JP4318355B2 - High wind speed air washer - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an air conditioner in a semiconductor factory or the like, and relates to a high wind speed air washer that removes dust and harmful gases in the air and performs humidification with high saturation efficiency.
[0002]
[Prior art]
An example of a conventional air washer is shown in FIG. The air washer 10 has a water spray chamber 12 having a predetermined length inside a main casing 11 having a rectangular channel cross section. The water spray chamber 12 is connected to a duct (not shown) at an air inlet 12a formed at one end thereof, and air A flowing from the duct is formed at the other end through the flow path of the water spray chamber 12. It flows out from the air outlet 12b.
[0003]
In the water spray chamber 12, a first washer medium 13 is disposed at the air inlet 12a, a second washer medium 14 is disposed in the middle of the flow path of the water spray chamber 12, and is positioned at the air outlet 12b. The third washer medium 15 is arranged, the first washer medium 13 and the second washer medium 14 are defined as a first-stage air washer portion 12c, and the second washer medium 14 and the third washer medium 15 are defined as The second stage air washer portion 12d is used. Each washer media 13, 14, 15 has a shape substantially equal to the cross section of the air flow path, is made of polyvinyl chloride fiber, stainless steel wire, etc., and has a mat shape having a thickness of about 25 mm to 50 mm, for example. It is.
[0004]
In the water spray chamber 12, a plurality of first stage nozzles 16 are arranged at positions downstream of the first washer media 13, and a plurality of second stage nozzles 17 are positioned downstream of the second washer media 14. Is arranged. The first stage nozzle 16 sprays spray water reaching the first washer medium 13 in the direction opposite to the air flow, and the second stage nozzle 17 is the second direction in the direction opposite to the air flow. The spray water that does not reach the washer medium 14 is sprayed.
[0005]
An eliminator 18 that removes water droplets and the like contained in the air that has passed through the water spray chamber 12 is disposed on the downstream side of the water spray chamber 12, and an air outlet 12b of the water spray chamber 12 includes a water spray chamber 12 and A cooling chamber 19 of a predetermined length having the same flow path cross-sectional shape is connected. A cooling coil 20 is provided as a cooler inside the cooling chamber 19, and a blower (not shown) is arranged downstream of the water spray chamber 12, and the water spray chamber 12 is operated by operating this blower. Air is introduced into the flow path.
[0006]
[Problems to be solved by the invention]
In the air washer 10 described above, the wind speed in the water spray chamber 12 is 2.0 to 2.5 m / s, and since it has a large outer shape, a large installation space corresponding to the shape is required. Location is limited. For this reason, it is required to reduce the size of the apparatus while ensuring the necessary air volume by increasing the wind speed in the water spray chamber.
[0007]
However, when the wind speed in the water spray chamber is increased, the contact time between the air passing through the water spray chamber and the spray water is shortened, and the gas removal performance and the saturation humidification efficiency are lowered. However, there has been a problem that the carrier over which passes through the washer medium and scatters downstream increases, the pressure loss of the air flow increases, and the power required for blowing increases.
[0008]
The present invention solves the above-described problems, and an object thereof is to provide a high wind speed air washer capable of realizing reliable gas removal performance and high saturation humidification efficiency while achieving high wind speed and downsizing.
[0009]
[Means for Solving the Problems]
To solve the problems described above, a high wind speed air washer of the present invention according to claim 1, in cross section a circular or rectangular air passage, toward the air inlet on one side to the other side of the air outlet air A water spray chamber in which a flow flows, a guide vane that is disposed at an air inlet of the water spray chamber and swirls the air flow, a gas-liquid contact medium disposed at an air outlet of the water spray chamber, a guide vane and a gas-liquid contact medium, A high-pressure spray of spray water from a plurality of small-diameter spray ports arranged in a row at a predetermined distance along the direction of ventilation in the water spray chamber in a space between A multi-head spray water nozzle , a water storage tank that receives the spray water flowing down, and a circulating water supply system that circulates and supplies the circulating water in the water tank to the multi-head spray water nozzle.
In the high wind speed air washer of the present invention according to claim 2, the gas-liquid contact medium forms an inclined surface with respect to the ventilation direction, and the air flow is passed through the water spray chamber at a high wind speed of 5 to 6 m / s. .
In the high wind speed air washer according to the third aspect of the present invention, the multi-head spray water nozzles are arranged in a plurality of rows at a predetermined distance along the ventilation direction in the water spray chamber and in a plurality of parallel rows. Is.
[0010]
With the above-described configuration, for the air flow flowing in from the air inlet of the water spray chamber, water from the water storage tank is radially sprayed from the small-diameter spray ports of the multi-head spray water nozzle so as to face the flow, Spray water is sprayed in multiple stages from the multi-head spray water nozzles at each position toward the air flow.
The spray water collides with dust and harmful gas in the air, and the dust and harmful gas in the collided air rides on the air flow with the spray water and reaches the gas-liquid contact medium, which is accompanied by dust and harmful gas. Capture the spray water. The sprayed water that has reached the gas-liquid contact medium is washed away from the dust adhering to the gas-liquid contact medium and flows into the water storage tank by taking in harmful gases. The circulating water staying in this water tank is sprayed again from the multi-head spray water nozzle through the circulating water supply system.
[0011]
In this way, spray water is sprayed radially from a multi-head spray water nozzle in a wide range and with a fine spray water particle size (average 60 to 90 μm), and is repeated in multiple stages from the multi-head spray water nozzle at each position toward the air flow. By spraying, the contact efficiency of the air flow and spray water is increased, so the air flow is passed through the water spray chamber at a high wind speed (5 to 6 m / s), and the ratio of the amount of spray water to the air flow rate is set low. However, reliable gas removal performance and high saturation humidification efficiency can be obtained, and high wind speed (2 to 3 times the conventional) and downsizing (the air passage cross-sectional area of the water spray chamber is 1/2 to 1/1 of the conventional one). 3) can be realized.
[0012]
High-pressure spraying (spraying water pressure: 0.6 to 1.2 MPa) to make the spraying water finer, but the amount of spraying water that satisfies the gas removal performance and saturation humidification efficiency is less than the conventional 1/3 to 1/6. By being (0.08 to 0.16% of the air flow weight), the power consumption required for spraying is about the same as or lower than that of the conventional art.
In addition, since the contact efficiency of the air flow and spray water is increased by spraying fine spray water in multiple stages, the number of gas-liquid contact media can be reduced. Further, since the gas-liquid contact medium has a conical or V-shaped shape in which the gas-liquid contact surface is inclined with respect to the ventilation direction, the gas-liquid contact area has a large gas-liquid contact area with respect to the air flow passage cross-sectional area of the water spray chamber. Obtainable. For this reason, since the capture rate of the spray water in the gas-liquid contact medium is increased, the spray water can be sufficiently captured even if it is installed only at the air outlet of the water spray chamber. Even if the air is ventilated, the pressure loss and the carrier over can be suppressed to the same level or lower.
[0013]
In addition, by swirling the air flow flowing through the water spray chamber by the guide vane provided at the air inlet of the water spray chamber, the contact efficiency between the spray water sprayed over a wide range from the multi-head spray water nozzle and the air flow is increased. Even in a state where the air flow is passed through the water spray chamber at a high wind speed, reliable gas removal performance and high saturation humidification efficiency can be obtained, and high wind speed and downsizing can be realized.
[0014]
A high wind speed air washer according to a fourth aspect of the present invention has multi-head spray water nozzles arranged in rows at a plurality of locations separated by a predetermined distance along the ventilation direction in the water spray chamber and in a plurality of parallel rows. The guide vanes are arranged at a plurality of locations corresponding to each row of the multi-head spray water nozzles, and the adjacent guide vanes are formed so that the airflow swirl directions are opposite to each other.
[0015]
With the above-described configuration, a plurality of swirling air flows are generated in the water spray chamber, and the swirling air flows adjacent to each other are swirled in opposite directions, so that the swirling of the air flow is not hindered with each other. The contact efficiency between the spray water sprayed over a wide range from the nozzle and the air flow is increased, and reliable gas removal performance and high saturation humidification efficiency can be obtained even when the air flow is passed through the water spray chamber at a high wind speed. High wind speed and downsizing can be realized.
[0016]
The high wind speed air washer of the present invention according to claim 5 is configured such that the multi-head spray water nozzles are arranged in a plurality of rows at a predetermined distance along the ventilation direction in the water spray chamber and in a plurality of parallel rows. , Guide vanes are arranged in multiple locations corresponding to each row of multi-head spray water nozzles, and media that forms a ventilation path corresponding to each guide vane in the water spray chamber is placed between each row of multi-head spray water nozzles It is a thing.
[0017]
With the above-described configuration, a plurality of swirling airflows are generated in the water spray chamber, and each swirling airflow flows through each ventilation passage in a state in which mutual interference is prevented by the interference prevention media, so that a wide range from the multi-head spraying water nozzle can be obtained. The contact efficiency between the spray water sprayed and the air flow is increased. In addition, by making the interference prevention media like a wire mesh, the spray water that collides with the interference prevention media is further refined, so that reliable gas removal performance can be achieved even when the air flow is passed through the water spray chamber at a high wind speed. High saturation humidification efficiency can be obtained, and high wind speed and downsizing can be realized.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 3, the air washer 11 has a water spray chamber having a predetermined length (1.5 to 1.8 m) inside a main body casing 12 having a rectangular (or circular) channel cross section. 13. The water spray chamber 13 is connected to a duct (not shown) at an air inlet 13a formed at one end thereof, and air A flowing from the duct is formed at the other end through the flow path of the water spray chamber 13. It flows out from the air outlet 13b.
[0019]
In the water spray chamber 13, a guide vane 14 that swirls the air flow is disposed at the air inlet 13 a, and a gas-liquid contact medium 15 is disposed at the air outlet 13 b, and the gas-liquid contact medium 15 is in the ventilation direction. It has a conical or V-shaped shape that forms an inclined surface, and is made of a synthetic resin such as polyvinylidene fiber or a metal fiber such as a stainless wire, and has a mat-like shape having a thickness of about 50 mm, for example. .
[0020]
Inside the water spray chamber 13, a plurality of multi-head spray water nozzles 16 for spraying spray water at high pressure toward the air flow are arranged in rows at a predetermined distance along the ventilation direction of the water spray chamber 13. It is arranged. As shown in FIGS. 4 to 6, each multi-head spray water nozzle 16 is formed by radially assembling a plurality of nozzle tips 17 having small-diameter spray ports 17 a.
[0021]
A water storage tank 18 that catches the spray water flowing down is provided downstream of the water spray chamber 13, and a circulating water supply system 19 that circulates the circulating water staying in the water storage tank 18 to the multi-head spray water nozzle 16 is provided in the water spray chamber. 13 is provided in communication with the lower part.
The circulating water supply system 19 is connected to a suction pipe 20 that opens at a lower portion of the water storage tank 18, a circulation pump 21 connected to the suction pipe 20, a motor 22 that drives the circulation pump 21, and a discharge port of the circulation pump 21. And a plurality of branch pipes 24 branched from the discharge pipe 23 and arranged in the vertical direction in the water spray chamber 12. Each branch pipe 24 has a plurality of multiple heads. A spray water nozzle 16 is provided.
[0022]
An overflow pipe 25 and a make-up water supply pipe 26 for supplying clean water as make-up water communicate with the water storage tank 18. On the downstream side of the water spray chamber 13, a cooling chamber 27 is provided connected to the air outlet 13 b of the water spray chamber 13, and a cooling coil 28 is provided inside the cooling chamber 27 as a cooler. A drain pan 29 is formed below the cooling chamber 27. A blower (not shown) is disposed on the downstream side of the water spray chamber 13, and air is guided to the flow path of the water spray chamber 13 by operating the blower.
[0023]
The operation of the above configuration will be described. Air A flows from the air inlet 13a through the guide vane 14 into the water spray chamber 13. The air flow is guided by the guide vanes 14 and swirls to flow as a swirling air flow through the water spray chamber 13.
The circulating water from the water storage tank 18 is sprayed radially from the spray port 17a of the multi-head spray water nozzle 16 toward the swirling air flow at a spray water pressure of 0.6 to 1.2 MPa, and the multi-head spray at each position. Spraying from the water nozzle 16 in multiple stages.
[0024]
The spray water collides with dust and harmful gas in the air, and the dust and harmful gas in the colliding air ride on the swirling air flow together with the spray water and reach the gas-liquid contact medium 15, and the gas-liquid contact medium 15 becomes dust and harmful. Capture spray water with gas.
The spray water that has reached the gas-liquid contact medium 15 is washed away from the dust adhering to the gas-liquid contact medium 15 and flows into the water storage tank 18 by taking in harmful gases. The circulating water staying in the water storage tank 18 is again sprayed from the multi-head spray water nozzle through the circulating water supply system 19.
[0025]
In this way, spray water is sprayed from the multi-head spray water nozzle 16 in a radial, wide-range and high-pressure spray to spray with a fine spray water particle size of 60 to 90 μm on average, and swirling air from the multi-head spray water nozzle 16 at each position. By repeatedly spraying in multiple stages toward the flow, the contact efficiency of the air flow and spray water is increased.
For this reason, even if an air flow is passed through the water spray chamber 13 at a high wind speed of 5 to 6 m / s and the ratio of the spray water amount to the air flow rate is set low, reliable gas removal performance and high saturation humidification efficiency can be obtained. Thus, it is possible to realize a wind speed that is two to three times higher than that of the conventional one and a reduction in size of the water spray chamber 13 that has an air passage cross-sectional area of ½ to ３ of the conventional one.
[0026]
Although high-pressure spraying is performed to refine the spray water, the amount of spray water that satisfies gas removal performance and saturation humidification efficiency may be 0.08 to 0.16% of the air flow weight, which is 1/3 to 1/6 of the conventional one. Since the amount of sprayed water is small, the power consumption of the motor 22 required for spraying is less than or equal to the conventional level.
The gas-liquid contact medium 15 is installed only downstream of the water spray chamber 13 and has a conical or V-shaped shape whose gas-liquid contact surface is inclined with respect to the ventilation direction. A large gas-liquid contact area with respect to the cross-sectional area can be obtained. For this reason, since the capture rate of the spray water in the gas-liquid contact medium is increased, the spray water can be sufficiently captured even if it is installed only at the air outlet 13 b of the water spray chamber 13. Even if the flow is ventilated at a high wind speed, pressure loss and carrier over can be suppressed to the same extent as in the past. The air that has passed through the gas-liquid contact medium 15 is led to the cooling chamber 27 from the air outlet 13b as purified air that has been purified and sufficiently humidified, and is cooled to a predetermined temperature by the cooling coil 28.
[0027]
In the above-mentioned process, the circulating water decreases with the humidification of the air. Therefore, the amount of supplemental water necessary for maintaining the harmful gas concentration in the circulating water below a certain value is compensated for while supplementing the decrease in the circulating water. Water is supplied from a makeup water supply pipe 26.
7 to 9 show other embodiments of the present invention, and members that perform the same operations as those of the previous embodiments are given the same reference numerals and description thereof is omitted. 7 to 9, a plurality of independent water spray chambers 13 are provided on the upstream side of the cooling chamber 27, and a guide vane 14, a gas-liquid contact medium 15, and a multi-head spray water nozzle 16 are provided in each water spray chamber 13. ing.
[0028]
10 to 12 show other embodiments of the present invention, and members that perform the same operations as those of the previous embodiments are denoted by the same reference numerals and description thereof is omitted. 10 to 12, the multi-head spray water nozzles 16 are arranged in rows at a plurality of locations separated by a predetermined distance along the ventilation direction, and in rows. The guide vanes 14 are arranged at a plurality of locations corresponding to each row of the multi-head spray water nozzles 16, and as shown in FIG. 13, the adjacent guide vanes 16 are formed so that the airflow swirl directions are opposite to each other. ing.
[0029]
With this configuration, a plurality of swirling air flows are generated inside the water spray chamber 13, and the adjacent swirling air flows swirl in opposite directions, so that swirling of the air flow is not hindered from each other, and there are many heads. The contact efficiency between the spray water sprayed over a wide range from the spray water nozzle 16 and the air flow is increased, and even in a state where the air flow is passed through the water spray chamber 13 at a high wind speed, reliable gas removal performance and high saturation humidification efficiency are achieved. It is possible to obtain high wind speed and miniaturization.
[0030]
FIGS. 14 to 16 show other embodiments of the present invention, and members that perform the same operations as those of the previous embodiments are denoted by the same reference numerals and description thereof is omitted. 14 to 16, the multi-head spray water nozzles 16 are arranged in rows at a plurality of locations separated by a predetermined distance along the ventilation direction, and in parallel rows. The guide vanes 14 are arranged at a plurality of locations corresponding to each row of the multi-head spray water nozzles 16, and an interference preventing medium 31 that forms a ventilation path corresponding to each guide vane 14 is provided inside the water spray chamber 13. It arrange | positions between each row | line | column of the multi-head spray water nozzle 16. FIG. The interference prevention medium 31 is formed of a metal mesh or punching metal. As shown in FIG. 17, the adjacent guide vanes 16 are formed so that the airflow swirl directions are opposite to each other.
[0031]
With this configuration, a plurality of swirling air flows are generated inside the water spray chamber 13, and each swirling air flow flows through each ventilation path in a state in which mutual interference is prevented by the interference prevention medium 31, thereby allowing the multi-head spray water to flow. The contact efficiency between the spray water sprayed over a wide range from the nozzle 16 and the air flow is increased. Moreover, since the spray water colliding with the interference prevention medium is further refined, even in a state where the air flow is passed through the water spray chamber 13 at a high wind speed, reliable gas removal performance and high saturation humidification efficiency can be obtained. High wind speed and downsizing can be realized.
[0032]
【The invention's effect】
As described above, according to the present invention, spray water is sprayed radially from a multi-head spray water nozzle in a wide range and with a fine spray water particle size, and repeatedly sprayed in multiple stages from the multi-head spray water nozzle at each position. Since the contact efficiency between the air flow and the spray water becomes high, reliable gas removal performance and high saturation humidification efficiency can be obtained, and high wind speed and downsizing can be realized. By increasing the gas-liquid contact area by increasing the gas-liquid contact area by increasing the gas-liquid contact area with a conical or V-shaped gas-liquid contact medium, pressure loss and carrier over can be suppressed to the same level as in the past. Can do. By rotating the air flow with the guide vanes, the contact efficiency between the spray water and the air flow can be further increased, and reliable gas removal performance and high saturation humidification efficiency can be obtained. By reducing the size, there is no restriction on the installation location, and the function of the existing air conditioner can be improved by installing this apparatus in the middle of the existing duct.
[Brief description of the drawings]
FIG. 1 is a plan sectional view of an air washer showing an embodiment of the present invention.
FIG. 2 is a longitudinal sectional view of the air washer.
FIG. 3 is a front view of the air washer.
FIG. 4 is a cross-sectional view of a multi-head spray water nozzle in the air washer.
FIG. 5 is a side view of the multi-head spray water nozzle.
FIG. 6 is a front view of the multi-head spray water nozzle.
FIG. 7 is a plan sectional view of an air washer showing another embodiment of the present invention.
FIG. 8 is a longitudinal sectional view of the air washer.
FIG. 9 is a front view of the air washer.
FIG. 10 is a plan cross-sectional view of an air washer showing another embodiment of the present invention.
FIG. 11 is a longitudinal sectional view of the air washer.
FIG. 12 is a front view of the air washer.
FIG. 13 is a schematic diagram showing a swirling direction of airflow in the air washer.
FIG. 14 is a cross-sectional plan view of an air washer showing another embodiment of the present invention.
FIG. 15 is a longitudinal sectional view of the air washer.
FIG. 16 is a front view of the air washer.
FIG. 17 is a schematic diagram showing a swirling direction of airflow in the air washer.
FIG. 18 is a plan sectional view showing a configuration of a conventional air washer.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 Air washer 12 Main body casing 13 Water spray chamber 13a Air inlet 13b Air outlet 14 Guide vane 15 Gas-liquid contact medium 16 Multi-head spray water nozzle 17 Nozzle tip 17a Spray port 18 Reservoir 19 Circulating water supply system 20 Suction pipe 21 Circulation pump 22 Motor 23 Discharge pipe 24 Branch pipe 25 Overflow pipe 26 Supplementary water supply pipe 27 Cooling chamber 28 Cooling coil 29 Drain pan 31 Interference prevention medium

Claims (5)

A circular or rectangular cross section is used, and the air flow is swirled by placing it in the water spray chamber where the air flow flows from the air inlet on one side to the air outlet on the other side, and the air inlet of the water spray chamber. A guide vane, a gas-liquid contact medium disposed at the air outlet of the water spray chamber, and a space between the guide vane and the gas-liquid contact medium are arranged in a plurality of locations separated by a predetermined distance along the direction of ventilation in the water spray chamber. A multi-head spray water nozzle that sprays spray water at a high pressure toward a stream of air from a plurality of small-diameter spray holes that are radially assembled, a water tank that receives the spray water that flows down , and circulating water in the water tank A high wind speed air washer comprising a circulating water supply system that circulates and supplies the water to a multi-head spray water nozzle. The high wind speed air washer according to claim 1, wherein the gas-liquid contact medium forms an inclined surface with respect to the ventilation direction, and the air flow is passed through the water spray chamber at a high wind speed of 5 to 6 m / s . The high-head spray water nozzle according to claim 1 or 2, wherein the multi-head spray water nozzles are arranged in a plurality of rows at a predetermined distance along the ventilation direction in the water spray chamber and in a plurality of parallel rows. Wind speed air washer. Multi-head spray water nozzles are arranged in multiple rows at a predetermined distance along the direction of ventilation in the water spray chamber and in multiple parallel rows, and guide vanes correspond to each row of multi-head spray water nozzles. The high wind speed air washer according to claim 1 or 2, wherein the guide vanes are arranged at a plurality of locations and the adjacent guide vanes are formed so that the airflow swirl directions are opposite to each other. Multi-head spray water nozzles are arranged in multiple rows at a predetermined distance along the direction of ventilation in the water spray chamber and in multiple parallel rows, and guide vanes correspond to each row of multi-head spray water nozzles. Te was placed at a plurality of positions, of individual water spray chamber guide vanes according to claim 1 or 2, characterized in that a medium to form a ventilation path corresponding between each row of the multi-head water spray nozzle High wind speed air washer.

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