JP2008125322A - Linear motor and uniaxial actuator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce a cogging force in an effective manner. <P>SOLUTION: A linear motor 1 has a fixed section 2 (field section) at which permanent magnets 14 are arranged side by side, and a movable section 3 (armature) facing the fixed section 2. The movable section 3 has an armature core 20 and a coil 24, and the armature core 20 has a plurality of main teeth 22 arranged in parallel with one another and a pair of auxiliary teeth 23 arranged on both sides of the arranging direction of the main teeth 22, and the coil 24 is wound around the respective main teeth 22. Respective auxiliary teeth 23 are arranged obliquely with respect to the main teeth 22. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a linear motor and a uniaxial actuator that moves a table or the like in a uniaxial direction using the motor.

  Conventionally, a stator in which permanent magnets whose surface side magnetic poles are N poles and S poles are alternately arranged in one direction, and an armature core that is arranged to face the stator and wound with an armature coil are provided. 2. Description of the Related Art A linear motor is generally known that includes a mover provided and is configured such that a mover moves linearly in the arrangement direction of permanent magnets by controlling energization of the coil. This type of linear motor is used for conveying articles in various fields, and is also applied to single-axis robots and the like.

In such a linear motor, the mover has a configuration in which, for example, an armature core is formed in a comb shape, that is, plate-shaped teeth are arranged in parallel at regular intervals, and the armature coil is wound around each tooth. However, in this structure, since the slot is opened at both ends of the mover (both ends in the stroke direction) and the interlinkage magnetic flux is different from the central portion, the end effect acts on the armature core in the moving direction. The electromagnetic force is pulsated, so-called cogging force is generated, and the thrust is likely to be uneven. Therefore, conventionally, auxiliary teeth are provided separately from the above teeth (called main teeth) at both ends of the armature core, and the cogging force acting on the main teeth is offset by the cogging force generated by the auxiliary teeth, thereby reducing the total cogging force. It was made to improve thrust nonuniformity (patent document 1).
Japanese Patent Publication No. 60-30195

  According to the configuration in which the auxiliary teeth are provided in the armature core as described above, it is considered effective in reducing the cogging force, but in reality, it is difficult to completely eliminate the cogging force, and uneven thrust is generated. It cannot be completely eliminated. This is considered due to the relationship with the specific structure of the linear motor. Therefore, in order to further improve the propulsion unevenness, it is desired that the cogging force can be further reduced in relation to such a specific structure.

  The present invention has been made in view of the above circumstances, and an object thereof is to further improve the propulsion unevenness by more effectively reducing the cogging force.

  In view of the above circumstances, the present invention includes a field portion in which a plurality of magnets are arranged in a uniaxial direction so that the polarities are alternately different from each other, and an armature disposed to face the magnet with a predetermined gap therebetween. In the linear motor configured such that the field portion and the armature move relatively in the uniaxial direction, the armature includes a plurality of plate-shaped main teeth arranged in the uniaxial direction in parallel with each other, and An armature core having a pair of plate-like auxiliary teeth disposed on both sides of the main teeth in the arrangement direction, and a coil wound around each main tooth, and each auxiliary tooth with respect to the main teeth. Are arranged diagonally.

  Specifically, each magnet of the field portion is disposed obliquely with respect to the uniaxial direction, the main teeth are disposed so as to face each other in the uniaxial direction, and the auxiliary teeth are parallel to each other. In addition, they are arranged with an inclination symmetrical to the magnet or with an inclination close thereto. Alternatively, the magnets of the field portion are arranged obliquely with respect to the uniaxial direction, the main teeth are arranged to face each other in the uniaxial direction, and the auxiliary teeth are parallel to each other. And it is arrange | positioned in the inclination state same as or close | similar to the said magnet.

  Specifically, both the magnet and each tooth are formed in an elongated shape, and the magnet and each tooth are provided as follows. That is, each magnet of the field magnet portion is disposed in a state where the longitudinal direction is oblique with respect to the uniaxial direction, and each main tooth is disposed in a state where the longitudinal direction is orthogonal to the uniaxial direction, The auxiliary teeth are arranged in parallel with each other and the longitudinal direction is inclined in the direction opposite to the magnet with respect to the uniaxial direction. In addition, each magnet of the field magnet portion is disposed in a state where the longitudinal direction is oblique with respect to the uniaxial direction, and the main teeth are disposed in a state where the longitudinal direction is orthogonal to the uniaxial direction, The auxiliary teeth are arranged in parallel with each other and the longitudinal direction is inclined in the same direction as the magnet with respect to the uniaxial direction. Further, each magnet of the field magnet portion is arranged in a state where the longitudinal direction is orthogonal to the uniaxial direction, and the main teeth are arranged in a state where the longitudinal direction is inclined with respect to the uniaxial direction, The auxiliary teeth are arranged in parallel with each other and the longitudinal direction is orthogonal to the uniaxial direction. Further, each magnet of the field magnet portion is arranged in a state where the longitudinal direction is orthogonal to the uniaxial direction, and the main teeth are arranged in a state where the longitudinal direction is inclined with respect to the uniaxial direction, The auxiliary teeth are arranged in parallel to each other and in a state where the longitudinal direction is inclined in the direction opposite to the main teeth with respect to the uniaxial direction.

  According to such a configuration, since the auxiliary teeth are provided outside the main teeth of the armature core, the cogging force acting on the main teeth and the cogging force by the auxiliary teeth are offset, and the total cogging force is effective. Reduced to At this time, the strength of the cogging force acting on the main teeth varies periodically due to the influence of the magnet of the field part, but is somewhat affected by various factors such as subtle differences in the pitch between the main teeth. According to the above configuration in which the auxiliary teeth are arranged obliquely with respect to the main teeth, as described in the embodiment of the present invention, the main teeth that vary in this manner are complicated. The cogging force can be effectively offset and the total cogging force can be reduced.

  On the other hand, the uniaxial actuator according to the present invention includes a base member, a table supported movably in a uniaxial direction with respect to the base member, a field portion fixed to the base member, and the field member so as to face the field member. In a single-axis robot provided with a linear motor having an armature fixed to a base portion, the linear motor as described above is provided as the linear motor.

  According to this single-axis actuator, since the linear motor capable of effectively reducing the total cogging force is applied, it is possible to move the table more smoothly while suppressing the occurrence of uneven thrust.

  According to the linear motor of the present invention, the effect of offsetting the cogging force acting on the main teeth and the cogging force due to the auxiliary teeth can be further enhanced. Therefore, the total cogging force can be effectively reduced, and as a result, thrust unevenness can be more reliably eliminated.

  And according to the single axis robot which concerns on this invention provided with such a linear motor, it becomes possible to move a table more smoothly.

  Embodiments of the present invention will be described with reference to the drawings.

  1 and 2 show an outline of a moving coil type linear motor which is a linear motor according to the present invention. FIG. 1 is a side view, and FIG. 2 is a sectional view (II-II sectional view of FIG. 1). Each shows a linear motor.

  As shown in these drawings, the linear motor 1 has a fixed portion 2 (field portion) and a movable portion 3 (armature) arranged to be movable with respect to the fixed portion 2.

  The fixed portion 2 is disposed on an elongated plate-like fixed yoke 12 extending in a uniaxial direction (left and right direction in FIG. 1; the moving direction of the movable portion 3) and the upper surface of the fixed yoke 12, and alternately have different polarities. It is composed of a plurality of permanent magnets 14 arranged in the uniaxial direction (so that the surface side magnetic poles are N, S, N, S...). In the following description, for the sake of convenience, the above-described uniaxial direction is referred to as a moving direction, and the description orthogonal to this (the vertical direction in FIG. 2) is the horizontal direction.

  The permanent magnets 14 are formed in a rectangular plate shape in plan view, and are arranged in a row so that a pair of long sides are aligned in the movement direction as shown in FIG. . Further, each permanent magnet 14 is arranged so that the longitudinal direction is oblique to the moving direction. In this embodiment, the center line (line parallel to the long side) of the permanent magnet 14 is relative to the moving direction. Thus, each permanent magnet 14 is arranged in a state of being inclined counterclockwise by θ1 (= 80 °).

  The movable part 3 includes an armature core 20 and a coil 24 wound around the armature core 20. The armature core 20 has a plurality of plate-like main teeth 22 arranged in a line in the movement direction, and a pair of plate-like auxiliary teeth 23 arranged on both sides (both sides in the movement direction) of the main teeth 22. The coils 24 are wound around the main teeth 22, respectively.

  The teeth 22, 23 are movable so that the lower surface of the permanent magnet 14 side is kept at a predetermined gap from the surface of the permanent magnet 14, and the lower end surfaces of the teeth 22, 23 are rectangular.

  The main teeth 22 are provided at a constant pitch in parallel with each other in a state where the rectangular longitudinal direction of the lower surface is orthogonal to the moving direction. On the other hand, the pair of auxiliary teeth 23 are arranged parallel to each other and obliquely with respect to the main teeth 24. In this embodiment, each auxiliary tooth 23 is provided so as to have an angular difference of 10 ° with respect to the main tooth 22. That is, the auxiliary teeth 23 are provided in a state in which the center line (line segment parallel to the long side) is inclined by θ2 (= 100 °) counterclockwise with respect to the moving direction, in other words, each auxiliary tooth. 23 is provided in an inclined state symmetrical to the permanent magnet 14.

  In the linear motor 1 of the embodiment configured as described above, when a drive current is supplied to the coil 24 from a drive device (not shown), a magnetic flux (a magnetic flux generated by each coil 24) is generated. This magnetic flux and the permanent magnet 14 Due to the interaction, a thrust is generated between the fixed portion 2 and the movable portion 3, and the movable portion 3 moves in the uniaxial direction.

  In this case, since the longitudinal direction of the main teeth 22 and the longitudinal direction of the permanent magnet 14 have a relative angle, the pulsation of thrust by the main teeth 22, that is, the cogging force is alleviated. Further, since the auxiliary teeth 23 are provided on both sides of the main teeth 22 in the armature core 20, the cogging force acting on the main teeth 22 and the cogging force generated by the auxiliary teeth 23 are offset, thereby providing a total cogging force. This reduces the occurrence of uneven thrust. In particular, in the armature core 20 of this embodiment, the auxiliary teeth 23 are provided obliquely with respect to the main teeth 22 as described above. As a result, the cogging force is more effective than this type of conventional linear motor. It becomes possible to reduce it.

  That is, when the movable part 3 moves with respect to the fixed part 2, a cogging force f1 that periodically changes is applied to the main teeth 22, but when the auxiliary teeth 23 are provided and the pitch and the like are maintained, the main teeth 22 are maintained. The cogging force f2 having a phase opposite to that of the cogging force f1 of the teeth 22 acts on the auxiliary teeth 23, thereby canceling the cogging forces f1 and f2 and reducing the total cogging force F. At this time, the cogging force f1 of the main teeth 22 fluctuates periodically under the influence of the permanent magnets 14, but there are not a few other factors such as subtle differences in the pitch between the main teeth 22. Affect. On the other hand, the strength of the cogging force f <b> 2 of the auxiliary teeth fluctuates solely due to the influence of the permanent magnet 14. Therefore, in the conventional configuration in which the main teeth 22 and the auxiliary teeth 23 are arranged in parallel, the cogging force f1 acting on the main teeth 22 fluctuates periodically but slightly complicatedly as shown in FIG. 3, for example. On the other hand, the auxiliary teeth 23 exhibit a fluctuation that is relatively close to a sine wave. Therefore, the fluctuations in the strengths of the cogging forces f1 and f2 are not strictly symmetrical. As a result, the cogging force f1 acting on the main teeth 22 is not sufficiently offset by the cogging force f2 acting on the auxiliary teeth 23, In total, the cogging force (symbol F in the figure) may still remain. On the other hand, according to the configuration in which the auxiliary teeth 23 are disposed obliquely with respect to the main teeth 22 as in the embodiment, the cogging force acting on the auxiliary teeth 23 in the left-right direction is not uniform, and as a result, the auxiliary teeth The cogging force acting on the head 23 also varies in a slightly complicated manner. Therefore, the cogging force f2 of the auxiliary teeth 23 can be changed in a state closer to the cogging force f1 of the main teeth 22 by preparing the inclination angle θ2 of the auxiliary teeth 23, and thereby the cogging acting on the main teeth 22 is achieved. The force and the cogging force by the auxiliary teeth 23 can be more effectively offset. In the present embodiment, as described above, good results have been confirmed by providing the auxiliary teeth 23 obliquely by 10 ° with respect to the main teeth.

  Therefore, according to the linear motor 1 of this embodiment, the total cogging force F can be reduced more effectively, and this has the effect of more reliably preventing the occurrence of thrust unevenness.

  Next, a single-axis robot that is a single-axis actuator according to the present invention incorporating the linear motor 1 will be described with reference to the drawings.

  4 and 5 show an outline of the single-axis robot, FIG. 4 is a plan view, and FIG. 5 is a cross-sectional view (cross-sectional view taken along line VV in FIG. 4).

  As shown in these drawings, the single-axis robot 30 includes a case member 32, a table 33 for mounting various work devices, and a drive mechanism including the linear motor 1 for moving the table 33. ing.

  The case member 32 includes a frame 42 (corresponding to a base member of the present invention), a pair of upper covers 44, and a pair of end surface covers 46, and is formed in a box shape extending in a uniaxial direction. In the present embodiment, for convenience of explanation, the uniaxial direction in which the case member 32 extends will be referred to as the front-rear direction, and the width direction of the case member 32 (the left-right direction in FIG. 5) will be described as the left-right direction.

  The frame 42 is an elongate member made of extruded material such as aluminum alloy or die-cast, for example, in the front-rear direction, and has a bottom wall portion 42a having a predetermined thickness and side wall portions 42b extending upward from the left and right sides of the bottom wall portion 42a. And has a substantially U-shaped cross section opened upward.

  As shown in FIG. 5, the pair of left and right upper covers 44 extends in the vertical direction continuously from the side wall portion 42 b of the case member 32, and extends horizontally from the upper end portion toward the inside of the case member 32. It is a member having an inverted L-shaped cross section and formed symmetrically. These upper covers 44 are elongated in the front-rear direction, and are fixed to the upper ends of the side wall portions 42b of the frame 42 by bolts, as shown in FIG.

  The pair (front and rear pair) of end surface covers 46 are, for example, rectangular block-shaped members, and are fixed to the front and rear end surfaces of the frame 42 with bolts (not shown).

  Then, the upper cover 44 and the end surface cover 46 are assembled to the frame 42, so that the frame 42 and the like cooperate to constitute the case member 32 having a space for accommodating the drive mechanism.

  A table 33 and the drive mechanism are disposed inside the case member 32.

  Specifically, a pair of linear guide devices 50 arranged at predetermined intervals in the left-right direction are provided on the inner bottom surface of the frame 42, the table 33 is fixed to these linear guide devices 50, and the above linear guide device 50 is used as a drive source. The motor 1 is incorporated in the case member 32.

  Each linear guide device 50 includes a rail 51 (guide rail) extending in the front-rear direction and a slider 53 that is slidably mounted on the rail 51 via a rigid ball 52. The rails 51 are arranged in parallel to each other. In this state, the frame 42 is fixed to the bottom wall portion 42a. The table 33 is fixed to the slider 53 in a state of straddling each slider 53 of the linear guide device 50.

  The table 33 is a rectangular member in plan view, and includes a table base 61 fixed to the slider 53 and a table main body 62 stacked and fixed on the table base 61.

  The table main body 62 is disposed above the upper cover 44 and is fixed to the table base 61 through an opening formed between the upper covers 44. On the upper surface of the table main body 62, mounting seats 62a made of ridges extending in the front-rear direction are formed at both left and right ends, and various working members are fixed to the mounting seats 62a with bolts. ing. A belt-like shutter member 47 extending in the front-rear direction and having both front and rear ends fixed to the end surface cover 46 is provided at the upper portion of the table body 62 and between the mounting seats 62a. Thus, the opening formed between the upper covers 44 is covered.

  The linear motor 1 is disposed between the table 33 and the frame 42 (bottom wall portion 42a). Specifically, a groove 43a that is recessed downward and extends in the front-rear direction is formed at the center of the bottom wall 42a of the frame 42 so that the permanent magnets 14 are arranged in the front-rear direction on the inner bottom surface of the groove 43a. The fixing part 2 is fixed. The movable portion 3 is fixed to the lower surface of the table base 61 of the table 33 with a predetermined gap between the movable portion 3 and the fixed portion 2. The coil 24 of the movable portion 3 is connected to a substrate (not shown), and is electrically connected to a power source and a control circuit (not shown) via the substrate and a cable W1 connected to the substrate. Yes. This cable W1 is led out to the side of the case member 32 together with the cable W2 of the sensor control board 83 described later, and is held by a bendable duct member 36 provided on the side of the case member.

  Further, a plate-like magnetic scale 80 on which a scale is magnetically recorded is located on the rail 51 at a position outside the rail 51 of the right linear guide device 50 (on the right side in FIG. 4) in the bottom wall portion 42a of the frame 42. A magnetic sensor 82 such as an MR sensor or a Hall sensor for reading the magnetic scale 80 is provided at the right end of the table 33. That is, the position of the table 33 is detected by reading the magnetic scale 80 by the magnetic sensor 82. The magnetic sensor 82 is disposed immediately on the side of the rail 51 and in a gap S formed between the lower surface of the slider 53 and the bottom wall portion 42a, and the magnetic scale 80 is disposed at the bottom wall portion 42a. Thus, the magnetic sensor 82 is provided at a position facing the magnetic sensor 82.

  The magnetic sensor 82 is integrally assembled with a sensor holder 84 (hereinafter simply referred to as a holder 84) together with a sensor control board 83, and the holder 84 is fixed to the table 33 by being assembled to the table base 61. Has been. Although not shown in detail, the holder 84 is provided with a hollow substrate housing portion, and the sensor control substrate 83 is disposed in the substrate housing portion. The sensor control board 83 is electrically connected to a power source and control circuit (not shown) via a cable W2.

  According to this single-axis robot 30, a driving current is supplied from a driving device (not shown) to the coil 24 of the linear motor 1, whereby a magnetic flux is generated in the movable part 3, and a thrust generated by an interaction between the magnetic flux and the permanent magnet 14 is generated. The table 33 moves in the front-rear direction. Then, the position of the movable portion 3 is detected based on the reading of the magnetic scale 80 by the magnetic sensor 82, and the movement of the table 33 and its speed are controlled by controlling the drive current based on this detection.

  According to the single-axis robot 30 of such an embodiment, since the linear motor 1 as described above is incorporated as a drive source, the cogging force F during operation can be effectively reduced. Therefore, the occurrence of thrust unevenness can be effectively suppressed and the table 33 can be moved more smoothly.

  In this case, when the linear motor 1 is incorporated in the single-axis robot 30, the cogging force acting on the main teeth 22 of the movable part 3 is not limited to the influence of subtle differences in the pitch between the main teeth 22. For example, it may be more complicated to be affected by the influence of the linear guide device 50 or the like, but even in this case, depending on the specific configuration, the cogging force of the auxiliary teeth 23 may vary closer to the cogging force of the main teeth 22. As shown in the figure, by adjusting the inclination angle θ2 of the auxiliary teeth 23, it is possible to effectively cancel out the cogging force, and as a result, the table 33 can be moved smoothly.

  The linear motor 1 and the single-axis robot 30 described above are examples of the embodiment of the present invention, and the specific structure thereof can be appropriately changed without departing from the gist of the present invention.

  For example, in the linear motor 1 of the embodiment, as shown in FIG. 2, each auxiliary tooth 23 is provided in an inclined state symmetrical to the permanent magnet 14, that is, a center line (a line parallel to the long side). The permanent magnets 14 are arranged in a state of being inclined counterclockwise by θ1 (= 80 °) with respect to the moving direction, and each auxiliary tooth 23 has a center line (a line segment parallel to the long side) with respect to the moving direction. The auxiliary teeth 23 may be arranged in the same inclined state as the permanent magnet 14 (that is, θ2 = 80 °). In addition, one auxiliary tooth 23 and the other auxiliary tooth 23 may be inclined in opposite directions. In short, in the present invention, the cogging force acting on the auxiliary teeth 23 is not uniform in the left-right direction by providing the auxiliary teeth 23 obliquely with respect to the main teeth 22, and this is used to act on the auxiliary teeth 23. The variation of the cogging force is made closer to the variation of the cogging force acting on the main teeth 22 so that the cogging force can be more effectively offset. Accordingly, the specific inclination angle and direction of each auxiliary tooth 23 may be appropriately selected so that the cogging force can be more effectively offset.

  In addition, although the case where the lower end surface of each main teeth 22 was a rectangle was shown in the said embodiment, if it is elongate shapes, such as an ellipse, a shape will not be ask | required in particular. Each main tooth 22 is provided so that its longitudinal direction is orthogonal to the moving direction. However, on the condition that the longitudinal direction of the main teeth 22 and the longitudinal direction of the permanent magnet 14 are relatively angled, You may have an angle. Further, the longitudinal direction of the permanent magnet 14 may be orthogonal to the moving direction, and the longitudinal direction of the main teeth 22 may be inclined with respect to the moving direction. Also in this case, since the longitudinal direction of the main teeth 22 and the longitudinal direction of the permanent magnet 14 have a relative angle, the pulsation of thrust by the main teeth 22, that is, the cogging force is alleviated.

  On the other hand, the cogging force can be further reduced by making the longitudinal direction of the auxiliary teeth 23 have an angle with the longitudinal direction of the main teeth 22. In order to provide this angle, the longitudinal direction of the auxiliary teeth 23 and the longitudinal direction of the permanent magnet 14 coincide with each other or only a small relative angle is provided, and the longitudinal direction of the auxiliary teeth 23 is the main teeth 22. In some cases, an angle may be given not only to the longitudinal direction of the permanent magnet 14 but also to the longitudinal direction of the permanent magnet 14. For example, in a configuration in which the longitudinal direction of the permanent magnet 14 is orthogonal to the moving direction and the longitudinal direction of the main teeth 22 is oblique to the moving direction, the longitudinal direction of the auxiliary teeth 23 is orthogonal to the moving direction. Alternatively, the cogging force can be reduced by making the longitudinal direction of the auxiliary teeth 23 tilt in the direction opposite to the longitudinal direction of the main teeth 22 with respect to the moving direction.

It is a side view showing the outline of the linear motor concerning the present invention. It is sectional drawing (II-II sectional drawing of FIG. 1) which shows the outline of a linear motor. It is a figure which shows the fluctuation | variation of the cogging force of the main teeth, the cogging force of the auxiliary teeth, and the total cogging force. It is a top view which shows the outline of the single axis | shaft robot (uniaxial actuator incorporating the linear motor which concerns on this invention) concerning this invention. It is sectional drawing (VV sectional drawing of FIG. 4) which shows the outline of a single axis robot.

Explanation of symbols

1 linear motor 2 stator 3 mover 14 permanent magnet 20 armature core 22 main teeth 23 mover 24 coil 30 single-axis robot 32 case member 33 table 50 linear guide device

Claims (6)

A plurality of magnets arranged in a uniaxial direction so as to alternately have different polarities, and an armature disposed opposite to the magnets with a predetermined gap therebetween, wherein the field portions and the armatures are In a linear motor configured to move relative to one axis,
The armature includes a plurality of plate-like main teeth arranged in the uniaxial direction in parallel with each other and a pair of plate-like auxiliary teeth arranged on both sides of the arrangement direction of the main teeth, A coil wound around the main teeth,
Each of the auxiliary teeth is disposed obliquely with respect to the main teeth. The linear motor according to claim 1,
Both the magnet and each tooth are formed in an elongated shape,
Each magnet of the field part is arranged in a state where the longitudinal direction is inclined with respect to the uniaxial direction,
Each of the main teeth is arranged in a state where the longitudinal direction is orthogonal to the uniaxial direction,
Each of the auxiliary teeth is arranged in parallel with each other and in a state where the longitudinal direction is inclined in the direction opposite to the magnet with respect to the uniaxial direction. The linear motor according to claim 1,
Both the magnet and each tooth are formed in an elongated shape,
Each magnet of the field part is arranged in a state where the longitudinal direction is inclined with respect to the uniaxial direction,
Each of the main teeth is arranged in a state where the longitudinal direction is orthogonal to the uniaxial direction,
Each of the auxiliary teeth is arranged in parallel with each other and in a state where the longitudinal direction is inclined in the same direction as the magnet with respect to the uniaxial direction. The linear motor according to claim 1,
Both the magnet and each tooth are formed in an elongated shape,
Each magnet of the field part is arranged in a state where the longitudinal direction is orthogonal to the uniaxial direction,
Each of the main teeth is arranged in a state where the longitudinal direction is oblique with respect to the uniaxial direction,
Each of the auxiliary teeth is arranged in parallel to each other and in a state where the longitudinal direction is orthogonal to the uniaxial direction. The linear motor according to claim 1,
Both the magnet and each tooth are formed in an elongated shape,
Each magnet of the field part is arranged in a state where the longitudinal direction is orthogonal to the uniaxial direction,
Each of the main teeth is arranged in a state where the longitudinal direction is oblique with respect to the uniaxial direction,
Each of the auxiliary teeth is arranged in parallel with each other and in a state where the longitudinal direction is inclined in the direction opposite to the main teeth with respect to the uniaxial direction. A base member, a table supported movably in one axial direction with respect to the base member, a field portion fixed to the base member, and an armature fixed to the base portion so as to face the field portion In a single-axis actuator equipped with a linear motor,
A single-axis actuator comprising the linear motor according to any one of claims 1 to 5 as the linear motor.

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