JP2008207277A - Grinding wheel mounting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a grinding wheel and the inside of a grinding device from being damaged when mounting the grinding wheel on a wheel mount. <P>SOLUTION: The grinding wheel 33 can be mounted without directly touching a grinding wheel part 332, by fixing both by a fixing means while contacting a fixing end surface 334 of an exposed frame part 330 with the wheel mount 32, in a state of storing a free end surface 331 of the grinding wheel 33 in a holding member 5 storing the free end surface 331 of the grinding wheel 33 covering the grinding wheel part 332. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a grinding wheel mounting method for mounting a grinding wheel having a grindstone portion on a wheel mount.

  A wafer on which a plurality of devices such as LSI and IC are formed is ground to a predetermined thickness by grinding the back surface, and is divided into individual devices by a processing device such as a dicing device to be used as an electronic device such as a mobile phone or a personal computer. Used. In the grinding apparatus, a grindstone having a width of 2 to 3 mm is annularly arranged on the outer periphery, and grinding is performed by an annular grinding wheel having the same outer diameter as the workpiece. Here, the grinding wheel is attached by removing the grinding wheel from the case and attaching it to the wheel mount while the operator supports the cutting edge of the grinding wheel with hands (see, for example, Patent Documents 1 and 2).

JP 2001-158492 A JP 2006-055963 A

  However, since the attachment operation is performed by directly touching the grindstone with the grinding wheel, the grindstone may be damaged during the attachment operation, and the grinding performance may be deteriorated. Further, when the grinding wheel is gripped and brought to the wheel mount, the grindstone may collide with a member inside the grinding apparatus such as a chuck table and damage the inside member.

  The present invention has been made in view of the above, and an object of the present invention is to provide a grinding wheel mounting method that does not damage the grindstone and the grinding apparatus when the grinding wheel is attached to the wheel mount.

  In order to solve the above-mentioned problems and achieve the object, a grinding wheel mounting method according to the present invention includes a grinding wheel having a fixed end surface in which a grindstone portion is annularly arranged on a free end surface of an annular frame portion. A grinding wheel mounting method for rotatably mounting on a mount, wherein the free end surface of the grinding wheel is accommodated in a holding member that accommodates the free end surface of the grinding wheel in a state of covering the grindstone portion and exposed. The fixing end surface of the frame portion is fixed to the wheel mount while being fixed by a fixing means.

  Moreover, the grinding wheel mounting method according to the present invention is characterized in that, in the above invention, the holding member has a rotation restricting portion for restricting rotation of the accommodated grinding wheel.

  According to the grinding wheel mounting method of the present invention, the fixed end surface of the exposed frame portion is wheel-mounted while the free end surface of the grinding wheel is accommodated in the holding member that accommodates the free end surface of the grinding wheel while covering the grindstone portion. Since both of them are fixed by the fixing means while being in contact with the grinding wheel, the grinding wheel can be attached without touching the grinding wheel portion directly, thereby preventing the grinding stone portion and the inside of the grinding apparatus from being damaged. There is an effect that can be done.

  Further, according to the grinding wheel mounting method according to the present invention, since the holding member having the rotation restricting portion that restricts the rotation of the accommodated grinding wheel is used, when the holding member is rotated when the grinding wheel is attached, The grinding wheel accommodated in the holding member is also integrally rotated by the rotation restricting portion, so that the mounting property can be improved.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a grinding wheel mounting method that is the best mode for carrying out the present invention will be described below in detail with reference to the drawings.

  First, an outline of a grinding apparatus and a basic operation for mounting a grinding wheel will be described with reference to FIGS. FIG. 1 is a perspective view showing a configuration example of a grinding apparatus to which the grinding wheel mounting method of the present embodiment is applied. A grinding apparatus 1 shown in FIG. 1 is an apparatus for grinding a surface of a workpiece W such as a wafer to finish it to a desired thickness. The chuck table 2 can be rotated and moved in the horizontal direction, and the chuck table 2. A grinding means 3 for grinding the workpiece W held on the grinding means, and a grinding means driving unit 4 for driving the grinding means 3 in the vertical direction.

  The grinding means driving unit 4 includes a pair of guide rails 41 arranged in a direction perpendicular to the wall 40, a ball screw 42 arranged in parallel to the guide rail 41, and a pulse motor 43 connected to one end of the ball screw 42. And a support portion 44 that is slidably engaged with the guide rail 41 and has an internal nut screwed into the ball screw 42, and is driven by the pulse motor 43 to rotate the ball screw 42. The support portion 44 is guided by the guide rail 41 and moves up and down, and the grinding means 3 supported by the support portion 44 is also moved up and down.

  The grinding means 3 includes a spindle 30 having a vertical axis, a drive source 31 that rotationally drives the spindle 30, a wheel mount 32 that is formed at the lower end of the spindle 30 and is rotationally driven by the drive source 31, and the wheel mount 32. And a grinding wheel 33 fixed to the wheel.

  As shown in FIG. 2, the wheel mount 32 constituting the grinding means 3 is provided with a plurality (three) of bolt insertion long holes 320 through which fixing means 34 such as bolts for fixing the grinding wheel 33 are passed. . Further, at least three engagement protrusions 321 (only one is shown in FIG. 2) are formed to protrude downward from the end of the wheel mount 32.

  On the other hand, the grinding wheel 33 is for grinding the workpiece W and is detachable from the wheel mount 32. As shown in FIGS. 2 and 3, the grinding wheel 33 is annularly arranged by fitting it into an annular frame portion 330 and an annular groove (not shown) formed in the free end surface 331 of the frame portion 330. It is comprised from the grindstone part 332. The frame portion 330 has a plurality of grinding waters positioned on the inner peripheral side of the grindstone portion 332 and penetrating in the vertical direction and supplied from the wheel mount 32 side to the inner peripheral surface side of the grindstone portion 332. Supply holes 333 are formed at equal intervals on the same circumference.

  An upper surface side of the annular frame portion 330 constitutes a fixed end surface 334 attached to the wheel mount 32. On the fixed end surface 334, the same number of female screws 335 as the bolt insertion long holes 320 are formed are engaged with the fixing means 34 that penetrates the bolt insertion long holes 320 of the wheel mount 32. In addition, an engaged long hole 336 is formed between adjacent female threads 335 to engage with an engaging protrusion 321 formed on the wheel mount 32. The engaged elongated hole 336 has a loose fitting portion 336a having a width larger than the diameter of the engaging protrusion 321 and a width similar to the diameter of the engaging protrusion 321 so that the engaging protrusion 321 can be inserted with a margin. And a fixing portion 336b for fastening the engaging protrusion 321.

  As shown in FIG. 4, the engaging protrusion 321 is formed so as to be inclined so that the tip portion thereof faces the outer peripheral side of the wheel mount 32, and the engaged elongated hole 336 formed in the frame portion 330 is Corresponding to the inclination of the engaging protrusion 321, it is formed to be inclined. The engagement protrusion 321 is engaged with the engagement protrusion 321 as shown in FIG. 5 by inserting the engagement protrusion 321 into the loose fitting portion 336a and rotating the wheel mount 32 and the grinding wheel 33 relative to each other around the axis. The grinding wheel 33 is temporarily fixed to the wheel mount 32 by being fastened to the fixing portion 336b of the elongated hole 336, and the mounted surface 322 of the wheel mount 32 and the fixed end surface 334 of the grinding wheel 33 are in close contact with each other.

  Then, as shown in FIG. 6, all the engagement protrusions 321 are fastened to the fixing portions 336 b of the corresponding engaged long holes 336, so that the rotation center of the wheel mount 32 and the rotation of the grinding wheel 33 are obtained. The center matches. And the state where the rotation center of the wheel mount 32 and the rotation center of the grinding wheel 33 matched by maintaining by the fixing means 34 is maintained. Since the bolt insertion long hole 320 formed in the wheel mount 32 is formed as a long hole, the fixing means 34 can be fastened corresponding to the position of the female screw 335 formed in the frame portion 330. In the illustrated example, since the three engaging protrusions 321 are arranged so as to form an equilateral triangle, the grinding wheel 33 is more stably fixed by the three-point support.

  Here, in the present embodiment, when the grinding wheel 33 as described above is attached to the wheel mount 32, a holding member is used. First, FIG. 7 is a schematic sectional view showing the holding member 5 and the like used in the present embodiment. The holding member 5 constitutes a wheel case for storing the grinding wheel 33 in a pair with the detachable lid member 6. In the holding member 5, the receiving recess 51 for receiving the free end surface 331 of the frame portion 330 of the grinding wheel 33 in a state of covering the annular grindstone portion 332 in a non-contact manner substantially matches the shape and size of the frame portion 330. It is formed. The depth of the housing recess 51 is set so that the fixed end surface 334 side can be exposed in a state where the free end surface 331 side is housed. The lid member 6 is formed in a concave shape so as to accommodate and cover the exposed fixed end surface 334 side. The holding member 5 and the lid member 6 are formed of a relatively soft member such as a resin such as ABS or polyethylene, or a metal such as aluminum.

  Further, the holding member 5 has a rotation restricting portion 52 that restricts the rotation of the accommodated grinding wheel 33 around the axis thereof at a portion where the inner surface side of the grinding wheel 33 abuts. For example, as shown in FIG. 8, the rotation restricting portion 52 has elasticity such as a suction cup disposed at equal intervals at four positions on the inner peripheral side of the housing recess 51 of the holding member 5 and has a friction coefficient. It consists of a large member. In addition, a handle 53 for an operator to hold the holding member 5 is provided in the central portion on the outer surface side of the holding member 5.

  Next, a method for mounting the grinding wheel 33 using the holding member 5 will be described with reference to FIGS. As shown in FIG. 7, the unused grinding wheel 33 is stored in a state where it is accommodated in a wheel case composed of the holding member 5 and the lid member 6. When the grinding wheel 33 is mounted on the wheel mount 32 of the grinding apparatus 1, the wheel case in the state shown in FIG. 7 is turned over to remove the lid member 6, and the fixed end surface 334 of the grinding wheel 33 is exposed.

  With the holding member 5 thus housed on the free end surface 331 side of the grinding wheel 33, the handle 53 is gripped, and the exposed fixed end surface 334 is lifted to contact the wheel mount 32 as shown in FIG. Let At this time, the grinding wheel 33 is raised together with the holding member 5 by positioning so that the engaging protrusion 321 is inserted into the loose fitting portion 336 a of the engaged elongated hole 336. Then, by rotating the holding member 5 containing the grinding wheel 33 relatively slightly around the axis with respect to the wheel mount 32, the engaging protrusion 321 is moved to the engaged length as described with reference to FIG. As shown in FIG. 10, the holding member 5 accommodating the grinding wheel 33 is temporarily fixed to the wheel mount 32, and the mounting surface 322 and the fixed end surface 334 of the wheel mount 32 are fixed to the fixing portion 336 b of the hole 336. Adhere. Here, when the holding member 5 is rotated when the grinding wheel 33 is mounted, the grinding wheel 33 accommodated in the holding member 5 is also rotated integrally by the rotation restricting portion 53, and the grinding wheel 33 is directly mounted. It is possible to secure the same mounting property as the case.

  After the temporary fixing, the wheel mount 32 and the grinding wheel 33 are fixed by the fixing means 34. After the fixing, the holding member 5 that accommodates the grinding wheel 33 is lowered and separated from the grinding wheel 33, as shown in FIG. Thus, the mounting operation of the grinding wheel 33 on the wheel mount 32 is completed.

  Thus, according to the grinding wheel mounting method of the present embodiment, in a state where the free end surface 331 of the grinding wheel 33 is accommodated in the holding member 5 that accommodates the free end surface 331 of the grinding wheel 33 in a state of covering the grindstone portion 332. Since both the fixed end surface 334 of the exposed frame portion 330 is in contact with the wheel mount 32 and both are fixed by the fixing means 34, the grinding wheel 33 can be attached without directly touching the grindstone portion 332. It is possible to prevent the grinding wheel portion 332 and the chuck table 2 inside the grinding apparatus from being damaged. Further, since the holding member 5 can be formed of a relatively soft member, even if the holding member 5 containing the grinding wheel 33 may come into contact with the chuck table 2 or the like, the grindstone portion 332 comes into direct contact. The degree of damage can be reduced as compared with the case. Furthermore, the holding member 5 has a diameter exceeding 300 mm (the wheel diameter actually used is from 152 mm to 300 mm in diameter). It becomes easier for the operator to hold and work efficiency can be improved.

  In the present embodiment, the rotation restricting portion 53 is configured by a suction cup. However, the configuration is not limited to the suction cup, and various configurations can be adopted. For example, as shown in FIG. 12, several pins that are detachably fitted in the grinding water supply hole 333 of the grinding wheel 33 may be provided on the holding member 5 as the rotation restricting portion 54.

  In the present embodiment, the wheel case for storing the grinding wheel 5 is used as the holding member. However, a jig dedicated to mounting the grinding wheel may be used. FIG. 13 is a perspective view illustrating a configuration example of the holding member 7 using a jig. The holding member 7 is formed with an accommodation recess 71 for accommodating the free end surface 331 of the frame portion 330 of the grinding wheel 33 so as to cover the annular grindstone portion 332 in a non-contact manner. The depth of the accommodating recess 71 is set so that the fixed end surface 334 side can be exposed in a state where the free end surface 331 side is accommodated. The holding member 7 is formed of a relatively soft member such as a resin such as ABS or polyethylene or a metal such as aluminum.

  Further, the holding member 7 has a rotation restricting portion 72 that restricts the rotation of the accommodated grinding wheel 33 around the axis thereof on the inner wall portion with which the outer peripheral surface of the grinding wheel 33 abuts. As shown in FIG. 13, for example, the rotation restricting portion 72 is made of a member having a large friction coefficient and having elasticity such as rubber disposed at four positions on the inner wall at equal intervals. In addition, instead of rubber, the rotation restricting portion 72 may be configured by a protrusion, a claw portion, or the like in which a part of the inner wall portion of the holding member 7 protrudes inward. Further, a handle (not shown) for an operator to hold the holding member 7 is provided at the center portion on the outer surface side of the holding member 7.

  When such a holding member 7 is used, when the grinding wheel 33 is mounted, the holding member 7 is received with respect to the grinding wheel 33 which is housed in a wheel case and the free end surface 331 side faces upward, as shown in, for example, Patent Document 1 or the like. By covering the recess 71 so that it faces downward, the free end surface 331 side of the grinding wheel 33 is accommodated in the accommodation recess 71. At this time, the grinding wheel 33 is lightly fixed by pressing the side surface of the frame portion 330 against the rotation restricting portion 72 of the inner wall portion. Therefore, by gripping the handle and turning the holding member 7 placed on the grinding wheel 33 upside down, the grinding wheel 33 is in an accommodation state in which the fixed end surface 334 is exposed upward with respect to the holding member 7 as shown in FIG. Become. Therefore, thereafter, the grinding wheel 33 can be attached to the wheel mount 32 as in the case of the holding member 5. Also in this mounting, when the holding member 7 is slightly rotated around the axis, the grinding wheel 33 is also rotated integrally under the restriction by the rotation restricting portion 72, and the mounting workability is not impaired.

  Further, although the present embodiment has been described as an application example to a structural example in which the wheel mount 32 has a bolt insertion long hole 320 for temporary fixing and the grinding wheel 33 is temporarily fixed and then fixed, the bolt insertion length The present invention can be similarly applied even when the grinding wheel 33 is directly screwed without temporarily fixing the grinding wheel 33 to the wheel mount 32 without having the hole 320, the engagement protrusion 321 and the engaged elongated hole 336. If the grinding wheel 33 is mounted using the members 5 and 7, the operation is easy.

It is a perspective view showing an example of composition of a grinding device to which a grinding wheel mounting method of an embodiment of the invention is applied. It is a perspective view which shows an example of a wheel mount and a grinding wheel. It is a perspective view which turns over and shows a grinding wheel. It is a schematic sectional drawing which shows the engagement state of an engagement protrusion and a to-be-engaged long hole. It is a schematic sectional drawing which shows the state by which the grinding wheel was temporarily fixed to the wheel mount. It is a top view which shows the state by which the grinding wheel was fixed to the wheel mount. It is a schematic sectional drawing which shows the holding member etc. which accommodated the grinding wheel. It is a perspective view which shows a holding member. It is a schematic sectional drawing which shows the 1st step of the mounting process of the grinding wheel of this Embodiment. It is a schematic sectional drawing which shows the 2nd step of the mounting process of the grinding wheel of this Embodiment. It is a schematic sectional drawing which shows the 3rd step of the mounting process of the grinding wheel of this Embodiment. It is a perspective view which shows the modification of a rotation control part. It is a perspective view which shows the modification of a holding member. It is a perspective view which shows the holding member of the state which accommodated the grinding wheel.

Explanation of symbols

5, 7 Holding member 32 Wheel mount 33 Grinding wheel 34 Fixing means 52, 54, 72 Rotation restricting portion 330 Frame portion 331 Free end surface 332 Grinding stone portion 334 Fixed end surface

Claims (2)

A grinding wheel mounting method in which a grinding wheel portion is disposed annularly on a free end surface of an annular frame portion and a grinding wheel having a fixed end surface is rotatably mounted on a wheel mount,
While the free end surface of the grinding wheel is accommodated in a holding member that accommodates the free end surface of the grinding wheel in a state of covering the grindstone portion, the fixed end surface of the exposed frame portion is brought into contact with the wheel mount. A grinding wheel mounting method characterized in that both are fixed by a fixing means.   The grinding wheel mounting method according to claim 1, wherein the holding member includes a rotation restricting portion that restricts rotation of the accommodated grinding wheel.

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