JP2001291650A - Semiconductor equipment and its maintenance method, and method for manufacturing semiconductor device and semiconductor manufacturing plant - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem where abnormality occurs in a semiconductor equipment and an error message frequently cannot be sent to a host computer, when the semiconductor equipment receives a command from the host computer and it will not respond for a long time thereafter, and accordingly, the host computer cannot detect the abnormal state of the semiconductor equipment, complete a sequential operation, and start the following processing, so that the productivity is greatly reduced because of long-lasting down time of the equipment. SOLUTION: A means for detecting the abnormality state of a semiconductor equipment is provided, and a detection time is set corresponding to the function of the respective devices, under the instruction of the equipment or host computer, so as to detect their state. The detection means can inform the host computer of the detected result. In addition, a maintenance method for the equipment utilizing a network, a method for manufacturing semiconductor devices, and a semiconductor manufacturing plant are provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus, a maintenance method thereof, a semiconductor device manufacturing method and a semiconductor manufacturing factory using the same. More specifically, the same semiconductor manufacturing apparatus that can be connected to a host computer that controls the semiconductor manufacturing apparatus by exchanging information with the same semiconductor manufacturing apparatus in a computer or a computer network, and a method for maintaining the same using a network,
The present invention relates to a semiconductor device manufacturing method and a semiconductor manufacturing factory.

[0002] The "semiconductor manufacturing apparatus" here means
Semiconductor manufacturing equipment for various processes used in semiconductor manufacturing factories, for example, pre-processing equipment (lithography equipment such as exposure equipment, resist processing equipment, etching equipment, heat treatment equipment, film forming equipment, flattening equipment, etc.) and post-processing Equipment (assembly equipment, inspection equipment, etc.). The “semiconductor device” here includes a semiconductor chip such as an IC or an LSI, a liquid crystal panel, a CCD, a thin-film magnetic head, and a micromachine.

[0003]

2. Description of the Related Art In recent years, semiconductor manufacturing plants have been brought online, and semiconductor manufacturing equipment has become increasingly SEMI (Semiconductor Equivalent).
It is increasingly connected to an on-line control / monitoring system of a host computer in a semiconductor factory via a protocol (SECS-I / SECS-II) conforming to Pment and Material International). In addition, conventional RS-23
Ethernet (registered trademark) and TCP / IP instead of the combination of 2C (American Electronic Industries Association) and SECS-I
(Transmission Control Protocol / Internet Protoco
l) and HSMS (Highspeed SECS Message Services)
By using a combination of these, a large size and a large number of messages are frequently transferred continuously at high speed.

Conventionally, a factory host computer that manages a semiconductor manufacturing apparatus normally transmits an operation of the semiconductor manufacturing apparatus manually input by an operator to each semiconductor manufacturing apparatus as a remote command via the above-described communication means. . For outgoing messages from the host computer,
If necessary, semiconductor manufacturing equipment that has an interface that supports a protocol that returns a reply message, when receiving and replying to a remote command message, etc., determines whether remote command execution is currently possible, Is transmitted to the host computer, and when the actual processing indicated by the remote command is completed, the fact that the processing is completed and the execution result of the processing are transmitted to the host computer. Upon completion of the processing, the host computer determines the next required processing based on the completion or the execution result, and starts execution.

[0005]

However, there are cases where the semiconductor manufacturing apparatus that has received the remote command does not respond to the host computer that the operation has been completed even after a long time has passed. In such a case, it is often impossible to transmit any error message to the host because some abnormal situation has occurred on the semiconductor manufacturing apparatus side. For this reason, the host cannot detect an abnormal situation on the semiconductor manufacturing apparatus side, and since the series of operations has not been completed, the next processing is not performed, and the semiconductor manufacturing apparatus remains stopped for a long time and the semiconductor manufacturing process continues. Productivity had declined significantly.

[0006]

In order to solve the above-mentioned problems, the present invention provides a semiconductor manufacturing apparatus and / or a host computer provided with the following function for detecting an abnormality of the semiconductor manufacturing apparatus. .

After the host computer sends a remote command to the semiconductor manufacturing apparatus, the host computer receives a report of the start of processing from the semiconductor manufacturing apparatus where the actual processing is performed, and then receives the remote processing command from the semiconductor manufacturing apparatus which has performed the actual processing. A function is provided in which a timeout is provided in the time until the report of the end of the process is received, and a device abnormality is detected when the timeout occurs (see FIG. 2); or, after the computer transmits a remote command to the semiconductor manufacturing device, No abnormal situation has occurred in the semiconductor manufacturing equipment from the reception of the report of the processing start from the semiconductor manufacturing equipment in which the actual processing is performed to the reception of the report of the processing end from the semiconductor manufacturing equipment in which the actual processing is performed. Sends an inquiry to the semiconductor manufacturing equipment at regular intervals and informs the equipment of the abnormality by the response. Or obtaining the results, or provided with a function of detecting device abnormality (see FIG. 4) in that there is no response.

During the execution of a remote command, the semiconductor manufacturing apparatus monitors the operation status of internal units constituting the apparatus at regular intervals, and immediately detects an abnormality such as no response from the internal unit. A function of transmitting an error message to the computer (see FIG. 3); or, in response to an inquiry from the host computer as to whether an abnormal situation has occurred, determine the operation status of the internal unit constituting the device, and respond to the internal unit. When an abnormality such as absence is detected, a function (see FIG. 4) for notifying the host computer of the content of the abnormal state as an inquiry result is provided.

That is, a first semiconductor manufacturing apparatus of the present invention is an online-compatible semiconductor manufacturing apparatus connected to an online control and monitoring system using a host computer, wherein a state for detecting an abnormal state of the semiconductor manufacturing apparatus is provided. It has a detecting means, and the state detecting means can detect a state by setting different detection times according to each operation purpose of the semiconductor manufacturing apparatus under the initiative of the semiconductor manufacturing apparatus.

A second semiconductor manufacturing apparatus according to the present invention is an online-compatible semiconductor manufacturing apparatus which is connected to an online control and monitoring system using a host computer, and detects an abnormal state of the semiconductor manufacturing apparatus. Means for detecting the state when the host computer sets the detection time different according to each operation purpose of the semiconductor manufacturing apparatus under the initiative of the host computer. It is characterized by becoming.

In a third semiconductor manufacturing apparatus according to the present invention, in the first or second online-compatible semiconductor manufacturing apparatus, the status detection means reports a result of the detection to the host computer in accordance with the detected status. It is characterized by having means for performing.

Further, according to a first method of manufacturing a semiconductor device of the present invention, a step of installing a semiconductor manufacturing apparatus group for various processes including any one of the above semiconductor manufacturing apparatuses in a semiconductor manufacturing factory, and using the manufacturing apparatus group Manufacturing a semiconductor device by a plurality of processes.

According to a second method of manufacturing a semiconductor device of the present invention, in the first method, the step of connecting the group of manufacturing apparatuses via a local area network includes the step of connecting the local area network to an external network outside the semiconductor manufacturing plant. And data communication of information on at least one of the manufacturing apparatuses.

According to a third method of manufacturing a semiconductor device of the present invention, in the second method, a database provided by a vendor or a user of the manufacturing apparatus is accessed via the external network to maintain the manufacturing apparatus by data communication. Information is obtained, or production control is performed by communicating data with the semiconductor manufacturing plant different from the semiconductor manufacturing plant via the external network.

The semiconductor manufacturing plant of the present invention comprises
3) a semiconductor manufacturing equipment group for various processes including any one of the semiconductor manufacturing equipments of (3), a local area network connecting the manufacturing equipment groups, and a gateway for enabling the local area network to access an external network outside the factory. Then, it is possible to perform data communication of information on at least one of the manufacturing apparatus groups.

The maintenance method of a semiconductor manufacturing apparatus according to the present invention is any one of the first to third semiconductor manufacturing apparatuses installed in a semiconductor manufacturing factory, wherein a vendor or a user of the manufacturing apparatus Providing a maintenance database connected to an external network of the semiconductor manufacturing plant; allowing access to the maintenance database from within the semiconductor manufacturing plant via the external network; and storing the maintenance database in the maintenance database. Transmitting the maintenance information to the semiconductor manufacturing factory via the external network.

Further, a fourth semiconductor manufacturing apparatus according to the present invention comprises:
In any one of the first to third semiconductor manufacturing apparatuses, the apparatus further includes a display, a network interface, and a computer that executes network software, and performs data communication of maintenance information of the semiconductor manufacturing apparatus via a computer network. It is possible.

In a fifth semiconductor manufacturing apparatus according to the present invention, in the fourth semiconductor manufacturing apparatus, the network software is connected to an external network of a factory where the semiconductor manufacturing apparatus is installed, and is connected to a vendor or user of the semiconductor manufacturing apparatus. It is possible to provide a user interface on the display for accessing the maintenance database provided by the user, and obtain information from the database via the external network.

[0019]

According to the present invention, even if any abnormal situation occurs on the semiconductor manufacturing apparatus side, the abnormality of the semiconductor manufacturing apparatus is detected by an instruction from the host computer or the spontaneous operation of the semiconductor manufacturing apparatus. By transmitting an error message from the manufacturing apparatus to the host computer, it is possible to prevent a long-time stop state, and thus prevent a decrease in productivity in the semiconductor manufacturing process.

[0020]

[Embodiment] <Embodiment of online-compatible semiconductor manufacturing apparatus>
FIG. 1 is a block diagram showing a system configuration of an online-compatible semiconductor manufacturing apparatus (for example, a semiconductor exposure apparatus) according to one embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a host computer group (A to A) that accommodates an online system in a factory.
B), and are connected to the semiconductor manufacturing equipment group 2 (A and B) in the factory by the SECS or HSMS protocol. The online control / monitoring system of the semiconductor manufacturing equipment group 2 is housed in the host computer 1 via the Ethernet 3 or the RS232C line 4. The Ethernet communication network 3 is laid to perform LAN communication in the factory. As a form of the Ethernet communication network 3,
10BASE-2 / 5 using coaxial cable and 10BASE-T connected in a star shape using twisted pair wires
Are widely spread. As a protocol between the host computer and the semiconductor manufacturing apparatus in the Ethernet communication network 3, HSMS using TCP / IP as a lower layer is used. In general, in the Ethernet communication network 3,
In many cases, transmission and reception are also performed simultaneously by a protocol other than TCP / IP. The RS232C communication line 4 connects the host computer A and the semiconductor manufacturing apparatus A or B on a one-to-one basis. The host computer 1 and the semiconductor manufacturing device 2 communicate with each other via the RS232C communication line 4 according to the SECS-I protocol. The RS232C communication line 4 is
In some cases, a plurality of serial lines are bundled by a multiplexer (line multiplexing device) on the way.

FIG. 2 is a flowchart illustrating a comprehensive embodiment of the online system according to the present invention using the SECS-II protocol. Host computer 1
Transmits a COMM1 command to the semiconductor manufacturing apparatus 2 (S11), the semiconductor manufacturing apparatus 2 determines whether the COMM1 command is in an executable state (S12), and returns the success or failure to the host computer 1 (S13). . If it is determined that the process is executable, the semiconductor manufacturing apparatus 2
The execution of the OMM1 command is started (S14). Also,
Until execution of the COMM1 command ends normally, a procedure process for activating a process T31 for determining an abnormality of the semiconductor manufacturing apparatus 2 by a timer interrupt is also performed (S14). After the end, information such as the time when the COMM1 command execution is started is transmitted to the host computer 1 (S15). Upon receiving this, the host computer 1 knows the start time of the COMM1 command (S16), and after a lapse of a certain value, starts a process T41 for judging whether the COMM1 command has completed normally within the specified time or has timed out. Procedure processing is performed (S16). The timer time at this time differs depending on the command. Thereafter, in each of the host computer 1 and the semiconductor manufacturing apparatus 2, the timer interrupt processing T 41, T 31, T 31
If the COMM1 command ends normally after the above, the semiconductor manufacturing apparatus 2 totals and edits the end result data of the COMM1 command (S18), and reports the end result data to the host computer 1 (S19). The host computer 1 acquires the COMM1 command end result data (S20), and proceeds to the next necessary processing.

FIG. 3 is a flowchart for explaining an embodiment of the present invention relating to the timer interrupt processing T31 of the semiconductor manufacturing apparatus 2 mentioned above using the SECS-II protocol. First, a timer interrupt T31 is generated inside the semiconductor manufacturing apparatus 2 by the procedure of the timer interrupt generation procedure (S14). It is determined whether or not the COMM1 command has already been completed and the result data has been transmitted to the host computer 1. If it has been completed, it is determined that the COMM1 command has been normally completed and the process proceeds to the next processing (S31). If not, the process proceeds to a process of testing whether the device is in an abnormal state (S32). As a result of the test, if no abnormality has occurred, a procedure for re-generating this series of timer interrupt processing T31 is performed (S33), and the process proceeds to the next processing. If the occurrence of an abnormality is recognized, the occurrence of the abnormality is reported to the host computer 1 (S3).
4). When the host computer 1 receives this and determines that the semiconductor manufacturing apparatus 2 is in an abnormal state, it performs recovery processing such as notifying the factory operator (S35). If it is not determined that there is an abnormal situation, the process proceeds to the next process without performing the recovery process (S36).

FIG. 4 is a flowchart for explaining an embodiment of the present invention relating to the timer interrupt processing T41 of the host computer 1 using the SECS-II protocol. First, a timer interrupt T41 is generated inside the host computer 1 by the procedure of the timer interrupt generation procedure (S16). It is determined whether the COMM1 command has already been completed and the result data has already been received from the semiconductor manufacturing apparatus 2.
The process proceeds to the next step assuming that the OMM1 command has been completed (S41). If not, the elapsed time from the time when the COMM1 command is started to the present time is calculated, and the COMM1 command is calculated.
It is determined whether or not a timeout has occurred by comparing the default timeout value for one command (S42). If it is timed out, error processing for COMM1 command failure is performed (S43), it is determined that the semiconductor manufacturing apparatus 2 is in an abnormal state, and it is determined that recovery processing is necessary, recovery processing is performed (S48), and the next processing is performed. Proceed to. If the timeout has not occurred, the semiconductor manufacturing apparatus 1 is inquired as to whether an abnormal state has occurred (S44). The semiconductor manufacturing apparatus 2 performs a process of verifying whether the apparatus is in an abnormal state (S45). This is the same processing as in S32 described above. The semiconductor manufacturing apparatus 2 sends the abnormality test result to the host computer 1
Reply to. If the verification result indicates that an abnormal situation has occurred in the semiconductor manufacturing apparatus 2 (S46), error processing for COMM1 command failure is performed, recovery processing such as notifying an operator in the factory is performed (S48), and the process proceeds to the next processing. . Alternatively, if no abnormal situation of the semiconductor manufacturing apparatus 2 is found in the test result (S47), a procedure for regenerating this series of timer interrupt processing T41 is performed (S49), and the process proceeds to the next processing. .

<Example of Semiconductor Production System> Next, an example of a semiconductor device production system will be described. In this system, maintenance services such as troubleshooting and periodic maintenance of a manufacturing apparatus installed in a semiconductor manufacturing factory or provision of software are performed using a computer network outside the manufacturing factory.

FIG. 5 shows the entire system cut out from a certain angle. In the figure, reference numeral 101 denotes a vendor that supplies a semiconductor device manufacturing apparatus (apparatus supplier).
Is a business establishment. Examples of manufacturing equipment include semiconductor manufacturing equipment for various processes used in semiconductor manufacturing factories, for example, pre-processing equipment (lithography equipment such as exposure equipment, resist processing equipment, etching equipment, heat treatment equipment, film formation equipment, planarization). Equipment) and post-process equipment (assembly equipment, inspection equipment, etc.). A host management system 1 that provides a maintenance database for manufacturing equipment in the business office 101
08, a plurality of operation terminal computers 110, and a local area network (LAN) 109 connecting these to construct an intranet. Host management system 1
Reference numeral 08 includes a gateway for connecting the LAN 109 to the Internet 105, which is an external network of the business office 101, and a security function for restricting external access.

On the other hand, reference numerals 102 to 104 denote manufacturing factories of a semiconductor device manufacturer as a user of the manufacturing apparatus.
The manufacturing factories 102 to 104 may be factories belonging to different manufacturers or factories belonging to the same manufacturer (for example, a factory for a pre-process, a factory for a post-process, etc.). In each of the factories 102 to 104, a plurality of manufacturing apparatuses 106 and a local area network (LAN) 111 connecting them to construct an intranet are provided.
And a host management system 107 as a monitoring device for monitoring the operation status of each manufacturing apparatus 106. Host management system 1 provided in each factory 102 to 104
Reference numeral 07 includes a gateway for connecting the LAN 111 in each factory to the Internet 105 which is an external network of the factory. As a result, access to the host management system 108 on the vendor 101 side from the LAN 111 of each factory via the Internet 105 is possible, and only a limited user is permitted access by the security function of the host management system 108. Specifically, each manufacturing apparatus 1 is connected via the Internet 105.
In addition to notifying the vendor of the status information (for example, the symptom of the manufacturing apparatus in which the trouble has occurred) indicating the operation status of No. 06, the response information (for example,
(Information instructing how to cope with a trouble, software and data for coping), and maintenance information such as the latest software and help information can be received from the vendor side. For data communication between the factories 102 to 104 and the vendor 101 and data communication on the LAN 111 in each factory, a communication protocol (TCP / IP) generally used on the Internet is used. Instead of using the Internet as an external network outside the factory, it is also possible to use a dedicated line network (such as ISDN) that cannot be accessed by a third party and has high security. In addition, the host management system 108 is not limited to the one provided by the vendor, and a user may construct a database and place it on an external network, and allow a plurality of factories of the user to access the database.

FIG. 6 is a conceptual diagram showing the entire system according to the present embodiment cut out from a different angle from FIG. In the above example, a plurality of user factories each having a manufacturing device and a management system of a vendor of the manufacturing device are connected via an external network, and the production management of each factory and at least one device are connected via the external network. The data of the manufacturing apparatus was communicated. In contrast, this example
A factory provided with manufacturing apparatuses of a plurality of vendors is connected to a management system of each vendor of the plurality of manufacturing apparatuses via an external network outside the factory, and data communication of maintenance information of each manufacturing apparatus is performed. In the figure, reference numeral 201 denotes a manufacturing factory of a manufacturing apparatus user (semiconductor device maker). A plurality of manufacturing apparatuses performing various processes, for example, an exposure apparatus 202, a resist processing apparatus 203, and a film forming apparatus are provided on a manufacturing line of the factory. 204 have been introduced. Although only one manufacturing factory 201 is illustrated in FIG. 6, a plurality of factories are actually networked similarly. Each device in the factory is connected by a LAN 206 to form an intranet, and the host management system 205 manages the operation of the production line. On the other hand, the exposure apparatus maker 210,
Resist processing equipment maker 220, deposition equipment maker 2
Each of the offices of vendors (equipment suppliers) such as 30 has host management systems 211, 221, and 231 for remote maintenance of the supplied equipment. These host management systems are connected to the maintenance database and the external network as described above. It has a gateway. The host management system 205 that manages each device in the user's manufacturing plant and the management systems 211, 221, and 231 of the vendors of each device are connected by the external network 200, ie, the Internet or a dedicated line network. In this system, if a trouble occurs in any of a series of manufacturing equipment in the manufacturing line, the operation of the manufacturing line is stopped, but remote maintenance is performed from the vendor of the troubled equipment via the Internet 200. As a result, quick response is possible, and downtime of the production line can be minimized.

Each of the plurality of manufacturing apparatuses installed in the semiconductor manufacturing factory includes a display, a network interface, and a computer that executes network access software and apparatus operation software stored in a storage device. The storage device is a built-in memory, a hard disk, a network file server, or the like. The network access software includes a dedicated or general-purpose web browser,
For example, a user interface having a screen as shown in FIG. 7 is provided on the display. The operator who manages the manufacturing apparatus in each factory refers to the screen and refers to the manufacturing apparatus model (401), serial number (402), trouble subject (403), date of occurrence (404), urgency (405), Information such as a symptom (406), a coping method (407), and a progress (408) is input to input items on the screen. The input information is transmitted to the maintenance database via the Internet, and the resulting appropriate maintenance information is returned from the maintenance database and presented on the display. The user interface provided by the web browser further includes a hyperlink function (410 to 41) as shown in the figure.
2), the factory operator can access more detailed information on each item, extract the latest version of software used for manufacturing equipment from the software library provided by the vendor, and provide an operation guide ( Help information). Here, the maintenance information provided by the maintenance database includes information related to the above-described state detection mechanism for detecting an abnormal state of the semiconductor manufacturing apparatus of the present invention, and the software library includes the latest information for realizing state detection. Software is also provided.

Next, a manufacturing process of a semiconductor device using the above-described production system will be described. FIG. 8 shows the flow of the whole semiconductor device manufacturing process. In step 1 (circuit design), the circuit of the semiconductor device is designed. Step 2 is a process for making a mask on the basis of the circuit pattern design. Step 3
In (wafer manufacture), a wafer is manufactured using a material such as silicon. Step 4 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by lithography using the prepared mask and wafer. The next step 5 (assembly) is called a post-process, and is a process of forming a semiconductor chip using the wafer produced in step 4, and assembly such as an assembly process (dicing and bonding) and a packaging process (chip encapsulation). Process. In step 6 (inspection), inspections such as an operation confirmation test and a durability test of the semiconductor device manufactured in step 5 are performed. Through these steps, a semiconductor device is completed and shipped (step 7). The pre-process and the post-process are performed in separate dedicated factories, and maintenance is performed for each of these factories by the above-described remote maintenance system. Further, information for production management and apparatus maintenance is also communicated between the pre-process factory and the post-process factory via the Internet or a dedicated line network.

FIG. 9 shows the wafer process (step 4).
The detailed flow of is shown. Step 11 (oxidation) oxidizes the wafer's surface. Step 12 (CVD) forms an insulating film on the wafer surface. Step 13 (electrode formation) forms electrodes on the wafer by vapor deposition. In step 14 (ion implantation), ions are implanted into the wafer. In step 15 (resist processing), a photosensitive agent is applied to the wafer. In step 16 (exposure), the circuit pattern of the mask is printed on the wafer by exposure using the exposure apparatus of the present invention described above. Step 17 (development) develops the exposed wafer. In step 18 (etching), portions other than the developed resist image are removed. Step 19
In (resist removal), unnecessary resist after etching is removed. By repeating these steps, multiple circuit patterns are formed on the wafer. Since the manufacturing equipment used in each process is maintained by the remote maintenance system described above, troubles can be prevented beforehand, and if troubles occur, quick recovery is possible. Productivity can be improved.

[0031]

As described above, according to the present invention,
Even if a semiconductor manufacturing apparatus such as a semiconductor exposure apparatus has some kind of abnormal situation, the abnormality of the semiconductor manufacturing apparatus is detected by an instruction from the host computer or a spontaneous operation of the semiconductor manufacturing apparatus, and the semiconductor manufacturing apparatus sends the abnormality to the host computer. By transmitting the error message, it is possible to prevent a long-time stop state and improve the actual operation rate of the manufacturing apparatus.

Further, since the semiconductor manufacturing apparatus of the present invention is online-compatible, it is possible to provide a maintenance method, a semiconductor device manufacturing method, and a semiconductor manufacturing factory for the semiconductor manufacturing apparatus using not only a network in the semiconductor manufacturing factory but also an external network.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an online system including a semiconductor manufacturing apparatus of the present invention.

FIG. 2 is an explanatory diagram of a comprehensive embodiment of an online system according to the present invention.

FIG. 3 is an explanatory diagram of an embodiment of a semiconductor device-side timer interrupt process according to the present invention.

FIG. 4 is an explanatory diagram of an embodiment of a host computer-side timer interrupt process according to the present invention.

FIG. 5 is a conceptual view of a semiconductor device production system according to the present invention as viewed from a certain angle.

FIG. 6 is a conceptual diagram of the semiconductor device production system according to the present invention as viewed from another angle.

FIG. 7 is a specific example of a user interface of the semiconductor manufacturing apparatus of the present invention.

FIG. 8 is a flowchart of a semiconductor device manufacturing process according to the present invention.

FIG. 9 shows a wafer process (step 4) according to the present invention.
It is a detailed flow of.

[Explanation of symbols]

1: Host computer group 2: Semiconductor manufacturing equipment group
3: Ethernet communication network, 4: RS232C communication line,
101, 210, 220, 230: Office of a semiconductor device manufacturing equipment vendor, 102 to 104, 201: Manufacturing factory of a semiconductor device manufacturer as a manufacturing equipment user, 105, 200: Internet, 106, 202
To 204: each manufacturing apparatus, 107, 205: host management system on the manufacturing factory side, 108, 211, 221, 23
1: host management system on the vendor side; 109: LAN connecting a plurality of operation terminals 110; 110: operation terminal computer; 111: LAN connecting a plurality of manufacturing apparatuses 106.

Claims (10)

[Claims] 1. An online-compatible semiconductor manufacturing apparatus connected to an online control and monitoring system using a host computer, comprising: a state detecting means for detecting an abnormal state of the semiconductor manufacturing apparatus; However, under the initiative of the semiconductor manufacturing apparatus, an on-line compatible semiconductor manufacturing apparatus characterized in that different detection times can be set according to each operation purpose of the semiconductor manufacturing apparatus to detect a state. 2. An on-line semiconductor manufacturing apparatus connected to an on-line control and monitoring system using a host computer, the apparatus comprising: state detecting means for detecting an abnormal state of the semiconductor manufacturing apparatus; An online-compatible semiconductor, characterized in that, under the initiative of the host computer, a state can be detected when making an inquiry from the host computer after setting different detection times according to each operation purpose of the semiconductor manufacturing apparatus. manufacturing device. 3. The apparatus according to claim 1, wherein said state detecting means has means for reporting a result of the detected state to the host computer in accordance with the detected state.
The online-compatible semiconductor manufacturing apparatus described in the above. 4. A step of installing a semiconductor manufacturing apparatus group for various processes including the semiconductor manufacturing apparatus according to claim 1 in a semiconductor manufacturing factory, and performing a plurality of processes using the manufacturing apparatus group. A method of manufacturing a semiconductor device. 5. A step of connecting the group of manufacturing apparatuses via a local area network, and data communication between at least one of the group of manufacturing apparatuses between the local area network and an external network outside the semiconductor manufacturing plant. 5. The method of claim 4, further comprising the step of: 6. A semiconductor manufacturing plant different from the semiconductor manufacturing plant by accessing a database provided by a vendor or a user of the manufacturing device via the external network to obtain maintenance information of the manufacturing device by data communication. 6. The method according to claim 5, wherein the production management is performed by data communication with the external network via the external network. 7. A group of semiconductor manufacturing apparatuses for various processes including the semiconductor manufacturing apparatus according to claim 1.
A local area network connecting the group of manufacturing apparatuses, and a gateway that enables the local area network to access an external network outside the factory;
A semiconductor manufacturing factory, capable of performing data communication of information on at least one of the manufacturing apparatus groups. 8. The semiconductor device according to claim 1, which is installed in a semiconductor manufacturing plant.
3. The method for maintaining a semiconductor manufacturing apparatus according to any one of claims 3, wherein a vendor or a user of the manufacturing apparatus provides a maintenance database connected to an external network of the semiconductor manufacturing factory; A step of permitting access to the maintenance database via the external network, and a step of transmitting maintenance information stored in the maintenance database to the semiconductor manufacturing factory via the external network. Maintenance method for semiconductor manufacturing equipment. 9. The semiconductor manufacturing apparatus according to claim 1, further comprising a display, a network interface, and a computer for executing network software, wherein maintenance information of the semiconductor manufacturing apparatus is stored in a computer network. A semiconductor manufacturing apparatus capable of performing data communication via a computer. 10. The network software,
The semiconductor manufacturing apparatus is connected to an external network of a factory where the semiconductor manufacturing apparatus is installed, and a user interface for accessing a maintenance database provided by a vendor or a user of the semiconductor manufacturing apparatus is provided on the display, and the database is provided through the external network. The semiconductor manufacturing apparatus according to claim 9, wherein information can be obtained from the device.