JP2003172697A - Device and method for analysis - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and method for analysis by which quantitative analysis can be performed easily on hazardous materials with high sensitivity. <P>SOLUTION: Inorganic hazardous materials which become excited states from ground states and, at the same time, are atomized and other inorganic hazardous materials which emit light and, at the same time, are atomized when the materials again return to base states are produced from inorganic hazardous materials (mercury, etc.), contained in contaminated soil by irradiating a sample A with laser light 101a from a laser oscillator 11. On the other hand, atomized mercury atoms are caused to absorb the light by the quantity corresponding to the number (content) of the atoms by irradiating the sample A with light 102a having a prescribed wavelength (253.7 nm) from a mercury lamp 22 and the remaining light 102c passed through the sample A without being absorbed by the atoms is collected and the quantity of mercury in the sample A is found in accordance with the magnitude of the collected light 102c. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an analysis apparatus and method for analyzing the amount of an object contained in an object to be inspected, such as lead, mercury, cadmium contained in soil or groundwater, It is suitable for quantitative analysis of inorganic harmful substances such as heavy metals such as chromium and organic harmful substances such as dioxins and polychlorinated biphenyls.

[0002]

2. Description of the Related Art For example, in polluted soil, inorganic harmful substances such as heavy metals such as lead, mercury, cadmium and chromium, organic compounds such as dioxins and polychlorinated biphenyls (PCBs), etc. When analyzing the amount of harmful substances, conventionally, by putting the contaminated soil in an organic solvent, organic solvent extraction of the organic harmful substances contained, by analyzing the organic solvent with the soil removed by gas chromatography, etc., While analyzing the amount of organic harmful substances in the soil, put the soil in an acidic aqueous solution, extract the inorganic harmful substances contained in it with an acid solution, and perform various treatments on the acid solution from which the soil has been removed (removal of interfering substances, etc. ), The acid solution was analyzed by emission spectroscopy or the like to analyze the amount of inorganic harmful substances in the soil.

[0003]

When the organic harmful substances and the inorganic harmful substances in the polluted soil are analyzed by the above-mentioned method, the pretreatment including the extraction work takes time (about 2 days).
Therefore, not only does it take a long time to obtain an analysis result, but also a large amount of analysis waste liquid is generated (50 to 100 ml per time), which causes a problem in the subsequent processing. Furthermore, the organic toxic substance and the inorganic toxic substance have to be individually extracted and pretreated, resulting in poor work efficiency.

Further, laser-induced emission analysis (Laser-Induced Breakdown Spectroscopy :) for quantitatively analyzing heavy metal-based harmful substances in the soil by irradiating the soil with laser light and measuring light emission from the contained heavy metal-based harmful substances. LIB
S) method has been proposed. When the soil is irradiated with laser light, the element corresponding to the heavy metal harmful substance gets energy from this laser light to enter the excited state through the ground state, and when it returns to the ground state, it emits light and loses energy. In this LIBS method, the amount is analyzed based on the intensity of light emission at this time. However, among heavy metal-based harmful substances, there are elements such as mercury and arsenic that require a large amount of energy to emit light, and elements that have a low probability of being excited from the ground state. There is a problem that quantitative analysis cannot be performed with high sensitivity.

The present invention is intended to solve such a problem, and an object of the present invention is to provide an analyzer and a method capable of easily carrying out quantitative analysis of harmful substances with high sensitivity.

[0006]

In order to achieve the above object, an analyzer according to the invention of claim 1 irradiates a laser beam irradiating means for irradiating an object to be inspected with a laser beam having a predetermined wavelength, and a laser beam irradiating means for irradiating the laser beam. Analyzing light irradiating means for irradiating the light emitting portion of the inspected object with light having a wavelength corresponding to the analysis object by irradiation, and the intensity of the analytical light passing through the light emitting portion in the inspected object The present invention is characterized by comprising a first object amount detecting means for obtaining the amount of the analysis object.

In the analyzer of the present invention, the analysis light irradiating means has an irradiation lamp for irradiating the elemental light having a predetermined wavelength, and the object amount detecting means irradiates the analysis light passing through the light emitting portion. It is characterized in that it has a daylighting lens for taking in, and the irradiation lamp and the daylighting lens are arranged at positions facing each other with respect to the object to be inspected.

In the analyzer of the third aspect of the present invention, a plurality of sets of the irradiation lamp and the lighting lens, which are arranged at a position facing the object to be inspected, are arranged corresponding to a plurality of objects to be analyzed. It is characterized by being done.

In the analyzer of the fourth aspect of the present invention, the first condenser lens is arranged between the irradiation lamp and the object to be inspected, and the first condensing lens is provided between the object to be inspected and the lighting lens. Two
It is characterized in that a condenser lens is provided.

In the analyzer of the fifth aspect of the invention, a condenser lens and a concave lens are arranged between the irradiation lamp and the object to be inspected.

In the analyzer of the sixth aspect of the present invention, the analysis light irradiating means has a white lamp for irradiating the elemental light of a plurality of wavelengths, and the object amount detecting means irradiates the analysis light passing through the light emitting section. It is characterized in that it has a daylighting lens to be taken in and a spectroscope for splitting for each wavelength of the analysis light, and the white lamp and the daylighting lens are arranged at positions facing each other with respect to the object to be inspected.

In the analyzer of the invention of claim 7, the laser light irradiating means is capable of irradiating the object to be inspected with laser light selected from a plurality of wavelengths, and the object to be inspected is based on the intensity of the light from the light emitting portion. It is characterized in that a second object amount detecting means for obtaining the amount of the object in the inspection object is provided.

According to the eighth aspect of the analyzer, the first object amount detecting means and the second object amount detecting means are provided according to the type of the object to be analyzed.
The object amount detecting means can be selectively applied, the first object amount detecting means is applied to an element having a large emission energy or a low excitation probability, and the second object amount detecting is applied to other elements. It is characterized by applying means.

According to a ninth aspect of the analysis apparatus of the present invention, the first
The object amount detection means is capable of detecting the amount of the inorganic harmful substance as the analysis object, and the second object amount detection means is the analysis object according to the wavelength irradiated from the laser light irradiation means. The feature is that the amount of the inorganic harmful substance or the organic harmful substance can be detected.

According to a tenth aspect of the present invention, in the analysis method, a laser beam having a predetermined wavelength is irradiated onto the object to be inspected, and a wavelength corresponding to the object to be analyzed is emitted to the light emitting portion of the object to be inspected by the irradiation of the laser beam. While irradiating the above-mentioned light, the analysis light which has passed through the light emitting portion is sampled, and the amount of the analysis object in the inspection object is obtained based on the intensity of this light.

In the analysis method of the invention of claim 11, in the light emitting portion, the element constituting the analyte is atomized by obtaining energy from the laser light, and each atom changes from a ground state to an excited state. When passing through the process of returning to the atom in the ground state again, the atom in the ground state absorbs a corresponding amount of analytical light, and the amount of the analyte is determined based on the remaining analytical light. .

The analysis method of the invention of claim 12 is characterized in that the analysis method of claim 10 is applied to an element having a large emission energy or a low excitation probability.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 shows a schematic structure of an analyzer according to the first embodiment of the present invention, FIG. 2 shows a schematic explanation of a first object amount detection method, and FIG. 3 shows a plasma and atomized element density by laser light irradiation. The graph showing, the graph showing the luminescence intensity of the soil containing the inorganic harmful substance in FIG. 4, the graph showing the fluorescence intensity of the soil containing the organic harmful substance in FIG. 5 (a), FIG.
A graph showing the fluorescence intensity of the soil containing no organic harmful substance is shown in (b).

Laser-Induced Breakdown Spectroscopy (LIBS) which is generally applied
The method is based on the intensity of light emitted when the element corresponding to the heavy metal-based harmful substance obtains energy when the soil is irradiated with laser light, returns from the ground state to the excited state, and then returns to the ground state again. The content is analyzed. However, among heavy metal-based harmful substances, there are elements such as mercury, arsenic, and selenium that require a large amount of energy to emit light, and elements that have a low probability of being excited from the ground state. Insufficient sensitivity.

However, with respect to some heavy metal type harmful substances (mercury, arsenic, selenium, etc.) which are difficult to change from the ground state to the excited state by the irradiation of the laser beam, these substances are actually atomized. That is, when the soil is irradiated with the pulsed laser, the heavy metal substance obtains energy to change from the ground state to the excited state, and returns to the ground state again, and emits light at this time. As shown in FIG. 3, this light emission state can be expressed by the atomic density in the plasma state, and the light emission disappears early. On the other hand, since the element is atomized for a long time even if the light emission disappears, the atomized element can be detected as the atomic density of the ground state.

As described above, by irradiating the soil with laser light, the applicant detects not the emission intensity but the atomic density of the ground state when the element of the heavy metal type harmful substance is changed from the ground state to the excited state. As a result, even with elements such as mercury, arsenic, and selenium that require a large amount of energy to emit light, or elements that have a low probability of becoming excited from the ground state, quantitative analysis can be performed with high sensitivity. I discovered that I can do it.

Accordingly, when the applicant irradiates the soil with laser light, the ground state element obtains energy from the laser light to be in an excited state and is atomized in the irradiated portion, and therefore, heavy metal-based harmful substances When irradiated with light having a wavelength corresponding to, the atomized analyte absorbs a corresponding amount of analysis light, and the remaining analysis light that has passed through this light emitting portion is collected, and the intensity of this light is changed. Based on this, it was decided to determine the content of heavy metal-based harmful substances.

Atomic Absorptio (Atomic Absorptio) is used as a quantification of the intensity of light passing through and the absorption of the light.
n Spectrometry (AAS) method, which is for heating heavy metal harmful substances in a flame by a burner to atomize them and to atomize refractory elements such as titanium, tungsten, and zirconia. I can't.

The analyzing apparatus and the analyzing method will be described in detail below. In the analyzer of the first embodiment, as shown in FIG. 1 and FIG. 2, the object to be inspected is a sample A formed by putting contaminated soil inside a mold or the like of a press and compacting it, for example, not shown. It is placed on the analysis table.

The laser oscillator 11 has a first wavelength (for example,
(1064 nm) laser light 101a can be pulsated in a pulsed manner, the laser light 101a having the first wavelength can be directly irradiated, and the laser light 101a from the laser oscillator 11 can be emitted.
To the second wavelength (for example, 266n
It is possible to irradiate the sample A as the laser beam 101c after conversion of m). In this case, the laser oscillator 11 and the wavelength adjuster 12 constitute a laser light irradiation means for irradiating the object to be inspected with laser light of a predetermined wavelength.

The wavelength adjuster 12 includes a laser oscillator 11
Of the laser light 101a provided on the irradiation optical axis of the laser light 101a
Of the laser beam 101a of the laser oscillator 11, a drive device 14 for moving the movable mirror 13 forward and backward with respect to the irradiation optical axis of the laser beam 101a of the laser oscillator 11, and the laser beam 101a reflected by the movable mirror 13 for the sample A. Of the laser light 101a reflected by the mirror 15, the dichroic mirror 16 disposed on the optical axis of the laser light 101a reflected by the mirror 15 and transmitting the laser light 101a, and the laser light 101a transmitted through the dichroic mirror 16. The convex (condensing) lens 17 disposed on the axis and the movable mirror 13 on the irradiation optical axis of the laser beam 101a from the laser oscillator 11 are disposed on the downstream side to convert the wavelength of the laser beam 101a ( (Eg, 532 nm) and the first wavelength conversion element 18 and the laser beam 101b that has been transmitted through the first wavelength conversion element 18 are arranged on the optical axis to convert the wavelength of the laser beam 101b (for example, 266 nm). That the second wavelength conversion element 1
9, a mirror 20 disposed on the optical axis of the laser light 101c that has passed through the second wavelength conversion element 19 and reflecting the laser light 101c toward the dichroic mirror 16, and between the mirror 20 and the dichroic mirror 16. The concave lens 21 is provided.

The drive unit 14 can position the movable mirror 13 on the irradiation optical axis of the laser beam 101a of the laser oscillator 11 and retract it from the irradiation optical axis.
That is, when the movable mirror 13 is located on the optical axis, the laser light 101a is reflected toward the mirror 14, and when the movable mirror 13 is retracted from the optical axis, the laser light 10a is reflected.
1a can be moved straight toward the first wavelength conversion element 18, and the traveling direction of the laser light 101a from the laser oscillator 11 can be switched.

The dichroic mirror 16 allows the laser light 101a having a long wavelength (for example, 1064 nm) to pass through without reflecting it, while the short wavelength (for example, 266n).
The laser light 101c of m) can be reflected.

Further, when the laser beam 101a from the laser oscillator 11 is incident on the first wavelength conversion element 18, its wavelength is halved (for example, 1064 nm to 532n).
m) laser light 101b can be converted. When the laser light 101b wavelength-converted by the first wavelength conversion element 18 is incident, the second wavelength conversion element 19 further reduces the wavelength to 1
It is possible to convert the laser light 101c having a wavelength of / 2 (for example, 532 nm to 266 nm).

Further, the concave lens 21 pre-expands the beam diameter of the laser beam 101c so that the laser beam 101c has a sufficient beam diameter even if the laser beam 101c passes through the downstream convex lens 17.

For example, a mercury lamp 22 is disposed on one side of the sample A, and the mercury lamp 22 can oscillate a light 102a having a predetermined wavelength (253.7 nm). The light can be condensed by the first condensing lens 23 and irradiated as the light 102b toward the sample A. In this case, the mercury lamp 22 and the first condenser lens 23 constitute an analysis light irradiation unit that irradiates the light emitting portion of the sample A with the light of the wavelength corresponding to the analyte (mercury) by the irradiation of the laser light. It

A second condenser lens 24 and a light collecting lens 25 are arranged on the other side of the sample A. The sample condenser A is oscillated by the mercury lamp 22 and condensed by the first condenser lens 23.
102c that has passed through the light emitting portion of the
The light 103 emitted from the sample A by the irradiation of 1c can be condensed by the second condenser lens 24 and can be collected by the collecting lens 25. The mercury lamp 22 and the daylighting lens 25 are arranged at positions facing the sample A. Then, the light collecting lens 25 collects the collected light 102c and the laser lights 101a and 101c.
Fibers 26a to 26d for branching and guiding the light in four directions
Is connected to each of the optical fibers 26a to 26d.
102c and wavelength demultiplexers 27a to 27d that transmit only the target wavelength region from the laser beams 101a and 101c are connected, and also have a gate function of receiving the light passing through these wavelength demultiplexers 27a to 27d only for a predetermined time. Together with the photomultiplier tube (Photo-Multi Tu
be: PMT) 28a to 28d are connected.

The PMTs 28a to 28d are connected to integrators 29a to 29d for integrating the magnitude of each light on a time basis based on the electric signal converted into the light intensity, and the integrators 29a to 29d are connected. Is connected to a control unit 30. The control unit 30 obtains the amount of the inorganic harmful substance which is the first analysis target substance in the sample A based on the integrated signal, and the organic target substance which is the second target substance. The amount of harmful substances in the system can be calculated.

The wavelength separator 27a allows only the light 102c (253.7 nm wavelength region due to mercury as an example of an organic harmful substance) of the mercury lamp 22 which has passed through the light emitting portion of the sample A to pass through among the collected light. , The wavelength separator 27b is the sample A
30 out of 103 light emitted from organic harmful substances
Wavelength separator 2 that passes only the wavelength range of 0 to 500 nm
7c passes only the wavelength region of 500 to 900 nm of the light 103 emitted from the sample A, which is caused by the soil itself,
The wavelength separator 27d is designed to pass only the light 103 emitted from the sample A only in the wavelength range of 200 to 800 nm caused by the inorganic harmful substance.

The PMT 28a oscillates the laser light 101a from the laser oscillator 11 and emits light from the mercury lamp 22 when the movable mirror 13 of the wavelength adjuster 12 is positioned on the optical axis based on the signal from the control unit 30. The gate operates so that light is received for a predetermined time after oscillating 102c,
The size of 102c is converted into an electric signal. Also, PMT28
b is the wavelength adjuster 12 based on the signal from the control unit 30.
When the movable mirror 13 is positioned on the optical axis, the gate operates so that the laser beam 101a is emitted from the laser oscillator 11 and is received only during the emission life of the inorganic harmful substance. Convert magnitude to electrical signal.

On the other hand, the PMT 28c oscillates the laser beam 101a from the laser oscillator 12 when the movable mirror 13 of the wavelength adjuster 12 is retracted from the optical axis based on the signal from the control unit 30, and then the organic system. The gate operates so as to receive light only during the emission life of the harmful substance, and converts the magnitude of the light 103 into an electric signal. When the movable mirror 13 of the wavelength adjuster 12 is retracted from the optical axis based on the signal from the control unit 30, the PMT 28d oscillates the laser light 101a from the laser oscillator 11 and then determines the emission life of the soil itself. The gate operates so as to receive light only during the period, and converts the magnitude of the light 103 into an electric signal.

Then, each integrator 29a-29d receives each light 102 based on the signals from the PMTs 28a-28d.
The sizes of c and 103 are integrated for each time, and each light 102c and 10
Calculate the total intensity of 3 respectively.

On the other hand, the controller 30 determines the amount of the inorganic harmful substance in the sample A based on the signal from the integrator 29a.
The control unit 30 also determines the amount of the inorganic harmful substance in the sample A based on the signal from the integrator 29b. Further, the control unit 30 controls the PM based on the signals from the integrators 29c and 29d.
The total intensity of the light 103 from the T28c and the total intensity of the light 103 from the PMT 28d are compared and the ratio of the intensities of the light between the two is compared to obtain the amount of the organic harmful substance in the sample A.

Further, the control unit 30 includes a laser oscillator 1
Oscillation operation of 1 laser beam 101a (oscillation start, pulse width, etc.), operation of driving device 14 of wavelength adjuster 12 (movement / retraction operation of movable mirror 13, etc.), gate operation of PMTs 28a-28d (opening timing, opening time, etc.) ) Etc. can be controlled respectively.

Although not shown, in the vicinity of the sample A,
A liquid adder 00 for adding at least one liquid of water, alcohol organic solvent and aliphatic organic solvent to the sample A (about 3 to 30 vol.% With respect to the sample 1) is provided. The aliphatic organic solvent includes n-hexane and the like, and the alcohol organic solvent includes methanol, ethanol, butanol, isopropanol (I
PA) and the like. A heating lamp for drying at least the laser light irradiation surface of the sample A is arranged near the sample A.

Now, a method of analyzing harmful substances in contaminated soil using the above-described analyzer of this embodiment will be described.

<Inorganic Hazardous Substance Analysis> First, a contaminated soil to be analyzed is put into a press die or the like and pressed to form a pellet-shaped sample A, which is placed on an analysis table. In this case, the analysis table may be rotated if necessary, and the heating lamp may be turned on to dry the sample A. Then, it is determined whether to use the laser emission spectroscopy or the laser atomic absorption method according to the analysis target.
Here, in the case of analyzing mercury, arsenic, selenium or the like as an element that requires a large amount of energy to emit light or an element that has a low probability of being excited from the ground state, a laser atomic absorption method (first object amount detecting means) is used. ) Is used, and a laser induced emission analysis method (second object amount detection means) is used when analyzing other elements.

A method of analyzing the amount of mercury contained in the contaminated soil by using the laser atomic absorption method will be described. Based on the signal from the control unit 30, the movable mirror 13 of the wavelength adjuster 12 is placed on the optical axis of the laser light 101a from the laser oscillator 11.
The driving device 14 is operated so that the laser light 101a (first wavelength: 106
4 nm) in a pulse form. Then this laser light
101a is irradiated onto the sample A through the movable mirror 13, the mirror 15, the dichroic mirror 16, and the convex lens 17. Further, based on the signal from the control unit 30, the mercury lamp 22 oscillates the light 102a having a predetermined wavelength (253.7 nm). Then, the light 102a is condensed by the first condensing lens 23 and is irradiated as the light 102b toward the sample A.

On the surface irradiated with the laser beam in the sample A, the inorganic harmful substance (such as mercury) contained in the contaminated soil is irradiated with the laser beam 101a to obtain energy from the laser beam to be excited from the ground state and atomized. Things also occur,
When it returns to the ground state again, some emit light and are atomized. The light of the mercury lamp 22
When 102a is irradiated, among the atomized heavy metal-based harmful substances, the contained mercury atoms absorb the light 102a having the same wavelength by a corresponding amount (content). Then, the remaining light 102c that is not absorbed by the light emitting portion and passes therethrough enters the second condensing lens 24, the daylighting lens 25, and the optical fibers 26a to 26d.

Then, the light entering the optical fiber 26a
102c is a component (253.7) of the wavelength region due to the inorganic harmful substance (mercury) in the sample A by the wavelength separator 27a.
The light 102c that passes through the optical fibers 26b to 26d is blocked by the wavelength demultiplexers 27b to 27d. The PMT 28a operates so that the gate of the PMT 28a receives light 102c in a region corresponding to mercury extracted by the wavelength demultiplexer 27a based on a signal from the control unit 30 for a predetermined time, and the magnitude of only the light 102c is converted into electric power. Convert to signal and integrator 2
9a. The integrator 29a integrates the size of the light 102c for each time based on the signal from the PMT 28a to obtain the total intensity thereof, and then transmits the result to the control unit 30. The controller 30 determines the amount of mercury in the sample A based on the signal from the integrator 29a. That is, the magnitude of the light 102a oscillated from the mercury lamp 22 (electrical signal),
Magnitude of light 102c that passes through the light emitting unit and is collected (electrical signal)
By comparing with, the amount of mercury in the sample A can be obtained from the difference between the two.

On the other hand, a method for analyzing inorganic harmful substances other than mercury, arsenic, selenium, etc. contained in contaminated soil by using laser emission spectroscopy will be described. Based on the signal from the control unit 30, the driving device 14 operates so as to move the movable mirror 13 of the wavelength adjuster 12 to the optical axis of the laser light 101a from the laser oscillator 11, and the laser oscillator 11
The laser light 101a (first wavelength: 1064 nm) is oscillated in a pulse form. Then, the laser light 101a is applied to the sample A through the movable mirror 13, the mirror 15, the dichroic mirror 16, and the convex lens 17. Then, on the laser light irradiation surface of the sample A, the inorganic harmful substance contained in the contaminated soil by the irradiation of the laser light 101a obtains energy from the laser light to be in the excited state from the ground state, and emits light when returning to the ground state again. . Then, the light 103 emitted from the sample A enters the condenser lens 24, the c-light collecting element 25, and the optical fibers 26a to 16d, respectively.

The optical fibers 26a, 26c, 26
The light 103 entering the inside of d is the wavelength demultiplexer 27a, 27c, 2
Light blocked by 7d and entering the optical fiber 16b
Reference numeral 103 is a wavelength separator 27b, which is a component in the wavelength region (200 to 800 nm) caused by the inorganic harmful substance in the sample A.
Only pass. The PMT 28b receives the laser light 101a from the laser oscillator 11 out of the light 103 in the predetermined wavelength region extracted by the wavelength demultiplexer 27b based on the signal from the control unit 30.
The gate operates so as to receive the light 103 from the inorganic harmful substance until the emission life of the inorganic harmful substance 103 (about t = 5 ms) from the time when it oscillates (t = 0). It is converted into an electric signal and transmitted to the integrator 29b. The integrator 29b uses the signal from the PMT 28b to
After the magnitude of 3 is integrated for each time to obtain the total intensity, the result is transmitted to the control unit 30. The controller 30 determines the amount of the inorganic harmful substance in the sample A based on the signal from the integrator 29b.

At this time, if the water content in the sample A is high,
As shown in, the emission intensity from the inorganic harmful substance in the sample A is remarkably reduced, and the amount of the inorganic harmful substance in the sample A cannot be accurately determined. By heating, the surface irradiated with the laser beam 101a is dried, and the emission intensity due to the inorganic harmful substance is increased so as to show a certain magnitude.

Here, when the emission intensity due to the inorganic harmful substance maintains a constant value for a predetermined time t, the control unit 30 determines that the sample A is dried, and the emission at that time is determined. The amount of the inorganic harmful substance in the sample A is calculated based on the strength. That is, by drying at least the surface irradiated with the laser beam 101a of the sample A, the inorganic harmful substance in the sample A can be accurately quantitatively analyzed without being affected by the amount of water in the sampled soil.

<Analysis of Organic Hazardous Substances> For quantitative analysis of organic harmful substances contained in contaminated soil, laser-induced fluorescence spectroscopy (Laser-Induced Fluorescence Spectroscopy:
LIFS) method. That is, the laser light 101a from the laser oscillator 11 is generated based on the signal from the control unit 30.
The driving device 14 is operated so as to retract the movable mirror 13 of the wavelength adjuster 12 from the optical axis of the laser beam, and the laser beam 101a (first wavelength: for example, 1064) from the laser oscillator 11 is operated.
nm) in a pulsed manner. Then this laser light 10
1a is a laser beam 101b (wavelength: 532, for example, having a wavelength width of 1/2 due to the first wavelength conversion element 18 of the wavelength adjuster 12).
laser beam 101c (for example, 266n) whose wavelength width is further ½ by the second wavelength conversion element 19 after being adjusted to
m), the focus is enlarged by the concave lens 21 through the mirror 20, and then the sample A is irradiated through the dichroic mirror 16 and the convex lens 17.

When the sample A is irradiated with the laser beam 101c, the light in the wavelength region of 300 to 500 nm from the organic harmful substance is emitted.
103 (see FIG. 5 (a)) and 500-900n from soil
Light 103 in the wavelength range of m (see FIG. 5B) is emitted, and this light 103 enters the optical fibers 26a to 26d via the condenser lens 24 and the daylighting lens 25, respectively.

The light 103 that has entered the optical fibers 26a and 26b is blocked by the wavelength demultiplexers 27a and 27b, and the light 103 that has entered the optical fiber 26c has a wavelength range of 300 to 500 nm by the wavelength demultiplexer 27c. The light 103 which has passed through only the component of (4) and has entered the optical fiber 26d passes through only the component of the wavelength region of 500 to 900 nm by the wavelength demultiplexer 27d.

The PMT 28c emits the laser light 101a from the laser oscillator 11 out of the light 103 in the predetermined wavelength range extracted by the wavelength demultiplexer 27c based on the signal from the control unit 30 (t = 0). Light from organic harmful substances 10
The gate operates so as to receive light until the light emission life of 3 (t = 10 to 100 ns), and the magnitude of only the light 103 at this time is converted into an electric signal and transmitted to the integrator 29c. On the other hand, the PMT 28d emits the laser light 101a from the laser oscillator 11 out of the light 103 in the predetermined wavelength region extracted by the wavelength separator 27d based on the signal from the control unit 30 (t = 0), and then the soil itself. Light emission lifetime of light 103 from (t
= About 5 ms), the gate operates so as to receive light, and the magnitude of only the light 103 at this time is converted into an electric signal and transmitted to the integrator 29d.

The integrators 29c, 29d are PMTs 28c, 2
Based on the signal from 8d, the size of each light 103 is integrated for each time, the total intensity of each light 103 is obtained, and the result is transmitted to the control unit 30. The control unit 30 controls the PMT 28 based on the signals from the integrators 29c and 29d.
The total intensity of the light 103 from c and the total intensity of the light 103 from the PMT 28d are compared and the ratio is calculated to calculate the amount of the organic harmful substance in the sample A, and the result is displayed on a monitor or the like. To do.

That is, a liquid is added to the sample A and laser light is added.
The intensity of the light 103 emitted from the sample A was determined during the predetermined time (fluorescence lifetime of the organic harmful substance) from the time when the laser light 101a was radiated and the laser light 101a was oscillated. By obtaining the intensity of the light 103 emitted from the sample A within a predetermined time from the time (fluorescence lifetime of the soil itself), and comparing and calculating the fluorescence intensity of the organic harmful substance and the fluorescence intensity of the soil itself, The amount of the organic harmful substance in the sample A can be calculated.

Specifically, when the sample A is measured without adding a liquid, only the peak due to the soil as shown in FIG. 5 (b) appears within a predetermined time (about 5 ms),
When this liquid was added to the sample A and measured, a peak due to an aromatic hydrocarbon in a wavelength region around 400 nm as shown in FIG. 5 (a) was obtained for a predetermined time (10 to 100 ns).
The organic harmful substances in soil can be analyzed based on this peak.

Although the reason for this is not clear, when the liquid as described above is added to the sample A, the liquid penetrates entirely between the particles of the soil in the sample A, and the organic harmful substances adhering to the surface of the particles are harmful. An optical path is formed by a liquid between the substance and the surface of the sample A, so that light can be exchanged evenly between the surface side of the sample A and the inner side of the sample A over the entire sample A. When a solvent or an aliphatic organic solvent is added, the solvent that has infiltrated throughout the particles of the soil in sample A dissolves the organic harmful substances adhering to the surface of the particles and enters the optical path from the particle surface. When organic harmful substances are drawn out to the UV, the UV irradiation of organic harmful substances and the emission of fluorescence from the organic harmful substances become more efficient, and when the added liquid is an alcohol organic solvent, Familiar without particles and unevenness due to the high affinity, is the optical path is easily formed uniformly, emission of fluorescence from the illumination and organic harmful substances UV for organic harmful substances is presumed to become more reliable.

As described above, in the analyzer and method of this embodiment, the sample A is irradiated with the laser beam 101a from the laser oscillator 11 so that the inorganic harmful substance (mercury or the like) contained in the contaminated soil is changed. While the energy is applied and excited from the ground state to atomize, the mercury lamp 22 irradiates the sample A with light 102a having a predetermined wavelength (253.7 nm) to atomize the atom of mercury. Absorb a considerable amount of light (content), and the remaining light that passes without being absorbed 10
2c is sampled and the amount of mercury in the sample A is determined according to the size of the light 102c.

Therefore, it is possible to easily quantitatively analyze, among the inorganic harmful substances, the elements that require a large amount of energy to emit light and the elements (mercury, arsenic, selenium, etc.) having a low probability of being excited from the ground state. It can be performed with high sensitivity.

With respect to other inorganic harmful substances, the laser light 101a is irradiated on the sample A, and the amount of the inorganic harmful substances contained is determined based on the emission intensity of the sample A and analyzed. By selecting the method according to the type of the inorganic harmful substance, the analysis can be performed with high sensitivity and easily.

Further, the laser light 10 from the laser oscillator 11
The wavelength adjuster 12 wavelength-converts 1a into laser light 101c and irradiates the sample A. With the irradiation of the laser light 101c, the amount of the organic harmful substance is obtained from the sample A based on the fluorescence intensity. In addition, the amount of analysis waste liquid generated can be extremely small, and the time from the collection of soil to the acquisition of analysis results can be greatly shortened. As a result, it is possible to analyze organic and heavy metal harmful substances in the same sample A almost simultaneously in a short time while suppressing the generation amount of the analysis waste liquid.

In the above-described embodiment, the mercury lamp 22 is provided as the analyzing light irradiating means to perform the analysis. However, not limited to this mercury lamp 22, arsenic or selenium can be used for the wavelength corresponding to the element. The content in these soils can be detected by using an irradiation lamp. In addition, the soil was compacted to form a sample A, and the sample A was analyzed. However, by making the device itself portable, the soil was directly irradiated with laser light for analysis. You may go.

Further, in the above embodiment, the wavelength demultiplexer 2 is used.
Although 7a to 27d are used, it is possible to use a spectroscope instead of this. Further, although the PMTs 28a to 28d and the integrators 29a to 29d are used, an ICCD may be used instead of them.

The wavelength of the laser light 101a is 10
64nm (when using YAG laser) or 1047n
m (when a YLF laser is used) and the like, examples of the wavelength of the laser beam 101b include 532 nm and 524 nm, and examples of the wavelength of the laser beam 101c include 266 nm and 262 nm.

FIG. 6 is a schematic explanation of the first object amount detecting method in the analyzer according to the second embodiment of the present invention, and FIG. 7 shows the first object amount detecting method in the analyzer according to the third embodiment of the present invention. Schematic explanation, FIG. 8 shows a schematic explanation of the first object amount detection method in the analyzer according to the fourth embodiment of the present invention. It should be noted that members having the same functions as those described in the above-described embodiment are designated by the same reference numerals, and redundant description will be omitted.

In the first object amount detecting method in the analyzer of the second embodiment, as shown in FIG. 6, the laser oscillator 11 collects the laser light 101a having the first wavelength (for example, 1064 nm) by the convex lens 17. The sample A can be irradiated. One side of the sample A has a predetermined wavelength (253.7
A mercury lamp 22 capable of oscillating a light beam 102a having a wavelength of (nm) is provided, and the light beam 102a can be condensed by a condenser lens 41 and can be irradiated toward the sample A as a parallel light beam 102d by a concave lens 42. A light-collecting lens 25 is arranged on the other side of the sample A, and is oscillated from the mercury lamp 22 so that the condenser lens 2
The light is condensed by 3 and becomes parallel light 102d by the concave lens 42.
The light 102e that has passed through the light emitting portion can be collected. The light collecting lens 25 has optical fibers 26a to 26d,
The wavelength demultiplexers 27a to 27d, PMTs 28a to 28d, integrators 29a to 29d, and the control unit 30 are connected.

Therefore, in order to analyze the amount of mercury contained in the contaminated soil using the laser atomic absorption method, the laser oscillator 1
The laser light 101a is oscillated from No. 1 and the sample A is irradiated with this laser light 101a, and the light 102a is oscillated from the mercury lamp 22. The light 102a is condensed by the condenser lens 41, and the concave lens 4
In step 2, the sample A is irradiated with parallel light 102d. Sample A
In the surface irradiated with the laser light in, the mercury contained in the contaminated soil by irradiation with the laser light 101a becomes energy from the ground state to become an excited state from the ground state and some are atomized, and when returning to the ground state again. Some emit light and are atomized. When the collimated light 102d from the mercury lamp 22 is irradiated to this light emitting part, among the atomized heavy metal-based harmful substances, the mercury atom contained contains the light 102d having the same wavelength by a considerable amount (content). Absorb. And
The remaining light 102e that is not absorbed by the light emitting portion and passes through enters the daylighting lens 25 and the optical fibers 26a to 26d.

Then, the light entering the optical fiber 26a
102e is a component (253.7n) in the wavelength region due to the inorganic harmful substance (mercury) in the sample A by the wavelength separator 27a.
m) only, and the PMT 28a converts the magnitude of the light 102e in the region corresponding to mercury into an electric signal, and the integrator 29a
Then, the magnitude of the light 102e is integrated every time based on this signal to obtain the total intensity, and the control unit 30 causes the integrator 29 to
The amount of mercury in sample A is determined based on the signal from a. That is, by comparing the magnitude of the light 102a oscillated from the mercury lamp 22 (electrical signal) with the magnitude of the light 102e (electrical signal) collected through the light emitting portion, the difference between the two causes The amount of mercury in can be determined.

As described above, in the present embodiment, the light 102a of the mercury lamp 22 is condensed by the condenser lens 41 and is emitted as parallel light 102d by the concave lens 42 toward the sample A.
The light 102a of the mercury lamp 22 can be applied to a wide area of the light emitting portion of the sample A, and the quantitative analysis of mercury can be performed with high sensitivity.

In the first object amount detecting method in the analyzer of the third embodiment, as shown in FIG. 7, a plurality of (five in the present embodiment) irradiation lamps 51 to 51 are provided on one side of the sample A. 55 are arranged in parallel, and lights of different wavelengths can be oscillated toward the sample A via the first condenser lenses 56 to 60. Each of the irradiation lamps 51 to 55 is capable of irradiating light of a wavelength corresponding to a plurality of kinds of inorganic harmful substances for which quantitative analysis is performed, and for example, a wavelength (resonance line) of lead, mercury, arsenic, or the like is used. It is a lamp that emits light. On the other side of the sample A, second condensing lenses 61 to 65 and daylighting lenses 66 to 70 are arranged facing the irradiation lamps 51 to 55 and the condensing lenses 56 to 60, respectively. The light oscillated from 51 to 55 collects light from each condenser lens 61 to
The light can be collected by 65 and collected by each of the collecting lenses 66 to 70. Then, the optical fibers 71 to 75 are connected to the respective lighting lenses 66 to 70, and further, a wavelength demultiplexer, a PMT, an integrator, and a controller which are not shown are connected. The laser oscillator and the like are omitted here.

Therefore, in order to analyze the amount of mercury contained in the contaminated soil by using the laser atomic absorption method, the sample A is irradiated with laser light, and light is oscillated from each irradiation lamp 51 to 55 to collect each light. The light is condensed by the optical lenses 56 to 60 and irradiated toward the sample A. On the surface irradiated with the laser beam in the sample A,
Irradiation with a laser beam causes a plurality of kinds of inorganic harmful substances contained in the contaminated soil to be excited from the ground state and atomized. When light having different wavelengths is irradiated to the light emitting portion, a considerable amount (content) of light having the same wavelength is absorbed by the atomized heavy metal-based harmful substance, and the respective passing lights are used as the respective light collecting lenses 66 to 70. , Optical fibers 71-75
Light enters into each.

Then, the light entering each of the optical fibers 71 to 75 is made to pass only the component of each wavelength region due to the inorganic harmful substance in the sample A by a wavelength separator (not shown), and P
The magnitude of light is converted into an electric signal by MT, the total intensity is obtained by an integrator, and the control unit determines the sample A based on the magnitude of each light.
Find the amount of inorganic harmful substances in the product. That is, the magnitude of the light (electrical signal) oscillated from each of the irradiation lamps 51 to 55,
The amount of each inorganic harmful substance in the sample A can be obtained from the difference between the two by comparing the magnitude of the light (electric signal) collected through the light emitting unit.

As described above, in the present embodiment, light having a wavelength corresponding to a plurality of types of inorganic harmful substances (for example, lead,
By arranging the irradiation lamps 51 to 55 capable of irradiating wavelengths (resonance lines) of mercury, arsenic, etc., and arranging them at the same time to start lighting, it is possible to enhance quantitative analysis of multiple kinds of inorganic harmful substances at the same time. It can be done with sensitivity.

In the first object amount detecting method in the analyzer of the fourth embodiment, as shown in FIG. 8, a white lamp 81 is arranged on one side of the sample A, and the first condenser lens 82 is provided. White light can be oscillated toward the sample A via the light. Further, on the other side of the sample A, a second condenser lens 83 and a daylighting lens 84 are arranged so as to face the white lamp 81 and the first condenser lens 82. The light collecting lens 84 has an optical fiber 85, a spectroscope 86, a multi-channel detector (CCD camera, photodiode array, P
87, and a control unit 88 are connected. The laser oscillator and the like are omitted here.

Therefore, in order to analyze the amount of mercury contained in the contaminated soil by using the laser atomic absorption method, the sample A is irradiated with the laser light and the white lamp 81 oscillates the light to generate the first condenser lens. The light is condensed at 82 and is irradiated toward the sample A. On the laser light irradiation surface of the sample A, the plurality of types of inorganic harmful substances contained in the contaminated soil are atomized from the ground state to the excited state by the laser light irradiation. When white light is emitted to this light emitting part, a plurality of atomized heavy metal-based harmful substances absorb a considerable amount (content) of white light of the same wavelength, and each of the passed white light is collected in the second collection. The light is collected by the light lens 83, and is collected by the light collecting lens 84 and the optical fiber 85.
Light enters into each.

Then, the light entering the optical fiber 85 is split into the light of each element by the spectroscope 86, detected by the multi-channel detector 87, and the magnitude of the light is converted into an electric signal. The control unit 88 determines the amount of the inorganic harmful substance in the sample A based on the intensity of each light. That is, the magnitude of each light emitted from the white lamp 81 (electrical signal) is compared with the magnitude of the light (electrical signal) that has passed through the light emitting portion and is dispersed by the spectroscope 86. Then, the amount of each inorganic harmful substance in the sample A can be obtained from the difference between the two.

As described above, in the present embodiment, by using the white lamp 81 as the analysis light irradiation means, it is possible to simultaneously perform quantitative analysis of a plurality of types of inorganic harmful substances with high sensitivity.

In each of the above-mentioned embodiments, heavy metal harmful substances such as lead, mercury, cadmium and chromium in soil, dioxins and polychlorinated biphenyls (PC) are used.
Although the case where it is applied to the analysis of an organic harmful substance such as B) is described, the analysis device and method of the present invention are not limited to this, and as another example, for example, a plant structural material such as a nuclear power plant. When analyzing an inorganic substance such as an organic substance or a metal oxide film on an oil film or the like that is attached to the surface of, when analyzing an inorganic substance such as an organic substance or a metallic substance such as a coating film component in a coating film coated on various members, When analyzing inorganic substances such as organic substances and metallic substances collected in the filtration membrane of the water purification system, the organic substances such as cutting oil and the corrosive components such as sulfur and chlorine remaining on the inner wall surface of the high vacuum container are analyzed. The present invention can be applied in the same manner as in the case of the present embodiment even in the case of analyzing the organic substance and the inorganic substance present in the object, such as the case of analyzing the contained inorganic substance.

[0080]

As described above in detail in the embodiments, according to the analyzer of the invention of claim 1, laser light irradiating means for irradiating the object to be inspected with laser light of a predetermined wavelength,
Analyzing light irradiating means for irradiating a light emitting portion of the inspection object with light of a wavelength corresponding to the analysis object by irradiation of laser light, and analysis in the inspection object based on the intensity of the analysis light passing through the light emitting portion. Since the first object amount detecting means for obtaining the amount of the object is provided, when the soil is irradiated with the laser beam, the element in the ground state obtains energy from the laser beam and becomes an excited state, and is atomized. By irradiating with light of a wavelength corresponding to the inorganic harmful substance, this atomized analyte absorbs the corresponding amount of analytical light, and the remaining analytical light that has passed through this light emitting part is collected. However, the content of the inorganic harmful substance can be obtained based on the intensity of the light, and the quantitative analysis of the harmful substance can be easily performed with high sensitivity.

According to the analyzer of the second aspect of the present invention, the analysis light irradiating means is an irradiation lamp for irradiating elemental light having a predetermined wavelength, and the object amount detecting means is a collecting lens for taking in the analysis light having passed through the light emitting portion. Since the irradiation lamp and the light-collecting lens are arranged at positions facing each other with respect to the object to be inspected, it is possible to easily carry out quantitative analysis of harmful substances with an inexpensive and simplified device.

According to the analyzer of the third aspect of the present invention, a plurality of sets of the irradiation lamp and the light-collecting lens, which are arranged at a position facing the object to be inspected, are arranged corresponding to a plurality of objects to be analyzed. Therefore, quantitative analysis of a plurality of types of inorganic harmful substances can be simultaneously performed with high sensitivity.

According to the analyzer of the fourth aspect of the present invention, the first condenser lens is arranged between the irradiation lamp and the object to be inspected, and the second condenser lens is arranged between the object to be inspected and the lighting lens. Since the lens is provided, it is possible to reliably irradiate the object to be inspected with light and to surely collect the irradiation light.

According to the analyzer of the fifth aspect of the present invention, since the condenser lens and the concave lens are arranged between the irradiation lamp and the object to be inspected, the diffused light is condensed to be parallel light and the object to be inspected. It is possible to irradiate a wide area, and quantitative analysis of mercury can be performed with high sensitivity.

According to the analyzing apparatus of the invention of claim 6, the analyzing light irradiating means is a white lamp for irradiating the elemental light of a plurality of wavelengths, and the object quantity detecting means is a light collecting lens for taking in the analyzing light passing through the light emitting portion, Since it is a spectroscope that disperses for each analysis light wavelength, and a white lamp and a lighting lens are arranged at positions facing each other with respect to the object to be inspected, by separating the light that has passed through the light emitting unit into a plurality of kinds by the spectroscope, Quantitative analysis of multiple kinds of inorganic harmful substances can be performed simultaneously with high sensitivity.

According to the analyzer of the seventh aspect of the invention, the laser light irradiating means can irradiate the object to be inspected with laser light selected from a plurality of wavelengths, and the object to be inspected is based on the intensity of the light from the light emitting portion. Since the second object amount detecting means for obtaining the amount of the object inside is provided, it is possible to select a plurality of detecting means according to the type of the inorganic harmful substance to be analyzed.

According to the analyzer of the present invention, the first object amount detecting means and the second object amount detecting means can be selectively applied according to the type of the object to be analyzed, and the emission energy is large or the excitation is performed. Since the first target amount detecting means is applied to the element having a low probability and the second target amount detecting means is applied to the other elements, detection is performed according to the type of the inorganic harmful substance to be analyzed. By choosing the means,
The analysis can be performed with high sensitivity and easily.

According to the analyzer of the invention of claim 9,
The object amount detecting means enables detection of the amount of the inorganic harmful substance as the analysis object, and the second object amount detecting means detects the amount of the inorganic harmful substance as the analysis object according to the wavelength irradiated from the laser beam irradiation means or Since it is possible to detect the amount of organic harmful substances, it is possible to quantify inorganic and organic harmful substances with one analyzer and significantly reduce the time to obtain analysis results. be able to.

According to a tenth aspect of the present invention, the analysis method irradiates the object to be inspected with a laser beam having a predetermined wavelength, and the light emitting portion of the object to be inspected by the irradiation of the laser beam is irradiated with light having a wavelength corresponding to the object to be analyzed. While irradiating the sample, the analysis light that passed through the light emitting part was collected and the amount of the analyte in the test object was calculated based on the intensity of this light, which facilitates quantitative analysis of harmful substances with high sensitivity. Can be implemented in.

According to the eleventh aspect of the analysis method of the present invention, in the light emitting portion, the elements constituting the object to be analyzed are atomized by obtaining energy from the laser beam, and each atom returns from the ground state to the excited state and then again. During the process of returning to the atoms in the ground state, the atoms in the ground state absorb the corresponding amount of analytical light and determine the amount of the analyte based on the remaining analytical light. Quantitative analysis can be performed with high sensitivity.

According to the analysis method of the twelfth aspect of the invention, the analysis method of the tenth aspect is applied to an element having a large emission energy or a low excitation probability.
By selecting the detection means according to the type of the inorganic harmful substance to be analyzed, the analysis can be performed with high sensitivity and easily.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an analyzer according to a first embodiment of the present invention.

FIG. 2 is a schematic explanatory diagram of a first object amount detection method.

FIG. 3 is a graph showing the density of elements that are turned into plasma and atomized by laser light irradiation.

FIG. 4 is a graph showing the luminescence intensity of soil containing an inorganic harmful substance.

FIG. 5 is a graph showing the fluorescence intensity of the soil containing the organic harmful substance and the fluorescence intensity of the soil not containing the organic harmful substance.

FIG. 6 is a schematic explanatory diagram of a first object amount detection method in the analyzer according to the second embodiment of the present invention.

FIG. 7 is a schematic explanatory diagram of a first object amount detection method in the analyzer according to the third embodiment of the present invention.

FIG. 8 is a schematic explanatory diagram of a first object amount detection method in an analyzer according to a fourth embodiment of the present invention.

[Explanation of symbols]

11 Laser oscillator (laser light irradiation means) 12 Wavelength adjuster 17 Convex lens 22 Mercury lamp (analysis light irradiation means, irradiation lamp) 23 First condenser lens 24 Second condenser lens 25 Daylighting lens 26a-26d optical fiber 27a-27d wavelength separator 28a-28d Photomultiplier tube (PMT) 29a-29d integrator 30 control unit (first object amount detecting means) 41 Condensing lens 42 concave lens 51-55 irradiation lamp 56-60 First condensing lens 61-65 2nd condensing lens 66-70 daylighting lens 71-75 optical fiber 81 White lamp (analysis light irradiation means, irradiation lamp) 82 First Condensing Lens 83 Second condenser lens 84 Daylighting lens 85 optical fiber 86 Spectrometer 87 Multi-channel detector 88 control unit 101a to 101c Laser light 102a-102e light 103 light A sample

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Makio Atsumi             2-8-19 Niihama, Arai-cho, Takasago-shi, Hyogo             Takaryo Engineering Co., Ltd. F-term (reference) 2G043 AA01 BA04 BA05 BA14 CA03                       CA05 DA04 EA01 FA06 GA01                       GB01 HA01 HA02 HA05 JA01                       KA01 KA02 KA03 KA05 KA09                       LA02 LA03                 2G059 AA01 BB04 BB08 CC02 CC12                       DD11 EE01 EE06 EE12 GG01                       GG10 HH01 HH02 HH03 HH06                       JJ01 JJ07 JJ11 JJ13 JJ17                       KK02 KK04 NN06

Claims (12)

[Claims] 1. A laser beam irradiating means for irradiating an object to be inspected with a laser beam having a predetermined wavelength, and a light emitting part of the object to be inspected by the irradiation of the laser beam with light of a wavelength corresponding to the object to be analyzed. An analysis light irradiating means for irradiating the light and a first object amount detecting means for obtaining an amount of the analysis object in the inspection object based on the intensity of the analysis light having passed through the light emitting part are provided. Analysis equipment. 2. The analyzing light irradiating means according to claim 1, wherein the analyzing light irradiating means has an irradiation lamp for irradiating the elemental light having a predetermined wavelength, and the object quantity detecting means takes in the analyzing light having passed through the light emitting section. And an illumination lamp and the lighting lens, which are arranged at positions facing each other with respect to the object to be inspected. 3. The set according to claim 2, wherein a plurality of sets of the irradiation lamp and the lighting lens arranged at a position facing the object to be inspected are provided corresponding to a plurality of analytes. An analyzer characterized by. 4. The first condenser lens is arranged between the irradiation lamp and the object to be inspected, and the second condensing lens is provided between the object to be inspected and the lighting lens. An analysis device having a lens. 5. The analyzer according to claim 2, wherein a condenser lens and a concave lens are provided between the irradiation lamp and the object to be inspected. 6. The collecting lens according to claim 1, wherein the analysis light irradiating means has a white lamp for irradiating elemental light having a plurality of wavelengths, and the object amount detecting means takes in the analysis light having passed through the light emitting section. And an analyzer that has a spectroscope for separating the wavelengths of the analysis light, and the white lamp and the lighting lens are arranged at positions facing each other with respect to the object to be inspected. 7. The object to be inspected according to claim 1, wherein the laser beam irradiating means is capable of irradiating an object to be inspected with a laser beam selected from a plurality of wavelengths. 2. An analysis device, comprising: a second object amount detecting means for obtaining the amount of the object. 8. The method according to claim 7, wherein the first object amount detecting means and the second object amount detecting means can be selectively applied according to the type of the object to be analyzed, and the emission energy is large or the excitation probability is high. An analyzing apparatus, wherein the first object amount detecting means is applied to a low element, and the second object amount detecting means is applied to other elements. 9. The method according to claim 7, wherein the first object amount detecting means is capable of detecting an amount of an inorganic harmful substance as the analysis object, and the second object amount detecting means is the laser beam irradiation. An analyzer which is capable of detecting the amount of an inorganic harmful substance or an organic harmful substance as the analysis object according to the wavelength irradiated from the means. 10. An object to be inspected is irradiated with laser light having a predetermined wavelength, and light having a wavelength corresponding to the object to be analyzed is irradiated to a light emitting portion of the object to be inspected by the irradiation of the laser light. An analysis method, which comprises collecting the analysis light that has passed through a light emitting unit and determining the amount of the analysis target in the inspection object based on the intensity of the light. 11. The element according to claim 10, wherein the element constituting the analyte is atomized by obtaining energy from the laser light in the light emitting section, and each atom returns to a ground state from an excited state to a ground state again. An analysis method, characterized in that, during the process of returning to the atom in the state, the atom in the ground state absorbs a corresponding amount of the analysis light, and the amount of the analyte is obtained based on the remaining analysis light. 12. An analysis method, wherein the analysis method according to claim 10 is applied to an element having a large emission energy or a low excitation probability.