DE102014117978A1 - Apparatus and method for measuring workpieces - Google Patents

Abstract

An invention relates to a device and to a method for the tactile-optical measurement of geometric features or structures on a workpiece. In order to be able to carry out an exact alignment of the probe extension in order to carry out precise measurements, a probe comprising a probe extension (13) designed at least in sections with bending elastic is proposed with a fastening section for insertion into a receptacle (14), which has a fastening section (60) designed to prevent rotation. having.

Description

An invention relates to a device and to a method for the tactile-optical measurement of geometric features or structures on a workpiece. The invention also relates to a method for the production of components of the tactile-optical sensor.

An invention also relates to a probe of a tactile-optical sensor comprising an at least partially bending elastic trained probe extension with a mounting portion for insertion into a receptacle, wherein the mounting portion is a portion of the probe extension or a portion of the probe extension receiving holder.

Tactile-optical sensors are described inter alia in the following documents of the applicant.

The EP 0988505 describes a method and an apparatus in which a key element (first target mark) and possibly another target mark emanate from a stylus extension via a flexurally elastic shaft, the coordinates of which are determined by deflection by means of an optical sensor.

Of the EP 1 071 921 A similar sensor can be seen in which the contact force is adjusted via the stiffness of the flexible elastic shaft by only the bending length l is varied.

In the EP 1 082 581 For an appropriate sensor, an opto-mechanical interface with an adjusting device will be described.

The DE 198 24 107 describes the use of a corresponding sensor for a stylus method.

In the DE 10 2004 022 314 a corresponding sensor is operated on a rotary or swivel joint.

The PGT / EP01 / 10826 describes inter alia the coating of the probe element or the probe extension on the side facing away from the sensor to a luminous mark in the interior of the probe element by bundling the radiation reflected at the coating, which is introduced into the interior of the shaft of the probe element or the probe extension to produce, whose position is measured, and a the probe associated brand, which is formed by a darkened portion of the luminous shaft of the probe element.

The DE 10 2010 060 833 describes a tactile-optical sensor, in addition to the determination of the position of a Antastformelementes or at least one associated therewith target in the X and / or Y-direction of the coordinate measuring machine with a first sensor such as image sensor and a determination in the Z-direction with a second Sensor as distance sensor is carried out, wherein for fastening the Antastformelementes and the targets in a holder at least one flexible connecting element is used, which is penetrated by the beam path of the first sensor in the beam direction, wherein the at least one flexible connecting element is transparent and / or with respect to the first Sensor is arranged strongly defocused. As in the Z direction (vertically extending direction), the deflection of the sensing element or at least one of this associated target mark detecting distance sensor is also proposed, for example, an interferometer, in particular an absolutely measuring heterodyne interferometer.

The disclosure of all of the aforementioned documents of the Applicant is fully incorporated by reference.

It is a basic object of one of the present inventions to retain the advantages of the prior art while at the same time providing a flexible tactile-optical sensor for a plurality of different measuring tasks and corresponding measuring methods, in particular a problem-free desired alignment of the probe of the tactile-optical sensor should be done. In addition, an easy replacement of the probe in his recording or fiber intake should be possible.

Therefore, it is a particular object of the present invention to develop a probe of a tactile-optical sensor such that an exact alignment can be done easily.

To achieve the object, the invention essentially provides a push button of a tactile-optical sensor comprising an at least partially bending elastic trained probe extension with a mounting portion for insertion into a receptacle, wherein the mounting portion is a portion of the probe extension or a portion of the probe extension receiving holder , which is characterized in that the fastening portion is formed as anti-rotation.

In particular, the invention is characterized by the fact that the fastening section has, in a plane extending perpendicularly to its longitudinal axis, at least in regions, an outer geometry deviating from a circular geometry.

The invention is also characterized in that the outer geometry deviating from the circular geometry has a flattening, such as a planar section of the fastening section, a projection projecting from the fastening section, a recess in the fastening section, a depression extending in the longitudinal direction of the section, and / or through a recess polygonal shape of the attachment portion is formed.

Preferably, it is provided that the deviating from the circle geometry outer geometry is a normal assignable, which runs parallel or at an angle α with α ≤ +/- 5 ° to a region of the probe extension from which a Antastformelement emanates.

Preferably, the invention provides that the holder is designed as a hollow cylinder having an L-geometry.

Furthermore, the invention is characterized in that the probe extension such as fiber at least partially extends inside the hollow cylinder, wherein the hollow cylinder has a bend of 85 ° to 95 °, preferably 90 °, wherein preferably extend within the hollow cylinder only not drawn areas of the probe extension and preferably at the Antastformelement facing exit point of the probe extension from the hollow cylinder probe extension and hollow cylinder are glued.

Preferably, it is provided that the receptacle or fiber receptacle has a contact surface adapted to the attachment portion for the attachment portion, wherein the abutment surface is preferably flat.

The invention relates in particular to a device for determining geometric features or structures on a workpiece by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, preferably a vertically measuring optical distance sensor, and an at least partially flexurally elastic Probe extension, wherein the probe extension at least emanate: a Antastformelement that is deflected upon contact with the workpiece, and preferably at least one of the Antastformelement associated target, which is deflected when touching the Antastformelementes with the workpiece, wherein the lateral deflection of the Antastformelements or the target , perpendicular to the optical axis of the laterally measuring optical sensor, can be determined with the latter, and preferably the vertical deflection of the sensing element or the target along or almost along the optical Axis of the laterally measuring optical sensor can be determined with the distance sensor.

At least aspects of the objects are essentially achieved by a corresponding device in which the key extension from a fiber receptacle, on which directly or indirectly adjoins a flexurally elastic part to which directly or indirectly adjoins the Antastformelement and optionally the target, where appropriate existing target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic member is rigid.

Indirect means that between the fiber receptacle and flexurally elastic part, a rigid part is provided or that a flexurally rigid part is provided between flexurally elastic part and Antastformelement.

There is a fundamental distinction between two types of tactile-optical sensor. The first is a 2D sensor in which only with the laterally measuring optical sensor, the deflection of the sensing element or the associated target perpendicular to the optical axis of the laterally measuring optical sensor is preferably determined by image processing, a vertical measurement of the deflection does not take place and the corresponding vertically measuring distance sensor is not used or not available. The Antastformelement is usually a spherical or nearly spherical thickening on the workpiece facing the end of the probe extension. The optional target may be a further thickening above the Antastformelements and is deflected together with the Antastformelement. A contact with the workpiece takes place only by the Antastformelement.

The detection of the target mark is always useful when the Antastformelement far, for example more than about 1 to 5 millimeters, depending on the diameter of the Antastformelements and the optics used, immersed in an opening or next to an edge on the workpiece, since it is in these cases Shadowing occurs in the imaging of the sensing element, which may decrease accuracy in determining the deflection. Preferably, the target is placed so far above the Antastformelementen or only so far immersed in the workpiece that the target always remains above the workpiece surface, so does not immerse, and thus is not shadowed. Dipping here refers to the falling below a workpiece surface located directly next to the sensing element. This itself can be located for example in a recess of the workpiece, the probe extension has already been moved in this recess. However, this is not disturbing, since the edges of the recess are usually far enough away from the beam path of the laterally measuring sensor and this does not shadow it.

In the type 2D sensor, the probe extension is designed as a fiber, which is received by a fiber, that is attached, which in turn is attached to the underside of the optics or an adjusting unit, for example via a magnetic interface. Since the fiber intake is not intended to influence the optical beam path, it is preferably arranged laterally next to the beam path. The workpiece-facing end of the probe extension and, if appropriate, the region of the probe extension running between the probe form element and the target extend in an almost parallel and as close as possible to the optic axis of the optics associated with the laterally measuring optical sensor in order to enable optimal detection of the deflection. The simplest solution for attachment in the fiber receptacle is to deflect the probe extension by about 90 °, so provide a bending or kinking. After this deflection, the probe extension then runs approximately 90 ° to the optical axis to the fiber holder (fiber intake). The bending point and the area after the bending point as well as the area which extends into the fiber holder (fiber intake) are preferably rigid in comparison to the flexurally elastic part of the probe extension, which is located above the detection element or optionally above the target. This measure ensures that only along or parallel to the optical axis extending portions of the probe extension in probing the workpiece and consequent deflection contribute to the elastic bending of the probe extension, creating a clear deflection behavior and especially in the lateral measurement plane direction independent probing results. The stiffening of the addressed areas can be done, for example, by the probe extension of a rigid sleeve, for example, metal tube or the like is surrounded, that runs in the interior of a hollow cylinder or is guided. Alternatively, the stylus extension in these areas may be implemented as a larger diameter fiber as compared to the flexurally elastic portion.

The area between the target mark and the probe-forming element is preferably made rigid or more rigid than the flexurally elastic part in order to transmit the deflection of the probe-shaped element as fully as possible to the target mark. This ensures a high sensitivity of the deflection measurement. The rigid version can, for. Example, be ensured by the fact that the distance between the probe form element and the target mark in comparison to the length of the flexurally elastic part is low, and even preferably has the same or about the same diameter. This has the advantage that a single fiber can be used for the stylus extension to which the stylus and the target are attached, for example fused or pulled out of the fiber. Also, the flexurally elastic part on the side facing away from the Antastformelement side of the target can be at least partially tapered by pulling, while the running between Antastformelement and target area is a separately manufactured section with a constant or slightly tapered diameter at which the Antastformelement melted, ie by heat input the fiber itself is generated, or a separate Antastformelement is adhered, preferably under the influence of heat.

According to the invention it can therefore be provided that the probe extension at least in the area of the fiber receptacle has a flexurally rigid part with respect to the flexurally elastic part, preferably by increasing the diameter of the probe extension compared to the flexurally elastic part or extends the probe extension inside a hollow cylinder.

An embodiment of the invention provides that the probe extension in the field of fiber intake at an angle of about 90 °, in particular at an angle of 88 ° to 92 °, to the optical axis of the extending laterally measuring optical sensor, and that the probe extension between the region of the fiber receiving and the Antastformelement containing portion containing a portion containing a bend, wherein preferably the portion is made rigid with respect to the flexurally elastic member.

The second design provides for a 3D sensor in which, in addition to the lateral measurement of the deflection, the vertical deflection is also determined using a distance sensor. There are known for this purpose, in which the vertical deflection of the Antastformelementes itself is determined, as for example, the unpublished at the time of filing this application DE 10 2014 111 086.2 describes. Also, the target mark described with respect to the type 2D sensor can be detected by the distance sensor with appropriate execution. Preferably, however, a separate target mark is used for the vertical deflection measurement, which is particularly preferably arranged on the upper side of the probe extension, as the side facing away from the workpiece and the optics side facing the probe extension. This target may be, for example, the upper end of a fiber that serves as a base for the probe extension. This upper end may be polished or coated or provided with a mirrored or partially mirrored plate to serve as a reflector for the measuring beam of the proximity sensor. The distance sensor uses the same front lens as the image processing sensor, so at least partially know a common beam path with this. This is necessary in order to keep the size of the entire arrangement small and thus present the lateral and vertical deflection to each other in defined directions.

Typical distance sensors are Foucault distance sensors, focus sensors, interferometric distance sensors or chromatic or chromatic confocal distance sensors. The beam path of the distance sensor can partially run through the optics used for the laterally measuring sensor, in particular in the area facing the workpiece, ie use the same front optics, or else the distance sensor has its own beam path. The former can be realized for example for Foucault distance sensors, focus sensors, and in particular chromatic confocal distance sensors, such as in the EP 1299691 for Foucault distance sensors or in the WO 2009049834 A2 for chromatic confocal distance sensors.

The distance sensor may also be a photogrammetric distance sensor.

In the 3D sensor design, direction-independent probing forces are to be realized in all three spatial directions, but at least a similarly low probing force in the vertical direction in comparison to the lateral directions. Therefore, it must therefore also be a bending elasticity in the vertical direction. This is preferably realized by the probe extension at a correspondingly low stiffness in the vertical direction having spring element such as leaf spring or leaf spring assembly, which is thus stretched at right angles to the optical axis and dimensioned correspondingly thin in the direction of the optical axis. This leaf spring arrangement thus serves as a fiber receptacle and know a corresponding clamping for the button extension. So that the spring elements influence the optical image of the image processing sensor as little as possible, they are arranged outside the focal plane of the beam path of the image processing sensor, so above the Antastformelementes or optionally the target for the image processing sensor or or additionally made transparent. Thus, they appear in the image of the laterally measuring optical sensor, so for example, the image processing sensor, defocused, so restrict practically only the available amount of light for evaluation. The separate target for the distance sensor is mounted above the clamping point on the probe extension, whereby the measuring beam of the distance sensor is not affected by the spring elements. Incidentally, the separate target mark is also only shown in a highly defocused manner in relation to the image processing sensor. The spring elements start from a lying outside the beam path holding element. This may for example be a stable ring structure which is attached to the underside of the optics or an adjusting unit, for example via a magnetic changeover interface.

• – von einem, vorzugsweise außerhalb des Strahlengang des lateral messenden optischen Sensors angeordneten, Halteelement ausgeht und
• – nahezu rechtwinklig zur optischen Achse des lateral messenden optischen Sensors verläuft, und
• – eine Einspannstelle zur Aufnahme der Tasterverlängerung aufweist, und
• – vorzugsweise transparent ist und/oder in Bezug auf den Strahlengang des lateral messenden optischen Sensors defokussiert angeordnet ist.

According to the invention can thus be provided that the fiber receptacle has at least one flexurally elastic element such as leaf spring or leaf spring arrangement, wherein the flexurally elastic element

• - Starting from a, preferably arranged outside the beam path of the laterally measuring optical sensor, holding element and
• - runs almost perpendicular to the optical axis of the laterally measuring optical sensor, and
• - Has a clamping point for receiving the probe extension, and
• - Is preferably transparent and / or is arranged defocused with respect to the beam path of the laterally measuring optical sensor.

The following explanations apply equally to the construction methods 2D sensor and 3D sensor.

To adjust the probe extension relative to the optical axis in both the translational and in the rotational degrees of freedom corresponding adjusting mechanisms are provided. These can be manual or motorized means. The aim of the adjustment is the orientation of the Antastformelementes or if this is detected by the laterally measuring optical sensor, the target in the focal plane of the optics of the image processing sensor and along the optical axis, and the defined setting the direction of the probe extension in the lower, the workpiece facing area , For this direction is preferably an angle of 0 °, ie parallel to the optical axis, or a slight angle of, for example, 0 ° <alpha <15 °, preferably 0 ° <alpha <5 °, particularly preferably 0 ° <alpha <1 ° set. Standard measurements take place at 0 ° angle, slight angles are particularly suitable for measurements in which the probe extension very far along a wall or edge dips into the workpiece or other reasons a Schaftantastung, ie a contact of the workpiece with the above the Antastformelementes or the target mark lying area of the probe extension and thus a Fehlauslenkung can be done. A small angle of a few degrees can also be used to measure the roughness of a workpiece surface. Depending on the position or orientation of the surface to be measured, in particular in the case of vertically oriented surfaces on the workpiece, the direction in which the angle is present must be set. For this purpose, various solutions of the invention offer.

A first solution provides that by means of adjusting the angle is set in each case for the corresponding direction. However, this is very costly when measuring differently oriented surfaces, since each must be readjusted accordingly. If, in addition, different stylus extensions are to be provided in a single measurement procedure, the adjustment means for each stylus extension may have to be set separately.

In addition, it can therefore be provided that an alternating interface for fastening various probe extensions is provided on the adjusting means. This changeover interface is designed to exchange the fiber intake including the probe extension attached therein. The exchange is preferably automatic and corresponding fiber receptacles are stored for example in a removable magazine. The changeover interface is preferably a magnetic interface. This makes it possible in the form of a second solution to automatically load probe extensions that already have the appropriate angle, without having to make a new adjustment. For this purpose, the bending of the stylus extension in the 2D sensor type already has a corresponding angle in the corresponding direction or the clamping in the clamping point in the design 3D sensor is carried out accordingly, so the probe extension accordingly obliquely clamped. In addition, the change-over interface makes it possible to automatically use probe extensions of different lengths or probes equipped with differently thick probing elements in a single measurement run, thereby achieving particularly high flexibility.

A third solution provides that an exchange interface for fastening the adjusting means and the fiber receptacle attached thereto or for fastening the fiber receptacle itself, if omitted adjusting means, or for fixing the holding elements used in the type 3D sensor to the laterally measuring optical sensor or a holder associated therewith is provided which provides for attachment in different angular positions about the optical axis. Thus, it is possible to use the same fiber in an automatic measurement process for differently oriented surfaces, without an adjustment is required. Adjustment can either be dispensed with or these must be set only once. The angular positions for the attachment can be carried out in any desired steps, but preferably four positions suffice to offset or twist each other by 90 °. For the case according to the invention that the light source for illuminating the Antastformelementes or the target, in the embodiment as a 2D sensor, integrated in the fiber holder (fiber mount) and thus must be attached with replaced or rotated, including corresponding electrical contacts for driving in the changeover interface must be provided, are provided as few rotational positions.

According to a particularly preferred solution, the invention thus provides that means for adjusting the probe extension, in particular together with the fiber receptacle, are provided relative to the laterally measuring optical sensor, which comprise at least one manually or motor-operated, translatory or rotary actuating mechanism, preferably that Means are provided for adjusting at least two translational and at least two rotational degrees of freedom.

It is also preferred that the means for adjustment comprise an exchangeable interface, preferably a magnetic interface, for attaching exchangeable fiber mounts.

• – die Biegung der Tasterverlängerung zwischen dem Bereich der Faseraufnahme und dem das Antastformelement enthaltenden Bereich entsprechend ausgeführt ist oder
• – die Einspannstelle entsprechend ausgeführt oder
• – die Mittel zur Justierung entsprechend einstellbar sind.

In a further preferred embodiment, the invention provides that an angle of 0 ° or an angle of 0 ° <α <15 ° is present between the area of the probe extension containing the probe element and the optical axis of the laterally measuring optical sensor, by

• - The bending of the probe extension between the region of the fiber receptacle and the Antastformelement containing area is carried out according to or
• - the clamping point is executed accordingly or
• - The means for adjustment are adjustable accordingly.

Particularly noteworthy is the idea that the means for adjustment one, preferably further, change interface, preferably magnetic interface, for attachment to the laterally measuring optical sensor or a holder associated therewith, preferably the means for adjustment in several, preferably four each 90 ° to the optical axis of the laterally measuring optical sensor twisted present positions can be fastened.

An alternative proposal provides that the holding element has an exchange interface, preferably magnetic interface, for attachment to the laterally measuring optical sensor or a holder associated therewith, wherein the holding element in several, preferably four each 90 °, about the optical axis of the laterally measuring optical Sensors twisted present positions can be fastened.

In extension of these ideas, a device is provided in which a light source such as LED, SLED, laser diode or the like is fixedly connected to the exchangeable fiber receptacle and the changeover interface for attaching the fiber receptacle has contacts for transmitting the signals for controlling the light source.

For the measurement of undercuts, in particular undercuts in arbitrary orientations, tactile-optical sensors according to the prior art are attached to a rotary / pivot joint. This has the disadvantage that the accuracy of the measurement is reduced by inaccuracies of the rotary / pivot joint. To avoid this, the invention provides for the use of laterally projecting or star-shaped or generally multi-branched probe extensions in which a sensing element is provided on each branch. The branching is preferably carried out below a target, so that the same target can be used for the deflection determination of all probing elements.

According to the invention, it can therefore be provided that the probe extension between the target mark and the probe-forming element runs under a changed direction or has a, preferably star-shaped, branching to a plurality of probe-shaped elements.

In order to realize a sensitive measurement with such a so-called laterally cantilever Antastformelement must be achieved by design measures that the deflection of the Antastformelementes is largely transferred to one or the target and not to a significant bending of the cantilevered region, ie the area changed direction, or torsion of the probe extension, that is, rotation about the optical axis of the laterally measuring sensor along which the above the target mark extending part extends at least partially. It should be noted here that the torque which is transmitted to the target mark via the lever arm present through the area of changed direction or branch, depending on its flexural rigidity, whereby a torsion of the probe extension takes place. The greater the torsion, the smaller is the proportion of the deflection of the sensing element which is transmitted to the target for measurement, whereby the sensitivity decreases and the measurement accuracy decreases. To counteract this, the ratio of perpendicular to the optical axis present distance between the sensing element and target, ie Hebelarmlänge, the bending stiffness of the range of change direction and the torsional stiffness of lying above the target range of the probe extension must be dimensioned correspondingly low. So it must also be carried out the projecting area in stiff, in particular rigid transverse to the possible probing forces. The least bending stiffness occurs conditionally perpendicular to the projection, ie in the direction perpendicular to the changed direction and perpendicular to the optical axis, ie perpendicular to the area in which the probe extension extends above the target. The cantilevered area can be made stiff enough by being made quite short, for example, only about 1 to 4 mm long. Typical diameters for the fiber present in the projecting region - and incidentally also for the fiber which is present in the flexurally elastic part above the target - are generally in the range from 10 .mu.m to about 300 .mu.m. From this area, suitable conditions must now be found, so that a high proportion of the deflection is transmitted to the target. For this purpose, the area of the probe extension running along the optical axis above the target point must first of all be made long enough to be flexurally elastic others are short enough to remain torsionally stiff. Exemplary for a fiber thickness of about 100 .mu.m to 200 .mu.m, preferably about 130 .mu.m, and a typical glass material for the fiber results from these requirements with a 1 mm to 2 mm, preferably 1.2 mm long projection a fiber length above the target to to the fiber holder of about 7 mm to 13 mm, preferably 10 mm. In the preferred embodiment, the transmission ratio between deflection of the sensing element for deflection of the target, in each case in the direction perpendicular to the projection and the optical axis, is approximately 1: 0.83. Typical diameters for the Antastformelement and the target are 200 microns to 300 microns, preferably 250 microns. The remaining deviation between deflection of the probe form element for the deflection of the target mark is corrected by measuring this behavior, so that, for example, a so-called direction-dependent deflection characteristic is created.

In a further preferred embodiment, the invention therefore provides that the torsional rigidity of the probe extension is selected to be large enough around the axis along the optical axis of the image processing sensor by selecting the diameter and length in the regions above the target mark and between the target mark and the probe shape element Deflection of the Antastformelementes in the direction perpendicular to the optical axis and perpendicular to the changed direction, at least 50%, preferably at least 70%, more preferably at least 80% is transferred to the target.

The optics which are assigned to the laterally measuring optical sensor and optionally also to the vertically measuring sensor are further developed for increasing the accuracy and / or flexibility. For the lateral deflection measurement it is necessary for accurate measurements that the image scale remains constant within the vertical positions of the detection element or the target mark which occur in the context of the occurring vertical deflections. Otherwise, depending on the vertical deflection, the lateral deflection would be incorrectly determined with a lateral offset. For this purpose, the optics is made telecentric, for example by using a telecentric optics with a fixed magnification or a telecentric zoom stage of a zoom lens. Additionally or alternatively, the possibility should be created to set the accuracy for the lateral and / or vertical measurement or to adapt the magnification to the size of the respective selected Antastformelementes or target, so that they still fully recorded and taking into account the maximum allowable lateral deflection maximum possible resolution and thus accuracy can be measured. This is achieved by the invention by using a zoom lens, wherein the different zoom levels for each required working distance due to different length probe extensions should be available by preferably a zoom optics is used with independent of the imaging scale adjustable working distance. If a zoom lens is also used for the distance sensor (type 3D sensor), either a large measuring range or a high accuracy for the determination of the vertical deflection is possible.

It can therefore also be characteristic that telecentric optics with fixed magnification and / or zoom optics, with working distance which is preferably adjustable independently of the magnification, is used for the laterally measuring optical sensor and / or the vertical optical distance sensor, the zoom optics preferably at least some Has zoom levels that cause a telecentric imaging.

Of particular note is the idea that the laterally measuring sensor and the vertically measuring distance sensor at least partially have a common beam path, in particular in the workpiece facing portion of the optics, wherein the distance sensor is preferably a distance sensor according to the Foucault principle or focus sensor or chromatically confocal sensor ,

To increase the measuring range of the vertically measuring sensor, this can be embodied in a further developed variant of a Foucault distance sensor. According to the prior art, in a Foucault distance sensor, the image of the measuring beam in the direction of the workpiece after the introduced Foucault cutting edge fills half the aperture of the optic. Therefore, during tilting and / or deflection of the surface detected by the measuring beam, the reflected measuring beam is partially shaded by the optics, as a result of which the evaluated measuring beam is deformed and the evaluation becomes inaccurate or the permissible deflection or tilting range is limited. This is improved according to the invention by using as the light source for the measuring beam a source of illumination filling only a limited area of the aperture of the optics, that is, for example, a strongly collimated punctiform light source. A further increase in the measuring range is realized according to the invention by using, instead of the differential diode arrangements customary in the prior art, a position-sensitive diode (PSD) or a CCD or CMOS camera as the receiver, which has a greater lateral deflection of the sensor can detect reflected measuring beam. Surface cameras or surface PSD's but also line scan cameras or line PSD's are used. To increase the read-out frequency for area cameras, it is provided to read only an adjustable restricted area, in particular a limited number of lines (line restriction). The lines are perpendicular to the direction of the deflection to be measured offset from each other. As a result, the full deflection can be done even with line restriction. A column restriction is particularly conducive to CMOS sensors and is made, for example, if the expected deflections do not reach the edge of the camera chip.

Particularly noteworthy therefore is the suggestion that the vertically measuring optical distance sensor is a Foucault principle sensor, using an illumination source which illuminates only a limited part of the aperture of the optics used for imaging on the workpiece, and / or wherein a linear or area detection unit such as position sensitive diode (PSD) or camera is used to determine the position of the reflected light from the workpiece.

The invention further proposes a device in which the tactile-optical sensor is integrated in a coordinate measuring machine, preferably a multi-sensor coordinate measuring device together with further sensors, preferably tactile, optical or computer tomographic sensors, preferably the laterally measuring optical sensor and the vertically measuring optical distance sensor independently can be operated by the tactile-optical sensor.

This means, for example, that the laterally measuring optical sensor and the vertically measuring optical distance sensor can be used alternatively when measuring the workpiece surface when the stylus extension is stored, ie when the fiber receptacle, adjusting unit or holder is stored.

The invention also provides an apparatus for determining geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, preferably a vertically measuring optical distance sensor, and an at least partially flexible elastic probe extension wherein at least one of the stylus extension is deflected: a probing element which is deflectable on contact with the workpiece, and preferably at least one target mark associated with the probing element which is deflectable when the probing element contacts the workpiece, the lateral deflection of the probing element or target being perpendicular to the optical axis of the laterally measuring optical sensor can be determined with this, and preferably the vertical deflection of the sensing element or the target along or almost along the optical axis d it can be determined with the distance sensor sensor, which is characterized in that the probe extension emanating from a fiber receptacle, which directly or indirectly adjoins a flexurally elastic part, directly or indirectly adjoining the Antastformelement or optionally the target, wherein if there is an existing target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic member is rigid, and that means for adjusting the probe extension have a removable interface for attaching replaceable fiber mounts.

In particular, the invention is characterized by a device for determining geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, preferably a vertically measuring optical distance sensor, and one at least partially flexible elastic probe extension, wherein from the probe extension at least assume: a Antastformelement which is deflected in contact with the workpiece, and preferably at least one of the Antastformelement associated target mark which is deflected when touching the Antastformelementes with the workpiece, wherein the lateral deflection of the Antastformelements or the target mark perpendicular to the optical axis of the laterally measuring optical sensor can be determined with this, and preferably the vertical deflection of the Antastformelements or the target along or almost along the opti rule axis of the laterally measuring optical sensor with the distance sensor can be determined, which is characterized in that the probe extension emanating from a fiber receptacle, which directly or indirectly adjoins a flexurally elastic part, which is directly or indirectly followed by the Antastformelement or optionally the target , Wherein optionally existing target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic member is rigid that means for adjusting the probe extension, in particular together with the fiber receptacle, are provided relative to the laterally measuring optical sensor, the at least one manually or motor-operated, translatory or rotary actuating mechanism, preferably that means for adjusting at least two translational and at least two rotational degrees of freedom are provided that the means for adjustment comprise an exchange interface, preferably a magnetic interface, for attaching interchangeable fiber receivers, and / or that the means for adjustment comprise a, preferably further, changeover interface, preferably magnetic interface, for attachment to the laterally measuring optical sensor or a holder associated therewith, wherein Preferably, the means for adjustment in a plurality, preferably four each 90 °, about the optical axis of the laterally measuring optical sensor twisted present positions can be fastened.

Also characteristic of the invention is a device for determining geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, preferably a vertically measuring optical distance sensor, and one at least partially flexurally elastic probe extension, wherein from the probe extension at least emanating: a Antastformelement which is deflected upon contact with the workpiece, and preferably at least one of the Antastformelement associated target mark, the touch of the Antastformelementes ( 8th ) is deflectable with the workpiece, wherein the lateral deflection of the Antastformelements or the target perpendicular to the optical axis of the laterally measuring optical sensor can be determined therewith, and preferably the vertical deflection of the Antastformelements or the target along or almost along the optical axis of the laterally measuring optical sensor with the distance sensor can be determined, which is characterized in that the probe extension emanating from a fiber receptacle, which directly or indirectly adjoins a flexurally elastic part, directly or indirectly adjoining the Antastformelement or optionally the target, wherein optionally present Target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic member is rigid, and that the vertically measuring optical distance sensor is a sensor according to the Foucault principle, wherein an illumination source v is used, which illuminates only a limited part of the aperture of the optics used for imaging on the workpiece, and / or wherein a planar detection unit such as position sensitive diode (PSD) or camera is used to determine the position of the reflected light from the workpiece.

Also, the invention relates to a method for the determination of geometric features or structures on a workpiece using a probe of a tactile-optical sensor comprising an at least partially bending elastic trained probe extension with a mounting portion for insertion into a receptacle or fiber receptacle, wherein the attachment portion is a portion of the probe extension or a portion of the probe extension receiving bracket, and is characterized in that the fastening portion is formed as a rotation.

In particular, it is provided that the attachment portion is provided in its extending in the receiving area in a plane perpendicular to the longitudinal axis of the attachment portion level at least in sections with a deviating from a circle geometry outer geometry to which the recording is adjusted in its internal geometry.

The invention is also distinguished by the fact that the geometry deviating from the circular geometry by a flattening as planar portion of the mounting portion, a projection projecting from the attachment portion, a recess extending in the attachment portion, a groove extending in the longitudinal direction of the attachment portion such as groove and / or is formed by a polygonal configuration of the attachment portion.

After the independent protection enjoying idea is provided in particular to perform the probe extension so that the probe extension at least in the fiber receiving a partially planar flat, preferably the flattening is formed by an at least partially flattened outside of the hollow cylinder, in which the probe extension is partially inserted ,

As a result, the detached from the remaining inventions problem can be solved that the probe extension is arranged in a defined position in the fiber receptacle. This has the advantage that the parallel or along the optical axis extending portion of the probe extension containing the Antastformelement and optionally the target, is determined exactly in its direction, even if the probe extension, z. B. wear, by a z. B. similar button extension is replaced.

Preferably, the formation of the flattening in the "2D sensor" design is used. Particularly preferably, the flattening is applied to the dipping into the fiber receiving portion of the hollow cylinder, in which the probe extension is introduced after the hollow cylinder bent over 90 has been. The fiber holder contains as counterpart an equally flat contact surface. Alternative embodiments, in which the probe extension or the hollow cylinder are cylindrical and the contact surface, for example in the form of a V-groove, have the disadvantage that the probe extension can be arranged in different rotational positions in the V-groove.

In a particular embodiment, the invention therefore provides that the fiber receptacle has a contact surface for the flattened region of the probe extension or the hollow cylinder, wherein the contact surface is preferably flat.

It is preferably provided that the normal direction of the flattening is formed parallel to the direction of the region of the probe extension extending parallel or along the optical axis, and preferably the hollow cylinder has a bend of 90 °.

The bending of the hollow cylinder or the probe extension is thus carried out so that the bent part runs along the desired direction of the probe extension in the range of sensing element or target. This is achieved, for example, by applying the flattened region in a bending device to a contact surface which has a defined position relative to the bending direction. Thus, the position of the flattening for bending is reproducibly set accurately.

Alternative embodiment of the bending of the hollow cylinder for special measuring tasks also provide that the bend takes place in the range 85 ° to 95 °.

Particularly preferred is the probe extension glued to the Antastformelement facing exit from the hollow cylinder with this, in order to achieve a fixation in the hollow cylinder.

According to the invention it is also provided that the probe extension extends at least in sections inside the hollow cylinder, wherein the hollow cylinder has a bend of 85 ° to 95 °, preferably 90 °, preferably within the hollow cylinder only not drawn areas of the probe extension extend and preferably on the Antastformelement facing exit point of the probe extension from the hollow cylinder probe extension and hollow cylinder are glued.

Another advantage of the flattening is that the system defined by the probe extension in the fiber intake ensures that the light source with high coupling efficiency aligned with the end of the probe extension aligned with the fiber optic receptacle can couple light into the probe extension, even if the light source Button extension is replaced.

Flattening is synonymous with a geometric design that causes an anti-rotation.

The invention also relates to a method for determining geometric features or structures on a workpiece by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, preferably a vertically measuring optical distance sensor, and an at least partially flexurally elastic Probe extension, wherein at least assume the probe extension: a Antastformelement which is deflected upon contact with the workpiece, and preferably at least one of the Antastformelement associated target, which is deflected when touching the Antastformelementes with the workpiece, wherein the lateral deflection of the Antastformelements or the target , perpendicular to the optical axis of the laterally measuring optical sensor, is determined therewith, and preferably the vertical deflection of the sensing element or the target along or almost along the optical axis of the is measured laterally measuring optical sensor with the distance sensor.

At least aspects of the objects are essentially achieved by a corresponding method in which a probe extension is used, which starts from a fiber receptacle, which directly or indirectly adjoins a flexurally elastic part, directly or indirectly adjoining the probing element or optionally the target , Wherein, if any existing target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic member is rigid.

In order to be able to measure as flexibly as possible with adjustable point density, measuring speed and accuracy, the invention provides for single-point measurements and various scanning methods switch. Under certain circumstances, different, correspondingly suitable probe extensions are used for the different methods, which are preferably replaced automatically.

In a first selectable operating mode for particularly high accuracies, the measuring points are recorded individually. For this purpose, the Antastformelement is driven up to the workpiece and deflected to a predefined amount. Then the position of the sensor in relation to the workpiece and the deflection is determined and the measuring point is calculated and the probing is released again. Alternatively, the determination of the position of the sensor and deflection can also take place several times and / or even during the probing process and a measurement point can be determined from a plurality of value pairs by averaging.

• – Antastformelement und Werkstück werden relativ zueinander aufeinander zu bewegt, bis eine vordefinierte Auslenkung des Antastformelementes oder der Zielmarke erreicht wurde
• – Antastformelement und Werkstück werden relativ zueinander voneinander weg bewegt, zumindest bis keine Auslenkung des Antastformelementes oder der Zielmarke mehr vorliegt
• – die Ermittlung der Auslenkung des Antastformelementes und/oder der Zielmarke erfolgt während des aufeinander zu Bewegens und/oder während des voneinander weg Bewegens und/oder zwischen beiden Bewegungen,
• – aus der einen oder mehreren ermittelten Auslenkungen und der dabei jeweils vorliegenden Lage des taktil-optischen Sensors in Bezug zum Werkstück, vorzugsweise anhand der Positionen der Messachsen eines Koordinatenmessgerätes bestimmt, wird jeweils ein Messpunkt berechnet.

According to a particularly preferred solution, the invention provides that a probe extension is loaded manually or automatically, with the measuring points on the workpiece being determined in each case in single-point mode, by carrying out the following steps:

• - Antastformelement and workpiece are moved towards each other relative to each other until a predefined deflection of the probe form element or the target mark has been reached
• - Antastformelement and workpiece are moved away from each other relative to each other, at least until there is no deflection of the probe form element or the target more
• The determination of the deflection of the sensing element and / or the target is effected during the movement towards one another and / or during the movement away from one another and / or between both movements,
• - Determined from the one or more determined deflections and thereby each present position of the tactile-optical sensor with respect to the workpiece, preferably based on the positions of the measuring axes of a coordinate measuring machine, a measuring point is calculated in each case.

In a second selectable operating mode for particularly fast recording of many measuring points on a track or in a region of the workpiece surface, various scanning methods are provided. General features of scanning are that after approaching the workpiece and deflection of the Antastformelementen up to a predetermined value, several measuring points are recorded cyclically, while the Antastformelement and the workpiece move each other on a track and remain in touch. Only after recording all intended measuring points, ie tracing the web, the probing is released again.

• – Antastformelement und Werkstück werden relativ zueinander aufeinander zu bewegt, bis eine vordefinierte Auslenkung des Antastformelementes oder der Zielmarke erreicht wurde
• – Antastformelement und Werkstück werden relativ zueinander auf einer Bahn bewegt, wobei Antastformelement und Werkstück in Berührung bleiben, und wobei während der Bewegung zyklisch die Auslenkung des Antastformelementes und/oder der Zielmarke ermittelt wird
• – Antastformelement und Werkstück werden relativ zueinander voneinander weg bewegt, zumindest bis keine Auslenkung des Antastformelementes oder der Zielmarke mehr vorliegt
• – aus den mehreren ermittelten Auslenkungen und der dabei jeweils vorliegenden Lage des taktil-optischen Sensors in Bezug zum Werkstück, vorzugsweise anhand der Positionen der Messachsen eines Koordinatenmessgerätes bestimmt, werden die mehreren Messpunkte berechnet.

According to a particularly preferred alternative solution, the invention therefore provides that manually or automatically a probe extension is exchanged with which a plurality of measuring points, preferably offset from one another, are determined on the workpiece in the scanning mode by carrying out the following steps:

• - Antastformelement and workpiece are moved towards each other relative to each other until a predefined deflection of the probe form element or the target mark has been reached
• - Antastformelement and workpiece are moved relative to each other on a track, with Antastformelement and workpiece in contact, and wherein during the movement, the deflection of the Antastformelementes and / or the target is determined cyclically
• - Antastformelement and workpiece are moved away from each other relative to each other, at least until there is no deflection of the probe form element or the target more
• - Determined from the plurality of determined deflections and thereby each present position of the tactile-optical sensor with respect to the workpiece, preferably based on the positions of the measuring axes of a coordinate measuring machine, the plurality of measuring points are calculated.

To determine the path on which the measuring points are recorded during scanning, several methods are provided. On the one hand, a distinction is made between methods in which the deflection between a minimum and maximum amount is regulated by a desired value (target deflection) (controlled scanning), and methods in which no control (unregulated scanning) takes place. On the other hand, a distinction is made between scanning on a fixed path and scanning without fixed specification of the path. In the second case, the determination of the web is carried out at least by defining a start and an end point, this method is practically only used in controlled scanning (exception: the workpiece surface along the direct line connecting the start and end points know maximum deviations in the size of the permissible Deflections on).

When scanning on a predetermined path (desired path), the relative movement between sensor and workpiece takes place on this desired path and in the unregulated case, the respective deflections are recorded. This unregulated scanning is then used when the workpiece surface in the frame the permissible deflection is known exactly enough. Otherwise, the permissible deflection would be exceeded. The deflection is monitored and if necessary the scanning is stopped. The desired path can be located anywhere in the space and all required axes of motion of the coordinate measuring machine used for relative movement between the workpiece and the tactile-optical sensor are used.

Alternatively, the scanning is carried out on a predetermined path as a controlled scanning. An attempt is made to follow the setpoint path and at the same time to regulate the predetermined deflection. This is achieved according to the invention preferably when the nominal path is followed in the two coordinate directions defined by a so-called scanning plane and in the coordinate direction perpendicular thereto the regulation of the deflection takes place. Preferably, the three coordinate directions are parallel to the axis drives of the coordinate measuring machine used to perform the relative movement. As a result, only one axle drive for regulating the deflection and the other two axle drives are used for movement on the desired path. However, it is also envisaged to carry out a control in all three spatial directions, ie to use all the final drives for the control. Since the movement along the path basically tangential to the respectively contacted workpiece surface, ie perpendicular to the respective present deflection, must be made in order not to lose contact with the workpiece surface, the control is carried out according to perpendicular to the surface tangent, ie in the direction of the deflection.

The desired path is, for example, a spline that is defined by contours that have been taken from a CAD model of the workpiece or already measured contours on the workpiece or geometric basic shapes such as straight line, straight line section, circle, circular section, helix section.

Preferably, it is therefore provided that a desired trajectory such as spline is formed for the web, which is formed from one or more predetermined curves in space, the curves preferably starting from already measured points and / or a model such as CAD model of the workpiece and / or from geometric basic forms such as straight line, straight line section, circle, circular section, helix section are determined and the web either the desired path corresponds (unregulated scanning) or the desired trajectory, taking into account the deflection of the Antastformelementes and / or the target, preferably in at least two by a scanning Plane defined coordinate directions, follows (controlled scanning).

When scanning without a predetermined target path, the path is determined by defining at least one start and one end point between which the path is to run. Furthermore, it is preferably provided to define intermediate points through which the web passes. The path to be traveled between the starting point and end point or the intermediate points is determined on the basis of the present workpiece surface by controlling the deflection. In the general case, the control takes place in all three spatial directions, ie using all axis drives. In order not to lose contact with the workpiece surface, the control is carried out according to perpendicular to the surface tangent, ie in the direction of deflection, and the movement on the web fundamentally tangent to the workpiece surface, ie perpendicular to each present deflection and in the direction of the web, ie on the End point or next intermediate point too.

According to a particularly preferred solution, the scanning succeeds without predetermined nominal path when the running between the start and end point path is limited by the specification of a scanning plane. This means that the web runs within this scanning plane. The regulation of the deflection is then preferably also in the two spanning the scanning plane spatial directions. In order to determine the exact direction of the respective control movement and the respective direction of movement on the web, it is provided to first determine the direction of the deflection, preferably the direction of the deflection projected into the scanning plane. This direction is approximately perpendicular to the currently just touched workpiece surface. Therefore, the control then takes place in the direction of the deflection or the deflection projected into the scanning plane, and the movement perpendicular thereto, ie along the respective surface tangent. The sense of direction of the movement is determined so that no movement in the opposite direction is initiated suddenly, so that the smaller angle to the existing direction of motion exists.

In order to specify in which direction the web is to start leading away from the starting point, it is preferably provided to specify a direction, for example by specifying a direction point. The scanning movement then starts from the starting point in the direct direction or in the scanning plane projected direction towards the direction point. For example, the definition of the scanning plane can be based on the starting point or end point in conjunction with a vector which contains the normal vector of the scanning Level forms. Alternatively, a plane defined by two coordinate measuring machine axes each, which is shifted to the starting point or end point, can also be used as the scanning plane.

It can therefore also be characteristic that the path is defined by a start point and an end point, and preferably by one or more intermediate points, and preferably by a start direction and / or scanning plane, and that between the defined points, the path taking into account the deflection of the probing element and / or the target mark (controlled scanning) is determined by the position of the respectively contacted workpiece surface.

Particularly noteworthy is the idea that during the movement on the web, the deflection between a minimum and a maximum amount by a target deflection by moving corresponding coordinate measuring machine axes is regulated, preferably the control perpendicular to a scanning plane or in the two spatial directions within the scanning Level or in all three spatial directions.

It is preferably provided that in the regulation in the two spatial directions within the scanning plane, the regulation in the direction of the deflection, preferably in the direction of the deflection projected into the scanning plane, and the movement along the path within the scanning plane at right angles to Deflection, preferably at right angles to the projected in the scanning plane deflection, takes place, wherein preferably the sense of direction of the movement is set so that the smaller angle is present to hitherto existing direction of movement.

In addition, there are special forms of scanning, such as scanning using a rotation axis. In this case, the turning of the workpiece is to be understood as a further movement axis of the coordinate measuring machine used for the relative movement between the tactile-optical sensor and the workpiece. The path can be just as given, so contains as another coordinate a rotation angle to each track point, or it is scanned without a predetermined path. Likewise, regulated as well as unregulated scanning is possible. The inventive considerations to scanning level and the directions for control and movement are transferable to the use of the axis of rotation. Drehachsscannig is preferably used in rotationally symmetrical components such as shafts or tools, but also crankshafts or the like. The probing takes place perpendicular to the rotational axis direction on the outer circumference of the workpiece, ie in a plane in which the axis of rotation is located. The probing and control of the deflection is preferably carried out for the type 2D sensor in the lateral direction, that is perpendicular to the optical axis, and for the type 3D sensor perpendicular or along the optical axis. The linear axis of motion perpendicular to the scanning direction and axis of rotation is usually not used in rotary axis scanning and instead the axis of rotation is rotated in order to realize the movement along the workpiece surface.

In order to carry out the scanning but also the measurement of individual points with the tactile-optical sensor analogous to the measurement with conventional tactile sensors, so as in the use of classical Wegmesssystemen, thereby reducing the cost of the corresponding method, the invention provides, if necessary, from derive the three Cartesian displacement signals as in a conventional tactile sensor, the images taken with the laterally measuring optical sensor and the measurement signal of the vertically measuring distance sensor. These signals can then be further processed, for example, by the same or even the same evaluation unit or evaluation software. For maximum accuracy, the recording of the signals must be synchronized with the determination of the respective positions of the measuring axes of the coordinate measuring machine, for example by triggering via a trigger line.

In a particular embodiment, the invention provides that for scanning, compared to the single point measurement, probe extensions are used, which have a higher bending stiffness, so-called scanning fibers. This is achieved in that the area of the probe extension that extends directly above the probe-forming element or the mark passes to a so-called free shaft length of about 0.5 mm to 1 mm in length, into a thicker and, compared to the free shaft length, significantly more rigid region. The transition from the thicker to the thinner region preferably takes place continuously, produced by a drawing process. For stylus extensions for single-point measurements, the free shaft length is made larger, about 3 mm to 6 mm long. In scanning fibers so a lower immersion depth, namely only in the context of the free shaft length, in the workpiece possible, however, it comes only with larger deflections, as in the single point measurement, to a so-called Schaftantastung, in which extending above the Antastformelementes part of Probe extension collides with the workpiece. The larger permissible deflections when using scanning fibers make it easier to control the deflection during scanning or larger scanning speeds are permitted.

Therefore, according to the invention, it is also provided that the stylus extension passes from a bending elastic region directly adjacent to the probing elements or the target into a region of larger diameter, which is preferably at least twice the diameter of the smallest diameter of the flexurally elastic region of the stylus extension, preferably by the flexurally elastic Part is continuously tapered by pulling in its diameter in the direction of the Antastformelement out, the length of extending directly above the Antastformelementen or the target range to the region of the larger diameter optionally less than 2 mm, in particular 0.2 mm to 1, 5 mm, for use in scanning measurement, or greater than 2.5 mm, especially 3 mm to 6 mm, for single point measurement.

Preferably, it is therefore provided that in each case two deflection signals, preferably mutually perpendicular deflection signals, are extracted from the images recorded with the laterally measuring optical sensor and a third deflection signal, preferably perpendicular to the first two deflection signals, provided by the vertically measuring distance sensor and preferably the deflection signals are processed with the same or the same evaluation unit and / or evaluation software that are used for a conventional tactile probe to determine the deflection of the probe element in 3D and from there the measurement points.

Particularly noteworthy is the idea that the recording of each used for the determination of the deflection of the sensing element in 3D image and the associated provided by the distance sensor third deflection signal controlled by a trigger line at the same time as the recording of the positions of the measuring axes of coordinate measuring machine.

For determining the lateral deflection of the probe element or the target mark, the position or position of the image of the probe element or the target in the deflected state in the digital image respectively recorded by the laterally measuring sensor and the position or position in the undeflected state is provided to compare. The position in the undeflected state is measured in advance. In addition, a characteristic must be measured, which includes the relationship of the situation in the image to the real deflection.

For the rapid and accurate determination of the position or position of the image of the detection element or the target mark in the digital image taken by the laterally measuring sensor, the invention fundamentally proposes two methods. The first method is based on a contour evaluation, the second on an image correlation.

In contour evaluation, a contour is extracted from the digital image using suitable mathematical algorithms. Along the edge course, measuring points are strung together pearl-like and determined by subpolarization of the edge course. In the case of a single image recording of the round probing element, a circular contour with a multiplicity of measuring points thus arises. Following this, the circle center of the contour, which can be determined by the method of the least squares ("compensation circle"), is typically used to determine the position. Alternatively, the evaluation of other features such as the contour focus is possible.

mit ncc: Kreuzkorrelationswert an i, j: Bildposition; T: Template; B: Bild; s_T ²: Grauwert-Varianz des Templates; s_B ²: Grauwert-Varianz des Bildbereichs (welches vom Template überdeckt wird).Image correlation allows finding any objects in the image. For this purpose, a reference image (template) of the undeflected probe shape element or the target mark is generated and stored in advance. This template is then searched during the measurement (deflected probe element or target mark) in the image. The location with the largest similarity value corresponds to the center position of the detection element or the target mark. When correlating the image, the template is moved pixel by pixel over the image. At each pixel a similarity value is determined from both. The simplest similarity value is the summation of the absolute difference of both images. If the template matches the image section, the difference between the two images is zero. The largest match is reached at this point. However, if a change in illuminance or brightness occurs in comparison to the state in which the template was recorded, the difference in the images can no longer become zero in this method. A similarity value which does justice to this circumstance is the standardized cross-correlation used according to the following equation, for example, in which a kind of normalization of template or image takes place:

with ncc: cross-correlation value at i, j: image position; T: template; B: picture; s _T ² : Gray value variance of the template; s _B ² : Gray value variance of the image area (which is covered by the template).

This method thus solves the task of realizing an accurate determination of the deflection even under poor imaging conditions or changed light conditions.

The result of the cross-correlation is a correlation matrix which has the same dimension as the camera image and contains correlation values between +1 and -1, where +1 means an exact match between template and image. If the gray values are inverted, the value assumes -1. The center position of the probe element or the target mark is represented by the pixel coordinate with the largest correlation coefficient. Suitable interpolation methods such as linear or quadratic interpolation allow a subpixel accurate evaluation of the location. Optimizations of the computation-intensive image correlation according to the known standard methods are aimed in practice at reducing computing times. Possibilities include the step-by-step calculation in resolution steps according to the pyramid method and the use of simple test variables for filtering the maximum value candidates, whereby recognized, inappropriate areas in the image are excluded from the correlation analysis via image evaluation.

According to a preferred solution, the invention provides that the extraction of the deflection signals from the images taken with the laterally measuring optical sensor takes place by determining the position of the sensing element or the target mark in the respective image in comparison to the previously measured position in the undeflected state the pre-measured position and the respective position is determined by determining the contour of the Antastformelementes or the target in the image and determining the center of gravity or the contour, or is determined by means of correlation methods, wherein the maximum correlation to a predetermined template of the mapping of the Antastformelementes or the target is determined, wherein the correlation is evaluated in several different layers of the template to the respective image.

It can therefore also be characteristic that a cross-correlation is used, wherein it is preferably taken into account as an extended parameter that the template and the image were recorded with different illumination, in particular brightness, and the template and / or image are accordingly normalized before the correlation is determined.

Of particular note is the idea that the determination of the correlation or the correlation coefficients initially takes place with reduced resolution of the image and / or template and a coarse position of the detection element or the target is determined and then limited with increased resolution in a limited by the roughly determined position Image area is performed, the process preferably iteratively repeated with gradually increasing resolution and gradual restriction of the image area (pyramid process).

It is preferably provided that, before determining a correlation, regions of the image are determined which are excluded from the correlation analysis, in particular simple test variables are used for filtering the maximum value candidates.

In order to achieve optimum alignment for the different probe extensions used, for example, for single-point measurements or scanning, these are adjustable.

In a preferred embodiment, the invention provides that the probe extension is adjusted relative to the laterally measuring optical sensor, preferably in one, two or three translational and / or one, two or three rotational degrees of freedom.

• – eine Faseraufnahme verwendet, vorzugsweise eingewechselt, wird, die eine Tasterverlängerung enthält, die zwischen dem das Antastformelement enthaltenden Bereich und dem Bereich der Faseraufnahme eine entsprechend voreingestellte Biegung aufweist oder
• – eine Faseraufnahme verwendet, vorzugsweise eingewechselt, wird, die eine entsprechend ausgeführte Einspannstelle ausweist oder
• – die Mittel zur Justierung entsprechend eingestellt werden,

und dass das Antastformelement oder die Zielmarke im Scharfbereich des lateral messenden optischen Sensors angeordnet sind, vorzugsweise zur Messung der Rauheit auf einer Werkstückoberfläche.According to a preferred solution, the invention provides that the area of the probe extension containing the probe element is set at an angle of 0 ° <alpha <15 ° relative to the optical axis of the laterally measuring optical sensor by

• A fiber receptacle is used, preferably inlaid, containing a stylus extension which has a corresponding preset bend between the area containing the probing element and the area of the fiber receptacle
• - Used a fiber receptacle, preferably replaced, is that identifies a correspondingly executed clamping or
• - the means for adjustment are adjusted accordingly,

and that the probing element or the target mark are arranged in the sharp region of the laterally measuring optical sensor, preferably for measuring the roughness on a workpiece surface.

It is also characteristic that, for the measurement of undercuts or other features inaccessible to straight stylus extensions, a stylus extension is used or exchanged which has a bend or a preferably star-shaped branching to a plurality of probing elements between the probing element and the target.

Particularly noteworthy is the idea that the magnification is kept constant when deflected in the vertical direction by using a telecentric optics with fixed magnification or a telecentric zoom level zoom optics, the zoom optics preferably has an adjustable independently of the magnification working distance.

As a result, the accuracy of the measurement of the lateral deflection does not change even if the detected detection element or the target mark is deflected vertically.

In a preferred embodiment, the invention provides for the determination of the lateral deflection a zoom optics, preferably zoom optics with independently adjustable working distance, is selected, wherein a zoom level is selected, which has a magnification, the diameter of the respective detected Antastformelementes or target mark is adapted, in particular adapted so that the image of the sensing element or target mark including its or their maximum permissible deflection of the zoom lens is completely detected and the resolution is maximized.

This ensures that different sized Antastformelemente or targets can be used, preferably on the automatic changer, but still can be completely detected and measured. The adaptation preferably takes place in such a way that a zoom level is selected in which the entire image of the touch-sensitive element or the target mark is barely registered, taking into account the maximum permissible deflection. This ensures the maximum possible resolution and thus accuracy for the lateral measurement.

• – ein Differenzsignal aus den Summensignalen, vorzugsweise Summensignalen der gemessenen Intensitäten der einzelnen lichtempfindlichen Elemente der Detektionseinheit, aus zumindest zwei unterschiedlichen Bereichen der Kamera, vorzugsweise in der Mitte der Kamerafläche aneinandergrenzenden gleich großen Bereichen, bestimmt wird und/oder
• – der Strahlschwerpunkt, vorzugsweise photometrische Mitte, durch Auswertung der Intensitäten der einzelnen lichtempfindlichen Elemente zumindest eines Teilbereiches der Kamerafläche bestimmt wird.

According to a preferred solution, the invention provides that the vertically measuring optical distance sensor is a Foucault-type sensor using an illumination source which illuminates only a limited part of the aperture of the optics used for imaging on the workpiece, and / or wherein a line-shaped or flat detection unit such as position-sensitive diode (PSD) or camera is used to determine the position of the reflected light from the workpiece, wherein the position is preferably determined with a camera by

• A difference signal from the sum signals, preferably sum signals of the measured intensities of the individual light-sensitive elements of the detection unit, from at least two different areas of the camera, preferably in the middle of the camera area adjoining equally large areas, is determined and / or
• - The beam center of gravity, preferably photometric center, is determined by evaluating the intensities of the individual photosensitive elements of at least a portion of the camera surface.

In addition to the explanations already given to this preferred development of a foucault distance sensor, when using a camera as a detection unit, it is proposed that the position of the illumination reflected by the workpiece, which originates from a separate illumination source of the faecal sensor, results from the intensity distribution associated with the various light-sensitive elements the camera is being recorded. The subtraction results in a signal with zero crossing, which is used as the middle of the measuring range. The use of the beam centroid occurs in the areas where the difference signal is saturated, so at least one of the selected areas is no longer illuminated, or for additional monitoring. To avoid over-exposure to the camera, the integration time of the camera is set correspondingly low. As a result of the high read-out frequency, which is also favored by the limitation of the rows or columns, as already explained, several consecutively recorded images can then be summed up in order to achieve a high signal-to-noise ratio. The integration time adjustment is also used according to the invention to control to a constant light intensity in order to realize an adaptation to different surface reflectivities or surface slopes.

Preferably, it is provided that the tactile-optical sensor integrated in a coordinate measuring machine, preferably multi-sensor coordinate measuring device together with other sensors, preferably tactile, optical or computer tomographic sensors, preferably the laterally measuring optical sensor and the vertically measuring optical distance sensor are operated independently of the tactile-optical sensor.

This means, for example, that the laterally measuring optical sensor and the vertically measuring optical distance sensor with the probe extension extended, that is to say a stored fiber receptacle, adjusting unit or holder, are used alternatively for measuring the workpiece surface.

• – Antastformelement und Werkstück werden relativ zueinander aufeinander zu bewegt, bis eine vordefinierte Auslenkung des Antastformelementes oder der Zielmarke erreicht wurde
• – Antastformelement und Werkstück werden relativ zueinander auf einer Bahn bewegt, wobei Antastformelement und Werkstück in Berührung bleiben, und wobei während der Bewegung zyklisch die Auslenkung des Antastformelementes und/oder der Zielmarke ermittelt wird
• – Antastformelement und Werkstück werden relativ zueinander voneinander weg bewegt, zumindest bis keine Auslenkung des Antastformelementes oder der Zielmarke mehr vorliegt
• – aus den mehreren ermittelten Auslenkungen und der dabei jeweils vorliegenden Lage des taktil-optischen Sensors in Bezug zum Werkstück, vorzugsweise anhand der Positionen der Messachsen eines Koordinatenmessgerätes bestimmt, werden die mehreren Messpunkte berechnet,

dass für die Bahn eine Sollbahn wie Spline festgelegt wird, die aus einer oder mehreren vorgegebenen Kurven im Raum gebildet wird, wobei die Kurven vorzugsweise ausgehend von bereits gemessenen Punkten und/oder einem Modell wie CAD-Modell des Werkstück und/oder aus geometrischen Grundformen wie beispielsweise Gerade, Geradenabschnitt, Kreis, Kreisabschnitt, Helixabschnitt festgelegt werden und die Bahn entweder der Sollbahn entspricht (ungeregeltes Scanning) oder der Sollbahn unter Berücksichtigung der Auslenkung des Antastformelementes und/oder der Zielmarke, vorzugsweise in zumindest zwei durch eine Scanning-Ebene definierten Koordinatenrichtungen, folgt (geregeltes Scanning), und dass während der Bewegung auf der Bahn die Auslenkung zwischen einem minimalen und einem maximalen Betrag um eine Sollauslenkung durch Bewegung entsprechender Koordinatenmessgeräteachsen geregelt wird, wobei vorzugsweise die Regelung senkrecht zu einer Scanning-Ebene oder in den zwei Raumrichtungen innerhalb der Scanning-Ebene oder in allen drei Raumrichtungen erfolgt.Inventive is also a method for determining geometric features or structures on a workpiece by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, preferably a vertically measuring optical distance sensor, and an at least partially flexurally elastic probe extension, wherein at least emanating from the probe extension: a Antastformelement which is deflected upon contact with the workpiece, and preferably at least one of the Antastformelement associated target, which is deflected when touching the Antastformelementes with the workpiece, the lateral deflection of the Antastformelements or the target perpendicular to the optical Axis of the laterally measuring optical sensor is determined with this, and preferably the vertical deflection of the sensing element or the target along or almost along the optical axis of the lateral m With the distance sensor it is determined that a stylus extension starting from a fiber receptacle directly or indirectly adjoining a flexurally elastic part is used, to which directly or indirectly adjoins the Antastformelement or optionally the target, which is at any existing target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic member is rigid that the probe extension is replaced manually or automatically, with the multiple measurement points , preferably offset from one another, are determined on the workpiece in the scanning mode by carrying out the following steps:

• - Antastformelement and workpiece are moved towards each other relative to each other until a predefined deflection of the probe form element or the target mark has been reached
• - Antastformelement and workpiece are moved relative to each other on a track, with Antastformelement and workpiece in contact, and wherein during the movement, the deflection of the Antastformelementes and / or the target is determined cyclically
• - Antastformelement and workpiece are moved away from each other relative to each other, at least until there is no deflection of the probe form element or the target more
• The plurality of measuring points are calculated from the plurality of deflections determined and the respective position of the tactile-optical sensor relative to the workpiece, preferably determined on the basis of the positions of the measuring axes of a coordinate measuring machine,

for the web, a desired path such as spline is formed, which is formed from one or more predetermined curves in space, the curves preferably starting from already measured points and / or a model such as CAD model of the workpiece and / or geometric basic forms such For example, straight line, straight line section, circle, circular section, helical section are determined and the path either the desired path corresponds (unregulated scanning) or the desired path, taking into account the deflection of the sensing element and / or the target, preferably in at least two coordinate directions defined by a scanning plane, follows (controlled scanning), and that during the movement on the path, the deflection between a minimum and a maximum amount is controlled by a desired displacement by moving corresponding coordinate measuring machine axes, preferably the control perpendicular to a scanning plane or in the two spatial directions inn takes place at the scanning level or in all three spatial directions.

• – Antastformelement und Werkstück werden relativ zueinander aufeinander zu bewegt, bis eine vordefinierte Auslenkung des Antastformelementes oder der Zielmarke erreicht wurde
• – Antastformelement und Werkstück werden relativ zueinander auf einer Bahn bewegt, wobei Antastformelement und Werkstück in Berührung bleiben, und wobei während der Bewegung zyklisch die Auslenkung des Antastformelementes und/oder der Zielmarke ermittelt wird
• – Antastformelement und Werkstück werden relativ zueinander voneinander weg bewegt, zumindest bis keine Auslenkung des Antastformelementes oder der Zielmarke mehr vorliegt
• – aus den mehreren ermittelten Auslenkungen und der dabei jeweils vorliegenden Lage des taktil-optischen Sensors in Bezug zum Werkstück, vorzugsweise anhand der Positionen der Messachsen eines Koordinatenmessgerätes bestimmt, werden die mehreren Messpunkte berechnet,

dass die Bahn festgelegt wird durch einen Startpunkt und einen Endpunkt, und vorzugsweise durch einen oder mehrere Zwischenpunkte, und vorzugsweise durch eine Startrichtung und/oder Scanning-Ebene, und dass zwischen den definierten Punkten die Bahn unter Berücksichtigung der Auslenkung des Antastformelementes und/oder der Zielmarke (geregeltes Scanning) durch die Lage der jeweils berührten Werkstückoberfläche bestimmt ist. dass während der Bewegung auf der Bahn die Auslenkung zwischen einem minimalen und einem maximalen Betrag um eine Sollauslenkung durch Bewegung entsprechender Koordinatenmessgeräteachsen geregelt wird, wobei vorzugsweise die Regelung senkrecht zu einer Scanning-Ebene oder in den zwei Raumrichtungen innerhalb der Scanning-Ebene oder in allen drei Raumrichtungen erfolgt, und dass bei der Regelung in den zwei Raumrichtungen innerhalb der Scanning-Ebene die Regelung in Richtung der Auslenkung, vorzugsweise in Richtung der in die Scanning-Ebene projizierten Auslenkung, und die Bewegung entlang der Bahn innerhalb der Scanning-Ebene rechtwinklig zur Auslenkung, vorzugsweise rechtwinklig zur in die Scanning-Ebene projizierten Auslenkung, erfolgt, wobei vorzugsweise der Richtungssinn der Bewegung so festgelegt wird, dass der kleinere Winkel zur bis dahin vorliegenden Bewegungsrichtung vorliegt.Likewise invented is a method for the determination of geometric features or structures on a workpiece by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, preferably a vertically measuring optical distance sensor, and an at least partially flexurally elastic probe extension, wherein at least emanating from the probe extension: a Antastformelement which is deflected upon contact with the workpiece, and preferably at least one of the Antastformelement associated target, which is deflected when touching the Antastformelementes with the workpiece, the lateral deflection of the Antastformelements or the target perpendicular to the optical Axis of the laterally measuring optical sensor is determined with this, and preferably the vertical deflection of the sensing element or the target along or almost along the optical axis of the late RAL measuring optical sensor is determined with the distance sensor, which is characterized in that a probe extension is used, which starts from a fiber receptacle, which directly or indirectly adjoins a flexurally elastic member to which directly or indirectly the Antastformelement or optionally the target adjoins, wherein at any existing target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic member is rigid that the probe extension is loaded manually or automatically, with the multiple measurement points, preferably offset from each other, are determined on the workpiece in the scanning mode, by following these steps:

• - Antastformelement and workpiece are moved towards each other relative to each other until a predefined deflection of the probe form element or the target mark has been reached
• - Antastformelement and workpiece are moved relative to each other on a track, with Antastformelement and workpiece in contact, and wherein during the movement, the deflection of the Antastformelementes and / or the target is determined cyclically
• - Antastformelement and workpiece are moved away from each other relative to each other, at least until there is no deflection of the probe form element or the target more
• The plurality of measuring points are calculated from the plurality of deflections determined and the respective position of the tactile-optical sensor relative to the workpiece, preferably determined on the basis of the positions of the measuring axes of a coordinate measuring machine,

in that the path is defined by a starting point and an end point, and preferably by one or more intermediate points, and preferably by a starting direction and / or scanning plane, and in that between the defined points the path is taken into account taking into account the deflection of the sensing element and / or Target mark (controlled scanning) is determined by the position of the respectively contacted workpiece surface. during movement on the track, the deflection between a minimum and a maximum amount is regulated by a desired deflection by moving corresponding coordinate measuring machine axes, preferably the control being perpendicular to a scanning plane or in the two spatial directions within the scanning plane or in all three directions Spaces takes place, and that in the control in the two spatial directions within the scanning plane, the control in the direction of the deflection, preferably in the direction of the deflection projected into the scanning plane, and the movement along the path within the scanning plane perpendicular to the deflection , Preferably at right angles to the projected in the scanning plane deflection, takes place, wherein preferably the sense of direction of the movement is set so that the smaller angle to the hitherto existing direction of movement is present.

Self-inventive is also a method for determining geometric features or structures on a workpiece by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, preferably a vertical measuring optical distance sensor, and an at least partially flexible key extension, wherein the probe extension at least emanating: a Antastformelement which is deflected upon contact with the workpiece, and preferably at least one of the Antastformelement associated target mark, which is deflected upon contact of the Antastformelementes with the workpiece wherein the lateral deflection of the detection element or the target mark perpendicular to the optical axis of the laterally measuring optical sensor is determined therewith, and preferably the vertical deflection of the sensing element or the target along or almost along the optical axis of the laterally measuring optical sensor with the distance sensor is determined in that it is distinguished by the fact that a stylus extension is used which starts from a fiber receptacle, which is adjoined, directly or indirectly, by a flexurally elastic part to which the probing member directly or indirectly adjoins ormelement or optionally adjoins the target mark, which is rigid at an optionally existing target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic part that extraction of the deflection signals from the images taken with the laterally measuring optical sensor images takes place by the position the pre-measured position and the respective position is determined by determining the contour of the Antastformelementes or the target in the image and determination of the center of gravity or the center of the Contour, or is determined by means of correlation methods, wherein the maximum correlation to a predetermined template of the mapping of the sensing element or the target mark is determined, the correlation in several different layers of the templ Ates is evaluated to the respective image, in particular, a cross-correlation is used, is preferably taken into account as an extended parameter that template and image were taken at different illumination especially brightness, template and / or image are normalized accordingly before determining the correlation.

• – eine Faseraufnahme verwendet, vorzugsweise eingewechselt, wird, die eine Tasterverlängerung enthält, die zwischen dem das Antastformelement enthaltenden Bereich und dem Bereich der Faseraufnahme eine entsprechend voreingestellte Biegung aufweist oder
• – eine Faseraufnahme verwendet, vorzugsweise eingewechselt, wird, die eine entsprechend ausgeführte Einspannstelle ausweist oder
• – die Mittel zur Justierung entsprechend eingestellt werden,

und dass das Antastformelement oder die Zielmarke im Scharfbereich des lateral messenden optischen Sensors angeordnet sind, vorzugsweise zur Messung der Rauheit auf einer Werkstückoberfläche.Eigenerfinderisch is also a method for determining geometric features or structures on a workpiece by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, preferably a vertically measuring optical distance sensor, and an at least partially flexurally elastic probe extension, wherein at least emanating from the probe extension: a Antastformelement which is deflected upon contact with the workpiece, and preferably at least one of the Antastformelement associated target, which is deflected when touching the Antastformelementes with the workpiece, the lateral deflection of the Antastformelements or the target perpendicular to the optical Axis of the laterally measuring optical sensor is determined with this, and preferably the vertical deflection of the probe element or the target along or almost along the optical axis of the latera L is determined measuring sensor with the distance sensor that is characterized in that a probe extension is used, which starts from a fiber receptacle, which directly or indirectly adjoins a flexurally elastic part, to which directly or indirectly the Antastformelement or optionally the target adjoins, which is optionally rigid target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic member that the containing the Antastformelement area of the probe extension relative to the optical axis of the laterally measuring optical sensor to an angle of 0 ° < α <15 ° is set by

• A fiber receptacle is used, preferably inlaid, containing a stylus extension which has a corresponding preset bend between the area containing the probing element and the area of the fiber receptacle
• - Used a fiber receptacle, preferably replaced, is that identifies a correspondingly executed clamping or
• - the means for adjustment are adjusted accordingly,

and that the probing element or the target mark are arranged in the sharp region of the laterally measuring optical sensor, preferably for measuring the roughness on a workpiece surface.

In a preferred embodiment, the invention provides that during a measurement, the brightness of the emitted from the sensing element or the target light from the camera of the image processing sensor and controlled by controlling the light source for illuminating the Antastformelementes or the target to a constant value is preferably, wherein the value is set in advance or is determined based on the first image taken for measurement with the image processing sensor.

By controlling the brightness in the image of the image processing sensor, it is ensured that the image of the detection element or the target used for evaluating the lateral deflection is reproducible in the so-called self-illumination mode. In particular, when deep immersion in a tight bore, there is at least slight shading, which are at least partially resolved. However, deviations in the brightness to a standard state, for example when calibrating the tactile-optical sensor, can also cause measurement deviations. If the value is thus determined in advance during calibration and then set in each measurement, ie regulated accordingly, constant light conditions are present and particularly reproducible accurate measurements possible.

• – Messungen bei Scanning-Verfahren, insbesondere die Möglichkeit zwischen Einzelpunktmessung und Scanning beliebig umzuschalten und auf vorgegebenen Bahnen oder frei (von einem Start- zu einem Endpunkt) zu Scannen und geregelt oder ungeregelt zu Scannen,
• – die einfache und reproduzierbare Justierung der Tasterverlängerung,
• – Messungen mit einstellbarer Neigung der Tasterverlängerung, insbesondere einmalig einstellbarer oder eingestellter Neigung und Verwendung zur Messung verschieden orientierter Flächen, beispielsweise zur Rauheitsmessungen, und hier für entsprechende Wechselschnittstellen, die eine reproduzierbare Lage und Neigung der Tasterverlängerung bei unterschiedlichen Neigungsrichtungen gewährleisten,
• – eine weitere Wechselschnittstelle, die eine zusätzliche Justierung unterschiedlicher Tasterverlängerungen erübrigt,
• – in austauschbaren Faserhaltern (Faseraufnahme) integrierte Lichtquellen zur Beleuchtung der Tasterverlängerung,
• – Messungen von Hinterschnitten und Hinterschnitten in beliebigen Orientierungen mit hoher Genauigkeit (ohne Verwendung von Dreh-Gelenken bzw. Dreh-/Schwenk-Gelenken),
• – die Realisierung eines exakt gleichbleibenden Abbildungsmaßstabs bei Auslenkung in Richtung der optischen Achse der zur optischen Erfassung der Auslenkung des Antastformelementes oder der Zielmarke der Tasterverlängerung eingesetzten Optik,
• – die Realisierung einer einstellbarer Genauigkeit für die Auslenkungsmessung
• – wahlweise große Messbereiche oder hohe Genauigkeiten für die Bestimmung der vertikalen Auslenkung,
• – einen großen Messbereich des vertikal messenden Sensors,
• – die Verwendung taktil-optischer Sensoren analog zu taktilen Sensoren,
• – die schnelle und genaue Bestimmung der lateralen Auslenkung des Antastformelements oder der Zielmarke bei schlechten Abbildungsbedingungen oder veränderter Beleuchtung,

die in einer oder möglichst wenigen unterschiedlichen Anordnungen zur Verfügung gestellt werden können.The invention thus proposes devices and methods for tactile-optical sensors which offer solutions for:

• - Measurements in scanning methods, in particular the possibility to switch between single point measurement and scanning as desired and to scan on predetermined paths or freely (from a start to an end point) and to scan regulated or unregulated,
• The simple and reproducible adjustment of the probe extension,
• - Measurements with adjustable inclination of the probe extension, in particular one-time adjustable or set inclination and use for measuring differently oriented surfaces, for example for roughness measurements, and here for corresponding change interfaces, which ensure a reproducible position and inclination of the probe extension at different inclination directions,
• A further change interface, which does not require an additional adjustment of different probe extensions,
• - integrated light sources in exchangeable fiber holders (fiber intake) for illuminating the probe extension,
• - Measurements of undercuts and undercuts in any orientation with high accuracy (without the use of rotary joints or pivoting joints),
• The realization of an exactly constant imaging scale when deflected in the direction of the optical axis of the optical system used for the optical detection of the deflection of the sensing element or the target of the probe extension optics,
• - The realization of an adjustable accuracy for the deflection measurement
• - either large measuring ranges or high accuracies for the determination of the vertical deflection,
• A large measuring range of the vertically measuring sensor,
• The use of tactile-optical sensors analogous to tactile sensors,
• The rapid and accurate determination of the lateral deflection of the probe element or the target under poor imaging conditions or altered illumination,

which can be provided in one or as few different arrangements as possible.

An independent invention has for its object to provide a method for producing the probe extension including the Antastformelementes and optionally the target, with a predetermined diameter, at least in the workpiece supplied area of the probe extension, and optionally a predetermined shape such as bending for the probe extension and a predetermined diameter for Antastformelement and optionally target mark can be realized with high accuracy to use the probe extension for accurate measurements of geometric features or structures on a workpiece with a tactile-optical sensor used in a coordinate measuring machine.

The invention therefore also relates to a method for producing a stylus extension, a probing element emanating from the stylus extension and preferably a target, for a tactile-optical sensor for use in a coordinate measuring machine for measuring geometric features or structures on a workpiece.

In an independent solution, the invention provides that of one or more pieces of fiber, preferably glass fiber pieces, under the influence of heat, preferably by laser, arc or heating wire, by drawing a diameter taper of the probe extension and by melting, and preferably taking advantage of cohesion, or gluing the Antastformelement and / or the target mark are generated.

The invention relates to a method for producing a probe extension to be independently protected, one of the probe extension outgoing Antastformelementes and preferably a target, for a tactile-optical sensor for use in a coordinate measuring machine for measuring geometric features or structures a workpiece, wherein the probe extension is at least a portion of a fiber, in particular an optical glass fiber or fiber piece such as glass fiber piece and is characterized in that at least a portion of the fiber portion under heat influence, such as laser, arc or heating wire, by pulling in his Diameter is tapered, and that the probe element and / or existing target mark this is produced by melting, and preferably taking advantage of cohesion, or gluing.

As a heat source, such is preferred, which generates high temperatures in the smallest possible local environment, as is possible for example by means of plasma or arc, a laser beam or a powerful heating wire. The areas of the glass fiber to be deformed are led to the heat source (for example during gluing or splicing, also called "splicing") or guided along it in a targeted manner (eg when reducing or pulling, also called "tapering") ) to melt them locally.

Preference is given to multi-layered fiber pieces, which consist of a glass core, in particular quartz glass core, a cladding located around it, therefore befindlicher silicone layer and turn around befindlicher plastic layer preferably made of ethylene tetraflourethylene such as Tefzel (registered trademark of DuPont). The cladding may also be made of glass or quartz glass and is then generally no longer separable from the quartz glass core, or of another material that can be solved by the quartz glass core. When pulling, only the existing layers of glass must remain, otherwise existing layers would burn. Accordingly, the region of the silicone layer and the plastic layer intended for pulling, and the cladding which does not consist of glass, are removed from the cladding. When pulled principle arises due to a taper of the diameter, which continuously decreases along the fiber. If the removal takes place at approximately constant rate, the preferred conical shape of the drawn fiber piece is formed. The drawn piece of fiber attaches to an untracked area of the probe extension. At the end facing away from the sensor, ie in the area to be immersed in the workpiece, the Antastformelement is attached or formed or generated. After pulling the fiber, in particular the extended area of tapered diameter is to be regarded as the flexurally elastic area of the probe extension. The non-drawn part bends virtually barely due to its larger diameter at deflection of the sensing element.

Another process is the cutting of an example drawn fiber, also called "cleaving". Alternatively, a tapered fiber is broken. The formation of a thickening on a pulled, so tapered and, for example, broken or cut end of the fiber is carried out by a special method by the fracture or interface is heated by an arc. Due to the surface tension of the molten glass, a spherical drop is formed, which represents the probe element or the target mark. In the second case, one or more separate pieces of fiber are glued to the target by gluing, so again local heating, at the opposite end of a Antastformelement is attached, in turn made with the previously described method of forming a thickening. As an alternative to thickening, a probing element can also be manufactured separately and adhered to the fiber end, again by local heating. The separate fiber piece with Antastformelement example, in the direction of the portion of the probe extension which adjoins the target, ie in the direction of the optical axis of the laterally measuring sensor, or in the changed direction, as already described. For example, several separate fiber pieces form a star shape.

Therefore, the idea is particularly preferred that the probing element or the target mark is produced by thickening the stylus extension during the melting process or separately produced Antastformelement or target is adhered to the diameter-tapered end of the probe extension.

An alternative production of the target is done by a thickening within the probe extension itself by this is compressed when heated.

In a particular embodiment, the invention therefore provides that within the diameter-tapered part of the probe extension, the target mark is generated by thickening the probe extension during the melting process, preferably by upsetting.

According to the invention, it is also provided that one or more separately produced pieces of fiber are glued to the target, which extend in the direction of the section of the button extension emanating from the target or in one or more changed directions, wherein the opposite end of the gluing or the fiber pieces emanating respectively one Antastformelement.

In the 2D sensor embodiment already described, the probe extension must be bent by about 90 °. To this end, the invention provides in a first embodiment, to use the gravity of the fiber itself and to guide the fiber defined at the heat source over. In order to produce a uniform radius, the fiber is then guided over a ceramic rod which descends in a defined movement. In this case, a horizontal movement is superimposed on a vertical movement. The movement of Faserabschnit - also called fiber piece - and support member such as ceramic rod are matched to each other, the distances traveled per unit time are correlated to each other, in particular in a constant ratio, which is one in particular. The rod-shaped support element extends in its longitudinal axis direction perpendicular to the direction of movement of the fiber section, ie in its longitudinal axis extending in the region of the support element.

Preferably, it is therefore provided that under heat influence and utilization of gravity, the probe extension is bent, preferably by 90 ° or by 85 ° to 95 °, the probe extension is guided by means of a feed movement of the heat source, preferably the bend is performed with a constant radius, in that the fiber piece is supported by the heat source via a support rod such as a cylindrical ceramic rod which exerts at least one vertical, preferably at least temporarily superimposed vertical and horizontal movement during the advancing movement, wherein in particular advancing movement of the probe extension and movement of the support rod in a correlated ratio, preferably constant Ratio, are coordinated.

In a second embodiment of the invention, the bend is generated by not the plastic itself is plastically deformed, but the rigid sleeve, so for example, the above-mentioned metal tube or generally a hollow cylinder. The piece of fiber is then introduced into its unstretched area in the metal tube, for example inserted. It follows the shape of the previously bent by about 90 ° tube. The drawn portion of the piece of fiber remains outside the tube. In the undrawn area, it is preferable not to remove the plastic layer and silicone layer, otherwise the fiber might break during insertion and deflection in the tube. It is preferably provided that the tube extends into the fiber holder after the bending point. Antastformelementseitig protrudes the non-drawn Area out of the tube, for example, a few millimeters, for example, 1 mm to 10 mm, in special forms to 50 mm or to 100 mm, before the drawn area begins. At the antastformelementseitigen exit point of the non-drawn portion of the tube this is glued to the tube.

In a particular embodiment, the invention therefore provides that the probe extension is at least partially introduced into the interior of a hollow cylinder, wherein the hollow cylinder has a bend of 85 ° to 95 °, preferably 90 °, wherein within the hollow cylinder preferably only not drawn areas of Probe extension run and preferably glued to the Antastformelement facing exit point of the probe extension from the hollow cylinder probe extension and hollow cylinder.

In the case of the 3D sensor, according to the invention, a target mark associated with the distance sensor, such as a reflector, is attached to the end of the probe extension facing away from the probe form element. This is preferably done by gluing, in particular under the influence of heat. The remote from the Antastformelement end of the probe extension is not drawn.

Particularly noteworthy is the idea that multi-layered fiber pieces are used, preferably a glass core, preferably quartz glass core cladding, preferably quartz glass cladding, and at least partially a silicone layer and a plastic layer preferably of ethylene tetraflourethylene such as Tefzel (registered trademark of DuPont) , and preferably only glass-made areas are subjected to the influence of heat.

In order to carry out the above-described manufacturing methods with high accuracy, the invention provides to work computer-controlled. In particular feed movement and alignment of the fiber can thus be done very quickly and accurately. The alignment is needed, for example, when gluing. Even when pulling and cutting the fiber, a defined orientation of the fiber is necessary. These processes are also monitored optically, by means of camera or image processing sensor and regulated accordingly. Before bonding takes place according to the invention a cleaning by means of plasma.

According to a preferred solution, the invention provides that the melting process, drawing process and gluing process, and preferably advancing movement, cutting process and operation for cleaning the fiber ends by means of plasma, run computer controlled, preferably before gluing computer-controlled translational and rotational alignment of the ends to be glued at least in the two perpendicular to the fiber direction directions and preferably takes place in the two tilting directions about these two vertical directions.

It can also be characteristic that the production of the stylus extension is monitored by means of a camera, preferably an image processing sensor, and / or is regulated by means of the camera, preferably signals generated by an image processing sensor.

After an independent protection enjoying idea also a method for producing a probe extension for a tactile-optical sensor is provided, wherein the probe extension is provided for receiving in a fiber receptacle, wherein the method is characterized in that at the end facing away from the Antastformelement the probe extension on the outside of the probe extension, preferably outside of the probe extension receiving hollow cylinder, a region-wise flat flattening is formed.

Particularly preferred is the idea that the normal direction of the flattening is parallel to the direction of extending parallel or along the optical axis portion of the probe extension, and that the hollow cylinder is bent by 90 °, preferably the bending takes place in a device in which the hollow cylinder with its flattening on a contact surface is applied and the bending direction is aligned with the normal of the contact surface.

The subject of an independent invention is also an apparatus and a method for using a tactile-optical sensor for measuring surface points on a workpiece.

In particular, the independent invention relates to a method and an apparatus for determining geometric features or structures on a workpiece by means of a tactile-optical sensor containing a holder for an at least partially flexible elastic probe extension, wherein at least emanating from the probe extension: a Antastformelement which is deflected on contact with the workpiece, and the Antastformelement associated first target mark which is deflected when touching the Antastformelementes with the workpiece and their deflection, preferably lateral deflection, with a first laterally measuring optical Sensor, preferably image processing sensor, can be determined,

Tactile-optical sensors are described in the following publications of the applicant.

The EP 0988505 describes a method and an apparatus in which a key element (first target mark) and possibly another target mark emanate from a stylus extension via a flexurally elastic shaft, the coordinates of which are determined by deflection by means of an optical sensor.

Of the EP 1 071 921 A similar sensor can be seen in which the contact force is adjusted via the stiffness of the flexible elastic shaft by only the bending length l is varied.

In the EP 1 082 581 For an appropriate sensor, an opto-mechanical interface with an adjusting device will be described.

The DE 198 24 107 describes the use of a corresponding sensor for a stylus method.

In the DE 10 2004 022 314 a corresponding sensor is operated on a rotary or swivel joint.

The DE 10 2010 060 833 Finally, describes a tactile-optical sensor, in which in addition to the determination of the position of a Antastformelementes or at least one associated therewith target in the X and / or Y-direction of the coordinate measuring machine with a first sensor and a determination in the Z-direction with a second sensor takes place, wherein for fastening the Antastformelementes and the targets in a holder at least one flexible connecting element is used, which is penetrated by the beam path of the first sensor in the beam direction, wherein the at least one flexible connecting element is transparent and / or greatly defocused with respect to the first sensor is arranged.

The disclosure of all of the aforementioned documents of the Applicant is fully incorporated by reference.

Object of the present invention is to realize an accurate measurement for features that only with a relatively long and thin stylus or a so-called stylus extension, preferably with a length of more than five millimeters and a diameter smaller than 0.5 mm , are to be ensured, with little probing forces to protect the workpiece from damage must be ensured and preferably also very small dimensions for the Antastform used Antastformelement in the range of less than 0.5 mm in diameter to be achieved, for example, to ensure a high structural resolution or Measurement of hard-to-access features such as small diameter bobs. In this case, the stylus or the stylus extension can run in the direction of the optical axis of the measuring system used for measuring the deflection of the probe form element or a target mark associated therewith, or can additionally project laterally (L button). Likewise, several lateral projections in different directions and lengths (star button), with large lengths of several millimeters to a few centimeters in length should be feasible.

To solve corresponding problems, it is necessary to attach the Antastformelement to a long button extension. If the probing element then dives very far into the workpiece, for example into a hole, the image on the optically laterally measuring image processing sensor is partially shaded by the workpiece, which results in measurement deviations. To improve the beats EP 0 988 505 Therefore, before to integrate an additional target above the Antastformelementes in the probe extension, which is always away from the workpiece, so for example slightly above a hole remains. This can then be detected undisturbed by the image processing sensor. However, the disadvantage is that the stylus extension is made of one piece, whereby the entire stylus extension has to be very thin, and in most cases less than 0.5 mm in diameter, in order to realize a low probing force (and associated low risk of damaging the workpiece). and is designed for example as a glass or plastic fiber. This results in the probing to the bending of the probe extension, whereby only one with the length of the probe extension increasingly lower proportion of Deflection of Antastformelementes is transferred to the target. As a result, the sensitivity of the overall system decreases, the signal-to-noise ratio is thus lower, the greater the distance between the probe form element and target is designed. Nor can this problem be remedied by choosing larger diameters for the stylus extension, otherwise it will no longer be possible to measure in holes with a very small diameter, such as spray holes of injection nozzles. In addition, very small diameter for the probe extension in conjunction with the selected material to a low rigidity and thus lead to so-called Schaftantastungen where the shaft touches the workpiece, resulting in erroneous measurement results.

At least aspects of these objects are achieved, in essence, by an apparatus and method using a tactile-optical sensor having a stylus extension with a first region of high stiffness, e.g. B. a first modulus of elasticity and a second region with lower stiffness z. B. a second modulus of elasticity, wherein optionally the first modulus of elasticity is greater than the second modulus of elasticity. This results in appropriate dimensioning favorable conditions in the transmission of the deflection of the Antastformelementes on the detected with the measuring system or sensor or more measuring systems or sensors deflection of the target mark or targets, and then when the first region of higher stiffness between the Antastformelement and the or the target marks is arranged. The second region of lesser rigidity at least partially extends between the attachment or retention of the probe extension on the tactile-optical sensor and thus on the measuring device, for. As coordinate measuring machine, and the or one of the targets or the connection between the probe form element and target or the connection between the plurality of targets, whereby a small probing force is realized.

The second region of lesser rigidity begins at the holder or near the holder and ends in a first preferred inventive solution directly to the first target or one of the plurality of targets, if any. If there are a plurality of target marks, the second region ends, in particular, after the target mark closest to the holder.

In an alternative solution according to the invention, the second region ends at the connection between the target mark and the probe form element or connection between the multiple target marks, that is to say at the first region of higher rigidity.

The first region of higher rigidity can thus also extend between the multiple target marks. There are therefore provided according to the invention also several targets. A second target mark is provided for detection by a second measuring system, in particular a distance sensor, provided that the deflection of the second target vertically, hereinafter referred to as vertical deflection, for the deflection of the first target, hereinafter referred to as lateral deflection detected. The first region of higher rigidity then extends between the probe-shaping element and the first target mark and the first and second or possibly further target marks. This ensures that the deflection of the sensing element is transmitted as completely as possible to all used targets.

As an extension of this idea, it is also envisaged to realize the dimensioning of the first region such that only one component of the deflection of the sensing element, for example the vertical deflection, is transmitted as completely as possible to a specific target mark, for example the second target mark. Generally speaking, the component should be transmitted as completely as possible to the respective target mark, which is determined by the measuring system assigned to the corresponding target mark.

A for fixing the Antastformelementes and optionally at least one associated therewith target in a holder is, for example, according to the DE 10 2010 060 833 at least one flexible connecting element used, which is penetrated by the beam path of the first sensor in the beam direction and wherein at least one flexible connecting element is transparent and / or is arranged in a highly defocused relation to the first measuring system or the first sensor. In the context of the present invention, these flexible connecting elements are to be regarded as part of the probe extension and, according to the invention, preferably represent the part or a part of the second region of lower rigidity.

in der F die Antastkraft und E der Elastizitätsmodul, l die wirksame Länge und I das axiale Flächenmoment (bzw. Trägheitsmoment) des jeweils betrachteten Bereichs der Tasterverlängerung und f die Auslenkung des Antastformelementes sind, die Parameter E, l und I, vorzugsweise der Elastizitätsmodul E beispielsweise über die Auswahl unterschiedlicher Materialien für die beiden Bereiche, entsprechend angepasst werden, dass bei einwirkender Antastkraft, also Berührung des Werkstücks durch das Antastformelement, eine Verformung nahezu vermieden wird, vorzugsweise auf einen Wert von maximal 10%, besonders bevorzugt maximal 1% begrenzt wird.As a region of higher rigidity, in particular a region is understood, which is dimensioned in such a way compared to the region of lower rigidity, wherein according to the formula of EP 1 071 921 B1 :

in the F the contact force and E the modulus of elasticity, l the effective length and I the axial area moment (or moment of inertia) of each considered area of the probe extension and f are the deflection of the Antastformelementes, the parameters E, l and I, preferably the modulus of elasticity E. For example, on the selection of different materials for the two areas, be adjusted accordingly that deformation is almost avoided when acting contact force, so touching the workpiece by the Antastformelement deformation, preferably to a maximum value of 10%, more preferably limited to 1% ,

The invention thus relates to a device for determining geometric features or structures on a workpiece by means of a tactile-optical sensor containing a holder for an at least partially flexible elastic probe extension, wherein at least assume the probe extension: a Antastformelement that touch can be deflected with the workpiece, and a Antastformelement associated with the first target mark, which is deflected when touching the Antastformelementes with the workpiece and the deflection, preferably lateral deflection, with a first laterally measuring optical sensor, preferably image processing sensor, can be determined.

To achieve the object of the invention, it is provided that the probe extension in a first region, which is arranged at least between the Antastformelement and the first target, has a higher rigidity, as in a second region, between the holder and the first target or between the Bracket and the first area is arranged.

The invention also relates to a device for determining geometric features or structures on a workpiece by means of a tactile-optical sensor, the first and preferably additionally a second target emanating from the at least partially flexible elastic probe extension, wherein the first and in the presence of the second target mark these are assigned to the Antastformelement and are deflected when touching the Antastformelementes with the workpiece and the deflection of the first and in the presence of the second target this perpendicular or nearly perpendicular to the detected with the first optical sensor deflection of the first target, with a second optical sensor , Preferably optical distance sensor, can be determined and is characterized in that the first region of higher stiffness angeord between the Antastformelement and the first target and in the presence of the second target between the first and second target is net and in the presence of the second target mark the second region of low rigidity between the holder and the region between the first and second target mark is arranged.

In a first preferred embodiment, the invention additionally provides that the first and preferably additionally a second target emanating from the at least partially flexible elastic probe extension, the first and preferably additionally the second target associated with the Antastformelement and deflected upon contact of the Antastformelementes with the workpiece and the deflection of the first or preferably second target mark is perpendicular or nearly perpendicular to the deflection of the first target detected by the first optical sensor, with a second optical sensor, preferably optical distance sensor, can be determined, wherein the first region of higher stiffness between the sensing element and the first target and, if there is a second target, between the first and second target and, if there is a second target, preferably the second region of low rigidity between the support and the region between the first and second target marks.

Particularly noteworthy is the idea that for fixing the Antastformelementes and the first and possibly second target on a holder at least a portion of the probe extension are formed as one or more flexible connecting elements, which are penetrated by the beam path of the first sensor in the beam direction and that at least one flexible connection element is transparent and / or is arranged in a highly defocused manner with respect to the first sensor.

According to a particularly preferred solution, the invention provides that the first region has a greater modulus of elasticity E than the second region, for example by correspondingly different choice of material or hardening of the first region.

It is therefore also characteristic that the first region consists of at least one of the materials steel, diamond, graphene or tungsten and / or the second region of a material with a lower elastic modulus such as glass, glass fiber, plastic or plastic fiber such as polyethylene, polypropylene, polyvinyl chloride or polyethylene terephthalate.

In a second preferred embodiment, the invention provides that the first region has a larger surface moment I, preferably greater thickness, and / or shorter length l than the second region.

In an embodiment, the invention provides that the Antastformelement is spherical or nearly spherical or disc-shaped at the object end of the probe extension and the first target spherical or spherical or nearly spherical or ellipsoidal or cylindrical or rectangular or almost rectangular or disc-shaped or almost disc-shaped or thickened the button extension is executed.

Preferably, it is provided that the probe extension is divided into several individual parts, in particular in the first and second region, and the items are connected to each other and / or with the first and / or second target and / or the Antastformelement by gluing or welding or splicing and / or by splicing or forming units.

Particularly noteworthy is the idea that the probe extension L-shaped or star-shaped, with each star end is a Antastformelement.

In an embodiment, the invention provides that the tactile-optical sensor is integrated as a sensor in a coordinate measuring machine, preferably multi-sensor coordinate measuring device together with other sensors.

The present invention also relates to a method for determining geometric features or structures on a workpiece by means of the tactile-optical sensor according to the invention.

Furthermore, the inventive method is characterized in that the tactile-optical sensor in a coordinate measuring machine, preferably multi-sensor coordinate measuring machine is used together with other sensors.

An independent invention relates to a device and to a method for the tactile-optical measurement of geometric features or structures on a workpiece.

An independent invention also relates to the coating of a tactile-optical sensor for measuring geometric features or structures on workpieces, wherein an improved coating is used.

In particular, the independent invention relates to a method and an apparatus for determining geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of an at least partially flexible elastic probe extension, at least assume the probe extension: a Antastformelement, which can be deflected in contact with the workpiece, and a the targeting element associated target mark, which is deflected when touching the Antastformelementes with the workpiece and their lateral deflection, perpendicular to the optical axis of a laterally measuring optical sensor, with the optical sensor, preferably image processing sensor determined Tactile optical sensors are described in the applicant's following works.

The EP 0 988 505 describes a method and an apparatus in which a probe extension (first target mark) and possibly another target mark originate from a stylus extension via a flexurally elastic sheep whose coordinates are determined by deflection by means of an optical sensor.

Of the EP 1 071 921 A similar sensor can be seen in which the contact force is adjusted via the stiffness of the flexible elastic shaft by only the bending length l is varied.

In the EP 1 082 581 For an appropriate sensor, an opto-mechanical interface with an adjusting device will be described.

The DE 198 24 107 describes the use of a corresponding sensor for a stylus method.

In the DE 10 2004 022 314 a corresponding sensor is operated on a rotary or swivel joint.

The DE 10 2010 060 833 describes a tactile-optical sensor in which in addition to the determination of the position of a Antastformelementes or at least one associated therewith target in the X and / or Y-direction of the coordinate measuring machine with a first sensor and a determination in the Z-direction with a second sensor , Wherein attachment of the Antastformelementes and the targets in a holder at least one flexible connecting element is used, which is penetrated by the beam path of the first sensor in the beam direction, wherein the at least one flexible connecting element is transparent and / or arranged with great defocus with respect to the first sensor becomes.

The PCT / EP01 / 010826 Finally, inter alia, describes the coating of the probe element or the probe extension on the side facing away from the sensor to a luminous mark in the interior of the probe element by bundling the radiation reflected on the coating, which is introduced into the interior of the shaft of the probe element or the probe extension , to produce, whose position is measured, and a the probe associated brand, which is formed by a darkened portion of the luminous shaft of the probe element.

The disclosure of all of the aforementioned documents of the Applicant is fully incorporated by reference.

Object of the present invention is to realize a precise measurement for features that are difficult to access, especially in more than a millimeter depth in holes or similar wells of diameters below about 0.5 mm, and thus only using a the Antastformelement associated target, which emanates above the Antastformelementes from the shaft of the probe extension and hardly or preferably does not enter the recess and thus can be completely detected by the optical sensor can be measured with high accuracy and thereby improved illumination for the optical measurement of the deflection to achieve the target.

Previously known devices and methods have the problem that the target appears only with low brightness in the optical sensor. However, coating the side of the mark or target mark facing away from the sensor by the means of the prior art improves this problem, sufficient brightness, in particular with long stylus lengths or stylus extension lengths and thus a large distance between the optical sensor and the target, can not be ensured according to experience be because large parts of the light introduced into the shaft pass through the target and can leave the probe element or the probe extension through the uncoated shaft and the uncoated Antastformelement. In addition, due to this radiation leaving the probe element or the probe extension, disturbing reflections may occur due to light components reflected or scattered on the workpiece, which may falsify the measurement.

To solve corresponding problems, it is necessary to increase the proportion of the introduced into the probe element or the probe extension light that is available for the evaluation, significantly.

At least aspects of these objects are essentially provided by a device for determining geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of an at least partially flexurally elastic probe extension, wherein the probe extension is at least emanating: a probe element that is at Contact with the workpiece can be deflected, and a the Antastformelement associated target mark, which is deflected when touching the Antastformelementes with the workpiece and their lateral deflection, perpendicular to the optical axis of a laterally measuring optical sensor, with the optical sensor, preferably image processing sensor, can be determined, solved, in which the side facing away from the optical sensor side of the target is at least partially provided with a reflective or fluorescent layer and wherein the extending between target and Antastformelement area of the shaft of Tasterverl ngerung are at least partially and / or the scanning element at least partially provided with a reflecting or fluorescent layer.

As an extension of this idea, a device is provided that the region of the shaft of the probe extension running between the target mark and the probe-forming element is completely complete and the probe-shaped element is completely provided with a reflective or fluorescent layer.

According to a particularly preferred solution, the invention provides that the layer is a metal layer and is preferably covered with a surface-hard or abrasion-resistant protective layer, such as a silicon nitride layer, at least in its region in contact with the object.

It is also characteristic that the target mark is spherical or nearly spherical and is provided on the surface facing away from the optical sensor until or approximately to the equator with the reflective or fluorescent layer.

In an embodiment, the invention provides that the light emitted by the reflective or fluorescent layer generates an image associated with the target, preferably a spot formed by focusing on the optical sensor whose lateral deflection can be determined with the laterally measuring optical sensor.

In a further preferred embodiment, the invention provides that a second target emanates from the stylus extension, which can be detected by means of a second sensor, preferably a distance sensor.

Particularly noteworthy is the idea that the tactile-optical sensor in a coordinate measuring machine, preferably multi-sensor coordinate measuring device is integrated together with other sensors, preferably tactile, optical or computer tomographic sensors.

The present invention also relates to a method for determining geometric features or structures on a workpiece by means of the device according to the invention.

To solve the problem of the invention is therefore also a method for the determination of geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of an at least partially flexible elastic probe extension, at least assume the probe extension: a Antastformelement that at Contact with the workpiece can be deflected, and a the Antastformelement associated target mark, which is deflected when touching the Antastformelementes with the workpiece and their lateral deflection, perpendicular to the optical axis of a laterally measuring optical sensor, with the optical sensor, preferably image processing sensor is determined is provided, which is characterized in that by means of a device according to at least one of the preceding claims of at least a portion of the reflective or fluorescent layers emitted radiation abge on the laterally measuring optical sensor is formed and from the figure, the lateral deflection of the sensing element is determined.

In a first preferred embodiment, the invention additionally provides that the second, from the button extension outgoing target, from the second sensor, preferably distance sensor, is detected, preferably the measuring beam of the distance sensor is at least partially reflected at the second target.

Particularly noteworthy is the idea that the tactile-optical sensor integrated in a coordinate measuring machine, preferably multi-sensor coordinate measuring device together with other sensors, preferably tactile, optical or computer tomographic sensors, is used.

An independent invention relates to a method for the automatic determination of geometric features and / or contours on workpieces by means of a coordinate measuring machine.

The independent invention also relates to the automatic optical measurement of geometric features and / or contours on workpieces with an image processing sensor.

As features such as diameter, distances, angles, surface parameters such as shape and roughness or the like of geometric elements such as straight lines or straight sections, circles, circular arcs, surfaces, etc. are referred to. In particular, contours refer to edge courses, which are usually represented as a chain of points on straight lines, circles, circular arcs, free-form lines, etc. Characteristics as well as contours are assigned by evaluating the position of measured measuring points actual dimensions. This takes place, for example, after selection of the measuring points belonging to a feature or a contour. This selection is made, for example, by setting a measurement window within a captured image or composite images composed of several individual images by the operator or automatically by a measurement program. The images can already be preprocessed, for example by filters, or be present in a generalized representation which for example already contains the edges recognized in the images. Within the measuring window, already existing measuring points are selected or measuring points are determined by means of suitable image processing methods, preferably at object edges, graduations or the like.

In order to select the measuring window position to be assigned to a specific feature, it is necessary in the prior art to teach a corresponding measuring program in which the operator recognizes the feature from at least one recorded image and manually determines the measuring window position. Alternatively, the determination can also be carried out in advance on the basis of a CAD model of the workpiece by importing the CAD model into the measuring program. An automatic measurement without user intervention is still not possible because to measure the respective workpiece, the assignment of measurement program and thus pre-selected CAD model and the respective workpiece must be performed by the operator and also the orientation of the workpiece, ie position and rotation and possibly Mirroring, on the measuring table must be determined by measuring selected features (so-called flow measurement) and a workpiece coordinate system determined therefrom with respect to the CAD coordinate system and the coordinate systems must be fitted to each other so that the predetermined measurement window in the right place of the workpiece, ie the position of the respective feature are placed.

There are also methods in which features, in particular rule geometries are automatically recognized in the image, as for example in the EP 1319164 is described. Disadvantage is, however, that a link with the target data, which are present for example in the form of a technical drawing such as CAD drawing or a test plan and often also the characteristics associated tolerances is not given. However, this combination and the alignment of the coordinate systems of the workpiece and desired data are necessary in order to determine whether the setpoint data may be adhered to, taking into account the tolerances, or how large the deviations from the desired data or to the nominal dimensions or desired geometries of the features are. The fitting of measured data into nominal data is known under the terms Bestfit or Gaussfit. A fitting in consideration of the tolerances is in the EP 1157313 to which reference is made in its entirety.

The object of the present invention is to enable a simple and rapid measurement with as little user intervention as possible for a plurality of features on a workpiece randomly present from a set of known workpieces, the actual dimensions of the features and, if appropriate, also a statement about the compliance and / or the measure of the undershooting or exceeding with respect to specified tolerances or with respect to the desired geometry is to be specified.

The recognition of the features or contours to be measured should preferably be based on a predetermined setpoint geometry or multiple setpoint geometries, such as a CAD model or a technical drawing associated test plan or similar computer-readable representation such as file, this or an additional computer-readable representation such as file the Features associated with tolerances.

In order to solve corresponding tasks, it is necessary to automatically select the desired data associated with the respective workpiece, such as CAD model and tolerance data.

At least aspects of these tasks are essentially solved in that the selection of the desired data associated with the respective workpiece takes place automatically by comparing the image or overall image with previously determined images or overall images (templates) of the several candidate workpieces, preferably by means of correlation analysis , and selecting the target data associated with the predetermined image of the workpiece for which the closest match exists.

Automatic means that as little user intervention as possible should be carried out during the actual measurement of the workpiece. This means that the user merely places the workpiece on the measuring table and starts the measurement, wherein the placing and starting can also be done by a feed system such as robots. The start of a measurement means that any input means, such as a physical button or a button in a computer program, is operated by a mouse click or the like. Alternatively, it is also provided that the measurement starts automatically when the measuring device detects the presence of a workpiece, for example based on the increased mass of the measuring tables using a corresponding sensor such as force sensor or based on the change in permanently recorded images of the optical sensor. Automatically means further that after the start of the measurement, a further user intervention until the reading of the result of the measurement, ie the dimensions of the detected features or deviations from the nominal dimensions of the features, is not necessary, ie in particular no setting of measurement windows to select the measuring features and selecting the target data associated with the workpiece. The reading of the measured values can also be carried out only after an automatic further processing, for example the automatic export to a CAQ system or the like. Also characteristic of an automatic measurement is that in advance a measuring program by the user not specifically for the present workpiece must be created. Thus, a previously created measuring program is started, which is valid for all candidate workpieces. In this case, if appropriate, a plurality of measuring programs can exist, from which the user can select, wherein the measuring programs use, for example, different evaluation strategies or recognition algorithms, but can always be used independently of the present workpiece. As preparation for the automatic measurement, however, it is necessary to record and store the target data and all tolerances associated with the target data, as well as previously determined images or overall images (templates) of workpieces such as master parts, so that they can be used for the automatic measurement. The term of an automatic measurement used in the following therefore refers to the parts of the inventive method between the start of a measurement program after placing a workpiece on the measuring table of a measuring device and the reading of the measurement results, wherein the start of the measuring program without knowledge of the present workpiece or its Location is done.

The invention therefore relates to a method for the automatic determination of geometric features and / or contours on one of a plurality of workpieces eligible workpiece by means of an optical sensor, preferably image processing sensor, wherein by means of the optical sensor and one or more images of the workpiece recorded and If necessary, they are combined to form an overall image, from which features and / or contours are extracted from the image or overall image, a fit between the extracted features and / or contours and the desired geometries of the features and / or contours, the desired geometries being the target data associated with the respective workpiece and preferably taking into account the tolerances of the features and / or contours contained in these nominal data during the fitting, and wherein the actual dimensions and / or the deviations from the desired geometries for the features and / or contours are made available ground, wherein the selection of the target data associated with the respective workpiece is carried out automatically by comparing the image or overall image with predetermined images or total images (templates) of the several candidate workpieces, preferably by means of correlation analysis, and selecting the desired data associated with the predetermined image of the workpiece for which the greatest match exists.

Target data are all data describing the desired geometry of a workpiece. These are, for example, drawing data from technical drawings or CAD data in file form, which may also be in the form of inspection plans. The features described by the desired geometry in their geometry, ie their dimensions or dimensions are also usually assigned tolerances. These are thus also among the target data. Also according to the invention, the setpoint data may include previously recorded images of master parts, that is to say workpieces which at least approximately correspond to the desired geometry of the respective workpiece. These images are stored, for example, as so-called templates and are assigned to the further target data, in particular the tolerances, or vice versa, the tolerances are assigned to the templates.

It should therefore be emphasized that the target data are drawing data such as CAD data and preferably tolerances associated with the features and / or contours contained in the drawing data.

In a preferred embodiment, the invention provides that the tolerances associated with the desired geometry of the features and / or contours are taken into account when fitting individual features and / or contours, or several or all features and / or contours together, wherein the fit is such takes place that none of the tolerances is exceeded, wherein preferably the minimum underrun of the tolerances is maximum, or that when exceeding the tolerances, the maximum excess is minimal.

The corresponding requirements for maximum undershooting or minimum exceeding of the tolerance limits are fulfilled by optimization methods known from the prior art. First, a distinction is made as to whether a fit of all features and / or contours, in particular those associated measuring points, can be completely fitted into the zones given by the tolerances around the desired geometries. If this is the case, the adaptation is carried out in such a way that the deviations from the tolerance limits, ie the outer edges of the zones, are maximized, ie the measuring points are adjusted so that they are as far away from the tolerance limits as possible. Maximum undershoot means that the distance between the point closest to the tolerance limits is as large as possible. This maximum criterion is the objective function of the optimization task, with the additional condition that the measurement points must all remain within the tolerance limits. For ideally present measurement data, which correspond exactly to the target data, the fit results in the measurement data and the target data being identical, ie the deviation of the value closest to the tolerance limits corresponds exactly to the value of the tolerance at this point. In the second case, a fit of all measuring points within the Tolerance zones are not possible, so at least one measuring point always lies outside the tolerance zones. This deviation should be minimal. If several measuring points lie outside the tolerance zones, the fitting should be such that the maximum deviation from the tolerance limits is minimized by means of the optimization task.

It is also characteristic that the deviations from the desired geometries provided as a result of the fitting contain information about the maintenance of the tolerances and / or the maximum and / or minimum undershooting and / or exceeding of the tolerances and / or desired geometries.

In order to select the appropriate target data for the present workpiece according to the invention, it is necessary to compare the recorded image or overall image with the templates of all pre-measured workpieces or master parts and to find the greatest match. Corresponding comparisons of the agreement can be carried out according to the invention by determining the correlation. In this case, the information present in the images, namely the gray values, in the case of a gray scale image, or the values of the intensities of the color channels, in the case of a color image, compared and determines the deviations. This is done for all templates and for different relative positions and rotations and, if necessary, mirroring of the nominal or actual image in order to detect the correct workpiece and also its position and rotation on the measuring table and, if necessary, whether the workpiece was placed upside down or Representation is distorted or scaled with a slightly wrong magnification. From the correlation coefficients determined for the several comparisons, the largest one is selected, for which the greatest match exists, and the correspondingly assigned nominal data are used for the further evaluation. Correlation analysis allows the operator to pre-limit degrees of freedom for faster comparison.

Particularly noteworthy is therefore the suggestion that the comparison of the image or overall image with the templates by means of correlation analysis, wherein realized as degrees of freedom in the correlation, a shift and / or rotation and / or mirroring and / or linear or nonlinear scaling or distortion of the image Preferably, the user can restrict degrees of freedom.

To create the templates, the invention provides z. Example, that images of master parts of the corresponding workpieces are recorded and stored and assigned to the desired data of each workpiece. In order to also take into account that different light settings may have been made during the actual measurement of the workpiece, preferably also templates are stored at different light settings. Alternatively, the templates can also be synthesized from the CAD data. Synthetic images can be generated, for example, by using the position of the edges, elevations, etc. from the target data and possibly a simulated incidence of light according to the respective illumination of the measuring device in order to calculate a theoretical, synthetic image. Again, different light settings can be used to create multiple templates.

According to a particularly preferred solution, the invention provides that the templates are prepared in advance from one or more measurements of master parts of the quantity of workpieces, or that the templates are synthetic images, determined from the CAD data of the amount of workpieces and preferably considering the in the measurement of the respective workpiece set type of light such as transmitted light, darkfield incident light or bright field incident light, and light intensity, and the templates are assigned to the target data of the respective workpiece.

In an embodiment, the invention provides that for each workpiece from the set of workpieces multiple templates are created, the parameters light type such as transmitted light, darkfield incident light or brightfield light and / or light intensity are varied and the comparison of the image or overall image with the templates at taken into account for the measurement of the respective workpiece.

After using the correlation analysis, the associated template and thus the relevant workpiece and its location have been identified, is now the comparison between the target and actual data so z. B. dimensions of the features. For this purpose, the features must be extracted from the recorded image or overall image. Since the desired position of the features is known from the target data, corresponding measurement windows can be set automatically in an image oriented to the template and thus also to the drawing data.

Preferably, it is therefore provided that, based on the position determined by means of the correlation analysis, in particular position, rotation and reflection, of the respective workpiece, a first at least rough fitting of the image or overall image of the workpiece to the template takes place.

Particularly noteworthy is the idea that for extracting the features and / or contours from the image or overall image automatically only the parts of the image or overall image, preferably by automatically setting windows, are taken into account, the location of the features and / or contours the desired data are assigned, wherein the assignment is based on the first at least coarse fit.

In an embodiment, the invention provides that a plurality of images of cutouts of the workpiece are recorded in different relative positions between the sensor and the workpiece and combined to form an overall image, wherein the relative positions determined by measuring axes are preferably taken into account during assembly and preferably a uniform pixel grid for the overall image by means of resampling is produced.

Corresponding methods are, for example, the DE 10341666 and the DE 10 2004 058 655 , but also the DE 10211760 to which reference is made in full.

In an independent, alternative solution according to the invention, the selection of the setpoint data associated with the respective workpiece takes place automatically by automatically extracting all the features and / or contours from the image or overall image and fitting them in all desired geometries of the several candidate workpieces, and selecting the desired data for which there is the greatest match in fitting, in particular least deviation from the desired geometries

This solution of the object according to the invention therefore uses known methods of automatic recognition of features and / or contours from unknown images. Subsequently, the images themselves are not compared with the templates, but the automatically recognized features or contours with the desired geometries known from the target data. This method is much more susceptible to misalignments, but faster for simple features.

The invention therefore also relates to a method for the automatic determination of geometric features and / or contours on a workpiece coming from a plurality of workpieces by means of an optical sensor, preferably an image processing sensor, wherein one or more images of the workpiece are recorded by means of the optical sensor and possibly to form an overall image, features and / or contours are extracted from the image or overall image, an adaptation between the extracted features and / or contours and the desired geometries of the features and / or contours takes place, the desired geometries being assigned to the respective workpiece Target data are taken and preferably the tolerances of the features and / or contours contained in these target data are taken into account during fitting, and wherein the actual dimensions and / or the deviations to the desired geometries for the features and / or contours available The selection of the desired data associated with each workpiece is automatically obtained by automatically extracting all the features and / or contours from the image or overall image and fitting them into all desired geometries of the plurality of candidate workpieces, and selecting the desired data for which greatest match in the fit, especially least deviation from the desired geometries, is present

Furthermore, the method according to the invention is characterized in that it is used in a coordinate measuring machine, preferably a multi-sensor coordinate measuring device, together with other sensors, such as tactile, optical, tactile-optical or computer tomographic sensors.

An independent invention relates to a device for dimensional measurement of geometric features and contours on workpieces with a multi-sensor system, at least consisting of an optical and a tactile sensor, the multi-sensor system is preferably used in a coordinate measuring machine.

In order to solve the widest possible variety of measurement tasks, different sensors are often combined in one device, for example a coordinate measuring machine. There are optical sensors, such as image processing sensors or optical distance sensors, tactile sensors such as probes or tactile-optical sensors, such as in the EP 0988505 or the DE 10 2010 060 833 described, for use. In most cases, the sensors are arranged side by side, for example on one or more sleeves of a coordinate measuring machine. As a result, the sensors have different measuring locations or operating points, ie an offset (sensor offset), ie they measure in the respective measuring position of the sleeve relative to the workpiece at different locations on the workpiece or at different locations in the measuring volume of a coordinate measuring machine. This is disadvantageous in that the measuring range that can be used in common by the sensors is limited and the measuring ranges of the devices may have to be larger, ie more expensive, designed.

The sensor offset must be measured before the measurement with the respective sensor to a fixed point, for example, the location of a reference sensor, and must be taken into account when combining the measurement results of different sensors in a coordinate system. The larger this offset, the greater the errors occur, for example, by mechanically or thermally induced strains or bends.

The aim is therefore always to integrate several sensors into each other so that they measure at approximately the same position, ie have common measuring points or operating points. In the alternative, there is already an advantage if the measuring locations are identical at least in two directions, preferably the horizontal, so that only the third vertical movement and measuring axis has to be designed correspondingly larger.

A corresponding integration of several sensors is according to the prior art for a plurality of optical sensors, for example multiple zoom levels of a zoom optics or alternatively usable, integrated into the optics laser distance sensor according to the Foucault principle (also known as TTL laser - Through the optic laser) or known for combination with a tactile-optical sensor. Also, a plurality of tactile sensors, in particular a plurality of styli or the respective probe system associated measuring systems for determining the Tasterauslenkung, interchangeable with each other can be arranged. In this case, interchangeable interfaces are mostly used, which allow an automated change with the aid of the axes of the coordinate measuring machine and storage in parking stations or a manual change by the operator. Corresponding interchangeable interfaces have, for example, magnetic connections and, in addition to the mechanical coupling, also provide detachable electrical or optical connections between the various sensor heads or button inserts and the measuring device.

However, a corresponding combination of optical sensors with the conventional tactile sensors, such as probes for coordinate measuring machines, such as those manufactured by Renishaw plc, for example, are not known.

The object of the present invention is to provide a multi-sensor system with which optical and tactile measurements can be performed with interchangeable sensors, the disadvantages of the prior art to be avoided.

To solve this task is u. a. provided that a multi-sensor system is designed so that a plurality of optical and tactile sensors can be arranged so that they have a nearly common measurement location or the measurement locations of the sensors are almost on a straight line through the imaging direction or the optical axis of the or the optical sensors is defined, which passes through the measuring location.

According to the invention, the various sensors can be integrated in such a way that the measuring location at which the sensors record the measured data of the workpiece is identical or nearly identical for as many sensors as possible, but at least different measuring locations on a straight line or the optical path lying in the imaging direction of the optical sensors Axis lie.

In the context of the present invention, an almost identical or almost common measuring location is understood to mean that the location at which the measurement is carried out is identical or at least almost identical, that is to say only a few millimeters, preferably less than 10 mm, particularly preferably a maximum of one millimeter. different from each other. In the case of surface-measuring optical sensors, such as image processing sensors, the measuring location is preferably the center of the areal measurement area, for example the center of the imaged sensor chip. For tactile sensors, the probe element center, that is, for example, the probe ball center, or the workpiece-facing extreme point, such as pole of the probe ball, describes the measurement location.

At least aspects of these tasks are thus essentially solved by a multi-sensor system for measuring geometric features and / or contours on a workpiece consisting of at least one optical and one tactile sensor, wherein at least some of the different sensor heads the sensors can be arranged interchangeably by the sensors are arranged so that they have an almost common measuring location or the measuring locations of the sensors are almost on a straight line, which is defined by the imaging direction or the optical axis of the optical sensor (s).

Of particular note is the idea that the replaceable sensor heads can be connected to the multisensor system via at least one changeover interface, preferably a magnetic changeover interface, detachably, preferably replaceable automatically via at least one parking station.

In a first preferred embodiment, the invention provides that the replaceable sensor heads can be connected to the multisensor system via a first changeover interface and a first parking station, or via a second changeover interface and a second parking station which is provided by one or more adapters can be arranged on the first exchange interface and exchangeable via the first parking station, wherein the adapter preferably includes a rotating or pivoting or rotating / swiveling device.

With the help of adapters, it is particularly easy to connect the different sensor heads of different tactile sensors. Examples of tactile sensors include TP200 touch probes and Renishaw plc's SP25 probing probes. A touch probe usually consists of a permanently installed base element and a replaceable probe head, which contains the measuring system and, in turn, changeable styli. The styli usually consists of a plate, the stylus and the tactile or probing element, or Taststiftanordnungen with multiple probing elements such as star probes. The styli are attached exchangeably to the measuring system via the plate. The second changeover interface on the adapters enables the changeover of the measuring system including the respective attached stylus, ie the probe. The adapter thus already contains the base element, and the second changeover interface is thus modeled on the already existing interfaces of the respective tactile sensor for the change of the measuring system. Alternatively, the measuring system can already be integrated in the adapter and the second changeover interface makes it possible to change the stylus. In contrast, the first changeover interface makes it possible to store the respective adapter and thus the entire probe system in order, for example, to load a tactile-optical sensor or an ancillary lens for a permanently integrated optical sensor or to measure it only with the optical sensor.

It is therefore also characteristic that the replaceable sensor heads contain tactile or tactile-optical feeler elements, in particular different styli and / or feeler styli such as star probes, wherein preferably the different tactile sensing elements containing sensor heads interchangeable with the second interface and with the help of the second parking station one of the adapters can be connected and the sensor heads containing the different tactile-optical feeler elements are interchangeably arranged via the first changeover interface and with the aid of the first parking station.

Particularly noteworthy is the idea that multiple optical sensors are formed by a zoom optics, preferably zoom optics with adjustable independently of the magnification working distance, and / or distance sensor integrated into the optics such as focus sensor or Foucault sensor or chromatic sensor, and / or one at the first Interchangeable interface can be arranged additional lens.

According to a particularly preferred solution, the invention provides that an optical sensor containing an optical sensor is firmly integrated in the multi-sensor system and the first changeover interface is arranged on the object side before and / or around the optics.

In an embodiment, the invention therefore provides that the multi-sensor system includes an integrated into the optics bright field illumination and / or arranged around the optics dark field illumination.

Preferably, it is provided that the multi-sensor system and / or the one or more parking stations in a coordinate measuring machine, preferably multi-sensor coordinate measuring device together with other sensors, such as tactile, optical, tactile-optical or computer tomographic sensors integrated.

It is also characteristic that the multi-sensor system, and preferably the coordinate measuring machine, is assigned a control device which, depending on the sensor used, automatically provides the previously measured sensor offset for the evaluation, preferably in a common coordinate system

The invention relates to a method for measuring geometric features on rotationally symmetrical workpieces. The invention also relates to a device for measuring geometric features of a particular rotatable symmetrical workpiece.

The measurement of tools which are mounted in a V-groove, in the DE 10 2013 102 335.5 and DE 10 2013 102 352.5 described. However, the tools usually present cutting ensure that it is not purely rotationally symmetrical workpieces. Therefore, these can not be completely measured with optical image processing sensors in transmitted light.

Object of the present invention is to measure rotationally symmetrical workpieces quickly with optical image processing sensors, preferably in transmitted light, with high accuracy. In particular, the outer edges are to be measured with high accuracy or geometrical features such as angle, length or distance of straight lines or straight line sections, location of intersections and diameter on the contour of the outer edge, preferably in different rotational positions.

To achieve the object, the invention provides that the rotationally symmetrical workpiece is rotated without tumble around its own axis of symmetry. For this purpose, this is preferably stored in a V-groove-shaped holder, that is pressed with a holding force in a V-shaped groove and a drive, for. B. friction drive such as friction wheel, rotated in this.

A particular feature of the invention is that the valve needles of injection nozzles are measured as rotationally symmetrical workpieces. These are particularly small tolerances for the geometric features, so that a highly accurate, especially tumble-free measurement must be realized.

In particular, the invention relates to a method for measuring geometric features on rotationally symmetrical workpieces, which is characterized in that the workpiece rotates about its axis of symmetry and preferably carried out measurements in several rotational positions and results determined from it are combined.

It is preferably provided that the workpiece is rotated without tumble around its axis of symmetry.

It should also be emphasized that a valve needle of an injection nozzle is used as the workpiece.

The invention is also characterized in that the measurement is carried out with at least one image processing sensor and preferably further geometrical features are carried out with tactile and / or tactile-optical and / or computer-tomographic sensors.

• – Geraden oder Geradenabschnitte und/oder
• – Winkel von Geradenabschnitten zueinander und/oder
• – Abstände und/oder Durchmesser von Merkmalen wie den Schnittpunkten jeweils zweier Geraden oder Geradenabschnitte und/oder
• – die Länge von Geraden oder Geradenabschnitten und/oder
• – der Radius von Abschnitten der Außenkontur und/oder
• – die Geradheit von Geraden oder Geradenabschnitten bestimmt wird bzw. werden.

Furthermore, it can be provided that for the determination of geometric features, preferably in transmitted light illumination, measuring points are recorded on the workpiece edge and from these measuring points

• - Straight or straight sections and / or
• - Angle of straight line sections to each other and / or
• - Distances and / or diameter of features such as the intersections of two straight lines or straight line sections and / or
• The length of straight lines or straight sections and / or
• - The radius of sections of the outer contour and / or
• The straightness of straight lines or straight sections is or will be determined.

Preferably, the invention proposes that for rotation of the workpiece about its own axis of symmetry, the workpiece is rotatably mounted in a V-groove-shaped holder, preferably is mounted on a shaft.

It can be used when using a transmitted light illumination, one that emits parallel or at least almost parallel light.

It is preferably provided that the V-groove-shaped holder and the image processing sensor are operated integrated in a coordinate measuring machine, preferably a multi-sensor coordinate measuring machine.

A device for measuring geometric features of a particular rotatable symmetrical workpiece is characterized in that the device comprises a workpiece receiving V-groove-shaped holder and a driven pressing the workpiece in the holder and rotating in this pressing element, which with a base element is connected, from which emanates a workpiece measuring optical sensor, or which is connected to a workpiece support, which is adjustable relative to a workpiece-measuring optical sensor.

It is provided in particular that the base element is arranged in a coordinate measuring machine.

An independent invention relates to a device and to a method for the tactile-optical measurement of geometric features or structures on a workpiece.

Also, an independent invention relates to the interferometric determination of the vertical deflection of a probe form element or a brand associated therewith, emanating from a flexurally elastic probe extension.

Tactile-optical sensors are described inter alia in the following documents of the applicant.

The EP 0988505 describes a method and an apparatus in which a key element (first target mark) and possibly another target mark emanate from a stylus extension via a flexurally elastic shaft, the coordinates of which are determined by deflection by means of an optical sensor.

Of the EP 1 071 921 A similar sensor can be seen in which the contact force is adjusted via the stiffness of the flexible elastic shaft by only the bending length l is varied.

In the EP 1 082 581 For an appropriate sensor, an opto-mechanical interface with an adjusting device will be described.

The DE 198 24 107 describes the use of a corresponding sensor for a stylus method.

In the DE 10 2004 022 314 a corresponding sensor is operated on a rotary or swivel joint.

The PCT / EP01 / 10826 describes inter alia the coating of the probe element or the probe extension on the side facing away from the sensor to a luminous mark in the interior of the probe element by bundling the radiation reflected at the coating, which is introduced into the interior of the shaft of the probe element or the probe extension to produce, whose position is measured, and a the probe associated brand, which is formed by a darkened portion of the luminous shaft of the probe element.

The DE 10 2010 060 833 describes a tactile-optical sensor, in addition to the determination of the position of a Antastformelementes or at least one associated therewith target in the X and / or Y-direction of the coordinate measuring machine with a first sensor such as image sensor and a determination in the Z-direction with a second Sensor as distance sensor is carried out, wherein for fastening the Antastformelementes and the targets in a holder at least one flexible connecting element is used, which is penetrated by the beam path of the first sensor in the beam direction, wherein the at least one flexible connecting element is transparent and / or with respect to the first Sensor is arranged strongly defocused. As in the Z direction (vertically extending direction), the deflection of the sensing element or at least one of this associated target mark detecting distance sensor and an interferometer, in particular an absolutely measuring heterodyne interferometer is proposed. In a preferred solution, the measuring radiation of the interferometer is coupled into the flexurally elastic probe extension (fiber). Details of the beam guidance, in particular of the reference beam path are not explained. Also, the beats DE 10 2010 060 833 For example, the measuring radiation of a distance sensor is reflected at a mark which is attached to the sensor-side end of the flexurally elastic extension. This creates the disadvantage that due to the deflection of the fiber, only a component of the vertical deflection, but not the complete deflection, is detected, the sensitivity is thus limited. The connection between the deflection of the probe form element and the detected measured value of the distance sensor must therefore be be measured. Measurement deviations occur due to the possibly direction-dependent behavior of this relationship, which can not be fully captured during calibration.

In another solution, for example, published in Andreas Ettemeyer: "New three-dimensional fiber probe for multisensor coordinate measurement", Opt. Eng. 51 (8), 081502 (May 14, 2012) . http://dx.doi.org/10.1117/1.OE.51.8.081502 , the direct interferometric measurement of the sensing element is proposed to improve the sensitivity. In this case, the measuring radiation (laser light) coupled into the fiber is emitted outward from the fiber by the detection element and superimposed with the reference beam (brought to interference) and the resulting interference pattern (speckle) is evaluated. Preferably, two radiation sources of different wavelength spectrum, in particular laser diodes with peak wavelengths of 635 nm and 675 nm are used in order to achieve an absolute measurement of the deflection or position of the detected probe form element or the detected target mark. In the illustrated preferred solution of the construction of the optical beam path of the interferometric sensor, which is coupled to the beam path of the image sensor used for determining the lateral deflection (X and Y direction), it is disadvantageous that the available amount of light due to the total of four optical divider is very low. In particular, the divider arranged directly before the coupling of the measuring radiation is passed through twice by this. The optical image of the image processing sensor passes through this optical splitter and is thereby reduced in the amount of light. Furthermore, it is disadvantageous that the superposition of the measurement and reference radiation takes place only after an imaging optics. Since the imaging optics are only passed through by the measuring beam, but not by the reference beam, different beam geometries are present, whereby the resulting interference is disturbed or at least not optimal. In addition, this results in a complex and also solid structure for the beam guidance of the reference beam. This structure requires a lot of space and is also susceptible to drifting phenomena, such as temperature changes. It should be noted that the optical path length of the reference beam must correspond to the superimposition of the measuring beam, the optical path length of the measuring beam, up to the coherence length of the radiation used, so that interference. Thus, particularly long probe extensions, for example, greater than 20 mm or even greater than 100 mm in length can be used to measure, for example, hard to reach areas of the workpiece, therefore, correspondingly large optical path lengths for the reference beam are provided. A disadvantage of the fixed structure of the reference beam path is also that this is not adaptable to different length probe extensions.

The disclosure of all of the aforementioned documents of the applicant and the aforementioned publication is fully incorporated by reference.

A basic object of the present invention is to avoid or at least to reduce the disadvantages of the prior art.

An object of the present invention is therefore, for example, to provide an improved arrangement for direct interferometric detection of the vertical deflection of a bending elastic extension emanating Antastformelementes, which in particular allows a compact design, even with large and variable lengths for the probe extension, due to the drifting phenomena the beam guidance of the measuring and reference beam are reduced and in which the amount of light available for the evaluation of the interferometric sensor (vertical Z-direction) and for the image processing sensor (lateral X and Y direction) is increased.

It is also an object of the invention to provide a method by which a more accurate measurement is possible, even with large or variable lengths for the probe extension, in particular the direct determination of the vertical deflection of the sensing element, and optionally also the determination of the deflection of the sensing element , From the second mentioned also other quantities such as the probing force or the direction of the probing force can be determined more accurately.

A first solution according to the invention of at least some of the tasks provides that a compact construction is achieved by the optical division of the radiation of the interferometric sensor into measurement and reference radiation by an optical splitter layer, for example a pellicle, ie one partially transparent from both sides and partially reflective film or mirror layer takes place, which is located directly above the side facing away from the workpiece side of the probe extension, so the probe extension side on the remote with respect to the probe or remote side. This divider layer is also used to deflect the reference beam reflected back from a reference mirror on the side of the probe extension facing away from the workpiece into the optical axis or parallel or inclined thereto, ie in the direction of the evaluation unit as the camera of the distance sensor. Thereby arises in comparison to the prior art, the advantage that the number of divider layers has been reduced. This increases the amount of light for the distance sensor and also for the optically laterally measuring sensor.

In addition, it can be provided that, in particular, the dimensions are kept low transversely to the optical axis of the inserted optically lateral measuring sensor by the reference radiation is deflected, for example, in the direction of the optical axis or obliquely to this, possibly also several times is deflected (folded). The corresponding deflection means such as mirrors together with the reference mirror form the reference beam path. This is particularly advantageous when large lengths for the probe extension to be achieved, whereby correspondingly long optical distances for the reference beam path are necessary.

• – parallel oder
• – geneigt oder
• – entlang der optischen Achse des lateral messenden Sensors

verläuft, wobei gegebenenfalls zwischen Teilerschicht und Referenzspiegel einer oder mehrere Reflektoren angeordnet sind, die zusammen mit dem Referenzspiegel einen Referenzstrahlengang bilden, wobei die Referenzstrahlung bevorzugt in eine Richtung parallel zur optischen Achse oder in eine Richtung geneigt zur optischen Achse des lateral messenden Sensors umlenkbar istAt least aspects of the tasks are thus essentially solved by a device for determining geometric features or structures on a workpiece, wherein the device at least consists of a laterally measuring optical sensor, preferably image processing sensor, a vertically measuring interferometric distance sensor, and an at least partially flexurally elastic Button extension, wherein from the button extension at least assume: a Antastformelement which is deflected in contact with the workpiece along with the probe extension, and preferably a target the touch element associated target, which is deflected when touching the Antastformelementes with the workpiece together with the probe extension, wherein the lateral deflection of the Antastformelements or the target, perpendicular to the optical axis of the laterally measuring optical sensor, can be determined with this, and the vertical deflection along or almost Entla ng the optical axis of the laterally measuring optical sensor can be determined with the distance sensor, wherein the measuring radiation of the interferometric distance sensor can be coupled into the probe extension and the Antastformelement or the associated target mark can be emitted and is superimposed with the reference radiation of the interferometric distance sensor and thereby resulting interference (Speckle) can be evaluated, and wherein the device is characterized in that the probe extension side on the remote with respect to the probe form element and the optical axis of the laterally measuring optical sensor, in particular spaced from the probe extension, an optical splitter layer is arranged, that the splitter layer is designed for the division of measurement radiation and reference radiation, that the divider layer deflects from a reference mirror back-reflected reference radiation in a direction which on the with respect to the Antastf ormelement facing away side

• - parallel or
• - inclined or
• Along the optical axis of the laterally measuring sensor

one or more reflectors are optionally arranged between divider layer and reference mirror, which form a reference beam path together with the reference mirror, wherein the reference radiation is preferably deflected in a direction parallel to the optical axis or in a direction inclined to the optical axis of the laterally measuring sensor

A second alternative solution according to the invention of at least some of the tasks provides that a compact structure is achieved by the optical division of the radiation of the interferometric sensor in measurement and reference radiation by an optical splitter layer, which also directly above the side facing away from the workpiece Probe extension, so the probe extension side on the remote with respect to the probe or remote side, is arranged, but laterally so far next to the optical axis of the optically lateral measuring sensor is arranged that it is outside the beam path of the optically lateral measuring sensor. The division thus takes place before entering the aperture of the image processing sensor whose beam path is not thereby divided by the splitter layer, whereby the available amount of light is increased. The division outside the optical axis, however, inevitably means that the measuring beam must be redirected once in the direction of the probe extension in order to be coupled on the side facing away from the workpiece in the probe extension. For this purpose, a deflection device is provided, which contains a first surface formed as a reflector, such as, for example, mirrors. Preferably, a second surface is present at this deflection device, which causes the deflection of the reference radiation, after it has passed through the reference beam, in the direction of the evaluation unit as camera of the distance sensor. The evaluation unit is preferably located on the side of the probe extension remote from the workpiece, in particular in the direction of the optical axis or parallel to the direction of the optical axis or inclined to the direction of the optical axis. A corresponding deflection is generally carried out by at least two reflectors. A first reflector is necessary in order to deflect the reference radiation extending after the division at the splitter layer in the direction of the optical axis after a travel distance set according to the length of the probe extension. The second or last reflector causes the deflection in the direction of the evaluation unit. Depending on the length of the probe extension, as in the case of the first solution according to the invention, further reflectors may be arranged in the reference beam path in order to fold it, ie to achieve long distances with a short installation space. This proves to be particularly advantageous if differently long probe extension should be made interchangeable with the reference arm. The reflectors in the reference beam path can be arranged in many possible variants, so that the reference radiation in one or more directions parallel to the optical axis or inclined to the optical axis. The reflectors are arranged, except for the last, preferably laterally next to the optical beam path of the optically laterally measuring sensor, so as not to disturb this beam path.

• – parallel oder
• – geneigt oder
• – entlang der optischen Achse des lateral messenden Sensors

verläuft, wobei vorzugsweise der zuletzt wirkende Reflektor an einer zweiten Fläche der Umlenkeinrichtung vorgesehen ist, und wobei vorzugsweise die Referenzstrahlung zwischen den zumindest zwei Reflektoren in einer oder mehreren Richtungen parallel zur optischen Achse oder geneigt zur optischen Achse des lateral messenden Sensors verläuft.At least aspects of the tasks are thus essentially also solved by a device for determining geometric features or structures on a workpiece, wherein the device at least consists of a laterally measuring optical sensor, preferably image processing sensor, a vertically measuring interferometric distance sensor, and at least partially bending elastic probe extension, wherein from the probe extension at least emanating: a Antastformelement which is deflected in contact with the workpiece together with the probe extension, and preferably a the dummy element associated target, which is deflected when touching the Antastformelementes with the workpiece together with the probe extension, wherein the lateral deflection of the Antastformelements or the target, perpendicular to the optical axis of the laterally measuring optical sensor, can be determined with this, and the vertical deflection along od it can be determined almost along the optical axis of the laterally measuring optical sensor with the distance sensor, wherein the measuring radiation of the interferometric distance sensor can be coupled into the probe extension and can be emitted by the probe element or the associated target and can be superimposed with the reference radiation of the interferometric distance sensor and thereby resulting interferences ( Speckle) are evaluated, and wherein the device is characterized in that the probe extension side on the remote with respect to the Antastformelement side adjacent to the beam path of the laterally measuring optical sensor, an optical splitter layer is arranged, that the splitter layer is formed for splitting measurement radiation and reference radiation in that the measuring radiation after passing through the splitter layer is deflectable in the direction of the probe extension by means of a reflector present on a first surface of a deflection device, and d in that the reference radiation can be deflected by means of at least two reflectors to form at least a part of the reference beam path in a direction which is on the side facing away from the scanning element

• - parallel or
• - inclined or
• Along the optical axis of the laterally measuring sensor

extends, wherein preferably the last-acting reflector is provided on a second surface of the deflecting device, and wherein preferably the reference radiation between the at least two reflectors in one or more directions parallel to the optical axis or inclined to the optical axis of the laterally measuring sensor.

In an embodiment, the invention also provides that the plurality of reflectors for deflecting the reference radiation, with the exception of the last-acting reflector or the splitter layer, are arranged adjacent or laterally next to the optical beam path of the optically laterally measuring sensor.

In extension of these ideas, a device is provided in which on the side facing away from the Antastformelement the probe extension designed as a reflector target mark is mounted and the vertical deflection of the target with the beam path of a further distance sensor such as Foucault laser sensor or focus sensor can be detected, preferably by the Last acting reflector or the divider layer is formed such that not the entire aperture of the beam path of the further distance sensor is covered.

In this case, therefore, the measuring radiation associated with the further distance sensor extends laterally around the divider layer or laterally around the deflection device, which contains the last traversed reflector, ie is not completely shaded. By this construction, it is possible to additionally measure the deflection of the Antastformelementes indirectly. From the comparison with the deflection measured by the interferometric sensor, the deflection of the probe extension and possibly the contact force can be assessed or the further distance sensor can be measured.

According to a particularly preferred solution, the invention provides that the interferometric distance sensor has one or more radiation sources whose radiation is coupled perpendicular or nearly perpendicular to the optical beam path in the direction of the optical splitter layer, preferably the guidance of the radiation between the radiation source and coupling by means of optical fibers.

The radiation sources can be constructed spatially separated, wherein preferably optical fiber or optical waveguide are used, or close to the optical divider and form at least this one unit, which is interchangeable, for example. In the second case, only the signals for electrical control must be transmitted to the unit from the outside.

It is also characteristic that the interferometric distance sensor has two radiation sources of different wavelength spectrum, wherein the radiation sources are preferably laser diodes.

As a result, the known in the prior art absolutely measuring heterodyne are applicable.

In a further preferred embodiment, the invention provides that at least one or the reference beam generating reflectors, the splitter layer and the probe extension, and optionally the reference mirror, form a unit or are arranged in a device such as housing or holder to form a unit, the manually and / or automatically interchangeable via an exchange interface, preferably magnetic exchange interface, directly or indirectly connected to the laterally measuring optical sensor, preferably with a laterally measuring optical sensor associated optics, wherein preferably the changeover interface additionally a coupling point for the supply of radiation the interferometric distance sensor or a coupling point for the electrical control of integrated in the unit has one or more radiation sources of the interferometric distance sensor.

As a result, it is possible with particularly simple means to use different probe extensions, in particular probe extensions of different lengths, in a preferably automatic measuring procedure. Each unit contains one of the respective probe extension adapted reference beam path, which is thus exchanged with. Unused units are stored, for example, in changing stations known for coordinate measuring machines.

Particularly noteworthy is the idea that the tactile-optical sensor in a coordinate measuring machine, preferably multi-sensor coordinate measuring device is integrated together with other sensors, preferably tactile, optical or computer tomographic sensors.

The present invention also relates to methods for determining geometric features or structures on a workpiece, preferably by means of the device according to the invention.

• – parallel oder
• – geneigt oder
• – entlang der optischen Achse des lateral messenden Sensors

verläuft, wobei gegebenenfalls eine oder mehrere Umlenkungen des Referenzstrahlengangs zwischen Teilerschicht und Referenzspiegel mittels einer oder mehrerer Reflektoren, welche zusammen mit dem Referenzspiegel einen Referenzstrahlengang bilden, erfolgen, wobei vorzugsweise die Referenzstrahlung bevorzugt in eine Richtung parallel zur optischen Achse oder in eine Richtung geneigt zur optischen Achse des lateral messenden Sensors umgelenkt wird.To solve the problem of the invention is therefore also a method for determining geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, a vertically measuring interferometric distance sensor, and at least one partially flexible elastic probe extension, wherein the probe extension at least emanate: a Antastformelement which is augelenkt in contact with the workpiece together with the probe extension, and preferably a the Antastformelement associated target, which is alektenkt when touching the Antastformelementes with the workpiece together with the probe extension, wherein the lateral deflection of the sensing element or the target mark, perpendicular to the optical axis of the laterally measuring optical sensor, is determined with this, and the vertical deflection along or close entl The measuring radiation of the interferometric distance sensor is coupled into the probe extension and emitted by the probe element or the associated target and is superimposed with the reference radiation of the interferometric distance sensor and interference (speckle) resulting therefrom is determined with the distance sensor. be evaluated, provided that characterized in that the probe extension side on the remote with respect to the probe form element and the optical axis of the laterally measuring optical sensor, in particular spaced from the probe extension, an optical splitter layer is arranged, that the splitter layer for Division of measuring radiation and reference radiation is formed, that by means of the splitter layer of a reference mirror back-reflected reference radiation is deflected in a direction that on the in relation to the Antastformelement remote side

• - parallel or
• - inclined or
• Along the optical axis of the laterally measuring sensor

Where appropriate, one or more deflections of the reference beam path between divider layer and reference mirror by means of one or more reflectors, which together with the reference mirror form a reference beam, carried out, preferably wherein the reference radiation preferably in a direction parallel to the optical axis or in a direction inclined to the optical Axis of the laterally measuring sensor is deflected.

• – parallel oder
• – geneigt oder
• – entlang der optischen Achse des lateral messenden Sensors

verläuft wobei vorzugsweise als der zuletzt wirkende Reflektor eine zweite Fläche der Umlenkeinrichtung verwendet wird, und wobei die Referenzstrahlung zwischen den zumindest zwei Reflektoren in einer oder mehreren Richtungen parallel zur optischen Achse oder geneigt zur optischen Achse des lateral messenden Sensors verläuft.An alternative method for solving at least some of the objects of the invention consists in a method for determining geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, a vertically measuring interferometric distance sensor , and an at least partially flexible elastic probe extension, wherein the probe extension at least emanating: a Antastformelement which is deflected in contact with the workpiece together with the probe extension, and preferably a the Antastformelement associated target, the contact with the Antastformelementes with the workpiece together with the Button extension is alektenkt, the lateral deflection of the probe form element or the target, perpendicular to the optical axis of the laterally measuring optical sensor is determined with this, and the vertical deflection along or nearly along the optical axis of the laterally measuring optical sensor is determined with the distance sensor, wherein the measuring radiation of the interferometric distance sensor is coupled into the probe extension and output from the sensing element or the associated target and is superimposed with the reference radiation of the interferometric distance sensor and thereby resulting interferences (Speckle) are evaluated in which that the probe extension side on the remote with respect to the Antastformelement side adjacent to the beam path of the laterally measuring optical sensor, an optical splitter layer is arranged, that the splitter layer is formed for splitting measurement radiation and reference radiation that the After passing through the splitter layer, measuring radiation is deflected in the direction of the probe extension by means of a reflector present on a first surface of a deflection device, and that the Reference radiation is deflected by means of at least two reflectors for forming at least a portion of the reference beam path in a direction which is on the side facing away from the Antastformelement page

• - parallel or
• - inclined or
• Along the optical axis of the laterally measuring sensor

wherein preferably a second surface of the deflection device is used as the last-acting reflector, and wherein the reference radiation between the at least two reflectors extends in one or more directions parallel to the optical axis or inclined to the optical axis of the laterally measuring sensor.

In a preferred development, the invention additionally provides that the vertical deflection of a reflector designed as an additional on the side facing away from the workpiece of the probe extension or with respect to the Antastformelement side facing away from the probe extension, attached target with the beam path of a further distance sensor such as Foucault Laser sensor or focus sensor is determined and preferably from the measured values of the interferometric distance sensor and the measured values of the other distance sensor, the deflection of the probe extension and / or the amount and / or the direction of the contact force is determined, preferably as last traversed reflector or as a splitter layer such trained is used that not the entire aperture of the beam path of the other distance sensor is covered.

According to a particularly preferred solution, the invention provides that the deflection of the reference radiation is effected by means of a plurality of reflectors, wherein, with the exception of the last traversed reflector or the splitter layer, the reflectors are arranged laterally next to the optical beam path of the optically lateral measuring sensor.

In an embodiment, the invention therefore provides that the radiation of the one or more radiation sources of the interferometric distance sensor is coupled perpendicular or nearly perpendicular to the optical beam path in the direction of the optical splitter layer, wherein preferably the guidance of the radiation between the radiation source and coupling by means of optical fibers.

Preferably, it is provided that for the interferometric distance sensor two radiation sources of different wavelength spectrum are used, preferably laser diodes, and preferably absolute values for the deflection or position of the detected probe form element or the detected target mark are determined.

It is also characteristic that manually and / or automatically via an exchange interface, preferably magnetic exchange interface, different units, each at least consisting of the reference beam forming reflectors, and optionally the reference mirror, the splitter layer and the probe extension, are exchanged, the various units each a different probe extension, in particular a different length probe extension, and a correspondingly adapted reference beam path, in particular a different length reference beam path and preferably correspondingly adapted positions and / or number of reflectors include.

Particularly noteworthy is the idea that the tactile-optical sensor integrated in a coordinate measuring machine, preferably multi-sensor coordinate measuring device together with other sensors, preferably tactile, optical or computer tomographic sensors, is used.

An independent invention relates to methods for non-contact measurement of geometric features and contours on workpieces with at least one optical and / or at least one computer tomographic sensor in a coordinate measuring machine.

In particular, the invention relates to the assembly of a plurality of images captured by a workpiece such as a vision sensor, such as a camera, from a workpiece.

Also, the invention relates to the measurement of a workpiece with a computed tomography sensor, wherein components of the sensor, the environment of the sensor and the environment of the workpiece, in particular the surrounding air in a housing in which the sensor and the workpiece are arranged thermally influenced, in particular cooled.

The recording of a plurality of images of a workpiece or an area with an optical sensor such as image processing sensor and the composition of these multiple captured individual images into an overall image, which is subsequently evaluated, is for example in DE 10341666 described. For example, resampling methods are also used, as in the DE 10 2004 058 655 to create a uniform pixel grid for the composite overall image. Both applications are referred to in their entirety. In these two documents of the applicant is given as a solution for the exact composition of the individual images that the position of the individual images is determined by using scales by the positions of the drives to realize the relative movement between the workpiece and sensor are determined. Corresponding scale systems are expensive and the cost of receiving and processing the scale signals is high.

An alternative solution for assembling individual images into an overall image is known to the person skilled in the art by the term stitching. In this case, use is made of the fact that the same image areas of the workpiece are contained in overlapping recorded individual images. The assignment of these areas is carried out by means of correlation determination. However, a prerequisite for a good correlation is that there are sufficient structures in the overlapping areas. A disadvantage of these methods is that only then can be made a composite, if there are sufficient random contrast and well-assignable structures in the respective overlap areas, the imaged workpiece is thus structured accordingly. However, this can not always be ensured, such as in homogeneous or reflective workpiece surfaces.

An object of the present invention is to allow a simple and quick assembly of individual images of a workpiece with any surface to an overall image, without using scale systems for determining the position of the individual images to each other.

To solve this task is provided that z. B. the measuring table on which the workpiece is placed or z. B. on a workpiece receiving holder a referencing such as structures are attached, which are at least partially miterfasst in the recording of the individual images of the workpiece. From the position of these referencing or structures in the individual images is closed to the position of the individual images to each other, whereby an accurate composition of the individual images is possible.

At least aspects of these tasks are thus essentially solved by determining the position of the individual images relative to one another by detecting structures in the individual images attached to the measuring table and determining the position of the structures.

The invention thus relates to a method for measuring geometric features and / or contours on a workpiece arranged on a measuring table by means of an optical sensor, preferably image processing sensor, wherein by means of the optical sensor a plurality of individual images of the workpiece or a portion of the workpiece in different relative positions between Workpiece and sensor are recorded and assembled into an overall image, wherein the composition of the position of the individual images is taken into account according to the relative positions, and from the overall image, the features and / or contours are extracted, the position of the individual images is determined by each other by the Measuring table attached structures are captured in the individual images and the location of the structures is determined.

So that at least part of the structure can be detected in all individual images, irrespective of the size and shape of the workpiece, the structures are preferably mounted in the edge area of the measuring table, which is not covered by the workpiece. As a result, the distribution of the individual images is limited such that each individual image must capture at least a part of the edge region of the measuring table. In at least one direction, therefore, only a maximum of two adjacently laying individual images can be recorded, wherein any number of individual images can be recorded perpendicular to this first direction.

To emphasize is therefore the idea that the structures are detected in the edge region of the measuring table and in a first direction z. B. a maximum of two frames are added adjacent and taken in a second, perpendicular to the first direction direction any number of frames.

These conditions are to ensure that an area of the structures or referencing is captured in each picture.

The pictures themselves are taken in one plane.

In the transmitted light and / or incident light method, the individual two-dimensional images are recorded.

As a location of the structure, two possible interpretations are to be understood within the scope of the invention. In a first variant, the position of a part of the structure, namely the part of the structure detected in each individual image, is to be understood in relation to an absolute position of the entire structure or structures. The entire structure is fully captured and stored in advance. This can be done for example by means of an image processing sensor, which preferably receives a plurality of individual images of the measuring table, in particular of the structures. In this case, the positions which the image processing sensor assumes during the recording are determined, for example by the image processing sensor being integrated in a coordinate measuring machine with measuring axes, in order to assemble an exact overall picture. The measuring table is thus measured, for example, before installation in a coordinate measuring machine according to the present invention, by means of another coordinate measuring machine or the like. Thus, the position of each part of the structure in a coordinate system is known, and thus the position of different parts of the structure to each other. In the actual measurement, a specific part of the structure is now included in each case. This part must be recognized again in the previously recorded overall picture. This is done, for example, by correlation methods. It should be noted that the coarse position of the structure on the measuring table, ie the coarse position of each frame, is usually already known, so the correlation must be examined only in part of the preliminary image. Otherwise, the structures must be unique patterns that do not repeat.

In a second variant, the position of a part of the structure, namely the part of the structure captured in a single image in each case, is to be understood only with reference to that part of the structure which is present in adjacent recorded individual images. For this purpose, it is necessary that adjacent individual images overlap, whereby parts of the structure in adjacent individual images are equally present. By correlation, the identical parts of the structure can be detected and from this the relative position of the adjacent individual images can be determined.

In a first preferred embodiment, the invention additionally provides that the position of the structures on the measuring table is determined before the measurement of the workpiece, for example by recording a plurality of images with an image processing sensor whose positions are determined when taking the images, and that at the measurement of the workpiece by means of correlation method, the current position is determined in relation to the predetermined position of the structures.

In a second preferred embodiment, the invention additionally provides that adjacent individual images overlap at least partially and the position of the structures in the individual images relative to one another is determined by means of correlation methods.

It is also characteristic that the structures are patterns such as lines or other geometric shapes, preferably non-repeating patterns, which are arranged at least in the edge areas of the measuring table, preferably along the entire edge area of the measuring table.

To implement the method according to the invention, a corresponding device is also provided.

The invention thus also relates to a device for measuring geometric features and / or contours on a workpiece, at least comprising a measuring table on which the workpiece can be arranged, and an optical sensor, preferably image processing sensor, and means for relative movement between the workpiece and the sensor Recording and storing a plurality of individual images of the workpiece or a region of the workpiece, composition to form an overall image and evaluation of the overall image, and means for extracting features and / or contours from the overall image.

To achieve at least aspects of the object of the invention, it is provided that structures, in particular patterns such as lines or other geometric shapes, preferably non-repeating patterns, are attached to the measuring table, which at least in the edge regions of the measuring table, preferably along the entire edge region of the Measuring tables are arranged, and that the patterns are detectable with the optical sensor.

When measuring workpieces by means of a computed tomography sensor, several heat sources occur. These are, for example, the radiation source such as an X-ray tube and the detector used for measuring the radiation, such as area detector. The axis drives, for example, the turntable for rotating the workpiece in the beam path of the radiation source, and optionally other drives provide in their use for heat inputs. Due to the measuring radiation devices, such as coordinate measuring machines, with computer tomography sensors are usually operated in closed chambers or housings. Within the housing therefore occurs without cooling measures heat accumulation. This ensures that the measurements are falsified by temperature-related expansions of the workpiece and sensors. To avoid this, individual components of the sensors are cooled. X-ray tubes usually have their own liquid cooling. The air inside the housing can be cooled, for example, by air cooling. For this purpose, for example, fans are integrated into the housing walls. However, for reasons of radiation protection, such arrangements are complex and less effective. Excessively high fan speeds can adversely affect the measurements due to vibrations and air currents. Another disadvantage is that separate supply lines and leads are to be provided consuming in the device design for each cooling circuit.

Basically, a cooling directly, for example by conduction, or indirectly, for example by convection, take place.

An independent object of one of the present inventions is therefore to realize by simple means a temperature, in particular cooling, at least of parts of a computed tomography sensor and the environment of the sensor and the workpiece.

To solve this task is essentially provided that a common cooling circuit for cooling, preferably direct cooling, the detector and for cooling, preferably indirect cooling, the computer tomography sensor and / or the workpiece surrounding air is used.

Computed tomography sensors and workpieces are located in a housing, for reasons of radiation protection mostly closed housing. For metrological reasons, for example, temperature fluctuations in the range of less than +/- 2 Kelvin or less than +/- 1 Kelvin are desirable.

One of the inventions therefore also relates to a method for tempering, in particular cooling, of at least parts of a computed tomography sensor system, the computed tomography sensor system comprising radiation source, preferably x-ray source, detector, preferably area detector, and turntable for rotating the workpiece or for rotating Radiation source and detector consists, and the computer tomography sensor and / or the workpiece surrounding air and preferably the workpiece, wherein the computed tomography sensor and the workpiece are in a housing, preferably using the computed tomography sensor geometry and / or geometric features Contours are measured on a workpiece, wherein a common cooling circuit for cooling, preferably direct cooling, the detector and for cooling, preferably indirect cooling, of the sensor and / or the workpiece surrounding air is used.

Since, according to experience, a particularly high heat load is generated by the detector, it makes sense to provide liquid cooling for the detector. In this case, a heat exchanger is thermally coupled to the detector, or the freely accessible areas of the detector, such as, for example, the rear side facing away from the detector elements, or the side surfaces. This is done, for example, by gluing, soldering or welding of plate material, wherein a good heat transfer is usually ensured with thermal paste. At the plate of the heat exchanger, the coolant is passed to cool them, for example by means of soldered and often meandering cooling coils through which the coolant flows, which is transported by means of a supply line from a cooling unit such as a thermostat by means of a pump to the heat exchanger.

Despite this cooling, part of the heat continues to be released, for example at the front of the detector, to the air in the housing. But also other sources of heat, as mentioned, heat the housing interior. Therefore, it is additionally provided to also indirectly cool the air by means of one or more heat exchangers. According to the invention, the same cooling circuit is used, with which the detector is also cooled. However, since the higher heat load emanates from the detector, the coolant is first passed by the detector. It heats up, for example, from a flow temperature of about 18 ° C to 20 ° C. Subsequently, the slightly heated coolant is passed to the heat exchangers for cooling the air. These heat exchangers are preferably arranged in the upper region of the housing because of the natural temperature stratification.

Particularly noteworthy is therefore the idea that the cooling circuit is a liquid cooling, the coolant is first passed by a heat exchanger at the detector and then past at least one, preferably several, for example two or four or eight, heat exchangers is passed in the air, preferably above the workpiece and / or the computed tomography sensor, and are disposed within the housing.

For better air cooling fans can additionally be provided, which transport the air in the housing from below in the direction of the heat exchanger. The fans are z. B. attached directly to the bottom of the heat exchanger.

According to a particularly preferred solution, the invention provides that at least the heat exchangers located in the air are each assigned at least one fan which transports air out of the housing in the direction of the heat exchanger.

Depending on the heat load present, the cooling circuit, ie the temperature and flow rate of the coolant provided by the cooling unit, must be controlled. For this purpose, the temperature of the coolant, for example in the flow, and optionally the detector or the air in the housing used as a measured or controlled variable. Also, the fan speed can be controlled accordingly, as is done for example in PC fans depending on the temperature of the surrounding air.

In an embodiment, the invention therefore provides that the temperature and / or flow rate of the cooling fluid and / or the speed of the fan is controlled, preferably based on temperature sensors that detect the temperature of the coolant and / or detect the temperature of the detector and / or which detect the temperature of the air in the housing.

It can also be provided to also realize the cooling of the radiation source, in particular the X-ray tube, with the same cooling circuit. Due to the high heat load of the radiation source, the coolant is passed by means of a heat exchanger first at the radiation source and then only at the detector and the air.

Particularly noteworthy is therefore the idea that the cooling circuit additionally comprises the cooling of the radiation source, preferably an X-ray tube, preferably by first passing the coolant by means of at least one heat exchanger past the X-ray tube.

The invention also relates to a device for temperature control, in particular cooling, of at least parts of a computed tomography sensor system, wherein the computed tomography sensor system of radiation source, preferably X-ray source, detector, preferably area detector, and turntable for rotating the workpiece or for rotation of radiation source and Detector exists, and the air surrounding the computed tomography sensor and / or the workpiece and preferably the workpiece, wherein the computed tomography sensor and the workpiece are housed in a housing, and wherein preferably the computed tomography sensor is designed, geometric features and / or Contours to be measured on a workpiece, wherein the device comprises a common cooling circuit for cooling, preferably direct cooling, the detector and for cooling, preferably indirect cooling, the surrounding the sensor and / or the workpiece air.

According to a particularly preferred solution, the invention provides that the cooling circuit is a liquid cooling, wherein supply lines are provided for transporting the coolant, which initially lead from a cooling unit located outside the housing to a heat exchanger associated with the detector, said heat exchanger Preferably, by means of thermal paste has a thermal coupling at least to the detector rear side and preferably cooling coils meander in this heat exchanger, and the leads then continue to at least one, preferably more, for example, two or four or eight, heat exchangers, which in the air, preferably in the upper region the housing and / or above the workpiece and / or the computed tomography sensor, and are arranged within a housing, wherein preferably cooling coils run meandering in this heat exchanger.

In an embodiment, the invention provides that at least at the air heat exchangers located in each case at least one fan is arranged, preferably arranged below, the air transported from the housing in the direction of the heat exchanger.

Preferably, it is therefore provided that a control for the set by means of the cooling unit temperature and / or flow rate of the cooling liquid and / or the fan speed is provided, wherein the control preferably on the basis of temperature sensors that detect the temperature of the cooling liquid and / or the temperature of the Detect detector and / or detect the temperature of the air in the housing takes place.

Particularly noteworthy is the idea that the cooling circuit additionally comprises leads, which connects the cooling unit with one of the radiation source such as X-ray tube associated heat exchanger, preferably the leads from the cooling unit first to the radiation source and then first to the detector and the air.

Furthermore, the method according to the invention or the device according to the invention is characterized in that use or integration in a coordinate measuring machine, preferably multi-sensor coordinate measuring device, takes place together with further sensors, such as tactile, optical, tactile-optical or computer tomographic sensors.

An independent invention relates to a device and to a method for determining geometric features on a rotationally symmetrical workpiece, in particular on a stent.

An independent invention also relates to the optical measurement of geometric features on a rotationally symmetrical workpiece, in particular to a stent using optical sensors, in particular image processing sensors, wherein an improved illumination, in particular transmitted light illumination, is used.

In particular, the invention also relates to the inspection of rotationally symmetrical workpieces, in particular stents, for example cracks or the like.

Also, the invention relates to the inclusion of rotationally symmetrical workpieces, in particular stents, in a pronounced as a mandrel holder.

The optical measurement of stents is done in the prior art by taking pictures in which a lighting emanates from either the top, in the form of a bright field incident illumination or dark field illumination, or from the bottom, in the form of transmitted light illumination, the stent. As already in the EP 1920213 B1 mentioned, it disturbances, z. B. by glitches on. The solution therefore combines the appropriate lighting methods. Nevertheless, there remains the problem that in transmitted light illumination, parts of the light are distorted as they pass through the side of the stent facing the illumination, and thus the optical measurement of the side of the stent facing away from the illumination and facing the sensor can be falsified. If mandrels are used to secure the stent to the inside of transmitted light measurements, appropriate mandrels must be transparent. Even when penetrating through the mandrel occur distortions.

Likewise the EP 1 920 213 B1 is to remove the attachment of stents on a rotation axis, wherein a spindle, also referred to as a mandrel, is inserted into the interior of the stent and the stent is clamped onto the spindle. Another specified solution provides to store the stent on, for example, two rotatable guide rollers. A backlash-free and tumble-free rotation of stents with different outer diameter in the axial direction, such. As heart stents, this is not or at least not possible with high accuracy, because known mandrels have a constant diameter and thus parts of the stent are not fixed. Also, it is not possible to further expand the stent in a single clamping for better detection of cracks or the like compared to the clamping for the optical measurement of the geometry.

The object of the present invention is to realize an accurate measurement for features on rotationally symmetrical workpieces, in particular stents, wherein a variable attachment of the workpieces and / or improved illumination for an optical measurement is to be achieved.

To solve at least aspects of the tasks is therefore intended to arrange the illumination in the interior of the stent, in particular to pour corresponding light sources in a transparent mandrel or to introduce into a hollow transparent mandrel.

Another solution of aspects of the task consists in the use of a different at least two parts outer diameter plug-together mandrel.

It is also intended to solve aspects of the tasks to use an expandable or expandable mandrel.

The invention particularly relates to a device for determining geometric features or structures on a rotationally symmetrical workpiece, preferably a stent, which can be arranged by means of a mandrel running at least partially inside the workpiece, with an optical sensor, preferably an image processing sensor, using transmitted light illumination wherein the mandrel is attached to a mechanical axis of rotation, preferably a mechanical pivot axis, wherein the means for transmitted light illumination in the interior of the rotationally symmetrical workpiece can be arranged, wherein the means for transmitted illumination with the mandrel form a unit.

In extension of this idea, it is also provided that the means for transmitted light illumination, preferably a plurality of LED bulbs, are cast in a transparent mandrel or that the transparent mandrel is hollow and the means for transmitted light illumination in the interior of the mandrel are insertable.

The invention also relates to a device for determining geometric features or structures on a rotationally symmetrical workpiece, preferably stent, which can be arranged by means of a mandrel running at least partially inside the workpiece, with an optical sensor, preferably image processing sensor, using transmitted light illumination , with the thorn on a mechanical axis of rotation, preferably mechanical rotary / pivot axis is fixed, wherein the outer diameter of the mandrel is adjustable, wherein preferably the mandrel consists of several, preferably three or four, individual parts, which are distributed over the circumference and spreadable or expandable to each other are arranged.

Likewise, the invention relates to a device for determining geometric features or structures on a rotationally symmetrical workpiece, preferably stent, which can be arranged by means of a at least partially extending inside the workpiece mandrel, with an optical sensor, preferably image processing sensor, using a transmitted light illumination , wherein the mandrel is attached to a mechanical axis of rotation, preferably mechanical pivot axis, which is characterized in that the mandrel consists of two parts having a different outer diameter and offset in the axial direction of the workpiece arranged and / or are connectable

Particularly noteworthy is the idea that the mandrel and the mechanical axis of rotation or mechanical rotary / pivot axis in a coordinate measuring machine, preferably multi-sensor coordinate measuring device together with other sensors, preferably tactile, optical or tactile-optical sensors integrated.

The independent invention also relates to a method for determining geometric features or structures on a rotationally symmetrical workpiece, preferably a stent, by means of one or more of the previously described features of the devices according to the invention.

According to a particularly preferred solution, the invention provides that by means of the optical sensor, preferably image processing sensor, taken in several rotational positions of the workpiece images of each side facing the sensor of the workpiece and evaluated, wherein integrated into the mandrel, preferably molded, means for Transmitted light illumination are controlled.

It is also characteristic that for fastening the workpiece, or for fastening the workpiece and widening the diameter of the workpiece, on the mechanical axis of rotation or mechanical axis of rotation / pivot axis of the outer diameter of the mandrel used for fastening according to the inner diameter of the workpiece - or Examination of structures such as cracks larger than the inner diameter of the workpiece - is set, wherein preferably the mandrel consists of several, preferably three or four, individual parts, which are distributed over the circumference and spread to each other or upgraded.

In a second preferred embodiment, the invention provides that for fixing a workpiece which offset in the axial direction of the workpiece has at least two regions of different inner diameter, preferably in diameter over its length at least partially tapering or thickening stent such as cardiac stent on the mechanical axis of rotation or mechanical axis of rotation, a mandrel consisting of at least two parts of different outer diameter is used, wherein the parts of the mandrel are used for fixing the corresponding portion of the workpiece with matching inner diameter and the parts of the mandrel in the axial direction offset from one another be arranged and / or connected.

In an embodiment, the invention provides that the mandrel and the mechanical axis of rotation or mechanical rotary / pivot axis integrated in a coordinate measuring machine, preferably multi-sensor coordinate measuring device together with other sensors, preferably tactile, optical, tactile-optical and / or computer tomographic sensors used become.

Further details, advantages and features of the invention will become apparent not only from the claims, the features to be taken from them - alone and / or in combination - but also from the following description of the figures.

Show it:

1 1 is a schematic representation of a device according to the invention in a first embodiment with a first probe extension according to the invention,

2 FIG. 2 a schematic illustration of a device according to the invention in a second embodiment with a second probe extension according to the invention, FIG.

3 3 is a schematic representation of a device according to the invention in a third embodiment with a vertically measuring optical distance sensor,

4a , b schematic diagrams of alternative inventive probe extensions,

5a , b schematic representations of an inventive probe extension according to an independent idea,

6 1 is a schematic representation of a device according to the invention in a first embodiment with a first laterally measuring optical sensor,

7a 2 is a schematic representation of a device according to the invention in a second embodiment with a first laterally measuring optical sensor and a second optical distance sensor in a first and particularly preferred embodiment of the probe extension,

7b a schematic diagram of a device according to the invention in the second embodiment with a first laterally measuring optical sensor and a second optical distance sensor in a second embodiment of the probe extension,

7c a schematic diagram of a device according to the invention in the second embodiment with a first laterally measuring optical sensor and a second optical distance sensor in a third embodiment of the probe extension,

7d a schematic diagram of a device according to the invention in the second embodiment with a first laterally measuring optical sensor and a second optical distance sensor in a first particular embodiment of the probe extension in L-shape,

7e a schematic diagram of a device according to the invention in the second embodiment with a first laterally measuring optical sensor and a second optical distance sensor in a second particular embodiment of the probe extension as a star key and

8th a schematic diagram of a coordinate measuring machine, which contains the inventive arrangement,

9 3 is a schematic representation of a device according to the invention in a first embodiment with a first sensor, which is a laterally measuring optical sensor,

10 a schematic diagram of a device according to the invention in a second embodiment with the first sensor, which is a laterally measuring optical sensor, and a second sensor, which is a distance sensor,

11 a flow diagram of a preferred embodiment of the method according to the invention,

12 A preferred embodiment of the device according to the invention with an inserted tactile sensor head,

13 a preferred embodiment of the device according to the invention with an inserted tactile-optical sensor head,

14 a preferred embodiment of the device according to the invention with a substitute additional lens,

15 a rotationally symmetrical workpiece and features to be measured,

16 a preferred clamping of the workpiece according to the invention,

17 a schematic diagram of a device according to the invention in a first embodiment,

18 a schematic representation of a device according to the invention in a second embodiment,

19 a preferred embodiment of structures on a measuring table according to the device according to the invention,

20 a preferred embodiment of a cooling according to the second device according to the invention,

21 a schematic diagram of a device according to the invention in a first embodiment for transmitted light illumination,

22 a schematic diagram of a device according to the invention in a second embodiment of the transmitted light illumination,

23 1 is a schematic representation of a device according to the invention in a first embodiment of the attachment of a stent,

24 a schematic diagram of a device according to the invention in a second embodiment of the attachment of a stent,

25 a schematic representation of a device according to the invention in a third embodiment of the attachment of a stent and

26 a schematic diagram of a coordinate measuring machine, in which the arrangement according to the invention is integrated.

The figures show various embodiments of one of the teachings of the invention, wherein in the 1 to 5b basically the same reference numerals are used for the same elements.

1 shows a first embodiment of an inventive arrangement for determining geometric features or structures of a workpiece 27 with a tactile-optical sensor 1 , This consists inter alia of a laterally measuring optical sensor, here an image processing sensor 2 , a button extension 13 , a fiber intake 14 , an adjustment unit 18 a holder 25 and two change interfaces 16 and 24 ,

The image processing sensor 2 consists among other things of a camera 3 and an optic with lenses 4 and 5 , where the optics are the optical axis 26 has and with the beam path 6 a target 7 the button extension 13 is detected.

The button extension 13 has a flexurally elastic part or section 10 on, from which the target mark 7 emanates. This section is preferably continuously tapered in diameter, more preferably conical, by means of a drawing process. This is illustrated in principle by the drawings.

From the target brand 7 go a rigid part or section 9 from where the Antastformelement 8th is fixed, which in contact with the workpiece to be measured 27 is deflected. Alternatively, go from the flexurally elastic part 10 directly the probing element 8th out and the deflection of the sensing element 8th is through the beam path 6 captured and from the image processing sensor 2 certainly. The button extension 13 is also with the fiber intake 14 connected.

At the flexurally elastic part 10 also close to bending-resistant sections or parts 11 . 12 in the type shown here 2D sensor in the area of the part or section 11 have a 90 ° bend and in the area of the part 12 approximately at right angles to the optical axis 26 in the fiber intake 14 into it. Between the sections 10 and 11 respectively. 12 In addition, a more rigid, and thus virtually even more rigid, sections 10a be present from the by pulling the section 10 was rejuvenated. The rigid part 11 . 12 is an example of a partially bent metal tube with a cylindrical cross-section, inside which the flexurally elastic part 10 or more rigid part 10a to be led. Preferably, the flexurally elastic part 10 or the more rigid part 10a at the exit point 11a glued from the metal tube with this.

The smallest diameter should not be smaller than 5 μm. The diameter in the rigid area (section 10a ) should not be smaller than 30 μm.

The fiber intake 14 has a light source 15 on, the light in the button extension 13 feeds and the target 7 illuminated. In addition, the fiber intake 14 via a magnetic exchange interface 16 with a moving part or element 17 the adjustment unit 18 connected. The change interface 16 has in addition to the mechanical and electrical contacts for the power supply of the light source 15 on. The whole unit of light source 15 , Fiber intake 14 and button extension 13 is automatically interchangeable according to the invention.

The adjustment unit 18 provides the means for adjustment. By motor drives is a translational adjustment of the probe extension 13 along the arrows 19 to 22 possible. The arrow 20 indicates that the adjustment is in the direction perpendicular to the plane of the drawing. Due to the different adjustment in the direction of the arrows 21 and 22 will also turn in the direction of the arrow 23 realized. The adjustment unit 18 is via a magnetic exchange interface 24 with a holder 25 connected, which the indirect connection to the image processing sensor 2 manufactures. In the holder 25 For example, darkfield incident illumination sources, not shown, are housed to serve the illumination of the workpiece. Through the change interface 24 is within the meaning of the invention, the entire unit of adjustment 18 , Fiber intake 14 and button extension 13 automatically interchangeable. In particular, it is provided that the changeover interface 24 a fastening of the adjusting unit 18 in four each 90 ° around the optical axis 26 rotated or staggered positions allowed. The corresponding mechanical and electrical connecting elements are offset from each other in 90 ° steps. In the sectional view of 1 For example, only the 180 ° offset fasteners are indicated.

2 basically shows the device of 1 , but with an alternative button extension 13 , This points in the region of the rigid part or section 11 an altered bend on, leaving the button extension 13 in the field of sections 10 and 9 slightly inclined to the optical axis 26 runs. This makes it possible to work at a greater depth on the workpiece 27 measure, without causing shadowing of the beam path 6 or stem touches (touching the flexurally elastic part or section 10 or part or section 9 with the workpiece 27 ) comes. In particular, to measure the roughness of this structure makes sense, as with particularly small Antastformelementen 9 must be measured, reducing the probe extension in the range of sections 9 and 10 must be particularly thin and thus flexurally elastic. In the example shown the 2 is the measurement of the plane of the workpiece oriented to the right in the plane of the drawing 27 intended. Surfaces oriented in other directions are measured according to the invention by changing the inclination direction of the probe extension accordingly. This is preferably done by the adjustment unit 18 and thus the button extension 13 correspondingly twisted at the interface 24 is attached. Alternatively, at the change interface 16 a unit of fiber intake 14 and button extension 13 be replaced with a bent in the appropriate direction area or section 11 having.

3 shows a third embodiment of the arrangement according to the invention, wherein additionally the vertical deflection of the Antastformelements 8th by determining the displacement of one at the button extension 13 attached reflector 34 , which serves as a further target with the vertical optical distance sensor 28 is determined. It is therefore the type of 3D sensor.

The distance sensor 28 consists of at least one light source 29 whose light is on a Foucault's sheath 30 over the deflection mirror 32 and 33 in the beam path of the image processing sensor 2 approximately along the optical axis 26 is introduced. The at the reflector 34 Reflected light is emitted from the deflecting mirror 33 on a detector 31 directed. The detector 31 In contrast to the prior art, it is not designed as a differential diode, but as a position-sensitive sensor (PSD) or camera, whereby the measurable range of the displacement of the reflector 34 along the optical axis 26 and its tilt is increased by the same. The reflector 34 is also provided, a portion of the incident light in the probe extension 13 to initiate the target 7 to illuminate. This light can be from the light source 29 come and the reflector 34 is executed partially mirrored, or it comes from another, not shown light source deviating wavelength and the reflector 34 is executed color-selective reflective.

The fiber intake 14 consists of a flexurally elastic element 35 and a rigid retaining element 36 , The flexural elastic element 35 For example, there are several thin ones around the optical axis 26 distributed leaf spring elements arranged. These are in the beam path 26 defocused, outside of the target area 7 lying sharp plane and have a clamping point in the middle 37 on, at the button extension 13 is attached. In the example shown, the clamping of the probe extension takes place 13 perpendicular at right angles to the optical axis 26 extending leaf springs as the flexurally elastic elements 35 , Alternatively, the attachment may also be slightly inclined to the optical axis 26 done in relation to 2 to achieve explained benefits. The attachment in, for example, 90 ° twisted or offset positions is again with the help of the interface 24 possible. This is also possible if in the course of an alternative embodiment of the device according to 3 the adjustment unit 18 eliminated and the fiber intake 14 , in particular the holding element 36 directly at the interface 24 is attached.

The 4a and 4b show schematic diagrams of alternative inventive probe extensions 13 , In the 4a run by way of example from the target 7 the areas or sections 9 of the probe extension 13 in star-shaped directions to each one Antastformelement 8th , Not shown are also Antastformelemente 8th and corresponding areas or sections 9 provided perpendicular to the plane of the drawing. Alternatively, the branching takes place to the multiple probing elements below the target 7 , The 4b shows an alternative with laterally projecting area 9 and attached Antastformelement 8th , being not an angle of 90 ° to the optical axis 26 but an angle of about 45 ° is present. Alternatively, all angles between 0 ° (straight version) and about 150 ° can be realized.

After a suggestion of his own invention, the stylus extension becomes 13 or the receiving this hollow cylinder with respect to a section 60 who is in the recording 14 runs and should therefore be referred to as a mounting portion, geometrically designed so that there is an anti-rotation. This is made possible by the fact that the attachment section 60 deviates from a circular geometry in its circumferential geometry and the recording or fiber intake 14 is adjusted accordingly geometrically, so that the probe extension 13 with its attachment section 14 only in a clear position from the recording 14 can be recorded and fixed in this.

The attachment section 60 captured both a solution in which the probe extension 13 not from that in the drawings in the 5a and 5b reproduced hollow cylinder ( 11 . 12 ) is surrounded, so the button extension 13 directly with its end portion, the attachment portion 60 forms, in the receptacle 14 without the hollow cylinder is attached, as well as a solution in which the probe extension 13 taken up by the hollow cylinder and this in the recording 14 is attached.

Will the button extension 13 surrounded by the hollow cylinder or goes the button extension 13 from this point of view, that is within the picture 14 extending portion of the hollow cylinder also as the attachment portion 60 interpreted.

Preferably extends the probe extension 13 within the hollow cylinder up to the securing portion acting as anti-rotation 60 so this is not a mandatory feature. Rather, the button extension 13 by way of example only in the section running vertically in the drawing 11 run or in the horizontal section 12 before the attachment section 60 end up.

The 5a and 5b show schematic diagrams of the button extension 13 according to the own invention idea, a flattening 80 to provide at this. The plane flattening 80 is how in 5a shown on the button extension 13 surrounding hollow cylinder 12 in the area of the clamping point, ie in the area of fiber absorption 14 educated. The fiber intake 14 contains an equally flat contact surface 81 at which the button extension 13 with the flattening 80 is applied.

5b shows a side view of 5a in enlarged view, wherein fiber intake 14 and light source 15 are not shown and the workpiece 27 facing and sensing element 8th and if necessary, target 7 containing area of the probe extension 13 only partially, namely until the beginning of the drawn area 10 is shown. In the upper part is the inside of the hollow cylinder 12 extending fiber of the probe extension 13 shown. The normal direction 83 the flattening 80 runs parallel to the optical axis 26 or sensing element 8th and if necessary, target 7 containing area of the probe extension 13 , so is directed in the figure down. Alternatively, the flattening may be attached to any other location on the circumference of the hollow cylinder. At the exit point 11a , leaves the fiber of the probe extension 13 the hollow cylinder 11 . 12 and is at this by the gluing 82 fixed. Alternatively, it is possible to dispense with the hollow cylinder and the fiber of the probe extension 13 itself is partially flattened. In this solution, however, the coupling efficiency to the light source 15 limited.

According to the above cited prior art, the entire arrangement of 1 to 3 preferably integrated in a coordinate measuring machine as a sensor. Exemplary will be on the 1 of the DE 10 2004 022 314 or the 12 of the DE 10 2010 060 833 directed.

6 shows a schematic diagram of an apparatus according to an independent invention in a first embodiment with a first laterally measuring optical sensor, which serves as an image processing sensor 101 is formed and a CCD or CMOS camera 102 Contains an optic 103 as optics with fixed magnification and working distance or zoom optics with a fixed or adjustable working distance, consisting of a plurality of lenses, which are optionally displaceable associated. The optical sensor 101 detects the position and thus the deflection of a target 104 that by a button extension 105 goes out, in the lateral direction or the two lateral directions perpendicular to the optical axis 106 of the optical sensor 101 , At the object end of the probe extension 105 there is a probing element 107 which is formed spherical and for measurement with a measuring object or workpiece 116 brought into contact and thereby deflected. So that the deflection of the sensing element 107 as completely as possible through the optical sensor 101 can be detected, must be the deflection of the sensing element 107 as completely as possible on the target 104 be transmitted. This is a first area 105a the button extension 105 to realize with the highest possible rigidity. This connects the Antastformelement 107 with the target mark 104 , Where appropriate, the Antastformelement 107 and the target 104 integral with the first area 105a are formed. But still very low probing forces to protect the workpiece 116 to be achieved from damage, becomes a second area 105b the button extension 105 with a significantly lower rigidity than the range 105a executed. The second area 105b goes from the target 104 from and runs away from the Antastformelement 107 , A preferred solution for realizing this is to calculate the elastic modulus E of the range 105a significantly higher than the elastic modulus of the range 105b to choose. This can be done, for example, by curing the area 105a or by appropriate choice of material. For the area 105a According to the invention, for example, hard materials such as steel, diamond, graphene or tungsten and for the area 105b soft materials such as glass, glass fiber, plastic or plastic fiber such as polyethylene, polypropylene, polyvinyl chloride or polyethylene terephthalate in question. Around the first or second area 105a and 105b with the target mark 104 or the Antastformelement 107 is to be joined, bonding, welding or splicing is provided according to the invention. Alternatively, the areas 105b with the target mark 104 and the area 105a with the sensing element 107 form a unit, for example, prepared by splicing or generally by molding, for example in a heated state. In another alternative, the area can also 105a with the sensing element 107 and the target 104 form a unit.

An alternative solution of the object according to the invention also provides for the dimensions of the area 105a , in particular length and thickness, ie diameter, to be designed so that a higher rigidity is present. However, this is possible only within certain limits, since, for example, a larger diameter leads to the fact that the Antastformelement 107 must be carried out with a larger diameter, and thus in particular holes with small diameters are no longer measurable. Shortening the length of the area 105a As a result, it is no longer possible to measure at a great depth in a bore.

The side of the probe extension remote from the object 105 goes from a holder 108 from, for example, means for adjusting the position of the probe extension 105 or also contains an exchange interface for storing the probe extension, as can be seen from the prior art described above, and with the optical sensor 101 connected is. The inventive arrangement is according to the invention in a coordinate measuring machine 130 integrated sensor, as for example in the 8th with the reference numerals 132 and 128 is marked.

The 7a shows a further schematic diagram of a device according to the invention in a second embodiment. Next to the image processing sensor 101 is a distance sensor 109 integrated, whose measuring beam 112 via a semi-permeable deflection mirror 110 in the beam path of the image processing sensor 101 in the direction of the optical axis 106 and from a second target 111 which is mirrored on its sensor-facing side, is reflected. The target 111 can, as already with respect to the first target 104 explained by gluing, welding or splicing with the first area 105a be connected or with this and possibly also the first target 104 and optionally also the first area 105a that is between the first target 104 and the sensing element 107 is located, and optionally also with the Antastformelement 107 form a unit.

This in turn the deflection of the sensing element 107 as completely as possible to the first target 104 and also to the second target 111 is transmitted, the first area extends 105a the button extension 105 between the probing elements 107 , the first target brand 104 and the second target 111 , The second area 105b the button extension 105 is formed by one or more flexible connecting elements, such as these, for example DE 10 2010 060 833 in the 8th - 10 can be seen. The second area 105b goes from the holder 108 off and ends at the first area 105a at a point between the first target 104 and the second target 111 , Alternative ends the second area 105b directly at the second target 111 , as this fragmentary in the 7b is self-explanatory in this respect. Likewise, the invention also provides that the first target 104 at the same time the function of the second target 111 takes over by the first target 104 is mirrored on the sensor facing side, as this fragmentary 7c shows.

By the invention, it is now also possible to realize very long styli or probe extensions of several millimeters, for example more than 5 mm, to a few centimeters, for example 3-15 cm, length.

The first area 105a should have a length of more than 5 mm, preferably up to 10 cm. The diameter of the first area 105a should be between 10 μm and 500 μm.

Regarding the second area 105b are to be given as preferred values for the length 10 mm to 100 mm and / or for the diameter 10 μm to 1 mm. In the choice of sizing, however, according to the previous statements, it should be considered that the first range 105a a greater rigidity than the second area 105b has according to the teaching of the invention and the information given in this connection.

Special designs, which are also possible, are in the 7d and 7e shown. The 7d shows a button extension 105 in L-shape, ie with a cantilevered area 105a ' on which the probe element 107 located. In the 7e is a button extension 105 represented in the form of a star button. At the several areas 105a ' each is a Antastformelement 107 for probing the workpiece. The areas 105a ' can also have larger lengths of several millimeters to a few centimeters. The in the 7d and 7e represented areas 105a ' also have the higher stiffness according to the range 105a ,

The well-known and again in the 8th reproduced principle of a coordinate measuring machine 130 includes a z. B. made of granite base frame 113 with measuring table 114 on which an object or workpiece to be measured 116 is positioned to measure its surface properties, ie features or structures.

Along the base frame 112 is a portal 119 adjustable in Y-direction. These are columns or stands 120 . 122 sliding on the base frame 112 supported. From the columns 120 . 122 go a traverse 124 along which a carriage is movable, in turn, a quill or column 126 absorbs, which is adjustable in the Z direction. From the quill 126 or optionally one with the quill 126 connected change interface 128 go a sensor or measuring system 132 from, which can be designed as a tactile sensor, which, if the quill 126 contains an image processing sensor, measures tactile-optically. In that regard, however, reference is made to well-known techniques, as well as with respect to other used sensors such as laser distance sensor, white light interferometer, image processing sensors, X-ray sensor or chromatic focus sensor or confocal scanning probe, without thereby limiting the teaching of the invention. With respect to the tactile-optical measurement is in particular the disclosure in the EP-B-988 505 ( WO 98/57121 ), the contents of which are incorporated by reference.

The sensor or sensors are selected and used in accordance with the measuring task, around the coordinate measuring machine 130 , which is also referred to as a multi-sensor coordinate measuring device, to be optimally configured for the respective measuring task. At the same time, problems that occur with conventional coordinate measuring machines are solved.

To the coordinate measuring machine 130 can be used with the appropriate sensor, the coordinate measuring machine may have a sensor changer. Thus, several sensors can each optionally via an interface with the coordinate measuring machine 130 be replaced by hand or by automatic pickup from a parking station.

9 shows a first embodiment of an independent inventive arrangement for the determination of geometric features or structures, here by way of example the diameter of the bore 218 on the workpiece 201 , The determination is made with the tactile-optical sensor according to the invention, at least consisting of the flexurally elastic probe extension 203 , of the one hand, a Antastformelement 204 and on the other hand a first target 202 go out, and that on a bracket 209 is attached, wherein by coupling to the light source 210 Light, such as an LED or a laser light source, in the probe extension 203 is introduced, and the laterally measuring optical sensor 206 at least consisting of at least one imaging lens 207 and a receiver 208 , such as CCD or CMOS sensor, by touching the sensing element 204 with the workpiece 201 the resulting lateral deflection of the Antastformelement 204 associated target mark 202 through the beam path 216 the laterally measuring optical sensor 206 is detected and by means of the imaging lens 207 on the receiver 208 is shown. The laterally measuring optical sensor 206 is pronounced as an image processing sensor and determines the Amount and the direction of the deflection of the target 202 , in particular by determining the deflection of the light spot 215 , The light spot 215 is made by the inside of the button extension 203 reflected light 219 the light source 210 , Among other things, the reflections take place on the layer or coating 213 of the probing element 204 and the layer or coating 212 the target brand 202 , The target 202 is particularly preferred, however, only on the laterally measuring optical sensor 206 opposite side, in particular to the equator of the spherically shaped target 202 , coated so the light spot 215 for the laterally measuring optical sensor 206 is visible, so through the lens 207 on the detector 208 can be displayed. In addition, the light becomes the light source 210 also once or several times on the coating 214 between the target mark 202 and sensing element 204 extending area 205 the shaft of the probe extension 203 reflected and thus held within the shaft, represented by the arrows 220 , To reduce light loss even in the area between the bracket 209 and the target 202 Of course, this area of the probe extension can also be avoided 203 So the area 211 , be provided with a reflective or fluorescent layer.

In particular, the layer 213 of the probing element 204 may additionally be covered with a surface-hard or abrasion-resistant protective layer such as silicon nitride layer, that is, on the outside of the Antastformelementes 204 over the reflective or fluorescent layer 213 is applied.

The 10 shows an inventive arrangement, in addition to a second sensor 221 for indirect determination of the deflection of the sensing element 204 is used. In order to provide a three-dimensionally measuring sensor system, the second sensor is a distance sensor 221 trained and determines the deflection of the sensing element 204 , by determining the change in position of the second target 226 in the direction of the measuring beam 225 of the distance sensor 221 in the direction perpendicular to the laterally measuring optical sensor 206 certain deflection of the sensing element 204 ,

The distance sensor 221 consists of the light source 210a , which preferably generates a light beam, at least over the partially transparent deflection mirror 223b and 223a and the lens 207 to the second target 226 directed and reflected by this. Preferably, the distance sensor is designed as a Foucault sensor in which a cutting edge 229 is used. The one from the second target 226 reflected measuring beam 225 becomes after the reflection at the partially transparent deflection mirror 223a on the differential diodes 224 directed to the evaluation.

The button extension 203 is preferably in the range between the first target mark 202 and the second target 226 via one or more flexible retaining elements 221 on a bracket 217 attached to allow the displacement of the probe extension in the measuring direction of the distance sensor. Preferably, the holder 217 connected to a coordinate measuring machine, preferably on the same component as the first and second sensor 206 . 221 , Regarding further versions for the button extension 203 , first and second target 202 . 226 , Holding elements 221 and the area in which the retaining elements 221 with the button extension 203 is related to the disclosure of the DE 10 2010 060 833 taken.

According to the above cited prior art, the entire arrangement of 9 respectively. 10 preferably integrated in a coordinate measuring machine as a sensor. Exemplary will be on the 9 of the DE 10 2004 022 314 or the 12 of the DE 10 2010 060 833 directed.

In the 11 the sequence of the inventive steps of the independent invention for the automatic measurement of geometric features or contours in a preferred embodiment is shown in principle. Before the actual measurement of the workpiece, the target data 301 all relevant workpieces ("workpiece 1", "workpiece 2" to "workpiece n") recorded or stored. The target data consist z. B. from the technical drawings taken "Sollgeometrien", which are stored for example in a CAD file ("CAD"). This or a separate file also stores the "tolerances" assigned to the characteristics. The assignment of characteristics and tolerances can also be in the form of a test plan. Furthermore, the target data include the template images or templates ("Template 1", "Template 2" to "Template i") taken from the workpieces 1, 2 to n which have been taken into consideration, which have been recorded at respectively different light settings.

The actual measurement of the workpiece becomes an image 302 or an overall image composed of a plurality of individual images ("image 1", "image 2" to "image m") with an optical sensor, preferably image processing sensor consisting at least of optics and camera. This will be referred to as an image below.

By means of the step "correlation analysis" the picture becomes 302 with all template images ("Template 1", "Template 2" to "Template i") of the target data 101 compared. The target data associated with the template with the greatest match, in particular CAD data ("CAD") and "tolerances", are referred to in the next step as "selected target data", in particular "target geometries" together with the determined "position" of the workpiece. the target data further processed. From the "position" of the "selected desired data", a coarse adjustment of the image 1, not shown, takes place with respect to the "desired geometries". Subsequently, the determination of the measurement window for the step of "feature extraction" of the features or contours from the image. In addition, the "selected target data" in the step "fitting" for the fitting of the extracted features in the target data, in particular selected "target geometries". used.

The fitting can be done with respect to the desired geometries in the form of a "bestfit" fit or in addition, taking into account the tolerances in the form of a so-called "Toleranzfit" adjustment.

The last step represents the "result output", whereby the determined "measures" of the characteristics and, if applicable, the "deviations" to the target values are indicated and preferably additionally the "compliance with the tolerances" and the measure of the "minimum underrun" or the measure of the "Maximum overshoot" of the tolerances or setpoints are output.

In the 12 is an independent invention illustrative arrangement of the multi-sensor system with a reinserted tactile sensor head 401 shown. Fixed to, for example, a coordinate measuring machine is an optical sensor 402 , at least consisting of a camera 403 and a look 404 (with optical axis 404a ), and a first changeover interface 405 , In addition, a bright field illumination 406 and a beam path of a laser distance sensor 407 for example, the Foucault principle in the beam path (optical axis 404a ) of the optical sensor 402 Mirrored, as well as an exterior to the optics 404 and the first changeover interface 405 arranged dark field illumination 408 shown.

Changeable at the first interface 405 arranged is an adapter 410 that is a basic element 409 a tactile probe system or tactile sensor contains. The basic element 409 contains a second change interface 411 at the measuring system 412 of the tactile sensor head 401 changeable, which in turn with a stylus 413 is connected, preferably interchangeably connected, in turn, from a plate 414 , a stylus 415 and a probe element 416 consists. With the feeler element 416 becomes a workpiece 417 at a measuring location 418 touched and measured by the deflection by the measuring system 412 is determined. adapter 410 with tactile sensor head 401 are stored in a first parking station, not shown. The measuring system 412 is stored in a second parking station, not shown. The button insert 413 is manually interchangeable or automatically stored in another parking station.

In 13 is the tactile sensor, so the adapter 410 with the base element 409 and the tactile sensor head attached thereto 401 stored in the first parking station, not shown. At the first change interface 405 is now a tactile-optical sensor head 419 attached. The deflection of a probe element 420 , which on a flexurally elastic probe extension 420a is attached directly to the optical sensor 402 , which is preferably formed as an image processing sensor, and indirectly via a on the flexurally elastic probe extension 420a attached reflector 420b with the distance sensor 407 detected. The feeler element 420 touches the workpiece at the measuring point 418 ,

14 now shows one instead of the tactile-optical sensor head 419 at the first changeover interface 405 substitute conversion lens 421 for optimal direct measurement of the workpiece 417 with the distance sensor 407 at the measuring location 418 is used. Will the conversion lens 421 stored in the first parking station, the direct measurement of the workpiece 417 with the optical sensor 403 Realized being the center of the camera 403 covered measuring range the measuring location 418 Are defined. In this case, conversion lens 421 as sensor head of the distance sensor 407 to understand.

With regard to an independent invention shows 15 a rotationally symmetrical workpiece 501 like nozzle needle. The symmetry or rotation axis is shown in dashed lines and with the reference numeral 502 characterized. The workpiece 501 is shown only partially and is denoted by the reference numeral 503 broken lines indicated. At the outer contour of the workpiece 501 There are several contour sections like the straight line sections 504 and the radius section 505 , Between these sections 504 . 505 are intersections 506 determined. Between the straight sections 504 are for example the diameter 507 or between the intersections 506 the diameter 508 determined. Likewise can be the angle 509 between the straight sections 504 determine. Between the straight sections 504 you can also adjust the angles 513 and 514 determine, for example, to determine the angle 509 can be used. Likewise, the length of the straight line sections can be 504 for example, the length 510 or the length 511 determine. Also, for example, the angle can be 512 between straight sections 504 determine.

In the 16 becomes the clamping of the workpiece 501 in the V-shaped groove 515 shown. The rotation around the workpiece axis of symmetry 502 takes place by means of a rotatable, driven pressure roller 516 , The pressure roller 516 is about a connection 517 with a base 518 , which may also represent the connection to a coordinate measuring machine, for example. At the base 518 is also the image processing sensor 519 to which an imaging optics 520 counts, with the help of which the image processing sensor 519 the outer contour of the means of a transmitted light source 522 with preferably parallel light 523 illuminated workpiece section 521 detected.

17 shows a first embodiment of one of the independent inventive arrangements for the determination of geometric features or structures of a workpiece 610 , The measurements on the workpiece 610 be doing by probing with a Antastformelement 601 performed, which in contact with the workpiece 610 is deflected and a flexible elastic probe extension 604 emanates. The deflection is determined by two sensors, a laterally measuring optical sensor 603 , Preferably image sensor, the deflection perpendicular to its optical axis 602 determines how this is sufficiently described in the prior art, and a vertically measuring interferometric distance sensor 605 , which is the deflection in the direction of the optical axis 602 certainly. Together with the flexible elastic probe extension 604 and other parts of a preferably interchangeable unit discussed below 606 These two sensors form the tactile-optical sensor according to the invention.

The tactile-optical sensor preferably includes an imaging optics 607 , which usually consists of several lenses and can also be designed as zoom optics to a beam path 608 along the optical axis 602 to form on the probe element 601 or a target associated with it 609 is focused. The optical axis 602 , the imaging optics 607 and the beam path 608 are first the laterally measuring optical sensor 603 but are also below for the interferometric distance sensor 605 used.

As can be seen in detail in the prior art, the shadow of the Antastformelements 601 or the target 609 with transmitted light illumination or the self-illuminating sensing element 601 or the self-luminous target 609 be recorded. In the context of this application, the second variant, also referred to as self-lighting, is preferably used. This self-lighting is generated by placing light on the workpiece 610 opposite side 626 the button extension 604 , So on the probe extension side on the remote with respect to the probe or remote side, coupled into this and within this to Antastformelement 601 or, if available, the target 609 , is forwarded. The probe extension 604 is designed as at least partially light-conducting, for example as a glass or plastic fiber. scanning element 601 or target mark 609 are formed by known from the prior art coating so that they emit the supplied light, which of the imaging optics 607 recorded and in the direction of the evaluation units 612 . 613 the sensors 603 and 605 is shown. The beam paths of both sensors extend to an optical splitter 611 on the one hand and on the one hand in the direction of the evaluation unit 612 of the lateral measuring sensor 3 and on the other hand in the direction of the evaluation unit 613 of the interferometric sensor 605 directed. The optical divider 611 is pronounced, for example, as a semi-permeable film (pellicle) or as a splitter cube. The evaluation units 612 . 613 For example, cameras with preferably planar receiver surface, such as CCD or CMOS cameras and may have additional imaging lenses upstream.

To the vertically measuring interferometric distance sensor 605 belong next to the imaging optics 607 and the evaluation units 613 , including the light sources 614 and 615 , the fiber optic cables 617a . 617b and 617c and a coupling arrangement 616 , The latter usually consists of a fiber end with superior beam shaping optics and couples the radiation 618 the light sources 614 and 615 from the optical fiber 617c so that a coupling into the button extension 604 is possible. The light of the two light sources 614 and 615 is through a Y-coupler, which is the optical fiber 617a and 617b with the optical fiber 617c connects, united. The light sources 614 and 615 , the fiber optic cables 617a . 617b and 617c and the coupling arrangement 616 Alternatively, you can also directly in the unit 606 to be ordered.

The preferably exchangeable or exchangeable unit 606 includes, among other things, the probe extension 604 , Medium 637 for attaching the probe extension, means 622 . 625 to divide the radiation 618 into the measuring radiation 619 and the reference radiation 620 , Medium 622 . 623 . 624 for deflecting the measuring radiation 619 in the direction of the workpiece 610 opposite side 626 the button extension 604 and means 627 . 628 . 629 . 630 . 631 . 632 . 633 . 634 like reflectors to form a reference beam path 621a . 621b . 621c , In that regard, reference is made expressly to the self-explanatory figures. The unit 606 also includes means not shown, such as permanent magnets, to an interface 635 to be releasably fastened. The coupling of the radiation 618 takes place preferably laterally to the unit 606 on an interface designed as an opening, for example 636 but can also do so within the interface 635 respectively. Optionally, then an additional deflection of the radiation 618 required. Unless the light sources 614 and 615 , the fiber optic cables 617a . 617b and 617c and the coupling arrangement 16 right in the unit 6 are arranged over the change interface 635 the required electrical supplies to the light sources 614 and 615 guided.

In the in 17 shown first inventive arrangement is based on the probe extension 604 the sensing element 601 out; becomes the radiation 618 at the optical splitter layer 622 into the measuring radiation 619 and the reference radiation 620 split, wherein the optical splitter layer 622 simultaneously the measuring radiation 619 in the direction of the side facing away from the workpiece 626 the button extension 604 deflects, causing the measuring radiation 619 in the button extension 604 is coupled; and becomes the reference radiation 620 through the reflectors 627 and 628 to the reference mirror 629 deflected, reflected by this and by the reflectors 627 and 628 again on the optical splitter layer 622 deflected and from this in the direction of imaging optics 607 and thus in the direction of the evaluation unit 613 displayed. The reference beam path extends partially inclined, in particular at right angles, to the optical axis (sections 621a ) and partially parallel to the optical axis (section 621b ), so it is folded several times (redirected). The reflectors 627 . 628 and 629 are located outside the beam path 608 , ie in particular laterally next to the optical beam path 608 ,

The in the in 18 fragmentary illustrated second inventive arrangements, in which only the compared to 17 changed unit 606 is shown, go from the button extension 604 the sensing element 601 and the target 609 out; becomes the radiation 618 at the optical splitter layer 625 into the measuring radiation 619 and the reference radiation 620 divided, the deflection of the measuring radiation takes place 619 in the direction of the side facing away from the workpiece 626 the button extension 604 through the as a reflector 623 trained surface of a deflection 624 like mirrored prism, reducing the measuring radiation 619 in the button extension 604 is coupled; and becomes the reference radiation 620 through the reflectors 630 . 631 . 632 . 633 and 634 in the direction of the imaging optics 607 and thus in the direction of the evaluation unit 613 displayed. Preference is given to the last traversed reflector 634 , as shown, by a further mirrored surface of the deflecting device 624 educated. The reference beam path is partially perpendicular to the optical axis (sections 21a ), partially inclined to the optical axis (section 621c ) and partially parallel to the optical axis (section 621b ), so it is folded several times (redirected). The reflectors 630 . 631 . 632 and 633 as well as the optical splitter layer 625 are located outside the beam path 608 , ie in particular laterally next to the optical beam path 608 ,

Likewise in the 18 partially shown by way of example is the optionally usable further distance sensor. The beam path 638 Furthermore, distance sensor is, for example, by another optical divider, comparable to the optical divider 611 , in the beam path 608 mirrored. By appropriately arranged lenses before the beam path 638 however, by the imaging optics 607 not on the sensing element 601 or the target 609 focused, but on the additional target as a reflector formed from the workpiece end facing away 626 the button extension 604 , This reflector 626 is preferably only partially mirrored, on the one hand, the measuring radiation 619 at least partially pass and, if appropriate, the intrinsic lighting of the Antastformelements 601 or the target 609 through the light of the beam path 638 allowing the function of the further distance sensor also independent of the on state of the interferometric distance sensor 605 is possible. This mode is used for example in the DE 10 2010 060 833 described.

By changing the arrangement of the positions, in particular the distances of the reflectors in the reference beam paths to 17 or 18 can be the optical path length of the reference beam path to the optical path length of the measuring radiation 619 adjusted through the measuring beam path. So are different lengths of stylus extensions 604 realizable.

According to the above cited prior art, the entire arrangement of 17 respectively. 18 preferably integrated in a coordinate measuring machine as a sensor. Exemplary will be on the 1 of the DE 10 2004 022 314 or the 12 of the DE 10 2010 060 833 directed.

In the 19 are an example of a measuring table 701 and structures attached to it 702 represented according to the independent teaching or device according to the invention. The structures 702 are lines with irregular spacing and at the complete edge area of the measuring table 701 attached and become through the workpiece 703 in each of the adjacent overlapping individual images 704a to 704f completely obscured. The single pictures 704a to 704f are successively recorded with an image processing sensor, not shown, and then to an overall picture 705 composed in which the complete workpiece 703 is included. The exact position that the image processing sensor takes during taking the frames 704a to 704f relative to the workpiece 703 does not need to be known according to the invention, since the structures 702 in all frames 704a to 704f be at least partially recorded and thus on the location of each frame 704a to 704f inferred. For moving the sensor and / or the workpiece relative to one another, manual or motorized axle drives are used, wherein preferably no measuring axes are present. Alternatively, the section of the workpiece depicted in the individual images can also be varied by sensor-internal or external deflection of the beam path of the optical sensor, for example by deflection and / or refraction of the measuring radiation of the sensor, or by tilting the sensor.

20 shows an example of an arrangement according to the invention for temperature control of a device for computed tomographic measurement with a computed tomography sensor 801 . 802 . 804 and the air in a housing 800 , Computed tomography sensor technology consists of a detector 801 , a radiation source such as an X-ray source 802 and a turntable 804 , On the relative to the fixed part 804a of the turntable 804 rotatable part 804b of the turntable 804 there is a workpiece 803 , From this, in a computer tomographic measurement radiographic images in several rotational positions of the turntable 804 with the detector 801 and reconstructed into a 3D volume from which surface measurement points are generated, which are used to determine features and contours on the workpiece 803 be used.

Computed tomography sensors 801 . 802 . 804 and the workpiece 803 are located in the housing 800 , which also represents a radiation protection arrangement and is therefore largely closed. According to the invention, cooling is in particular liquid cooling of the detector 801 provided by a coolant, provided by a cooling unit arranged outside the housing 805 , through a supply line 806a to a detector 801 associated heat exchanger 808a . 807a , For example, by a pump contained in the cooling unit is transported. The detector 801 associated heat exchanger consists of one with the detector 801 thermally bonded plate 808a and cooling coils 807a through which the coolant flows. The thermal coupling between detector 801 , in particular the detector back, and the plate 808a is done by gluing or similar bonding techniques and is reinforced by introduced thermal paste. The connection between the cooling coils 807a and the plates 808a arises, for example, by soldering and the cooling coils 807a are often meandering. Corresponding heat exchanger elements are ready made ready to order in the retail trade.

After the coolant through the heat exchanger associated with the detector 808a . 807a has flowed, it is over the supply line 806b . 806c etc. one or more heat exchangers 808b . 807b . 808c . 807c , ... for cooling the air inside the housing 800 fed and then on the derivative 806d back to the cooling unit 805 guided. The heat exchangers used for air cooling, of which only two are shown here by way of example, wherein according to the invention also several, for example 4 or 8, are used, preferably also consist of plates 808b . 808c and soldered cooling coils 807b . 807c , To support the cooling of the air is ever heat exchanger 808b . 807b . 808c . 807c , ... one fan each 809a . 809b , provided so under the heat exchanger 808b . 807b . 808c . 807c , ..., and preferably directly connected to these, is arranged that the air from the housing interior in the direction of the arrows 810 , ie in the direction of the heat exchanger 808b . 807b . 808c . 807c , ... is transported.

21 shows according to an independent invention, a first embodiment of a transparent mandrel 901 integrated transmitted light illumination 902 , The lighting 902 consists of one or more light elements such as LED, LCD, laser diode or OLED or the like, but may also be a unit of these elements and form, for example, a luminous surface. The lighting 902 is in the transparent thorn 901 embedded, in particular cast, and preferably only with the characters "+" and "-" provided connecting wires for powering the lighting leave the mandrel. Of the mandrel 901 itself is in a chuck 903 attached according to the prior art, which in turn on a rotation axis or rotary / pivot axis 932 is attached according to the prior art. The axis of rotation or rotary / pivot axis 932 The job is to make a workpiece like a stent 916 to turn it from all sides through the optical sensor 928 is detectable. The rotary / swivel axis 932 and the optical sensor 928 are preferably corresponding in a coordinate measuring machine 26 integrated.

The workpiece, like the stent 916 , is on its inside on the thorn 901 mounted deferred and is upon rotation of the pivot axis 932 together with the thorn 901 turned.

The 22 shows an alternative arrangement of lighting 902 inside the hollow thorn 901 , It may in turn consist of one or more individual lighting elements or lighting surfaces.

In the 23 becomes an expandable spike 901 shown. The thorn 901 consists of several jaws 901 . 901b etc., which are distributed over the circumference and are mutually movable, in particular in the radial direction. By means of a correspondingly shaped auxiliary mandrel 904 or from the prior art known spreading, the mandrel can be 901 spread as in 23b , in comparison to the non-splayed state, illustrates in 23a represented. Together with the thorn 901 becomes the stent 916 likewise spread open and can be examined more suitably with regard to cracks or the like, in particular by means of the arrangement shown in FIGS. 901 and 906 illustrated optical sensor 928 ,

24 shows a first arrangement according to the invention for fastening a stent 916 whose inner diameter is at least partially different. The thorn 901 consists of two parts 1-1 and 1-2 , which correspond to the inner diameters of the stent 916 have different outer diameter and are pushed into one another. For this the part has 1-1 one to the outside diameter of the part 1-2 corresponding slightly larger inner cylinder, in which the part 1-1 introduced, and attached, for example, in the context of a fit, is.

The 25 shows a second arrangement according to the invention for fastening a stent 916 whose inner diameter tapers continuously at least in sections. The part 1-1 the mandrel has a corresponding taper at the outer diameter, with stents 916 can be fixed with different lengths. The part 1-2 The mandrel is in turn in a corresponding inner cylinder of the part 1-1 inserted and serves to attach the end of the stent facing away from the chuck 916 which has, for example, a section of constant diameter on this side. Also the part 1-2 of the spine may be provided with a corresponding thickening, insofar as the stent 916 has a corresponding shape. Further embodiments of plug-in mandrel parts depending on the shape of the stent are conceivable.

The well-known and again in the 26 reproduced principle of a coordinate measuring machine 930 includes a z. B. made of granite base frame 912 with measuring table 914 on which an object or workpiece to be measured 916 is positioned to measure its surface properties, ie features or structures. The positioning of the workpiece 916 can be right on the measuring table 914 or indirectly by attachment to a rotation axis or rotary / pivot axis 932 carried out, the agents of the invention such as chucks 903 , Thorn 901 , Mandrel parts 1-1 . 1-2 and auxiliary thorn 904 for fixing and the means 902 be used for lighting.

Along the base frame 912 is a portal 919 adjustable in Y-direction. These are columns or stands 920 . 922 sliding on the base frame 912 supported. From the columns 920 . 922 go a traverse 924 along which a carriage is movable, in turn, a quill or column 926 absorbs, which is adjustable in the Z direction. From the quill 926 or optionally one with the quill 926 connected exchange interface go out a sensor or measuring system, which may be designed as a tactile sensor, but also as an optical sensor 928 , In that regard, however, reference is made to well-known techniques, as well as with respect to other used sensors such as laser distance sensor, white light interferometer, image processing sensors, X-ray sensor or chromatic focus sensor or confocal scanning probe, without thereby limiting the teaching of the invention. The sensor or sensors are selected and used in accordance with the measuring task, around the coordinate measuring machine 930 , which is also referred to as a multi-sensor coordinate measuring device, to be optimally configured for the respective measuring task. At the same time, problems that occur with conventional coordinate measuring machines are solved.

To the coordinate measuring machine 930 can be used with the appropriate sensor, the coordinate measuring machine may have a sensor changer. Thus, several sensors each optionally via an interface with the coordinate measuring machine 930 be replaced by hand or by automatic pickup from a parking station.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• EP 0988505 [0004, 0152, 0160, 0185, 0238, 0275]
• EP 1071921 [0005, 0153, 0186, 0276]
• EP 1082581 [0006, 0154, 0187, 0277]
• DE 19824107 [0007, 0155, 0188, 0278]
• DE 102004022314 [0008, 0156, 0189, 0279, 0426, 0445, 0466]
• EP 01/10826 [0009, 0280]
• DE 102010060833 [0010, 0157, 0166, 0190, 0238, 0281, 0281, 0426, 0431, 0444, 0445, 0464, 0466]
• DE 102014111086 [0030]
• EP 1299691 [0031]
• WO 2009049834 A2 [0031]
• EP 1071921 B1 [0167]
• EP 01/010826 [0191]
• EP 1319164 [0211]
• EP 1157313 [0211]
• DE 10341666 [0232, 0314]
• DE 102004058655 [0232, 0314]
• DE 10211760 [0232]
• DE 102013102335 [0258]
• DE 102013102352 [0258]
• EP 1920213 B1 [0358, 0359]
• EP 988505 B [0437]
• WO 98/57121 [0437]

Cited non-patent literature

• Andreas Ettemeyer: "New three-dimensional fiber probe for multisensor coordinate measurement", Opt. Eng. 51 (8), 081502 (May 14, 2012) [0282]
• http://dx.doi.org/10.1117/1.OE.51.8.081502 [0282]

Claims (29)

Probe of a tactile-optical sensor comprising an at least partially bending elastic trained probe extension ( 13 ) with a fastening section ( 60 ) for insertion into a receptacle ( 14 ), wherein the attachment portion a portion of the probe extension or a portion of the probe extension receiving bracket ( 11 . 12 ), characterized in that the attachment portion ( 60 ) is designed as anti-rotation. Device for determining geometric features or structures on a workpiece ( 27 ), by means of a tactile-optical sensor ( 1 ), at least consisting of a laterally measuring optical sensor ( 2 ), preferably image processing sensor, preferably a vertically measuring optical distance sensor ( 28 ), and an at least partially flexurally elastic probe extension ( 13 ), whereby the button extension ( 13 ) at least go out: a Antastformelement ( 8th ), which in contact with the workpiece ( 27 ) is deflectable, and preferably at least one the Antastformelement ( 8th ) associated target ( 7 ), which when touching the Antastformelementes ( 8th ) with the workpiece ( 27 ) is deflectable, wherein the lateral deflection of the Antastformelements ( 8th ) or the target ( 7 ) perpendicular to the optical axis ( 26 ) of the laterally measuring optical sensor ( 2 ) can be determined with this, and preferably the vertical deflection of the Antastformelements ( 8th ) or the target ( 34 ) along or nearly along the optical axis ( 26 ) of the laterally measuring optical sensor ( 2 ) with the distance sensor ( 28 ) can be determined, characterized in that the probe extension ( 13 ) of a fiber intake ( 14 . 35 . 36 ), to which directly or indirectly a flexurally elastic part ( 10 ), to which directly or indirectly the sensing element ( 8th ) or, if applicable, the target ( 7 ), whereby if any target ( 7 ) between this and the Antastformelement ( 8th ) extending part ( 9 ) of the probe extension with respect to the flexurally elastic part ( 10 ) is rigid. Method for determining geometric features or structures on a workpiece using a probe of a tactile-optical sensor comprising an at least partially bending elastic trained probe extension with a mounting portion for insertion into a receptacle or fiber receptacle, wherein the attachment portion is a portion of the probe extension or a portion the holder which receives the probe extension, characterized in that the fastening portion is formed as anti-rotation. Method for determining geometric features or structures on a workpiece by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably an image processing sensor, preferably a vertically measuring optical distance sensor, and an at least partially flexible elastic probe extension, wherein of the probe extension at least emanating: a Antastformelement which is deflected upon contact with the workpiece, and preferably at least one of the Antastformelement associated target mark, which is deflected when touching the Antastformelementes with the workpiece, wherein the lateral deflection of the Antastformelements or the target perpendicular to the optical axis of the laterally measuring optical sensor is determined with this, and preferably the vertical deflection of the sensing element or the target along or almost along the optical axis of the laterally measuring optical sensor with de m distance sensor is determined, characterized in that a probe extension is used, which starts from a fiber receptacle, which directly or indirectly adjoins a flexurally elastic part, which directly or indirectly adjoins the Antastformelement or optionally the target, wherein optionally present target between this and the Antastformelement extending part of the probe extension with respect to the flexurally elastic member is rigid. Method for producing a stylus extension, a probing element originating from the stylus extension and preferably a target, for a tactile-optical sensor for use in a coordinate measuring machine for measuring geometrical features or structures on a workpiece, wherein the stylus extension comprises at least a portion of a fiber, In particular, an optical glass fiber or a piece of fiber such as glass fiber piece is characterized in that at least a portion of the fiber portion under the influence of heat, such as laser, arc or heating wire, is tapered by pulling in its diameter, and that the Antastformelement and / or existing target this is produced by melting, and preferably taking advantage of cohesion, or gluing. A method for producing a probe extension for a tactile-optical sensor according to preferably claim 4, wherein the probe extension is provided for receiving in a fiber receptacle, characterized in that at the end facing away from the Antastformelement end of the probe extension the outside of the probe extension, preferably outside of the probe extension receiving hollow cylinder, a region-wise flat flattening is formed. Device for determining geometric features or structures on a workpiece ( 116 ) by means of a tactile-optical sensor having a holder ( 108 ) for an at least partially flexurally elastic probe extension ( 105 ), wherein at least assume the probe extension: a Antastformelement ( 107 ), which is deflectable upon contact with the workpiece, and a first target mark ( 104 ), which is deflectable on contact of the Antastformelementes with the workpiece and the deflection, preferably lateral deflection, with a first laterally measuring optical sensor, preferably image processing sensor ( 101 ), can be determined, characterized in that the probe extension ( 105 ) in a first area ( 105a ), which at least the Antastformelement ( 107 ) and the first target ( 104 ), has a higher rigidity than in a second region ( 105a ), the holder ( 108 ) and the first target ( 104 ) or the bracket and the first area connects. Device for determining geometric features or structures on a workpiece ( 116 ) by means of a tactile-optical sensor according to at least claim 61, wherein the first and preferably additionally a second target ( 104 . 111 ) of the at least partially flexurally elastic probe extension ( 105 ), wherein the first and in the presence of the second target this the Antastformelement ( 107 are associated with the workpiece and the deflection of the first and in the presence of the second target these perpendicular or nearly perpendicular to the detected with the first optical sensor deflection of the first target, with a second optical sensor, preferably optical distance sensor ( 109 ), can be determined, characterized in that the first area ( 105a ) higher rigidity between the probe form element ( 107 ) and the first target ( 104 ) and in the presence of the second target ( 111 ) is arranged between the first and second target mark and in the presence of the second target mark the second region ( 105b ) low rigidity between the holder ( 108 ) and the region between the first and second target marks. Apparatus for determining geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of an at least partially flexible elastic probe extension, wherein at least emanating from the probe extension: a Antastformelement that is deflected upon contact with the workpiece, and a the target element associated target, which is deflected when touching the Antastformelementes with the workpiece and their lateral deflection, perpendicular to the optical axis of a laterally measuring optical sensor with the optical sensor, preferably image processing sensor, can be determined, characterized in that the side facing away from the optical sensor the target mark is at least partially provided with a reflective or fluorescent layer and that extending between the target and Antastformelement area of the shaft of the Tastverlängerung at least partially and / or the Antastformelement at least partially provided with a reflective or fluorescent layer. Device according to claim 9, characterized in that a second target emanates from the stylus extension, which can be detected by means of a second sensor, preferably a distance sensor. Method for determining geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of an at least partially flexible elastic probe extension, at least assume the probe extension: a Antastformelement that is deflected upon contact with the workpiece, and a the target element associated target mark, which is deflected when touching the Antastformelementes with the workpiece and their lateral deflection, perpendicular to the optical axis of a laterally measuring optical sensor, with the optical sensor, preferably image processing sensor is determined, characterized in that the means of a device according to at least one of the preceding claims of at least a portion of the reflective or fluorescent layers emitted radiation is imaged on the laterally measuring optical sensor and from the image, the lateral deflection of Antastformelemen is determined. Method for the automatic determination of geometric features and / or contours on a workpiece coming from a plurality of workpieces by means of an optical sensor, preferably an image processing sensor, wherein one or more images of the workpiece are picked up by means of the optical sensor and if necessary assembled into an overall image, From the image or overall image features and / or contours are extracted, a fit between the extracted features and / or contours and the desired geometries of the features and / or contours takes place, the Target geometries are taken from the target data associated with the respective workpiece, and preferably the tolerances of the features and / or contours contained in these target data are taken into account during the fitting, and wherein the actual dimensions and / or deviations from the desired geometries for the features and / or contours are available be set, characterized in that the selection of the respective workpiece associated target data is carried out automatically by the image or overall image with predetermined images or overall images (templates) of several candidate workpieces, preferably by means of correlation analysis, is compared, and the desired data are selected, which are assigned to the predetermined image of the workpiece, for which there is the largest match. Method for the automatic determination of geometric features and / or contours on a workpiece coming from a plurality of workpieces by means of an optical sensor, preferably an image processing sensor, wherein one or more images of the workpiece are picked up by means of the optical sensor and if necessary assembled into an overall image, From the image or overall image features and / or contours are extracted, a fit between the extracted features and / or contours and the desired geometries of the features and / or contours, wherein the desired geometries are taken from the respective workpiece associated target data and preferably in this Tolerances of the features and / or contours contained in the setpoint data are taken into account during the fitting, and wherein the actual dimensions and / or deviations from the desired geometries for the features and / or contours are made available, preferably according to one of the claims che 84, 85, 86, 92, 93, characterized in that the selection of the assigned to the respective workpiece target data is performed automatically by all of the features and / or contours automatically extracted from the image or picture and in all desired geometries of several possible workpieces are fitted, and the desired data are selected for which there is the greatest match in the fit, in particular least deviation from the desired geometries. Multi-sensor system for measuring geometric features and / or contours on a workpiece consisting of at least one optical and one tactile sensor ( 401 . 402 . 409 ), wherein at least some of the sensors each have at least one sensor head ( 401 ), which are exchangeably locatable, characterized in that the sensors ( 401 . 402 . 407 . 419 ) are locatable so that they have a common or almost common location ( 418 ) or the measuring locations ( 418 ) of the sensors ( 401 . 402 . 407 . 419 ) on or nearly on a straight line ( 404a ), the optical axis passing through the measuring location ( 404a ) of the optical sensor (s) ( 402 . 407 ) is defined. Method for measuring geometric features on rotationally symmetrical workpieces, characterized in that the workpiece rotates about its axis of symmetry and preferably carried out measurements in several rotational positions and results determined therefrom are combined. Device for measuring geometric features of a particular rotatable symmetrical workpiece ( 501 ), characterized in that the device is a the workpiece ( 501 ) receiving V-groove-shaped holder ( 515 ) and a driven pressing the workpiece in the holder and in this rotating pressing element ( 516 ) comprising a base element ( 517 . 518 ) from which an optical sensor measuring the workpiece ( 519 ), or which is connected to a workpiece support, which is adjustable relative to a workpiece-measuring optical sensor. Device for determining geometric features or structures on a workpiece ( 610 ), by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor ( 603 ), preferably image processing sensor, a vertically measuring interferometric distance sensor ( 605 ), and an at least partially flexurally elastic probe extension ( 604 ), whereby the button extension ( 604 ) at least go out: a Antastformelement ( 601 ), which in contact with the workpiece ( 610 ) together with the button extension ( 604 ) is deflectable, and preferably a the Antastformelement ( 601 ) associated target ( 609 ), which when touching the Antastformelementes ( 601 ) with the workpiece ( 610 ) together with the button extension ( 604 ) is deflectable, wherein the lateral deflection of the Antastformelements ( 601 ) or the target ( 609 ), perpendicular to the optical axis ( 602 ) of the laterally measuring optical sensor ( 603 ), with which it can be determined, and the vertical deflection along or almost along the optical axis ( 602 ) of the laterally measuring optical sensor ( 603 ) with the distance sensor ( 605 ) can be determined, wherein the measuring radiation ( 619 ) of the interferometric distance sensor ( 605 ) in the button extension ( 604 ) and from the Antastformelement ( 601 ) or the associated target ( 609 ) and with the reference radiation ( 620 ) of the interferometric distance sensor ( 605 ) can be superimposed and resulting interference (speckle) can be evaluated, characterized in that the button extension side on the in relation to the Antastformelement ( 601 ) remote side and from the optical axis ( 602 ) of the laterally measuring optical sensor ( 603 ) interspersed, in particular spaced from the probe extension ( 604 ), an optical splitter layer ( 622 ) is arranged such that the splitter layer ( 622 ) for the distribution of measuring radiation ( 619 ) and reference radiation ( 620 ) is formed such that the splitter layer ( 622 ) from a reference mirror ( 629 ) reflected reference radiation ( 620 ) deflected in a direction that is on the in relation to the Antastformelement ( 601 ) facing away from - parallel or - inclined or - along the optical axis ( 602 ) of the laterally measuring sensor ( 603 ), optionally between divisor layer ( 622 ) and reference levels ( 629 ) one or more reflectors ( 627 . 628 ), which together with the reference mirror ( 629 ) form a reference beam path, wherein the reference radiation ( 620 ) preferably in one direction parallel ( 621b ) to the optical axis ( 602 ) or inclined in one direction ( 621a ) to the optical axis ( 602 ) of the laterally measuring sensor ( 603 ) is deflectable. Device for determining geometric features or structures on a workpiece ( 610 ), by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor ( 603 ), preferably image processing sensor, a vertically measuring interferometric distance sensor ( 605 ), and an at least partially flexurally elastic probe extension ( 604 ), whereby the button extension ( 604 ) at least go out: a Antastformelement ( 601 ), which in contact with the workpiece ( 610 ) together with the button extension ( 604 ) is deflectable, and preferably a the Antastformelement ( 601 ) associated target ( 609 ), which when touching the Antastformelementes ( 601 ) with the workpiece ( 610 ) together with the button extension ( 604 ) is deflectable, wherein the lateral deflection of the Antastformelements ( 601 ) or the target ( 609 ), perpendicular to the optical axis ( 602 ) of the laterally measuring optical sensor ( 603 ), with which it can be determined, and the vertical deflection along or almost along the optical axis ( 602 ) of the laterally measuring optical sensor ( 603 ) with the distance sensor ( 605 ) can be determined, wherein the measuring radiation ( 619 ) of the interferometric distance sensor ( 605 ) in the button extension ( 604 ) and from the Antastformelement ( 601 ) or the associated target ( 609 ) and with the reference radiation ( 620 ) of the interferometric distance sensor ( 605 ) can be superimposed and resulting interference (Speckle) can be evaluated, characterized in that the probe extension side on the in relation to the Antastformelement ( 601 ) remote side adjacent to the beam path ( 608 ) of the laterally measuring optical sensor ( 603 ) an optical splitter layer ( 625 ) is arranged such that the splitter layer ( 625 ) for the distribution of measuring radiation ( 619 ) and reference radiation ( 620 ) is formed such that the measuring radiation ( 619 ) after passing through the splitter layer ( 625 ) by means of a first surface ( 623 ) a deflection device ( 624 ) existing reflector in the direction of the button extension ( 604 ) is deflectable, and that the reference radiation ( 620 ) by means of at least two reflectors ( 630 . 631 . 632 . 633 . 634 ) is deflectable to form at least a part of the reference beam path in a direction that is on the with respect to the Antastformelement ( 601 ) facing away from - parallel or - inclined or - along the optical axis ( 602 ) of the laterally measuring sensor ( 603 ), wherein preferably the last-acting reflector ( 634 ) on a second surface ( 634 ) of the deflection device ( 624 ), and wherein preferably the reference radiation ( 620 ) between the at least two reflectors ( 630 . 631 . 632 . 633 . 634 ) in one or more directions parallel ( 621b ) to the optical axis ( 602 ) or inclined ( 621a . 621c ) to the optical axis ( 602 ) of the laterally measuring sensor ( 603 ) runs. Method for the determination of geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, a vertically measuring interferometric distance sensor, and an at least partially flexible elastic probe extension, wherein at least of the probe extension go out: a Antastformelement which is deflected upon contact with the workpiece together with the probe extension, and preferably a the Antastformelement associated target mark, which is deflected when touching the Antastformelementes with the workpiece together with the probe extension, wherein the lateral deflection of the Antastformelements or the target is determined perpendicular to the optical axis of the laterally measuring optical sensor, and the vertical displacement along or nearly along the optical axis of the laterally measuring optical sensor ors is determined with the distance sensor, wherein the measuring radiation of the interferometric distance sensor in the probe extension coupled and emitted by the Antastformelement or the associated target and is superimposed with the reference radiation of the interferometric distance sensor and thereby resulting interference (speckle) are evaluated, characterized in that the probe extension side on the remote with respect to the Antastformelement side and of the optical axis of the interspersed by the laterally measuring optical sensor, in particular spaced from the probe extension, an optical splitter layer is arranged so that the splitter layer is formed for splitting measurement radiation and reference radiation, that by means of the splitter layer of a reference mirror back-reflected reference radiation is deflected in a direction on the in relation facing away from the Antastformelement side - parallel or - inclined or - along the optical axis of the laterally measuring sensor, wherein optionally one or more deflections of the Referenzstr Ahlengangs between divider layer and reference mirror by means of one or more reflectors, which together with the reference mirror form a reference beam, take place, preferably wherein the reference radiation is preferably deflected in a direction parallel to the optical axis or in a direction inclined to the optical axis of the laterally measuring sensor. Method for the determination of geometric features or structures on a workpiece, by means of a tactile-optical sensor, at least consisting of a laterally measuring optical sensor, preferably image processing sensor, a vertically measuring interferometric distance sensor, and an at least partially flexible elastic probe extension, wherein at least of the probe extension go out: a Antastformelement which is deflected upon contact with the workpiece together with the probe extension, and preferably a the Antastformelement associated target mark, which is deflected when touching the Antastformelementes with the workpiece together with the probe extension, wherein the lateral deflection of the Antastformelements or the target is determined perpendicular to the optical axis of the laterally measuring optical sensor, and the vertical displacement along or nearly along the optical axis of the laterally measuring optical sensor ors is determined with the distance sensor, wherein the measuring radiation of the interferometric distance sensor coupled into the probe extension and output from the probe form element or the associated target and is superimposed with the reference radiation of the interferometric distance sensor and thereby resulting interferences (Speckle) are evaluated, characterized in that button extension side an optical splitter layer is arranged on the remote with respect to the Antastformelement adjacent to the beam path of the laterally measuring optical sensor, that the splitter layer for splitting measurement radiation and reference radiation is formed, that the measuring radiation by passing through the splitter layer by means of a first surface of a Deflector existing deflector is deflected in the direction of the probe extension, and that the reference radiation by means of at least two reflectors to form at least a portion d it is deflected reference beam path in a direction which is on the side facing away from the Antastformelement - parallel or - inclined or - along the optical axis of the laterally measuring sensor, preferably as the last-acting reflector, a second surface of the deflecting device is used, and wherein the reference radiation between the at least two reflectors extends in one or more directions parallel to the optical axis or inclined to the optical axis of the laterally measuring sensor. Method for measuring geometric features and / or contours on a workpiece arranged on a measuring table by means of an optical sensor, preferably an image processing sensor, wherein by means of the optical sensor a plurality of individual images of the workpiece or a portion of the workpiece in different relative positions between the workpiece and sensor and recorded Assembled, the position of the individual images according to the relative positions is taken into account, and from the overall image, the features and / or contours are extracted, characterized in that the position of the individual images to each other by means of a particular workpiece-independent referencing is determined, preferably by On the measuring table attached structures are detected in the individual images, and the position of the referencing or the structures is determined. Device for measuring geometric features and / or contours on a workpiece, at least comprising a measuring table on which the workpiece can be arranged, and an optical sensor, preferably image processing sensor, and means for relative movement between the workpiece and sensor, for receiving and storing a plurality of individual images the workpiece or a region of the workpiece, composition to form an overall image and evaluation of the overall image and means for extracting features and / or contours from the overall image, characterized in that structures, in particular patterns such as lines or other geometric shapes, preferably on the measuring table non-repeating patterns are mounted, which are arranged at least in the edge regions of the measuring table, preferably along the entire edge region of the measuring table, and that the patterns are detectable with the optical sensor. Method for tempering, in particular cooling, of at least parts of a computed tomography sensor system, the computed tomography sensor system consisting of radiation source, preferably x-ray source, detector, preferably area detector, and turntable for rotating the workpiece or for rotating radiation source and detector, and the computed tomography Sensor system and / or the workpiece surrounding air and preferably the workpiece, wherein the computed tomography sensor and the workpiece are located in a housing, preferably with the help of computer tomography sensors geometric features and / or contours are measured on a workpiece, characterized in that a common cooling circuit is used for cooling, preferably direct cooling, of the detector and for cooling, preferably indirect cooling, of the air surrounding the sensor system and / or the workpiece. Device for temperature control, in particular cooling, of at least parts of a computed tomography sensor system, the computed tomogram sensor system consisting of radiation source, preferably x-ray source, detector, preferably area detector, and turntable for rotating the workpiece or for rotating radiation source and detector, and computer tomography Sensor and / or the workpiece surrounding air and preferably the workpiece, wherein the computed tomography sensor and the workpiece are in a housing, and wherein preferably the computed tomography sensor is adapted to measure geometric features and / or contours on a workpiece, characterized in that the device comprises a common cooling circuit for cooling, preferably direct cooling, of the detector and for cooling, preferably indirect cooling, of the ambient air surrounding the sensors and / or the workpiece. Device for determining geometric features or structures on a rotationally symmetrical workpiece, preferably a stent ( 916 ), which by means of a at least partially extending inside the workpiece mandrel ( 901 ) can be arranged with an optical sensor ( 928 ), preferably image processing sensor, using a transmitted light illumination ( 902 ), wherein the mandrel on a mechanical axis of rotation, preferably mechanical pivot axis ( 932 ), characterized in that the means for transmitted light illumination ( 902 ) can be arranged in the interior of the rotationally symmetrical workpiece, wherein the means for transmitted light illumination with the mandrel ( 901 ) form a unit. Device according to claim 25, characterized in that the outer diameter of the mandrel ( 901 ) is adjustable, wherein preferably the mandrel of several, preferably three or four, parts ( 901 . 901b ), which are distributed over the circumference and are arranged spreadable or expandable to each other. Method for determining geometric features or structures on a rotationally symmetrical workpiece, preferably a stent, by means of a device according to at least one of the preceding claims 25 or 26. Method according to claim 27, characterized in that for fastening the workpiece, or for fixing the workpiece and widening the diameter of the workpiece, on the mechanical axis of rotation or mechanical axis of rotation / pivot axis of the outer diameter of the mandrel used for fastening according to the inner diameter of the workpiece or for examining structures such as cracks is set larger than the inner diameter of the workpiece, wherein preferably the mandrel consists of several, preferably three or four, individual parts which are distributed over the circumference and spread apart or expanded. A method according to preferably claim 27, characterized in that for fixing a workpiece, the offset in the axial direction of the workpiece to each other at least two areas has different inner diameter, preferably in the diameter over its length at least partially tapering or thickening stent such as cardiac stent, on the mechanical axis of rotation or mechanical rotary / pivot axis of at least two parts of different outer diameter existing mandrel is used, the parts of Mandrel be used to attach the corresponding portion of the workpiece with matching inner diameter and the parts of the mandrel in the axial direction offset from each other and / or are connected.

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