DE69318601D1 - Laserlichtstrahlerzeugende Vorrichtung - Google Patents
Laserlichtstrahlerzeugende VorrichtungInfo
- Publication number
- DE69318601D1 DE69318601D1 DE69318601T DE69318601T DE69318601D1 DE 69318601 D1 DE69318601 D1 DE 69318601D1 DE 69318601 T DE69318601 T DE 69318601T DE 69318601 T DE69318601 T DE 69318601T DE 69318601 D1 DE69318601 D1 DE 69318601D1
- Authority
- DE
- Germany
- Prior art keywords
- laser light
- generating device
- light generating
- laser
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
- H01S3/1398—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length by using a supplementary modulation of the output
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3542—Multipass arrangements, i.e. arrangements to make light pass multiple times through the same element, e.g. using an enhancement cavity
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Lasers (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07875392A JP3564705B2 (ja) | 1992-03-02 | 1992-03-02 | レーザ光発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69318601D1 true DE69318601D1 (de) | 1998-06-25 |
DE69318601T2 DE69318601T2 (de) | 1998-09-10 |
Family
ID=13670660
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69318601T Expired - Lifetime DE69318601T2 (de) | 1992-03-02 | 1993-03-02 | Laserlichtstrahlerzeugende Vorrichtung |
Country Status (7)
Country | Link |
---|---|
US (2) | US5367531A (de) |
EP (1) | EP0560179B1 (de) |
JP (1) | JP3564705B2 (de) |
KR (1) | KR100302814B1 (de) |
AU (1) | AU663563B2 (de) |
CA (1) | CA2090591C (de) |
DE (1) | DE69318601T2 (de) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3564705B2 (ja) * | 1992-03-02 | 2004-09-15 | ソニー株式会社 | レーザ光発生装置 |
US5572543A (en) * | 1992-04-09 | 1996-11-05 | Deutsch Aerospace Ag | Laser system with a micro-mechanically moved mirror |
JP3309430B2 (ja) * | 1992-07-28 | 2002-07-29 | ソニー株式会社 | レーザ光発生装置 |
JPH07211620A (ja) * | 1994-01-25 | 1995-08-11 | Sony Corp | 半導体露光装置 |
JPH07254744A (ja) * | 1994-03-15 | 1995-10-03 | Sony Corp | レーザ光発生装置 |
JPH07273391A (ja) * | 1994-03-30 | 1995-10-20 | Sony Corp | レーザ光発生装置 |
US5608744A (en) * | 1995-03-31 | 1997-03-04 | Litton Systems, Inc. | Compact laser apparatus and method |
US5680412A (en) * | 1995-07-26 | 1997-10-21 | Demaria Electrooptics Systems, Inc. | Apparatus for improving the optical intensity induced damage limit of optical quality crystals |
US5832009A (en) * | 1995-08-18 | 1998-11-03 | Sony Corporation | Laser light emitting device, laser beacon device and laser imager display device |
US5642193A (en) * | 1996-03-08 | 1997-06-24 | Met One, Inc. | Particle counter employing a solid-state laser with an intracavity view volume |
US6286055B1 (en) * | 1996-11-07 | 2001-09-04 | Okuma Corporation | Error correction apparatus for NC machine tool |
JPH10301153A (ja) * | 1997-04-23 | 1998-11-13 | Sony Corp | 光源装置とこれを用いた光学測定装置および露光装置 |
JP3601645B2 (ja) * | 1997-04-24 | 2004-12-15 | 澁谷工業株式会社 | 固体レーザ発振器のボンディング方法 |
US6097741A (en) * | 1998-02-17 | 2000-08-01 | Calmar Optcom, Inc. | Passively mode-locked fiber lasers |
JP3035613B1 (ja) * | 1999-01-14 | 2000-04-24 | 神戸大学長 | 単一モ―ドレ―ザ光のパルス化増幅装置および方法 |
JP2000223760A (ja) * | 1999-02-04 | 2000-08-11 | Nec Corp | イオンレーザ装置及びイオンレーザ装置のミラー角度調整方法 |
DE19937565B4 (de) * | 1999-08-09 | 2006-02-09 | Wallenstein, Richard, Prof. Dr. | Verfahren zum Regeln der Ausgangsleistung eines Laserstrahls sowie eine dazugehörige Vorrichtung |
EP1096307B1 (de) * | 1999-10-28 | 2008-08-27 | FUJIFILM Corporation | Optisches Wellenlängenumwandlungssystem und wellenlängenstabilisierter Laser |
US7173955B2 (en) * | 2001-08-31 | 2007-02-06 | Balobeck Joseph J | Laser stimulated sympathetic vibration of molecular structure of a body |
GB0122670D0 (en) | 2001-09-20 | 2001-11-14 | Karpushko Fedor V | Intracavity frequency conversion of laser |
US7378636B2 (en) * | 2002-02-13 | 2008-05-27 | Riken | Method of evaluating non-linear optical crystal and device therefor and wavelength conversion method and device therefor |
JP4242141B2 (ja) * | 2002-11-19 | 2009-03-18 | 株式会社トプコン | 固体レーザ装置 |
DE10339210B4 (de) * | 2003-01-23 | 2011-12-29 | Crylas Crystal Laser Systems Gmbh | Laserresonator und Frequenzkonvertierter Laser |
WO2004066460A1 (de) * | 2003-01-23 | 2004-08-05 | Nlg - New Laser Generation Gmbh | Laserresonator und frequenzkonvertierter laser |
JP4128092B2 (ja) * | 2003-02-21 | 2008-07-30 | 株式会社トプコン | 固体レーザ装置 |
JP4190325B2 (ja) * | 2003-03-24 | 2008-12-03 | 株式会社トプコン | 固体レーザ装置及び固体レーザ装置によるレーザ照射方法 |
JP2004334129A (ja) * | 2003-05-12 | 2004-11-25 | Sony Corp | レンズ、光照射装置及びレーザポインタ |
JP2006049584A (ja) * | 2004-08-04 | 2006-02-16 | Sony Corp | レーザ光発生装置 |
US7602825B1 (en) | 2004-10-20 | 2009-10-13 | Calmar Optcom, Inc. | Tunable passively mode-locked lasers with phase-lock feedback for low timing jitters |
JP2007019361A (ja) * | 2005-07-11 | 2007-01-25 | Mitsutoyo Corp | 周波数安定化レーザ |
KR101106807B1 (ko) | 2008-06-24 | 2012-01-19 | 두산디에스티주식회사 | 레이저 발생장치에서의 레이저 빔 모드 변경을 위한 광경로보정 장치 및 방법 |
DE102012208912B4 (de) * | 2012-05-25 | 2013-12-12 | Crylas Crystal Laser Systems Gmbh | Laseranordnung zur Erzeugung einerzweifach frequenzkonvertierten Laserstrahlung |
US9564732B2 (en) * | 2013-03-25 | 2017-02-07 | Inter-University Research Institute Corporation High Energy Accelerator Research Organization | Optical resonator system |
US9509112B2 (en) | 2013-06-11 | 2016-11-29 | Kla-Tencor Corporation | CW DUV laser with improved stability |
US9293882B2 (en) | 2013-09-10 | 2016-03-22 | Kla-Tencor Corporation | Low noise, high stability, deep ultra-violet, continuous wave laser |
WO2015093210A1 (ja) * | 2013-12-20 | 2015-06-25 | ソニー株式会社 | 光源装置及び波長変換方法 |
US10371625B1 (en) * | 2015-06-23 | 2019-08-06 | Lockheed Martin Corporation | Identification of a reflective surface as being associated with a threat optic |
US10175555B2 (en) | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
KR102603290B1 (ko) * | 2021-12-29 | 2023-11-17 | 한국기계연구원 | 광변조 레이저 펄스의 생성 시스템 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4594715A (en) * | 1983-11-17 | 1986-06-10 | Particle Measuring Systems, Inc. | Laser with stabilized external passive cavity |
JPS61222289A (ja) * | 1985-03-28 | 1986-10-02 | Tokyo Gas Co Ltd | レ−ザ装置 |
US4845718A (en) * | 1988-06-07 | 1989-07-04 | The Boeing Company | Method and apparatus for FEL sideband suppression |
US4939739A (en) * | 1989-04-24 | 1990-07-03 | Coherent, Inc. | Laser alignment servo method and apparatus |
US5018150A (en) * | 1989-09-05 | 1991-05-21 | General Electric Company | Reflector switched lasers |
US5253198A (en) * | 1991-12-20 | 1993-10-12 | Syracuse University | Three-dimensional optical memory |
JP3564705B2 (ja) * | 1992-03-02 | 2004-09-15 | ソニー株式会社 | レーザ光発生装置 |
-
1992
- 1992-03-02 JP JP07875392A patent/JP3564705B2/ja not_active Expired - Lifetime
-
1993
- 1993-02-26 CA CA002090591A patent/CA2090591C/en not_active Expired - Lifetime
- 1993-03-01 AU AU33915/93A patent/AU663563B2/en not_active Expired
- 1993-03-01 US US08/024,627 patent/US5367531A/en not_active Expired - Lifetime
- 1993-03-02 EP EP93103311A patent/EP0560179B1/de not_active Expired - Lifetime
- 1993-03-02 DE DE69318601T patent/DE69318601T2/de not_active Expired - Lifetime
- 1993-03-02 KR KR1019930002952A patent/KR100302814B1/ko not_active IP Right Cessation
-
1994
- 1994-06-30 US US08/269,657 patent/US5418810A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0560179A1 (de) | 1993-09-15 |
AU3391593A (en) | 1993-09-09 |
AU663563B2 (en) | 1995-10-12 |
DE69318601T2 (de) | 1998-09-10 |
KR100302814B1 (ko) | 2001-11-30 |
JPH05243661A (ja) | 1993-09-21 |
EP0560179B1 (de) | 1998-05-20 |
KR930020782A (ko) | 1993-10-20 |
CA2090591C (en) | 2004-06-01 |
JP3564705B2 (ja) | 2004-09-15 |
CA2090591A1 (en) | 1993-09-03 |
US5418810A (en) | 1995-05-23 |
US5367531A (en) | 1994-11-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |