EP1356664A4 - Cmos-compatible three-dimensional image sensing using quantum efficiency modulation - Google Patents

Cmos-compatible three-dimensional image sensing using quantum efficiency modulation

Info

Publication number
EP1356664A4
EP1356664A4 EP01987386A EP01987386A EP1356664A4 EP 1356664 A4 EP1356664 A4 EP 1356664A4 EP 01987386 A EP01987386 A EP 01987386A EP 01987386 A EP01987386 A EP 01987386A EP 1356664 A4 EP1356664 A4 EP 1356664A4
Authority
EP
European Patent Office
Prior art keywords
cmos
compatible
dimensional image
image sensing
quantum efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP01987386A
Other languages
German (de)
French (fr)
Other versions
EP1356664A2 (en
Inventor
Cyrus Bamji
Edoardo Charbon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microsoft Corp
Original Assignee
Canesta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/876,373 external-priority patent/US6587186B2/en
Application filed by Canesta Inc filed Critical Canesta Inc
Publication of EP1356664A2 publication Critical patent/EP1356664A2/en
Publication of EP1356664A4 publication Critical patent/EP1356664A4/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4915—Time delay measurement, e.g. operational details for pixel components; Phase measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
    • G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4913—Circuits for detection, sampling, integration or read-out
    • G01S7/4914—Circuits for detection, sampling, integration or read-out of detector arrays, e.g. charge-transfer gates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/493—Extracting wanted echo signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14643—Photodiode arrays; MOS imagers
EP01987386A 2000-12-11 2001-12-11 Cmos-compatible three-dimensional image sensing using quantum efficiency modulation Ceased EP1356664A4 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US25487300P 2000-12-11 2000-12-11
US254873P 2000-12-11
US09/876,373 US6587186B2 (en) 2000-06-06 2001-06-06 CMOS-compatible three-dimensional image sensing using reduced peak energy
US876373 2001-06-06
PCT/US2001/048219 WO2002049339A2 (en) 2000-12-11 2001-12-11 Cmos-compatible three-dimensional image sensing using quantum efficiency modulation

Publications (2)

Publication Number Publication Date
EP1356664A2 EP1356664A2 (en) 2003-10-29
EP1356664A4 true EP1356664A4 (en) 2009-07-22

Family

ID=26944292

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01987386A Ceased EP1356664A4 (en) 2000-12-11 2001-12-11 Cmos-compatible three-dimensional image sensing using quantum efficiency modulation

Country Status (4)

Country Link
EP (1) EP1356664A4 (en)
JP (1) JP4533582B2 (en)
AU (1) AU2002239608A1 (en)
WO (1) WO2002049339A2 (en)

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JP2006523074A (en) * 2003-04-11 2006-10-05 カネスタ インコーポレイテッド Method and system for differentially expanding the dynamic range of a sensor
JP4280822B2 (en) * 2004-02-18 2009-06-17 国立大学法人静岡大学 Optical time-of-flight distance sensor
US7126100B1 (en) * 2004-05-21 2006-10-24 Kla-Tencor Technologies Corporation System and method for sensing using adjustable modulation transfer function (MTF)
DE102004037137B4 (en) * 2004-07-30 2017-02-09 PMD Technologie GmbH Method and device for distance measurement
US7362419B2 (en) 2004-09-17 2008-04-22 Matsushita Electric Works, Ltd. Range image sensor
JP2006337286A (en) * 2005-06-03 2006-12-14 Ricoh Co Ltd Shape-measuring device
JP4944579B2 (en) * 2005-11-14 2012-06-06 パナソニック株式会社 Spatial information detection device
NL1032435C2 (en) 2006-09-05 2008-03-06 Maasland Nv Device for automatically milking a dairy animal.
JP4757779B2 (en) 2006-11-15 2011-08-24 浜松ホトニクス株式会社 Distance image sensor
JP5295511B2 (en) * 2007-03-23 2013-09-18 富士フイルム株式会社 Ranging device and ranging method
JP4831760B2 (en) * 2007-03-29 2011-12-07 日本放送協会 3D information detection method and apparatus
US8629976B2 (en) * 2007-10-02 2014-01-14 Microsoft Corporation Methods and systems for hierarchical de-aliasing time-of-flight (TOF) systems
WO2009048799A1 (en) 2007-10-11 2009-04-16 Jie Yao Photo-detector array and semiconductor image intensifier
US8253215B2 (en) 2009-01-15 2012-08-28 Wavefront Holdings, Llc Mesa heterojunction phototransistor and method for making same
JP6386777B2 (en) * 2014-05-08 2018-09-05 浜松ホトニクス株式会社 Distance image sensor
DE102014211071A1 (en) * 2014-06-11 2015-12-17 Robert Bosch Gmbh Vehicle lidar system
US10134926B2 (en) 2015-02-03 2018-11-20 Microsoft Technology Licensing, Llc Quantum-efficiency-enhanced time-of-flight detector
WO2018172610A1 (en) * 2017-03-19 2018-09-27 Kovilta Oy Systems and methods for modulated image capture

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US5859462A (en) * 1997-04-11 1999-01-12 Eastman Kodak Company Photogenerated carrier collection of a solid state image sensor array
DE19821974A1 (en) * 1998-05-18 1999-11-25 Rudolf Schwarte Phase and amplitude detector of electromagnetic waves from pixels operating in visible, UV and IR wavelengths

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US5754280A (en) * 1995-05-23 1998-05-19 Olympus Optical Co., Ltd. Two-dimensional rangefinding sensor
DE19704496A1 (en) * 1996-09-05 1998-03-12 Rudolf Prof Dr Ing Schwarte Method and device for determining the phase and / or amplitude information of an electromagnetic wave
US5859462A (en) * 1997-04-11 1999-01-12 Eastman Kodak Company Photogenerated carrier collection of a solid state image sensor array
DE19821974A1 (en) * 1998-05-18 1999-11-25 Rudolf Schwarte Phase and amplitude detector of electromagnetic waves from pixels operating in visible, UV and IR wavelengths

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Title
See also references of WO0249339A2 *

Also Published As

Publication number Publication date
EP1356664A2 (en) 2003-10-29
JP2004525351A (en) 2004-08-19
WO2002049339A3 (en) 2003-02-27
WO2002049339A2 (en) 2002-06-20
JP4533582B2 (en) 2010-09-01
AU2002239608A1 (en) 2002-06-24

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