JP2000146819A - Optical system for optical dust sensor - Google Patents
Optical system for optical dust sensorInfo
- Publication number
- JP2000146819A JP2000146819A JP10317443A JP31744398A JP2000146819A JP 2000146819 A JP2000146819 A JP 2000146819A JP 10317443 A JP10317443 A JP 10317443A JP 31744398 A JP31744398 A JP 31744398A JP 2000146819 A JP2000146819 A JP 2000146819A
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- light
- optical
- dust
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 290
- 239000000428 dust Substances 0.000 title claims abstract description 118
- 238000001514 detection method Methods 0.000 claims abstract description 18
- 238000005259 measurement Methods 0.000 claims description 78
- 239000002131 composite material Substances 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 14
- 239000002245 particle Substances 0.000 description 11
- 230000010287 polarization Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 241000238876 Acari Species 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ほこり（ダニやカ
ビ等を含む）に光が照射された時に生じるＭｉｅ散乱に
よる受信光強度のレベル変動（減少）によってほこりの
存在を検出する、光学式ほこりセンサの光学系に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical system for detecting the presence of dust by detecting a level variation (decrease) in received light intensity due to Mie scattering generated when light (including mites and molds) is irradiated to the dust. The present invention relates to an optical system of a dust sensor.
【０００２】[0002]
【従来の技術】図８は、例えば、水野眞人「液体用パー
ティクルカウンタ」センサ技術、ｖｏｌ．１０，Ｎｏ．
１２，５５−５９（９０）に示された従来のレーザ液中
パーティクルカウンタの光学系の構成を示す構成説明図
である。図において、１０は光源であるレーザダイオー
ド、２０はコリメータレンズ２１と軸外し楕円面鏡２２
からなる照射光学系、３０は集光光学系、４０は光検出
器であるフォトダイオードである。レーザダイオード１
０からの光１００は照射光学系２０によって試料１１０
が流されるセル１２０の位置に絞り込まれる。このよう
にレーザダイオード１０からの光１００が絞り込まれた
焦点位置が測定領域５０（図示せず）である。この時、
試料１１０中にレーザダイオード１０からの光１００の
波長と同程度の粒径を有するほこりが存在していると、
レーザダイオード１０からの光１００はこのほこりによ
ってＭｉｅ散乱される。この散乱光１０１を集光光学系
３０で受光し、フォトダイオード４０の検出部分に集光
する。2. Description of the Related Art FIG. 8 shows, for example, the sensor technology of "Liquid particle counter" by Masato Mizuno, vol. 10, No.
FIG. 12 is a configuration explanatory diagram showing a configuration of an optical system of a conventional particle counter in a laser liquid shown in 12, 55-59 (90). In the figure, 10 is a laser diode as a light source, 20 is a collimator lens 21 and an off-axis elliptical mirror 22
Is an irradiation optical system, 30 is a condensing optical system, and 40 is a photodiode as a photodetector. Laser diode 1
The light 100 from 0 is supplied to the sample 110 by the irradiation optical system 20.
Is narrowed down to the position of the cell 120 through which the fluid flows. The focus position where the light 100 from the laser diode 10 is thus narrowed is the measurement area 50 (not shown). At this time,
When dust having a particle size substantially equal to the wavelength of the light 100 from the laser diode 10 is present in the sample 110,
The light 100 from the laser diode 10 is Mie-scattered by the dust. The scattered light 101 is received by the condensing optical system 30 and condensed on a detection portion of the photodiode 40.
【０００３】上記のように、従来のレーザ液中パーティ
クルカウンタによれば、測定領域５０に光１００の波長
と同程度の粒径を有するほこりが存在すると、ほこりに
よるＭｉｅ散乱の散乱光１０１をフォトダイオード４０
で受光することができるため、図９に示すようなフォト
ダイオード４０の出力変動（増加）を得ることができる
ので、ほこりを検出することができる。As described above, according to the conventional particle counter in a laser liquid, if dust having a particle size substantially equal to the wavelength of the light 100 is present in the measurement area 50, the scattered light 101 of Mie scattering due to the dust is converted into a photo. Diode 40
Therefore, the output fluctuation (increase) of the photodiode 40 as shown in FIG. 9 can be obtained, so that dust can be detected.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記し
た従来のレーザ液中パーティクルカウンタは、小さい粒
子を測定するためにレーザダイオード１０を用い、測定
領域５０のエネルギー密度を高めるために、レーザダイ
オード１０からの光１００を照射光学系２０によって測
定領域５０にビーム径が１０μｍ程度以下に絞り込んで
おり、また、図８に示したように構成されているため、
測定領域５０と集光光学系３０でフォトダイオード４０
を見込む位置がずれると十分に散乱光を受光できなくな
り、高い位置合わせ精度が要求されると共に振動等の影
響を受けない構造が必要となるという問題点を有する。However, the above-described conventional particle counter in a laser liquid uses the laser diode 10 to measure small particles, and uses the laser diode 10 to increase the energy density of the measurement region 50. Since the beam diameter of the light 100 is narrowed down to about 10 μm or less in the measurement area 50 by the irradiation optical system 20 and is configured as shown in FIG.
The measurement area 50 and the condensing optical system 30 make the photodiode 40
If the expected position is shifted, scattered light cannot be sufficiently received, and high alignment accuracy is required and a structure that is not affected by vibration or the like is required.
【０００５】本発明は、検出対象のほこりで発生したＭ
ｉｅ散乱による散乱光を直接的に検出器で検出する必要
がなく、各部の設定精度を緩和する光学式ほこりセンサ
光学系を得ることを目的としており、さらに、振動等に
対する信頼性を向上した光学式ほこりセンサ光学系を得
ることを目的としている。According to the present invention, the M
It is not necessary to directly detect the scattered light due to IE scattering with a detector, and it is an object of the present invention to obtain an optical dust sensor optical system that alleviates the setting accuracy of each part, and furthermore has improved reliability against vibration and the like. It is intended to obtain a type dust sensor optical system.
【０００６】[0006]
【課題を解決するための手段】この発明の請求項１に係
る光学式ほこりセンサ光学系は、検出対象のほこりの大
きさに対して前方散乱を主とするＭｉｅ散乱を発生させ
る波長の光源と、上記波長の光を検出する光検出器と、
上記光源からの光が絞り込まれ、上記検出対象のほこり
に照射される測定領域と、上記光源からの光を上記測定
領域に絞り込む照射光学系と、上記測定領域付近の所定
の位置に設置され、上記測定領域に絞り込まれた上記光
源からの光を反射させる反射鏡と、上記反射鏡で反射さ
れた光を上記光検出器に導く集光光学系とを備え、上記
検出対象のほこりで発生した上記Ｍｉｅ散乱による上記
光検出器の出力の減少により、上記検出対象のほこりを
検出することを特徴とするものである。According to a first aspect of the present invention, there is provided an optical dust sensor optical system comprising: a light source having a wavelength that generates Mie scattering mainly including forward scattering with respect to the size of dust to be detected; A photodetector for detecting light of the above wavelength,
The light from the light source is narrowed down, the measurement area irradiated to the dust of the detection target, the irradiation optical system for narrowing down the light from the light source to the measurement area, and the light source is installed at a predetermined position near the measurement area, A reflecting mirror for reflecting light from the light source narrowed down to the measurement area, and a condensing optical system for guiding the light reflected by the reflecting mirror to the photodetector, generated by dust of the detection target The method is characterized in that dust of the detection target is detected by a decrease in the output of the photodetector due to the Mie scattering.
【０００７】また、この発明の請求項２に係る光学式ほ
こりセンサ光学系は、上記照射光学系と集光光学系に代
えて、上記照射光学系として機能すると共に上記集光光
学系としても機能する共通の共用光学系と、上記光源か
らの光を上記共用光学系に導くと共に上記反射鏡で反射
されて上記共用光学系に入射した光を上記光検出器に導
く、上記光源から上記共用光学系への光路と上記共用光
学系から上記光検出器への光路を分離する光学素子とを
備えたことを特徴とするものである。An optical dust sensor optical system according to a second aspect of the present invention functions as the irradiation optical system instead of the irradiation optical system and the condensing optical system, and also functions as the condensing optical system. A common shared optical system that guides light from the light source to the shared optical system and guides light reflected by the reflecting mirror and incident on the shared optical system to the photodetector. An optical element for separating an optical path to a system and an optical path from the shared optical system to the photodetector is provided.
【０００８】また、この発明の請求項３に係る光学式ほ
こりセンサ光学系は、上記共用光学系を上記測定領域に
後側焦点を有し、上記光源からの光を上記測定領域に集
光させるよう形成し、上記反射鏡を上記後側焦点位置に
設置される平面鏡としたことを特徴とするものである。According to a third aspect of the present invention, in the optical dust sensor optical system, the common optical system has a rear focal point in the measurement area, and condenses light from the light source on the measurement area. And the reflecting mirror is a plane mirror installed at the rear focal point.
【０００９】また、この発明の請求項４に係る光学式ほ
こりセンサ光学系は、上記共用光学系を上記測定領域に
後側焦点を有し、上記光源からの光を上記測定領域に集
光させるよう形成し、上記反射鏡を上記後側焦点を中心
とする球面内面で形成される球面鏡としたことを特徴と
するものである。In the optical dust sensor optical system according to a fourth aspect of the present invention, the common optical system has a rear focal point in the measurement area, and condenses light from the light source to the measurement area. And the reflecting mirror is a spherical mirror formed by the inner surface of a spherical surface centered on the rear focal point.
【００１０】また、この発明の請求項５に係る光学式ほ
こりセンサ光学系は、上記共用光学系を上記光源からの
光を平行光として上記測定領域に絞り込むコリメート光
学系とし、上記反射鏡を平面鏡としたことを特徴とする
ものである。According to a fifth aspect of the present invention, in the optical dust sensor optical system, the common optical system is a collimating optical system that narrows down the light from the light source to the measurement area as parallel light, and the reflecting mirror is a plane mirror. It is characterized by having.
【００１１】また、この発明の請求項６に係る光学式ほ
こりセンサ光学系は、上記共用光学系と上記光学素子に
代えて、上記共用光学系と上記光学素子のそれぞれの機
能を有する一体化した複合光学系を備えたことを特徴と
するものである。In the optical dust sensor optical system according to a sixth aspect of the present invention, instead of the common optical system and the optical element, an integrated unit having the functions of the common optical system and the optical element is provided. A composite optical system is provided.
【００１２】また、この発明の請求項７に係る光学式ほ
こりセンサ光学系は、上記光源と光検出器と共用光学系
と光学素子に代えて、検出対象のほこりの大きさに対し
て前方散乱を主とするＭｉｅ散乱を発生させる波長の光
源となるレーザダイオードと、上記レーザダイオードか
らの光を上記測定領域に絞り込む対物レンズと、上記反
射鏡で反射されて上記対物レンズに入射した上記レーザ
ダイオードからの光を検出する光検出器となるフォトダ
イオードとを有する光ピックアップ光学系を備え、上記
対物レンズの後側焦点位置を上記測定領域とし、上記反
射鏡を上記対物レンズの後側焦点位置に設置される平面
鏡としたことを特徴とするものである。According to a seventh aspect of the present invention, there is provided the optical dust sensor optical system, wherein the light source, the photodetector, the common optical system, and the optical element are replaced by a forward scatter with respect to the size of the dust to be detected. A laser diode serving as a light source having a wavelength that mainly generates Mie scattering, an objective lens for narrowing light from the laser diode to the measurement region, and the laser diode reflected by the reflecting mirror and incident on the objective lens An optical pickup optical system having a photodiode serving as a photodetector that detects light from the target lens, the rear focal position of the objective lens as the measurement area, and the reflecting mirror at the rear focal position of the objective lens. A flat mirror to be installed is characterized.
【００１３】また、この発明の請求項８に係る光学式ほ
こりセンサ光学系は、上記光源と光検出器と共用光学系
と光学素子に代えて、検出対象のほこりの大きさに対し
て前方散乱を主とするＭｉｅ散乱を発生させる波長の光
源となるレーザダイオードと、上記レーザダイオードか
らの光を上記測定領域に絞り込む対物レンズと、上記反
射鏡で反射されて上記対物レンズに入射した上記レーザ
ダイオードからの光を検出する光検出器となるフォトダ
イオードとを有する光ピックアップ光学系を備え、上記
対物レンズの後側焦点位置を上記測定領域とし、上記反
射鏡を上記対物レンズの後側焦点を中心とする球面内面
で形成される球面鏡としたことを特徴とするものであ
る。According to an eighth aspect of the present invention, there is provided an optical dust sensor optical system, wherein the light source, the photodetector, the common optical system, and the optical element are replaced by a forward scatter with respect to the size of the dust to be detected. A laser diode serving as a light source having a wavelength that mainly generates Mie scattering, an objective lens for narrowing light from the laser diode to the measurement region, and the laser diode reflected by the reflecting mirror and incident on the objective lens An optical pickup optical system having a photodiode serving as a photodetector for detecting light from the object lens, the rear focal position of the objective lens being the measurement area, and the reflecting mirror being centered on the rear focal point of the objective lens. And a spherical mirror formed by the inner surface of the spherical surface.
【００１４】[0014]
【発明の実施の形態】実施の形態１．図１は本発明によ
る光学式ほこりセンサ光学系の実施の形態１を示す構成
説明図である。図１において、６０は照射光学系として
用いると共に集光光学系としても用いられる共用光学
系、７０は共用光学系６０の後側焦点位置に相当する測
定領域５０の位置に設置された平面鏡、８０は光源１０
からの光１００を共用光学系６０に導くと共に共用光学
系６０からの光を光検出器４０に導く光学素子である。
なお、図１において、図８と同一または相当部分には、
同一符号を付している。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 FIG. 1 is a configuration explanatory view showing Embodiment 1 of an optical dust sensor optical system according to the present invention. In FIG. 1, reference numeral 60 denotes a shared optical system used as an irradiation optical system and also used as a condensing optical system; 70, a plane mirror installed at a position of a measurement area 50 corresponding to a rear focal position of the shared optical system 60; Is the light source 10
An optical element that guides light 100 from the common optical system 60 to the photodetector 40 while guiding light 100 from the common optical system 60.
In FIG. 1, the same or equivalent parts as those in FIG.
The same reference numerals are given.
【００１５】次に、図１に示した光学式ほこりセンサ光
学系の動作について説明する。光源１０から出た光１０
０は、照射光学系と集光光学系の共用光学系６０によっ
て測定領域５０に絞り込まれる。絞り込まれた光は平面
鏡７０によって反射されて戻され、再び共用光学系６０
によって受光されて集光され、光学素子８０によって光
検出器４０に導かれ受光される。一方、この測定領域５
０に光源１０の波長と同程度の大きさのほこりが到来し
た時、光源１０からの光１００はほこりによって散乱さ
れる。図２に光源１０の波長を０．７８μｍとした時の
粒径１μｍのほこりによる散乱強度の散乱角依存性を示
す。図２に示したように散乱源の粒径（２Ａとする）が
光の波長（λとする）と同程度以上（散乱係数α＝２π
Ａ／λが４程度）である場合のＭｉｅ散乱においては、
散乱光のほとんどが前方に散乱され、後方（光の到来方
向）には極僅かしか散乱されないことが分かる。従っ
て、直接的に共用光学系６０へ戻る散乱光はほとんど無
く、前方に散乱されたものが平面鏡７０によって反射さ
れて戻されることになる。しかしながら、前方散乱の角
度範囲のうち共用光学系６０に戻されて再び有効に入る
可能性のある角度範囲は限られ、さらに、平面鏡７０に
よって反射され、再度ほこりで散乱されるため、共用光
学系６０へ戻る前方散乱光は激減する。このため、測定
領域５０に絞り込まれた光１００のうち測定領域５０に
到来したほこりによって散乱された光は共用光学系６０
にほとんど戻らず、光検出器４０で受光されないため、
光検出器４０からの出力には図３に示すようなレベル変
動（減少）が生じる。Next, the operation of the optical dust sensor optical system shown in FIG. 1 will be described. Light 10 emitted from light source 10
0 is narrowed down to the measurement area 50 by the shared optical system 60 of the irradiation optical system and the condensing optical system. The squeezed light is reflected back by the plane mirror 70, and is again returned to the common optical system 60.
The optical element 80 guides the light to the photodetector 40 and receives the light. On the other hand, this measurement area 5
When dust arrives at zero, the size of which is comparable to the wavelength of the light source 10, the light 100 from the light source 10 is scattered by the dust. FIG. 2 shows the scattering angle dependence of the scattering intensity due to dust having a particle size of 1 μm when the wavelength of the light source 10 is 0.78 μm. As shown in FIG. 2, the particle size of the scattering source (2A) is equal to or greater than the wavelength of the light (λ) (scattering coefficient α = 2π).
In the case of Mie scattering when A / λ is about 4),
It can be seen that most of the scattered light is scattered forward, and very little is scattered backward (in the direction of arrival of light). Therefore, almost no scattered light directly returns to the common optical system 60, and the light scattered forward is reflected by the plane mirror 70 and returned. However, the angle range of the forward scattering angle range which is likely to be returned to the common optical system 60 and re-entered is limited, and furthermore, it is reflected by the plane mirror 70 and scattered again by dust. The forward scattered light returning to 60 is dramatically reduced. For this reason, the light scattered by the dust arriving at the measurement region 50 out of the light 100 narrowed down to the measurement region 50 is the common optical system 60.
, And is not received by the photodetector 40.
The output from the photodetector 40 undergoes a level fluctuation (decrease) as shown in FIG.
【００１６】例えば、光源１０の波長を０．７８μｍと
し、共用光学系６０の開口数ＮＡを０．４５とすると、
次式から絞り込まれたところでのスポット径は２．１μ
ｍ程度となる。 Ａspot＝２．４４λ／２・ＮＡ 一方、ほこりの粒径を１μｍとすると、スポットサイズ
が３．４６μｍ2 であるのに対してほこりの断面積が
０．７９μｍ2 であるので、図３に示した出力の減少は
２３％程度にもなり、ほこりの検出が可能であることが
分かる。For example, if the wavelength of the light source 10 is 0.78 μm and the numerical aperture NA of the common optical system 60 is 0.45,
The spot diameter narrowed down from the following equation is 2.1μ
m. A spot = 2.44λ / 2 · NA On the other hand, if the particle size of dust is 1 μm, the spot size is 3.46 μm 2 and the cross-sectional area of dust is 0.79 μm 2 . The output decrease shown is about 23%, which indicates that dust can be detected.
【００１７】以上は共用光学系を備えた光学式ほこりセ
ンサ光学系の構成説明図を示して、検出対象のほこりの
大きさに対して前方散乱を主とするＭｉｅ散乱を発生さ
せる波長の光源を用い、測定領域に絞り込まれた上記光
源からの光を測定領域付近の所定の位置に設置された反
射鏡で反射し、上記検出対象のほこりで発生した上記Ｍ
ｉｅ散乱による光検出器の出力の減少により、上記検出
対象のほこりを検出する一実施の形態を説明したが、共
用光学系の機能を別々に担う個別の照射光学系と集光光
学系で構成できることは言うまでもない。The above is an explanatory diagram of the configuration of an optical dust sensor optical system provided with a common optical system. A light source having a wavelength that generates Mie scattering mainly of forward scattering with respect to the size of dust to be detected is shown. The light from the light source narrowed down to the measurement area is reflected by a reflecting mirror installed at a predetermined position near the measurement area, and the M is generated by dust of the detection target.
An embodiment has been described in which the above-described detection target dust is detected by reducing the output of the photodetector due to IE scattering. However, it is composed of a separate irradiation optical system and a condensing optical system that separately perform the functions of a common optical system. It goes without saying that you can do it.
【００１８】以上のように、検出対象のほこりの大きさ
に対して前方散乱を主とするＭｉｅ散乱を発生させる波
長の光源を用い、測定領域に絞り込まれた上記光源から
の光を測定領域付近の所定の位置に設置された反射鏡で
反射し、上記検出対象のほこりで発生した上記Ｍｉｅ散
乱による光検出器の出力の減少により、上記検出対象の
ほこりを検出するので、検出対象のほこりで発生したＭ
ｉｅ散乱による散乱光を直接的に検出器で検出する必要
がなく、光学式ほこりセンサ光学系の各部の設定精度を
緩和できる。さらに、共用光学系と光学素子とを用いて
構成することにより、照射光学系と集光光学系が同軸に
なり、振動等に対する信頼性を向上でき、また、小型
化、軽量化できる。また、図１に示したように、共用光
学系を測定領域に後側焦点を有し、光源からの光を上記
測定領域に集光させるよう形成し、上記後側焦点位置に
平面鏡を設置したので、検出対象のほこりで発生するＭ
ｉｅ散乱による前方散乱光の内、平面鏡で反射されて共
用光学系へ入射可能となる光の有効角度を狭くでき、光
検出器の出力の減少を顕著にして精度の良いほこりの検
出を可能にする。As described above, a light source having a wavelength that generates Mie scattering mainly due to forward scattering with respect to the size of dust to be detected is used. Is reflected by a reflecting mirror installed at a predetermined position of the detection target, and the dust of the detection target is detected by the decrease of the output of the photodetector due to the Mie scattering generated by the dust of the detection target. M that occurred
There is no need to directly detect the scattered light due to the IE scattering with the detector, and the setting accuracy of each part of the optical dust sensor optical system can be relaxed. Further, by using the common optical system and the optical element, the irradiation optical system and the condensing optical system are coaxial, so that the reliability against vibration and the like can be improved, and the size and weight can be reduced. Also, as shown in FIG. 1, the common optical system has a rear focal point in the measurement region, is formed so as to condense light from the light source to the measurement region, and a plane mirror is installed at the rear focal position. Therefore, M generated by dust to be detected
Of the forward scattered light due to ie scattering, the effective angle of the light that is reflected by a plane mirror and can enter the common optical system can be narrowed, and the output of the photodetector is remarkably reduced to enable accurate detection of dust. I do.
【００１９】実施の形態２．図４は本発明による光学式
ほこりセンサ光学系の実施の形態２を示す構成説明図で
ある。図４において、７１は共用光学系６０の後側焦点
位置に設定される測定領域５０付近に置かれた球面鏡で
あり、共用光学系６０の後側焦点を中心とする球面で形
成されている。なお、図４において、図１と同一または
相当部分には、同一符号を付している。Embodiment 2 FIG. 4 is a structural explanatory view showing Embodiment 2 of the optical dust sensor optical system according to the present invention. In FIG. 4, reference numeral 71 denotes a spherical mirror placed near the measurement area 50 set at the rear focal position of the common optical system 60, and is formed of a spherical surface centered on the rear focal point of the common optical system 60. In FIG. 4, the same or corresponding parts as those in FIG. 1 are denoted by the same reference numerals.
【００２０】次に、図４に示した光学式ほこりセンサ光
学系の動作について説明する。光源１０から出た光１０
０は、照射光学系と集光光学系の共用光学系６０によっ
て測定領域５０に絞り込まれる。絞り込まれた光は球面
鏡７１によって反射されて戻され、再び共用光学系６０
によって受光されて集光され、光学素子８０によって光
検出器４０に導かれ受光される。一方、この測定領域５
０に光源１０の波長と同程度の大きさを有するほこりが
到来した時、光源１０からの光１００はほこりによって
散乱される。ここで、平面鏡７０に代えて球面鏡７１を
用いる場合にも、発明の実施の形態１で述べたような条
件でのＭｉｅ散乱の説明ように、測定領域５０に導かれ
た光１００のうち測定領域５０に到来したほこりによっ
て散乱された光は共用光学系６０にほとんど戻らないた
め、光検出器４０で受光されない。このため、光検出器
４０からの出力には図３に示すようなレベル変動（減
少）が生じる。Next, the operation of the optical dust sensor optical system shown in FIG. 4 will be described. Light 10 emitted from light source 10
0 is narrowed down to the measurement area 50 by the shared optical system 60 of the irradiation optical system and the condensing optical system. The narrowed light is reflected back by the spherical mirror 71, and is again returned to the common optical system 60.
The optical element 80 guides the light to the photodetector 40 and receives the light. On the other hand, this measurement area 5
When dust having a size comparable to the wavelength of the light source 10 arrives at zero, the light 100 from the light source 10 is scattered by the dust. Here, even when the spherical mirror 71 is used instead of the plane mirror 70, as described in the Mie scattering under the conditions described in the first embodiment of the present invention, the measurement area of the light 100 guided to the measurement area 50 The light scattered by the dust arriving at 50 hardly returns to the common optical system 60 and is not received by the photodetector 40. For this reason, the output from the photodetector 40 undergoes a level fluctuation (decrease) as shown in FIG.
【００２１】従って、前記実施の形態１と同様の効果を
奏する他、反射鏡を共用光学系の後側焦点を中心とする
球面内面で形成される球面鏡としたので、検出対象のほ
こりで発生したＭｉｅ散乱による散乱光以外の測定領域
に集光された光源からの光を確実に共用光学系へ戻すよ
う反射させることができる効果がある。Therefore, in addition to having the same effects as in the first embodiment, since the reflecting mirror is a spherical mirror formed by a spherical inner surface centered on the rear focal point of the common optical system, it is generated by dust to be detected. There is an effect that the light from the light source focused on the measurement area other than the light scattered by the Mie scattering can be reflected so as to be surely returned to the common optical system.
【００２２】実施の形態３．図５は本発明による光学式
ほこりセンサ光学系の実施の形態３を示す構成説明図で
ある。図５において、６１は光源１０からの光１００を
コリメートして測定領域５０に導くと共に測定領域５０
からの戻り光を光学素子８０を介して光検出器４０に集
光する共用光学系、７０は測定領域５０付近に置かれた
平面鏡である。なお、図５において、図１と同一または
相当部分には、同一符号を付している。Embodiment 3 FIG. FIG. 5 is a structural explanatory view showing Embodiment 3 of the optical dust sensor optical system according to the present invention. In FIG. 5, reference numeral 61 denotes a collimated light 100 from the light source 10 which is guided to the measurement area 50, and
A common optical system for condensing return light from the optical detector 80 via the optical element 80 on the photodetector 40 is a plane mirror placed near the measurement area 50. In FIG. 5, the same or corresponding parts as those in FIG. 1 are denoted by the same reference numerals.
【００２３】次に、図５に示した光学式ほこりセンサ光
学系の動作について説明する。光源１０から出た光は、
照射光学系と集光光学系の共用光学系６１によってコリ
メートされて測定領域５０に導かれる。測定領域５０に
導かれた光は平面鏡７０によって反射され、共用光学系
６１によって受光され、光学素子８０によって光検出器
４０に導かれ受光される。一方、この測定領域５０に光
源１０の波長と同程度の大きさを有するほこりが到来し
た時、光源１０からの光１００はほこりによって散乱さ
れる。ここで、共用光学系６１によってコリメートされ
た光をほこりに照射した場合にも、発明の実施の形態１
で述べたような条件でのＭｉｅ散乱の説明のように、測
定領域５０に導かれた光１００のうち測定領域５０に到
来したほこりによって散乱された光は共用光学系６１に
ほとんど戻らないため、光検出器４０で受光されない。
このため、光検出器４０からの出力には図３に示すよう
なレベル変動（減少）が生じる。Next, the operation of the optical dust sensor optical system shown in FIG. 5 will be described. The light emitted from the light source 10 is
The light is collimated by the shared optical system 61 of the irradiation optical system and the condensing optical system and guided to the measurement area 50. The light guided to the measurement region 50 is reflected by the plane mirror 70, received by the shared optical system 61, guided to the photodetector 40 by the optical element 80, and received. On the other hand, when dust having the same size as the wavelength of the light source 10 arrives at the measurement area 50, the light 100 from the light source 10 is scattered by the dust. Here, the first embodiment of the present invention can also be applied to a case where the light collimated by the shared optical system 61 is applied to dust.
As described in the description of the Mie scattering under the conditions described in the above, since the light scattered by the dust arriving at the measurement region 50 among the light 100 guided to the measurement region 50 hardly returns to the shared optical system 61, No light is received by the photodetector 40.
For this reason, the output from the photodetector 40 undergoes a level fluctuation (decrease) as shown in FIG.
【００２４】従って、前記実施の形態１と同様の効果を
奏する他、共用光学系を光源からの光を平行光として測
定領域に絞り込むコリメート光学系とし、反射鏡を平面
鏡としたので、光学式ほこりセンサ光学系の反射鏡ほ
か、各部の設定精度をより緩和し、振動等に対する信頼
性をより向上できる。Therefore, in addition to the same effects as those of the first embodiment, the common optical system is a collimating optical system for narrowing the light from the light source to the measurement area as parallel light, and the reflecting mirror is a plane mirror. The setting accuracy of each part other than the reflecting mirror of the sensor optical system can be further relaxed, and the reliability against vibration and the like can be further improved.
【００２５】なお、以上の実施の形態１〜３で用いる光
学素子８０は、例えば、偏光ビームスプリッタ等を用い
た複数の光学素子からなるものであっても良く、上記の
ような光源からの光を共用光学系に導くと共に共用光学
系で導かれた反射鏡などからの戻り光を光検出器に導く
機能を有するものであれば良い。また、以上の実施の形
態１〜３では、照射光学系と集光光学系の共用光学系を
模式的に単レンズで図示しているが、組み合せレンズ等
でも良い。さらに、以上の実施の形態１〜３では、光学
素子と共用光学系を分離した機能として模式的に別に図
示しているが、それぞれの機能を併せ持つ複合光学系で
一体化して実現したものでも良い。このようにすること
により、光学式ほこりセンサ光学系をコンパクトに構成
でき、振動等に対する信頼性を向上できるという効果を
奏する。The optical element 80 used in the first to third embodiments may be composed of, for example, a plurality of optical elements using a polarizing beam splitter or the like. May be provided as long as it has a function of guiding the light to a common optical system and guiding return light from a reflector or the like guided by the common optical system to a photodetector. Further, in the first to third embodiments, the shared optical system of the irradiation optical system and the condensing optical system is schematically illustrated by a single lens, but may be a combination lens or the like. Further, in the first to third embodiments, the optical element and the shared optical system are schematically illustrated separately as functions separated from each other, but may be realized by integrating them with a composite optical system having the respective functions. . By doing so, the optical dust sensor optical system can be made compact and the effect of improving the reliability against vibration and the like can be obtained.
【００２６】実施の形態４．図６は本発明による光学式
ほこりセンサ光学系の実施の形態４を示す構成説明図で
ある。図６において、９０はピックアップ光学系、７０
は測定領域５０付近に置かれた平面鏡である。なお、図
６において、図１と同一または相当部分には、同一符号
を付している。Embodiment 4 FIG. 6 is a structural explanatory view showing Embodiment 4 of an optical dust sensor optical system according to the present invention. In FIG. 6, reference numeral 90 denotes a pickup optical system;
Is a plane mirror placed near the measurement area 50. In FIG. 6, the same or corresponding parts as those in FIG. 1 are denoted by the same reference numerals.
【００２７】次に、図６に示した光学式ほこりセンサ光
学系の動作について説明する。ピックアップ光学系９０
は、光源であるレーザダイオード１０からの偏光された
光１００が結合レンズ９１でコリメートされた後、偏光
ビームスプリッタ９２を透過し、対物レンズ９３で測定
領域５０に絞り込まれる。絞り込まれた光は対物レンズ
９３の焦点位置に置かれた平面鏡７０によって反射され
る。反射された光１００は対物レンズ９３によってコリ
メートされた後、偏光ビームスプリッタ９２、偏光ビー
ムスプリッタ９４で反射され、集光レンズ９５で集光さ
れてフォトダイオード４０に導かれ受光される。なお、
ここでは、ピックアップ光学系として機能するために設
けられた制御信号用の集光レンズ９６とフォトダイオー
ド４１は用いる必要はない。一方、この測定領域５０に
レーザダイオード１０の波長と同程度の大きさを有する
ほこりが到来した時、レーザダイオード１０からの光１
００はほこりによって散乱される。ここで、発明の実施
の形態１で述べたような条件でのＭｉｅ散乱の説明よう
に、測定領域５０に導かれた光１００のうち測定領域５
０に到来したほこりによって散乱された光は対物レンズ
９３にほとんど戻らないため、フォトダイオード４０で
受光されない。このため、フォトダイオード４０からの
出力には図３に示すようなレベル変動（減少）が生じ
る。Next, the operation of the optical dust sensor optical system shown in FIG. 6 will be described. Pickup optical system 90
After the polarized light 100 from the laser diode 10 as the light source is collimated by the coupling lens 91, it passes through the polarization beam splitter 92 and is narrowed down to the measurement area 50 by the objective lens 93. The narrowed light is reflected by the plane mirror 70 placed at the focal position of the objective lens 93. The reflected light 100 is collimated by the objective lens 93, reflected by the polarization beam splitter 92 and the polarization beam splitter 94, condensed by the condenser lens 95, guided to the photodiode 40, and received. In addition,
Here, it is not necessary to use the condensing lens 96 for control signals and the photodiode 41 provided to function as a pickup optical system. On the other hand, when dust having the same size as the wavelength of the laser diode 10 arrives at the measurement area 50, the light 1 from the laser diode 10
00 is scattered by dust. Here, as described in the Mie scattering under the conditions described in the first embodiment of the invention, the measurement region 5 of the light 100 guided to the measurement region 50 is used.
Since the light scattered by the dust arriving at 0 hardly returns to the objective lens 93, it is not received by the photodiode 40. For this reason, a level change (decrease) occurs in the output from the photodiode 40 as shown in FIG.
【００２８】従って、前記実施の形態１と同様の効果を
奏する他、上記のように、検出対象のほこりの大きさに
対して前方散乱を主とするＭｉｅ散乱を発生させる波長
の光源となるレーザダイオードと、レーザダイオードか
らの光を測定領域に絞り込む対物レンズと、平面鏡で反
射されて対物レンズに入射したレーザダイオードからの
光を検出する光検出器となるフォトダイオードとを有す
る光ピックアップ光学系を用い、対物レンズの後側焦点
位置を測定領域とし、対物レンズの後側焦点位置に平面
鏡を設置したので、光学式ほこりセンサ光学系をコンパ
クトに構成でき、かつ、量産製品である光ピックアップ
光学系の流用により低価格化できるという効果がある。Therefore, in addition to having the same effects as in the first embodiment, as described above, the laser which is a light source having a wavelength that generates Mie scattering mainly of forward scattering with respect to the size of dust to be detected. An optical pickup optical system including a diode, an objective lens that narrows light from the laser diode to a measurement area, and a photodiode serving as a photodetector that detects light from the laser diode reflected by a plane mirror and incident on the objective lens. Since the rear focal position of the objective lens is used as the measurement area and the plane mirror is set at the rear focal position of the objective lens, the optical dust sensor optical system can be made compact and the optical pickup optical system is a mass-produced product. There is an effect that the price can be reduced by diverting.
【００２９】実施の形態５．図７は本発明による光学式
ほこりセンサ光学系の実施の形態４を示す構成説明図で
ある。図７において、９０はピックアップ光学系、７１
は対物レンズ９３の後側焦点位置に設定される測定領域
５０付近に置かれた球面鏡であり、対物レンズ９３の後
側焦点を中心とする球面で形成されている。なお、図７
において、図６と同一または相当部分には、同一符号を
付している。Embodiment 5 FIG. 7 is a structural explanatory view showing Embodiment 4 of the optical dust sensor optical system according to the present invention. In FIG. 7, reference numeral 90 denotes a pickup optical system;
Is a spherical mirror placed near the measurement area 50 set at the rear focal position of the objective lens 93, and is formed of a spherical surface centered on the rear focal point of the objective lens 93. FIG.
In FIG. 6, the same or corresponding parts as those in FIG. 6 are denoted by the same reference numerals.
【００３０】次に、図７に示した光学式ほこりセンサ光
学系の動作について説明する。ピックアップ光学系９０
は、光源であるレーザダイオード１０からの偏光された
光１００が結合レンズ９１でコリメートされた後、偏光
ビームスプリッタ９２を透過し、対物レンズ９３で測定
領域５０に絞り込まれる。絞り込まれた光は球面鏡７１
によって反射される。反射された光１００は対物レンズ
９３によってコリメートされた後、偏光ビームスプリッ
タ９２、偏光ビームスプリッタ９４で反射され、集光レ
ンズ９５で集光されてフォトダイオード４０に導かれ受
光される。なお、ここでは、ピックアップ光学系として
機能するために設けられた制御信号用の集光レンズ９６
とフォトダイオード４１は用いる必要はない。一方、こ
の測定領域５０にレーザダイオード１０の波長と同程度
の大きさを有するほこりが到来した時、レーザダイオー
ド１０からの光１００はほこりによって散乱される。こ
こで、発明の実施の形態１で述べたような条件でのＭｉ
ｅ散乱の説明のように、測定領域５０に導かれた光１０
０のうち測定領域５０に到来したほこりによって散乱さ
れた光は対物レンズ９３にほとんど戻らないため、フォ
トダイオード４０で受光されない。このため、フォトダ
イオード４０からの出力には図３に示すようなレベル変
動（減少）が生じる。Next, the operation of the optical dust sensor optical system shown in FIG. 7 will be described. Pickup optical system 90
After the polarized light 100 from the laser diode 10 as the light source is collimated by the coupling lens 91, it passes through the polarization beam splitter 92 and is narrowed down to the measurement area 50 by the objective lens 93. The narrowed light is a spherical mirror 71
Is reflected by The reflected light 100 is collimated by the objective lens 93, reflected by the polarization beam splitter 92 and the polarization beam splitter 94, condensed by the condenser lens 95, guided to the photodiode 40, and received. Here, a condensing lens 96 for a control signal provided to function as a pickup optical system.
And the photodiode 41 need not be used. On the other hand, when dust having the same size as the wavelength of the laser diode 10 arrives at the measurement region 50, the light 100 from the laser diode 10 is scattered by the dust. Here, Mi under the conditions described in the first embodiment of the present invention.
As described for e-scattering, the light 10 guided to the measurement area 50
Since the light scattered by dust arriving at the measurement area 50 among 0 is hardly returned to the objective lens 93, it is not received by the photodiode 40. For this reason, a level change (decrease) occurs in the output from the photodiode 40 as shown in FIG.
【００３１】従って、前記実施の形態２と同様の効果を
奏する他、上記の実施の形態４と同様に、光学式ほこり
センサ光学系をコンパクトに構成でき、かつ、量産製品
である光ピックアップ光学系の流用により低価格化でき
るという効果がある。Therefore, in addition to the same effects as in the second embodiment, the optical dust sensor optical system can be made compact and the optical pickup optical system which is a mass-produced product, as in the fourth embodiment. There is an effect that the price can be reduced by diverting.
【００３２】なお、上記の実施の形態４および実施の形
態５では、ピックアップ光学系９０として、光源である
レーザダイオード１０、結合レンズ９１、偏光ビームス
プリッタ９２、対物レンズ９３、偏光ビームスプリッタ
９４、集光レンズ９５、フォトダイオード４０、制御信
号用の集光レンズ９６、及び、制御信号用のフォトダイ
オード４１で構成されているものを例示して説明した
が、この構成のものに限るものではなく、所望の波長の
レーザダイオード光源からの光を測定領域へ絞り込み、
測定領域付近に設置した反射鏡で反射されて戻された光
をフォトダイオードで受光して出力する方式のピックア
ップ光学系であれば良く、上記実施の形態４又は実施の
形態５と同様の効果を奏する。In the fourth and fifth embodiments, as the pickup optical system 90, the laser diode 10, which is the light source, the coupling lens 91, the polarization beam splitter 92, the objective lens 93, the polarization beam splitter 94, Although the optical lens 95, the photodiode 40, the condensing lens 96 for the control signal, and the photodiode 41 for the control signal have been described as an example, the present invention is not limited to this configuration. Focus the light from the laser diode light source of the desired wavelength to the measurement area,
Any pickup optical system may be used as long as it is a pickup optical system that receives and outputs the light reflected and returned by the reflecting mirror provided near the measurement area with the photodiode, and has the same effect as that of the above-described fourth or fifth embodiment. Play.
【００３３】[0033]
【発明の効果】本発明は、以上説明したように構成され
ているので、以下に記載されているような効果を奏す
る。Since the present invention is configured as described above, it has the following effects.
【００３４】検出対象のほこりの大きさに対して前方散
乱を主とするＭｉｅ散乱を発生させる波長の光源を用
い、測定領域に絞り込まれた上記光源からの光を測定領
域付近の所定の位置に設置された反射鏡で反射し、上記
検出対象のほこりで発生した上記Ｍｉｅ散乱による光検
出器の出力の減少により、上記検出対象のほこりを検出
するので、検出対象のほこりで発生したＭｉｅ散乱によ
る散乱光を直接的に検出器で検出する必要がなく、光学
式ほこりセンサ光学系の各部の設定精度を緩和するとい
う効果を奏する。Using a light source having a wavelength that generates Mie scattering mainly due to forward scattering with respect to the size of dust to be detected, the light from the light source narrowed down to the measurement area is placed at a predetermined position near the measurement area. Since the output of the photodetector is reduced by the Mie scattering caused by the dust of the detection target, the dust of the detection target is detected by the reflection mirror installed, and the Mie scattering caused by the dust of the detection target is detected. There is no need to directly detect the scattered light with the detector, and there is an effect that the setting accuracy of each part of the optical dust sensor optical system is eased.
【００３５】さらに、照射光学系と集光光学系に代え
て、照射光学系として機能すると共に集光光学系として
も機能する共通の共用光学系と、光源から上記共用光学
系への光路と上記共用光学系から光検出器への光路を分
離する光学素子とを備えたので、照射光学系と集光光学
系が同軸になり、光学式ほこりセンサ光学系の振動等に
対する信頼性を向上でき、また、小型化できるという効
果を奏する。Further, instead of the irradiation optical system and the condensing optical system, a common shared optical system that functions as an irradiation optical system and also functions as a condensing optical system, an optical path from a light source to the shared optical system, and An optical element for separating the optical path from the common optical system to the photodetector is provided, so that the irradiation optical system and the condensing optical system are coaxial, and the reliability of the optical dust sensor optical system against vibration and the like can be improved. Also, there is an effect that the size can be reduced.
【００３６】また、共用光学系を測定領域に後側焦点を
有し、光源からの光を上記測定領域に集光させるよう形
成し、上記測定領域付近の所定の位置に上記光源からの
光を反射させる反射鏡を設置したので、検出対象のほこ
りで発生するＭｉｅ散乱による前方散乱光の内、反射鏡
で反射されて共用光学系へ入射可能となる光の有効角度
を狭くでき、光検出器の出力の減少を顕著にして精度の
良いほこりの検出を可能にするという効果を奏する。Further, the common optical system has a rear focal point in the measurement area, is formed so as to condense light from the light source to the measurement area, and transmits the light from the light source to a predetermined position near the measurement area. Since the reflecting mirror for reflection is installed, the effective angle of the light, which is reflected by the reflecting mirror and can enter the common optical system, of the forward scattered light due to Mie scattering generated by dust to be detected can be narrowed. This makes it possible to remarkably reduce the output of the device and to enable accurate detection of dust.
【００３７】また、共用光学系を光源からの光を平行光
として測定領域に絞り込むコリメート光学系とし、反射
鏡を平面鏡としたので、光学式ほこりセンサ光学系の反
射鏡ほか、各部の設定精度をより緩和し、振動等に対す
る信頼性をより向上するという効果を奏する。Further, since the common optical system is a collimating optical system for narrowing the light from the light source to the measurement area as parallel light, and the reflecting mirror is a plane mirror, the setting accuracy of each part other than the reflecting mirror of the optical dust sensor optical system is improved. This has the effect of further relaxing and improving the reliability against vibration and the like.
【００３８】さらに、共用光学系と光学素子に代えて、
上記共用光学系と上記光学素子のそれぞれの機能を有す
る一体化した複合光学系としたので、光学式ほこりセン
サ光学系をコンパクトに構成でき、また、振動等に対す
る信頼性を向上するという効果を奏する。Further, instead of the common optical system and the optical element,
Since the combined optical system has the functions of the common optical system and the optical element, the optical dust sensor optical system can be made compact, and the reliability against vibration and the like is improved. .
【００３９】また、光源と光検出器と共用光学系と光学
素子に代えて、検出対象のほこりの大きさに対して前方
散乱を主とするＭｉｅ散乱を発生させる波長の光源とな
るレーザダイオードと、上記レーザダイオードからの光
を測定領域に絞り込む対物レンズと、反射鏡で反射され
て上記対物レンズに入射した上記レーザダイオードから
の光を検出する光検出器となるフォトダイオードとを有
する光ピックアップ光学系を備え、上記対物レンズの後
側焦点位置を測定領域とし、測定領域付近の所定の位置
に反射鏡を設置したので、光学式ほこりセンサ光学系を
コンパクトに構成でき、かつ、量産製品である光ピック
アップ光学系の流用により低価格化できるという効果を
奏する。In place of the light source, the photodetector, the common optical system, and the optical element, a laser diode serving as a light source having a wavelength that generates Mie scattering mainly of forward scattering with respect to the size of dust to be detected is provided. An optical lens having an objective lens for narrowing light from the laser diode to a measurement area, and a photodiode serving as a photodetector for detecting light from the laser diode reflected by a reflecting mirror and incident on the objective lens; System, the rear focal position of the objective lens is used as a measurement area, and a reflecting mirror is installed at a predetermined position near the measurement area, so that the optical dust sensor optical system can be compactly configured and is a mass-produced product. There is an effect that the price can be reduced by diverting the optical pickup optical system.
【図１】 本発明による光学式ほこりセンサ光学系の実
施の形態１を示す構成説明図である。FIG. 1 is a configuration explanatory diagram showing Embodiment 1 of an optical dust sensor optical system according to the present invention.
【図２】 光源の波長を０．７８μｍとしたときの粒径
１μｍのほこりによる散乱強度の散乱角依存性を示す図
である。FIG. 2 is a diagram showing the scattering angle dependence of the scattering intensity due to dust having a particle size of 1 μm when the wavelength of the light source is 0.78 μm.
【図３】 本発明による光学式ほこりセンサ光学系の光
検出器の出力レベル変動例を示す図である。FIG. 3 is a diagram showing an example of an output level fluctuation of a photodetector of the optical dust sensor optical system according to the present invention.
【図４】 本発明による光学式ほこりセンサ光学系の実
施の形態２を示す構成説明図である。FIG. 4 is a configuration explanatory view showing Embodiment 2 of an optical dust sensor optical system according to the present invention.
【図５】 本発明による光学式ほこりセンサ光学系の実
施の形態３を示す構成説明図である。FIG. 5 is a configuration explanatory view showing Embodiment 3 of an optical dust sensor optical system according to the present invention.
【図６】 本発明による光学式ほこりセンサ光学系の実
施の形態３を示す構成説明図である。FIG. 6 is a configuration explanatory view showing Embodiment 3 of an optical dust sensor optical system according to the present invention.
【図７】 本発明による光学式ほこりセンサ光学系の実
施の形態３を示す構成説明図である。FIG. 7 is a configuration explanatory view showing Embodiment 3 of an optical dust sensor optical system according to the present invention.
【図８】 従来の光学式ほこりセンサ光学系の構成説明
図である。FIG. 8 is an explanatory diagram of a configuration of a conventional optical dust sensor optical system.
【図９】 従来の光学式ほこりセンサ光学系の光検出器
の出力レベル変動例を示す図である。FIG. 9 is a diagram showing an example of an output level fluctuation of a photodetector of a conventional optical dust sensor optical system.
【符号の説明】 １０ 光源（レーザダイオード）、２０ 照射光学系、
２１ コリメータレンズ、２２ 楕円面鏡、３０ 集光
光学系、４０ 光検出器（フォトダイオード）、５０
測定領域、６０、６１ 共用光学系、７０ 平面鏡、７
１ 球面鏡、８０ 光学素子、９０ ピックアップ光学
系、９１ 結合レンズ、９２ 偏光ビームスプリッタ、
９３ 対物レンズ、９４ 偏光ビームスプリッタ、９５
集光レンズ、１００ 光、１０１ 散乱光、１１０
試料、１２０ セル。[Description of Signs] 10 light sources (laser diodes), 20 irradiation optical systems,
DESCRIPTION OF SYMBOLS 21 Collimator lens, 22 Ellipsoidal mirror, 30 Condensing optical system, 40 Photodetector (photodiode), 50
Measurement area, 60, 61 Shared optical system, 70 Plane mirror, 7
1 spherical mirror, 80 optical elements, 90 pickup optical system, 91 coupling lens, 92 polarizing beam splitter,
93 Objective lens, 94 Polarizing beam splitter, 95
Condenser lens, 100 light, 101 scattered light, 110
Sample, 120 cells.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 中野 貴敬 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 (72)発明者 安藤 俊行 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 (72)発明者 笠原 久美雄 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 (72)発明者 片木 孝至 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 Ｆターム(参考） 2G059 AA05 BB02 CC19 EE02 GG01 GG02 JJ11 JJ13 JJ19 JJ22 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Takataka Nakano 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Inside Mitsubishi Electric Corporation (72) Inventor Toshiyuki Ando 2-3-2 Marunouchi, Chiyoda-ku, Tokyo (72) Inventor Kumio Kasahara 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsui Electric Co., Ltd. (72) Takashi Katagi, 2-3-2 Marunouchi 2-chome, Chiyoda-ku, Tokyo F term in Ryo Denki Co., Ltd. (reference) 2G059 AA05 BB02 CC19 EE02 GG01 GG02 JJ11 JJ13 JJ19 JJ22
Claims (8)
散乱を主とするＭｉｅ散乱を発生させる波長の光源と、
上記波長の光を検出する光検出器と、上記光源からの光
が絞り込まれ、上記検出対象のほこりに照射される測定
領域と、上記光源からの光を上記測定領域に絞り込む照
射光学系と、上記測定領域付近の所定の位置に設置さ
れ、上記測定領域に絞り込まれた上記光源からの光を反
射させる反射鏡と、上記反射鏡で反射された光を上記光
検出器に導く集光光学系とを備え、上記検出対象のほこ
りで発生した上記Ｍｉｅ散乱による上記光検出器の出力
の減少により、上記検出対象のほこりを検出することを
特徴とする光学式ほこりセンサ光学系。1. A light source having a wavelength that generates Mie scattering mainly including forward scattering with respect to the size of dust to be detected;
A photodetector that detects light of the wavelength, light from the light source is narrowed down, a measurement region irradiated to dust of the detection target, and an irradiation optical system that narrows light from the light source to the measurement region, A reflecting mirror that is installed at a predetermined position near the measurement area and reflects light from the light source narrowed down to the measurement area, and a condensing optical system that guides the light reflected by the reflection mirror to the photodetector And an optical system for detecting the dust of the detection target by reducing the output of the photodetector due to the Mie scattering generated by the dust of the detection target.
系において、上記照射光学系と集光光学系に代えて、上
記照射光学系として機能すると共に上記集光光学系とし
ても機能する共通の共用光学系と、上記光源からの光を
上記共用光学系に導くと共に上記反射鏡で反射されて上
記共用光学系に入射した光を上記光検出器に導く、上記
光源から上記共用光学系への光路と上記共用光学系から
上記光検出器への光路を分離する光学素子とを備えたこ
とを特徴とする光学式ほこりセンサ光学系。2. An optical dust sensor optical system according to claim 1, wherein said common optical system functions as said irradiation optical system and also functions as said light collection optical system in place of said irradiation optical system and condensing optical system. A common optical system and guides light from the light source to the common optical system and guides light reflected by the reflecting mirror and incident on the common optical system to the photodetector, from the light source to the common optical system. An optical dust sensor optical system, comprising: an optical path and an optical element for separating an optical path from the common optical system to the photodetector.
系において、上記共用光学系を上記測定領域に後側焦点
を有し、上記光源からの光を上記測定領域に集光させる
よう形成し、上記反射鏡を上記後側焦点位置に設置され
る平面鏡としたことを特徴とする光学式ほこりセンサ光
学系。3. The optical dust sensor optical system according to claim 2, wherein said common optical system has a rear focal point in said measurement area, and is formed so as to focus light from said light source on said measurement area. An optical dust sensor optical system, wherein the reflecting mirror is a plane mirror installed at the rear focal point.
系において、上記共用光学系を上記測定領域に後側焦点
を有し、上記光源からの光を上記測定領域に集光させる
よう形成し、上記反射鏡を上記後側焦点を中心とする球
面内面で形成される球面鏡としたことを特徴とする光学
式ほこりセンサ光学系。4. The optical dust sensor optical system according to claim 2, wherein said common optical system has a rear focal point in said measurement area, and is formed so as to focus light from said light source on said measurement area. An optical dust sensor optical system, wherein the reflecting mirror is a spherical mirror formed by a spherical inner surface centered on the rear focal point.
系において、上記共用光学系を上記光源からの光を平行
光として上記測定領域に絞り込むコリメート光学系と
し、上記反射鏡を平面鏡としたことを特徴とする光学式
ほこりセンサ光学系。5. The optical dust sensor optical system according to claim 2, wherein said common optical system is a collimating optical system for narrowing light from said light source into parallel light to said measurement area, and said reflecting mirror is a plane mirror. An optical dust sensor optical system characterized by the following.
学式ほこりセンサ光学系において、上記共用光学系と上
記光学素子に代えて、上記共用光学系と上記光学素子の
それぞれの機能を有する一体化した複合光学系を備えた
ことを特徴とする光学式ほこりセンサ光学系。6. The optical dust sensor optical system according to claim 2, wherein said shared optical system and said optical element are replaced by said shared optical system and said optical element. An optical dust sensor optical system comprising an integrated composite optical system having the following.
系において、上記光源と光検出器と共用光学系と光学素
子に代えて、検出対象のほこりの大きさに対して前方散
乱を主とするＭｉｅ散乱を発生させる波長の光源となる
レーザダイオードと、上記レーザダイオードからの光を
上記測定領域に絞り込む対物レンズと、上記反射鏡で反
射されて上記対物レンズに入射した上記レーザダイオー
ドからの光を検出する光検出器となるフォトダイオード
とを有する光ピックアップ光学系を備え、上記対物レン
ズの後側焦点位置を上記測定領域とし、上記反射鏡を上
記対物レンズの後側焦点位置に設置される平面鏡とした
ことを特徴とする光学式ほこりセンサ光学系。7. The optical dust sensor optical system according to claim 2, wherein said light source, said photodetector, said common optical system and said optical element are replaced mainly by forward scattering with respect to the size of dust to be detected. A laser diode serving as a light source having a wavelength that causes Mie scattering, an objective lens for narrowing light from the laser diode to the measurement area, and light from the laser diode reflected by the reflecting mirror and incident on the objective lens An optical pickup optical system having a photodiode serving as a photodetector for detecting the position of the objective lens, the rear focal position of the objective lens being the measurement area, and the reflecting mirror being provided at the rear focal position of the objective lens. An optical dust sensor optical system comprising a plane mirror.
系において、上記光源と光検出器と共用光学系と光学素
子に代えて、検出対象のほこりの大きさに対して前方散
乱を主とするＭｉｅ散乱を発生させる波長の光源となる
レーザダイオードと、上記レーザダイオードからの光を
上記測定領域に絞り込む対物レンズと、上記反射鏡で反
射されて上記対物レンズに入射した上記レーザダイオー
ドからの光を検出する光検出器となるフォトダイオード
とを有する光ピックアップ光学系を備え、上記対物レン
ズの後側焦点位置を上記測定領域とし、上記反射鏡を上
記対物レンズの後側焦点を中心とする球面内面で形成さ
れる球面鏡としたことを特徴とする光学式ほこりセンサ
光学系。8. The optical dust sensor optical system according to claim 2, wherein said light source, said photodetector, said common optical system, and said optical element are replaced mainly by forward scattering with respect to the size of dust to be detected. A laser diode serving as a light source having a wavelength that causes Mie scattering, an objective lens for narrowing light from the laser diode to the measurement area, and light from the laser diode reflected by the reflecting mirror and incident on the objective lens An optical pickup optical system having a photodiode serving as a photodetector for detecting the position of the objective lens, the rear focal position of the objective lens being the measurement area, and the reflecting mirror being a spherical surface centered on the rear focal point of the objective lens. An optical dust sensor optical system comprising a spherical mirror formed on an inner surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31744398A JP3454173B2 (en) | 1998-11-09 | 1998-11-09 | Optical dust sensor optical system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31744398A JP3454173B2 (en) | 1998-11-09 | 1998-11-09 | Optical dust sensor optical system |
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| Publication Number | Publication Date |
|---|---|
| JP2000146819A true JP2000146819A (en) | 2000-05-26 |
| JP3454173B2 JP3454173B2 (en) | 2003-10-06 |
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