DE50104612D1 - INTERFEROMETRIC MEASURING DEVICE - Google Patents

INTERFEROMETRIC MEASURING DEVICE

Info

Publication number
DE50104612D1
DE50104612D1 DE50104612T DE50104612T DE50104612D1 DE 50104612 D1 DE50104612 D1 DE 50104612D1 DE 50104612 T DE50104612 T DE 50104612T DE 50104612 T DE50104612 T DE 50104612T DE 50104612 D1 DE50104612 D1 DE 50104612D1
Authority
DE
Germany
Prior art keywords
measuring device
interferometric measuring
interferometric
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50104612T
Other languages
German (de)
Inventor
Friedrich Prinzhausen
Michael Lindner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE50104612T priority Critical patent/DE50104612D1/en
Priority claimed from PCT/DE2001/001191 external-priority patent/WO2001075395A1/en
Application granted granted Critical
Publication of DE50104612D1 publication Critical patent/DE50104612D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062—Arrangements for scanning
    • A61B5/0066—Optical coherence imaging
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0082—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence adapted for particular medical purposes
    • A61B5/0084—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence adapted for particular medical purposes for introduction into the body, e.g. by catheters
DE50104612T 2000-03-30 2001-03-29 INTERFEROMETRIC MEASURING DEVICE Expired - Lifetime DE50104612D1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50104612T DE50104612D1 (en) 2000-03-30 2001-03-29 INTERFEROMETRIC MEASURING DEVICE

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE10015878 2000-03-30
DE10065179 2000-12-23
DE10115524A DE10115524A1 (en) 2000-03-30 2001-03-28 Interferometric measuring device
PCT/DE2001/001191 WO2001075395A1 (en) 2000-03-30 2001-03-29 Interferometric measuring device
DE50104612T DE50104612D1 (en) 2000-03-30 2001-03-29 INTERFEROMETRIC MEASURING DEVICE

Publications (1)

Publication Number Publication Date
DE50104612D1 true DE50104612D1 (en) 2004-12-30

Family

ID=26005107

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10115524A Ceased DE10115524A1 (en) 2000-03-30 2001-03-28 Interferometric measuring device
DE50104612T Expired - Lifetime DE50104612D1 (en) 2000-03-30 2001-03-29 INTERFEROMETRIC MEASURING DEVICE

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10115524A Ceased DE10115524A1 (en) 2000-03-30 2001-03-28 Interferometric measuring device

Country Status (1)

Country Link
DE (2) DE10115524A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10131779B4 (en) * 2000-07-07 2006-05-11 Robert Bosch Gmbh Interferometric short coherent shape measuring device for valve seat surfaces has beam splitter to form object beam guided over optical path to object and reference beam guided to reference plane
DE10039239A1 (en) * 2000-08-11 2002-03-07 Bosch Gmbh Robert Optical measurement device has image flattening optics for detecting/flattening curved surface area or panoramic optics for detecting radial symmetrical surface area over 360 degrees
WO2003106920A1 (en) 2002-06-17 2003-12-24 Zygo Corporation Interferometry methods and systems having a coupled cavity geometry for use with an extended source
US7525666B2 (en) 2003-01-20 2009-04-28 Robert Bosch Gmbh Interferometric measuring device
DE10325443A1 (en) 2003-06-05 2004-12-23 Robert Bosch Gmbh Interferometric measuring device
DE102004017229A1 (en) 2004-04-05 2005-12-22 Robert Bosch Gmbh Interferometric system for the use of special optics
DE102004017232A1 (en) 2004-04-05 2005-10-20 Bosch Gmbh Robert Interferometric measuring device
US7899573B2 (en) 2008-06-16 2011-03-01 GM Global Technology Operations LLC Non-contact method and system for inspecting a multi-faceted machine surface
CN104792735B (en) * 2014-12-09 2018-01-23 中国科学院微电子研究所 A kind of method and apparatus that image checking virus is scattered using surface phasmon

Also Published As

Publication number Publication date
DE10115524A1 (en) 2001-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition