DE50007088D1 - INTERFEROMETRIC MEASURING DEVICE FOR MEASURING MEASURES - Google Patents

INTERFEROMETRIC MEASURING DEVICE FOR MEASURING MEASURES

Info

Publication number
DE50007088D1
DE50007088D1 DE50007088T DE50007088T DE50007088D1 DE 50007088 D1 DE50007088 D1 DE 50007088D1 DE 50007088 T DE50007088 T DE 50007088T DE 50007088 T DE50007088 T DE 50007088T DE 50007088 D1 DE50007088 D1 DE 50007088D1
Authority
DE
Germany
Prior art keywords
measuring
measures
interferometric
measuring device
interferometric measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50007088T
Other languages
German (de)
Inventor
Michael Lindner
Pawel Drabarek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE50007088T priority Critical patent/DE50007088D1/en
Priority claimed from PCT/DE2000/003547 external-priority patent/WO2001027558A1/en
Application granted granted Critical
Publication of DE50007088D1 publication Critical patent/DE50007088D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
DE50007088T 1999-10-09 2000-10-09 INTERFEROMETRIC MEASURING DEVICE FOR MEASURING MEASURES Expired - Lifetime DE50007088D1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50007088T DE50007088D1 (en) 1999-10-09 2000-10-09 INTERFEROMETRIC MEASURING DEVICE FOR MEASURING MEASURES

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19948813 1999-10-09
DE10047495A DE10047495B4 (en) 1999-10-09 2000-09-26 Interferometric measuring device for shape measurement
PCT/DE2000/003547 WO2001027558A1 (en) 1999-10-09 2000-10-09 Interferometric measuring device for form measurement
DE50007088T DE50007088D1 (en) 1999-10-09 2000-10-09 INTERFEROMETRIC MEASURING DEVICE FOR MEASURING MEASURES

Publications (1)

Publication Number Publication Date
DE50007088D1 true DE50007088D1 (en) 2004-08-19

Family

ID=7925153

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10047495A Expired - Fee Related DE10047495B4 (en) 1999-10-09 2000-09-26 Interferometric measuring device for shape measurement
DE50007088T Expired - Lifetime DE50007088D1 (en) 1999-10-09 2000-10-09 INTERFEROMETRIC MEASURING DEVICE FOR MEASURING MEASURES

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10047495A Expired - Fee Related DE10047495B4 (en) 1999-10-09 2000-09-26 Interferometric measuring device for shape measurement

Country Status (1)

Country Link
DE (2) DE10047495B4 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1272812B1 (en) 2000-03-30 2004-11-24 Robert Bosch Gmbh Interferometric measuring device
DE10204136B4 (en) * 2002-02-01 2004-03-25 Robert Bosch Gmbh Interferometric measuring device
WO2003106920A1 (en) 2002-06-17 2003-12-24 Zygo Corporation Interferometry methods and systems having a coupled cavity geometry for use with an extended source
US7525666B2 (en) 2003-01-20 2009-04-28 Robert Bosch Gmbh Interferometric measuring device
DE10302055B4 (en) * 2003-01-21 2005-04-14 Robert Bosch Gmbh Interferometric measuring device
DE102004017229A1 (en) 2004-04-05 2005-12-22 Robert Bosch Gmbh Interferometric system for the use of special optics
DE102004017232A1 (en) 2004-04-05 2005-10-20 Bosch Gmbh Robert Interferometric measuring device
DE102004053420B4 (en) * 2004-11-05 2007-04-19 Robert Bosch Gmbh Interferometer with a height adapter for measuring a surface contour of a measurement object
DE102007010389B4 (en) * 2007-03-03 2011-03-10 Polytec Gmbh Device for the optical measurement of an object
DE102007022217A1 (en) 2007-05-11 2008-11-13 Robert Bosch Gmbh Interferometric measuring device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9101682U1 (en) * 1991-01-19 1991-05-29 Man Technologie Ag, 8000 Muenchen, De
DE4108944A1 (en) * 1991-03-19 1992-09-24 Haeusler Gerd Contactless measurement of surface shape of diffusely scattering objects e.g. semiconductor wafers - using interferometric arrangement for three=dimensional measurement with minimal coherence length and illumination aperture angle less than observation aperture angle
DE19721842C2 (en) * 1997-05-26 1999-04-01 Bosch Gmbh Robert Interferometric measuring device
DE19721843C1 (en) * 1997-05-26 1999-02-11 Bosch Gmbh Robert Interferometric measuring device
DE19801959A1 (en) * 1998-01-21 1999-07-22 Polytec Gmbh Optical construction for non-contact vibration measurement

Also Published As

Publication number Publication date
DE10047495B4 (en) 2005-06-09
DE10047495A1 (en) 2001-10-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition