JP2007315882A - Apparatus and method for positioning substrate, and device and method for manufacturing color filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate positioning apparatus which enables quick and highly-accurate positioning of substrates, and so on. <P>SOLUTION: A color filter manufacturing device acquires a picked-up image 27 by imaging a substrate with an alignment camera, performs image processing with respect to a reference area 37 of the picked-up image 27, calculates correction amounts by performing comparison with prescribed data stored in advance, and corrects the positions of the substrate and a working part and working processing timing. It is desirable that the reference area 37 contains an area having a lot of features, a corner part 39 of a light-shielding area 33 for example. Since positioning is performed on the basis of the pattern of the light-shielding part, the accuracy of positioning of a substrate in formation processing of a colored layer can be improved. Moreover, the quality and yield of colored filters to be manufactured can be improved. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate positioning device for positioning a substrate. More specifically, the present invention relates to a substrate positioning device for positioning a color filter substrate used in a display device.

Conventionally, color filters are used in display devices such as liquid crystal displays, PDPs (Plasma Display Panels), and organic ELs (Organic ElectroLuminescence). The color filter is manufactured by forming a light shielding portion (black matrix: BM) or a colored layer (R (red), G (green), B (blue)) on a substrate such as glass.
The colored layer is formed through a patterning step by photolithography after applying each color by spin coating or die coating. In addition, a colored layer can be formed by applying each color ink on a substrate by an inkjet method.

Generally, a color filter manufacturing apparatus forms a colored layer after forming a lattice-shaped light-shielding portion on a substrate. That is, it is necessary to form a colored layer in accordance with the position of the light shielding portion. The color filter manufacturing apparatus positions the substrate on which the light shielding portion is formed, and applies a colored layer to the substrate. The color filter manufacturing apparatus confirms the position of the alignment mark on the substrate and positions the substrate.
In addition, a color filter manufacturing method in which an alignment mark is also formed when forming a light shielding portion has been proposed (see, for example, [Patent Document 1]).

Japanese Patent No. 2597626

However, since the position of the alignment mark and the position of the light shielding portion are not necessarily in a predetermined positional relationship, it is necessary to grasp the positional relationship between the alignment mark and the light shielding portion, and positioning is performed based on the alignment mark. When this is done, there is a problem that a predetermined positioning accuracy may not be obtained.
The color filter manufacturing apparatus holds the position of the alignment mark when the substrate is positioned for the first time, and the second and subsequent substrates can be positioned by matching the position of the held alignment mark. it can. However, when the positional relationship between the alignment mark and the light shielding portion is different between the first substrate and the second and subsequent substrates, there is a problem that it is difficult to obtain a predetermined positioning accuracy. Further, similarly to the first substrate setup operation, when the second and subsequent substrates are positioned without using the alignment mark as a positioning index, there is a problem that the labor burden increases.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a substrate positioning device and the like that can quickly and accurately position a substrate.

  In order to achieve the above-mentioned object, a first invention is a substrate positioning apparatus for positioning a substrate on which a light shielding portion area is formed, and includes a moving means for moving the position of the substrate, and one of the light shielding portion areas. An image capturing means for acquiring a captured image of a reference area including a portion; an image processing means for performing image processing on the captured image of the reference area to calculate a correction amount; and correcting the position of the substrate based on the correction amount. A substrate positioning apparatus comprising: a correction unit configured to perform correction.

  The substrate positioning device acquires a captured image of a reference region including a part of the light shielding portion region, performs image processing on the captured image of the reference region, calculates a correction amount, and determines the position of the substrate based on the correction amount. Correct.

The imaging means is a device that images the surface of the substrate, for example, a CCD (Charge Coupled Device) camera.
The light shielding area is a black matrix (BM) area of the color filter. The reference area is an area to be subjected to image processing by the image processing means. Image processing is, for example, pattern matching processing or binarization processing. In order to accurately detect the position of the light shielding part region, the light shielding part region may include an area with many features, for example, a corner portion of the light shielding part region. Furthermore, a pixel region may be included.

  In the first invention, since the substrate positioning apparatus performs positioning based on the pattern of the light shielding portion formed on the substrate, it is possible to improve the positioning accuracy of the substrate during the colored layer forming process. It is not necessary to obtain the relative position of the light-shielding portion or to perform setup for the first substrate or the like. Further, it is not necessary to form alignment marks for positioning on the substrate.

  A second invention is a color filter manufacturing apparatus for manufacturing a color filter by performing a processing process by a processing unit that is relatively movable with respect to a substrate on which a light shielding portion region is formed, the position of the substrate and the processing A moving means for relatively moving the position of the part, an imaging means for acquiring a captured image of a reference area including a part of the light shielding part area, and a correction amount by performing image processing on the captured image of the reference area An image processing unit for calculating the color, and a correction unit for correcting at least one of the position of the substrate, the position of the processing unit, or the timing of the processing based on the correction amount. It is a filter manufacturing apparatus.

  The color filter manufacturing apparatus acquires a captured image of a reference region including a part of the light shielding portion region, performs image processing on the captured image of the reference region, calculates a correction amount, and based on the correction amount, The position, the position of the processing part, and the processing timing (processing start and processing stop timing) are corrected.

  In the second invention, since the color filter manufacturing apparatus corrects the timing of positioning and processing based on the pattern of the light shielding portion formed on the substrate, the quality and yield of the color filter to be manufactured can be improved. it can.

  According to a third aspect of the present invention, there is provided a substrate positioning method for positioning a substrate on which a light shielding portion area is formed, an imaging step for acquiring a captured image of a reference region including a part of the light shielding portion region, An image processing step of performing image processing on a captured image to calculate a correction amount, and a correction step of correcting the position of the substrate based on the correction amount.

  A third invention relates to a substrate positioning method for positioning a substrate on which a light shielding portion region is formed.

  4th invention is a color filter manufacturing method which manufactures a color filter by performing the processing by the processing part which can move relatively to the substrate in which the light shielding part region is formed, and a part of the light shielding part region An imaging step of acquiring a captured image of a reference region including the image, an image processing step of calculating a correction amount by performing image processing on the captured image of the reference region, and the position of the substrate or the processing based on the correction amount And a correction step for correcting at least one of the position of the portion and the timing of the processing.

  A fourth invention is an invention relating to a color filter manufacturing method for manufacturing a color filter by performing a processing process by a processing section that is relatively movable with respect to a substrate on which a light shielding section region is formed.

  ADVANTAGE OF THE INVENTION According to this invention, the board | substrate positioning apparatus etc. which make it possible to position a board | substrate rapidly and with high precision can be provided.

  Hereinafter, preferred embodiments of a substrate positioning apparatus and the like according to the present invention will be described in detail with reference to the accompanying drawings. In the following description and the accompanying drawings, the same reference numerals are given to components having substantially the same functional configuration, and redundant description will be omitted.

(1. Configuration of color filter manufacturing apparatus 1)
First, the configuration of the color filter manufacturing apparatus 1 will be described with reference to FIG.
FIG. 1 is a perspective view of the color filter manufacturing apparatus 1.
The X direction indicates the transport direction of the substrate 3, the Y direction indicates the movement direction of the processing unit 11, the Z direction indicates the vertical rotation axis, and the θ direction indicates the rotation direction. The X axis, the Y axis, and the Z axis are perpendicular to each other.

The color filter manufacturing apparatus 1 includes a suction table 5, a processing unit 11, an X direction moving mechanism 7, a Y direction moving mechanism 13, a θ direction rotating mechanism 9, and an alignment camera 15.
The color filter manufacturing apparatus 1 is an apparatus that manufactures a color filter by positioning the substrate 3 and processing the substrate 3 by the processing unit 11.

The suction table 5 is a table that sucks and fixes the substrate 3. The adsorption of the substrate 3 is performed, for example, by reducing the pressure and vacuum of the air between the adsorption table 5 and the substrate 3. In this case, the suction table 5 is provided with a small hole (not shown) for sucking air, and air is sucked by a vacuum pump (not shown) or the like through the hole at the time of suction.
The suction table 5 is provided on the surface plate 17 via the X-direction moving mechanism 7 and the θ-direction rotating mechanism 9.

The processing unit 11 is a device that forms a colored layer in a pixel region provided with a light shielding unit (black matrix: BM). The processing unit 11 is, for example, an inkjet head or a laser irradiation head.
The processing unit 11 is provided in a gantry 19 that stands on the surface plate 17 via the Y-direction moving mechanism 13.

The X-direction moving mechanism 7 and the Y-direction moving mechanism 13 are linear movement mechanisms and are devices that move and position an object in a predetermined axial direction. As the X-direction moving mechanism 7 and the Y-direction moving mechanism 13, general-purpose ones can be used. For example, a step motor, a servo motor, or a linear motor is used as a moving actuator, and an LM guide ( THK Co., Ltd.), an air slide or the like can be used.
The X-direction moving mechanism 7 performs positioning by moving the suction table 5 in the X direction. The Y-direction moving mechanism 13 performs positioning by moving the processing unit 11 in the Y direction. In addition, regarding the X direction, you may provide an X direction moving mechanism in the process part 11 side. Regarding the Y direction, a Y direction moving mechanism may be provided on the suction table 5 side.

The θ-direction rotating mechanism 9 is a rotating mechanism and is a device that rotates and positions an object. As the θ direction rotation mechanism, a general-purpose one can be used, for example, a direct drive motor or the like can be used.
The θ-direction rotating mechanism 9 performs positioning by rotating the suction table 5 in the θ direction.

The alignment camera 15 is a camera that captures an image of a predetermined portion of the substrate 3 in order to detect the θ-direction angle and the XY coordinates of the substrate 3 that is sucked and fixed to the suction table 5. As the alignment camera 15, for example, a CCD (Charge Coupled Device) camera can be used.
The alignment camera 15 is fixedly supported on a frame (not shown) of the color filter manufacturing apparatus 1. Further, the alignment camera 15 may be provided with a moving mechanism so as to take an image of an arbitrary place or a plurality of places on the substrate 3. Further, a plurality of alignment cameras 15 may be provided.

(2. Operation of color filter manufacturing apparatus 1)
Next, the operation of the color filter manufacturing apparatus 1 will be described with reference to FIGS.
FIG. 2 is a block configuration diagram of the color filter manufacturing apparatus 1.
FIG. 3 is a flowchart showing the operation of the color filter manufacturing apparatus 1.
4 is a diagram illustrating the captured image 27 and the reference region 37-1 (region having many features). FIG. 5 is a diagram illustrating the captured image 27 and the reference region 37-2 (region having many features). 27 and area 43 (area with few features)

The image processing unit 21 is an apparatus that performs image processing and arithmetic processing. The control unit 23 is a device that performs operation control and arithmetic processing of each device. As the image processing unit 21 and the control unit 23, for example, an electronic computer or a computer including a CPU and a memory can be used. In addition, the image processing unit 21 and the control unit 23 can be configured integrally.
The moving unit 25 will be described as a general term for the X-direction moving mechanism 7, the θ-direction rotating mechanism 9, and the Y-direction moving mechanism 13.

The alignment camera 15 of the color filter manufacturing apparatus 1 captures the substrate 3 and sends the captured image 27 to the image processing unit 21 (step 101).
The image processing unit 21 performs pattern matching processing and binarization processing on the reference region 37 of the captured image 27, compares it with predetermined data stored in advance, and calculates the θ-direction angle and XY coordinates of the substrate 3. A correction amount 29 is calculated. The image processing unit 21 sends the correction amount 29 to the control unit 23 (step 102).
Based on the correction amount 29 sent from the image processing unit 21, the control unit 23 calculates a control amount for each of the X-direction moving mechanism 7, the Y-direction moving mechanism 13, and the θ-direction rotating mechanism 9. A signal 31 is sent (step 103).
The moving unit 25 corrects the positions of the substrate 3 and the processing unit 11 based on the control signal 31 sent from the control unit 23 (step 104).
The processing unit 11 corrects the processing timing (processing start or processing stop timing) based on the control signal 31 sent from the control unit 23 (step 105).

In order to increase the accuracy of image processing in step 102, the reference region 37 is desirably a region having a large feature amount (a region having many feature parts). For example, as shown in a reference region 37-1 in FIG. 4, it is desirable to set a region including the corner portion 39 of the light shielding portion region 33 as the reference region.
Further, as shown in a reference area 37-2 in FIG. 5, an area including the outer peripheral frame portion 41 and the pixel area 35 of the light shielding portion area 33 may be used as the reference area. When the peripheral portion (edge) of the light shielding portion region 33 is unclear, it is desirable to set the reference region including the pixel region 35.
As shown in a region 43 in FIG. 6, if the region including the pixel region 35 without including the outer peripheral frame portion 41 of the light shielding portion region 33 is set as a reference region, a simple form is repeated and an accurate position and angle are set. It is difficult to get.

  Through the above process, the color filter manufacturing apparatus 1 images the substrate 3 by the alignment camera 15, performs image processing on the reference region 37 of the captured image 27, calculates the correction amount 29, and sets the correction amount 29 to this correction amount 29. Based on this, the positions of the substrate 3 and the processing unit 11 and the processing timing are corrected.

(3. Effects, etc.)
Thus, since the color filter manufacturing apparatus 1 performs positioning based on the pattern of the light-shielding part formed on the substrate, it is possible to improve the positioning accuracy of the substrate during the colored layer forming process. That is, the substrate can be accurately positioned regardless of the relative positional relationship of the pattern of the light shielding portion with respect to the substrate. In addition, the quality and yield of the color filter to be manufactured can be improved.
Further, since the position of the pattern of the light shielding portion is detected and corrected for each substrate, the substrate can be positioned with high accuracy even when the formation position of the light shielding portion is different for each substrate. Further, it is not necessary to obtain the relative position of the light-shielding portion or to perform setup for the first substrate or the like. Therefore, it is possible to position the substrate quickly and with high accuracy while reducing the labor burden. Further, it is not necessary to form alignment marks for positioning on the substrate.

Prior to the processing shown in FIG. 3, coarse positioning processing may be performed in advance so that the reference region 37 is within the field of view of the alignment camera 15.
In addition, the reference regions 37 may be provided at a plurality of locations (for example, two locations, the left front corner portion and the right rear corner portion of the light shielding portion 33).

  The preferred embodiments of the substrate positioning device and the like according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea disclosed in the present application, and these are naturally within the technical scope of the present invention. Understood.

The perspective view of the color filter manufacturing apparatus 1 Block configuration diagram of the color filter manufacturing apparatus 1 Flow chart showing the operation of the color filter manufacturing apparatus 1 The figure which shows the captured image 27 and the reference | standard area | region 37-1. The figure which shows the captured image 27 and the reference | standard area | region 37-2. The figure which shows the captured image 27 and the area | region 43

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ......... Color filter manufacturing apparatus 3 ......... Substrate 5 ......... Suction table 7 ......... X direction moving mechanism 9 ......... θ direction rotating mechanism 11 ......... Processing part 13 ......... Y direction moving mechanism 15 ......... Alignment camera 21 ......... Image processing unit 23 ......... Control unit 25 ......... Moving unit 27 ......... Captured image 29 ......... Correction amount 31 ......... Control signal 33 ......... Shading part area 35 ……… Pixel area 37 ………… Reference area

Claims (8)

A substrate positioning device for positioning a substrate on which a light shielding portion region is formed,
Moving means for moving the position of the substrate;
An imaging means for acquiring a captured image of a reference region including a part of the light shielding portion region;
Image processing means for performing image processing on a captured image of the reference region and calculating a correction amount;
Correction means for correcting the position of the substrate based on the correction amount;
A substrate positioning apparatus comprising:   The substrate positioning apparatus according to claim 1, wherein the image processing by the image processing means includes at least one of pattern matching processing and binarization processing.   The substrate positioning apparatus according to claim 1, wherein the reference region includes at least one of a corner portion of the light shielding portion region and a pixel region. A color filter manufacturing apparatus that manufactures a color filter by performing processing by a processing unit that is relatively movable with respect to the substrate on which the light-shielding region is formed,
Moving means for relatively moving the position of the substrate and the position of the processing part;
An imaging means for acquiring a captured image of a reference region including a part of the light shielding portion region;
Image processing means for performing image processing on a captured image of the reference region and calculating a correction amount;
Correction means for correcting at least one of the position of the substrate, the position of the processing unit, or the timing of the processing based on the correction amount;
A color filter manufacturing apparatus comprising:   The color filter manufacturing apparatus according to claim 4, wherein the image processing by the image processing means includes at least one of pattern matching processing and binarization processing.   The color filter manufacturing apparatus according to claim 4, wherein the reference region includes at least one of a corner of the light shielding portion region and a pixel region. A substrate positioning method for positioning a substrate on which a light shielding portion region is formed,
An imaging step of acquiring a captured image of a reference region including a part of the light shielding portion region;
An image processing step of performing image processing on the captured image of the reference region and calculating a correction amount;
A correction step of correcting the position of the substrate based on the correction amount;
A substrate positioning method comprising the steps of: A color filter manufacturing method for manufacturing a color filter by performing processing by a processing unit movable relative to a substrate on which a light shielding unit region is formed,
An imaging step of acquiring a captured image of a reference region including a part of the light shielding portion region;
An image processing step of performing image processing on the captured image of the reference region and calculating a correction amount;
A correction step of correcting at least one of the position of the substrate, the position of the processing unit, or the timing of the processing based on the correction amount;
A method for producing a color filter, comprising:

Images