate 20, and the elastic film 50 is formed on the elastic film 50. An insulator film 55 having a thickness of, for example, about 0.4 μm is formed. Further, on the insulator film 55, a lower electrode film 60 having a thickness of, for example, about 0.2 μm, a piezoelectric layer 70 having a thickness of, for example, about 1.0 μm, and a thickness of, for example, about 0 The upper electrode film 80 having a thickness of 0.05 μm is laminated by a process described later to constitute the piezoelectric element 300. Here, the piezoelectric element 300 refers to a portion including the lower electrode film 60, the piezoelectric layer 70, and the upper electrode film 80. In general, one electrode of the piezoelectric element 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. In the present embodiment, the lower electrode film 60 is used as a common electrode of the piezoelectric element 300 and the upper electrode film 80 is used as an individual electrode of the piezoelectric element 300. However, there is no problem even if this is reversed for convenience of a drive circuit and wiring. That is, in the present embodiment, the piezoelectric element 300 is provided as a pressure generating element that causes a pressure change in the ink (liquid) in the pressure generating chamber 12.

  In addition, the upper electrode film 80 of each piezoelectric element 300 has a lead electrode 90 such as gold (Au) extending to the vicinity of the end of the flow path forming substrate 10 opposite to the ink supply path 14. Each is connected. A voltage is selectively applied to each piezoelectric element 300 via the lead electrode 90.

  In addition, a reservoir forming substrate 30 provided with a reservoir 100 serving as a common ink chamber (liquid chamber) for the individual flow paths is provided on the surface of the flow path forming substrate 10 on the piezoelectric element 300 side via a compliance substrate 40. ing. That is, the compliance substrate 40 bonded to the surface of the flow path forming substrate 10 via the adhesive 35 via the adhesive 35 and the reservoir forming substrate 30 bonded to the compliance substrate 40 via the adhesive 36 Is provided.

  The reservoir forming substrate 30 is provided with a reservoir 100 having a concave shape that opens toward the flow path forming substrate 10 in a region facing the plurality of piezoelectric elements 300, and the opening of the reservoir 100 is sealed by the compliance substrate 40. It has been stopped. In the present embodiment, the reservoir 100 is continuously provided from a region facing the communication portion 13 to a region facing the plurality of piezoelectric elements 300.

  In addition, on the surface of the reservoir forming substrate 30 opposite to the compliance substrate 40, there is provided an introduction hole 31 that allows the reservoir 100 to communicate with storage means such as an ink tank that stores external ink (not shown). The introduction hole 31 is provided on the end side opposite to the through-hole 45 of the compliance substrate 40, which will be described in detail later, so that the influence of the dynamic pressure of the ink introduced from the storage means causes the through-hole 45 to be affected. The pressure exerted on the pressure generation chamber 12 is reduced.

  The material of the reservoir forming substrate 30 includes, for example, glass, ceramic material, metal, resin, etc., but is preferably formed of a material that is substantially the same as the coefficient of thermal expansion of the flow path forming substrate 10, In this embodiment, a silicon single crystal substrate that is the same material as the flow path forming substrate 10 is used. In this way, the reservoir forming substrate 30 is made of substantially the same material as the thermal expansion coefficient of the flow path forming substrate 10, so that the thermal expansion coefficient can be increased even when the ink jet recording head is heated during ink ejection or manufacturing. It is possible to prevent the occurrence of warpage due to the difference and the occurrence of breakage such as cracks.

  The compliance substrate 40 includes a fixing plate 41 bonded to the flow path forming substrate 10 via an adhesive 35 and a sealing film 42 bonded on the fixing plate 41.

  For example, the fixing plate 41 is formed of a plate-like member having a thickness of about several tens of μm, and in this embodiment, a thickness of 30 μm. It has a length that reaches the outside of the pressure generating chambers 12 in the parallel direction.

  The material of the fixing plate 41 includes, for example, glass, ceramic material, metal, resin, etc., but it is preferable to form the same material as the thermal expansion coefficient of the flow path forming substrate 10, and in this embodiment, A silicon single crystal substrate which is the same material as the flow path forming substrate 10 is used. In this way, by using a silicon single crystal substrate made of the same material as the flow path forming substrate 10 for the fixing plate 41 to be bonded to the flow path forming substrate 10 of the compliance substrate 40, the ink jet recording head can be used during ink ejection or manufacturing. Even when heated at times, it is possible to reliably prevent the occurrence of warpage due to the difference in thermal expansion coefficient and the occurrence of breakage such as cracks. Further, since the fixing plate 41 is a thin member with respect to the thickness of the flow path forming substrate 10, even if stainless steel (SUS) is used as the material of the fixing plate 41, the possibility of warping due to heat is low.

  Further, the sealing film 42 is a flexible material such as a resin having low rigidity and a flexibility, for example, a polyphenylene sulfide (PPS) film having a thickness of about several μm and a thickness of 6 μm in this embodiment. Consists of. Of course, in addition to polyphenylene sulfide, polyimide, polyamide, or the like can be used as the flexible material.

  Further, the fixing plate 41 is provided with an opening 43 that is completely removed in the thickness direction in a region facing the reservoir 100. Such an opening 43 is provided in a region facing the plurality of piezoelectric elements 300.

  The compliance substrate 40 is provided with a flexible deformable portion 44 that seals the opening of the reservoir 100 with only the sealing film 42 by the opening 43 of the fixing plate 41. That is, by providing the opening 43 of the fixing plate 41 in a region opposite to the plurality of piezoelectric elements 300, a predetermined space is provided between the sealing film 42 that seals the opening of the reservoir 100 and the piezoelectric element 300. The sealing film 42 that seals the opening of the reservoir 100 is a flexible portion 44 that can be bent and deformed.

  In addition, since such a sealing film 42 is used as the flexible portion 44, it is sufficient that it is provided with a size that at least seals the opening 43 of the fixing plate 41. In the present embodiment, the sealing film 42 is provided in the same size as the outer periphery of the fixing plate 41.

  Further, a through-hole 45 penetrating in the thickness direction communicating the communication portion 13 and the reservoir 100 is provided in a region facing the communication portion 31 of the compliance substrate 40. In the present embodiment, one through hole 45 is provided across the communication portion 13 that is a plurality of individual flow paths. Then, the ink from the reservoir 100 is supplied to the communication part 13, the ink supply path 14, and the pressure generation chamber 12 which are the individual flow paths through the through holes 45. That is, the reservoir 100 functions as a common liquid chamber (ink chamber) for each individual flow path.

  A drive circuit 120 for driving the piezoelectric element 300 is mounted on the reservoir forming substrate 30. As the drive circuit 120, for example, a circuit board, a semiconductor integrated circuit (IC), or the like can be used. And the front-end | tip part of each lead electrode 90 which is the lead-out wiring pulled out from each piezoelectric element 300, and the drive circuit 120 are electrically connected via the drive wiring 121 which consists of a bonding wire etc.

  In such an ink jet recording head according to this embodiment, ink is taken in from a storage unit that stores external ink (not shown) through the introduction hole 31, and reaches from the reservoir 100 to the nozzle opening 21 through the through hole 45. After the interior is filled with ink, a voltage is applied between each of the lower electrode film 60 and the upper electrode film 80 corresponding to the pressure generation chamber 12 in accordance with a recording signal from the drive circuit 120, and the piezoelectric element 300 and the vibration plate , The pressure in each pressure generating chamber 12 is increased and ink is ejected from the nozzle openings 21.

  As described above, since the reservoir 100 is provided in the region facing the piezoelectric element 300 of the flow path forming substrate 10, the width in the longitudinal direction of the pressure generating chamber 12 of the ink jet recording head can be reduced, and the size can be reduced. Can be achieved.

  In addition, the compliance substrate 40 is provided between the flow path forming substrate 10 and the reservoir forming substrate 30, and the flexible portion 44 is provided in a region facing the piezoelectric element 300 of the compliance substrate 40. The flexible portion 44 can reduce the pressure fluctuation in the reservoir 100 when the ink is supplied. Further, even if the introduction hole 31 of the reservoir forming substrate 30 is formed in a region facing the piezoelectric element 300 to reduce the size of the head, the flexible portion 44 is formed in the region facing the introduction hole 31. Therefore, the pressure fluctuation in the reservoir 100 can be reduced by the flexible portion 44. That is, the ink supplied from the introduction hole 31 to the reservoir 100 abuts on the flexible portion 44 provided in the supply direction, and the flexible portion 44 bends and deforms, thereby reducing the pressure fluctuation in the reservoir 100. Can do. As a result, it is possible to reduce the influence of pressure fluctuations on the pressure generating chamber 12 when ink is supplied to the reservoir 100 and to improve the ink ejection characteristics.

  Further, by providing the compliance substrate 40 having the flexible portion 44 between the flow path forming substrate 10 and the reservoir forming substrate 30, the flexible portion 44 can be formed in a wide area, and the pressure variation in the reservoir 100 And the occurrence of crosstalk due to the adverse effects of pressure fluctuations can be reliably reduced.

  Furthermore, by providing the compliance substrate 40 having the flexible portion 44 between the flow path forming substrate 10 and the reservoir forming substrate 30, the drive circuit 120 that drives the piezoelectric element 300 can be mounted on the reservoir forming substrate 30. This eliminates the need for components or the like for mounting the drive circuit 120, and can reduce the size without increasing the number of components.

In the present embodiment, the inner wall surface of the individual flow path including the pressure generation chamber 12, the communication portion 13, and the ink supply path 14, the inner wall surface of the through hole 45 of the compliance substrate 40, and the adhesive continuous to the through hole 45 are used. A protective film 200 made of a material having ink resistance (liquid resistance), for example, tantalum oxide such as tantalum pentoxide (Ta ₂ O ₅ ), has a thickness of about 50 nm. Is provided. The ink resistance referred to here is etching resistance against alkaline ink. The material of the protective film 200 is not limited to tantalum oxide, and depending on the pH value of the ink used, for example, zirconium oxide (ZrO2), nickel (Ni), chromium (Cr) or the like may be used. Good.

  Thus, by providing the protective film 200, it is possible to prevent the flow path forming substrate 10 and the compliance substrate 40 from being eroded by ink, thereby improving durability and reliability.

(Embodiment 2)
FIG. 3 is a schematic perspective view of an ink jet recording head according to Embodiment 2 of the present invention, and FIG. 4 is a plan view and a cross-sectional view of the ink jet recording head. In addition, the same code | symbol is attached | subjected to the member similar to Embodiment 1 mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in the figure, the compliance substrate 40A of the present embodiment is provided with a through hole 45A independently for each individual flow path. Even with such a configuration, as in the first embodiment described above, the ink jet recording head can be reduced in size without increasing the number of components, and the flexible portion 44 can be formed in a wide area. In addition, crosstalk at the time of supplying ink to the reservoir 100 and discharging ink can be reduced.

(Other embodiments)
As mentioned above, although each embodiment of this invention was described, the basic composition of this invention is not limited to what was mentioned above. For example, in the first and second embodiments described above, the pressure generation chamber 12, the ink supply path 14, and the communication portion 13 are provided as the individual flow paths. However, the present invention is not particularly limited thereto. For example, the communication portion 13 is provided. It may not be possible. Further, as in the second embodiment described above, when an independent through hole 45A is provided for each individual flow path, the through hole 45A has a flow path resistance applied to the ink between the pressure generating chamber 12 and the reservoir 100. By functioning as an ink supply path to be generated, the ink supply path 14 and the communication portion 13 may not be provided in the flow path forming substrate 10. Thereby, only the pressure generation chamber 12 has to be formed on the flow path forming substrate 10, and the width in the longitudinal direction of the pressure generation chamber 12 can be further reduced, and the cost can be reduced. Of course, a reservoir portion or the like that constitutes a part of the reservoir 100 may be provided in the flow path forming substrate 10 so as to communicate with each individual flow path.

  In the first embodiment, the through holes 45 are provided so as to communicate with all the individual flow paths. In the second embodiment, the through holes 45A are provided independently for each individual flow path. For example, a through hole may be provided for each individual flow path group including a plurality of individual flow paths. Thereby, the flow path resistance can be generated in the ink by the through-hole when the ink is discharged, and the positioning can be easily performed when the compliance substrate and the flow path forming substrate 10 are joined.

  Furthermore, in the first and second embodiments described above, the compliance substrates 40 and 40A are configured by the sealing film 42 and the fixing plate 41, and the flexible portion 44 is formed by the opening 43 of the fixing plate 41. However, the present invention is not particularly limited thereto, and for example, the flexible portion 44 and the like may be formed by partially reducing the thickness of one plate-like member.

  Further, in the first and second embodiments described above, one flexible portion 44 is provided on the compliance substrates 40 and 40A. However, the present invention is not particularly limited thereto. For example, a plurality of openings 43 are provided on the fixed plate 41. Thus, a plurality of flexible portions 44 may be provided.

  In addition, the ink jet recording heads of these embodiments constitute a part of a recording head unit having an ink flow path communicating with an ink cartridge or the like, and are mounted on the ink jet recording apparatus. FIG. 5 is a schematic view showing an example of the ink jet recording apparatus.

  As shown in FIG. 5, in the recording head units 1A and 1B having the ink jet recording head, cartridges 2A and 2B constituting ink supply means are detachably provided, and a carriage 3 on which the recording head units 1A and 1B are mounted. Is provided on a carriage shaft 5 attached to the apparatus body 4 so as to be movable in the axial direction. The recording head units 1A and 1B, for example, are configured to eject a black ink composition and a color ink composition, respectively.

  The driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and timing belt 7 (not shown), so that the carriage 3 on which the recording head units 1A and 1B are mounted is moved along the carriage shaft 5. The On the other hand, the apparatus body 4 is provided with a platen 8 along the carriage shaft 5, and a recording sheet S which is a recording medium such as paper fed by a paper feed roller (not shown) is wound around the platen 8. It is designed to be transported.

  In the above-described embodiment, the piezoelectric element is used as the pressure generating element. However, a so-called electrostatic actuator that controls the vibration of the diaphragm with electrostatic force by arranging the diaphragm and the electrode with a predetermined gap is provided. It may be used as a pressure generating element. In addition, although an ink jet recording head has been described as an example of a liquid ejecting head, the present invention is intended for a wide range of liquid ejecting heads and is naturally applicable to liquid ejecting heads that eject liquids other than ink. can do. Other liquid ejecting heads include, for example, various recording heads used in image recording apparatuses such as printers, color material ejecting heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejection head used for electrode formation, a bioorganic matter ejection head used for biochip production, and the like.

2 is a schematic perspective view of a recording head according to Embodiment 1. FIG. 2A and 2B are a plan view and a cross-sectional view of the recording head according to the first embodiment. 6 is a schematic perspective view of a recording head according to Embodiment 2. FIG. 6A and 6B are a plan view and a cross-sectional view of a recording head according to Embodiment 2. 1 is a schematic view of an ink jet recording apparatus according to an embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Flow path formation board | substrate, 12 Pressure generation chamber, 13 Communication part, 14 Ink supply path, 15 Communication path, 20 Nozzle plate, 21 Nozzle opening, 30 Reservoir formation board, 31 Introduction hole, 40, 40A Compliance board, 41 Fixing board 42 sealing film, 43 opening part, 44 flexible part, 45, 45A through hole, 50 elastic film, 55 insulator film, 60 lower electrode film, 70 piezoelectric layer, 80 upper electrode film, 90 lead electrode, 100 Reservoir, 300 Piezoelectric element

Claims (10)

A flow path forming substrate provided with an individual flow path having a pressure generating chamber communicating with a nozzle opening for ejecting liquid, and provided in a region opposite to the pressure generating chamber on one side of the flow path forming substrate. A pressure generating element,
A reservoir forming substrate in which a reservoir serving as a common liquid chamber of the individual flow path is provided in a region facing the pressure generating element on a surface of the flow path forming substrate on the pressure generating element side, the pressure generating element A flexible part is provided in a region bonded to the element via a compliance substrate provided at a predetermined interval, and the compliance substrate seals the opening of the reservoir and seals the reservoir of the compliance substrate. A liquid ejecting head characterized by comprising: The compliance substrate includes a fixing plate bonded to the flow path forming substrate side, and a sealing film made of a flexible material bonded to the fixing plate, and is opposed to the reservoir of the fixing plate. 2. The region is provided with an opening penetrating in the thickness direction, and the region in which the reservoir is sealed only by the sealing film by the opening serves as the flexible portion. The liquid jet head described. The liquid jet head according to claim 1, wherein the compliance substrate is provided with a through-hole that communicates the reservoir and the individual flow path. The liquid ejecting head according to claim 3, wherein a protective film having liquid resistance is provided on an inner surface of the individual flow path and an inner surface of the through hole. The liquid ejecting head according to claim 3, wherein the through hole is provided independently for each individual flow path group including a plurality of individual flow paths. The liquid ejecting head according to claim 3, wherein the through hole is provided independently for each individual flow path. The individual flow path includes the pressure generation chamber, and the through-hole functions as a liquid supply path that causes a flow path resistance of the liquid between the reservoir and the pressure generation chamber. 6. The liquid jet head according to 6. The individual flow path communicates with at least the pressure generation chamber and one end of the pressure generation chamber, has a cross-sectional area smaller than a cross-sectional area in the width direction of the pressure generation chamber, and the reservoir and the pressure The liquid ejecting head according to claim 1, wherein the liquid ejecting head is configured by a liquid supply path that generates a flow path resistance in the liquid between the generating chamber and the generation chamber. The liquid ejecting head according to claim 1, wherein a drive circuit that drives the pressure generating element is mounted on a surface of the reservoir forming substrate opposite to the compliance substrate. . A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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