FR3050033B1 - PROBE FOR MEASURING APPARATUS OF INTERACTION BETWEEN A SAMPLE, A NEAR-FIELD DEVICE TIP AND AN EXCITATION ELECTROMAGNETIC BEAM AND MEASURING APPARATUS INCLUDING SUCH A PROBE - Google Patents

PROBE FOR MEASURING APPARATUS OF INTERACTION BETWEEN A SAMPLE, A NEAR-FIELD DEVICE TIP AND AN EXCITATION ELECTROMAGNETIC BEAM AND MEASURING APPARATUS INCLUDING SUCH A PROBE Download PDF

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Publication number
FR3050033B1
FR3050033B1 FR1653182A FR1653182A FR3050033B1 FR 3050033 B1 FR3050033 B1 FR 3050033B1 FR 1653182 A FR1653182 A FR 1653182A FR 1653182 A FR1653182 A FR 1653182A FR 3050033 B1 FR3050033 B1 FR 3050033B1
Authority
FR
France
Prior art keywords
probe
measuring apparatus
tip
field device
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1653182A
Other languages
French (fr)
Other versions
FR3050033A1 (en
Inventor
Bettignies Philippe De
Damien Eschimese
Joachim Schreiber
Gaetan Leveque
Thierry Melin
Steve Arscott
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
De Lille 1, University of
Horiba Jobin Yvon SAS
Centre National de la Recherche Scientifique CNRS
Universite de Lille 1 Sciences et Technologies
Original Assignee
De Lille 1, University of
Horiba Jobin Yvon SAS
Centre National de la Recherche Scientifique CNRS
Universite de Lille 1 Sciences et Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De Lille 1, University of, Horiba Jobin Yvon SAS, Centre National de la Recherche Scientifique CNRS, Universite de Lille 1 Sciences et Technologies filed Critical De Lille 1, University of
Priority to FR1653182A priority Critical patent/FR3050033B1/en
Priority to PCT/FR2017/050861 priority patent/WO2017178746A1/en
Publication of FR3050033A1 publication Critical patent/FR3050033A1/en
Application granted granted Critical
Publication of FR3050033B1 publication Critical patent/FR3050033B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22Probes, their manufacture, or their related instrumentation, e.g. holders
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28Systems for automatic generation of focusing signals
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28Systems for automatic generation of focusing signals
    • G02B7/34Systems for automatic generation of focusing signals using different areas in a pupil plane
    • G02B7/346Systems for automatic generation of focusing signals using different areas in a pupil plane using horizontal and vertical areas in the pupil plane, i.e. wide area autofocusing
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28Systems for automatic generation of focusing signals
    • G02B7/36Systems for automatic generation of focusing signals using image sharpness techniques, e.g. image processing techniques for generating autofocus signals

Abstract

L'invention concerne une sonde (10) pour instrument d'analyse comprenant un dispositif à champ proche à sonde locale (10) ayant une pointe (1), le dispositif à champ proche étant combiné à un faisceau électro-magnétique d'excitation concentré sur la pointe (1), l'instrument d'analyse comprenant un système de détection d'interaction entre l'échantillon, la pointe et le faisceau électromagnétique d'excitation. Selon l'invention, la pointe (1) est métallique, la sonde (10) comporte un support (3) et une portion intermédiaire (2) disposée entre la pointe (1) et le support (3), la portion intermédiaire (2) est métallique ou comporte un revêtement externe métallique, le support (3) est en matériau diélectrique ou en matériau diélectrique recouvert d'un revêtement externe métallique et la portion intermédiaire (2) s'étend latéralement à l'extérieur d'un cône (18) défini par une droite génératrice passant par l'apex et par une circonférence de la base (12) de la pointe (1).The invention relates to a probe (10) for an analytical instrument comprising a local probe near-field device (10) having a tip (1), the near-field device being combined with a concentrated excitation electromagnetic beam. on the tip (1), the analysis instrument comprising a system for detecting interaction between the sample, the tip and the electromagnetic excitation beam. According to the invention, the tip (1) is metallic, the probe (10) comprises a support (3) and an intermediate portion (2) arranged between the tip (1) and the support (3), the intermediate portion (2) ) is metallic or has a metallic outer coating, the support (3) is made of dielectric material or of dielectric material covered with a metallic outer coating and the intermediate portion (2) extends laterally outside a cone ( 18) defined by a generative line passing through the apex and by a circumference of the base (12) of the point (1).

FR1653182A 2016-04-11 2016-04-11 PROBE FOR MEASURING APPARATUS OF INTERACTION BETWEEN A SAMPLE, A NEAR-FIELD DEVICE TIP AND AN EXCITATION ELECTROMAGNETIC BEAM AND MEASURING APPARATUS INCLUDING SUCH A PROBE Active FR3050033B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1653182A FR3050033B1 (en) 2016-04-11 2016-04-11 PROBE FOR MEASURING APPARATUS OF INTERACTION BETWEEN A SAMPLE, A NEAR-FIELD DEVICE TIP AND AN EXCITATION ELECTROMAGNETIC BEAM AND MEASURING APPARATUS INCLUDING SUCH A PROBE
PCT/FR2017/050861 WO2017178746A1 (en) 2016-04-11 2017-04-10 A probe for an apparatus for measuring interaction between a sample, a tip of a near-field device and an exciting electromagnetic beam and a measuring apparatus comprising such a probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1653182A FR3050033B1 (en) 2016-04-11 2016-04-11 PROBE FOR MEASURING APPARATUS OF INTERACTION BETWEEN A SAMPLE, A NEAR-FIELD DEVICE TIP AND AN EXCITATION ELECTROMAGNETIC BEAM AND MEASURING APPARATUS INCLUDING SUCH A PROBE

Publications (2)

Publication Number Publication Date
FR3050033A1 FR3050033A1 (en) 2017-10-13
FR3050033B1 true FR3050033B1 (en) 2021-02-12

Family

ID=56373015

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1653182A Active FR3050033B1 (en) 2016-04-11 2016-04-11 PROBE FOR MEASURING APPARATUS OF INTERACTION BETWEEN A SAMPLE, A NEAR-FIELD DEVICE TIP AND AN EXCITATION ELECTROMAGNETIC BEAM AND MEASURING APPARATUS INCLUDING SUCH A PROBE

Country Status (2)

Country Link
FR (1) FR3050033B1 (en)
WO (1) WO2017178746A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113866229B (en) * 2021-09-23 2022-07-26 北京大学 high-Q-value eccentric artificial local surface plasmon quasi-BIC super surface and implementation method thereof

Also Published As

Publication number Publication date
WO2017178746A1 (en) 2017-10-19
FR3050033A1 (en) 2017-10-13

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