JP2008003017A - Piezo-electric single crystal vibrator and piezoelectric vibrating gyroscope - Google Patents

Piezo-electric single crystal vibrator and piezoelectric vibrating gyroscope Download PDF

Info

Publication number
JP2008003017A
JP2008003017A JP2006174740A JP2006174740A JP2008003017A JP 2008003017 A JP2008003017 A JP 2008003017A JP 2006174740 A JP2006174740 A JP 2006174740A JP 2006174740 A JP2006174740 A JP 2006174740A JP 2008003017 A JP2008003017 A JP 2008003017A
Authority
JP
Japan
Prior art keywords
single crystal
piezoelectric single
crystal vibrator
electrode
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006174740A
Other languages
Japanese (ja)
Inventor
Koichi Okamoto
幸一 岡本
Akiko Oshima
亜希子 大島
Takeshi Mizuno
豪 水野
Yoshiaki Ikeda
義秋 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
NEC Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Tokin Corp filed Critical NEC Tokin Corp
Priority to JP2006174740A priority Critical patent/JP2008003017A/en
Publication of JP2008003017A publication Critical patent/JP2008003017A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Gyroscopes (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small and low-priced piezo-electric single crystal vibrator and a piezoelectric vibrating gyroscope configured with the piezo-electric single crystal vibrator, while ensuring implementation reliability of the piezo-electric single crystal vibrator. <P>SOLUTION: In the vicinity of the a reference potential electrode 19a on the outer edge section of the application section of a conductive adhesive of the piezo-electric single crystal vibrator 1, by an insulting film 11 formed so as to cover drive electrodes 15a, 15b and detection electrodes 17a, 18a, a short circuit failure with other electrode can be prevented and a yield can be improved while improving reliability. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、圧電単結晶材料を用いた圧電単結晶振動子およびそれを用いて構成された圧電振動ジャイロに関するもので、特に圧電単結晶振動子の構造および実装方法に関するものである。   The present invention relates to a piezoelectric single crystal vibrator using a piezoelectric single crystal material and a piezoelectric vibration gyro configured using the piezoelectric single crystal vibrator, and more particularly to a structure and mounting method of a piezoelectric single crystal vibrator.

圧電振動子は、センサ、発振器、表面弾性波フィルタ、超音波モータ、音響素子、トランスなど、幅広い分野に用いられている。圧電振動子に用いられる圧電材料の中でも、特に圧電単結晶材料は、一般に機械的品質係数（以下、Ｑｍと表す）が高く、温度変化に対する特性変化が小さく、材料が均一で信頼性が高く、材料の量産性が優れている等の特徴があり、特にセンサ、発振器、表面弾性波フィルタなど、電子部品向けの振動子としてよく用いられている。   Piezoelectric vibrators are used in a wide range of fields such as sensors, oscillators, surface acoustic wave filters, ultrasonic motors, acoustic elements, transformers, and the like. Among piezoelectric materials used for piezoelectric vibrators, in particular, piezoelectric single crystal materials generally have a high mechanical quality factor (hereinafter referred to as Qm), a small characteristic change with respect to a temperature change, a uniform material and high reliability, It is characterized by excellent mass productivity of materials and is often used as a vibrator for electronic parts such as sensors, oscillators, surface acoustic wave filters, and the like.

これらの圧電単結晶材料を用いた圧電振動子を大量生産する場合の一例として、以下のような製法が用いられる。まず、圧電単結晶のウエハーに電極となる金属薄膜をスパッタや真空蒸着等で成膜し、いわゆるフォトリソグラフでレジストをパターニングした後、金属薄膜をエッチングして電極パターンを形成する。その後、再びフォトリソグラフでレジストをパターニングして、圧電単結晶をエッチング処理したり、またはサンドブラストで研削したりして所望の振動子形状に加工し、最後にダイシングソーで振動子を個片に切り分けることで、１枚のウエハーから多数の圧電単結晶振動子を得ている。   As an example of mass production of piezoelectric vibrators using these piezoelectric single crystal materials, the following manufacturing method is used. First, a metal thin film serving as an electrode is formed on a piezoelectric single crystal wafer by sputtering, vacuum deposition, or the like, a resist is patterned by so-called photolithography, and then the metal thin film is etched to form an electrode pattern. After that, the resist is patterned again by photolithography, and the piezoelectric single crystal is etched or sandblasted to be processed into a desired vibrator shape. Finally, the vibrator is cut into individual pieces by a dicing saw. Thus, a large number of piezoelectric single crystal vibrators are obtained from one wafer.

携帯電話、携帯オーディオ、デジタルカメラなどの携帯機器の市場が益々大きくなっていく中で、それに使用される電子部品の小型化、高機能化、低コスト化が強く要求されている。圧電単結晶振動子を用いた電子部品の場合、圧電単結晶振動子の振動を阻害することなく圧電単結晶振動子を回路基板上に固定し、かつ所望の機能を働かせるために圧電単結晶振動子と回路基板を電気的に接続する実装手段が必要となる。これらの圧電単結晶振動子を信号処理回路が配線された回路基板に実装する方法として、ワイヤーボンディング法、ＧＧＩ法（Gold to Gold Interconnection）、あるいは導電接着剤を用いた方法で実装配線し、最後に封止して製品としている。   As the market for portable devices such as mobile phones, portable audios, and digital cameras grows larger, there is a strong demand for downsizing, higher functionality, and lower costs of electronic components used in the market. In the case of electronic parts using a piezoelectric single crystal vibrator, the piezoelectric single crystal vibration is used to fix the piezoelectric single crystal vibrator on the circuit board without hindering the vibration of the piezoelectric single crystal vibrator and to perform a desired function. A mounting means for electrically connecting the child and the circuit board is required. As a method of mounting these piezoelectric single crystal vibrators on a circuit board wired with a signal processing circuit, the wiring bonding method, the GGI method (Gold to Gold Interconnection), or a method using a conductive adhesive is used. The product is sealed.

特許文献１には、ワイヤーボンディング法により接続された圧電デバイスの例が開示されている。   Patent Document 1 discloses an example of a piezoelectric device connected by a wire bonding method.

また、特許文献２には、電極とＩＣチップとをＧＧＩ法により電気的に接続した磁気センサの例が開示されている。   Patent Document 2 discloses an example of a magnetic sensor in which an electrode and an IC chip are electrically connected by a GGI method.

また、特許文献３には、電極と圧電基板とを導電接着剤を用いて接着した表面弾性波フィルタの例が開示されている。   Patent Document 3 discloses an example of a surface acoustic wave filter in which an electrode and a piezoelectric substrate are bonded using a conductive adhesive.

特開２００５−０９４４６１号公報JP 2005-094461 A 特開２００５−００３４７７号公報JP 2005-003477 A 特開平１１−２５１８６７号公報Japanese Patent Laid-Open No. 11-251867

特許文献１に開示されているワイヤーボンディング法を使用する場合、圧電単結晶振動子を回路基板に接着剤で固定し、圧電単結晶振動子の電極と回路基板の電極とにワイヤーを引き回して電気的な接続を取る際、ワイヤーを引き回すための空間が必要となり、また圧電単結晶振動子の電極と回路基板の電極との距離がある程度必要といった問題があり、小型化に不利であった。また、実装が接着固定、配線と２段階の工程となるので製造コストが高くなってしまうという問題もあった。   When the wire bonding method disclosed in Patent Document 1 is used, the piezoelectric single crystal vibrator is fixed to the circuit board with an adhesive, and the wire is routed between the electrode of the piezoelectric single crystal vibrator and the electrode of the circuit board. In order to make a simple connection, there is a problem that a space for routing the wire is required, and there is a problem that a certain distance is required between the electrode of the piezoelectric single crystal vibrator and the electrode of the circuit board. In addition, since the mounting is a two-step process including adhesive fixing and wiring, there is also a problem that the manufacturing cost increases.

特許文献２に開示しているＧＧＩ法を使用する場合、固定と電気的接続を同時にできるが、金（Ａｕ）を使用するために材料コストの高騰、さらにＧＧＩ法だけでは接続強度が不足するため、一般的に補強のためのシリコーン等によるアンダーフィル材が必要となり、そのために材料コスト、製造コストが高くなってしまうという問題もあった。   When the GGI method disclosed in Patent Document 2 is used, fixing and electrical connection can be performed at the same time. However, since gold (Au) is used, the material cost increases, and the connection strength is insufficient only by the GGI method. In general, an underfill material made of silicone or the like for reinforcement is required, which causes a problem that the material cost and the manufacturing cost increase.

また、特許文献３に開示している導電接着剤を用いた場合、固定と電気的接続が同時にできるので製造コストを抑えることができ、また金（Ａｕ）よりも価格的に安い銀（Ａｇ）を一般的に用いるので材料コストも抑えることができ、接着強度を確保しながら接着剤塗布面積を小さくすれば製品の小型化にも対応が可能となる。このように、ワイヤボンディング法やＧＧＩ法と比較して、導電接着剤を使用する方法はあらゆる面で有利な実装方法といえる。   In addition, when the conductive adhesive disclosed in Patent Document 3 is used, fixing and electrical connection can be performed at the same time, so that the manufacturing cost can be reduced, and silver (Ag), which is cheaper than gold (Au). Is generally used, the material cost can be reduced, and if the adhesive application area is reduced while securing the adhesive strength, it is possible to cope with downsizing of the product. Thus, the method using a conductive adhesive can be said to be an advantageous mounting method in all aspects as compared with the wire bonding method and the GGI method.

しかしながら、圧電単結晶振動子の小型化に伴い、導電接着剤の塗布部に電極配線が密集する部分ができてしまい、その際、導電接着剤の塗布する電極と近接する異なる電位をもつ別の電極配線とが、導電接着剤の塗布のしかたによっては短絡するおそれがあり、実装工程の歩留を低下させる問題があった   However, with the miniaturization of the piezoelectric single crystal vibrator, a portion where the electrode wiring is densely formed is formed in the application portion of the conductive adhesive, and in this case, another electrode having a different potential close to the electrode to which the conductive adhesive is applied is formed. Depending on how the conductive adhesive is applied, the electrode wiring may be short-circuited, causing a problem of reducing the yield of the mounting process.

本発明は、従来の課題を解決すべくなされたもので、圧電単結晶振動子の実装信頼性を確保しつつ、小型、低コストな圧電単結晶振動子およびこの圧電単結晶振動子を用いて構成された圧電振動ジャイロを提供することにある。   The present invention has been made in order to solve the conventional problems. A small-sized and low-cost piezoelectric single crystal vibrator and the piezoelectric single crystal vibrator are used while ensuring mounting reliability of the piezoelectric single crystal vibrator. An object of the present invention is to provide a configured piezoelectric vibration gyro.

本発明は、前記課題の解決のため、圧電単結晶材料から成る圧電単結晶板の表裏両面の主面上に複数の電極が形成されており、前記電極の少なくとも１つは導電接着剤によって、回路基板と電気的に導通し、かつ機械的に固定されてなる圧電単結晶振動子であって、前記導電接着剤を塗布する電極とは、異なる他の前記電極の少なくとも一部が絶縁膜で覆われていることを特徴とする圧電単結晶振動子である。なお、絶縁膜を施すのは、前もって導電接着剤を塗布する電極の近傍にある電極のみであってもよい。また、導電接着剤を塗布する電極と絶縁膜を施す電極は、少なくとも異なる電位を有している。   In the present invention, in order to solve the above problems, a plurality of electrodes are formed on the main surfaces of the front and back surfaces of a piezoelectric single crystal plate made of a piezoelectric single crystal material, and at least one of the electrodes is formed by a conductive adhesive. A piezoelectric single crystal vibrator electrically connected to a circuit board and mechanically fixed, wherein at least a part of the other electrode different from the electrode to which the conductive adhesive is applied is an insulating film. A piezoelectric single crystal vibrator characterized by being covered. Note that the insulating film may be applied only to the electrode in the vicinity of the electrode to which the conductive adhesive is applied in advance. In addition, the electrode to which the conductive adhesive is applied and the electrode to which the insulating film is applied have at least different potentials.

また、絶縁膜は、ＳｉＯ2、Ｓｉ3Ｎ4、ＴｉＯ2、Ａｌ2Ｏ3、ポリイミド、フォトレジストから選ばれる少なくとも１種からなることを特徴とする圧電単結晶振動子である。 The insulating film is a piezoelectric single crystal vibrator characterized by comprising at least one selected from SiO 2 , Si 3 N 4 , TiO 2 , Al 2 O 3 , polyimide, and photoresist.

さらに、圧電単結晶振動子を用いて構成されたことを特徴とする圧電振動ジャイロである。   Further, the piezoelectric vibration gyro is configured by using a piezoelectric single crystal vibrator.

従って、本発明によれば、圧電単結晶振動子の実装信頼性を確保しつつ、小型、低コストな圧電単結晶振動子およびこの圧電単結晶振動子を用いて構成された圧電振動ジャイロを得ることができる。   Therefore, according to the present invention, a compact and low-cost piezoelectric single crystal vibrator and a piezoelectric vibration gyro configured using the piezoelectric single crystal vibrator are obtained while ensuring mounting reliability of the piezoelectric single crystal vibrator. be able to.

図１は、本発明の実施の形態に係わる圧電単結晶振動子の導電接着剤塗布部（基準電位電極１９ａの近傍）の拡大図である。本発明の実施の形態を、図面を参照しながら説明する。圧電単結晶振動子１の外縁部にある基準電位電極１９ａの近傍には絶縁膜１１が駆動電極１５ａ、１５ｂ、検出電極１７ａ、１８ａを覆うように形成され、導電接着剤１２が基準電位電極１９ａを覆うように塗布されている。   FIG. 1 is an enlarged view of a conductive adhesive application portion (near the reference potential electrode 19a) of the piezoelectric single crystal vibrator according to the embodiment of the present invention. Embodiments of the present invention will be described with reference to the drawings. An insulating film 11 is formed in the vicinity of the reference potential electrode 19a on the outer edge of the piezoelectric single crystal vibrator 1 so as to cover the drive electrodes 15a and 15b and the detection electrodes 17a and 18a, and the conductive adhesive 12 is formed on the reference potential electrode 19a. It is applied to cover.

絶縁膜１１によって駆動電極１５ａ、１５ｂ、検出電極１７ａ、１８ａが覆われているので、もし塗布工程のばらつきによって塗布位置がずれ、検出電極１８ａに導電接着剤１２を塗布されたとしても、検出電極１８ａは絶縁膜１１に覆われており、電位の異なるこれらの電極同士が短絡することがない。このように、絶縁膜の形成により、導電接着剤塗布工程において、他電極との短絡不良の発生を防ぐことができ、信頼性を高めつつ、歩留を向上させることができる。   Since the drive electrodes 15a and 15b and the detection electrodes 17a and 18a are covered with the insulating film 11, even if the application position is shifted due to variations in the application process and the conductive adhesive 12 is applied to the detection electrode 18a, the detection electrode 18a is covered with the insulating film 11, and these electrodes having different potentials are not short-circuited. As described above, the formation of the insulating film can prevent the occurrence of short-circuit failure with other electrodes in the conductive adhesive application step, and can improve the yield while improving the reliability.

また、絶縁膜１１の材質は、ＳｉＯ2、Ｓｉ3Ｎ4、ＴｉＯ2、Ａｌ2Ｏ3、ポリイミド、フォトレジストのいずれかであることが好適であるが、これらに限らず、絶縁性のある材質であれば使用可能である。 The material of the insulating film 11 is preferably any of SiO 2 , Si 3 N 4 , TiO 2 , Al 2 O 3 , polyimide, and photoresist, but is not limited thereto and has an insulating property. Any material can be used.

図２は、本発明の実施の形態に係わる圧電単結晶振動子の外形を示した上面図である。図３は、本発明の実施の形態に係わる圧電単結晶振動子の上面の電極配置図である。図４は、本発明の実施の形態に係わる圧電単結晶振動子の下面の電極配置図である。本発明の実施の形態を、図面を参照しながら説明する。この圧電単結晶振動子は、２軸の角速度が検出可能な圧電振動ジャイロとなっている。以下、説明の便宜上、図２、図３、図４に示したように、圧電単結晶振動子の厚み方向をＸ軸、図面上の縦方向をＹ軸、図面上の横方向をＺ軸とする。   FIG. 2 is a top view showing the outer shape of the piezoelectric single crystal resonator according to the embodiment of the present invention. FIG. 3 is an electrode arrangement diagram on the upper surface of the piezoelectric single crystal resonator according to the embodiment of the present invention. FIG. 4 is an electrode arrangement diagram of the lower surface of the piezoelectric single crystal resonator according to the embodiment of the present invention. Embodiments of the present invention will be described with reference to the drawings. This piezoelectric single crystal vibrator is a piezoelectric vibration gyro capable of detecting a biaxial angular velocity. Hereinafter, for convenience of explanation, as shown in FIGS. 2, 3, and 4, the thickness direction of the piezoelectric single crystal vibrator is the X axis, the vertical direction in the drawing is the Y axis, and the horizontal direction in the drawing is the Z axis. To do.

圧電単結晶振動子１は矩形状板に貫通加工をして、矩形状板の一部を打ち抜くことにより、内部に振動部である４つの付加質量部１３ａ、１３ｂ、１３ｃ、１３ｄを保持する構造体が一体物として形成されている。また、圧電単結晶振動子１は圧電振動ジャイロとして機能させるための電極、および振動効率および検出効率を向上させるための表裏両面に電極が形成されている。図３の上面の電極配置図より、上面には駆動電極１４ａ、１４ｂ、１５ａ、１５ｂ、検出電極１７ａ、１７ｂ、１８ａ、１８ｂ、基準電位電極１９ａ、１９ｂが形成されている。図４の下面の電極配置図より、下面には駆動電極１４ｃ、１４ｄ、１６ａ、１６ｂ、検出電極１７ｃ、１７ｄ、１８ｃ、１８ｄ、基準電位電極１９ｃ、１９ｄが形成されている。各電極は圧電単結晶振動子１の外縁部まで引き回して配線されている。   The piezoelectric single crystal vibrator 1 has a structure in which four additional mass portions 13a, 13b, 13c, and 13d that are vibrating portions are held inside by penetrating a rectangular plate and punching a part of the rectangular plate. The body is formed as one piece. In addition, the piezoelectric single crystal vibrator 1 is provided with electrodes for functioning as a piezoelectric vibration gyro, and electrodes on both the front and back surfaces for improving vibration efficiency and detection efficiency. From the electrode arrangement diagram on the upper surface of FIG. 3, the drive electrodes 14a, 14b, 15a and 15b, the detection electrodes 17a, 17b, 18a and 18b, and the reference potential electrodes 19a and 19b are formed on the upper surface. From the electrode arrangement diagram on the lower surface of FIG. 4, drive electrodes 14c, 14d, 16a, 16b, detection electrodes 17c, 17d, 18c, 18d, and reference potential electrodes 19c, 19d are formed on the lower surface. Each electrode is wired to the outer edge of the piezoelectric single crystal vibrator 1.

また、図１と同様、図３において、圧電単結晶振動子１の外縁部にある基準電位電極１９ｂの近傍には駆動電極１４ａ、１４ｂ、検出電極１７ｂ、１８ｂを覆うように絶縁膜１１が形成され、導電接着剤１２が基準電位電極１９ｂを覆うように塗布されている（図示せず）。また、図４において、基準電位電極１９ｃの近傍には駆動電極１４ｃ、１４ｄ、検出電極１７ｃ、１８ｃを覆うように絶縁膜１１が形成され、導電接着剤１２が基準電位電極１９ｃを覆うように塗布されている。基準電位電極１９ｄの近傍には駆動電極１６ａ、１６ｂ、検出電極１７ｄ、１８ｄを覆うように絶縁膜１１が形成され、導電接着剤１２が基準電位電極１９ｄを覆うように塗布されている（図示せず）。   As in FIG. 1, in FIG. 3, an insulating film 11 is formed in the vicinity of the reference potential electrode 19b at the outer edge of the piezoelectric single crystal vibrator 1 so as to cover the drive electrodes 14a and 14b and the detection electrodes 17b and 18b. The conductive adhesive 12 is applied so as to cover the reference potential electrode 19b (not shown). In FIG. 4, an insulating film 11 is formed in the vicinity of the reference potential electrode 19c so as to cover the drive electrodes 14c and 14d and the detection electrodes 17c and 18c, and the conductive adhesive 12 is applied so as to cover the reference potential electrode 19c. Has been. An insulating film 11 is formed in the vicinity of the reference potential electrode 19d so as to cover the drive electrodes 16a and 16b and the detection electrodes 17d and 18d, and a conductive adhesive 12 is applied so as to cover the reference potential electrode 19d (not shown). )

この圧電単結晶振動子の製造プロセスの一例を説明する。圧電単結晶材料としては、水晶、ニオブ酸リチウム、タンタル酸リチウム、ランガサイト、酸化亜鉛のいずれかが用いられる。これらのウエハーに電極としてＣｒを下地としてＡｕをスパッタもしくは真空蒸着で成膜する。次に、フォトリソグラフによりレジストを所望のパターンに形成し、エッチングによりＡｕおよびＣｒを除去し、さらにレジストを除去して、電極を形成する。反対面も同様な工程により、表裏両面に電極が形成される。次にフォトリソグラフによりレジストを所望のパターンに形成し、エッチングもしくはサンドブラストによって貫通加工を行い、レジストを除去して圧電単結晶振動子が得られる。   An example of the manufacturing process of this piezoelectric single crystal vibrator will be described. As the piezoelectric single crystal material, quartz, lithium niobate, lithium tantalate, langasite, or zinc oxide is used. A film is formed on these wafers by sputtering or vacuum deposition with Au as an electrode and Cr as a base. Next, a resist is formed into a desired pattern by photolithography, Au and Cr are removed by etching, and the resist is further removed to form electrodes. On the opposite side, electrodes are formed on both the front and back sides by the same process. Next, a resist is formed into a desired pattern by photolithography, and through processing is performed by etching or sandblasting, and the resist is removed to obtain a piezoelectric single crystal vibrator.

こうして得られた圧電単結晶振動子１は、回路基板（図示せず）に導電接着剤１２で固定かつ電気的接続をとって実装される。この時、駆動電極１４ａと１４ｃ、１４ｂと１４ｄ、検出電極１７ａと１７ｃ、１７ｂと１７ｄ、１８ａと１８ｃ、１８ｂと１８ｄ、基準電位電極１９ａと１９ｃ、１９ｂと１９ｄは各々導電接着剤１２で電気的に接続される。   The piezoelectric single crystal vibrator 1 thus obtained is mounted on a circuit board (not shown) with a conductive adhesive 12 and electrically connected. At this time, the drive electrodes 14a and 14c, 14b and 14d, the detection electrodes 17a and 17c, 17b and 17d, 18a and 18c, 18b and 18d, the reference potential electrodes 19a and 19c, and 19b and 19d are electrically connected by the conductive adhesive 12, respectively. Connected to.

上面において、駆動電極１４ａおよび１４ｂと駆動電極１５ａおよび１５ｂとの間に交流電圧を印加し、下面では、前記駆動電極とは逆位相で、駆動電極１４ｃおよび１４ｄと駆動電極１６ａおよび１６ｂとの間に交流電圧を印加する。その結果、付加質量部１３ａおよび１３ｃがＸ軸方向に振動し、それとは逆位相に１３ｂおよび１３ｄがＸ軸方向に振動する。この振動状態でＹ軸まわりに回転角速度が印加されるとコリオリ力により、Ｚ軸方向の振動が励振されるので、検出電極１７ａおよび１７ｃと１７ｂおよび１７ｄとから電気的に検出することができる。Ｚ軸まわりに回転角速度が印加されるとＹ軸方向の振動が励振されるので、検出電極１８ａおよび１８ｃと１８ｂおよび１８ｄとから電気的に検出することができる。これらの検出信号を信号処理して出力することで、２軸の角速度が検出できる圧電振動ジャイロを得ることができる。   On the upper surface, an AC voltage is applied between the drive electrodes 14a and 14b and the drive electrodes 15a and 15b, and on the lower surface, the drive electrodes 14c and 14d and the drive electrodes 16a and 16b are in opposite phases to each other. AC voltage is applied to As a result, the additional mass portions 13a and 13c vibrate in the X-axis direction, and 13b and 13d vibrate in the X-axis direction in the opposite phase. When a rotational angular velocity is applied around the Y-axis in this vibration state, vibration in the Z-axis direction is excited by the Coriolis force, so that it can be electrically detected from the detection electrodes 17a and 17c and 17b and 17d. When a rotational angular velocity is applied around the Z axis, vibration in the Y axis direction is excited, so that it can be electrically detected from the detection electrodes 18a and 18c and 18b and 18d. By processing these detection signals and outputting them, a piezoelectric vibration gyro capable of detecting a biaxial angular velocity can be obtained.

次に、実施例を挙げ、本発明の圧電単結晶振動子および圧電振動ジャイロについて、さらに詳しく説明する。   Next, with reference to examples, the piezoelectric single crystal vibrator and the piezoelectric vibration gyro of the present invention will be described in more detail.

圧電単結晶材料としてニオブ酸リチウムを用い、外形寸法が４ｍｍ×４ｍｍ×厚み０．２５ｍｍ、各付加質量部大きさを０．７５ｍｍ×１ｍｍ、付加質量部に形成されたスルーホールは０．１ｍｍ×０．１ｍｍの大きさとなる図２で示した形状の圧電単結晶振動子を作製し、絶縁膜にはポリイミドを使い厚み４μｍの絶縁膜を形成した。   Lithium niobate is used as the piezoelectric single crystal material, the outer dimensions are 4 mm × 4 mm × thickness 0.25 mm, each additional mass part size is 0.75 mm × 1 mm, and the through hole formed in the additional mass part is 0.1 mm × A piezoelectric single crystal resonator having a size of 0.1 mm and having the shape shown in FIG. 2 was produced, and an insulating film having a thickness of 4 μm was formed using polyimide as the insulating film.

この圧電単結晶振動子に１．５Ｖｐｐ（ピークトゥーピーク）で駆動した場合、Ｘ軸方向の振動の共振周波数はおよそ２０ｋＨｚとなり、圧電振動ジャイロとしての感度は、信号処理回路の増幅率が２００倍の時でＹ軸回りの回転角速度およびＺ軸回りの回転角速度共におよそ０．３ｍＶ／゜／秒が得られ、１つの圧電単結晶振動子で、２軸の角速度が検出可能となった。   When this piezoelectric single crystal vibrator is driven at 1.5 Vpp (peak to peak), the resonance frequency of vibration in the X-axis direction is about 20 kHz, and the sensitivity as a piezoelectric vibration gyro is 200 times the amplification factor of the signal processing circuit. At this time, a rotational angular velocity about the Y axis and a rotational angular velocity about the Z axis were both about 0.3 mV / ° / second, and a single piezoelectric single crystal vibrator could detect the biaxial angular velocity.

本発明の実施の形態に係わる圧電単結晶振動子の導電接着剤塗布部（基準電位電極の近傍）の拡大図。FIG. 4 is an enlarged view of a conductive adhesive application portion (near the reference potential electrode) of the piezoelectric single crystal vibrator according to the embodiment of the present invention. 本発明の実施の形態に係わる圧電単結晶振動子の外形を示した上面図。The top view which showed the external shape of the piezoelectric single crystal vibrator concerning embodiment of this invention. 本発明の実施の形態に係わる圧電単結晶振動子の上面の電極配置図。The electrode arrangement | positioning figure of the upper surface of the piezoelectric single crystal vibrator concerning embodiment of this invention. 本発明の実施の形態に係わる圧電単結晶振動子の下面の電極配置図。The electrode arrangement | positioning figure of the lower surface of the piezoelectric single crystal vibrator concerning embodiment of this invention.

符号の説明Explanation of symbols

１ 圧電単結晶振動子
１１ 絶縁膜
１２ 導電接着剤
１３ａ〜１３ｄ 付加質量部
１４ａ〜１４ｄ 駆動電極
１５ａ、１５ｂ 駆動電極
１６ａ、１６ｂ 駆動電極
１７ａ〜１７ｄ 検出電極
１８ａ〜１８ｄ 検出電極
１９ａ〜１９ｄ 基準電位電極 DESCRIPTION OF SYMBOLS 1 Piezoelectric single crystal vibrator 11 Insulating film 12 Conductive adhesives 13a-13d Additional mass parts 14a-14d Drive electrodes 15a, 15b Drive electrodes 16a, 16b Drive electrodes 17a-17d Detection electrodes 18a-18d Detection electrodes 19a-19d Reference potential electrodes

Claims (3)

圧電単結晶材料から成る圧電単結晶板の表裏両面の主面上に複数の電極が形成されており、前記電極の少なくとも１つは導電接着剤によって、回路基板と電気的に導通し、かつ機械的に固定されてなる圧電単結晶振動子であって、前記導電接着剤を塗布する前記電極とは、異なる他の前記電極の少なくとも一部が絶縁膜で覆われていることを特徴とする圧電単結晶振動子。   A plurality of electrodes are formed on the front and back main surfaces of a piezoelectric single crystal plate made of a piezoelectric single crystal material, and at least one of the electrodes is electrically connected to a circuit board by a conductive adhesive and is mechanical A piezoelectric single crystal vibrator fixed in a fixed manner, wherein at least a part of another electrode different from the electrode to which the conductive adhesive is applied is covered with an insulating film. Single crystal oscillator. 前記絶縁膜は、ＳｉＯ2、Ｓｉ3Ｎ4、ＴｉＯ2、Ａｌ2Ｏ3、ポリイミド、フォトレジストから選ばれる少なくとも１種からなることを特徴とする請求項１に記載の圧電単結晶振動子。 2. The piezoelectric single crystal resonator according to claim 1, wherein the insulating film is made of at least one selected from SiO 2 , Si 3 N 4 , TiO 2 , Al 2 O 3 , polyimide, and a photoresist. 前記請求項１または２に記載の圧電単結晶振動子を用いて構成されたことを特徴とする圧電振動ジャイロ。   A piezoelectric vibration gyro comprising the piezoelectric single crystal resonator according to claim 1 or 2.
JP2006174740A 2006-06-26 2006-06-26 Piezo-electric single crystal vibrator and piezoelectric vibrating gyroscope Pending JP2008003017A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006174740A JP2008003017A (en) 2006-06-26 2006-06-26 Piezo-electric single crystal vibrator and piezoelectric vibrating gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006174740A JP2008003017A (en) 2006-06-26 2006-06-26 Piezo-electric single crystal vibrator and piezoelectric vibrating gyroscope

Publications (1)

Publication Number Publication Date
JP2008003017A true JP2008003017A (en) 2008-01-10

Family

ID=39007520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006174740A Pending JP2008003017A (en) 2006-06-26 2006-06-26 Piezo-electric single crystal vibrator and piezoelectric vibrating gyroscope

Country Status (1)

Country Link
JP (1) JP2008003017A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100791167B1 (en) * 2006-01-09 2008-01-02 엘에스전선 주식회사 roll type anisotropic conductive film
KR100832229B1 (en) * 2005-12-27 2008-05-23 엘지디스플레이 주식회사 Organic electroluminescent device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11325911A (en) * 1998-05-18 1999-11-26 Kinseki Ltd Angular speed sensor
JP2001050751A (en) * 1999-08-05 2001-02-23 Matsushita Electric Ind Co Ltd Angular velocity sensor
JP2001144581A (en) * 1998-07-24 2001-05-25 Seiko Epson Corp Piezoelectric vibrator and its manufacturing method
JP2002261577A (en) * 2001-03-02 2002-09-13 Seiko Epson Corp Vibrating reed, vibrator, oscillator and portable telephone
JP2004364019A (en) * 2003-06-05 2004-12-24 Seiko Epson Corp Piezoelectric vibration chip, piezoelectric vibrator, piezoelectric oscillator, gyroscope sensor, electronic apparatus, and manufacturing method
JP2005026573A (en) * 2003-07-04 2005-01-27 Murata Mfg Co Ltd Manufacturing method of module with built-in component
JP2006088630A (en) * 2004-09-27 2006-04-06 Brother Ind Ltd Connection structure of flexible wiring board and connection method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11325911A (en) * 1998-05-18 1999-11-26 Kinseki Ltd Angular speed sensor
JP2001144581A (en) * 1998-07-24 2001-05-25 Seiko Epson Corp Piezoelectric vibrator and its manufacturing method
JP2001050751A (en) * 1999-08-05 2001-02-23 Matsushita Electric Ind Co Ltd Angular velocity sensor
JP2002261577A (en) * 2001-03-02 2002-09-13 Seiko Epson Corp Vibrating reed, vibrator, oscillator and portable telephone
JP2004364019A (en) * 2003-06-05 2004-12-24 Seiko Epson Corp Piezoelectric vibration chip, piezoelectric vibrator, piezoelectric oscillator, gyroscope sensor, electronic apparatus, and manufacturing method
JP2005026573A (en) * 2003-07-04 2005-01-27 Murata Mfg Co Ltd Manufacturing method of module with built-in component
JP2006088630A (en) * 2004-09-27 2006-04-06 Brother Ind Ltd Connection structure of flexible wiring board and connection method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100832229B1 (en) * 2005-12-27 2008-05-23 엘지디스플레이 주식회사 Organic electroluminescent device
KR100791167B1 (en) * 2006-01-09 2008-01-02 엘에스전선 주식회사 roll type anisotropic conductive film

Similar Documents

Publication Publication Date Title
JP5678727B2 (en) Vibration device, method for manufacturing vibration device, electronic apparatus
US9362483B2 (en) Vibrator element having a suppressed vibration signal of leakage vibration
JP5682267B2 (en) Angular velocity sensor
TW201333426A (en) Vibrator element, sensor unit, and electronic device
JP6136349B2 (en) Electronic device, electronic apparatus, and moving object
JP5970690B2 (en) SENSOR ELEMENT, SENSOR UNIT, ELECTRONIC DEVICE, AND SENSOR UNIT MANUFACTURING METHOD
JP5030135B2 (en) Piezoelectric single crystal vibrator and piezoelectric vibration gyro
JP5987426B2 (en) Vibrating piece, manufacturing method of vibrating piece, sensor unit, electronic device
JP2013186029A (en) Vibration piece, sensor unit, and electronic apparatus
JP2012257141A (en) Crystal vibrating piece, gyro sensor, electronic apparatus and manufacturing method of crystal vibrating piece
JP3941736B2 (en) Quartz vibrating piece, manufacturing method thereof, quartz crystal device using quartz crystal vibrating piece, mobile phone device using quartz crystal device, and electronic apparatus using quartz crystal device
JP6572892B2 (en) Gyro sensor and electronic equipment
JP2007327758A (en) Piezoelectric single-crystal oscillator and piezoelectric vibration gyroscope
JP2008003017A (en) Piezo-electric single crystal vibrator and piezoelectric vibrating gyroscope
JP5716557B2 (en) Vibrating piece, gyro sensor, electronic device, and method of manufacturing the vibrating piece
JP6210345B2 (en) Gyro sensor element, gyro sensor unit, electronic device, and manufacturing method of gyro sensor unit
JP5434712B2 (en) Piezoelectric vibrating piece and piezoelectric device
JP2013234873A (en) Vibrating piece and manufacturing method for the vibrating piece, gyro sensor, and electronic apparatus and mobile body
JP4726133B2 (en) Piezoelectric vibrator and piezoelectric vibration gyro
JP5533349B2 (en) Bending vibrator, bending vibrator, oscillator, and electronic device
JP2009128020A (en) Piezoelectric vibration gyroscope using tuning fork type piezoelectric single crystal vibrator
JP2007333546A (en) Piezoelectric single crystal vibrator and piezoelectric vibration gyroscope
JP2008283243A (en) Piezoelectric vibrator and piezoelectric vibratory gyroscope
JP2011182306A (en) Piezoelectric device and method of manufacturing the same
JP2012167941A (en) Sensor device, motion sensor, electronic equipment

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20081201

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110408

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110413

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110608

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110706

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110901

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20120523