JP2001096123A - Air washer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air washer performing humidification high in saturation efficiency, certainly removing dust or harmful gas in air, suppressing the jet amt. of water to reduce pump power and capable of reducing the outer dimension of an apparatus. SOLUTION: An air washer is equipped with the first washer medium 54a arranged to the air inlet 53a of a water spraying chamber 53, the second washer medium 54b arranged to the air outlet 53b of the water spraying chamber 53, the metal net 55 arranged in parallel to the first washer medium 54a at the position on the downstream side of the first washer medium 54a, the nozzles 56 positioned on the downstream side of the wires netting 55 and spraying water in the direction reverse to an air flow so as to allow the same to reach the first washer medium 54a, the water tank 58 positioned in the water spraying chamber 53 to receiving flowing-down sprayed water and a circulating water supply system 59 for circulating and supplying the circulating water in the water tank 58 to the nozzles 56.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air conditioner in a semiconductor factory or the like, and more particularly to an air washer that removes dust and harmful gas from the air and performs humidification with high saturation efficiency.

[0002]

2. Description of the Related Art Conventional air washers include those shown in FIGS. 13 to 15, the air washer 11 has a water spray chamber 13 having a predetermined length inside a main body casing 12 having a rectangular flow path cross section. The water spray chamber 13 is connected to a duct (not shown) at an air inlet 13a formed at one end thereof.
The air A flowing from the duct passes through the flow path of the water spray chamber 13 and flows out of the air outlet 13b formed at the other end.

[0003] In the water spray chamber 13, a first washer medium 14 is disposed at an air inlet 13a.
b, a second washer media 15 is arranged. Each of the washer media 14 and 15 has a shape substantially equal to the cross-section of the flow path of the air flow, and is made of polyvinyldene chloride fiber, stainless steel wire, or the like. , For example, 25 mm to 5
It is a mat having a thickness of about 0 mm.

In the water spray chamber 13, a plurality of first-stage nozzles 16 communicating with a circulating water supply system to be described later are disposed downstream of the first washer media 14, and a supply water supply to be described later is provided. A plurality of second stage nozzles 17 communicating with the system are arranged at substantially the same positions as the first stage nozzles 16. The first stage nozzle 16 sprays the spray water reaching the first washer media 14 in the direction opposite to the air flow, and the second stage nozzle 17 sprays the second washer in the forward direction with the air flow. The spray water is sprayed on the medium 15.

A water storage tank 18 is provided below the water spray chamber 13 for receiving the spray water flowing down. A circulating water supply system 19 for circulating the circulating water staying in the water storage tank 18 to the first stage nozzle 16 is provided. It is provided in communication with the lower part of the water spray chamber 13. The circulating water supply system 19 includes a suction pipe 20 opening at a lower part of the water storage tank 18 and a circulating pump 21 connected to the suction pipe 20.
, A motor 22 for driving the circulation pump 21, a first-stage discharge pipe 23 connected to the discharge port of the circulation pump 21 and disposed above the water spray chamber 13, and water branched from the first-stage discharge pipe 23. A plurality of first-stage branch pipes 24 are provided in the spray chamber 12 in the vertical direction, and each of the first-stage branch pipes 24 is provided with the plurality of first-stage nozzles 16 described above.

[0006] A makeup water supply system 25 for supplying pure water as makeup water to the second stage nozzle 17 is connected to a clean water supply device (not shown) or a pure water supply device (not shown), and is connected to a water spray chamber. 13 and a water supply pipe 26 disposed above the water supply pipe 2.
6 is provided with the plurality of second-stage nozzles 17 described above. An overflow pipe 28 and a second makeup water supply pipe 29 for supplying clean water as makeup water communicate with the water storage tank 18, and the second makeup water supply pipe 29 communicates with a clean water supply device (not shown). ing.

Downstream of the water spray chamber 13 is a water spray chamber 13
An eliminator 30 that removes water droplets and the like contained in the air that has passed through is provided, and an air outlet 13 b of the water spray chamber 13 is provided.
Is connected to a cooling chamber 31 of a predetermined length having the same channel cross-sectional shape as the water spray chamber 13. A cooling coil 32 is provided inside the cooling chamber 31 as a cooler.
A drain pan 33 is formed below 1. A drain pipe 34 communicating with the outside of the cooling chamber 31 is connected to the recess of the drain pan 33. A blower (not shown) is disposed downstream of the water spray chamber 13, and the blower is operated to guide air to the flow path of the water spray chamber 13.

[0008]

In the above-described air washer, the spray water sprayed from the first stage nozzle 16 collides with dust or harmful gas in the air, and the dust or harmful gas in the colliding air is sprayed with the spray water. With the first washer media 14
, The first washer media 14 catches the spray water with dust and harmful gas. The contact efficiency between the spray water and dust or harmful gas in the air increases as the spray water becomes finer, and the removal efficiency improves.

The present invention has been made to solve the above-mentioned problem, and performs humidification with high saturation efficiency, reliably removes dust and harmful gas from the air, and reduces the amount of fountain water to reduce pump power. An object of the present invention is to provide an air washer capable of reducing the external dimensions of the device.

[0010]

According to another aspect of the present invention, there is provided an air washer having an air inlet and an air outlet, wherein an air flow from the air inlet to the air outlet is provided. , A first washer media disposed at an air inlet of the water spray chamber, a second washer media disposed at an air outlet of the water spray chamber, and a first washer at a position downstream of the first washer media. A wire mesh placed in parallel with the media, a nozzle located downstream of the wire mesh and spraying spray water reaching the first washer media in a direction opposite to the air flow, and a spray located in the water spray chamber and flowing down It is configured to have a water storage tank for receiving water and a circulating water supply system for circulating water in the water storage tank to circulate the water to the nozzle.

[0011] With the above configuration, the air from the water storage tank is sprayed from the nozzle against the air flow flowing from the air inlet of the water spray chamber through the first washer media so as to oppose the flow. Spray water (especially large particles)
It collides with the wire netting and becomes fine particles due to the impact, thereby improving the contact efficiency with dust and harmful gas in the air. Part of the dust and harmful gas in the air that has collided with the fine particles of the spray water reaches the first washer media together with the spray water, and the first washer media captures the spray water with the dust and the harmful gas. First
The spray water that has reached the washer media rinses away dust adhering to the first washer media, flows down, takes in harmful gas, flows into the water storage tank, evaporates in the process of flowing down, and humidifies the air.

Part of the fine particles of the spray water that have not collided with the first washer medium collide with the ceiling surface, wall surface, or water storage surface of the water spray chamber, but otherwise move with the air flow and move in the process. And humidifies the air, takes in dust and harmful gas in the air, reaches the second washer media, and the second washer media captures spray water accompanied by dust and harmful gas. The circulating water staying in the water storage tank circulates through the circulating water supply system and is sprayed again from the nozzle.

As described above, the spray water sprayed from the first-stage nozzle is atomized by collision with the wire mesh, the contact efficiency with dust and harmful gas is increased, and the removal and humidification of the air are performed. Even if the ratio of the amount of spray water is set low and the external dimensions are reduced, dust and harmful gases in the air can be sufficiently removed, and the air can be efficiently saturated and humidified. The output of an actuator such as a pump can be reduced, and its size can be reduced to save space.

The air washer of the present invention according to claim 2 is
A water spray chamber having an air inlet and an air outlet, in which an air flow is generated from the air inlet toward the air outlet, a first washer media arranged at the air inlet of the water spray chamber, and an air outlet of the water spray chamber A second washer media, at least one wire mesh disposed between the first washer media and the second washer media in parallel with the airflow, and spraying toward the wire mesh, a portion of which reaches the first washer media. It is configured to include a nozzle for spraying water, a water storage tank located in the water spray chamber for receiving the spray water flowing down, and a circulating water supply system for circulating the circulating water in the water storage tank to the nozzle. .

With the above-described structure, an air flow flowing from the air inlet of the water spray chamber through the first washer media is sprayed from the nozzle toward the wire net so as to cross the flow. The spray water (especially one having a large particle diameter) collides with the wire netting, and is atomized by the impact, thereby improving the contact efficiency with dust and harmful gas in the air. Part of the dust and harmful gas in the air that has collided with the fine particles of the spray water reaches the first washer media together with the spray water, and the first washer media captures the spray water with the dust and the harmful gas. The spray water that has reached the first washer medium is washed off dust adhering to the first washer medium, flows down, takes in harmful gas, flows into the water storage tank, evaporates in the course of flowing down, and humidifies the air.

Part of the fine particles of the spray water that did not collide with the first washer medium collide with the ceiling surface, wall surface, or water storage surface of the water spray chamber, but move with the air flow in other cases. And humidifies the air, takes in dust and harmful gas in the air, reaches the second washer media, and the second washer media captures spray water accompanied by dust and harmful gas. The circulating water staying in the water storage tank circulates through the circulating water supply system and is sprayed again from the nozzle.

As described above, the spray water sprayed from the first stage nozzle is atomized by collision with the wire mesh, the contact efficiency with dust and harmful gas is enhanced, and the removal and humidification of the air are performed. Even if the ratio of the amount of spray water is set low and the external dimensions are reduced, dust and harmful gases in the air can be sufficiently removed, and the air can be efficiently saturated and humidified. The output of an actuator such as a pump can be reduced, and its size can be reduced to save space.

[0018]

Embodiments of the present invention will be described below with reference to the drawings. Embodiment 1 As shown in FIGS. 1 to 3, the air washer 51 has a water spray chamber 53 having a predetermined length inside a main body casing 52 having a rectangular flow path cross section. The water spray chamber 53 is connected to a duct (not shown) at an air inlet 53a formed at one end thereof, and air A flowing from this duct is formed at the other end through the flow path of the water spray chamber 53. Air outlet 5
3b.

In the water spray chamber 53, a first washer media 54a is disposed at an air inlet 53a, and an air outlet 5a is provided.
3b, a second washer media 54b is arranged. Each of the washer media 54a, 54b has a shape substantially equal to the cross section of the flow path of the air flow, and is made of polyvinyl chloride fiber or stainless steel wire. , For example, 25m
It is a mat having a thickness of about m to 50 mm.

Inside the water spray chamber 53, a wire mesh 55 is connected to the first washer media 5 on the side of the first washer media 54a.
4a. This wire mesh 55 has a wire diameter of 0.5 to 1.0 mm and a wire interval of 2 as shown in FIG.
It is about 5 mm. On the downstream side of the wire mesh 55, a plurality of first-stage nozzles 56 communicating with a circulating water supply system described later are provided.
And a plurality of second-stage nozzles 57 communicating with a makeup water supply system described later are arranged at substantially the same positions as the first-stage nozzles 56. The first-stage nozzle 56 moves the first washer media 54 toward the wire mesh 55 in a direction opposite to the air flow.
The second stage nozzle 5
7 is a second washer media 5 in the forward direction with the airflow.
4a is sprayed with spray water.

A water storage tank 58 is provided below the water spray chamber 53 for receiving the spray water flowing down. A circulating water supply system 59 for circulating the circulating water staying in the water storage tank 58 to the first stage nozzle 56 is provided. It is provided in communication with the lower part of the water spray chamber 53. The circulating water supply system 59 includes a suction pipe 60 opening below the water storage tank 58 and a circulating pump 61 connected to the suction pipe 60.
, A motor 62 for driving the circulation pump 61, a first-stage discharge pipe 63 connected to the discharge port of the circulation pump 61 and disposed above the water spray chamber 53, and water branched from the first-stage discharge pipe 63. A plurality of first-stage branch pipes 64 are provided in the spray chamber 52 in the vertical direction, and each of the first-stage branch pipes 64 is provided with a plurality of first-stage nozzles 56 described above.

A make-up water supply system 65 for supplying pure water as make-up water to the second stage nozzle 57 is connected to a clean water supply device (not shown) or a pure water supply device (not shown) to connect to a water spray chamber. A water supply pipe 66 disposed above the water supply pipe 53;
6 is provided with the plurality of second-stage nozzles 57 described above. An overflow pipe 68 and a second makeup water supply pipe 69 for supplying clean water as makeup water communicate with the water storage tank 58, and the second makeup water supply pipe 69 communicates with a clean water supply device (not shown). ing.

Downstream of the water spray chamber 53, the water spray chamber 53
An eliminator 70 that removes water droplets and the like contained in the air that has passed through is provided, and an air outlet 53 b of the water spray chamber 53 is provided.
Is connected to a cooling chamber 71 having a predetermined cross-sectional shape similar to that of the water spray chamber 53 and having a predetermined length. A cooling coil 72 is provided inside the cooling chamber 71 as a cooler.
A drain pan 73 is formed below 1. A drain pipe 74 communicating with the outside of the cooling chamber 71 is connected to the recess of the drain pan 73. A blower (not shown) is disposed downstream of the water spray chamber 53, and the blower is operated to guide air to the flow path of the water spray chamber 53.

The operation of the above configuration will be described. As shown in FIG. 6, the air A flows into the water spray chamber 53 from the air inlet 53a through the first washer media 54a.
In response to this air flow, the water tank 5 is opposed to the air flow.
8 is sprayed from the first stage nozzle 56. The spray water (especially having a large particle diameter) collides with the wire mesh 55 and becomes fine particles, and collides with dust and harmful gas in the air. At this time, the atomization of the spray water improves the contact efficiency with dust and harmful gas in the air.

Part of the fine particles of the spray water that has collided with dust or harmful gas in the air reaches the first washer media 54a, and the first washer media 54a captures the spray water accompanied by dust or harmful gas. First washer media 54a
In this case, the spray water rinses away dust adhering to the first washer media 54a, flows down, and takes in harmful gas and flows into the water storage tank 58. The spray water evaporates in the process of flowing down to humidify the air.

A part of the spray water that has not collided with the first washer media 54a collides with the ceiling surface, the wall surface or the water storage surface of the water spray chamber 53, but otherwise moves on the air flow, and the process proceeds. In addition to evaporating the air and humidifying the air, dust and harmful gas in the air are taken in and reach the second washer media 54b, and the second washer media 54b captures the spray water accompanied by the dust and harmful gas.

Then, with respect to the air flow in the water spray chamber 53,
When clean water or pure water is sprayed from the second stage nozzle 57, the spray water of clean water or pure water reaches the second washer media 54b together with dust and harmful gas remaining in the air, and the second washer media 54b Capture spray water with harmful gases. In the second washer media 54b, the spray water rinses away dust adhering to the second washer media 54b, flows down, takes in harmful gases, and flows into the water storage tank 58. The spray water evaporates in the process of flowing down to humidify the air. The clean water or pure water that has flowed into the water storage tank 58 joins the circulating water as makeup water, passes through the circulating water supply system 59, and is sprayed as circulating water from the first-stage nozzle 56.

The air that has passed through the second washer media 54b flows into the eliminator 70 from the air outlet as purified and sufficiently humidified clean air, and the eliminator 70 removes water droplets in the air. The air flowing out of the eliminator 70 is guided to a cooling chamber 71 and is cooled by a cooling coil 72. In the process described above, the first stage nozzle 5
The spray water sprayed from 6 is atomized by collision with the wire mesh 55, and the efficiency of contact with dust and harmful gas is increased to remove the spray water and humidify the air. Even if it is set and the external dimensions are reduced, dust and harmful gas in the air can be sufficiently removed, and the air can be efficiently saturated and humidified.
9, the output of the circulation pump 61 is reduced, and the size of the circulation pump 61 can be reduced to save space.

Since the circulating water decreases with the humidification of the air, the amount of the circulating water is compensated for, and the required amount of the replenishing water required to maintain the concentration of the harmful gas in the circulating water at a certain value or less is provided. Replenish the circulating water circulation system. Since clean water or pure water flows into the water storage tank 58 as make-up water at the second stage nozzle 57, this water amount is subtracted from the necessary make-up water amount, and the amount is used as make-up water from the second make-up water supply pipe 69 to the water storage tank 58. Supply. The replenishment water supply system 65 that supplies the second-stage nozzle 57 may supply all necessary replenishment water with clean water or pure water, and may supply the replenishment water from the second replenishment water supply pipe 69 only in an emergency. good.

Embodiment 2 FIG. 7 shows another embodiment of the present invention. Members performing the same functions as those of the previous embodiment are denoted by the same reference numerals and description thereof is omitted. In FIG. 7, an intermediate washer media 54c is disposed between the first washer media 54a and the second washer media 54b inside the water spray chamber 53,
The second-stage nozzle 57 is disposed so as to spray the spray water in a direction facing the air flow.

With this configuration, of the spray water sprayed from the first-stage nozzle 56, the spray water moving along with the air flow takes in dust and harmful gas in the air, reaches the intermediate washer media 54c, and reaches the intermediate washer media 54c. Captures spray water with dust and harmful gases. When clean water or pure water is sprayed from the second-stage nozzle 57 on the air flow passing through the intermediate washer media 54c, the spray water of clean water or pure water collides with dust and harmful gas remaining in the air. Reaches the intermediate washer media 54c, and the intermediate washer media 54c captures the spray water with dust and harmful gas. Of the spray water sprayed from the second-stage nozzle 57, the spray water moving along with the air flow takes in dust and harmful gas in the air and reaches the second washer media 54b.

Embodiment 3 FIG. 8 shows another embodiment of the present invention. Members performing the same functions as those of the previous embodiment are denoted by the same reference numerals and description thereof is omitted. In FIG. 8, the air washer 81
It has two air washers 82 and 83 along the air flow, and each air washer 82 and 83 has a water spray chamber 5.
3, a first washer media 54a, a second washer media 54b, a wire mesh 55, a first stage nozzle 56, a water storage tank 58, and a circulating water supply system 59, and a downstream air washer unit. A second stage nozzle 57 and a makeup water supply system 65 are provided at 83. Upstream air washer portion 82
And the water tank 5 of the downstream air washer unit 83
8 is communicated via a communication pipe 84, and an overflow pipe 68 is provided in the water storage tank 58 of the air washer section 82 on the upstream side.

With the above configuration, the inflowing air can be purified in multiple stages, the gas removing effect can be enhanced, and it can be used in areas where the concentration of harmful gas in the atmosphere is high.

[0034]

[Table 1] Table 1 shows the effect of the present invention. In each of Embodiments 1, 2, and 3, the spray water is atomized by collision with the wire mesh 55 to increase the contact efficiency with dust and harmful gas. Thus, the ratio of the amount of spray water to the flow rate of air can be set low, and the external dimensions can be reduced.

Embodiment 4 FIGS. 9 to 11 show another embodiment of the present invention. Members performing the same functions as those of the previous embodiment are denoted by the same reference numerals and description thereof is omitted. 9 to 11, in the water spray chamber 53, a plurality of wire meshes 90 are arranged between the first washer media 54a and the second washer media 54b in parallel with the air flow. This wire mesh 55 is described in FIG.
Or, it is the same as that shown in FIG.

Downstream of the wire mesh 90, there are provided a plurality of first-stage nozzles 56 which spray toward the wire mesh 55 and a part of the spray water reaches the first washer media 54a. With this configuration, as shown in FIG. 12, an air flow flowing from the air inlet 53 a of the water spray chamber 53 through the first washer media 54 a is directed from the first stage nozzle 56 toward the wire mesh 90 so as to cross the flow. Spray. The spray water (especially one having a large particle diameter) collides with the wire mesh 90 and is atomized by the impact, thereby improving the contact efficiency with dust and harmful gas in the air. Other functions and effects are the same as those of the first embodiment described above.

[0037]

As described above, according to the present invention, the spray water sprayed from the first stage nozzle is atomized by collision with a wire mesh, the efficiency of contact with dust and harmful gas is enhanced, and the removal efficiency is improved. Since the air is humidified, even if the ratio of the amount of spray water to the flow rate of the air is set low and the external dimensions are reduced, dust and harmful gases in the air can be sufficiently removed, and the air can be efficiently saturated and humidified. The output of an actuator such as a pump in the circulating water supply system can be reduced, and the size can be reduced to save space.

[Brief description of the drawings]

FIG. 1 is a plan sectional view of an air washer showing an embodiment of the present invention.

FIG. 2 is a vertical sectional view of the air washer.

FIG. 3 is a front view of the air washer.

FIG. 4 is a schematic view showing a form of a wire mesh used for the air washer.

FIG. 5 is a schematic view showing another embodiment of a wire mesh used for the air washer.

FIG. 6 is a schematic diagram illustrating an operation of the air washer.

FIG. 7 is a longitudinal sectional view of an air washer showing another embodiment of the present invention.

FIG. 8 is a longitudinal sectional view of an air washer showing another embodiment of the present invention.

FIG. 9 is a plan sectional view of an air washer showing an embodiment of the present invention.

FIG. 10 is a vertical sectional view of the air washer.

FIG. 11 is a front view of the air washer.

FIG. 12 is a schematic diagram illustrating an operation of the air washer.

FIG. 13 is a plan sectional view of a conventional air washer.

FIG. 14 is a longitudinal sectional view of the air washer.

FIG. 15 is a schematic diagram illustrating the operation of the air washer.

[Explanation of symbols]

 Reference Signs List 51 air washer 52 main body casing 53 water spray chamber 53a air inlet 53b air outlet 54a first washer media 54b second washer media 55 wire netting 56 first stage nozzle 57 second stage nozzle 58 water storage tank 59 circulating water supply system 60 suction pipe 61 Circulation pump 62 Motor 63 First-stage discharge pipe 64 First-stage branch pipe 65 Pure water supply system 66 Second-stage discharge pipe 67 Each second-stage branch pipe 68 Overflow pipe 69 Make-up water supply pipe 70 Eliminator 71 Cooling chamber 72 Cooling coil 73 Drain pan 74 Drain pipe

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yoshikazu Yamagata 1-4-1 Yurakucho, Chiyoda-ku, Tokyo Sanki Kogyo Co., Ltd. Tochigi Plant, Tochigi Co., Ltd. (72) Inventor Masaaki Shinohara 28, Hirade Industrial Park, Utsunomiya City, Tochigi Prefecture Tokugi Plant Co., Ltd. (72) Inventor Toshihisa Shimizu Toshigi Prefecture 28 AC08 BB01 BB05

Claims (2)

[Claims] 1. A water spray chamber having an air inlet and an air outlet, in which an air flow is generated from the air inlet toward the air outlet, a first washer medium disposed at the air inlet of the water spray chamber,
A second washer media disposed at an air outlet of the water spray chamber; a wire mesh disposed parallel to the first washer media at a position downstream of the first washer media; and a wire mesh positioned downstream of the wire mesh and opposite to the air flow. A nozzle for spraying the spray water reaching the first washer media in the direction, a water storage tank located in the water spray chamber for receiving the spray water flowing down, and a circulating water supply for circulating the circulating water in the water storage tank to the nozzle An air washer comprising: 2. A water spray chamber having an air inlet and an air outlet, in which an air flow is generated from the air inlet toward the air outlet, a first washer media disposed at the air inlet of the water spray chamber,
A second washer media disposed at an air outlet of the water spray chamber, at least one wire mesh disposed between the first washer media and the second washer media in parallel with the air flow, and spraying toward the wire mesh; A nozzle for spraying the spray water reaching the first washer media, a water storage tank located in the water spray chamber for receiving the spray water flowing down, and a circulating water supply system for circulating the circulating water in the water storage tank to the nozzle. An air washer comprising: