DE102014108353A1 - Method and device for the determination of geometries on measured objects by means of a combined sensor system - Google Patents

Abstract

The invention relates to a method and a device for measuring the geometry of workpieces by means of a combined sensor system, at least consisting of an image processing sensor and optics associated therewith and at least one distance sensor and / or a tactile-optical fiber sensor and / or a light field camera. A combined sensor system is to be made available that enables the functionalities of several, as many as possible sensors for measuring complex workpieces in a compact sensor head. For this purpose, it is proposed that surface points and / or contours on the measurement object be determined, the determination optionally being made by means of at least one of the sensors integrated in the sensor system, and a common beam path being at least partially used for all sensors integrated in the sensor system.

Description

The invention relates to a method and a device for measuring the geometry of workpieces by means of a combined sensor system, comprising at least one image processing sensor and optics associated therewith.

According to the prior art, image processing sensors are known, which evaluate edges or contours of measurement objects whose image is imaged by means of an optical arrangement such as optics with fixed working distance and fixed magnification or zoom optics onto a matrix-like detection device such as CCD or CMOS camera become. Distance sensors are in particular optical distance sensors to be understood, in which the light of a light source is directed by means of an optical device to the measurement object, reflected at this and imaged by the optics or other optics on a receiver. A corresponding combination of these two sensor types is for example in the DE10251412 described, both sensors partially use a common beam path, in particular a common lens on the object side of the optics. This combination of distance sensor and image processing sensor is provided in particular for distance sensors according to the foucault cutting principle.

In addition to optics with a fixed working distance and fixed magnifications zoom optics are for example in the EP 1 071 922 described with independently adjustable working distance and magnification.

An applicant's patent application, unpublished at the date of filing of this application, relates inter alia to the combination of an image processing sensor with a chromatic distance sensor. These are the DE10 2013 105 102 , The complete content of this patent application is incorporated herein by reference. The methods and devices described in this document are part of this patent application.

For the image processing measurement necessary illuminations of the measurement object are the bright field incident illumination, the dark field incident light illumination, especially with multiple light rings whose light intersect the optical axis at different distances along the optical axis at different angles, such as EP 1 373 827 can be seen. To increase the contrast in an image processing measurement, in particular the use of the image processing sensor for distance measurement according to the autofocus or focus variation principle, a so-called pattern projection is also known. In this case, a pattern is reflected in the imaging beam path and projected onto the measurement object. The location of the pattern is not evaluated.

According to the prior art according to the EP 0 988 505 and the EP 1 528 354 is also known that the deflection of a mechanical or tactile probe element can be evaluated by means of image processing sensors. This method is known as a tactile-optical fiber probe. The determination of the deflection of the fiber stylus element in contact with the measurement object, in the direction of the optical axis of the optics used for the image processing sensor, is likewise possible by means of a distance sensor. This describes the DE 10 2010 060 833.5 , For this purpose, a corresponding probing element can be interchangeably arranged in front of the optics of the image processing sensor and distance sensor, in particular the laser distance sensor. If the fiber button element is replaced, the object can also be measured directly with the image processing sensor or the distance sensor. Corresponding interchangeable interfaces are usually designed as magnetic interfaces. In addition to fiber optic elements and attachment lenses or mechanically stiff probing elements such as the probing needle of a Tastschnittsensors can be attached to this. By replacing a conversion lens, the beam path can be optimized, for example, to the measurement with the distance sensor. Corresponding magnetic interfaces and the functions of the auxiliary lenses is for example the EP 0 581 9689.0 refer to. Additional lenses, but also zoom optics, as in the EP 1 299 691 are also used to adjust the working distance for the measurement with the distance sensor or the determination of the vertical deflection of the probe element of a tactile-optical sensor by means of the distance sensor. The arrangement of a stiff probing element such as a stylus for shape and contour measurement or roughness measurement is for example in the EP 1 407 224 described.

Particular reference is made to the embodiment in the publications described above. The described sensors and illumination options are preferably used in coordinate measuring machines, particularly preferably in multi-sensor coordinate measuring machines.

If several of the sensors described are to be used in a multi-sensor coordinate measuring device, then these may possibly be arranged next to one another. This restricts the measuring range available jointly for both sensors on the measuring object, since the axes of motion of the coordinate measuring machine have a limited range of motion. In addition, there is an increased design effort for the separate attachment of the individual sensors and increased risk of collision for the sensor not used for the measurement. If this is to be avoided, constructive and control technology-consuming, additional movement axes, so-called sensor retraction axes are necessary.

Object of the present invention is therefore to provide a combined sensor system that allows the functionality of multiple, as many sensors for the measurement of complex workpieces in a compact sensor head.

In order to achieve the object, a combined sensor system is provided in which surface points or contours of measurement objects are determined, wherein the determination optionally takes place by means of at least one of the sensors integrated in the sensor system in addition to the image processing sensor. It is intended to integrate at least one of the sensors: first distance sensor according to the Foucault principle, second distance sensor according to the chromatic principle and / or confocal principle or chromatic confocal principle or interferometric principle, tactile-optical fiber probe or light field camera in the sensor system, and wherein for all integrated sensors in the sensor system, at least partially a common beam path is used, preferably the same object-side lens is used. A photogrammetry sensor can also be used, with the common beam path preferably being used at least partially for its illumination beam path.

A corresponding inventive teaching provides for solving the problem, a sensor system, in which the selectively usable sensors image processing sensor, first distance sensor according to the Foucault principle, preferably second distance sensor according to the chromatic principle and / or confocal principle or chromatic confocal principle or interferometric principle, preferably tactile optical fiber probe, light field camera are integrated, with at least partially a common beam path is used for all sensors integrated in the sensor system, preferably the same object-side lens is used.

• – der Bildverarbeitungssensor und der erster Abstandssensor nach dem Foucault-Prinzip und der zweite Abstandsensor nach dem chromatisch konfokalen Prinzip oder
• – der Bildverarbeitungssensor und der erster Abstandssensor nach dem Foucault-Prinzip und der zweite Abstandsensor nach dem konfokalen Prinzip oder
• – der Bildverarbeitungssensor und der erster Abstandssensor nach dem Foucault-Prinzip und der zweite Abstandsensor nach dem interferometrischen Prinzip oder
• – der Bildverarbeitungssensor und der erster Abstandssensor nach dem Foucault-Prinzip und die Lichtfeldkamera oder
• – der Bildverarbeitungssensor und der zweite Abstandssensor und die Lichtfeldkamera oder
• – der Bildverarbeitungssensor und der erster Abstandssensor nach dem Foucault-Prinzip und der zweite Abstandssensor und die Lichtfeldkamera oder
• – der Bildverarbeitungssensor und der Beleuchtungsstrahlengang des Fotogrammetriesensors und vorzugsweise der bzw. die Beobachtungs-strahlengänge des Fotogrammetriesensors integriert werden und die Sensoren des kombinierten Sensorsystems die Oberfläche des Werkstücks erfassen.

In particular, it is proposed that the combined sensor system includes a measuring head in which:

• - The image processing sensor and the first distance sensor according to the Foucault principle and the second distance sensor according to the chromatic confocal principle or
• - The image processing sensor and the first distance sensor according to the Foucault principle and the second distance sensor according to the confocal principle or
• - The image processing sensor and the first distance sensor according to the Foucault principle and the second distance sensor according to the interferometric principle or
• - The image processing sensor and the first distance sensor according to the Foucault principle and the light field camera or
• The image processing sensor and the second distance sensor and the light field camera or
• - The image processing sensor and the first distance sensor according to the Foucault principle and the second distance sensor and the light field camera or
• - The image processing sensor and the illumination beam path of the photogrammetry sensor and preferably the or the observation beam paths of the photogrammetry sensor are integrated and detect the sensors of the combined sensor system, the surface of the workpiece.

In particular, with at least one of the sensors integrated in the combined sensor system, the probe element or a marker of a tactile-optical fiber probe associated with the probe element is detected.

Preferably, a zoom optics is used as the optics, which is integrated in the measuring head of the combined sensor system and is preferably arranged on the object side in the measuring head.

Characteristic of the invention is therefore that as many sensors are integrated in a common combined sensor system in order to be able to measure with the help of the same object-side lens, or optical element at the same or approximately the same place on a measurement object. In this case, the sensors detect either a single measuring point simultaneously or substantially simultaneously, that is to say in a measuring operation, a plurality of measuring points within the sensor measuring range, that is to say the region of the workpiece detected by the sensor in a fixed position.

Multi-sensor coordinate measuring instruments enable a large common measuring range. For this purpose, the sensors of the combined sensor system essentially detect the same area of the workpiece. Thus, perpendicular to the optical axis of the optics, there is essentially no offset between the measuring range centers or the detected measuring point of the sensors used. The advantage of using coordinate measuring machines is that the measured values of all sensors are in the same coordinate system. For this purpose, the sensors, that is to say in particular the sensor positions, that is to say the ever-present small offset of usually less than one millimeter, are measured with respect to one another.

• – erster Abstandssensor nach dem Foucault-Prinzip,
• – zweiter Abstandssensor nach dem chromatischen Prinzip und/oder konfokalen Prinzip oder chromatisch konfokalen Prinzip oder interferometrischen Prinzip,
• – taktil-optischer Fasertaster,
• – Fotogrammetriesensor,

im Sensorsystem integriert ist und für alle im Sensorsystem integrierten Sensoren zumindest teilweise ein gemeinsamer Strahlengang verwendet wird, vorzugsweise gleiches objektseitiges Objektiv verwendet wird, wobei bei Verwendung des Fotogrammetriesensors zumindest für dessen Beleuchtungsstrahlengänge zumindest teilweise der gemeinsame Strahlengang verwendet wird. The invention is thus characterized by a method for measuring the geometry of workpieces by means of a combined sensor system, at least consisting of an image processing sensor and this associated optics and at least one distance sensor and / or a tactile-optical fiber probe and / or a light field camera, wherein surface points and or contours are determined on the measurement object, wherein the determination is optionally carried out by means of at least one of the sensors integrated in the sensor system, wherein in addition to the image processing sensor one or more of the sensors:

• First distance sensor according to the Foucault principle,
• Second distance sensor according to the chromatic principle and / or confocal principle or chromatic confocal principle or interferometric principle,
• - tactile-optical fiber probe,
• - photogrammetry sensor,

is integrated in the sensor system and at least partially a common beam path is used for all sensors integrated in the sensor system, preferably the same object-side lens is used, wherein at least partially the common beam path is used when using the Fotogrammetriesensors at least for its illumination beam paths.

In particular, for the measurement with the image processing sensor illumination of the measurement object is necessary. This takes place according to the invention by means of a bright field illumination and optionally additionally with a pattern projection for increasing the contrast for the focus evaluation of the images recorded by means of the image processing sensor as part of an autofocus or focus variation method. Similarly, a dark field illumination is provided with one or more light rings.

The method according to the invention therefore provides that a bright field illumination and preferably a pattern projection is used for the measurement, which is reflected in the beam path of the combined sensor system.

For the widest possible variety of measurement tasks to be solved, it is preferable to use zoom optics which allow different magnifications. In particular, the working distance of such zoom optics should be adjustable independently of the magnification.

Preferably, it is therefore provided that a zoom optics is used as the optics, which allows independent adjustment of magnification and working distance by separately motorized lenses or lens groups and is preferably telecentric for at least some of the zoom levels or that as optics telecentric optics with a fixed working distance and fixed magnification is used.

According to the prior art, a pattern is temporarily, usually automatically controlled, introduced into the beam path of a bright field illumination for the projection of patterns on low-contrast workpiece surfaces. As a result, the pattern is imaged onto the workpiece surface and generates the necessary contrast for focus method (single-point measurement) or focus variation method (multipoint measurement) in order to generate corresponding contrast changes in the images, which are recorded at different distances between sensor and workpiece surface, and to enable a contrast evaluation. For the measurement of edges by means of image processing in a bright field illumination correspondingly displayed patterns are disturbing. Therefore, for the measurement with the image processing sensor, the pattern from the beam path of the bright field illumination must be mechanically removed.

It is therefore also an object of the present invention to make possible a simplified construction and a fast switching between image processing measurement and surface measurement by means of focus method or focus variation method using a pattern projection.

To solve this problem, it is planned to integrate corresponding patterns firmly into the beam path of the bright field illumination. If the reflection of the pattern on the object side to the displaceable lens groups of a zoom lens, so the pattern is detected only in one or substantially a working distance of the zoom lens and the corresponding distance between the workpiece and the sensor system, in focus. This working distance serves as a working distance for the measurement with the focus sensor or focus variation sensor. At all other working distances of the zoom optics the mark appears blurred, whereby these working distances can be used for the image processing measurement.

The invention is therefore u. a. also by the fact that the pattern used for pattern projection in the beam path of the bright field illumination fixed, in particular not automatically interchangeable, is arranged.

In particular, it is provided that the pattern is imaged sharply on the workpiece in essentially only one working distance of the zoom optics, preferably by measurements of low-contrast workpiece surfaces by means of autofocus method for measuring individual points or focus variation methods for measuring many points the workpiece surface, preferably using at least the optics and the receiver (camera) of the image processing sensor, and that the mark is blurred in the further working distances of the zoom lens to realize measurements with the image processing sensor by the reflection of the bright field illumination, in the beam path of which the pattern for the pattern projection is fixed, into the beam path of the combined sensor system on the object side relative to the motor-displaceable lenses or lens groups.

Zoom optics known in the prior art generally have a fixed front lens. In order to achieve an adjustment of the working distance with the same optical magnification by simple means, the invention also provides, in addition to attach a movable lens or lens group at the object end of a zoom lens. This makes it possible to record image series in different focusing states of the measurement object, as is the case with the typical focus or focus variation methods. If, at the same time, relative movement between the workpiece and the sensor system provides for a subsequent positioning of the workpiece surface in the respective focus range of the respective adjusted working distance, then the recordable images of the workpiece, in which different inclinations of a dark field illumination are set, are produced in the different working distances. From this illumination variation or the resulting images, an overall image is generated by fusion according to the invention, which can be used, for example, to determine an improved image for the image processing sensor. As a result, edges are additionally visible that are only visible at certain working distances and the illumination directions set for this purpose. This exploits the fact that, in the various working distances, the typical shadow cast occurs in the dark field illumination due to the different angles of inclination to the optical axis, which are shifted in each case. In order to optimize this also for differently oriented edges, it is also intended to use different segments on the rings of the annular dark field illumination for illumination and in turn to fuse the corresponding images. In addition, it is provided to provide images which are fused by the use of different intensities of the illumination or integration times of the camera in one or even in the many working distances, to make available the subregions of differing degrees of reflection, for example by different present inclination of the surfaces. It is also possible with this method of image fusion to determine surface points based on the known focus or focus variation method.

The invention is therefore also distinguished by the fact that the zoom lens additionally contains a motor-displaceable lens or lens group, which is arranged on the object side in front of a fixed lens or lens group, wherein the additional lens or lens group is formed, different working distances at a constant optical magnification adjust.

In particular, it is provided that using the additional separately motor-adjustable lens or lens group of the zoom optics images are taken by the camera at different working distances of the zoom optics, wherein the same optical magnification is present in the different working distances, and wherein the integration time of the camera and / or Intensity of a dark field illumination and / or in the different working distances the direction, in particular the inclination of the illumination device, in particular annular dark field illumination device to the optical axis and / or the selected segment of a dark field illumination device on a ring about the optical axis, a dark field illumination can be varied, and in that the images are provided for the evaluation by means of a focus variation method for determining a plurality of surface points or that the images are used for the determination of an optimized image are made available for the image processing sensor, wherein preferably the distance between the combined sensor system and workpiece is adjusted using the Koordinatengeräteachsen, preferably adjusted so that in each case sharp images.

In particular, the invention is characterized in that a dark field illumination in the form of one or more light rings, preferably each consisting of several light elements such as LEDs, is used, wherein the light rings surround the optics of the combined sensor system preferably concentric and preferably the light of the individual light rings optical axis at different distances along the optical axis intersect at different angles and preferably each of the illuminated ring is activated, the light intersects the optical axis in each selected working distance of the optics.

Is the object side of the optics a probing element, such as a tactile-optical sensor such as fiber probe or a dimensionally stable, rigid probe element such as stylus or stylus of a Tastschnittsensors, preferably used for the shape measurement, contour measurement or roughness measurement, arranged to capture the Deflection of this probing the working distance of the optics, compared to the direct measurement of the surface of the workpiece by means of the built-in optics distance sensor to be changed. For this purpose, on the one hand, the zoom lens itself can be used by their working distance is changed. On the other hand, it is also envisaged to exchange an auxiliary lens, or to replace it when measuring the deflection of the probe element.

Preferably, the invention provides that the working distance of the optics for the direct measurement of the surface of the workpiece with the distance sensor used in each case or for the measurement of the deflection of a probing element, preferably probe element of the tactile-optical sensor, by means of zoom optics or by replacing or replacing a Attachment lens, is set.

It should also be emphasized that a distance sensor is optionally used for the direct measurement of the surface of the workpiece or the measurement of the deflection of a probing element, preferably a stylus, wherein the probing element is interchangeable on the object side in front of the optics of the combined sensor, preferably by means of a magnetic interface ,

Preferably, a sensor according to the Foucault cutting principle is used as the distance sensor for determining the deflection of a probing element. Alternatively, the measurement is also provided with an interferometric distance sensor. A probing element is interchangeably mounted on the object side in front of the optics of the combined sensor, preferably with the aid of a magnetic interface. However, if necessary, it is also provided to measure the workpiece directly by depositing the probe element in a changing station.

In particular, the invention is characterized in that the first or second distance sensor, preferably the distance sensor according to the Foucault principle or the interferometric sensor, for determining the deflection of a probing element, preferably probing element of the tactile-optical sensor, is used, wherein the probing element on the object side is replaceably mounted in front of the optics of the combined sensor, preferably by means of a magnetic interface, and preferably the distance sensor is optionally used for the direct measurement of the surface of the workpiece.

As an interferometric sensor, in particular, a sensor is provided, which is based on the evaluation of interference-induced speckle phenomena. The measurement is carried out using a coherent light source, such as a laser or a laser diode. The light of the light source is divided by means of a beam splitter into a measuring arm and a reference arm. The resulting measuring light is directed into the probing element and emitted by it. Preferably, the probing element is designed as a fiber probe, so that the measuring light is coupled into the fiber and a part of the fiber, preferably a spherical thickening located at the lower fiber end or above the lower fiber end, emit the measuring light. This is then detected by the optics and imaged on the receiver, wherein an overlay with the reference light, which is passed to the receiver without passing through the probe element. The resulting speckle patterns are dependent on the position, in particular the position in the direction of the optical axis of the optics, the probing element, in particular the luminous spherical thickening. By evaluating the speckle pattern, therefore, the deflection of the probing element in the direction of the optical axis of the optics is determined. If, in addition, the position of the speckle pattern on the receiver is evaluated, the deflection of the probe element in the two directions perpendicular to the optical axis of the optics is also possible.

According to one particularly noteworthy proposal, it is therefore provided that the interferometric sensor is based on the evaluation of speckles picked up by the superposition of measuring light and reference light from the receiver of the image processing sensor, the light of a coherent light source such as a laser diode by means of a beam splitter in a Mess - And a reference light path is divided, wherein the measuring light is slid into the probe and is emitted by this and directed by the optics to the receiver and the reference light is passed to the receiver without passing through the probe element, and that from the respective present Speckelmuster the Deflection of the probing element in the direction of the optical axis of the optics is determined and preferably the deflection of the probing element in the two directions is determined perpendicular to the optical axis of the optics, wherein preferably a plurality of coherent light sources of different wavelengths ge be used.

In addition to distance sensors according to the Foucault principle and chromatic distance sensors are known. These are mostly designed as single-point sensors. According to the invention, however, also chromatic sensors or chromatic confocal sensors are included, which detect multiple surface points on the workpiece. Adjacent areas of the surface of the measurement object are in this case made possible by means of a mapping with the aid of a plurality of individual optical conductors, such as optical fibers in a bundle or image guide. The confocal mapping becomes for each measurement point realized by the respective individual optical conductors per measuring point.

The invention is characterized in that a sensor according to the chromatic confocal principle is used as a distance sensor, wherein for the determination of measuring points, such as surface points on the workpiece, a confocal image of several, preferably adjacent, areas of the surface of the workpiece by a plurality of individual optical Conductor, such as optical fibers, preferably image guide, takes place, wherein the individual fibers are arranged as Konfokalblende per measurement point.

As a further distance sensor sensors are known according to the confocal principle. Here, too, several measuring points are measured simultaneously, that is to say in one measuring operation at one point on the workpiece. In order to achieve a confocal imaging for the several measuring points, either rotating diaphragms, so-called Nipkov writing, or a fixed diaphragm arrangement are used in an intermediate image plane of the optics. The fixed diaphragm arrangement according to the invention consists of a diaphragm grille which consists of a plurality of preferably circular openings, and is introduced only temporarily for the measurement with the confocal sensor in the optical path of the optical system. For evaluation, two alternative approaches are provided. The first alternative provides that, in accordance with the known focus variation method, the distance between the sensor and the workpiece is varied and several images are taken. For each measuring point, with the measuring points being arranged separately from each other in order to avoid crosstalk, with the apertures being correspondingly spaced, a focus curve will be obtained from the present image or contrast or intensity values within the range of the receiver associated with the respective measuring point , certainly. The evaluation of the focus curve, ie the application of a focus criterion such as determining the location of the highest contrast or the highest intensity, provides the distance between the sensor and the workpiece surface for the individual measurement points. A second alternative is to dispense with taking pictures at different distances and to take only one picture at a given distance. For this purpose, it is provided to use a chromatic confocal principle. In this case, a white light source and a chromatic lens or lens arrangement is used, and the sharpest wavelength of the white light source determined by means of a color camera as a receiver per measuring point. In this case, the chromatic lens or lens arrangement is automatically arranged only for measurement with the chromatically confocal sensor at an exchange interface at the object-side end of the optics.

In particular, the invention is characterized by the fact that a sensor according to the confocal principle is used as a distance sensor, wherein a plurality of measurement points is largely determined simultaneously, wherein the confocal imaging on the receiver for the plurality of measurement points is achieved by in one Intermediate image plane of the optics, a diaphragm grille, consisting of a plurality of preferably circular openings, temporarily introduced for the measurement, and images are recorded at several distances between sensor and workpiece with the receiver, from which each measurement point by evaluating a focus criterion, preferably the image sharpness or Intensity within the range of the receiver, which is assigned to the respective measuring point, the respective distance between sensor and workpiece surface and thus the measuring points are determined.

It should also be emphasized that a sensor according to the chromatic confocal principle with a white light source is used as a distance sensor, whereby a multiplicity of measuring points are determined at the same time as far as possible, whereby the confocal imaging on the receiver for the multiplicity of measuring points is achieved by a chromatic Lens or chromatic lens assembly in the optical path of the optics and in an intermediate image plane of the optics, a diaphragm grating, consisting of a plurality of preferably circular openings, is temporarily introduced for the measurement, and in each available distances between the sensor and the workpiece an image with the color camera trained receiver is taken from the per measurement point by evaluating the sharpest imaged wavelength of the white light source, preferably the strongest intensity wavelength within the range of the receiver, which is assigned to the respective measuring point, the distance between the sensor and the workpiece surface and thus the measuring points are determined.

As a further sensor which can be integrated into the sensor head, a light field camera can be provided. By means of this sensor, a plurality of surface points can be measured essentially simultaneously in all three spatial coordinates by recording an image or a so-called light field, without a movement taking place between the sensor and the workpiece. For this purpose, a microlens array must be arranged in front of the receiver of the image processing sensor. According to the invention it is provided that the optics of the combined system is used and the microlens array only is temporarily introduced for the measurement in the optical path of the optics.

Preferably, it is therefore provided that by means of a light field camera, at least consisting of the optics, the receiver of the image processing sensor and a microlens array, a plurality of surface measuring points largely simultaneously, ie determined in a measurement, the microlens array temporarily for the measurement in the optical path of the optics is introduced and in the respective distances between the sensor and the workpiece an image is taken with the receiver from which each measurement point by applying the light field technology, the respective distance between the sensor and the workpiece surface and thus the measurement points are determined.

For the introduction of the microlens array according to the invention two positions in the beam path of the optics are provided between the image side outer lens of the optics and the receiver, as is preferred in the prior art, or between the workpiece and the object side outer lens optics, and this is particularly simple by using a standard change interface succeeds.

In particular, the invention is characterized in that the microlens array of the light field camera in the beam path of the optics between the image side outer lens of the optics and the receiver, preferably directly in front of the receiver, or between the workpiece and the object side outer lens of the optics is introduced.

As an alternative to the inventive idea of using the receiver of the image processing sensor to evaluate the light field by temporarily placing a corresponding microlens array in front of the receiver, the beam path of the light field camera can also be projected into the beam path of the image processing sensor, in particular above, ie between image processing sensor and displaceable lenses. the sliding lenses of a zoom lens are arranged. This results in the possibility that the working distance, in which the light field is generated or recorded, is varied by means of the zoom optics. Thus, it is possible to record light fields at different distances of the sensor system, ie in different areas along the imaging direction of the zoom lens. This is alternatively also possible because the distance between combined sensor systems and workpiece is adjusted by means of coordinate measuring machine axes. The coordinate measuring machine axes can also be used to set several positions at right angles to the imaging axis in which workpiece areas are detected by means of a light field camera. The different regions detected in the imaging direction or at right angles to the imaging direction and 3D points determined therefrom are arranged and evaluated in a common coordinate measuring system.

For this purpose, for example, the scale systems of the coordinate measuring machine axes or the measured working distances of the zoom optics are used.

In addition, there is the possibility of taking pictures of the same area of the workpiece by means of a light field camera and by means of an image processing sensor. These are fused to improve image quality. In this way, in particular, an increase in the resolution or the contrast in the images can be realized, which are generated from the light field recorded with the light field camera. To increase the contrast on low-contrast workpiece surfaces, it is also possible in turn to make a corresponding pattern projection on the workpiece surface. Since this is imaged sharply on the surface only in a defined depth of field, the pattern is partially blurred in the images produced by means of the light field camera at several distances between the workpiece and the light field camera. This affects the evaluation by light field camera but only insignificantly.

The invention is therefore also characterized in that a consisting of at least microlens array and associated receiver light field camera via an optical splitter in the imaging beam path of the image processing sensor, in particular in the imaging beam path of the zoom lens, in particular between the receiver of the image processing sensor and the separately adjustable motor lenses or lens groups Zoom optics, is reflected.

It should also be emphasized that several areas of the workpiece surface which are offset in the imaging direction are detected and evaluated together by the light field camera by changing the working distance by means of the zoom optics, wherein preferably the magnification remains constant or 3D points are converted into a common magnification, preferably by means of Resampling, or the distance between the combined sensor systems and workpiece preferably by means of Koordinatengeräteachsen, is adjusted, each working distance or relative position, the plurality of 3D points are determined by the light field camera and are arranged according to their recording position in a common coordinate measuring system.

Furthermore, it is preferably provided that a plurality of regions of the workpiece lying perpendicular to the imaging direction are detected by means of the light field camera and the determined 3D points are arranged and evaluated in a common coordinate system by shifting the light field camera and workpiece relative to one another by means of the coordinate device axes.

Advantageously, the invention is also characterized in that images or image sections taken with the light field camera are combined with images or image sections of the same workpiece region, recorded with the image processing sensor.

Furthermore, provision can be made for a pattern to be projected onto the object surface when the light field is recorded by means of the light field camera.

For maximum flexibility of the different functions that the combined sensor head should fulfill, it is provided according to the invention that an interface is provided at the object-side end of the combined sensor. This is performed, for example, as a magnetic interface and allows partially different components to attach. By means of an auxiliary lens, for example, the beam path of an optical distance sensor is optimized or changed for an image processing sensor, the magnification or the working distance. At the same interface, a probing element such as probing probes for a Tastschnittsensor or a probe for a tactile-optical sensor such as fiber probe can be attached. By means of an attachable to the same interface angle optics, the optical axis for the distance sensor or image processing sensor can change, for example, deflect 90 degrees. Likewise, the invention provides that a tactile measuring head is attached to the interface before the combined sensor system. For this purpose, corresponding electrical connecting lines are integrated in the interface, which are optionally switched over for the operation of the tactile measuring head, in order thus to enable a tactile measurement at approximately the same point of the measuring object. It is likewise provided to interchangeably mount a microlens array for a light field camera at the interface, or alternatively a chromatic lens or chromatic lens arrangement for a chromatically confocal distance sensor.

• – eine Vorsatzlinse für einen Abstandsensor oder den Bildverarbeitungssensor oder
• – ein Antastelement, vorzugsweise Tastnadel oder Antastelement des taktil-optischen Sensors oder
• – eine Winkeloptik für einen Abstandsensor oder den Bildverarbeitungssensor oder
• – ein taktiler Messkopf oder
• – ein Mikrolinsenarray für eine Lichtfeldkamera
• – eine chromatische Linse oder chromatische Linsenanordnung für einen chromatisch konfokalen Abstandsensor

modular eingewechselt wird. In particular, the invention is characterized in that at an interface, preferably magnetic interface, at the object-side end of the optics of the combined sensor according to the needs of the sensor used, optionally

• A conversion lens for a distance sensor or the image processing sensor or
• - A probing element, preferably Tastnadel or probing element of the tactile-optical sensor or
• An angle optics for a distance sensor or the image processing sensor or
• - a tactile measuring head or
• - A microlens array for a light field camera
• A chromatic lens or chromatic lens arrangement for a chromatic confocal distance sensor

modular is exchanged.

As an alternative to the above-mentioned prior art fiber buttons are also buttons with stiff styli, so solid connections between probe, in particular probing ball, and a mark located above, known in the art. Here, the determination of the deflection of the probing element by determining the deflection of each associated brand with special measuring systems. In order to simplify this structure, the invention provides for using the already existing image processing sensor system, but particularly preferably the already existing distance sensor system as the first or second distance sensor for determining the deflection of the brand. For this purpose, the deflection of the mark in the imaging direction is preferably realized by means of the first or second distance sensor and additionally preferably in the direction perpendicular to the imaging direction by means of the image processing sensor. For this purpose, a structure such as pattern is preferably applied to the mark, which can be detected by the image processing sensor.

The invention is also characterized in that a probing element is used which has a rigid connection to a mark, wherein the probing element, rigid connection and mark are tiltably mounted to the optical imaging direction, and that for determining the deflection of the probing element, the deflection of the mark at least with the first or second distance sensor, preferably with the first or second distance sensor and the image processing sensor is determined, preferably wherein by means of the first or second distance sensor, the deflection of the mark is detected in the direction of the imaging direction and in addition to the image processing sensor, the deflection of the on the Mark applied structure is detected perpendicular to the imaging direction.

In particular, the invention is also distinguished by the fact that the illumination beam path of the photogrammetry sensor, at least consisting of light source and pattern illuminated by means of this light source, enters the beam path of the Zoom optics is mirrored by means of optical splitter, the reflection is preferably the image side of the separately motorically displaceable lenses or lens group zoom optics, and that the photogrammetry sensor has two receivers, preferably CCD or CMOS cameras, with which the projected on the object pattern of two different is observed to the optical axis inclined directions, wherein the two receivers respectively assigned observation beam paths use the object-side lens or lens group of the zoom lens or each containing a separate object-side lens or lens group.

Preferably, it is provided that one or more motor-displaceable lenses or lens groups are used in the two observation beam paths, which are moved together with the separately motorized sliding lenses or lens groups zoom optics, preferably by each connecting elements exist between them and common motor drives are used.

According to a further proposal, the invention is characterized in that in each of the two observation beam paths between the motor-displaceable lenses or lens groups and the object-side lens or lens group, a deflection mirror is arranged, each causing the inclination of the observation beam path to the optical axis.

It should also be emphasized that in each of the two illumination beam paths, separate motor-displaceable lenses or lens groups are arranged, the two observation beam paths each contain separate object-side lenses or lens groups, wherein the two observation beam paths and the respective associated receiver are arranged inclined to the optical axis.

Preferably, it is provided that by adjusting the separately movable motor lenses or lens groups of the zoom optics and shared or separately realized adjusting the motorically displaceable lenses or lens groups of the observation beam paths of the magnification of the observation beam path and the illumination beam path, and thus the image size of the pattern on the workpiece , be set together.

After a particularly noteworthy proposal, it is provided that the sensor system is operated integrated in a coordinate measuring machine.

Furthermore, it is preferably provided that all sensors integrated in the sensor system are aligned with the substantially same region of the workpiece, preferably there is substantially no offset between the center of the measuring ranges of the integrated sensors perpendicular to the optical axis.

• – erster Abstandssensor nach dem Foucault-Prinzip,
• – zweiter Abstandssensor nach dem chromatischen Prinzip und/oder konfokalen Prinzip oder chromatisch konfokalen Prinzip oder interferometrischen Prinzip,
• – taktil-optischer Fasertaster,
• – Lichtfeldkamera,
• – Fotogrammetriesensor,

wobei für alle im Sensorsystem integrierten Sensoren zumindest teilweise ein gemeinsamer Strahlengang verwendbar ist, vorzugsweise gleiches objektseitiges Objektiv verwendbar ist, und wobei bei Verwendung des Fotogrammetriesensors zumindest für dessen Beleuchtungsstrahlengang zumindest teilweise der gemeinsame Strahlengang verwendbar ist. In particular, the object underlying the invention is essentially achieved by a device in the form of a combined sensor system, at least consisting of an image processing sensor and this associated optics and at least one distance sensor and / or a tactile-optical fiber probe and / or a light field camera, wherein with the Sensors of the sensor system surface points and / or contours on a workpiece can be determined, wherein in addition to the image processing sensor in the sensor system, one or more of the following sensors are integrated and optionally used:

• First distance sensor according to the Foucault principle,
• Second distance sensor according to the chromatic principle and / or confocal principle or chromatic confocal principle or interferometric principle,
• - tactile-optical fiber probe,
• - light field camera,
• - photogrammetry sensor,

wherein at least partially a common beam path can be used for all sensors integrated in the sensor system, preferably the same object-side lens can be used, and wherein at least partially the common beam path can be used when using the photogrammetry sensor at least for its illumination beam path.

With regard to the photogrammetry sensor, there is the possibility that the two observation beam paths use the common front lens. Alternatively, the two observation beam paths of the photogrammetry sensor each use separate front lenses, which are arranged next to the front lens of the common sensor system.

A particular feature of the inventive device is that means for reflecting a bright field illumination, and preferably a pattern projection, are integrated in the beam path of the combined sensor system.

Alternatively, the device is characterized in that the optics is a zoom lens, which allows independent adjustment of magnification and working distance by separately movable lenses or lens groups and is preferably telecentric for at least some of the zoom levels or that the optics telecentric optics with fixed working distance and fixed magnification.

Preferably, it is provided that a dark field illumination in the form of one or more light rings, preferably each consisting of several light elements such as LEDs, the combined sensor system are assigned, wherein the light rings surround the optics of the combined sensor system preferably concentric and preferably the light of the individual light rings the optical Cut the axis at different distances along the optical axis at different angles.

In particular, the invention is characterized in that the working distance of the optics for the direct measurement of the surface of the workpiece with the distance sensor used in each case or for the measurement of the deflection of a probing element, preferably probe element of the tactile-optical sensor, by means of zoom optics or by replacing or Replacing a conversion lens, is adjustable.

Preferably, the invention provides that a probing element is interchangeable on the object side in front of the optics of the combined sensor, preferably by means of a magnetic interface, wherein a distance sensor optionally for the direct measurement of the surface of the workpiece or for the measurement of the deflection of a probing element, preferably a stylus, can be used.

The invention is also characterized in that the first or second distance sensor, preferably the distance sensor according to the Foucault principle or the interferometric sensor, for determining the deflection of a probing element, preferably probing element of the tactile-optical sensor, can be used, the probing element on the object side is mounted interchangeably before the optics of the combined sensor, preferably by means of a magnetic interface, and preferably the distance sensor is selectively usable for the direct measurement of the surface of the workpiece.

In particular, the invention is characterized in that the interferometric sensor at least consists of the receiver of the image processing sensor, one or more coherent light sources such as laser diodes, a beam splitter for dividing the light of the light source into a measuring and a reference light path, whereby the measuring light in the probe element is passed and emitted by this and is guided by the optics to the receiver and the reference light is passed to the receiver, without passing through the probe element.

It should also be emphasized that a distance sensor according to the chromatic confocal principle is assigned a plurality of individual optical conductors, such as optical fibers, preferably image conductors, as a confocal diaphragm for a plurality of measurement points to be measured, such as surface points on the workpiece.

In particular, the invention is characterized in that a sensor according to the confocal principle is used as a distance sensor, wherein a plurality of measurement points are largely simultaneously determined, the confocal imaging on the receiver for the plurality of measurement points is achieved by in an intermediate image plane the optics, a diaphragm grille, consisting of a plurality of preferably circular openings, temporarily for the measurement can be introduced, and in several distances between sensor and workpiece images are receivable with the receiver from which each measurement point by evaluating a focus criterion, preferably the image sharpness or intensity within the range of the receiver, which is assigned to the respective measuring point, the respective distance between sensor and workpiece surface and thus the measuring points can be determined.

Preferably, the invention provides that a sensor according to the chromatic confocal principle with a white light source is used as a distance sensor, wherein a plurality of measuring points can be determined as far as possible simultaneously, wherein the confocal imaging on the receiver for the plurality of measuring points is achieved by a chromatic lens or chromatic lens assembly in the optical path of the optics and in an intermediate image plane of the optics, a diaphragm grille, consisting of a plurality of preferably circular openings, temporarily introduced for the measurement, and in the respective present distance between the sensor and the workpiece, an image can be recorded with the receiver designed as a color camera, from each measurement point by evaluating the sharpest imaged wavelength of the white light source, preferably the strongest intensity wavelength within the range of the receiver, which is associated with the respective measuring point, the respective distance between the sensor and workpiece surface and thus the measuring points can be determined.

The invention is also characterized in that a light field camera, at least consisting of the optics, the receiver of the image processing sensor and a microlens array can be used to determine a plurality of surface measuring points as far as possible simultaneously, wherein the microlens array temporarily for the measurement in the optical path of the optics can be introduced and in the respective distances between the sensor and the workpiece an image with the receiver can be received, from which each measurement point by applying the light field technology, the respective distance between the sensor and the workpiece surface and thus the measuring points can be determined.

It should also be emphasized that the microlens array of the light field camera in the optical path of the optics between the image side outer lens of the optics and the receiver, preferably directly in front of the receiver, or between the workpiece and the object side outer lens of the optics can be introduced.

• – eine Vorsatzlinse für einen Abstandsensor oder den Bildverarbeitungssensor oder
• – ein Antastelement, vorzugsweise Tastnadel oder Antastelement des taktil-optischen Sensors oder
• – eine Winkeloptik für einen Abstandsensor oder den Bildverarbeitungssensor oder
• – ein taktiler Messkopf oder
• – ein Mikrolinsenarray für eine Lichtfeldkamera
• – eine chromatische Linse oder chromatische Linsenanordnung für einen chromatisch konfokalen Abstandsensor

modular einwechselbar ist. The invention is also distinguished by the fact that optionally at an interface, preferably magnetic interface, at the object-side end of the optics of the combined sensor according to the needs of the sensor used

• A conversion lens for a distance sensor or the image processing sensor or
• - A probing element, preferably Tastnadel or probing element of the tactile-optical sensor or
• An angle optics for a distance sensor or the image processing sensor or
• - a tactile measuring head or
• - A microlens array for a light field camera
• A chromatic lens or chromatic lens arrangement for a chromatic confocal distance sensor

modular exchangeable.

The invention is also characterized in that to reduce the overall size and for rapid measurement of the same area of a workpiece with different sensors, even with adjustable measuring range and thus adjustable pattern size or even adjustable working distance, a Fotogrammetriesensorsystem, in particular stereogrammetry sensor system, but at least the illumination beam path of a Photogrammetry sensor, at least partially integrated into the beam path of the combined sensor system. Photogrammetry sensors known in the prior art generally have three separate beam paths. A first illumination beam path contains a light source which projects a pattern arranged in front of the light source, for example stripe patterns, with imaging optics onto the workpiece. Two observation beam paths inclined at different inclinations (for example +30 degrees and -30 degrees) to the imaging beam path have separate optical beam paths which realize the observation of the workpiece surface by two separate receivers, such as cameras, from different directions. Corresponding illumination and observation optics are designed according to the prior art with fixed working distance and fixed magnification.

In the present invention, at least the illumination beam path is integrated into the beam path of the combined sensor system. The reflection of the pattern projections of the photogrammetry sensor preferably takes place above the displaceable lenses or lens groups, as a result of which the pattern of the pattern on the workpiece can be varied by displacing the motor-displaceable lenses or lens groups in size, and optionally also in its working distance. In order to ensure optimum measurement, the magnification and, if necessary, the working distance of the two illumination beam paths must be adapted accordingly. The invention provides that correspondingly displaceable lenses or lens groups are arranged in the observation beam paths of the two receivers. These lens groups are preferably moved together with the displaceable lens groups of the zoom optics, that is, for example, by the same drives. In this first preferred solution, the displacement of the movable lenses or lens groups in the observation beam paths takes place parallel to the movement of the displaceable lenses or lens groups in the optical path of the zoom optical system (which is part of the illumination beam path according to the invention), whereby the movable lenses or lens groups in the observation beam paths on the object side Deflection mirror must be arranged to realize the inclined observation of the workpiece surface. On the object side after deflection by these deflecting mirrors, the workpiece surface is observed by means of the common object-side lens or lens group or else by means of separate object-side lenses or lens groups for the two observation beam paths. In an alternative solution, the deflecting mirror is dispensed with and the separate object-side lenses or lens groups and the respectively present in the observation beam paths movable lenses or lens groups including the receiver already tilted.

The invention is therefore also characterized in that the illumination beam path of the photogrammetry sensor, at least consisting of light source and illuminated by this light source pattern, in the beam path of the zoom optics by means of optical divider einspiegelbar, the reflection preferably on the image side of separately movable motor lenses or lens group Zoom optics, and that the photogrammetry sensor has two receivers, preferably CCD or CMOS cameras, with which the pattern projected onto the object from two directions different from the optical axis is observable, wherein each of the two receivers associated observation beam paths use the object-side lens or lens group of the zoom lens or each containing a separate object-side lens or lens group.

Characteristic of the invention may also be that in the two observation beam paths, one or more motorically displaceable lenses or lens groups are included, which are displaceable together with the separately motorically displaceable lenses or lens groups of the zoom optics, preferably by each connecting elements exist between them and common motor drives are usable.

Furthermore, the invention may also be characterized in that in each of the two observation beam paths between the motor-displaceable lenses or lens groups and the object-side lens or lens group, a deflection mirror is arranged, which in each case causes the inclination of the observation beam path to the optical axis.

In particular, it is provided that separately motor-displaceable lenses or lens groups are arranged in the two illumination beam paths, the two observation beam paths each contain separate object-side lenses or lens groups, wherein the two observation beam paths and the respectively associated receiver are arranged inclined to the optical axis.

Preferably, it is proposed that by adjusting the separately movable motor lenses or lens groups of the zoom optics and shared or separately realized adjusting the motorically displaceable lenses or lens groups of observation beam paths of the magnification of the observation beam path and the illumination beam path, and thus the image size of the pattern on the workpiece , is adjustable together.

In particular, the invention is characterized in that the sensor system is integrated in a coordinate measuring machine.

Preferably, the invention provides that all integrated sensors in the sensor system are aligned on the substantially same area of the workpiece, preferably perpendicular to the optical axis substantially no offset between the center of the measuring ranges of the integrated sensors is present.

It should also be mentioned that there is the possibility that one or more lenses of one or more lens groups are aspherical.

Further details, advantages and features of the invention will become apparent not only from the

Claims, the features to be taken these - alone and / or in combination - but also from the following description of the figures.

Show it:

1 the device according to the invention, consisting of image processing sensor, first and second distance sensor, bright field illumination with pattern projection, zoom optics with variable working distance and magnetic interface,

2 an alternative arrangement of the device according to the invention with auxiliary lens,

3 an alternative arrangement of the device according to the invention with tactile-optical sensing element,

4 a further alternative arrangement of the device according to the invention with tactile-optical probe element and interferometric distance sensor,

5 an alternative arrangement of the device according to the invention with a distance sensor according to the confocal principle

6 an alternative arrangement of the device according to the invention with a light field camera,

7 an alternative arrangement of the device according to the invention with a photogrammetry and

8th an alternative arrangement to that of 7 ,

The 1 shows a combined sensor system 1 consisting of an image processing sensor 2 , a first distance sensor 3 , a second distance sensor 4 , a bright field illumination 5 , a zoom lens 6 and an exchange interface 7 , The image processing sensor is next to the with 2 designated matrix camera, which consists of several surface-mounted photosensitive elements 8th exists, further optical components for imaging the measurement object 9 along the optical axis 10 , The optics consists for example of the zoom optics 6 which, among other things, consists of two lenses or lens groups 11a and 11b exists which motor along the arrows 12 are displaceable to Adjusting the working distance and magnification of the zoom optics independently, and an imaging lens 13 , Other optical elements are along the beam path 10 in other places, such as directly in front of the camera 2 can be used without them being displayed.

The first distance sensor 3 is exemplified as a Foucault sensor. The light of a light source 14 gets on a foucault's edge 15 partially dimmed and by means of a partially transparent deflection or divider mirror 16 reflected in the beam path of the image processing sensor. After reflection on the test object 9 the measuring radiation is in accordance with a first inventive idea by means of a deflecting mirror 16 back towards the first distance sensor 3 and is by a divider mirror 17 to a receiver 18 , such as differential diode arrangement, mapped. The semipermeable divider 16 is this example color selective designed so that the wavelength of the light source 14 of the first distance sensor 3 each reflected. In an alternative embodiment eliminates the divider mirror 17 and the receiver 18 comprehensive assembly 19 and the splitter mirror 16 is designed as a non-color-selective divider, so that of the measured object 9 reflected measuring radiation on the camera 2 falls, which is used to evaluate the measurement radiation.

The second distance sensor 4 is exemplified as a chromatic distance sensor. A light source 20 In a first embodiment, a punctiform light source, preferably the exit end of an optical waveguide fiber, preferably provided with an additional lens. The light source 20 However, according to an alternative embodiment, also consist of a plurality of individual optical lighting elements whose light is transmitted, for example, means optical conductor. By means of a semipermeable divider 21 the reflection of the measuring radiation takes place again in the image processing beam path of the image processing sensor. After reflection on the test object 9 The measuring radiation according to a first embodiment of the invention proceeds by means of the divider 21 back in the direction of the second distance sensor and is at a deflection mirror 22 to an evaluation unit 23 diverted. This is designed, for example, as a spectrometer and determines the wavelength with the highest intensity present. For this first embodiment, the light source is 20 as a single light source, and the chromatic sensor is a single point distance sensor. In an alternative embodiment, the measurement radiation reflected by the measurement object passes through the divider 21 through and out of the camera 2 evaluated. Is the distance sensor 4 In this case, a single-point sensor, so must in the beam path along the optical axis 10 an additional shutter, not shown, a so-called confocal shutter, can be used in an intermediate image plane. When a plurality of optical conductors are used for the illumination, the chromatic distance sensor operates as a multipoint sensor and in the optical path along the optical axis 10 To realize a multiplicity of optical conductors for achieving a confocal effect for each measuring point or each individual optical conductor. The spectrometer 23 then disappears. The light of a light source 25 the brightfield lighting 5 is by means of a semi-permeable divider 26 faded into the image processing beam path. By arranging the grid or pattern 27 In the case of bright field illumination, a pattern projection is additionally preferably carried out.

Alternatively to in the 1 illustrated reflection of the bright field illumination 5 between the divider 21 and the lens 11a , the reflection of the bright field illumination 5 also between the lens 11b and the lens 13 respectively. This will ensure that the pattern 27 only at a working distance of the zoom optics 6 sharp on the workpiece 9 is shown. The pattern 27 can therefore be fixed in the beam path of the bright field illumination 5 remain integrated, as it in the further working distances of the zoom optics 6 out of focus on the workpiece 9 imaged, making measurements with the image processing sensor 2 are possible without interference.

In addition, a dark field incident light illumination 28 provided, which with the combined sensor system 1 connected is. It consists of several light rings, exemplified by three light rings 29a . 29b . 29c each containing a plurality of lighting elements such as LEDs or the like. These are at different angles of inclination to the optical axis 10 arranged so that their radiation along the arrows 30a . 30b respectively. 30c on the test object 9 is correctable. The individual rings 29a . 29b . 29c are exemplarily individually switchable, so that their radiation the measured object in each case by the zoom optics 6 specified working distance meets or the optical axis intersects in this position.

The order of the elements 3 - 6 along the optical axis 10 is shown only by way of example and may vary according to the invention.

The 2 shows an alternative arrangement of the device according to the invention, wherein at the combined sensor system by means of the changeover interface 7 a conversion lens 31 is attached. This is used, for example, to optimize the optics for the imaging of the first or second distance sensor, for example to set the working distance or the magnification. Alternatively, the conversion lens is used 31 for adjusting the working distance or the magnification for the measurement with the image processing sensor.

In 3 a further alternative arrangement of the device according to the invention is shown, wherein the combined sensor system 1 by means of the change interface 7 a tactile-optical probe 32 is arranged on the object side. The tactile probe 32 consists of a probing element 34 , preferably a ball, which on a shaft, for example, flexurally elastic shaft such as fiber 33 is attached, which in turn by means of a preferably flexible attachment 35 , which can be penetrated by the optical beam path, preferably by outbreaks or transparent design, and by means of the changeover interface 7 with the combined sensor system 1 connected is. At the top of the shaft 33 there is a reflector 36 such as mirrors or semitransparent mirrors. This serves to reflect the measuring beam 37 one of the distance sensors, which is along the optical axis 10 runs. Without the in 2 illustrated auxiliary lens 31 becomes the measuring radiation 37 here on the reflector 36 focused. In this case, a relatively short working distance is preferably present. This will be accordingly 2 by means of the auxiliary lens 31 For example, zoomed in to the in 2 shown measurement object 9 to measure directly. In 3 On the other hand, the measurement of the measurement object takes place by means of the detection of the deflection of the detection element 34 , This is preferably carried out brightly, the illumination by the semitransparent reflector 36 through, for example by means of the epi-illumination unit 5 represented in 1 , The reflector is designed for this purpose as a wavelength-selective divider and the wavelength of the measuring radiation 37 The distance sensor used differs from the wavelength of the bright field illumination 5 , The detection of the deflection of the sensing element 34 along the optical axis 10 takes place by means of the one or second distance sensor, the deflection perpendicular to the optical axis 10 is determined by means of the image processing sensor whose measuring radiation 38 this accordingly on the probing element 34 is focused. As an alternative to the tactile-optical probe, a rigid stylus probe is used, which also has a reflector on the back 36 for determining the displacement along the optical axis 10 having. This probing element can also at the change interface 7 be attached.

Alternatively to in the 3 shown construction, the shaft 33 not flexural elastic, but firm, so stiff, be executed. An unillustrated suspension of the shaft 33 between the probing element or probing element 34 and the reflector 36 , in this case as a brand 36 To designate, for example, designed as a movable in two degrees of freedom pivoting, ensures that when deflection of the probe 34 perpendicular to the direction of the optical axis 10 a correspondingly translated deflection of the brand 36 he follows. The suspension can also in the form of the holder shown 35 extended also to a deflection in the direction of the optical axis 10 to enable. Capturing the deflection of the brand 36 in the direction of the optical axis 10 done by the measuring beam 37 , one of the distance sensors. The deflection perpendicular to the optical axis 10 takes place by means of the measuring radiation 38 , So the image processing sensor, which differs from the representation in the 3 not on the touch element 34 but on the brand 36 is focused. On the mark 36 For this purpose, a pattern, which can be detected by means of image processing, is applied on the sensor side, such as a pattern, the deflection of which is detected by the image processing sensor.

In 4 a further alternative arrangement of the device according to the invention is shown, wherein the combined sensor system 1 again by means of the changeover interface 7 a tactile-optical probe 32a is arranged on the object side. It is different from the one in the 3 shown tactile-optical probing element 32 in that a reflector 36 is not needed because the deflection or position of the Antastformelementes 34 along the optical axis 10 is determined directly with an interferometric sensor. The additional components are the coherent light source 39 , For example, a laser diode 39a , optionally with a superior lens 39b , and a plurality of partially transparent deflection mirrors or beam splitters 40 to 42 and the deflection mirror 43 , In addition, the interferometric sensor uses the optics of the invention 6 and the receiver 2 , The light of the coherent light source 39 is at the beam splitter 40 into the measuring light arm 44 and the reference light arm 45 divided up. The measuring light is transmitted through the beam splitter 41 in the beam path of the combined sensor system and along the optical axis 10 in the fiber 33 coupled. For this purpose, preferably a focusing by means of the lens 42 , Then the measuring light comes on 46 from the sensing element 34 , which is preferably pronounced as a spherical thickening, and out through the lens 13 the optics 6 recorded and in the direction of the recipient 2 directed. The reference light 45 is through the deflection mirror 43 and the beam splitter 42 as well on the receiver 2 conducts and interferes with the measuring light 46 , causing a speckle pattern on the receiver 2 arises. The manifestation of the speckle pattern is influenced by the path difference between measuring light and reference light, ie the position or deflection of the sensing element 34 , From the expression of the speckle pattern is therefore in contact with the workpiece 9 the coordinate of the surface measuring point in the direction of the optical axis 10 certainly. In addition, it is provided, also perpendicular to the optical axis 10 present position of the sensing element and thus to determine the corresponding two further coordinates of the surface measuring point. For this purpose, the position of the speckle pattern is evaluated in the receiver plane.

5 shows an alternative arrangement of the device according to the invention with a distance sensor according to the confocal principle. For this purpose, the light of the light source 25 over the semipermeable divider 26 along the optical axis 10 additionally by one in the direction of the arrow 48 Aperture grid introduced into the beam path in an intermediate image plane 47 on the workpiece 9 directed. The aperture grille 47 consists of a plurality of spaced apertures 49 , and extends two-dimensionally in the plane perpendicular to the optical axis 10 , After reflection on the workpiece 9 the light of the light source passes 25 again through the aperture grille 47 This acts as a confocal shutter, which attenuates the light from the unfocused measuring points of the workpiece. This after passing through the aperture grille 47 Light reflected on the receiver is examined separately for each measuring point, as indicated by the distance between the apertures 49 to separate areas of the recipient 2 is shown. For each area, ie measuring point, for example, the contrast or the intensity can be determined in a central area of a few pixels in diameter. In a first embodiment, according to the known focus variation method, the distance between the combined sensor system 1 and the workpiece 9 varies while taking several pictures with the receiver 2 added. For each measuring point, a focus curve is determined from the available contrast or intensity values of the individual regions and the location of the maximum value as the measuring point coordinate in the direction of the optical axis 10 determined. A second embodiment provides that the evaluation takes place chromatically. In the chromatic confocal principle, only one image at a given distance between the sensor 1 and workpiece 9 added. This is done as a light source 25 a white light source is used, which emits light of different wavelengths, and at the interface 7 a chromatic lens or lens assembly according to the in 2 illustrated lens 31 arranged. The chromatic lens or lens arrangement is characterized by particularly pronounced chromatic aberrations, ie by different wavelengths at different distances along the optical axis 10 be focused. For each measuring point, therefore, there exists a dominant wavelength, namely the wavelength for which the respective measuring point lies in the focal plane, after passing through the diaphragm grating, which is a measure of the distance of the respective measuring point to the sensor 1 and thus for the coordinate of the surface measuring point in the direction of the optical axis 10 is. To determine the respective wavelength is per area of the receiver 2 the wavelength with the strongest intensity determined by the receiver 2 is designed as a color camera and from the color channels of the color camera, the dominant color and thus wavelength is determined.

In the 6 an alternative arrangement of the device according to the invention is shown with a light field camera, for which among other things the receiver 2 and the optics 6 of the combined sensor system 1 is used. To simultaneously receive information from multiple focal planes of a scene, without causing a movement between sensor 1 and workpiece 9 must be made, the arrangement of a light field camera characterized by the fact that a microlens array 50 in the optical path of the optics 6 is arranged and thereby the image of the scene or a workpiece 9 to a receiver 2 affected. The invention therefore provides a microlens array 50 in the case in the beam path of the sensor 1 to introduce that according to the principle of a light field camera for a variety of surface points of the object to be measured 9 three-dimensional coordinates are to be determined. The microlens array is preferred 50 if necessary directly in front of the receiver 2 of the image sensor at the position 50a , So between the image side outer lens of the optics 6 and the receiver 2 , by shifting in the direction of the arrow 48 arranged. Alternatively, the arrangement of the microlens array takes place 50 at the point 50b by attachment to the interface 7 , ie between the workpiece 9 and on the object side outer lens of the optics 1 ,

The combined sensor system 1 is in the 2 to 6 each shown only indicated. The order of the elements 3 - 6 along the optical axis 10 is shown again only as an example.

7 shows the combined sensor system consisting of image processing sensor 2 with optical axis 10 , the sliding lens groups 11a and 11b as well as the front lens 13 , and the at least partially integrated photogrammetry sensor. The photogrammetry sensor consists of the illumination 51 which the illumination source 52 and the pattern 53 contains that over the divider 54 in the beam path of the combined sensor system along the optical axis 10 mirrored and by means of sliding lenses or lens groups 11a and 11b and the front lens 13 on the object 9 is projected. The corresponding to the axes 10c and 10d the surface of the workpiece 9 obliquely observing observation beam paths 55 and 56 consist of the deflecting mirrors 63 respectively. 64 , the sliding lenses or lens groups 59 and 60 respectively. 61 and 62 and the respective recipients 57 and 58 , The sliding lenses or lens groups 59 and 60 respectively. 61 and 62 are with the help of fasteners 65 together with the sliding lenses or lens groups 11a and 11b along the direction of the arrows 12 displaceable. The observation beam paths 55 and 56 extend in the region of the displaceable lenses or lens groups ( 59 . 60 respectively. 61 . 62 ) So along the axes 10a respectively. 10b and thus parallel to the optical axis 10 , By common displacement of the displaceable lenses or lens groups 11a . 59 and 61 respectively. 11b . 60 and 62 becomes for the illumination beam path 51 and the observation beam paths 55 and 56 realized a common magnification or a common working distance, whereby a measurement at different optical imaging scales and / or different working distances is made possible with the photogrammetry sensor, wherein parallel or successively also a measurement with the image processing sensor 2 or further sensors integrated in the combined sensor system is possible.

8th shows an alternative embodiment of the observation beam paths 55 and 56 for a photogrammetry sensor. The observation beam paths 55 and 56 are according to their axes 10e and 10f already with respect to the optical axis 10 of the illumination beam path 51 arranged inclined and contain separate front lenses 13a and 13b which as well as the displaceable lenses or lens groups 59 . 60 . 61 and 62 as well as the recipients 57 and 58 are arranged inclined. The sliding lenses or lens groups 59 and 60 are each with separate motor drives in the direction of the arrows 12a or the lens groups 61 and 62 in the direction of the arrows 12b each shifted independently of each other, by means of the displacement of the displaceable lenses or lens groups 11a and 11b Illumination changed in magnification and, where appropriate, working distance 51 to grasp sharply.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 10251412 [0002]
• EP 1071922 [0003]
• DE 102013105102 [0004]
• EP 1373827 [0005]
• EP 0988505 [0006]
• EP 1528354 [0006]
• DE 102010060833 [0006]
• EP 05819689 [0006]
• EP 1299691 [0006]
• EP 1407224 [0006]

Claims (60)

 Method for measuring the geometry of workpieces by means of a combined sensor system, at least consisting of an image processing sensor and associated optical system, wherein, in addition to the image processing sensor, one or more of the sensors: First distance sensor according to the Foucault principle, Second distance sensor according to the chromatic principle and / or confocal principle or chromatic confocal principle or interferometric principle, - tactile-optical fiber probe, - light field camera - photogrammetry sensor, is integrated in the sensor system and be used for the determination of surface points and / or contours on the measurement object and wherein at least partially a common beam path is used for all integrated in the sensor system sensors, preferably the same object-side lens is used, wherein Using the photogrammetry sensor at least for the illumination beam path at least partially the common beam path is used. A method according to claim 1, characterized in that the combined sensor system includes a measuring head, in which: - the image processing sensor and the first distance sensor according to the Foucault principle and the second distance sensor according to the chromatic confocal principle or - the image processing sensor and the first distance sensor after the Foucault principle and the second distance sensor according to the confocal principle or - the image processing sensor and the first distance sensor according to the Foucault principle and the second distance sensor according to the interferometric principle or - the image processing sensor and the first distance sensor according to the Foucault principle and the light field camera or the image processing sensor and the second distance sensor and the light field camera or - the image processing sensor and the first distance sensor according to the Foucault principle and the second distance sensor and the light field camera or - the image processing sensor and the Beleuchtungstra the length of the photogrammetry sensor and preferably the observation beam paths of the photogrammetry sensor are integrated and the sensors of the combined sensor system detect the surface of the workpiece. A method according to claim 1 or 2, characterized in that is detected with at least one of the sensors integrated in the combined sensor, the probing element or a probe of the associated brand of the tactile optical fiber probe. Method according to at least one of the preceding claims, characterized in that a zoom optics is used as the optics, which is integrated in the measuring head of the combined sensor system and is preferably arranged on the object side in the measuring head. Method according to at least one of the preceding claims, characterized in that a bright field illumination and preferably a pattern projection is used for the measurement, which is reflected in the beam path of the combined sensor system. Method according to at least one of the preceding claims, characterized in that the pattern used for the pattern projection in the beam path of the bright field illumination fixed, in particular not automatically interchangeable, is arranged. Method according to at least one of the preceding claims, characterized in that the zoom optics by separately motorically displaceable lenses or lens groups allows independent adjustment of magnification and working distance and is preferably telecentric for at least some of the zoom levels or that as optics telecentric optics with a fixed working distance and fixed magnification is used. Method according to at least one of the preceding claims, characterized in that the pattern is imaged in substantially only one working distance of the zoom optics sharp on the workpiece, preferably measurements of low-contrast workpiece surfaces by autofocus method for measuring individual points or focus variation method for measuring many points on the workpiece surface , preferably using at least the optics and the receiver (camera) of the image processing sensor, and that the mark is blurred in the further working distances of the zoom optics in order to realize measurements with the image processing sensor by the reflection of the bright field illumination, in its beam path the pattern for the pattern projection is fixed, takes place in the beam path of the combined sensor system on the object side to the motor-displaceable lenses or lens groups. Method according to at least one of the preceding claims, characterized in that the zoom lens additionally includes a motor-displaceable lens or lens group, which is arranged on the object side in front of a fixed lens or lens group, wherein the additional lens or lens group is formed, different working distances at the same to adjust the optical magnification. Method according to at least one of the preceding claims, characterized in that images are recorded by means of the camera at different working distances of the zoom optics using the additional separately motor-adjustable lens or lens group of the zoom optics, wherein the same optical magnification is present in the different working distances, and wherein the Integration time of the camera and / or the intensity of a dark field illumination and / or in the various working distances the direction, in particular the inclination of the illumination device, in particular annular dark field illumination device to the optical axis and / or the selected segment of a dark field illumination device on a ring about the optical axis , dark field illumination, and that the images are provided for evaluation by a focus variation method for detecting multiple surface points, or that the images are provided for the determination of an optimized image for the image processing sensor, wherein preferably the distance between the combined sensor system and workpiece is adjusted using the Koordinatengeräteachsen, preferably adjusted so that in each case sharp images. Method according to at least one of the preceding claims, characterized in that a dark field illumination in the form of one or more light rings, preferably each consisting of a plurality of light elements such as LEDs, is used, wherein the light rings surround the optics of the combined sensor system preferably concentric and preferably the light of individual light rings the optical axis at different distances along the optical axis intersect at different angles and preferably each of the light ring is activated, the light intersects the optical axis in each selected working distance of the optics. Method according to at least one of the preceding claims, characterized in that the working distance of the optics for the direct measurement of the surface of the workpiece with the distance sensor used in each case or for the measurement of the deflection of a probing element, preferably probing element of the tactile-optical sensor, by means of the zoom optics or by replacing or replacing a conversion lens, is set. Method according to at least one of the preceding claims, characterized in that a distance sensor is optionally used for the direct measurement of the surface of the workpiece or the measurement of the deflection of a probing element, preferably a stylus, wherein the probing element is interchangeable on the object side before the optics of the combined sensor , preferably by means of a magnetic interface. Method according to at least one of the preceding claims, characterized in that the first or second distance sensor, preferably the distance sensor according to the Foucault principle or the interferometric sensor, for determining the deflection of a probing element, preferably probing element of the tactile-optical sensor, is used the probing element is interchangeably mounted on the object side in front of the optics of the combined sensor, preferably by means of a magnetic interface, and preferably the distance sensor is optionally used for the direct measurement of the surface of the workpiece. Method according to at least one of the preceding claims, characterized in that the interferometric sensor based on the evaluation of speckles, which are recorded by the superimposition of measurement light and reference light from the receiver of the image processing sensor, wherein the light of a coherent light source such as laser diode by means of a beam splitter in a measuring and a reference light path is divided, the measuring light is passed into the probe and is emitted by this and directed by the optics to the receiver and the reference light is passed to the receiver without passing through the probe element, and that from the respective present Speckelmuster the deflection of the probing element in the direction of the optical axis of the optics is determined and preferably the deflection of the probing element in the two directions is determined perpendicular to the optical axis of the optics, wherein preferably a plurality of coherent light sources differ Licher wavelength can be used. Method according to at least one of the preceding claims, characterized in that a sensor according to the chromatic confocal principle is used as a distance sensor, wherein for the determination of measuring points, such as surface points on the workpiece, a confocal image of several, preferably adjacent, areas of the surface of the workpiece a plurality of individual optical conductors, such as optical fibers, preferably image conductors, takes place, wherein the individual Fibers are arranged as Konfokalblende per measurement point. Method according to at least one of the preceding claims, characterized in that a sensor according to the confocal principle is used as a distance sensor, a multiplicity of measuring points being determined in one measurement, the confocal imaging being achieved on the receiver for the multiplicity of measuring points, in that in an intermediate image plane of the optics, a diaphragm grille, consisting of a plurality of preferably circular openings, is temporarily introduced for the measurement, and in several distances between sensor and workpiece images are taken with the receiver from which each measurement point by evaluating a focus criterion, preferably the image sharpness or intensity within the range of the receiver, which is assigned to the respective measuring point, the respective distance between the sensor and the workpiece surface and thus the measuring points are determined. Method according to at least one of the preceding claims, characterized in that a sensor according to the chromatic confocal principle with a white light source is used as a distance sensor, wherein a plurality of measuring points is determined in one measurement, wherein the confocal image on the receiver for the plurality of Measuring points is achieved by a chromatic lens or chromatic lens assembly in the optical path of the optics and in an intermediate image plane of the optics, a diaphragm grid, consisting of a plurality of preferably circular openings, temporarily introduced for the measurement, and in the respective distances between the sensor and Workpiece an image is recorded with the designed as a color camera receiver, from the per measurement point by evaluating the sharpest imaged wavelength of the white light source, preferably the strongest intensity wavelength within the range of the receiver, d it is assigned to the respective measuring point, the respective distance between sensor and workpiece surface and thus the measuring points are determined. Method according to at least one of the preceding claims, characterized in that by means of a light field camera, at least consisting of the optics, the receiver of the image processing sensor and a microlens array, a plurality of surface measuring points is determined in a measurement, wherein the microlens array temporarily for the measurement in the beam path the optics is introduced and an image is recorded with the receiver in each available distances between the sensor and the workpiece, from each measurement point by applying the light field technology, the respective distance between the sensor and the workpiece surface and thus the measurement points are determined. Method according to at least one of the preceding claims, characterized in that the microlens array of the light field camera in the beam path of the optics between the image side outer lens of the optics and the receiver, preferably directly in front of the receiver, or between the workpiece and the object side outer lens of the optics is introduced. Method according to at least one of the preceding claims, characterized in that a consisting of at least microlens array and associated receiver light field camera via an optical splitter in the imaging beam path of the image processing sensor, in particular in the imaging beam path of the zoom lens, in particular between the receiver of the image processing sensor and the separately motor-adjustable lenses or Lens groups of the zoom optics, is reflected. Method according to at least one of the preceding claims, characterized in that detected with the light field camera offset in the imaging direction areas of the workpiece surface and evaluated together by the working distance is changed by the zoom lens, the magnification remains constant or 3D points in a common Reproduced scale, preferably by resampling, or the distance between combined sensor systems and workpiece preferably by means of Koordinatengeräteachsen, is adjusted, each working distance or relative position, the plurality of 3D points are determined by the light field camera and are arranged according to their recording position in a common coordinate measuring system , Method according to at least one of the preceding claims, characterized in that detected by the light field camera a plurality of perpendicular to the imaging direction offset from each other lying areas of the workpiece and the determined 3D points are arranged and evaluated in a common coordinate system by light field camera and workpiece relative to each other by means of Koordinatengeräteachsen be moved. Method according to at least one of the preceding claims, characterized in that images or image sections taken with the light field camera are combined with images or image sections of the same workpiece region recorded with the image processing sensor. Method according to at least one of the preceding claims, characterized in that when the light field is recorded by means of the light field camera, a pattern is projected onto the object surface. Method according to at least one of the preceding claims, characterized in that at an interface, preferably magnetic interface, at the object-side end of the optics of the combined sensor according to the needs of the sensor used, optionally - an auxiliary lens for a distance sensor or the image processing sensor or - a probing element, preferably Tastnadel or sensing element of the tactile-optical sensor or - an angle optics for a distance sensor or the image processing sensor or - a tactile measuring head or - a microlens array for a light field camera - a chromatic lens or chromatic lens assembly for a chromatic confocal distance sensor modular is switched. Method according to at least one of the preceding claims, characterized in that a probing element is used, which has a rigid connection to a mark, wherein the probing element, rigid connection and mark are tiltably mounted to the optical imaging direction, and that for determining the deflection of the probing element, the Deflection of the mark is determined at least with the first or second distance sensor, preferably with the first or second distance sensor and the image processing sensor, preferably wherein by means of the first or second distance sensor, the deflection of the mark in the direction of the imaging direction is detected and additionally with the image processing sensor, the deflection a structure applied to the mark perpendicular to the imaging direction is detected. Method according to at least one of the preceding claims, characterized in that the illumination beam path of the photogrammetry sensor, at least consisting of light source and illuminated by this light source pattern, is reflected in the beam path of the zoom optics by means of optical splitter, the reflection preferably on the image side of the separately motor-displaced lenses or Lens group of the zoom optics, and that the photogrammetry sensor has two receivers, preferably CCD or CMOS cameras, with which the projected on the object pattern is observed from two different directions inclined to the optical axis, wherein the two receivers respectively zugeordenden observation beam paths the object-side Use lens or lens group of the zoom lens or each containing a separate object-side lens or lens group. Method according to at least one of the preceding claims, characterized in that one or more motor-displaceable lenses or lens groups are used in the two observation beam paths, which are displaceable together with the separately motorically displaceable lenses or lens groups of the zoom optics, preferably by each connecting elements between them exist and common motor drives are used. Method according to at least one of the preceding claims, characterized in that in each of the two observation beam paths between the motor-displaceable lenses or lens groups and the object-side lens or lens group, a deflection mirror is arranged, which in each case causes the inclination of the observation beam path to the optical axis. Method according to at least one of the preceding claims, characterized in that separate motor-displaceable lenses or lens groups are arranged in the two illumination beam paths, the two observation beam paths each contain separate object-side lenses or lens groups, wherein the two observation beam paths and the respectively associated receiver inclined to the optical axis to be ordered. Method according to at least one of the preceding claims, characterized in that by adjusting the separately motorically displaceable lenses or lens groups of the zoom optics and shared or separately realized adjusting the motorically displaceable lenses or lens groups of the observation beam paths of the magnification for the observation beam path and for the illumination beam path, and thus the image size of the pattern on the workpiece can be adjusted together. Method according to at least one of the preceding claims, characterized in that the sensor system is operated integrated in a coordinate measuring machine. Method according to at least one of the preceding claims, characterized in that all integrated sensors in the sensor system are aligned on the same or substantially the same area of the workpiece, preferably perpendicular to the optical axis of the optics substantially no offset between the center of the measuring ranges of the integrated sensors is present , Device for measuring the geometry of a workpiece comprising a combined sensor system arranged in a measuring head with an image processing sensor and associated optics, wherein one or more of the following sensors integrated in the sensor system next to the image processing sensor and optionally used for determining surface points and / or contours on the workpiece are: - first distance sensor according to the Foucault principle, - second distance sensor according to the chromatic principle and / or confocal principle or chromatic confocal principle or interferometric principle, - tactile-optical fiber probe, - light field camera, - photogrammetry sensor, wherein for all sensors integrated in the sensor system at least partially a common beam path can be used, preferably the same object-side lens is used, and wherein at least for the illumination beam path at least partially the g. When using the photogrammetry sensor emeinsame beam path is usable. Apparatus according to claim 35, characterized in that means for reflecting a bright field illumination, and preferably a pattern projection, are integrated into the beam path of the combined sensor system. Apparatus according to claim 35 or 36, characterized in that the pattern used for the pattern projection fixed, in particular not automatically interchangeable, is arranged in the beam path of the bright field illumination and preferably the bright field illumination object side to the separately motorically displaceable lenses or lens groups of the zoom optics in the beam path of the combined sensor system is reflected. Device according to at least one of claims 35 to 37, characterized in that the optics is a zoom optics which allows independent adjustment of magnification and working distance by separately movable lenses or lens groups and is preferably telecentric for at least some of the zoom levels or that the optics is a telecentric optics with fixed working distance and fixed magnification. Device according to at least one of claims 35 to 38, characterized in that one or more lenses of one or more lens groups are formed aspherical. Device according to at least one of claims 35 to 39, characterized in that the zoom lens comprises an additional separately motor-displaceable lens or lens group, the object side in front of the fixed lens or lens group ( 13 ) is arranged. Device according to at least one of claims 35 to 40, characterized in that a dark field illumination in the form of one or more light rings, preferably each consisting of several light elements such as LEDs, associated with the combined sensor system, the light rings preferably surround the optics of the combined sensor system concentric and preferably the light of the individual light rings intersect the optical axis at different distances along the optical axis at different angles. Device according to at least one of claims 35 to 41, characterized in that the working distance of the optics for the direct measurement of the surface of the workpiece with the distance sensor used in each case or for the measurement of the deflection of a probing element, preferably probing element of the tactile-optical sensor, by means of Zoom optics or by replacing or replacing a conversion lens, is adjustable. Device according to at least one of claims 35 to 42, characterized in that a probing element is interchangeable on the object side in front of the optics of the combined sensor, preferably by means of a magnetic interface, wherein a distance sensor optionally for the direct measurement of the surface of the workpiece or for the measurement of Deflection of a probing element, preferably Tastnadel, can be used. Device according to at least one of claims 35 to 43, characterized in that the first or second distance sensor, preferably the distance sensor according to the Foucault principle or the interferometric sensor, for determining the deflection of a probing element, preferably probing element of the tactile-optical sensor, can be used wherein the probing element is interchangeably mounted on the object side in front of the optics of the combined sensor, preferably by means of a magnetic interface, and preferably the distance sensor is optionally usable for the direct measurement of the surface of the workpiece. Device according to at least one of claims 35 to 44, characterized in that the interferometric sensor at least consists of the receiver of the image processing sensor, one or more coherent light sources such as laser diodes, a beam splitter for dividing the light of the light source into a measuring and a reference light path, whereby the measuring light can be conducted into the probing element and can be emitted by the latter and can be conducted to the receiver by means of the optics and the Reference light can be passed to the receiver without passing through the probing element. Device according to at least one of claims 35 to 47, characterized in that a distance sensor according to the chromatic confocal principle, a plurality of individual optical conductors, such as optical fibers, preferably image guide, as Konfokalblende for a plurality of measuring points to be measured, such as surface points on the workpiece assigned. Device according to at least one of claims 35 to 46, characterized in that a distance sensor is a sensor according to the confocal principle, wherein a plurality of measuring points can be determined as far as possible simultaneously, wherein the confocal imaging on the receiver for the plurality of measuring points takes place by an intermediate image plane of the optics, a diaphragm grille, consisting of a plurality of preferably circular openings, temporarily for the measurement can be introduced, and in several distances between sensor and workpiece images are receivable with the receiver from which each measurement point by evaluating a focus criterion, preferably the image sharpness or intensity within the range of the receiver, which is assigned to the respective measuring point, the respective distance between sensor and workpiece surface and thus the measuring points can be determined. Device according to at least one of claims 35 to 47, characterized in that as a distance sensor is a sensor according to the chromatic confocal principle with a white light source, wherein a plurality of measuring points can be determined largely simultaneously, wherein the confocal image on the receiver for the plurality of Measuring points is achieved by a chromatic lens or chromatic lens assembly in the optical path of the optics and in an intermediate image plane of the optics, a diaphragm grid, consisting of a plurality of preferably circular openings, temporarily introduced for the measurement, and in the respective present distance between the sensor and Workpiece an image can be received with the configured as a color camera receiver, from the per measurement point by evaluating the sharpest imaged wavelength of the white light source, preferably the strongest intensity wavelength within the range of the receiver, the j Meanwhile measuring point is assigned, the distance between the sensor and the workpiece surface and thus the measuring points can be determined. Device according to at least one of claims 35 to 48, characterized in that a light field camera, at least consisting of the optics, the receiver of the image processing sensor and a microlens array is used to determine a plurality of surface measuring points as far as possible simultaneously, the microlens array temporarily for the measurement in the beam path of the optics can be introduced and in each available distances between the sensor and the workpiece an image with the receiver is receivable from each measurement point by applying the light field technology of the respective distance between the sensor and the workpiece surface and thus the measuring points can be determined. Device according to at least one of claims 35 to 49, characterized in that consisting of at least microlens array and associated receiver light field camera via an optical splitter in the imaging beam path of the image processing sensor, in particular in the imaging beam path of the zoom lens, in particular between the receiver of the image processing sensor and the separately motorized adjustable Lenses or lens groups of the zoom optics einspiegelbar. Device according to at least one of claims 35 to 50, characterized in that the microlens array of the light field camera in the beam path of the optics between the image side outer lens of the optics and the receiver, preferably directly in front of the receiver, or between the workpiece and the object side outer lens of the optics einbringbar is. Device according to at least one of claims 35 to 51, characterized in that at an interface, preferably magnetic interface, at the object-side end of the optics of the combined sensor according to the needs of the sensor used, optionally - an auxiliary lens for a distance sensor or the image processing sensor or - a probing element , preferably a stylus or probe element of the tactile-optical sensor or - an angle optics for a distance sensor or the image processing sensor or - a tactile measuring head or - a microlens array for a light field camera - a chromatic lens or chromatic lens arrangement for a chromatic confocal distance sensor is modular exchangeable. Device according to at least one of claims 35 to 52, characterized in that a probing element can be used, which has a rigid connection to a mark, wherein probing element, rigid connection and mark are tiltably mounted to the optical imaging direction, and that for determining the deflection of the probing element , the deflection of the brand at least with the first or second distance sensor, preferably with the first or second distance sensor and the image processing sensor, can be determined, preferably wherein the displacement of the mark in the direction of the imaging direction can be detected by means of the first or second distance sensor and additionally with the image processing sensor the deflection of a structure applied to the mark perpendicular to the imaging direction is detected. Device according to at least one of claims 35 to 53, characterized in that the sensor system is integrated in a coordinate measuring machine. Device according to at least one of claims 35 to 54, characterized in that all integrated in the sensor system sensors are aligned on the substantially same area of the workpiece, preferably perpendicular to the optical axis of the optics no offset or substantially no offset between the center of the measuring range of a Sensor is present at the center of the measuring range of the at least one further sensor of the integrated sensors. Device according to at least one of claims 35 to 55, characterized in that the illumination beam path of the photogrammetry sensor, at least consisting of light source and illuminated by this light source pattern, in the beam path of the zoom optics by means of optical divider is einspiegelbar, the reflection preferably on the image side of the separately motor-displaced Lenses or lens group of the zoom optics is carried out, and that the Fotogrammetriesensor has two receivers, preferably CCD or CMOS cameras, with which the projected onto the object pattern of two different directions to the optical axis is observable directions, wherein the two receivers respectively zugeordenden observation beam paths use the object-side lens or lens group of the zoom lens or each contain a separate object-side lens or lens group. Device according to at least one of claims 35 to 56, characterized in that in the two observation beam paths, one or more motor-displaceable lenses or lens groups are included, which are displaceable together with the separately movable motor lenses or lens groups zoom optics, preferably by each connecting elements between them exist and common motor drives are usable. Device according to at least one of claims 35 to 57, characterized in that in each of the two observation beam paths between the motor-displaceable lenses or lens groups and the object-side lens or lens group, a deflection mirror is arranged, which in each case causes the inclination of the observation beam path to the optical axis. Device according to at least one of claims 35 to 58, characterized in that separate motor-displaceable lenses or lens groups are arranged in the two illumination beam paths, the two observation beam paths each contain separate object-side lenses or lens groups, the two observation beam paths and the respectively associated receiver inclined to optical axis are arranged. Device according to at least one of claims 35 to 59, characterized in that by adjusting the separately motorically displaceable lenses or lens groups of the zoom optics and shared or separately realized adjusting the motorically displaceable lenses or lens groups of the observation beam paths of the magnification of the observation beam path and the illumination beam path, and thus the image size of the pattern on the workpiece is adjustable together.

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