JP2000202988A - Printing agent filling device - Google Patents

Printing agent filling device

Info

Publication number
JP2000202988A
JP2000202988A JP11007228A JP722899A JP2000202988A JP 2000202988 A JP2000202988 A JP 2000202988A JP 11007228 A JP11007228 A JP 11007228A JP 722899 A JP722899 A JP 722899A JP 2000202988 A JP2000202988 A JP 2000202988A
Authority
JP
Japan
Prior art keywords
printing
printing agent
filling
agent
movable member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP11007228A
Other languages
Japanese (ja)
Inventor
Shingen Kinoshita
真言 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Microelectronics Co Ltd
Original Assignee
Ricoh Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Microelectronics Co Ltd filed Critical Ricoh Microelectronics Co Ltd
Priority to JP11007228A priority Critical patent/JP2000202988A/en
Publication of JP2000202988A publication Critical patent/JP2000202988A/en
Withdrawn legal-status Critical Current

Links

Landscapes

  • Screen Printers (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PROBLEM TO BE SOLVED: To certainly prevent a cream solder as a printing agent from becoming highly viscous and at the same time, prevent the solid component and the liquid component of the cream solder from being separated by excess stirring. SOLUTION: This printing agent filling device uses a filling member 1 having a stirring means which comprises a printing agent storage part 1a which stores a cream solder 50, a discharge aperture 1b for the cream solder 50, formed in a part coming into contact with a stencil mask, a replenishing aperture 1c which replenishes the solder 50 to the printing agent storage part 1a, a movable member 2 which stirs the solder 50 by transferring a part of the solder 50 tending to flow toward the discharge aperture 1b from the replenishing aperture 1c in the printing agent storage part 1a, in a different direction from a direction where the part of the solder 50 moves and the like. Further, a forcing-in means which forces the solder 50 from the replenishing aperture 1c of the filling member 1 into the printing agent storage part 1a, is provided independently of the stirring means.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、電子回路基板や該
基板上に表面実装される表面実装部品等の印刷対象物の
印刷面への印刷に用いる印刷マスクの貫通孔又は凹部
に、導電性ペースト等の印刷剤を充填する印刷剤充填装
置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for printing a printed object, such as an electronic circuit board or a surface-mounted component mounted on the board, on a printed surface of a printing mask used for printing on a printing surface. The present invention relates to a printing agent filling device for filling a printing agent such as a paste.

【0002】[0002]

【従来の技術】従来、この種の印刷剤充填装置として
は、大別して次の二つのものが知られている。一つ目
は、プラスチック材等からなるスキージブレードを、印
刷マスクの表面に押し当てながら該表面に沿って移動さ
せることにより、該表面に載置した印刷剤を該印刷マス
クの貫通孔又は凹部に擦り込むように充填していく擦り
込み型の装置である。二つ目は、充填部材の印刷剤収容
部内の印刷剤を、該印刷剤収容部の印刷マスク側に取り
付けられた1対のブレードなどで囲まれた排出口から押
し出しながら、該充填部材を該印刷マスクの表面に沿っ
て移動させることにより、該印刷剤を該印刷マスクの貫
通孔又は凹部に充填していく圧入型の装置である。
2. Description of the Related Art Conventionally, the following two types of printing agent filling apparatuses of this type are known. First, a printing agent placed on the surface of the printing mask is moved into a through hole or a concave portion of the printing mask by moving a squeegee blade made of a plastic material or the like along the surface while pressing the squeegee blade against the surface of the printing mask. It is a rub-in type device that rubs and fills. Second, the printing material in the printing material container of the filling member is extruded from a discharge port surrounded by a pair of blades attached to the printing mask side of the printing material storage portion, and the filling member is removed. This is a press-fit type device in which the printing agent is filled in through holes or recesses of the print mask by moving along the surface of the print mask.

【0003】上記後者の圧入型の装置は、印刷マスクの
貫通孔や凹部に印刷剤を強制的に押し込んでいるため、
印刷マスクの貫通孔や凹部の内壁が荒れている場合でも
十分な充填を行うことができ、基板などの電子部品上の
パッドへの粘着も促進させることができるという利点を
有している。この圧入型の装置としては、例えば1対の
スキージ等からなる吐出口を有する密閉容器に不活性ガ
スが供給され、該密閉容器内の印刷剤が不活性ガスの圧
力と自重とによって吐出口に供給されるものが知られて
いる(例えば、特開平4−284249号公報参照)。
In the latter press-fit type device, a printing agent is forcibly pressed into a through hole or a concave portion of a print mask.
Even when the inner wall of the through hole or the concave portion of the print mask is rough, sufficient filling can be performed, and there is an advantage that adhesion to a pad on an electronic component such as a substrate can be promoted. In this press-fit type apparatus, for example, an inert gas is supplied to a closed container having a discharge port formed of a pair of squeegees or the like, and the printing agent in the closed container is supplied to the discharge port by the pressure of the inert gas and its own weight. What is supplied is known (see, for example, JP-A-4-284249).

【0004】[0004]

【発明が解決しようとする課題】ところが、上記特開平
4−284249号公報における圧入型の装置では、上
記密閉容器内の印刷剤の粘性が次第に上昇し、孔版マス
クの貫通孔への充填不良が発生するおそれがあった。そ
こで、この印刷剤収容部内の印刷剤の粘度上昇を防止す
ることができる装置として、印刷剤を収容する印刷剤収
容部に相当するハウジング構造体の中に、1対のスキー
ジ側に印刷剤を送給する送給手段を兼ねた混練手段を内
蔵する円筒状のユニットが設けられ、該混練手段で印刷
剤を混練することにより印刷剤の高粘度化を防止するも
のが知られている(例えば、特開平8−112289号
公報参照)。ところが、この装置では、混練手段が送給
手段を兼ねているため、印刷時に混練手段が連続して駆
動されることになり、印刷剤の過剰な撹拌による液状化
が生じ、印刷剤内の固体成分(例えば半田粒)と液体成
分(例えばフラックス)が分離してしまうおそれがあっ
た。
However, in the press-fit type apparatus disclosed in Japanese Patent Application Laid-Open No. 4-284249, the viscosity of the printing agent in the closed container gradually increases, and poor filling of the stencil mask into the through-holes occurs. There was a risk of occurrence. Therefore, as a device capable of preventing an increase in the viscosity of the printing agent in the printing agent storage portion, a printing agent is placed on a pair of squeegee sides in a housing structure corresponding to the printing agent storage portion that stores the printing agent. It is known to provide a cylindrical unit having a built-in kneading means also serving as a feeding means for feeding, and to prevent the viscosity of the printing agent from being increased by kneading the printing agent with the kneading means (for example, And JP-A-8-112289). However, in this apparatus, since the kneading unit also serves as the feeding unit, the kneading unit is continuously driven during printing, and liquefaction occurs due to excessive stirring of the printing agent, and the solid in the printing agent is generated. There is a possibility that the component (for example, solder particles) and the liquid component (for example, flux) may be separated.

【0005】また、上記印刷剤収容部内の印刷剤の粘度
上昇を防止するために、米国のMPM社の印刷装置で
は、印刷対象物側が狭くなるように1対のスキージを逆
「ハ」字状に配置し円筒形状に近い内部空間を有するよ
うに印刷剤収容部を構成することにより、印刷時に該ス
キージから露出している印刷剤を、印刷マスクの表面側
から受けるズリ応力により該印刷剤収容部内で循環運動
(ローリング)させるようにした充填装置が採用されて
いる。この装置では、印刷剤の循環運動(ローリング)
により高粘度化を防止しようとするものである。ところ
が、上記孔版マスク側から受けるズリ応力が上記循環運
動を発生させるには小さすぎると思われ、しかも上記ズ
リ応力が印刷スピードなどの印刷条件によって大きく変
化することから、上記印刷剤の高粘度化を確実に防止す
ることは難しいと思われる。
Further, in order to prevent the viscosity of the printing agent in the printing agent container from increasing, a printing apparatus manufactured by MPM in the United States has a pair of squeegees in an inverted “C” shape so as to narrow the printing object side. And the printing agent container is configured to have an internal space close to a cylindrical shape, so that the printing agent exposed from the squeegee at the time of printing receives the printing agent by a shear stress received from the surface side of the printing mask. A filling device adapted to perform a circulating motion (rolling) in the section is employed. In this device, the circulation of printing agent (rolling)
To prevent the viscosity from being increased. However, the shear stress received from the stencil mask side seems to be too small to generate the circulating motion, and since the shear stress greatly changes depending on printing conditions such as printing speed, the viscosity of the printing agent is increased. Seems to be difficult to prevent.

【0006】本発明は以上の問題点に鑑みなされたもの
であり、その目的は、印刷剤の高粘度化を確実に防止す
ることができるとともに、印刷剤の過剰な撹拌による印
刷剤の固体成分と液体成分との分離を防止することがで
きる印刷剤充填装置を提供することである。
The present invention has been made in view of the above problems, and an object of the present invention is to prevent the viscosity of a printing agent from being increased, and to reduce the solid component of the printing agent due to excessive stirring of the printing agent. It is an object of the present invention to provide a printing agent filling device capable of preventing separation of liquid and liquid components.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に、請求項1の発明は、印刷マスクの貫通孔又は凹部に
印刷剤を充填する印刷剤充填装置であって、印刷剤を収
容する印刷剤収容部と、該印刷マスクとの接触する部分
に形成した印刷剤の排出口と、該印刷剤収容部に印刷剤
を補給するための補給口と、該印刷剤収容部内の該補給
口から該排出口に向かって移動しようとする印刷剤の一
部を該印刷剤の移動方向とは異なる方向に移動させて該
印刷剤を撹拌する撹拌手段とを有する充填部材を用いる
とともに、該充填部材の該補給口から該印刷剤収容部内
に印刷剤を圧入する圧入手段を、該撹拌手段とは独立に
設けたことを特徴とするものである。この印刷剤充填装
置では、圧入手段で充填部材の補給口から印刷剤収容部
内に印刷剤を圧入することにより、充填部材の排出口か
ら印刷マスクに対して印刷剤を押し出すように排出し、
該印刷マスクの貫通孔又は凹部に印刷剤を充填する。そ
して、上記圧入手段とは独立に設けた撹拌手段により、
充填部材の補給口から排出口に向かって移動しようとす
る印刷剤の一部を該印刷剤の移動方向とは異なる方向に
移動させ、該充填部材の印刷剤収容部内の印刷剤を撹拌
し、該印刷剤収容部内の印刷剤の粘度が高くならないよ
うにする。
According to one aspect of the present invention, there is provided a printing material filling apparatus for filling a printing material into a through hole or a concave portion of a printing mask, wherein the printing material is accommodated. A printing material container, a printing material discharge port formed at a portion where the printing material comes into contact with the printing mask, a supply port for replenishing the printing material storing portion with printing material, and the supply port in the printing material storing portion. A stirrer for moving a part of the printing agent moving toward the discharge port from the moving agent in a direction different from the moving direction of the printing agent to stir the printing agent. A press-fitting means for press-fitting the printing agent from the supply port of the member into the printing agent storage section is provided independently of the stirring means. In this printing material filling apparatus, by press-fitting the printing material into the printing material container from the supply port of the filling member by the press-fitting means, the printing material is discharged so as to be pushed out from the discharge port of the filling member to the print mask,
A printing agent is filled into the through holes or the concave portions of the print mask. And by the stirring means provided independently of the press-fitting means,
A part of the printing agent that is going to move from the supply port of the filling member toward the discharge port is moved in a direction different from the moving direction of the printing agent, and the printing agent in the printing agent container of the filling member is stirred, The viscosity of the printing agent in the printing agent container is prevented from increasing.

【0008】請求項2の発明は、請求項1の印刷剤充填
装置において、上記撹拌手段として、表面に凹凸を有す
る可動部材と、該可動部材を駆動する駆動装置とを設け
たことを特徴とするものである。この印刷剤充填装置で
は、表面に凹凸を有する可動部材を駆動装置で駆動する
ことにより、充填部材の補給口から排出口に向かって移
動しようとする印刷剤の一部を、該可動部材表面の凹凸
で該印刷剤の移動方向とは異なる方向に移動させ、該充
填部材の印刷剤収容部内の印刷剤を撹拌し、該印刷剤収
容部内の印刷剤の粘度が高くならないようにする。
According to a second aspect of the present invention, in the printing agent filling apparatus of the first aspect, a movable member having an uneven surface and a driving device for driving the movable member are provided as the stirring means. Is what you do. In this printing material filling device, a part of the printing material that is moving from the supply port to the discharge port of the filling member is driven by driving the movable member having the unevenness on the surface by the driving device, so that the surface of the movable member is removed. The printing agent is moved in a direction different from the moving direction of the printing agent by the unevenness to stir the printing agent in the printing agent storage section of the filling member so that the viscosity of the printing agent in the printing agent storage section does not increase.

【0009】請求項3の発明は、請求項2の印刷剤充填
装置において、上記可動部材として、上記充填部材の上
記補給口から上記排出口に向かう印刷剤の移動方向と交
差する方向に凹凸が繰り返し形成された表面を有する可
動部材を、該印刷剤の移動方向と交差する方向に往復動
可能に設けたことを特徴とするものである。この印刷剤
充填装置では、上記所定の方向に凹凸が繰り返し形成さ
れた表面を有する可動部材を駆動装置で往復動させるこ
とにより、充填部材の補給口から排出口に向かって移動
しようとする印刷剤の一部を、上記所定の方向に往復動
させ、該充填部材の印刷剤収容部内の印刷剤を撹拌し、
該印刷剤収容部内の印刷剤の粘度が高くならないように
する。ここで、上記可動部材の表面に繰り返し形成した
凹凸の方向と、該可動部材の往復動の方向とが同じであ
るので、該可動部材による印刷剤の移動が良好に行わ
れ、上記印刷剤の撹拌性が向上する。
According to a third aspect of the present invention, in the printing material filling apparatus according to the second aspect, the movable member has irregularities in a direction intersecting a moving direction of the printing agent from the supply port to the discharge port of the filling member. A movable member having a repeatedly formed surface is provided so as to be reciprocally movable in a direction intersecting with a moving direction of the printing agent. In this printing material filling device, the printing material that moves from the replenishing port of the filling member toward the discharge port by reciprocating a movable member having a surface on which irregularities are repeatedly formed in the predetermined direction by a driving device. Part of the reciprocating motion in the predetermined direction, stirring the printing agent in the printing agent container of the filling member,
The viscosity of the printing agent in the printing agent container is prevented from increasing. Here, since the direction of the irregularities repeatedly formed on the surface of the movable member and the direction of the reciprocating motion of the movable member are the same, the movement of the printing agent by the movable member is performed favorably, Stirring properties are improved.

【0010】請求項4の発明は、請求項2又は3の印刷
剤充填装置において、上記充填部材の上記印刷剤収容部
の内壁面に、上記可動部材の移動方向に沿って凹凸が繰
り返し形成されていることを特徴とするものである。こ
の印刷剤充填装置では、充填部材の印刷剤収容部内で可
動部材を駆動すると、該可動部材近傍の印刷剤は、該可
動部材とともに移動しようとする。これに対し、該印刷
剤収容部の内壁面近傍の印刷剤は、該内壁面の凹凸によ
り移動しにくくなっている。この可動部材近傍の印刷剤
と充填部材の内壁面近傍の印刷剤とが接する領域で両者
の混合が行われて該印刷剤が撹拌される。
According to a fourth aspect of the present invention, in the printing material filling apparatus according to the second or third aspect, irregularities are repeatedly formed on an inner wall surface of the printing material containing portion of the filling member along a moving direction of the movable member. It is characterized by having. In this printing agent filling device, when the movable member is driven in the printing agent storage section of the filling member, the printing agent near the movable member tends to move together with the movable member. On the other hand, the printing agent in the vicinity of the inner wall surface of the printing agent container is hard to move due to the unevenness of the inner wall surface. In a region where the printing agent near the movable member and the printing agent near the inner wall surface of the filling member are in contact with each other, the two are mixed and the printing agent is stirred.

【0011】請求項5の発明は、請求項2又は3の印刷
剤充填装置において、上記充填部材の内壁面の凹凸が、
上記補給口から上記排出口に向かう印刷剤の移動方向に
沿って延在する溝、リブ又はそれらの組み合わせを用い
て形成されていることを特徴とするものである。この印
刷剤充填装置では、充填部材の補給口から排出口に向か
う印刷剤が、該充填部材の内壁面に形成された印刷剤移
動方向に延在する溝、リブ又はそれらの組み合わせに沿
って移動するので、該排出口に向かう印刷剤の流れが該
内壁面で阻止されにくい。
According to a fifth aspect of the present invention, in the printing agent filling apparatus of the second or third aspect, the unevenness of the inner wall surface of the filling member is as follows:
It is characterized by being formed using a groove, a rib or a combination thereof extending along the direction of movement of the printing agent from the supply port toward the discharge port. In this printing material filling apparatus, the printing material that travels from the supply port of the filling member to the discharge port moves along a groove, a rib, or a combination thereof that extends in the printing material movement direction formed on the inner wall surface of the filling member. Therefore, the flow of the printing agent toward the discharge port is not easily blocked by the inner wall surface.

【0012】請求項6の発明は、請求項2又は3の印刷
剤充填装置において、上記駆動装置を、上記可動部材の
負荷トルクに基づいて該可動部材を駆動するように構成
したことを特徴とするものである。この印刷剤充填装置
では、上記印刷剤収容部内の印刷剤の粘度に応じて変化
する上記可動部材の負荷トルクに基づき、該負荷トルク
が一定になるように該可動部材を駆動し、該印刷剤収容
部内の印刷剤の粘度を所定粘度に維持する。
According to a sixth aspect of the present invention, in the printing agent filling apparatus of the second or third aspect, the driving device is configured to drive the movable member based on a load torque of the movable member. Is what you do. In this printing material filling apparatus, the printing material is driven such that the load torque is constant based on the load torque of the movable member that changes according to the viscosity of the printing material in the printing material container, and the printing material is The viscosity of the printing agent in the storage section is maintained at a predetermined viscosity.

【0013】[0013]

【発明の実施の形態】以下、本発明を、印刷対象物とし
ての半導体素子(半導体チップ)が多数形成されたウェ
ーハに印刷剤としてのクリーム半田からなるバンプ電極
を一括形成するときに用いる印刷剤充填装置(以下、
「充填装置」という。)に適用した実施形態について説
明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to a printing agent used when batch forming bump electrodes made of cream solder as a printing agent on a wafer on which a large number of semiconductor elements (semiconductor chips) as printing objects are formed. Filling device (hereafter,
It is called “filling device”. An embodiment applied to (1) will be described.

【0014】図1(a)は本実施形態に係る充填装置の
側面図であり、図1(b)は同充填装置に用いる充填部
材などの正面断面図である。この充填装置は、貫通孔か
らなる印刷用パターンが形成された印刷マスク(以下
「孔版マスク」という。)10に接触する充填部材1
と、導電性ペーストとしてのクリーム半田を充填部材1
に圧入する圧入手段とを備えている。充填部材1は、ク
リーム半田50を収容する印刷剤収容部1aと、孔版マ
スク10との接触する部分に形成した排出口1bと、該
印刷剤収容部1aにクリーム半田50を補給するための
補給口1cとを有している。この印刷剤収容部1a及び
排出口1bは、クリーム半田の充填時に移動させる方向
(図中B方向)と交差する交差方向(図中A方向)に延
在するように形成されている。また、上記排出口1b
は、孔版マスクの貫通孔よりも十分大きくなるように設
定されている。上記補給口1cは上記交差方向に沿って
複数形成され、印刷剤収容部1a内にクリーム半田が均
一に補給されるようになっている。
FIG. 1A is a side view of a filling device according to this embodiment, and FIG. 1B is a front sectional view of a filling member and the like used in the filling device. The filling device includes a filling member 1 that comes into contact with a printing mask (hereinafter, referred to as a “stencil mask”) 10 on which a printing pattern including through holes is formed.
And cream solder as a conductive paste
And press-fitting means for press-fitting. The filling member 1 includes a printing agent container 1a for accommodating the cream solder 50, a discharge port 1b formed at a portion that comes into contact with the stencil mask 10, and a supply for supplying the cream solder 50 to the printing agent container 1a. It has a mouth 1c. The printing agent storage section 1a and the discharge port 1b are formed so as to extend in an intersecting direction (A direction in the figure) that intersects a direction in which the cream solder is moved (B direction in the figure). The outlet 1b
Is set to be sufficiently larger than the through hole of the stencil mask. A plurality of the supply ports 1c are formed along the cross direction so that the cream solder is uniformly supplied into the printing agent container 1a.

【0015】また、上記充填部材1は、弾性材料(例え
ば、ウレタンゴム,シリコンゴムなどのエラストマ樹
脂)で一体成型している。さらに、排出口1b近傍の壁
1dの厚みを他の部分よりも薄くすることにより、孔版
マスクの表面凹凸に追従しやすくしている。これによ
り、上記印刷剤収容部1aが印刷対象物のウェーハ51
および孔版マスク52で塞がれて密閉空間とすることが
できる。
The filling member 1 is integrally formed of an elastic material (for example, an elastomer resin such as urethane rubber or silicone rubber). Further, the thickness of the wall 1d near the discharge port 1b is made smaller than that of the other portions, thereby making it easy to follow the surface irregularities of the stencil mask. As a result, the printing agent storage section 1a stores the wafer 51 to be printed.
And it can be closed with the stencil mask 52 to form a closed space.

【0016】また、上記充填部材1の印刷剤収容部1a
の内部には、補給口1cから排出口1bに向かって移動
しようとするクリーム半田50の一部を該クリーム半田
の移動方向とは異なる方向に移動させて撹拌する撹拌手
段が設けられている。この撹拌手段は、表面に凹凸を有
する可動部材2と、可動部材2を長手方向(図中のA方
向)方向に往復動させる駆動装置3とにより構成されて
いる。可動部材2の軸は、充填部材1の長手方向両端の
壁部に図示しない軸受を介して支持されている。また、
充填部材1の外周面は凸部2aが分布するように形成さ
れ、長手方向に凹凸が繰り返し形成された表面となって
いる。駆動装置3は充填部材1の長手方向の一方の端部
に取り付けられ、例えばソレノイド等を用いて構成する
ことができる。
Further, the printing agent accommodating portion 1a of the filling member 1 is provided.
Is provided with a stirring means for moving a part of the cream solder 50 which is going to move from the supply port 1c toward the discharge port 1b in a direction different from the moving direction of the cream solder and stirring. This stirring means is composed of a movable member 2 having an uneven surface, and a drive device 3 for reciprocating the movable member 2 in a longitudinal direction (A direction in the figure). The axis of the movable member 2 is supported by walls at both ends in the longitudinal direction of the filling member 1 via bearings (not shown). Also,
The outer peripheral surface of the filling member 1 is formed so that the convex portions 2a are distributed, and has a surface in which irregularities are repeatedly formed in the longitudinal direction. The driving device 3 is attached to one end of the filling member 1 in the longitudinal direction, and can be configured using, for example, a solenoid.

【0017】上記可動部材2の駆動装置3においては、
可動部材2の負荷トルクが所定の負荷トルクになるよう
に、可動部材2が駆動制御される。この可動部材2の負
荷トルクは印刷剤収容部1a内のクリーム半田50の粘
度に応じて変化するため、上記可動部材2の駆動制御に
より、粘度センサを個別に設けなくても、印刷剤収容部
1a内のクリーム半田50の粘度が常に所定粘度になる
ようにすることができる。
In the driving device 3 for the movable member 2,
The driving of the movable member 2 is controlled so that the load torque of the movable member 2 becomes a predetermined load torque. Since the load torque of the movable member 2 changes according to the viscosity of the cream solder 50 in the printing agent container 1a, the drive control of the movable member 2 allows the printing agent container to be provided without separately providing a viscosity sensor. The viscosity of the cream solder 50 in 1a can always be set to a predetermined viscosity.

【0018】上記可動部材2としては、軸体20の長手
方向に円盤状の板部材21を所定ピッチで取り付けたも
のを用いてもよい(図2(a)参照)。この可動部材を
充填部材1の印刷剤収容部1a内に取付けて長手方向
(図中C方向)に往復動させる。また、上記可動部材と
しては、長手方向に直交する断面形状22の直径が該長
手方向に沿って周期的に変化するものを用いてもよい
(図2(b)参照)。この可動部材を充填部材1の印刷
剤収容部1a内に取付けて長手方向(図中のC方向)に
往復動させる。更に、上記可動部材としては、軸体23
の長手方向に円盤状の板部材24を所定ピッチで斜めに
取り付けたものを用いてもよい(図2(c)参照)。こ
の可動部材を充填部材1の印刷剤収容部1a内に取付け
て図中D方向に回転させる。
The movable member 2 may be a member in which disk-shaped plate members 21 are attached at a predetermined pitch in the longitudinal direction of the shaft body 20 (see FIG. 2A). The movable member is mounted in the printing agent container 1a of the filling member 1 and reciprocated in the longitudinal direction (C direction in the figure). Further, as the movable member, a member whose diameter of the cross-sectional shape 22 orthogonal to the longitudinal direction changes periodically along the longitudinal direction may be used (see FIG. 2B). The movable member is mounted in the printing agent container 1a of the filling member 1 and reciprocated in the longitudinal direction (C direction in the figure). Further, as the movable member, a shaft 23
May be used in which a disk-shaped plate member 24 is attached obliquely at a predetermined pitch in the longitudinal direction (see FIG. 2C). This movable member is attached to the inside of the printing agent storage part 1a of the filling member 1 and rotated in the direction D in the drawing.

【0019】また、充填部材1の内壁面には、図3に示
すように補給口1cから排出口1bに向かうクリーム半
田の押し出し移動方向に沿って延在する溝1eが形成さ
れている。この溝1eにより、充填部材1の内壁面に上
記可動部材2の往復動の方向に沿って凹凸が繰り返し形
成されることになり、可動部材2近傍で移動しようとす
るクリーム半田と充填部材1の内壁面近傍で留まろうと
するクリーム半田とが接する領域で両者の混合が行われ
るので、クリーム半田を良好に撹拌することができる。
また、上記溝1eがクリーム半田の押し出し移動方向に
沿って延在するので、排出口1bに向かうクリーム半田
の流れが充填部材1の内壁面で阻止されにくく、排出口
1bからの印刷剤の押し出しをスムーズに行うことがで
きる。なお、上記溝1eの代わりに、凸状のリブを形成
してもいいし、溝とリブとを組み合わせて形成してもよ
い。
As shown in FIG. 3, a groove 1e is formed on the inner wall surface of the filling member 1 so as to extend along the direction in which the cream solder is pushed from the supply port 1c to the discharge port 1b. Due to the groove 1e, irregularities are repeatedly formed on the inner wall surface of the filling member 1 along the direction of reciprocation of the movable member 2, and the cream solder which is to move near the movable member 2 and the Since the two are mixed in a region in the vicinity of the inner wall surface and in contact with the cream solder to be retained, the cream solder can be satisfactorily stirred.
In addition, since the groove 1e extends along the direction in which the cream solder is extruded, the flow of the cream solder toward the discharge port 1b is not easily blocked by the inner wall surface of the filling member 1, and the printing agent is extruded from the discharge port 1b. Can be performed smoothly. Note that, instead of the groove 1e, a convex rib may be formed, or a combination of the groove and the rib may be formed.

【0020】上記圧入手段は、クリーム半田50を加圧
して供給する加圧供給装置4と、充填部材1の上部に取
り付けられた中継部材5と、加圧供給装置4と中継部材
5とを連結する中継ホース6とにより構成されている。
中継部材5は、充填部材1の上部に形成された係止部1
fに係止されている。この中継部材5の内壁と充填部材
1の上面とにより中継収容部5aが形成され、この中継
収容部5a内のクリーム半田50が長手方向に複数形成
された補給口1cを通って充填部材1の印刷剤収容部1
b内に補給される。なお、この中継部材5は、充填部材
1と一体成型してもよい。
The press-fitting means comprises a pressurizing and supplying device 4 for pressurizing and supplying the cream solder 50, a relay member 5 mounted on the top of the filling member 1, and connecting the pressurizing and supplying device 4 to the relaying member 5. And a relay hose 6.
The relay member 5 is provided with a locking portion 1 formed on an upper portion of the filling member 1.
f. A relay housing 5a is formed by the inner wall of the relay member 5 and the upper surface of the filling member 1, and the cream solder 50 in the relay housing 5a passes through a supply port 1c formed in a plurality of lengthwise directions to supply the filling member 1 with the cream solder 50. Printing agent container 1
b. Note that the relay member 5 may be integrally formed with the filling member 1.

【0021】上記加圧供給装置4としては、図4に示す
ようにシリンダ40内のクリーム半田50をピストン4
1で押し出すものを用いることができる。この構成の場
合は、ピストン41に一定圧力を加えておくことによ
り、印刷剤収容部1a内の内圧を一定圧力に維持するこ
とができる。また、図5(a)に示すようにチューブ4
2内のクリーム半田を回転ローラ43の外周部に取り付
けた小ローラ44で送り出すものや、図5(b)に示す
ような筒状の搬送路45内のクリーム半田50をスパイ
ラル状の搬送部材46で押し出すものなどを用いてもよ
い。更に、クリーム半田を収容した可撓性バックの上部
に絞りローラ対を取り付け、この絞りローラ対を該可撓
性バック内のクリーム半田を絞り出すように移動させる
ことにより、該可撓性バック内のクリーム半田を加圧供
給するものを用いてもよい。
As shown in FIG. 4, the cream solder 50 in the cylinder 40 is
One extruded at 1 can be used. In the case of this configuration, by applying a constant pressure to the piston 41, the internal pressure in the printing agent container 1a can be maintained at a constant pressure. Also, as shown in FIG.
2 is fed by a small roller 44 attached to the outer periphery of the rotary roller 43, or the cream solder 50 in a cylindrical transport path 45 as shown in FIG. Alternatively, a material extruded with the above method may be used. Further, a pair of squeezing rollers is attached to the upper part of the flexible bag containing the cream solder, and the pair of squeezing rollers is moved so as to squeeze out the cream solder in the flexible bag. A cream solder may be supplied under pressure.

【0022】上記構成の充填装置を用いたクリーム半田
の印刷は次のように行う。まず、図1(b)に示すよう
に孔版マスク3が、貫通孔3aがウェーハ2の導電性パ
ッド2a上にくるように位置決めされる。そして、上記
圧入手段でクリーム半田50を充填部材1の印刷剤収容
部1a内に圧入するとともに、充填部材1の印刷剤収容
部1aがウェーハ51および孔版マスク52で塞がれて
密閉空間となった状態で、充填部材1を矢印B方向に移
動させると、孔版マスク52の貫通孔52aがつぎつぎ
とクリーム半田50で圧入充填されていく。そして、ク
リーム半田50が貫通孔52aに圧入充填された孔版マ
スク52を、所定時間経過した後、ウェーハ51から離
すと、ウェーハ51の導電性パッド51a上にバンプ電
極が形成される。
The printing of cream solder using the filling device having the above-described structure is performed as follows. First, as shown in FIG. 1B, the stencil mask 3 is positioned so that the through-hole 3a is located on the conductive pad 2a of the wafer 2. Then, the cream solder 50 is press-fitted into the printing material accommodating portion 1a of the filling member 1 by the press-fitting means, and the printing material accommodating portion 1a of the filling member 1 is closed by the wafer 51 and the stencil mask 52 to form a sealed space. When the filling member 1 is moved in the direction of arrow B in this state, the through holes 52a of the stencil mask 52 are successively press-filled with the cream solder 50. Then, when the stencil mask 52 in which the cream solder 50 is press-fitted into the through holes 52a is separated from the wafer 51 after a predetermined time has elapsed, bump electrodes are formed on the conductive pads 51a of the wafer 51.

【0023】以上、本実施形態によれば、充填部材1の
印刷剤収容部1a内のクリーム半田50を往復動する可
動部材2で撹拌できるので、該印刷剤収容部1a内のク
リーム半田50の高粘度化を確実に防止することができ
る。したがって、経時にわたって良好なバンプ電極形成
を行うことができる。更に、充填部材1の排出口1bか
ら孔版マスク52に対するクリーム半田50の押し出し
を、印刷剤収容部1a内のクリーム半田50を撹拌する
可動部材2ではなく、該印刷剤収容部1aにクリーム半
田50を圧入する圧入手段で行えるので、上記クリーム
半田50の押し出しを連続して行ってもクリーム半田5
0を過剰に撹拌することなく、クリーム半田50の固体
成分である半田粒子と液体成分であるフラックスとの分
離を防止することができる。
As described above, according to the present embodiment, the cream solder 50 in the printing material container 1a of the filling member 1 can be stirred by the reciprocating movable member 2, so that the cream solder 50 in the printing material container 1a can be stirred. High viscosity can be reliably prevented. Therefore, it is possible to form a good bump electrode over time. Further, the cream solder 50 is extruded from the discharge port 1b of the filling member 1 to the stencil mask 52, not by the movable member 2 that stirs the cream solder 50 in the printing agent container 1a, but by the printing agent container 1a. Can be performed by a press-fitting means for press-fitting the cream solder 50 even if the cream solder 50 is continuously extruded.
It is possible to prevent the solder particles, which are the solid components of the cream solder 50, from being separated from the flux, which is the liquid component, without excessively stirring 0.

【0024】なお、上記実施形態においては、半導体素
子が複数形成されているウェーハ1上にクリーム半田か
らなるバンプ電極を一括形成(印刷)する場合について
説明したが、本発明は、印刷対象物の種類や印刷剤の種
類に限定されることなく適用することができるものであ
る。例えば、本発明は、半導体チップがモールドされた
BGA、CSPタイプのパッケージや、基板に表面実装
されるコネクタ類にバンプ電極を形成する場合にも適用
することができ、同様な効果が得られるものである。ま
た、パッケージやコネクタ等の電子部品にバンプ電極を
形成する場合、バンプ電極形成面が同一の仮想平面上に
位置するように複数の電子部品を並べ、該複数の電子部
品のバンプ電極形成面にバンプ電極を一括形成(印刷)
する場合にも適用できるものである。
In the above embodiment, the case where the bump electrodes made of cream solder are collectively formed (printed) on the wafer 1 on which a plurality of semiconductor elements are formed has been described. The present invention can be applied without being limited to the type and the type of printing agent. For example, the present invention can be applied to a case where a bump electrode is formed on a BGA or CSP type package in which a semiconductor chip is molded, or a connector surface-mounted on a substrate, and a similar effect can be obtained. It is. Further, when forming a bump electrode on an electronic component such as a package or a connector, a plurality of electronic components are arranged so that the bump electrode forming surface is located on the same virtual plane, and the bump electrode forming surface of the plurality of electronic components is arranged on the bump electrode forming surface. Batch formation of bump electrodes (printing)
It is also applicable to the case where it does.

【0025】また、上記実施形態のおいては、貫通孔か
らなる印刷用パターンを有する印刷マスク(孔版マス
ク)に印刷剤を充填する場合について説明したが、本発
明は、凹部からなる印刷用パターンを有する印刷マスク
(凹版マスク)に印刷剤を充填する場合にも適用できる
ものである。
In the above embodiment, the case where the printing agent is filled in the printing mask (stencil mask) having the printing pattern including the through-hole has been described. The present invention can also be applied to a case where a printing agent is filled in a printing mask (intaglio mask) having the following.

【0026】[0026]

【発明の効果】請求項1乃至6の発明によれば、充填部
材の印刷剤収容部内の印刷剤を撹拌手段で撹拌できるの
で、該印刷剤収容部内の印刷剤の高粘度化を確実に防止
することができる。しかも、充填部材の排出口から孔版
マスクの印刷面に対する印刷剤の押し出しを、印刷剤収
容部内の印刷剤を撹拌する撹拌手段ではなく、該印刷剤
収容部に印刷剤を圧入する圧入手段で行えるので、上記
印刷剤の押し出しを連続して行っても印刷剤を過剰に撹
拌することがなくなり、印刷剤の固体成分と液体成分と
の分離を防止することができるという効果がある。
According to the first to sixth aspects of the present invention, the printing agent in the printing agent storage section of the filling member can be agitated by the stirring means, so that the printing agent in the printing agent storage section is reliably prevented from having a high viscosity. can do. Moreover, the printing agent can be pushed out of the printing surface of the stencil mask from the discharge port of the filling member by the press-fitting unit that press-fits the printing agent into the printing agent storage unit instead of the stirring unit that stirs the printing agent in the printing agent storage unit. Therefore, even if the printing agent is continuously extruded, the printing agent is not agitated excessively, and there is an effect that separation of the solid component and the liquid component of the printing agent can be prevented.

【0027】特に、請求項2の発明によれば、充填部材
の補給口から排出口に向かって移動しようとする印刷剤
の一部を、該可動部材表面の凹凸で該印刷剤の移動方向
とは異なる方向に移動させて該印刷剤を撹拌しているの
で、印刷剤の排出口に向かう全体的な移動を阻害するこ
となく、該印刷剤収容部内の印刷剤の高粘度化を防止す
ることができるという効果がある。
In particular, according to the second aspect of the present invention, a part of the printing agent moving from the replenishing port to the discharging port of the filling member is changed by the unevenness of the surface of the movable member to the direction of movement of the printing agent. Is moved in a different direction to agitate the printing agent, so that it is possible to prevent the printing agent from becoming highly viscous in the printing agent storage portion without hindering the overall movement toward the discharge outlet of the printing agent. There is an effect that can be.

【0028】また特に、請求項3の発明によれば、可動
部材による印刷剤の移動を良好に行うことができ、印刷
剤の撹拌性が向上するという効果がある。
In particular, according to the third aspect of the invention, the printing agent can be favorably moved by the movable member, and there is an effect that the agitation property of the printing agent is improved.

【0029】また特に、請求項4の発明によれば、可動
部材近傍で移動しようとする印刷剤と充填部材の内壁面
近傍で留まろうとする印刷剤とが接する領域で両者の混
合が行われるので、印刷剤を良好に撹拌することができ
るという効果がある。
In particular, according to the fourth aspect of the present invention, the printing agent which is to be moved near the movable member and the printing agent which is to be retained near the inner wall surface of the filling member are mixed in a region where the two are in contact with each other. Therefore, there is an effect that the printing agent can be favorably stirred.

【0030】また特に、請求項5の発明によれば、排出
口に向かう印刷剤の流れが充填部材の内壁面で阻止され
にくいので、排出口からの印刷剤の押し出しをスムーズ
に行うことができるという効果がある。
According to the fifth aspect of the present invention, since the flow of the printing agent toward the outlet is not easily blocked by the inner wall surface of the filling member, the printing agent can be smoothly pushed out from the outlet. This has the effect.

【0031】また特に、請求項6の発明によれば、個別
に設けた粘度センサで印刷剤収容部内の印刷剤の粘度を
検知しなくても、印刷剤収容部内の印刷剤の粘度を所定
粘度に維持することができるという効果がある。
According to the present invention, the viscosity of the printing agent in the printing agent container can be determined by the predetermined viscosity even if the viscosity of the printing agent in the printing agent container is not detected by a separately provided viscosity sensor. There is an effect that can be maintained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(a)は本発明の実施形態に係る充填装置の側
面図。(b)は同充填装置に用いた充填部材の断面図。
FIG. 1A is a side view of a filling device according to an embodiment of the present invention. (B) is sectional drawing of the filling member used for the same filling apparatus.

【図2】(a)乃至(c)は変形例に係る可動部材の斜
視図。
FIGS. 2A to 2C are perspective views of a movable member according to a modification.

【図3】同充填部材の部分断面斜視図。FIG. 3 is a partial cross-sectional perspective view of the filling member.

【図4】圧入手段の加圧供給装置の概略構成図。FIG. 4 is a schematic configuration diagram of a pressurizing supply device of a press-fitting unit.

【図5】(a)および(b)は変形例に係る加圧供給装
置の概略構成図。
FIGS. 5A and 5B are schematic configuration diagrams of a pressure supply device according to a modification.

【符号の説明】[Explanation of symbols]

1 充填部材 1a 印刷剤収容部 1b 排出口 1c 補給口 1e 溝 2 可動部材 2a 可動部材表面の凸部 3 駆動装置 4 加圧供給装置 40 シリンダ 41 ピストン 5 中継部材 5a 中継収容部 6 中継ホース 50 クリーム半田 51 ウェーハ 52 孔版マスク 52a 貫通孔 DESCRIPTION OF SYMBOLS 1 Filling member 1a Printing agent accommodation part 1b Discharge port 1c Supply port 1e Groove 2 Movable member 2a Convex part of movable member surface 3 Drive device 4 Pressurizing supply device 40 Cylinder 41 Piston 5 Relay member 5a Relay accommodation portion 6 Relay hose 50 Cream Solder 51 Wafer 52 Stencil mask 52a Through hole

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】印刷マスクの貫通孔又は凹部に印刷剤を充
填する印刷剤充填装置であって、 印刷剤を収容する印刷剤収容部と、該印刷マスクとの接
触する部分に形成した印刷剤の排出口と、該印刷剤収容
部に印刷剤を補給するための補給口と、該印刷剤収容部
内の該補給口から該排出口に向かって移動しようとする
印刷剤の一部を該印刷剤の移動方向とは異なる方向に移
動させて該印刷剤を撹拌する撹拌手段とを有する充填部
材を用いるとともに、 該充填部材の該補給口から該印刷剤収容部内に印刷剤を
圧入する圧入手段を、該撹拌手段とは独立に設けたこと
を特徴とする印刷剤充填装置。
1. A printing agent filling device for filling a printing agent into a through-hole or a concave portion of a printing mask, wherein the printing agent is formed in a printing agent storage section for storing the printing agent and a portion in contact with the printing mask. And a replenishing port for replenishing the printing agent container with the printing agent, and a part of the printing agent moving from the replenishing port in the printing agent container toward the discharging port. Press-fitting means for using a filling member having a stirring means for moving the printing agent in a direction different from the moving direction of the agent to stir the printing agent, and for press-fitting the printing agent into the printing agent container from the supply port of the filling member. Is provided independently of the stirring means.
【請求項2】請求項1の印刷剤充填装置において、 上記撹拌手段として、表面に凹凸を有する可動部材と、
該可動部材を駆動する駆動装置とを設けたことを特徴と
する印刷剤充填装置。
2. The printing material filling apparatus according to claim 1, wherein the stirring means comprises: a movable member having an uneven surface;
And a driving device for driving the movable member.
【請求項3】請求項2の印刷剤充填装置において、 上記可動部材として、上記充填部材の上記補給口から上
記排出口に向かう印刷剤の移動方向と交差する方向に凹
凸が繰り返し形成された表面を有する可動部材を、該印
刷剤の移動方向と交差する方向に往復動可能に設けたこ
とを特徴とする印刷剤充填装置。
3. The printing material filling apparatus according to claim 2, wherein the movable member has a surface on which irregularities are repeatedly formed in a direction intersecting a moving direction of the printing material from the supply port to the discharge port of the filling member. A printing material filling apparatus, characterized in that a movable member having: is provided so as to be able to reciprocate in a direction intersecting with the moving direction of the printing material.
【請求項4】請求項2又は3の印刷剤充填装置におい
て、 上記充填部材の上記印刷剤収容部の内壁面に、上記可動
部材の移動方向に沿って凹凸が繰り返し形成されている
ことを特徴とする印刷剤充填装置。
4. The printing material filling device according to claim 2, wherein the inner surface of the printing material container of the filling member has irregularities repeatedly formed along the moving direction of the movable member. Printing agent filling device.
【請求項5】請求項2又は3の印刷剤充填装置におい
て、 上記充填部材の内壁面の凹凸が、上記補給口から上記排
出口に向かう印刷剤の移動方向に沿って延在する溝、リ
ブ又はそれらの組み合わせを用いて形成されていること
を特徴とする印刷剤充填装置。
5. The printing material filling apparatus according to claim 2, wherein the unevenness of the inner wall surface of the filling member extends along a direction in which the printing material moves from the supply port toward the discharge port. Or a printing agent filling device characterized by being formed using those combinations.
【請求項6】請求項2又は3の印刷剤充填装置におい
て、 上記可動部材の負荷トルクが一定になるように、該可動
部材を駆動することを特徴とする印刷剤充填装置。
6. The printing material filling apparatus according to claim 2, wherein the movable member is driven so that the load torque of the movable member is constant.
JP11007228A 1999-01-14 1999-01-14 Printing agent filling device Withdrawn JP2000202988A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11007228A JP2000202988A (en) 1999-01-14 1999-01-14 Printing agent filling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11007228A JP2000202988A (en) 1999-01-14 1999-01-14 Printing agent filling device

Publications (1)

Publication Number Publication Date
JP2000202988A true JP2000202988A (en) 2000-07-25

Family

ID=11660149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11007228A Withdrawn JP2000202988A (en) 1999-01-14 1999-01-14 Printing agent filling device

Country Status (1)

Country Link
JP (1) JP2000202988A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003504249A (en) * 1999-07-19 2003-02-04 ディーイーケイ プリンティング マシーンズ リミテッド Screen print improvements
US6571701B1 (en) * 2001-05-04 2003-06-03 Speedline Technologies, Inc. Stirring mechanism for viscous-material printer and method of printing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003504249A (en) * 1999-07-19 2003-02-04 ディーイーケイ プリンティング マシーンズ リミテッド Screen print improvements
JP4831904B2 (en) * 1999-07-19 2011-12-07 ディーイーケー インターナショナル ゲゼルシャフト ミット ベシュレンクテル ハフツング Improvements related to screen printing
US6571701B1 (en) * 2001-05-04 2003-06-03 Speedline Technologies, Inc. Stirring mechanism for viscous-material printer and method of printing

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