DE19840927B4 - Laser radiation source of high power density and high energy for material processing - Google Patents

Abstract

Laser radiation source for material processing with an optical unit for shaping the laser beam on a processing surface,
characterized,
a plurality of diode-pumped fiber lasers (2) whose energy is individually controlled are provided,
in that the outputs of the fiber lasers (2) are connected by means of end pieces (26, 94) to an optical unit (8) for shaping the laser beam,
wherein the outputs of the end pieces are arranged in a first part and the optical unit in the first part and in a second part of a multi-part receptacle,
the optical unit (8) has a modulation unit, on the input of which the output beams of the individual fiber lasers (2) are directed and by which the individual laser beams are respectively modulated,
the laser beams emerging from the modulation unit are combined and bundled by means of the optical unit (8) in such a way that the beams impinge on the processing surface (81),
the optical unit (8) for shaping the laser beam, a transmission unit for transmitting the exit from the terminators ...

Description

The The invention relates to a laser source of high power density and high energy, preferably for material processing, with a optical unit for shaping the laser beam on a processing surface.

at Material processing with bundled laser beams there are use cases For example, in the printing technology in the creation of printing forms for the Gravure printing, in which structures, namely so-called wells, in the surface a copper cylinder must be produced, the high demands at the bundled Energy ray re its beam geometry and the focusability of the beam. At the same time a big one Steel power needed. There are from the literature and the patent literature arrangements known in which attempts are made to a single laser beam bundle up and thus remove material. With such a laser arrangement, from a single solid-state laser it is possible, You want to machine gravure cylinders with a zinc surface but to take advantage of the copper surface and copper cylinders and engrave them with a laser, it's imperative the penetration into the surface of copper required high power density and the melting of the Copper required high energy at the same time precisely controllable Apply beam geometry. But this is so far with solid state lasers failed.

From the WO 95/16294 A1 For example, there is known a device having a multi-laser output connected to one another, in which a multiplicity of individual fiber lasers are connected to one another, wherein a plurality of outputs are connected in a phase-locked manner, so that the output energy of the device can be adjusted.

From the GB 2-154 364 A For example, an adjustable laser vibration system for producing a single laser output beam is known, in which the phase-locked output beams of a large number of small laser oscillators are added together. In the known arrangement, the output of a plurality of small laser oscillators is summarized, with the aim of creating a single larger laser oscillator, which is adjustable in dependence on the number of small individual oscillators used.

Next discloses the US 5 717 450 A a laser radiation source comprising an optical unit in which a plurality of diode-pumped fiber lasers are provided whose outputs are connected to the optical unit for shaping the laser beam. The optical unit has a modulation unit, on whose input the output beams of the individual fiber lasers are directed and by which the individual laser beams are respectively modulated. The laser beams emerging from the modulation unit are combined by means of the optical unit in such a way that the beams impinge on the processing surface. The optical unit further has there a transmission unit for transmitting the laser beams emerging from the fiber lasers to the processing surface.

Moreover, from the US Pat. No. 5,760,880 a laser beam source having an optical unit for shaping a laser beam from the laser beam source, wherein an output connected to the optical unit in a first part and the optical unit in the first part and in a second part of a multi-part recording are arranged. The optical unit comprises a modulation unit for modulating the laser beam and a transmission unit for transmitting the laser beam onto a processing surface. Next, there is provided a interception arrangement, with which a part of the laser radiation can be hidden.

task Therefore, it is the object of the present invention to provide a laser radiation source To create extremely high power density and very high energy by a transmission device is used, which is a transmission the extremely high power density to the working surface and a maximum depth of field allows. The disadvantages of the known arrangements and methods should be avoided in principle become. Furthermore should it be possible Both the beam shape, flexibility, precision and beam positioning as well as the beam power even at much higher laser powers to control exactly.

This object is achieved by the laser radiation source according to the invention according to claim 1. Advantageous developments of the invention are described in the subclaims 2 to 96. In the parallel running, filed simultaneously with the present application German patent application DE 198 40 926 A1 "Method and Arrangement for Material Processing by Laser Beams" describes such a laser radiation source, which basically avoids the disadvantages of the known arrangements and methods, and it is possible to vary the beam shape in terms of flexibility, precision and beam positioning as well as the beam power Precisely control even at much higher laser powers.

The laser radiation source consists of a plurality of diode-pumped fiber lasers, also called fiber lasers, their output beams by means of the optical unit at the processing site next to each other and / or one above the other or in one point or bundles and thus enable the production of a shape and size selectively variable processing spot even at very high laser powers and extremely high power densities. According to the invention, these fiber lasers can be designed as continuous-wave lasers or as Q-switched lasers, also called Q-switch lasers, wherein they are advantageously modulated internally or externally and / or have an additional modulator. Q-switch lasers have the advantage that they emit short pulses of high power, which leads for a short time to a high power density. It is possible in pulsed operation by the short-term interruptions in the machining process, an advantageous discharge of the molten and vaporized material. Instead of switching the quality, it is also possible to generate a pulsed operation by means of internal or external modulation. The processing spot can be selectively changed in shape and size by different numbers of the lasers provided for shaping the processing spot can be turned on. It is particularly advantageous that the depth of the excavated wells regardless of their shape and size can be determined by the laser energy. Furthermore, by controlling the energy of the individual lasers, any desired beam profile can be generated within the processing spot and thus also within the cells.

at the material processing, it is desirable to use the laser energy Optical fibers as possible close to the working surface introduce. An advantage of the present invention over the known laser radiation sources is that the Coupling the radiation from a solid-state laser into an optical fiber can be omitted, but the output of the fiber laser, which already has the Fiber provides diffraction-limited radiation, according to the invention to less than 10 microns Spot diameter can be focused, creating an extremely high Power density at the highest possible depth of field is reached.

at a conventional one Arrangement with solid-state lasers lies the size of the processing spot in the range of about 100 microns. Thus, it results in the present invention, approximately to the Factor 100 improved power density and about a factor 100 improved design options of the processing spot.

One Another advantage of the invention is that the efficiency of such Arrangement with fiber lasers is much higher than the efficiency of solid-state lasers, because for Fiber lasers achieve absorption efficiencies of over 60% compared to conventional ones diode-pumped solid-state lasers only at about half lie and are even lower in lamp-pumped solid state lasers.

Of Further results in a multiple arrangement of lasers of Advantage that the Failure of a laser is less critical than with a single-channel Arrangement. falls in the single-channel arrangement of a laser during the engraving of a printing cylinder off, the entire impression cylinder is useless. But falls in a multiple array, a laser, then you can see the performance the remaining laser slightly increase, to compensate for the failure. After completing the engraving can then failed lasers are replaced.

The Laser radiation source according to the invention can also be beneficial for all other types of material processing or material transfer be used, where there is high power density, high energy and big precision or even high optical resolution arrives. In addition to the engraving of intaglio printing forms of copper, other materials such as All metals, ceramics, glass, semiconductor materials, rubber or plastics are processed and / or materials of special groomed support materials superseded and transferred to other materials at high speed and high precision become. Furthermore can in addition to uncoated gravure coated with masks, Printing plates or printing cylinders as well as all types of printing plates high-speed and high-resolution for offset, portrait, screen, Flexographic printing and all other printing processes produced or processed become. For example, you can also the for the printing of very high runs in offset printing used offset printing plates with metal coating (bimetal plates) and similar products environmentally friendly be imaged, which could previously be produced only by etching.

Farther can Materials are processed that contain a magnetizable surface by the large areas magnetized by a Vormagnetisierungsprozeß games of the material by briefly heating selected processing points Temperatures above the Curie point, by means of the laser radiation source according to the invention be demagnetized. For Applications in the printing industry can be illustrated in such a way Material in conjunction with a corresponding toner as a print template serve.

However, the use of the laser radiation source according to the invention is not limited to applications in the printing industry, but it can be used wherever it matters with lasers at high resolution and high speed by energy irradiation material ablate or change its properties.

One considerable advantage of the laser radiation source according to the invention is, that you has a low volume and over a flexible connection, namely the laser fibers or connected fibers between the pump source and the exit of the radiation at the processing location and thereby all conceivable operating conditions permits. Therefore is also available for the arrangement of the working surface no limits, it can be arranged arbitrarily.

Another advantage of the invention is that the beams of the individual lasers with defined values in beam diameter, beam divergence, centering and angular direction in the end pieces can be accurately and permanently taken to obtain a manufacturing and service-oriented arrangement and the laser radiation targeted to the Leading machining surface. In the parallel running, filed simultaneously with the present application German patent application DE 198 40 935 A1 "Terminator for optical fibers", and in the parallel running, filed simultaneously with the present application German utility model application DE 298 16 108 U1 According to the invention, the radiation beams can be coupled out, for example, as parallel laser beams, diverge or, for example, be focused at a certain distance from the exit point, depending on the application. By means of these terminators, the position of the respective fiber from which the laser energy emerges is precisely fixed in the terminator (termiator) and the position of the emerging bundle of rays is precisely adjusted. which also due to a special shape also particularly easy to string together, it is possible to summarize the bundle of fibers of several fiber lasers and bundle that each set task is solved and at the same time economical production and a cost low maintenance of the laser radiation source is made possible.

The invention will be described below with reference to the 1 to 14a explained in more detail. Show it:

1 a schematic diagram of a laser radiation source according to the invention,

2 a schematic diagram of a fiber laser (prior art),

2a a shortened representation of the fiber of the fiber laser (prior art),

3 a representation of the optical unit in a multi-part recording to a laser radiation source with a multiple array of fiber lasers,

3a a perspective view of the 3 .

3b an extension option too 3 .

3c another extension option too 3 .

3d an example of a multiple socket for several end pieces,

3e a lens that is surrounded by a coolant,

3f a section through a socket for the objective lens,

4 a representation of the optical unit of a laser radiation source according to the invention,

5 a representation of the optical unit of a further laser radiation source according to the invention,

6 an example of a conclusion piece with square cross section,

6a a cross section through the end piece according to 6 .

7 an example of a terminator with a rectangular cross-section and a trapezoidal plan view,

7a a longitudinal section through the end piece according to 7 .

7b a cross section through the end piece according to 7 .

8th an arrangement with an electro-optical modulator,

9 a top view of a four-channel acousto-optic modulator,

9a a section through the modulator after 9 .

10 a basic beam path for a top view 3 .

11 a basic beam path for a top view 4 .

12 a basic beam path for a top view 5 .

13 a beam path for terminators, which are arranged at an angle to each other,

14 a variant of 13 containing a multi-channel acousto-optic modulator, and

14a a detail too 14 , where the 3 . 10 . 13 and 14 show no laser radiation source according to the invention.

In 1 is a laser radiation source 1 shown, which consists of several, preferably embodied as modules according to the invention, diode-pumped fiber lasers or fiber lasers ( 2 ) consists of a preferably modular supply 32 be subjected to electrical energy, which is partially converted into laser radiation. Furthermore, there is a controller 33 provided, via which the modulation of the radiation is made and which ensures the interaction of the laser radiation source with its periphery. The output beams of the lasers appear at the radiation input 9 in the optical unit 8th on and at the radiation output 10 out of the optical unit. Through the optical unit 8th the laser radiation becomes a processing spot 24 on a working surface 81 shaped.

In the 2 and 2a is the basic structure of a fiber laser array 2 , also called fiber laser, shown. In 2 the energy of a pump source such. B. a laser diode, here pump source 2 called, via a Einkoppeloptik 3 to a suitable pump leak 4 shaped and into the laser fiber 5 coupled. Such pump sources are z. B. in the parallel German patent application with the file number DE 196 03 704 A1 wrote. Typical pump cross-sections of the laser fibers are approximately between 100 .mu.m and 600 .mu.m with a numerical aperture of about 0.4. The laser fiber 5 is on the feed-in side 6 with a coupling mirror 7 provided that passes the pump radiation unhindered, but for the laser radiation has a 100% reflection. The coupling mirror 7 can be attached to the fiber end with a suitable support or by gluing, but it can also be realized by direct vapor deposition of a suitable layer, as used in coupling mirrors for lasers, on the fiber end. On the decoupling side 11 the laser fiber 5 is a partially transparent for the laser radiation Auskoppelspiegel 12 attached by the laser radiation 13 is decoupled. The output mirror for the pump radiation advantageously has a 100% reflection. As a result, the remaining pump radiation is reflected back into the optical fiber, which is advantageous because the pump energy is better utilized and also does not interfere with the application of laser radiation. The coupling-out mirror, like the coupling-in mirror, can likewise be produced by vapor deposition.

In 2a is the coupling process of the pump radiation in the pump cross section 14 the laser fiber 5 shown in more detail. The energy in the pump leak 4 stimulates the laser radiation in its core on its way through the fiber 15 the laser fiber 5 at. The pump core 16 is from a coat 17 surround. The approximately 5 μm to 10 μm thick core of the laser fiber is predominantly doped with rare earths. As a result of the deliberately manufactured, very small fiber core diameter, the fiber laser at the outlet delivers a laser beam that is virtually diffraction-limited 13 , One can also connect passive fibers to the active output of fiber lasers 28 Docking.

In 3 is a section through an application example of a multi-part receptacle for the adaptation of the optical unit of a laser radiation source with sixteen fiber lasers, which via terminators 26 coupled with two multi-channel acousto-optic modulators 34 shown. The recording contains versions 29 ( 3a ) with mating surfaces for the fit or fits of the terminators 26 , Means for merging the individual laser beams, the modulation unit, the transmission unit for transmitting the laser radiation, which is to cause a processing effect, on the processing surface 81 and an arrangement for rendering the laser radiation harmless, which should not cause a processing effect. At the multi-part recording, the Anord tion for removing the removed from the processing surface material may be arranged, but can also be attached in other ways in the vicinity of the processing surface.

3a is a perspective view too 3 ,

In 4 is a variant too 3 shown in which the beams of each fiber laser not as in 3 parallel, but at an angle to each other, but what the sectional drawing in 3 is not apparent and therefore in the 10 to 14 is explained in more detail.

In 5 is a variant too 4 shown, which allows an advantageous, much more compact design due to a differently executed transmission unit.

It will be the first 3 with the help of the 3a explained in detail. These explanations apply mutatis mutandis to the 4 and 5 ,

In a housing 35 are at the radiation entrance 9 ( 1 ) each 4 fiber lasers F _HD1 to F _HD4 , F _VD1 to F _VD4 , F _HR1 to F _HR4 , F _VR1 to F _VR4 via F _HD1 to F _HD4 , F _VD1 to F _VD4 , F _HR1 to F _HR4 , F _VR1 to F _VR4 over the terminators 26 by means of the versions 29 arranged in each case in four tracks, each one beam packet side by side in a plane. The embodiment of in 3 used terminators 26 , is in the 6 . 6a . 7 . 7a and 7b described in more detail. The terminators are preferably gas-tight in the housing 35 be used, including seals 36 ( 3a ) can be used. It can also be used differently shaped terminators instead of the illustrated terminators, if appropriate versions 29 in the case 35 are provided. The fiber lasers F _HD1 to F _HD4 or F _VR1 to F _VR4 , for example, should have a different wavelength than the fiber lasers F _VD1 to F _VD4 or F _HR1 to F _HR4 . For example, F _HD1 to F _HD4 and F _VR1 to F _{VR4 should have} a wavelength of 1100 nm, while F _VD1 to F _VD4 or F _HR1 to F _{HR4 should have} a wavelength of 1060 nm, resulting in a corresponding doping of the laser-active core material the laser fiber 5 can be achieved. However, all fiber lasers can also have different wavelengths if they are combined accordingly.

About wavelength-dependent mirrors 37 as means for merging the beam packets of the fiber lasers F _HD1 to F _HD4 with those of the fiber lasers F _VD1 to F _VD4 and the beam packets of the fiber lasers F _VR1 to F _VR4 with those of the fiber lasers F _HR1 to F _HR4 to a radiation packet F _D1 to F _D4 and F _R1 to F _R4 ( 3a ) united. There are other ways to influence the wavelength of the fiber laser, for example, in the range of laser fiber between Einkoppelspiegel 7 and Auskoppelspiegel 12 wavelength-selecting elements such as Brewster plates, diffraction gratings or narrow band filters are introduced. It is also possible to have at least one of the two laser mirrors 7 or 12 to be provided with such a mirror layer, which is sufficiently highly reflective only for the desired wavelength. However, the beam splicing implementation is not limited to the use of fiber lasers of different wavelengths according to the invention. In addition to fiber lasers, which have no preferential direction in the polarization of the emitted laser radiation, it is also possible to use fiber lasers which emit polarized laser radiation. By replacing the wavelength-dependent mirror with one that is polarization-dependent to pass one direction of polarization while reflecting the other direction of polarization, only two differently polarized types of laser need to be used to combine both by means of the polarization-dependent mirror. In this case, the use of the end piece 26 after the 6 and 6a Particularly suitable with square cross-section, as you by turning the end piece by 90 ° before mounting in the housing 35 each can produce one or the other polarization direction with the same fiber laser.

A particular advantage of combining several lasers into a single spot, namely to each of the individual processing points B ₁ to B _n (for example B ₁ to B ₄ in FIG 10 to 12 ) is to achieve a higher power density at a given spot size on the processing surface 81 ,

By omitting fiber lasers or tracks as required, it is possible to reduce the initial cost of such an arrangement and later to retrofit fiber lasers as needed. For example, you can start with a fiber laser and a track. The missing terminators of unused fiber lasers are replaced by identical terminators, but no through hole and no laser fiber and serve only for closure, replaced to the housing 35 to shut up as if it were equipped with all final pieces.

The number of levels in which the terminators are arranged is not limited to the one level described and the number of tracks is not limited to the 4 tracks described. In 3b is z. B. an arrangement with 3 levels and n tracks specified

Each with a four-channel acousto-optic modulator 34 , its mode of action and embodiment in the 9 and 9a is explained in more detail, the respective beam packets of the fiber lasers are modulated. Through the acousto-optic modulator 34 , which is a deflector in principle, is deflected in the illustrated case, the unwanted energy from the original beam direction I ₀ in the beam direction I ₁ ( 3a ), so that they can be easily intercepted later in the beam path and rendered harmless. The modulation can preferably be done digitally, ie it is different in the individual modulator channels only between two states, namely "ON" and "OFF", which is particularly easy to control; but it can also be done analogously by the laser power in each modulator channel can be set to any value. The modulation is not limited to that the energy from the beam direction I _{0 is used} for the machining and the energy from the direction I _{1 is} rendered harmless. In the parallel running, filed simultaneously with the present application German patent application DE 198 40 926 A1 "Method and arrangement for material processing by means of laser beams", examples are given ben in which the deflected beam direction I ₁ for Machining is used and the energy from the direction I _{0 is} rendered harmless.

The multi-channel acousto-optic modulator 34 is preferably on a cylindrical modulator housing 41 attached, that rotatable in an opening 48 in the case 35 is stored. After the modulator housing has been adjusted to the required Bragg angle α _B , the modulator housing is connected by means of a connection 42 fixed. By means of a seal 43 is ensured that each modulator housing gas-tight to the housing 35 concludes. From the modulator housing 41 protrudes a specially prepared circuit board 171 in the inner space 44 of the housing 35 , about which the electrical connections to the piezoelectric transducers 45 getting produced. The preferred embodiment of the modulators is in the 9 and 9a described in more detail.

After passing through the acousto-optic modulators, the ray packets F _D1 to F _D4 and F _R1 to F _R4 become a streak mirror 46 guided, the strip-shaped at intervals alternately transparent and mirrored. The beam packet F _D1 to F _D4 is relative to the strip mirror 46 arranged so that it can pass through the streak mirror unhindered. However, the laser beams of the beam set F _R1 to F _R4 are offset from the beam packet F _D1 to F _D4 by half a track pitch and strike the strip-shaped mirrored strips of the strip mirror. As a result, they are deflected in their direction and are now in one plane with the laser beam bundles F _D1 to F _D4 . This results in an eight-track arrangement, in which in each track also two lasers of different wavelengths are superimposed, so that a total of 16 Lasers have been brought together and come to effect. Above this level I ₀ are those in the acousto-optic modulator 34 rejected beams I ₁ . In another adjustment of the acousto-optic modulator 34 The diffracted rays may also lie below the plane of I ₀ , as in the 4 and 5 will be shown.

A significant advantage of the arrangement according to the invention is that the axis of symmetry of the beam _packets F _HD1 to F _HD4 and F _D1 to F _D4 on the axis of the housing 35 lie through the hole 47 is defined and the beam axes of the associated beam packets are each parallel or perpendicular to this axis, which allows a simple and accurate production. However, it is also possible to arrange the beam packets asymmetrically and at different angles.

Furthermore, it is possible to have small differences in the position of the beam packets by adjusting the wavelength-dependent mirror 37 and the streak mirror 46 to correct. It is possible to readjust the terminators after installation in their position and their angle assignment, but this is not shown in the figures.

It is within the scope of the invention that reduces the number of tracks, but also be further increased can, for. B. can by stringing together eight instead of four End pieces, the connected to fiber lasers, doubling to a beam packet the number of lanes are made. This would require two 8-channel acousto-optic Modulators are used. They are acousto-optic modulators with 128 separate channels available on a crystal.

It is also possible according to the invention, to increase the power per track, to arrange the fiber lasers in different planes and to superimpose their power on the working surface, which is in the 3b is pictured.

It can also directly modulatable fiber lasers can be used. In this Case eliminates the acousto-optic modulators and it arises a particularly simple construction.

Of the Operation with several tracks of lasers and several lasers in one Track allows high processing speeds with low relative speed between the laser beam and that of the workpiece. Also, this can be the processing speed optimally to the time constant of the heat dissipation of the material customized become. For longer Processing time flows namely too much energy useless in the environment.

The housing 35 is gas-tight with a lid and a seal, both of which are not shown in the figures. To the case 35 is in the area of the hole 47 a cylindrical tube 51 flanged and over a seal 52 sealed. The cylindrical tube contains as a transmission unit optics, namely two tubes 53 and 54 each with an optical imaging system, the eight laser beams F _D1 to F _D4 and F _R1 to F _R4 at the radiation exit 10 ( 1 ) on the working surface to the correct scale. There are preferably two optical imaging systems arranged one behind the other, otherwise altogether a very large length or a very small distance between the objective lens and the processing surface would result, both of which is disadvantageous because a long beam path would have to be folded by means of mirrors and too small a distance between the objective lens and the processing surface could lead to an excessive risk of contamination of the objective lens.

The beam path is in 3 as a page shown. In 10 the principal ray _{path is} shown as a plan view for the radiation _packet F _HD1 to F _HD4 . The wavelength dependent mirrors, the modulators and the streak mirror are not shown there. In the figures, plano-convex lenses are mainly shown, but it is also possible in all figures other lens shapes such. B. biconvex or concave-convex lenses or use those with aspherical shape. Lens systems, each consisting of several combinations of lenses, may also be used.

Around to transfer the laser energy as efficiently as possible and to warm up the Limiting optical components are all in the different versions the laser radiation source occurring optical surfaces for the in question coming wavelength range with highest quality non-reflective.

There are still further advantageous solutions for the transfer unit to shorten the overall length of the transfer unit and still achieve a sufficiently large distance between the objective lens and the processing surface, such as in the 4 and 5 is shown in more detail.

The lenses 55 and 56 can be screwed or glued to the tube 53 be connected, but they can preferably metallized at their edges and to the tube 53 be soldered. The same goes for the lenses 57 and 61 in the tube 54 , This results in a gas-tight seal of the lenses and a good heat transfer from the lenses to the tubes. The tube 54 is preferably with a seal 62 opposite the cylindrical tube 51 sealed gas-tight. For the room 63 The same conditions apply to tightness and cleanliness as to the room 44 and also for the rooms 64 and 65 inside the tubes 53 and 54 , The chambers 66 and 67 are preferably via holes 71 with the rooms 44 and 63 connected. The tubes 53 and 54 may preferably have openings 72 exhibit.

An interception arrangement 73 to make harmless the laser radiation, which should cause no processing effect on the processing surface and a highly reflective mirror 74 and a diverging lens (concave lens) 75 protrudes into the room 63 into it. The interception arrangement 73 is with a seal 76 used, and the concave lens 75 , which can also be replaced by another optical element, such as a glass plate, glued into the interceptor or preferably metallized in its edge zone and soldered for better heat dissipation to the interceptor. This is the room 63 Completed gas-tight from the environment. By the measures described results that the entire interior of the multi-part recording gas-tight is completed by the environment. The rooms 44 . 63 . 64 and 65 and the chambers 66 and 67 , So the entire interior of the multi-part recording, can preferably be evacuated or filled with a protective gas. The spaces and chambers should be as free as possible of components that secrete gases or particles, because it could settle dirt on the highly loaded optical surfaces, which would lead to premature failure of the arrangement. Therefore, the requirement is made to the seals to be used that they do not secrete particles or gases. During installation, great importance is attached to maximum purity of the parts to be assembled and the environment until the optical unit is closed. After sealing the optical unit can over the valve 77 an evacuation of the entire interior of the multi-part recording are made, or a protective gas are filled. The advantage of filling the interior with an inert gas is that it can be more easily renewed by operating the valve 77 connects a gas cylinder, not shown, via a pressure reducing valve, from which gas can be refilled into the housing if necessary. Another advantage is that when replacing a fiber laser one end piece is to be removed from the housing and replaced by another or if the housing or the cylindrical tube has to be opened by the user for some reason, one constantly during the process small amount of the inert gas can flow through the housing, so as to prevent the ingress of dirt particles in the protected space. You can also constantly a small amount of gas flow through the housing and through openings 120 ( 3f ), preferably in the vicinity of the objective lens, so that this flow also prevents contamination of the objective lens by such dirt particles that are released in the machining process. One can also do without the evacuation or the inert gas filling, if one takes a shorter life of the laser radiation source into account.

Advantageous in the arrangement according to 3 is that the angle between the beam packets of the original beam direction I _{0 of} the acousto-optic modulator and the deflected beam direction I ₁ through the imaging system of the lenses 55 and 56 is significantly increased, so that it is easy, by means of the highly reflective mirror 74 at the interception assembly 73 to intercept the unwanted radiation packet of the deflected beam direction. The mirror 74 is preferably made of metal and provided with a highly reflective layer to minimize the heating due to absorbed laser energy. He is for better heat dissipation over a strong flange of the interception assembly 73 with the pipe 51 connected. The advantage of the arrangement after 3 is that low demands are placed on the optical components in the two tubes. You could even do both tubes completely the same. Another advantage is that the axes of the end pieces 26 lie parallel to each other. The distance between the objective lens 61 and the working surface 81 must not be too small, so that flying particles from the material surface do not reach the objective lens. If it is contaminated, it absorbs the laser energy and is destroyed and thus unusable. To prevent contamination is between the objective lens 61 and the working surface 81 a special mouthpiece 82 arranged in the parallel running, simultaneously filed with the present application German utility model DE 298 16 110 U1 "Arrangement for removing material that is removed by a laser radiation source in the material processing from a processing surface" is described.

The multi-part recording of the optical unit is within the arrangement for material processing, for example on a prism 83 around the through the objective lens 61 certain optical axis corresponding to the axis of the tube, rotatably mounted and slidably mounted in the direction of the optical axis and, for example, with a clamping band 85 or fixed in place with several tension straps. As a result, an accurate delivery of the optical unit to the processing surface 81 possible. Due to the rotation of the track spacing of the individual processing tracks of the laser on the processing surface 81 to be changed. Outside the prism 83 there is a plate 86 , the openings 87 has, through which a coolant can be pumped. The task of this plate 86 is to absorb and dissipate the laser energy intercepted from the beam path, which is not intended to cause any processing effect. Between the plate 86 and the tube 51 . 95 . 113 There is a thermal insulation, but not shown in the figures. The plate is over insulating flanges 91 with the pipe 51 . 95 . 113 connected. The flanges 91 also prevent the leakage of laser radiation.

Due to the high laser power, the optical elements in the beam path will heat up because they absorb a, albeit very small, part of the laser energy. Preferably, therefore, the critical optical components instead of glass made of a material with better thermal conductivity, for example made of sapphire. The loss of heat is dissipated by metallization of the bonding surfaces of the optical components through the solder joints to the sockets and to the housing. The housing is for better heat dissipation with cooling fins 92 executed, which can be cooled by a fan, not shown. Also, an enforcement of the housing 35 and the other components of the laser radiation source with holes, especially in the critical areas on the lens frames and sockets for the terminators 26 , possible through which a coolant can be pumped, resulting in the 3d and 3e is shown.

Since in the material processing, as set forth above, very high laser powers are required, it is essential according to the invention to keep the number of optical elements, in particular the lenses, as small as possible in the beam path to the optical losses and the risk of Pollution of the optics, which would always lead to premature failure, to keep as low as possible. It is also within the scope of the invention that the objective lens ( 61 . 103 and 112 ) with an exchange certificate ( 3f ), so that it can be swapped quickly by the user of the laser radiation source if necessary, whether it has been contaminated during operation or that a different magnification is desired. It is also within the scope of the invention that measures are taken in the optical beam path that no laser energy can get back into the laser. It is appropriate that the laser radiation does not impinge perpendicularly but at an angle on the material to be processed, so that the radiation reflected on the material surface can not return to the laser radiation source. Furthermore, in the 3 . 4 . 5 and 8th shown that the laser radiation to be destroyed by an obliquely placed concave lens 75 in a swamp, consisting of a slanted plate 86 which can be cooled is passed. According to the invention, instead of the concave lens 75 also another optical component, such as a plate or a diaphragm can be used. In this case, this optical component is dimensioned in its effective diameter so that the guided into the sump laser radiation can happen just while such radiation, which is reflected back from the sump or scattered back, is largely retained, so that no energy back into the laser can get. According to the invention, the surface of the plate 86 , which is shown in the figures as a flat surface, are also performed spherical or hollow and preferably roughened to absorb the highest level of radiation and to reflect a minimum of radiation or to scatter.

It is within the scope of the invention, of the described embodiment deviating embodiments of the optical, mechanical and electrical arrangement for 3 to choose. For example, one could use all parallel ray packets Focus F _D1 to F _D4 and F _R1 to F _R4 onto the processing _surface with a lens so that all processing points hit the same spot, which gives a very high power density, but can not represent the shape of the processing spot as well all processing points lie on top of each other and are united into a common spot.

The principle of the described arrangement of laser outputs in multiple levels or in multiple tracks or in multiple tracks and in multiple levels or overlapping in one point according to the invention also applies to those on the processing surface 81 incident laser beams. According to this ordering principle, a plurality of tracks or a plurality of planes or a plurality of tracks and a plurality of planes of laser beams may also be arranged on the processing surface, or the laser beams may be arranged overlapping one another at one point.

In 3b It is shown how the distances of the beams from the terminators can be changed in one direction, for example to guide the beams of several levels through the same modulator. In the parallel arrangement of the tracks, the illustrated imaging system with the cylindrical lenses 202 and 203 , also called cylinder optics, for example, mutatis mutandis to an arrangement such as the 3 to be added. If the individual tracks but at an angle in accordance with 13 or 14 should run, are preferably terminators 94 after the 7 . 7a and 7b used. Also in this arrangement, the beams of the individual planes remain parallel, the fits of the terminators 94 should this in the side view 7a run parallel. If the axes of the beams for the tracks are at an angle to each other, the cylindrical optics may be aligned with the lenses 203 and 203 For example, mutatis mutandis to arrangements according to the 5 or 6 to be added. The emerging from the terminators beams 144 are on the convex cylindrical lens 202 directed, which would unite the rays from the individual planes in their focus to a line with the length of the beam diameter. In the area of the focus is a concave cylindrical lens 203 with a shorter focal length than the cylindrical lens 202 has, so appropriate, that their focus with the focus of the cylindrical lens 202 matches. This will cause the rays to be the lens 203 leave, again in parallel. The distances between the individual levels have, however, in relation to the distances between the beams when leaving the terminators 26 . 94 had reduced the ratio of the focal lengths of the two cylindrical lenses. In the direction of the tracks, the distances of the beams have remained unchanged, since in the cylinder lenses in this direction have no effect. This results in the modulator elliptical beam cross-sections. The purpose of this arrangement, for example, is to make the total height of the three superimposed ellipses small enough to correspond approximately to the long axis of the ellipses to provide similar ratios in the channels of the acousto-optic modulator as in a circular beam cross-section For example, similar short switching times can be achieved.

The cylinder optics ( 202 . 203 ) is in 3b between the end pieces ( 26 . 94 ) and the modulator ( 34 ). However, it can be in the beam direction before or after the cylinder optics, a wavelength or polarization-dependent mirror 37 be ordered to. It can also be a cylinder optics ( 202 . 203 ) in the beam path after the modulator, before or after the streak mirror 46 be arranged. Preferably, the intermediate image in the beam path to the in 4a used with "E" designated places.

In 3c It is shown how the distances of the beams from the terminators can be changed in both directions. There is a miniaturizing intermediate image by means of the lenses 191 and 192 indicated so that the distance between the individual end pieces 26 . 94 may be greater than the distance between the individual modulator channels T1 to T4 on the multi-channel acousto-optic modulator 34 , The imaging ratio corresponds to the ratio of the focal lengths of the two lenses 191 and 192 , The intermediate image is preferably formed telecentric by the distance of the lens 191 to the lenses 133 the final pieces 26 respectively. 94 and to the crossover point 193 is equal to their focal length and by the distance from the crossover point 193 to the lens 192 as well as the distance of the lens 192 to the modulator crystal 34 is equal to their focal length. It can be achieved by adjusting the distance between the two lenses but also that of the lens 192 emanating rays no longer run parallel, but at an angle to each other, to it a beam path according to the 11 or 12 to join. The intermediate picture ( 191 . 192 ) is in 3c between the end pieces ( 26 . 94 ) and the modulator ( 34 ). However, it may be in the beam direction before or after the intermediate image, a wavelength or polarization-dependent mirror 37 be arranged. It can also be an intermediate image ( 191 . 192 ) in the beam path after the modulator, before or after the streak mirror 46 be arranged. Preferably, the intermediate image in the beam path to the in 3a used with "E" designated places.

In 3d are versions 29 in a housing 145 for several conical terminators 26 shown how they are in 13 shown are and which have a cylindrical shape and two cylindrical fits, of which the lens 133 facing fit has a conical shape. It is an arrangement in 2 parallel planes provided in sections. The axes of the terminators may be parallel or at an angle to each other in the direction of the tracks. The housing 145 with the versions 27 for the terminators is part of the housing 35 . 93 , It can be made with him in one piece or manufactured as a separate piece and be connected to him gas-tight. To dissipate the heat loss, the housing can 145 according to the invention with holes 87 be provided, through which a coolant is passed.

3e shows a lens 101 whose socket holes 87 contains, which are preferably to enclose the lens in several turns and are traversed by a coolant. With high power devices, one can not disregard the absorption of the optical medium of the lenses. In addition, a small proportion of the radiation is scattered by each optical surface and absorbed by the socket parts, even with the best compensation. Therefore, a cooling of the lens frames makes sense. It has already been mentioned that for the most highly stressed lenses materials with high thermal conductivity and low absorption such. B. sapphire are advantageous. Sapphire also has the advantage that the lens surface does not scratch during cleaning due to the high hardness of the material. It is also necessary to ensure a good contact of the optical medium to the socket, which is advantageous by a metallization of the edge zone of the optical element and a soldering 223 is made with the socket, as metallic solders have a better heat conduction than glass solders, especially since these can be used only in certain types of glass.

3f shows a section through a socket 118 according to the invention for the objective lens 61 . 103 . 112 , for example, with a thread on the tube 65 . 96 , or the version 116 attached and with a seal 125 is sealed. The objective lens can be glued into the socket or preferably metallized at its edge and soldered into the socket ( 223 ). The socket can be fitted with one or more holes 120 be provided, through which a protective gas coming from the interior of the optical unit 8th comes, flows out and for example by means of a groove 119 over the side of the objective lens facing the working surface 61 . 103 . 112 is directed to avoid contamination of the objective lens by material particles or gases that are released during processing.

• – Gehäuse 93,
• – Abschlußstücke 94,
• – zylindrisches Rohr 95,
• – Tubus 96 und
• – hoch reflektierender Spiegel 97

In 4 a further multi-part recording for the optical unit of a laser radiation source is shown, which in the following points from the in 3 differentiates:

• - Casing 93 .
• - End pieces 94 .
• - cylindrical tube 95 .
• - tube 96 and
• - highly reflective mirror 97

The housing 93 has to the final pieces 94 suitable versions 29 , The final pieces 94 preferably correspond to those of 7 . 7a and 7b , The axes of the beam bundles run parallel to each other when the terminators are arranged in the respective bundles of rays, but approximately to the center of the concave lens 101 to what in the plan view 11 is shown. But it can also be used other forms of terminators, if it is ensured that the versions 29 are arranged at a corresponding angle, such as in 13 shown. In the tube 96 is located as a transmission unit imaging optics, which consists of 3 lenses, namely a diverging lens, ie a concave lens 101 and two converging lenses, so convex lenses 102 and 103 , where the lens 103 is preferably designed as a replaceable objective lens. For the installation of the lenses with regard to tightness and heat dissipation, see under 3 Said, as well as for the choice of material regarding the heat conduction. The tube 96 can be in the space between the lenses 101 and 102 be evacuated or filled with an inert gas or preferably via a bore 104 with the room 105 be connected, in turn, via a hole 106 with the room 107 connected is. The space 107 is with the room 111 over the hole 47 connected, which in turn is sealed gas-tight, as under 3 described. The space between the lenses 102 and 103 can have a hole 72 . 104 ( 3f ) with the room 105 be connected, in particular if the version of the lens is gas-tight manner or as under 3 described constantly a small amount of inert gas flows through the optical unit and exits near the objective lens, which in 3f is shown. The entire interior of the receptacle for the optical unit, consisting of the rooms 111 . 105 . 107 is preferably evacuated or filled with an inert gas or by a protective gas flows through, as under 3 has been described in detail. The unwanted beams are provided with a highly reflective mirror 97 intercepted. The distance between the highly reflecting mirror and the modulators is kept sufficiently large in order to achieve a sufficient spatial separation of the beam packets I ₀ and I ₁ . The optical beam path of the transmission unit in 4 represents a side view, in 11 is a principal ray path for a top view 4 specified. The beam path of the lenses 101 and 102 corresponds to the egg its inverted Galilee telescope; but it can also be implemented as an inverted Kepler telescope, if one uses the short focal length concave lens 101 exchanged for a convex lens. Such telescopes are described in the textbook "Optics" by Klein and Furtak, Springer 1988, pp. 140 to 141. The advantage of the arrangement according to 4 is that only 3 lenses are required for the transmission unit. The disadvantage that the beams of the individual terminators are not parallel, is provided by terminators according to the 7 . 7a and 7b Fixed.

You could also use a lens 55 use to redirect the beams in the desired direction, as in 10 was presented. Then the individual laser beams would be between the terminators 26 and the lens 55 that like in 3 is arranged, run parallel to each other and there is no difference with respect to the housing and the terminators or their arrangement 3 , But there the lens 55 In addition to the distracting effect also exerts a collecting effect on the individual beam, would be in place of the concave lens 101 not the same conditions arise as in 11 , But this can be done by another adjustment of the distance of the fiber 28 or the laser fiber 5 to the lens 133 or a modification of the lens 133 in the final pieces 26 be compensated, ie the beam cone of the laser beam from the individual terminators would each be set so that there is a sharp image on the processing surface at the location of the points B ₁ to B _n . It is also possible according to the invention, the lenses 102 and 103 into a single, common lens. Then there is a transmission unit with only 2 lenses.

At the multipart recording is a special mouthpiece 82 provided that contamination of the objective lens 112 and in the parallel running, simultaneously filed with the present application German utility model DE 298 16 110 U1 "Arrangement for removing material that is removed by a laser radiation source in the material processing from a processing surface" is described.

5 shows a multi-part recording, which is designed to be much more compact than that of 3 and 4 , As a transmission unit in conjunction with a mirror arrangement, an objective lens 112 used, which can be exchanged to achieve different magnifications 5 differs from 4 in the following points. The cylindrical tube 95 is replaced by an eccentric tube 113 , The tube 96 is preferably replaced by a plate 114 with a concave mirror 115 and a version 116 with an objective lens 112 and a high tempered plate 117 , The interception unit 73 receives above the highly reflective mirror 97 a domed (convex) mirror 121 , The eccentric tube is on one side with the housing 93 connected. A seal 52 ensures the required tightness. Into the eccentric tube 113 is a plate 114 used, which contains a passage for the radiation packets I ₀ and I ₁ and the concave mirror 115 carries, whose heat loss is thus derived well to the eccentric tube. The eccentric tube has two mutually preferably parallel axes, namely, first, the axis of symmetry of the incoming beam packets with the direction of I ₀ , which are directed to the curved mirror and second, the axis between the concave mirror and the objective lens 112 , which can be considered as an optical axis of symmetry for the exiting laser radiation. According to the invention, the beam path is by means of the two mirrors 121 and 115 folded. The arched mirror 121 is preferably made of metal. He is closely related to the highly reflective mirror 97 connected and preferably made with him together from one piece. The convex surface of the domed mirror may be spherically or aspherically shaped. The mirror 115 is concave, so a concave mirror. Its surface may be spherically shaped but is preferably aspherical in shape. It is preferably made of metal. Metal has the advantage of good dissipation of heat loss. Furthermore, in the production of metal there is a considerable advantage in the production of aspherical surfaces, which in this case, namely, as well as spherical and planar surfaces, can be produced by known diamond polishing processes. This allows the highly reflective mirror 97 and the arched mirror 121 manufactured in one piece and preferably in one operation with the same shape of the surface and mirrored together, which is particularly easy to manufacture and very advantageous for the positional stability of the curved mirror, because in the modulation of the laser energy by means of the acousto-optic modulator either on the arched mirror 121 or on the highly reflective mirror 97 , The heat loss generated in each case remains the same and the domed mirror maintains its temperature and thus its position, which is very important because it is preferably designed with a short focal length and therefore the imaging quality of the device is very dependent on its exact position. In this case, the arched mirror has 121 the function of the highly reflective mirror 97 taken over in an advantageous manner. The highly reflective mirror can 97 but also have a different shape of the surface than the arched mirror 121 and, for example, a plane mirror. The beam path is similar to that of a reverse mirror telescope according to Herschel, which instead of the curved mirror contains a convex lens, and is in 12 described in more detail. Mirror telescopes are described in the "Textbook of Experimental Physics Volume III, Optics" by Bergmann-Schäfer, 7th edition, De Gruyter 1978, on page 152. You can also replace the arched mirror with a short focal length concave mirror. As a result, the overall length would be slightly increased and it would be to adjust other radiation cone of emerging from the terminator beams to obtain a sharp image in the image plane. At the eccentric tube is the interceptor assembly 73 about a seal 76 attached gas-tight, over which the unwanted laser energy, as under the 3 and 4 described, to a cooling plate 86 with holes 87 derived and rendered harmless. It is also possible already at the place of the plate 114 to intercept the unwanted laser radiation from the radiation packet I ₁ and render harmless.

The space 111 in the case 93 is over the hole 122 with the cavity 123 connected. Both rooms can be evacuated or preferably filled with a protective gas or flowed through by a protective gas as already described. At the end of the eccentric tube 113 that the case 93 is opposite, is the version 116 attached, which is the interchangeable objective lens 112 receives. A seal 124 closes the cavity 123 gastight. Furthermore, the version of a tempered plate 117 record, whose edge is preferably metallized, and which is preferably gas-tight soldered to the socket. Your job is the cavity 123 gas-tight if the objective lens has been removed for cleaning or if an objective lens with a different focal length is to be used to produce a different magnification. The space between the objective lens 112 and the high-tempered plate 117 can also have a hole 104 with the room 123 be connected, especially if the entire optical unit as under 4 described, is constantly flowed through by a protective gas, which is in the vicinity of the objective lens 112 what happens in the 3f is shown. The high tempered plate 117 but may also contain optical correction functions, as they are known from the Schmidt-Optik known from the literature, in order to improve the optical imaging quality of the arrangement. But it is also possible to omit the highly coated plate, in particular, if it contains no optical correction function and the objective lens was used gas-tight or by a protective gas flowing through it is ensured that when changing the objective lens no dirt in the room 123 can occur.

At the multipart recording is a special mouthpiece 82 provided that contamination of the objective lens 112 should prevent, as in the parallel running, simultaneously filed with the present application German utility model DE 298 16 110 U1 "Arrangement for removing material that is removed by a laser radiation source in the material processing of a processing surface" is described.

The eccentric tube can with cooling fins 92 be provided, which can be blown by a fan, not shown, to better dissipate the heat loss to the environment. The multi-part recording is rotatably mounted in a prism about an axis defined by the objective lens between the concave mirror and the objective lens to the track spacing as shown in 3 described adjustable and the correct distance to the working surface 81 adjust. The multi-part recording can with a strap 85 be fixed.

Furthermore, all descriptions that apply to the 3 . 3a and 4 were given, mutatis mutandis.

But it is also possible, instead of the acousto-optic modulator 34 other modulators, e.g. B. use so-called electro-optical modulators. Electro-optical modulators are described under the terms "laser modulators", "phase modulators" and "Pockels cells" on pages F16 to F33 of the General Catalog G3, Order No. 650020 of the company Laser Spindler & Hoyer, Göttingen.These are also multichannel electro-optical Modulators were used, what in the publication "The laser in the printing industry" by Werner Hülsbuch, Verlag W. Hülsbusch, Konstanz, on page 523 in 8th - 90a is shown. If single-channel or multichannel electro-optical modulators are used in conjunction with a birefringent material, then one can split each laser beam into two beams which can be modulated separately via further modulators. Such an arrangement is also referred to in the literature as an electro-optical deflector.

But you can also modulate the fiber laser directly. Such directly modulatable fiber lasers, which have a separate modulation input, are offered, for example, by IPG Laser GmbH D-57299 Burbach, under the name "Model YLPM Series." The advantage is that the modulators and the associated electronics can be dispensed with. as in 13 is shown.

In 6 is an embodiment of a termination piece 26 (Terminator) for a fiber shown. Such terminators can be used to advantage for the decoupling of the laser radiation from a fiber, as introduced in the parallel running, simultaneously with the present application filed German patent application DE 198 40 935 A1 "Terminator for optical fibers", and in parallel running, simultaneously filed with the present application German utility model DE 298 16 108 U1 "Terminator for optical fibers" are described 26 can be used in principle for all applications where it is important that a fiber 28 or a laser fiber belonging to a fiber laser 5 Precipitating emergent beams with a detachable connection. It is also possible with the help of this end piece, a precisely releasable connection of the fiber 5 . 28 to produce with the remaining optics. The housing has one or more outer fits 134 on, with which the case in a socket 29 can be used exactly. At one end of the case becomes the end of the fiber 28 or the laser fiber 5 taken up and inside the housing in the opening 130 guided. At the other end of the housing is a short focal length lens 133 attached. There may be means for adjusting the position of the fiber 28 or laser fiber 5 be provided within the terminator to the position of the fiber 28 or laser fiber 5 to the lens 133 within the final piece and in terms of fits 134 to adjust. It is also possible to adjust the position of the lens to the fiber. By adjusting to be achieved that from the lens 133 emergent bundles of rays 144 is brought into a predetermined axis and focus position with a defined cone.

In 6a is a cross section through the end piece 26 shown in the area of adjusting screws

In the 6 illustrated embodiment of the end piece 26 has a square or rectangular cross-section, in which all opposite outer surfaces are parallel and fits 134 could be. To prevent the optical surfaces on the optical fiber and the side of the lens 133 , which is facing the optical fiber, pollute by particles in the surrounding air, the compounds in the 6 . 6a . 7 . 7a and 7b between the lens 133 and the housing, as well as between the adjustment screws and the housing hermetically sealed. 7 shows an embodiment of the end piece 94 with rectangular cross section, wherein two opposite outer surfaces trapezoidal and two opposite outer surfaces parallel to each other. It can also extend all opposite outer surfaces trapezoidal to each other. The outer surfaces can be fits 134 be.

In 7a is a longitudinal section and in 7b is a cross section through the end piece according to 7 shown.

It is basically possible to combine several of the terminators described above in several tracks next to each other and in several levels one above the other to form a package. It is also possible to make the shape of the end caps and the associated sockets differently than shown in the figures, for example, a cylindrical shape with a cylindrical and a conical fit according to the versions in 3d can be used or an exclusively cylindrical fit can be used, or it may, for example, a cylindrical shape of the end piece rectangular or trapezoidal fits after 6 or 7 receive.

In 8th is an arrangement with an electro-optical modulator 168 shown. In an electro-optical modulator, for example, the polarization direction of the laser radiation which is not desired for processing becomes the incident beam 163 , rotated (P _b ) and then in a polarization-dependent beam splitter, which also serves as a polarization-dependent mirror 169 is designated, the not desired for processing laser radiation P _b and separated into a sump, for example in a heat exchanger consisting of a cooled plate 86 can exist, passed. The radiation P _a desired for processing is not rotated in the polarization direction and over the lens 165 supplied to the processing surface. In the embodiments of the 3 . 4 , and 5 can be the single or multi-channel acousto-optic modulators 34 be replaced by appropriate single or multi-channel electro-optical modulators. Likewise, in the embodiments according to the 3 . 4 , and 5 the highly reflective mirror 74 . 97 through the polarization-dependent mirror 169 be replaced ( 8th ), resulting in a interception arrangement 78 and wherein the polarization-dependent mirror extends into the beam path desired for processing.

9 shows a plan view of a four-channel acousto-optic deflector or modulator, in which the distance from channel to channel, for example, 2.5 mm. In the description to the 3 . 3a . 4 and 5 it is mentioned that the room 44 respectively. 111 , in which the modulators are arranged, should be as free as possible of such components that secrete particles or gases, because it could deposit particles on the highly loaded optical surfaces, which would lead to premature failure of the arrangement. For this reason, the electrical components of the arrangement are in 9 and 9a on a separate circuit board 171 arranged, which protrudes with only two arms in the sealed space and the electrical connections to the piezoelectric encoders 45 manufactures. The circuit board 171 is to the modulator housing 172 preferably by means of a soldering agency 173 sealed. Instead of a circuit board and a different line arrangement can be used. For example, each radio frequency channel can be connected by its own shielded line. The modulator housing 172 contains an access opening 174 to the electrical components. The modulator crystal 34 can be metallized on its base and is preferably by means of a solder joint or a bond 175 attached to the modulator housing. Directly below the attachment point can be a connection 176 to a cooling system to the heat loss through the openings 87 to be removed by a coolant. The modulator housing 172 is preferably through a lid 177 closed, the electrical connections 181 and also contains the connections for the cooling system, but this is not shown. By means of a seal 43 is ensured that the modulator housing 172 gas-tight in the housing 35 respectively. 93 of the 3 . 3a . 4 , and 5 used and by means of the connection 42 is attached.

It is possible to use the electro-optical modulator 168 similarly to the modulator housing ( 172 ) and over the circuit board 171 to contact.

In 10 is the principal ray path to the embodiment 3 for the beams 144 the corresponding Fiberlaser F _HD1 to F _HD4 specified. The beams of the fiber lasers F _VD1 to F _VD4 are partially congruent with the drawn beams, but according to the invention have a different wavelength and become as shown 4a to see about one in 10 not shown wavelength-dependent mirror 37 with the beam _packet F _HD1 to F _HD4 to the beam _packet F _D1 to F _D4 united. Furthermore, in 10 not the beam packets of the fiber lasers F _VR1 to F _VR4 and F _HR1 to F _HR4 are shown, which, as shown 3a can also be combined via a wavelength-dependent mirror to the beam packet F _R1 to F _R4 . As from the arrangement of the strip mirror 46 in 4a can be seen, would the beams of the beam set F _R1 to F _R4 in 10 offset by half a track distance to the drawn rays run. Thus, the complete beam path instead of the drawn 4 beams contains a total of 8 beams, resulting in a total of 8 separate tracks on the processing surface. There are in 10 only the two beams 144 the Fiberlaser F _HD1 and F _HD4 shown. As already mentioned, but also more tracks can be arranged, for example, the number of tracks on the processing area can be increased to 16 separately modulated tracks. This arrangement allows a digital modulation of the respective laser, ie the laser is operated by switching on and off in only two states, a particularly simple control and a good shape of the processing spot on the processing surface. This digital modulation requires only a particularly simple modulation system. In 10 are the modulators 34 as well as the streak mirror 46 not shown. For better illustration, the cross section of the beam is 144 from the end piece of the fiber laser F _HD1 , which is after passing through the wavelength-dependent mirror congruent with the beam F _D1 , designed with a hatching. The representation is, like all others, not to scale. The two drawn bundles of rays 144 result on the working surface 81 the processing points B ₁ and B ₄ , the structure of the processing _spot 24 contribute and on the editing surface 81 generate corresponding processing tracks. The axes of the terminators 26 and the beam 144 the individual fiber lasers run in 10 parallel to each other. The beam cones of the terminators, ie the shape of the beam 144 , are shown as slightly divergent. In the figure, a beam waist within the lens 133 accepted. The divergence angle is inversely proportional to the diameter of the beam in the associated beam waist. The position of the beam waist and its diameter can be changed by changing the lens 133 in the final piece 26 , and / or their distance to the fiber 28 or the laser fiber 5 to be influenced.

The calculation of the beam path is carried out in the known manner, see technical explanations on pages K16 and K17 of the General Catalog G3, Order No. 650020 from Laser Spindler & Hoyer, Göttingen. The goal is that each of the processing points B ₁ to B _n on the processing surface 81 become beam waists to obtain the highest power density in the machining points. With the help of the two lenses 55 and 56 become beam waists and track distances from the object plane 182 in which the lenses 133 the final pieces 26 , lie, according to the ratio of the focal lengths of the lenses 55 and 56 in an intermediate image plane 183 shown reduced in size. If in this case the distance of the lens 55 from the final piece 26 and from the crossover point 184 is equal to their focal length and if the distance of the lens 56 from the intermediate image plane 183 equal to their focal length and equal to their distance from the crossover point 184 is, one obtains a so-called telecentric imaging, ie in the intermediate image plane, the axes of the beams belonging to the individual tracks run parallel again. The divergence is however significantly increased. The preferably telecentric imaging has the advantage that the diameters of the following lenses 57 and 61 only have to be slightly larger than the diameter of a beam. The lenses 57 and 61 in a second step, reduce the image from the intermediate image plane 183 on the working surface 81 in the manner described. A preferably telecentric imaging, namely that the axes of the individual beams between the objective lens 61 and the working surface 81 running parallel, here has the advantage that changes in the distance between the processing surface and the objective lens bring no change in the track pitch, which is very important for a precise processing. The image does not necessarily have to be made as described in 2 stages with 2 lenses each, there are other arrangements which can also generate parallel beam axes between the objective lens and the processing surface, as in FIG 11 and 12 will be shown. Also, deviations in the parallelism of the beam axes between the objective lens 61 and the working surface 81 tolerable, as long as the result of material processing is satisfactory.

In 11 is a principal ray path to the embodiment 4 specified. The representation is not to scale. As already in 10 these are the two bundles of rays 144 the laser F _HD1 and F _HD4 only a subset of the beams of all existing lasers to explain the principle. In contrast to 10 but are in 11 the axes of the individual beams of the terminators not parallel, but at an angle to each other, which in the 13 and 14 is shown in more detail and advantageous by terminators 94 according to the 7 . 7a and 7b is reached. By this arrangement, the individual beams would 144 similar to in 10 cross over without a lens 55 is required. In the area of the imaginary crossover point is the short focal length diverging lens, ie a concave lens 101 inserted, which kinks the incoming rays as shown and the beams makes divergent, ie widening. The convex lens 102 is preferably located at the intersection of the axis beams and forms together with the lens 101 an inverted Galilean telescope. As a result, for example, parallel input beams in parallel output beams of increased diameter between the lenses 102 and 103 transformed. The desired parallelism of each input beam can, as already described, by suitable choice of focal length and distance of the lens 133 to the fiber 28 or laser fiber 5 in the final pieces 26 . 94 be made. The objective lens 103 focuses the enlarged beams on the processing surface 81 to the processing points B ₁ to B ₄ , the structure of the processing _spot 24 contribute and on the editing surface 81 generate corresponding processing tracks. By changing the focal length of the lens 103 The magnification can be changed in a simple way. That is why it is beneficial when the lens 103 is designed as a replaceable objective lens. When the position of the lens 103 is chosen so that the distance between the lenses 102 and 103 the focal length of the lens 103 corresponds, the axes of the beams are between the lens 103 and the machining surface are parallel and give constant distances of the tracks on the processing surface, even with a changed distance between the objective lens and the processing surface.

In 12 is the principal ray path to the embodiment 5 specified. The representation is, as in all other figures, not to scale. The beam path is the the 11 very similar, with the difference that instead of the lens 101 a vaulted mirror 121 and instead of the lens 102 a concave mirror 115 be used. Due to the resulting folding the beam is uplifting Lich Lich. The beam path corresponds approximately to that of an inverted mirror telescope. Mirror telescopes are independent of the wavelength, which is advantageous when using lasers with different wavelengths. The aberrations can be reduced by the use of aspherical surfaces or with an optical correction plate 117 but not in 12 is shown to be corrected. It is advantageous if the focal length of the objective lens 112 is equal to their distance from the concave mirror. Then the axes of the beams become between the objective lens 112 and the working surface 81 parallel and give constant distances of the tracks on the processing surface, even with a changed distance between the objective lens and the processing surface. In addition, there is an advantageously large distance from the objective lens to the processing surface.

In 13 an arrangement with several lasers is shown in which the individual laser outputs in the form of the terminators 26 are arranged on a circle segment and on a common crossover point 185 aim. This arrangement is particularly suitable for directly modulated laser, since then results in a very low cost. In such an arrangement, the image may be on the working surface 81 with only a single lens 186 respectively. But it can also be an arrangement according to the 4 or 5 to be used for illustration. The beam cones of the beams from the terminators are set so that all lasers on the processing surface 81 a beam waist and thus gives a sharp picture.

In 14 is a variant of 13 specified. There are 4 Fiberlaser F _HD1 , F _HD2 , F _HD3 , F _HD4 with their terminators 94 that in the 10 . 10a , and 10b be described in more detail, strung together on a circle segment. The final pieces 94 are particularly suitable for stringing together due to their shape. Since no directly modulated fiber lasers are used here, a four-channel acousto-optic modulator is used 34 inserted. The piezoe electrical sensor 45 can, as in 14 can also be arranged on a circular segment, but they can also, as in 14a shown to be arranged in parallel, as long as the beam still sufficient from the acoustic field of the piezoelectric encoder 45 be detected. Instead of the lens 186 is advantageously used a transmission unit, as in the 4 and 5 is described.

Claims (96)

A laser radiation source for material processing with an optical unit for shaping the laser beam on a processing surface, characterized in that a plurality of diode-pumped fiber lasers ( 2 ), whose energy is controlled individually, are provided that the outputs of the fiber laser ( 2 ) by means of end caps ( 26 . 94 ) with an optical unit ( 8th ) are arranged to form the laser beam, wherein the outputs of the end pieces are arranged in a first part and the optical unit in the first part and in a second part of a multi-part receptacle, the optical unit ( 8th ) has a modulation unit, on whose input the output beams of the individual fiber lasers ( 2 ) and by which the individual laser beams are respectively modulated, the laser beams emerging from the modulation unit by means of the optical unit ( 8th ) are bundled and bundled in such a way that the rays on the processing surface ( 81 ), the optical unit ( 8th ) for forming the laser beam, a transmission unit for transmitting the laser beams emerging from the terminating pieces to the processing surface ( 81 ), wherein the transmission unit consists of a diverging lens ( 101 ) or a curved mirror ( 121 ) and at least one converging lens ( 102 . 103 ) or a concave mirror ( 115 ), and wherein the diverging lens ( 101 ) or the arched mirror ( 121 ) in the condenser lens ( 133 ) of the end pieces ( 26 . 94 ) formed beam ( 144 ) expands, and with the converging lens or with the converging lenses ( 102 . 103 ) or with the concave mirror ( 115 ) the expanded beams can be focussed to a spot diameter of less than 10 μm for the purpose of achieving an improved power density and on the working surface ( 81 ), and that to make harmless the unwanted laser radiation on the processing surface ( 81 ) should cause no processing effect, an interception arrangement ( 73 . 78 . 86 ) is provided, by which the unwanted radiation from the processing surface ( 81 ) is kept away. Laser radiation source according to claim 1, characterized in that the transmission unit is formed in two stages and in the second part of the multi-part receptacle, which is used as a tube ( 51 ) is formed, is arranged. Laser radiation source according to claim 1 or 2, characterized in that in the tube ( 95 ) formed second part of the multi-part receptacle, between the arrangement ( 73 . 86 ) for intercepting and rendering harmless the laser radiation and the end of the tube, the working surface ( 81 ), within the tube in the beam path extending in the longitudinal direction of the tube tube ( 96 ), which contains the transmission unit, which is mounted centrally within the tube, wherein the transmission unit, the diverging lens ( 101 ), which is arranged at the end of the tube, which leads to the housing ( 93 ) and the laser radiation, which is to cause a processing effect, receives and expands, wherein the transfer unit, the convergent lens ( 102 ), which forms the expanded laser radiation into bundles of rays, and at which the working surface ( 81 ) facing end of the tube ( 96 ) a lens ( 103 ) is directed to which the laser radiation, which is to cause a processing effect, is directed, wherein the lens on the processing surface ( 81 ) a processing spot ( 24 ) and wherein the unwanted laser radiation, which is not intended to cause a processing effect, by means of a mirror ( 74 . 97 ) into the arrangement ( 73 . 86 ) is deflected to intercept and harmless the laser radiation. Laser radiation source according to one of claims 1 or 3, characterized in that in the beam path after the converging lenses ( 133 ) of the final pieces ( 94 ), which are arranged in one or more planes and in one or more tracks 1 to n, the transmission unit with the diverging lens ( 101 ) and two converging lenses ( 102 and 103 ) is arranged, through which the from the converging lenses ( 133 ) of the final pieces ( 94 ) emerging beam ( 144 ), whose axes of symmetry in the individual tracks extend at an angle to one another, are deflected and widened in such a way that the rays in the lens ( 102 ), with the diverging beams ( 144 ) the Lens ( 102 ) leave each at an angle, and that in the beam path to the lens ( 102 ) a lens ( 103 ) is arranged, through which the radiation beam on the processing surface ( 81 ), each of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emerging beams generated a processing point (B ₁ to B _n ). Laser radiation source according to one of claims 1 to 3, characterized in that the focal length of the diverging lens ( 101 ) less than the condenser lens ( 102 ). Laser radiation source according to claim 1, characterized in that at the end of the tube ( 113 ) formed second part of the multi-part receptacle, which on the housing as ( 93 ) flanged first part of the receptacle, a plate ( 114 ) is provided which the concave mirror ( 115 ) and a hole ( 122 ) by which the laser radiation from the housing into the tube ( 113 ) occurs at the other end of the tube ( 113 ), on which the arrangement ( 73 . 86 ) to intercept and render harmless the laser radiation, the curved mirror ( 121 ), through which the opening ( 122 ) is incident in the tube entering laser radiation, wherein the laser radiation, which is to cause a processing effect, on the concave mirror ( 115 ) is reflected and the unwanted laser radiation, which is not intended to cause a processing effect, in the arrangement ( 73 . 86 ) for intercepting and rendering harmless the laser radiation by means of the curved mirror ( 121 ) or a plane mirror ( 97 ) or a polarization-dependent mirror ( 169 ) is deflected, and that at the the processing surface ( 81 ) facing end of the tube a lens ( 112 ) is provided, on which the laser radiation, which is to cause a processing effect, by means of the concave mirror ( 115 ), wherein the lens on the processing surface ( 81 ) a processing spot ( 24 ) generated. Laser radiation source according to claim 1 or 6, characterized in that in the beam path after the converging lenses ( 133 ) of the final pieces ( 94 ), which are arranged in one or more planes and in one or more tracks 1 to n, the transmission unit with the curved mirror (FIG. 121 ), the concave mirror ( 115 ) and the condenser lens ( 112 ) is arranged, through which the from the converging lenses ( 133 ) of the final pieces ( 94 ) emerging beam ( 144 ), whose axes of symmetry in the individual tracks extend at an angle to one another, are deflected and widened in such a way that the beams of light travel on the concave mirror (FIG. 115 ), with the diverging beams ( 144 ) through the concave mirror ( 115 ) and leave the concave mirror in each case at an angle, and that in the beam path to the concave mirror ( 115 ) a lens ( 112 ) is arranged, through which the approximately parallel beams on the processing surface ( 81 ), each of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emerging beams generated a processing point (B ₁ to B _n ). Laser radiation source according to one of claims 1, 6 or 7, characterized in that the focal length of the curved mirror ( 121 ) smaller than that of the concave mirror ( 115 ). Laser radiation source according to one of claims 1 to 8, characterized in that the optical unit ( 8th ) Versions ( 29 ) having the end pieces ( 26 . 94 ) record the laser so that the output beams of the laser at the radiation exit ( 10 ) of the optical unit ( 8th ) for shaping the beam on the processing surface ( 81 ). Laser radiation source according to claim 9, characterized in that the sockets ( 29 ) Mating surfaces for the fit or fits ( 134 ) of the final pieces ( 26 . 94 ), which are arranged so that the axes of symmetry of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emitted laser beams are arranged in at least one track and / or a plane. Laser radiation source according to claim 10, characterized in that the axes of symmetry of the converging lenses ( 133 ) of the final pieces ( 26 ) emerging beam ( 144 ) parallel to each other in the individual planes. Laser radiation source according to claim 10, characterized in that the axes of symmetry of the converging lenses ( 133 ) of the final pieces ( 26 ) emerging beam ( 144 ) in each plane to each other at an angle. Laser radiation source according to claim 10, characterized in that the mating surfaces of the sockets ( 29 ) for the fit or fits ( 134 ) of the final pieces ( 26 . 94 ) are arranged for the individual tracks and planes so that the axes of symmetry of the of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emerging laser beams ( 144 ) for the individual tracks and for the individual planes at an angle to each other. Laser radiation source according to claim 10, characterized in that the mating surfaces of the sockets ( 29 ) for the fit or fits ( 134 ) of the final pieces ( 26 . 94 ) are arranged for the individual tracks so that the axes of symmetry of the of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emanating at an angle to each other, and that the mating surfaces of the sockets ( 29 ) for the fit or fits ( 134 ) of the final pieces ( 26 . 94 ) are arranged for the individual planes so that the axes of symmetry of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emanating laser beams are parallel to each other. Laser radiation source according to claim 10, characterized in that the mating surfaces of the sockets ( 29 ) for the fit or fits ( 134 ) of the final pieces ( 26 . 94 ) are arranged for the individual planes so that the axes of symmetry of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emerging laser beams ( 144 ) at an angle to each other, and that the mating surfaces of the sockets ( 29 ) for the fit or fits ( 134 ) of the final pieces ( 26 . 94 ) are arranged for the individual tracks so that the axes of symmetry of the of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emerging laser beams ( 144 ) are parallel to each other. Laser radiation source according to claim 10, characterized in that the versions ( 29 ) Mating surfaces for the fit or fits ( 134 ) of the final pieces ( 26 . 94 ), which are arranged so that the axes of symmetry of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emanating laser beams are parallel to each other. Laser radiation source according to one of claims 1 to 16, characterized in that the modulation unit one or has several separate modulators. Laser radiation source according to one of claims 1 to 17, characterized in that the modulation unit of one or more multi-channel modulators ( 34 ) consists. Laser radiation source according to one of claims 1 to 18, characterized in that electro-optical modulators and / or electro-optical deflectors ( 168 ) are used. Laser radiation source according to one of claims 1 to 18, characterized in that acousto-optic modulators and / or acousto-optic deflectors ( 34 ) are used. Laser radiation source according to one of claims 1 to 20, characterized in that the optical unit ( 8th ) for shaping the laser beam in the region between the radiation entrance ( 9 ) and the radiation outlet ( 10 ) Means for merging the individual laser beams ( 13 ) contains. Laser radiation source according to claim 21, characterized in that for combining the individual laser beams means for reducing the distance of the axes of symmetry of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emerging beams (beams of the laser outputs) ( 144 ) are provided in the direction of the tracks and / or in the direction of the planes. Laser radiation source according to claim 22, characterized in that as means for reducing the distance of the symmetry axes of the beams of the laser outputs ( 144 ) is provided at least one lens. Laser radiation source according to claim 22, characterized in that as means for reducing the distance of the symmetry axes of the beams of the laser outputs ( 144 ) two converging lenses ( 191 . 192 ) are provided. Laser radiation source according to claim 22, characterized in that as means for reducing the distance of the symmetry axes of the beams of the laser outputs ( 144 ) a condenser lens ( 202 ) and a diverging lens ( 203 ) are provided. Laser radiation source according to claim 22, characterized in that spherical lenses ( 191 . 192 ) or cylindrical lenses ( 202 . 203 ) are provided. Laser radiation source according to one of claims 24 to 26, characterized in that the distance between the two lenses is the same the sum of their two focal lengths is. Laser radiation source according to one of claims 24 to 27, characterized in that the distance of the two lenses is set so that the radiation beam in the modulator ( 34 ) overlap. Laser radiation source according to claims 21 or 22, characterized in that as means for merging the beams of the laser outputs ( 133 ) Mirrors and / or lenses and / or wavelength and / or polarization dependent elements are used. Laser radiation source according to claim 29, characterized characterized in that for merging the rays of at least two laser outputs on wavelength-dependent element is used. Laser radiation source according to claim 30, characterized in that as a wavelength-dependent element a filter ( 37 ), which transmits the radiation of one of the laser outputs and reflects the radiation of the other laser output. Laser radiation source according to claim 29, characterized characterized in that for merging the rays of at least two laser outputs with polarized radiation, a polarization-dependent element is used. Laser radiation source according to claim 32, characterized in that a polarization-dependent mirror is used as a polarization-dependent element, which transmits the polarization radiation of one of the laser outputs and reflects the polarization-directed radiation of the other laser output. Laser radiation source according to claim 29, characterized in that for merging the beams of at least two laser outputs a strip mirror ( 46 ), which transmits the beams of the laser outputs from a first direction and reflects the beams of the laser outputs from a second direction. Laser radiation source according to one of claims 21 to 34, characterized in that the means for merging the Beams arranged in the beam direction before and / or after the modulation unit are. Laser radiation source according to Claim 21, characterized in that one or more single-channel or multi-channel acousto-optic deflectors (16) are used as means for bringing the beams together within the modulation unit. 34 ) are provided. Laser radiation source according to one of claims 1 to 36, characterized in that the transmission unit for transmitting the laser beams emerging from the terminating pieces to the processing surface ( 81 ) at least one lens ( 165 . 197 ) having. Laser radiation source according to one of claims 1 to 37, characterized in that between the concave mirror ( 115 ) and the working surface ( 81 ) a transparent plate ( 117 ) is provided. Laser radiation source according to claim 38, characterized in that the transparent plate ( 117 ) is an optical correction plate. Laser radiation source according to one of claims 1 to 39, characterized in that the lenses are formed as lens systems are. Laser radiation source according to one of claims 1 to 40, characterized in that the mirrors ( 115 . 121 ) have spherical and / or aspherical surfaces. Laser radiation source according to one of claims 1 to 41, characterized in that at least one of the mirrors Metal is. Laser radiation source according to one of claims 1 to 42, characterized in that the transmission unit is a replaceable objective ( 61 . 103 . 112 ) having. Laser radiation source according to one of claims 1 to 43, characterized in that from the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emerging beam ( 144 ) have an exit cone, which by the distance of the convergent lens ( 133 ) to the fiber end within the end pieces ( 26 . 94 ) is adjustable so that for the processing points B ₁ to B _n on the processing surface ( 81 ) gives an optimal sharpness. Laser radiation source according to one of claims 1 to 44, characterized in that the interception arrangement ( 73 . 78 . 86 ) a polarization-dependent mirror arranged in the beam path ( 169 ), by which the unwanted laser radiation, which is not intended to cause a processing effect on the processing surface, from the processing surface ( 81 ) is kept away. Laser radiation source according to one of claims 1 to 44, characterized in that the interception arrangement ( 73 ) a deflecting mirror arranged in the beam path ( 74 . 97 . 121 ), by which the unwanted laser radiation, which is not intended to cause a processing effect on the processing surface, from the processing surface ( 81 ) is kept away. Laser radiation source according to claim 46, characterized in that the deflecting mirror ( 74 . 97 . 121 ) is made of metal. Laser radiation source according to claim 46 or 47, characterized in that the arched mirror ( 121 ) and the deflection mirror ( 97 ) are made of one part. Laser radiation source according to claim 46, characterized in that the arched mirror ( 121 ) Also designed as a deflection mirror for the unwanted radiation. Laser radiation source according to one of claims 1 to 49, characterized in that the optical surfaces are non-reflective are. Laser radiation source according to one of claims 1 to 50, characterized in that the optical components in their Frames are glued. Laser radiation source according to one of claims 1 to 50, characterized in that the optical components in their Frames are soldered. Laser radiation source according to one of claims 1 to 52, characterized in that of the optical components at least one of a material, in particular made of sapphire is that a higher one thermal conductivity as glass possesses. Laser radiation source according to one of claims 21 to 53, characterized in that the means for merging the individual laser beams ( 144 ) within the housing ( 35 . 93 ) are arranged. Laser radiation source according to one of Claims 9 to 54, characterized in that the sockets ( 29 ) for the final pieces ( 26 . 94 ) so in the housing ( 35 . 93 ) are arranged and aligned so that the individual laser beams on the processing surface ( 81 ) are merged. Laser radiation source according to claim 55, characterized in that the means for reducing the distance of the axes of symmetry of the converging lenses ( 133 ) of the final pieces ( 26 . 94 ) emerging beam ( 46 . 191 . 192 . 202 . 203 ) in the housing ( 35 . 93 ) are arranged. Laser radiation source according to one of claims 1 to 56, characterized in that the first part of the multi-part receptacle as housing ( 35 . 93 ) is formed, in which a cylindrical opening ( 48 ) for a replaceable modulator housing ( 172 ) is provided, which is adjustable and fixable by twisting within the cylindrical opening ( 48 ) and on its outwardly facing side electrical connections ( 181 ), which are provided with control electronics and with a line arrangement ( 171 ) for the electrical control of the modulator and / or deflector ( 34 . 168 ), and that the modulator housing at its in the interior ( 44 . 111 ) of the housing ( 35 . 93 ) facing end a bracket for the modulator and / or deflector ( 34 . 168 ) and in its interior the line arrangement ( 171 ), wherein the line arrangement from the interior of the modulator housing ( 172 ) through which the interior of the housing ( 35 . 93 ) facing end face in the interior ( 44 . 111 ) and electrically connected to the modulator. Laser radiation source according to claim 57, characterized in that the housing ( 35 . 93 ) a plurality of cylindrical openings ( 48 ) for several modulator housings ( 172 ) having. Laser radiation source according to one of claims 2 to 58, characterized in that the tube ( 51 . 95 . 113 ) by a at the beam exit side of the housing ( 35 . 93 ) arranged bore ( 47 ) and on the housing ( 35 . 93 ) is flanged. Laser radiation source according to one of claims 1 to 59, characterized in that the arrangement ( 73 . 78 . 86 ) for capturing and rendering harmless the laser radiation which is present on the working surface ( 81 ) should cause no processing effect, laterally on the pipe ( 51 . 95 . 113 ) is flanged. Laser radiation source according to one of claims 1 to 60, characterized in that an arrangement ( 82 ) for removing the from the processing surface ( 81 ) abraded material between the radiation exit from the transfer unit at the end of the tube ( 51 . 95 . 113 ) and the working surface ( 81 ) is provided. Laser radiation source according to one of claims 2 to 61, characterized in that the tube ( 51 . 95 . 113 ) around its through the objective lens ( 61 . 103 . 112 ) certain axis is rotatable and / or slidably mounted in its longitudinal direction. Laser radiation source according to one of claims 1 to 62, characterized in that to catch the unwanted Radiation is provided to a swamp into which the unwanted radiation is directed becomes. Laser radiation source according to claim 63, characterized characterized in that the sump consists of a medium that the undesirable Radiation is absorbed by converting the energy of the radiation into heat becomes. Laser radiation source according to claim 63 or 64, characterized in that the sump is designed as a heat exchanger. Laser radiation source according to one of claims 63 to 65, characterized in that the arrangement for intercepting and rendering harmless the unwanted laser radiation between the deflection mirror ( 74 . 97 . 121 ) or the polarization-dependent mirror ( 169 ) and the sump for collecting the unwanted laser radiation, an optical component ( 75 ) containing the interior of the tube ( 51 . 95 . 113 ) is separated from the sump and sized in diameter so that the laser radiation conducted into the sump can just pass, while such radiation reflected back or scattered back from the sump is largely retained in the sump. Laser radiation source according to claim 66, characterized in that the optical component ( 75 ) is a glass plate or a lens. Laser radiation source according to claim 67, characterized in that the optical component ( 75 ) is antireflective. Laser radiation source according to one of claims 66 to 68, characterized in that the optical component ( 75 ) is glued or soldered in its socket. Laser radiation source according to one of claims 45 to 48, characterized in that the arrangement ( 73 . 86 ) for intercepting the unwanted laser radiation from a cylindrically shaped intercepting arrangement ( 73 ) with the deflection mirror ( 74 . 97 . 121 ) - or from a cylindrically shaped intercepting arrangement ( 86 ) or with the polarization-dependent mirror ( 169 ) - with the optical element ( 75 ), and a flange for attachment to the pipe ( 51 . 95 . 113 ) consists. Laser radiation source according to one of claims 63 to 65, characterized in that the sump for collecting the unwanted radiation from a plate ( 86 ), the openings ( 87 ), through which a coolant can be passed. Laser radiation source according to claim 71, characterized in that the plate ( 86 ) on the side facing the laser radiation has a flat surface inclined to the incident laser radiation. Laser radiation source according to claim 71, characterized characterized in that the surface the plate is convex or hollow. Laser radiation source according to one of claims 71 to 73, characterized in that the surface of the plate is roughened. Laser radiation source according to one of claims 1 to 74, characterized in that the optical unit ( 8th ) is designed to form the laser beam so that on the processing surface ( 81 ) Give waistlines. Laser radiation source according to one of claims 1 to 75, characterized in that the optically active surfaces of Components are provided with anti-reflective layers. Laser radiation source according to one of claims 1 to 76, characterized in that the optically effective surfaces with respect to the Laser radiation to avoid back reflections and backscattering are arranged inclined in the laser. Laser radiation source according to one of claims 20 to 77, characterized in that the acousto-optic modulators are arranged with respect to the incident laser radiation so that the currently passing, undeflected radiation (I ₀ ) causes a processing effect and that the deflected radiation (I ₁ ) does not cause a processing effect. Laser radiation source according to one of claims 20 to 77, characterized in that the acousto-optic modulators ( 34 ) with respect to the incident laser radiation are arranged so that the deflected radiation (I ₁ ) causes a processing effect and that the currently passing, undeflected radiation (I ₀ ) causes no processing effect. Laser radiation source according to one of claims 1 to 79, characterized in that on the optical unit ( 8th ) are provided for shaping the laser beam means. which prevent contamination of the optical surfaces. Laser radiation source according to claim 80, characterized in that the means for preventing contamination of the optical surfaces consist in that the receptacle and / or the optical unit ( 8th ) are free of outgassing materials, gas-tight can be closed, and that optical windows are provided for the exit of the laser radiation. Laser radiation source according to claim 81, characterized characterized in that the optical windows through which the laser radiation exit, glass plates are. Laser radiation source according to claim 81, characterized characterized in that the optical windows through which the laser radiation exit, glass plates or lenses are. Laser radiation source according to claim 83, characterized in that the objective lens ( 61 . 103 . 112 ) is provided as an optical window for passing the laser radiation to cause a processing effect. Laser radiation source according to claim 83, characterized in that the plate ( 117 ) is provided as an optical window for passing the laser radiation to cause a processing effect. Laser radiation source according to claim 83, characterized in that the lens ( 75 ) is provided as an optical window for the passage of the laser radiation, which is not intended to cause a processing effect. Laser radiation source according to claim 81, characterized in that the parts of the receptacle for adapting the optical unit ( 8th ) ( 35 . 93 . 51 . 95 . 113 ) are connected to each other in a gastight manner and that the assemblies ( 26 . 94 . 37 . 41 . 46 . 73 . 54 . 96 . 116 . 118 ) are mounted gas-tight. Laser radiation source according to claim 87, characterized in that seals are used as means for sealing ( 36 . 43 . 52 . 76 . 62 . 124 . 125 ) are provided. Laser radiation source according to claim 87, characterized in that as means for sealing bonds ( 223 ) are provided. Laser radiation source according to claim 87, characterized in that as means for sealing soldering ( 223 ) are provided. Laser radiation source according to one of claims 1 to 90, characterized in that on the housing ( 35 . 93 ) a valve ( 77 ) is provided, via which the interior of the multi-part receptacle and the optical unit ( 8th ) can be evacuated or acted upon by a protective gas. Laser radiation source according to claim 91, characterized in that the holder of the objective lens ( 61 . 103 . 112 ) distributed on its circumference one or more openings ( 120 ), through which a protective gas can flow. Laser radiation source according to one of claims 1 to 92, characterized in that the receptacle for adapting the optical unit ( 8th ) on the housing ( 35 . 93 ) in the area of the end pieces ( 26 . 94 ) is provided with cooling fins. Laser radiation source according to one of claims 1 to 93, characterized in that the receptacle for adapting the optical unit ( 8th ) on the pipe ( 118 ) in the area of the interception unit ( 73 . 78 . 86 ) and the objective lens ( 61 . 103 . 112 ) is provided with cooling fins. Laser radiation source according to one of claims 1 to 94, characterized in that the optical unit ( 8th ) in the region of the end pieces and / or the lenses with bores ( 87 ) is provided for supplying a coolant. Laser radiation source according to one of claims 1 to 95, characterized in that the modulator housing ( 172 ) in the region of the modulator ( 34 ) with holes ( 87 ) is provided for supplying a coolant.